TWD198930S - Part of the holding pad for substrate transportation - Google Patents

Abstract

【物品用途】;本設計的物品是在半導體製造裝置中，配置在搬運半導體晶圓之類的基板用的搬運支臂上來使用的保持墊。本物品，係如「使用狀態之參考圖」所示，為配置在搬運支臂的基板保持部，抵接於所搬運的基板之邊緣部而予以吸附保持，當搬運支臂動作時，可防止基板從保持位置偏移或脫落。本物品，係在正面側的圓環狀部具備突起部，並且使圓環狀部的上端至下端距離加大。藉此，本物品，於使用時，能夠減少與吸引保持的基板之接觸面，且加大圓環狀部的內部之空間，可防止本物品蓄積基板的熱能，可抑制搬運支臂或後來所搬運的基板之高溫化。;【設計說明】;圖式所揭露之虛線部分，為本案不主張設計之部分；圖式中一點鏈線所圍繞者，係界定本案所欲主張之範圍，該一點鏈線本身為本案不主張設計之部分。[Use of article]; The article of this design is a holding pad used in semiconductor manufacturing equipment, placed on a transport arm for transporting substrates such as semiconductor wafers. This article, as shown in the "Reference Picture of Used Conditions", is a substrate holding part arranged on the conveyance arm. It is in contact with the edge of the conveyed substrate to adsorb and hold it. When the conveyance arm moves, it can prevent The base plate is displaced or detached from the holding position. In this article, the annular portion attached to the front side is provided with a protruding portion, and the distance from the upper end to the lower end of the annular portion is increased. Thereby, when this article is in use, it can reduce the contact surface with the suction-held substrate, and increase the space inside the annular portion, which can prevent the article from accumulating the heat energy of the substrate, and can inhibit the transportation arm or subsequent transportation. The temperature of the substrate increases. ;[Design explanation];The dotted line part disclosed in the drawing is the part of the design that is not claimed in this case; the one-point chain line in the drawing is surrounded by the scope of the intended claim in this case, and the one-point chain line itself is not claimed in this case part of the design.