TW528680B

TW528680B - Inkjet device of piezoelectric inkjet printhead and method for making the same

Info

Publication number: TW528680B
Application number: TW90119363A
Authority: TW
Inventors: Chang-Mou Yang; Jen-Hua Lin; Shr-Guang Li; Suo-Hung Jang
Original assignee: Nanodynamics Inc
Priority date: 2001-08-08
Filing date: 2001-08-08
Publication date: 2003-04-21

Abstract

The present invention relates to an inkjet device of a piezoelectric inkjet printhead and a method for making the same. The method comprises providing a substrate including a top face and a bottom face; forming a metal vibration layer on the top face of the substrate; and defining the bottom face of the substrate to form a plurality of ink chambers exposing a portion of the metal vibration layer, in which the substrate is made of a silicon chip, a ceramic substrate, or a metal sheet for receiving an etching operation, and the metal vibration layer is formed of a Ni, Cu, or Pt or other metal by an electroplating method, a physical vapor deposition (PVD), or a chemical vapor deposition (CVD), on the top face of the substrate. The invented method further comprises forming a piezoelectric vibration component with upper/lower electrodes on the metal vibration layer. The invented inkjet device of piezoelectric inkjet printhead can greatly increase the yield of inkjet printhead production process, reduce the process time, and increase the production.

Description

528680 製其及置裝墨喷之頭喷式電壓種一於關有 1是⑴域明 W領發明本明e 發發 rL 五且(S置，材裝法基墨方為喷造屬之有是別特造製其及金或瓷陶 Λ 片晶矽用利可 \liml 種腔水墨之頭墨噴式電壓成形而【發明背景】近年來，在高科技產業的帶動下，所有的電子相關產業均蓬勃發展。以印表機為例，才不過幾年功夫，列印技術便已從撞針式、黑白雷射進步到彩色喷墨及彩色雷射等，可謂一日千里。目前市面上的喷墨印表機，大多採用氣泡式（Thermal bubble)或是壓電式（Piezoelectric)喷墨頭以將墨水散佈至紙張上完成列印工作。氣泡式乃利用加熱器將墨水瞬間氣化，產生高壓氣泡推動墨水由喷嘴射出。壓電式係利用一因施加電壓而可產生形變的壓電材料 (piezoelectric material)，對喷墨腔内的墨水造成擠壓而將墨水喷出。一般而言，相較於氣泡式，壓電式喷墨頭具有下列優點：（1 )壓電式喷墨頭不須加熱因此噴墨頭不會因為高溫產生化學變化，影響顏色品質；並且由於喷墨頭不需要經過反覆的溫度循環，故而具有極佳的耐久性。（2 )壓電材料的反應速度快，可提升列印速度；熱泡式則受限於加熱冷卻速度，因此喷頭的列印速度有限。（3)壓電式喷墨頭〇可以藉由控制壓電振動片的振動量來控制液滴大小，提升528680 The head spray voltage type of the inkjet device and the inkjet device are installed. One is closed. 1 is the domain name W collar invention. The invention efafa rL five and (S set, the material installation method is based on the inkjet method. It is specially made and made of gold or porcelain pottery Λ flake crystal silicon with Rico \ liml head cavity inkjet inkjet voltage forming [Background of the Invention] In recent years, driven by high-tech industries, all electronics related industries Both are booming. Taking printers as an example, only a few years of work, printing technology has progressed from striker type, black and white laser to color inkjet and color laser, which can be described as a thousand miles. Currently inkjet printing on the market Most of the monitors use thermal bubble or piezoelectric inkjet heads to spread the ink onto the paper to complete the printing work. The bubble type uses a heater to instantly vaporize the ink and generate high-pressure bubbles to push it The ink is ejected from the nozzle. The piezoelectric system uses a piezoelectric material that can deform due to the application of voltage, which squeezes the ink in the inkjet chamber and ejects the ink. In general, compared with the bubble type, the piezoelectric inkjet head has the following advantages: (1) the piezoelectric inkjet head does not need to be heated so the inkjet head does not cause chemical changes due to high temperature, which affects the color quality; and Since the inkjet head does not need to undergo repeated temperature cycles, it has excellent durability. (2) The piezoelectric material has a fast response speed and can improve printing speed; the thermal bubble type is limited by the heating and cooling speed, so the inkjet head The print speed of the head is limited. (3) Piezo inkjet heads 〇 The droplet size can be controlled by controlling the amount of vibration of the piezoelectric vibrating piece to improve

528680 五、發明說明（2) 列印品質；熱泡式只能控制喷點喷射與否，難以控制墨滴大小。請參照第1 A圖，其繪示一種傳統壓電式喷墨頭之單一喷墨腔之剖面圖（請參考美國專利案號5, 85 6, 8 3 7 )。傳統壓電式喷墨頭之喷墨腔係利用一墨水腔下蓋1 〇 2，一墨水腔本體104和一振動片（vibrating plate)108三部分的生胚（green sheet)，藉由對位、壓合（pressing)後，再燒結（baking)成形。其中，墨水腔下蓋102、墨水腔本體104 和振動片108的生胚均為陶瓷材料（ceramic material)，並藉由雷射光束（laser beam)、或沖壓（punching)方式形成墨水腔（pressure producing chamber)106於墨水腔本體1 0 4。然後，在振動片1 0 8上方形成一具有上下驅動電極 (drive electrode)110、111 的壓電振動元件 (piezoelectric vibrating e 1 eraent)112，並力口以燒結成形。其中，壓電振動元件為具有壓電性（piezoelectric) 之材料。墨水腔下蓋102的下方還有一喷孔片（nozzle plate)(未顯示於第1A圖中），喷孔片上有一與墨水腔1〇6 對應之噴孔（nozzle hole)(未顯示於第1A圖中），用以喷出墨水腔1 0 6内的墨水。當控制電路施加電壓於上驅動電極110與下驅動電極 111時，壓電振動元件112會產生變形，進而使振動片1〇8 形成側向彎曲而擠壓墨水腔1 〇 6内的墨水。最後使墨水自噴孔喷出。然而，將墨水腔下蓋1 〇 2、墨水腔本體1 〇 4和振動片528680 V. Description of the invention (2) Printing quality; The thermal bubble type can only control whether the dot is ejected or not, and it is difficult to control the ink droplet size. Please refer to FIG. 1A, which is a cross-sectional view of a single inkjet chamber of a conventional piezoelectric inkjet head (refer to US Patent No. 5, 85 6, 8 3 7). The inkjet cavity of the conventional piezoelectric inkjet head uses a green sheet of three parts: an ink chamber lower cover 10, an ink chamber body 104, and a vibrating plate 108. 3. After pressing, baking is performed. Among them, the green embryo of the ink chamber lower cover 102, the ink chamber body 104, and the vibrating plate 108 are all ceramic materials, and the ink chamber pressure is formed by a laser beam or a punching method. producing chamber) 106 on the ink chamber body 104. Then, a piezoelectric vibrating element (piezoelectric vibrating e 1 eraent) 112 having upper and lower drive electrodes 110 and 111 is formed above the vibrating piece 108, and the force opening is formed by sintering. Among them, the piezoelectric vibration element is a piezoelectric material. There is also a nozzle plate (not shown in Figure 1A) below the lower cover 102 of the ink chamber. The nozzle hole has a nozzle hole (not shown in Figure 1A) corresponding to the ink chamber 106. (In the figure), used to eject the ink in the ink chamber 106. When a voltage is applied to the upper driving electrode 110 and the lower driving electrode 111 by the control circuit, the piezoelectric vibrating element 112 is deformed, so that the vibrating piece 108 is bent sideways to squeeze the ink in the ink chamber 106. Finally, the ink is ejected from the nozzle holes. However, the ink chamber lower cover 10, the ink chamber body 104, and the vibration plate

528680 五、發明說明（3) 108的生胚經過對位壓合而燒結成型的製程，具有一些缺點’例如·要在墨水腔本體1 〇 4内以沖壓（p u n c h i n g )方式形成結構十分微小的墨水腔1 〇 6，並不容易，特別是大面積上具有許多墨水腔106，其沖壓成形的良率不高。再者，三層陶瓷生胚的壓合對位需要很高的精密度，對位不準確時容易造成產品良率的下降。且，壓合之後的燒結製程由於生胚中具有許多微小結構很容易造成燒結的良率大幅降低而使得製程成本大幅提高。528680 V. Description of the invention (3) The process of sintering and molding of the raw embryo of 108 has some disadvantages. For example, it is necessary to form a very fine structured ink by punching in the ink chamber body 104. The cavity 106 is not easy. Especially, there are many ink cavities 106 on a large area, and the yield of stamping is not high. In addition, the three-layer ceramic green embryo requires high precision for the alignment, and the inaccurate alignment can easily cause the product yield to decrease. Moreover, the sintering process after lamination has a large reduction in the yield of sintering due to the many microstructures in the green embryo, which greatly increases the cost of the process.

另外，壓合的陶瓷生胚在燒結時會產生收縮應力 (contraction stress)，由於上、下驅動電極iiQ、in和壓電振動元件112的收縮率不同，使燒結完成後兩者的中心朝向墨水腔1 0 6方向收縮，請參照第1 b圖，其繪示第1 A 圖之單一喷墨腔經過燒結後之示意圖。當驅動電極丨丨〇之電壓造成壓電振動元件1 1 2收縮時，由於中心已經在收縮狀態，而使大部分的收縮發生在壓電振動元件丨丨2的兩側，進而對墨水腔1 0 6之側壁造成一向内的拉力，如箭號 F 1、F 2所示。這種向内的拉力會影響到原本欲擠壓墨水自下方喷孔喷出的作用力，如箭號E所示，而減少墨水自喷孔喷出的效率（ink expelling efficiency)。而且，由於墨水在墨水腔之間係為相互連通的，這種墨水腔1 〇 6側壁的拉力會引起相鄰喷墨室内墨水的擾動，此現象稱為擾流效應（cross talk)，特別是當鄰近的墨水腔同時欲噴出墨點時，擾流效應尤其容易發生。 'In addition, the compacted ceramic green body generates contraction stress during sintering. Due to the different shrinkage rates of the upper and lower driving electrodes iiQ and in and the piezoelectric vibration element 112, the centers of the two are oriented toward the ink after the sintering is completed. The cavity shrinks in the direction of 106. Please refer to FIG. 1b, which shows a schematic view of the single inkjet cavity in FIG. 1A after sintering. When the voltage of the driving electrode 丨〇 causes the piezoelectric vibration element 1 1 2 to contract, since the center is already in a contracted state, most of the contraction occurs on both sides of the piezoelectric vibration element 丨丨 2 and then to the ink chamber 1 The side wall of 06 causes an inward pulling force, as shown by arrows F1 and F2. This inward pulling force will affect the force of the ink that is intended to be squeezed from the lower nozzle hole, as shown by arrow E, and reduce the ink expelling efficiency of the ink from the nozzle hole. Moreover, because the ink is interconnected between the ink chambers, the tensile force of the side wall of the ink chamber 106 may cause the ink in the adjacent inkjet chamber to be disturbed. This phenomenon is called cross talk, especially When the adjacent ink chambers want to eject ink dots at the same time, the spoiler effect is particularly easy to occur. '

第6頁 528680 明說明 C 發發 [ 五目鑑明有墨喷式電壓種一供提在是就的目的明 1發述本概，及此 4)的於 Γν 式的喷方目式刻的電 #昇壓用提種利效一，有出法均提方率，造良的製和目其量的及產明置的發裝品本墨產據喷到根之達頭以腔水墨成形裝墨喷之頭墨和義面定頂，一著括接包。材層基動，振材屬基金 --供成提形，上先面首頂。之法材方基造於製。其面及底置一分複部成屬出形金露上一暴面或腔底、水之板墨材基些基究該在陶，式一腔方、水刻片墨晶個以矽數係一複，係成中材形其基以。。面層腔底動水之振墨材屬個基金數 }膜 Ρ 度 (# 鉑相或氣 mc- 、理 U)物 C - 銅法、鑄 }電 • 1 (N以鎳係係層 14¾ 材振之屬層金動且振，屬屬金金而他。其片或製電之壓明的發下本上。有上具面一頂成之形材上基層於動成振形屬法金膜於鍍：相括氣包學更化，或法、方法造水對墨腔於水並墨。與質以性孔電喷壓個有數具複件有元上 ii/fe 振孔電喷壓，，板中孔其喷 α 1 件成元形 li;Jl 振腔程製體導半用利係置裝墨〇喷水之墨頭的墨内喷腔式水電墨壓出之喷明以發用本應合良壓的統形傳成免腔避水以墨，使腔但水不墨明個發數本複，成此形因上 0 材題基問一的在確術準技不刻位蝕對易顯明更能點優和 ο 、短徵縮特為、大的亦目間述時上程之製明，發高本提讓為為大率說細詳作式圖附所合配並例施實佳較 - 舉特文：下下，如懂明Page 6 528680 Explanatory note C Hairfat [Wumujianming Ink jet voltage type one confession purpose is provided 1] This is a summary, and 4) of the electric spray engraved in Γν type #Boosting has the advantage of raising seeds. There is a method of raising the average square rate, and the system is well-made, and the amount and production of the hair products are assured. The head of the ink spray ink and the prosthetic surface are fixed to the top. Fundamental movement of materials, vibrating materials belong to the fund-supply and promotion, first top. The legal material Fang Ji made in the system. The surface and the bottom part of it are formed out of a golden dew on a violent surface or the bottom of the cavity, and the water and ink on the plate are based on the ceramics. Department of complex, tied into the shape of the base material. . The number of liquid ink materials at the bottom of the surface cavity is the number of funds} film P degree (# platinum phase or gas mc-, physical U) material C-copper method, casting} electricity • 1 (N is nickel system layer 14¾ material Zhen Zhi belongs to Jin Jin, and it belongs to Jin Jin and other. Its sheet or electricity is printed on the printed book. There is a top-shaped profile on the top, and the base layer is shaken into French. Membrane plating: The encapsulation is changed, or the method or method is used to make water and ink to the ink cavity. There are several copies of the electroporation of the pores, and there are several copies. ,, the hole in the plate is sprayed with α 1 pieces of element li; Jl vibrating cavity system guide and half use the system to install ink. The water jet ink head of the ink jet cavity type hydroelectric ink is extruded in order to send out. Use the system that should be combined with good pressure to form a cavity free of water and ink, so that the cavity but the water is not clear, make a few copies. This is the reason for the fact that the 0 questions are not accurate. Potential eclipse pairs are more obvious to Yi Xian, ο, short sign special features, large, also described the time and time of the system, issued a higher cost as Great rate that small details for engagement with the attachment of formula FIG embodiment and application Saga more - for Twente: the next, such as know-ming

528680 五、發明說明（5) 【較佳實施例】本發明之技術特點在於，在一基材上定義出墨水腔，並以一金屬片作為壓電式喷墨頭之振動層。其中，基材的材料可以是矽晶片、陶瓷基板、或是金屬片。而金屬片係以電鑄、物理氣相鍍膜（Physical Vapor Deposition， PVD)、或化學氣相鍍膜（Chemical Vapor Deposition， CVD)等方式形成金屬振動層於基材上。在此較佳實施例中係以矽晶片作為基材，對本發明之壓電式喷墨頭之製程做一說明，然並不因而限制本發明。請參照第2 A〜2 F圖，其繪示依照本發明一較佳實施例之壓電式噴墨頭之噴墨裝置之部分製程。首先，提供一矽晶片202作為基材（substrate)，如第2A圖中所示，其中，矽晶片202包括一頂面204和一底面206。接著，如第2 B圖所示，利用一金屬片於矽晶片2 〇 2之頂面204上形成一金屬振動層208。其中，金屬片的材質例如是鎳（Ni+)、銅（Cu)、鉑（Pt)等或其他可耐高溫之金屬，並利用電鑄，物理氣相鍍膜（PVD)，或化學氣相錢膜（Cvd) 方法形成。 ' 接著，利用微影（photolithography)和#刻 (etching)技術在矽晶片2〇2上形成空腔，以做為 c 如第2 C圖至第2 D圖所示，先形成對應墨水腔的保護層2工〇於矽晶片2 0 2之底面2 〇 6上，再蝕刻矽晶片2 〇 2，水腔所需之空腔。 ~ &臺528680 V. Description of the invention (5) [Preferred embodiment] The technical feature of the present invention is that an ink cavity is defined on a substrate, and a metal sheet is used as the vibration layer of the piezoelectric inkjet head. The material of the substrate may be a silicon wafer, a ceramic substrate, or a metal sheet. The metal sheet is formed on the substrate by electroforming, physical vapor deposition (PVD), or chemical vapor deposition (CVD). In this preferred embodiment, a silicon wafer is used as a substrate to explain the manufacturing process of the piezoelectric inkjet head of the present invention, but the present invention is not limited thereby. Please refer to FIGS. 2A to 2F, which show a part of the manufacturing process of the inkjet device of the piezoelectric inkjet head according to a preferred embodiment of the present invention. First, a silicon wafer 202 is provided as a substrate, as shown in FIG. 2A, wherein the silicon wafer 202 includes a top surface 204 and a bottom surface 206. Next, as shown in FIG. 2B, a metal sheet is used to form a metal vibration layer 208 on the top surface 204 of the silicon wafer 202. Among them, the material of the metal sheet is, for example, nickel (Ni +), copper (Cu), platinum (Pt), or other high-temperature-resistant metals, and uses electroforming, physical vapor deposition (PVD), or chemical vapor film (Cvd) method formation. 'Next, a cavity is formed on the silicon wafer 202 using photolithography and #etching techniques as c. As shown in FIG. 2C to FIG. 2D, the corresponding ink cavity is first formed. The protective layer 2 is worked on the bottom surface 206 of the silicon wafer 202, and the silicon wafer etched again, the cavity required for the water cavity. ~ & desk

