TW443576U - Wafer boat capable of preventing control plate from sliding out - Google Patents

Wafer boat capable of preventing control plate from sliding out

Info

Publication number
TW443576U
TW443576U TW89206004U TW89206004U TW443576U TW 443576 U TW443576 U TW 443576U TW 89206004 U TW89206004 U TW 89206004U TW 89206004 U TW89206004 U TW 89206004U TW 443576 U TW443576 U TW 443576U
Authority
TW
Taiwan
Prior art keywords
control plate
wafer boat
sliding out
preventing control
boat capable
Prior art date
Application number
TW89206004U
Other languages
Chinese (zh)
Inventor
Heng-Yi Tzeng
Original Assignee
Taiwan Semiconductor Mfg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiwan Semiconductor Mfg filed Critical Taiwan Semiconductor Mfg
Priority to TW89206004U priority Critical patent/TW443576U/en
Publication of TW443576U publication Critical patent/TW443576U/en

Links

TW89206004U 2000-04-14 2000-04-14 Wafer boat capable of preventing control plate from sliding out TW443576U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW89206004U TW443576U (en) 2000-04-14 2000-04-14 Wafer boat capable of preventing control plate from sliding out

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW89206004U TW443576U (en) 2000-04-14 2000-04-14 Wafer boat capable of preventing control plate from sliding out

Publications (1)

Publication Number Publication Date
TW443576U true TW443576U (en) 2001-06-23

Family

ID=21666492

Family Applications (1)

Application Number Title Priority Date Filing Date
TW89206004U TW443576U (en) 2000-04-14 2000-04-14 Wafer boat capable of preventing control plate from sliding out

Country Status (1)

Country Link
TW (1) TW443576U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI751806B (en) * 2020-11-25 2022-01-01 松勁科技股份有限公司 Vertical furnace and vertical boat used therefor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI751806B (en) * 2020-11-25 2022-01-01 松勁科技股份有限公司 Vertical furnace and vertical boat used therefor

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Legal Events

Date Code Title Description
GD4K Issue of patent certificate for granted utility model filed before june 30, 2004