JP2004272204A - Collar changeable pixel - Google Patents

Collar changeable pixel Download PDF

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JP2004272204A
JP2004272204A JP2003340544A JP2003340544A JP2004272204A JP 2004272204 A JP2004272204 A JP 2004272204A JP 2003340544 A JP2003340544 A JP 2003340544A JP 2003340544 A JP2003340544 A JP 2003340544A JP 2004272204 A JP2004272204 A JP 2004272204A
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plate
color variable
modulator
variable pixel
color
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Wen-Jian Lin
リン ウェンジァン
Hsiung-Kuang Tsai
ツァイ シゥンクァン
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Prime View International Co Ltd
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • C03C17/3417—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials all coatings being oxide coatings
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • C03C17/3429—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
    • C03C17/3435—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising a nitride, oxynitride, boronitride or carbonitride

Abstract

<P>PROBLEM TO BE SOLVED: To provide a color changeable pixel which is easy to manufacture and has good performance. <P>SOLUTION: The color changeable pixel has a 1st plate, a 2nd plate, and a 3rd plate. The three plates are provided in parallel. The 2nd plate is a reflective plate which can deform. An incident light beam from one side of the 1st plate is modulated and only a light beam of specified frequency is reflected by the 2nd plate. The frequency of the reflected light beam is related to the distance between the 1st plate and 2nd plate. The 2nd plate is displaced with a voltage applied to the 3rd plate to vary the distance between the 1st and 2nd plates. Consequently, the frequency of the reflected light beam varies. <P>COPYRIGHT: (C)2004,JPO&NCIPI

Description

本発明は、カラー可変ピクセルに関連する。より詳しく述べると本発明は、光学干渉ディスプレイプレートのカラー可変ピクセルに関連する。   The present invention relates to color variable pixels. More particularly, the present invention relates to a color variable pixel of an optical interference display plate.

軽量で小型サイズであるという性質のため、ディスプレイプレートは、スペースが制約される携帯用ディスプレイの市場で好まれている。現在までのところ、液晶ディスプレイ（ＬＣＤ）と有機エレクトロルミネッセントディスプレイ（ＯＬＥＤ）とプラズマディスプレイパネル（ＰＤＰ）に加えて、光学干渉ディスプレイのモジュールの研究が行われている。   Due to their light weight and small size nature, display plates are preferred in the space-constrained portable display market. To date, research has been conducted on optical interference display modules in addition to liquid crystal displays (LCDs), organic electroluminescent displays (OLEDs), and plasma display panels (PDPs).

米国特許第５８３５２５５号には、ディスプレイプレートに使用できる可視光線のモジュレータアレイが開示されている。図１は、先行技術によるモジュレータの断面を示す。あらゆるモジュレータ１００は、２枚の壁１０２，１０４を有する。これら２枚の壁は支柱１０６によって支持され、こうして空洞１０８が形成される。２枚の壁の間の距離つまり空洞１０８の長さは、Ｄである。吸収因子を持つ壁１０２，１０４の一方は、可視光線を部分的に吸収する半透明な層である。他方は、電圧が印加された時に変形可能な光線反射層である。入射光線が壁１０２または１０４を通過して空洞１０８に到達すると、数式１に対応する波長を持つ可視光線のみが出力される。つまり、 U.S. Pat. No. 5,835,255 discloses a modulator array of visible light that can be used in a display plate. FIG. 1 shows a cross section of a modulator according to the prior art. Every modulator 100 has two walls 102,104. These two walls are supported by columns 106, thus forming a cavity 108. The distance between the two walls, ie, the length of the cavity 108, is D. One of the walls 102, 104 having an absorption factor is a translucent layer that partially absorbs visible light. The other is a light reflecting layer that can be deformed when a voltage is applied. When the incident light beam passes through the wall 102 or 104 and reaches the cavity 108, only visible light having a wavelength corresponding to Equation 1 is output. That is,

２Ｄ＝Ｎλ （１）   2D = Nλ (1)

上式において、Ｎは自然数である。   In the above equation, N is a natural number.

空洞１０８の長さＤが何らかの自然数に波長を掛けた数の半分に等しい時、建設的干渉が発生し、急な光線波形が発せられる。その間に観察者が入射光線の方向を辿ると、波長λ１の反射光線を観察できる。そのため、モジュレータ１００は「開いて」いる。   When the length D of the cavity 108 is equal to half the natural number times the wavelength, constructive interference occurs and a steep ray waveform is emitted. If the observer follows the direction of the incident light during this time, the reflected light having the wavelength λ1 can be observed. Therefore, modulator 100 is "open."

