TW383480B - Manufacturing method for improving the flatness of semiconductor component - Google Patents

Manufacturing method for improving the flatness of semiconductor component Download PDF

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Publication number
TW383480B
TW383480B TW087113562A TW87113562A TW383480B TW 383480 B TW383480 B TW 383480B TW 087113562 A TW087113562 A TW 087113562A TW 87113562 A TW87113562 A TW 87113562A TW 383480 B TW383480 B TW 383480B
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Taiwan
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insulating layer
semiconductor substrate
manufacturing
layer
forming
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TW087113562A
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Chang-Gyu Kim
Seok-Ji Hung
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Samsung Electronics Co Ltd
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    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/01—Manufacture or treatment
    • H10B12/09—Manufacture or treatment with simultaneous manufacture of the peripheral circuit region and memory cells
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    • H01—ELECTRIC ELEMENTS
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    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
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    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3105—After-treatment
    • H01L21/31051—Planarisation of the insulating layers
    • H01L21/31053—Planarisation of the insulating layers involving a dielectric removal step
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    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H—ELECTRICITY
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    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
    • H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
    • H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
    • H01L21/02126—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material containing Si, O, and at least one of H, N, C, F, or other non-metal elements, e.g. SiOC, SiOC:H or SiONC
    • H01L21/02129—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material containing Si, O, and at least one of H, N, C, F, or other non-metal elements, e.g. SiOC, SiOC:H or SiONC the material being boron or phosphorus doped silicon oxides, e.g. BPSG, BSG or PSG
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    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
    • H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
    • H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
    • H01L21/02164—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material being a silicon oxide, e.g. SiO2
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    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/314—Inorganic layers
    • H01L21/316—Inorganic layers composed of oxides or glassy oxides or oxide based glass
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    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/314—Inorganic layers
    • H01L21/316—Inorganic layers composed of oxides or glassy oxides or oxide based glass
    • H01L21/31604—Deposition from a gas or vapour
    • H01L21/31608—Deposition of SiO2
    • H01L21/31612—Deposition of SiO2 on a silicon body
    • H—ELECTRICITY
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    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/314—Inorganic layers
    • H01L21/316—Inorganic layers composed of oxides or glassy oxides or oxide based glass
    • H01L21/31604—Deposition from a gas or vapour
    • H01L21/31625—Deposition of boron or phosphorus doped silicon oxide, e.g. BSG, PSG, BPSG
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/01—Manufacture or treatment
    • H10B12/02—Manufacture or treatment for one transistor one-capacitor [1T-1C] memory cells
    • H10B12/03—Making the capacitor or connections thereto
    • H10B12/033—Making the capacitor or connections thereto the capacitor extending over the transistor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
    • H10B12/31—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells having a storage electrode stacked over the transistor
    • H10B12/312—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells having a storage electrode stacked over the transistor with a bit line higher than the capacitor

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Semiconductor Memories (AREA)

Description

經濟部中央標準局員工消費合作社印製 3756pif.doc/006 A7 ____ B7__ 五、發明説明（丨） 本發明是有關於一種具有記憶兀件（Memory Device ) 和邏輯元件（Logic Device)在相同晶片上的半導體元件 之製造方法’且特別是夸關於一種能增進記憶胞區和邏輯 區之間平坦性的半導體元件製造方法。 隨著半導體元件積集度的增加，更需要形成於半導體 晶片或基底上的絕緣層之3E坦化的技術，用以確定微影製 程邊緣（Margin)和金屬內連線（Metal Interconnection) 的最小長度。爲了將絕緣層平坦化，特別是內層絕緣層 (Interlayer Insulating Layer)，已使用多種方法，例如， 回流已摻雜的玻璃之方法，比如BPSG (Boro-Phospho-Silicate-Glass;硼磷矽玻璃）、當於絕緣層上沈積光阻後 所進行的回蝕刻製程、用於將沈積的絕緣層平坦化的CMP (Chemical Mechanical Polishing;化學機械硏磨）製程、 以及其他類似此性質者。這些方法中，CMP製程提供了低 溫平坦化，是回流製程或回蝕刻製程所無法達到的，且 CMP製程已廣泛的使用於基底的平坦化。 具有DRAM胞區和邏輯區的半導體元件之傳統製造 方法，將無法參照第1圖描述。 請參照第1圖，首先，包括閘極12的電晶體形成於 已藉由場氧化層11而定義的元件隔離之半導體基底10 上。電容器Μ形成時直接與基底10接觸，且藉由側壁間 隙壁13a、閘極I2，以及形成在閘極12上的頂覆絕緣層 (Capping Insulating Layer) 13b 來做絕緣。之後，進行絕 緣材料的沈積和CMP製程，以形成具有平坦表面的絕緣 4 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） ----------·,1------、耵------舞 (諳先闆讀背面、V注意事項再填寫本頁} 3756pif.doc/006 A7 B7 五、發明説明（1) 層15。當穿透平坦的絕緣層15形成接觸窗開口後，鎢插 塞16a塡滿此接觸窗開口，然後形成內連線17a與鎢插塞 16a做電性連接。 隨後’再進行沈積絕緣物質、CMP製程、以及形成插 塞和內連線的製程，以穿透絕緣層18形成鎢插塞16b，並 在鎢插塞16b上形成內連線17b。 如上所述，因爲在形成電容器之前，場氧化層11和 閘極12同時形成於DRAM胞區和邏輯區，並沒有在元件 之間產生很高的階梯。當形成電容器之後，然而，因爲電 容器14僅在DRAM胞區形成，所以DRAM胞區和邏輯區 之間的階梯非常高。而且，當電容器14形成後沈積絕緣 層15時，上述之CMP製程的進行應獲得具有弔坦表面的 絕緣層15。此將導致一嚴重的問題，由於直接與硏磨墊接 觸之基底的部份和基底的其他表面之間有不同的壓力，發 生不均勻的硏磨，於是導致碟陷（Dishing)的現象。 爲了抑制碟陷現象，使用兩個硏磨步驟：使用光阻進 行回蝕刻，以及CMP。首先，使用光阻進行回蝕刻的製程， 以移除在高階梯區域固定量的絕緣層，然後進行CMP製 程將基底的全部表面平坦化。 然而，此方法有兩個缺點，一是由玲在基底的平坦化 上使用許多步驟，因而降低了產#;另一是_於在硏磨期 間使用光阻進行回蝕刻，產生了大量的粒子。 因此本發明計畫解決上述問題，本發明的目的就是在 提供一種製造半導體元件的方法，藉由在DRAM胞區形成 5 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） (请先閲讀背面乏注意事項异填寫本頁)
、1T
經濟部中央標準局員工消費合作衽印製 3756pifdoc/006 A7 B7 五、發明説明（> ) 電容器和在邏輯區形成金屬內連線，且金屬內連線的高度 與電容器相同，使能夠縮小DRAM區和邏輯區之間的階 梯。 爲達成本發明之上述和其他目的，一種半導體元件的 製造方法’其中半導體元件，的半導體基底已定義出一記憶 胞區和一邏輯區，包括下列步驟：於半導體基底的記憶胞 區形成一電容器；於半導體基底上形成一第一絕緣層，此 第一絕緣在半導體基底的記憶胞區和邏輯區上被局部地 平坦化；於邏輯區形成一金屬圖案層，其與半導體基底接 觸’且與電容器有相同的一高度；於包含第一絕緣層和金 屬圖案圖的半導體基底上形成一第二絕緣層；以及將第二 絕緣層平坦化。 爲讓本發明之上述和其他目的、特徵、和優點能更明 顯易懂’下文特舉一較佳實施例，並配合所附圖式，作詳 細說明如下： 圖式之簡單說明： 第1圖係繪示一種基底已定義出DRAM胞區和邏輯區 之傳統半導體元件的部份剖面圖；以及 第2A圖至第2D圖係繪示根據本發明較佳實施例之一 種製造半導體元件的方法。 其中’各圖示之標號所代表的元件結構如下： 10 '20 半導體基底 H ' 21 場氧化層 12 ' 22 閘極 6 本紙張尺度適用中國國家檩隼（CNS > A4規格UlOx297公羞〉 (祷先聞讀背面·之注意事項再填寫本頁) 4β
T 經濟部中央標準局員工消費合作社印製 3756pif.doc/006 A7 B7 經濟部中央標準局員工消費合作社印製 五、發明説明（今) 13a、23a 側壁間隙壁 13b ' 23b 頂覆絕緣層 14、 24 電容器 15、 18、25、27 絕緣層 16a、16b、28 鎢插寨 17a、17b 內連線 26 金屬圖案 實施例 本發明將參照以下顯示一較佳實施的圖示，做詳細的 描述。 首先請參照第2A圖，已由場氧化層21做元件隔離的 半導體基底20定義出DRAM胞區和邏輯區。包括閘極22 的電晶體形成於半導體基底20的DRAM胞區和邏輯區^ 形成電容器24與基底20直接接觸，且藉由側壁間隙壁23a 和形成在閘極22上的頂覆絕緣層23b與閘極22做絕緣。 在此，因注意的是形成於DRAM胞區的電容器24，並沒 有形成於邏輯區，因此在兩區之間導致一很高的階梯。 接著，如第2B圖所示，在基底上形成第一絕緣層25， 其方法爲當沈積完 03-TE0S USG ( Undoped Silicate Glass; 未摻雜的矽玻璃）層後進行回蝕刻、SOG回蝕刻、BPSG 熱回流製程或其他類似此性質者。當每一區域局部平坦化 後’金屬內連線26,形成與電容器有相同高度的金屬圖案 26 ’且經由形成於局部區域的第一絕緣層25之接觸窗口 與基底20做電性連接。在此，可以看出DRAM胞區和邏 7 本紙張尺度適用中ifgl家標準（CNS )八4規格（2Ι〇χ297公釐） ' ' (諳先聞讀背面之注意事項再填寫本頁) 訂 舞· 3756pif.doc/006 A7 B7 五、發明説明（f) 輯區之間的平坦性並沒有藉由第一絕緣層25而提供，但 在個別的區域則提供了局部的平坦性。 藉由以下的步驟來完成金屬圖案26的形成。 首先，進行第一絕緣層25的選擇性蝕刻製程，以形 成接觸窗開口。接著，阻障金屬層，比如Ti/TiN層（未 繪出），沈積於接觸窗開口的底部，然後進行鋁熱回流製 程。將熱回流的鋁層圖案化，以形成金屬圖案26。另一種 方法，係應用用於形成鎢插塞之習知製程來形成金屬圖案 26 ° 之後，如第2C圖所示，第二絕緣層27,比如SOG層， 形成於包含金屬圖案26和第一絕緣層25的基底上，然後 進行平坦化製程。第二絕緣層27的平坦化可僅藉由CMP 或回蝕刻來完成。當使用SOG層做爲第二絕緣層27時， 在本實施例中較佳的是使用回蝕刻。 -接著請參照第_2〇圖，在DRAM胞區的基底20以及在 邏斷區的金屬圖案26上’形成接觸窗開口，然後將接觸 窗開口塡滿鎢金屬，以鎢插塞28。鎢插塞28同時形 成在DRAM胞區和邏輯區。 經濟部中央標準局員Η消費合作社印製 ----:---------- (請先閲讀背面之注意事項再填寫本頁) Γ — 如上所述，雖然’在DRAM胞區形成電容器後，半導 體基底的DRAM胞區和邏輯區之間有一高的階梯，此高的 階梯可以藉由在邏輯區形成金屬圖案而降低，其中邏輯區 的金屬圖案的高度與電容器一樣，且金屬圖案直接與基底 接觸。因此，在電容器和金屬圖案上的絕緣層之隨後的平 坦化製程可以被簡化。 8 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐）

