TW445682B - Gas discharge laser with magnetic bearings and magnetic reluctance centering for fan drive assembly - Google Patents
Gas discharge laser with magnetic bearings and magnetic reluctance centering for fan drive assembly Download PDFInfo
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- TW445682B TW445682B TW089106808A TW89106808A TW445682B TW 445682 B TW445682 B TW 445682B TW 089106808 A TW089106808 A TW 089106808A TW 89106808 A TW89106808 A TW 89106808A TW 445682 B TW445682 B TW 445682B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/04—Arrangements for thermal management
- H01S3/041—Arrangements for thermal management for gas lasers
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
- F16C32/0406—Magnetic bearings
- F16C32/044—Active magnetic bearings
- F16C32/047—Details of housings; Mounting of active magnetic bearings
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/038—Electrodes, e.g. special shape, configuration or composition
- H01S3/0385—Shape
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
- H01S3/22—Gases
- H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
- H01S3/225—Gases the active gas being polyatomic, i.e. containing two or more atoms comprising an excimer or exciplex
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- Engineering & Computer Science (AREA)
- Electromagnetism (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- General Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Mechanical Engineering (AREA)
- Lasers (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Description
A7 4456B; ___________ 五、發明說明(1 ) 詳細說明: 本發明係有關於氣體雷射,尤係關於高重複率的放電 氣體雷射。 放電氣體雷射自1960年代雷射被發明之後乃已被公知 並很快地廣泛使用。在兩個電極之間的高壓放電會激發一 氣態的放大介質。一包含該放大介質的共振腔穴乃可容許 光的激發放大,嗣可被以一雷射光束的形式由該腔六被引 出。此等放電氣體雷射係能以持續或脈衝的方式來操作。 準分子雷射係為一種特殊的放電氣體雷射,而在1970 年代中期已被公知。一種供使用於積體電路光蝕刻之準分 子雷射,乃揭述於1991年6月11曰公告的第5023884號美國 專利案中,名稱為,'小型準分子雷射”。該發明已被讓渡給 申請人的產生’並於此附送參考。該專利案所述之準分子 雷射係為一種高重複率的脈衝雷射。該雷射丨〇之主要構件 乃示於第1圖中,其係相當於該專利案的第1圖。放電壓22 係介於二相隔的5/8吋的長(約23吋)電極18與20之間。如 所述的習知雷射之重複率’典型係在每秒1 〇〇至1 〇〇〇脈衝 的範圍内。該等高重複率的雷射通常設有一氣體循環系統 ’其可在每一脈衝之間將氣體重置於電極之間的區域。在 上述的雷射中,此係以一長的轉籠式風扇46來進行,其具 有數扇葉48如第1、2圖所示,而在該專利案中為第7圖。 