TW567323B

TW567323B - Device and method to inspect the broken electrode in plasma display panel

Info

Publication number: TW567323B
Application number: TW91121270A
Authority: TW
Inventors: Shiang-Wen Wan; Shou-Ling Suei; Shih-Chun Lo
Original assignee: Au Optronics Corp
Priority date: 2002-09-17
Filing date: 2002-09-17
Publication date: 2003-12-21

Abstract

The present invention provides a device to inspect the broken electrode in plasma display panel, whose structure comprises: a glass substrate; at least a stripe-like electrode disposed on the glass substrate; an overcoat disposed on the stripe-like electrode; a supporting structure disposed on the overcoat and is located around the glass substrate; and a gas inlet to introduce inert gas into the discharge space. The discharge space is formed of a protection film, supporting structure and overcoat. The broken electrode inspection device can be disposed on the front panel or rear panel of the machine to be tested. Whether the electrode is broken or not can be inspected by observing if the discharge cell corresponding to the electrode emits light.

Description

567323 五、發明說明（1) 【發明領域】本發明係有關於一種電漿平面顯示器（P1 a s m a display pane丨，PDp )之電極缺陷的檢測方法及其裝置。且特別有關於一種電漿平面顯示器（PDP )前板（front Panel)的維持電極（sustain electrodes)和掃描電極 (scan electrodes )以及後板（rear panel )之資料電極斷線檢測方法，以及電極斷線檢測裝置。【發明背景】 / 電漿平面顯示器（PDP )是一種利用惰性氣體放電時所產生的紫外線激發彩色螢光粉後，再轉換成人眼可接受的可見光的大面積螢幕顯示器。依據限流工作方式不同，可分為直流型（DC )與交流型（AC )兩種，目前產品多以交流型為主。交流型電漿平面顯示器（PDP )主要可區分成三大製程： (1 )前板前段製程··包括透明電極製造、輔助電極 (bus electrode )製造、誘電體製造、MgO保護膜製造等四部分。 (2)後板刖段製私·包括資料電極（data electrode )(或稱定址電極，address e 1 ec trode )製造、阻隔壁 (rib)製造、螢光體（phosphor )塗佈、封裝材料塗佈等四部分。 (3 )後段組裝製程··包括將前板和後板對位並暫時固定後，放入真空排氣裝置内進行排氣抽真空製程，封入放567323 V. Description of the invention (1) [Field of the invention] The present invention relates to a method and a device for detecting electrode defects of a plasma flat panel display (P1 a s m a display pane, PDp). In particular, it relates to a data electrode disconnection detection method for sustain electrodes, scan electrodes, and rear panel of a plasma panel display (PDP) front panel, and electrode breakage. Line detection device. [Background of the Invention] / Plasma flat panel display (PDP) is a large-area screen display that uses ultraviolet light generated during discharge of an inert gas to excite color phosphors and then converts visible light acceptable to the adult eye. According to the different current limiting working methods, it can be divided into two types: direct current (DC) and alternating current (AC). At present, most of the products are mainly AC. The AC plasma display (PDP) can be mainly divided into three major processes: (1) the front panel front stage process ... including transparent electrode manufacturing, auxiliary electrode (bus electrode) manufacturing, electromotive body manufacturing, MgO protective film manufacturing, etc. . (2) Private manufacturing of the rear plate section · Including the production of data electrode (or address electrode, address e 1 ec trode), the manufacture of barrier ribs, the coating of phosphors, and the coating of packaging materials Cloth and other four parts. (3) Back-end assembly process ... Including the front plate and the rear plate are aligned and temporarily fixed, and then placed in a vacuum exhaust device for an exhaust vacuum process, sealed and placed

0632-8415TWF(n);AU91009;AMY.ptd 第4頁 567323 五、發明說明（2) ，用混合氣U體’直至壓力約為67〇 (hPa )。最後進入老化 as 1 ng )製程’透過長時間放電檢測各放電空間發光穩定性。 # 、就電聚平面顯示器（PDP )的掃瞄方式，可分為單掃目:式iS^ngle —SCan)與雙掃瞎式（dual—scan)兩種，其雙知喊的方式係為將資料電極分割為兩部分以達到同時驅動的目的，以提昇畫面更新率。目前在完成電漿平面顯電極製造後，會進行開路短 ^ ，以檢測電漿平面顯示器疋否有缺陷，此種測試的方兩類。然而非接觸式設備的然接觸式設備的開路短路測雙掃瞄式資料電極在介電層法應用’因此，若電極的開生’則無法檢測出來。【發明的目的及概要】示器（P D P )的前板和後板的路測試（open-short test (PDP)的前板和後板之電極法為可分為接觸式與非接觸式開路短路測試的可靠度差，雖試的可靠度高，但是對於後板 (overcoat )後續的製程後無路係在覆蓋層後續的製程後發㈣有？於，，、本發明的目的在於提供—種可檢測電黎平面顯不益（PDP)的前板和後板之電極斷線與否的方法。本、發」月的另一目的在於提供一種檢測電漿平面顯示器 (PDP )剛板和後板之電極斷線與否的檢測結構。 ^本發明的又一目的在於將電漿平面顯示器（PDP)的刚板和後板進行後段組裝製程前，檢測出電極是否有斷線缺陷的方法。0632-8415TWF (n); AU91009; AMY.ptd page 4 567323 V. Description of the invention (2), use a mixed gas U 'until the pressure is about 67 ° (hPa). Finally enter the aging as 1 ng) process ’to test the light emission stability of each discharge space through long-term discharge. # 、 The scanning methods of PDP can be divided into single scanning mode: iS ^ ngle —SCan) and dual —scan. The dual-knowing method is The data electrode is divided into two parts to achieve the purpose of driving at the same time, so as to improve the picture update rate. At present, after the manufacture of plasma flat display electrodes is completed, an open circuit is performed to detect whether the plasma flat display is defective. There are two types of such tests. However, the open-circuit and short-circuit measurement of non-contact devices is of course. The double-scan data electrode is used in the dielectric layer method. Therefore, if the electrode is opened, it cannot be detected. [Objective and Summary of the Invention] The front and back panel of the PDP (open-short test (PDP) electrode method of the front and back panels can be divided into contact and non-contact open-circuit short circuits. The reliability of the test is poor. Although the reliability of the test is high, there is no road system after the subsequent process of the overcoat. After the subsequent process of the cover layer, the purpose of the present invention is to provide- A method for detecting whether the electrodes on the front and rear panels of a PDP display are disconnected. Another objective of this and the next month is to provide a method for detecting the rigid panel and the rear panel of a plasma flat panel display (PDP). Structure for detecting whether the electrode of the board is disconnected. ^ Another object of the present invention is a method for detecting whether the electrode has a disconnection defect before the rigid panel and the rear panel of the plasma flat panel display (PDP) are subjected to a post-assembly process.

567323567323

。讯本發，提供一種電極斷線檢測裝置，其結構簡述如下 =置至j 一條狀電極於玻璃基板上，設置介電層於條狀闲二上、且，汉置支撐結構於介電層上，且位於玻璃基板二。並設置保護膜於支撐結構上，其中保護膜、支撐結 5和介電層構成-放電空間。此外，《包括用以導入惰性乳體至放電空間的氣體入口。本=明並提供另一種電極斷線檢測裝置，其結構簡述 ^下。没置至少一條狀電極於玻璃基板上，設置介電層於 ^狀電極上。且，設置支撐結構於介電層上，且位於破璃基板周圍。並設置保護膜於支撐結構上，其中保護膜、支撐結構和介電層構成一放電空間。此外，還包括用以導入惰性氣體至放電空間的氣體入口。另外，更包括於介電層表面設置一螢光體。曰 _ 此外’本發明並提供一種檢測電漿平面顯示器（PDp )的電極是否斷線之方法，其方法如下所述。首先，提供電漿平面顯示器之一受測基板，此受測基板上已形成複數第二電極。之後將一電極斷線檢測裝置放置於受測基板上’並使電極斷線檢測裝置之條狀第一電極大致與受測基板上之第二電極垂直，其中此電極斷線檢測裝置具有第一放電空間，且對應複數放電單元。接著分別施加帶有一定頻率的交流電壓至受測基板之第二電極和電極斷線檢測裝置之條狀第一電極。之後檢查對應於受測基軛备一笛一i 電極之每-放電單元是否有發光，若有發光η:上第一電極正常，若沒發光則表示對應之第二電極斷線。. Xunbenfa provides an electrode disconnection detection device, the structure of which is briefly described as follows: a strip electrode is placed on a glass substrate, a dielectric layer is disposed on the stripe, and a support structure is disposed on the dielectric layer. On the glass substrate. A protective film is provided on the supporting structure, wherein the protective film, the supporting junction 5 and the dielectric layer constitute a discharge space. In addition, "Includes gas inlets for introducing inert milk into the discharge space. Ben = Ming and provide another electrode disconnection detection device, its structure is briefly described below. At least one strip-shaped electrode is not disposed on the glass substrate, and a dielectric layer is disposed on the surface-shaped electrode. Moreover, a supporting structure is provided on the dielectric layer and is located around the broken glass substrate. A protective film is provided on the supporting structure, wherein the protective film, the supporting structure and the dielectric layer constitute a discharge space. In addition, a gas inlet for introducing an inert gas into the discharge space is included. In addition, a phosphor is provided on the surface of the dielectric layer. _ In addition, the present invention also provides a method for detecting whether an electrode of a plasma flat panel display (PDp) is disconnected. The method is as follows. First, a test substrate of a plasma flat display is provided, and a plurality of second electrodes have been formed on the test substrate. An electrode disconnection detection device is then placed on the substrate under test 'and the strip-shaped first electrode of the electrode disconnection detection device is substantially perpendicular to the second electrode on the substrate under test. The electrode disconnection detection device has a first The discharge space corresponds to a plurality of discharge cells. Then, an AC voltage with a certain frequency is applied to the second electrode of the substrate under test and the strip-shaped first electrode of the electrode disconnection detection device, respectively. Then check whether the per-discharge cell corresponding to the tested base yoke-diode-i electrode has light emission. If there is light emission η: on, the first electrode is normal, if it is not light, it means that the corresponding second electrode is disconnected.

0632-8415TlVF(n);AU91009;AMY.ptd 五、發明說明（4) 上述之檢測電漿平面鹿一 w 之方法中，受測基板可為1 态（PDP )的電極是否斷線上述之檢測電浆；板。之方法中，若受測基板為::益（PDP)的電極是否斷線裝置之第一放電空間的^ ^矣則所使用之電極斷線檢測在此情況下，上述之放電H表面更包括設置-螢光體。上述之檢測電聚= =第-放電空間中。之方法中，若受測基板為後板 -否斷線由阻隔壁所定義的第二放電空間中j。江之放電早兀係位於【發明詳細說明】通常電漿平面顯示器（pj)p ) H 乂裝組合而成。以第1圖所示之電&與後板30封电水平面顯不器f PDP、类為例：前板10是由玻璃基板12、透明電極14、辅助= 、：電體層（又稱介電層）18及Mg0保護層20所 '豆 :月上極14和輔助電極16係構成維持電極X和掃描電極 Y。後板30則是由玻璃基板32、資料電極 ”二介電層36、阻隔壁38所構成。其中電：序塗佈紅色（R)、綠色⑷以及藍色⑴内相依器二合)之後分別注入氮…氣體即構成電毁平面顯示電衆平面顯示器（PDP)的前板之製程依序包括· 明電極14的製作、輔助電極16的製作、介電層18的製及保護層20的製作。其中，在製作透明電極14的過對其電極形狀及厚度的精度要求極高，倘若未達到要求則「麵〇632-8415TW(n);AU91009;AMY.ptd 567323 五、發明說明（5) =亮度。辅助電極16對位置 —— 谷易發生斷線及短路的現象。二的要求極高，否則將 1 6所構成的維持電極χ和掃描、明電極1 4和辅助電極功能是儲存電荷以達到影像上覆蓋一層介電層18的對介電層18之位置精準度的要求=憶效果，製造過程中為重要，並且要確保放電時的絕緣:。’但厚度的均-性甚本^月對於檢測電漿平面顯示器（pDp ) 乂是否斷線，係於當介電層18覆二後且於形成保護膜2 〇之前進行。於^ ^極X和知描電極Υ 中做詳細描述。於其檢測方法將於後文電t平面顯示器（PDP )的德4，料電極34的製作、介電芦36 & _ I程依序包括··資 6的製作、阻隔壁38的製作、螢先體40的塗佈以及封裝材料塗佈。灰作螢本發明對於檢測電漿平面顯是否斷線，係於當螢光體40涂：：（p)後板的電極、田蛍九體40塗佈於阻隔壁38上後進行。至於其檢測方法將於後文中做詳細描述。電極斷線檢測裝置雷將：下f配合第2圖、第3圖和第4圖詳細說明用於檢測電水平面顯示器（PDP)前板的電極和後板的電極是否斷線之一種電極斷線檢測裝置100。其中第2圖係為電極斷線檢測裝置100之上視圖。第3圖和第4圖分別為兩種不同之電極斷線檢測裝置，且為第2圖之a — a，剖面圖。首先將配合第2圖和第3圖詳細說明第一種電極斷線檢測裝置。此電極斷線檢測裝置1 〇〇包括玻璃基板丨〇 2、設置 1^· 0632.8415TW(n);AU91009;AMY.ptd 第8頁 567323 五、發明說明（6) ---— 於玻璃基板102上之條狀電極1〇4、設置於條狀電極1〇4和玻璃基板102上之介電層1〇6、設置於介電層1〇6上且位於玻璃基板102周圍之支撐結構1〇8、保護膜11〇、以及氣體入口 11 2。其中保護膜丨！〇、支撐結構丨〇8和介電層1〇6係構成一放電空間11 4，而氣體入口 11 2係用以將惰性氣體導入至放電空間11 4。所導入的惰性氣體可為氦（He )、氖 (N e )或其混合。上述電極斷線檢測裝置丨〇〇之條狀電極丨〇 4的數目至少為’在圖中係以兩條電極1 0 4為例，當然亦可配置兩條以上的電極104。此電極1〇4的材質可為透明的導電材質配合導電性佳的金屬線，其結構例如電漿平面顯示器（PDp )之維持電極X和掃描電極γ的結構，所使用之透明的導電材質可為氧化銦錫（ITO )或二氧化錫（Sn02 )，所使用之金屬線的材質可為鉻/銅/鉻（Cr/Cu/Cr )、銀（Ag )、紹（A1 )或是鎳（n i )等。此外，此電極丨〇 4的材質亦可僅由金屬線構成。、至於第二種電極斷線檢測裝置如第4圖所示，其與第種電極斷線檢測裝置（見第3圖）不同處在於介^層1〇6 的表面塗佈一層螢光體120。此種電極斷線檢測裝置的目的在於提高辨識斷線電極位置的方便性。第一種電極斷線檢測裝置（見第3圖）較適用於檢測電漿平面顯示器（PDP )後板的資料電極是否斷線。第一種電極斷線檢測裝置（見第4圖）較適用於檢測電水平面顯不Is ( P D P )則板的維持電極和掃描電極是否0632-8415TlVF (n); AU91009; AMY.ptd V. Description of the invention (4) In the above method for detecting plasma plane deer-w, the substrate under test can be in a state of 1 (PDP). Plasma; board. In the method, if the substrate to be tested is: The electrode of the PDP is disconnected ^ ^ 矣 of the first discharge space of the device, the electrode disconnection detection used in this case, the above-mentioned discharge H surface further includes Settings-phosphor. The above-mentioned detection charge is == in the -discharge space. In the method, if the substrate to be tested is the rear plate-whether the wire is broken or not in the second discharge space defined by the barrier wall. The Jiang Zhi discharge system is located in [Detailed description of the invention] Usually plasma plasma display (pj) p) H is assembled. Take the electric & and rear panel 30 sealed horizontal plane display f PDP and the like shown in Figure 1 as an example: the front panel 10 is composed of a glass substrate 12, a transparent electrode 14, and auxiliary =, an electrical layer (also called a dielectric layer) The electric layer) 18 and the Mg0 protective layer 20 are used to form a sustain electrode X and a scan electrode Y. The rear plate 30 is composed of a glass substrate 32, a data electrode, a second dielectric layer 36, and a barrier wall 38. Among them, the red (R), green cymbals, and blue cylindrical interlocking devices are sequentially coated, respectively, and then separately The process of injecting nitrogen ... gas to form the front panel of a flat panel for electrical destruction (PDP) includes the production of bright electrodes 14, the production of auxiliary electrodes 16, the production of dielectric layer 18, and the production of protective layer 20. Among them, the precision of the shape and thickness of the electrode during the manufacture of the transparent electrode 14 is extremely high. If the requirements are not met, "face 632-8415TW (n); AU91009; AMY.ptd 567323. V. Description of the invention (5) = Brightness. 16 pairs of positions of the auxiliary electrode-Valley is prone to disconnection and short circuit. The requirements of the two are extremely high, otherwise the maintenance electrode χ and scan composed of 16 and the bright electrode 14 and the auxiliary electrode function to store charge. In order to achieve the accuracy of the position of the dielectric layer 18 covered by a layer of the dielectric layer 18 on the image = recall effect, it is important in the manufacturing process, and it is necessary to ensure the insulation during discharge: 'but the thickness uniformity is very low ^ Month for detection plasma plane display (PDp) 乂 Whether or not the wire is disconnected is performed after the dielectric layer 18 is overlaid and before the protective film 20 is formed. It will be described in detail in the electrode X and the electrode Υ. The detection method will be described later. Wen Dian's flat panel display (PDP) of Germany 4, the production of electrode 34, dielectric Lu 36 & _ process in sequence includes the production of 6 materials, the production of barrier wall 38, coating and packaging of fluorescent precursor 40 The material is coated with ash. The present invention is used to detect whether the plasma plane is broken or not, which is when the phosphor 40 is coated: (p) After the electrode of the rear plate and the tincture 9 are coated on the barrier wall 38 As for the detection method, it will be described in detail later. The electrode disconnection detection device Lei Jiang: The following f will be described in detail in conjunction with Figure 2, Figure 3, and Figure 4. An electrode disconnection detection device 100 for detecting whether the electrodes and the electrodes on the rear panel are disconnected. The second figure is a top view of the electrode disconnection detection device 100. The third and fourth figures are two different electrode disconnections The detection device is a—a, cross-sectional view of Fig. 2. First, it will cooperate with Fig. 2 and Figure 3 illustrates the first electrode disconnection detection device in detail. This electrode disconnection detection device 1 00 includes a glass substrate 2 and settings 1 ^ 0632.8415TW (n); AU91009; AMY.ptd page 8 567323 5. Description of the invention (6) ----- strip-shaped electrode 104 on glass substrate 102, dielectric layer 106 provided on strip-shaped electrode 104 and glass substrate 102, and dielectric layer 10 A support structure 108, a protective film 110, and a gas inlet 112 are provided on 6 and located around the glass substrate 102. Among them protective film 丨! 〇, the support structure 〇 08 and the dielectric layer 106 constitute a discharge space 114, and the gas inlet 112 is used to introduce an inert gas into the discharge space 114. The inert gas introduced may be helium (He), neon (Ne), or a mixture thereof. The number of the strip electrodes of the above-mentioned electrode disconnection detection device 丨〇〇 is at least ′. In the figure, two electrodes 104 are used as an example. Of course, two or more electrodes 104 may be provided. The material of the electrode 104 can be a transparent conductive material with a metal wire with high conductivity. The structure of the electrode 104 can be, for example, the structure of a sustaining electrode X and a scanning electrode γ of a plasma flat display (PDp). Indium tin oxide (ITO) or tin dioxide (Sn02), the material of the metal wire used can be chromium / copper / chromium (Cr / Cu / Cr), silver (Ag), Shao (A1), or nickel ( ni) and so on. In addition, the material of this electrode 4 may be composed of only metal wires. As for the second electrode disconnection detection device, as shown in FIG. 4, it is different from the first electrode disconnection detection device (see FIG. 3) in that a layer of phosphor 120 is coated on the surface of the interlayer 106. . The purpose of this electrode disconnection detection device is to improve the convenience of identifying the position of a disconnected electrode. The first electrode disconnection detection device (see Figure 3) is more suitable for detecting whether the data electrode on the rear panel of the plasma flat panel display (PDP) is disconnected. The first type of electrode disconnection detection device (see Figure 4) is more suitable for detecting whether the horizontal electrode Is (P D P) is the sustain electrode and the scan electrode of the board.

0632-8415TW(n)；AU91009；AMY.ptd 第9頁 5673230632-8415TW (n); AU91009; AMY.ptd page 9 567323

，線。不過，第二種電極斷線檢測裝置亦可用於檢測電漿平面顯示器（PDP )後板的資料電極是否斷線。利用電極斷線檢測裝置檢測PDP後板電極本發明對於檢測電漿平面顯示器（PDP )後板3〇的資料電極3 4是否斷線，係於阻隔壁3 8上塗佈螢光體4 〇後進行 ’並配合使用如第2圖和第3圖所示之第一種電極斷線檢測裝置1 0 0進行檢測。此電極斷線檢測裝置1 〇〇與受測後板 3〇’的相對位置關係如第5圖所示。,line. However, the second electrode disconnection detection device can also be used to detect whether the data electrodes on the rear panel of the plasma flat panel display (PDP) are disconnected. The present invention is used to detect whether the data electrode 34 of the rear panel 30 of the plasma flat panel display (PDP) is disconnected. Perform the test in conjunction with the first electrode disconnection detection device 100 shown in FIG. 2 and FIG. 3. The relative positional relationship between the electrode disconnection detection device 100 and the back plate 3O 'under test is shown in FIG. 5.

在此實施例中，用於檢測後板30，的資料電極34是否斷線之電極斷線檢測裝置1 〇〇中的保護膜丨丨〇，其介電常數大約介於7和1 6之間，厚度大約介於3 〇微米和7 〇微米之間。在阻隔壁38上覆蓋此層保護膜11〇，可提供一個平坦的表面，使惰性氣體可充份在放電空間11 4中流通。此外，此保護膜110還可避免受測後板30,在放電過程中發生弧光現象（arcing)。In this embodiment, the protective film of the electrode disconnection detection device 100 for detecting whether the data electrode 34 of the rear plate 30 is disconnected has a dielectric constant between approximately 7 and 16. The thickness is between 30 microns and 70 microns. Covering the barrier film 38 with this layer of protective film 110 can provide a flat surface so that the inert gas can fully circulate in the discharge space 114. In addition, the protective film 110 can also prevent arcing during the discharge of the back plate 30 under test.

藉由在保護膜11 0上方由電極斷線檢測裝置丨〇〇本身所建立的新的放電空間丨丨4，使放電空間丨丨4中充滿的惰性氣體放電（discharge )產生電漿，而電漿所產生的紫外光 (UV )可穿透保護膜1丨〇激發受測後板30,上的螢光體4〇發光，若受測後板30’的資料電極34斷線，則可清楚觀察出不發光的放電單元（cell)。在此例子中，觀察放電與否之放電單元係位於由阻隔壁38定義出電漿平面顯示器（PDP)之放電空間42中，且電極斷線檢測裝置1 〇〇之放電空間1 14係對應許多放電單元With the new discharge space created by the electrode disconnection detection device above the protective film 110, itself, the discharge space filled with the inert gas in the discharge space is generated, and the electricity is generated. The ultraviolet light (UV) generated by the paste can penetrate the protective film 1 and excite the phosphor 40 on the back plate 30, which is tested, and emit light. If the data electrode 34 of the back plate 30 'is disconnected, it is clear. Non-luminous discharge cells were observed. In this example, the discharge cells for observing the discharge are located in the discharge space 42 of the plasma flat display (PDP) defined by the barrier wall 38, and the discharge space 1 14 of the electrode disconnection detection device 100 corresponds to many Discharge unit

0632-8415TW(n);AU91009;AMY.ptd 第10頁 567323 五、發明說明（8) 〇為了讓此實施例更為易懂，以下係以雙掃瞄式電漿平面顯示器（PDP )為例，做更進一步的說明。如第6圖所示 ’其資料電極（同第5圖標號3 4 )係分割為兩部分，例如所不之D1、D2、D3、D4、D5 "·Ε)η、V 、D2, 、d3，、D4, 、D5, …Dn’ 。需注意的是，第5圖和第6圖均為示意圖，兩者並未依相同比例繪示。在進行資料電極34 (即h〜Dn ，〜Dn，）的斷線檢測0632-8415TW (n); AU91009; AMY.ptd Page 10 567323 V. Description of the invention (8) 〇 In order to make this embodiment easier to understand, the following is a dual-scanning plasma flat panel display (PDP) as an example For further explanation. As shown in FIG. 6 'the data electrode (same as the fifth icon number 3 4) is divided into two parts, for example, D1, D2, D3, D4, D5 " · Ε) η, V, D2,, d3, D4, D5,… Dn '. It should be noted that Figures 5 and 6 are schematic diagrams, and they are not shown to the same scale. Disconnection detection of data electrode 34 (ie h ~ Dn, ~ Dn,)

時’觉測後板3 0 ’的資料電極3 4係與電極斷線檢測裝置1 〇〇之電極1 0 4互相垂直。而且，施加於資料電極〜w和h，〜W以及電極104的交流電壓大約介於15〇伏特（V)至 350伏特之間，頻率大約介於4 kHz (千赫茲）至％ kHzi 間，電流大約介於〇· 02安培（A )至〇· 24安培之間。、饭5又^料電極有斷線的缺陷，位於保護膜1 1 〇和資料電極D2之間的放電單元A則不發光。當電極斷線檢測裝置100沿著箭頭的方向移動時，即可對整個受測後板30，資料電㈣丨训，〜V (對應於第5圖的標二進：斷線檢測。需注意的是，當電極斷線檢測裝置i 〇〇沿著箭頭的方The data electrode 3 4 of the 'sensing back plate 3 0' is perpendicular to the electrode 104 of the electrode disconnection detection device 100. Moreover, the AC voltage applied to the data electrodes ~ w and h, ~ W, and the electrode 104 is approximately between 15 volts (V) and 350 volts, and the frequency is between approximately 4 kHz (kilohertz) and% kHzi. Approximately between 0.02 amps (A) and 0.25 amps. The electrode 5 has a defect of disconnection, and the discharge cell A located between the protective film 110 and the material electrode D2 does not emit light. When the electrode disconnection detection device 100 is moved in the direction of the arrow, the entire back panel 30 can be tested, and the data can be trained to ~ V (corresponding to the standard binary in Figure 5: disconnection detection. Note that It is true that when the electrode disconnection detection device i 〇〇

^移動時’保護膜Π0可以不同時移動，在此情況下，保 1膜110的尺寸遠大於電極斷線檢測裝置丨〇〇之玻璃基板 =2的尺寸。由於保護膜11〇的存在，使得在進行斷線檢測時，不會損壞受測後板3 0，。藉由上述之檢測方法，可以在後板30,進行後段組裝^ When moving, the protection film Π0 may not be moved at the same time. In this case, the size of the protection film 110 is much larger than the size of the glass substrate of the electrode disconnection detection device 〇〇〇. Due to the presence of the protective film 110, when the disconnection detection is performed, the back plate 30 under test will not be damaged. With the above detection method, rear stage assembly can be performed on the rear plate 30

第11頁 ^7323 五、發明說明（9) ’檢測出資料電極34有斷線的後板3〇,。用電極斷線檢測裝置檢測PDP前板電極持雷對於檢測電漿平面顯示器（PDP)冑板10的維極Y v FI ΐ 斷線，係於維持電極X和掃描電覆盍；丨電層18後且於形成Mg〇保護膜2〇 (見第電進行，並配合使用如第2圖和第4圖所示之第二種;）二檢測裝置1 0 〇進行檢測。此電極斷線檢測裝置丨⑽與丄 d則板10,的相對位置關係如第7圖所示。一又在此實施例中，用於檢測受測前板1 〇,的電極是否辦之電極斷線檢測裝置100之介電層1〇6上係塗佈一層螢 1^0，可增加點亮時的亮度，而方便辨識斷線的電極， 1:下方有一層保護膜11 〇，使所塗佈的螢光體1 2 0不致污氷文測前板10,。此外，由於保護膜11〇的存在，可以避免在放電過程中發生弧光，並可防止電極斷線檢測裝置11() 的支撐結構108刮傷受測之前板1〇，。藉由在保護膜110上方由電極斷線檢測裝置1〇〇本身所建立的新的放電空間114，使放電空間114中充滿的惰性氣體放電（discharge )產生電漿，而電漿所產生的紫外光 (UV )會激發電極斷線檢測裝置1〇〇的螢光體12〇發光，若則板1 0的維持電極X或掃描電極γ斷線，則可清楚觀察出不發光的放電單元（cel 1 )。 ” 在此例子中，觀察放電與否之放電單元係位於電極斷線檢測裝置1 0 0之放電空間11 4中。為了讓此實施例更為易懂，以下更配合第7圖做更進Page 11 ^ 7323 V. Description of the invention (9) ′ The back plate 30 of which the data electrode 34 is disconnected is detected. Electrode disconnection detection device is used to detect the lightning on the front panel of the PDP. The electrode Y v FI ΐ of the plasma flat panel display (PDP) panel 10 is disconnected, which is connected to the sustaining electrode X and the scanning electrical overlay. 丨 Electrical layer 18 Then, a Mg0 protective film 20 is formed (see No. 2 and used in conjunction with the second type shown in Figures 2 and 4;) The second detection device 100 is used for testing. The relative positional relationship between the electrode disconnection detecting device 丨 ⑽ and 丄 d is shown in FIG. 7. In this embodiment, a layer of fluorescent light 1 ^ 0 is coated on the dielectric layer 10 of the electrode disconnection detection device 100, which is used to detect whether the electrodes of the front panel 10, are tested, which can increase the lighting. The brightness at the same time, which is convenient to identify the broken electrode, 1: There is a protective film 11 〇 below, so that the coated phosphor 1 2 0 will not stain the front panel 10. In addition, due to the presence of the protective film 110, arc light can be prevented from occurring during the discharge, and the support structure 108 of the electrode disconnection detection device 11 () can be prevented from scratching the front plate 10 under test. The new discharge space 114 established by the electrode disconnection detection device 100 itself above the protective film 110 causes the inert gas filled in the discharge space 114 to generate a plasma, and the ultraviolet light generated by the plasma is Light (UV) excites the phosphor 12 of the electrode disconnection detection device 100 to emit light. If the sustain electrode X or scan electrode γ of the plate 10 is disconnected, the non-luminous discharge cell (cel 1 ). ”In this example, the discharge cell that observes the discharge is located in the discharge space 11 14 of the electrode disconnection detection device 100. In order to make this embodiment easier to understand, the following is further improved in conjunction with FIG. 7

0632-8415TWF(n)；AU91009;AMY.ptd 第 12 頁 567323 五、發明說明（10) {的X說明X。·如Λ8::示’維持電極包括如圖所示之1 並未依相同比例繪示。和第8圖均為示意圖，兩者電極1 04互相垂窗π田電和係”電極斷線檢測裝置1 00之 "Xi ^Xn 1 πη件姓·> P, 電壓大約介於15〇伏特（V)至 350伏特之間，頻率大約介於4山蝴山之間。（）至的放iTL持則電不極:;有斷線的缺陷，對應於此維持電極、的方向移動時，即可對整個受測前板10;=°電:者” ::描電極Y1〜Yn (對應於第7圖的標號“和16)進行斷〜》需注意的是，當電極斷線檢測裝置丨00沿著向移動時，保護膜110可以不同時移動，在此情況下，、保護膜110的尺寸遠大於電極斷線檢測裝置i 〇〇诂 ’、 102的尺寸。敬喁基扳藉由上述之檢測方法，可以在前板10，於蒸鍍保蠖膜20 (見第1圖）以及進行後段組裝製程前，檢測出電極X或掃描電極Y有斷線的前板1〇，。 ' / 、上述利用電極斷線檢測裝置檢測電聚平面顯$ ^ (P D P )前板和後板電極是否斷線的檢測方法，並不°卩卩定於上述之電漿平面顯示器（PDP)結構和製程。其他 567323 五、發明說明αυ 之電漿平面顯示細上所述， (1)可在前檢測出有電極有 (2 )電極斷 (Single-Scan 〕否正常。 (3)可明確雖然本發明限制本發明，任神和範圍内，當當事後附之申請器（PDP)結構和製程亦均適用。本發明至少具有下列之優點或特徵：板和後板封裝前，利用電極斷線檢測裝置缺陷的前板和後板。線檢測裝置可適用於檢測單掃瞄式與雙掃瞄式（Dual-Scan)的資料電極是知道前板和後板之電極斷線的位置。已以較佳實施例揭露如上，然其並非用以何熟習此項技藝者，在不脫離本發明之精可做更動與潤飾，因此本發明之保護範圍專利範圍所界定者為準。〇632-8415TW(n);AU91009;AMY.ptd 第14頁 5673230632-8415TWF (n); AU91009; AMY.ptd page 12 567323 V. Description of invention (10) {X explains X. · As Λ8 :: show 'The sustain electrode includes 1 as shown in the figure and is not shown in the same scale. Figure 8 and Figure 8 are schematic diagrams. The electrodes 104 are perpendicular to each other, and the electrode disconnection detection device 100 is "Xi ^ Xn 1 πη". P, the voltage is about 15 Volts (V) to 350 volts, the frequency is approximately between 4 mountains. () To the iTL holding is not very electric :; there is a defect of disconnection, corresponding to the direction of this sustain electrode, when moving , You can break the entire front panel 10; = ° 电: 者 ”:: tracing electrodes Y1 ~ Yn (corresponding to the numbers“ and 16 ”in Figure 7) ~ Note that when the electrode is disconnected, When the device 00 moves in the direction, the protective film 110 may not be moved at the same time. In this case, the size of the protective film 110 is much larger than the sizes of the electrode disconnection detection devices i 〇〇诂 'and 102. According to the detection method described above, the front plate 10 can be detected as a broken front plate 10 of the electrode X or the scan electrode Y before the evaporation protection film 20 (see FIG. 1) and the subsequent assembly process are performed on the front plate 10. '/ The above-mentioned detection method for detecting whether the electrodes on the front panel and the rear panel of the electric polyplane display are disconnected by using the electrode disconnection detection device, It is not determined by the structure and manufacturing process of the plasma flat panel display (PDP) mentioned above. Others 567323 V. Description of the invention The plasma flat display of αυ is described in detail above. (1) The electrode can be detected before (2) Is the electrode break (Single-Scan) normal? (3) It is clear that although the present invention limits the present invention, within the scope and scope, the structure and manufacturing process of the attached application device (PDP) are also applicable. The present invention has at least the following Advantages or characteristics: Before the board and the back plate are packaged, the front and back plates of the device are detected by the electrode disconnection. The line detection device can be used to detect single-scan and dual-scan data electrodes. Know the position of the electrode disconnection of the front plate and the back plate. It has been disclosed above in a preferred embodiment, but it is not used for those skilled in the art. It can be modified and retouched without departing from the essence of the present invention. The scope of protection is defined by the patent scope. 632-8415TW (n); AU91009; AMY.ptd Page 14 567323

【符號說明】前板：1 〇則板的7L件··玻璃基板〜12、透明電極〜Μ、輔助電極〜1 6、誘電體層（介電層）〜18、[Symbol description] Front plate: 1 〇 7L pieces of the plate ·· Glass substrate ~ 12, transparent electrode ~ M, auxiliary electrode ~ 1 6, Electrolyte layer (dielectric layer) ~ 18,

MgO保ό蔓層〜20、維持電極〜X、掃描電極〜Υ 後板：3 0 後板的元件：玻璃基板〜32、資料電極（定址電極）介電層〜36、阻隔壁〜38 放電空間〜42 電極斷線檢夠裝置·· 1 〇〇元件：受測後板資料電極：h〜Dn、Di，〜％, 受測前板·· 1 〇，MgO protection layer ~ 20, sustain electrode ~ X, scan electrode ~ Υ Back plate: 3 0 Back plate elements: glass substrate ~ 32, data electrode (address electrode) dielectric layer ~ 36, barrier wall ~ 38 discharge space 〜42 Electrode disconnection detection device ... 1 〇〇 Components: After the test panel data electrode: h ~ Dn, Di, ~%, before the test panel ... 1 〇,

〜34、、螢光體〜40~ 34,, phosphor ~ 40

玻璃基板〜102、條狀電極〜1〇4、 η電層〜106、支撐結構〜、保護膜〜11〇、氣體入口〜112、放電空間〜114、螢光體〜12〇Glass substrate ~ 102, strip electrode ~ 104, η electric layer ~ 106, support structure ~, protective film ~ 11, gas inlet ~ 112, discharge space ~ 114, phosphor ~ 12

維持電極·· X，〜XSustaining electrode ... X, ~ X

567323 圖式簡單說明掃描電極：〜γ 【圖式簡單說明】板結傳統電漿平面顯w⑽）的前板及後線之Γ極圖斷係:：，發明用於檢測受測基板之電極是否斷線之電極斷線檢測裝置之上視圖。同第3圖係為本發明之笛—^ ^ ^ %2 M > 電極斷線檢測裝置，且為訂應於第2圖之a-a切線的剖面圖。 ^ 第4圖係為本發明之筮_ 對應於第2圖之a-a，切绩沾二電極斷線檢測裝置，且為固切線的剖面圖。第5圖係繪示電極斷線檢測… 置關係之剖面圖。、置與受測後板的相對位第6圖係為利用第一種後板之資料電極斷線與否的/音斷線檢測裝置來檢測受測第7圖係緣示電極斯蠄&、圖置關係之剖面圖。、、欢’則袭置與受測前板的相對位第8圖係為利用第二種前板之維持電極和掃描電極斷後斷愈線檢測裝置來檢測文測研琛與否的示意圖。567323 Schematic illustration of scanning electrode: ~ γ [Schematic description of Schematic] Γ pole diagram of front plate and rear line of traditional plasma plasma display w⑽) Broken system ::, Invented to detect whether the electrode of the substrate under test is Top view of disconnected electrode disconnection detection device. Fig. 3 is a cross section of the flute of the present invention-^ ^ ^% 2 M > electrode disconnection detection device, corresponding to a-a tangent line of Fig. 2. ^ Figure 4 is a cross-sectional view of the invention __ Corresponding to a-a of Figure 2, the two-electrode disconnection detection device is cut. Figure 5 is a cross-sectional view showing the relationship of electrode disconnection detection ... The relative position of the rear panel under test. Figure 6 is the use of the first type of back panel data electrode disconnection / sound disconnection detection device to detect the edge of the electrode shown in Figure 7. , Sectional view of the relationship between the map. ",, Huan" is the relative position between the front panel and the tested front panel. Figure 8 is a schematic diagram of detecting the failure of the text measurement research by using the second type of front panel's sustaining electrode and scanning electrode broken line detection device.

0632.8415TW(n);AU91009;AMY.ptd 第16頁0632.8415TW (n); AU91009; AMY.ptd Page 16

Claims

567323 六、申請專利範圍一種電極斷線檢測裝置，包括：一玻璃基板；至少一條狀電極，設置於該玻璃基板上； ~介電層，設置於該條狀電極上；支樓結構，設置於該介電層上，且位於該玻璃基板周圍； ^ 一保護膜，設置於該支撐結構上，該保護膜、該支撐結構和該介電層構成一放電空間；以及一氣體入口，用以導入一惰性氣體至該放電空間。567323 VI. Patent application scope An electrode disconnection detection device includes: a glass substrate; at least one strip electrode is disposed on the glass substrate; a dielectric layer is disposed on the strip electrode; a branch structure is disposed on On the dielectric layer and located around the glass substrate; ^ a protective film disposed on the supporting structure, the protective film, the supporting structure and the dielectric layer forming a discharge space; and a gas inlet for introducing An inert gas reaches the discharge space.

1 2·如申請專利範圍第1項所述之電極斷線檢測裝置， ^中該條狀電極係由堆疊的透明導電材質和金屬材質所構 ΐ t、如申請專利範圍第2項所述之電極斷線檢測裝置， ^ 4透明導電材質係擇自由氧化銦錫（丨τ〇 )和二氧化鈦所組成的族群中，該金屬材質係擇自由鉻/銅/ mu/cr)、銀w)、銘⑷）和錄（Ni)所組成 4;如申請專利範圍第1項所述之 ρρ 1 rry ^ 其中該條狀電極^系由金屬材質所構成。 1中利範圍第1項所述之電極斷線檢測裝置，組==體係擇自由氮⑹、請)和其混合所其中6該二申以利電\圍數第=所述之電極斷線檢測裝置，吊數"於7和1 6之間，厚度介於3 〇微1 2 · The electrode disconnection detection device described in item 1 of the scope of patent application, wherein the strip electrode is composed of stacked transparent conductive materials and metal materials. T, as described in item 2 of the scope of patent application Electrode disconnection detection device, the transparent conductive material is selected from the group consisting of free indium tin oxide (丨 τ〇) and titanium dioxide, and the metal material is selected from free chromium / copper / mu / cr), silver w), Ming Ii) and (Ni) 4; ρρ 1 rry ^ as described in item 1 of the patent application range, wherein the strip electrode ^ is composed of a metal material. 1 The electrode disconnection detection device described in item 1 of the Zhongli range, group == system selection free nitrogen (please, please) and its mixing office 6 of the two applications to Eliden \ Wai number = = electrode disconnection Detection device, hanging number "between 7 and 16 and thickness between 30 micrometers

567323567323

六、申請專利範圍米和7 0微米之間。 7如申請專利範圍第1項所述之電極斷線檢測裝置，更匕括一螢光體，設置於該介電層表面。 8 · 一種檢測電漿平面顯示器的電極是否斷線之方法，包括： j供一電漿平面顯示器之一受測基板，該受測基板上已形成複數第二電極；放置電極斷線檢測裝置於該受測基板上，豆中該雷極斷線檢測裝置包括·· 八人一第一玻璃基板；至少一條狀第一電極，設置於該第一玻璃基板上’且該條狀第一電極大致與該受測基板上之該些第二電極垂直； — 一第一介電層，設置於該條狀第一電極上；一支撐結構，設置於該第一介電層上，.且位於該第一玻璃基板周圍；一第一保護膜，設置於該支撐結構和該受測基板之間，該第一保護膜、該支撐結構和該第一介電層構成一第一放電空間；以及一氣體入口，用以導入一惰性氣體至該第一放電空間，其中該電極斷線檢測裝置之該第一放電空間係對應複數放電單元，分別施加帶有一定頻率的交流電壓至該受測基板之該Sixth, the scope of patent application is between meters and 70 microns. 7. The electrode disconnection detection device according to item 1 of the scope of the patent application, further comprising a phosphor disposed on the surface of the dielectric layer. 8 · A method for detecting whether an electrode of a plasma flat panel display is disconnected, comprising: j providing a test substrate of a plasma flat panel display, and a plurality of second electrodes have been formed on the test substrate; On the substrate under test, the thunder pole disconnection detection device in the bean includes: a eight-person first glass substrate; at least one strip-shaped first electrode disposed on the first glass substrate; and the strip-shaped first electrode is roughly Perpendicular to the second electrodes on the substrate under test; a first dielectric layer disposed on the strip-shaped first electrode; a support structure disposed on the first dielectric layer and located on the first dielectric layer Around a first glass substrate; a first protective film disposed between the support structure and the substrate under test, the first protective film, the support structure, and the first dielectric layer forming a first discharge space; and a A gas inlet for introducing an inert gas into the first discharge space, wherein the first discharge space of the electrode disconnection detection device corresponds to a plurality of discharge cells, and an alternating current with a certain frequency is applied respectively Subject to the substrate of the test

0632-8415TW(n);AU91009;AMY.ptd 第18頁六、申請專利範圍些第二電極和該電極斷線檢測及、之該條狀第一電極；以檢查對應於該受測基板之每_ 元是否有發光，若有發光則表示一，極之每一放電單若沒發光則表㈣應之該第〔電極a^該第=電極正常， 9.如申請專利範圍第8項所述之檢的電極是否斷線之方法’其中施加至該;平面顯示器二電極和該電極斷線檢測裝置 ς “1 ς，之该些第赫茲）至36 kHz之間。鴻旱"於4 kHz (千 10，如申明專利範圍第8項所述之檢測電漿平φ g 器的電極是否斷線之方法，其中該受電-千面顯- 括： j签伋馮别板，其包一第二玻璃基板；一該些第二電極，設置於該第二玻璃基板上，其中誃此第二電極包含複數維持電極和複數掃描電極；以及 Μ二一第二介電層，設置於該些第二電極和該測裝置之該第一保護膜之間。電極斷線檢 11·如申請專利範圍第1 〇項所述之檢測電漿平面顯八器的電極是否斷線之方法，其中該電極斷線檢測裝置更= 括一第一螢光體，設置於該第一介電層表面。匕 12·如申請專利範圍第11項所述之檢測電漿平面顯示器的電極是否斷線之方法，其中該些放電單元位於該第= 放電空間中。 /0632-8415TW (n); AU91009; AMY.ptd Page 18 VI. Patent application scope The second electrodes and the electrode disconnection detection and the strip-shaped first electrode; to check each corresponding to the substrate under test _ Whether there is light emission, if there is light, it means one, if each discharge sheet of the electrode does not light, it means that the [electrode a ^ the third = electrode is normal, 9. as described in item 8 of the scope of patent application The method of inspecting whether the electrode is disconnected 'is applied to the two electrodes of the flat display and the electrode disconnection detection device ("1", some of these Hz) to 36 kHz. Drought " at 4 kHz (Thousands, the method for detecting whether the electrode of the plasma level φ g device is disconnected as described in item 8 of the declared patent scope, wherein the power receiving-thousand-face display- includes: j signing the Fengbei board, which includes a first Two glass substrates; one or more second electrodes disposed on the second glass substrate, wherein the second electrodes include a plurality of sustain electrodes and a plurality of scan electrodes; and a second dielectric layer is disposed on the first Between the two electrodes and the first protective film of the measuring device. Inspection 11. The method for detecting whether an electrode of a plasma plane display device is disconnected as described in item 10 of the scope of the patent application, wherein the electrode disconnection detection device further includes a first phosphor and is provided in the first A surface of a dielectric layer. 12. The method for detecting whether an electrode of a plasma flat panel display is disconnected as described in item 11 of the scope of patent application, wherein the discharge cells are located in the first discharge space.

0632-8415TWF(n);AU91009;AMY.ptd 第19頁 5673230632-8415TWF (n); AU91009; AMY.ptd Page 19 567323

13.如申請專利範圍第8項所述之檢測電聚平面1員禾器的電極是否斷線之方法，其中該受測基板為後板，其包括：一第二玻璃基板；該些第二電極，設置於該第二玻璃基板上，其中誘此第二電極為資料電極；一第二介電層，設置於該些第二電極和該第二坡螭基板上；一阻隔壁，設置於該第二介電層和該電極斷線檢剛敦置之該第一保護膜之間，用以定義複數第二放電空間；以及一第二螢光體，設置於該阻障壁表面。 14·如申請專利範圍第1 3項所述之檢測電漿平面顯示器的電極是否斷線之方法，其中該電極斷線檢測裝置之該第一保護膜的介電常數介於7和1 6之間，厚度介於30微米和7 0微米之間。 15·如申請專利範圍第1 3項所述乏檢測電漿平面顯示器的電極是否斷線之方法，其中該些放電單元位於該些第二放電空間中。13. The method for detecting whether an electrode of a poly-plane 1 device is disconnected as described in item 8 of the scope of patent application, wherein the substrate to be tested is a rear plate, which includes: a second glass substrate; the second substrates An electrode is disposed on the second glass substrate, wherein the second electrode is a data electrode; a second dielectric layer is disposed on the second electrodes and the second slope substrate; a barrier wall is disposed on A space between the second dielectric layer and the first protective film just after the electrode break detection is defined is used to define a plurality of second discharge spaces; and a second phosphor is disposed on the surface of the barrier wall. 14. The method for detecting whether an electrode of a plasma flat panel display is disconnected as described in item 13 of the scope of patent application, wherein the dielectric constant of the first protective film of the electrode disconnection detection device is between 7 and 16. The thickness is between 30 microns and 70 microns. 15. The method for detecting whether the electrodes of the plasma plane display are disconnected as described in item 13 of the scope of the patent application, wherein the discharge cells are located in the second discharge spaces.

0632-8415TW(n);AU91009;AMY.ptd 第20頁0632-8415TW (n); AU91009; AMY.ptd Page 20