591244 玖、發明說明 發明所屬之技術領域 本發明是有關於一種可變色畫素單元，且特別是有關 於一種光干涉式顯示面板之可變色畫素單元。 先前技術 平面顯示器由於具有體積小、重量輕的特性，在可攜 式顯示設備，以及小空間應用的顯示器市場中極具優勢。 現今的平面顯示器除液晶顯示器（Liquid Crystal Display， LCD )、有機電激發光二極體（Organic Electro-Luminescent Display，OLED)和電漿顯示器（Plasma Display Panel， PDP )等等之外，一種利用光干涉式的平面顯示模式已被 提出。 請參見美國USP5835255號專利，該專利揭露了一可 見光的調整元件陣列（Array of Modulation )，可用來作為 平面顯示器之用。請參見第1圖，第1圖係繪示習知調整 元件的剖面示意圖。每一個調整元件100包括兩道牆 (Wall) 102及104，兩道牆102、104間係由支撐物106 所支撐而形成一腔室（Cavity)108。兩道牆102、104間的 距離，也就是腔室108的長度為D。牆102、104其中之 一係為一具有光吸收率可吸收部分可見光的部分穿透部分 反射層，另一則係為一以電壓驅動可以產生形變的反射 1 591244 層。當入射光穿過牆102或i〇4而進入腔室i〇8中時，入 射光所有的可見光頻譜的波長（Wave Length，以；I表示） 中，僅有符合公式Μ的波長（λ 〇可以產生建設性干涉 而輸出。其中iV為自然數。換句話說， 2D=W ( 1. 1) 當腔室108長度D滿足入射光半個波長的整數倍時，則可 鲁 產生建設性干涉而輸出陡峭的光波。此時，觀察者的眼睛 順著入射光入射的方向觀察，可以看到波長為λι的反射 光，因此，對調整元件1〇〇而言係處於，，開，，的狀態。 第2圖係係繪示習知調整元件加上電壓後的剖面示意 圖。請參照第2圖，在電壓的驅動下，牆104因為靜電吸 引力而產生形變，向牆102的方向塌下。此時，兩道牆1〇2、 104間的距離，也就是腔室1〇8的長度並不為零，而是為 d，d可以等於零。此時，公式Μ中的d將以d置換，入 射光所有的可見光頻譜的波長λ中，僅有符合公式ι·ι的 ® 可見光波長（又2 )可以產生建設性干涉，經由牆104的 反射穿透牆102而輸出。牆1〇2對波長為又2的光具有較 高的光吸收，此時，入射光所有的可見光頻譜均被濾除， 對順著入射光入射牆102的方向觀察的觀察者而言，將不 會看到任何可見光頻譜内的反射光，因此，對調整元件100 而言係處於’’關”的狀態。 對單色平面顯示器而言，調整元件1〇〇所組成可以利 2 用電壓操作來控制開關的陣列已足夠，但對於彩色平面顯 示器而言，調整元件1〇〇顯然不夠。習知的作法係製造具 有不同腔室長度的三個調整元件而成為一個晝素，如第3 圖及第4圖所示，第3圖及第4圖係繪示習知利用調整元 件所製造之彩色平面顯示器剖面示意圖。第3圖係緣示習 知複層式彩色平面顯示器剖面示意圖。複層式彩色平面顯 示器200包括了三層調整元件202、204及206。當入射光 208入射時，三層調整元件202、204及206分別會反射一 個波長的色光，例如，紅光、綠光或藍光。三層調整元件 202、204及206之所以能反射出不同波長的色光係利用不 同的腔室長度以及選用不同的反射鏡面。三層重疊調整元 件的方式來製造彩色平面顯示器的方法所得到的解析度差 而且如圖所示，藍光的亮度較紅光的亮度低。 第4圖係繪示習知陣列式彩色平面顯示器剖面示意 圖。在同一基材300上分別形成三個調整元件3〇2、3〇4 及306陣列，當入射光308入射時，三個調整元件3〇2、3〇4 及306不同的腔室長度可分別反射出不同波長的色光，例 如紅光、綠光或藍光。調整元件陣列式的排列除了無須 選用不同的反射鏡面，更重要的是可以提供極佳的解析度 而且各種色光間的亮度均勻，但是，由於腔室長度的不同， 二個調整元件必需要分別製造，例如，製造調整元件3〇2 時需以光阻遮蔽欲形成調整元件3〇4及3〇6的區域，複雜 的製程本身而言成本較高，更嚴重的是由於複雜的製程而 使得良率無法提升。除此之外，製程上的偏差，例如腔室 的長度的偏差會使得反射出來的色光產生 隨）或藍㈣（Blue歸）時，完全Η祕正基材只 能報廢。 因此， 高解析度、 要的課題。 提供-個彩色光干涉式顯示面板能夠同時具有 高亮度、製程“且製程良率高，成為一個重 發明内容 因此本發明的目的就是在提供一種可變色畫素單元， 於製坆彩色光干涉式顯示面板，可以具有高解析度及 南亮度。 本發明的另一目的是在提供一種可變色畫素單元，適 用於製造♦色光干涉式顯示面板，製程簡易而且製程良 高。 本發明的又一目的是在提供一種可變色畫素單元，適 用於製彩色光干涉式顯示面板，可以在後續的製程中修 正可變色畫素單元製程上的偏差。 根據本發明之上述目的，在本發明一較佳實施例中提 出-種調整元件，可以作為一可變色畫素單元，至少包含 一第一電極、一第二電極與一第三電極，其中，三個電極 約成平仃排列且第二電極位於第一電極與第三電極之間。 第一電極係為一半穿透電極，第二電極則係為一可變形之 反射電極。第一電極與第二電極間係由支撐物所支撐而形 591244 成一腔室，腔室的長度為D。 在調整元件為”開”的狀態下，在第一電極與第二電極 •並不施加電壓，當入射光由第一電極一側入射並在藉由在 第一電極與第二電極間的腔室内發生光干涉作用後，入射 光所有的可見光頻譜的波長中，僅有符合公式M的波長 可以產生建設性干涉，經由第二電極的反射穿透第一電極 而輸出。反射光的頻率和腔室的長度有關。第三電極係為 一操作電極’在第三電極上可以施加一第一電壓，由於第 一電極係為一可變形之反射電極，第二電極會受到第三電 極上的電壓的影響，可以是被吸引或被排斥而改變了第一 電極與第二電極間的距離，也就是腔室的長度。由公式 所示，腔室長度的改變可以改變反射光的波長而得到不同 的色光，例如紅光、綠光或藍光。另外如習知所示，在第 一電極與第二電極間加上一第二電壓，在第二電壓的驅動 下可以良形的第二電極因為靜電吸引力而產生形變，向 第一電極的方向塌下，而使調整元件處於，，關，，的狀態，不 反射出任何可見光。 根據本發明之另一目的，在本發明一較佳實施例提供 一陣列式彩色平面顯示器結構。在同—基材上分別形成一 =整疋件陣列，每三個調整元件可以形成-畫素，每-調 元件至夕包含一第一電極、一第二電極與一第三電極， =中’三個電極約成平行排列且第二電極位於第一電極與 第:電極之間。第_電極係為—半穿透電極，第二電極則 I可變形之反射電極。第—電極與第二電極間係由支 5 撐物所支撐而形成一腔室，腔室的長度為D。在三個調整 元，其中兩個或是三個的第三電極上施加不同的電壓，由 =第一電極係為一可變形之反射電極，第二電極會受到第 一電極上的電壓的影響，可以是被吸引或被排斥而改變了 ，一電極與第二電極間的距離，也就是腔室的長度，因此， 二個調整元件中的腔長都不相同。在調整元件為，，開，，的狀591244 (ii) Description of the invention The technical field to which the invention belongs The present invention relates to a variable color pixel unit, and more particularly to a variable color pixel unit of a light interference display panel. Prior art Flat displays, due to their small size and light weight, are extremely advantageous in the display market for portable display devices and small space applications. In addition to liquid crystal displays (LCDs), organic electro-luminescent displays (OLEDs), and plasma display panels (PDPs), the current flat displays use light interference. A flat display mode has been proposed. See U.S. Patent No. 5,835,255, which discloses an array of modulation elements with visible light (Array of Modulation), which can be used as a flat panel display. See Figure 1, shows a schematic cross-sectional