TW345631B - Method for resist removal, and adhesive or adhesive sheet for use in the same - Google Patents

Method for resist removal, and adhesive or adhesive sheet for use in the same

Info

Publication number
TW345631B
TW345631B TW085107603A TW85107603A TW345631B TW 345631 B TW345631 B TW 345631B TW 085107603 A TW085107603 A TW 085107603A TW 85107603 A TW85107603 A TW 85107603A TW 345631 B TW345631 B TW 345631B
Authority
TW
Taiwan
Prior art keywords
adhesive
resist
adhesive layer
same
resist removal
Prior art date
Application number
TW085107603A
Other languages
Chinese (zh)
Inventor
Takayuki Yamamoto
Tatuya Kubozono
Yasuo Kihara
Yuji Okawa
Koichi Hashimoto
Kouichi Hashimoto
Matsumura Takeshi
Original Assignee
Nitto Denko Corp
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nitto Denko Corp, Hitachi Ltd filed Critical Nitto Denko Corp
Application granted granted Critical
Publication of TW345631B publication Critical patent/TW345631B/en

Links

Landscapes

  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Adhesives Or Adhesive Processes (AREA)

Abstract

A method for resist removal comprising forming an adhesive layer on an article on which a resist is present and peeling the adhesive layer as a united sheet including the resist material from the article, characterized in that the adhesive layer has been regulated so as to have a modulus of elasticity of 1 kg/mm2 or higher in the peeling, and the adhesion between the adhesive layer and the resist layer is set to be greater than the adhesion between the resist layer and the article; moreover the 180° peeling and adhesive strength between the adhesive layer and the resist is greater than 5g/10mm.
TW085107603A 1996-03-29 1996-06-25 Method for resist removal, and adhesive or adhesive sheet for use in the same TW345631B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7563496A JP2868720B2 (en) 1996-03-29 1996-03-29 Method of removing resist, and adhesive or adhesive sheet used therefor

Publications (1)

Publication Number Publication Date
TW345631B true TW345631B (en) 1998-11-21

Family

ID=13581891

Family Applications (1)

Application Number Title Priority Date Filing Date
TW085107603A TW345631B (en) 1996-03-29 1996-06-25 Method for resist removal, and adhesive or adhesive sheet for use in the same

Country Status (2)

Country Link
JP (1) JP2868720B2 (en)
TW (1) TW345631B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100372619C (en) * 2000-07-14 2008-03-05 日东电工株式会社 Cleaning sheet, conveying member using the same, and substrate processing equipment cleaning method using them
JP2002231600A (en) * 2001-01-30 2002-08-16 Nitto Denko Corp Adhesive tape for resist removal and resist-removing method

Also Published As

Publication number Publication date
JP2868720B2 (en) 1999-03-10
JPH09265191A (en) 1997-10-07

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees