4 455 9 q 4 455 9 q 經濟部智慧財產局員Η消費合作社印®!ί A7 一 .~. .—一 ~·----------4 455 9 q 4 455 9 q Member of the Intellectual Property Bureau of the Ministry of Economic Affairs ΗConsumer Cooperative Cooperative Seal®! Ί A7 一. ~. .— 一 ~ · ----------
五、發明說明（P 1 ‘發明之領域 本發明係有關於一種晶片f r L 1A灿 里印片（Chip)容器換裝裝置與方法， 尤其係有關於-種在積體電路模組（IC Chip)之測試程 、，將置於料管（Tube)中之晶片換裝至料盤（Tray)令的 容器換裝裝_置與方法。 2.先前技藝之說明 在積體電路7Ό件I製成過程中，除了在基體上作出各式 半導體元件而形成一晶方（Dle)外，通常還會對該晶方進行 測試程序以及封裝程序等，而形成—所謂積體電路晶片 Chip) °而且，在芫成封裝程序後’每顆⑴晶片通常會被容 裝在一料管中運送至各測試機台進行測試。 此外，隨著測試機台之進步，其測試方式亦從以往之— 顆顆IC測試，進步至一整盤I c同時進行測試。然而，不同 測试功能之機台不一定提供相同的測試方式，因而當要在 各種機台之間移轉以進行各種測試時，常需要將容裝在科 管之晶片轉換成放在料盤上。': 又，以往之轉換作業有兩種，一種是純人工作業，亦即 以純手工將一顆顆IC晶片從料管取出，再一顆顆排列在料 盤中’此具優點於彈性大，但人力需求大，速度慢，頂多 只達到每小時3000顆（3000 UPH)，且易碰傷1C，或是造成 晶片反向投料（方向相反）之情形。另一種是純自動化作業， 其轉換型式亦是一次一顆’其優點是人力簡化，品質穩定 ，但速度仍不夠快，約可達4 5 ο ο υ Ρ Η，且設備投資費用高 本紙張尺度適用中固围家標準（CNS)A4規丨各（210 χ 297公髮） 1---!i — —--- .丨 — II---訂·--I----- (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 44^59 8 A7 —------- B7 五、發明說明（ 2) ’體積大、佔空間u 不。可者相對於料盤式測試機台之每小時6 〇 〇 〇顆以上 的處理能力’目前所用之方法顯然皆有極待改善之處。 發明之概i 為此，本發明之目的即在於提供—種佔地空間減省、建 置成本低、且轉換速率高的晶片容器換裝裝置與方法。 本發明之另一目的在於提供—種可避免因人為因素造成 方向錯誤等品質不穩定情事的晶片容器換裝裝置。 為達成上.述目的，本發明所揭晶片容器換裝裝置包含·· 基座，可旋動暫存架，用以承接並暫存各料管中之多 數晶片，且可在該基座上旋動，並具有複數個平行並列而 可容納晶片之縱長暫存槽，各該暫存槽具有一料管固定端 開口與一可被封閉之晶片出口端開口；一可滑動轉置架， 用以推動各暫存槽中之晶片使之由該出口端開口落入—用 以谷置該等晶片之料盤，其裝設於該暫存架上且可沿該等 暫存槽之延伸方向相對於該暫存架滑動於—起始位置與一 完成位置之間，並具有一料盤載架與一閘控裝置；該料盤 載采位於遠等暫存槽下方，供載置該料盤；該閘控裝置位 於該等暫存槽上方，具有一滑動部與一排可升降手指部， 該滑動部與該料盤載架相連結而可與其同步同向滑動，該 等手指邵對應於各暫存槽並列設於該滑動部上，且設置成 可移位於一伸入各對應暫存槽中推動該等晶片之撲止位置 ’與一升離各對應暫存槽供該等晶片通過之開放位置。 為達成上述目的，本發明所揭晶片容器換裝方法包含： 本紙張尺度適用中國國家標準（CNS)A4規格（21〇x 297公呈） 'lltlllllll *—^· I —--I--訂 ---------. (請先閱讀背面之注意事項再填寫本頁) 五 經濟部智慧財產局員工消費合作社印製 4455 Q R A7 ___ B7 發明說明（3) (I)備置複數條縱向並列且各具有兩端開口的晶片暫存槽’ 以及位於該等暫存槽正下方具有一供收存晶片空間的料盤 ，且使該料盤之該晶片收存空間之其中一端约略與該等暫 存槽之其中一端開口切齊；（2)使複數個晶片依序自該等暫 存槽之另一端開口落入該等暫存槽中，並且使其偏靠該等 暫存槽之該其中一端開口而並列於該等暫存槽中；以及（3) 使該料盤以該等暫存槽之另一端開口向該其中一端開口之 延伸方向，移離該等暫存槽下方，並同時使該等複數個晶 片與遠料盤同步同向地依序並列移出該其中一端開口，且 依序並列落入該料盤中。 藉由上述裝置與方法，由於無須電動機構，且利用一多 槽並列之暫.存架，以自由落體及序進並出之方式進行轉換 ’其產能將可達到1 2000UPH，因而設備費用節省，且轉 換效率比自動機器作業或人工作業還快，終而可以獲得— 產能提高、佔地節省、費用低的晶片容器換裝裝置。 又，在進一步實施例中並設有一防呆裝置，其僅在有放 置料盤且料盤之放置方向正確峰才可進行晶片換裝之動作 ，因而可以避免因人為操作失誤所造成之損壞晶片或反向 置放晶片等換裝品質上之瑕疵。 圖式之簡單說明 圖ί顯示一根據本發明之一實施例而成之晶片容器換裳裝 置之等角斜視圖。 圖2顯示圖1所示換裝裝置從出口端看時之端视圖。 圖3顯示沿圖1之111 - π I截取的剖面侧視圖。 本纸張尺度適用中囷囤家揉準（CNS)A4規格（2!〇χ297公釐） -------------------訂·------- (請先閱讀背面之注意事項再填寫本頁) 4455 9 8 A7 B7 五、發明說明（ 圖4顯示利用圖1所示換裝裝置來載入料管中之晶片時的 斜視圖。 圖 圖5顯示利用目i所示換裝裝置轉出晶彳至料盤時的項视 盤=’本發明而成—及所欲承載之料 經濟部智慧財產局員工消費合作社印製 1 式.符號之說明 1 晶片容器換裝裝置 10 料管 20 料盤 2 1 凸緣 22 晶片容置空間 30 晶片 100 基座 10 1 底座 102 架腳 103 卡栓 200 暫存架 210 床板 2 11 暫存槽 2 11a 出口端開口 211b料管***端開口 22〇Ej220b 立板 221，222 導軌 223 穿槽 230 扶手 2 4 0- 轉軸 3 00 轉置架 3 10 料盤載架 3 11 載座 3 11a 底板 3 11b 邊框 3 11c 滑子 Slid 凹部 3 12 固定器 3 12a 定止機構 3 12b 握把 3 13 把手 3 14 防呆裝置 3 14a 掣爪 3 14b 止動具 本紙張尺度適用中國國家標準（CNS)A_j覘烙（210 X 297公釐） II - -I t - - *^1 1 I ί— - —1« 111 n i - If - 1 n I (請先閱讀背面之注意^項再填寫本頁) 64 45 〇 A7 B7 經濟部智慧財產局員工消費合作社印製 32◦閘控裝置 3 2 1 a側架 321c擋板 3 25a扳手 3 25 c手指部 3 3 1 軸桿 3 3 3 下環帶 3 3 5 第一連結件 五、發明說明（5) 321 滑動架 321b枢座 325 可動部 325b腹板 3 3 0 同步調整機構 3 3 2 上環帶 3 3 4 連動環帶 3 3 6 第二連結件 _發明之詳細說a月 圖旧示-根據本發明之較佳實施例而成的晶片容器換裝 裝置1之立體斜视圖，圖2顯示圖1所示晶片容器換裝裝置丄 間如園1、2所π，本發明之該晶片容器換 裝裝置1大體上包本：一其 ^ Q 基厓100、—可旋動暫存架200、 以及-可滑動轉置架3⑽；其中，該暫存架2。◦上設有複數 條暫存槽211且可相對於基座1QQ旋動；可滑動轉置架綱 包含-料盤載架3 10、-間控裝置32〇、以及—同步調整機 構3 3 0，且可沿各暫存槽211之.延仲方向，相對於暫存架 20 0滑動於-起始位置與-結束位置之間。以下為便於描述 ，將暫存架之旋動軸方向稱為橫向，滑動方向稱為縱向。 基座100包含一底座101與兩腳架1〇2，其中—聊架1〇2 並設有一可向侧邊橫向拉出之卡栓1 0 3 ^ 可旋動暫存架200包含：-暫存床板21〇、兩連結於床板 2 10兩侧之立板22 0a和220b、以及一架設於兩立板22〇&和 220b之間的扶手23 0。兩立板22〇a、22〇b之下方約略中間 未紙張尺度適用t國國家標準（CN'S>A4規格（210 X 297公釐） (請先闓讀背面之il意事項再填寫本頁) I . I I I 1 i ! I > I I---l I I 1 4 4 5 5 9 8 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（5) 部位透過轉軸240掘接至該兩腳架102，使整個暫存架200 可相對於該基座1 0 0旋動，且在靠近該卡栓1 〇 3側之立板 220a外側設有一凹部（未顯示），供卡栓丨03在未被拉出時卡 止，而將暫存架固定於水平位置。在各立板220a、220b内 側各設有一導引閘控裝置3 20滑行之導轨221以及一導引料 盤載架滑行之導轨222，且在立疼220b之導轨222稍上方位 置並設有一與導轨222平行之穿槽223，供第二連結件336( 下文會述及）穿過。 床板210上設有複數條縱長延伸且平行並列之暫存槽211 ;各暫存槽2 1 1具有一晶片送出端及位於該出口端之開口 211a，以及一料管***端及位於該端之開口 211b。其中料 管***端並設有上蓋，以利料管1〇(參考圖4)之***與固定 η 閘控裝置3 2 0包含一滑動架3 2 1與一設於滑動架3 2 1上可 上下移.動之可動部3 25 »滑動架32 1具有：一對側架321a， 位於兩侧且透過滑子（未顯示）滑行於導軌2 2 1上；一框座 32 1b，設於兩侧架32 U之間用以支:撐該可動部3 25 ;以及 一猜板321c ’位於兩側架321a上對應於暫存槽出口端開口 2 1 1 a之未端部位間，供在閘控裝置3 2 〇滑移至起始位置（如 圖1所示）時’恰可封閉各暫存槽2】1之出口端開口 2丄1 a。 可動部325包含一可樞轉於一開放位置與一擋止位置間之 扳手3 2 5 a、一受該扳手3 25 a作動之腹板3 2 5 b、以及多數對 應各暫存槽211而裝設於腹板3 25b上之手指部3 2 5 c。板手 3 25 a與腹板3 25b之間透過—軸桿（未標號）連動，且腹板 ------------- -—-------訂 --------»I (請先閱讀背面之注意事項再填寫本頁) 本纸張尺度適用令國國家標準（CNS)A；J規格（210 x 297公釐.) 44^598 A7 ______B7 五、發明說明（7) •525b受彈簧（未顯示）之作用而向下偏動□板手325a並作成 凸輪狀’且在起之開放位置下（如圖4所示）可以定住，並 能透過軸桿帶動腹板325b上升，進而使各手指部325c升離 各暫存槽2 Ϊ1之槽面；而在平放之擒止位置下（如圖1所示） ’則可以放開腹板3 25b，使腹板3 25b在彈簧之偏動下帶動 各手指部325c仲入各暫存槽211之槽道中，擋住晶片3〇之 通過與造入。 料盤載架310包含一供載置一料盤20(參考圖3)之載座 311、一位於載板311前端（對應於暫存架之出口端）的料盤 固定器312、一亦位於載板311前端之拉動把手313、以及 一位於載板31 1後端（對應於暫存架之料管***端）之防呆裝 置 3 1 4 〇 載座311如圖6所示具有一底板3na和三面邊框311b， 而界定出一供容置料盤20之料盤載置空間，其中位於後端 之邊框並分成長短邊，俾配合圖6所示料盤20端緣上未置中 之凸緣21 ’以確保料盤20以正確之方向被置入《又，載座 3 1 1之位於兩側之邊框透過滑子士η c而可滑行於導軌2 2 2上 ，且可滑行於一使料盤2〇中之晶片容置空間22前端約略與 暫存槽2丨1之出口端開口 211a切齊之起始位置，與一料盤 2 0後端離開該出口端開口 2 1丨a之完成位置之間。此外，在 載座3 11兩側邊框外側面適當位置設有一凹部3 1 1 d，其定 位成當載座3 1 1向内滑至該起始位置時，恰與一設於立板 2 2 0 a ' 2 2 0 b内侧相對應位置之例如鋼珠等物（未顯示）相卡 合，而將載座3 1 1固定於該起始位置。 -10- 本纸張尺度適用中國國家標準（CN'S)/W規络（210 * 297公茇〉 (請先閱讀背面之注意事項再填寫本頁) -裝--- 訂---------線—V. Description of the invention (P 1 'Field of the invention The present invention relates to a chip fr L 1A chip container replacement device and method, and more particularly to an IC chip ) Test procedure, the wafer placed in the tube (Tube) to the tray (Tray) order container replacement equipment _ placement and method. 2. The description of the prior art in the integrated circuit 7 I In the process of forming, in addition to making various semiconductor elements on the substrate to form a crystal (Dle), the crystal is usually subjected to test procedures and packaging procedures to form a so-called integrated circuit chip (Chip) ° and After the packaging process is completed, each chip is usually contained in a material tube and transported to each test machine for testing. In addition, with the progress of the test machine, the test method has also changed from the past-IC test, to a full disk I c test at the same time. However, machines with different test functions do not necessarily provide the same test method. Therefore, when transferring between various machines for various tests, it is often necessary to convert a wafer contained in a scientific tube into a tray. on. ': In addition, there are two types of conversion operations in the past. One is purely manual operation, that is, the IC chips are taken out from the material tube by hand, and then arranged in the tray.' This has the advantage of flexibility, However, the manpower demand is large and the speed is slow. At most, it only reaches 3000 pieces per hour (3000 UPH), and it is easy to bump 1C, or cause the reverse feeding of wafers (in the opposite direction). The other is a purely automated operation, and its conversion type is also one at a time. Its advantages are simplified labor and stable quality, but the speed is still not fast enough, which can reach about 4 5 ο ο υ Ρ Η, and the equipment investment cost is high. This paper standard Applicable to Zhongguweijia Standard (CNS) A4 regulations 丨 each (210 χ 297 issued) 1 ---! I — —---. 丨 — II --- order · --I ----- (Please Read the notes on the back before filling this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 44 ^ 59 8 A7 —------- B7 V. Description of the invention (2) 'Large volume, occupying space u not . However, compared with the processing capacity of more than 6000 pieces per hour of the tray-type testing machine, the methods currently used obviously need to be improved. SUMMARY OF THE INVENTION Therefore, the object of the present invention is to provide a wafer container replacement device and method with reduced space occupation, low construction cost, and high conversion rate. Another object of the present invention is to provide a wafer container changing device which can avoid the quality instability such as the wrong direction caused by human factors. In order to achieve the above-mentioned purpose, the wafer container replacement device disclosed in the present invention includes a base, a rotatable temporary storage rack, for receiving and temporarily storing most of the wafers in each material tube, and can be on the base It rotates, and has a plurality of longitudinal storage tanks in parallel that can hold wafers. Each of the storage tanks has a fixed end opening of the material tube and