view of the conventional view of the first adjusting element system. Each adjusting element 100 includes two walls 102 and 104. The two walls 102 and 104 are supported by a support 106 to form a cavity 108. The distance between the two walls 102, 104, i.e. the length of the chamber 108 is D. One of the walls 102, 104 is a partially reflective layer having a light absorption rate capable of absorbing part of visible light, and the other is a reflective layer 1 591244 which can be deformed by voltage driving. When the incident light passes through the wall 102 or i04 and enters the cavity i08, among all the wavelengths (Wave Length, denoted by I) of the visible light spectrum of the incident light, only the wavelength (λ 0) that conforms to the formula M It can produce constructive interference and output. Where iV is a natural number. In other words, 2D = W (1.1) When the length D of the cavity 108 satisfies an integer multiple of half the wavelength of incident light, constructive interference can be generated. The output of the steep light wave. At this time, when the observer's eyes observe the direction of the incident light, the reflected light with a wavelength of λm can be seen. Therefore, the adjustment element 100 is located at Fig. 2 is a schematic cross-sectional view of a conventional adjusting element after voltage is applied. Please refer to Fig. 2. Under the driving of voltage, the wall 104 is deformed due to electrostatic attraction and collapses in the direction of the wall 102. At this time, the distance between the two walls 102 and 104, that is, the length of the cavity 108 is not zero, but is d, and d can be equal to zero. At this time, d in the formula M will be d Permutation, only the wavelength λ of all visible light spectrums of incident light meets the formula ι · ι® visible light wavelength (again 2) can produce constructive interference and output through wall 102 through the reflection of wall 104. Wall 102 has a higher light absorption for light with wavelength 2 and at this time, All visible light spectrums of incident light are filtered out. For an observer looking in the direction of the incident light incident wall 102, he will not see any reflected light in the visible light spectrum. Therefore, the adjustment element 100 is It is in the "off" state. For a monochrome flat-panel display, an array of adjustment elements 100 can be used to control the switch using voltage operation. However, for a color flat-panel display, the adjustment element 100 is sufficient. Obviously not enough. The conventional method is to make three adjustment elements with different chamber lengths into one day element, as shown in Figs. 3 and 4, and Figs. 3 and 4 show the conventional use of adjustments. A schematic cross-sectional view of a color flat display manufactured by the component. Figure 3 is a schematic cross-sectional view of a conventional multi-layer color flat display. The multi-layer color flat display 200 includes three layers of adjustment elements 202, 204, and 206. When light 208 is incident, the three-layer adjustment elements 202, 204, and 206 respectively reflect colored light of one wavelength, such as red, green, or blue light. The reason why the three-layer adjustment elements 202, 204, and 206 can reflect colored light of different wavelengths The use of different chamber lengths and the use of different reflective mirrors. The method of three layers of overlapping adjustment elements to make a color flat display has poor resolution and as shown in the figure, the brightness of blue light is lower than that of red light. Fig. 4 is a schematic cross-sectional view of a conventional array-type color flat display. Three adjustment elements 302, 300, and 306 are formed on the same substrate 300. When incident