TW345631B - Method for resist removal, and adhesive or adhesive sheet for use in the same - Google Patents
Method for resist removal, and adhesive or adhesive sheet for use in the sameInfo
- Publication number
- TW345631B TW345631B TW085107603A TW85107603A TW345631B TW 345631 B TW345631 B TW 345631B TW 085107603 A TW085107603 A TW 085107603A TW 85107603 A TW85107603 A TW 85107603A TW 345631 B TW345631 B TW 345631B
- Authority
- TW
- Taiwan
- Prior art keywords
- adhesive
- resist
- adhesive layer
- same
- resist removal
- Prior art date
Links
Landscapes
- Photosensitive Polymer And Photoresist Processing (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Adhesives Or Adhesive Processes (AREA)
Abstract
A method for resist removal comprising forming an adhesive layer on an article on which a resist is present and peeling the adhesive layer as a united sheet including the resist material from the article, characterized in that the adhesive layer has been regulated so as to have a modulus of elasticity of 1 kg/mm2 or higher in the peeling, and the adhesion between the adhesive layer and the resist layer is set to be greater than the adhesion between the resist layer and the article; moreover the 180° peeling and adhesive strength between the adhesive layer and the resist is greater than 5g/10mm.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7563496A JP2868720B2 (en) | 1996-03-29 | 1996-03-29 | Method of removing resist, and adhesive or adhesive sheet used therefor |
Publications (1)
Publication Number | Publication Date |
---|---|
TW345631B true TW345631B (en) | 1998-11-21 |
Family
ID=13581891
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW085107603A TW345631B (en) | 1996-03-29 | 1996-06-25 | Method for resist removal, and adhesive or adhesive sheet for use in the same |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP2868720B2 (en) |
TW (1) | TW345631B (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100372619C (en) * | 2000-07-14 | 2008-03-05 | 日东电工株式会社 | Cleaning sheet, conveying member using the same, and substrate processing equipment cleaning method using them |
JP2002231600A (en) * | 2001-01-30 | 2002-08-16 | Nitto Denko Corp | Adhesive tape for resist removal and resist-removing method |
-
1996
- 1996-03-29 JP JP7563496A patent/JP2868720B2/en not_active Expired - Lifetime
- 1996-06-25 TW TW085107603A patent/TW345631B/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
JP2868720B2 (en) | 1999-03-10 |
JPH09265191A (en) | 1997-10-07 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |