TW326970U - Device for transferring plate-like objects - Google Patents

Device for transferring plate-like objects

Info

Publication number
TW326970U
TW326970U TW086210352U TW86210352U TW326970U TW 326970 U TW326970 U TW 326970U TW 086210352 U TW086210352 U TW 086210352U TW 86210352 U TW86210352 U TW 86210352U TW 326970 U TW326970 U TW 326970U
Authority
TW
Taiwan
Prior art keywords
objects
transferring plate
transferring
plate
Prior art date
Application number
TW086210352U
Other languages
English (en)
Chinese (zh)
Inventor
Katsumi Ishii
Hisashi Kikuchi
Original Assignee
Tokyo Electron Ltd
Tokyo Electron Tohoku Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd, Tokyo Electron Tohoku Kk filed Critical Tokyo Electron Ltd
Publication of TW326970U publication Critical patent/TW326970U/zh

Links

TW086210352U 1993-10-04 1994-10-26 Device for transferring plate-like objects TW326970U (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27130793A JPH07106402A (ja) 1993-10-04 1993-10-04 板状体搬送装置

Publications (1)

Publication Number Publication Date
TW326970U true TW326970U (en) 1998-02-11

Family

ID=17498229

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086210352U TW326970U (en) 1993-10-04 1994-10-26 Device for transferring plate-like objects

Country Status (2)

Country Link
JP (1) JPH07106402A (ja)
TW (1) TW326970U (ja)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6481956B1 (en) * 1995-10-27 2002-11-19 Brooks Automation Inc. Method of transferring substrates with two different substrate holding end effectors
JPH10284577A (ja) * 1997-04-09 1998-10-23 Tokyo Electron Ltd 被処理基板の移載方法
JPH1111663A (ja) * 1997-06-27 1999-01-19 Tokyo Electron Ltd 基板搬送装置
US6450755B1 (en) * 1998-07-10 2002-09-17 Equipe Technologies Dual arm substrate handling robot with a batch loader
JP2007005582A (ja) 2005-06-24 2007-01-11 Asm Japan Kk 基板搬送装置及びそれを搭載した半導体基板製造装置
KR100774981B1 (ko) * 2006-07-24 2007-11-08 세메스 주식회사 기판을 이송하는 장치 및 방법
JP5100179B2 (ja) 2007-03-30 2012-12-19 大日本スクリーン製造株式会社 基板処理装置
JP2010067871A (ja) * 2008-09-12 2010-03-25 Dainippon Screen Mfg Co Ltd 基板搬送装置およびそれを備えた基板処理装置
KR101181560B1 (ko) 2008-09-12 2012-09-10 다이닛뽕스크린 세이조오 가부시키가이샤 기판처리장치 및 그것에 사용되는 기판반송장치
JP5303301B2 (ja) * 2009-02-06 2013-10-02 日本電産サンキョー株式会社 産業用ロボット
JP4973675B2 (ja) * 2009-02-26 2012-07-11 東京エレクトロン株式会社 基板処理装置及び基板処理方法
JP6122256B2 (ja) * 2011-08-12 2017-04-26 芝浦メカトロニクス株式会社 処理システムおよび処理方法
JP2021197374A (ja) * 2020-06-09 2021-12-27 川崎重工業株式会社 基板保持装置

Also Published As

Publication number Publication date
JPH07106402A (ja) 1995-04-21

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