図２は、電圧が印加された後のモジュレータの断面図を示す。図２に見られるように、電圧のため、壁１０４は変形して壁１０２へと降下している。壁１０２と１０４の間の距離つまり空洞１０８の長さは、正確にはゼロではない。これはｄであり、ｄはゼロのこともある。数式１においてＤの代わりにｄを使用すると、数式１を満たす波長つまりλ２を持つ可視光線のみが、建設的干渉を発生させて通過が可能である。波長λ２の光線に対する壁１０２の高い吸収率のため、すべての入射可視光線がフィルタリングされ、そのため入射光線の方向を辿る観察者は、反射可視光線を観察できない。この時モジュレータは「閉じて」いる。   FIG. 2 shows a cross-sectional view of the modulator after a voltage has been applied. As can be seen in FIG. 2, due to the voltage, the wall 104 has deformed and descended to the wall 102. The distance between walls 102 and 104, ie, the length of cavity 108, is not exactly zero. This is d, and d may be zero. When d is used instead of D in Equation 1, only visible light having a wavelength that satisfies Equation 1, that is, λ2, can generate constructive interference and pass through. Due to the high absorption of the wall 102 for light of wavelength λ2, all incident visible light is filtered so that observers following the direction of the incident light cannot see the reflected visible light. At this time, the modulator is "closed."

モジュレータ１００を有するモジュレータのアレイは、単色ディスプレイプレートには充分であるが、カラー平面ディスプレイには充分でない。当該技術で周知の方法は、空洞の長さが異なる３種類のモジュレータを有するピクセルを製造することである。図３と図４は、当該技術で周知のモジュレータを有するカラー平面ディスプレイを示す断面図である。図３は、先行技術による多層カラー平面ディスプレイの断面図を示す。多層カラー平面ディスプレイ２００は、３層つまりモジュレータ２０２，２０４，２０６を有する。入射光線２０８はモジュレータ２０２，２０４，２０６によって反射される。反射光線の波長は異なり、例えば、赤色光線、緑色光線、青色光線となり得る。三つの異なる波長を持つ反射光線が生じる理由は、モジュレータ２０２，２０４，２０６の空洞の長さが異なり、また反射率の異なるミラーが使用されていることである。多層カラー平面ディスプレイの短所の一つは、解像度の低さである。また図３に見られるように、青色光線は赤色光線よりも輝度が低い。   An array of modulators with modulators 100 is sufficient for a monochrome display plate, but not for a color flat panel display. A method well known in the art is to produce a pixel having three types of modulators with different lengths of the cavity. 3 and 4 are cross-sectional views illustrating a color flat panel display having a modulator as is well known in the art. FIG. 3 shows a cross-sectional view of a multilayer color flat panel display according to the prior art. The multilayer color flat display 200 has three layers or modulators 202, 204, 206. Incident light beam 208 is reflected by modulators 202, 204, 206. The wavelengths of the reflected light are different and can be, for example, red light, green light, blue light. The reason that reflected light beams having three different wavelengths occur is that the modulators 202, 204, and 206 have different cavity lengths and use mirrors having different reflectivities. One of the disadvantages of multilayer color flat displays is the low resolution. Also, as seen in FIG. 3, blue light has lower brightness than red light.

図４は、先行技術によるマトリックスカラー平面ディスプレイの断面図を示す。基板３００には、３個のモジュレータつまりモジュレータ３０２，３０４，３０６が形成されている。入射光線３０８は、モジュレータ３０２，３０４，３０６によって反射される。反射光線の波長は異なり、例えば赤色光線、緑色光線、青色光線となる。反射光線が３種類の異なる波長を持つ理由は、モジュレータ３０２，３０４，３０６の空洞の長さが異なることである。反射率の異なるミラーを使用する必要はない。解像度は良好で、各色の光線の輝度は似通っている。しかし３種類の長さの異なる空洞を持つモジュレータは別々に製造される必要があり、例えば、モジュレータ３０２を製作する工程が実行される間、モジュレータ３０４と３０６を製作するための範囲はフォトレジストによって遮蔽される。製造工程は複雑で、歩留りは低い。さらに製造工程中に生じる誤差、例えば空洞長さの誤差は、赤色シフトまたは青色シフトを起こす。失敗は修正不可能で、基板が無駄になる。   FIG. 4 shows a cross-sectional view of a matrix color flat panel display according to the prior art. On the substrate 300, three modulators, that is, modulators 302, 304, and 306 are formed. Incident light beam 308 is reflected by modulators 302, 304, 306. The wavelengths of the reflected light are different, for example, red light, green light, and blue light. The reason that the reflected light has three different wavelengths is that the cavities of the modulators 302, 304 and 306 have different lengths. There is no need to use mirrors with different reflectivity. The resolution is good, and the brightness of the light rays of each color is similar. However, modulators having three different cavities of different lengths need to be manufactured separately, for example, while the process of fabricating modulator 302 is performed, the area for fabricating modulators 304 and 306 is limited by photoresist. Be shielded. The manufacturing process is complicated and the yield is low. In addition, errors that occur during the manufacturing process, such as errors in cavity length, cause a red or blue shift. Failure is uncorrectable and wastes the board.

