TW202400955A - Porous ceramic heat spreader and manufacturing method thereof - Google Patents
Porous ceramic heat spreader and manufacturing method thereof Download PDFInfo
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- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 56
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- IATRAKWUXMZMIY-UHFFFAOYSA-N strontium oxide Chemical compound [O-2].[Sr+2] IATRAKWUXMZMIY-UHFFFAOYSA-N 0.000 claims description 42
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 26
- 238000000465 moulding Methods 0.000 claims description 26
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 23
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- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 claims description 22
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- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical group O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 14
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- 239000011734 sodium Substances 0.000 claims description 14
- KKCBUQHMOMHUOY-UHFFFAOYSA-N sodium oxide Chemical compound [O-2].[Na+].[Na+] KKCBUQHMOMHUOY-UHFFFAOYSA-N 0.000 claims description 14
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- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 claims description 8
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- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims description 7
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical group Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 7
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- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 claims description 6
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- VXAUWWUXCIMFIM-UHFFFAOYSA-M aluminum;oxygen(2-);hydroxide Chemical compound [OH-].[O-2].[Al+3] VXAUWWUXCIMFIM-UHFFFAOYSA-M 0.000 claims 1
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Abstract
Description
本發明係有關散熱鰭片技術領域，特別係指一種多孔洞陶瓷散熱鰭片及其製造方法。The present invention relates to the technical field of heat dissipation fins, and in particular to a porous ceramic heat dissipation fin and a manufacturing method thereof.
高功率電子零件在運作之過程所產生熱，需藉由傳導、對流及輻射方式將熱排出，以降低電子產品的運轉溫度，進而維持系統運轉的穩定度與可靠度。The heat generated by high-power electronic components during operation needs to be discharged through conduction, convection and radiation to reduce the operating temperature of electronic products and thereby maintain the stability and reliability of system operation.
電子元件常用的散熱方式為散熱片，散熱片為一種固定於電子元件表面之導熱性材料，藉以將電子元件產生之熱傳導至周圍環境，其構造多為底板和鰭片所組成，底板部份直接與電子元件接觸，主要作用為均熱，使熱快速傳導及擴散；鰭片部份之作用為散熱，藉由表面積之增加來傳遞經由底板所擴散之熱，並由空氣對流將熱自鰭片表面散至周圍環境。The commonly used heat dissipation method for electronic components is a heat sink. The heat sink is a thermally conductive material fixed on the surface of the electronic component to conduct the heat generated by the electronic component to the surrounding environment. Its structure is mostly composed of a base plate and fins. The base plate part is directly When in contact with electronic components, its main function is to distribute heat, allowing rapid heat conduction and diffusion; the function of the fins is to dissipate heat, by increasing the surface area to transfer the heat diffused through the base plate, and by air convection, the heat is transferred from the fins The surface is dispersed into the surrounding environment.
當鰭片表面積越大，其散熱效果越佳。但是由於材料本身的材料特性和加工程式，因此經過這些年的發展已經發現瓶頸，當需要增加鰭片的散熱面積時，就需要增加機械加工程式及工時成本提高外，而且以CNC來增加的散熱面積有限。近年來由於半導體技術之快速發展，電子產品朝向輕薄短小，快速與多功能的需求下，其所使用的高功率電子零件發熱量越來越高，使得電子產品的散熱成為一棘手的難題。The larger the fin surface area, the better the heat dissipation effect. However, due to the material properties and processing methods of the material itself, bottlenecks have been discovered after these years of development. When it is necessary to increase the heat dissipation area of the fins, it is necessary to increase the mechanical processing methods and increase the labor cost, and it is increased by CNC. The heat dissipation area is limited. In recent years, due to the rapid development of semiconductor technology, electronic products have become lighter, shorter, faster, and more versatile. The high-power electronic parts used in them generate more and more heat, making the heat dissipation of electronic products a thorny problem.
為達到散熱效果，昔日的鋁質散熱片散熱效果已不符所需。多孔陶瓷散熱片有輕薄、高熔點、非導體、易大量生產之特性外，並有較高的耐冷熱衝擊性/低熱膨脹係數/輕薄/多孔隙散熱/降低EMI干擾等優點，以為高功率電子產品自然對流散熱的主流之一。In order to achieve the heat dissipation effect, the heat dissipation effect of the aluminum heat sink of the past is no longer what is needed. Porous ceramic heat sinks are thin, high melting point, non-conductive, and easy to mass-produce. They also have the advantages of high thermal shock resistance, low thermal expansion coefficient, thinness, porous heat dissipation, and reduced EMI interference. They are suitable for high-power electronics. One of the mainstream products is natural convection heat dissipation.
多孔材料的性能主要取決於孔隙率，其影響權重超出其他所有影響因素。 TW 第I189036號發明專利揭示了「孔洞結構陶瓷散熱片」。其主要係由散熱層及導熱層構成，該散熱層係利用微觀化學液相變化原理，以乳膠狀漿料不均勻分散，形成陶瓷粉的微胞結構並與次微米粉體結合，再燒結成具中空結晶體的孔洞化結構散熱層。該散熱層孔隙率在5%-40%之間，粉體粒徑在0.125-0.49 μm之間，其與熱源接觸面具有一層導熱層，藉導熱層吸收熱源熱量，再藉由散熱層中空結晶體的孔洞化結構的高表面積，以空氣為散熱媒介，來提高散熱片的散熱能力。The properties of porous materials are primarily determined by porosity, which outweighs all other influencing factors. TW Invention Patent No. I189036 reveals "hole structure ceramic heat sink". It is mainly composed of a heat dissipation layer and a thermal conductive layer. The heat dissipation layer uses the principle of microscopic chemical liquid phase change to unevenly disperse latex-like slurry to form a microcell structure of ceramic powder and combine with sub-micron powder, and then sintered into A heat dissipation layer with a hollow crystal structure. The porosity of the heat dissipation layer is between 5% and 40%, and the powder particle size is between 0.125 and 0.49 μm. The contact surface with the heat source has a thermal conductive layer. The heat conductive layer absorbs the heat of the heat source, and then uses the hollow crystals of the heat dissipation layer. The high surface area of the hole structure uses air as the heat dissipation medium to improve the heat dissipation capacity of the heat sink.
