TW339407B - Detecting method and detector for defects in objects the invention relates to a detection method of defects in objects - Google Patents

Detecting method and detector for defects in objects the invention relates to a detection method of defects in objects

Info

Publication number
TW339407B
TW339407B TW085116013A TW85116013A TW339407B TW 339407 B TW339407 B TW 339407B TW 085116013 A TW085116013 A TW 085116013A TW 85116013 A TW85116013 A TW 85116013A TW 339407 B TW339407 B TW 339407B
Authority
TW
Taiwan
Prior art keywords
objects
defects
detector
detection method
relates
Prior art date
Application number
TW085116013A
Other languages
Chinese (zh)
Inventor
Noboru Shirakami
Masao Minobe
Original Assignee
Sumitomo Kagaku Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Kagaku Kk filed Critical Sumitomo Kagaku Kk
Application granted granted Critical
Publication of TW339407B publication Critical patent/TW339407B/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Optical Filters (AREA)

Abstract

A sort of detection method of defects in objects for detection of objects subject to illumination for observation of images formed by the lighting passing by the object or reflected on the object, featuring: observation of said perspective light or diffused reflective light gathered by optical means by using the covering by the opening at the focus located in said optical means.
TW085116013A 1995-12-28 1996-12-24 Detecting method and detector for defects in objects the invention relates to a detection method of defects in objects TW339407B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP35276995 1995-12-28
JP35437995 1995-12-28

Publications (1)

Publication Number Publication Date
TW339407B true TW339407B (en) 1998-09-01

Family

ID=60629289

Family Applications (1)

Application Number Title Priority Date Filing Date
TW085116013A TW339407B (en) 1995-12-28 1996-12-24 Detecting method and detector for defects in objects the invention relates to a detection method of defects in objects

Country Status (2)

Country Link
KR (1) KR100487261B1 (en)
TW (1) TW339407B (en)

Also Published As

Publication number Publication date
KR970048632A (en) 1997-07-29
KR100487261B1 (en) 2005-09-02

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees