575773 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明説明（1 ) 發明所屬技術領域 本發明係有關一種液晶顯示板之製造裝置，例如液晶 投影機用顯示板等在兩片基板之間除接合劑以外之地方不 散布隔墊（spacer)之液晶顯示板。 詳言之，將上下二片基板精度良好對位，K其精度下 加壓基板壓扁至規定之間隙，並使兩基板間之接合劑硬化 而不藉由隔墊粘合之液晶顯示板之製造裝置。 習知之技術 通常之液晶顯示板，係在基板間塗布接合劑成框狀， 其餘處亦全面散布隔墊，如此僅靠兩基板之加壓使兩者之 間隔易於具規定之間隙。 一方面，尤其是液晶投影機用顯示板，透射之畫像需 經擴大，在使用為畫面之領域内如有隔墊則同時被放大構 成一種妨礙，因此，不能在塗有接合劑位置之內側散布隔 墊。 但是，在此等狀況下，由於薄板及薄膜等可撓性材料 ，將一方基板向固定之另一方基板加壓時，因基板中央部 分無法散布隔墊支持，在加壓時中央部凹入，顯示板中央 部接合成凹面狀態，結果有無法獲得規定間隙之問題。 發明之目的 本發明中申請專利範圍第1項之發明，係為將兩基板 精度良好對位並保持平行狀下確實壓扁至規定空間隙為目 的0 一 4- (請先閲讀背面之注意事項再填寫本頁) 、11 4 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 經濟部智慧財產局員工消費合作社印製 575773 A7 B7 五、發明説明（2 ) 申請專利範圍第2項之發明，係在$ _ ®和』@ ®第1 項之發明目的，追加升降構件不動作而將兩基板以微米（ lfticron)簞位壓扁至規定間隙為目的。 申請專利範圍第3項之發明，係在串請專和圍第1 項或第2項之發明目的，追加防止上下基板因溫度上升而 變形為目的。 申請專利範圍第4項之發明，係在申請專利範圍第1 項、第2項或第3項之發明目的，追加由一部裝置進行上 下基板之定位及壓扁至規定之間隙為目的。 申請專利範圍第5項之發明，係在申請專利範圍第1 項、第2項、第3項或第4項之發明目的，追加升降構件 在調整移動時對其動作遲延及動作能使加壓板無誤差隨動 為目的。 申請專利範圍第6項之發明，係在串請專利範圍第5 項之發明目的，追加在兩基板對位時可撓性材料之加壓吸 着面不致傾斜過大為目的。 解決問題之手段 為達成上逑目的，本發明申請專利範圍第1項之發明 ，經具備加壓板，為分別吸著保持基板之形成平坦加壓吸 著面之由上下一對剛體所成者，及升降構件，為將此等加 壓板之任一方對另一方支持成上下方向之往復移動自如者 ,而於此升降構件由一方之加壓板因可撓性材料之弾性變 形支持成傾斜移動自如為其特徵。 申請專利範圍第2項之發明，係在申請專利範圍第1 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） (請先閱讀背面之注意事項再填寫本頁)575773 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the Invention (1) The invention belongs to a manufacturing device for a liquid crystal display panel, such as a display panel for a liquid crystal projector between two substrates Liquid crystal display panels where spacers are not scattered except for the bonding agent. In detail, the upper and lower substrates are aligned accurately, and the substrate is pressed to a predetermined gap under the accuracy of K, and the bonding agent between the two substrates is hardened without being bonded by a spacer. Manufacturing device. Conventional technology Generally, the liquid crystal display panel is coated with a bonding agent between the substrates to form a frame, and the other parts are also fully spread with spacers. Therefore, the pressure between the two substrates makes it easy to provide a predetermined gap between the two. On the one hand, especially for display panels for liquid crystal projectors, the transmitted image needs to be enlarged. If a spacer is used in the area where it is used as a screen, it will be enlarged at the same time, which will hinder it. Therefore, it cannot be spread on the inner side where the adhesive is applied. Septa. However, under these conditions, due to flexible materials such as thin plates and films, when one substrate is pressurized to the other fixed substrate, the septum support cannot be spread in the central part of the substrate, and the central part is recessed during pressurization. The central part of the display panel is connected to a concave state, and as a result, a predetermined gap cannot be obtained. Purpose of the invention The invention in the scope of patent application No. 1 in the present invention is for the purpose of accurately aligning the two substrates and keeping them in a parallel state, and flattening them to a predetermined gap. 0 1 4- (Please read the precautions on the back first (Fill in this page again), 11 4 This paper size is in accordance with Chinese National Standard (CNS) A4 (210X297 mm) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 557773 A7 B7 V. Description of the invention (2) The scope of patent application The invention of item is for the purpose of the invention of $ _ ® and "@ ® item 1". The purpose of the additional lifting member is to prevent the two substrates from being flattened to a predetermined gap with a micron (lfticron) position without moving. The invention in item 3 of the scope of patent application is for the purpose of invention of item 1 or item 2 in the patent application, and the purpose of preventing deformation of the upper and lower substrates due to temperature rise is added. The invention in the fourth scope of the patent application is for the purpose of the invention in the first, the second or the third scope of the patent scope, and an additional device is used for positioning and flattening the upper and lower substrates to a predetermined gap. The invention in the fifth scope of the patent application is for the purpose of the invention in the first, the second, the third, or the fourth scope of the patent application. The addition of the lifting member when the movement of the lifting member is adjusted and the movement can be pressurized The board has no error following for the purpose. The invention in the sixth scope of the patent application is for the purpose of the invention in the fifth scope of the patent application, and the purpose of adding the pressure-absorbing surface of the flexible material when the two substrates are aligned is not to tilt too much. Means to solve the problem In order to achieve the above objective, the invention in the first patent application scope of the present invention is provided with a pressure plate, which is formed by a pair of upper and lower rigid bodies for holding and holding the substrate to form a flat pressure suction surface. , And the lifting member, in order to support any one of these pressure plates to the other side to move up and down in a reciprocating direction, and here the lifting member is supported by one of the pressure plates due to the flexible deformation of the flexible material Free movement is its feature. The invention of item 2 in the scope of patent application is the first paper in the scope of patent application. The paper size applies to the Chinese National Standard (CNS) A4 specification (210X 297 mm) (Please read the precautions on the back before filling this page)
575773 A7 _____B7_ 五、發明說明（3 ) 項之發明之構成，追加在前逑升降構件與可撓性材料之間 區劃形成閉空間，由此閉空間之內壓上升將一方之加壓板 向另方之加壓板上下動作使可撓性材料彈性變化之構成為 經濟部智慧財產局員工消費合作社印製 1 溫徵 1 板讕 1 任之 5 盡 使方基之壓受 第受特第壓向 第之狀 第面 件一方方加等 圍給其圍加方 圔板島 圍著 構之另一成均 範供為範之平 範壓浮 範吸 降持之使所面 利內成利方水 利加成 利壓 升保持形體板 專間構專一向 專逑持 專加 之著保變剛基 請空之譆在成 請前支 讅之 方吸著性在方 申閉升申加持 申加料 申方。一面吸彈此另 在述上在追支 在追材 在一徼在著面料由著 係前壓係，方 係，性 係何特係吸著材，順 ，在内，成一 ，成撓 ，任為，壓吸性動板 明加之明構另 明構可 明之成明加壓撓移基 發追間發之對。發之由 發板構發其加可斜之· 之，空之明方徵之明藉 之壓之之在之使傾方-6 項成閉項發一特項發央 項加料項，板下加一 3 構此 4 之任其 5 之中 6 在材 1 作壓態稍使 第之使第項之為第項之 第加性第動加狀板面 圍明可圍 3 板成圍 3 件 圍追撓圍下之近基著 範發，範第壓構範第構 範，可範上方接之吸 利之體利或加之利或降。利成置利板另此方壓 專項流專項之如專項升徵專構配專壓在 Μ 一加 。 請 2 之請 2 方自請 2 在特請明近請加與，及坦 徼申第制申第一動申第方為申發接申之 ，近板平 特或控 ，另移 ，一成 之能 方板接壓之 其項度 項或整 項何構 項可 一基板加板 (請先閱讀背面之注意事項再填寫本頁) 一裝 訂· J· 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 575773 經濟部智慧財產局員工消費合作社印製 A7 __B7_五、發明說明（4 ) 加壓。 申請專利範圍第2項之發明，係對於申請專利範圍第 1項之構成，於前逑升降構件與可撓性材料之間區劃形成 閉空間，因此閉空間之內壓上升由一方之加壓板向他方之 加壓板上下動作而使可撓性材料彈性變形之構成，因此隨 閉空間之內壓上升使可撓性材料彈性變形，得Μ—方之加 壓板向另一方之加壓板Μ微米單位向下動。 申請專利範圍第3項之發明，係對於申請專利範圍第 1項或第2項之構成，在前逑閉空間內追加供給受溫度控 制之流體，使此閉空間之内壓上升之構成，因此，藉由一 方之加壓板可冷卻上下基板。 申請專利範圍第4項之發明，係對於申請專利範圍第 1項、第2項或第3項，追加前逑一方之加壓板或另一方 之加壓板之任一方對另方支持成向水平方向調整移動自如 之構成，因此，使一方之加壓板或另一方之加壓板之任一 方對另一方向水平方向調整移動，則上下基板可精度良好 對位，隨後，Κ此對好位之狀態下加壓上下基板壓扁至規 定之間隙。 申請專利範圍第5項之發明，係對於申請專利範圍第 1項、第2項、第3項或第4項之構成，追加前逑加壓板 之任一方在升降構件之中央藉可撓性材料支持成浮島狀之 構成，因此，由調整機構使升降構件向水平方向調整移動 時，對其動作遲延及動向能使加壓板無誤差隨動。 申請專利範圍第6項之發明，係對於申請專利範圍第 -7- (請先閱讀背面之注意事項再填寫本頁) 裝！---I — —^w.. 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 575773 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明說明（5 ) 5項之構成，追加盡可能接近前逑加壓板之任一方之加壓 吸著面而配置可撓性材料之構成，因此由升降構件將加壓 板向水平方向調整移動使上下基板對位時，吸著保持基板 之加壓吸著面較向自可撓性材料更下方之加壓板突出者， 不易發生撓距Uoaent)。 發明實施之形態 下面對本發明之實胨例Μ圖面說明之。 本實施例係如第1圖（a)及（b)所示，上方加壓板1 藉由可撓性材料4支持於升降構件3之下面中央成浮島狀 之同時，下方加壓板2做為平台固定配備成不能移動狀， 於此等加壓板1、2之平坦加壓吸著面la、2a，分別吸著 上下2片玻璃製基板A、B保持狀態使升降構件3下降， 由此使上基板A接近下基板B之情形。 上方加壓板1及下方加壓板2,分別由_體構成，上 方加壓板1之下面，形成與上基板A之上面相對之平坦加 壓吸著面la,下方加壓板2之上面，形成與下基板B之下 面相對之平坦加壓吸著面2a。 本實施例之情形，上方加壓板1例如由金屬或陶瓷等 剛體構成，下方加壓板2例如由石英等透明剛體構成，再 者，在下方加壓板2之下方，配設紫外線光源（無圖示）。 此等上下加壓板1、2，開穿抽氣孔lb、2b,此等抽氣 孔lb、2b藉由形成於加壓板1、2内部之抽氣通路lc、2c 連通於抽氣源（無圓示）。 上方加壓板1內形成之抽氣通路lc,在本實施例時， -8- 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 1· f 裝--------訂 ---I--i^^wi (請先閱讀背面之注意事項再填寫本頁) 575773575773 A7 _____B7_ 5. Description of the invention (3) The structure of the invention is added to define a closed space between the front lifting member and the flexible material, so that the internal pressure of the closed space rises and pushes one of the pressure plates to the other. The action of Fang's pressing on and down the board to make the flexible material elastically changed is printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. 1 Wen Zheng 1 Ban Yi 1 Ren 5 The first case and the first case are provided by one party and the other party to the other side of the island. It is another uniform average supply for the fan island. The fan is flat and the fan is absorbed. Chengli pressure rises to maintain the shape of the board. The special structure of the structure has always been dedicated to holding the book. The change is based on the rigidity of the base. Please wait for the support of the party before the completion of the application. On one side, the suction bomb is on the other. In the description, it is chasing the material. On the stack of fabrics, it is pressed in front of the writing system, the square system, and the sex system. The special system is the suction material. For this reason, the pressure-suction action plate is clearly structured, and the structure can be clearly established. The hair is issued by the hair board, which can be added by the slanting, the empty and the bright side can be used by the pressure to make the dumping -6 items into a closed item, a special item, a central item, and an additional item. Add 1 to 3 to build any of 4 out of 5 to 6 in the material 1 to make the pressure slightly so that the first item is the first item of the addition of the addition of the surface of the plate can be surrounded by 3 plates into 3 Fan Fa, who is chasing and siege, is based on Fan Fa, Fan Di opposes Fan Di, and can be used to absorb the benefits of the benefits or increase or decrease. Li Cheng Zhi Li Ban also presses on the other side of the special stream, such as the special promotion, the special structure of the special pressure on the one plus. Please ask for 2 and 2 for your own request. 2 Please join us in the near future, and the first party to apply for the first application is to issue the application for the application. Nearly flat or special control, another move, 10% The item or the entire item can be added to the board of the energy square board. You can add a board to the board (please read the precautions on the back before filling this page). Binding · J · This paper size applies to Chinese National Standards (CNS) A4 specification (210 X 297 mm) 575773 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 __B7_ V. Description of the invention (4) Pressurization. The invention in the second scope of the patent application is for the structure in the first scope of the patent application. The closed space is formed between the front lifting member and the flexible material. Therefore, the internal pressure of the closed space is increased by one pressure plate. A structure in which the flexible material is elastically deformed by moving up and down on the other pressure plate. Therefore, as the internal pressure of the closed space rises, the flexible material is elastically deformed. M micron units move down. The invention in item 3 of the scope of patent application is for the structure in item 1 or 2 of the scope of patent application, in which the temperature-controlled fluid is additionally supplied in the front closed space to increase the internal pressure of the closed space. The upper and lower substrates can be cooled by one pressure plate. The invention in item 4 of the scope of patent application refers to the support of the other party's pressure plate or the other side's pressure plate for the first, second, or third scope of the patent application. The horizontal direction can be adjusted and moved freely. Therefore, if one of the pressure plate or the other pressure plate is horizontally adjusted and moved in the other direction, the upper and lower substrates can be accurately aligned. In the state of being pressed, the upper and lower substrates are compressed to a predetermined gap. The invention in the scope of the patent application No. 5 is for the constitution of the scope of the patent application in the first, the second, the third, or the fourth, and any one of the additional front pressure plates is flexible at the center of the lifting member. The material supports a floating island structure. Therefore, when the lifting member is adjusted and moved in the horizontal direction by the adjusting mechanism, the delay and movement of the lifting member can follow the error plate without error. The invention in the scope of patent application No. 6 is for the scope of patent application No. -7- (Please read the precautions on the back before filling this page) Pack! --- I — — ^ w .. This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) 575773 Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention (5) 5 The structure of this item is added with a configuration in which a flexible material is arranged as close as possible to the pressure suction surface of either of the front pressure plates. Therefore, when the pressure plate is adjusted and moved horizontally by the lifting member to align the upper and lower substrates. If the pressure holding surface of the holding and holding substrate protrudes toward the pressure plate lower from the flexible material, it is less likely to cause a deflection Uoaent). Embodiments of the Invention A practical example M of the present invention will be described with reference to the drawings. In this embodiment, as shown in FIG. 1 (a) and (b), the upper pressure plate 1 is supported by a flexible material 4 on the lower center of the lifting member 3 into a floating island shape, and the lower pressure plate 2 is made The platform is fixed to be immovable. The flat pressure