TWD156030S - Liner for plasma processing apparatus - Google Patents

Abstract

【物品用途】;本創作的物品是電漿處理裝置用內襯材，係構成可利用電漿在基板上進行氧化膜等之成膜和蝕刻之類的處理的電漿處理裝置之處理容器的一部分之電漿處理裝置用內襯材。;【創作特點】;從各視圖觀之，本物品的本體呈圓形中空碗狀體，本體中央為貫通圓孔，該圓孔係由底部向上擴展成兩不同直徑大小之同心圓，使該貫通圓孔內呈現一段差；如使用狀態參考圖所示，該處理容器1具有確認窗8、處理室及排氣室6，在處理容器1內，係設置有用來載置處理基板9的載置台7，該載置台7的周圍係配設有擋板3，本物品之電漿處理裝置用內襯材5係在處理容器1之內壁上，於其他電漿處理裝置用內襯材2、4之下方；具有防止因處理容器1之構成材料所產生的金屬污染之功能。[Application of the article]: The article of this invention is an inner lining material for a plasma processing device, which is an inner lining material for a plasma processing device that constitutes a part of a processing container of a plasma processing device that can perform processes such as film formation and etching of an oxide film on a substrate using plasma. ;【Creative Features】;From each view, the main body of the article is a circular hollow bowl-shaped body, and the center of the main body is a through circular hole, and the circular hole expands from the bottom to the top into two concentric circles of different diameters, so that a step is presented in the through circular hole; as shown in the reference figure of the use state, the processing container 1 has a confirmation window 8, a processing chamber and an exhaust chamber 6, and a mounting table 7 for mounting a processing substrate 9 is provided in the processing container 1, and a baffle 3 is arranged around the mounting table 7. The inner lining material 5 for the plasma processing device of the article is on the inner wall of the processing container 1, and is below other inner lining materials 2 and 4 for the plasma processing device; it has the function of preventing metal contamination caused by the constituent materials of the processing container 1.