light 308 is incident, the three adjustment elements are formed. Different chamber lengths of 302, 304, and 306 can reflect colored light of different wavelengths, such as red, green, or blue light. In addition to the array of adjustment elements, it is not necessary to use different reflective mirrors. It is more important to provide excellent resolution and uniform brightness between various colors. However, due to the difference in chamber length, the two adjustment elements must be manufactured separately. For example, when manufacturing the adjustment element 302, it is necessary to cover the area where the adjustment elements 304 and 306 are to be formed with a photoresist. The complex process itself is more expensive, and more serious is the good process due to the complex process. The rate cannot be improved. In addition, process deviations, such as the deviation of the length of the chamber, will cause the reflected colored light to follow) or blue (Blue return), the complete secret can only be discarded. Therefore, it is a high-resolution and important problem. Provided is a color light interference type display panel which can simultaneously have high brightness, a high process rate and a high process yield rate, which becomes a re-invention. Therefore, the object of the present invention is to provide a variable color pixel unit for manufacturing a color light interference type. The display panel can have high resolution and brightness. Another object of the present invention is to provide a variable-color pixel unit, which is suitable for manufacturing a color-light interference display panel. The manufacturing process is simple and the manufacturing process is high. The purpose is to provide a variable color pixel unit, which is suitable for producing a color light interference display panel, and can correct the deviation of the variable color pixel unit process in the subsequent processes. According to the above object of the present invention, A kind of adjusting element is proposed in the preferred embodiment, which can be used as a variable color pixel unit, which includes at least a first electrode, a second electrode, and a third electrode. Among them, the three electrodes are arranged approximately flat and the second electrode is located at Between the first electrode and the third electrode. The first electrode is a half-penetrating electrode, and the second electrode is a deformable reflection. Electrode. The first electrode and the second electrode are supported by a support and formed into a cavity 591244. The length of the cavity is D. With the adjustment element “on”, the first electrode and the second electrode No voltage is applied. When the incident light is incident from the side of the first electrode and optical interference occurs in the cavity between the first electrode and the second electrode, only the wavelengths of the visible light spectrum of the incident light match. The wavelength of the formula M can produce constructive interference, which is transmitted through the first electrode through the reflection of the second electrode and output. The frequency of the reflected light is related to the length of the chamber. The third electrode is an operating electrode. When a first voltage is applied, because the first electrode is a deformable reflective electrode, the second electrode is affected by the voltage on the third electrode. It can be attracted or repelled to change the first electrode and the second electrode. The distance between them is the length of the cavity. As shown by the formula, changing the length of the cavity can change the wavelength of the reflected light and get different color light, such as red, green or blue light. As shown in the figure, a second voltage is applied