an opening end of the wafer that can be closed. A slidable transposition rack, It is used to push the wafers in each temporary storage tank to fall through the opening at the exit end. The tray used to store the wafers is installed on the temporary storage rack and can extend along the temporary storage tanks. The direction slides between the starting position and a finishing position relative to the temporary storage rack, and has a tray carrier and a gate control device; the tray carrier is located below the remote temporary storage tank for the storage of the The tray control device is located above the temporary storage tanks, and has a sliding portion and a row of liftable finger portions. The sliding portion is connected to the tray carrier and can slide synchronously in the same direction. Corresponding to each temporary storage slot are arranged side by side on the sliding part, and are arranged so as to be movable on an extension Pushing grooves each corresponding temporary stopping position such wafer flutter 'each corresponding to a lift-off grooves for the temporary storage of such wafer through the open position. In order to achieve the above object, the wafer container replacement method disclosed in the present invention includes: The paper size is applicable to the Chinese National Standard (CNS) A4 specification (21 × x297). 'Lltlllllll * — ^ · I --- I--Order ---------. (Please read the notes on the back before filling out this page) 5Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 4455 QR A7 ___ B7 Description of the Invention (3) (I) Prepare multiple articles Wafer temporary storage tanks arranged side by side with openings at both ends, and trays having a wafer storage space directly below the temporary storage tanks, and one end of the wafer storage space of the tray is approximately the same as One end of the temporary storage slots is cut open; (2) A plurality of wafers are sequentially dropped from the other end of the temporary storage slots into the temporary storage slots, and are biased against the temporary storage slots. One of the openings is juxtaposed in the temporary storage tanks; and (3) the tray is moved away from the temporary storage tanks with the other openings of the temporary storage tanks extending toward the openings in the other end. , And at the same time, the plurality of wafers and the remote material tray are moved out in parallel and sequentially in the same direction. Wherein one end open, parallel and sequentially falls within the trays. With the above device and method, since no electric mechanism is needed, and a multi-slot side-by-side temporary storage rack is used, conversion can be made by free fall and sequential entry and exit. Its production capacity can reach 1 2000 UPH, thus saving equipment costs. And the conversion efficiency is faster than the automatic machine operation or manual operation, and finally it can be obtained-a wafer container replacement device with increased production capacity, space saving and low cost. Furthermore, in a further embodiment, a fool-proof device is also provided, which can perform the wafer replacement operation only when a tray is placed and the placement direction of the tray is correct, so that damage to the wafer due to human error can be avoided. Defects in the quality of the dressing, such as reverse placement of chips. Brief Description of the Drawings Figure 1 shows an isometric perspective view of a wafer container changing device according to an embodiment of the present invention. FIG. 2 shows an end view of the changing device shown in FIG. 1 when viewed from the outlet side. Fig. 3 shows a sectional side view taken along 111-π I of Fig. 1. This paper is suitable for CNS A4 specification (2! 〇χ297mm) ------------------- Order · ----- -(Please read the precautions on the back before filling out this page) 4455 9 8 A7 B7 V. Description of the invention (Figure 4 shows the perspective view when the wafer in the material tube is loaded using the changing device shown in Figure 1. Figure Figure 5 shows the item video disc when the crystal device is transferred out to the tray using the changing device shown in item i = 'made by the present invention—and the type 1 printed by the consumer consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs of the material to be carried. Description 1 Wafer container changing device 10 Feed tube 20 Feed tray 2 1 Flange 22 Wafer accommodating space 30 Wafer 100 Base 10 1 Base 102 Foot 103 Holder 200 Temporary shelf 210 Bedboard 2 11 Temporary slot 2 11a Outlet opening 211b Feed tube insertion end opening 22〇Ej220b Standing plate 221, 222 Guide rail 223 Passing slot 230 Handrail 2 4 0-Rotating shaft 3 00 Rotating frame 3 10 Tray carrier 3 11 Carrier 3 11a Base plate 3 11b Frame 3 11c Slider Recess 3 12 Holder 3 12a Fixing mechanism 3 12b Grip 3 13 Handle 3 14 Foolproof device 3 14a Paw 3 14b Stopper paper Applicable to China National Standard (CNS) A_j 觇 (210 X 297 mm) II--I t--* ^ 1 1 I ί—-1 «111 ni-If-1 n I (Please read the (Note ^ Please fill in this page again) 64 45 〇 A7 B7 Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs and Consumer Cooperatives 32 ◦ Gate control device 3 2 1 a side frame 321c baffle 3 25a wrench 3 25 c finger 3 3 1 shaft 3 3 3 Lower ring belt 3 3 5 First connection piece V. Description of the invention (5) 321 Sliding frame 321b Pivot 325 Movable part 325b Web 3 3 0 Synchronous adjustment mechanism 3 3 2 Upper ring belt 3 3 4 Interlocking ring belt 3 3 6 SECOND LINKER_Detailed description of the invention a month old view-perspective perspective view of wafer container changing device 1 according to a preferred embodiment of the present invention, FIG. 2 shows the wafer container changing device shown in FIG. 1 The installations are like the gardens 1,2, and the wafer container replacement device 1 of the present invention is generally a package: one of them Q base cliff 100, a rotatable temporary storage rack 200, and a slidable transposition rack 3⑽; Among them, the temporary storage rack 2. There are a plurality of temporary storage slots 211 on the base and can be rotated relative to the base 1QQ; slideable transposition frame outline-tray carrier 3 10 - control means between 32〇, and - the synchronization adjusting mechanism 330, and each of the staging grooves 211 along the direction of extension of the secondary with respect to the storage rack 200 to slide - between the end position - the start position. For ease of description below, the direction of the rotation axis of the temporary storage rack is referred to as the horizontal direction, and the sliding direction is referred to as the vertical direction. The base 100 includes a base 101 and a bipod 102. Among them, the chat rack 102 is provided with a latch 1 0 3 which can be pulled out laterally and laterally. The rotatable temporary storage rack 200 includes: The bed board 21o, two upright boards 22 0a and 220b connected to both sides of the bed board 2 10, and an armrest 23 0 erected between the two upright boards 22o & 220b. Below the two vertical plates 22〇a and 22〇b, approximately the middle of the paper size is applicable to the national standard (CN'S> A4 specification (210 X 297 mm) (please read the meaning on the back before filling out this page) I III 1 i! I > I I --- l II 1 4 4 5 5 9 8 A7 B7 Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs The tripod 102 enables the entire temporary storage frame 200 to rotate relative to the base 100, and a recess (not shown) is provided on the outside of the vertical plate 220a near the 103 side of the latch for the latch 丨 03 It is locked when it is not pulled out, and the temporary storage rack is fixed in a horizontal position. Inside each of the risers 220a, 220b are provided a guide rail 221 for guiding the sliding control device 3 20 and a guide tray carrier. The sliding guide rail 222 is provided at a position slightly above the guide rail 222 of Litong 220b and is provided with a through groove 223 parallel to the guide rail 222 for the second connecting member 336 (to be described later) to pass through. There are a plurality of temporary storage slots 211 extending lengthwise and parallel to each other; each temporary storage slot 2 1 1 has a wafer sending end and an opening 211a located at the exit end. A material pipe insertion end and an opening 211b at the end. The material pipe insertion end is provided with a cover to facilitate the insertion and fixing of the material pipe 10 (refer to FIG. 4). The gate control