TW357464B - Piezoelectric actuator of multilayer design and process for making contact with a piezoelectric actuator of multilayer design - Google Patents
Piezoelectric actuator of multilayer design and process for making contact with a piezoelectric actuator of multilayer designInfo
- Publication number
- TW357464B TW357464B TW086116815A TW86116815A TW357464B TW 357464 B TW357464 B TW 357464B TW 086116815 A TW086116815 A TW 086116815A TW 86116815 A TW86116815 A TW 86116815A TW 357464 B TW357464 B TW 357464B
- Authority
- TW
- Taiwan
- Prior art keywords
- piezoelectric actuator
- multilayer design
- multilayer
- making contact
- design
- Prior art date
Links
- 238000000034 method Methods 0.000 title 1
- 239000002184 metal Substances 0.000 abstract 3
- 239000000919 ceramic Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
- H10N30/872—Interconnections, e.g. connection electrodes of multilayer piezoelectric or electrostrictive devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/06—Forming electrodes or interconnections, e.g. leads or terminals
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/06—Forming electrodes or interconnections, e.g. leads or terminals
- H10N30/063—Forming interconnections, e.g. connection electrodes of multilayered piezoelectric or electrostrictive parts
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/06—Forming electrodes or interconnections, e.g. leads or terminals
- H10N30/067—Forming single-layered electrodes of multilayered piezoelectric or electrostrictive parts
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
- H10N30/875—Further connection or lead arrangements, e.g. flexible wiring boards, terminal pins
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19646676A DE19646676C1 (de) | 1996-11-12 | 1996-11-12 | Piezoaktor mit neuartiger Kontaktierung und Herstellverfahren |
Publications (1)
Publication Number | Publication Date |
---|---|
TW357464B true TW357464B (en) | 1999-05-01 |
Family
ID=7811401
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW086116815A TW357464B (en) | 1996-11-12 | 1997-11-11 | Piezoelectric actuator of multilayer design and process for making contact with a piezoelectric actuator of multilayer design |
Country Status (15)
Country | Link |
---|---|
US (1) | US6236146B1 (zh) |
EP (1) | EP0958620B1 (zh) |
JP (1) | JP2001507169A (zh) |
KR (1) | KR20000052836A (zh) |
CN (1) | CN1150638C (zh) |
AR (1) | AR008525A1 (zh) |
AT (1) | ATE239981T1 (zh) |
BR (1) | BR9713500A (zh) |
CA (1) | CA2271281A1 (zh) |
CZ (1) | CZ152099A3 (zh) |
DE (2) | DE19646676C1 (zh) |
RU (1) | RU2178222C2 (zh) |
TW (1) | TW357464B (zh) |
WO (1) | WO1998020721A1 (zh) |
ZA (1) | ZA9710101B (zh) |
Families Citing this family (45)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19930585B4 (de) * | 1998-08-06 | 2017-11-09 | Epcos Ag | Piezoaktor mit verbesserter elektrischer Kontaktierung und Verwendung eines derartigen Piezoaktors |
DE19905340C2 (de) * | 1999-02-09 | 2001-09-13 | Siemens Ag | Verfahren und Anordnung zur Voreinstellung und dynamischen Nachführung piezoelektrischer Aktoren |
DE19928190A1 (de) * | 1999-06-19 | 2001-01-11 | Bosch Gmbh Robert | Piezoaktor |
DE19928189A1 (de) * | 1999-06-19 | 2001-04-19 | Bosch Gmbh Robert | Piezoaktor |
DE50014127D1 (de) * | 1999-06-29 | 2007-04-19 | Siemens Ag | Piezoaktor mit einer elektrisch leitenden Mehrschichtfolie |
DE19945933C1 (de) * | 1999-09-24 | 2001-05-17 | Epcos Ag | Piezoaktor mit isolationszonenfreier elektrischer Kontaktierung und Verfahren zu dessen Herstellung |
DE19945934C1 (de) * | 1999-09-24 | 2001-03-22 | Epcos Ag | Verfahren zur Herstellung einer Außenkontaktierung eines elektrokeramischen Bauelementes, insbesondere eines Piezoaktors |
WO2001045138A2 (de) * | 1999-12-16 | 2001-06-21 | Epcos Ag | Piezoelektrisches bauelement |
DE10017334C2 (de) * | 2000-04-07 | 2002-04-18 | Daimler Chrysler Ag | Piezoelektrische Betätigungseinrichtung |
DE10017331C1 (de) * | 2000-04-07 | 2001-06-07 | Daimler Chrysler Ag | Piezoelektrischer Vielschichtaktuator und Verfahren zu seiner Herstellung |
DE10017332C2 (de) * | 2000-04-07 | 2002-04-18 | Daimler Chrysler Ag | Piezoelektrische Betätigungseinrichtung zur Klappensteuerung am Rotorblatt eines Hubschraubers |
JP4158338B2 (ja) * | 2000-06-06 | 2008-10-01 | 株式会社デンソー | インジェクタ用圧電体素子 |
GB0022612D0 (en) * | 2000-09-15 | 2000-11-01 | Univ Warwick | Non-destructive testing apparatus |
DE10055241A1 (de) | 2000-11-08 | 2002-05-29 | Epcos Ag | Piezoaktor |
DE10113744A1 (de) * | 2000-11-27 | 2002-06-20 | Hans Richter | Elektrische Anschlußanordnung für einen monolithischen Vielschicht-Piezoaktor |
DE10112588C1 (de) * | 2001-03-15 | 2002-05-02 | Siemens Ag | Piezoaktor sowie Verfahren zur Herstellung eines Piezoaktors |
DE10121270A1 (de) | 2001-04-30 | 2003-02-06 | Epcos Ag | Passivierungsmaterial für ein elektrisches Bauteil sowie piezoelektrisches Bauteil in Vielschichtbauweise |
WO2002089226A2 (de) | 2001-04-30 | 2002-11-07 | Siemens Aktiengesellschaft | Weiterkontaktierung für ein elektrisches bauteil sowie piezoelektrisches bauteil in vielschichtbauweise |
DE10121271A1 (de) * | 2001-04-30 | 2002-11-21 | Epcos Ag | Grünkörper, piezoelektrisches Bauteil sowie Verfahren zum Herstellen eines piezoelektrischen Bauteils |
DE10126656A1 (de) * | 2001-06-01 | 2002-12-05 | Endress & Hauser Gmbh & Co Kg | Elektromechanischer Wandler mit mindestens einem piezoelektrischen Element |
DE10207292B4 (de) | 2002-02-21 | 2005-08-11 | Siemens Ag | Piezostack und Verfahren zur Herstellung eines Piezostacks |
DE10251230B4 (de) * | 2002-11-04 | 2005-04-21 | Epcos Ag | Schwingungsfeste elektrochemische Zelle sowie Verfahren zu ihrer Herstellung |
DE10328373B4 (de) * | 2003-06-24 | 2015-10-08 | Continental Automotive Gmbh | Piezoelektrisches Bauteil mit Temperiervorrichtung und Verwendung des Bauteils |
DE20313727U1 (de) * | 2003-09-04 | 2005-01-13 | Thinxxs Gmbh | Piezoaktor |
WO2005086247A1 (ja) * | 2004-03-09 | 2005-09-15 | Kyocera Corporation | 積層型圧電素子とその製造方法 |
DE102004031402A1 (de) * | 2004-06-29 | 2006-02-09 | Siemens Ag | Piezoelektrisches Bauteil mit Sollbruchstelle, Verfahren zum Herstellen des Bauteils und Verwendung des Bauteils |
DE102004058715B4 (de) * | 2004-12-06 | 2010-08-12 | Continental Automotive Gmbh | Kraftstoffinjektor für eine Brennkraftmaschine sowie Verfahren zur Herstellung eines Kraftstoffinjektors |
DE102005015405B3 (de) * | 2005-02-08 | 2006-07-20 | Pi Ceramic Gmbh Keramische Technologien Und Bauelemente | Anordnung zur elektrischen Kontaktierung von piezoelektrischen Vielschicht-Stapelaktoren |
DE102005039358B4 (de) * | 2005-08-19 | 2016-12-08 | Physik Instrumente (Pi) Gmbh & Co. Kg | Piezoelektrischer Aktor für einen Ultraschallmotor |
DE102006014606B4 (de) * | 2006-03-29 | 2011-04-07 | Siemens Ag | Verfahren zur Herstellung eines gekapselten Hochdruckaktors |
ATE549750T1 (de) * | 2006-03-31 | 2012-03-15 | Murata Manufacturing Co | Piezoelektrischer aktuator |
JP2008055456A (ja) * | 2006-08-30 | 2008-03-13 | Sumitomo Electric Ind Ltd | 半田付け方法および半田付け用レーザ装置 |
US7843633B2 (en) * | 2007-01-15 | 2010-11-30 | Sumitomo Electric Industries, Ltd. | Laser processing apparatus |
DE102007011652B4 (de) | 2007-02-23 | 2008-12-11 | Pi Ceramic Gmbh Keramische Technologien Und Bauelemente | Anordnung zur elektrischen Kontaktierung von piezoelektrischen Vielschichtaktoren |
DE102007046077A1 (de) * | 2007-09-26 | 2009-04-02 | Epcos Ag | Piezoelektrisches Vielschichtbauelement |
JP5176853B2 (ja) * | 2007-10-09 | 2013-04-03 | 住友電気工業株式会社 | 光学モジュール及びそれを含む光源装置 |
JP2009195976A (ja) * | 2008-02-25 | 2009-09-03 | Sumitomo Electric Ind Ltd | 戻り光測定方法、戻り光測定装置及びレーザ加工方法 |
JP5566393B2 (ja) | 2008-11-20 | 2014-08-06 | セラムテック ゲゼルシャフト ミット ベシュレンクテル ハフツング | 多孔性の伸張可能な金属製の導電層としての外部電極を備えた多層アクチュエータ |
DE102010051864B4 (de) * | 2009-12-22 | 2020-08-27 | Sew-Eurodrive Gmbh & Co Kg | Antrieb und Verfahren zum Betreiben eines Antriebs |
DE102012207276B4 (de) | 2011-08-01 | 2018-04-05 | Continental Automotive Gmbh | Vollaktiver Piezostack mit Passivierung |
KR101288257B1 (ko) * | 2011-09-30 | 2013-07-26 | 삼성전기주식회사 | 미세토출장치의 구동부 제작방법 |
DE102011090156A1 (de) | 2011-12-30 | 2013-07-04 | Continental Automotive Gmbh | Piezostack mit Passivierung und Verfahren zur Passivierung eines Piezostacks |
RU2540440C1 (ru) * | 2013-08-01 | 2015-02-10 | Открытое акционерное общество "Научно-исследовательский институт "Элпа" с опытным производством" | Способ изготовления монолитных многослойных пьезокерамических элементов-столбиков |
DE102015219427B4 (de) * | 2015-10-07 | 2024-04-11 | Robert Bosch Gmbh | Piezoelement und Ultraschallwandler mit einem Piezoelement |
US10658565B2 (en) * | 2016-08-29 | 2020-05-19 | The Boeing Company | Actuator assemblies, mechanical assemblies including the actuator assemblies, and methods of fabricating the same |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4803763A (en) * | 1986-08-28 | 1989-02-14 | Nippon Soken, Inc. | Method of making a laminated piezoelectric transducer |
ATE115772T1 (de) * | 1989-04-07 | 1994-12-15 | Mitsui Petrochemical Ind | Geschichtete keramikanordnung und verfahren zu deren herstellung. |
JPH034576A (ja) * | 1989-06-01 | 1991-01-10 | Fuji Electric Co Ltd | 積層型圧電素子 |
JPH03154387A (ja) * | 1989-11-13 | 1991-07-02 | Fujitsu Ltd | 圧電アクチュエータ素子の電極構造 |
DE4201937C2 (de) * | 1991-01-25 | 1997-05-22 | Murata Manufacturing Co | Piezoelektrisches laminiertes Stellglied |
-
1996
- 1996-11-12 DE DE19646676A patent/DE19646676C1/de not_active Expired - Fee Related
-
1997
- 1997-11-06 CN CNB971978654A patent/CN1150638C/zh not_active Expired - Lifetime
- 1997-11-06 BR BR9713500-3A patent/BR9713500A/pt unknown
- 1997-11-06 AT AT97948725T patent/ATE239981T1/de not_active IP Right Cessation
- 1997-11-06 DE DE59710061T patent/DE59710061D1/de not_active Expired - Lifetime
- 1997-11-06 CA CA002271281A patent/CA2271281A1/en not_active Abandoned
- 1997-11-06 CZ CZ991520A patent/CZ152099A3/cs unknown
- 1997-11-06 EP EP97948725A patent/EP0958620B1/de not_active Expired - Lifetime
- 1997-11-06 RU RU99112481/28A patent/RU2178222C2/ru not_active IP Right Cessation
- 1997-11-06 JP JP52202798A patent/JP2001507169A/ja active Pending
- 1997-11-06 WO PCT/DE1997/002587 patent/WO1998020721A1/de not_active Application Discontinuation
- 1997-11-06 US US09/254,764 patent/US6236146B1/en not_active Expired - Lifetime
- 1997-11-06 KR KR1019990703667A patent/KR20000052836A/ko not_active Application Discontinuation
- 1997-11-10 ZA ZA9710101A patent/ZA9710101B/xx unknown
- 1997-11-11 TW TW086116815A patent/TW357464B/zh active
- 1997-11-12 AR ARP970105262A patent/AR008525A1/es not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
CN1150638C (zh) | 2004-05-19 |
EP0958620A1 (de) | 1999-11-24 |
AR008525A1 (es) | 2000-01-19 |
US6236146B1 (en) | 2001-05-22 |
RU2178222C2 (ru) | 2002-01-10 |
WO1998020721A1 (de) | 1998-05-22 |
CZ152099A3 (cs) | 1999-08-11 |
BR9713500A (pt) | 2000-07-04 |
ZA9710101B (en) | 1998-08-03 |
EP0958620B1 (de) | 2003-05-07 |
ATE239981T1 (de) | 2003-05-15 |
CN1230291A (zh) | 1999-09-29 |
JP2001507169A (ja) | 2001-05-29 |
KR20000052836A (ko) | 2000-08-25 |
DE19646676C1 (de) | 1998-04-23 |
DE59710061D1 (de) | 2003-06-12 |
CA2271281A1 (en) | 1998-05-22 |
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