第8頁 528680 五、發明說明（6) 接著，如第2E圖至第2F圖所示，覆蓋一噴孔片 (nozzle plate)212於矽晶片202之底面206上而形成複數個墨水腔214。其中，喷孔片上具有以雷射或蝕刻等方式所形成的複數個噴孔2 1 6，一個喷孔2 1 6對應一個墨水腔 2 1 4，用以將墨水腔2 1 4内的墨水喷出。然後，於金屬振動層208上形成具有上下驅動電極之壓電振動元件（未顯示於第2 F圖中），其中，壓電振動元件具有壓電性質。當控制電路施加電壓於上下驅動電極，使與上下驅動電極緊鄰的壓電振動元件會產生變形，進而使振動片2 0 8側向彎曲而擠壓墨水腔2 1 4内的墨水，此時，位於喷孔216處之墨水因承受内外壓力差而加速運動，形成速度漸增的突出液面。當上下驅動電極之電壓於適當時間釋放，壓電振動元件亦回復原來形狀，使墨水腔2丨4内的墨水壓力下降，然而噴孔2 1 6處之墨水仍因慣性緣故，克服表面張力之牽絆而自喷孔2 1 6脫離，形成墨點（丨nk droplet) 〇其中，上下驅動電極的材質，例如是，鉑 (platinum)，爹巴（palladium)，或銀（silver)，或包含上述任何兩種或兩種以上組合的合金，或是其他具有良好導電特性的材料。而壓電振動元件（piez〇electric vibrating element)係具壓電性質之材料，一般係包含有·結酉夂鈦酸錯（lead zirconate titanate)，鎮代銳酸錯（lead magnesium-ni0bate)，鎳代鈮酸鉛（lead nickel niobate) ’ 辞代銳酸錯（iea(j zinc-ni〇bate)，猛Page 8 528680 V. Description of the invention (6) Next, as shown in FIGS. 2E to 2F, a nozzle plate 212 is covered on the bottom surface 206 of the silicon wafer 202 to form a plurality of ink chambers 214. The nozzle hole sheet has a plurality of nozzle holes 2 1 6 formed by laser or etching, and one nozzle hole 2 1 6 corresponds to one ink chamber 2 1 4 for spraying the ink in the ink chamber 2 1 4 Out. Then, a piezoelectric vibration element (not shown in FIG. 2F) having upper and lower driving electrodes is formed on the metal vibration layer 208, wherein the piezoelectric vibration element has a piezoelectric property. When a voltage is applied to the upper and lower driving electrodes by the control circuit, the piezoelectric vibration element adjacent to the upper and lower driving electrodes will be deformed, and then the vibration piece 2 08 will be bent sideways to squeeze the ink in the ink chamber 2 1 4. The ink located at the nozzle hole 216 accelerates due to the pressure difference between the inside and outside, forming a protruding liquid surface with an increasing speed. When the voltage of the upper and lower driving electrodes is released at an appropriate time, the piezoelectric vibrating element also returns to its original shape, which reduces the ink pressure in the ink chamber 2 丨 4. However, the ink at the nozzle holes 2 1 6 is still inertia and overcomes the surface tension. Trapped and detached from the nozzle 2 16 to form ink droplets. Among them, the material of the upper and lower driving electrodes is, for example, platinum, platinum, or silver, or contains An alloy of any two or more of the above, or other materials with good conductive properties. Piezoelectric vibrating elements are materials with piezoelectric properties. Generally, they include lead zirconate titanate, lead magnesium-ni0bate, and nickel. Lead nickel niobate ”'iea (j zinc-ni〇bate), fierce

第9頁 528680Page 528680

五、發明說明（7) 代鈮酸錯（lead manganese-niobate) ’ 錄代銳®（lead antimony-stannate)，或鈇酸錯（lead titanate)等具有壓電特性的材料。5. Description of the invention (7) Lead manganese-niobate ’Lead antimony-stannate, or lead titanate and other materials with piezoelectric properties.

與傳統上利用層層壓合對位燒結方式所製成的壓電式噴墨頭之喷墨裝置相較，本發明係利用半導體製程，如光蝕刻技術在一基材上形成複數個墨水腔，不但可避免壓合對位不準確的情形，亦可使墨水腔成形的良率大為提高，製程時間也大為縮短。另外，金屬片所形成的金屬振動 ^ =不但可快速形成使製程時間縮短，製程成本亦降低。右疋使用電鑄方式成形，金屬振動層的厚度可以輕易達到數十# m以上，因此振動層的結構不會受到厚度的限而使設計的自由度較高。，得^意的是，在上述實施例中，雖然以矽晶片為j 限。基材的材料也基材iiii屬；=用：ί屬作為振動層之材料κ 、’ 動層’係為本發明之技術特徵。【發明效果】本發明上述實施例所揭露 +Compared with the conventional inkjet device of the piezoelectric inkjet head which is traditionally made by the lamination and registration sintering method, the present invention uses a semiconductor process such as photolithography to form a plurality of ink chambers on a substrate. , Not only can avoid the situation of inaccurate pressure alignment, but also can greatly improve the yield of ink cavity forming, and greatly shorten the process time. In addition, the metal vibration formed by the metal sheet ^ = can not only be formed quickly, shorten the process time, but also reduce the process cost. The right side is formed by electroforming, and the thickness of the metal vibrating layer can easily reach more than several tens of meters. Therefore, the structure of the vibrating layer is not limited by the thickness and the degree of freedom in design is high. It is interesting to note that, in the above embodiment, although the silicon wafer is limited to j. The material of the base material is also the material of the base material iiii; = Used: The material κ as the vibration layer, and the 'moving layer' are the technical features of the present invention. [Effects of the Invention] Disclosed by the above embodiments of the present invention +

及其製造方法，係光敍刻；，登2式贺墨頭之喷墨裝電鑄，物理氣相鍍膜，或化=f材形成墨水腔，並利的金屬振動層，解決了傳统了 ^相鍍膜等方式形成墨水變形的問㉟，因壓ί對位不易和燒結引起此，相當適合用以作為大量^產使^時間短之優點。因Its manufacturing method is based on optical engraving; the inkjet mounted electroforming of Deng 2 type ink-jet head, physical vapor-phase coating, or chemical material to form an ink cavity, and a favorable metal vibration layer, solve the traditional problem ^ The problem of ink deformation caused by phase plating and other methods is caused by the difficulty of pressure alignment and sintering, which is quite suitable for the advantages of mass production and short time. because

528680 五、發明說明（8) 綜上所述，雖然本發明已以一較佳實施例揭露如上，然其並非用以限定本發明，任何熟習此技藝者，在不脫離本發明之精神和範圍内，當可作各種之更動與潤飾，因此本發明之保護範圍當視後附之申請專利範圍所界定者為準〇讀528680 V. Description of the invention (8) In summary, although the present invention has been disclosed as above with a preferred embodiment, it is not intended to limit the present invention. Any person skilled in the art will not depart from the spirit and scope of the present invention. In addition, it can be modified and retouched. Therefore, the scope of protection of the present invention shall be determined by the scope of the attached patent application.

第11頁 528680 圖式簡單說明【圖式之簡單說明】第1 A圖繪示一種傳統壓電式喷墨頭之單一喷墨腔之剖面圖；第1 B圖繪示第1 A圖之單一喷墨腔經過燒結後之示意圖：及第2 A〜2 F圖繪示依照本發明一較佳實施例之壓電式喷墨頭之喷墨裝置之部分製程。【圖式標號說明】 1 0 2 :墨水腔下蓋 1 0 4 :墨水腔本體 1 0 6、2 1 4 :墨水腔 1 0 8 ·振動片 1 1 0 :上驅動電極 1 1 1 :下驅動電極 1 1 2 :壓電振動元件 202 :矽晶片 204 :頂面 2 0 6 :底面 2 0 8 :振動層 2 1 0 :保護層 2 12:喷孔片 2 1 6 :喷孔Page 11 528680 Brief description of the drawing [Simplified description of the drawing] Fig. 1A shows a cross-sectional view of a single inkjet cavity of a conventional piezoelectric inkjet head; Fig. 1B shows a single diagram of Fig. 1A Schematic diagram of the inkjet cavity after sintering: and Figures 2A ~ 2F show a part of the process of the inkjet device of the piezoelectric inkjet head according to a preferred embodiment of the present invention. [Illustration of figure number] 1 0 2: Ink chamber lower cover 1 0 4: Ink chamber body 1 0 6, 2 1 4: Ink chamber 1 0 8 · Vibrating plate 1 1 0: Upper drive electrode 1 1 1: Lower drive Electrode 1 1 2: Piezoelectric vibration element 202: Silicon wafer 204: Top surface 2 0 6: Bottom surface 2 0 8: Vibration layer 2 1 0: Protective layer 2 12: Nozzle piece 2 1 6: Nozzle

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Claims

528680 六、申請專利範圍 1. 一種壓電式喷墨頭之喷墨裝置，可與一墨水槽 (ink reservoir)連接，該墨水槽内含有一墨水（ink)，該喷墨裝置包括：一墨水腔，與該墨水槽連通並充填有該墨水，該墨.水腔包括：一金屬振動層，位於該墨水腔之上方；及一喷孔片，位於該墨水腔之下方，該喷孔片上有一喷孔，與該墨水腔連通，用以將該墨水自該喷孔喷出；一下驅動電極（driving electrode)，位於該振動層之上方；一壓電振動元件（piezoelectric vibrating 地 element)，具有壓電性質，位於該下驅動電極之上方；及· 一上驅動電極，位於該壓電振動元件上方；其中，當一電壓施加於該上下驅動電極時，該壓電振動元件產生變形而使該金屬振動片側向彎曲，進而擠壓墨水腔内的該墨水使自該喷孔處喷出。 2 · 如申請專利範圍第1項所述之喷墨裝置，其中，該金屬振動層之材料係鎳（N i )。 3 · 如申請專利範圍第1項所述之喷墨裝置，其中，該金屬振動層之材料係銅（Cu)。 4 · 如申請專利範圍第1項所述之喷墨裝置，其中，該金屬振動層之材料係始（Pt)。 5 · 如申請專利範圍第1項所述之喷墨裝置，其中，該廢電振動元件係含有鈦酸热（lead titanate)。528680 6. Application patent scope 1. An inkjet device of a piezoelectric inkjet head can be connected with an ink reservoir, the ink reservoir contains an ink, and the inkjet device includes: an ink The cavity is in communication with the ink tank and is filled with the ink. The ink. The water cavity includes: a metal vibration layer located above the ink cavity; and an orifice plate located below the ink cavity, and the orifice plate has a A spray hole is communicated with the ink cavity for ejecting the ink from the spray hole; a lower driving electrode is located above the vibration layer; a piezoelectric vibration element (piezoelectric vibrating ground element) having a pressure Electrical properties, located above the lower driving electrode; and · an upper driving electrode located above the piezoelectric vibrating element; wherein when a voltage is applied to the upper and lower driving electrodes, the piezoelectric vibrating element is deformed to cause the metal The vibration piece is bent sideways, and then the ink in the ink cavity is squeezed to be ejected from the spray hole. 2. The inkjet device according to item 1 of the scope of patent application, wherein the material of the metal vibration layer is nickel (N i). 3. The inkjet device according to item 1 of the scope of patent application, wherein the material of the metal vibration layer is copper (Cu). 4 · The inkjet device according to item 1 of the scope of patent application, wherein the material of the metal vibrating layer is Pt. 5. The inkjet device according to item 1 of the scope of patent application, wherein the waste electric vibration element contains lead titanate.

第13頁 528680 六、申請專利範圍 6 ·如申請專利範圍第1項所述之喷墨裝置，其中，該壓電振動元件係含有鍅酸鈦酸船（lead zirconate t i t an a t e ) ° 7 · 如申請專利範圍第1項所述之喷墨裝置，其中，該壓電振動元件係含有鎂代銳酸錯（1 e a d magnesium-niobate) 〇 8 ·如申請專利範圍第1項所述之喷墨裝置，其中，該壓電振動元件係含有錄代銳酸船（lead n i eke 1-n i obate)。 9 ·如申請專利範圍第i項所述之喷墨裝置，其中，壓電振動元件係含有鋅代鈮酸鉛（lead zinc-niobate)。 1 0 ·如申請專利範圍第1頊所述之喷墨裝置，其中，該壓電振動元件係含有錳代鈮酸鉛（1 ead manganese-niobate) 〇 1 1 ·如申請專利範圍第1項所述之噴墨裝置，其中，該壓電振動元件係含有鎊代鈮酸鉛（1 ead antimony-stannate)。 12· —種壓電式噴墨頭之喷墨裝置之製造方法，至少包括以下之步驟：提供一基材，該基材包栝一頂面和一底面；於該基材之該頂面上形成一金屬振動層；及定義該基材之該底面以形成複數個墨水腔。 13·如申請專利範圍第1 2項所述之製造方法，其中，該基材係一矽晶片。Page 13 528680 6. Scope of patent application 6 · The inkjet device described in item 1 of the scope of patent application, wherein the piezoelectric vibration element contains a lead zirconate titanate boat ° 7 · Such as The inkjet device according to item 1 of the scope of patent application, wherein the piezoelectric vibration element contains 1 ead magnesium-niobate 〇8. The inkjet device according to item 1 of the scope of patent application The piezoelectric vibrating element includes a lead ni eke 1-ni obate. 9. The inkjet device according to item i in the scope of patent application, wherein the piezoelectric vibration element contains lead zinc-niobate. 1 0 · The inkjet device according to item 1 in the scope of the patent application, wherein the piezoelectric vibration element contains 1 ead manganese-niobate 〇1 1 · As described in the first scope of the patent application The inkjet device described above, wherein the piezoelectric vibration element contains 1 ead antimony-stannate. 12 · —A method for manufacturing an inkjet device of a piezoelectric inkjet head, including at least the following steps: providing a substrate, the substrate including a top surface and a bottom surface; on the top surface of the substrate Forming a metal vibration layer; and defining the bottom surface of the substrate to form a plurality of ink chambers. 13. The manufacturing method according to item 12 of the scope of patent application, wherein the substrate is a silicon wafer.

528680 六、申請專利範圍 14. 如申請專利範圍第1 3項所述之製造方法，其中，定義該矽晶片之該底面以形成複數個墨水腔之步驟更包括微影（photolithography)和钱刻（etching) 〇 15. 如申請專利範圍第1 2項所述之製造方法，其中，該基材係一陶瓷基板。 16. 如申請專利範圍第1 2項所述之製造方法，其中，該基材係一金屬片。 17. 如申請專利範圍第1 2項所述之製造方法，其中，該金屬振動層之材料係鎳（Ni)。 18. 如申請專利範圍第1 2項所述之製造方法，其中，該金屬振動層之材料係銅（C u )。 19. 如申請專利範圍第1 2項所述之製造方法，其中，該金屬振動層之材料係始（P t)。 20. 如申請專利範圍第1 2項所述之製造方法，其中，該金屬振動層係以電鑄法形成於該基材之該頂面上。 2 1. 如申請專利範圍第1 2項所述之製造方法，其中，該金屬振動層係以物理氣相鍵膜法（Physical Vapor Deposition，PVD)形成於該基材之該頂面上。 22. 如申請專利範圍第1 2項所述之製造方法，其中，該金屬振動層係以化學氣相鍍膜法（Chemical Vapor Deposition，CVD)形成於該基材之該頂面上。 23. 如申請專利範圍第1 2項所述之製造方法，其中，更包括以下步驟：於該金屬振動層上形成一下驅動電極；528680 6. Application for Patent Scope 14. The manufacturing method described in item 13 of the scope of application for patent, wherein the steps of defining the bottom surface of the silicon wafer to form a plurality of ink chambers further include photolithography and money engraving ( etching) 〇15. The manufacturing method as described in item 12 of the scope of patent application, wherein the substrate is a ceramic substrate. 16. The manufacturing method according to item 12 of the scope of patent application, wherein the substrate is a metal sheet. 17. The manufacturing method according to item 12 of the scope of patent application, wherein the material of the metal vibration layer is nickel (Ni). 18. The manufacturing method according to item 12 of the scope of patent application, wherein the material of the metal vibration layer is copper (Cu). 19. The manufacturing method as described in item 12 of the scope of patent application, wherein the material of the metal vibration layer is Pt. 20. The manufacturing method according to item 12 of the scope of patent application, wherein the metal vibration layer is formed on the top surface of the substrate by an electroforming method. 2 1. The manufacturing method as described in item 12 of the scope of patent application, wherein the metal vibrating layer is formed on the top surface of the substrate by a physical vapor bonding method (PVD). 22. The manufacturing method as described in item 12 of the scope of patent application, wherein the metal vibration layer is formed on the top surface of the substrate by a chemical vapor deposition method (CVD). 23. The manufacturing method according to item 12 of the scope of patent application, further comprising the following steps: forming a driving electrode on the metal vibration layer;