そのため、解像度と輝度が高くて製造が容易なカラー光学干渉ディスプレイプレートを開発することが重要である。   Therefore, it is important to develop a color optical interference display plate that has high resolution and brightness and is easy to manufacture.

米国特許第５８３５２５５号明細書U.S. Pat. No. 5,835,255

本発明の目的の一つは、多色光学干渉ディスプレイプレートの生産に使用されるカラー可変ピクセルを提供することである。カラー可変ピクセルの解像度と輝度は、高い。   One of the objects of the present invention is to provide a color variable pixel used in the production of multicolor optical interference display plates. The resolution and brightness of the color variable pixels are high.

本発明の第二の目的は、カラー光学干渉ディスプレイプレートの生産に使用されるカラー可変ピクセルを提供することである。製造工程は簡単で、製造の歩留りは高い。   A second object of the present invention is to provide a color variable pixel used in the production of a color optical interference display plate. The manufacturing process is simple and the production yield is high.

本発明の第三の目的は、カラー光学干渉ディスプレイプレートの生産に使用されるカラー可変ピクセルを提供することである。製造工程中に生じた誤差の修正が可能である。   A third object of the present invention is to provide a color variable pixel used in the production of a color optical interference display plate. It is possible to correct errors caused during the manufacturing process.

本発明の目的により、本発明の好適な実施例の一つでは、カラー可変ピクセルとして使用できるモジュレータが提供される。これは、少なくとも第１プレートと第２プレートと第３プレートとを有する。３枚のプレートが平行に取り付けられ、第２プレートは第１および第３プレートの間に設けられる。第１プレートは半透明な電極であり、第２プレートは変形自在な反射性電極である。２枚のプレートは支柱によって支持され、空洞が形成される。空洞の長さはＤである。   For the purposes of the present invention, in one of the preferred embodiments of the present invention, there is provided a modulator that can be used as a color variable pixel. It has at least a first plate, a second plate and a third plate. Three plates are mounted in parallel and a second plate is provided between the first and third plates. The first plate is a translucent electrode, and the second plate is a deformable reflective electrode. The two plates are supported by columns, forming a cavity. The length of the cavity is D.

モジュレータが「開いて」いる時には、第１および第２プレートには電圧は印加されない。第１プレートの片側からの入射光線が変調され、数式１を満たす波長を持つ光線のみに建設的干渉が発生して、この光線は第２プレートに反射されて第１プレートを通過する。反射光線の周波数は、空洞の長さと関係する。第３プレートは動作電極であって、ここに電圧が印加される。第３プレートに電圧が印加されると第２プレートが変位するため、第１および第２プレートの間の距離が変化する、つまり空洞の長さが変化する。数式１に見られるように、反射光線の波長は変化して、赤色光線や緑色光線や青色光線など、色の異なる光線が得られる。さらに、第１および第２プレートの間に第２電圧が印加されると、第２プレートが変形して第１プレートへと降下することが知られている。モジュレータは「閉じて」おり、可視光線は反射されない。   When the modulator is "open", no voltage is applied to the first and second plates. The incident light from one side of the first plate is modulated so that only light having a wavelength that satisfies Equation 1 causes constructive interference, which is reflected by the second plate and passes through the first plate. The frequency of the reflected light is related to the length of the cavity. The third plate is a working electrode, to which a voltage is applied. When a voltage is applied to the third plate, the second plate is displaced, so that the distance between the first and second plates changes, that is, the length of the cavity changes. As can be seen from Equation 1, the wavelength of the reflected light changes, and light of different colors, such as a red light, a green light, and a blue light, is obtained. Further, it is known that when a second voltage is applied between the first and second plates, the second plate is deformed and drops to the first plate. The modulator is "closed" and no visible light is reflected.

