TWD186028S - Part of the protective tube for thermocouples - Google Patents

Abstract

【物品用途】;本設計的物品是熱電偶用保護管，為一種設置在半導體製造裝置之反應管的側面，將用來檢測反應管之溫度的熱電偶收納在內部，藉以保護熱電偶遠離熱源的保護管。將熱電偶的裸線穿過設置在保護管內部的複數個圓柱狀空間裡而予以收納其中。用來防止保護管碰觸到反應管的鋁板是被黏著在保護管的表面，在鋁板的上下捲繞著絕緣套，當保護管被加熱，而鋁板自保護管剝離時，鋁板藉著該絕緣套就不會立即掉落下來。;【設計說明】;圖式所揭露之虛線部分，為本案不主張設計之部分；圖式中一點鏈線所圍繞者，係界定本案所欲主張之範圍，該一點鏈線本身為本案不主張設計之部分。[Use of article] The article designed in this design is a protective tube for thermocouples. It is placed on the side of a reaction tube in a semiconductor manufacturing device. The thermocouple used to detect the temperature of the reaction tube is stored inside to protect the thermocouple from the heat source. protective tube. The bare wires of the thermocouple are passed through a plurality of cylindrical spaces provided inside the protective tube and stored therein. The aluminum plate used to prevent the protective tube from touching the reaction tube is adhered to the surface of the protective tube, and an insulating sleeve is wrapped around the upper and lower parts of the aluminum plate. When the protective tube is heated and the aluminum plate peels off from the protective tube, the aluminum plate relies on the insulation. The cover will not fall off immediately. ;[Design explanation];The dotted line part disclosed in the drawing is the part of the design that is not claimed in this case; the one-point chain line in the drawing is surrounded by the scope of the intended claim in this case, and the one-point chain line itself is not claimed in this case part of the design.