device 3 2 0 includes a sliding frame 3 2 1 and one provided on the sliding frame 3 2 1 can be moved up and down. The movable part 3 25 »The sliding frame 32 1 has: a pair of side frames 321a, which are located on both sides and slide on the guide rail 2 through sliders (not shown) 2 1; a frame base 32 1b is provided between the two side frames 32 U to support: support the movable part 3 25; and a guess board 321c 'is located on the side frames 321 a corresponding to the opening end of the temporary storage tank 2 1 1 a between the ends, for the gate control device 3 2 〇 sliding to the starting position (as shown in Figure 1) 'can just close each temporary storage tank 2] 1 exit opening 2 1 a. The movable part 325 includes a wrench 3 2 5 a pivotable between an open position and a stop position, a web 3 2 5 b actuated by the wrench 3 25 a, and a plurality of corresponding temporary storage slots. 211 and the fingers 3 2 5 c installed on the web 3 25b. The wrench 3 25a and the web 3 25b are transmitted through the shaft—the shaft (not numbered) is linked, and the web -------- ------ ----------- Order-- ------ »I (Please read the notes on the back before filling out this page) This paper size applies the national standard (CNS) A; J size (210 x 297 mm.) 44 ^ 598 A7 ______B7 V. Description of the invention (7) • 525b is biased downward by the action of a spring (not shown) □ wrench 325a and made into a cam shape, and can be fixed in the open position (as shown in Figure 4), and It can drive the web 325b to rise through the shaft, so that each finger 325c can be lifted off the groove surface of each temporary storage slot 2 Ϊ1; and in the flat position (as shown in Figure 1), you can release the web 3 25b, so that the web 3 25b drives the fingers 325c into the channels of the temporary storage slots 211 under the bias of the spring, and blocks the passage and fabrication of the wafer 30. The tray carrier 310 includes a carrier 311 for placing a tray 20 (refer to FIG. 3), a tray holder 312 located at the front end of the carrier plate 311 (corresponding to the exit end of the temporary storage rack), and The pull handle 313 at the front end of the carrier plate 311, and a foolproof device 3 1 4 at the rear end of the carrier plate 31 1 (corresponding to the material pipe insertion end of the temporary storage rack). The carrier base 311 has a bottom plate 3na as shown in FIG. And three sides of the frame 311b, and defines a tray mounting space for the tray 20, wherein the frame at the rear end is divided into short sides, and cooperates with the uncentered edge of the tray 20 shown in FIG. 6 The flange 21 ′ ensures that the tray 20 is placed in the correct direction. Also, the borders on both sides of the carrier 3 1 1 can slide on the guide rail 2 2 2 through the slider η c, and can slide on A starting position where the front end of the wafer accommodating space 22 in the tray 20 is approximately aligned with the exit opening 211a of the temporary storage slot 2 丨 1, and the rear end of a tray 20 leaves the exit opening 2 1 丨a between the completion positions. In addition, a recess 3 1 1 d is provided at an appropriate position on the outer side of the frame on both sides of the carrier 3 11, and is positioned so that when the carrier 3 1 1 slides inward to the starting position, it is exactly the same as that provided on the riser 2 2 0 a '2 2 0 b The corresponding positions on the inner side, such as steel balls (not shown), are engaged with each other, and the carrier 3 1 1 is fixed at the starting position. -10- This paper size applies to China's National Standard (CN'S) / W profile (210 * 297 meters) (Please read the precautions on the back before filling out this page)-Install --- Order ----- ---line-
