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Encoder with diffraction grating and multiply diffracted light
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Position measuring apparatus utilizing two-beam interferences to create phase displaced signals
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1987-08-12
Reference position detecting device and encoder having said device
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1993-03-28
Positional deviation measuring device and method thereof
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光栅位移测量方法
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1996-03-19
Photoelectric position measuring system with integral optical circuit having phase shifted interference gratings
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Optischer Lagegeber.
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Fixed point detecting device using detection of light diffracted by holographic diffraction gratings
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Diffractive grating rotary optical encoder with high tolerance to grating defects and misalignment
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Diffractive grating linear optical encoders with high tolerance to grating defects and misalignment
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2008-11-19
位置测量装置
JPH06174424A
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1994-06-24
測長または測角装置
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1995-06-13
Apparatus wherein diffracted light does not return to the source
JP3068408B2
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2000-07-24
格子干渉型変位検出装置
JPS59132311A
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1984-07-30
光学スケ−ル
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2001-04-03
格子干渉型変位検出装置
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1998-07-11
Cylindrical laser optical ruler having a high tolerance for grating defects and misalignment
SU1126812A1
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1984-11-30
Устройство дл измерени деформаций диффузно отражающих объектов
JPS61130816A
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1986-06-18
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