經濟部中央標準局員工消費合作社印裝 311108 A7 _ B7_ 五、發明説明（1 ) 【發明之詳細說明】 ： 【發明所屬之技術領域】 本發明是關於使用包含磨料之漿液以切斷矽晶 錠等工件，藉此形成薄形片狀之切割用線狀鋸之漿液 管理系統及該漿液管理方法。詳細而言，是有關可適 • 〆 當管理供應線狀鋸之漿液中磨料含量之切割用線k 鋸之漿液管理系統及該漿液管理方法。 【習知技術】 以往，例如陶瓷、1C晶片基板、太陽電池之矽、 合成石英等材料的製造，係使用內側鋸加工裝置完 成。該裝置是利用刀具切割材料而逐片製成晶片。因 此爲獲得多片之晶片時極花費時間而造成生產效率 的不良。並且，使用刀具切割材料會造成多餘的切割 部份而形成晶片生產效率降低等問題。 因此，業界最近積極進行所謂切割用線狀鋸裝置 之開發。該線狀鋸是例如圖19所示，包含3個輥 12a、12b、12c ;在該等輥之間具有以預定節距呈 螺旋狀捲繞之金屬線10 ;及，在該金屬線10間可供 應漿液之供應管13。設置位於上側2個輥12a、12b 間之金屬線10是構成互相鄰接而平行配置之金屬線 群11。漿液爲可將磨料分散於水系或油系之液體 〔以下稱分散液〕中》此外，該糠狀鋸包含承接槽 I4設置於金屬線10包圍之三角形加工領域內，及設 於該承接槽14下游側之漿液槽15。漿液槽15包含 攪拌機19可攪拌漿液。具有閥VI及栗P1的管16連 本紙張尺度適用中國國家標準（CNS ) A4規格（2丨0 X 297公釐） --------------------打-------1 - (請先閲讀背面之注意事項再填寫本頁) 3ill〇8 A7 -------- -B7___ 五、發明説明d) 接供應管13及漿液槽15、漿液槽15具有可供應新 發液之漿液供應口 15a。具有閥V2之排出管17係連 接於漿液槽15。 藉上述線狀鋸切割圓柱形工件18時，首先，關 閉閥V2的同時，開啓閥VI。其次，使漿液槽15內 的發液藉著泵P1經由管16及供應管13供應至金屬/ 線群11 »同時，將輥12a、12b、12c朝著例如圖19 順時鐘方向轉動，使金屬線群11朝右側移動。在此 狀態下，配置在金屬線群11上方的工件18會通過金 屬線群11而下降至金屬線群11下方。其結果，工件 爲金屬線群11所切割而可同時獲得多數之晶片。 金屬線群Π之切割能力爲供應金屬線群11之漿 液中的磨料與分散液的混合重量比所左右。因此，爲 有效進行工件18的切割，漿液中磨料與分散液的混 合比重必須維持在金屬線群11的最大切割能力値。 經濟部中央標準局員工消費合作社印裝 ^ϋ· ^^^1 -1 n^— n i. nn f*^— tma m nn、一 ^ (請先閲讀背面之注意事項再填寫本頁) 又，上述之切割處理時，從供應管13供應至金 屬線群11的漿液是經承接槽14而儲放於漿液槽15 內。並且，在每完成預定次之切割處理時，從漿液槽 I5將使用過一定量的漿液排出，隨後將與排出漿液 量同量的新漿液經由供應口 15a供應至漿液槽15 內。如上述，即可進行漿液的再生處理。 更換漿液一部份的理由如下。.隨著工件18的切 割所產生的粉屑會混入漿液中。而漿液中粉屑的混入 量會隨著切割的進行而增加。同時，隨著切割使漿液 中的磨料破碎，其結果會減少可供切割之磨料量。該 本紙張尺度適用中國國家標準（CNS} A4规格（210X297公釐） 經濟部中央標準局員工消費合作社印製 ^11108 a? ___B7__ 五、發明説明（3 ) 粉屑的混入或磨料的減少會降低工件18的切割效 果。因此爲防止其發生而必須定期更換漿液的一部 份。但是，只定期更換漿液的一部份仍會因時間增長 而使漿液中粉屑或破碎磨料的量增加》因此，例如， 在進行數十次切割處理後，須將漿液全部重新更換成 新的漿液。 ’ 【發明所欲解決之問題】 但是如上述，在漿液全部更換成新漿液的一段期 間，漿液中粉屑或破碎磨料的量仍會增加，因此不能 經常維持漿液中的磨料與分散液之最適當混合重量 比値。其結果，金屬線群11的切割能力會隨之降低 而降低切割效率。 進行漿液之更換時，從漿液槽15排出的漿液會 作爲廢漿液而廢棄。在此廢漿液中含有切割時可使用 之磨料或分散液。因此，在廢棄可使用之磨料或分散 液，並補充新的磨料與分散液時，會增加切割時所須 的磨料與分散液的消耗量，以致增加切割處理時所須 的成本。同時，因爲將分散液作爲工業廢棄物處理， 會增大分散液廢棄物處理的負擔* 進行漿液之更換處理後，在漿液槽15中投入新 的磨料與分散液，將此混合進行漿液的調合。因此在 漿液的更換處理上極爲費時。並且.，在更換處理時， 由於切割所須漿液量的不足而必須停止工件18的切 割處理。尤其是在更換全部漿液時，其更換的時間極 長，因此切割處理的停止時間會隨著加長。而導致不 本紙伕尺度適用中國國家標準（CNS ) A4規格（210X297公釐） (請先閱讀背面之注$項再填寫本頁) 士夸 訂 經濟部中央標準局貝工消費合作社印製 3ί1108 Α7 ______Β7_ 五、發明説明（+ ) 良之作業效率。 本發明之目的爲提供一種切割用線狀鋸之漿液 管理系統及該漿液管理方法，可將磨料與分散液的混 合重量比調合設定在適於切割工件値。 本發明之其.他目的爲提供切割用線狀鋸之漿液 管理系統，其可再使用磨料及分散液。 / 本發明之另一目的爲提供切割用線狀鋸之漿液 管理系統，可將漿液連續供應切割用線狀鋸，而可提 高切削作業效率。 【解決問題之方法】 爲達成上述之目的，本發明切割用線狀鋸之漿液 管理系統，係可管理供應至線狀鋸之漿液者。漿液是· 將磨料分散於油系或水系之分散液中所形成。漿液供 應至互相平行設置之金屬線群，利用金屬線群切割工 件同時形成多數之晶片。調合裝置可調合供應線狀鋸 之駿液。磨料供應裝置可供應磨料至調合裝置。分散 液供應裝置係可供應分散液至調合裝置。第1調節裝 置係可調節磨料供應裝置所供應磨料之供應量。而第 2調節裝置則可調節分散液供應裝置所供應分散液 之供應量者。 【圖式之簡單說明】 圖1爲表示本發明漿液管理系統之第1具體實 施形態之構成圖》 圖2是表示切割用線狀鋸構成之透視圖。 圖3表示切割用線狀鋸及其相關構成之構成 本紙伕尺度適用中國國家標準（CNS )八4規格（210Χ297公楚） ----- I —T-111 表—11111 訂 (請先閲讀背面之注意事項再填寫本頁) 311108 經濟部中央標準局貞工消費合作社印製 A7 B7 五、發明説明（5 ) 圖。 " 圖4是表示傾注器構成之剖視圖。 圖5是表示漿液中磨料與基油之混合重量比與 切割負載之關係圖表。 圖6爲表示本發明第2實施形態之漿液管理系 統之構成圖。 ’ ®7爲表示本發明第3實施形態之漿液管理系 統之構成圖。 ®8爲表示本發明第4實施形態之漿液管理系 統之構成圖。 圖9是表示分離裝置構成之部份透視圖。 @ 10 t a〕〜〔c〕表示分離裝置之作用說明 圖。 圖11是表示分離裝置之作用說明圖。 圖12爲表示本發明第5實施形態之分離裝置之 構成圖。 圖I3爲表示本發明第6實施形態之分離裝置之 構成圖。 圖14爲表示本發明第7實施形態之分離裝置之 構成圖。 圖15爲表示本發明第8實施形態之分離裝置之 構成圖。 圖16爲表示本發明第9實施形態之漿液管理系 統之構成圖。 圖17是表示切割用線狀鋸之遮蔽件及支持單元 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公楚） I----------装-- (請先聞讀背面之注意事項再填寫本頁) 訂 經濟部中央標準局員工消費合作社印製 A7 ____ B7__ 五、發明説明（fc) 等構成之透視圖》 “ 圖18表示切割用線狀鋸及其相關構成之構成 圖》 圖19是表示習知切割用線狀鋸及其相關構成之 構成圖。 【發明之實施形態】 【第1實施形態】 以下，根據圖1〜圖5說明本發明具體化之切割 用線狀鋸之漿液管理系統及該漿液管理方法。 如圖1所示，調合槽2係構成調合漿液用之調合 裝置。調合槽2內部配設有攪拌機20。供應磨料至 調合槽2內之漏斗21，係經由螺旋式進給機21a及 配管T21連接調合槽2。供應分散液〔例如油系液 體，以下稱基油〕之分散液槽22係經由配管T22連 接於調合槽2上。調節基油供應量的控制閥V22及泵 P22是配設在配管T22的中途。 測定漿液比重之比重計S 1係配設於調合槽2 內。測定漿液黏度之黏度計S2是配設在調合槽2 內。比重計S1及黏度計S2構成可檢測漿液中磨料含 量之裝置。控制器C1係根據比重計S1及黏度計S2 之檢測値輸出開放量的指令信號至控制閥V21 、 V22 » 儲放調合後漿液之儲放槽3，係經由具有閥V2 之配管T2而連接在調合槽2上》儲放槽3內部配設 有攪拌機30。複數台〔本實施形態爲4台〕切割用 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） ^ϋ. Ill ^^1 *f^i I - n - m In I— (請先閲讀背面之注意事項再填寫本頁) 3111〇8 A7 —_____B7_ 五、發明説明（) 線狀鋸W1〜W4分別具肴漿液槽45。各線狀鋸W1 〜W4之漿液槽45是分別藉配管T3、T31〜T34而 連接儲放槽3。在配管T3的途中配置有閥V3及泵 P3。各配管T31〜T34的中途分別配設有供應閥V3 1 〜V34 〇 各線狀鋸W1〜W4之漿液槽45分別經由配管 T41〜T44連接有廢漿液儲放槽5。廢漿液儲放槽5 內部配設有攪拌機50。在各配管T41〜T44中途分 別配置排出閥V41〜V44。 各線狀鋸W1〜W4形成相同之構造。因此，以 第1線狀鋸W1爲代表參照圖2、圖3說明如下》第 1線狀鋸W1包含形成三角形區域之3個輥42a、 42b、42c，及在該等輥之間以預定節距螺旋形纏繞 1根金屬線40。跨設位在上側2個輥42a、42b間之 金屬線40構成相鄰互相間平行配置之金屬線群41。 隨著輥42a、42b、42c朝著例如圖3之順時鐘方向 的轉動，使金屬線群41朝右方方向移動。將工件46 配置在金屬線群41上方，使其下降通過金屬線群 41。 經濟部中央標準局員工消費合作社印繁 ^^—•n ^^1 1 I - - -- 171 - -1- J I - n HI i (請先閲讀背面之注f項再填寫本頁) 供應管43是被配設在工件46通過區域更朝著金 屬線41進行方向之上游側。供應管43沿著與金屬線 群41之各金屬線延伸方向之正交方向延伸。供應管 43下方沿著供應管43縱向方向延伸形成漿液供應孔 〔未圖示〕。輥42a〜42c形成之三角形區域內部， 配置可承接從金屬線群41流下的漿液之承接槽44。 本紙伕尺度適用中國國家標皁（CNS ) A4規格（210X297公釐） 經濟部中央標準局員工消費合作社印製 A7 __B7_ 五、發明説明（g ) 在該承接槽44上經由配‘管T40連接前述之漿液槽 45。並在該漿液槽45內部配設攪拌機45a。 漿液槽45連接有配管T31、供應管T4及配管 T41。配管T3 1可將調合槽2調合的漿液供應至漿液 槽45。供應管T4是將漿液槽45內的漿液供應至供 應管43。而配管T41係將漿液槽45內的漿液排出至 廢漿液儲放槽5內。供應管T4中途配設有閥V4及泵 P4。控制各管T31 ' T4、T41上的閥V31、V4、 V41，控制器C2可分別選擇地開放或封鎖。 如圖1所示，經由包含閥V5及泵P5的配管T5 廢漿液儲放槽5連接有傾注器6。本實施例形態中， …傾注器6構成第1分離回收裝置。具體而言，傾注器 6是利用離心力將從線狀鋸排出廢漿液中較磨料微 細之微粒成份與基油分離除去，而回收再利用磨料之 裝置。該傾注器6構成例如圖4所示。同圖中表示， 螺旋式運送機62係沿著傾注器本體61內部縱向方向 延伸配設。運送機62外週圍面形成螺旋狀螺旋62a。 內筒63配設於包圍運送機62之傾注器本體61的內 部。螺旋式運送機62是利用電動機64直接轉動。內 筒63是利用電動機64經皮帶64而以不同於螺旋式 運送機62之轉速而轉動。 傾注器本體61具有磨料排出口 61a及排 61b。磨料排出口 61a可將離心力分離之固態 磨料從傾注器本體61排出。排油口 61b爲 後較磨料微小之微粒成份及基油從傾注f 本紙張尺度適用中國國家標準（CNS ) A4規格（210 X 297公釐、 - - -· —.1 I m ;-J«- -! i- I I. I I— 1^1 1^1 nn n (請先聞讀背面之注意事項再填寫本頁) 經濟部中央標準局負工消費合作社印製 311108 A7 B7 五、發明説明（cp 出者。螺旋式運送機62'內部形成漿液之供應路徑 62b。供應路徑62b具有連接配管T5的入口，及在內 筒63內部開口之出口。圖1所示，磨料排出口 61a 係經由第1配管T6連接調合槽2。第1配管T6構成 將回收之磨料運送至調合槽2之運送裝置。排油口 611)是經由具有泵？61之配管161連接過濾器7。在 本實施形態中，過濾器7構成第2分離回收裝置。 過濾器7是以例如不織布所構成。經由配管T61 而從傾注器6送來含有較磨料微小之微粒成份的基 油中，過濾器7除去微粒成份後回收基油。過濾器7 是經第2配管T7連接於第1配管T6之中途。第2配 管T7係構成可將過濾器7所回收之基油運送至調合 槽2的運送裝置。 其次，說明如前述之漿液管理系統的軌作如下。 該漿液管理系統首先是隨著閥V21的開啓，而從 漏斗21經螺旋式進給機21a將預定量之磨料供應至 調合槽2內。同時，隨著閥V22的開啓而利用泵P22 從分散液槽22將預定量之基油供應至調合槽2內。 並且，在調合槽2中藉攪拌機20混合磨料與基油， 藉此調合漿液。將調合後的漿液隨著閥V2的開啓而 暫時儲放於儲放槽3內。之後隨著閥V3及供應閥V3 1 〜V34的開啓，利用泵P3將儲放槽3內的漿液供應 至各線狀鋸W1〜W4之漿液槽45內。 此外’漏斗21供應之新的磨粒是使用具有5〜 30 /z m平均粒徑之碳化矽、碳化硼、鑽石、氮化硼 本纸張尺度適用中國國家標準（CNS )八4現格（210X297公釐） (請先閲讀背面之注意事項再填寫本頁) • —1 I I I 装· 訂 經濟部中央標準局負工消費合作社印繁 A7 ___B7 ,_ 五、發明説明（丨Ό) 等顆粒材。具有該等粒徑乏磨料極適合利用線狀鋸進 行晶片的製作。又，調合槽2中調合後漿液中之磨料 與基油的混合重量比係設定於1: 0.91至1 : 0.6之 範圍內。例如從漏斗21供應lOOKg磨料，同時從分 散液槽22供應89Kg之基油，可藉此使磨料與基油的 混合重量比調合爲1 : 0.89的漿液。此外，漿液的 黏度被設定在當基油爲高黏度種類的場合時爲150 〜220cP〔厘泊〕之範圍內，當基油爲低黏度種類時 則設定在40〜60 cP的範圍內。 各線狀鋸W1〜W4可進行工件46的切割。根據 圖3舉第1線狀鋸W1爲例說明該切割動作。首先， 藉控制器C2開啓閥V4,同時關閉供應閥V31及排出 閥V41。其次，利用泵Ρ4經供應管43將漿液槽45 內的漿液供應至金屬線群41 »在此狀態下，使工件 46下降而自金屬線群41上方通過金屬線群41。其結 果，在附著磨料的狀態下移動之金屬線群41切割工 件46,而可同時形成多數之晶片。 在此切割時，從供應管43供應至金屬線群41的 漿液，從金屬線群41落下後經由承接槽44儲放於漿 液槽45，並經由供應管Τ4供應至供應管43。使用 於工件46切割之漿液中包含例如：具有10〜30 /z m 或大致相同平均粒徑之磨料，及隨切割而破碎之5〜 15 m或大致相同平均粒徑之破碎磨料，及具有次 /z m〜數# m左右粒徑之工件46的粉屑，及金屬線 40所產生之金屬粉屑等。 本紙伕尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 丨.1 ί 11 ，装| I I I I I 訂 (請先閲讀背面之注f項再填寫本頁) 經濟部中央標準局員工消費合作社印製 A7 ____._B7__ 五、發明説明（u) 重覆進行工件46之切割時，漿液中的粉屑或金 屬粉屑的量會隨著增加，而降低切割效果》因此，在 預定次數，例如進行第2次切割處理時，藉控制器c2 將排出閥V41開啓預定之時間後，將漿液槽45內使 用後的漿液經配管T41部份排出。.同時藉控制器C2 r 將供應閥V3 1開啓預定時間後，將圖1所示調合槽2 調合之新的漿液經儲放槽3及配管T31供應預定量 至漿液槽45內。其結果，工件46切割同時，而對於 漿液槽45進行漿液之部份更換，使漿液槽45內的漿 液更新。並且，在開始另一次工件46之切割前，藉 控制器C2關閉供應閥V31及排出閥V41 » 另一方面，將各線狀鋸W1.〜W4之漿液槽45所 排出之廢漿液，一旦儲放於圖1所示廢漿液儲放槽5 之後，隨閥V5的開啓而傳送至傾注器6。在傾注器 6中，經由圖4表示之供應路徑將廢漿液供應至傾注 器61內部。並且，利用電動機64使螺旋式運送機62 與內筒63以互相不同轉速轉動，而賦予漿液離心 力。藉此使漿液中磨料朝著傾注器本體61內壁側移 動，而包含較磨料微細之微粒成份的切屑、破碎磨料 及金屬粉末所成之基油在磨料內側成層。如上述，可 使漿液中的磨料與包含微粒成份之基油分離》 利用傾注器6將漿液分離之磨料送至圖1所示 第1配管T6。另一方面，包含微粒成份之基油是利 用圖1表示之泵P61經配管T61傳送至過濾器7。過 濾器7從包含微粒成份之基油中分離除去切屑、破碎 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） ΙΓ —^1 ^^1 1^1 ml ....... i HI n I ^^1 (請先閲讀背面之注意事項再填寫本頁) 經濟部中央標準局貝工消費合作社印聚 A7 B7 五、發明説明（11) 磨料、金屬粉末等微粒成而回收基油。利用過濾器 7回收之基油是經由第2配管T7傳送至第1配管 T6，而與第1配管T6中的磨料匯流。並且，磨料及 基油係通過第1配管T6而運送至調合槽2。 傾注器6之中，以150〜500G (例如300G〕的 r 離心加速度經過約80秒的停留時間，進行磨料的分 離。150〜500G之離心加速度適於分離具有5 ~3 0 # m粒徑之磨粒。藉傾注器6從廢漿液中回收磨粒 之回收率設定在85〜95重量％的範圍內。過濾器7 所分離之切屑等微粒成份之回收率係設定於30〜50 重量％的範圍內，基油的回收率則設定在90重量％。 調合槽2可藉比重計S1及黏度計S2分別檢測漿 液的比重及黏度，將該等檢測値輸出於控制器C1。 在控制器C1中預先輸入漿液的比重及黏度之目標 •値。因此，控制器C1可根據與該目標値及前述檢測 値的比較而控制閥V21、V22的開啓量，藉以調節 漏斗21之磨料供應量及分散液槽22基油的供應量。 在控制器C1中預先設定表示比重計S1及黏度計 S2的檢測値〔換言之，漿液的比重及黏度〕與漿液 中磨料含量間的相關資料。漿液中磨料含量愈高時比 重或黏度愈高，當磨料含量愈低時則比重或黏度愈低 的特性。在重覆進行工件46的切割時，會隨著破碎 磨料量的增加而使得從傾注器6朝調合槽2運送之 正常磨料的量相對減少。此一減少會影響調合槽2內 漿液的比重或黏度的降低。因此，如上述的場合，必 本紙張尺度適用中國國家標準（CNS ) A4規格（2丨0X297公釐） —^—-—-----装.— (請先閲讀背面之注意事項再填寫本頁) •tT' 經濟部中央標準局員工消費合作社印製311108 A7 _ B7_ Printed by the Employees ’Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economy V. Description of the invention (1) [Detailed description of the invention]: [Technical field to which the invention belongs] The present invention relates to the use of slurry containing abrasives to cut silicon ingots Wait for the workpiece, thereby forming a thin sheet-shaped cutting line saw for slurry management system and the slurry management method. In detail, it is related to the applicable • 〆 When managing the supply of the abrasives in the slurry of the linear saw, the slurry management system and the slurry management method of the wire k saw for cutting. [Conventional Technology] In the past, the manufacture of materials such as ceramics, 1C wafer substrates, silicon for solar cells, synthetic quartz, etc., was completed using an internal sawing device. The device uses a knife to cut the material to make a wafer piece by piece. Therefore, it takes a lot of time to obtain a plurality of wafers, which causes a defect in production efficiency. In addition, the use of a knife to cut the material will cause extra cuts, resulting in problems such as reduced wafer production efficiency. Therefore, the industry has recently been actively developing so-called linear saw devices for cutting. The wire saw is, for example, as shown in FIG. 19, and includes three rollers 12a, 12b, and 12c; between the rollers, there is a metal wire 10 spirally wound at a predetermined pitch; and, between the metal wires 10 Supply pipe 13 that can supply slurry. The metal wires 10 provided between the two upper rollers 12a and 12b constitute a group of metal wires 11 adjacent to each other and arranged in parallel. The slurry is a liquid that can disperse the abrasive in an aqueous or oil system (hereinafter referred to as a dispersion liquid). In addition, the bran saw includes a receiving groove I4 disposed in a triangular processing field surrounded by a metal wire 10, and a receiving groove 14 Downstream side of slurry tank 15. The slurry tank 15 contains a stirrer 19 to stir the slurry. Pipes with valve VI and chestnut P1, 16 pieces of this paper are suitable for China National Standard (CNS) A4 specifications (2 丨 0 X 297 mm) ------------------- -Play ------- 1-(Please read the precautions on the back before filling in this page) 3ill〇8 A7 -------- -B7 ___ 5. Description of the invention d) Connect the supply pipe 13 and the slurry The tank 15 and the slurry tank 15 have a slurry supply port 15a that can supply fresh hair. A discharge pipe 17 having a valve V2 is connected to the slurry tank 15. When the cylindrical workpiece 18 is cut by the linear saw, first, the valve V2 is closed and the valve VI is opened. Next, the liquid in the slurry tank 15 is supplied to the metal / wire group 11 via the pipe 16 and the supply pipe 13 by the pump P1. At the same time, the rollers 12a, 12b, and 12c are rotated clockwise as shown in FIG. 19, for example. The line group 11 moves to the right. In this state, the workpiece 18 disposed above the metal wire group 11 passes through the metal wire group 11 and falls below the metal wire group 11. As a result, the workpiece is cut by the metal wire group 11 and many wafers can be obtained at the same time. The cutting capacity of the metal wire group Π is determined by the mixing weight ratio of the abrasive and the dispersion liquid in the slurry supplied to the metal wire group 11. Therefore, in order to efficiently cut the workpiece 18, the mixed specific gravity of the abrasive and the dispersion liquid in the slurry must be maintained at the maximum cutting capacity of the wire group 11. Printed by the Employee Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs ^ ϋ · ^^^ 1 -1 n ^ — n i. Nn f * ^ — tma m nn, one ^ (please read the precautions on the back before filling this page) During the cutting process described above, the slurry supplied from the supply pipe 13 to the metal wire group 11 is stored in the slurry tank 15 through the receiving tank 14. In addition, each time a predetermined number of cutting processes are completed, a certain amount of used slurry is discharged from the slurry tank I5, and then a new amount of slurry equal to the amount of discharged slurry is supplied into the slurry tank 15 through the supply port 15a. As described above, the slurry regeneration process can be performed. The reasons for replacing part of the slurry are as follows. The dust generated by the cutting of the workpiece 18 will be mixed into the slurry. The amount of dust in the slurry will increase as the cutting progresses. At the same time, as cutting breaks the abrasive in the slurry, the result is a reduction in the amount of abrasive available for cutting. This paper scale is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) Printed by the Employee Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs ^ 11108 a? ___B7__ 5. Description of the invention (3) The mixing of dust or the reduction of abrasives will reduce The cutting effect of the workpiece 18. Therefore, in order to prevent it from happening, a part of the slurry must be replaced regularly. However, only a part of the slurry will be replaced regularly will still increase the amount of dust or broken abrasive in the slurry due to time. For example, after dozens of cutting processes, all the slurry must be replaced with a new slurry. '[Problems to be solved by the invention] But as mentioned above, during the period when the slurry is completely replaced with a new slurry, the powder in the slurry The amount of chips or broken abrasive will still increase, so it is not always possible to maintain the optimum mixing weight ratio of the abrasive and dispersion in the slurry. As a result, the cutting ability of the metal wire group 11 will be reduced and the cutting efficiency will be reduced. At the time of replacement, the slurry discharged from the slurry tank 15 will be discarded as waste slurry. This waste slurry contains abrasives that can be used for cutting Dispersion. Therefore, when discarding the usable abrasive or dispersion and adding new abrasive and dispersion, it will increase the consumption of abrasive and dispersion required for cutting, which will increase the cost of cutting. At the same time, because the dispersion liquid is treated as industrial waste, it will increase the burden of the disposal of the dispersion liquid * After the replacement of the slurry, the new abrasive and the dispersion liquid are put into the slurry tank 15 and the mixture is mixed to adjust the slurry Therefore, the replacement process of the slurry is extremely time-consuming. And, during the replacement process, the cutting process of the workpiece 18 must be stopped due to the insufficient amount of slurry required for cutting. Especially when the entire slurry is replaced, the replacement time is extremely long. Therefore, the cutting process will be stopped longer. As a result, the size of the paper is not applicable to the Chinese National Standard (CNS) A4 specification (210X297mm) (please read the $ item on the back and fill in this page) Printed by the Beigong Consumer Cooperative of the Central Standards Bureau of the Ministry 3ί1108 Α7 ______ Β7_ V. Description of the invention (+) Good operating efficiency. The purpose of the present invention is to provide A slurry management system for a linear saw for cutting and the slurry management method can set the mixing weight ratio of abrasive and dispersion to be suitable for cutting a workpiece. The other purpose of the present invention is to provide a linear saw for cutting A slurry management system that can reuse abrasives and dispersions. / Another object of the present invention is to provide a slurry management system for a linear saw for cutting, which can continuously supply the slurry to the linear saw for cutting, which can improve the efficiency of cutting operations [Method for solving the problem] To achieve the above purpose, the slurry management system of the linear saw for cutting of the present invention can manage the slurry supplied to the linear saw. The slurry is the dispersion of the abrasive dispersed in the oil or water system Formed in the liquid. The slurry is supplied to the metal wire groups arranged parallel to each other, and the metal wire group is used to cut the workpiece to form a plurality of wafers at the same time. The mixing device can be adjusted to supply the liquid of the linear saw. The abrasive supply device can supply abrasive to the blending device. The dispersion liquid supply device can supply the dispersion liquid to the mixing device. The first adjusting device can adjust the amount of abrasive supplied by the abrasive supply device. The second adjusting device can adjust the supply amount of the dispersion liquid supplied by the dispersion liquid supply device. [Brief description of drawings] FIG. 1 is a configuration diagram showing a first specific implementation form of the slurry management system of the present invention. FIG. 2 is a perspective view showing the configuration of a linear saw for cutting. Figure 3 shows the composition of the linear saw for cutting and its related components. The paper size is applicable to the Chinese National Standard (CNS) 84 specifications (210Χ297 Gongchu) ----- I —T-111 Table — 11111 (please read first (Notes on the back and then fill out this page) 311108 Printed A7 B7 by the Zhengong Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs V. Invention description (5) Figure. " FIG. 4 is a cross-sectional view showing the configuration of the pouring device. Fig. 5 is a graph showing the relationship between the mixing weight ratio of abrasive and base oil in the slurry and the cutting load. Fig. 6 is a configuration diagram showing a slurry management system according to a second embodiment of the present invention. '®7 is a configuration diagram showing a slurry management system according to a third embodiment of the present invention. ®8 is a configuration diagram showing a slurry management system according to a fourth embodiment of the present invention. 9 is a partial perspective view showing the structure of the separation device. @ 10 t a] ~ 〔c〕 Description of the function of the separation device. 11 is an explanatory diagram showing the operation of the separation device. Fig. 12 is a configuration diagram showing a separation device according to a fifth embodiment of the present invention. Fig. I3 is a configuration diagram showing a separation device according to a sixth embodiment of the present invention. Fig. 14 is a configuration diagram showing a separation device according to a seventh embodiment of the present invention. Fig. 15 is a configuration diagram showing a separation device according to an eighth embodiment of the present invention. Fig. 16 is a configuration diagram showing a slurry management system according to a ninth embodiment of the present invention. Figure 17 shows the shield and support unit of the linear saw for cutting. The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X297 Gongchu) I ---------- installed-- (please listen first Read the precautions on the back and then fill out this page) Printed A7 ____ B7__ by the Employees ’Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 5. Perspective of the composition of the invention (fc) etc." "Figure 18 shows the linear saw for cutting and its related components Fig. 19 is a diagram showing a conventional linear saw for cutting and its related structure. [Embodiment of the invention] [First embodiment] Hereinafter, the cutting according to the present invention will be described based on FIGS. 1 to 5. A slurry management system using a linear saw and the slurry management method. As shown in FIG. 1, the mixing tank 2 constitutes a mixing device for mixing the slurry. The mixing tank 2 is equipped with a mixer 20 inside. The abrasive is supplied to the mixing tank 2. The hopper 21 is connected to the mixing tank 2 via a screw feeder 21a and a pipe T21. The dispersion tank 22 supplying a dispersion liquid (for example, an oil-based liquid, hereinafter referred to as base oil) is connected to the mixing tank 2 via a pipe T22. Base oil supply control V22 and pump P22 are arranged in the middle of the pipeline T22. The hydrometer S 1 for measuring the specific gravity of the slurry is arranged in the mixing tank 2. The viscometer S2 for measuring the viscosity of the slurry is arranged in the mixing tank 2. The hydrometer S1 and The viscometer S2 constitutes a device that can detect the abrasive content in the slurry. The controller C1 outputs a command signal of the opening amount to the control valves V21 and V22 according to the detection values of the specific gravity meter S1 and the viscometer S2 »Storage and storage tank of the mixed slurry 3. It is connected to the mixing tank 2 via the piping T2 with valve V2. The storage tank 3 is equipped with an agitator 30. A plurality of units [4 units in this embodiment] The paper size for cutting is applicable to the Chinese National Standard (CNS ) A4 specification (210X297 mm) ^ ϋ. Ill ^^ 1 * f ^ i I-n-m In I— (please read the precautions on the back before filling this page) 3111〇8 A7 —_____ B7_ V. Description of invention () The linear saws W1 ~ W4 are respectively equipped with a slurry tank 45. The slurry tanks 45 of each linear saw W1 ~ W4 are connected to the storage tank 3 by pipes T3, T31 ~ T34. A valve V3 is arranged on the way of the pipe T3 And pump P3. Supply valves V3 1 to V34 are provided in the middle of each piping T31 to T34. The slurry tanks 45 of the linear saws W1 to W4 are connected to the waste slurry storage tank 5 through pipes T41 to T44. The waste slurry storage tank 5 is equipped with an agitator 50 inside. Each discharge pipe V41 to T44 is equipped with a discharge valve V41 ~ V44. Each linear saw W1 ~ W4 has the same structure. Therefore, the first linear saw W1 will be described as follows with reference to FIGS. 2 and 3. The first linear saw W1 includes three rollers 42a forming a triangular area, 42b, 42c, and a metal wire 40 is spirally wound between the rollers at a predetermined pitch. The metal wires 40 straddling between the upper two rollers 42a, 42b constitute a group of metal wires 41 arranged adjacent to each other in parallel. As the rollers 42a, 42b, and 42c rotate in the clockwise direction of FIG. 3, for example, the wire group 41 moves in the right direction. The workpiece 46 is arranged above the metal wire group 41 so that it descends through the metal wire group 41. Indo-Traditional Consumer Cooperative of Central Bureau of Standards, Ministry of Economic Affairs ^^ — • n ^^ 1 1 I---171--1- JI-n HI i (please read note f on the back and fill in this page) Supply Management 43 is arranged on the upstream side of the workpiece 46 passing region further toward the direction of the wire 41. The supply pipe 43 extends in a direction orthogonal to the extending direction of each metal wire of the metal wire group 41. A slurry supply hole [not shown] extends below the supply pipe 43 in the longitudinal direction of the supply pipe 43. Inside the triangular area formed by the rollers 42a to 42c, a receiving groove 44 that can receive the slurry flowing from the metal wire group 41 is arranged. The paper scale is applicable to China National Standard Soap (CNS) A4 specification (210X297mm). The A7 printed by the Staff Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs A7 __B7_ V. Description of the invention (g) Connect the aforesaid to the receiving groove 44 via the pipe T40之 浆 槽 45。 Slurry tank 45. A stirrer 45a is arranged inside the slurry tank 45. The slurry tank 45 is connected with a pipe T31, a supply pipe T4, and a pipe T41. The piping T3 1 can supply the slurry mixed in the mixing tank 2 to the slurry tank 45. The supply pipe T4 supplies the slurry in the slurry tank 45 to the supply pipe 43. The piping T41 discharges the slurry in the slurry tank 45 to the waste slurry storage tank 5. The supply pipe T4 is equipped with a valve V4 and a pump P4 halfway. Control the valves V31, V4, V41 on each tube T31 'T4, T41, the controller C2 can be selectively opened or blocked. As shown in FIG. 1, the pourer 6 is connected to the waste slurry storage tank 5 through the pipe T5 including the valve V5 and the pump P5. In this embodiment, the pourer 6 constitutes the first separation and recovery device. Specifically, the pourer 6 is a device that separates and removes finer particulate components in the waste slurry discharged from the linear saw from the base oil by centrifugal force, and recovers and reuses the abrasive. The configuration of the pouring device 6 is shown in FIG. 4, for example. As shown in the figure, the screw conveyor 62 is arranged to extend in the longitudinal direction inside the pourer body 61. A spiral 62a is formed on the outer peripheral surface of the conveyor 62. The inner cylinder 63 is disposed inside the pourer body 61 surrounding the conveyor 62. The screw conveyor 62 is directly rotated by a motor 64. The inner cylinder 63 is rotated at a rotational speed different from that of the screw conveyor 62 via the belt 64 by the motor 64. The pourer body 61 has abrasive discharge ports 61a and 61b. The abrasive discharge port 61a can discharge the solid abrasive separated by centrifugal force from the pourer body 61. The oil discharge port 61b is the fine particle component and base oil poured from the back compared with the abrasive. The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm,---·-.1 I m; -J « --! i- I I. II— 1 ^ 1 1 ^ 1 nn n (please read the precautions on the back before filling out this page) Printed by the Ministry of Economic Affairs, Central Standards Bureau, Consumer Cooperatives 311108 A7 B7 V. Description of invention (Cp out. The screw conveyor 62 'forms a slurry supply path 62b inside the supply path 62b. The supply path 62b has an inlet connecting the pipe T5 and an outlet opening inside the inner cylinder 63. As