TW403685B - Device for laser processing of workpiece - Google Patents
Device for laser processing of workpiece Download PDFInfo
- Publication number
- TW403685B TW403685B TW088110192A TW88110192A TW403685B TW 403685 B TW403685 B TW 403685B TW 088110192 A TW088110192 A TW 088110192A TW 88110192 A TW88110192 A TW 88110192A TW 403685 B TW403685 B TW 403685B
- Authority
- TW
- Taiwan
- Prior art keywords
- workpiece
- laser units
- laser
- carrier
- processing
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0011—Working of insulating substrates or insulating layers
- H05K3/0017—Etching of the substrate by chemical or physical means
- H05K3/0026—Etching of the substrate by chemical or physical means by laser ablation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/0604—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
- B23K26/0619—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams with spots located on opposed surfaces of the workpiece
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/10—Devices involving relative movement between laser beam and workpiece using a fixed support, i.e. involving moving the laser beam
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/15—Position of the PCB during processing
- H05K2203/1572—Processing both sides of a PCB by the same process; Providing a similar arrangement of components on both sides; Making interlayer connections from two sides
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Laser Beam Processing (AREA)
- Removal Of Insulation Or Armoring From Wires Or Cables (AREA)
Description
3-1-^ I 經濟部智慧財產局員工消費合作社印製 A7 ___B7 五、發明說明(/ ) 本發明是有關一種將工件作雷射加工處理之裝置,其 具有彼此相反面對之加工處理表面。 當製造精細的表面結構時,例如當它是熟知的印刷電 路板,其引導或覆蓋層是用具有高精確度的雷射光以形 成結構。在雙面覆蓋的印刷電路板中,必須將印刷電路 板翻轉,並且第二次地被帶至雷射單元之加工處理範圍 之中。 本發明以此目的為基礎,以提高加工處理的精確度並 縮短加工處理時間β 此目的是藉由本發明而根據申請專利範圍第1項而獲 得解決。因為兩個雷射單元可以彼此獨立控制,可以在 兩側産生不同的圖案,而不須操作印刷電路板,因此加 工處理時間對分減半。此外取消印刷電路板第二面之翻 轉,更換,以及調準之加工處理費用。此工件的位置必 須只偵測一次。此兩値雷射單元可以如此的事先調準, 致使印刷電路板兩供之加工處理圖像沒有差別足钩柢償。 經由根據申請專利範圍第2項進一步的探討,可以不 使用罩幕而在印刷電路板的兩销産生不同的結構。 以下是根據在圖式說明的實施例中,對本發明作更詳 盡的描述。此説明的第1圖顯示在一d面圖中,一具有 兩個雷射單元2的承載框架1。一植作為印刷電路板所 形成的工件3,以及一掴作為直線輪送裝置所形成的可 移動載體4,其输送方向垂直於所經遇的圖像平面。 此雷射單元2是由一雷射光産生器5,以及一轉向裝 本紙張尺度適用中國國家標準(CNS)A4規格(210 x 297公釐) -------------裝--------訂---------線 (請先閱讀背面之注意事項再填寫本頁) A7 403685 __B7 五、發明說明(>* ) 置6所構成。經由它此雷射光在兩個座標方向中可以如 此的偏轉,致使它各傾垂直對準於工件表面。此兩偁雷 射單元2是在工件3的上面與下面如此的配置,致使得 其所發出的光線彼此相反的對準。握住工件3的兩個表 面。此兩表面這時可以同時被加工處理,並且然後經由 可移動的載體4大體上之操作,致使到逹在雷射單元2 的照射區域中印刷電路板之另一個加工處理匾域,或者 直到工件3離開雷射區域β 當各個區域須要特別精細的結構時,工件3可以形成 例如作為標準的印刷電路板。其亦為可能,將此印刷電 路板例如作為導體薄膜使用,並此介於兩轉向裝置6之 間以逐步的方式穿過。此工件3亦可形成例如作為相當 小的晶Η載體,並固定於工件載體之複數傾容器中。其 設有具有相對應的通孔,以便射出雷射光。在此情況中 握持工件載體之載體4,並且將它如此的導引,致使得 各個工件逐漸地到達雷射光區域之中。 符號之説明 1........承載框架 ----------------------訂--------1^. -/» · (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 2 3 4 5 器 生 元 産置 單光裝 射件體射向 雷 Η 載雷轉 4 本紙張尺度適用中國國家標準(CNS)A4規格(2]〇χ 297公釐)
Claims (1)
- A8B8C8D8 六、申請專利範圍 1. 一種將工件(3)作雷射加工處理之裝置,其具有彼此 相反面對之加工處理表面,尤其是雙層遮蓋板形導軌 載體,其特歡為: 此裝置具有兩傾互相對準之雷射單元(2), 工件可固定於一可移動的載體(4),並可置放於兩 値雷射單元(2)之間,並且 此兩値雷射單元(2)可以同時開動。 2. 如申請專利範圍第1項之裝置,其中 此兩個雷射單元設置具有一内部光線轉向器(例如 5),其將各値工件(3)待加工處理的區域覆蓋。 ----------I--裝1!11訂---------線 (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19831343 | 1998-07-13 |
Publications (1)
Publication Number | Publication Date |
---|---|
TW403685B true TW403685B (en) | 2000-09-01 |
Family
ID=7873891
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW088110192A TW403685B (en) | 1998-07-13 | 1999-06-17 | Device for laser processing of workpiece |
Country Status (9)
Country | Link |
---|---|
US (1) | US6759625B1 (zh) |
EP (1) | EP1097023B1 (zh) |
JP (1) | JP2002520163A (zh) |
KR (1) | KR100621258B1 (zh) |
CN (1) | CN1310653A (zh) |
AT (1) | ATE269185T1 (zh) |
DE (1) | DE59909758D1 (zh) |
TW (1) | TW403685B (zh) |
WO (1) | WO2000003831A1 (zh) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2371191B (en) | 2001-01-11 | 2005-06-15 | Mitel Corp | Double-talk and path change detection using a matrix of correlation coefficients |
