TW348287B - Process for producing gate oxide layer - Google Patents

Process for producing gate oxide layer

Info

Publication number
TW348287B
TW348287B TW086110123A TW86110123A TW348287B TW 348287 B TW348287 B TW 348287B TW 086110123 A TW086110123 A TW 086110123A TW 86110123 A TW86110123 A TW 86110123A TW 348287 B TW348287 B TW 348287B
Authority
TW
Taiwan
Prior art keywords
oxide layer
gate oxide
silicon substrate
producing gate
forming
Prior art date
Application number
TW086110123A
Other languages
Chinese (zh)
Inventor
Yih-Jyh Liou
Jyh-Horng Chern
Original Assignee
United Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Microelectronics Corp filed Critical United Microelectronics Corp
Priority to TW086110123A priority Critical patent/TW348287B/en
Application granted granted Critical
Publication of TW348287B publication Critical patent/TW348287B/en

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  • Formation Of Insulating Films (AREA)

Abstract

A process for producing a gate oxide layer, which comprises: (a) providing a silicon substrate; (b) forming a first stop layer on the silicon substrate; (c) forming a first oxide layer on the interface between the silicon substrate and the first stop layer; (d) forming a second stop layer on the interface between the silicon substrate and the first oxide layer; and (e) forming a second oxide layer on the interface between the silicon substrate and the second stop layer.
TW086110123A 1997-07-17 1997-07-17 Process for producing gate oxide layer TW348287B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW086110123A TW348287B (en) 1997-07-17 1997-07-17 Process for producing gate oxide layer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW086110123A TW348287B (en) 1997-07-17 1997-07-17 Process for producing gate oxide layer

Publications (1)

Publication Number Publication Date
TW348287B true TW348287B (en) 1998-12-21

Family

ID=58264058

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086110123A TW348287B (en) 1997-07-17 1997-07-17 Process for producing gate oxide layer

Country Status (1)

Country Link
TW (1) TW348287B (en)

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