為更進一步提高散熱片的散熱能力，TW 第I299975號發明專利揭示了「複合多層式多孔洞結構陶瓷散熱器」，如第 1 圖所示。複合多層式多孔洞結構陶瓷散熱器(2)其主要包含有陶瓷材料之散熱層(21)、金屬材料之吸熱層(22)及介於散熱層(21)與吸熱層(22)間之導接層(23)；該散熱層(21)具有散熱基部(211)及外散熱頂部(213)。由於導接層(23)係使用錫膏以銲錫方式將散熱基部(211)與 吸熱層(22) 銲接或使用導熱膠、導熱膏或其他導熱黏劑將散熱基部(211)與吸熱層(22)黏接，因此，在散熱器之整體製程相當不方便外，散熱器於XY平面之熱均勻度亦不甚佳。In order to further improve the heat dissipation capacity of the heat sink, TW invention patent No. I299975 reveals a "composite multi-layered porous structure ceramic heat sink", as shown in Figure 1. The composite multi-layered porous structure ceramic radiator (2) mainly includes a heat dissipation layer (21) of ceramic material, a heat absorption layer (22) of metal material, and a conductor between the heat dissipation layer (21) and the heat absorption layer (22). The heat dissipation layer (21) has a heat dissipation base (211) and an external heat dissipation top (213). Because the conductive layer (23) uses solder paste to solder the heat dissipation base (211) and the heat absorption layer (22), or uses thermal conductive glue, thermal conductive paste or other thermal conductive adhesives to connect the heat dissipation base (211) and the heat absorption layer (22). ) bonding, therefore, the overall manufacturing process of the radiator is quite inconvenient, and the thermal uniformity of the radiator on the XY plane is also not very good.
本發明提供了一種多孔洞陶瓷散熱鰭片，包括：一陶瓷散熱基部，包括一第一散熱面與一第二散熱面，其中，該第一散熱面與該第二散熱面平行；一陶瓷外散熱頂部，耦接該陶瓷散熱基部的該第一散熱面；及一金屬散熱層，燒結一複合金屬於該散熱基部的該第二散熱面；其中，該陶瓷外散熱頂部與該陶瓷散熱基部係一體成型。The invention provides a porous ceramic heat dissipation fin, which includes: a ceramic heat dissipation base, including a first heat dissipation surface and a second heat dissipation surface, wherein the first heat dissipation surface is parallel to the second heat dissipation surface; a ceramic outer surface The heat dissipation top is coupled to the first heat dissipation surface of the ceramic heat dissipation base; and a metal heat dissipation layer is sintered with a composite metal on the second heat dissipation surface of the heat dissipation base; wherein the ceramic outer heat dissipation top and the ceramic heat dissipation base are One-piece molding.
本發明還提供了一種多孔洞陶瓷散熱鰭片製造方法，包括：備置陶瓷散熱鰭片原料；成型一陶瓷散熱鰭片；燒結陶瓷散熱鰭片；塗佈一複合金屬於該陶瓷散熱鰭片；及燒結該複合金屬於該陶瓷散熱鰭片。The invention also provides a method for manufacturing porous ceramic heat sink fins, which includes: preparing ceramic heat sink raw materials; shaping a ceramic heat sink fin; sintering the ceramic heat sink fin; coating a composite metal on the ceramic heat sink fin; and The composite metal is sintered on the ceramic heat dissipation fin.
如前所述，本發明披露了多孔洞陶瓷散熱鰭片。多孔洞陶瓷散熱鰭片之陶瓷外散熱頂部與陶瓷散熱基部係一體成型，並燒結一複合金屬於該散熱基部的一第二散熱面。因此，該散熱鰭片之整體製程相當方便外，亦可大大提升散熱器於XY平面之熱均勻度。As mentioned above, the present invention discloses porous ceramic heat dissipation fins. The ceramic outer heat dissipation top of the porous ceramic heat dissipation fin and the ceramic heat dissipation base are integrally formed, and a composite metal is sintered on a second heat dissipation surface of the heat dissipation base. Therefore, the overall manufacturing process of the heat dissipation fin is very convenient, and it can also greatly improve the thermal uniformity of the heat sink on the XY plane.
以下將對本發明的實施例給出詳細的說明。儘管本發明透過這些實施方式進行闡述和說明，但需要注意的是本發明並不僅僅只局限於這些實施方式。相反地，本發明涵蓋後附申請專利範圍所定義的發明精神和發明範圍內的所有替代物、變體和等同物。在以下對本發明的詳細描述中，為了提供一個針對本發明的完全的理解，闡明了大量的具體細節。然而，本領域技術人員將理解，沒有這些具體細節，本發明同樣可以實施。在另外的一些實例中，對於大家熟知的方案、流程、元件和電路未作詳細描述，以便於凸顯本發明的主旨。A detailed description of the embodiments of the present invention will be given below. Although the present invention has been illustrated and described through these embodiments, it should be noted that the present invention is not limited only to these embodiments. On the contrary, the invention covers all alternatives, modifications and equivalents falling within the spirit and scope of the invention as defined by the appended claims. In the following detailed description of the invention, numerous specific details are set forth in order to provide a thorough understanding of the invention. However, one skilled in the art will understand that the present invention may be practiced without these specific details. In some other examples, well-known solutions, processes, components and circuits are not described in detail in order to highlight the gist of the present invention.
第2圖係根據本發明第1個實施例的多孔洞陶瓷散熱鰭片100。多孔洞陶瓷散熱鰭片100 包括一陶瓷散熱基部(101)，包括一第一散熱面(1011)與一第二散熱面(1012)，其中，該第一散熱面(1011)與該第二散熱面(1012)平行；一陶瓷外散熱頂部 ( 1021)，耦接該陶瓷散熱基部(101)的該第一散熱面(1011)；及一複合金屬散熱層(103)，一複合金屬燒結於該陶瓷散熱基部(101)的該第二散熱面(1012)；其中，該陶瓷外散熱頂部(1021)與該陶瓷散熱基部(101)係一體成型。在另一實施例中，該陶瓷外散熱頂部(1021)與該陶瓷散熱基部(101)兩者係呈水平，且該陶瓷散熱基部(101) 包括但不限定為正方形或長方形。 Figure 2 shows a porous ceramic heat dissipation fin 100 according to the first embodiment of the present invention. The porous ceramic heat dissipation fin 100 includes a ceramic heat dissipation base (101), including a first heat dissipation surface (1011) and a second heat dissipation surface (1012), wherein the first heat dissipation surface (1011) and the second heat dissipation surface (1012) The surface (1012) is parallel; a ceramic external heat dissipation top ( 1021) is coupled to the first heat dissipation surface (1011) of the ceramic heat dissipation base (101); and a composite metal heat dissipation layer (103), a composite metal is sintered on the The second heat dissipation surface (1012) of the ceramic heat dissipation base (101); wherein, the ceramic outer heat dissipation top (1021) and the ceramic heat dissipation base (101) are integrally formed. In another embodiment, the ceramic outer heat dissipation top (1021) and the ceramic heat dissipation base (101) are both horizontal, and the ceramic heat dissipation base (101) includes but is not limited to a square or a rectangle.
多孔洞陶瓷散熱鰭片100之該複合金屬散熱層(103)係與熱源(未示出)貼合，以吸收熱源熱量並經由陶瓷散熱基部(101)與陶瓷外散熱頂部(1021)，藉對流將熱源帶離排出以降低熱源之溫度。The composite metal heat dissipation layer (103) of the porous ceramic heat dissipation fin 100 is attached to the heat source (not shown) to absorb the heat from the heat source and pass through the ceramic heat dissipation base (101) and the ceramic outer heat dissipation top (1021), through convection Take the heat source away from the exhaust to lower the temperature of the heat source.
在一實施例中，該外散熱頂部(1021)與該散熱基部(101)由一陶瓷粉末與一玻璃粉末，經910℃燒結成型。燒結成型的方式包括但不限定為高壓擠出再滾壓成型、或沖壓成型、調配成漿料灌注成型、噴霧造粒或濕式造粒。在一實施例中，該玻璃粉末係選自三氧化二鋁Al 2O 3、二氧化矽SiO 2、三氧化二硼B 2O 3、三氧化二鉍 Bi 2O 3、氧化鋅ZnO、氧化鈣CaO、氧化鎂MgO、氧化鍶SrO及氧化鈉Na 2O所組成的群組之任一。在另一實施例中，該陶瓷粉末為氮化鋁AlN、氮化矽SiN、氮化硼BN、碳化矽SiC或石墨烯粉末(Graphene)，且與該玻璃粉末之比例為 0.001~0.2。 In one embodiment, the external heat dissipation top (1021) and the heat dissipation base (101) are formed by sintering at 910°C from a ceramic powder and a glass powder. The method of sintering molding includes but is not limited to high-pressure extrusion and then roll molding, or stamping molding, blending into slurry injection molding, spray granulation or wet granulation. In one embodiment, the glass powder is selected from aluminum oxide Al 2 O 3 , silicon dioxide SiO 2 , boron trioxide B 2 O 3 , bismuth trioxide Bi 2 O 3 , zinc oxide ZnO, oxide Any one of the group consisting of calcium CaO, magnesium oxide MgO, strontium oxide SrO and sodium oxide Na 2 O. In another embodiment, the ceramic powder is aluminum nitride AlN, silicon nitride SiN, boron nitride BN, silicon carbide SiC or graphene powder (Graphene), and the ratio to the glass powder is 0.001~0.2.
由銅(Cu) 粉末或鋁(Al) 粉末與一玻璃粉末組成之膏狀體之複合金屬，塗佈於該陶瓷散熱基部(101)的該第二散熱面(1012)，經高溫燒結後以形成該複合金屬散熱層(103)。在一實施例中，該複合金屬中之銅(Cu) 粉末或鋁(Al) 粉末與玻璃粉末之比例為 0.001~0.25。在另一實施例中，該玻璃粉末係選自三氧化二鋁Al 2O 3、二氧化矽SiO 2、三氧化二硼B 2O 3、三氧化二鉍 Bi 2O 3、氧化鋅ZnO、氧化鈣CaO、氧化鎂MgO、氧化鍶SrO及氧化鈉Na 2O所組成的群組之任一。 A paste-like composite metal composed of copper (Cu) powder or aluminum (Al) powder and a glass powder is coated on the second heat dissipation surface (1012) of the ceramic heat dissipation base (101), and is sintered at high temperature. The composite metal heat dissipation layer (103) is formed. In one embodiment, the ratio of copper (Cu) powder or aluminum (Al) powder to glass powder in the composite metal is 0.001~0.25. In another embodiment, the glass powder is selected from aluminum oxide Al 2 O 3 , silicon dioxide SiO 2 , boron trioxide B 2 O 3 , bismuth trioxide Bi 2 O 3 , zinc oxide ZnO, Any one of the group consisting of calcium oxide CaO, magnesium oxide MgO, strontium oxide SrO and sodium oxide Na 2 O.
由於該複合金屬與該散熱基部(101)皆具有玻璃粉末成分，因此，可以用較低溫度將複合金屬燒結於該第二散熱面(1012)外，並可提高複合金屬與該第二散熱面(1012) 間之附著力(adhesion)。如此一來，該複合金屬中高導熱之銅或鋁成分，可以吸收熱源熱量並經由陶瓷散熱基部(101)與陶瓷外散熱頂部(1021)，將熱源之熱藉對流方式帶離排出至空氣中。Since both the composite metal and the heat dissipation base (101) have glass powder components, the composite metal can be sintered outside the second heat dissipation surface (1012) at a lower temperature, and the composite metal and the second heat dissipation surface can be improved (1012) Adhesion between. In this way, the highly thermally conductive copper or aluminum component in the composite metal can absorb the heat from the heat source and take away the heat from the heat source and discharge it to the air through convection through the ceramic heat dissipation base (101) and the ceramic external heat dissipation top (1021).
在一實施例中，包含銅(Cu) 粉末之複合金屬燒結於該第二散熱面(1012)之燒結溫度為750~900 oC。在另一實施例中，包含鋁(Al) 粉末之複合金屬燒結於該第二散熱面(1012)之燒結溫度為700~800 oC。 In one embodiment, the sintering temperature of the composite metal including copper (Cu) powder on the second heat dissipation surface (1012) is 750~900 ° C. In another embodiment, the sintering temperature of the composite metal including aluminum (Al) powder on the second heat dissipation surface (1012) is 700~800 °C .
