TWD184278S - Sponge part for cleaning the substrate - Google Patents

Abstract

【物品用途】;本設計的物品是基板洗淨用海綿，是例如：晶圓等的基板表面洗淨用的海綿。;【設計說明】;如「使用狀態參考圖」所示，在晶圓等的基板洗淨機中，設置在一邊迴轉一邊左右擺動的臂部的前端使用。本物品的底面洗淨面按壓貼於旋轉的晶圓等的基板表面，可對於晶圓等的基板進行表面洗淨。;圖式所揭露之實線部分，為本案主張設計之部分，虛線部分為本案不主張設計之部分。;圖式所揭露之一點鏈線，係界定本案所欲主張之範圍，該一點鏈線本身為本案不主張設計之部分。;後視圖與前視圖對稱，後視圖省略。[Use of article] The article of this design is a sponge for substrate cleaning. It is a sponge for cleaning the surface of substrates such as wafers. ;[Design Description];As shown in the "Usage Reference Picture", in a substrate cleaning machine such as a wafer, it is used at the tip of an arm that swings left and right while rotating. The bottom cleaning surface of this product is pressed against the surface of a rotating wafer or other substrate, and the surface of the wafer or other substrate can be cleaned. ; The solid line part disclosed in the drawing is the part where the design of this case is advocated, and the dotted line part is the part of the case where the design is not advocated. ;The dotted chain line disclosed in the diagram defines the scope of the claim in this case. The dotted chain line itself is a part of the design that is not claimed in this case. ;The rear view is symmetrical to the front view, and the rear view is omitted.