TW373262B - Method for cleaning metal film stuck inside film treating device - Google Patents
Method for cleaning metal film stuck inside film treating deviceInfo
- Publication number
- TW373262B TW373262B TW087106605A TW87106605A TW373262B TW 373262 B TW373262 B TW 373262B TW 087106605 A TW087106605 A TW 087106605A TW 87106605 A TW87106605 A TW 87106605A TW 373262 B TW373262 B TW 373262B
- Authority
- TW
- Taiwan
- Prior art keywords
- film
- treating device
- cleaning
- oxidizing
- metal film
- Prior art date
Links
- 238000004140 cleaning Methods 0.000 title abstract 7
- 239000002184 metal Substances 0.000 title abstract 6
- 229910052751 metal Inorganic materials 0.000 title abstract 6
- 238000000034 method Methods 0.000 title abstract 6
- 239000010408 film Substances 0.000 abstract 12
- 230000001590 oxidative effect Effects 0.000 abstract 4
- 238000000859 sublimation Methods 0.000 abstract 3
- 230000008022 sublimation Effects 0.000 abstract 3
- 239000000126 substance Substances 0.000 abstract 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract 1
- 229910052802 copper Inorganic materials 0.000 abstract 1
- 239000010949 copper Substances 0.000 abstract 1
- 230000000694 effects Effects 0.000 abstract 1
- 239000002245 particle Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- 239000010409 thin film Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/10—Etching compositions
- C23F1/12—Gaseous compositions
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical Vapour Deposition (AREA)
- Physical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
- Electrodes Of Semiconductors (AREA)
- Drying Of Semiconductors (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP32042997A JP4049423B2 (ja) | 1997-11-06 | 1997-11-06 | 成膜処理装置内の付着金属膜のクリーニング方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
TW373262B true TW373262B (en) | 1999-11-01 |
Family
ID=18121358
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW087106605A TW373262B (en) | 1997-11-06 | 1998-04-29 | Method for cleaning metal film stuck inside film treating device |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP4049423B2 (zh) |
KR (1) | KR100327282B1 (zh) |
TW (1) | TW373262B (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI725194B (zh) * | 2016-07-26 | 2021-04-21 | 日商中央硝子股份有限公司 | 蝕刻方法及蝕刻裝置 |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6284052B2 (en) * | 1998-08-19 | 2001-09-04 | Sharp Laboratories Of America, Inc. | In-situ method of cleaning a metal-organic chemical vapor deposition chamber |
JP2000345346A (ja) * | 1999-05-31 | 2000-12-12 | Japan Pionics Co Ltd | 気化供給装置及び半導体製造装置の洗浄方法 |
US6352081B1 (en) * | 1999-07-09 | 2002-03-05 | Applied Materials, Inc. | Method of cleaning a semiconductor device processing chamber after a copper etch process |
JP4663059B2 (ja) | 2000-03-10 | 2011-03-30 | 東京エレクトロン株式会社 | 処理装置のクリーニング方法 |
US6534413B1 (en) * | 2000-10-27 | 2003-03-18 | Air Products And Chemicals, Inc. | Method to remove metal and silicon oxide during gas-phase sacrificial oxide etch |
JP3527231B2 (ja) * | 2002-07-05 | 2004-05-17 | 東京エレクトロン株式会社 | 基板処理装置のクリーニング方法 |
US7383841B2 (en) * | 2002-07-05 | 2008-06-10 | Tokyo Electron Limited | Method of cleaning substrate-processing device and substrate-processing device |
US20040014327A1 (en) * | 2002-07-18 | 2004-01-22 | Bing Ji | Method for etching high dielectric constant materials and for cleaning deposition chambers for high dielectric constant materials |
JP4234135B2 (ja) * | 2003-02-13 | 2009-03-04 | 東京エレクトロン株式会社 | 基板処理装置のクリーニング方法 |
US8298336B2 (en) | 2005-04-01 | 2012-10-30 | Lam Research Corporation | High strip rate downstream chamber |
JP5481547B2 (ja) * | 2006-08-24 | 2014-04-23 | 富士通セミコンダクター株式会社 | 金属付着物の除去方法、基板処理装置、および記録媒体 |
US7476291B2 (en) * | 2006-09-28 | 2009-01-13 | Lam Research Corporation | High chamber temperature process and chamber design for photo-resist stripping and post-metal etch passivation |
JP2011035119A (ja) * | 2009-07-31 | 2011-02-17 | Tokyo Electron Ltd | 基板洗浄装置及び基板洗浄方法 |
JP5646190B2 (ja) * | 2010-03-12 | 2014-12-24 | 東京エレクトロン株式会社 | 洗浄方法及び処理装置 |
JP5707144B2 (ja) * | 2011-01-18 | 2015-04-22 | 東京エレクトロン株式会社 | 基板処理装置のドライクリーニング方法及び金属膜の除去方法 |
JP5929386B2 (ja) | 2012-03-22 | 2016-06-08 | セントラル硝子株式会社 | 成膜装置内の金属膜のドライクリーニング方法 |
JP6142676B2 (ja) | 2013-05-31 | 2017-06-07 | セントラル硝子株式会社 | ドライエッチング方法、ドライエッチング装置、金属膜及びそれを備えたデバイス |
JP6087236B2 (ja) * | 2013-07-24 | 2017-03-01 | 東京エレクトロン株式会社 | 成膜方法 |
JP7379993B2 (ja) * | 2019-09-20 | 2023-11-15 | 東京エレクトロン株式会社 | エッチング装置及びエッチング方法 |
WO2022080288A1 (ja) * | 2020-10-16 | 2022-04-21 | セントラル硝子株式会社 | ウェットエッチング方法 |
CN114618852B (zh) * | 2022-05-17 | 2022-08-16 | 江苏浦贝智能科技有限公司 | 一种半导体加工用除胶机及除胶方法 |
-
1997
- 1997-11-06 JP JP32042997A patent/JP4049423B2/ja not_active Expired - Lifetime
-
1998
- 1998-04-29 TW TW087106605A patent/TW373262B/zh not_active IP Right Cessation
- 1998-05-06 KR KR1019980016200A patent/KR100327282B1/ko not_active IP Right Cessation
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI725194B (zh) * | 2016-07-26 | 2021-04-21 | 日商中央硝子股份有限公司 | 蝕刻方法及蝕刻裝置 |
US11282714B2 (en) | 2016-07-26 | 2022-03-22 | Central Glass Company, Limited | Etching method and etching device |
Also Published As
Publication number | Publication date |
---|---|
KR100327282B1 (ko) | 2002-04-17 |
JPH11140652A (ja) | 1999-05-25 |
JP4049423B2 (ja) | 2008-02-20 |
KR19990044727A (ko) | 1999-06-25 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |