TW274645B - - Google Patents

Info

Publication number
TW274645B
TW274645B TW084105811A TW84105811A TW274645B TW 274645 B TW274645 B TW 274645B TW 084105811 A TW084105811 A TW 084105811A TW 84105811 A TW84105811 A TW 84105811A TW 274645 B TW274645 B TW 274645B
Authority
TW
Taiwan
Application number
TW084105811A
Original Assignee
Amada Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=26460435&utm_source=***_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=TW274645(B) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Priority claimed from JP12354694A external-priority patent/JP3305499B2/ja
Priority claimed from JP12514094A external-priority patent/JP3291125B2/ja
Application filed by Amada Co Ltd filed Critical Amada Co Ltd
Application granted granted Critical
Publication of TW274645B publication Critical patent/TW274645B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
    • B23K26/123—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in an atmosphere of particular gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
    • B23K26/127—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in an enclosure
    • B23K26/128—Laser beam path enclosures
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/1435—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor involving specially adapted flow control means
    • B23K26/1436—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor involving specially adapted flow control means for pressure control
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/1462—Nozzles; Features related to nozzles
    • B23K26/1464—Supply to, or discharge from, nozzles of media, e.g. gas, powder, wire
    • B23K26/1476—Features inside the nozzle for feeding the fluid stream through the nozzle

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
TW084105811A 1994-06-06 1995-06-08 TW274645B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP12354694A JP3305499B2 (ja) 1994-06-06 1994-06-06 レーザ加工機
JP12514094A JP3291125B2 (ja) 1994-06-07 1994-06-07 レーザ加工機に対するアシストガス供給方法及び装置

Publications (1)

Publication Number Publication Date
TW274645B true TW274645B (zh) 1996-04-21

Family

ID=26460435

Family Applications (1)

Application Number Title Priority Date Filing Date
TW084105811A TW274645B (zh) 1994-06-06 1995-06-08

Country Status (7)

Country Link
US (1) US5763855A (zh)
EP (1) EP0712346B2 (zh)
KR (1) KR100370875B1 (zh)
CN (1) CN1107570C (zh)
DE (2) DE69507575T3 (zh)
TW (1) TW274645B (zh)
WO (1) WO1995033594A1 (zh)