between the first electrode and the second electrode, and the second electrode, which can be well-shaped under the driving of the second voltage, is deformed due to electrostatic attraction and collapses in the direction of the first electrode The adjustment element is in the state of, off, and does not reflect any visible light. According to another object of the present invention, in a preferred embodiment of the present invention, an array-type color flat display structure is provided. In the same-substrate A three-element array is formed on the top, and every three adjustment elements can form a pixel. Each adjustment element includes a first electrode, a second electrode, and a third electrode. They are arranged in parallel and the second electrode is located between the first electrode and the first electrode. The first electrode is a semi-transmissive electrode, and the second electrode is a deformable reflective electrode. The first electrode is connected to the second electrode. A support is formed by the support 5 to form a cavity. The length of the cavity is D. Different voltages are applied to the third electrode of two or three adjustment elements, and the = first electrode system is a Deformable reflective electrode, the second electrode will Influenced by the voltage on the first electrode, it can be changed by being attracted or repelled. The distance between one electrode and the second electrode, that is, the length of the chamber, therefore, the length of the cavity in the two adjustment elements is not the same. The adjustment element is like
態下’在第一電極與第二電極並不施加電壓，由公式U 所不，腔室長度的改變可以改變反射光的波長而得到不同 的色光，例如紅光、綠光或藍光。同樣的，如習知所示， 在第電極與第二電極間加上一電壓，在電壓的驅動下， 可以變形的第二電極因為靜電吸引力而產生形變，向第一 電極的方向塌下，而使調整元件處於，，關，，的狀態，不反射 出任何可見光。 根據本發明所揭露的調整元件之陣列所組成的彩色平 面，示器，保留了習知陣列式彩色平面顯示器的優點，具 有南解析度及南免度，同時也具有習知複層式彩色平面顯 不器的優點，製程簡易而且製程良率高。除了具備習知兩 種光干涉式彩色平面顯示器的優點外，更可以利用第三電 極上施加的電壓來微調調整元件内腔室的長度，以修正可 能因製程的誤差而產生的腔室長度的偏差，以提高製程的 良率。由此可知，本發明所揭露的調整元件不只在形成陣 列時同時保持習知光干涉式彩色平面顯示器所有的優點， 高解析度、高亮度、製程簡易及製程良率高之外，更可以 增加製程時的裕度，提高光干涉式彩色平面顯示器的製程 591244 良率。 實施方式 為了讓本發明所提供之可變色畫素單元結構更加清楚 起見，在本發明實施例1中詳細說明每一調整元件之結構。 另外，為使本發明所揭露以調整元件陣列所形成之光干涉 式彩色平面顯示器更加清楚起見，在本發明實施例2中進 一步詳細說明。 實施例1 請參照第5 A圖，第5 A圖係繪示依照本發明第一較 佳實施例的一種調整元件剖面示意圖。一調整元件5〇0， 可以作為一可變色晝素單元，至少包含一第一電極5〇2、 一第二電極504與一第三電極506，其中，三個電極約成 平行排列且第二電極504位於第一電極502與第三電極5〇6 之間。第一電極502及一第二電極504係選自於窄波帶 (Narrowband)鏡面、寬波帶（Broadband)鏡面、非金屬鏡 及金屬鏡或其組合所組成之族群。 第一電極502係為一部分穿透部分反射電極，一般係 由一基材5021、一吸收層5022及一介電層5023所組成。 δ入射光穿過第一電極502時’入射光的部分強度為吸收 層5022所吸收。其中，形成基材5021的材質可以為導電 7 透明材質，例如氧化銦錫玻璃（ITO)或是氧化銦辞玻璃 (ΙΖΟ) ’形成吸收層5022的材質可以為金屬，例如銘、 鉻、銀等等。形成介電層5023的材質可以為氧化矽、氮 化石夕或金屬氧化物。金屬氧化物的部分可以直接氧化部分 吸收層5022而獲得。第二電極5〇4則係為一可變形之反 射電極’在電壓的控制下可以變形而上下移動。一般而言 形成第二電極504的材質可以為介電材質/導電不（半） 透明材質或是金屬材質/導電透明材質。 第一電極502與第二電極504間係由支撐物5〇8所支 撑而形成一腔室510,腔室的長度為D。第二電極5〇4與 第二電極506間也係由支撐物512所支撐。 在凋整元件500為’’開’’的狀態下，在第一電極502與 第二電極504間之腔室510維持D的長度，當入射光514 由第一電極502 —側入射並在藉由在第一電極5〇2與第二 電極504間的腔室51〇内發生光干涉作用後，入射光514 所有的可見光頻譜的波長中，僅有符合公式Μ的波長可 以產生建設性干涉，經由第二電極5〇4的反射穿透第一電 極502而輸出。反射光的頻率和腔室的長度有關。 請參照第5Β圖，第5Β圖係繪示調整元件中第三電極 之功能之剖面示意圖。在第三電極506上可以施加一電壓 Vi ’由於第二電極5〇4係為一可變形之反射電極，第二電 極504會受到第三電極5〇6上的電壓％的影響，可以因 被吸引或被排斥而靠近（位置5〇41)或遠離（位置5042) 第三電極506改變了第一電極502與第二電極504間的距 離’也就是腔室501的長度由D改變成Di* D2而。由公 式1·1所示，腔室501長度的改變可以改變反射光的波長 而得到不同的色光，例如紅光、綠光或藍光。 請繼續參照第5Β圖，如習知所示，在第一電極502 與第二電極504間加上一電壓ν2，在電壓V2的驅動下， 可以變形的第二電極504因為靜電吸引力而產生形變，向 第一電極502的方向塌下（位置5043 )，而使調整元件500 處於”關”的狀態，不反射出任何可見光。 針對光干涉式單色平面顯示器而言，相較習知之下， 利用本實施例所揭露之調整元件作為晝素單元並不會增加 製程的步驟，但若因製程上的偏差而使腔室的長度並非原 先設計的長度或是因製程上的偏差而使鏡面電極的特性偏 離所設計的反射光波長時，可以利用第三電極上施加的電 壓來微調調整元件内腔室的長度，以修正可能因製程的誤 差，以提高製程的良率。 實施例2 請參照第6圖，第6圖係緣示依照本發明第二較佳實 施例的一種調整元件陣列剖面示意圖。一調整元件陣列 600,調整元件陣列600具有三個並列的調整元件6〇2、6〇4 及606，三個調整元件602、604及606可以構成一書素， 其中，每一調整元件可做為一可變色晝素單元。每一調整 元件的結構均與實施例1中所揭露者相同。以—控制電路 591244 608連結到第三電極6023、6043及6063之上，控制電路 608可以各別或同時對第三電極6023、6043及6063施加 相同或不同的電壓，由於第二電極6022、6042及6062係 為一可變形之反射電極，第二電極6022、6042及6062會 受到第三電極6023、6043及6063上的電壓的影響，可以 因被吸引或被排斥而改變了第一電極6021、6041及6061 與第二電極6022、6042及6062間的距離，也就是腔室610 的長度而使調整元件602、604及606具有不同的腔室 6102、6104及6106具有不同的長度屯、d2及d3。在調整 元件602、604及606為’’開”的狀態下，由公式1 · 1所示， 腔室長度d!、（12及d3的設計可以產生不同波長的反射光， 例如紅光、綠光或藍光。 同樣的，如習知所示，以一驅動電路612連結到調整 元件602、604及606之上，驅動電路612可以各別或同 時對在第一電極6021、6041及6061與第二電極6022、6042 及6062間施加一電壓，在電壓的驅動下，可以變形的第 二電極6022、6042及6062因為靜電吸引力而產生形變， 向第一電極6021、6041及6061的方向塌下，而使調整元 件602、604及606分別或同時處於”關”的狀態，而產生 紅光、綠光、藍光、兩兩混合之色光或不反射出任何可見 光。 根據本實施例所揭露的調整元件之陣列所組成的彩色 平面顯示器，保留了習知陣列式彩色平面顯示器的優點， 具有高解析度及高亮度，同時也具有習知複層式彩色平面 10 591244 顯示器的優點，製程簡易而且製程良率高。相較於習知陣 列式彩色平面顯示器而言，本實施例所揭露的調整元件之 陣列中腔室的長度相同，腔室長度的變化係由控制電路所 控制，而非利用的製程來形成不同腔室長度的調整單元， 製程簡易且及製程良率高。相較於習知複層式彩色平面顯 示器而言，本實施例所揭露的調整元件之陣列，所有可用 來產生反射色光的調整元件位於同一平面上，入射光不需 穿透多層的調整元件以反射出不同的色光，因此具有高解 析度及高亮度，而且，習知複層式彩色平面顯示器為使入 射光有效穿過位於前位置的調整元件到達後位置的調整元 件亦及後位置調整元件中光干涉的結果（綠光波長或藍光 波長的反射光）能有效的穿透前位置調整元件，三類型調 整元件的第一電極及第二電極所使用的材質組成及厚度均 需不相同，製程看似單純，但實際上仍是相當的複雜。相 較之下’本發明所揭露的調整元件之陣列的製程的複雜度 並不高於習知的製程。 除了具備習知兩種光干涉式彩色平面顯示器的優點 外’更可以利用第三電極上施加的電壓來微調調整元件内 腔室的長度’以修正可能因製程的誤差而產生的腔室長度 的偏差，以提高製程的良率。 雖然本發明已以一較佳實施例揭露如上，然其並非用 以限定本發明’任何熟習此技藝者，在不脫離本發明之精 神和範圍内’當可作各種之更動與潤飾，因此本發明之保 護範圍當視後附之申請專利範圍所界定者為準。 11 591244 :讓本發明之上述和其他目的、特徵、和優點能更明 顯，下文特舉一較佳實施例，並配合所附圖式，作詳 細說明如下： 八F汗 第1圓係繪示習知調整元件的剖面示意圖； 修 第2圖係係緣示習知調整元件加上電麼後的剖面示 圖； 第3圖係繪示習知複層式彩色平面顯示器剖面 ® 讎 第4圖係緣示習知陣列式彩色平面顯示 ®· 第5Α圖係繪示依照本發明第一較佳實施例的一種調 整元件剖面示意圖； 第5Β圖係纷示調整元件中第三電極之功能之剖面示 · 意圖；以及 一第6圖係繪示依照本發明第二較佳實施例的一種調整 元件陣列剖面示意圖。 凰立標記說明 500、602、604、 100、202、204、206、302、304、306、 12 591244 606 :調整元件 102 、 104 :牆 106、508、512 :支撐物 108、510、6102、6104、6106 :腔室 200 :複層式彩色平面顯示器 300 :陣列式彩色平面顯示器 301、5021 :基材 502、6021、6041、6061 :第一電極 籲 504、6022、6042、6062 :第二電極 5041、5042、5043 :位置 506、6023、6043、6063 :第三電極 5022 :吸收層 5023 :介電層 514 :入射光 600 :調整元件陣列 608 :控制電路 | R :紅光 G :綠光 B :藍光 13In the state ', no voltage is applied to the first electrode and the second electrode. According to the formula U, a change in the length of the chamber can change the wavelength of the reflected light to obtain different color light, such as red light, green light, or blue light. Similarly, as shown in the prior art, a voltage is applied between the first electrode and the second electrode. Under the driving of the voltage, the deformable second electrode is deformed due to electrostatic attraction and collapses in the direction of the first electrode. , And the adjustment element is in the state of, off, and does not reflect any visible light. The color plane and indicator composed of the array of adjustment elements disclosed in the present invention retains the advantages of the conventional array-type color flat display, and has a South resolution and a South immunity, and also has a conventional multi-layer color plane. The advantages of display are simple process and high process yield. In addition to the advantages of the conventional two types of light interference color flat display, the voltage applied to the third electrode can be used to fine-tune the length of the cavity in the component to correct the length of the cavity that may be caused by process errors. Deviation to improve the yield of the process. It can be known that the adjustment element disclosed in the present invention not only maintains all the advantages of the conventional light interference type color flat display while forming the array, but also has high resolution, high brightness, simple process and high process yield, and can increase the process time. Margin to improve the yield of the process of light interference color flat display 591244. Embodiments In order to make the structure of the variable color pixel unit provided by the present invention clearer, the structure of each adjustment element is described in detail in Embodiment 1 of the present invention. In addition, in order to make the light interference type