經濟部智慧財產局員工消費合作社印S dd〇598 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（g) 固定器312包含一定止機構312a以及一裝設於定止機構 312a上而可以縱向為料旋動於一水平位置與一直立位置間 的握把312b。握把312b頂端向載座311後端突出，俾在轉 至直立位置時，將料盤20緊靠載座3 11之後端邊框而固定之 ，而在水平位置時，則可讓料盤2 0被取離載座3 1 1。 防呆裝置3 1 4包含一設於載座3 U之後端長短邊邊框之間 可以橫向為轴旋動之擎爪314a，以及一位於暫存架200之 床板210出口端下側的止動具314b ;該掣爪314a之其中一 端頂點並延伸至床板210下方。藉此，當載座311上承載有 —料盤20時，該掣爪314a之該其中一端將為料盤20之非置 中凸緣21所推動而向後向下倒至一在滑動時不會為止動具 314b所阻擋之位置，而使料盤載架310可以被推入床板210 下方。換言之，當料盤20未被置入載座311，或是方向不對 致凸緣2 1無法落於載座3 1 ;[後端之長短邊框間之問隙而確實 落入料盤載置空間時，料盤載架310將因該掣爪314a之頂 端點為該止動具3 1 4 b所阻擋，而無法被推入床板2 1 1下方 °藉此，將可以避免料盤20未堇·入或方向不對之失誤，因 而稱之為防呆裝置。 同步調整機構3 3 0包含：複數個固定於立板2 2 0 b外侧之 軸桿331、一上環帶3S2、一下環帶333、一連動環帶334 、一跨過立板2 2 0 b上側緣用以可移位地連結上環帶3 3 2與 間控裝置3 2 0之側架3 2 1 a的第一連結件3 3 5、以及—用以穿 過立板220b之穿槽223而可移位地連結下環帶333與料盤載 架310之載座311邊框的第二連結件336。而且，第一與第 -11- 本纸張尺度通用中Θ回家標準（CNS0A4規格（210 X 297公t ) ----111 J 11 - - · I 丨 — f ! I I 訂—----- --- (靖先閱讀背面之注意事項再填寫本頁) 445'455 r\Printed by the Consumers 'Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs S dd〇598 A7 B7 Printed by the Consumers' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the Invention (g) The holder 312 includes a fixed stop mechanism 312a and a fixed stop mechanism 312a The handle 312b can be rotated vertically between a horizontal position and an upright position. The top of the grip 312b protrudes toward the rear end of the carrier 311. When turning to the upright position, the tray 20 is held close to the rear frame of the carrier 3 11 and fixed in the horizontal position. Taken away from the carrier 3 1 1. The fool-proof device 3 1 4 includes a pawl 314a that can be pivoted laterally between the long and short side frames at the rear end of the carrier 3 U, and a stopper located under the exit end of the bed 210 of the temporary storage rack 200 314b; the vertex of one end of the pawl 314a extends below the floorboard 210. By this, when the tray 20 is carried on the carrier 311, one end of the pawl 314a will be pushed by the non-centering flange 21 of the tray 20 and fall backwards to a position that will not slide during sliding. The position blocked by the moving tool 314b allows the tray carrier 310 to be pushed under the bed plate 210. In other words, when the tray 20 is not placed in the carrier 311, or the orientation is not the same, the flange 21 cannot fall on the carrier 3 1; [the gap between the length and length of the rear end does fall into the tray placement space. At this time, the tray carrier 310 will be blocked by the stopper 3 1 4 b because the top point of the pawl 314a is blocked by the stopper 3 1 4 b. This will prevent the tray 20 from being damaged. · Mistakes in the wrong direction or direction are called foolproof devices. The synchronous adjustment mechanism 3 3 0 includes: a plurality of shafts 331 fixed on the outside of the vertical plate 2 2 0 b, an upper ring belt 3S2, a lower ring belt 333, a linked ring belt 334, and an upper side of the vertical plate 2 2 0 b The edge is used to displaceably connect the upper link 3 3 2 with the side link 3 2 1 a of the interlocking device 3 2 0 and the first connecting member 3 3 5 and—for passing through the slot 223 of the stand 220b and The second connecting member 336 is movably connected with the lower endless belt 333 and the frame of the carrier 311 of the tray carrier 310. In addition, the first and the 11th-this paper standard common Θ home standard (CNS0A4 specification (210 X 297 g t)) ---- 111 J 11--· I 丨 — f! II Order ----- ---- (Jing first read the notes on the back before filling out this page) 445'455 r \
Q A7 B7 經濟部智慧財產局員工消費合作社印t 五、發明說明（9) 一連結件3 3 5、3 3 6並將閘控裝置32〇與料盤載架間之 相對位置設置成當料盤2〇被固定器312夾緊時，若載座Hi 被推到該起始位置’擋板32u將恰好封住各暫存槽2ιι之 出口端開口 2 1 1. a。 藉由同步裝置330，當將料盤載架31〇向該出口端開口 21 la方向拄離床板2 10時，閘控裝置32〇亦將被同步同向移 動。在此可以理解地，同步調整裝置33〇事實上在一變形例 中亦可用直接連結料盤載架310和閘控裝置32〇之硬質元 件達成。惟，藉由上述同步裝置33〇，將更具一優點在於當 晶片30長度變更時，將可藉由調整各連結件3 3 5 ' 3%相對 於各壤帶33'2、3 3 3之連結位置，而調整閘控裝置32〇之各 手指部3 25 c相對於各暫存槽211出口端開口之距離，以及 料盤20離開出口端開口2na之位置，俾適應之。 以上為本發明所揭晶片容器換裝裝置之構成，以下即進 一步就其使用以及利用該裝置之晶片容器換裝方法作一說 明。 使用上述晶片容器換裝裝置i時，係先如圖丨所示將暫存 架200設定於平放位置，然後將料盤2〇裝入料盤載架中 ，並推入床板210下方到達該起始位置，亦即擋板32k封 閉出口端開口2Ha，且料盤2〇之晶片容置空間22前端與出 口端開口2lla約略切齊之位置；另一方面’將晶片料管⑺ —隻一隻***各暫存槽211之料管***端開口 2Ub。然後 ，將閘控裝置3 20之扳手3 2 5 a轉換至直立之開放位置而開 放各暫存槽211，並如圖4所示使暫存架2〇〇相對於基座1〇〇 42- 本纸張尺度翻帽找辟(CN5)A-t km (2ΐ〇Τ29Γ^^ f n .n i i n ^^1 I 1 I « 1— I n ^^1 V I 訂1 - it I - I In I f：請先閱讀背面之注意事項再填寫本I) 445 A7 B7 經濟部智慧財產局員工消費合作社印？