suction surfaces 1a and 2a of the pressure plates 1 and 2 suck the upper and lower glass substrates A and B respectively to keep the lifting member 3 down. This brings the upper substrate A closer to the lower substrate B. The upper pressure plate 1 and the lower pressure plate 2 are respectively composed of a body. The lower pressure plate 1 forms a flat pressure suction surface la opposite the upper surface of the upper substrate A, and the upper surface of the lower pressure plate 2 A flat pressure suction surface 2a is formed opposite to the lower surface of the lower substrate B. In the case of this embodiment, the upper pressure plate 1 is formed of a rigid body such as metal or ceramic, the lower pressure plate 2 is formed of a transparent rigid body such as quartz, and an ultraviolet light source is disposed below the lower pressure plate 2 ( (Not shown). These upper and lower pressure plates 1, 2 are opened through the exhaust holes lb, 2b, and these exhaust holes lb, 2b are connected to the exhaust source through the exhaust channels lc, 2c formed inside the pressure plates 1, 2 (no Circle). The exhaust path lc formed in the upper pressure plate 1 is, in this embodiment, -8- this paper size applies to China National Standard (CNS) A4 specifications (210 X 297 mm) 1 · f pack ----- --- Order --- I--i ^^ wi (Please read the notes on the back before filling in this page) 575773
五、發明說明（9 ) 流體6至與可撓性材料4之間所區劃形成之閉空間5。 由此，閉空間5之内壓上升，上方加壓板1受往下之 推壓，達適當內壓時，可撓性材料4彈性變形使上方加壓 板1微小，即Μ微米單位向下動。 由於此上方加壓板1之微小向下動，所吸著保持之上 基板Α亦向Ζ方向下動微小距離，此上基板Α之下面藉粘 合劑C，與吸引保持於被固定配備在下方加壓板2之下基 板B之上面接觸之同時，將此兩基板A 、B壓扁達其間隔 至規定之間隙。 此結果，無需發動升降構件3而可將兩基板A、B, K 微米單位壓扁至規定間隙。 於是，較依前逑升降機構（無圖示）之機械式升降構件 3之上下動使兩基板A、B K微米單位壓扁至規定間隙者， 可簡化整體裝置。 此時，由上方加壓板1而向下動之上基板A,與被固 定配備在下方加壓板2所吸引保持之下基板B之上面，即 使非微米單位之完全平行，其上下基板A、B之傾斜，首 先上基板A下面之粘合劑C對下基板B上面僅部分接觸時 ，隨其部分接觸，可撓性材料4更加彈性變形而使上方加 壓板1及上基板A傾斜移動。 由此，在剛體所成之上方加壓板1之平坦加壓吸著面 la,上基板A順著下基板B之上面而受均勻加壓。 结果，將兩基板A、B精度良好對位並保持平行狀可 確實壓扁至規定間隙。此間隙精度係，例如基板A、B之 - 12- 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） (請先閱讀背面之注意事項再填寫本頁) I ------- — 訂 --- 經濟部智慧財產局員工消費合作社印製 575773 A7 B7 五、發明說明（10 ) 對角長度卜4英时（2 · 54- 10 · 56cm)時在± 0 · 3/i ffiM下。 於是，維持如此規定間隙之狀態，透過透明之下方加 壓板2由紫外線光源（無圖示）之紫外線，照射至上下基 板A、Β間之紫外線硬化型粘合麵C。 於是，上述紫外線硬化型粘合劑C經硬化，無需藉隔 熱可將上下基板A、B粘合。 並且，上下基板A、B對位及壓扁至規定間隙僅由一 部裝置即可完成。 尤其是，供給至前逑閉空間5之流體6 ,係使用受溫 度控制之冷水等低於設定溫度時，藉上方加壓板1可冷卻 上基板A及下基板B，而可防止因上下基板A、B之溫度上 升而變形之優點。 經濟部智慧財產局員工消費合作社印製 裝---- (請先閱讀背面之注意事項再填寫本頁) 另，第2圖U)及（b)所示為本發明之其他實施例， 在此，前逑上方加壓板P為平台固定配備成不能移動，同 時下方加壓板2’在升降構件3’上面中央藉可撓性材料4’支 持成浮島狀，而在此等加壓板1’，2’之平坦加壓吸著面la’ 、2a’，分別吸著保持上下基板A、B之狀態下，使升降構 件3’及下方加壓板2’上升，而下基板B接近上基板A之構 成，係不同於前述第1圖（a)及（b)所示之實施例，除此 之外之構成則同於第1圖U)及（b)所示之實施例。 並且於圖示例，在升降構件3’與可撓性材料4’之間區 劃形成之閉空間5’供給流體6’使內壓上升，由此，可撓性 材料4 ’彈性變形使下方加壓板2 ’將上方加壓板1 ’微小向上 動。 -13- 本紙張尺度適用中國國家標準（CNS)A4規格（210 χ 297公釐） 經濟部智慧財產局員工消費合作社印製 575773 A7 B7 五、發明說明（11 ) 因此，第2圖（a)及（b)所示者，亦如同前逑第1圖 (a)及（b)所示之實施例，可將兩基板A、B精度良好對 位並保持平行狀確實壓扁至規定間隙之作用效果。 又，於前述實施例，在上下基板A、B經對位完了後 使閉空間5之內壓上升，而可撓性材料4經彈性變形將一 方加壓板1向另方加壓板微小向下動，但不限於此，亦可 將升降構件3由機械方式Μ微米單位再向上下動使可撓性 材料4彈性變形，由此一方之加壓板1及一方之基板Α可 微小傾斜移動，將上下基板A、B加壓至規定間隙亦可。 又，於前述實施例，由升降構件3將上方加壓板1, 對下方加壓板2支持成可向水平方向調整移動自如，但並 不限定於此，亦可將下方加壓板2對升降構件3及上方加 壓板1支持成可向水平方向調整移動自如，如是可將下方 加壓板2向水平方向調整移動，用K將上下基板A、B對 位亦可。 再者於前逑實施例，對上下基板A、B間之紫外線硬 化型接合劑C照射紫外線加K硬化，但並不限定於此，其 他例如熱硬化性樹脂之接合劑經加熱硬化等，使用其他接 合劑亦可。 如上之說明，本發明中申請專利範圍第1項之發明係 ，由升降構件使一方之加壓板向上下動，而吸著保持於該 加壓吸著面之一方基板，接近於吸著保持於另方加壓板之 另方基板，照此接近狀態將可撓性材料彈性變形，使一方 之加壓板及一方基板微小傾斜移動，由此於剛體所成加壓 ~ 1 4 - 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） I---------裝--------訂-------^wi (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 575773 Α7 Β7 五、發明說明（12 ) 板之平坦加壓吸著面，一方基板順著另方基板面均受加壓 ,因此可將兩基板精度良好對位並保持平行狀確實壓扁至 規定間隙。 