US6652731B2 (en) | 2001-10-02 | 2003-11-25 | Shipley Company, L.L.C. | Plating bath and method for depositing a metal layer on a substrate |
DE10210040C1 (de) * | 2002-03-07 | 2003-10-30 | Siemens Ag | Betriebsverfahren und Transportwagen für eine Laserbearbeitungsanlage |
DE102004020737A1 (de) * | 2004-04-27 | 2005-11-24 | Lzh Laserzentrum Hannover E.V. | Vorrichtung zum Durchtrennen von Bauteilen aus sprödbrüchigen Materialien mit spannungsfreier Bauteillagerung |
US7223674B2 (en) * | 2004-05-06 | 2007-05-29 | Micron Technology, Inc. | Methods for forming backside alignment markers useable in semiconductor lithography |
GB2457720A (en) * | 2008-02-23 | 2009-08-26 | Philip Thomas Rumsby | Method for laser processing on the opposite sides of thin transparent substrates |
CN102020417A (zh) * | 2009-09-16 | 2011-04-20 | 昆山汉白精密设备有限公司 | 电子产品用玻璃的加工工艺 |
CN102886606B (zh) * | 2012-10-16 | 2015-08-26 | 江苏大学 | 一种激光再制造金属薄板焊接件的方法和装置 |
CN104253883A (zh) * | 2013-06-27 | 2014-12-31 | 王荷琴 | 手机玻璃的制作方法 |
CN103979803A (zh) * | 2014-03-19 | 2014-08-13 | 昆山瑞咏成精密设备有限公司 | 一种电子产品玻璃面板的制造工艺 |
CN106997929A (zh) * | 2016-01-22 | 2017-08-01 | 上海微电子装备有限公司 | 一种双面激光准同步封装***及封装方法 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2821883C2 (de) * | 1978-05-19 | 1980-07-17 | Ibm Deutschland Gmbh, 7000 Stuttgart | Vorrichtung zur Materialbearbeitung |
JPS59212185A (ja) * | 1983-05-18 | 1984-12-01 | Inoue Japax Res Inc | レ−ザ加工装置 |
JPS60177982A (ja) * | 1984-02-23 | 1985-09-11 | Sumitomo Electric Ind Ltd | 両面マ−キング法 |
US4652721A (en) * | 1985-01-03 | 1987-03-24 | Dow Corning Corporation | Method and apparatus for edge contouring lenses |
US4642439A (en) * | 1985-01-03 | 1987-02-10 | Dow Corning Corporation | Method and apparatus for edge contouring lenses |
IT1190581B (it) * | 1986-05-29 | 1988-02-16 | Fiat Auto Spa | Procedimento per saldare di testa con l impiego di un fascio laser due pezzi di materiali metallici dissimili in particolare pezzi di acciaio a medio od elevato tenore di carbonic |
US4925620A (en) * | 1988-09-29 | 1990-05-15 | General Electric Company | Control rod absorber section fabrication by square tube configuration and dual laser welding process |
JPH03142090A (ja) * | 1989-10-27 | 1991-06-17 | Canon Inc | プリント配線基板の穴明け加工装置 |
JPH0467654A (ja) * | 1990-07-09 | 1992-03-03 | Nec Kyushu Ltd | 並列処理機能付リペア装置 |
US5578229A (en) * | 1994-10-18 | 1996-11-26 | Michigan State University | Method and apparatus for cutting boards using opposing convergent laser beams |
JPH09260820A (ja) * | 1996-03-26 | 1997-10-03 | Taiyo Yuden Co Ltd | 電子部品の実装方法 |
JPH1099980A (ja) * | 1996-09-30 | 1998-04-21 | Toshiba Corp | 積層部材の加工方法 |
-
1999
- 1999-06-17 TW TW088110192A patent/TW403685B/zh not_active IP Right Cessation
- 1999-07-01 EP EP99942753A patent/EP1097023B1/de not_active Expired - Lifetime
- 1999-07-01 JP JP2000559961A patent/JP2002520163A/ja active Pending
- 1999-07-01 AT AT99942753T patent/ATE269185T1/de not_active IP Right Cessation
- 1999-07-01 US US09/743,892 patent/US6759625B1/en not_active Expired - Fee Related
- 1999-07-01 WO PCT/DE1999/001935 patent/WO2000003831A1/de active IP Right Grant
- 1999-07-01 CN CN99808537A patent/CN1310653A/zh active Pending
- 1999-07-01 KR KR1020017000431A patent/KR100621258B1/ko not_active IP Right Cessation
- 1999-07-01 DE DE59909758T patent/DE59909758D1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP1097023B1 (de) | 2004-06-16 |
ATE269185T1 (de) | 2004-07-15 |
KR100621258B1 (ko) | 2006-09-13 |
DE59909758D1 (de) | 2004-07-22 |
JP2002520163A (ja) | 2002-07-09 |
KR20010053486A (ko) | 2001-06-25 |
WO2000003831A1 (de) | 2000-01-27 |
CN1310653A (zh) | 2001-08-29 |
EP1097023A1 (de) | 2001-05-09 |
US6759625B1 (en) | 2004-07-06 |
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Legal Events
Date | Code | Title | Description |
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GD4A | Issue of patent certificate for granted invention patent | ||
MM4A | Annulment or lapse of patent due to non-payment of fees |