配合散熱鰭片之散熱需求，陶瓷外散熱頂部(102)可有不同的形態。第3圖係根據本發明第2個實施例的多孔洞陶瓷散熱鰭片200。多孔洞陶瓷散熱鰭片200 包括一陶瓷散熱基部(101)，包括一第一散熱面(1011)與一第二散熱面(1012)，其中，該第一散熱面(1011)與該第二散熱面平行(1012)；一陶瓷外散熱頂部(1022)，耦接該陶瓷散熱基部(101)的該第一散熱面(1011)；及一複合金屬散熱層(103)，一複合金屬燒結於該陶瓷散熱基部(101)的該第二散熱面(1012)；其中，該陶瓷外散熱頂部(1022)與該陶瓷散熱基部(101)係一體成型。燒結成型的方式包括但不限定為高壓擠出再滾壓成型、或沖壓成型、調配成漿料灌注成型、噴霧造粒或濕式造粒。在一實施例中，該陶瓷外散熱頂部(1022)與該陶瓷散熱基部(101)兩者係呈垂直。在另一實施例中，該陶瓷散熱基部(101) 不限定為正方形或長方形。To meet the heat dissipation requirements of the heat dissipation fins, the ceramic outer heat dissipation top (102) can have different shapes. Figure 3 shows a porous ceramic heat dissipation fin 200 according to the second embodiment of the present invention. The porous ceramic heat dissipation fin 200 includes a ceramic heat dissipation base (101), including a first heat dissipation surface (1011) and a second heat dissipation surface (1012), wherein the first heat dissipation surface (1011) and the second heat dissipation surface (1012) The surfaces are parallel (1012); a ceramic external heat dissipation top (1022) is coupled to the first heat dissipation surface (1011) of the ceramic heat dissipation base (101); and a composite metal heat dissipation layer (103), a composite metal is sintered on the The second heat dissipation surface (1012) of the ceramic heat dissipation base (101); wherein, the ceramic outer heat dissipation top (1022) and the ceramic heat dissipation base (101) are integrally formed. The method of sintering molding includes but is not limited to high-pressure extrusion and then roll molding, or stamping molding, blending into slurry injection molding, spray granulation or wet granulation. In one embodiment, the ceramic outer heat dissipation top (1022) and the ceramic heat dissipation base (101) are vertical. In another embodiment, the ceramic heat dissipation base (101) is not limited to a square or rectangular shape.
多孔洞陶瓷散熱鰭片100之該複合金屬散熱層(103)係與熱源(未示出)貼合，以吸收熱源熱量並經由陶瓷散熱基部(101)與陶瓷外散熱頂部(1022)，藉對流將熱源帶離排出以降低熱源之溫度。The composite metal heat dissipation layer (103) of the porous ceramic heat dissipation fin 100 is bonded with the heat source (not shown) to absorb the heat from the heat source and pass through the ceramic heat dissipation base (101) and the ceramic outer heat dissipation top (1022) through convection. Take the heat source away from the exhaust to lower the temperature of the heat source.
在一實施例中，該外散熱頂部(1022)與該散熱基部(101)由一陶瓷粉末與一玻璃粉末，經910℃燒結成型。燒結成型的方式包括但不限定為高壓擠出再滾壓成型、或沖壓成型、調配成漿料灌注成型、噴霧造粒或濕式造粒。在一實施例中，該玻璃粉末係選自三氧化二鋁Al 2O 3、二氧化矽SiO 2、三氧化二硼B 2O 3、三氧化二鉍 Bi 2O 3、氧化鋅ZnO、氧化鈣CaO、氧化鎂MgO、氧化鍶SrO及氧化鈉Na 2O所組成的群組之任一。在另一實施例中，該陶瓷粉末為氮化鋁AlN、氮化矽SiN、氮化硼BN、碳化矽SiC或石墨烯粉末(Graphene)，且與該玻璃粉末之比例為 0.001~0.2。 In one embodiment, the external heat dissipation top (1022) and the heat dissipation base (101) are formed by sintering at 910°C from a ceramic powder and a glass powder. The method of sintering molding includes but is not limited to high-pressure extrusion and then roll molding, or stamping molding, blending into slurry injection molding, spray granulation or wet granulation. In one embodiment, the glass powder is selected from aluminum oxide Al 2 O 3 , silicon dioxide SiO 2 , boron trioxide B 2 O 3 , bismuth trioxide Bi 2 O 3 , zinc oxide ZnO, oxide Any one of the group consisting of calcium CaO, magnesium oxide MgO, strontium oxide SrO and sodium oxide Na 2 O. In another embodiment, the ceramic powder is aluminum nitride AlN, silicon nitride SiN, boron nitride BN, silicon carbide SiC or graphene powder (Graphene), and the ratio to the glass powder is 0.001~0.2.
由銅(Cu) 粉末或鋁(Al) 粉末與一玻璃粉末組成之膏狀體之複合金屬，塗佈於該陶瓷散熱基部(101)的該第二散熱面(1012)，經高溫燒結後以形成該複合金屬散熱層(103)。在一實施例中，該複合金屬中之銅(Cu) 粉末或鋁(Al) 粉末與玻璃粉末之比例為 0.001~0.25。在另一實施例中，該玻璃粉末係選自三氧化二鋁Al 2O 3、二氧化矽SiO 2、三氧化二硼B 2O 3、三氧化二鉍 Bi 2O 3、氧化鋅ZnO、氧化鈣CaO、氧化鎂MgO、氧化鍶SrO及氧化鈉Na 2O所組成的群組之任一。 A composite metal paste composed of copper (Cu) powder or aluminum (Al) powder and a glass powder is coated on the second heat dissipation surface (1012) of the ceramic heat dissipation base (101), and is sintered at high temperature. The composite metal heat dissipation layer (103) is formed. In one embodiment, the ratio of copper (Cu) powder or aluminum (Al) powder to glass powder in the composite metal is 0.001~0.25. In another embodiment, the glass powder is selected from aluminum oxide Al 2 O 3 , silicon dioxide SiO 2 , boron trioxide B 2 O 3 , bismuth trioxide Bi 2 O 3 , zinc oxide ZnO, Any one of the group consisting of calcium oxide CaO, magnesium oxide MgO, strontium oxide SrO and sodium oxide Na 2 O.
由於該複合金屬與該散熱基部(101)皆具有玻璃粉末成分，因此，可以用較低溫度將複合金屬燒結於該第二散熱面(1012)外，並可提高複合金屬與該第二散熱面(1012) 間之附著力(adhesion)。如此一來，該複合金屬中高導熱之銅或鋁成分，可以吸收熱源熱量並經由陶瓷散熱基部(101)與陶瓷外散熱頂部(1022)，將熱源之熱藉對流方式帶離排出至空氣中。Since both the composite metal and the heat dissipation base (101) have glass powder components, the composite metal can be sintered outside the second heat dissipation surface (1012) at a lower temperature, and the composite metal and the second heat dissipation surface can be improved (1012) Adhesion between. In this way, the highly thermally conductive copper or aluminum component in the composite metal can absorb the heat from the heat source and take away the heat from the heat source and discharge it to the air through convection through the ceramic heat dissipation base (101) and the ceramic external heat dissipation top (1022).
在一實施例中，包含銅(Cu) 粉末之複合金屬燒結於該第二散熱面(1012)之燒結溫度為750~900 oC。在另一實施例中，包含鋁(Al) 粉末之複合金屬燒結於該第二散熱面(1012)之燒結溫度為700~800 oC。 In one embodiment, the sintering temperature of the composite metal including copper (Cu) powder on the second heat dissipation surface (1012) is 750~900 ° C. In another embodiment, the sintering temperature of the composite metal including aluminum (Al) powder on the second heat dissipation surface (1012) is 700~800 °C .
第4圖係根據本發明第3個實施例的多孔洞陶瓷散熱鰭片300。多孔洞陶瓷散熱鰭片300 包括一陶瓷散熱基部(101)，包括一第一散熱面(1011)與一第二散熱面(1012)，其中，該第一散熱面(1011)與該第二散熱面平行(1012)；一陶瓷外散熱頂部(1023)，耦接該陶瓷散熱基部(101)的該第一散熱面(1011)；及一複合金屬散熱層(103)，一複合金屬燒結於該陶瓷散熱基部(101)的該第二散熱面(1012)；其中，該陶瓷外散熱頂部(1023)與該陶瓷散熱基部(101)係一體成型。燒結成型的方式包括但不限定為高壓擠出再滾壓成型、或沖壓成型、調配成漿料灌注成型、噴霧造粒或濕式造粒。在一實施例中，該陶瓷外散熱頂部(1023)與該陶瓷散熱基部(101)兩者係呈垂直。在另一實施例中，該陶瓷散熱基部(101) 不限定為正方形或長方形。Figure 4 shows a porous ceramic heat dissipation fin 300 according to the third embodiment of the present invention. The porous ceramic heat dissipation fin 300 includes a ceramic heat dissipation base (101), including a first heat dissipation surface (1011) and a second heat dissipation surface (1012), wherein the first heat dissipation surface (1011) and the second heat dissipation surface (1012) The surfaces are parallel (1012); a ceramic external heat dissipation top (1023) is coupled to the first heat dissipation surface (1011) of the ceramic heat dissipation base (101); and a composite metal heat dissipation layer (103), a composite metal is sintered on the The second heat dissipation surface (1012) of the ceramic heat dissipation base (101); wherein, the ceramic outer heat dissipation top (1023) and the ceramic heat dissipation base (101) are integrally formed. The method of sintering molding includes but is not limited to high-pressure extrusion and then roll molding, or stamping molding, blending into slurry injection molding, spray granulation or wet granulation. In one embodiment, the ceramic outer heat dissipation top (1023) and the ceramic heat dissipation base (101) are vertical. In another embodiment, the ceramic heat dissipation base (101) is not limited to a square or rectangular shape.
多孔洞陶瓷散熱鰭片100之該複合金屬散熱層(103)係與熱源(未示出)貼合，以吸收熱源熱量並經由陶瓷散熱基部(101)與陶瓷外散熱頂部(1023)，藉對流將熱源帶離排出以降低熱源之溫度。The composite metal heat dissipation layer (103) of the porous ceramic heat dissipation fin 100 is attached to the heat source (not shown) to absorb the heat from the heat source and pass through the ceramic heat dissipation base (101) and the ceramic outer heat dissipation top (1023), through convection Take the heat source away from the exhaust to lower the temperature of the heat source.
在一實施例中，該外散熱頂部(1023)與該散熱基部(101)由一陶瓷粉末與一玻璃粉末，經910℃燒結成型。燒結成型的方式包括但不限定為高壓擠出再滾壓成型、或沖壓成型、調配成漿料灌注成型、噴霧造粒或濕式造粒。在一實施例中，該玻璃粉末係選自三氧化二鋁Al 2O 3、二氧化矽SiO 2、三氧化二硼B 2O 3、三氧化二鉍 Bi 2O 3、氧化鋅ZnO、氧化鈣CaO、氧化鎂MgO、氧化鍶SrO及氧化鈉Na 2O所組成的群組之任一。在另一實施例中，該陶瓷粉末為氮化鋁AlN、氮化矽SiN、氮化硼BN、碳化矽SiC或石墨烯粉末(Graphene)，且與該玻璃粉末之比例為 0.001~0.2。 In one embodiment, the external heat dissipation top (1023) and the heat dissipation base (101) are formed by sintering at 910°C from a ceramic powder and a glass powder. The method of sintering molding includes but is not limited to high-pressure extrusion and then roll molding, or stamping molding, blending into slurry injection molding, spray granulation or wet granulation. In one embodiment, the glass powder is selected from aluminum oxide Al 2 O 3 , silicon dioxide SiO 2 , boron trioxide B 2 O 3 , bismuth trioxide Bi 2 O 3 , zinc oxide ZnO, oxide Any one of the group consisting of calcium CaO, magnesium oxide MgO, strontium oxide SrO and sodium oxide Na 2 O. In another embodiment, the ceramic powder is aluminum nitride AlN, silicon nitride SiN, boron nitride BN, silicon carbide SiC or graphene powder (Graphene), and the ratio to the glass powder is 0.001~0.2.
由銅(Cu) 粉末或鋁(Al) 粉末與一玻璃粉末組成之膏狀體之複合金屬，塗佈於該陶瓷散熱基部(101)的該第二散熱面(1012)，經高溫燒結後以形成該複合金屬散熱層(103)。在一實施例中，該複合金屬中之銅(Cu) 粉末或鋁(Al) 粉末與玻璃粉末之比例為 0.001~0.25。在另一實施例中，該玻璃粉末係選自三氧化二鋁Al 2O 3、二氧化矽SiO 2、三氧化二硼B 2O 3、三氧化二鉍 Bi 2O 3、氧化鋅ZnO、氧化鈣CaO、氧化鎂MgO、氧化鍶SrO及氧化鈉Na 2O所組成的群組之任一。 A paste-like composite metal composed of copper (Cu) powder or aluminum (Al) powder and a glass powder is coated on the second heat dissipation surface (1012) of the ceramic heat dissipation base (101), and is sintered at high temperature. The composite metal heat dissipation layer (103) is formed. In one embodiment, the ratio of copper (Cu) powder or aluminum (Al) powder to glass powder in the composite metal is 0.001~0.25. In another embodiment, the glass powder is selected from aluminum oxide Al 2 O 3 , silicon dioxide SiO 2 , boron trioxide B 2 O 3 , bismuth trioxide Bi 2 O 3 , zinc oxide ZnO, Any one of the group consisting of calcium oxide CaO, magnesium oxide MgO, strontium oxide SrO and sodium oxide Na 2 O.
由於該複合金屬與該散熱基部(101)皆具有玻璃粉末成分，因此，可以用較低溫度將複合金屬燒結於該第二散熱面(1012)外，並可提高複合金屬與該第二散熱面(1012) 間之附著力(adhesion)。如此一來，該複合金屬中高導熱之銅或鋁成分，可以吸收熱源熱量並經由陶瓷散熱基部(101)與陶瓷外散熱頂部(1023)，將熱源之熱藉對流方式帶離排出至空氣中。Since both the composite metal and the heat dissipation base (101) have glass powder components, the composite metal can be sintered outside the second heat dissipation surface (1012) at a lower temperature, and the composite metal and the second heat dissipation surface can be improved (1012) Adhesion between. In this way, the highly thermally conductive copper or aluminum component in the composite metal can absorb the heat from the heat source and take away the heat from the heat source and discharge it to the air through convection through the ceramic heat dissipation base (101) and the ceramic external heat dissipation top (1023).
在一實施例中，包含銅(Cu) 粉末之複合金屬燒結於該第二散熱面(1012)之燒結溫度為750~900 oC。在另一實施例中，包含鋁(Al) 粉末之複合金屬燒結於該第二散熱面(1012)之燒結溫度為700~800 oC。 In one embodiment, the sintering temperature of the composite metal including copper (Cu) powder on the second heat dissipation surface (1012) is 750~900 ° C. In another embodiment, the sintering temperature of the composite metal including aluminum (Al) powder on the second heat dissipation surface (1012) is 700~800 °C .
第5圖係根據本發明第4個實施例的多孔洞陶瓷散熱鰭片400。多孔洞陶瓷散熱鰭片400 包括一陶瓷散熱基部(101)，包括一第一散熱面(1011)與一第二散熱面(1012)，其中，該第一散熱面(1011)與該第二散熱面平行(1012)；一陶瓷外散熱頂部(1024)，耦接該陶瓷散熱基部(101)的該第一散熱面(1011)；及一複合金屬散熱層(103)，一複合金屬燒結於該陶瓷散熱基部(101)的該第二散熱面(1012)；其中，該陶瓷外散熱頂部(1024)與該陶瓷散熱基部(101)係一體成型。燒結成型的方式包括但不限定為高壓擠出再滾壓成型、或沖壓成型、調配成漿料灌注成型、噴霧造粒或濕式造粒。在一實施例中，該陶瓷外散熱頂部(1024)與該陶瓷散熱基部(101)兩者係呈垂直。在另一實施例中，該陶瓷散熱基部(101) 包括但不限定為正方形或長方形。Figure 5 shows a porous ceramic heat dissipation fin 400 according to the fourth embodiment of the present invention. The porous ceramic heat dissipation fin 400 includes a ceramic heat dissipation base (101), including a first heat dissipation surface (1011) and a second heat dissipation surface (1012), wherein the first heat dissipation surface (1011) and the second heat dissipation surface (1012) The surfaces are parallel (1012); a ceramic external heat dissipation top (1024) is coupled to the first heat dissipation surface (1011) of the ceramic heat dissipation base (101); and a composite metal heat dissipation layer (103), a composite metal is sintered on the The second heat dissipation surface (1012) of the ceramic heat dissipation base (101); wherein, the ceramic outer heat dissipation top (1024) and the ceramic heat dissipation base (101) are integrally formed. The method of sintering molding includes but is not limited to high-pressure extrusion and then roll molding, or stamping molding, blending into slurry injection molding, spray granulation or wet granulation. In one embodiment, the ceramic outer heat dissipation top (1024) and the ceramic heat dissipation base (101) are vertical. In another embodiment, the ceramic heat dissipation base (101) includes but is not limited to a square or rectangular shape.
多孔洞陶瓷散熱鰭片100之該複合金屬散熱層(103)係與熱源(未示出)貼合，以吸收熱源熱量並經由陶瓷散熱基部(101)與陶瓷外散熱頂部(1024)，藉對流將熱源帶離排出以降低熱源之溫度。The composite metal heat dissipation layer (103) of the porous ceramic heat dissipation fin 100 is adhered to the heat source (not shown) to absorb the heat from the heat source and pass through the ceramic heat dissipation base (101) and the ceramic outer heat dissipation top (1024), through convection Take the heat source away from the exhaust to lower the temperature of the heat source.
在一實施例中，該外散熱頂部(1024)與該散熱基部(101)由一陶瓷粉末與一玻璃粉末，經910℃燒結成型。燒結成型的方式包括但不限定為高壓擠出再滾壓成型、或沖壓成型、調配成漿料灌注成型、噴霧造粒或濕式造粒。在一實施例中，該玻璃粉末係選自三氧化二鋁Al 2O 3、二氧化矽SiO 2、三氧化二硼B 2O 3、三氧化二鉍 Bi 2O 3、氧化鋅ZnO、氧化鈣CaO、氧化鎂MgO、氧化鍶SrO及氧化鈉Na 2O所組成的群組之任一。在另一實施例中，該陶瓷粉末為氮化鋁AlN、氮化矽SiN、氮化硼BN、碳化矽SiC或石墨烯粉末(Graphene)，且與該玻璃粉末之比例為 0.001~0.2。 In one embodiment, the external heat dissipation top (1024) and the heat dissipation base (101) are formed by sintering at 910°C from a ceramic powder and a glass powder. The method of sintering molding includes but is not limited to high-pressure extrusion and then roll molding, or stamping molding, blending into slurry injection molding, spray granulation or wet granulation. In one embodiment, the glass powder is selected from aluminum oxide Al 2 O 3 , silicon dioxide SiO 2 , boron trioxide B 2 O 3 , bismuth trioxide Bi 2 O 3 , zinc oxide ZnO, oxide Any one of the group consisting of calcium CaO, magnesium oxide MgO, strontium oxide SrO and sodium oxide Na 2 O. In another embodiment, the ceramic powder is aluminum nitride AlN, silicon nitride SiN, boron nitride BN, silicon carbide SiC or graphene powder (Graphene), and the ratio to the glass powder is 0.001~0.2.