該風扇係稍長於電極18與20,並具有足的循環能力而能在 100至1000HZ的脈衝率下,使當各脈衝之間在二電極之間 的氣體皆為清淨的》該風扇46的轉軸130係由二軸承132所 本紙張尺度適用中關家標準(CNS)A4規格⑵Q x 297公餐)----. * T-- -111 JIT---^ -裝 i — — I — I 訂··--- - - — (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作杜印製 經濟部智慧財產局員工消費<合作社印製 A7 B7 五、發明說明(2 ) 支撐如第3圖所示,其在該專利案中係為第9圖。使用於該 雷射中的氣體含有氟其係非常激活的'•驅動該風扇轉軸130 之風扇轉子乃被密封件136密封於由殼體構件12與14所提 供之同一環境系統中,如該專利案中第9欄第45行所述者 ,而該馬達定子140係在密封件136外部,並被保護免受氟 氣體的腐蝕作用。但是,軸承132等在利用任何潤滑下皆 會受該腔室氣體的腐餘作用。而抽承的腐触與獨滑皆會污 染該氣體。 活動磁性軸承乃已被公知許多年。該等系統早在1938 年已被構造’而在今日被使用於許多產業用途。該等軸承 之所知優點包含較長的使用壽命,減少維修及軸承損耗小 ,且不需要潤滑而可消除污染源。 一典型的習知活動徑向軸承乃示於第4圖中。感測器2 會感測軟鐵轉子4的位置,並發出一信號至控制器6,其可 由能量放大器10來控制電磁鐵8中的電流,而產生所需之 精確磁場來平衡在預定位置的轉子4。
第5848089號美國專利案已讓渡給申請人的產生,乃 揭露一氣體放電雷射 > 具有活動磁性軸承以提供徑向及轴 向的支撐=申請人及其工作夥伴們已利用該專利之技術成 功地驗證實施該雷射總成。然而,提供徑向與軸向承轴及 所附的活動式控制及是非常昂貴的D 故需要減少氣體放電雷射之磁性秘承系統的成本費用 〇 本發明係在提供一種放電氣體雷射,具有一雷射腔穴 本紙張尺度·中_ 4+ US)A4規格(210 X 297公爱) 敦-------—訂---------線 (請先閱讀背面之;i意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 445682 A7 ----B7__ 五、發明說明(3 ) 其中含有一雷射氣體及一風扇可循環該雷射氣體。該風扇 係由一活動經由堵性軸承系統所撑持,並由一無刷式DC 馬達所驅動,其中該馬達的轉子及至少二徑向軸承的轉子 ,係被密封於該雷射腔穴的氣體環境中,而該馬達定子及 軸承磁鐵的線圈則設於該氣體環境的外部》不必設置止推 轴承。該轉轴的轴向定位係藉磁阻定心來提供,其乃由至 少二徑向磁性轴承及該無刷DC馬達所產生者〇在一較佳 實施例中’該馬達定子於轴向係大於該轉子,以增加該磁 性定心作用。 圖式簡單說明: 第1圖示出一習知的雷射系統。 第2圖示出第1圖中之雷射的轉籠式風扇之位置。 第3圖示出一可驅動該風扇之習知的無刷DC馬達。 第4圖顯示一習知活動徑向磁性軸承系統之功能。 第5圖係本發明一較佳實施例之剖視圖。 第6圖為磁阻定心的示意囷。 第7圖為一標示資料圖表示出磁阻定心的結果。 本發明之較佳實施例乃可參考各圖式來說明。 第5圖示出本發明一較佳實施例的重要特徵。該圖式 示出一在第5023 8 84號美國專利案中所述之準分子雷射令 供氣體循環的風扇系統。該氣體係含有氟,一緩衝氣體氖 ’及一惰性氣體可為氪或氬。在該習知的單元中,轉子134 係設於轉軸130的一端,而可用該轉子134來驅動該轉軸丨3〇 及26吋長的風扇46,該風扇的中段於第5圖中已被截除。 本纸張尺度適用中因國家標準(CNS)A4規格C297公爱)--~6 .---- ----------裝--------訂--------- (請先閲讀背面之注意事項再填寫本頁) A7 B7 五、發明說明(4 ) 包圍著該轉子134末端及密封件136者係為定子14〇,其係 為一組捲繞線圏。該定子14〇與轉子134一起形成一無刷0{: 馬達,其基本上以平常方式運作。該馬達與一正常的無刷 DC馬達間之主要差異,係在於利用密封件136設於轉子與 定手之間,而使該轉子相對密封於該定子14〇。此等設計 可使該DC馬達驅動風扇46而不必使用於前述專利案中所 述之旋轉密封方式。該馬達亦包括電路板142 ’電源輸入 連接器144,及一Hall(霍耳)檢測器146乃如前述專利案中 所揭。 訂 線 經濟部智慧財產局員工消費合作社印製 本發明之該實施例包含二徑向磁性軸承2〇與22支撑著 該風扇46之轉軸130的兩端。該轉軸13〇的軸向定位係向定 子140對轉子134之磁阻定心來提供6負責該磁阻定心的磁 場線乃示於第6囷中。各徑向軸承20與22皆含有四個電磁 鐵26(其中兩個示於第5圖中)。最好該等電磁鐵係被定位 於45。、135° 、225°及315。的徑向位置。其轉子28及定子 元件係由疊層的軟鐵所製成《事實上,該等電磁鐵非常相 似於上述之無刷DC馬達。但是’該等磁鐵的功能係在將 S袭風扇轉軸固持於妥當的徑向位置,而非用以驅轉它。該 等磁鐵最好係以一固定的偏流來激磁(大約為用一控制電 流來對稱擾動以產生動態控制力之最大電流的一半)。該 固疋偏流會使袖承所產生之磁力直線化β徑向位置感測写 32等會呈90°間隔分開,並對齊於各電磁鐵,而能提供位 置資訊給一控制單元(未示出)’其可依據習知技術來控制 流至各電磁鐵的電流。 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) 4 45 6 4 45 6 8 .ί ΑΊ