color flat display formed by adjusting the element array disclosed in the present invention clearer, it will be further described in detail in Embodiment 2 of the present invention. Embodiment 1 Please refer to FIG. 5A, which is a schematic cross-sectional view of an adjusting element according to a first preferred embodiment of the present invention. An adjusting element 500 can be used as a variable-color daylight unit, which includes at least a first electrode 502, a second electrode 504, and a third electrode 506, wherein the three electrodes are arranged approximately in parallel and the second The electrode 504 is located between the first electrode 502 and the third electrode 506. The first electrode 502 and a second electrode 504 are selected from the group consisting of a narrow-band mirror surface, a broad-band mirror surface, a non-metallic mirror, a metal mirror, or a combination thereof. The first part of the penetration electrode 502 is partially reflective-based electrode system is generally composed of a substrate 5021, dielectric layer 5022 and layer 5023 composed of an absorber. When δ incident light passes through the first electrode 502, a portion of the intensity of the incident light is absorbed by the absorption layer 5022. The material for forming the substrate 5021 may be a conductive 7 transparent material, such as indium tin oxide glass (ITO) or indium oxide glass (IZO). The material for forming the absorption layer 5022 may be a metal, such as metal, chromium, silver, etc. Wait. The material for forming the dielectric layer 5023 may be silicon oxide, nitrided nitride, or metal oxide. A part of the metal oxide can be obtained by directly oxidizing the part of the absorption layer 5022. The second electrode 504 is a deformable reflective electrode 'which can be deformed and moved up and down under the control of voltage. Generally speaking, the material forming the second electrode 504 can be a dielectric material / conductive (semi-) transparent material or a metal material / conductive transparent material. A cavity 510 is formed between the first electrode 502 and the second electrode 504 by a support 508, and the length of the cavity is D. 5〇4 between the second electrode and the second electrode 506 is also supported by the support system 512. In the state where the conditioning element 500 is `` on '', the length D of the cavity 510 between the first electrode 502 and the second electrode 504 is maintained. When the incident light 514 is incident from the side of the first electrode 502 and is borrowed After the optical interference occurs in the cavity 51 between the first electrode 502 and the second electrode 504, only the wavelengths of the visible light spectrum of the incident light 514 can have constructive interference. The reflection through the second electrode 504 penetrates the first electrode 502 and is output. The frequency of the reflected light is related to the length of the cavity. Please refer to FIG. 5B, which is a schematic cross-sectional view showing the function of the third electrode in the adjusting element. A voltage Vi can be applied to the third electrode 506. Since the second electrode 504 is a deformable reflective electrode, the second electrode 504 will be affected by the voltage% on the third electrode 506. Attracted or repelled to approach (position 5041) or away (position 5042) The third electrode 506 changes the distance between the first electrode 502 and the second electrode 504 ', that is, the length of the chamber 501 is changed from D to Di * D2 instead. As shown in Equation 1.1, changing the length of the cavity 501 can change the wavelength of the reflected light to obtain different color light, such as red light, green light, or blue light. Please continue to refer to FIG. 5B. As shown in the prior art, a voltage ν2 is applied between the first electrode 502 and the second electrode 504. Under the driving of the voltage V2, the deformable second electrode 504 is generated due to electrostatic attraction. Deformed and collapsed in the direction of the first electrode 502 (position 5043), so that the adjustment element 500 is in the "off" state and does not reflect any visible light. For the light interference type monochrome flat-panel display, compared with the conventional method, using the adjusting element disclosed in this embodiment as a daylight unit does not increase the number of steps in the process, but if the deviation in the process makes the chamber's When the length is not the originally designed length or the characteristics of the mirror electrode deviate from the designed reflected light wavelength due to process deviations, the voltage applied to the third electrode can be used to fine-tune the length of the internal cavity of the element to correct the possible To improve the yield of the process due to process errors. Embodiment 2 Please refer to FIG. 6, which is a schematic cross-sectional view of an adjusting element array according to a second preferred embodiment of the present invention. An adjustment element array 600 has three side-by-side adjustment elements 602, 604, and 606. The three adjustment elements 602, 604, and 606 can constitute a book element, where each adjustment element can be made It is a variable color day element. The structure of each adjustment element is the same as that disclosed in the first embodiment. The control circuit 591244 608 is connected to the third electrodes 6023, 6043, and 6063. The control circuit 608 can apply the same or different voltages to the third electrodes 6023, 6043, and 6063 separately or simultaneously. Since the second electrodes 6022, 6042 And 6062 are deformable reflective electrodes. The second electrodes 6022, 6042, and 6062 are affected by the voltage on the third electrodes 6023, 6043, and 6063. The first electrodes 6021 can be changed by being attracted or repelled. The distance between 6041 and 6061 and the second electrode 6022, 6042, and 6062, that is, the length of the cavity 610, so that the adjustment elements 602, 604, and 606 have different cavities. 6102, 6104, and 6106 have different lengths, d2, and d3. When the adjustment elements 602, 604, and 606 are "on", as shown in Formula 1.1, the cavity lengths d !, (12, and d3 are designed to generate reflected light with different wavelengths, such as red light, green Similarly, as shown in the prior art, a driving circuit 612 is connected to the adjusting elements 602, 604, and 606, and the driving circuit 612 can be opposed to the first electrodes 6021, 6041, and 6061 and the first and second electrodes individually or simultaneously. A voltage is applied between the two electrodes 6022, 6042, and 6062. Under the driving of the voltage, the second electrodes 6022, 6042, and 6062, which can be deformed, are deformed due to the electrostatic attractive force, and fall toward the first electrodes 6021, 6041, and 6061. While the adjustment elements 602, 604, and 606 are in the "off" state separately or at the same time, and red light, green light, blue light, and mixed color light are not reflected or any visible light is reflected. The adjustment disclosed in this embodiment The color flat display composed of an array of elements retains the advantages of the conventional array color flat display, with high resolution and high brightness, and also has the advantages of the conventional multi-layer color flat 10 591244 display. Compared with the conventional array-type color flat-panel display, the length of the chamber in the array of the adjusting element disclosed