由銅(Cu) 粉末或鋁(Al) 粉末與一玻璃粉末組成之膏狀體之複合金屬，塗佈於該陶瓷散熱基部(101)的該第二散熱面(1012)，經高溫燒結後以形成該複合金屬散熱層(103)。在一實施例中，該複合金屬中之銅(Cu) 粉末或鋁(Al) 粉末與玻璃粉末之比例為 0.001~0.25。在另一實施例中，該玻璃粉末係選自三氧化二鋁Al 2O 3、二氧化矽SiO 2、三氧化二硼B 2O 3、三氧化二鉍 Bi 2O 3、氧化鋅ZnO、氧化鈣CaO、氧化鎂MgO、氧化鍶SrO及氧化鈉Na 2O所組成的群組之任一。 A composite metal paste composed of copper (Cu) powder or aluminum (Al) powder and a glass powder is coated on the second heat dissipation surface (1012) of the ceramic heat dissipation base (101), and is sintered at high temperature. The composite metal heat dissipation layer (103) is formed. In one embodiment, the ratio of copper (Cu) powder or aluminum (Al) powder to glass powder in the composite metal is 0.001~0.25. In another embodiment, the glass powder is selected from aluminum oxide Al 2 O 3 , silicon dioxide SiO 2 , boron trioxide B 2 O 3 , bismuth trioxide Bi 2 O 3 , zinc oxide ZnO, Any one of the group consisting of calcium oxide CaO, magnesium oxide MgO, strontium oxide SrO and sodium oxide Na 2 O.
由於該複合金屬與該散熱基部(101)皆具有玻璃粉末成分，因此，可以用較低溫度將複合金屬燒結於該第二散熱面(1012)外，並可提高複合金屬與該第二散熱面(1012) 間之附著力(adhesion)。如此一來，該複合金屬中高導熱之銅或鋁成分，可以吸收熱源熱量並經由陶瓷散熱基部(101)與陶瓷外散熱頂部(1024)，將熱源之熱藉對流方式帶離排出至空氣中。Since both the composite metal and the heat dissipation base (101) have glass powder components, the composite metal can be sintered outside the second heat dissipation surface (1012) at a lower temperature, and the composite metal and the second heat dissipation surface can be improved (1012) Adhesion between. In this way, the highly thermally conductive copper or aluminum component in the composite metal can absorb the heat from the heat source and take away the heat from the heat source and discharge it to the air through convection through the ceramic heat dissipation base (101) and the ceramic external heat dissipation top (1024).
在一實施例中，包含銅(Cu) 粉末之複合金屬燒結於該第二散熱面(1012)之燒結溫度為750~900 oC。在另一實施例中，包含鋁(Al) 粉末之複合金屬燒結於該第二散熱面(1012)之燒結溫度為700~800 oC。 In one embodiment, the sintering temperature of the composite metal including copper (Cu) powder on the second heat dissipation surface (1012) is 750~900 ° C. In another embodiment, the sintering temperature of the composite metal including aluminum (Al) powder on the second heat dissipation surface (1012) is 700~800 °C .
第6圖係根據本發明多孔洞陶瓷散熱鰭片之製造方法流程圖600。步驟 601，備置陶瓷散熱鰭片原料。陶瓷散熱鰭片原料由一陶瓷粉末與一玻璃粉末經過均勻混合而成。在一實施例中，該玻璃粉末係選自三氧化二鋁Al
2O
3、二氧化矽SiO
2、三氧化二硼B
2O
3、三氧化二鉍 Bi
2O
3、氧化鋅ZnO、氧化鈣CaO、氧化鎂MgO、氧化鍶SrO及氧化鈉Na
2O所組成的群組之任一。在另一實施例中，該陶瓷粉末為氮化鋁AlN、氮化矽SiN、氮化硼BN、碳化矽SiC或石墨烯粉末(Graphene)，且與該玻璃粉末之比例為 0.001~0.2。
Figure 6 is a
步驟 602，成型一陶瓷散熱鰭片。該陶瓷散熱鰭片係包括：一陶瓷散熱基部，包括一第一散熱面與一第二散熱面，其中，該第一散熱面與該第二散熱面平行；及一陶瓷外散熱頂部，耦接該散熱基部的該第一散熱面；其中，該陶瓷外散熱頂部與該散熱基部係一體成型。燒結成型的方式包括但不限定為高壓擠出再滾壓成型、或沖壓成型、調配成漿料灌注成型、噴霧造粒或濕式造粒。Step 602: Form a ceramic heat dissipation fin. The ceramic heat dissipation fin includes: a ceramic heat dissipation base, including a first heat dissipation surface and a second heat dissipation surface, wherein the first heat dissipation surface is parallel to the second heat dissipation surface; and a ceramic outer heat dissipation top, coupled The first heat dissipation surface of the heat dissipation base; wherein, the ceramic outer heat dissipation top and the heat dissipation base are integrally formed. The method of sintering molding includes but is not limited to high-pressure extrusion and then roll molding, or stamping molding, blending into slurry injection molding, spray granulation or wet granulation.
步驟 603，燒結該陶瓷散熱鰭片。以溫度750~1200℃燒結該陶瓷散熱鰭片。在一實施例中，該外散熱頂部(1021)與該散熱基部(101)由一陶瓷粉末與一玻璃粉末，經910℃燒結成型。Step 603: sinter the ceramic heat dissipation fin. The ceramic heat sink fins are sintered at a temperature of 750~1200°C. In one embodiment, the external heat dissipation top (1021) and the heat dissipation base (101) are formed by sintering at 910°C from a ceramic powder and a glass powder.
步驟 604，塗佈一複合金屬於該陶瓷散熱鰭片。該複合金屬由銅粉末或鋁粉末與一玻璃粉末組成膏狀體塗佈於該散熱基部的該第二散熱面。在一實施例中，該複合金屬中之銅(Cu) 粉末或鋁(Al) 粉末與玻璃粉末之比例為 0.001~0.25。在另一實施例中，該玻璃粉末係選自三氧化二鋁Al 2O 3、二氧化矽SiO 2、三氧化二硼B 2O 3、三氧化二鉍 Bi 2O 3、氧化鋅ZnO、氧化鈣CaO、氧化鎂MgO、氧化鍶SrO及氧化鈉Na 2O所組成的群組之任一。 Step 604: Coat a composite metal on the ceramic heat dissipation fin. The composite metal is a paste composed of copper powder or aluminum powder and a glass powder and is coated on the second heat dissipation surface of the heat dissipation base. In one embodiment, the ratio of copper (Cu) powder or aluminum (Al) powder to glass powder in the composite metal is 0.001~0.25. In another embodiment, the glass powder is selected from aluminum oxide Al 2 O 3 , silicon dioxide SiO 2 , boron trioxide B 2 O 3 , bismuth trioxide Bi 2 O 3 , zinc oxide ZnO, Any one of the group consisting of calcium oxide CaO, magnesium oxide MgO, strontium oxide SrO and sodium oxide Na 2 O.
步驟 605，燒結該複合金屬於該陶瓷散熱鰭片以形成該複合金屬散熱層(103)。在一實施例中，包含銅(Cu) 粉末之複合金屬燒結於該第二散熱面(1012)之燒結溫度為750~900 oC。在另一實施例中，包含鋁(Al) 粉末之複合金屬燒結於該第二散熱面(1012)之燒結溫度為700~800 oC。 Step 605: Sinter the composite metal on the ceramic heat dissipation fin to form the composite metal heat dissipation layer (103). In one embodiment, the sintering temperature of the composite metal including copper (Cu) powder on the second heat dissipation surface (1012) is 750~900 ° C. In another embodiment, the sintering temperature of the composite metal including aluminum (Al) powder on the second heat dissipation surface (1012) is 700~800 °C .
如前所述，本發明披露了多孔洞陶瓷散熱鰭片。多孔洞陶瓷散熱鰭片之陶瓷外散熱頂部與陶瓷散熱基部係一體成型，並燒結一複合金屬於該散熱基部的一第二散熱面。由於複合金屬與散熱基部皆具有玻璃粉末，因此可以低溫燒結複合金屬與散熱基部外，並可提高複合金屬與散熱基部之該第二散熱面間之附著力。如此一來，散熱鰭片之整體製程相當方便外，亦可大大提升散熱器於XY平面之熱均勻度。As mentioned above, the present invention discloses porous ceramic heat dissipation fins. The ceramic outer heat dissipation top of the porous ceramic heat dissipation fin and the ceramic heat dissipation base are integrally formed, and a composite metal is sintered on a second heat dissipation surface of the heat dissipation base. Since both the composite metal and the heat dissipation base have glass powder, the composite metal and the heat dissipation base can be sintered at low temperature, and the adhesion between the composite metal and the second heat dissipation surface of the heat dissipation base can be improved. In this way, the overall manufacturing process of the heat sink is very convenient, and it can also greatly improve the thermal uniformity of the heat sink on the XY plane.
在此使用之措辭和表達都是用於說明而非限制，使用這些措辭和表達並不將在此圖示和描述的特性之任何等同物（或部分等同物）排除在發明範圍之外，在申請專利範內可能存在各種修改。其它的修改、變體和替換物也可能存在。因此，申請專利範旨在涵蓋所有此類等同物。The words and expressions used herein are for purposes of illustration and not limitation, and their use does not exclude from the scope of the invention any equivalents (or partial equivalents) of the features illustrated and described herein. There may be various modifications within the scope of the patent application. Other modifications, variations and substitutions may exist. Accordingly, the patent application is intended to cover all such equivalents.
100 ，200，300，400:多孔洞陶瓷散熱鰭片
101:陶瓷散熱基部
1011:第一散熱面
1012:第二散熱面
1021，1022，1023，1024:陶瓷外散熱頂部
103:複合金屬散熱層
600:多孔洞陶瓷散熱鰭片之製造流程圖
601，602，603，604，605:步驟
2:複合多層式多孔洞結構陶瓷散熱器(先前技術)
21:散熱層
22:金屬材料之吸熱層
23:導接層
211:散熱基部
213:外散熱頂部
100, 200, 300, 400: porous ceramic cooling fins
101: Ceramic heat dissipation base
1011: First heat dissipation surface
1012: Second heat dissipation surface
1021, 1022, 1023, 1024: Ceramic external heat dissipation top
103: Composite metal heat dissipation layer
600: Manufacturing flow chart of porous
第1圖 先前技術。 第2圖 根據本發明第1個實施例的多孔洞陶瓷散熱鰭片。 第3圖 根據本發明第2個實施例的多孔洞陶瓷散熱鰭片。 第4圖 根據本發明第3個實施例的多孔洞陶瓷散熱鰭片。 第5圖 根據本發明第4個實施例的多孔洞陶瓷散熱鰭片。 第6圖 根據本發明多孔洞陶瓷散熱鰭片之製造流程圖。 Figure 1 Prior art. Figure 2: A porous ceramic heat dissipation fin according to the first embodiment of the present invention. Figure 3: Porous ceramic heat dissipation fin according to the second embodiment of the present invention. Figure 4: Porous ceramic heat dissipation fin according to the third embodiment of the present invention. Figure 5: Porous ceramic heat dissipation fin according to the fourth embodiment of the present invention. Figure 6 is a flow chart of manufacturing a porous ceramic heat dissipation fin according to the present invention.
100:多孔洞陶瓷散熱鰭片 100:Porous ceramic cooling fins
101:陶瓷散熱基部 101: Ceramic heat dissipation base
1011:第一散熱面 1011: First heat dissipation surface
1012:第二散熱面 1012: Second heat dissipation surface
1021:陶瓷外散熱頂部 1021: Ceramic external heat dissipation top
103:複合金屬散熱層 103: Composite metal heat dissipation layer
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