本発明の目的によれば、本発明の別の好適な実施例では、モジュレータのアレイを備える多色平面ディスプレイが提供される。モジュレータのアレイは、同じ基板に形成される。３個のモジュレータごとに、一つのピクセルを形成する。ピクセルは、少なくとも第１プレートと第２プレートと第３プレートとを有する。３枚のプレートは平行に取り付けられ、第２プレートは第１および第３プレートの間に設けられる。第１プレートは半透明な電極であり、第２プレートは変形可能な反射性電極である。２枚のプレートは支柱によって支持され、空洞が形成される。空洞の長さはＤである。３個のモジュレータの３枚の第３プレートのうち２枚または３枚に異なる電圧が印加されると、移動可能な第２プレートが変位して、第１および第２プレートの間の距離が変化する、つまり空洞の長さが変化する。そのため、これら３個の空洞の長さは異なる。モジュレータが「開いて」いる時には、第１および第２プレートには電圧は印加されない。数式１によれば、空洞の長さの変化により反射光線の波長が変化する。さらに、第１および第２プレートの間に第２電圧が印加されると、第２プレートが変形して第１プレートへと降下することが知られている。モジュレータは「閉じて」おり、可視光線は反射されない。   According to an object of the present invention, in another preferred embodiment of the present invention, there is provided a multicolor flat display comprising an array of modulators. The array of modulators is formed on the same substrate. One pixel is formed for every three modulators. The pixel has at least a first plate, a second plate, and a third plate. The three plates are mounted in parallel and the second plate is provided between the first and third plates. The first plate is a translucent electrode and the second plate is a deformable reflective electrode. The two plates are supported by columns, forming a cavity. The length of the cavity is D. When different voltages are applied to two or three of the three third plates of the three modulators, the movable second plate is displaced and the distance between the first and second plates changes. That is, the length of the cavity changes. Therefore, these three cavities have different lengths. When the modulator is "open", no voltage is applied to the first and second plates. According to Equation 1, the wavelength of the reflected light beam changes according to the change in the length of the cavity. Further, it is known that when a second voltage is applied between the first and second plates, the second plate is deformed and drops to the first plate. The modulator is "closed" and no visible light is reflected.

本発明で提供されるモジュレータのアレイを備えるカラー平面ディスプレイは、当該技術で周知のマトリックスカラー平面ディスプレイの長所、つまり高い解像度と輝度とを持ち、さらに、当該技術で周知の多層カラー平面ディスプレイの長所、つまり単純な製造工程と高い歩留りを持つ。そのうえ、空洞の長さは第３プレートに印加される電圧に影響されるため、製造工程中に生じる空洞長さの誤差を修正できる。そのため歩留りも高くなる。   The color flat panel display provided with the array of modulators provided by the present invention has the advantages of a matrix color flat panel display known in the art, that is, high resolution and brightness, and further has the advantages of a multi-layer color flat panel display known in the art. In other words, it has a simple manufacturing process and a high yield. In addition, since the length of the cavity is affected by the voltage applied to the third plate, errors in the cavity length that occur during the manufacturing process can be corrected. Therefore, the yield also increases.

上記の概説と以下の詳細な説明は例示的なものであって、請求項に記載された本発明についてさらに説明を加えようとするものであることは、理解できるだろう。   It will be understood that the foregoing general description and the following detailed description are exemplary, and are intended to provide further explanation of the invention as claimed.

カラー可変ピクセルの構造についてさらなる情報を提供することを目的として、本発明のあらゆるモジュレータの構造を説明するため第一実施例が提示される。加えて、モジュレータのアレイを備える光学干渉ディスプレイプレートについてさらなる情報を与えるために、第２実施例が提示される。   In order to provide further information about the structure of the color variable pixel, a first embodiment is presented to illustrate the structure of any modulator of the present invention. In addition, a second embodiment is presented to give more information about an optical interference display plate with an array of modulators.

図５Ａを参照してほしい。図５Ａは、本発明の第一実施例で設けられるモジュレータの断面図を示す。カラー可変ピクセルとして機能するモジュレータ５００は、少なくとも第１プレート５０２と第２プレート５０４と第３プレート５０６とを有する。３枚のプレートは平行に取り付けられ、第２プレート５０４は第１プレート５０２と第３プレート５０６との間に設けられている。第１プレート５０２と第２プレート５０４とは、狭帯域ミラーと広帯域ミラーと非金属ミラーと金属ミラーとこれらの組合せとで構成される群から選択される。   See FIG. 5A. FIG. 5A shows a cross-sectional view of the modulator provided in the first embodiment of the present invention. The modulator 500 functioning as a color variable pixel has at least a first plate 502, a second plate 504, and a third plate 506. The three plates are mounted in parallel, and the second plate 504 is provided between the first plate 502 and the third plate 506. The first plate 502 and the second plate 504 are selected from the group consisting of a narrow band mirror, a wide band mirror, a non-metal mirror, a metal mirror, and a combination thereof.

第１プレート５０２は、導電性基板５０２１と吸収層５０２２と誘電層５０２３とを有する半透明電極である。入射光線電極５０２を通過する入射光線は、吸収層５０２２によって部分的に吸収される。導電性基板５０２１は、ＩＴＯやＩＺＯなど、導電性の透明材料である。吸収層５０２２は、アルミニウムや銀などの金属で製作される。誘電層５０２３は、吸収層５０２２の一部の酸化によって得ることのできる酸化ケイ素または窒化ケイ素または金属酸化物から製作される。第２プレート５０４は、変形可能な反射性電極である。これは、印加される電圧によって変位する。第２プレート５０４は、誘電性材料、導電性の半透明または不透明材料、または金属／導電性透明材料から製作される。   The first plate 502 is a translucent electrode having a conductive substrate 5021, an absorption layer 5022, and a dielectric layer 5023. Incident light passing through the incident light electrode 502 is partially absorbed by the absorbing layer 5022. The conductive substrate 5021 is a conductive transparent material such as ITO or IZO. The absorption layer 5022 is made of a metal such as aluminum or silver. The dielectric layer 5023 is made of silicon oxide or silicon nitride or metal oxide, which can be obtained by oxidizing a part of the absorption layer 5022. The second plate 504 is a deformable reflective electrode. This is displaced by the applied voltage. The second plate 504 is made from a dielectric material, a conductive translucent or opaque material, or a metal / conductive transparent material.

２枚のプレート５０２，５０４は支柱５０８によって支持され、空洞５１０が形成されている。空洞の長さはＤである。第２プレート５０４と第３プレート５０６も、支柱５１２によって支持されている。   The two plates 502 and 504 are supported by columns 508, forming a cavity 510. The length of the cavity is D. The second plate 504 and the third plate 506 are also supported by the columns 512.

モジュレータ５００が「開いて」いる時には、空洞５１０の長さはＤである。第１プレート５０２の片側からの入射光線５１４は、空洞５１０で変調され、数式１を満たす波長を持つ光線のみが第２プレート５０４に反射されて、第１プレート５０２を通過する。反射光線の周波数は、空洞の長さに関係する。   When the modulator 500 is "open", the length of the cavity 510 is D. An incident light beam 514 from one side of the first plate 502 is modulated by the cavity 510, and only a light beam having a wavelength satisfying Equation 1 is reflected by the second plate 504 and passes through the first plate 502. The frequency of the reflected light is related to the length of the cavity.

図５Ｂを参照すると、図５Ｂはモジュレータの第３プレートの断面図である。図５Ｂに見られるように、電圧Ｖ１が第３プレート５０６に印加された時に第２プレート５０４は変位する。第２プレート５０４は、第３プレート５０６に対して近接する（位置５０４１）か、あるいは離間する（位置５０４２）。そのため、第１プレート５０２と第２プレート５０４との距離つまり空洞５０１の長さＤが変化して、空洞の長さはＤからＤ１またはＤ２に変化する。数式１に見られるように、反射光線の波長は、空洞５０１の長さの変化によって変わる。赤色光線、緑色光線、青色光線など、色の異なる光線が得られる。   Referring to FIG. 5B, FIG. 5B is a cross-sectional view of the third plate of the modulator. As seen in FIG. 5B, when a voltage V1 is applied to the third plate 506, the second plate 504 displaces. The second plate 504 is close to the third plate 506 (position 5041) or separated from the third plate 506 (position 5042). Therefore, the distance between the first plate 502 and the second plate 504, that is, the length D of the cavity 501 changes, and the length of the cavity changes from D to D1 or D2. As can be seen from Equation 1, the wavelength of the reflected light changes according to a change in the length of the cavity 501. Light rays of different colors such as red light rays, green light rays, and blue light rays can be obtained.

さらに図５Ｂを参照すると、第１プレート５０２と第２プレート５０４との間に第２電圧Ｖ２が印加されると、第２プレート５０４が変形して第１プレート５０２へと降下する（位置５０４３）ことが図５Ｂから分かる。モジュレータ５００は「閉じて」おり、可視光線は反射されない。   Still referring to FIG. 5B, when a second voltage V2 is applied between the first plate 502 and the second plate 504, the second plate 504 is deformed and descends to the first plate 502 (position 5043). This can be seen from FIG. 5B. Modulator 500 is "closed" and no visible light is reflected.

単色の光学干渉ディスプレイプレートについては、本発明で提供されるモジュレータの使用は、当該技術で周知のモジュレータと比較して製造工程を複雑しない。そのうえ、空洞の長さは第３プレートに印加される電圧に影響されるため、製造工程中に発生する空洞長さの誤差は、修正が可能である。そのため歩留りが向上する。   For monochromatic optical interference display plates, the use of the modulator provided in the present invention does not complicate the manufacturing process compared to modulators known in the art. Moreover, because the length of the cavity is affected by the voltage applied to the third plate, errors in the cavity length that occur during the manufacturing process can be corrected. Therefore, the yield is improved.

図６を参照すると、本発明の第二実施例で設けられるモジュレータのアレイの断面図が図６に図示されている。モジュレータのアレイ６００は、３個のモジュレータ、つまりモジュレータ６０２とモジュレータ６０４とモジュレータ６０６とを有する。どのモジュレータも、カラー可変ピクセルである。モジュレータの構造は実施例１で設けられたものと同じである。第３プレート６０２３，６０４３，６０６３には少なくとも一つの制御回路が接続されている。制御回路は、３枚のプレートすべてに、一緒にまたは別々に取り付けられている。第３プレート６０２３，６０４３，６０６３に加えられる電圧は、同一であるか、または異なっている。第２プレート６０２２，６０４２，６０６２は、移動可能な反射性のプレートなので、第３プレート６０２３，６０４３，６０６３に印加される電圧の影響を受ける。第１プレート６０２１，６０４１，６０６１と第２プレート６０２２，６０４２，６０６２との間の距離、つまり空洞６１０の長さＤは、変化する。そのため、空洞６１０２，６１０４，６１０６、つまりｄ１，ｄ２，ｄ３は異なる。数式１に見られるように、反射光線の波長は、空洞の長さの変化によって変わる。赤色光線、緑色光線、青色光線など、異なる色の光線が得られる。   Referring to FIG. 6, a cross-sectional view of an array of modulators provided in a second embodiment of the present invention is shown in FIG. Modulator array 600 has three modulators, modulator 602, modulator 604, and modulator 606. Each modulator is a color variable pixel. The structure of the modulator is the same as that provided in the first embodiment. At least one control circuit is connected to the third plates 6023, 6043, and 6063. The control circuit is mounted on all three plates together or separately. The voltages applied to the third plates 6023, 6043, 6063 are the same or different. Since the second plates 6022, 6042, and 6062 are movable reflective plates, they are affected by the voltage applied to the third plates 6023, 6043, and 6063. The distance between the first plate 6021, 6041, 6061 and the second plate 6022, 6042, 6062, that is, the length D of the cavity 610 varies. Therefore, the cavities 6102, 6104, and 6106, that is, d1, d2, and d3 are different. As can be seen in Equation 1, the wavelength of the reflected light varies with changes in cavity length. Light of different colors, such as red light, green light, and blue light, can be obtained.

そのうえ、モジュレータ６０２，６０４，６０６に駆動回路が接続されると、第１プレート６０２１，６０４１，６０６１と第２プレート６０２２，６０４２，６０６２との間に、一緒にまたは別々に電圧が加えられることが分かる。第２プレート６０２２，６０４２，６０６２は変形して、第１プレート６０２１，６０４１，６０６１へと降下する。モジュレータ（６０２，６０４，６０６）の全部または一部は「閉じて」いる。可視光線が反射されないか、あるいは色の異なる光線が得られる。   In addition, when a driving circuit is connected to the modulators 602, 604, and 606, a voltage may be applied between the first plate 6021, 6041, 6061 and the second plate 6022, 6042, 6062 together or separately. I understand. The second plates 6022, 6042, 6062 are deformed and descend to the first plates 6021, 6041, 6061. All or some of the modulators (602, 604, 606) are "closed." Either no visible light is reflected or light of a different color is obtained.

本発明で設けられるモジュレータのアレイを備えるカラー平面ディスプレイは、当該技術で周知の先行技術によるマトリックスカラー平面ディスプレイの長所、つまり高い解像度と輝度とを持ち、さらに、当該技術で周知の多層カラー平面ディスプレイの長所、つまり単純な製造工程と高い歩留りを持つ。当該技術で周知のマトリックスカラー平面ディスプレイと比較すると、長さの変化が制御ＩＣによって制御されるので、すべてのモジュレータの空洞長さは同じである。そのため、空洞長さの異なるモジュレータを生産する必要はない。製造工程は単純で、歩留りは高い。当該技術で周知の多層カラー平面ディスプレイと比較して、すべてのモジュレータが同一平面上にあり、そのため入射光線が多層モジュレータを通過する必要がない。解像度と輝度は高い。そのうえ、先行技術による多層カラー平面ディスプレイでは、入射光線に第１モジュレータを通過させ、第２モジュレータによって効果的に反射させるため、３種類のモジュレータの第１プレートと第２プレートの組成と厚さは異なる。実際には、製造工程は予想よりも複雑である。本発明で設けられるモジュレータの製造は、当該技術で周知のモジュレータよりも困難でない。   A color flat panel display comprising an array of modulators provided in the present invention has the advantages of prior art matrix color flat panel displays known in the art, i.e., high resolution and brightness, and furthermore, a multi-layer color flat panel display known in the art. It has the advantages of simple manufacturing process and high yield. Compared to a matrix color flat display known in the art, the cavity length of all modulators is the same since the change in length is controlled by the control IC. Therefore, there is no need to produce modulators with different cavity lengths. The manufacturing process is simple and the yield is high. Compared to multilayer color flat displays known in the art, all modulators are co-planar, so that incident light need not pass through the multilayer modulator. Resolution and brightness are high. Moreover, in prior art multilayer color flat displays, the composition and thickness of the first and second plates of the three types of modulators are such that the incident light passes through the first modulator and is effectively reflected by the second modulator. different. In practice, the manufacturing process is more complicated than expected. The manufacture of modulators provided in the present invention is less difficult than modulators known in the art.