in this embodiment is the same, and the change in the length of the chamber is controlled by the control circuit. Instead of using a manufacturing process to form adjustment units with different chamber lengths, the process is simple and the process yield is high. Compared to the conventional multi-layer color flat display, the array of adjustment elements disclosed in this embodiment, All the adjustment elements that can be used to generate reflected colored light are located on the same plane. The incident light does not need to pass through multiple adjustment elements to reflect different colored light, so it has high resolution and high brightness. Moreover, the multi-layer color flat display is known. In order for the incident light to effectively pass through the adjustment element located at the front position to the adjustment element at the rear position and the result of light interference in the rear position adjustment element (reflected light at the wavelength of green light or blue light), it can effectively penetrate the front position adjustment element The material composition and thickness of the first electrode and the second electrode of the three types of adjustment elements need to be different, and the manufacturing process looks like Pure, but in fact it is still quite complicated. In comparison, the manufacturing process of the array of adjusting elements disclosed in the present invention is not more complicated than the conventional process. In addition to the conventional two types of optical interference color planes The advantage of the display is that the voltage applied to the third electrode can be used to fine-tune the length of the cavity in the element to correct the deviation of the length of the cavity that may be caused by the error of the process, so as to improve the yield of the process. The invention has been disclosed as above with a preferred embodiment, but it is not intended to limit the present invention. 'Any person skilled in the art can make various changes and decorations without departing from the spirit and scope of the present invention. The scope of protection shall be determined by the scope of the appended patent application. 11 591244: To make the above and other objects, features, and advantages of the present invention more obvious, a preferred embodiment is provided below with the accompanying drawings. The detailed description is as follows: The eighth circle of the first circle shows a schematic cross-sectional view of a conventional adjustment element; the second diagram shows the cross-section of the conventional adjustment element after adding electric power. Figure 3 shows a section of a conventional multi-layer color flat display ® 雠 Figure 4 shows a conventional array-type color flat display ® Figure 5A shows a type according to the first preferred embodiment of the present invention Sectional schematic diagram of the adjusting element; FIG. 5B is a schematic cross-sectional view illustrating the function of the third electrode in the adjusting element; and FIG. 6 is a schematic cross-sectional diagram of an adjusting element array according to the second preferred embodiment of the present invention. Description of Phoenix mark 500, 602, 604, 100, 202, 204, 206, 302, 304, 306, 12 591244 606: Adjusting element 102, 104: Wall 106, 508, 512: Support 108, 510, 6102, 6104 6106: Chamber 200: Multi-layer color flat display 300: Array color flat display 301, 5021: Substrates 502, 6021, 6041, 6061: First electrode 504, 6022, 6042, 6062: Second electrode 5041 , 5042, 5043: positions 506, 6023, 6043, 6063: third electrode 5022: absorption layer 5023: dielectric layer 514: incident light 600: adjustment element array 608: control circuit | R: red light G: green light B: Blu-ray 13