五、發明說明(5 ) (請先閱讀背面之注意事項再填寫本頁) 在該風扇轉軸130兩端的轉子腔穴係被密封件130、136 及〇型環138所密封。因此,該馬達單元14〇之繞組及在軸 承20與22處之電磁鐵等,將可被保護免受在雷射腔室中之 氟氣體的腐蝕。 於此較佳實施例中,該風扇係為一 26吋長的單轴風扇 ’而由九個2.3吋長之相同的筒狀(中空)塊段所製成。每 一塊段係由二具有3.75吋外徑與2.75吋内徑的環體/圓環所 製成。在該等環體之間設有二十三個扇葉/葉片環繞360° 。該等扇葉為2.3吋長,0.5吋寬(弯曲的)及〇.〇3吋厚。該 風扇係由鋁合金製成重為1.5磅。為了其它的考量其最終 的重量可能高至2·0磅,或者更多。該風扇的較佳速度為 3300至 5000PRM。 該風扇以3000至5000RPM的速度,在大約60°C的溫 度下運作於具有約0.1%氟含量的需射氣體環境中。利用 該等軸承,發明人等乃期望能有3000小時的無問題操作可 達95%的可靠程度,而有10000小時的操作能達99%的可 靠程度。 經濟部智慧財產局員工消費合作社印製 本發明超通等^848089號美國專利案所述系統之主要 優點係不須要有軸向彰其軸向定位乃由二徑向磁性軸 承與該無刷DC馬達所產生的磁阻定心作用所提東。第6圖 係示出定子的磁場線1 55及轉子磁場線156,其會迫使該轉 子的磁性中心與該定子的磁性中心轴向地對齊該磁阻定 心作用係可藉在該等磁鐵或DC馬達處使轉子軸向地較長 於其所對應的定子而來提升。另藉著使該等定子軸向地較 本紙張尺度適用中國國家標準(cnS)A4規格(210 X 297公餐) % 五 A7
發明說明(6 ) 長於轉子亦可達到相同的效果。 習知的風扇一般係以固定的速度例如38〇〇RPM來操 作。而本發明將以高至5〇〇〇RPM或更高的速度來操作。 在較佳的模式中’該速度係持續地或周期性地自動循環 變化’例如由4000RPM至5000RPM,以使該腔室内之氣 體能更佳地混合 風扇速度之自動循環亦可被用來避免在 該長型風扇中造成振盪。 假使有必要,該風扇之速度亦可藉一策略性設置之感 測器送至該控制器的資料而被控制。若當該旋轉風扇的零 件太靠近於在該腔室内之其他構件的零件時,此乃是有幫 助的5雖然有許多其它的理由須控制及/或改變該風扇的 速度’但在雷射操作中減少/控制聲波及/或振波及非常重 要的。 為了證明磁阻定心的實用性,申請人已用如第5圖所 不之原型風扇單元來實際測試。其測試資料之一例乃載述 於下列表中: 裝--------訂---------線 (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員T1消費合作社印製 本 欄 1 欄Ί _· - 1.— ____ 只用磁性 位移 吋 磅 0.000 0.00 0.005 "^1 0.6T 0.010 0.84 0.015 1.28 0,020 1.65 0,025 2.05 0.030 「2.4? 2 0.03$ .81 攔 3 磁性軸承及馬達 襴 4 馬達淨作用 磅 磅 0.00 0.00 0.82 1.16~ 0.21 0.32 1.71 0.43 2.20 2.27 0.55 0.67 3.16 ! 0.71 3.58 ! 0.77 A7 4 45b ( ! —--—_ 五、發明說明(7 ) 欄1係由該轉轴向磁阻中心位置位移的測量值。欄2係 為DC馬達關閉時將該轉軸移動相當於欄〗中之對應位移值 的距離所需之力。欄3係相同於欄2,惟該馬達乃以 5000RPM轉動風扇。襴4代表欄2與欄3之差異,或該馬達 之單獨磁阻定心作用。該資料乃標示於第7圖中。 雖本發明已用目前認為較佳的實施例來描述,但應可 瞭解本發明並不受限於所揭實施例,相反地,乃涵蓋各種 含括於下列申請專利範圍之精神與範疇内的修正及等效實 施。例如’前僅示出一個徑向活動磁性轴承之例子。但有 許多其它的磁性軸承設計係已泛知而可被採行於使用在此 所揭概念的氣體放電雷射。在諸多實施例中,設置該等軸 承乃可避免非預期之太大的軸向或徑向力量所造成的危險 或磨損。所揭之風扇驅動單元在作為KrF與ArF雷射及F2 雷射之驅動器時乃特別有用。因此,該項領域之專業人士 應可瞭解所有該等等效實施皆包含於申請專利範圍中。 (請先閱讀背面之注意事項再填寫本頁
