TW369603B - Apparatus for machining, recording, and reproducing, using scanning probe microscope - Google Patents

Apparatus for machining, recording, and reproducing, using scanning probe microscope

Info

Publication number
TW369603B
TW369603B TW087105151A TW87105151A TW369603B TW 369603 B TW369603 B TW 369603B TW 087105151 A TW087105151 A TW 087105151A TW 87105151 A TW87105151 A TW 87105151A TW 369603 B TW369603 B TW 369603B
Authority
TW
Taiwan
Prior art keywords
probe
machining
recording
scanning
sample
Prior art date
Application number
TW087105151A
Other languages
Chinese (zh)
Inventor
Eisuke Tomita
Original Assignee
Sii Nanotechnology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP9092635A external-priority patent/JPH10283972A/en
Application filed by Sii Nanotechnology Inc filed Critical Sii Nanotechnology Inc
Application granted granted Critical
Publication of TW369603B publication Critical patent/TW369603B/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
    • G01Q60/16—Probes, their manufacture, or their related instrumentation, e.g. holders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/045—Self-actuating probes, i.e. wherein the actuating means for driving are part of the probe itself, e.g. piezoelectric means on a cantilever probe
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/08—Means for establishing or regulating a desired environmental condition within a sample chamber
    • G01Q30/16—Vacuum environment
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
    • G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
    • G11B9/1463—Record carriers for recording or reproduction involving the use of microscopic probe means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/861—Scanning tunneling probe
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/865—Magnetic force probe
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/868—Scanning probe structure with optical means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/872—Positioner

Abstract

A machining, recording, and reproducing apparatus using a scanning probe microscope comprising: a probe 1 equipped with a probe tip at its front end, a vibration application portion consisting of a piezoelectric vibrating body 2 and an AC voltage-generating portion 3, a vibration-detecting portion consisting of a quartz oscillator 4 and a current/voltage amplifier circuit 5, a coarse displacement means 6 for bringing the probe close to a surface of a sample, a sample-to-probe distance control means consisting of a Z fine displacement element 11 and a Z servo circuit 12, a two-dimensional scanning means consisting of an XY fine displacement element 13 and an XY scanning circuit 14, and a data-processing means 15 for converting a measurement signal into a three-dimensional image. The probe 1 is held to the quartz oscillator 4 by spring pressure of a resilient body 16.
TW087105151A 1997-04-10 1998-04-04 Apparatus for machining, recording, and reproducing, using scanning probe microscope TW369603B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9092635A JPH10283972A (en) 1997-04-10 1997-04-10 Machining, recording, and reproducing device using scanning probe microscope

Publications (1)

Publication Number Publication Date
TW369603B true TW369603B (en) 1999-09-11

Family

ID=57941417

Family Applications (1)

Application Number Title Priority Date Filing Date
TW087105151A TW369603B (en) 1997-04-10 1998-04-04 Apparatus for machining, recording, and reproducing, using scanning probe microscope

Country Status (2)

Country Link
KR (1) KR100526217B1 (en)
TW (1) TW369603B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI673498B (en) * 2017-04-19 2019-10-01 東南科技大學 Micromachining head structure

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101218177B1 (en) 2010-04-05 2013-01-18 (주)나노포커스 atomic force microscope

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05180616A (en) * 1992-01-08 1993-07-23 Canon Inc Holding mechanism of probe
JP3131517B2 (en) * 1992-12-25 2001-02-05 オリンパス光学工業株式会社 Scanning probe microscope equipment
JPH07167933A (en) * 1993-12-15 1995-07-04 Nikon Corp Magnetic polarization microscope
JP3581421B2 (en) * 1995-02-23 2004-10-27 キヤノン株式会社 Information processing equipment
JPH08248082A (en) * 1995-03-08 1996-09-27 Nippon Telegr & Teleph Corp <Ntt> Potential distribution measuring method and scanning microscope
JPH0982771A (en) * 1995-09-19 1997-03-28 Toshiba Corp Method and apparatus for evaluating semiconductor material

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI673498B (en) * 2017-04-19 2019-10-01 東南科技大學 Micromachining head structure

Also Published As

Publication number Publication date
KR19980081248A (en) 1998-11-25
KR100526217B1 (en) 2006-01-12

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