於是，與習用之無隔墊支持之基板中央部在加壓時凹 陷而無法獲得規定間隙者比較，無需隔墊支持亦能精密形 成上下基板間之間隙。 申請專利範圍第2項之發明，係在申請專利範圍第1 項之發明效果，追加隨閉空間之內壓上升使可撓性材料弾 性變形，由此一方之加壓板Μ微米單位向另方加壓板下動 ，因此無需動升降構件即可Μ微米單位將兩基板壓扁至規 定間隙。 如是，與採機械性升降構件之上下動Κ微米單位將兩 基板壓扁至規定間隙者比較，可將整體裝置簡化得Μ小型 化之同時，亦可謀求減低製造成本。 申請專利範圍第3項之發明，係在申請專利範圍第1 項或第2項之發明效果，追加藉由一方之加壓板冷卻上下 基板，因此可防止上下基板因溫度上升之變形。 申請專利範圍第4項之發明，係在申請專利範圍第1 項、第2項或第3項之發明效果，追加將一方加壓板或另 方加壓板之任一方，對另一方向水平方向調整移動，由此 上下基板可精度良好對位，隨後，照此對好位狀態加壓上 下基板壓扁至規定間隙，因此，上下基板之對位及壓扁至 規定間隙僅由一部裝置進行即可。 申請專利範圍第5項之發明，係在申請專利範圍第1 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） (請先閱讀背面之注音？事項再填寫本頁) 裝 訂.V. Description of the invention (9) The closed space 5 formed between the fluid 6 and the flexible material 4 is defined. As a result, the internal pressure of the closed space 5 rises, and the upper pressure plate 1 is pushed downward. When an appropriate internal pressure is reached, the flexible material 4 elastically deforms to make the upper pressure plate 1 minute, that is, the unit of M microns is downward. move. Due to the small downward movement of the upper pressure plate 1, the upper substrate A sucked and held also moves a small distance in the direction of Z. The lower surface of the upper substrate A is held by the adhesive C and is fixedly equipped with While the upper surface of the lower substrate B of the lower pressure plate 2 is in contact with each other, the two substrates A and B are flattened to a predetermined gap. As a result, the two substrates A, B, and K micrometer units can be crushed to a predetermined gap without starting the lifting member 3. Therefore, compared with the mechanical lifting member 3 according to the front lifting mechanism (not shown), the two substrates A, B and K micrometer units are flattened to a predetermined gap, which can simplify the overall device. At this time, the upper substrate A is moved downward by the upper pressure plate 1, and the upper substrate A is fixedly equipped on the lower substrate B attracted and held by the lower pressure plate 2. Even if the non-micron unit is completely parallel, the upper and lower substrates A are parallel. And B. When the adhesive C on the upper substrate A and the upper substrate B are only partially in contact with each other, the flexible material 4 deforms more elastically with the partial contact, and the upper pressure plate 1 and the upper substrate A are inclined. mobile. Thereby, the flat pressing surface la of the upper pressing plate 1 formed by the rigid body is uniformly pressed along the upper substrate A along the upper surface of the lower substrate B. As a result, the two substrates A and B can be accurately aligned and kept parallel, so that they can be flattened to a predetermined gap. This gap accuracy is, for example, for substrates A and B.-12- This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) (Please read the precautions on the back before filling this page) I --- ---- — Order --- Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 575773 A7 B7 V. Description of the invention (10) The diagonal length is 4 inches (2 · 54-10 · 56cm) when ± 0 · 3 / i ffiM. Therefore, maintaining the state of such a predetermined gap, the transparent lower pressing plate 2 is irradiated with ultraviolet light from an ultraviolet light source (not shown) to the ultraviolet-curable adhesive surface C between the upper and lower substrates A and B. Therefore, the