shown in FIG. 1, the abrasive discharge port 61a passes through The first pipe T6 is connected to the mixing tank 2. The first pipe T6 constitutes a conveying device that transports the recovered abrasive to the mixing tank 2. The oil discharge port 611) is connected to the filter 7 via a pipe 161 with a pump 61. In this embodiment Among them, the filter 7 constitutes the second separation and recovery device. The filter 7 is composed of, for example, non-woven fabric. The filter 7 removes the particulate component from the base oil containing finer particulate components than the abrasive sent from the pourer 6 through the pipe T61 After recovering the base oil, the filter 7 is connected to the second pipe T7 1 Piping T6 in the middle. The second piping T7 constitutes a conveying device that can transport the base oil recovered by the filter 7 to the mixing tank 2. Next, the operation of the slurry management system as described above will be described as follows. The slurry management system first With the opening of the valve V21, a predetermined amount of abrasive is supplied from the hopper 21 through the screw feeder 21a to the mixing tank 2. At the same time, with the opening of the valve V22, the pump P22 is used to set the predetermined amount from the dispersion tank 22 The amount of base oil is supplied to the mixing tank 2. In the mixing tank 2, the abrasive and the base oil are mixed by the mixer 20, thereby mixing the slurry. The mixed slurry is temporarily stored in the storage as the valve V2 is opened In the tank 3. After the valve V3 and the supply valves V3 1 ~ V34 are opened, the slurry in the storage tank 3 is supplied to the slurry tank 45 of each linear saw W1 ~ W4 by the pump P3. In addition, the funnel 21 supplies The new abrasive particles are silicon carbide, boron carbide, diamond, boron nitride with an average particle size of 5 ~ 30 / zm. The paper size is applicable to the Chinese National Standard (CNS) 84 4 grid (210X297 mm) (please first Read the notes on the back and fill in this page) • —1 III · Subscribing to the A7 ___B7, _5, the invention description (丨 Ό) and other granular materials of the Ministry of Economic Affairs, Central Bureau of Standards, Negative Work Consumer Cooperatives. The spent abrasives with these particle sizes are very suitable for the production of wafers with linear saws. The mixing weight ratio of the abrasive and base oil in the slurry after mixing in the tank 2 is set in the range of 1: 0.91 to 1: 0.6. For example, 10OKg of abrasive is supplied from the funnel 21, and 89Kg of base oil is supplied from the dispersion tank 22, By this, the mixing weight ratio of the abrasive and the base oil can be adjusted to a slurry of 1: 0.89. In addition, the viscosity of the slurry is set in the range of 150 to 220 cP [centipoise] when the base oil is a high-viscosity type, and in the range of 40 to 60 cP when the base oil is a low-viscosity type. Each linear saw W1 ~ W4 can cut the workpiece 46. The first linear saw W1 will be taken as an example to explain this cutting operation based on Fig. 3. First, the valve V4 is opened by the controller C2, and the supply valve V31 and the discharge valve V41 are closed at the same time. Next, the slurry in the slurry tank 45 is supplied to the wire group 41 via the supply pipe 43 by the pump P4 »In this state, the workpiece 46 is lowered and passes the wire group 41 from above the wire group 41. As a result, the metal wire group 41 moved while the abrasive is attached cuts the workpiece 46, and a plurality of wafers can be formed at the same time. At the time of cutting, the slurry supplied from the supply pipe 43 to the metal wire group 41 falls from the metal wire group 41 and is stored in the slurry tank 45 through the receiving groove 44 and supplied to the supply tube 43 through the supply tube T4. The slurry used for cutting the workpiece 46 includes, for example, abrasives having an average particle diameter of 10 to 30 / zm or approximately the same, and crushed abrasives having an average particle diameter of 5 to 15 m or approximately the same broken with cutting, and having secondary / The dust of the workpiece 46 with a particle size of about zm ~ 数 # m, and the metal dust generated by the metal wire 40, etc. This paper is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) 丨 .1 ί 11, installed | IIIII order (please read note f on the back before filling in this page) Printed by the Employee Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs System A7 ____._ B7__ V. Description of the invention (u) When repeatedly cutting the workpiece 46, the amount of dust or metal dust in the slurry will increase with decreasing the cutting effect. Therefore, at a predetermined number of times, for example, In the second cutting process, after the discharge valve V41 is opened by the controller c2 for a predetermined time, the used slurry in the slurry tank 45 is discharged through the piping T41. At the same time, after the supply valve V3 1 is opened by the controller C2 r for a predetermined time, the new slurry blended in the blending tank 2 shown in FIG. 1 is supplied to the slurry tank 45 through the storage tank 3 and the piping T31 in a predetermined amount. As a result, the workpiece 46 is cut at the same time, and part of the slurry is replaced in the slurry tank 45, so that the slurry in the slurry tank 45 is renewed. And before starting another cutting of the workpiece 46, the supply valve V31 and the discharge valve V41 are closed by the controller C2 »On the other hand, the waste slurry discharged from the slurry tank 45 of each linear saw W1. ~ W4 is stored once After the waste slurry storage tank 5 shown in FIG. 1, it is transferred to the pourer 6 as the valve V5 opens. In the pourer 6, the waste slurry is supplied into the pourer 61 via the supply path shown in FIG. In addition, the screw conveyor 62 and the inner cylinder 63 are rotated at different rotation speeds by the motor 64 to impart centrifugal force to the slurry. By this, the abrasive in the slurry moves toward the inner wall side of the pourer body 61, and the base oil formed by the chips, broken abrasive and metal powder containing finer particulate components than the abrasive is layered inside the abrasive. As described above, the abrasive in the slurry can be separated from the base oil containing particulate components. The abrasive separated by the slurry is sent to the first pipe T6 shown in FIG. On the other hand, the base oil containing particulate components is transferred to the filter 7 through the pipe T61 using the pump P61 shown in FIG. The filter 7 separates and removes chips and crushed from the base oil containing particulate components. The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) ΙΓ — ^ 1 ^^ 1 1 ^ 1 ml ...... . i HI n I ^^ 1 (please read the precautions on the back before filling in this page) Printed A7 B7 by the Beigong Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs V. Description of the invention (11) Abrasives, metal powders and other fine particles are recovered Base oil. The base oil recovered by the filter 7 is transferred to the first pipe T6 through the second pipe T7 and merges with the abrasive in the first pipe T6. In addition, the abrasive and base oil system are transported to the mixing tank 2 through the first pipe T6. In the pourer 6, the centrifugal acceleration of 150 ~ 500G (for example, 300G) passes the residence time of about 80 seconds to separate the abrasive. The centrifugal acceleration of 150 ~ 500G is suitable for separating particles with a particle size of 5 ~ 3 0 # m Abrasive particles. The recovery rate of the abrasive particles recovered from the waste slurry by the pourer 6 is set in the range of 85 ~ 95% by weight. The recovery rate of the particulate components such as the cutting chips separated by the filter 7 is set at 30 ~ 50% by weight Within the range, the recovery rate of the base oil is set at 90% by weight. The mixing tank 2 can detect the specific gravity and viscosity of the slurry by the hydrometer S1 and the viscometer S2, respectively, and output the detection values to the controller C1. The controller C1 Enter the target of the specific gravity and viscosity of the slurry in advance. Therefore, the controller C1 can control the opening amount of the valves V21 and V22 according to the comparison with the target value and the aforementioned detection value, thereby adjusting the abrasive supply and dispersion of the funnel 21 The supply amount of the base oil in the liquid tank 22. The controller C1 sets in advance the correlation between the detection value of the hydrometer S1 and the viscometer S2 (in other words, the specific gravity and viscosity of the slurry) and the abrasive content in the slurry. The higher the specific gravity or viscosity, the lower the abrasive content, the lower the specific gravity or viscosity. When repeatedly cutting the workpiece 46, it will be adjusted from the pourer 6 as the amount of broken abrasive increases. The amount of normal abrasive transported by the tank 2 is relatively reduced. This reduction will affect the reduction of the specific gravity or viscosity of the slurry in the mixing tank 2. Therefore, as in the above-mentioned occasions, the paper size shall comply with the Chinese National Standard (CNS) A4 specification (2丨 0X297mm) — ^ —-—----- installed.— (Please read the precautions on the back before filling out this page) • Printed by tT 'Employee Consumer Cooperative of Central Standards Bureau, Ministry of Economic Affairs
31110Q A7 B7 五、發明説明（l>) 須增大閥V21的開啓量而’增加自漏斗21之磨料的供 應量。 藉過濾器7分離之切屑、破碎磨料、金靥粉末等微粒 成份由過濾器7除去而棄置於外部。由於在該廢棄的 微粒成份上附著有基油，因此運送至調合槽2之基油 量會相對減少。此一減少會形成調合槽2內漿液的比 重或黏度的上升》因此，如上述時，可增大閥V22 的開啓量而增加從分散液槽22之基油的供應量。 如上述以調合槽2調合之漿液中的磨料及基油 之混合重量比，係經常調節在1 : 0.91至1 : 0.6的 範圍內。 針對藉前述實施形態可獲得期待之效果記載如 下〇 〔a〕 從線狀鋸W1〜W4所排出使用過的廢漿 液中，分離出磨料及基油的同時予以回收再使用。因 此，可大幅刪減工件切割時所須之新追加之磨料及基 油的量，可降低切割處理時的成本。 〔b〕 對於線狀鋸W1〜W4之漿液的供應可連 續進行，因此可不須中斷線狀鋸W1〜W4的切割而 可連續進行。因此可提高切割作業的效率》其結果， 因磨料及基油的再使用而降低成本，同時工件46切 割時所須之運轉費用更可降低。 〔c〕 可利用漿液之比重或黏度的檢測確保漿 液中磨料的含量。並且，調節磨料及基油的供應量使 磨料含量呈設定値。如上述，工件46的切割可經常 本纸張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） n 1^1^1 nn «n—ν fm ^^^^1 1 fue n (锖先閲讀背面之注意事項再填寫本頁) 訂 經濟部中央標準局員工消費合作社印裝 A7 ___- _B7 五、發明説明（丨+) 在安定的切割條件下進行‘。 〔d〕 由於基油可再使用，因而可刪減工業廢棄 物量。因此可大幅減少工業廢棄物處理上必要之負 擔。 〔e〕 將調合漿液中磨料與分散液之混合重量 / 比調節在經常爲1 : 0.91至1 : 0.6的範圍內。漿液 之混合重量比設定在此範圍內時，可確保最良好的切 割條件。 圖5是表示漿液中磨料及基油之混合重量比與線 狀鋸之金屬線群切割工件時切割負載之關係圖表。再 者，該圖表是以下述條件進行切割時所獲得者。即， 以呈100mm角之四角形柱狀多晶矽作爲工件。並且 該工件具有O.lSmm直徑且以500m/min之移動速度之 金屬線切割。在切割時，切割負載愈大時愈可有效地 切割工件。因此，根據圖5之圖表，漿液中磨料與基 油之混合重量比係設定於切割負載大之1 : 0.91至 1 : 0.6的範圍內。 上述第1實施形態中，使用過濾器7作爲第1分 離回收裝置，或使用傾注器6作爲第2分離回收裝置 亦可。或者，也可以同時使用傾注器6作爲第1分離 回收裝置及第2分離回收裝置。此外，亦可以過濾器 7作爲第1分離回收裝置及第2分：離回收裝置。 〔第2_實施形態〕 其次，根據圖6說明本發明第2實施形態如下。 在此第2實施形態中，關於與上述第1實施形態相同 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） ^^1- —l·— ^^—^1 ^^—^1 m —^ϋ ^Jn ^ ^ _ - (請先聞讀背面之注意事項再填寫本頁) 經濟部中央標準局員工消費合作社印製 A7 _____B7_ 五、發明説明（15>) 之構件係賦予相同符號而''省略其說明。 該第2實施形態之漿液管理系統中，如圖6所示 係使用旋風式分離器8作爲第1分離回收裝置，第2 分離回收裝置則是使用傾注器6。並且，利用旋風式 分離器8從廢漿液中使較磨料微細之微粒成份及基 油分離後回收基油。 具體而言，旋風式分離器8可使含於廢漿液中的 磨料接受下降旋流的離心力作用，而與旋風式分離器 8的內壁衝突。下降後的磨料隨著在旋風式分離器8 內的下降而被收集，並從旋風式分離器8下部排出至 第1配管T6。如上述，可從廢漿液中回收磨料。含 有微粒成份之基油是利用泵P61經配管Τ'61傳送至傾 注器6，在此可分離爲微粒成份及基油。 以旋風式分離器8分離回收之磨料是經由配管 Τ6運送至調合槽2內。又，傾注器6所分離回收之 基油是經第2配管Τ7,與第1配管Τ6中的磨料匯流 而運送至調合槽2內。其他之構成及作用皆與前述第 1實施形態相同。 再者，藉旋風式分離器8進行第1次分離時，例 如以3〇〇G之離心加速度經過8〇秒的停留時間，進行 磨料的分離。又，以傾注器6進行第2次分離時，例 如以2,000〜3,000G的離心加速度經過50秒的停留 時間，而藉此進行微粒成份與基油的分離。 於上述之第2實施形態中，亦可使用傾注器6作 爲第1分離回收裝置，或使用旋風式分離器8作爲第 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） ------------裝------^-訂 (請先閱讀背面之注-*事項再填寫本頁) 經濟部中央標準局員工消費合作社印製 Α7 Β7 五'發明説明（丨（>) 2分離回收裝置。或者使角旋風式分離器8作爲第1 分離回收裝置而使用上述第1實施形態之過濾器7 作爲第2分離回收裝置。除此之外，也可以使用上述 第1實施形態之過濾器7作爲第1分離回收裝置，使 用旋風式分離器.8作爲第2分離回收裝置。又，也可 同時使用旋風式分離器8作爲第1分離回收裝置及 第2分離回收裝置》 〔第3實施形態〕 其次，參照圖7說明本發明之第3實施形態如 下》在此第3實施形態中，關於與上述第1實施形態 相同之構件係賦予相同符號而省略其說明。 該第3實施形態之漿液管理系統中，如圖7所 示？係使用一對第1過濾器9a、9b作爲第1分離回 收裝置，而第2分離回收裝置是使用一對第2過濾器 9c、9d。利用第1過濾器9a、9b從廢漿液中將細 於磨料之微粒成份及基油分離後回收磨料，並利用第 2過濾器9c、9d從含有微粒成份之基油中分離微粒 成份後回收基油。 具體而言，廢漿液儲放槽5之廢漿液是利用十字 閥構成之變換閥V91的變換，並經由配管T91、T92 間隔預定時間交替供應至第1過濾器9a ' 9b，在此 可從廢漿液中分離微粒成份及基油而可回收磨粒。含 有微粒成份之基油是藉泵P61經配管Τόΐ而朝著變換 閥V92輸送。配管Τ01內含有微粒成份之基油係藉著 變換閥V92的變換，而經配管Τ93、Τ94間隔預定時 本纸張尺度適用中國國家標準（CNS ) Α4規格（210Χ297公釐） II -1 Jn n^i · -1« m .n i - in nn ^^^1 ^^^1 一el (請先閲讀背面之注意事項再填寫本頁) 311103 A7 B7 五、發明説明（丨*7) 間交替供應於第2過濾器‘9c、9d，在此可分離爲微 粒成份與基油。 n··· ml ^n· m^i tLIt n^i n^i · ml 11 (請先閲讀背面之注意事項再填寫本頁) 對於各第1過濾器9a、9b，利用變換閥V91的 變換，中斷廢漿液的供應期間，隨著閥V93或V94 的開啓，從配管T91、T92下游側供應淸洗油’可清 〆 洗內部之過濾器面。同樣地，對於各個第2過濾器 9c、9d，同樣利用變換閥V92的變換，停止含有微 粒成份之基油供應的期間，隨著閥V95或V96的開 啓從配管T93、T94下游側供應淸洗油，可藉此清洗 內部之過濾器面。 利用第1過濾器9a、9b回收之磨料是經由第1 配管T6運送至調合槽2內。又，藉第2過濾器9c、 9d所回收之基油係經由第2配管T7與第1配管T6 中的磨料匯流，而運送至調合槽2內。其他構成及作 用與前述之第1及第2實施形態相同。 經濟部中央標準局貞工消費合作社印製 上述第3實施形態中，亦可使用第1過濾器9a、 9b作爲第1分離回收裝置，或使用上述第2實施形 態之旋風式分離器8或傾注器6作爲第2分離回收 裝置。或者使用上述第2實施形態之旋風式分離器8 或傾注器6作爲第1分離回收裝置而使用第2過濾 器9c、9d作爲第2分離回收裝置亦可。 此外’亦可將上述第1〜第3實施形態變更如下 而予以具體化。 〔1〕 在儲存槽3內配設比重計S1及黏度計 S2，可於儲存槽3內檢測漿液中磨料之含量者。此 本紙張尺度適用中國國家標準（CNS ) A4規格（2IOX297公楚） 經濟部中央標準局員工消費合作社印製 A7 B7 五、發明説明（丨δ) 時，也可以將使用後廢漿液所回收的磨料及基油運送 至儲放槽3內。 〔2〕 在與第2配管Τ7匯流點更下游側之第1 配管Τ6中配設比重計S1及黏度計S2，而可於其第 1配管Τ6中途檢測漿液中磨粒之含量。 