TW326970U - Device for transferring plate-like objects - Google Patents
Device for transferring plate-like objectsInfo
- Publication number
- TW326970U TW326970U TW086210352U TW86210352U TW326970U TW 326970 U TW326970 U TW 326970U TW 086210352 U TW086210352 U TW 086210352U TW 86210352 U TW86210352 U TW 86210352U TW 326970 U TW326970 U TW 326970U
- Authority
- TW
- Taiwan
- Prior art keywords
- objects
- transferring plate
- transferring
- plate
- Prior art date
Links
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP27130793A JPH07106402A (ja) | 1993-10-04 | 1993-10-04 | 板状体搬送装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
TW326970U true TW326970U (en) | 1998-02-11 |
Family
ID=17498229
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW086210352U TW326970U (en) | 1993-10-04 | 1994-10-26 | Device for transferring plate-like objects |
Country Status (2)
Country | Link |
---|---|
JP (1) | JPH07106402A (ja) |
TW (1) | TW326970U (ja) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6481956B1 (en) * | 1995-10-27 | 2002-11-19 | Brooks Automation Inc. | Method of transferring substrates with two different substrate holding end effectors |
JPH10284577A (ja) * | 1997-04-09 | 1998-10-23 | Tokyo Electron Ltd | 被処理基板の移載方法 |
JPH1111663A (ja) * | 1997-06-27 | 1999-01-19 | Tokyo Electron Ltd | 基板搬送装置 |
US6450755B1 (en) * | 1998-07-10 | 2002-09-17 | Equipe Technologies | Dual arm substrate handling robot with a batch loader |
JP2007005582A (ja) | 2005-06-24 | 2007-01-11 | Asm Japan Kk | 基板搬送装置及びそれを搭載した半導体基板製造装置 |
KR100774981B1 (ko) * | 2006-07-24 | 2007-11-08 | 세메스 주식회사 | 기판을 이송하는 장치 및 방법 |
JP5100179B2 (ja) | 2007-03-30 | 2012-12-19 | 大日本スクリーン製造株式会社 | 基板処理装置 |
JP2010067871A (ja) * | 2008-09-12 | 2010-03-25 | Dainippon Screen Mfg Co Ltd | 基板搬送装置およびそれを備えた基板処理装置 |
KR101181560B1 (ko) | 2008-09-12 | 2012-09-10 | 다이닛뽕스크린 세이조오 가부시키가이샤 | 기판처리장치 및 그것에 사용되는 기판반송장치 |
JP5303301B2 (ja) * | 2009-02-06 | 2013-10-02 | 日本電産サンキョー株式会社 | 産業用ロボット |
JP4973675B2 (ja) * | 2009-02-26 | 2012-07-11 | 東京エレクトロン株式会社 | 基板処理装置及び基板処理方法 |
JP6122256B2 (ja) * | 2011-08-12 | 2017-04-26 | 芝浦メカトロニクス株式会社 | 処理システムおよび処理方法 |
JP2021197374A (ja) * | 2020-06-09 | 2021-12-27 | 川崎重工業株式会社 | 基板保持装置 |
-
1993
- 1993-10-04 JP JP27130793A patent/JPH07106402A/ja active Pending
-
1994
- 1994-10-26 TW TW086210352U patent/TW326970U/zh unknown
Also Published As
Publication number | Publication date |
---|---|
JPH07106402A (ja) | 1995-04-21 |
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