TW546200B - Moistureproof multilayered film and manufacturing method thereof - Google Patents

Abstract

Disclosed is a moistureproof multilayered film which comprises a non-hygroscopic resin layer and formed on at least one surface thereof a vapor-deposited film of an inorganic oxide or metal. The surface of the vapor-deposited film of the composite film has a layer constitution which is bonded through an adhesive layer to another non-hygroscopic resin layer or to a vapor-deposited film of another composite film. The total number (n) of vapor-deposited films adjacent to the adhesive layer is 2 to 8, and the moistureproof multilayered film has a water vapor permeability (W; unit, g/m<2> day) satisfying the relationship W <= (1/n)x0.20 when determined under the conditions of 40 DEG C and 100% RH. Also disclosed is a process for producing a moistureproof multilayered film which comprises heating the multilayered film in a dry atmosphere having a temperature above 55 DEG C but below 140 DEG C for 10 hours or longer.

Description

546200 案號 89110249 五、發明說明（1) 技術領域 本發明為關 更詳言之，為 裝材料和封裝 明之防濕性多 濕性，且特別 裝薄膜。 背景技術 自以往，於 相沉積膜的複 好，且透明性 情形中，具有 品、電子零件 氣相沉積膜的 樹脂薄膜，則 耐熱性、熱封 但是，含有 濕度充分降低 之電子零件封 元件（E L元件） 對螢光化合 螢光發光能量 造而言’可分 螢光體之薄膜 於具有 關於適 材料之 層薄膜 適於作 =度防濕性能之防濕性多 5作為食品、醫藥品、電 防4性多層薄膜及其製造 I發揮匹敵於聚氣三氟乙 為電發光元件等電子零件 層薄 子零 方法 烯薄 之封 膜，且 件等包 。本發 膜的防 裝用封 合成樹 合薄膜 優良， 電子距 等之包 複合薄 可保護 性等諸 氣相沉 ’故例 裝用封 為例， 物之固 之作用 成薄膜 所構成 脂薄膜表面 ’為氧氣阻 並且於氣相 離適性，故 I材料和封 膜，於其單 氣相沉積膜 機能的多層 積膜的先前 如不一定能 裝薄膜。以 更加具體說 體（螢光體） 稱為電發光 型及分散型 的發光層。 形成無機氧化 氣性及水蒸氣 沉積膜為石夕氧 被使用作為食 裝材料。於至 面或兩面上疊 ，並且可作成 薄膜。 複合薄膜，因 適於作為要求 下對於此問題 明。 外加電場，將 。電發光由其 。薄膜型E L元 分散型E L元件 物或 阻礙 化物 品、 少一 層各 職與 為無 高度 ，以 電能 基本 件為 為具 金屬氣 性良 薄膜等 醫藥 面形成 種合成 強度、 89110249.pt(546200 Case No. 89110249 V. Description of the Invention (1) Technical Field The present invention is more detailed. It is a packaging material and a package which has a moisture-proof property and a high-humidity property, and is particularly provided with a film. 2. Description of the Related Art In the past, when a phase-deposited film was recovered and transparent, a resin film having a vapor-deposited film of an electronic component or an electronic component has heat resistance and heat sealing. However, it contains an electronic component sealing element with sufficiently reduced humidity ( EL element) For the production of fluorescent and fluorescent energy, the thin film that can be divided into phosphors is suitable for a layer of film with suitable materials. It is suitable for moisture resistance of 5 degrees. It is used as food, medicine, Electrically-resistant multilayer film and its manufacture I can compete with polytrifluoroethylene for electronic light-emitting components and other electronic parts. The packaging film of the hair film is excellent in anti-packaging synthetic resin film, and the thin film can be protected by electrons and other thin films. Therefore, the packaging film is used as an example. The surface of the film is composed of a thin film. 'Because it is oxygen-blocking and suitable for gas phase dissociation, the material I and the sealing film are not necessarily able to fit a thin film in the previous multi-layer film with a single vapor deposition film function. More specifically, the body (phosphor) is called an electroluminescent type and a dispersed type light emitting layer. It forms inorganic oxide gas and water vapor, and the deposited film is Shi Xi oxygen, which is used as a food material. It can be stacked on the top or both sides, and can be made into a thin film. Composite film, as it is suitable as a requirement, will address this issue. The applied electric field will be. Electroluminescence by it. Thin film type EL element Dispersion type EL element or obstructive material product, one level less each position and no height, the basic electrical energy as a metal gas good film and other medical surfaces forming a variety of synthetic strength, 89110249.pt (

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案號 891I024Q 五、發明說明（2) 末螢光體於有機或無機黏合劑中分散的發光層。紅元件為 具備以一對電極直接或透過絕緣層將發光層夾住的元件本 體，且於一對電極之至少一者中，使用透明電極。構成發 光層之螢光體若吸濕，則令其發光亮度顯著受損。因此， EL元件為具有將一對電極間配置發光層之EL元件本體，以 透明的防濕材料予以覆被（封裝）之構造。 &gt;以往，EL元件的防濕材料為使用聚氣三氟乙烯（pcTFE) 薄膜和玻璃基板。PCTFE薄膜為於合成樹脂薄膜中具有最 優之防濕性，但其費用高，且氛圍氣溫度若為超過50 t之 溫二降！：因此，以譲薄膜所封装之 兀=、：同'皿、同濕下之壽命極短之問題。另一方 :所膜化及輕量化上具有限度，並且亦具 本體封裝，其不可或二并璃基板元件 能的防濕性薄膜。以往，涛膜之/有高度防濕性 等，代替PCTFE作為樹脂材料“、、將聚偏氯乙烯和聚乙烯醇 化物和金屬之氣相沉積膜的合成^且以檢討形产無機氧 發出具有匹敵PCTFE薄膜之古 於曰潯膜。但疋，難以開 防濕材料。 、阿度防濕性能及適度可撓性的 例如，於特開平8〜3 〇 〇 Μ 9辦八 性被膜之雙轴延拉塑料薄膜二=民中，揭示令設有具阻氣 構成之至少由雙軸延拉塑料舊膜面與黏合樹脂層接觸所 性薄膜所構成的層合薄脸 ^膜、被膜/黏合樹脂層/可撓 / 、’ ；該雙軸延拉塑料薄膜之玻璃Case No. 891I024Q V. Description of the invention (2) A light-emitting layer in which a phosphor is dispersed in an organic or inorganic binder. The red element is an element body having a pair of electrodes sandwiching the light emitting layer directly or through an insulating layer, and a transparent electrode is used for at least one of the pair of electrodes. If the phosphor constituting the light emitting layer absorbs moisture, its luminous brightness will be significantly impaired. Therefore, the EL element has a structure in which an EL element body in which a light emitting layer is disposed between a pair of electrodes is covered (encapsulated) with a transparent moisture-proof material. &gt; Conventionally, a moisture-proof material for an EL element has used a polytrifluoroethylene (pcTFE) film and a glass substrate. PCTFE film has the best moisture resistance in synthetic resin film, but its cost is high, and if the temperature of the atmosphere is more than 50 t, the temperature will drop! : Therefore, the problem of the packaged with the thin film = ,: the same life with the same dish, under the same humidity. The other side: there is a limit in filming and weight reduction, and it also has a body package, which is not a moisture-resistant film that can be combined with glass substrate components. In the past, Tao film has a high degree of moisture resistance, etc., instead of PCTFE as a resin material, and the synthesis of vapor-deposited films of polyvinylidene chloride and polyvinyl alcohol compounds and metals ^ and in the form of inorganic oxygen produced by review The ancient PC film is comparable to the PCTFE film. However, it is difficult to open a moisture-proof material. For example, Ada's moisture-proof performance and moderate flexibility are described in, for example, Yukai Kai 8 ~ 300 MM. Yanla Plastic Film 2 = Minzhong, reveals that there is a laminated thin face consisting of at least a biaxially stretched plastic old film surface and an adhesive resin layer, which has a gas barrier structure. ^ Film, film / adhesive resin Layer / flexible /, '; the glass of the biaxially stretched plastic film

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五、發明說明（3) 態化溫度以上、熔點以下之溫度中將琴雔 加熱，此時，令該雙軸延拉塑；= 拉塑料薄膜 率範圍為延伸率2%以内及收縮率5%以内，則可改。：性 之方法。於該公報中，揭示以無機氧化 膜作為具有阻氣性之被膜。 *金屬乳相&quot;U積 上述公報所記載之方法為在加熱層合薄膜時，於二根獨 =驅動滾筒之間通過’且’經由調整各獨立驅：滾筒 的迴轉速度，則可控制層合薄膜的伸縮率。具體而古，將 驅動滾筒Β之周速相對於驅動滾筒Α之周速調整至】&amp;〜 〇古巧倍，令層合薄膜於緊張下加熱。又，該公報所記載之 =法，期望令加熱溫度為雙軸延拉塑料薄膜之玻璃態化溫 度+7〇t以上、熔點以下。於該公報之實施例中，示出令 層—合薄膜於緊張下，分別於23 0 t之熱滾筒上接觸15秒 (貫施例1)、於19(TC之熱滾筒上接觸32秒（實施例2)、 25 0 之熱滾筒上接觸〇.9秒（實施例3)之例。於該公報之 其他實施例中，示出令層合薄膜一邊於獨立驅動之二根滚 筒間慢慢流過，一邊於170之加熱爐中加熱1〇分鐘（實施 例4)、及21〇它之加熱爐中加熱2分鐘（實施例5)，分別顯 示出加熱之例。示出經由此類方法，令層合薄膜之透濕度 (依據杯封法於40 t、相對濕度差9 〇%下測定）由熱處理前 之l.jg/m2 · day，改善至熱處理後之〇. 6g/m2 . day為止之 例（貫施例4)。但是，此透濕度值，遠不及PCTFE薄膜之透 濃度水準（〇〇32/1112.(^7左右）。 取近，本發明者等人發現令聚乙烯醇等吸濕性樹脂層之V. Description of the invention (3) The cymbals are heated at a temperature above the state temperature and below the melting point. At this time, the biaxial stretching is plasticized; = the range of the stretched plastic film is within 2% of the elongation and the shrinkage is 5%. Within, it can be changed. : Sexuality. In this publication, an inorganic oxide film is disclosed as a film having gas barrier properties. * The method described in the above publication of the metal emulsion phase is that when the laminated film is heated, it passes between two independent driving rollers and the independent driving is adjusted by the rotation speed of the rollers, and the layer can be controlled. Stretch ratio of the composite film. Specifically, the peripheral speed of the driving roller B is adjusted to be smaller than the peripheral speed of the driving roller A so as to make the laminated film heated under tension. The method described in this publication requires the heating temperature to be equal to or higher than the glass transition temperature of the biaxially stretched plastic film + 70 t or more and lower than the melting point. In the example of this bulletin, it is shown that the laminated film is brought into contact with a heat roller at 23 0 t for 15 seconds (performed in Example 1) and 19 (TC heat roller for 32 seconds under tension). Example 2), an example of contact with a heat roller of 0.90 seconds (Example 3). In other examples of the publication, it is shown that the laminated film is slowly moved between two independently driven rollers. Flow through, while heating in a heating furnace of 170 minutes (Example 4) and 21 minutes in a heating furnace of 2 minutes (Example 5), respectively, heating examples are shown. This method is shown , The moisture permeability of the laminated film (measured under the cup sealing method at 40 t and a relative humidity difference of 90%) was improved from l.jg / m2 · day before heat treatment to 0.6 g / m2 · day after heat treatment. (Example 4). However, this moisture permeability value is far less than the PCTFE film's permeability concentration level (0032/1112. (About 7). Closer, the inventors have found that polyethylene Alcohol and other hygroscopic resin layers

89110249.pt 第7頁 546200 月 案號 89110249 五、發明說明（4) 明多 兩面，直接或透過黏合劑層配置無機氧化物薄膜白勺、 層薄膜進行加熱’則可取得具有優良防濕性能的/、 (PCT/JP98/ 0 1 78 1 )。但是，此防濕薄膜必須# ^方滿薄骐 脂’令樹脂材料之選擇受到限制。又，此防、、县 * “、、生樹 濕度，加上透濕量亦被抑低，故必須經由包含真介^厂逯 高度乾燥處理，將該吸濕性樹脂層乾燥至絕對乾燥的 態。 冑乾軔之狀 本發明之目的為在於提供含有於非吸濕性樹脂居 一面上，形成無機氧化物或金屬之氣相沉積膜^ ^ ^至少 之必須具有非吸濕性樹脂層及氣相沉積膜的多旻θ薄膜 __ / &gt;專膜所構 成，且顯示高度防濕性能之防濕性多層薄膜及其製造方 法0 本發明者等人，為了克服前述先前技術之問題點而進行 致力研究，結果製作出於非吸濕性樹脂層之至少一面上， 形成無機氧化物或金屬之氣相沉積膜之複合薄膜的氣相沉 積膜面，為含有透過黏合劑層，與其他非吸濕性樹脂層面 或其他複合薄膜之氣相沉積膜面疊層之層構造，且與黏含 劑層鄰接層合之氣相沉積膜合計層數（n)為2〜8之多層薄 膜，且其次，令該多層薄膜於未滿丨4 〇 〇c之較低溫下進行 長時間熱處理，則可取得具有匹敵pCTFE薄膜之高度防濕 性能、並且亦具有適度之可撓性和柔軟性之防濕性多層薄 膜。 …、 若根據本發明之方法，則不需令多層薄膜於緊張卞進行 熱處理，且例如以迴捲成滾筒狀之狀態下，於加熱爐中保89110249.pt Page 7 546200 Month No. 89110249 V. Description of the invention (4) There are two sides of the invention. The inorganic oxide film is directly or through the adhesive layer, and the layer film is heated. /, (PCT / JP98 / 0 1 78 1). However, the moisture-proof film must be thin and thin, which limits the choice of resin materials. In addition, the humidity of the tree, the county, the county, the county, and the county are reduced, and the moisture permeability is also reduced. Therefore, it is necessary to dry the hygroscopic resin layer to an absolute dry state by including a high degree of drying treatment including Shinsuke Factory. The purpose of the present invention is to provide a vapor-deposited film containing an inorganic oxide or a metal on one side of a non-hygroscopic resin ^ ^ ^ At least it must have a non-hygroscopic resin layer and gas. Multi-theta film of phase-deposited film __ / &gt; A moisture-resistant multilayer film composed of a special film and showing a high moisture-proof property and a method for manufacturing the same 0 In order to overcome the problems of the foregoing prior art, the inventors As a result of dedicated research, the vapor-deposited film surface of the composite thin film that forms a vapor-deposited film of inorganic oxide or metal on at least one side of the non-hygroscopic resin layer is made of a permeable adhesive layer and other non-hygroscopic resin layers. A layered structure of a vapor-deposited film layer of a hygroscopic resin layer or other composite film, and a multilayer film having a total number of layers (n) of 2 to 8 laminated next to the adhesive layer, and Second, make the multilayer thin Long-term heat treatment at a lower temperature of less than 400 ° C can obtain a moisture-resistant multilayer film that has high moisture-proof performance comparable to that of pCTFE films, and also has moderate flexibility and softness ...., According to the method of the present invention, it is not necessary to heat treat the multilayer film in a tense state, and for example, in a state of being rolled back into a roll, it is maintained in a heating furnace.