Families Citing this family (78)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE514450C2 (sv) 1995-01-31 2001-02-26 Aga Ab Sätt vid laserskärning och gaskomposition för användning därvid
DE29509648U1 (de) * 1995-06-19 1995-09-14 Trumpf Gmbh & Co Laserbearbeitungsmaschine mit gasgefülltem Strahlführungsraum
IL133422A0 (en) 1997-06-10 2001-04-30 Nikon Corp Optical device, method of cleaning the same, projection aligner, and method of producing the same
DE19734715A1 (de) 1997-08-11 1999-02-25 Lambda Physik Gmbh Vorrichtung zum Spülen des Strahlenganges eines UV-Laserstrahles
DE29714489U1 (de) * 1997-08-13 1997-10-09 Trumpf Gmbh & Co Laserbearbeitungsmaschine mit Gasausgleichsvolumen
JPH11224839A (ja) * 1998-02-04 1999-08-17 Canon Inc 露光装置とデバイス製造方法、ならびに該露光装置の光学素子クリーニング方法
DE69905971D1 (de) * 1998-05-13 2003-04-24 Enshu Seisaku Kk Gaszuführungssystem für Stickstoff für eine Trockenschneidmaschine
FR2779078A1 (fr) * 1998-05-29 1999-12-03 Air Liquide Procede de decoupe laser de l'aluminium et de ses alliages
US6381256B1 (en) 1999-02-10 2002-04-30 Lambda Physik Ag Molecular fluorine laser with spectral linewidth of less than 1 pm
US6795473B1 (en) 1999-06-23 2004-09-21 Lambda Physik Ag Narrow band excimer laser with a prism-grating as line-narrowing optical element
US6442182B1 (en) 1999-02-12 2002-08-27 Lambda Physik Ag Device for on-line control of output power of vacuum-UV laser
US6426966B1 (en) 1999-02-10 2002-07-30 Lambda Physik Ag Molecular fluorine (F2) laser with narrow spectral linewidth
US6424666B1 (en) 1999-06-23 2002-07-23 Lambda Physik Ag Line-narrowing module for high power laser
US6490307B1 (en) 1999-03-17 2002-12-03 Lambda Physik Ag Method and procedure to automatically stabilize excimer laser output parameters
US6822187B1 (en) 1998-09-09 2004-11-23 Gsi Lumonics Corporation Robotically operated laser head
US6678291B2 (en) 1999-12-15 2004-01-13 Lambda Physik Ag Molecular fluorine laser
US6717973B2 (en) 1999-02-10 2004-04-06 Lambda Physik Ag Wavelength and bandwidth monitor for excimer or molecular fluorine laser
US6546037B2 (en) 1999-02-10 2003-04-08 Lambda Physik Ag Molecular fluorine laser with spectral linewidth of less than 1 pm
US6965624B2 (en) * 1999-03-17 2005-11-15 Lambda Physik Ag Laser gas replenishment method
US6463086B1 (en) 1999-02-10 2002-10-08 Lambda Physik Ag Molecular fluorine laser with spectral linewidth of less than 1 pm
US6421365B1 (en) 1999-11-18 2002-07-16 Lambda Physik Ag Narrow band excimer or molecular fluorine laser having an output coupling interferometer
US6389052B2 (en) 1999-03-17 2002-05-14 Lambda Physik Ag Laser gas replenishment method
US6219368B1 (en) 1999-02-12 2001-04-17 Lambda Physik Gmbh Beam delivery system for molecular fluorine (F2) laser
US6327290B1 (en) 1999-02-12 2001-12-04 Lambda Physik Ag Beam delivery system for molecular fluorine (F2) laser
US6727731B1 (en) 1999-03-12 2004-04-27 Lambda Physik Ag Energy control for an excimer or molecular fluorine laser
US6700915B2 (en) 1999-03-12 2004-03-02 Lambda Physik Ag Narrow band excimer laser with a resonator containing an optical element for making wavefront corrections
DE29907349U1 (de) 1999-04-26 2000-07-06 Lambda Physik Gmbh Laser zur Erzeugung schmalbandiger Strahlung
FR2793179A1 (fr) * 1999-05-06 2000-11-10 Air Liquide Installation de soudage ou de coupage par faisceau laser avec dispositif de concentration du flux de gaz d'assistance
EP1072351A1 (en) * 1999-07-08 2001-01-31 Pierre Diserens Method for laser cutting
US6785316B1 (en) 1999-08-17 2004-08-31 Lambda Physik Ag Excimer or molecular laser with optimized spectral purity
US6553050B1 (en) 1999-11-18 2003-04-22 Lambda Physik Ag Narrow band excimer or molecular fluorine laser having an output coupling interferometer
US6529533B1 (en) 1999-11-22 2003-03-04 Lambda Physik Ag Beam parameter monitoring unit for a molecular fluorine (F2) laser
US6603788B1 (en) 1999-11-23 2003-08-05 Lambda Physik Ag Resonator for single line selection
US6795456B2 (en) 1999-12-20 2004-09-21 Lambda Physik Ag 157 nm laser system and method for multi-layer semiconductor failure analysis
US6907058B2 (en) 2000-01-25 2005-06-14 Lambda Physik Ag Energy monitor for molecular fluorine laser
US7075963B2 (en) 2000-01-27 2006-07-11 Lambda Physik Ag Tunable laser with stabilized grating
US6735232B2 (en) 2000-01-27 2004-05-11 Lambda Physik Ag Laser with versatile output energy
US6618403B2 (en) 2000-03-16 2003-09-09 Lambda Physik Ag Method and apparatus for compensation of beam property drifts detected by measurement systems outside of an excimer laser
US6834066B2 (en) 2000-04-18 2004-12-21 Lambda Physik Ag Stabilization technique for high repetition rate gas discharge lasers
US6862307B2 (en) * 2000-05-15 2005-03-01 Lambda Physik Ag Electrical excitation circuit for a pulsed gas laser
US6577663B2 (en) 2000-06-19 2003-06-10 Lambda Physik Ag Narrow bandwidth oscillator-amplifier system
US6603789B1 (en) 2000-07-05 2003-08-05 Lambda Physik Ag Narrow band excimer or molecular fluorine laser with improved beam parameters
US6807205B1 (en) 2000-07-14 2004-10-19 Lambda Physik Ag Precise monitor etalon calibration technique
US6801561B2 (en) 2000-09-25 2004-10-05 Lambda Physik Ag Laser system and method for spectral narrowing through wavefront correction
US6747741B1 (en) 2000-10-12 2004-06-08 Lambda Physik Ag Multiple-pass interferometric device
FI113849B (fi) * 2001-02-23 2004-06-30 Laser Gas Oy Menetelmä lasertyöstölaitteiston yhteydessä
US6804327B2 (en) * 2001-04-03 2004-10-12 Lambda Physik Ag Method and apparatus for generating high output power gas discharge based source of extreme ultraviolet radiation and/or soft x-rays
FR2825305A1 (fr) * 2001-06-01 2002-12-06 Air Liquide Procede et installation de soudage laser avec buse laterale de distribution de gaz
DE10138866B4 (de) * 2001-08-08 2007-05-16 Bosch Gmbh Robert Verfahren zum Bohren eines Lochs in ein Werkstück mittels Laserstrahls
US6998620B2 (en) * 2001-08-13 2006-02-14 Lambda Physik Ag Stable energy detector for extreme ultraviolet radiation detection
US6756564B2 (en) * 2001-12-31 2004-06-29 Andrx Pharmaceuticals Llc System and method for removing particulate created from a drilled or cut surface
ES2305159T3 (es) 2002-08-01 2008-11-01 Trumpf Werkzeugmaschinen Gmbh + Co. Kg Maquina de mecanizado por laser.
DE20306336U1 (de) * 2003-04-22 2003-06-26 Trumpf Werkzeugmaschinen Gmbh Strahlführung einer Laserbearbeitungsmaschine
FR2858474A1 (fr) * 2003-07-28 2005-02-04 Safmatic Machine laser a chemin optique equipe d'une chicane de contournement du miroir de renvoi
CN1867813B (zh) * 2003-10-14 2011-01-26 洛德公司 用于测量距离的磁致伸缩传感器
FR2868718B1 (fr) * 2004-04-08 2007-06-29 3D Ind Soc Par Actions Simplif Dispositif de decoupe au laser pour detourer, ajourer, poinconner
ATE504388T1 (de) * 2005-02-25 2011-04-15 Trumpf Werkzeugmaschinen Gmbh Verfahren zum spülen von leitungen und/oder hohlräumen einer laserbearbeitungsmaschine
EP1722451A1 (de) * 2005-05-10 2006-11-15 Wavelight Laser Technologie AG Lasersystem mit integrierter Stickstoffversorgung
JP5014614B2 (ja) * 2005-10-26 2012-08-29 ヤマザキマザック株式会社 レーザ加工機光路系のシール装置
EP2024132A1 (de) 2006-05-09 2009-02-18 Trumpf Laser- und Systemtechnik GmbH Laserbearbeitungsmaschine mit einer einrichtung zum belüften der laserstrahlführung und verfahren zum belüften der laserstrahlführung einer laserbearbeitungsmaschine
US20080219317A1 (en) 2007-03-06 2008-09-11 Pettit George H Gas-purged laser system and method thereof
DE102007030397B4 (de) 2007-06-29 2013-04-11 Trumpf Laser- Und Systemtechnik Gmbh Laseranlage mit einer Aufbereitungsvorrichtung für die Druckluft eines Strahlführungsraums und entsprechendes Aufbereitungsverfahren
JP5511806B2 (ja) 2008-06-20 2014-06-04 トルンプフ ヴェルクツォイクマシーネン ゲゼルシャフト ミット ベシュレンクテル ハフツング ウント コンパニー コマンディートゲゼルシャフト ガス雰囲気を含むビームガイド内に光音響測定ヘッドを備えるレーザ加工機械
DE102009058054B4 (de) * 2009-12-14 2011-12-08 Airco Systemdruckluft Gmbh Stickstoff-Generator, dessen Verwendung sowie Verfahren zur vor Ort Herstellung von Stickstoff
FR2956337B1 (fr) * 2010-02-16 2012-03-02 Air Liquide Installation d'usinage laser avec source de gaz commune pour l'oscillateur et la tete laser
WO2011158617A1 (ja) * 2010-06-14 2011-12-22 三菱電機株式会社 レーザ加工装置、及びレーザ加工方法
CN102476244A (zh) * 2010-11-23 2012-05-30 深圳市大族激光科技股份有限公司 一种激光切割方法及激光切割机
JP6148878B2 (ja) 2012-03-14 2017-06-14 株式会社アマダホールディングス レーザ加工機の同軸ノズル
JP2013239696A (ja) 2012-04-16 2013-11-28 Amada Co Ltd ファイバレーザ発振器，ファイバレーザ加工装置，及びファイバレーザ発振器の除湿方法
CN103537815A (zh) * 2013-10-18 2014-01-29 昆山思拓机器有限公司 激光设备光学器件防灰尘***
US10583532B2 (en) * 2015-12-28 2020-03-10 General Electric Company Metal additive manufacturing using gas mixture including oxygen
US10773340B2 (en) * 2015-12-28 2020-09-15 General Electric Company Metal additive manufacturing using gas mixture including oxygen
CN107150169A (zh) * 2016-03-02 2017-09-12 大族激光科技产业集团股份有限公司 一种铝合金的无毛刺切割方法
CN105807430A (zh) * 2016-03-17 2016-07-27 邓泳安 一种具有高效散热功能的平行离散光束发射***
CN109570148A (zh) * 2018-11-08 2019-04-05 中国科学院半导体研究所 直连空压机的激光清洗一体机
CN111906439B (zh) * 2020-06-19 2022-02-22 宁波大艾激光科技有限公司 一种激光冲击强化的光路保护装置
CN114535794B (zh) * 2022-04-25 2022-08-23 济南邦德激光股份有限公司 一种激光切割头的气路***
WO2024013566A1 (en) * 2022-07-15 2024-01-18 Manufacturing Service Solutions Limited High pressure filter panel for lasers