找Q A7 B7 Printed by the Consumers' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the invention (9) A connector 3 3 5, 3 3 6 and set the relative position between the gate control device 32 and the tray carrier as the material. When the disk 20 is clamped by the holder 312, if the carrier Hi is pushed to the starting position, the baffle 32u will just seal the outlet opening 2 1 1.a of each temporary storage slot 2m. With the synchronizing device 330, when the tray carrier 31o is pulled away from the bed plate 21 in the direction of the exit opening 21 la, the gate control device 32o will also be moved in the same direction synchronously. It can be understood here that the synchronization adjusting device 33o can actually be achieved by a hard element which directly connects the tray carrier 310 and the gate control device 32o in a modified example. However, with the above-mentioned synchronizing device 33〇, it will have a further advantage that when the length of the chip 30 is changed, it will be possible to adjust each link 3 3 5 '3% relative to each of the soil zones 33'2, 3 3 3 And adjust the distance between each finger portion 3 25 c of the gate control device 32 and the exit end opening of each temporary storage tank 211, and the position of the tray 20 away from the exit end opening 2na, so as to adapt it. The above is the structure of the wafer container replacement device disclosed in the present invention. The following will further explain its use and the wafer container replacement method using the device. When using the wafer container changing device i, the temporary storage rack 200 is set to a flat position as shown in Figure 丨, and then the tray 20 is loaded into the tray carrier, and pushed under the bed plate 210 to reach the The starting position, that is, the baffle 32k closes the exit opening 2Ha, and the front end of the wafer accommodation space 22 of the tray 20 is approximately aligned with the exit opening 21a; on the other hand, 'the wafer material tube 料 — only one Only the insertion end opening of the material tube of each temporary storage tank 211 is opened 2Ub. Then, switch the wrench 3 2 5 a of the gate control device 3 20 to an upright open position to open each temporary storage slot 211, and make the temporary storage rack 2000 relative to the base 10042- as shown in FIG. 4. Find the size of this paper (CN5) At km (2ΐ〇Τ29Γ ^^ fn .niin ^^ 1 I 1 I «1— I n ^^ 1 VI Order 1-it I-I In I f: Please first Read the notes on the back and fill out this I) 445 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs? Find
玉、發明說明（J 旋動至一暫存槽211之出口端開口 211a降低之傾斜位置。 如此一來，由於各手指部325c升離各暫存槽211，各晶片 3 0將從該料管***端開口 2 1丨b滑入各對應暫存槽2 Η，並 通過閘控裝置3 2 0，依序到達並排列於各暫存槽2 1 1之出口 端開口 2 1 1 a前，JL為擋板3 2 1 c所阻擋= 接著，將閘控裝置320放回撲止位置，並將暫存架200旋 回如圖1所示平放位置。然後，如圖5所示，拉動料盤載架 310之把手313。此時，由於閘控裝置320與料盤載架310 透過同步調整裝置330而能同步同向移動，在料盤載架31〇 前端遠離出口端開口 211a之同時，各手指部325c亦將推動 各對應暫存槽2 1 1内之暫存晶片’而使其依序多槽並列離開 各出口端開口211a，且如圖5所示向下落入料盤2〇之晶片 空置空間2 2中，直到手指部3 2 5 c到達出口端開口 2 1 1 a。藉 此，原本單列位於各料管1〇中之晶片3〇即很快速地被多列 並排於料盤20中’而快速地完成容器之轉換。 因此，根據上述使用程序，一根據本發明而成之晶片容 器換裝方法可歸納以下步驟。 (1) 備置複數條縱向並列且各具有兩端開口的晶片暫存槽 ’以及位於該等暫存槽正下方具有一供收存晶片空間心 盤，且使該料盤足該晶片收存空間之其中—端約略與該等 暫存槽之其中一端開口切齊； (2) 使複數個晶片依序自該等暫存槽之另—端開口落入該 等暫存槽中，並且使其偏靠該等暫存槽之該其中一端3 而並列於該等暫存槽中；以及 *13- 本纸張尺度過用中國國家標準（CNS)A4規格（21〇1<的7公釐） ---------- · I --------訂·-------I (請先閱讀背面之注意事項再填寫本頁) 445598 A7 B7 經濟部智慧財產局員工消費合作社印製Jade, description of the invention (J is rotated to the inclined position where the exit end opening 211a of a temporary storage tank 211 is lowered. In this way, since each finger portion 325c is lifted away from each temporary storage tank 211, each wafer 30 will be removed from the material tube. The insertion end opening 2 1 丨 b slides into each corresponding temporary storage slot 2 Η, and sequentially arrives and is arranged in front of the outlet end opening 2 1 1 a of each temporary storage slot 2 1 1 through the gate control device 3 2 0, JL Blocked by the baffle 3 2 1 c = Next, return the gate control device 320 to the flutter position and rotate the temporary storage rack 200 back to the flat position as shown in Fig. 1. Then, as shown in Fig. 5, pull the tray The handle 313 of the carrier 310. At this time, since the gate control device 320 and the tray carrier 310 can move in the same direction through the synchronization adjustment device 330, while the front end of the tray carrier 31 is away from the exit opening 211a, each The finger portion 325c will also push the temporary storage wafers in the corresponding temporary storage slots 2 1 1 so that they sequentially leave multiple openings 211a in parallel in each slot, and as shown in FIG. 5, the wafers that fall into the tray 20 In the vacant