TWD179673S - Sponge part for cleaning the substrate - Google Patents

Sponge part for cleaning the substrate

Info

Publication number
TWD179673S
TWD179673S TW105302200F TW105302200F TWD179673S TW D179673 S TWD179673 S TW D179673S TW 105302200 F TW105302200 F TW 105302200F TW 105302200 F TW105302200 F TW 105302200F TW D179673 S TWD179673 S TW D179673S
Authority
TW
Taiwan
Prior art keywords
substrate
cleaning
view
sponge
substrates
Prior art date
Application number
TW105302200F
Other languages
Chinese (zh)
Inventor
Tomoatsu Ishibashi
Original Assignee
荏原製作所股份有限公司
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 荏原製作所股份有限公司, Ebara Corp filed Critical 荏原製作所股份有限公司
Publication of TWD179673S publication Critical patent/TWD179673S/en

Links

Abstract

【物品用途】;本設計的物品是基板洗淨用海綿,為一種用來洗淨晶圓等之基板表面的海綿,例如:如「使用狀態參考圖」所示,在用來洗淨晶圓等之基板的筆型洗淨機中,配備在邊旋轉邊左右擺動之支臂部的前端來使用。以本物品之底面作為洗淨面,按壓在進行旋轉的晶圓等之基板表面,藉此就能洗淨晶圓等的基板表面。;【設計說明】;後視圖、左側視圖及右側視圖皆與前視圖相同,故省略之。;圖式所揭露之虛線部分,為本案不主張設計之部分。[Usage of the item]; The item of this design is a substrate cleaning sponge, which is a sponge used to clean the surface of substrates such as wafers. For example: as shown in the "Usage Reference Picture", it is used to clean wafers. For use in pen-type cleaning machines for substrates, the front end of the arm is equipped with an arm that swings left and right while rotating. By using the bottom surface of this product as a cleaning surface and pressing it against the surface of a rotating wafer or other substrate, the surface of the wafer or other substrate can be cleaned. ;[Design Description];The rear view, left side view and right side view are all the same as the front view, so they are omitted. ;The dotted line parts disclosed in the diagram are the parts of this case that are not intended to be designed.

TW105302200F 2015-10-28 2016-04-26 Sponge part for cleaning the substrate TWD179673S (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JPD2015-23966F JP1556818S (en) 2015-10-28 2015-10-28

Publications (1)

Publication Number Publication Date
TWD179673S true TWD179673S (en) 2016-11-21

Family

ID=56687386

Family Applications (1)

Application Number Title Priority Date Filing Date
TW105302200F TWD179673S (en) 2015-10-28 2016-04-26 Sponge part for cleaning the substrate

Country Status (3)

Country Link
US (1) USD787143S1 (en)
JP (1) JP1556818S (en)
TW (1) TWD179673S (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD799129S1 (en) * 2015-10-28 2017-10-03 Ebara Corporation Sponge for substrate cleaning
JP1569705S (en) * 2016-04-13 2017-02-20
JP1581087S (en) * 2016-12-16 2017-07-10
USD859767S1 (en) * 2017-07-07 2019-09-10 Inland Diamond Products Company Flexible abrasive pad
USD838422S1 (en) * 2017-12-28 2019-01-15 Jacob Zimmerman Sponge with suction cup
USD874834S1 (en) * 2019-09-08 2020-02-11 Tongcheng Dafuhao Brush Co., Ltd. Detachable electric brush
USD935291S1 (en) * 2019-12-11 2021-11-09 Brad A. English Filter cleaner
USD938120S1 (en) * 2020-08-28 2021-12-07 Guangzhou Yihua Electronic Equipment Co., Ltd. Cleaning device for soldering tips

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Publication number Priority date Publication date Assignee Title
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USD315236S (en) * 1988-12-05 1991-03-05 Kraselsky Maurice A Scrubbing device
JP4091187B2 (en) 1998-12-08 2008-05-28 株式会社荏原製作所 Cleaning tool, substrate cleaning apparatus and substrate cleaning method
USD422792S (en) * 1999-04-13 2000-04-18 Te-Ching Liu Barbecue brush
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USD694081S1 (en) * 2003-05-21 2013-11-26 HTI USA, Inc. Polishing pad
USD498116S1 (en) * 2003-09-22 2004-11-09 Andreas Papanastasiou Can heater
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USD765328S1 (en) * 2014-06-20 2016-08-30 Griot's Garage, Inc. Tire dressing applicator pad

Also Published As

Publication number Publication date
USD787143S1 (en) 2017-05-16
JP1556818S (en) 2016-08-22

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