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4977566A (zh) * 1972-11-28 1974-07-26
JPS59215292A (ja) * 1983-05-20 1984-12-05 Mitsubishi Electric Corp レ−ザ加工装置
JPS60121097A (ja) * 1983-12-02 1985-06-28 Matsushita Electric Ind Co Ltd レ−ザ加工装置
EP0148405B1 (de) * 1983-12-13 1988-10-12 Messer Griesheim Gmbh Verfahren zur Kantenfindung einer auf eine Werkstückkante zubewegten, gasausströmenden Schweiss- und/oder Schneiddüse
JPS63299884A (ja) * 1987-05-30 1988-12-07 Komatsu Ltd レ−ザ加工装置
JPS6444296A (en) * 1987-08-12 1989-02-16 Fanuc Ltd Assist gas control system
JPH0215895A (ja) * 1988-07-04 1990-01-19 Toshiba Corp ガスレーザ装置の伝送路
DE3906571A1 (de) * 1989-03-02 1990-09-06 Festo Kg Lichtleiter
KR0136566B1 (ko) * 1989-10-12 1998-07-01 가따다 데쯔야 레이저 절단방법
JPH03221290A (ja) † 1990-01-24 1991-09-30 Hitachi Ltd レーザ加工機
US4977566A (en) * 1990-02-02 1990-12-11 Spectra-Physics, Inc. Purged cavity solid state tunable laser
JP2736182B2 (ja) * 1991-02-28 1998-04-02 ファナック株式会社 レーザ装置及びレーザ溶接方法
JPH0584590A (ja) * 1991-09-26 1993-04-06 Amada Co Ltd レーザ加工用アシストガス供給装置
JPH05185267A (ja) * 1992-01-16 1993-07-27 Fanuc Ltd レーザ加工装置
EP0554523B1 (en) * 1992-02-03 1997-04-16 Matsushita Electric Industrial Co., Ltd. Laser beam machining apparatus and method for adjusting the height of its condenser lens
US5559584A (en) * 1993-03-08 1996-09-24 Nikon Corporation Exposure apparatus

Also Published As

Publication number Publication date
KR100370875B1 (ko) 2003-05-12
WO1995033594A1 (en) 1995-12-14
DE69507575D1 (de) 1999-03-11
DE69507575T2 (de) 1999-06-02
EP0712346B2 (en) 2005-06-22
DE712346T1 (de) 1996-11-07
CN1107570C (zh) 2003-05-07
EP0712346B1 (en) 1999-01-27
KR960703703A (ko) 1996-08-31
CN1129416A (zh) 1996-08-21
DE69507575T3 (de) 2006-03-02
US5763855A (en) 1998-06-09
EP0712346A1 (en) 1996-05-22

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