A7 B7 % h. t 五、發明説明 ( 1 ) 1 1 | I 發 明 範 圍 1 1 1 本 項 發 明 是 有 醞 於 —‘ 種 用 於 運 送 不 同 物 品 的 卡 匣 0 更 1 | 請 I 特 別 之 處 為 本 項 發 明 是 有 關 於 特 別 被 用 來 保 存 晶 圓 、 精 密 先 Μ 1 I 讀 1 | 記 憶 磁 碟 片 平 板 顯 示 器 液 晶 顯 示 器 或 光 罩 的 卡 匣 0 本 背 A 1 I 之 1 項 發 明 所 特 有 的 優 點 是 能 夠 保 存 例 如 直 徑 大 小 為 300 咖 或 注 意 1 1 300 KUD 以 上 之 晶 圓 的 大 型 物 品 〇 然 而 依 昭 本 項 發 明 所 製 做 事 項 I 再 1 1 出 來 的 卡 匣 亦 被 用 來 保 存 較 小 型 物 品 0 寫 本 I 先 刖 技 術 之 描 述 頁 1 I 在 先 刖 技 術 中 已 有 許 多 種 不 同 的 容 器 被 用 來 保 存 矽 晶 1 1 圓 精 密 記 憶 磁 碟 片 > 平 板 顯 示 器 \ 液 晶 顯 示 器 Μ 及 其 他 1 類 似 元 件 0 由 於 >Χ 上 元 件 非 常 易 碎 這 些 元 件 在 製 造 設 備 1 訂 內 從 某 一 位 置 運 送 至 另 位 置 的 過 程 中 必 須 被 保 護 0 將 1 1 上 述 之 元 件 裝 入 保 護 用 卡 匣 已 被 證 明 是 一 種 能 夠 提 供 保 護 1 1 作 用 的 有 效 方 式 〇 1 | 早 期 所 用 之 卡 匣 的 重 量 較 重 體 積 m 大 且 價 格 昂 贵 0 1 另 外 埴 些 早 期 所 使 用 之 卡 匣 亦 無 法 完 全 遴 應 其 產 生 作 用 1 的 環 境 〇 在 此 種 使 用 環 境 中 所 生 成 的 高 埶 和 嚴 苛 之 化 學 物 1 1 霣 通 常 會 劣 化 先 刖 技 術 所 採 用 的 卡 匣 導 致 這 些 卡 匣 在 加 1 | 工 過 程 中 產 生 彎 曲 Λ 褶 縮 、 歪 斜 或 是 甚 至 破 損 〇 以 上 這 1 I 些 卡 匣 所 產 生 的 損 害 通 常 會 破 壊 儲 存 於 該 卡 匣 内 之 物 品 0 1 1 後 期 所 使 用 之 卡 匣 被 設 計 成 意 圖 藉 由 提 供 不 同 種 類 之 1 1 墊 片 支 架 或 Η 型 桿 來 加 強 卡 匣 的 強 度 防 止 上 述 之 歪 斜 1 | 現 象 發 生 來 克 服 先 前 技 術 的 3 - 缺 失 〇 同 樣 地 例 如 是 截 弗 1 1 1 1 本紙乐又度適用中國國家標準（CNS ) A4说格（210X 297公釐） A7 _B7_ 五、發明说明（i) 龍的材料亦被採用。以上這些材料被挑選來承受被髄存之 物品所經常接受的化學蝕刻加工過程。Μ上這些技術適用 於被設計成保存那些長度或直徑接近150咖1或150咖1以下 之較小型物品的卡匣。然而，已知最近在半導體和電子工 業的發展趨勢中，新型卡匣的設計必須要能夠容納較大尺 寸之物品。此種卡匣的設計方式使得這些卡匣甚至在承受 高溫或嚴苛之化學物質作用時，亦不會產生褶縮、歪斜、 彎曲或破損。此外•由於已知上述之儲存物品的尺寸和重 量，使用機械手臂的處理方式就變得更加重要，於是，在 卡匣上所需要的構造要能夠相對於加工設備而協助將該卡 匣加Μ指示和定位。 發明描述： 本項發明直接是有關於特別被設計成用來容納較大直 徑之晶圓（亦即直徑大小為3 0 0 πβ或3 0 0则1 Μ上之晶圓） 和其他類似尺寸之物品的卡匣。而此種卡匣亦可Κ被用來 保存較小型的物品。另外，獨特的加強構造被提供用來防 止該卡匣在使用時產生歪斜、彎曲、褶縮或破損狀況。Μ 上這些加強構造的設計方式使得被用來製做卡匣之材料數 量減少，於是*降低了製造成本和重量。 本項發明亦提供容易清理之卡匣。此種卡匣能夠以彼 此間隔平行排列之方式來保存物品•使得物品不會因為彼 此接觸而造成損壊。該卡匣亦包括一组被用來Μ運動學方 式將卡匣本身耦合至用於加工或處理物品之設備處的溝槽 本紙張尺度適用中國國家標準（CNS ) Α4規格（210Χ297公釐） (請先Μ讀背面之注意事項再填寫本！) 订 A7 B7 五、發明説明（今） 。Μ上瑄些運動用溝槽被用來將卡匣附著於一微觀保護環 境容器内，Μ在運送過程中協助保護所儲存的物品。 針對Μ上所述的内容，本項發明之一項目的是在提供 —種能夠保存（例如）若干個晶圓的卡匣，其中每一個晶 圓的直徑為300咖或300咖以上。 本項發明之另一項目的是在提供一種具有已知尺寸 之適宜加強元件的卡匣，用Μ防止該卡匣在承受嚴苛之化 學物質或高溫時，產生歪斜、彎曲、褶縮或破損的狀況。 本項發明之另一項目的是在提供一種能夠以彼此間隔 平行排列之方式來保存若干個物品的卡匣。 本項發明之另一項目的是在提供一種包括有一運動用 耦合裝置的卡匣，使得該卡匣能夠與加工設備對準在同一 條直線上，或被適宜地安置於一微觀保護環境的容器内。 本項發明之另一項目的是在提供一種具有一開放頂端 和一開放底端的卡匣。 本項發明之另一項目的是在提供一種卡匣，其中該卡 匣的所有表面均容易被加Κ清理和消毒。 參考與所附之圖形结合之較佳實腌例的詳细描述内容 ，本項發明之以上所述和其他目的將會被更清楚地了解， 所有的圖形成為本專利說明書内容的一部份。 圖示說明： 圖1為依照本項發明之特點之卡匣的立體視圖； 圖2為本項發明之卡匣其中之一末端的正視圖； -5- 本紙張尺度適用中國國家標準（CNS ) Α4規格（210Χ 297公釐） ---------ίν------訂------| I (請先Μ讀背面之注意事項再填寫本f ) A7 _B7_ 五、發明説明（山） 圖3為卡匣中與圖2所示末端方向相對之末端的正視 ΓΒΗ 國 ， 圖4為卡匣之一側邊的正視圖； 圖5為卡匣中與圖4所示側邊方向相對之側邊的正視 圖； 圖6為卡匣的下視圖； 圖7為卡匣的上視圖；Μ及 圖8為表示兩個位置相對之分隔器和一個晶圓的横剖 面圖形。 較佳實施方案之描述： 如同Μ上所述之内容，本項發明所提供的卡匣能夠被 用來保存例如矽晶圓、精密記憶磁碟片、平板顯示器、液 晶顯示器以及光罩、單體或其他類似元件之物品。於是， 不必連鑛地重複Μ上清單中的所有元件項目，Κ下所說明 之圖形和描述內容僅提供一“晶圓”卡匣。熟知本項技術 之人士可以知道本項發明的優點能夠同樣地應用至所有以 上所述之物品，同時，無意Μ任何方式限制其應用範面。 該卡匣的不同元件必須以具有低揮發性之材料所組成，此 低揮發性可耐久且僅產生少量微粒。 較佳實施方案之晶圓卡匣10包括第一開放側 20，第二開放側22，第一末端壁1 2，一組位置相對 之側壁14和1 6以及一個第二末端壁1 8。此第一開放 側2 0的尺寸要大到能夠容許晶圚被***或從該卡匣1 〇 本紙张尺度逋用中國國家標準（CNS )八4说格（210Χ297公釐） (請先Μ讀背面之注意事項再填寫本页) ,"τ A7 B7_ 五、發明説明（？） 取出。此第二開放侧邊2 2的尺寸要小到能夠將晶圓支撐 於該卡ElQ内但大到能夠允許液臞化學物質容易從卡匣 内所儲存的任何晶圓之間通過。 ±述之兩烟I壁1 4和1 6互為保持鏡相反射的部位。 每一側壁均有一内部表面2 3K及一個外部表面24，一 個側構件2 5，一個中間構件2 6K及一個上構件2 8。 每一側邊壁的上述構件25、26和28均结合成為一整 體’使得中間構件2 6的頂端位於一個在下構件2 5之頂 端上方和外側的位置處。