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1 號891議Q 曰 立、發明說明（5) 持則可進行熱處理。因 — — 又，本發明之方法可:忐為適於大量生 下進行熱處理。若栌擔 上未滿14 〇 °c之較低溫 知多層薄丄月者等人之實驗結果：二 顯著降低特別若於17〇。。以上之高③下埶處理度,降低之 且亦二更且，本發明之方法，並不:：、：則透濕度 :明之防濕性多、層絕對乾燥之狀態為止。本 战。 月马根據此些發現而到達 之至據=:，為提供含有於非吸濕性樹脂層 合薄犋的防渴性：屏：機乳化物或金屬之氣相沉積膜之複 含有透過黏：劑ΐ =，該複合薄膜的氣相沉積膜面為 合薄骐之氣相η 1 /'一他之非吸濕性樹脂層面或其他複 鄰接層合之t ;冗積膜面所疊層的層構造，且與黏合劑層所 構成’且計層數=2〜8之多層薄膜所 濕度c w ;罩# 一又C、相對濕度1 〇Ο/g條件下所測定之 位=g/m2 · day)為滿足式（1 ) C:0.20 ⑴ 又，=濕性多層薄膜。 至少據本發明，則為提供含有於非°及濕性樹脂層之 七成無機氧化物金屬之氣相沉積膜之複合薄No. 891 meeting Q stands for the invention, description of the invention (5) can be heat treated. Because of this, the method of the present invention can be: 忐 is suitable for heat treatment in large quantities. If the temperature is lower than 140 ° C, the experimental results of those who know multiple layers of thin and thin moons, etc., are as follows: (2) A significant decrease is particularly lower than 170. . The above ③ degree of chin treatment is reduced, and furthermore, the method of the present invention does not ::,: then the moisture permeability: the moisture resistance is clear, and the layer is absolutely dry. This war. Yuema arrived based on these findings =: In order to provide thirst-proofing properties contained in non-hygroscopic resin laminates: screen: organic emulsion or metal vapor-deposited film containing translucent adhesive: Agent ΐ =, the vapor-deposited film surface of the composite film is a thin gas phase η 1 / '-other non-hygroscopic resin layer or other multiple adjacent lamination t; Layer structure, and formed with the adhesive layer, and the number of layers = 2 to 8 humidity cw of the multilayer film; cover # again and again, the relative humidity of 100 / g measured position = g / m2 · day) is to satisfy the formula (1) C: 0.20 ⑴ and = wet multilayer film. According to at least the present invention, it is to provide a composite thin film of a vapor-deposited film containing 70% of an inorganic oxide metal in a non- ° and wet resin layer.

89Π0249,89Π0249,

Ptc 第9頁 546200 _案號 89110249_年月日_修正 _ 五、發明說明（6) 膜的防濕性多層薄膜的製造方法中， (1 )製作複合薄膜之氣相沉積膜面為含有透過黏合劑 層，與其他之非吸濕性樹脂層面或其他複合薄膜之氣相沉 積膜面所疊層的層構造，且與黏合劑層所鄰接層合之氣相 沉積膜合計層數（η )為2〜8之多層薄膜，其次， (2)令該多層薄膜於55 °C以上未滿140 °C之乾熱氛圍氣中 進行1 0小時以上熱處理 為其特徵之防濕性多層薄膜的製造方法。 本發明可經甴以下之詳細說明而完全理解。本發明之進 一步的應用範圍可經由以下之詳細說明而闡明。但是，詳 細之說明及特定之實例為本發明所欲的實施形態，僅為了 說明之目的而記載。業者當可明瞭由此詳細說明所作出的 各種變更、改變，為在本發明之精神及範圍内。 本申請人並未意圖將所記載之任何實施形態均獻於公 眾，且於所揭禾之改變、代替案中，也許於申請專利範圍 内之文句上所不包含者亦於均等論下，視為發明之一部 分。 用以實施發明的最佳形態 本發明之防濕性多層薄膜必須具有非吸濕性樹脂層、氣 相沉積膜、及黏合劑層，且各層分別具有二層以上之多層 薄膜所構成。 1.非吸濕性樹脂層 本發明所使用之所謂的非吸濕性樹脂，為意指吸水率 (JIS K-72 0 9 )通常為1. 0%以下、較佳為0. 8%以下、更佳為Ptc Page 9 546200 _Case No. 89110249_Year_Month_Revision_ V. Description of the Invention (6) In the method for manufacturing the moisture-resistant multilayer film of the film, (1) the vapor-deposited film surface of the composite film is made of transparent Adhesive layer, the layer structure laminated with other non-hygroscopic resin layers or the vapor-deposited film surface of other composite films, and the total number of vapor-deposited films laminated with the adhesive layer (η) It is a multilayer film of 2 ~ 8. Secondly, (2) Manufacture of a moisture-resistant multilayer film characterized by subjecting the multilayer film to a heat treatment in a dry heat atmosphere of 55 ° C to 140 ° C for 10 hours or more. method. The present invention can be fully understood through the following detailed description. Further scope of application of the present invention can be clarified by the following detailed description. However, detailed descriptions and specific examples are intended embodiments of the present invention, and are described only for the purpose of explanation. It should be apparent to those skilled in the art that various changes and modifications from the detailed description are within the spirit and scope of the invention. The applicant does not intend to dedicate any of the recorded implementation forms to the public, and in the changes and substitutions of the disclosed disclosure, perhaps those not included in the text within the scope of the patent application are also considered to be equal. Part of the invention. Best Mode for Carrying Out the Invention The moisture-resistant multilayer film of the present invention must have a non-hygroscopic resin layer, a vapor-deposited film, and an adhesive layer, and each layer should be composed of two or more multilayer films. 1. Non-hygroscopic resin layer The so-called non-hygroscopic resin used in the present invention means water absorption (JIS K-72 0 9), usually 1.0% or less, preferably 0.8% or less Better

89110249.ptc 第10頁 546200 一修正 曰 t號 89110249 五 發明說明（7) 酸：_寺之聚烯烴系樹脂；聚對二 文乙一 &amp;、聚對苯二曱酸丁二酯、聚酞酸r _對本二甲 糸樹脂；聚氣乙烯、聚偏氣乙 —酯等之聚酯 r以基芳香族系樹脂；聚笨乙稀 月女、聚砜等。 本硫、聚醯亞 *由非吸濕性樹脂所構成之層，可 朕=任一種，但以雙軸延拉聚對笨^溽膜或延拉薄 :::為佳。又，非吸濕性樹；二二酉旨等雙轴延 以於該熱處理溫度下，具 非吸濕性樹脂層為 非吸濕性樹脂層之厚度：：; '!!者為佳。 …較佳為8〜2〇〇心、更：為1〇二’但通常為5〜400 樹脂層為雙軸延拉薄膜之情 1 00/m。於非吸濕性 右即為充分。於非吸濕性樹脂層中於1〇〜20㈣左 化劑、紫外線η及收劑、防靜“中,f要’可含有抗氧 劑、難燃劑#添加劑 者色刮、滑劑、可塑 於非吸渴性；^ M &amp; ”、、了文。虱相沉積膜之密合性，可 體處理表：，預先進行電晕放電處理、等離： 理、塗底劑塗ΐ處理等外Ϊ =處理、電子射線照射處 吸濕性樹脂層以透明性優者為佳二塗底劑處理為特佳。非 本？明中’ #吸濕性樹 可於 相沉積膜並且以複合薄至ν —面上，形成氣 氣相沉積膜之非明^ u 、孓式仏使用，但視需要，未形成 之非吸濕性樹脂層亦可使用作為多層薄膜的： 89110249.ptc 第11頁 546200 修正 曰 五、發明說明（8) 構成成合。 .2·無i氧化物i金屬^氣相沉積膜 無機氧化物或金屬之氣相沉積膜為於非吸渴 單面或兩面上形成，但若考片^对脂層的 性，則僅於單面上形成者U夕的可繞性和柔軟 ,^ 办成者為佳0無機氧化物可例；〆 鋁、巩化鋅、氧化錫、氧化銦、氧化鈦万甘不虱化 金屬氧化物；Si〇、Si〇2、及苴，、0入物抑及/、混合物等之 金屬可例示例如銘、金2、么二 鈦、銦、及其混合物等。苴:^ 鎳鈷、鋅、 鋁等之氣相沉積膜為佳，且以氧：：乳化物、鉈、氧化 佳。於石夕氧化物氣相沉積膜中，；沉積膜為特 氣相-積膜可於非吸濕：樹 至h上，經由真空氣相沉生樹脂薄膜)之 學亂相成長法等）、離子電铲、矾相成長法、化 法等則可形成。反應氣相^法為m、/應氣相沉積 之方法。真空氣相沉積法箄^ 虱軋—邊進行氣相沉積 依常法實施。 、，寺為業者所熟知之方法，可分別 氣相沉積膜之厚户赍 2〇〇魏，更佳為30〜^二為二〜’較佳為20〜 防濕性不足，若過 =相/儿積膜之厚度若過薄，則 本身易發生龜裂和剥離:形發，捲曲，1氣相沉積膜 樹脂薄膜亦可使用市 y 4類氣相沉積膜的非吸濕性 用市售。…父佳之市售品可列舉三菱化學 89110249.ptc 第12頁 546200 __案號89110249_年月日 倐正 五、發明說明（9) 興人PAX股份有限公司製之TECRIA Η、TECBARIA U、 TECBARIA Τ、TECBARIA V 等之TECB AR I Α 系列；尾池工業股 份有限公司製之M0S-TH、M0S-TB等之M0S系列等。其均為 於雙軸延拉聚對苯二甲酸乙二酯薄膜（雙軸延拉PET薄膜） 之單面上’形成矽氧化物之氣相沉積膜。其中亦以 TECBARIA系列，就顯著提高熱處理所造成之防濕性能效果 方面而言為佳。 3 ·黏合劍層 本發明為製作具 成無機氧化物或金 膜面，為透過黏合 複合薄膜之氣相沉 處’所謂其他非吸 膜之非吸濕性樹脂 氣相沉積膜之複合 謂其他複合薄膜為 樹脂層之至少— 之複合薄膜。 有令非吸濕性樹脂 屬之氣相沉積膜之 劑層，與其他非吸 積膜面疊層之層構 濕性樹脂層面，為 層（薄膜）之任一者 薄膜的非吸濕性樹 意指同種的複合薄 上，形成無機氧化 層之至少一面上，形 複合薄膜的氣相沉積 濕性樹脂層面或其他 造的多層薄膜。此 指於未形成氣相沉積 表面、或於一面形成 脂層面亦可。又，所 膜’即，於非吸濕性 物或金屬氣相沉積膜 於製作此類客μ炫』 性樹脂層之」面:/ 、,，較佳為使用2枚以上於非吸濕 複合薄膜，並：機氧化物或金屬氣相沉積膜的 樹脂層之兩面來 a 且q 使用非吸濕、性 可為1牧，但若老# π接:膜之祓口厚膜日可，該複合薄膜 匕於罝而π丄考慮可抗性和柔軟性’則較佳a桢田9从、 上於早面形成 马使用2枚以 成礼相-積膑之複合薄膜。又’视需要，亦可89110249.ptc Page 10 546200 First Amendment No. 89110249 Five Descriptions of the Invention (7) Acids: _ Terylene's Polyolefin Resin; Poly-p-Epiphenylene &amp; Polybutylene Terephthalate, Polyphthalic Acid r _ to the present dimethyl resin; polyester gas such as polyethylene gas, polyvinylidene chloride, etc., based on aromatic resins; polyethylene resin, polysulfone, etc. Natural sulfur, polyfluorene * A layer composed of a non-hygroscopic resin can be 朕 = any one, but it is better to use biaxially stretched poly-pure film or thinly stretched :::. In addition, non-hygroscopic trees; biaxial extensions, such as two or two purposes. At this heat treatment temperature, the thickness of the non-hygroscopic resin layer is the thickness of the non-hygroscopic resin layer: '!! ... preferably 8 to 200 centimeters, and more: 10 to 2 'but usually 5 to 400. The resin layer is a biaxially stretched film at 100 / m. Non-hygroscopic right is sufficient. In a non-hygroscopic resin layer, in the range of 10 to 20% of a left-handing agent, ultraviolet light, a collector, and an antistatic agent, f may include antioxidants, flame retardants, additives, color scrapers, slippers, and plastics. Yu non-thirsty; ^ M &amp; The adhesion of the lice phase deposited film can be treated in advance. Table: Corona discharge treatment in advance, plasmon: treatment, primer coating treatment, etc. External treatment = treatment, the hygroscopic resin layer in the electron beam irradiation area is transparent Those with excellent performance are better. Not this? Mingzhong '# hygroscopic tree can be used on the phase deposition film and composite thin to ν-surface to form the gas-phase vapor deposition film non-aqueous ^ u, 仏 type, but if necessary, the unformed non-hygroscopic The flexible resin layer can also be used as a multilayer film: 89110249.ptc Page 11 546200 Amendment V. Description of the invention (8) Composition and combination. .2 · I oxide-free metal ^ Vapor deposition film Inorganic oxide or metal vapor-deposited film is formed on one or both sides of non-thirsty, but if the test film ^ for the lipid layer, only The flexibility and softness of the U-shaped one on one side, ^ It is better to be an inorganic oxide; for example, aluminum, sintered zinc, tin oxide, indium oxide, titanium oxide, etc. Examples of metals such as Si0, Si〇2, and ytterbium, 0, and / or mixtures such as Ming, Au 2, Modium Titanium, Indium, and mixtures thereof.苴: ^ Vapor-deposited films of nickel, cobalt, zinc, aluminum, etc. are preferred, and oxygen :: emulsions, rhenium, and oxidation are preferred. In Shixi oxide vapor-deposited film, the deposited film is a special vapor-deposited film that can be used in non-hygroscopic: tree to h, through the vacuum phase deposition resin film), etc.), Ion shovel, alum phase growth method, chemical method can be formed. The reactive gas phase method is a method of m // vapour deposition. Vacuum Vapor Deposition 箄 ^ Rolling-Vapor Deposition While Performing Normally. The temple is a well-known method for the industry, and can be separately thickened with a vapor-deposited film of 200mm, more preferably 30 ~ ^ 2 is two ~ ', more preferably 20 ~, the moisture resistance is insufficient, if it is too high / If the thickness of the child film is too thin, it is easy to crack and peel: hair shape, curl, 1 vapor-deposited film resin film can also use commercially available 4 types of vapor-deposited film for non-hygroscopicity. . … Fujia ’s products on the market can be listed on Mitsubishi Chemicals 89110249.ptc Page 12 546200 __Case No. 89110249_ Year Month Five, Invention Description (9) TECRIA Η, TEBCARIA U, TECBARIA made by Xingren PAX Co., Ltd. TEC, TECBARIA V, etc. TECB AR I Α series; M0S-TH, M0S-TB and other M0S series manufactured by Oike Industry Co., Ltd. All of them are vapor-deposited films of silicon oxide on one side of a biaxially stretched polyethylene terephthalate film (biaxially stretched PET film). Among them, the TECBARIA series is also excellent in terms of significantly improving the effect of moisture resistance caused by heat treatment. 3 · Adhesive sword layer The present invention is to produce an inorganic oxide or gold film surface, through the vapor deposition of the adhesive composite film 'the so-called other non-absorptive resin non-hygroscopic resin vapor deposition film composite is called other composite The film is a composite film of at least one of the resin layers. There is a non-hygroscopic resin layer of a non-hygroscopic resin, a vapor-deposited film, and a layer of a non-hygroscopic resin layer laminated with a non-hygroscopic resin layer. It means that on the same kind of composite thin film, on at least one side forming an inorganic oxide layer, a vapor-deposited wet resin layer of a composite thin film or another multilayer film is formed. This means that a vapor deposition surface is not formed, or a lipid layer is formed on one side. In addition, the film is, that is, a non-hygroscopic substance or a metal vapor-deposited film on the "face" of the production of this kind of customer-friendly resin layer: / ,, preferably using two or more non-hygroscopic composites Thin film, and: both sides of the resin layer of organic oxide or metal vapor-deposited film come a and q are non-hygroscopic, and the property can be 1 μm, but if the old # π is connected: the thick mouth of the film is OK, the The composite film is better than π 丄 considering resistance and softness. 'Putian 9 is used to form a horse from the upper side. It uses 2 pieces of composite film to form a ceremonial phase-product. Also ’as needed

546200 案號 89110249 卞546200 Case number 89110249 卞

五、發明說明（10) 將未形成氣相沉積膜之非吸濕性樹脂層（* 組合使用。 q〆犋）與複 黏合劑可使用胺基甲酸酯系、丙稀酸系 合薄 mV. Description of the invention (10) Use non-hygroscopic resin layer (* in combination without forming a vapor-deposited film. Q〆 犋) and composite adhesive can use urethane-based, acrylic-based thin m

舶贫劑〜便用胺丞甲酸酯系、丙稀酸系、 種黏合劑。其中亦以胺基曱酸酯系之多聚酯系等 酸酯成分所構成之二液反應型為佳。胺爲成s與聚異&amp; &gt;A I r- r^- 一、、β ^ Τ XV- 〆、肯 L 為經由反應，形成聚醚系聚胺基甲酸酯^二醆酯系黏合 基甲酸酯樹脂，且以形成聚酯系聚胺基甲萨1 4 s旨系聚 較佳之二液反應型胺基曱酸酯系黏合劑可=醋樹月旨為佳。 Moton股份有限公司所市售之釣―5〇2/CA丁1J舉由東洋 AD-57 8A/CAT- 10 等。 、10 ' 黏合劑層之厚度通常為1〜5 〇 “ m，較佳 佳為3〜5 //in左右。黏合劑層較佳為經由^;、2〜10 ，更 氣相沉積膜面或薄膜面上塗佈黏合劑，並層合法，於 形成。黏合劑層形成後，將各層以埶滾筒將其乾燥則可 之常法，進行乾式層合，則可製作多、^壤以壓軋貼合等 4.多層薄膜 日/膜。 關於本發明所使用之多層薄膜的基本性 照圖i〜5—邊予以說明。如圖〗所示般，可—邊參 吸滿性樹脂層1之單面形成氣相沉積膜2 丁於非 ^並：”合薄膜彼此之氣相沉積面對向，且透過—黏合 二^ Γ a，具有「非吸渴性樹脂層/氣相沉積膜/黏合 劑層/氣相沉積膜/非吸濕性樹脂層」之層構造的多層薄 膜:圖2為示=使用於非吸濕性樹脂層！之單面形成氣相沉 積膜2的複口 /專膜X二牧之具有「非吸濕性樹脂層/氣相沉Lean agent ~ amine formate type, acrylic acid type, adhesive. Among them, a two-liquid reaction type composed of acid ester components such as aminopolyester-based polyesters is also preferred. The amine is formed into s and polyiso- &amp; AI r- r ^-I, β ^ T XV- 〆, Ken L through the reaction to form a polyether-based polyurethane ^ diethyl ester-based adhesive group The formate resin is preferably a two-liquid reactive urethane-based adhesive for the purpose of forming a polyester-based polyaminomethaline 1 4 s, which is preferably a polyacetate. Moton Co., Ltd.'s commercially available fishing 502 / CA Ding 1J is provided by Toyo AD-57 8A / CAT-10. The thickness of the 10 'adhesive layer is usually 1 ~ 5 0 "m, preferably about 3 ~ 5 // in. The adhesive layer is preferably through ^ ;, 2 ~ 10, more vapor-deposited film surface or Adhesive is coated on the film surface and laminated. The adhesive layer is formed. After the adhesive layer is formed, the layers are dried by a roller. The conventional method is dry lamination. Lamination, etc. 4. Multi-layer film day / film. The basic pictures of the multi-layer film used in the present invention are described below with pictures i ~ 5. As shown in the figure, you can refer to the absorbent resin layer 1 Vapor deposition film 2 formed on one side 2 Ding Yufei: "The vapor deposition of the composite films face each other, and through-adhesion ^ Γ a, with" non-thirsty resin layer / vapor deposition film / adhesion Agent layer / vapor-deposited film / non-hygroscopic resin layer "multilayer film with a layer structure: Figure 2 is shown = used in non-hygroscopic resin layer! One side of the film forming the vapor deposition film 2 / special film X Ermu's with "non-hygroscopic resin layer / vapor deposition

546200 案號 89Πί)?4.0 五、發明說明⑴） 月 Θ 修正 積膜/黏合劑層/氣相沉積膜 氣相沉積膜/非吸濕性樹脂' 之禮、I枭層/黏合劑層/ 為示出使用於非吸濕性樹脂層層層薄膜。圖3 複合薄膜x二枚，及於非吸濕性樹脂層/之H相沉積臈2之 積膜4之稷合薄膜y二枚合計四枚之具 形成軋相沉 /氣相％積膜/黏合劑層/氣相沉積膜; ，濕性樹腊層 合劑層/非吸濕性樹脂層/氣相沉積膜/黏入^性樹脂層/黏 膜/非吸濕性樹脂層」之層構造的多&gt;層/氣相沉積 圖4為不出製作使用於非吸濕性樹二之 相沉積膜2之複合薄膜χ四 θ ^早面上形成氣 「非，濕性樹脂層/氣相沉積二 吸濕性樹脂層/霉占合劑層/非吸渴性樹；目沉積膜/非 膜例。圖5為示出製作除Y以^入月曰之層構造的多層薄 外，具有與圖4同樣之#構造:〇 ^層〜代替黏合劑層a】以 5所八示有之多層薄膜的“層構造：此些圓1〜 含有上述較佳層構造者，可例示如鈀例1〜5中。 (1)非吸濕性樹脂層/氣 述之多層構造。 非吸濕性樹脂層 積臈’黏合劑層/氣相沉積膜/ (2 )非吸濕性樹脂層/氛相、”并 非吸濕性樹脂層/黏合= 氣 (3)非吸濕性樹脂層/氣 ^積膜/非吸濕性樹脂層 非吸濕性樹脂層/黏合 貝、=合劑層/氣相沉積膜/ 黏合劑層/氣相沉積非吸濕性 89110249.ptc 第15頁 1 546200 月546200 Case No. 89Πί)? 4.0 V. Description of the invention ⑴) Month Θ Correction of build-up film / adhesive layer / vapor-deposited film vapor-deposited film / non-hygroscopic resin's gift, I 枭 layer / adhesive layer / A layer-by-layer film used for a non-hygroscopic resin layer is shown. Fig. 3 Two composite films and two composite films on the non-hygroscopic resin layer / H-phase deposition 臈 2 of the composite film 4 Two composite films y two of which have a rolling phase deposition / gas phase% deposition film / Adhesive layer / Vapor-deposited film; layer structure of "wet tree wax laminate layer / non-hygroscopic resin layer / vapor-deposited film / adhesive resin layer / mucosa / non-hygroscopic resin layer" &Gt; Layer / Vapor Deposition Figure 4 shows the production of a composite film for the non-hygroscopic tree phase deposition film 2 x 4θ ^ formation of gas on the early surface, non-wet resin layer / vapor deposition Two hygroscopic resin layer / mold mixture layer / non-thirsty tree; mesh deposited film / non-film example. Fig. 5 shows the production of a multi-layer thin film with a layer structure in addition to Y. 4 Similarly #structure: 〇 ^ layer ~ instead of the adhesive layer a] "layer structure of the multilayer film shown in Figure 5: These circles 1 ~ those containing the above-mentioned preferred layer structure, can be exemplified as palladium example 1 ~ 5 in. (1) Non-hygroscopic resin layer / multilayer structure. Non-hygroscopic resin laminate 臈 'Adhesive layer / Vapor deposition film / (2) Non-hygroscopic resin layer / Atmosphere, "Not hygroscopic resin layer / adhesive = Air (3) Non-hygroscopic resin Layer / air-laminated film / non-hygroscopic resin layer non-hygroscopic resin layer / adhesive shell = mixture layer / vapor-deposited film / adhesive layer / vapor-deposited non-hygroscopic 89110249.ptc page 15 1 546200 months

J號 89]〗fmQ 曰 一修正 五、發明說明（12) (4)非吸濕性樹月旨層/氣相沉積膜/ &quot; 月曰層/氣相沉積膜/黏合劑； /層/非吸濕性樹 非吸=Γΐ樹脂層/氣相沉積膜/黏合曰劑声/ IU 非及濕性樹脂層/黏合劑 w層/虱相沉積膜/ 黏合劑層/氣相沉積膜以,=:脂層/氣相沉積膜/ (二非:脂層/氣相 月曰層/乳相沉積膜/黏合劑 非吸濕性樹 /黏合劑層/非吸 ^ ^，儿積非吸濕性樹脂層 沉積膜/非吸濕性樹層/氣相沉積膜/黏合劑層/氣相 (月匕二/非-吸士濕性樹脂層/氣相沉積膜/黏合劑声/非；^ ^ ^ ^ ^ #J ^ 』。別層/非吸濕性樹脂層/氣相 ^性树脂層 沉積膜/非吸漯性榭炉思/私人 積膜/黏合劑層/氣相 樹脂層 …知層/黏合劑層/氣相沉積膜/非吸濕性 (8)非吸濕性樹脂層/氣相沉積膜 非吸濕性樹脂層/黏合劑層 二？相沉積膜/ 黏合劑層/氣相沉積膜/非吸渴樹ϋ層/乳相沉積膜/ ^ ^ ^ f ,；; ；·^ ； ； ^ ^ ^ 脂層 孔祁/儿積膜/非吸濕性樹 膜/黏合劑層/氣相沉積膜/ 黏合劑層/氣；…積膜/ 性樹…相沉積膜/黏合劑;;J number 89] fmQ, a correction, five, description of the invention (12) (4) non-hygroscopic tree layer / vapor deposition film / &quot; month layer / vapor deposition film / adhesive; / layer / Non-hygroscopic tree non-absorbent = Γΐ resin layer / vapor deposition film / adhesive agent sound / IU non-wet resin layer / adhesive agent w layer / lice phase deposition film / adhesive agent layer / vapor deposition film, =: Lipid layer / Vapor deposition film / (Two non: lipid layer / Vapor phase layer / Emulsion film / Adhesive non-hygroscopic tree / Adhesive layer / Non-absorbent ^^ Non-hygroscopic resin layer deposited film / non-hygroscopic tree layer / vapor-deposited film / adhesive layer / vapor-phase (Yueji II / Non-hygroscopic resin layer / Vapor deposition film / Adhesive sound / Non; ^ ^ ^ ^ ^ #J ^ ". Other layers / non-hygroscopic resin layer / vapor phase ^ resin layer deposition film / non-absorptive resin stove / private build-up film / adhesive layer / gas phase resin layer ... Layer / adhesive layer / vapor-deposited film / non-hygroscopic (8) non-hygroscopic resin layer / vapor-deposited film non-hygroscopic resin layer / adhesive layer Two? Phase deposition film / adhesive layer / air Phase deposition film / non-thirsty tree shrew layer / milk phase deposition film / ^ ^ ^ f,;;; ^;; ^ ^ ^ lipid Hole Qi / child laminated film / non-hygroscopic tree film / adhesive layer / vapor-deposited film / adhesive layer / gas; laminated film ... / ... of tree deposition film / adhesive ;;

II 89110249.ptc 第16頁 546200 修正II 89110249.ptc Page 16 546200 Correction

案號 89110249 五、發明說明（13) 月旨層 (ίο) 非吸濕性樹脂層/氧i日、v&amp;人 / 成、、Η &amp; &amp; t ρ 相積膜/黏合劑層/氣相沉積膜 /非及濕性柄·知層/黏合劑声/非 、、 /黏合劑層/氣才目沉積膜/===樹脂層/氣㈣積膜 2 膜劑層/氣相沉積膜/非吸渴性 树知層/黏ό诏層/氣相沉積膜/非吸濕性樹脂層 多層薄膜之層構造並不限定於上述。 劑層與鄰接（接觸）疊層之氣相、.冗藉晅入4 :，寻，〇Υ之黏5 :為2〜6。與黏合劑層鄰接之氣相沉積膜合計層數若為3 曰以上，則可輕易安定取得低透濕性之多層薄Μ。隨著氣 相沉積膜之合計層數變多，雖可提高多層薄膜的防濕性” 能，但因令可撓性及柔軟性降低，故使得彎曲加工變難。 又，若氣相沉積膜之合計層數變多，則不經濟。另—方 ，，於氣相沉積膜為一牧之情形中’即使經由熱處理亦難 實現充分低的透濕度。若根據本發明之方法，令氣相沉積 膜之合計層數為2〜6左右，則可取得具有匹敵pCTFE薄膜、 之高度防濕性能（低透濕度）的多層薄膜。氣相沉積膜的合 計層數，通常為根據單面形成氣相沉積膜之非吸濕性樹脂 溥膜的使用枚數而調整。尚，亦可附加存在不鄰接黏合 層的氣相沉積膜。 4 本發明所使用之多層薄膜為如圖i所示般，至少含有二 枚於非吸濕性樹脂層之單面或雙面（較佳為單面）形成益一 氧化物或金屬之氣相沉積膜的複合薄膜（χ)，且，複人' 、 膜之至少二枚為透過黏合劑層，以彼此之氣相沉積膜口予以Case No. 89110249 V. Description of the invention (13) Non-hygroscopic resin layer / oxygen i day, v &amp; person / adult, Η &amp; &amp; t ρ phase buildup film / adhesive layer / gas Phase Deposition Film / Non-wet Handle · Knowledge Layer / Adhesive Acoustic / Non-, / Adhesive Layer / Gascular Membrane Deposition Film / === Resin Layer / Gas Deposit Film 2 Film Agent Layer / Vapor Deposition Film The layer structure of the / non-thirsty tree layer / adhesive layer / vapor deposition film / non-hygroscopic resin layer multilayer film is not limited to the above. The gas phase of the agent layer and the adjacent (contact) stack, the redundant borrowing 4 :, find, the viscosity of 0: 5 ~ 2. If the total number of layers of the vapor-deposited film adjacent to the adhesive layer is 3 or more, a multilayer thin film with low moisture permeability can be easily and stably obtained. As the total number of layers of the vapor-deposited film increases, the moisture-proof performance of the multilayer film can be improved. However, since the flexibility and softness are reduced, bending processing becomes difficult. If the total number of layers increases, it is not economical. On the other hand, in the case where the vapor-deposited film is one grain, it is difficult to achieve a sufficiently low moisture permeability even through heat treatment. If the method according to the present invention makes vapor deposition The total number of layers of the film is about 2 to 6, and a multilayer film with high moisture resistance (low moisture permeability) comparable to that of pCTFE films can be obtained. The total number of layers of a vapor-deposited film is usually a gas phase formed on one side. The number of non-hygroscopic resin 溥 films of the deposited film is adjusted. However, a vapor-deposited film which does not adjoin the adhesive layer may also be added. 4 The multilayer film used in the present invention is as shown in Figure i, at least Composite film (χ) containing two vapor-deposited films of mono-oxide or metal on one or both sides (preferably single-sided) of a non-hygroscopic resin layer, At least two are through the adhesive layer, Deposition film to be port