〔3〕 省略專用之儲放槽3。 〔4〕 利用比重計S 1及黏度計S2中任一側檢測 漿液中磨料之含量者。 〔5〕 利用與比重計S1或黏度計S2不同之檢測 裝置，例如使用濁度計等光學檢測裝置檢測漿液中磨 料之含量。 〔6〕 藉由第1及第2分離回收裝置之分離回 收性能，決定第2分離回收裝置分離附著在微粒成份 而廢棄之基油量、及將微粒成份而除去之破碎磨料 量。因此，預先調查該等量之後，可從運送至調合槽 2之磨料及基油的量確保漿液中磨料的含量。 〔7〕 使用水系物代替油系物作爲漿液中的分 散液。使用水系分散液時，將磨料與分散液之混合重 量比設定於1 : 0.76至1 : 0.5的範圍內爲佳。以該 水系之漿液與前述第1〜第3實施形態之油系漿液 比較，其磨料之含量高出約20%左右。即，以水系之 漿液與油系之漿液比較，磨料在調合槽2內之均勻分 散困難，因此爲使磨料安定供應至線狀鋸，必須提高 磨料的含量。使用水系漿液的場合，將混合重量比設 定於上述範圍時，可確保最佳之切割條件而可有效切 本紙伕尺度適用中國國家標準（CNS ) A4規格（210X297公釐） - I- - I 1 1^1 In 1— - 次水 —I— —^1 1 I-. , (請先閲讀背面之注意事項再填寫本頁) 經濟部中央標準局員工消費合作社印製 A7 .__ B7 -- - ~~ 丨丨"丨_ I —-丨一 -— 五、發明説明（1¾) 割工件。再者，如上述之永系漿液係將其黏度例如設 定在40〜5〇 cP的範圍內。 〔第4實施形態〕 其次，根據圖8〜圖11說明本發明之第4實施 形態如下。在該第4實施形態中，關於與上述第1實 施形態相同之構件係賦予相同符號而省略其說明》 如圖8所示，供應磨料至調合槽2內的漏斗21 是經由包含閥V21之配管T21連接調合槽2。供應分 散液至調合槽2內的分散液槽22則是經由具有閥 V22的配管T22而連接在調合槽22。適當使用油系 或水系物作爲分散液。將 比重計S1及黏度計S2配置在調合槽2內。控制器C1 可根據比重計S1及黏度計S2之檢測値輸出開啓量指 令信號至控制閥V21、V22。 調合槽2是經由具有閥V2之配管T2而連接在 線狀鋸之漿液槽45。另外，由於線狀鋸W具有與上 述第1實施形態之各線狀鋸W1〜W4相同之構造， 因此省略其說明。又，亦可設置複數台之線狀鋸。線 狀鋸之漿液槽45係經由具有排出閥41及泵P41之配 管T41而連接於廢漿液儲放槽5。 在廢漿液儲放槽5內，經由包含閥V5及泵P5 之配管T5，連接有構成第丨分離回收裝置之分離裝 置100。該分離裝置100具有如圖9所示之構成。同 圖所示，分離裝置100具有呈圓筒形容器101。該容 器101係構成裝置本體。過濾器102係配設於容器101 本紙依尺度適用中囷國家標準（CNS ) A4規格（210X297公楚） (請先閲讀背面之注意事項再填寫本頁} 装- 訂 A7 __B7 五、發明説明（w) 內而可將容器101的內都上下分隔爲上游側之第1 室103與下游側之第2室104。過濾器102例如可將 複數片圓形金屬網狀物重疊所構成，其外圍緣部藉環 狀支持框體105固定於容器101內周圍面上》 超音波振盪器106係與過濾器相對配設在第1 室103內。超音波振盪器106上面例如具有與過濾器 102的面大致相同大小面積。超音波振盪器106上面 與過濾器102之間，例如設定爲5 mm左右的間隔。 控制器C1可控制超音波振盪器106的開/關》此外， 控制器C1除可進行各閥的開啓及關閉控制之外，同 ' 時可進行各泵之開/關控制。 過濾器102可阻止磨料的通過，並且具有多數孔 可容許較磨料小之微粒成份〔具體而言，切屑、破碎 磨料、金屬粉末等〕及分散液通過。該等孔的大小是 由容許通過微粒成份的大小來決定，例如設定在5〜 20 " m的範圍內。例如過濾器1 02的濾孔大小爲容 許具有粒徑約6〜7 m粒子通過，而設定可容許通 過粒子大小約1.4〜1.7倍之10 y m左右。 經濟部中央標準局員工消費合作社印製 1§1 I I —I- I m —4.AIn I I— I 1 I 、一OJ (請先聞讀背面之注意事項再填寫本頁) 圖8及圖9所示，供應廢漿液儲存槽5的廢漿液 至第1室103之配管T5具有連接容器101之出口》 從第1室103排出含有磨料之廢漿液的配管T100具 有連接容器1〇1之入口、及連接廢漿液儲放槽5之出 口。配管T101具有連接配管T1 00中途之入口及連接 儲存磨料用儲放槽108的出口。閥VI 01係設置於配 管T101之中途。 20 本紙乐尺度通用中國國家樣準（CNS ) A4規格（2丨〇以97公釐） 經濟部中央標準局員工消費合作社印製 A 7 __；__ _^B7________ 五、發明説明（) 從第2室104排出杳有微粒成份之分散液的配 管丁61具有連接容器101之入口、及連接構成第2分 離回收裝置之過濾器107之出口。在配管T61途中配 置有泵P61。過濾器107例如與上述第1實施形態之 過濾器7相同之物，而可從包含微粒成份之分散液中 分離微粒成份而回收分散液》過爐器1 07係經由具有 閥VI 07之配管T107連接在儲放分散液之分散液儲 放槽109上。 其次，說明如前述所構成之第4實施形態的動作 如下。 首先，隨著閥V21的開啓從漏斗21將預定量之 磨料供應至調合槽2內。同時，隨著閥V22的開啓而 將預定量之分散液從分散液槽22供應至調合槽2 內。並且在調合槽2中利用攪拌機20混合磨料與分 散液，可藉此調合漿液者。此外，將調合槽2中所調 合漿液中之磨料與分散液的混合重量比設定在與上 述第1實施形態相同之範圍內。所調合之漿液隨著閥 V2的開啓而供應至線狀鋸之漿液槽45內。 線狀鋸W與上述第1實施形態相同可進行工件 的切割。具體而言，在關閉閥V2及V4 1之後，漿液 槽45內的漿液經供應管43供應至金屬線群4 1。在 此狀態下，使工件46從金屬線群41上方下降通過金 屬線群41。其結果，在附著磨粒的狀態下藉移動之 金屬線群41切割工件46，而可同時形成多數之晶 片。 本紙伕尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） JJ-Γ HW *I - --- ί I —— 1 t M^ - I I—1 1- — .1 [: '^-5 (請先閱讀背面之注意事項再填寫本頁) A7 ____B7 _ 五、發明説明（H) 在切割時，從供應管_43供應至金屬線群41之漿 液，係經由承接槽44而儲放於漿液槽45內，再次經 供應管T4供應至供應管43。使用於工件46切割之 漿液中’例如包含有180 cP左右黏度之分散液，及 具有10〜3〇/z m或相同平均粒徑之磨料，及具有隨 切割而破碎之5〜15 # m或相等平均粒徑的破碎磨 料，具有次# m〜數// m左右粒徑之工件46的切屑， 及金屬線40切出之金屬粉末等。 重覆進行工件46之切割時，會使漿液中切割或 金屬粉末的量相對增加，而降低切割效率。因此，與 上述第1實施形態相同，預定次數例如第2次切割處 理時，進行漿液槽45內漿液之部份更換，使漿液槽 , 45內的漿液更新。 經濟部中央標準局員工消費合作社印製 i. ml 1 ! i -1 *^9^ —11 1^1 m^— i 一。 I (請先閱讀背面之注意事項再填寫本頁) 將線狀鋸W之漿液槽45所排出的廢漿液儲放於 廢漿液儲放槽5之內。其儲放之廢漿液的量達到預定 量時，關閉閥V41及V101的同時，開啓閥V5及 VI 07。其次，啓動泵P5及P61同時開啓超音波振盪 器106。並且，泵P5壓送廢漿液時的壓力最好在 〇.5Kg/cm2左右。又藉泵P61排出含有微粒成份之分 散液的排出量在1〜2升/ min左右爲佳。超音波振 盪器106發出之超音波頻率在40Hz左右較佳。 如圖10〔 a〕所示，隨著泵P61的動作，廢漿 液儲放槽5內的廢漿液是經由配管T5被壓送至分離 裝置100之第1室103內。第1室103內之廢漿液量 一旦到達預定量以上時，如圖10〔 a〕之虛線所示， 本紙法尺度適用中國國家標孪（CNS ) A4規格（210X 297公釐） 經濟部中央標準局員工消費合作社印裝 A7 B7 五、發明説明 該廢漿液中之分散液爲案’ P61所吸引，通過過濾器 1〇2而朝著第2室104流動。 廢漿液中的磨粒及微粒成份與分散液同時通過 過濾器102。此時，如圖10〔 b〕所示具有小於過 濾器102濾孔的粒徑之微粒成份與分散液同通過過 濾器而流向第2室1〇4。相對於此，由於具有大於過 濾器102濾孔粒徑的磨料不能通過過濾器102，因此 停留在第1室103中。當第1室103內的廢漿液量達 到預定量以上時，磨料與廢漿液同時被壓出配管 T100而回到廢漿液儲放槽5內。 ’ 另一方面，超音波振盪器1〇6發出之超音波係經 由第1室103內的廢漿液傳達至過濾器102，以非常 細微的振幅振動其過濾器102。因此，如圖11所示 與分散液同時通過過濾器102之磨料即使接觸過濾 器102的表面，該磨料仍會爲振動之過濾器102所振 落，可抑制其附著於過濾器102的表面。 廢漿液中微粒成份具有可通過過濾器1〇2濾孔 的大小，但是在通過複數片金屬網狀物重疊所形成過 濾器1 0 2的過程中會被過濾器1 0 2的濾孔所阻 擋。因此如上述，可利用超音波振盪器1〇6發出的超 音波使過濾器1 〇2振動’藉以除去黏著之微粒成份而 可通過過濾器102。因此’可抑制微粒成份附著在過 濾器102的內部。 如上述，利用過爐器1 0 2的振動可防止過爐器 1 02表面之磨料的附著、及過濾器1 02內部之微粒成 本纸伕尺度適用中國國家橾準（CNS ) A4規格（210X 297公釐） ^^1- 1^1 11^1. u— n m —4 1^1^1 I 、一^ - (請先閲讀背面之注意事項再填寫本頁) 經濟部中央標準局員工消費合作社印製 311103 A7 _____B7 五、發明説明（#) 份的附著，因而可抑制過繪器102濾孔的阻塞。因此， 使微粒成份與分散液同時迅速通過過濾器102，迅速 進行微粒成份的分離。 如上述，廢漿液隨著廢漿液儲放槽5、配管T5、 分離裝置100及配管T1 00所形成之循環路徑的循 環，如圖10〔 C〕所示使分離裝置100之第1室103 內廢漿液中的磨粒含量逐漸增加，同時使微粒成份的 含量逐漸降低。因此，依預定時間進行該廢漿液的循 環時’開啓閥V101使第1室103內的磨粒經配管 T101而輸送至磨粒儲放槽108內。隨後，當預定時 間之處理完成時，可關閉超音波振盪器106。 另一方面，通過過濾器102而流入第2室104之 含有微粒成份的分散液是利用泵P6 1經由配管T6 1送 至過濾器107內。過濾器107可從含有微粒成份之分 散液中分離除去切屑、破碎磨料、金屬粉末等微粒成 份後回收分散液。過濾器107所回收之分散液是經配 管T1 07輸送入分散液儲放槽丨〇9。 回收至磨料儲存槽1〇8的磨料，及回收於分散液 儲放槽109之分散液被輸送至調合槽2內。此時，如 圖8兩點虛線所不，與上述第1實施形態同樣地使磨 料儲放槽108內的磨料及分散液儲放槽109內的分散 液藉由第1配管T6及第2配管T7輸送至調合槽2內 亦可。或者作業員可將回收之磨料及分散液運送至調 合槽2內亦可。並且，連續或間歇性進行運送皆可。 與上述第1實施形態相同，調合槽2是根據比重 本纸伕尺度適用中國國家榇準（CNS ) A4規格（210χ297公楚） (請先閲讀背面之注意事項再填寫本頁) ''衣· 經濟部中央標準局員.工消費合作社印製31110Q A7 B7 V. Description of the invention (l >) It is necessary to increase the opening amount of the valve V21 and increase the supply amount of abrasive from the hopper 21. Particulate components such as swarf, crushed abrasive, and gold powder separated by the filter 7 are removed by the filter 7 and discarded outside. Since the base oil adheres to the waste particulate component, the amount of base oil transported to the mixing tank 2 is relatively reduced. This decrease will result in an increase in the specific gravity or viscosity of the slurry in the mixing tank 2. Therefore, as described above, the opening amount of the valve V22 can be increased to increase the supply of base oil from the dispersion liquid tank 22. As mentioned above, the mixing weight ratio of the abrasive and the base oil in the slurry blended by the blending tank 2 is often adjusted in the range of 1: 0.91 to 1: 0.6. The expected effects obtained by the foregoing embodiments are described below. [A] From the used waste slurry discharged from the linear saws W1 to W4, the abrasive and the base oil are separated and recovered for reuse. Therefore, the amount of newly added abrasive and base oil required for cutting the workpiece can be greatly reduced, and the cost during cutting can be reduced. [B] The supply of slurry to the linear saws W1 to W4 can be performed continuously, so that the cutting of the linear saws W1 to W4 can be performed continuously without interrupting the cutting. Therefore, the efficiency of the cutting operation can be improved. As a result, the cost can be reduced due to the reuse of the abrasive and the base oil. At the same time, the operation cost required for cutting the workpiece 46 can be further reduced. 〔C〕 The specific gravity or viscosity of the slurry can be used to ensure the content of abrasive in the slurry. Also, adjust the supply of abrasive and base oil so that the abrasive content is set. As mentioned above, the cutting of the workpiece 46 can always be applied to the Chinese standard (CNS) A4 specification (210X297 mm) on this paper scale n 1 ^ 1 ^ 1 nn «n—ν fm ^^^^ 1 1 fue n (锖 先Read the precautions on the back and fill in this page) Order A7 of the Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs Printed A7 ___- _B7 V. Invention description (丨 +) Under stable cutting conditions'. 〔D〕 Because the base oil can be reused, the amount of industrial waste can be reduced. Therefore, the necessary burden on industrial waste disposal can be greatly reduced. [E] The mixing weight / ratio of the abrasive and the dispersion liquid in the mixed slurry is adjusted within the range of usually 1: 0.91 to 1: 0.6. When the mixing weight ratio of the slurry is set within this range, the best cutting conditions can be ensured. Fig. 5 is a graph showing the relationship between the mixing weight ratio of the abrasive and base oil in the slurry and the cutting load when the metal wire group of the linear saw cuts the workpiece. In addition, the graph is obtained by cutting under the following conditions. That is, a quadrilateral columnar polycrystalline silicon with a 100 mm angle is used as the workpiece. And the workpiece has a metal wire cutting with a diameter of 0.1 Smm and a moving speed of 500 m / min. During cutting, the larger the cutting load, the more efficiently the workpiece can be cut. Therefore, according to the graph of Fig. 5, the mixing weight ratio of the abrasive and the base oil in the slurry is set in the range of 1: 0.91 to 1: 0.6 where the cutting load is large. In the first embodiment described above, the filter 7 may be used as the first separation and recovery device, or the pourer 6 may be used as the second separation and recovery device. Alternatively, the pourer 6 may be used as the first separation and recovery device and the second separation and recovery device at the same time. In addition, the filter 7 may be used as a first separation and recovery device and a second point: separation and recovery device. [Second Embodiment] Next, a second embodiment of the present invention will be described based on FIG. 6 as follows. In this second embodiment, the Chinese paper standard (CNS) A4 specification (210X297 mm) is applied to the paper size same as the first embodiment described above ^^ 1- —l · — ^^ — ^ 1 ^^ — ^ 1 m — ^ ϋ ^ Jn ^ ^ _-(Please read the precautions on the back before filling out this page) A7 _____B7_ printed by the Employee Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 5. The description of the invention (15 >) is the same Symbols '' omit their description. In the slurry management system of the second embodiment, as shown in FIG. 6, a cyclone-type separator 8 is used as the first separation and recovery device, and a decanter 6 is used as the second separation and recovery device. Then, the cyclone-type separator 8 is used to separate the finer particulate component and the base oil from the waste slurry and recover the base oil. Specifically, the cyclone-type separator 8 can subject the abrasive contained in the waste slurry to the centrifugal force of the descending cyclone and collide with the inner wall of the cyclone-type separator 8. The descending abrasive is collected as it descends in the cyclone separator 8, and is discharged from the lower part of the cyclone separator 8 to the first pipe T6. As mentioned above, the abrasive can be recovered from the waste slurry. The base oil containing the particulate component is transferred to the pourer 6 through the piping T'61 by the pump P61, where it can be separated into the particulate component and the base oil. The abrasive separated and recovered by the cyclone separator 8 is transported into the mixing tank 2 through the pipe Τ6. In addition, the base oil separated and recovered by the pourer 6 is transported into the mixing tank 2 through the second pipe T7, and the abrasive in the first pipe T6 merges. The other constitutions and functions are the same as those of the aforementioned first embodiment. Furthermore, when the cyclone-type separator 8 performs the first separation, for example, a centrifugal acceleration of 300 G passes a residence time of 80 seconds to separate the abrasive. In addition, when the second separation is performed by the pourer 6, for example, a centrifugal acceleration of 2,000 to 3,000 G passes for a residence time of 50 seconds, thereby separating the particulate component from the base oil. In the second embodiment described above, the pourer 6 can also be used as the first separation and recovery device, or the cyclone separator 8 can be used as the first paper size. The Chinese National Standard (CNS) A4 specification (210X297 mm) is applicable- ---------- 装 ------ ^-subscribe (please read the note on the back-* matters before filling out this page) Printed Α7 Β7 five inventions by the employee consumer cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs Description (丨 (>) 2 Separation and recovery device. Alternatively, the angular cyclone separator 8 is used as the first separation and recovery device and the filter 7 of the first embodiment described above is used as the second separation and recovery device. In addition, The filter 7 of the first embodiment described above can be used as the first separation and recovery device, and the cyclone separator .8 is used as the second separation and recovery device. Alternatively, the cyclone separator 8 can also be used as the first separation and recovery device and [Second Separation and Recovery Device] [Third Embodiment] Next, a third embodiment of the present invention will be described with reference to FIG. 7 as follows. In this third embodiment, the same components as those in the above-mentioned first embodiment are given the same symbols. The explanation is omitted. In the slurry management system of the form, as shown in Fig. 7, a pair of first filters 9a, 9b is used as the first separation and recovery device, and a second separation and recovery device uses a pair of second filters 9c, 9d. The first filter 9a, 9b separates the fine particle component and base oil from the waste slurry to recover the abrasive, and the second filter 9c, 9d separates the particulate component from the base oil containing the particulate component and