該上構件2 8從中間構件2 6之 頂端處注上突出。一上側加強用軌道3 4和一下加強用軌 道3 6從上構件2 8之平的外側面24注外突出。軌道 34和36協助支持該卡匣1〇且亦提供一個機構使得一 機械手臂能夠有效地抓住和握捋該卡匣内。 該卡匣1 0亦包括若干位於每一側邊壁14和1 6之 内面2 3上的分隔器4 0。此分隔器4 0從上構件2 8之 頂端延伸至中間構件2 6之底端。位於側壁1 4上的分隔 器40會與位於側壁16上之分隔器彼此位置相對。分隔 器4 0被用來Μ相對於髄存在卡匣内之其他晶圊平行、間 隔且不接觸的方式而保存每一個晶圓。此分隔f 4 0在§ 向上的曲率半徑等於晶圓之曲率半徑。分隔器4 0在側向 上有錐度以減少該晶圓被放置入或從卡匣1 0中取出時對 晶圓造成損壊的可能性。從画8更特別被表示出來，分隔 器4 0有一連蹟變化的斜率，晶圓被定位於水平方向上時 本紙張尺度適用中國國家標準（CNS ) Α4規格（210Χ297公釐） (請先閱讀背面之注意事項再填寫本頁)A7 B7% h. T V. Description of the invention (1) 1 1 | I Scope of invention 1 1 1 This invention is in the making of — a cassette for transporting different items. 0 More 1 | Please I special This invention relates to a cassette that is especially used to store wafers, precision M 1 I read 1 | memory disk flat panel display liquid crystal display or photomask 0 unique advantages of the invention of A 1 I It is a large item capable of storing, for example, wafers with a diameter of 300 coffee or paying attention to 1 1 300 KUD or more wafers. However, according to the items made by this invention I. The cassettes produced by 1 1 are also used to save smaller items 0 Write a book I Description of the first technology page 1 I In the first technology there have been many different types of containers used to store Silicon 1 1 round precision memory disk > flat panel display \ LCD display Μ and other 1 similar components 0 Because > Χ upper components are very fragile These components are shipped from one location to another location within the manufacturing equipment 1 order It must be protected during the process. 0 Putting 1 1 into the protective cassette has proved to be an effective way to provide the protection 1 1. The cassette used in the early days is heavier, heavier, bulkier, and more expensive. 0 1 In addition, some of the cassettes used in the early days could not fully select the environment in which they functioned. 1 The high and harsh chemicals generated in such a use environment 1 1 霣 usually degrades the technical institute. The cassettes used cause these cassettes to bend, skew, or even break during the process. 1 The damage caused by some cassettes usually breaks the items stored in the cassettes. 0 1 1 The cassettes used later are designed to be strengthened by providing different types of 1 1 spacer brackets or H-shaped rods. The strength of the cassette prevents the above-mentioned skew 1 | The phenomenon occurs to overcome the 3-deficiency of the prior art. Similarly, for example, the cut-off 1 1 1 1 This paper music is again applicable to the Chinese National Standard (CNS) A4 said grid (210X 297 mm ) A7 _B7_ V. Description of the invention (i) The material of the dragon has also been adopted. These materials have been selected to withstand the chemical etching processes that are often accepted by the objects that are stored. These techniques on M are suitable for cassettes that are designed to hold smaller items with a length or diameter close to 150 or less. However, it is known that in the recent development trend of the semiconductor and electronic industries, the design of new cassettes must be able to accommodate larger-sized items. The design of such cassettes allows them to not fold, skew, bend or break even when subjected to high temperatures or harsh chemicals. In addition • As the size and weight of the above-mentioned stored items are known, the processing method using the robotic arm becomes more important, so the structure required on the cassette can help to increase the cassette relative to the processing equipment. Instructions and positioning. Description of the invention: This invention is directly related to wafers specially designed to accommodate larger diameter wafers (ie wafers with a diameter of 3 0 0 πβ or 3 0 0 1 M) and other similar sizes. Cartridge for items. This type of cassette can also be used to store smaller items. In addition, a unique reinforcement structure is provided to prevent the cartridge from skewing, bending, shrinking, or breaking during use. The design of these reinforced structures on Μ reduces the amount of material used to make cassettes, thus reducing manufacturing costs and weight. The invention also provides a cartridge that is easy to clean. This type of cassette can store items in a parallel arrangement with each other so that the items will not be damaged by contact with each other. The cassette also includes a set of grooves that are used in the kinematics to couple the cassette itself to the equipment used to process or process the items. This paper standard is applicable to the Chinese National Standard (CNS) Α4 specification (210Χ297 mm) ( Please read the precautions on the back before filling in this!) Order A7 B7 5. Description of the invention (today). Some grooves for movement on M are used to attach the cassette to a micro-protection environment container. M helps to protect the stored items during transportation. Regarding the content described in Μ, one of the items of this invention is to provide a cassette capable of storing (for example) several wafers, wherein the diameter of each wafer is 300 or more. Another item of the present invention is to provide a cassette with suitable reinforcing elements of known size, using Μ to prevent the cassette from being skewed, bent, shrunken or damaged when subjected to harsh chemicals or high temperatures Situation. Another object of the present invention is to provide a cassette capable of storing several items in parallel with each other. Another item of the present invention is to provide a cassette including a coupling device for movement, so that the cassette can be aligned with the processing equipment on the same straight line, or is suitably placed in a micro-protected container Inside. Another item of the present invention is to provide a cassette having an open top and an open bottom. Another item of the present invention is to provide a cassette, in which all the surfaces of the cassette are easily cleaned and disinfected by K. With reference to the detailed description of the preferred practical example combined with the attached graphics, the above and other objectives of the present invention will be more clearly understood, and all graphics become part of the content of this patent specification. Illustration: Figure 1 is a perspective view of a cassette according