第15頁 528680 六、申請專利範圍於該下驅動電極上形成一壓電振動元件，其中該壓電振動元件具有壓電性質；於該壓電振動元件上形成一上驅動電極；及於該些墨水腔上形成一喷孔板（η ο z z 1 e p 1 a t e )，該喷孔板上形成複數個喷孔以與該些墨水腔相對應，用以喷出該些墨水腔内的墨水。 24. 如申請專利範圍第2 3項所述之製造方法，其中，該些喷孔係利用雷射方式形成。 25. 如申請專利範圍第23項所述之製造方法，其中，該些喷孔係利用蝕刻方式形成。 26. 如申請專利範圍第23項所述之製造方法，其中，該壓電振動元件係含有欽酸錯（1 e a d t i t a n a t e )。 27. 如申請專利範圍第2 3項所述之製造方法，其中，該壓電振動元件係含有錯酸鈦酸热（lead zirconate titanate) 〇 28 . 如申請專利範圍第2 3項所述之製造方法，其中，該壓電振動元件係含有鎂代鈮酸鉛（1 ead magnes i um-niobate) ° 29 . 如申請專利範圍第23項所述之製造方法，其中，壓電振動元件係含有鎳代鈮酸鉛（1 e a d n i eke 1-n i obate) 〇 3 0· 如申請專利範圍第2 3項所述之製造方法，其中，該壓電振動元件係含有鋅代鈮酸鉛（1 ead z i nc-n i obate) oPage 15 528680 6. The scope of the patent application forms a piezoelectric vibration element on the lower driving electrode, wherein the piezoelectric vibration element has a piezoelectric property; an upper driving electrode is formed on the piezoelectric vibration element; and An ink hole plate (η ο zz 1 ep 1 ate) is formed on the ink cavity. A plurality of nozzle holes are formed on the ink hole plate to correspond to the ink holes, and are used to eject the ink in the ink holes. 24. The manufacturing method according to item 23 of the scope of patent application, wherein the spray holes are formed by a laser method. 25. The manufacturing method according to item 23 of the scope of patent application, wherein the spray holes are formed by an etching method. 26. The manufacturing method as described in item 23 of the scope of application for a patent, wherein the piezoelectric vibration element contains cinnamic acid (1 e a d t i t a n a t e). 27. The manufacturing method described in item 23 of the scope of patent application, wherein the piezoelectric vibrating element contains lead zirconate titanate. 28. Manufacturing according to item 23 of the scope of patent application Method, wherein the piezoelectric vibration element contains 1 ead magnes i um-niobate ° 29. The manufacturing method according to item 23 of the patent application scope, wherein the piezoelectric vibration element contains nickel 1 eadni eke 1-ni obate 〇3 0 · The manufacturing method as described in item 23 of the patent application scope, wherein the piezoelectric vibrating element contains 1 ead zi nc -n i obate) o

第16頁 528680 六、申請專利範圍 31. 如申請專利範圍第23項所述之製造方法，其中，該壓電振動元件係含有錳代鈮酸鉛（lead manganese-niobate) ° 3 2. 如申請專利範圍第2 3項所述之製造方法，其中，該壓電振動元件係含有諦代鈮酸鉛（lead antimony-stannate)。 iPage 16 528680 6. Scope of patent application 31. The manufacturing method as described in item 23 of the scope of patent application, wherein the piezoelectric vibration element contains lead manganese-niobate ° 3 2. As applied The manufacturing method according to item 23 of the patent, wherein the piezoelectric vibration element contains lead antimony-stannate. i

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