above-mentioned ultraviolet-curable adhesive C is cured, and the upper and lower substrates A and B can be adhered without using heat insulation. Moreover, the alignment and flattening of the upper and lower substrates A and B to a predetermined gap can be completed by only one device. In particular, when the fluid 6 supplied to the front closed space 5 uses temperature-controlled cold water or the like below the set temperature, the upper pressure plate 1 can cool the upper substrate A and the lower substrate B, and can prevent A, B has the advantage of increasing temperature and deforming. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs-(Please read the precautions on the back before filling out this page) In addition, Figure 2 U) and (b) show other embodiments of the present invention. Here, the upper pressure plate P of the forefoot is fixed to the platform so that it cannot move, and the lower pressure plate 2 'is supported by a flexible material 4' in the center of the upper surface of the lifting member 3 'to form a floating island. The flat pressure suction surfaces la 'and 2a' of 1 'and 2' respectively lift the lifting member 3 'and the lower pressure plate 2' while holding the upper and lower substrates A and B, respectively, and the lower substrate B approaches The structure of the upper substrate A is different from the embodiment shown in Figs. 1 (a) and (b), and the other structures are the same as those shown in Fig. 1 (U) and (b). In the example shown in the figure, the closed space 5 'formed between the elevating member 3' and the flexible material 4 'is supplied with a fluid 6' to increase the internal pressure. As a result, the flexible material 4 'is elastically deformed to increase the downward pressure. Platen 2 'moves the upper platen 1' slightly upward. -13- This paper size is in accordance with Chinese National Standard (CNS) A4 (210 χ 297 mm) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 575773 A7 B7 V. Description of the invention (11) Therefore, Figure 2 (a) And (b), as in the embodiment shown in (a) and (b) of Fig. 1 above, the two substrates A and B can be aligned with good accuracy and kept parallel, and flattened to a predetermined gap. Effect. Furthermore, in the foregoing embodiment, the internal pressure of the closed space 5 is increased after the upper and lower substrates A and B are aligned, and the flexible material 4 is elastically deformed to move one of the pressure plates 1 to the other pressure plate slightly. Downward movement, but it is not limited to this, the lifting member 3 can also be moved up and down from the mechanical M micron unit to elastically deform the flexible material 4, so that one pressure plate 1 and one substrate A can be tilted slightly. It is also possible to press the upper and lower substrates A and B to a predetermined gap. Furthermore, in the foregoing embodiment, the upper pressure plate 1 and the lower pressure plate 2 are supported by the lifting member 3 so as to be adjustable and movable in the horizontal direction, but it is not limited to this, and the lower pressure plate 2 may be The lifting member 3 and the upper pressure plate 1 are supported to be able to adjust and move freely in the horizontal direction. If the lower pressure plate 2 can be adjusted and moved in the horizontal direction, the upper and lower substrates A and B can be aligned with K. Furthermore, in the previous example, the ultraviolet curing adhesive C between the upper and lower substrates A and B is irradiated with ultraviolet rays and K, but it is not limited to this. Other adhesives such as thermosetting resins are cured by heating and the like. Other bonding agents are also possible. As described above, in the present invention, the invention claims the first item of the patent system. One of the pressure plates is moved up and down by a lifting member, and the substrate held on one side of the pressure suction surface is held close to the suction holding surface. On the other substrate of the other pressure plate, the flexible material is elastically deformed according to the approach state, so that one of the pressure plate and the one substrate is slightly inclined to move, thereby pressurizing the rigid body ~ 1 4-This paper Standards are applicable to China National Standard (CNS) A4 specifications (210 X 297 mm) I --------- Installation -------- Order ------- ^ wi (Please read first Note on the back, please fill in this page again.) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 557773 Α7 Β7 V. Description of the invention (12) The flat pressing surface of the board, one substrate is pressed along the other substrate surface Therefore, the two substrates can be aligned with good accuracy and kept parallel to be surely flattened to the prescribed gap. Therefore, compared with the conventional substrate without a spacer support, the central portion of the substrate sags during pressurization to obtain a predetermined gap, and the gap between the upper and lower substrates can be precisely formed without the use of spacer support. The invention in the second scope of the patent application is based on the invention effect in the first scope of the patent application. The flexible material is deformed elastically with the increase of the internal pressure of the closed space, so that one micrometer unit of the pressure plate is directed to the other The pressure plate moves downwards, so the two substrates can be flattened to a predetermined gap in M micrometer units without moving the lifting member. If so, compared with the case where the mechanical lifting member is moved up and down by KM units to flatten the two substrates to a predetermined gap, the overall device can be simplified and miniaturized, and the manufacturing cost can be reduced. The invention in the third scope of the patent application is the invention effect in the first or the second scope of the patent scope. The upper and lower substrates are cooled by one pressure plate, so that the upper and lower substrates can be prevented from being deformed due to temperature rise. The invention in item 4 of the scope of patent application is the invention effect of item 1, 2, or 3 in the scope of patent application, and one of the pressure plate or the other pressure plate is added to the other direction horizontally. The direction is adjusted and moved, so that the upper and lower substrates can be aligned with good precision. Then, the upper and lower substrates are pressed and aligned to the prescribed gap according to the aligned state. Therefore, only one device is used to align and flatten the upper and lower substrates. Just go. The invention in item 5 of the scope of patent application is in the first scope of patent application. The paper size applies to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) (Please read the phonetic on the back? Matters before filling out this page) Binding .