to the features of the present invention; Figure 2 is a front view of one of the ends of the cassette of the present invention; -5- This paper scale is applicable to the Chinese National Standard (CNS) Α4 specification (210Χ 297mm) --------- ίν ------ order ------ | I (please read the precautions on the back before filling in this f) A7 _B7_ 5 3. Description of the invention (mountain) Fig. 3 is a front view of the end of the cassette opposite to the direction shown in Fig. 2; Fig. 4 is a front view of one side of the cassette; Fig. 5 is a view of the cassette and Fig. 4 Front view of the opposite side showing the side direction; Figure 6 is the bottom view of the cassette; Figure 7 is the top view of the cassette; M and Figure 8 are cross-sections showing two separators and a wafer opposite to each other Graphics. Description of the preferred embodiments: As described above, the cassette provided by the present invention can be used to store, for example, silicon wafers, precision memory disks, flat panel displays, liquid crystal displays, and photomasks, monomers Or other similar components. Therefore, it is not necessary to repeat all the component items in the list above M in the mine. The graphics and descriptions described under K only provide a "wafer" cassette. Those skilled in the art can know that the advantages of the present invention can be equally applied to all the above-mentioned items, and at the same time, it is not intended to limit its application in any way. The different components of the cassette must be composed of materials with low volatility, which is durable and produces only a small amount of particles. The wafer cassette 10 of the preferred embodiment includes a first open side 20, a second open side 22, a first end wall 12, a set of opposed side walls 14 and 16 and a second end wall 18. The size of the first open side 20 should be large enough to allow the crystal to be inserted into or out of the cassette. The size of the paper is based on the Chinese National Standard (CNS) 8 4 (210 × 297 mm) (please read Note on the back then fill out this page), " τ A7 B7_ V. Invention description (?) Take out. The size of this second open side 22 is small enough to support the wafer in the card ElQ but large enough to allow liquid chemistry to easily pass between any wafers stored in the cassette. ± The two smoke I walls 14 and 16 are mutually maintaining mirror reflection. Each side wall has an inner surface 23K and an outer surface 24, a side member 25, an intermediate member 26K and an upper member 28. The above-mentioned members 25, 26 and 28 of each side wall are combined into a whole 'so that the top end of the intermediate member 26 is located at a position above and outside the top end of the lower member 25. The upper member 28 protrudes from the top of the intermediate member 26. An upper reinforcement rail 34 and a lower reinforcement rail 36 project outward from the flat outer side surface 24 of the upper member 28. The rails 34 and 36 assist in supporting the cassette 10 and also provide a mechanism for a mechanical arm to effectively grasp and grip the cassette. The cassette 10 also includes a