89110249.ptc 第17頁 546200 _案號89110249_年月日 修正_ 五、發明說明（14) 疊層之層構造者為佳。透過黏合劑層而以彼此之氣相沉積 膜予以疊層之層構造期望為於多層薄膜中，含有1〜4個、 較佳為1〜3個、更佳為1〜2個。於多層薄膜中，含有透過 黏合劑層而以彼此之氣相沉積膜予以疊層之層構造，可於 熱處理後，賦與高度的防濕性能。又，使用二枚以上於單 面形成氣相沉積膜之複合薄膜，並且透過黏合劑層令氣相 沉積膜彼此疊層，則可不損害多層薄膜之可撓性及柔軟 性，並且提高防濕性能。更且，藉由作成此類之層構造， 則可抑制多層薄膜之基本層構造中各層的使用牧數，並且 可確保提高防濕性能所必須的氣相沉積膜合計層數。 本發明所使用之多層薄膜為具有如前述之基本的層構 造，但在提高強度和耐熱性、賦與熱封性等之目的下，視 所欲，可配置一層以上不具有氣相沉積膜之樹脂層，作為 最内層、最外層、或中間層。此類附加之樹脂層較佳為由 具有透明性之合成樹脂所構成之層。此類附加之樹脂層可 使用同於前述非吸濕性樹脂層者。又，附加之樹脂層例如 可使用聚乙烯醇（PV A)與聚（曱基）丙烯酸或其部分中和物 之混合物所形成的熱處理薄膜（特開平6 - 2 2 0 2 2 1號公報）、 糖類與聚（曱基）丙烯酸或其部分中和物之混合物所形成的 熱處理薄膜（特開平7- 1 6 5 94 2號公報）等之阻氣性薄膜、於 熱塑性樹脂層之至少單面上形成此等阻氣性薄膜的複合薄 膜。附加性的樹脂層除了上述以外，亦可使用由P V A、乙 烯- g香酸乙烯醋共聚物鹼化物（EV0H)、聚醯亞胺等之吸濕 性樹月旨所構成之層。於附加性的樹脂層中，視所欲，可含89110249.ptc Page 17 546200 _Case No. 89110249_ Year, Month, Date, Amendment_ V. Description of the invention (14) It is better to have a layered structure. It is desirable that the layer structure laminated with each other's vapor-deposited films through the adhesive layer is 1 to 4, preferably 1 to 3, and more preferably 1 to 2 in a multilayer film. The multilayer film includes a layer structure in which vapor-deposited films are laminated with each other through an adhesive layer, which can impart a high degree of moisture resistance after heat treatment. In addition, by using two or more composite films forming a vapor-deposited film on one side and laminating vapor-deposited films on each other through an adhesive layer, the flexibility and softness of the multilayer film can be prevented, and the moisture-proof performance can be improved. . Furthermore, by making such a layer structure, the number of layers used in the basic layer structure of the multilayer film can be suppressed, and the total number of vapor-deposited films necessary to improve the moisture-proof performance can be ensured. The multilayer film used in the present invention has the basic layer structure as described above, but for the purpose of improving strength and heat resistance, imparting heat sealability, etc., as required, more than one layer can be arranged without a vapor deposition film. The resin layer serves as the innermost, outermost, or intermediate layer. Such an additional resin layer is preferably a layer composed of a synthetic resin having transparency. Such an additional resin layer may be the same as the aforementioned non-hygroscopic resin layer. As the additional resin layer, for example, a heat-treated film formed of a mixture of polyvinyl alcohol (PV A) and poly (fluorenyl) acrylic acid or a partially neutralized product thereof can be used (Japanese Patent Application Laid-Open No. 6-2 2 0 2 21) , Gas-barrier films such as heat-treated films (Japanese Patent Application Laid-Open No. 7- 1 6 5 94 2) formed from a mixture of sugars and poly (fluorenyl) acrylic acid or a partially neutralized product thereof, on at least one side of a thermoplastic resin layer A composite thin film having such a gas barrier film formed thereon. As the additional resin layer, in addition to the above, a layer composed of a hygroscopic tree such as PVA, an ethylene-vinyl acetate copolymer base (EVOH), or polyimide may be used. In the additional resin layer, it may contain

89110249.ptc 第18頁 546200 _案號89110249_年月曰 修正_ 五、發明說明（15) 有紫外線吸收劑及用以進行EL元件色轉變之顏料等添加 劑。 為了對本發明之防濕性多層薄膜賦與熱封性，可在最内 層（實施熱封之層）配置熱封性樹脂層。熱封性樹脂層例如 以聚稀烴系熱熔型密封膠層、環氧系熱熔型密封膠層等為 佳。It匕密封膠層之厚度通常為1 0〜3 0 0 // m左右。使用本發 明之防濕性多層薄膜，將EL元件本體封入之情形中，亦可 將熱封性樹脂層僅配置於包圍EL元件本體之部位。此些附 加性的樹脂層可分別單獨、或與其他樹脂層組合使用。 又，此些附加性的樹脂層可透過黏合劑層，配置於多層薄 膜中的指定位置，但視情況，亦可不使用黏合劑層進行熱 炫接。更且，附加性的樹脂層可在多層薄膜之熱處理後’ 於該多層薄膜之單面或雙面進行疊層。熱熔型密封膠層較 佳於多層薄膜之熱處理後進行疊層。 具有如前述基本層構造之多層薄膜、及配置附加性樹脂 層的多層薄膜，較佳為均具有透明性。此處，透明性之程 度雖根據使用目的而異，但例如將防濕性多層薄膜使用作 為EL元件本體之防濕材料時，必須具有可令來自發光層之 光透過的透明程度。 5.熱處理 本發明之製造方法為令多層薄膜（包含配置附加性的樹 脂層）於特定之條件下進行熱處理，令防濕性能顯著提 高。使用二液反應型胺基甲酸酯系黏合劑等反應性黏合劑 作為黏合劑時，先進行熱處理，並且進行黏合劑反應用之89110249.ptc Page 18 546200 _Case No. 89110249_Year Month Amendment _ V. Description of the invention (15) There are additives such as ultraviolet absorbers and pigments for color conversion of EL elements. In order to impart heat-sealability to the moisture-resistant multilayer film of the present invention, a heat-sealable resin layer may be disposed on the innermost layer (the layer to be heat-sealed). The heat-sealable resin layer is preferably, for example, a polyolefin-based hot-melt sealant layer, an epoxy-based hot-melt sealant layer, or the like. The thickness of the It sealant layer is usually about 10 to 3 0 0 // m. When the EL element body is enclosed using the moisture-proof multilayer film of the present invention, the heat-sealable resin layer may be disposed only at a portion surrounding the EL element body. These additional resin layers may be used individually or in combination with other resin layers. In addition, these additional resin layers can be arranged at a specified position in the multilayer film through the adhesive layer, but depending on the circumstances, thermal bonding can be performed without using the adhesive layer. Furthermore, the additional resin layer can be laminated on one or both sides of the multilayer film after the heat treatment of the multilayer film. Hot-melt sealant layers are better than lamination of multilayer films after heat treatment. The multilayer film having the basic layer structure as described above and the multilayer film in which an additional resin layer is disposed are preferably both transparent. Although the degree of transparency varies depending on the purpose of use, for example, when a moisture-resistant multilayer film is used as a moisture-proof material for the EL element body, it must have a degree of transparency that allows light from the light-emitting layer to pass through. 5. Heat treatment The manufacturing method of the present invention is to heat-treat a multilayer film (including a resin layer with additional configuration) under specific conditions, thereby significantly improving the moisture resistance. When using reactive adhesives such as two-liquid reactive urethane-based adhesives as the adhesive, heat treatment is performed first, and the adhesive is reacted.

89110249.ptc 第19頁 546200 __案號 89110249__年月 曰—_ 五、發明說明（16) 熟化處理。於多層薄膜之製造步驟中，對黏合劑層使用胺 基甲酸酯系黏合劑製作多層薄膜時，於30〜5〇 °c之溫度範 圍進行24小時以上之黏合劑熟化處理後，進行熱處理為 佳。熟化處理溫度若過低，則硬化反應變成過慢，若過高 則因氣泡生成而冒泡，對於透濕度造成不良影響。熟化處 理溫度以4 0 °C前後為更佳。熟化處理時間較隹為2 4小時（1 曰）〜168小時（7日），更佳為48小時（2日）〜96小時（4曰） 左右。 °C以上未滿 &gt;熱處理溫 理溫度若過 間，使得生 令透濕度降 適當。熱處 二。熱處理 但若由生產 佳。熱處理 則為1 2 0 0小89110249.ptc Page 19 546200 __Case No. 89110249__Year Month Said —_ 5. Description of the invention (16) Ripening treatment. In the manufacturing process of the multilayer film, when a urethane-based adhesive is used for the adhesive layer to make the multilayer film, the adhesive is aged for more than 24 hours at a temperature range of 30 to 50 ° C, and then heat-treated as follows: good. If the curing temperature is too low, the hardening reaction becomes too slow, and if it is too high, bubbles will be generated due to the generation of bubbles, which will adversely affect the moisture permeability. The curing temperature is preferably around 40 ° C. The curing time is about 24 hours (1 day) to 168 hours (7 days), and more preferably about 48 hours (2 days) to 96 hours (4 days). Less than ° C &gt; If the heat treatment temperature is too short, the moisture permeability will be reduced appropriately. Hot place Heat treatment but good if produced. Heat treatment is 1 2 0 0 small

多層薄膜之熱處理步驟為將多層薄膜，於55 1 4 0 °C之乾熱氛圍氣中進行熱處理1 〇小時以上 度較佳為60〜130 °C，更佳為7〇〜120 °C。熱處 低，則令多層薄膜透濕度充分降低上需要長時 產性降低。另一方面，熱處理溫度若過高，則 低1艾用效果小，或者產生透濕度變不 =;為30小時以上，更佳為100小時以」 ΤΓ間於熱處理〉昆声古R士曰d &amp; , W#日 瓜度回日守則為短，低時則為長，The heat treatment step of the multilayer film is to heat treat the multilayer film in a dry heat atmosphere at 55 1 40 ° C for more than 10 hours, preferably 60 to 130 ° C, and more preferably 70 to 120 ° C. If the heat is low, it will take a long time to reduce the moisture permeability of the multilayer film. On the other hand, if the heat treatment temperature is too high, the effect will be lower if the temperature is lower than 1%, or the moisture permeability will not be changed; it is more than 30 hours, more preferably 100 hours. &amp;, W # The rule of returning to the sun is short, when it is low, it is long.

性之觀點而言，則 A ^ , , 則以女疋取得小透濕度值者為 時^右。、5無特別，但於熱處理溫度低時，From a sexual point of view, then A ^,, and when the son-in-law has obtained a small moisture permeability value ^ right. , 5 is not special, but when the heat treatment temperature is low,

下進行。：Ϊ:須在多層薄膜緊張下實施，其可在非緊張 下以高溫進:ϊ ί (門特之開/^3 0054 9號公報）雖指示於緊張 層薄膜予以埶處理日l l處理，但在將本發明層構造之多 低溫度進行；時門:考々人驚訝地，藉由在非緊張下以較 曰…、處理’則可取得具有可匹敵PCTFE薄Carry on. ： Ϊ: Must be implemented under tension of multi-layer film, which can be advanced at high temperature without tension: 门 (Ment. Kai / ^ 3 0054 No. 9) Although it is instructed to perform treatment on the tension layer film, At the low temperature at which the layer structure of the present invention is performed; the time gate: surprisingly, by non-stressed, the processing can be achieved with a PCTFE thin

第20頁 546200 修正 _____案號 89110249 年 a 五、發明說明（17) 膜防濕性能之多層薄膜。以工業性規模實施熱處理上，較 佳採用將多層薄膜以迴捲成滾筒狀之狀態下，於調整至指 定溫度之加熱爐中，保持指定時間之方法。若採用此類熱 處理法，則可不必將多層薄膜在緊張下加熱，故即使熱處 理時間為呈較長之時間，亦可大量處理，並不會損害生產 性。 本發明為經由熱處理，取得於溫度40 °C、相對濕度1 〇〇% 條件下測定之透濕度為〇 . 1 0 g / · d a y以下，較佳為 0.08g/m2 .day以下，更佳為〇.06g/m2 .day以下之具有高 度防濕性能之防濕性多層薄膜。許多情況可取得透濕度為 〇，〇5g/m2 .day 以下、最佳為0·02 〜〇.〇4g/m2 .day 之防漏 性多層薄膜。於相同條件所測定之PCTFE薄膜的防濕度為 〇· 〇3g/m2 · day左右，故可知若根據本發明，則可取得具 有匹敵PCTFE薄膜防濕性能之防濕性多層薄膜。 隨著令多層薄膜中的複合薄膜枚數變多，則透濕度變 小，但若根據本發明，則可取得滿足下述式（j ) W ^ (1/n)X 0. 20 ⑴ [式中，η為與黏合劑層鄰接疊層之氣相沉積膜的合計層 數，W為透濕度（單位=g/m2 · day) ] 、 °曰 關係之防濕性多層薄膜。更具體而言，例如於圖i所示般 之與黏合劑層鄒接疊層之氣相沉積膜合計層數為2 (η = 2 ) 之多層薄膜之愔況，經由熱處理，則可達成0 · 1 〇g/m2 · day以下之透濕度。 關於熱處理溫度與熱處理時間與透濕度之關係，解析實Page 20 546200 Amendment _____ Case No. 89110249 a. V. Description of the invention (17) Multilayer film with moisture-proof performance. For industrial scale heat treatment, it is better to keep the multilayer film in a roll-shaped state and keep it for a specified time in a heating furnace adjusted to a specified temperature. If such a heat treatment method is used, it is not necessary to heat the multilayer film under tension, so even if the heat treatment time is a long time, it can be processed in large quantities without compromising productivity. In the present invention, the moisture permeability measured under the conditions of a temperature of 40 ° C and a relative humidity of 100% is 0.10 g / · day or less, preferably 0.08g / m2.day or less, more preferably Moisture-resistant multilayer film with high moisture-proof performance below 0.06g / m2.day. In many cases, it is possible to obtain a leak-proof multilayer film having a water vapor transmission rate of 0,05 g / m2.day or less, and preferably, 0.02 to 0.04 g / m2.day. The moisture resistance of the PCTFE film measured under the same conditions is about 0.03 g / m2 · day. Therefore, it can be understood that according to the present invention, a moisture-resistant multilayer film having a moisture resistance performance comparable to that of a PCTFE film can be obtained. As the number of composite films in the multilayer film increases, the moisture permeability decreases, but according to the present invention, it can be obtained that satisfies the following formula (j) W ^ (1 / n) X 0. 20 ⑴ [Formula Here, η is the total number of layers of the vapor-deposited film laminated adjacent to the adhesive layer, and W is a moisture-resistant multilayer film having a relationship of moisture permeability (unit = g / m2 · day)] °. More specifically, for example, in the case of a multilayer film with a total number of layers (2 = η = 2) of a vapor-deposited film laminated with an adhesive layer as shown in FIG. · 10 gram / m2 · Penetrability below day. The relationship between heat treatment temperature, heat treatment time, and moisture permeability is analyzed.

89110249.ptc89110249.ptc

546200 案號 89110249 曰 修正 五、發明說明（18) ♦ 驗數攄，結果可判定成立如下述之關係式。即，將多層薄 膜之透濕度（W)作成（1/n) X 0· 2〇S/m2 · day以下，則於T = 熱處理時間（Hr )、t =熱處理溫度（K)時，較佳於滿足下列 關係式（I)之條件下進行熱處° T - 3 X ΙΟ1。X t-4·5184 ⑴ 即，於55t：( 3 28K)以上未滿140°C(413K)之範圍内設定 熱處理溫度t(K)時，令多層薄膜之透濕度作成（1/n) x 0 · 2 0 g / m2 · d a y以下，則於其熱處理溫度下進行T小時（H r) 以上之熱處理。 於多層薄膜之透濕度作成（l/n)x 〇.i6g/m2 .day以下， 則較佳於滿足下列關係式（11)之條件下進行熱處理。 T - 2 X 1 Ο11 X t_4.6651 於多層薄膜之透濕 則較佳於滿足下列關 T ^ 3 X 1 Ο10 X f41345 尚，式（I )之t的次 為-4· 6 651、式（I π) 6.用途 本發明之防濕性多 如，V使用作為食品 封裝材料。本發明之 薄膜的防濕性，且特 薄膜。 列舉具體例，說明 (II) 度作成（l/n)x 〇.i2g/m2 .day 以下， 係式（I I I)之條件下進行熱處理。 (III) 方數為-4· 5184、式（U)之t的次方數 之ΐ的次方數為—4. 1345。 層為活用高度的防濕性能，例 防:藥品、電子零件等之包裝材料和 Μ :生多層薄膜可發揮匹敵於PCTFE 、於作為EL元件本體之封裝用封裝 只月之防濕性多層薄膜為適於作為546200 Case No. 89110249 said Amendment V. Description of the invention (18) ♦ After checking the number, the result can be determined as follows. That is, when the moisture permeability (W) of the multilayer film is made (1 / n) X 0 · 2〇S / m2 · day or less, it is better when T = heat treatment time (Hr) and t = heat treatment temperature (K). The heat treatment is performed under the conditions satisfying the following relation (I) ° T-3 X 1001. X t-4 · 5184 ⑴ That is, when the heat treatment temperature t (K) is set within the range of 55t: (3 28K) and less than 140 ° C (413K), the moisture permeability of the multilayer film is made (1 / n) x 0 · 2 0 g / m2 · day or less, heat treatment for more than T hours (H r) at its heat treatment temperature. If the multilayer film is made to have a moisture permeability of (l / n) x 〇.i6g / m2 .day or less, the heat treatment is preferably performed under the condition that the following relationship (11) is satisfied. T-2 X 1 〇11 X t_4.6651 The moisture permeability in multilayer films is better to satisfy the following relations T ^ 3 X 1 Ο10 X f41345, the order of t of formula (I) is -4.66 651, formula ( I π) 6. Uses The present invention has as many moisture resistance properties as V, which is used as a food packaging material. The film of the present invention has moisture resistance and is particularly thin. A specific example will be described, and the heat treatment is performed under the conditions of the formula (I I I) below (1 / n) x 〇.i2g / m2 .day. (III) The power is -4.5184, and the power of t in the formula (U) is -4.1345. The layer has a high degree of moisture resistance. For example, packaging materials for pharmaceuticals and electronic parts, and M: green multilayer films can compete with PCTFE. The moisture-resistant multilayer films used as packaging for EL element bodies are only Suitable as

89110249.ptc 546200 月 曰 修正 案號 89110249 五、發明說明（19) EL兀件本體之防濕材料的情 截面模式圖。圖6所示之EL ζ凡件例的 ⑽、與設置電極64之基板65件為夹^ 件本f ’以一對防濕材料66及67予以“所構成i:EL 二二對電⑽及64為分別連接導線，經由來自 對發光層61外加電場。基板63及65為以至ίί 外：m和玻璃板等透明基板，令來自發光層的光往 等及64為由金屬和1m銦錫複合氧化物） 等所形成，並且其至少-者作成透明，令 因此，於基板63和電極62為 im;併作為基板電極。el元件本體可為數個= 材料;以；；：；疊層’並將數舰元件本體集合以防濕 層薄=== =料66及67之至少一者可由本發明之防濕性多 士曰σ ’，於一冓成，且另一者為玻璃基板和金屬板亦可。例 μ + j 一者之防濕材料67為玻璃基板之情形中，可省略JL ^板65，並於玻璃基板上設置電極64亦可。- it; 二防=f 67 ί本發明之防濕性多層薄膜時，可使用二枚 可。、、、生夕層/專膜，但以一牧之防濕性薄膜重覆使用亦 圖/所2不出本發明對象EL元件之另一例的截面模式圖。 (鋁落兀件為在透明導電薄膜（IT0)73及背面電極 / 之間’具有以有機黏合劑所固定之粉末螢光體所89110249.ptc 546200 Month Amendment Case No. 89110249 V. Description of the Invention (19) Moisture-proof material of EL element. In the example of EL ζ shown in FIG. 6, 65 pieces of substrates provided with electrodes 64 are sandwiched. The f ′ is composed of a pair of moisture-proof materials 66 and 67. 64 is a connection wire respectively, and an electric field is applied to the light-emitting layer 61 from the substrates. Substrates 63 and 65 are even ίί: transparent substrates such as m and glass plates, so that light from the light-emitting layer is equal, and 64 is composed of metal and 1m indium tin Oxide), etc., and at least one of them is made transparent, so that the substrate 63 and the electrode 62 are im; and as the substrate electrode. The el element body can be several = materials; Assembling several ship element bodies to make the moisture-proof layer thin ==== At least one of materials 66 and 67 can be formed by the moisture-proof toast σ ′ of the present invention, and the other is a glass substrate and metal For example, in the case where the moisture-proof material 67 of μ + j is a glass substrate, the JL ^ plate 65 may be omitted, and an electrode 64 may be provided on the glass substrate.-It; 二 防 = f 67 ί 本When inventing the moisture-resistant multilayer film, two can be used .. ,,, and the original layer / special film, but the moisture-resistant film of Yimu is repeated Another example of a cross-sectional schematic view of the EL element of the present invention is not shown in the figure. (The aluminum element is fixed between the transparent conductive film (IT0) 73 and the back electrode / with an organic adhesive. Powder phosphor

Ptc 89110249. 第23頁Ptc 89110249. Page 23

I 546200 案號 89110249I 546200 Case No. 89110249

五、發明說明（20) 構成的發光層7 4、及其單側夾住防止破壞絕緣用之介電體 層75之構造。圖7之EL元件為***除濕用之吸濕薄膜72及&amp; 77，並且以防濕材料71及78予以封裝。若使用本/發明之防 濕性多層薄膜作為防濕材料71及78，則可取得具^牟軟性5. Description of the invention (20) The structure of the light-emitting layer 7 4 and its one side sandwiching the dielectric layer 75 for preventing damage to the insulation. The EL element in FIG. 7 is a moisture-absorbing film 72 and &amp; 77 inserted for dehumidification, and is packaged with moisture-proof materials 71 and 78. If the moisture-resistant multilayer film of the present invention is used as the moisture-proof materials 71 and 78, softness can be obtained.

之EL元件。 -木人 實施你J 以下列舉實施例及比較例，更加具體說明本發明。尚 物性之^測定法為如下。 (1) 透濕度 透濕度為以ASTM F - 1249(JIS K-7129B法）為準，使用EL element. -Mu Ren implement you J The following examples and comparative examples are given to explain the present invention more specifically. The physical property measurement method is as follows. (1) Moisture permeability The moisture permeability is based on ASTM F-1249 (JIS K-7129B method).

Modern Control公司製水蒸氣穿透試驗機 P E R M A T R A N - W 3 / 3 1 S W進行測定。具體而言，將測定對象之 扁平的多層薄膜（試驗片）於擴散元件上固定，使用擴散元 件為透過試驗片而隔成乾燥室及調濕室。將擴散元件全體 於40 °C之氛圍氣下’經時地，令試驗片之溫度為4(rc。由 試驗片隔開前開始，將乾燥室曝露於乾燥氮氣流中，將另 一者之5周濕至，以含有瘵餾水之海綿曝露於相對濕度丨〇⑽ 並且於氮氣流下。將兩室以試驗片隔開後，若經過1小時 左右之時間’則乾燥室之相對濕度為呈〇%，且調濕室之相 對濕度為呈100% ’故由此時開始測定透濕度。通過試驗 片，由調濕室透過至乾燥室的水蒸氣為混入乾燥氮流中， 並且被運迗到紅外線感應器。經由紅外線感應器’測定水 蒸氣所吸收之紅外線能量之比例並且以電訊號型式取出， 藉此可算出透濕度。根據此方法’測定多層薄膜於溫度40The water vapor transmission tester P E R M A T R A N-W 3/3 1 SW manufactured by Modern Control was used for measurement. Specifically, a flat multilayer film (test piece) to be measured is fixed to a diffusing element, and the diffusing element is used to divide the test piece into a drying chamber and a humidity-controlling chamber. The entire diffusion element was placed in an atmosphere of 40 ° C over time, so that the temperature of the test piece was 4 (rc.) Before the test piece was separated, the drying chamber was exposed to a stream of dry nitrogen, and the other After 5 weeks of humidity, the sponge containing distilled water was exposed to relative humidity 丨 0⑽ and under nitrogen flow. After separating the two rooms with test pieces, if the time of about 1 hour elapsed, the relative humidity of the drying room was 〇%, and the relative humidity of the humidity control room is 100% 'so the moisture permeability measurement was started at this time. Through the test piece, the water vapor transmitted from the humidity control room to the drying room was mixed into the dry nitrogen stream and was transported. To the infrared sensor. Through the infrared sensor 'measure the ratio of infrared energy absorbed by water vapor and take it out as a signal type, so that the moisture permeability can be calculated. According to this method' measure the multilayer film at temperature 40

89110249.pt 第24頁 546200 _案號 891 1024fl 五、發明說明（21) 曰 修正 1 度1〇〇%條件下的透濕度（單位1/m2 ._)。 ⑺^件的發光亮度保持率 罟0 | 士 /水口口’方；溫度6 0 〇C 、相對濕度9 0 %之條件下放 4()()Hz 、^後’於室溫下連接工作電壓100V、工作周波數 厣並測+W，、測定初期發光亮度Lq，其次’依舊外加電 $ ^ 2方、室脏下經過7 5 〇小時後的發光亮度l，且根據 下式，鼻出發光亮度保持率。 發光亮度保持率)x 100U) [貫施例1 ] ，Γ =具有圖1所示層構造之防濕性多層薄膜。此多層薄 、g構造由外面至内面為如下。 一匕开二成砂氧化物氣相沉積膜之雙軸延拉聚對苯二曱酸乙 ^ S曰缚膜[三菱化學興人Pax(股）製「TECBARIA Η」、厚度 1 V (氣相沉積膜於内面側）、 月女基曱酉文®曰系點合劑層[東洋Μ 〇 t ο η (股）製 502/CAT-10」、厚度3 5&quot;m]、 (f ) t =成石夕氧化物氣相沉積膜之雙軸延拉聚對苯二曱酸乙 一知〉專膜[三菱化學興人Pax(股）製「TECBARIA Η」、厚度 1 2 # m ](氣相沉積膜於外面側）。 依據乾式疊層法，透過胺基曱酸酯系黏合劑將各層疊 層’取得透明的多層薄膜。多層薄膜為迴捲成滚筒狀。將 此夕層溥膜於4 〇 C下熟化處理7 2小時。其次，將迴捲成滾 筒狀之狀態的多層薄膜，投入調整至12 〇 r之加熱爐中，89110249.pt Page 24 546200 _Case No. 891 1024fl V. Description of the invention (21) Modified the moisture permeability at 1 ° 100% (unit 1 / m2._). The luminous brightness retention rate of the unit is 罟 0 | person / shuikoukou; put 4 () () Hz, ^ after the temperature of 60 ℃, relative humidity of 90%, and connect the working voltage at room temperature 100V ， Working frequency and measurement of + W ， Measure the initial luminous brightness Lq ， Secondly ， still add power ^ 2 square, luminous brightness l after 750 hours under the chamber dirty, and according to the following formula, the luminous brightness is nasal Retention rate. Luminous brightness retention rate) x 100U) [Example 1], Γ = moisture-resistant multilayer film having a layer structure shown in FIG. 1. This multilayer thin, g structure is as follows from the outside to the inside. Biaxially-stretched poly (ethylene terephthalate) film made of two-layered sand oxide vapor-deposited film ["TECBARIA 人" manufactured by Mitsubishi Chemical Co., Ltd. Pax (stock), thickness 1 V (vapor phase The deposited film is on the inner surface side), Yue Nu Ji 曱 酉 曱 酉 曰 series point mixture layer [502 / CAT-10 made by Toyo M o t ο (share), thickness 3 5 &quot; m], (f) t = cheng Biaxially stretched poly (ethylene terephthalate) film of Shixi oxide vapor-deposited film> Special film ["TECBARIA Η" manufactured by Mitsubishi Chemical Co., Ltd. Pax (stock), thickness 1 2 # m] (Vapor-deposited film On the outside side). According to the dry lamination method, each laminated layer 'was obtained through an amino-based adhesive to obtain a transparent multilayer film. The multilayer film is rolled into a roll shape. This layer was cured at 4 ° C for 72 hours. Next, the multi-layer film rolled into a roll shape is put into a heating furnace adjusted to 120 12,