space 2 2 until the finger portion 3 2 5 c reaches the outlet end opening 2 1 1 a. As a result, the original single row is located in each material tube 1〇 The wafer 30 is quickly arranged in multiple rows and side by side in the tray 20 to quickly complete the container conversion. Therefore, according to the above-mentioned use procedure, a wafer container replacement method made according to the present invention can be summarized as follows. (1) Prepare a plurality of wafer temporary storage tanks arranged side by side and each having two ends open, and a core disk for storing wafer space directly under the temporary storage tanks, and make the tray sufficient for the wafer storage space. Among them, the end is approximately aligned with one of the openings of the temporary storage slots; (2) The plurality of wafers are sequentially dropped from the other openings of the temporary storage slots into the temporary storage slots, and the Leaning on one of the temporary storage tanks 3 and juxtaposed in the temporary storage tanks; and * 13- This paper has been oversized using the Chinese National Standard (CNS) A4 specification (7mm of 20.1 <) ---------- · I -------- Order · ------- I (Please read the notes on the back before filling this page) 445598 A7 B7 Intellectual Property of the Ministry of Economic Affairs Printed by Bureau Consumers Cooperative
五、發明說明（J (0使该料盤以該等暫存槽之另一端開口向該其中一端開 口延伸I万向，移離該等暫存槽下方，並使該等複數個β 片與該料盤同步地依序並列移出該其中—端開口，且依Ζ 並列落入該料盤中。 其中，孩第（2)步驟可以藉由使料管***該等暫存槽之該 另‘並彳員斜戎等暫存槽’而使料管中之複數個晶片靠 者重力依序並列靠攏於該等暫存槽之該其中一端開口前。 而該第（3)步驟則可以藉由—可移離地阻隔各暫存槽且與該 料盤同步同向移動之閘控裝置，來推動該等複數個晶片"， 使其依序並列移離該等暫存槽之該其中一端開口，而依序 並列落入該料盤中。 換言之，藉由上述方法，不f是使用本發明所揭上述換 裝裴置，或其它更進—步之自動機構，將可以快速地達成 晶片容器換裝之程序。 综上所述，根據本發明所揭之換裝裝置以及換裝方法， 將可使晶片容器換裝效率大為提升，且節省設備支出，減 少佔地，而有相當大的效益.榷，以上之說明應僅用以例 舉本發明之較佳實施例，而非用以限制本發明，例如τ擋 板32U亦可設置於下方之料盤載架31〇前端上，而非在上 方之閉控裝置320側’或是由料盤2〇之凸緣形成；因此，任 何熟於此技藝人士參考上逑實施例之顯易變更或修改皆應 在本發明之保護範園内。 14- 本紙張又度過用中國函家標準（CNS〉A4現格（2丨〇 X 297公餐） -----------1 I -----I I I 訂-----丨 1 丨- (請先閱讀背面之注意事項再填寫本頁)V. Description of the invention (J (0 causes the tray to extend from the other end of the temporary storage tanks to the opening at one end by an I universal direction, moves away from below the temporary storage tanks, and makes the plurality of beta sheets and The trays are moved out of the middle-end openings in parallel and sequentially, and fall into the trays in parallel according to Z. Among them, step (2) can be performed by inserting a feed pipe into the other of the temporary storage slots. By arranging the temporary storage tanks such as Xie Rong and so on, the plurality of wafers in the material tube are sequentially moved closer to each other by the gravity of the one of the temporary storage tanks, and the (3) step can be performed by — A gate control device that can block each temporary storage slot and move in the same direction as the tray synchronously to push the plurality of chips " to move them away from one end of the temporary storage slots sequentially in parallel Opening, and fall into the tray sequentially in order. In other words, by the above method, it is not possible to use the above-mentioned dressing device disclosed in the present invention, or other advanced-step automatic mechanism, to quickly achieve the wafer Procedure for container replacement. In summary, according to the present invention, the replacement device and the replacement device The method will greatly improve the efficiency of chip container replacement, save equipment expenses, reduce land occupation, and have considerable benefits. The above description should only be used to exemplify the preferred embodiment of the present invention, and It is not intended to limit the present invention. For example, the τ baffle 32U can also be disposed on the front end of the tray carrier 31o below, instead of the upper control device 320 side 'or formed by the flange of the tray 20; Therefore, any obvious changes or modifications of those skilled in the art with reference to the previous embodiment should be within the protection scope of the present invention. 14- This paper has passed the standard of Chinese letters (CNS> A4) (2 丨〇X 297 public meal) ----------- 1 I ----- III Order ----- 丨 1 丨-(Please read the precautions on the back before filling in this page)