number of dividers 40 located on the inner surface 23 of each side wall 14 and 16. This divider 40 extends from the top end of the upper member 28 to the bottom end of the middle member 26. The divider 40 on the side wall 14 and the divider on the side wall 16 are positioned opposite each other. The divider 40 is used to store each wafer in a parallel, spaced, and non-contact manner with respect to other crystals stored in the cassette. The radius of curvature of this partition f 4 0 in the § direction is equal to the radius of curvature of the wafer. The separator 40 is tapered laterally to reduce the possibility of damage to the wafer when the wafer is placed in or removed from the cassette 10. It is more specifically shown in drawing 8. The separator 40 has a continuous slope of change. When the wafer is positioned in the horizontal direction, the paper scale is applicable to the Chinese National Standard (CNS) Α4 specification (210Χ297 mm) (please read first (Notes on the back then fill this page)
、1T __B7_ 五、發明説明（办） (請先閲讀背面之注意事項再填寫本页) 此斜率被用來將該晶圓固定於承載架的中央位置處。此斜 率的變化範圍是從在壁面之垂直狀況到在分隔器之極端逢 緣的完全水平狀況。由於此種已知的構造，晶圓得Μ —直 依靠在分隔器中有一定斜率的部位上，保證彼此永遠接觸 。晶圓80被水平運送時，重力有肋於將晶圓80定位於 這些分隔器4 0之已知構造的中央位置處。該晶圓一旦被 定位於分隔器的中央時，晶圓本身的垂直位置就被精確地 界定。此外，容器從一個位置移至下一個位置時，小幅度 的振動有助於將晶圓定位於容器之中央位置處。此項结果 可以協助改菩晶圓的水平定位精度和垂直定位精度。 該分隔器之設計亦可Μ提供其他額外的益處。舉例而 言，此分隔器的設計方式代表一已知強度所需之最小可能 横剖面形狀。該分隔器4 0表示當晶圓被***和從承載架 中取出時，晶圓本身所需的干涉區域，於是，由於晶圓8 0較不會撞擊分隔器40，而且較不會導致灰塵生成，所 Μ採用較窄的支架為較適宜。同樣地•此分隔器的強度亦 須足Μ支撐晶圓和避免分隔器本身在容器之使用壽命範圍 內產生變形。 一晶圓接收用溝槽4 2是在每一組分隔器4 0之間。 此溝槽背部至少有一部位在縱向上的曲率半徑等於晶圓沿 著晶圓本身之周圍的曲率半徑。由於晶圓沿著一直線被此 的溝榷42支撐，而非被支撐於一軍獨的接觸點，所Μ， 採用此種構造為較有利。此種支撐方式改善了晶圓在卡便； -8 - 本紙伕尺度適用中國國家標準（CNS ) Α4規格（210X297公釐） A7 B7_ 五、發明説明（7 ) 内的毽定程度。當卡匣1 〇被放置於一晶圓轉移工具時* 上述之支撐方式亦被用來協助保持該晶圓在完全水平的狀 態下。卡匣1 0之側壁14和1 6相隔若干距離以接收和 儲存例如是300 ran直徑的晶圃。該卡匿的尺寸能夠保存任 何數目之晶圓。兩種典型的卡®構造通常可以容納十三個 與二十五個晶圓。分隔器4 〇的數量多寡依照卡匣之容量 不同而改變。 分隔器4 0和溝槽4 2均被適宜地定位以得到特定的 益處。首先，此二元件被定位以從 5 mo到12職之已預先 設定節距保存晶圓加。其次，此二元件被定位而在晶圓之 間提供3 HBB到8 BHD的間隙。第三’ 1师1到3職大小的間隙 被提供於卡匣1 0的每一側壁1 4和1 6與晶圓的邊緣之 間而此晶圆的直徑則平行於開放側2 0和2 2之平面。由 於提供了上述之節距和若干不同間隙’使得在卡匣内的晶 圓不致於彼此接觸。同樣地，該卡匣被放置於上述之晶圓 轉移工具時，Μ上這些間隙足Μ容許機械手鹫將晶圓*** 和移出。 本項設計的若干項獨特點存在於第一末端壁面1 2之 構造中。此第一端壁1 2是由第一平板50、考二平抿 5 2Μ及若干被溝槽5 6分開的搭接構件54所共同组成 *> _________ 。平板5 0和5 2藉由搭接構件54而被固定而彼此分開 且相互平行。每一溝槽5 6是由第一平板5 0的一個部位 、第二平板5 2的一涸部位以及兩涸搭接構件54所組成 -9- 本紙張尺度適用中國國家標準（CNS ) Α4規格（210Χ297公釐） (請先Μ讀背面之注意事項再填寫本页)、 1T __B7_ V. Description of Invention (Office) (Please read the notes on the back before filling in this page) This slope is used to fix the wafer to the center of the carrier. This slope varies from the vertical condition at the wall to the completely horizontal condition at the extreme edge of the divider. Due to this known structure, the wafers are directly dependent on the parts of the separator with a certain slope to ensure permanent contact with each other. When wafer 80 is transported horizontally, gravity is ribbed to position wafer 80 at the center of the known configuration of these dividers 40. Once the wafer is positioned in the center of the divider, the vertical position of the wafer itself is precisely defined. In addition, as the container moves from one location to the next, small amplitude vibrations help