Claims (1)

  1. 經濟部中央標準局員工消費合作社印裝 A8 S83480 ll 3756pif.doc/006 D8 六_、申請專利範圍 1. 一種半導體元件的製造方法，該半導體元件的半導 體基底已定義出一記憶胞區和一邏輯區，該方法包括下列 步驟： 形成一電容器於該半導體基底的該記憶胞區； 形成一第一絕緣層於該半導體基底上，該第一絕緣層 在該半導體基底的該記憶胞區和該邏輯區上被局部地平 坦化； 形成一金屬圖案層於該邏輯區，該金屬圖案層與該半 導體基底接觸，且舆該電容器有相同的一高度；-一一 形成一第二絕緣層於包含該第一絕緣層和該金屬圖 案圖的該半導體基底上；以及 將該第二絕緣層平坦化。' 2. 如申請專利範圍第1項所述之製造方法，其中形成 該第一絕緣層的步驟包括成一 o3-teos未摻雜的矽玻 璃層於包含該電容器的該半導體基底上，以及回蝕刻該 o3-teos未摻雜的矽玻璃層。 3. 如申請專利範圍第1項所述之製造方法，其中形成 該第一絕緣層的方法，包括：一包含SOG的絕緣層於包含 該電容器的該半導體基底上，以及回蝕刻該包含SOG的絕 緣層。 4·如申請專利範圍第1項所述之製造方法，其中該第 一絕緣層包括形成一回流的BPSG層。 5·如申請專利範圍第1或4項所述之製造方法，其中 將該第二絕緣層平坦化的步驟係由一 CMP製程進行。 丨…_____9________ 本紙張尺度適用中國國家樣準.（CNS〉A4规格（21〇><297公釐） , ---Γ—一,----,,,-------tT-------f----^------J— - - (請先閲讀背面之注意事項再填寫本頁) _ A8 Βδ C8 D8 mum 3756pif.doc/006 六、申請專利範圍 6.如申請專利範圍第1或4項所述之製造方法，其中 該第二絕緣層係由一 SOG層所製成，且其中將該第二絕緣 層平坦化的方法係由一回蝕刻製程進行。 (請先閱讀背面之注意事項再填寫本頁) 經濟部中央標準局員工消費合作社印製 10 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐）
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