recovers the base oil Specifically, the waste slurry of the waste slurry storage tank 5 is changed by a changeover valve V91 composed of a cross valve, and is alternately supplied to the first filters 9a ′ 9b through pipes T91 and T92 at a predetermined time interval. Abrasive particles can be recovered by separating the particulate component and the base oil from the waste slurry. The base oil containing the particulate component is sent to the shift valve V92 through the piping Τόΐ by the pump P61. The base oil containing the particulate component in the piping Τ01 is passed through the shift valve The conversion of V92, and when the interval between the pipes Τ93 and Τ94 is predetermined, the paper size is applicable to the Chinese National Standard (CNS) Α4 specification (210Χ297 mm) II -1 Jn n ^ i · -1 «m .ni-in nn ^^ ^ 1 ^^^ 1 one el (please read the notes on the back first (Enter this page again) 311103 A7 B7 Fifth, the invention description (丨 * 7) is alternately supplied to the second filter '9c, 9d, where it can be separated into particulate components and base oil. N ··· ml ^ n · m ^ i tLIt n ^ in ^ i · ml 11 (please read the precautions on the back before filling in this page) For each first filter 9a, 9b, use the changeover valve V91 to interrupt the supply period of waste slurry. With the opening of valve V93 or V94, the cleaning oil is supplied from the downstream side of pipes T91 and T92 to clean and clean the filter surface inside. Similarly, for each of the second filters 9c and 9d, the changeover of the changeover valve V92 is also used to stop the supply of the base oil containing particulate components, and the valve V95 or V96 is opened to supply the wash water from the downstream side of the pipes T93 and T94. Oil can be used to clean the filter surface inside. The abrasive recovered by the first filters 9a and 9b is transported into the mixing tank 2 through the first pipe T6. Furthermore, the base oil recovered by the second filters 9c and 9d is transported into the mixing tank 2 through the confluence of the abrasives in the second pipe T7 and the first pipe T6. Other configurations and functions are the same as those in the first and second embodiments described above. In the above-mentioned third embodiment printed by the Zhengong Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs, the first filters 9a and 9b can also be used as the first separation and recovery device, or the cyclone-type separator 8 or pouring of the above-mentioned second embodiment The device 6 serves as a second separation and recovery device. Alternatively, the cyclone separator 8 or the pourer 6 of the second embodiment described above may be used as the first separation and recovery device, and the second filters 9c and 9d may be used as the second separation and recovery device. In addition, the first to third embodiments described above may be modified as follows to be embodied. 〔1〕 A hydrometer S1 and a viscometer S2 are arranged in the storage tank 3, and the content of abrasive in the slurry can be detected in the storage tank 3. This paper scale is applicable to the Chinese National Standard (CNS) A4 specification (2IOX297 Gongchu). The A7 B7 is printed by the Employee Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs. 5. The invention description (丨 δ) can also be recovered from the waste slurry after use The abrasive and base oil are transported to the storage tank 3. 〔2〕 A hydrometer S1 and a viscometer S2 are installed in the first pipe T6 on the downstream side of the confluence point of the second pipe T7, and the content of abrasive particles in the slurry can be detected in the middle of the first pipe T6. 〔3〕 Omit the dedicated storage slot 3. [4] Use either the hydrometer S 1 or the viscometer S2 to detect the amount of abrasive in the slurry. [5] Use a different detection device than the hydrometer S1 or viscometer S2, for example, use an optical detection device such as a turbidimeter to detect the content of abrasive in the slurry. [6] Based on the separation and recovery performance of the first and second separation and recovery devices, determine the amount of base oil that the second separation and recovery device separates and adheres to the particulate component and waste, and the amount of crushed abrasive that removes the particulate component. Therefore, after investigating the amount in advance, the amount of abrasive and base oil delivered to the mixing tank 2 can be used to ensure the content of abrasive in the slurry. [7] Use water-based materials instead of oil-based materials as the dispersion in the slurry. When using an aqueous dispersion, the mixing weight ratio of the abrasive to the dispersion is preferably set in the range of 1: 0.76 to 1: 0.5. Comparing this water-based slurry with the oil-based slurry in the first to third embodiments described above, the content of the abrasive is about 20% higher. That is, it is difficult to evenly disperse the abrasive in the mixing tank 2 in comparison with the water-based slurry and the oil-based slurry. Therefore, in order to stably supply the abrasive to the linear saw, it is necessary to increase the content of the abrasive. When using water-based slurry, when the mixing weight ratio is set in the above range, the best cutting conditions can be ensured and the paper size can be effectively cut. The Chinese National Standard (CNS) A4 specification (210X297 mm) is applied-I--I 1 1 ^ 1 In 1—-次 水 —I— — ^ 1 1 I-., (Please read the notes on the back before filling this page) A7 .__ B7 --- Printed by the Staff Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs ~~ 丨 丨 " 丨 _ I —- 丨 一 -— V. Description of the invention (1¾) Cutting the workpiece. Furthermore, as described above, the viscosity of the permanent slurry is set in the range of 40 to 50 cP, for example. [Fourth Embodiment] Next, a fourth embodiment of the present invention will be described based on Figs. 8 to 11 as follows. In this fourth embodiment, the same components as those in the above-mentioned first embodiment are given the same symbols and their descriptions are omitted. As shown in FIG. 8, the funnel 21 that supplies the abrasive into the mixing tank 2 is passed through the piping including the valve V21. T21 连接 调 槽 2。 T21 connection mixing slot 2. The dispersion liquid tank 22 which supplies the dispersion liquid into the mixing tank 2 is connected to the mixing tank 22 via a pipe T22 having a valve V22. Appropriate use of oil-based or water-based products as the dispersion. The hydrometer S1 and the viscometer S2 are arranged in the mixing tank 2. The controller C1 can output the opening amount instruction signal to the control valves V21 and V22 according to the detection values of the hydrometer S1 and the viscometer S2. The mixing tank 2 is connected to the slurry tank 45 of the linear saw via a pipe T2 having a valve V2. In addition, since the linear saw W has the same structure as each of the linear saws W1 to W4 in the first embodiment described above, its description is omitted. In addition, a plurality of linear saws can also be provided. The slurry tank 45 of the linear saw is connected to the waste slurry storage tank 5 via a pipe T41 having a discharge valve 41 and a pump P41. In the waste slurry storage tank 5, a separation device 100 constituting a first separation and recovery device is connected via a pipe T5 including a valve V5 and a pump P5. The separation device 100 has a structure as shown in FIG. 9. As shown in the figure, the separation device 100 has a cylindrical container 101. The container 101 constitutes a device body. The filter 102 is installed in the container 101. The paper is applicable to the Chinese National Standard (CNS) A4 (210X297) according to the standard (please read the precautions on the back and then fill out this page) Binding-Order A7 __B7 V. Description of invention ( w) The inside of the container 101 can be divided up and down into the first chamber 103 on the upstream side and the second chamber 104 on the downstream side. The filter 102 can be formed by overlapping a plurality of circular metal meshes, for example, The rim is fixed to the inner peripheral surface of the container 101 by the ring-shaped supporting frame 105. The ultrasonic oscillator 106 is disposed in the first chamber 103 opposite to the filter. The ultrasonic oscillator 106 has, for example, a filter 102 The surface is approximately the same size and area. The distance between the upper surface of the ultrasonic oscillator 106 and the filter 102 is set to, for example, about 5 mm. The controller C1 can control the on / off of the ultrasonic oscillator 106. In addition, the controller C1 can be divided. In addition to the opening and closing control of each valve, the on / off control of each pump can also be performed at the same time. The filter 102 can prevent the passage of abrasives, and has a large number of holes to allow particulate components smaller than abrasives [specifically, Chips, crushing mill , Metal powder, etc.] and the dispersion liquid. The size of the pores is determined by the size of the particulate component that is allowed to pass, for example, set in the range of 5 to 20 m. For example, the filter pore size of the filter 102 is allowed Particles with a particle size of about 6 to 7 m pass through, and the set allowable particle size is about 1.4 to 1.7 times 10 ym. Printed by the Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs 1§1 II —I- I m —4. AIn II—I 1 I and I OJ (please read the precautions on the back before filling in this page). As shown in Figure 8 and Figure 9, the pipeline that supplies the waste slurry from the waste slurry storage tank 5 to the first chamber 103 has a connection. The outlet of the container 101 "The piping T100 for discharging the waste slurry containing abrasives from the first chamber 103 has an inlet connecting the container 101 and an outlet connecting the waste slurry storage tank 5. The piping T101 has an inlet connecting the piping T100 midway and Connected to the outlet of the storage tank 108 for storing abrasives. The valve VI 01 is installed in the middle of the piping T101. 20 The standard of the paper music standard China National Standards (CNS) A4 specification (2 mm to 97 mm) Central Standards Bureau of the Ministry of Economic Affairs A 7 _ printed by the employee consumer cooperative _; __ _ ^ B7 ________ 5. Description of the invention () The piping 61 that discharges the dispersion liquid containing the particulate component from the second chamber 104 has an inlet connected to the container 101, and an outlet connected to the filter 107 constituting the second separation and recovery device A pump P61 is arranged in the middle of the piping T61. The filter 107 is, for example, the same as the filter 7 of the first embodiment described above, and the particulate component can be separated from the dispersion liquid containing the particulate component to recover the dispersion liquid. 07 is connected to the dispersion liquid storage tank 109 storing the dispersion liquid via a pipe T107 having a valve VI 07. Next, the operation of the fourth embodiment constructed as described above will be described as follows. First, with the opening of the valve V21, a predetermined amount of abrasive is supplied from the funnel 21 into the mixing tank 2. At the same time, a predetermined amount of dispersion liquid is supplied from the dispersion liquid tank 22 into the mixing tank 2 with the opening of the valve V22. In the mixing tank 2, the agitator 20 is used to mix the abrasive and the dispersion liquid, so that the slurry can be mixed. In addition, the mixing weight ratio of the abrasive and the dispersion liquid in the slurry prepared in the mixing tank 2 is set in the same range as in the first embodiment described above. The adjusted slurry is supplied to the slurry tank 45 of the linear saw with the opening of the valve V2. The linear saw W is capable of cutting a workpiece as in the first embodiment described above. Specifically, after closing the valves V2 and V41, the slurry in the slurry tank 45 is supplied to the metal wire group 41 through the supply pipe 43. In this state, the workpiece 46 is lowered from above the metal wire group 41 through the metal wire group 41. As a result, a plurality of wafers can be formed simultaneously by cutting the workpiece 46 by the moving metal wire group 41 with the abrasive particles attached. The paper scale is applicable to the Chinese National Standard (CNS) A4 specification (210X 297 mm) JJ-Γ HW * I---- ί I —— 1 t M ^-II—1 1- — .1 [: '^- 5 (Please read the precautions on the back before filling in this page) A7 ____B7 _ 5. Description of the invention (H) When cutting, the slurry supplied from the supply pipe _43 to the metal wire group 41 is stored through the receiving groove 44 In the slurry tank 45, it is again supplied to the supply pipe 43 via the supply pipe T4. Used in the slurry cut by the workpiece 46 ', for example, contains a dispersion liquid with a viscosity of about 180 cP, and an abrasive with an average particle diameter of 10 ~ 3〇 / zm or the same, and 5 ~ 15 # m or equivalent with a crushing after cutting The crushed abrasive with an average particle diameter, the chips of the workpiece 46 having a particle diameter of about # m ~ number // m, and the metal powder cut from the metal wire 40, etc. When the workpiece 46 is repeatedly cut, the amount of cutting or metal powder in the slurry is relatively increased, and the cutting efficiency is reduced. Therefore, as in the first embodiment described above, when a predetermined number of times, for example, the second cutting process, part of the slurry in the slurry tank 45 is replaced to renew the slurry in the slurry tank 45. Printed by the employee consumer cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs i. Ml 1! I -1 * ^ 9 ^ —11 1 ^ 1 m ^ — i 1. I (Please read the precautions on the back before filling in this page) Store the waste slurry discharged from the slurry tank 45 of the linear saw W in the waste slurry storage tank 5. When the amount of waste slurry stored reaches a predetermined amount, the valves V41 and V101 are closed, and the valves V5 and VI 07 are opened. Next, the pumps P5 and P61 are started while the ultrasonic oscillator 106 is turned on. In addition, the pressure when the pump P5 pressurizes the waste slurry is preferably about 0.5 kg / cm2. Furthermore, the pump P61 is used to discharge the dispersion liquid containing the particulate component at about 1 to 2 liters / min. The ultrasonic frequency emitted by the ultrasonic oscillator 106 is preferably around 40 Hz. As shown in FIG. 10 [a], with the operation of the pump P61, the waste slurry in the waste slurry storage tank 5 is pressure-fed to the first chamber 103 of the separation device 100 via the pipe T5. Once the amount of waste slurry in the first chamber 103 reaches more than the predetermined amount, as shown by the dashed line in Figure 10 [a], the standard of this paper method is applicable to the Chinese National Standard (CNS) A4 specification (210X 297mm) Central Standard of the Ministry of Economic Affairs Bureau employee consumer cooperative printed A7 B7 V. Description of the invention The dispersion in the waste slurry was attracted by case P61 and flowed toward the second chamber 104 through the filter 102. The abrasive and particulate components in the waste slurry pass through the filter 102 at the same time as the dispersion. At this time, as shown in FIG. 10 [b], the particulate component having a particle size smaller than the filter hole of the filter 102 and the dispersion liquid pass through the filter and flow to the second chamber 104. On the other hand, since the abrasive having a particle size larger than the filter pores of the filter 102 cannot pass through the filter 102, it stays in the first chamber 103. When the amount of waste slurry in the first chamber 103 reaches a predetermined amount or more, the abrasive and the waste slurry are simultaneously pushed out of the pipe T100 and returned to the waste slurry storage tank 5. On the other hand, the ultrasonic wave emitted from the ultrasonic oscillator 106 is transmitted to the filter 102 through the waste slurry in the first chamber 103, and vibrates the filter 102 with a very fine amplitude. Therefore, as shown in FIG. 11, even if the abrasive passing through the filter 102 at the same time as the dispersion liquid contacts the surface of the filter 102, the abrasive will still be shaken off by the vibrating filter 102, and its adhesion to the surface of the filter 102 can be suppressed. The particulate component in the waste slurry has a size that can pass through the filter pores of the filter 102, but it is blocked by the filter pores of the filter 102 during the process of forming the filter 102 by overlapping a plurality of metal meshes . Therefore, as described above, the ultrasonic wave emitted from the ultrasonic oscillator 106 can be used to vibrate the filter 102 to remove the adhered particulate components and pass through the filter 102. Therefore, it is possible to suppress the adhesion of particulate components to the inside of the filter 102. As mentioned above, the vibration of the furnace 102 is used to prevent the adhesion of the abrasive on the surface of the furnace 102, and the particle cost inside the filter 102 is applicable to the China National Standard (CNS) A4 specification (210X 297 Mm) ^^ 1- 1 ^ 1 11 ^ 1. U— nm —4 1 ^ 1 ^ 1 I 、 一 ^-(please read the notes on the back before filling this page) Employee Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs Printed 311103 A7 _____B7 5. Attachment of the description of the invention (#), so that the clogging of the filter hole of the plotter 102 can be suppressed. Therefore, the particulate component and the dispersion liquid are quickly passed through the filter 102 at the same time, and the particulate component is quickly separated. As described above, the waste slurry circulates along the circulation path formed by the waste slurry storage tank 5, the piping T5, the separation device 100, and the piping T100, as shown in FIG. 10 [C], in the first chamber 103 of the separation device 100 The content of abrasive particles in the waste slurry gradually increases, while the content of particulate components gradually decreases. Therefore, when the waste slurry is circulated at a predetermined time, the valve V101 is opened to allow the abrasive particles in the first chamber 103 to be transferred to the abrasive particle storage tank 108 through the pipe T101. Subsequently, when the processing at the predetermined time is completed, the ultrasonic oscillator 106 may be turned off. On the other hand, the dispersion liquid containing the particulate component flowing into the second chamber 104 through the filter 102 is sent into the filter 107 through the pipe T6 1 by the pump P61. The filter 107 separates and removes particulate components such as swarf, crushed abrasive, metal powder, etc. from the dispersion liquid containing particulate components, and recovers the dispersion liquid. The dispersion liquid recovered by the filter 107 is transferred to the dispersion liquid storage tank 〇〇9 through the pipe T1 07. The abrasive recovered in the abrasive storage tank 108 and the dispersion recovered in the dispersion storage tank 109 are sent to the mixing tank 2. At this time, as indicated by the two-dotted line in FIG. 8, the abrasive in the abrasive storage tank 108 and the dispersion in the dispersion liquid storage tank 109 are passed through the first pipe T6 and the second pipe in the same manner as in the first embodiment described above T7 can also be transported into the mixing tank 2. Alternatively, the operator may transport the recovered abrasive and dispersion liquid into the mixing tank 2. Moreover, it can be carried out continuously or intermittently. Similar to the above-mentioned first embodiment, the mixing tank 2 is adapted to the Chinese National Standard (CNS) A4 specifications (210χ297) according to the specific gravity paper size (please read the precautions on the back and fill in this page) '' Clothing Member of the Central Standards Bureau of the Ministry of Economic Affairs. Printed by the Industrial and Consumer Cooperative
SlU〇8 A7 ---------B7_ 五、發明説明（4) 計S 1及黏度計S2的檢測値控制閥V21、V22的開啓 量’可藉此調節從漏斗21之磨料供應量及分散液槽 22之分散液供應量。其結果，以調合槽2所調合之 漿液中磨料與分散液的混合重量比，分散液爲油系時 調節在1 : 0·91ι至1 : 0.6的範圍內，分散液爲水系 時則調節在1 : 0.76至1 ·· 〇.5的範圍內。 如上述第4實施形態中，從廢漿液中進行微粒成 份的分離時’利用超音波振盪器106發出之超音波使 過濾器1 02振動。因此，可抑制過濾器1 02的阻塞， 並可防止過濾器1 02過濾效果的降低。如上述，即使 使用黏度較高之漿液時，仍可迅速有效分離除去微粒 成份，並可將磨料予以回收。 分離裝置1〇〇是以容器101、過濾器102及超音 波振盪器106爲主體所構成。如上述之分離裝置1〇〇 與上述第1實施形態等的傾注器比較，具有簡單的構 造，製造成本亦較便宜。因此，可降低處理系統整體 之製造成本。 調節過濾器102濾孔的大小，或通過過濾器102 之分散液的流速等，可運用於分離時標的物大小或處 理量、或處理規模不同等種種的處理系統中，該系統 之設計本身也較容易。其他的作用及效果皆與上述第 1〜第3實施形態相同。 超音波振盪器106可從廢漿液中分離微粒成份 處理期間連續動作，或間歇動作皆可。 廢漿液在廢漿液儲放槽5、配管Τ5、分離裝置 本纸伕尺度適用中國國家標準（CNS ) Α4規格（210Χ 297公釐） (請先閲讀背面之注意事項再填寫本頁) 訂 經濟部中央標準局員工消費合作社印製 A7 ---- —_ B7 五、發明説明（^) 100及配管T100所形成乏循環路徑中循環的時間可 對應標的物磨粒的回收率或微粒成份的含量等作適 當變更。或者，無須將使含有磨粒之廢漿液回到廢漿 液儲放槽5內，而直接輸送至磨料儲放槽108內。 【第5實施形態】 其次，根據圖12說明本發明之第5實施形態如 下。 該第5實施形態係表示上述第4實施形態分離 裝置100之變化例。圖12所示，該第5實施形態之 分離裝置100爲橫向配置。具體而言，過濾器102係 配設於容器101內，而可將容器101內部左右劃分爲 第1室1〇3及第2室104。供應廢漿液至第1室103 之配管T5是連接在容器101的外周圍上部。從第1 室1〇3排出含有磨料之廢漿液的配管T1 00係連接於 容器101之外周圍下部。 該第5實施形態中，雖是利用泵P5經由第1室 1〇3而將廢漿液儲放槽5送出之廢漿液壓送至配管 T100，但是亦可藉其本身重量將廢漿液朝著配管 T 100推出。 【第6實施形態】 其次，根據圖13說明本發明第6實施形態如 下。 該第.6實施形態係表示上述第4實施形態分離 裝置100之變化例。圖13所示，該第6實施形態之 分離裝置1 〇〇係藉由配管T5及從該配管T5分支設置 本纸伕尺度適用中國國家標孪（CNS > A4規格（210X297公釐） ^n. I I In I- -I i.— Ill— in-4- i - - - n (請先閱讀背面之注意事項再填寫本頁) 311103 . A7 ______B7_ 五、發明説明（厂/ ) 之配管T61構成裝置本體__。過濾器102係配置於配管 T61的中途β超音波振盪器106爲在配管T5內與過 濾器102相對配置者。配管Τ5之配管Τ61的連接部 下游側構成可排出磨料之配管Τ100。配管Τ5之配管 Τ61的連接部上游側構成第1室103。配管Τ61之過 濾器102之上游側構成第2室104。 利用泵Ρ5將廢漿液中的分散液及微粒成份送出 至配管Τ5時，廢漿液中之分散液及微粒成份是利用 泵Ρ61經過濾器102流入配管Τ61。含有磨料廢漿液 是從配管Τ1 00排出。 【第7實施形態】 其次，根據圖14說明本發明第7實施形態如 下。 該第7實施形態是表示上述第4實施形態分離 裝置1〇〇之變化例。如圖14所示，該第7實施形態 之分離裝置1〇〇是被配置在廢漿液儲放槽5的下 方。連接廢漿液儲放槽5與分離裝置1〇〇之配管Τ5 是朝著分離裝置1〇〇而向下傾斜。與該配管Τ5同樣 傾斜設置配管Τ100、第1室103的底面、超音波振 盪106及過濾器102。 經濟部中央標準局員工消費合作社印製 1. ! ·- I —l·— nn m I —1 I—il I —1— J-OJ (請先閱讀背面之注意事項再填寫本頁) 廢漿液儲放槽5送出之廢漿液是利用其本身重 量經由配管Τ5而流入第1室103內，同時從第1室 103排出配管Τ100。此外，同時可利用泵Ρ5將廢漿 液經由第1室103送出至配管Τ100。 【第8實施形態】 本紙張·尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 經濟部中央標準局員工消費合作社印製 A7 B7 五、發明説明（2_它） 其次，根據圖1 5說"明本發明第8實施形態如 下。 該第8實施形態爲上述第6實施形態之分離裝 置1〇〇的構成與上述第7實施形態分離裝置1〇〇之構 成所組合而成。如圖15所示，該第8實施形態之分 離裝置1〇〇基本上具有與第6實施形態相同的構 造。與第6實施形態不同的點是將配管T5從廢漿液 儲放槽5朝著分離裝置100向下傾斜配置。從廢漿液 儲放槽5送出的廢漿液由於其本身重量經配管T5而 流入第1室103之內，同時由第1室103從配管T100 排出，此一方面，該第8實施形態係與第7實施形態 相同。 【第9實施形態】 其次，根據圖16〜圖18說明本發明第9實施形 態如下。該第9實施形態中，有關上述第1實施形態 相同構件賦予相同號碼而簡化其說明。 線狀鋸在切割時會使漿液飛散，而使得包含在漿 液中的磨料附著於線狀鋸各部。因此，可以淸洗液定 期淸洗線狀鋸。但是，附著在線狀鋸各部的磨料在淸 洗時會與淸洗液同時丟棄。因此，必須追加與廢棄量 相同之磨料，以致使切割時所使用之磨料量增加。且 由於磨料價昂，在大量使用磨料時會造成運轉費用的 增加。 因此，該第9實施形態是可從線狀鋸淸洗時的淸 洗液中回收磨料，而可將回收之磨料使用於切割者。 本纸伕尺度適用中國國家標準（CNS ) A4規格（2丨0>< 297公釐） I--------:木-- (請先閲讀背面之注意事項再填寫本頁) 訂 經濟部中央標準局員工消費合作社印製 、發明説明（1) 如圖I6所示，供應磨料至'調合槽2內之漏斗21係經 由包含螺旋式進給機21a、及閥V21之配管T21而連 接在調合機2上。供應分散液至調合槽2內的分散液 槽22，是經由包含閥V22之配管T22而連接調合槽 2。分散液是例如使用水系物者。該分散液是在水中 添加可促使磨料分散之預定的分散劑所形成。比重計 S1及黏度計S2係配置於調合槽2內》控制器C1是 根據比重計S1及黏度計S2之檢測値，輸出開啓量之 指令信號至控制閥V21、V22。 調合槽2是經由具有閥V2的配管T2連接在線 狀鋸W之漿液槽45。並且，亦可設置複數台之線狀 鋸。又，線狀鋸W基本上具有與第1實施形態的各線 狀鋸W1〜W4相同之構造，因此與第1實施形態相 同之構件賦予相同的號碼》 如圖17及圖18所示，線狀鋸W具有固定在框體 〔未圖示〕的一對支持單元133。各支持單元133具 有三個支持構件133a、133b、133c。線狀鋸W的3 個輥42a、42b、42c在兩支持單元133之間，藉各 個支持構件1 3 3 a、1 3 3 b、1 3 3 c可自由轉動地支持其 間。將驅動軸133d設置於一側支持單元133的一個 支持構件133b上，並連結於支持在支持構件133b上 之輥42b上。輥42b是利用電動機〔未圖示〕藉驅動 軸1 3 3 d而轉動。輥.42b的轉動是經由金屬線40傳達 至其他輥42a' 42c所成者。 接受淸洗液之承接板135a是朝著線狀鋸W背側 29 本紙乐尺度適用中國國家標準（CNS ) A4規格（2丨0 X 297公釐） I. m 1 . m - - -- -I I I I- I— - - - I I - 丁 ^-4口 (請先聞讀背面之注意事項再填寫本頁) S11108 A7 ____B7_ 五、發明説明（七0) 〔圖18左側〕向下傾斜’配置在支持單元133的下 方。承接板135a的兩側部爲朝上方彎折而成，其彎 折部上面係形成水平。一對遮蔽件134是可朝著水平 方向自由滑動支持在承接.板135a的各個彎曲部上 面。線狀鋸W兩側配置有可從外側覆蓋支持單元133 之遮蔽件134 » 前面板13 5b設有例如可自由開關之承接板135a 之前面側。背面板13 5c係配置於承接板13 5a之背面 側。背面板135c垂直方向的長度與遮蔽件13相同。 又，使背面板135c的上面配置與遮蔽件134上面相 同的高度。淸洗液排出用開口 135d係形成於背面板 135c與承接板135a之間》遮蔽件134、承接板135a、 前面板135b及背面板135c包圍著線狀鋸W之加工領 域。 一對淸洗管136被配置在遮蔽件134上方》在各 淸洗管136下部形成有噴出淸洗液的孔〔未圖 示〕。漿液槽45形成可承接從開口 135d排出之淸洗 液。漿液槽45內的漿液或淸洗液是經配管T4 1排出 至廢漿液儲存槽5或後述之清洗液儲放槽137。 經濟部中央標準局員工消費合作社印製 .I - . - I - J - I - - -- i 皮衣 - -I - I! - - - II (請先閱讀背面之注意事項再填寫本頁) 如圖16所示，配管T41具有連接漿液槽45的一 個入口、及分別連接廢漿液儲放槽5及淸洗液儲放槽 137的2個出口。在配管T41中途設有對應廢漿液儲 放槽5的閥V41 、及對應淸洗液儲放槽137的閥 V42。淸洗液儲放槽Π7具有攪拌機137a。廢漿液儲 放槽5是經由包含閥V5之配管T5連接在構成第1 本紙伕尺度適用中國國家標準（CNS) A4規格（210X297公釐） 經濟部中央標準局員工消費合作社印製 A7 ____B7_ 五、發明説明（士I) 分離回收裝置之傾注器6”上》同樣地，淸洗液儲放槽 137是經包含閥V137的配管ΤΠ7連接在傾注器6 上。該傾注器6具有例如與上述第1實施形態相同之 構成。淸洗液儲放槽137則是經由具有閥V138及泵 P138之配管T13 8而連接淸洗管136。 傾注器6之磨料排出口 6 1 a是經第1配管T6連 接調合槽2。第1配管T6可將傾注器6所回收之磨 料運送至調合槽2內。傾注器6之排出口 61b係藉由 具有泵P61之配管T61連接構成第2分離回收裝置之 過濾器7。該過濾器7爲例如與上述第1實施形態相 同之構成。過濾器7是經由具有閥V7之第2配管T7 而連接於第1配管T6的中途。第2配管T7可將過濾 器7回收之分散液的一部份運送至調合槽2。此外， 亦可使用旋風式分離機作爲第1分離回收裝置。又， 也可使用傾注器作爲第2分離回收裝置》 配管T71具有連接第2配管T2中途之入口、及 連接分散液儲放槽139之出口。配管T72具有連接配 管T71中途的入口》在配管T72的中途配置有閥 V72。 其次，說明該第9實施形態之動作如下》此外， 此係使用水系之分散液》 首先，與上述第1實施形態相同，在調合槽2中 調合漿液。且調合槽2中調合之漿液中磨料與分散液 的混合重量比爲設定在與上述第1實施形態相同的 範圍內。所調合的漿液可隨著閥V2的開啓送至線狀 本纸伕尺度適用中國國家標準（CN’S ) A4規格（210X 297公釐） . m il I l— - - - -- - Λ HI n· HI I— -i— a^n t (請先閲讀背面之注意事項再填寫本頁) 經濟部中央標準局員工消費合作社印製 A7 _____ _B7 _ 五、發明説明 鋸W之漿液槽45 » : 線狀鋸W可進行與上述第1實施形態相同之工 件46的切割。具體而言，在開啓閥V4的同時關閉閥 V2、V41 ' V42,使漿液槽45內的漿液經供應管43 供應至金屬線群41。在此狀態下，隨著工件46的下 降可藉金屬線群41切割工件46而可同時形成多數片 之晶片。 依預定次數進行工件46之切割時，與上述第1 實施形態相同，可進行漿液槽45中漿液的部份更 換，使漿液槽45內的漿液更新。 從線狀鋸W之漿液槽45排出的廢漿液一旦儲存 在廢漿液儲放槽5之後被送至傾注器6。傾注器6可 自廢漿液中分離較磨料細小之微粒成份及分散液，並 可將磨料回收。回收之磨料被送至第1配管T6。包 含微粒成份之分散液是經由配管T61被送至過濾器 7。過濾器7可從含有微粒成份的分散液中分離微粒 成份而回收分散液。回收之分散液的一部份是隨著閥 V7的開啓與閥V71、V72的關閉，而經由第2配管 T7及配管T6與磨料同時被運送至調合槽2內。剩餘 的分散液係藉著閥V71的開啓及閥V7、V72的關 閉，而經由配管T71被運送至分散液儲放槽139內。 在工件46之切割時，漿液會朝著遮蔽件13 4、 承接板135a、前面板135b、背面板135c的各內面、 或支持單元133、輥42a〜42c飛散。