position the wafer at the center of the container. This result can assist in improving the horizontal and vertical positioning accuracy of the wafer. The design of the divider can also provide other additional benefits. For example, the design of this divider represents the smallest possible cross-sectional shape required for a known strength. The separator 40 represents the interference area required by the wafer itself when the wafer is inserted and removed from the carrier, so that the wafer 80 is less likely to hit the separator 40 and less likely to cause dust generation Therefore, it is more appropriate to use a narrower stent. Similarly, the strength of this separator must be sufficient to support the wafer and prevent the separator itself from being deformed within the service life of the container. A wafer receiving groove 42 is between each group of dividers 40. At least one part of the back of the trench has a radius of curvature in the longitudinal direction equal to the radius of curvature of the wafer along the circumference of the wafer itself. Since the wafer is supported by the trench 42 along the straight line, rather than being supported at the contact point of the military, it is more advantageous to adopt this structure. This support method improves the wafer in the card; -8-The paper size is applicable to the Chinese National Standard (CNS) Α4 specification (210X297 mm) A7 B7_ V. Instruction description (7) The degree of permissible in the description. When the cassette 10 is placed in a wafer transfer tool * The above support method is also used to help keep the wafer in a completely horizontal state. The side walls 14 and 16 of the cassette 10 are separated by a distance to receive and store a crystal garden of 300 ran diameter, for example. The size of the card can hold any number of wafers. Two typical Card® configurations can usually accommodate thirteen and twenty-five wafers. The number of dividers 40 varies according to the capacity of the cassette. Both the separator 40 and the groove 42 are suitably positioned to obtain specific benefits. First of all, these two components are positioned to save wafers from 5 mo to 12 positions with a preset pitch. Second, the two components are positioned to provide a gap of 3 HBB to 8 BHD between the wafers. The third '1 division 1 to 3 position size gap is provided between each side wall 14 and 16 of the cassette 10 and the edge of the wafer and the diameter of this wafer is parallel to the open side 20 and 2 2 plane. Due to the provision of the above-mentioned pitch and several different gaps', the crystal circles in the cassette do not come into contact with each other. Similarly, when the cassette is placed in the wafer transfer tool described above, these gaps on M allow the manipulator to insert and remove wafers. Several unique points of this design exist in the structure of the first end wall 12. The first end wall 12 is composed of a first flat plate 50, a second flattening 52 M, and a plurality of overlapping members 54 separated by a groove 56 *> _________. The flat plates 50 and 52 are fixed by the overlapping member 54 to be separated from each other and parallel to each other. Each groove 56 is composed of a part of the first flat plate 50, a part of the second flat plate 52, and two overlapping members 54-9- This paper scale is applicable to China National Standard (CNS) Α4 specifications (210Χ297mm) (Please read the precautions on the back before filling this page)
i-T fch t pi Α7 Β7 五、發明説明（i7 ) 。每一溝檷5 6均具有一個開放頂端5 8和一個開放底端 60，使得液體在加工晶圓或濟理卡匣的過程中容易流經 此溝槽5 6。而在溝槽中則沒有難K清理的封閉角落或其 他類似部位或在卡匣10被清理或晶圓加工之過程中會收 集或積存液體的部位。 平板5 0之形吠通常是平坦的。平板5 2之形狀通常 亦為平坦的•但是於平板5 2的中央有一大型開口 64。 三個運動耦合用溝槽6 6、68和7 0成形於第二平板 52的表面上，同時，往後延伸至第一平板50。Μ上這 三個溝槽被用來將卡匣指引至例如是晶圓加工設備之通口 的其他物體。該三溝6、68和70會與三個位於被 設計用來和此三溝槽66、68和70相匹配之物髖上的 互補的突出部位结合以適宜地對準卡匣1 0。熟知此項技 術之人士將知道有其他替代配量方式能夠提供運動溝槽 66、68和70。舉例而言，瑄些溝播能夠用模子製造 成一種分隔塊狀部位，然後再以螺絲、銷、或是超音波焊 接或粘著劑，將此分隔之塊狀部位附著於平板5 2上。 上述之益處有許多是來自有此種設計的前壁1 2。首 先，兩個平板5 0和5 2與搭接構件54的組合減少壁面 產生歪斜或彎曲狀況的危險。其次•此種設計方式非常容 易被清理而且在晶圓的加工過程中容易排放液體。此乃因 為溝槽56有一開放頂端和一開放底端。另外，溝槽56 中亦無空間會阻擋疲體流動而導致液體被收集於卡匣1 0 -1 0 - 本紙伕尺度適用中國國家標準（CNS ) Α4規格（210X 297公釐） (請先閱讀背面之注意事項再填寫本页) 訂 A7 B7 五、發明説明（巧） 内。第三*匹配在一表面上之互補的突出部位時，理動耦 合用溝檑6 6、68和70會簡化卡匣1 0本身在表面上 的定位。第四，採用少量塑膠材料是有必要的且可使得整 體的設計變得更輕。第五，由於在平板5 2上的開口 6 4 ，卡匣1 0能夠很容易地被人類手部或機械手臂工具抓住 。另外，由於加強用軌道34和36，該卡匣1 0亦可被 一機械手臂工具從側邊抓住。 第一壁1 2的設計會產生一個用於將此一壁面接合至 兩個側壁1 4和1 6之獨特方式。第一平板5 0之下側部 位的相對側緣幾乎Μ—直角而接合每一個彼此相對之側邊 壁面14和1 6的下側構件25。平板52之相對邊緣亦 被接合至每一側壁14和1 6的上側構件28。以上结果 的得到是藉由提供形狀彎曲之格板5 3於平板5 2與側邊 壁面的上側構件2 8之間。此格板5 3相對於平板5 2和 上側構件2 8而保持彎曲形狀，用以協肋加強整體的設計 〇 卡匣1 0之第二壁1 6具有與第一端壁1 2相同的設 計。然而第一端壁與第二端壁通常不必同時有運動耦合用 溝槽66、68和70。於是，在圖式中，這些溝榷未被 表示在第二端壁18上。 如同Μ上所描述之内容，本項發明提供了許多除了用 於儲存和移轉矽晶圓以外的優點。同樣的*瑄種發明亦可 以成功地被用來儲存和移轉精密記憧磁磲片、光罩、液晶 -11- 本紙张尺度適用中國國家標準（CNS ) Α4規格（210X 297公釐） {請先閱讀背面之注意事項再填寫本页) 訂 A7 B7 五、發明説明（ 顯示器、平板顯示器、單體以及其他類似元件。在不偏離 狀 的。 容改 内修 明的 發同 項不 本多 之許 義做 定匣 欲卡 意之 圍示 範揭 利所 專此 請在 申對 述針 所 K 下可 由下 藉況 (請先閱讀背面之注意事項再填寫本页) 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐）i-T fch t pi Α7 Β7 5. Description of the invention (i7). Each trench 56 has an open top end 58 and an open bottom end 60, so that liquid can easily flow through the trench 56 during processing of wafers or Jili cassettes. In the trench, there are no closed corners or other similar parts that are difficult to clean, or where liquid will collect or accumulate during the cleaning or wafer processing of the cassette 10. The flat shape of the 50-shaped bark is usually flat. The shape of the flat plate 52 is usually flat, but there is a large opening 64 in the center of the flat plate 52. Three kinematic coupling grooves 66, 68, and 70 are formed on the surface of the second plate 52, and at the same time, extend back to the first plate 50. These three grooves on the M are used to direct the cassette to other objects such as the openings of wafer processing equipment. The three grooves 6, 68 and 70 will be combined with three complementary protrusions on the hip designed to match the three grooves 66, 68 and 70 to properly align the cassette 10. Those skilled in the art will know that there are other alternative dosing methods that can provide motion grooves 66, 68, and 70. For example, some trenches can be made with a mold to form a divided block, and then the divided block can be attached to the flat plate 52 with screws, pins, or ultrasonic