546200 _案號89110249_年月曰 修正__ 五、發明說明（22) 且保持1 4 0小時進行熱處理。結果示於表1。 [比較例1 ] 於實施例1中，除了於熟化處理後未進行熱處理以外’ 同樣處理，取得多層薄膜。結果示於表1。 [實施例2 ] 製作具有圖2所示層構造之防濕性多層薄膜。此多層薄 膜之層構造由外面至内面為如下。 (1) 形成矽氧化物氣相沉積膜之雙軸延拉聚對苯二曱酸乙 二酯薄膜[三菱化學興人Pax(股）製「TECBARIA Η」、厚度 1 2 // m ](氣相沉積膜於内面側）、 (2 ) 胺基甲酸酯系黏合劑層[東洋Μ 〇 t ο η (股）製 「AD— 5 02/CAT-10」、厚度3.5/zm]、 (3 ) 形成矽氧化物氣相沉積膜之雙軸延拉聚對苯二甲酸乙 二酯薄膜[三菱化學興人Pax(股）製「TECBARIA Η」、厚度 1 2 // m ](氣相沉積膜於外面側）、 (4) 胺基曱酸酯系黏合劑層[東洋Mo ton (股）製 「AD—502/CAT-10」、厚度3.5//m]、 (5 ) 形成矽氧化物氣相沉積膜之雙軸延拉聚對苯二曱酸乙 二酯薄膜[三菱化學興人Pax(股）製「TECBARIA Η」、厚度 1 2 // m ](氣相沉積膜於外面側）。 依據乾式疊層法，透過胺基曱酸酯系黏合劑將各層疊 層，取得透明的多層薄膜。多層薄膜為迴捲成滾筒狀。將 此多層薄膜於4 〇 °C下熟化處理7 2小時。其次，將迴捲成滾 筒狀之狀態的多層薄膜，投入調整至1 〇 〇 t之加熱爐中，546200 _Case No. 89110249_ Year Month Amendment __ 5. Description of the invention (22) and keep it for 140 hours for heat treatment. The results are shown in Table 1. [Comparative Example 1] In Example 1, a multilayer film was obtained in the same manner except that heat treatment was not performed after the aging treatment. The results are shown in Table 1. [Example 2] A moisture-resistant multilayer film having a layer structure shown in Fig. 2 was produced. The multilayer structure of this multilayer film from the outside to the inside is as follows. (1) Biaxially stretched poly (ethylene terephthalate) film forming a silicon oxide vapor-deposited film ["TECBARIA Η" manufactured by Mitsubishi Chemical Co., Ltd. Pax (stock), thickness 1 2 // m] (gas Phase deposited film on the inner side), (2) urethane-based adhesive layer [Toyo M 〇 t ο η (AD-5 02 / CAT-10), thickness 3.5 / zm], (3 ) Biaxially stretched polyethylene terephthalate film forming a silicon oxide vapor-deposited film ["TECBARIA Η" manufactured by Mitsubishi Chemical Co., Ltd., Pax Corporation, thickness 1 2 // m] (Vapor-deposited film On the outer side), (4) Amino acid ester-based adhesive layer ["AD-502 / CAT-10" manufactured by Toyo Moton Co., Ltd., thickness 3.5 // m], (5) Silicon oxide gas is formed Phase-deposited film of biaxially stretched poly (ethylene terephthalate) film ["TECBARIA Η" manufactured by Mitsubishi Chemical Co., Ltd. Pax Corporation, thickness 1 2 // m] (vapor-deposited film on the outer side). According to the dry lamination method, each layer was laminated through an amino-based adhesive to obtain a transparent multilayer film. The multilayer film is rolled into a roll shape. This multilayer film was aged at 40 ° C for 72 hours. Next, put the multilayer film rolled into a roll shape into a heating furnace adjusted to 1000 t,

89110249.ptc 第26頁 546200 _案號 89110249_年月日__ 五、發明說明（23) 且保持2 5 0小時進行熱處理。結果示於表1。 [比較例2 ] 於實施例2中，除了於熟化處理後未進行熱處理以外， 同樣處理，取得多層薄膜。結果示於表1。 [實施例3] 製作具有圖3所示層構造之防濕性多層薄膜。此多層薄 膜之層構造由外面至内面為如下。 (1 ) 形成矽氧化物氣相沉積膜之雙軸延拉聚對苯二曱酸乙 二酯薄膜[三菱化學興人Pax(股）製「TECBARIA Η」、厚度 1 2 // m ](氣相沉積膜於内面側）、 (2 ) 胺基甲酸醋系黏合劑層[東洋Μ 〇 t ο η (股）製 「AD- 5 02/CAT-1 0」、厚度 3.5/zm]、 (3 ) 形成矽氧化物氣相沉積膜之雙轴延拉聚對苯二曱酸乙 二酯薄膜[三菱化學興人Pax (股）製「TECBARIA Η」、厚度 1 2 // m ](氣相沉積膜於外面側）、 (4) 胺基甲酸酯系黏合劑層[東洋Mo ton (股）製 「AD- 5 02/CAT-1 0」、厚度 3.5/zm]、 (5 ) 形成矽氧化物氣相沉積膜之雙軸延拉聚對苯二曱酸乙 二酯薄膜[尾池工業（股）製「M0S-TH」、厚度12#m](氣相 沉積膜於内面側）、 (6) 胺基甲酸酯系黏合劑層[東洋Mo ton (股）製 「AD- 5 02/CAT-1 0」、厚度 3.5//m]、 (7 ) 形成矽氧化物氣相沉積膜之雙軸延拉聚對苯二曱酸乙 二酯薄膜[尾池工業（股）製「M0S-TH」、厚度12 //m](氣相89110249.ptc page 26 546200 _ case number 89110249_ year month day__ 5. Description of the invention (23) and keep it for 250 hours for heat treatment. The results are shown in Table 1. [Comparative Example 2] In Example 2, a multilayer film was obtained in the same manner except that the heat treatment was not performed after the aging treatment. The results are shown in Table 1. [Example 3] A moisture-resistant multilayer film having a layer structure shown in FIG. 3 was produced. The multilayer structure of this multilayer film from the outside to the inside is as follows. (1) Biaxially stretched poly (ethylene terephthalate) film forming a silicon oxide vapor-deposited film ["TECBARIA Η" manufactured by Mitsubishi Chemical Co., Ltd. Pax (stock), thickness 1 2 // m] (gas The phase-deposited film is on the inner side), (2) Urethane-based adhesive layer [Toyo M 〇 t ο η (AD- 5 02 / CAT-1 0), thickness 3.5 / zm], (3 ) Biaxially stretched poly (ethylene terephthalate) film forming a silicon oxide vapor-deposited film ["TECBARIA Η" manufactured by Mitsubishi Chemical Co., Ltd. Pax (stock), thickness 1 2 // m] (Vapor deposition The film is on the outer side), (4) Urethane-based adhesive layer [AD-5 02 / CAT-1 0 by Toyo Moton Co., Ltd., thickness 3.5 / zm], (5) Silicon oxide is formed Biaxially stretched poly (ethylene terephthalate) film of organic vapor deposition film [MOS-TH manufactured by Oike Industry Co., Ltd., thickness 12 # m] (vapor deposition film on the inner side), ( 6) Urethane-based adhesive layer [AD-5 02 / CAT-1 0 manufactured by Toyo Moton Co., Ltd., thickness 3.5 // m], (7) Forming a silicon oxide vapor-deposited film Biaxially stretched poly (ethylene terephthalate) film ["M0S-TH" manufactured by Oike Industry Co., Ltd., Of 12 // m] (Gas

89110249.ptc 第27頁 546200 --案號89110249 __年月_日 條正 _ 五、發明說明（24) 〉儿積膜於外面側）。 依據乾式疊層法，透過胺基曱酸酯系黏合劑將各層疊 層’取得透明的多層薄膜。多層薄膜為迴捲成滾筒狀。將 此多層薄膜於4 0 °C下熟化處理72小時。其次，將迴捲成滾 筒狀之狀態的多層薄膜，投入調整至丨丨0它之加熱爐中， 且保持200小時進行熱處理。結果示於表1。 [比較例3 ] 於實施例3中，除了於熟化處理後未進行熱處理以外， 同樣處理，取得多層薄膜。結果示於表1。 [貫施例4 ] 製作具有圖4所示層構造之防濕性多層薄膜。此多層薄 膜之層構造由夕卜面至内面為如下。 (1) 形成矽氧化物氣相沉積膜之雙軸延拉聚對苯二曱酸乙 二酯薄膜[三菱化學興人pax(股）製「TECBARIA Η」、厚度 1 2 &quot; m ](氣相沉積膜於内面側）、 (2) 胺基曱酸酯系黏合劑層[東洋Mo ton (股）製 「AD — 5 78A/CAT—10」、厚度3. 5 //m]、 (3 ) 形成矽氧化物氣相沉積膜之雙軸延拉聚對苯二曱酸乙 二酯薄膜[三菱化學興人pax(股）製「TECBARIA Η」、厚度 1 2 // m ](氣相沉稽膜於外面側）、 (4) 胺基曱酸系黏合劑層[東洋Mo ton (股）製 「八〇- 5 78人/〇人丁—10」、厚度3.5#111]、 (5 ) 形成矽氧化物氣相沉積膜之雙軸延拉聚對苯二曱酸乙 二S旨薄膜[三菱化學興人Pax(股）製「TECBARIA H」、厚度89110249.ptc Page 27 546200-Case No. 89110249 __Month_Day Article Zheng _ V. Description of the invention (24)> The pediatric membrane is on the outer side). According to the dry lamination method, each laminated layer 'was obtained through an amino-based adhesive to obtain a transparent multilayer film. The multilayer film is rolled into a roll shape. This multilayer film was aged at 40 ° C for 72 hours. Next, the multi-layered film rolled back into a roll shape was put into a heating furnace which was adjusted to 0 and maintained for 200 hours for heat treatment. The results are shown in Table 1. [Comparative Example 3] In Example 3, a multilayer film was obtained in the same manner except that the heat treatment was not performed after the aging treatment. The results are shown in Table 1. [Example 4] A moisture-resistant multilayer film having a layer structure shown in FIG. 4 was produced. The layer structure of this multilayer film from the Xibu side to the inner side is as follows. (1) Biaxially stretched poly (ethylene terephthalate) film to form a silicon oxide vapor-deposited film ["TECBARIA Η" manufactured by Mitsubishi Chemical Co., Ltd. pax (stock), thickness 1 2 &quot; m] (gas The phase-deposited film is on the inner side), (2) Amino acid ester-based adhesive layer [AD-5 78A / CAT-10 made by Toyo Moton Co., Ltd., thickness 3. 5 // m], (3 ) Biaxially stretched poly (ethylene terephthalate) film forming a silicon oxide vapor-deposited film ["TECBARIA Η" manufactured by Mitsubishi Chemical Co., Ltd., pax (stock), thickness 1 2 // m] (vapor deposition The film is on the outer side), (4) Amino-acid-based adhesive layer [Toyo Moton Co., Ltd. "80-5 78 people / 0 people D-10", thickness 3.5 # 111], (5) Biaxially stretched poly (ethylene terephthalate) film forming a silicon oxide vapor-deposited film ["TECBARIA H" manufactured by Mitsubishi Chemical Co., Ltd., Pax Corporation], thickness

89110249.ptc 第28頁 $46200 __案號89110249 _年月日 倏正 五、發明說明（25) ~ ' 1 2 // m ](氣相沉積膜於内面側）、 (6 )胺基曱酸酯系黏合劑層[東洋M 〇 t〇n (股）製 「AD—578A/CAT — 1〇」、厚度3·5//πι]、 (7 )形成石夕氧化物氣相沉積膜之雙軸延拉聚對苯二甲酸乙 二S旨薄膜[三菱化學興人Pax (股）製「TECBARIA Η」、厚度 1 2 // m ](氣相沉積膜於外面側）。 依據乾式疊層法，透過胺基曱酸酯系黏合劑將各層疊 層’取得透明的多層薄膜。多層薄膜為迴捲成滾筒狀。將 此多層薄膜於4 ◦ °c下熟化處理7 2小時。其次，將迴捲成滾 筒狀之狀態的多層薄膜，投入調整至7〇它之加熱爐中，且 保持8 0 0小時進行熱處理。結果示於表1。 [比較例4 ] 於貫施例4中，除了於熟化處理後未進行熱處理以外， 同樣處理，取得多層薄膜。結果示於表1。 [實施例5 ] 製作具有圖5所示層構造之防濕性多層薄膜。此多層薄 膜之層構造由外面至内面為如下。 (1 )形成矽氧化物氣相沉積膜之雙軸延拉聚對苯二曱酸乙 二S旨薄膜[三菱化學興人Pax(股）製「TECBARI A Η」、厚度 1 2 // m ](氣相沉積膜於内面侧）、 胺基甲酸酯系黏合劑層[東洋Mo ton (股）製 AD—502/CAT-1Q」、厚度、 (3 )形成矽氧化物氣相沉積膜之雙軸延拉聚對苯二甲酸乙 二_薄膜[三菱化學興人pax(股）製rTECBARIA η」、厚度89110249.ptc Page 28 $ 46200 __Case No. 89110249 _ Year, month, day, and fifth. Description of the invention (25) ~ '1 2 // m] (Vapor deposition film on the inner side), (6) Amino acid Ester-based adhesive layer [AD-578A / CAT — 10 manufactured by Toyo Mone Corporation], thickness 3.5 · // πι], (7) Double formation of Shixi oxide vapor-deposited film Axially drawn polyethylene terephthalate film [TECBARIA 制 manufactured by Mitsubishi Chemical Corporation Pax (stock), thickness 1 2 // m] (vapor-deposited film on the outer side). According to the dry lamination method, each laminated layer 'was obtained through an amino-based adhesive to obtain a transparent multilayer film. The multilayer film is rolled into a roll shape. This multilayer film was aged at 4 ° C for 72 hours. Next, the multilayer film rolled back into a roll shape was put into a heating furnace adjusted to 70, and maintained for 800 hours for heat treatment. The results are shown in Table 1. [Comparative Example 4] In Example 4, a multilayer film was obtained in the same manner except that the heat treatment was not performed after the aging treatment. The results are shown in Table 1. [Example 5] A moisture-resistant multilayer film having a layer structure shown in FIG. 5 was produced. The multilayer structure of this multilayer film from the outside to the inside is as follows. (1) Biaxially-stretched poly (ethylene terephthalate) film forming a silicon oxide vapor-deposited film ["TECBARI A 三" manufactured by Mitsubishi Chemical Co., Ltd., Pax (stock), thickness 1 2 // m] (Vapor deposition film on the inner side), urethane-based adhesive layer [AD-502 / CAT-1Q manufactured by Toyo Moton Co., Ltd.], thickness, (3) forming a silicon oxide vapor deposition film Biaxially drawn polyethylene terephthalate_thin film [rTECBARIA η ", thickness by Mitsubishi Chemical Corporation

89110249.ptc 第29頁 546200 _案號 89110249 _年月日__ 五、發明說明（26) 1 2 // m ](氣相沉積膜於外面側）、 (4 ) 胺基曱酸s旨系黏合劑層[東洋Μ 〇 t ο η (股）製 「AD- 5 02/CAT-1 0」、厚度 3.5//m]、 (5) 形成矽氧化物氣相沉積膜之雙軸延拉聚對苯二甲酸乙 二酯薄膜[三菱化學興人pax (股）製「TECB ARIA Η」、厚度 1 2 // m ](氣相沉積膜於内面側）、 (6 ) 胺基曱酸自旨系黏合劑層[東洋Μ 〇 t ο η (股）製 「AD- 5 02/CAT-10」、厚度3.5/zm]、 (7) 形成矽氧化物氣相沉積膜之雙軸延拉聚對苯二曱酸乙 二酯薄膜[三菱化學興人pax(股）製「TECBARIA Η」、厚度 1 2 // m ](氣相沉積膜於外面側）。 依據乾式疊層法，透過胺基甲酸酯系黏合劑將各層疊 層，取得透明的多層薄膜。多層薄膜為迴捲成滾筒狀。將 此多層薄膜於40 °C下熟化處理72小時。其次，將迴捲成滾 筒狀之狀態的多層薄膜，投入調整至8 5 之加熱爐中，且 保持4 0 0小時進行熱處理。結果示於表1。 [比較例5 ] 於實施例4中，除了於熟化處理後未進行熱處理以外， 同樣處理’取得多層薄膜。結果示於表1。 [比較例6 ] 測定聚氯三IL乙烯薄膜[PCTFE薄膜；日東電工公司紫 「NIFTR〇N NO4820」、厚度20 0 _]之透濕度。結果示^ 表1 〇89110249.ptc page 29 546200 _ case number 89110249 _ year month day__ V. Description of the invention (26) 1 2 // m] (Vapor deposition film on the outer side), (4) Amino acid Adhesive layer [AD-5 02 / CAT-1 0 manufactured by Toyo M. Co., Ltd., thickness 3.5 // m], (5) Biaxially stretched polysilicon to form a silicon oxide vapor-deposited film Ethylene terephthalate film ["TECB ARIA 制" made by Mitsubishi Chemical Co., Ltd., pax (stock), thickness 1 2 // m] (vapor-deposited film on the inner side), (6) Amino acid Adhesive layer [AD-5 02 / CAT-10 made by Toyo M. Co., Ltd., thickness 3.5 / zm], (7) Biaxially stretched polycondensation pair for forming silicon oxide vapor deposited film Ethylene terephthalate film ["TECBARIA 制" manufactured by Mitsubishi Chemical Co., Ltd., pax (stock), thickness 1 2 // m] (vapor-deposited film on the outer side). According to the dry lamination method, each layer was laminated through a urethane-based adhesive to obtain a transparent multilayer film. The multilayer film is rolled into a roll shape. This multilayer film was aged at 40 ° C for 72 hours. Next, the multilayer film rolled back into a roll shape was put into a heating furnace adjusted to 8 5 and kept for 400 hours for heat treatment. The results are shown in Table 1. [Comparative Example 5] In Example 4, a multilayer film was obtained in the same manner except that the heat treatment was not performed after the aging treatment. The results are shown in Table 1. [Comparative Example 6] The moisture permeability of a polychlorinated triethylene vinyl film [PCTFE film; Nitto Denko Purple "NIFTRON NO4820", thickness 20 0 _] was measured. Results are shown in Table 1 〇

89110249.ptc 第30頁 54620089110249.ptc Page 30 546200

89110249.ptc 第31頁 546200 _案號89110249_年月曰 修正_ 五、發明說明（28) 如表1之結果所闡明般，本發明之防濕性多層薄膜可達 成 0.03 〜0.04g/m2 .day 之透濕度（40°C、100%RH)，其顯 示具有與P C T F E薄膜同一水準之防濕性能。 [實施例6〜8、及比較例7〜1 6 ] 使用實施例1之層構造的多層薄膜，於熟化處理後，除 · 了以表2所示之熱處理條件下進行熱處理以外，同實施例1 進行操作。結果示於表2。89110249.ptc page 31 546200 _ case number 89110249 _ year and month amended _ V. Description of the invention (28) As explained in the results of Table 1, the moisture-proof multilayer film of the present invention can achieve 0.03 ~ 0.04g / m2. Day moisture permeability (40 ° C, 100% RH), which shows the same level of moisture resistance performance as PCTFE film. [Examples 6 to 8 and Comparative Examples 7 to 16] The multilayer film using the layer structure of Example 1 was the same as in Example except that it was heat-treated under the heat treatment conditions shown in Table 2 after the aging treatment. 1 Perform the operation. The results are shown in Table 2.

89110249.ptc 第32頁 546200 案號 89110249 曰 修正 五、發明說明（29) 表289110249.ptc Page 32 546200 Case No. 89110249 Amendment V. Description of Invention (29) Table 2

89110249.ptc 第33頁 54620089110249.ptc Page 33 546200

546200546200

曰 修- =小對笨一曱酸乙二酯上形成i τ 〇透明氣相沉積膜之透 明=薄膜（厚度75/zm)，於前述之發光層上重疊，且 以滾筒$層裔予以加熱壓黏。由背面電極與透明導電性薄 ^ το層中，‘出電極導線。於如此處理所作成之el ::的兩面’苎過黏合劑層（乙烯-醋酸乙烯酯卩聚物、厚 ί成eT-杜：Ϊ以尼龍所構成的吸濕薄膜(厚度75㈣）， 作成E L兀件本體。 (EL元件的製作） 將前述所調製之防渴性多厣蔆 熔型密封膠層之面對向，並ς其間，放^各聚烯烴系熱Yue Xiu = = i τ 〇 formed on the small ethylene oxide monoethylene glycol transparent film = transparent film (thickness 75 / zm), which is superimposed on the aforementioned light-emitting layer and heated by a roller Pressure stick. The back electrode and the thin transparent conductive layer ‘out the electrode lead. In this way, an el :: double-sided adhesive layer made of el :: (ethylene-vinyl acetate polymer, thick eT-du: Ϊ) was made of a hygroscopic film (thickness 75㈣) made of nylon, and EL was produced. The body of the element. (Production of the EL element) Face the prepared thirst-preventing polypyrite sealant layer and place the heat of each polyolefin system in between.

兀件本體，並於1 40 t下加熱壓點 引述^所5周製之EL 製作EL元件本體以防濕性多層 以、周邊欲封，則可 EL元件。織元件的發光亮度保持：為7，的電解發光型 產業上之可利用付 才午马〇 若根據本發明，則可提供由含有形 之氣相沉積膜之非吸濕性樹脂層的:機氧化物或金屬 示高度防濕性能的防濕性多層薄膜 ^，專膜所構成、且顯 之防濕性多層薄膜為適於作^食品、=製造方法。本發明 包裝材料和封裝材料。本發 西藥品、電子零件等 膜可發揮匹 別適於补&amp; %作為電發光元 敵於聚氯三i乙烯薄膜的防濕性，=性多層薄 件等之電子零件封裝用封裝薄膜、 元件編號說明 、 雙軸延拉PET薄膜 2 矽氡化物之氣相沉積膜 89110249.ptc 第35頁 546200 案號 89110249 年 月 曰 修正 五、發明說明（32) 3 雙車由延拉PET薄膜 4 石夕氧化物之氣相沉積膜 61 發光層 62 電極 63 基板 64 電極 65 基板 66 防濕材料 67 防濕材料 71 防濕材料 72 吸濕薄膜 73 透明導電薄膜 74 發光層 75 介電體層 76 背面電極 77 吸濕薄膜 78 防濕材料 a! 胺基曱酸酯系黏合劑層 a2 胺基曱酸酯系黏合劑層 X 氣相沉積薄膜 Y 氣相沉積薄膜 iiii 89110249.ptc 第36頁 546200 _案號89110249_年月曰 修正_ 圖式簡單說明 圖1為示出本發明防濕性多層薄膜一例之層構造的截面 略圖 。 圖2為示出本發明防濕性多層薄膜另一例之層構造的截 面略圖。 圖3為示出本發明防濕性多層薄膜另一例之層構造的截 面略圖。 圖4為示出本發明防濕性多層薄膜另一例之層構造的截 面略圖。 圖5為示出本發明防濕性多層薄膜另一例之層構造的截 面略圖。 圖6為示出電發光（E L)元件之一層構造例的截面模式 圖。 圖7為示出電發光元件之另一層構造例的截面模式圖。The element body is heated and pressed at 1 40 t. The EL element body made of 5 weeks is used to make the EL element body to prevent moisture. The luminous brightness of the woven element is maintained: 7, which can be used in the electroluminescent type industry. According to the present invention, a non-hygroscopic resin layer containing a vapor-deposited film can be provided. Moisture-resistant multilayer films with high moisture-proof properties, such as oxides or metals, are made of special films and exhibit moisture-resistant multilayer films that are suitable for food and manufacturing methods. Packaging materials and packaging materials of the present invention. The films of this drug, electronic parts, etc. can exhibit the moisture-proof properties of polychlorotriethylene vinyl film, which is suitable as a light emitting element, and an encapsulation film for electronic component packaging such as multilayer thin parts. Component number description, biaxially stretched PET film 2 Silicide vapor-deposited film 89110249.ptc Page 35 546200 Case No. 89110249 Amended, 5. Description of the invention (32) 3 Double car stretched PET film 4 stone Vapor deposition film of evening oxide 61 Light emitting layer 62 Electrode 63 Substrate 64 Electrode 65 Substrate 66 Moisture-proof material 67 Moisture-proof material 71 Moisture-proof material 72 Moisture absorbing film 73 Transparent conductive film 74 Light-emitting layer 75 Dielectric layer 76 Back electrode 77 Hygroscopic film 78 Moisture-proof material a! Urethane-based adhesive layer a2 Urethane-based adhesive layer X Vapor deposition film Y Vapor deposition film iiii 89110249.ptc Page 36 546200 _ Case No. 89110249 _ 年月 月 更改 _ Brief Description of Drawings FIG. 1 is a schematic cross-sectional view showing a layer structure of an example of the moisture-resistant multilayer film of the present invention. Fig. 2 is a schematic cross-sectional view showing a layer structure of another example of the moisture-resistant multilayer film of the present invention. Fig. 3 is a schematic cross-sectional view showing a layer structure of another example of the moisture-resistant multilayer film of the present invention. Fig. 4 is a schematic cross-sectional view showing a layer structure of another example of the moisture-resistant multilayer film of the present invention. Fig. 5 is a schematic cross-sectional view showing a layer structure of another example of the moisture-resistant multilayer film of the present invention. Fig. 6 is a schematic cross-sectional view showing an example of a one-layer structure of an electroluminescence (EL) element. FIG. 7 is a schematic cross-sectional view showing another example of the structure of the electroluminescent element.

89110249.ptc 第37頁89110249.ptc Page 37

Claims (1)