飛散之漿液隨 著時間的經過而乾燥，使漿液中所包含之磨料附著在 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） (請先閲讀背面之注意事項再填寫本頁)SlU〇8 A7 --------- B7_ V. Description of the invention (4) The detection value of the gauge S 1 and the viscometer S2 The opening amount of the control valves V21 and V22 'can be used to adjust the abrasive supply from the hopper 21 The amount and supply of the dispersion liquid in the dispersion liquid tank 22. As a result, according to the mixing weight ratio of the abrasive and the dispersion liquid in the slurry prepared by the mixing tank 2, when the dispersion liquid is an oil system, it is adjusted within the range of 1: 0.191 to 1: 0.6, and when the dispersion liquid is an aqueous system, it is adjusted to 1: Within the range of 0.76 to 1 ·· 0.5. As in the fourth embodiment described above, when separating the particulate component from the waste slurry, the filter 102 is vibrated by the ultrasonic wave emitted from the ultrasonic oscillator 106. Therefore, clogging of the filter 102 can be suppressed, and a reduction in the filtering effect of the filter 102 can be prevented. As mentioned above, even when a slurry with a high viscosity is used, the particulate component can be quickly and effectively separated and the abrasive can be recovered. The separation device 100 is mainly composed of a container 101, a filter 102, and an ultrasonic oscillator 106. The separator 100 as described above has a simple structure as compared with the pourer of the first embodiment described above, and the manufacturing cost is relatively cheap. Therefore, the manufacturing cost of the entire processing system can be reduced. Adjust the size of the filter hole of the filter 102, or the flow rate of the dispersion liquid through the filter 102, etc., can be used in various processing systems such as the size of the time scale, the amount of processing, or the scale of processing. The design of the system itself is also Easier. Other functions and effects are the same as those in the first to third embodiments. The ultrasonic oscillator 106 can separate the particulate component from the waste slurry and can be operated continuously or intermittently during the treatment. The waste slurry is stored in the waste slurry storage tank 5, piping Τ5, separation device. The paper size is applicable to the Chinese National Standard (CNS) Α4 specification (210Χ 297 mm) (please read the precautions on the back and fill in this page). Printed by the Central Standards Bureau employee consumer cooperative A7 ---- —_ B7 V. Description of the invention (^) The circulation time in the exhausted circulation path formed by 100 and piping T100 can correspond to the recovery rate of the target abrasive particles or the content of the particulate component Wait for appropriate changes. Alternatively, it is not necessary to return the waste slurry containing abrasive particles to the waste slurry storage tank 5 and directly transfer it to the abrasive storage tank 108. [Fifth Embodiment] Next, a fifth embodiment of the present invention will be described with reference to Fig. 12 as follows. The fifth embodiment shows a modification of the separation device 100 of the fourth embodiment. As shown in Fig. 12, the separation device 100 of the fifth embodiment is arranged laterally. Specifically, the filter 102 is disposed in the container 101, and the inside of the container 101 can be divided into the first chamber 103 and the second chamber 104 on the left and right. The piping T5 for supplying the waste slurry to the first chamber 103 is connected to the outer upper part of the container 101. A pipe T100 which discharges the waste slurry containing abrasives from the first chamber 103 is connected to the lower part of the outer periphery of the container 101. In the fifth embodiment, although the waste slurry sent from the waste slurry storage tank 5 is hydraulically sent to the piping T100 by the pump P5 through the first chamber 103, the waste slurry can also be directed toward the piping by its own weight The T 100 is launched. [Sixth Embodiment] Next, a sixth embodiment of the present invention will be described with reference to Fig. 13 as follows. This .6th embodiment shows a modification of the separation device 100 of the above-mentioned 4th embodiment. As shown in FIG. 13, the separation device 100 of the sixth embodiment is set by piping T5 and branching from the piping T5. The paper size is applicable to the Chinese National Standard (CNS & A4 specifications (210X297 mm) ^ n . II In I- -I i.— Ill— in-4- i---n (please read the precautions on the back before filling in this page) 311103. A7 ______B7_ V. Composition of the invention description (factory /) piping T61 Device body__. The filter 102 is arranged in the middle of the pipe T61. The β-ultrasonic oscillator 106 is arranged opposite to the filter 102 in the pipe T5. The downstream side of the connection part of the pipe T61 of the pipe T5 constitutes a pipe that can discharge abrasives Τ100. The upstream side of the connection part of the piping T61 of the piping T5 constitutes the first chamber 103. The upstream side of the filter 102 of the piping T61 constitutes the second chamber 104. The pump P5 is used to send the dispersion and particulate components in the waste slurry to the piping T5 At this time, the dispersion and particulate components in the waste slurry are pumped into the pipe T61 through the filter 102 through the filter P61. The waste slurry containing abrasive is discharged from the pipe T100. [Seventh Embodiment] Next, the seventh embodiment of the present invention will be described based on FIG. The form is as follows. The 7th The application form is a variation of the separation device 100 of the fourth embodiment described above. As shown in FIG. 14, the separation device 100 of the seventh embodiment is arranged below the waste slurry storage tank 5. Connection waste The piping T5 of the slurry storage tank 5 and the separating device 100 is inclined downward toward the separating device 100. The piping T100, the bottom surface of the first chamber 103, the ultrasonic oscillation 106, and the filter are inclined at the same angle as the piping T5器 102. Printed by the Employee Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs 1.!-I —l · — nn m I —1 I—il I —1— J-OJ (Please read the precautions on the back before filling this page ) The waste slurry sent from the waste slurry storage tank 5 flows into the first chamber 103 through the pipe Τ5 by its own weight, and is discharged from the first chamber 103 at the same time. The pipe Τ100 can also be used to pump the waste slurry through the first Room 103 is sent to the piping Τ100. [Eighth Embodiment] This paper and standard are applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm). The A7 B7 is printed by the Employee Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs. 5. Description of the invention (2_ It) Secondly, according to Figure 15 " The eighth embodiment of the present invention is as follows. This eighth embodiment is a combination of the configuration of the separation device 100 of the sixth embodiment described above and the configuration of the separation device 100 of the seventh embodiment described above. As shown in FIG. 15 The separation device 100 of the eighth embodiment basically has the same structure as the sixth embodiment. The difference from the sixth embodiment is that the piping T5 is directed downward from the waste slurry storage tank 5 toward the separation device 100 Tilt configuration. The waste slurry sent from the waste slurry storage tank 5 flows into the first chamber 103 through the pipe T5 due to its own weight, and is discharged from the pipe T100 from the first chamber 103. On the one hand, the eighth embodiment is different from the first 7 The embodiment is the same. [Ninth Embodiment] Next, a ninth embodiment of the present invention will be described based on FIGS. 16 to 18 as follows. In this ninth embodiment, the same members are given the same numbers in relation to the above-mentioned first embodiment, and their explanations are simplified. When the linear saw cuts, the slurry will be scattered, and the abrasive contained in the slurry will adhere to each part of the linear saw. Therefore, the linear saw can be washed regularly with the washing liquid. However, the abrasive attached to each part of the linear saw is discarded at the same time as the washing liquid during washing. Therefore, it is necessary to add the same amount of abrasive as the discarded amount, so that the amount of abrasive used during cutting increases. Moreover, due to the high price of abrasives, the operating costs will increase when a large amount of abrasives are used. Therefore, in the ninth embodiment, the abrasive can be recovered from the washing liquid during the washing of the linear saw, and the recovered abrasive can be used by the cutter. The paper scale is applicable to the Chinese National Standard (CNS) A4 specification (2 丨 0> <297mm) I --------: Wood-- (Please read the precautions on the back before filling this page) Printed and invented by the Employees Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs (1) As shown in Figure I6, the funnel 21 that supplies abrasive to the mixing tank 2 is passed through a piping T21 including a screw feeder 21a and a valve V21 And connected to the blending machine 2. The dispersion liquid tank 22 which supplies the dispersion liquid to the mixing tank 2 is connected to the mixing tank 2 via a pipe T22 including a valve V22. The dispersion liquid is, for example, a person using an aqueous system. The dispersion is formed by adding a predetermined dispersant in water to promote the dispersion of the abrasive. The hydrometer S1 and the viscometer S2 are arranged in the mixing tank 2. The controller C1 outputs the command signal of the opening amount to the control valves V21 and V22 according to the detection values of the hydrometer S1 and the viscometer S2. The mixing tank 2 is a slurry tank 45 connected to the linear saw W via a pipe T2 having a valve V2. In addition, multiple linear saws can also be installed. Moreover, the linear saw W basically has the same structure as the linear saws W1 to W4 of the first embodiment, and therefore the same members as the first embodiment are given the same numbers. As shown in FIGS. 17 and 18, the linear The saw W has a pair of support units 133 fixed to a frame [not shown]. Each supporting unit 133 has three supporting members 133a, 133b, and 133c. The three rollers 42a, 42b, 42c of the linear saw W are supported between the two support units 133, and each support member 1 3 3 a, 1 3 3 b, 1 3 3 c is rotatably supported therebetween. The drive shaft 133d is provided on one support member 133b of the one-side support unit 133, and is connected to the roller 42b supported on the support member 133b. The roller 42b is rotated by a drive shaft 1 3 3 d by a motor (not shown). The rotation of the roller 42b is transmitted to the other rollers 42a ′ 42c via the wire 40. The receiving plate 135a that accepts the washing solution is directed toward the back of the linear saw W. 29 This paper music scale applies the Chinese National Standard (CNS) A4 specification (2 丨 0 X 297 mm) I. m 1. m---- III I- I—---II-Ding ^ -4 (please read the precautions on the back and then fill in this page) S11108 A7 ____B7_ 5. Description of the invention (seven 0) [left side of figure 18] tilt down configuration Below the support unit 133. Both sides of the receiving plate 135a are bent upward, and the upper surface of the bent portion is horizontal. A pair of shielding members 134 is freely slidably supported in the horizontal direction on each curved portion of the receiving plate 135a. On both sides of the linear saw W, a shield 134 that can cover the support unit 133 from the outside is arranged. »The front panel 135b is provided with, for example, a front side of a receiving plate 135a that can be freely opened and closed. The back plate 135c is arranged on the back side of the receiving plate 135a. The length of the back plate 135c in the vertical direction is the same as that of the shield 13. Also, the upper surface of the back plate 135c is arranged at the same height as the upper surface of the shield 134. The opening 135d for discharging the washing liquid is formed between the back plate 135c and the receiving plate 135a, the shield 134, the receiving plate 135a, the front plate 135b, and the back plate 135c surround the processing area of the linear saw W. A pair of rubbing tubes 136 are arranged above the shielding member 134. A hole for spraying the rubbing liquid is formed in the lower portion of each rubbing tube 136 [not shown]. The slurry tank 45 is formed to receive the washing liquid discharged from the opening 135d. The slurry or washing liquid in the slurry tank 45 is discharged to the waste slurry storage tank 5 or the cleaning liquid storage tank 137 described later via the pipe T41. Printed by the Employee Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs. I-.-I-J-I---i Leather--I-I!