welding or adhesive. Many of the above benefits come from the front wall 12 with this design. First, the combination of the two flat plates 50 and 52 and the lap member 54 reduces the risk of the wall surface being skewed or bent. Secondly, this design method is very easy to clean up and easy to drain liquid during wafer processing. This is because the groove 56 has an open top and an open bottom. In addition, there is no space in the groove 56 to block the flow of the fatigued body and cause the liquid to be collected in the cassette 1 0 -1 0-The paper scale is applicable to the Chinese National Standard (CNS) Α4 specification (210X 297 mm) (please read first (Notes on the back and then fill in this page) Order A7 B7 V. Invention description (Qiao). Thirdly, when matching complementary protrusions on a surface, the grooves 6, 6, and 70 for dynamic coupling will simplify positioning of the cassette 10 itself on the surface. Fourth, the use of a small amount of plastic material is necessary and can make the overall design lighter. Fifth, due to the opening 6 4 in the flat plate 52, the cassette 10 can be easily grasped by human hands or mechanical arm tools. In addition, due to the reinforcing rails 34 and 36, the cassette 10 can also be grasped from the side by a robot arm tool. The design of the first wall 12 will create a unique way for joining this wall surface to the two side walls 14 and 16. The opposite side edge of the lower side portion of the first flat plate 50 is almost M-right angle and engages the lower member 25 of each side wall surface 14 and 16 opposite to each other. The opposite edges of the flat plate 52 are also joined to the upper member 28 of each side wall 14 and 16. The above result is obtained by providing a curved grid 53 between the flat plate 52 and the upper member 28 on the side wall surface. The grid 53 maintains a curved shape relative to the flat plate 52 and the upper member 28, and is designed to reinforce the whole with the rib. The second wall 16 of the cassette 10 has the same design as the first end wall 12 . However, it is generally unnecessary for the first end wall and the second end wall to have grooves 66, 68 and 70 for kinematic coupling at the same time. Therefore, in the drawing, these grooves are not shown on the second end wall 18. As described in M, the present invention provides many advantages in addition to storing and transferring silicon wafers. The same * general invention can also be successfully used to store and transfer precision magnetic magnetic film, photomask, liquid crystal-11- This paper scale is applicable to China National Standard (CNS) Α4 specification (210X 297mm) { Please read the precautions on the back and then fill out this page) Order A7 B7 V. Description of the invention (monitor, flat panel display, single body and other similar components. It does not deviate from the shape. There are not many of the same items in the revised content Xu Yi made a demonstrative demonstrator for the encirclement of the enlightenment. Please apply under the K needle office (please read the precautions on the back and then fill out this page). CNS) A4 specification (210X 297mm)