加えて、空洞の長さは、第３プレートに印加される電圧に影響されるため、製造工程中に発生する空洞長さの誤差は修正できる。そのため歩留りが上昇する。   In addition, because the length of the cavity is affected by the voltage applied to the third plate, errors in the cavity length that occur during the manufacturing process can be corrected. Therefore, the yield increases.

本発明の範囲と趣旨を逸脱せずに本発明の構造に様々な変形と変更を加えられることは、当該技術の熟練者には明らかだろう。以上のことから、本発明の変形と変更は、上の請求項とその均等物の範囲に包含されるのであれば、本発明に包含されるものとする。   It will be apparent to those skilled in the art that various modifications and variations can be made in the structure of the present invention without departing from the scope or spirit of the invention. From the foregoing, it is to be understood that modifications and variations of the present invention are included in the present invention if they fall within the scope of the following claims and their equivalents.

添付図面は、本発明をさらに理解するために設けられ、本明細書に組み込まれてその一部を成す。図面は、説明とともに本発明の実施例を例示し、本発明の原理の説明に役立つ。図面において、
先行技術によるモジュレータの断面図である。 電圧が印加された後の先行技術によるモジュレータの断面図である。 当該技術で公知の多層カラー平面ディスプレイを示す断面図である。 先行技術によるマトリックスカラーディスプレイを示す断面図である。 本発明の好適な一実施例によるモジュレータの断面図である。 本発明の好適な一実施例によるモジュレータの第３プレートの断面図である。 本発明の好適な一実施例により、本発明の実施例２に設けられたモジュレータの断面図である。 The accompanying drawings are provided to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification. The drawings, together with the description, illustrate embodiments of the invention and, together with the description, serve to explain the principles of the invention. In the drawing,
1 is a cross-sectional view of a prior art modulator. FIG. 2 is a cross-sectional view of a prior art modulator after a voltage has been applied. 1 is a cross-sectional view showing a multilayer color flat display known in the art. 1 is a sectional view showing a matrix color display according to the prior art. 1 is a cross-sectional view of a modulator according to a preferred embodiment of the present invention. FIG. 4 is a cross-sectional view of a third plate of the modulator according to the preferred embodiment of the present invention. FIG. 7 is a cross-sectional view of a modulator provided in a second embodiment of the present invention according to a preferred embodiment of the present invention.

符号の説明Explanation of reference numerals

５００ モジュレータ
５０２ 第１プレート
５０２１ 導電性基板
５０２２ 吸収層
５０２３ 誘電層
５０４ 第２プレート
５０６ 第３プレート
５０８ 支柱または支持体
５１０ 空洞
Ｄ 空洞の長さ
６００ モジュレータアレイ
６０２ モジュレータ
６０４ モジュレータ
６０６ モジュレータ
６０２１，６０４１，６０６１ 第１プレート
６０２２，６０４２，６０６２ 第２プレート
６０２３，６０４３，６０６３ 第３プレート
６１０２，６１０４，６１０６ 空洞
ｄ１，ｄ２，ｄ３ 空洞の長さ
６０８ 制御回路
６１２ 駆動回路

500 modulator 502 first plate 5021 conductive substrate 5022 absorption layer 5023 dielectric layer 504 second plate 506 third plate 508 post or support 510 cavity D cavity length 600 modulator array 602 modulator 604 modulator 606 modulator 6021, 6041, 6061 First plate 6022, 6042, 6062 Second plate 6023, 6043, 6063 Third plate 6102, 6104, 6106 Cavity d1, d2, d3 Cavity length 608 Control circuit 612 Drive circuit

Claims (13)

第１プレートと、
前記第１プレートと平行に設けられた動作プレートと、
前記第１プレートと前記動作プレートとの間に平行に設けられて該第１プレートとともに空洞を形成する第２プレートであって、該第１プレートの片側からの入射光線が変調され、特定周波数の光線のみが該第２プレートにより反射され、前記第３プレートに加えられた電圧により該第２プレートが変位して該第１プレートと該第２プレートとの間の距離を変化させて、該反射光線の周波数を変化させる、第２プレートと、
を有する、カラー可変ピクセル。 A first plate,
An operating plate provided in parallel with the first plate;
A second plate provided in parallel between the first plate and the operating plate to form a cavity with the first plate, wherein incident light from one side of the first plate is modulated, and Only light rays are reflected by the second plate, and the voltage applied to the third plate displaces the second plate to change the distance between the first plate and the second plate, thereby causing the reflection. A second plate for changing the frequency of the light beam,
, A color variable pixel. 干渉平面ディスプレイを形成するために使用され、前記干渉平面ディスプレイは、
制御回路と、駆動回路と、モジュレータアレイとを備え、
前記モジュレータアレイの全てのピクセルは、前記第１プレートと、前記第２プレートと、前記動作プレートとを有し、
前記制御回路が前記動作プレートに接続されて、特定の波長を持つ光線を反射するために前記モジュレータアレイのモジュレータの空洞の長さを制御し、前記駆動回路が前記第１プレートおよび前記第２プレートに接続されて、該モジュレータのオンまたはオフを制御する請求項１のカラー可変ピクセル。 Used to form an interference plane display, wherein the interference plane display comprises:
A control circuit, a drive circuit, and a modulator array,
All pixels of the modulator array have the first plate, the second plate, and the working plate;
The control circuit is connected to the operating plate to control the length of the modulator cavity of the modulator array to reflect light having a particular wavelength, and the drive circuit controls the first plate and the second plate. 2. The color variable pixel of claim 1, wherein said variable color pixel is connected to and controls on or off of said modulator. 前記第１プレートが少なくとも、基板と、吸収層と、誘電層とを有する、請求項１または２のカラー可変ピクセル。   3. The color variable pixel according to claim 1, wherein the first plate has at least a substrate, an absorbing layer, and a dielectric layer. 前記基板が透明な導電性基板である、請求項３のカラー可変ピクセル。   4. The color variable pixel of claim 3, wherein said substrate is a transparent conductive substrate. 前記誘電層を形成するための材料が、酸化ケイ素または窒化ケイ素または金属酸化物である、請求項３のカラー可変ピクセル。   The color variable pixel according to claim 3, wherein the material for forming the dielectric layer is silicon oxide or silicon nitride or metal oxide. 前記吸収層が金属から製作される、請求項３のカラー可変ピクセル。   4. The color variable pixel of claim 3, wherein said absorbing layer is made of metal. 前記基板がＩＴＯまたはＩＺＯから製作される、請求項３のカラー可変ピクセル。   4. The color variable pixel of claim 3, wherein said substrate is fabricated from ITO or IZO. 前記第１プレートと前記第２プレートとが、狭帯域ミラーと広帯域ミラーと非金属ミラーと金属ミラー及びこれらの組合せとにより構成される群から選択される、請求項３のカラー可変ピクセル。   4. The color tunable pixel of claim 3, wherein the first plate and the second plate are selected from the group consisting of a narrow band mirror, a wide band mirror, a non-metallic mirror, a metal mirror, and combinations thereof. 前記第２プレートが変形可能なプレートである、請求項１または２のカラー可変ピクセル。   3. The color variable pixel according to claim 1, wherein said second plate is a deformable plate. 前記第２プレートが移動可能なプレートである、請求項１または２のカラー可変ピクセル。   3. The color variable pixel according to claim 1, wherein the second plate is a movable plate. 前記第２プレートが少なくとも、不透明材料または半透明材料を含む、請求項１または２のカラー可変ピクセル。   The color variable pixel of claim 1 or 2, wherein said second plate comprises at least an opaque or translucent material. 前記半透明材料が、ＩＴＯとＩＺＯと薄層金属、及びこれらの組合せとにより構成される群から選択される、請求項１１のカラー可変ピクセル。   12. The color variable pixel of claim 11, wherein said translucent material is selected from the group consisting of ITO, IZO, thin metal, and combinations thereof. さらに、前記第１プレートと前記第２プレートとの間、そして該第２プレートと前記動作プレートとの間に配置された複数の支持体を有する、請求項１または２のカラー可変ピクセル。
The color variable pixel according to claim 1, further comprising a plurality of supports disposed between the first plate and the second plate and between the second plate and the working plate.
JP2003340544A 2003-03-05 2003-09-30 Collar changeable pixel Pending JP2004272204A (en)

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