---II (Please read the precautions on the back before filling this page) As shown in FIG. 16, the piping T41 has one inlet connected to the slurry tank 45, and two outlets connected to the waste slurry storage tank 5 and the washing liquid storage tank 137, respectively. A valve V41 corresponding to the waste slurry storage tank 5 and a valve V42 corresponding to the washing liquid storage tank 137 are provided in the middle of the piping T41. The washing liquid storage tank Π7 has a stirrer 137a. The waste slurry storage tank 5 is connected through the piping T5 including the valve V5 to form the first paper sheet standard. The Chinese National Standard (CNS) A4 specification (210X297 mm) is printed by the Ministry of Economy Central Standards Bureau Employee Consumer Cooperative A7 ____B7_ V. DESCRIPTION OF THE INVENTION (± I) On the pourer 6 ″ of the separation and recovery device Similarly, the wash liquid storage tank 137 is connected to the pourer 6 via the piping ΤΠ7 including the valve V137. The pourer 6 has, for example, the 1. The configuration of the embodiment is the same. The washing liquid storage tank 137 is connected to the washing tube 136 via a pipe T138 having a valve V138 and a pump P138. The abrasive discharge port 6 1 a of the pourer 6 passes through the first pipe T6 Connected to the mixing tank 2. The first pipe T6 can transport the abrasive recovered by the pourer 6 to the mixing tank 2. The discharge port 61b of the pourer 6 is connected to the pipe T61 with the pump P61 to constitute the filtration of the second separation and recovery device 7. The filter 7 has the same structure as the first embodiment described above. The filter 7 is connected to the middle of the first pipe T6 via the second pipe T7 having the valve V7. The second pipe T7 can connect the filter 7 Part of the recovered dispersion To the mixing tank 2. In addition, a cyclone separator can be used as the first separation and recovery device. In addition, a decanter can also be used as the second separation and recovery device. The piping T71 has an inlet for connecting the second piping T2, and the connection is dispersed The outlet of the liquid storage tank 139. The pipe T72 has an inlet for connecting the pipe T71 halfway. A valve V72 is arranged halfway in the pipe T72. Next, the operation of the ninth embodiment will be described as follows. First, as in the above-mentioned first embodiment, the slurry is mixed in the mixing tank 2. The mixing weight ratio of the abrasive and the dispersion liquid in the slurry mixed in the mixing tank 2 is set in the same range as the above-mentioned first embodiment. The mixed slurry can be sent to the linear paper with the opening of valve V2. The standard is applicable to the Chinese national standard (CN'S) A4 specification (210X 297 mm). M il I l—-----Λ HI n · HI I— -i— a ^ nt (Please read the precautions on the back before filling out this page) A7 _____ _B7 _ printed by the Employee Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs V. Slurry tank 45 of the invention description saw W »: linear saw W can The workpiece 46 is cut in the same manner as in the first embodiment described above. Specifically, the valves V2 and V41'V42 are closed while the valve V4 is opened, and the slurry in the slurry tank 45 is supplied to the wire group 41 through the supply pipe 43. In this state, as the workpiece 46 descends, the workpiece 46 can be cut by the wire group 41 to form a plurality of wafers at the same time. When the workpiece 46 is cut a predetermined number of times, it is the same as the first embodiment above, and slurry can be processed Part of the slurry in the tank 45 is replaced, so that the slurry in the slurry tank 45 is renewed. Once the waste slurry discharged from the slurry tank 45 of the linear saw W is stored in the waste slurry storage tank 5, it is sent to the pourer 6. The pourer 6 can separate finer particle components and dispersion liquid from the waste slurry, and can recover the abrasive. The recovered abrasive is sent to the first pipe T6. The dispersion liquid containing the particulate component is sent to the filter 7 through the pipe T61. The filter 7 can separate the particulate component from the dispersion containing the particulate component to recover the dispersion. A part of the recovered dispersion liquid is transported into the mixing tank 2 through the second pipe T7 and the pipe T6 together with the abrasive as the valve V7 is opened and the valves V71 and V72 are closed. The remaining dispersion liquid is transferred into the dispersion liquid storage tank 139 via the pipe T71 by opening the valve V71 and closing the valves V7 and V72. When the workpiece 46 is cut, the slurry will scatter toward the shielding member 134, the receiving plate 135a, the front panel 135b, the back panel 135c, the support unit 133, and the rollers 42a to 42c. The scattered slurry dries over time, so that the abrasive contained in the slurry adheres to this paper. The Chinese National Standard (CNS) A4 specification (210X297mm) is applicable to this paper (please read the precautions on the back before filling this page)
311108 A7 ___________ B7 _ 五、發明説明（七\) H冓件上。磨料是隨切割^進行附著而逐漸堆積。因 比匕’定期的’例如每進行預定的切割次數後，進行線 狀鋸W的淸洗。 具體而言，在開啓閥V42 ' VI38的同時，關閉 閥V2、V4、V41。於此狀態下，淸洗液儲放槽137 之淸洗液〔例如水〕是利用泵P 1 3 8經配管T 1 3 8而運 送至淸洗管I36。水是從淸洗管136朝著遮蔽件134 等的內面、或支持單元133、輥42a〜42c等呈淋浴 狀噴出’可沖洗附著在該等構件上的磨料。 經濟部中央標準局員工消費合作社印製 · I I - - -1- - - n 1 1^1 - l-r . - -1 - -in s (請先閲讀背面之注意事項再填寫本頁) 沖洗後的磨料與淸洗液同時流入承接板135a 上。含有磨料的淸洗液係沿著承接板135a的斜面， 經開口 135d回收至漿液槽45內。漿液槽45所回收 的淸洗液是經由配管T41回收至淸洗液儲放槽137。 淸洗液儲放槽137內淸洗液的量一旦達到預定量 時，開放閥V137而可將淸洗液儲放槽137內的淸洗 液送至傾注器6內。傾注器6可從清洗液中分離較磨 料細小之微粒成份及淸洗液，而回收磨料。回收之磨 料被送至第1配管T6。含有微粒成份之淸洗液是經 由配管T61傳送至過濾器7。過濾器7可從含微粒成 份之淸洗液中分離微粒成份後回收清洗液。藉由閥 V7的開放，並關閉閥V71、V72，回收之淸洗液的 —部份〔例如，運送第1配管T6中之磨料所須的淸 洗液量〕。藉此，可經第2配管T7運送至第1配管 T6。因此，第1配管T6內的磨料與淸洗液同時被運 送至調合槽2內》而剩餘的淸洗液則是藉著閥V72 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 經濟部中央標準局貝工消費合作社印製 A7 ______B7_ 五、發明説明牛） 的開啓並關閉閥V71、V’72而從配管T72排出。 如上述，交替重覆處理工件46的切割與線狀鋸 W的淸洗處理，在各個處理過程中可回收磨料，並運 送至調合槽2內。在調合槽2中混合運送來之磨料與 分散液或淸洗液，及將新供應之磨粒與分散液調合新 的漿液。此時，調合槽2與上述第1實施形態相同， 皆是根據比重計S1及黏度計S2的檢測値，控制閥 V21、V22的開啓量，可藉此調節漏斗21之磨料供 應量及分散液槽22之分散液的供應量。其結果，如 本實施形態之分散液爲水系時，可將調合槽2所調合 之漿液中磨料與分散液的混合重量.比調節在1 : 〇_76至1 : 0.5的範圍內。 如使用水系物作爲漿液之分散液時，附著在遮蔽 件Π4等的磨料可利用淸洗液的水簡單沖洗。又，在 線狀鋸W中漿液所飛散之區域則可輕易地限制區域 內進行。此外，由於是使用水作爲淸洗液，因此淸洗 液的成本低廉。水系分散液所形成的漿液較油系分散 液所形成的漿液容易飛散，且磨料因乾燥而容易附著 在各部位上。但是，使用水系分散液在淸洗上較爲容 易。 可從線狀館W淸洗後之淸洗液回收磨料，並可 將其磨料再使用於工件46的切割。因此會降低切割 處理時所須的成本。同時可在遮蔽件134等限制漿液 的飛散區域內進行淸洗，並回收附著在其飛散區域內 各部位的磨料，因此磨料之回收率高。作爲淸洗液所 本紙伕尺度適用中國國家標準（CNS ) A4規格（21〇X 297公釐） II. ^^^1 l.n 1· I In I m In 一WJ - (請先閲讀背面之注意事項再填寫本頁) A7 -------B7___ 五、發明説明 使用的水爲分散液的主要成份。因此可利用淸洗液將 傾注器6所回收之磨料運送至調合槽2內。 上述第9實施形態也可運用在油系構成之漿液 中。此時，例如使用機油作爲淸洗液而藉機油進行線 狀鋸W的淸洗。淸洗後，將混入機油中的磨料藉傾注 器6回收，並利用分散液運送至調合槽2內。此時， 同樣在"切割時不能回收之價昂的磨料可從淸洗液中 回收而可降低運轉費用。此外，在使用油系分散液所 構成之漿液時，將調合槽2所調合之漿液中磨料與分 散液之混合重量比調節在1 : 0.91至1 : 0.6的範圍 內。 亦可自淸洗液中僅回收磨料而運送至調合槽 2。或可以將淸洗液中回收的磨料儲放後運送至調合 槽2內》311108 A7 ___________ B7 _ Fifth, the description of the invention (seven \) H 冓 件. The abrasive is gradually accumulated as the cutting attaches. For example, every time a predetermined number of cuts is performed, the linear saw W is washed. Specifically, while the valves V42'VI38 are opened, the valves V2, V4, V41 are closed. In this state, the washing liquid (for example, water) of the washing liquid storage tank 137 is transported to the washing line I36 via the piping T 1 3 8 by the pump P 1 3 8. Water is sprayed from the washing tube 136 toward the inner surface of the shield 134 or the like, or the supporting unit 133, the rollers 42a to 42c and the like in a shower form, and the abrasives adhering to these members can be washed away. Printed by the Staff Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs · II---1---n 1 1 ^ 1-lr.--1--in s (please read the precautions on the back before filling out this page) The abrasive and the washing liquid flow into the receiving plate 135a at the same time. The washing liquid containing abrasives is recovered into the slurry tank 45 through the opening 135d along the inclined surface of the receiving plate 135a. The washing liquid recovered by the slurry tank 45 is recovered to the washing liquid storage tank 137 via the pipe T41. Once the amount of the washing liquid in the washing liquid storage tank 137 reaches a predetermined amount, the valve V137 is opened to send the washing liquid in the washing liquid storage tank 137 to the pourer 6. The pourer 6 can separate the finer particulate components and the washing liquid from the cleaning liquid, and recover the abrasive. The recovered abrasive is sent to the first pipe T6. The washing liquid containing particulate components is transferred to the filter 7 through the pipe T61. The filter 7 can separate the particulate component from the cleaning liquid containing the particulate component and recover the cleaning liquid. By opening the valve V7 and closing the valves V71 and V72, part of the recovered washing liquid [for example, the amount of washing liquid required to transport the abrasive in the first pipe T6]. By this, it can be transported to the first pipe T6 via the second pipe T7. Therefore, the abrasive and the washing liquid in the first pipe T6 are transported to the mixing tank 2 at the same time "and the remaining washing liquid is through the valve V72. The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm ) The A7 ______B7_ printed by the Beigong Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs 5. Opening and closing the valves V71, V'72 and discharged from the piping T72. As described above, the cutting of the workpiece 46 and the washing process of the linear saw W are alternately repeated, and the abrasive can be recovered and transported into the mixing tank 2 in each process. In the mixing tank 2, the transferred abrasive and dispersion liquid or washing liquid are mixed, and the newly supplied abrasive particles and dispersion liquid are mixed into a new slurry. At this time, the mixing tank 2 is the same as the first embodiment described above, and the opening amounts of the valves V21 and V22 are controlled based on the detection values of the hydrometer S1 and the viscometer S2, whereby the abrasive supply amount and dispersion liquid of the funnel 21 can be adjusted The supply amount of the dispersion liquid in the tank 22. As a result, if the dispersion liquid of the present embodiment is an aqueous system, the mixing weight of the abrasive and the dispersion liquid in the slurry prepared by the mixing tank 2 can be adjusted in the range of 1: 〇_76 to 1: 0.5. If an aqueous material is used as the dispersion of the slurry, the abrasive attached to the shield Π4 etc. can be simply rinsed with the water of the washing liquid. In addition, the area where the slurry is scattered in the linear saw W can be easily restricted to the area. In addition, since water is used as the washing liquid, the cost of the washing liquid is low. The slurry formed by the aqueous dispersion is easier to scatter than the slurry formed by the oil dispersion, and the abrasive is easily attached to various parts due to drying. However, it is easier to use an aqueous dispersion for washing. The abrasive can be recovered from the washing liquid after washing in the thread-like building W, and the abrasive can be reused for cutting the workpiece 46. Therefore, the cost required for the cutting process will be reduced. At the same time, it can be washed in the scattering area where the slurry is restricted, such as the shielding member 134, and the abrasive attached to each part in the scattering area can be recovered, so the recovery rate of the abrasive is high. As the paper size of the lotion liquid, the Chinese national standard (CNS) A4 specification (21〇X 297 mm) is applicable. II. ^^^ 1 ln 1 · I In I m In One WJ-(Please read the notes on the back first (Fill in this page again) A7 ------- B7___ 5. Description of the invention The water used is the main component of the dispersion. Therefore, the washing liquid can be used to transport the abrasive recovered by the pourer 6 to the mixing tank 2. The ninth embodiment described above can also be applied to an oil-based slurry. At this time, for example, engine oil is used as a washing liquid, and the washing of the linear saw W is carried out by using the engine oil. After washing, the abrasive mixed in the engine oil is recovered by the pourer 6, and transferred to the mixing tank 2 using the dispersion liquid. At this time, the expensive abrasive which cannot be recovered at the time of "cutting" can be recovered from the washing liquid to reduce the operation cost. In addition, when the slurry composed of the oil-based dispersion liquid is used, the mixing weight ratio of the abrasive and the dispersion liquid in the slurry prepared in the mixing tank 2 is adjusted in the range of 1: 0.91 to 1: 0.6. It is also possible to recover only abrasive from the washing liquid and transport it to the mixing tank 2. Or you can store the abrasive recovered in the washing liquid and transport it to the mixing tank 2》
In' {1 nn n^— n. —^m 1^1 ml m^——OJn^l· (請先閲讀背面之注意事項再填寫本頁) 經濟部中央標準局員工消費合作社印製 5 3 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐）In '{1 nn n ^ — n. — ^ M 1 ^ 1 ml m ^ —— OJn ^ l · (please read the precautions on the back before filling out this page) Printed by Employee Consumer Cooperative of Central Bureau of Standards, Ministry of Economic Affairs 5 3 This paper scale is applicable to China National Standard (CNS) A4 specification (210X297mm)