5Φ520Θ——— I 么、 : .p,-.:_ -六、申請專科範圍 1. 一種防濕性多 至少一面上，形成 薄膜白勺防濕性多層 糸樹月旨、聚酉旨糸樹 月旨、聚碳酸醋、聚 脂所組成之組群之 氧化紹、氧化鋅、 組成之金屬氧j匕物 成之石夕氧化物組群 銘、金、銀、#白、 物所組成之組君羊之 膜面為含有透遇黏 其他複合薄膜之氣 劑層所鄰接層合之 薄膜所構成，旦， 定之透濕度（W ;單 W ^ (1/n)X 0. 20 2 · —種防濕性多 至少一面上，开j成 薄膜的防濕性务層 糸樹月旨、聚酉旨各樹 月旨、聚碳酸酷、聚 脂等；該無機氧化 氧化姻、氧化汰、 9L 12, 25 替換本 層薄膜，其為含有於非吸濕性樹脂層之 無機氧化物或金屬之氣相沉積膜之複合 薄膜，該非吸濕性樹脂係選自由聚烯烴 脂、含氯樹脂、聚乙烯基芳香族系樹 苯硫、聚醯亞胺、聚颯、環狀烯烴系樹 至少一種材料；該無機氧化物係選自由 氧化錫、氧化銦、氧化鈦及其混合物所 組群以及由S i 0、S i 02及其混合物所組 之至少一種材料；而該金屬係選自由 纪、錫、錄、結、鋅、鈦、銦及其混合 至少一種材料；該複合薄膜之氣相沉積 合劑層，與其他之非吸濕性樹脂層面或 相沉積膜面所疊層的層構造，且與黏合 氣相沉積膜合計層數（η)為2〜8之多層 於溫度40 °C、相對濕度1 00%條件下所測 位=g / m2 · d a y)為滿足式（1 )之關係 (1) 〇 層薄膜，其為含有於非吸濕性樹脂層之 無機氧化物或金屬之氣相沉積膜之複合 薄膜，該非吸濕性樹脂可列舉如聚烯烴 脂、含氯樹脂、聚乙烯基芳香族系樹 苯硫、聚醯亞胺、聚砜、環狀烯烴系樹 物可列舉如氧化紹、氧化鋅、氧化錫、 及其混合物等之金屬氧化物，S i 0、 _鱺» 115Φ520Θ ———— I Mody,: .p,-.: _-VI. Application scope 1. One kind of moisture-proof multilayer at least one side to form a thin film. The group consisting of moon purpose, polycarbonate, and polyester is composed of metal oxide, zinc oxide, metal oxide, metal oxide, and stone oxidizer group, gold, silver, white, and white. The film surface of the junior sheep is composed of a film containing adjacent layers of aerosol layers that are transparent to other composite films. Once the moisture permeability is fixed (W; single W ^ (1 / n) X 0. 20 2 · —species It has more moisture resistance on at least one side, and it is a moisture-proof layer that forms a film. It is a tree-moon purpose, a poly-moisture purpose, a polycarbonate, a polyester, etc .; the inorganic oxidative oxide, oxidized, 9L 12 , 25 Replaces this layer of film, which is a composite film containing inorganic oxide or vapor-deposited film of metal contained in a non-hygroscopic resin layer. The non-hygroscopic resin is selected from the group consisting of polyolefin resin, chlorine-containing resin, and polyethylene. At least one material of the aromatic tree benzenesulfur, polyimide, polyfluorene, and cyclic olefin tree; the inorganic oxide At least one material selected from the group consisting of tin oxide, indium oxide, titanium oxide, and mixtures thereof, and S i 0, S i 02, and mixtures thereof; and the metal is selected from the group consisting of Yuki, tin, ru, Zinc, titanium, indium, and a mixture of at least one material thereof; a layer structure of a vapor-deposited mixture layer of the composite film and other non-hygroscopic resin layers or phase-deposited film surfaces, and a bonded vapor-deposited film Multi-layers with a total number of layers (η) of 2 to 8 measured at a temperature of 40 ° C and a relative humidity of 100% = g / m2 · day) are those that satisfy the relationship of formula (1) (1). The non-hygroscopic resin layer is a composite film of an inorganic oxide or a metal vapor-deposited film. Examples of the non-hygroscopic resin include polyolefin resins, chlorine-containing resins, polyvinyl aromatic sulphur resins, Examples of the polyfluorene imide, polysulfone, and cyclic olefin-based trees include metal oxides such as oxides, zinc oxide, tin oxide, and mixtures thereof, S i 0, _ 鲡 »11 89110249(替換）-2.ptd 第38頁 、’請專利範1 金2、钾及H物箄之矽乳化n談金屬可列舉如鋁、 專.，誌複、蜴、鎳、鈍、鉾、钵、锢、反其混合物 其他乏非0 之I秸沉積臊面為含洧1過黏合劑層，與 所疊層的樹脂層面或其他複合薄腺之氤相沉積膜面 合計層數二）為U之與Λ合劑層所鄰接廣合之氣相沉積膜 。°、相對濕度100%條件%層戶二模所構成’且’於溫度40 ^ .day)為滿足：(;牛)下之戶;：定之w :各（1/rO X 〇.2〇 系 •如申凊專利範圍第1或 “ 有二枚以上於非吸濕性樹H員之防濕性多層薄膜，、其為含 化物或全；I 2 hg之至少一面上，形成無機氧 乂孟屬之亂相沉積膜的複人 娀虱 4 ·如申請專利範圍第3 口厚Μ。 二枚以上於非吸濕性樹脂；之防/性多層薄膜，其為含有 物或金屬之氣相沉積二Sit面上機氧化 一枚為透過黏合劑層，以、且二”之至少 層構造。 匕的氣相沉積膳面予以疊層之 吸唱Η： ίί防濕性多層薄膜的製造方法，立特徵為含右 及濕性樹脂層之至少一面 广泰异‘ 7有於非 相沉積膜之複合薄膜的防滿性：金屬之氣 層，與其他之非吸濕性相Γ脂=膜面為含合劑 積膜面所疊層的層構造，且^ f；其他祓^接、之氣相沉 沉積膜合計層數⑷為2〜8之與，合劑層所鄰接層合之氣相 β之多層薄膜，其次，89110249 (replacement)-2.ptd p. 38, 'Please Patent No. 1 Gold 2, Potassium, and H Silicone Emulsions n Talk about metals can be listed such as aluminum, special, Zhifu, lizard, nickel, blunt, 鉾, The other non-zero non-zero I-sediment deposition surfaces of the bowl, tincture, and other mixtures are the 1-adhesive-containing layer, and the total number of layers with the laminated resin layer or other thin-layered gadolinium-deposited film surfaces is two.) A vapor-deposited film of U and adjacent to the Λ mixture layer. °, relative humidity 100% condition% stratified household second model 'and' at a temperature of 40 ^ .day) to satisfy: (; cattle) under the household ;: fixed w: each (1 / rO X 〇. 2〇 series • For example, in the scope of the patent application No. 1 or "There are two or more moisture-resistant multilayer films for non-hygroscopic tree members, which are compounds or all; on at least one side of I 2 hg, inorganic oxomonoxide is formed. Anomalous human lice of a disordered phase deposited film 4 · If the scope of patent application is 3 mouth thickness M. Two or more non-hygroscopic resins; anti-repellent multilayer film, which is the vapor deposition of content or metal One machine on the two Sit surfaces is oxidized by the adhesive layer to form at least two layers. The vapor-deposited surface of the knife is laminated and sucked. Features at least one side of the right and wet resin layer. Guangtai Yi'7 Fully-preventive properties of non-phase-deposited composite films: gas layer of metal, and other non-hygroscopic phases. Lipid = film surface is The layer structure of the composite film-containing layer is laminated, and ^ f; the total number of layers of the vapor-deposited deposited film 祓 connected to other 祓 is 2 to 8 and The layer of bonding adjacent layers of the multilayer film of vapor β, secondly, 1111 ___1111 ___ 89110249(替換）_2.ptd89110249 (replace) _2.ptd 第39頁 546200 &lt;、申請專利範圍 (2)令該多層薄膜於55 °C以上未滿140 °C之乾熱氛圍氣中 進行1 0小時以上熱處理； 該非吸濕性樹脂係選自由聚烯烴系樹脂、聚酯系樹脂、 含氣樹脂、聚乙烯基芳香族系樹脂、聚碳酸S旨、聚苯硫、 聚醯亞胺、聚颯、環狀烯烴系樹脂所組成之組群之至少一 種材料；該無機氧化物係選自由氧化鋁、氧化鋅、氧化 錫、氧化銦、氧化鈦及其混合物所組成之金屬氧化物組群 以及由S i 0、S i 02及其混合物所組成之矽氧化物組群之至 少一種材料；而該金屬係選自由I呂、金、銀、祐、纪、 錫、錄、钻、辞、鈦、銦及其混合物所組成之組群之至少 p 一種材料。 6. —種防濕性多層薄膜的製造方法，其特徵為含有於非 吸濕性樹脂層之至少一面上，形成無機氧化物或金屬之氣 相沉積膜之複合薄膜的防濕性多層薄膜的製造方法中， (1 )製作複合薄膜之氣相沉積膜面為含有透過黏合劑 層，與其他之非吸濕性樹脂層面或其他複合薄膜之氣相沉 積膜面所疊層的層構造，且與黏合劑層所鄰接層合之氣相 沉積膜合計層數（η)為2〜8之多層薄膜，其次， (2)令該多層薄膜於55 t以上未滿140 °C之乾熱氛圍氣中 | 進行1 0小時以上熱處理； 該吸濕性樹脂可列舉如聚烯烴系樹脂、聚酯系樹脂、 含氣樹脂、聚乙烯基芳香族系樹脂、聚碳酸酯、聚苯硫、 聚醯亞胺、聚颯、環狀烯烴系樹脂等；該無機氧化物可列 舉如氧化IS、氡化鋅、氧化錫、氧化銦、氧化鈦、及其混Page 39 546200 &lt; Patent application scope (2) The multilayer film is subjected to heat treatment for more than 10 hours in a dry heat atmosphere above 55 ° C and below 140 ° C; The non-hygroscopic resin is selected from polyolefin At least one of the group consisting of resins, polyester resins, gas-containing resins, polyvinyl aromatic resins, polycarbonate carbonate, polyphenylene sulfide, polyimide, polyfluorene, and cyclic olefin resins Material; the inorganic oxide is selected from the group consisting of metal oxides consisting of aluminum oxide, zinc oxide, tin oxide, indium oxide, titanium oxide, and mixtures thereof, and silicon consisting of Si 0, Si 02, and mixtures thereof At least one material of the oxide group; and the metal is at least one material selected from the group consisting of I, Au, Au, Ag, Yu, Ji, tin, diamond, diamond, titanium, indium, and mixtures thereof . 6. A method for manufacturing a moisture-resistant multilayer film, characterized in that the moisture-resistant multilayer film is formed on at least one side of a non-hygroscopic resin layer and forms a composite film of an inorganic oxide or a metal vapor-deposited film. In the manufacturing method, (1) the vapor-deposited film surface of the composite film is a layer structure including a permeation adhesive layer, and other non-hygroscopic resin layers or the vapor-deposited film surface of other composite films, and The multilayer film with the total number of layers (η) of the vapor-deposited film laminated adjacent to the adhesive layer is 2 to 8; secondly, (2) the multilayer film is to be dried in a dry and hot atmosphere at a temperature of 55 t and less than 140 ° C; Medium | Heat treatment for more than 10 hours; Examples of the hygroscopic resin include polyolefin resin, polyester resin, air-containing resin, polyvinyl aromatic resin, polycarbonate, polyphenylene sulfide, polyfluorene Amines, polyfluorenes, cyclic olefin resins, etc .; examples of the inorganic oxide include IS oxide, zinc halide, tin oxide, indium oxide, titanium oxide, and mixtures thereof 89110249(替換）-2.ptd 第 40 頁 546200 六、申誚·專利範圍 —_____ 合物等之金屬氧化物， 化物等；該金屬可列與 i 〇2、及其混合物等之矽氧 叫」Μ举如|呂、入 α、 鈷、鋅、鈦、銦、及苴、e 孟、銀、鉑 ，、化合物等 鎳 爹巴、錫 7.如申請專利範圍第物等。 法，其為於步驟(2)中，L6由項之防濕性多層薄膜的製造方 對濕度1GG%條件下所、工由煞處理，取得溫度40 °C、相 為滿足式⑴關係之疋之透濕度（W ;單位=g/m2 .day) W ^ (1/n) X 〇. 20 寻版 8 ·如申請專利範圍第5 、（1) 。 法，其為於步驟（1)中，制工、之防濕性多層薄膜的製造方 脂層之至少一面上，妒’製作含有至少二枚於非吸濕性樹 之複合薄膜的多層薄^成無機氧化物或金屬之氣相沉積膜 9 ·如申請專利範圍笫 法，其為於步驟（丨）中，制之防濕性多層薄膜的製造方 脂層之至少一面上，/ ‘作έ有至少一枚於非吸濕性樹 之複合薄膜的多層薄=成無機氧化物或金屬之氣相沉積膜 I 〇 ·如申睛專利範圍、 法’其為於步驟⑴ 制'之防濕性多層薄膜的製造方 脂層之至少一面 y衣乍含有二牧以上於非吸濕性樹 的複合薄膜，且，呈機氧化物或金屬之氣相沉積膜 以彼此的氣相沉膣ς、=至少二枚為透過黏合劑層， II ·如申請專利範圍M q馆曰之曰構乂的多層溥膜。 脂層之至少- =，νΛ作，有二枚以上於非吸濕性樹 上形成無機氧化物或金屬之氣相沉積卞膜89110249 (replacement)-2.ptd page 40 546200 6. Application scope of patents-_____ Metal oxides, compounds, etc. of compounds; this metal can be listed with i 02, and its mixture of silicon oxide, etc. " Examples include: 吕, αα, cobalt, zinc, titanium, indium, and thallium, emanganese, silver, platinum, and compounds such as nickel dba and tin 7. Such as the scope of patent applications. The method is that in step (2), the manufacturer of the moisture-resistant multilayer film of L6 is treated under the condition of 1GG% humidity and processed by processing, and the temperature is 40 ° C, and the phase satisfies the relationship of the formula ⑴ Permeability (W; Unit = g / m2.day) W ^ (1 / n) X 0.20 Seeking Edition 8 · For example, the scope of application for patent No. 5 (1). Method, in the step (1), manufacturing at least one side of the grease layer of the moisture-resistant multilayer film of the manufacturing process, jealousy 'producing a multilayer thin film containing at least two composite films in a non-hygroscopic tree ^ Formation of inorganic oxide or metal vapor-deposited film 9 · If the patent application method is adopted, it is at least one side of the grease layer for the moisture-resistant multilayer film produced in step (丨), Multi-layer thin film with at least one non-hygroscopic tree composite film = vapor-deposited film formed of inorganic oxides or metals I. As claimed in the patent scope, the method 'is moisture-proof in the process of preparation' Manufacture of multilayer films At least one side of the fat layer contains a composite film with more than two non-hygroscopic trees, and the vapor-deposited films of organic oxides or metals are vapor-deposited with each other, = At least two of them are through the adhesive layer, II. As in the scope of the patent application, the multi-layered diaphragm of the structure is described. At least-=, νΛ of the lipid layer, there are two or more vapor-deposited 卞 films of inorganic oxides or metals on non-hygroscopic trees 891]0249(替換）-2. Ptd 第41頁 法’其為於步驟貝之防濕性多層薄膜的製造方 546200 六、申請專利範圍 的複合薄膜，且，具有其中之至少二牧為透過黏合劑層， 以彼xtb的氣相沉積膜面予以疊層之層構造的多層薄膜。 1 2.如申請專利範圍第5或6項之防濕性多層薄膜的製造 方法，其為於步驟（2)中，令多層薄膜於非緊張下進行熱 處理。 1 3.如申請專利範圍第7項之防濕性多層薄膜的製造方 法，其為於步驟（2 )中，令多層薄膜於非緊張下進行熱處 理。 1 4.如申請專利範圍第1 2項之防濕性多層薄膜的製造方 法，其為將多層薄膜以迴捲成滾筒狀之狀態下進行熱處 理。 1 5.如申請專利範圍第1 3項之防濕性多層薄膜的製造方 法，其為將多層薄膜以迴捲成滚筒狀之狀態下進行熱處 理。 1 6.如申請專利範圍第5或6項之防濕性多層薄膜的製造 方法，其為於步驟（1)中，於黏合劑層使用胺基甲酸酯系 黏合劑製作多層薄膜，其次，於30〜50 °C之溫度範圍下進 行2 4小時以上之黏合劑的熟化處理後，進行步驟（2 )之熱 處理。 1 7.如申請專利範圍第7項之防濕性多層薄膜的製造方 法，其為於步驟（1)中，於黏合劑層使用胺基曱酸酯系黏 合劑製作多層薄膜，其次，於30〜50 °C之溫度範圍下進行 2 4小日寺以上之黏合劑的熟化處理後，進行步驟（2 )之熱處 理。891] 0249 (replacement)-2. Ptd method on page 41 'It is the manufacturer of the moisture-resistant multilayer film in step 546200 6. The patented composite film, and at least two of them are through adhesion The agent layer is a multilayer film having a layer structure laminated with a vapor-deposited film surface of xtb. 1 2. The method for manufacturing a moisture-resistant multilayer film according to item 5 or 6 of the scope of patent application, wherein in step (2), the multilayer film is heat-treated under tension. 1 3. The method for manufacturing a moisture-resistant multilayer film according to item 7 of the patent application scope, in step (2), the multilayer film is subjected to heat treatment under non-stress. 1 4. The method for manufacturing a moisture-resistant multilayer film according to item 12 of the scope of the patent application, which comprises heat-treating the multilayer film in a state of being rolled into a roll. 1 5. The method for manufacturing a moisture-resistant multilayer film according to item 13 of the scope of patent application, which comprises heat-treating the multilayer film in a rolled state. 1 6. The method for manufacturing a moisture-resistant multilayer film according to item 5 or 6 of the scope of patent application, which is to use a urethane-based adhesive to make a multilayer film in the adhesive layer in step (1), and secondly, After curing the adhesive at a temperature range of 30 to 50 ° C for more than 24 hours, the heat treatment of step (2) is performed. 1 7. The method for manufacturing a moisture-resistant multilayer film according to item 7 of the scope of patent application, which is used in step (1) to make a multilayer film using an amino ester-based adhesive in the adhesive layer, followed by 30 After the curing process of the binder at a temperature of 2 to 4 Koriji is performed in a temperature range of ~ 50 ° C, the heat treatment of step (2) is performed. 89110249(替換）-2.ptd 第42頁89110249 (Replace)-2.ptd Page 42