_ 裝 i I I 訂----- 經濟部智慧財產局員工消費合作社印製 10 本紙張&度適时關家鮮(CNS)A4規格(21G x 297公爱) 經濟部智慧財產局員工消費合作社印製 A: _B7_ 五、發明說明(8 ) 元件標號對照 2…感測器 48…扇葉 4…轉子 13 0…轉轴 6···控制器 130.136…密封件 8…電磁鐵 13 2…料承 10…雷射 134…轉子 12,】4…殼體構件 13 6…密封件 18.20…電極 138…0型環 2 0,2 2…徑向磁性轴承 140…馬達定子 22…放電區 142…電路板 26···電磁鐵 144…電源輸入連接器 2 8…轉子 146…霍耳檢測器 32…徑向位置感測器 155…定子磁場線 46…風扇 1 5 6…轉子磁場線 -------------裝.-------訂---------線 (請先閱讀背面之注意事項再填寫本頁) 本纸張適用中舀围家標準丨規格 11
Claims (1)
- 445682 AS E6 C8 DS 六、申請專利範圍 1. 一種放電氣體雷射,包含: A—殼體結構具有數壁形成一内部雷射腔穴; B—氣體置於該雷射腔六中以形成一氣體環境, 該氣體可造成雷射作用; C 一對間隔的細長電極設於該雷射腔穴中,並在 其間形成一放電壓’可激發在該放電區中的氣體配合 該二電極之間的放電而造成雷射作用; D —旋轉風扇具有一轉軸而設於該雷射腔穴内可 使該氣體循環通過放電區; E —無刷直流馬達包含一定子及一轉子可使風扇 旋轉並以磁阻定心作用來提供該風扇總成的轴向定位 經濟部智慧財產局員工消費合作社印製 F至少二徑向磁性抽承,各含有一定子及一轉子 及數位置感測器,而可對該轉轴提供徑向支撐: G該馬達與該至少二磁性轴承之轉子等,係各 接或間接地耦合於該轉轴;及 Η至少一密封件設於該等轉子與定之間來封閉 等轉子,且該密封件係密封於該殼體結構使該等轉子 有效地密封於該氣體環境中,而該等定子則在該氣體 環境外部。 2·如申請專利範圍第】項之雷射,更包含有—電子的風扇 控制單元能對該徑向磁性軸承提供高速的活動式控制。 3,如申請專利範圍第1項之雷射,其中該氣體乃包含 直 該 — i ---Γ -Η-----it---------線 y •^-.-'-"'::'/之.;1音?事項再填寫本頁> 素及一緩衝氣體以提供—準分子雷射 鹵 良紙張尺度適用由丨 12 A8 BS C8 DS 六、申請專利範圍 4. 如申請專利範圍第1項之雷射,其中該鹵素為氟,該緩 衝氣體為氖。 5. 如申請專利範圍第1項之雷射,其中該氣體更包含氪。 6. 如申請專利範圍第1項之雷射,其中該氣體更包含氬。 -------------裝--------訂---------線 (請先閱讀背面之d意事項再填寫本頁) 經濟部智慧財產局員工消費诠作杜印製 本.紙張弋度適用中闯S家標巫規格了公f 13
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US09/290,851 US6104735A (en) | 1999-04-13 | 1999-04-13 | Gas discharge laser with magnetic bearings and magnetic reluctance centering for fan drive assembly |
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TW089106808A TW445682B (en) | 1999-04-13 | 2000-04-12 | Gas discharge laser with magnetic bearings and magnetic reluctance centering for fan drive assembly |
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US (1) | US6104735A (zh) |
EP (1) | EP1045495B1 (zh) |
JP (1) | JP2001085766A (zh) |
KR (1) | KR100679075B1 (zh) |
DE (1) | DE60039145D1 (zh) |
TW (1) | TW445682B (zh) |
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EP1045495A2 (en) | 2000-10-18 |
JP2001085766A (ja) | 2001-03-30 |
US6104735A (en) | 2000-08-15 |
EP1045495B1 (en) | 2008-06-11 |
DE60039145D1 (de) | 2008-07-24 |
KR100679075B1 (ko) | 2007-02-05 |
EP1045495A3 (en) | 2003-09-24 |
KR20000071666A (ko) | 2000-11-25 |
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