TW202319645A - Vacuum pump - Google Patents

Vacuum pump Download PDF

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Publication number
TW202319645A
TW202319645A TW111124973A TW111124973A TW202319645A TW 202319645 A TW202319645 A TW 202319645A TW 111124973 A TW111124973 A TW 111124973A TW 111124973 A TW111124973 A TW 111124973A TW 202319645 A TW202319645 A TW 202319645A
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Taiwan
Prior art keywords
turbine
vacuum pump
oil
pump
lubricated
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TW111124973A
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Chinese (zh)
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勞倫 畢席特
盧卡斯 雷
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法商普發真空公司
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Publication of TW202319645A publication Critical patent/TW202319645A/en

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02—Lubrication; Lubricant separation
    • F04C29/025—Lubrication; Lubricant separation using a lubricant pump
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/123—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially or approximately radially from the rotor body extending tooth-like elements, co-operating with recesses in the other rotor, e.g. one tooth
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

Vacuum pump (1) comprising a stator (4) comprising at least one compression chamber (5), two rotors (6) configured to rotate in the compression chamber (5) about a respective axis of rotation (I-I), the axes of rotation (I-I) being vertical, and elements to be lubricated mounted on shafts (7) of the rotors (6), characterized in that the vacuum pump (1) further comprises an oil pump (9) comprising an oil sump (13) and at least one turbine (14) mounted on one of the shafts (7) of the rotors (6), the turbine (14) being bathed in a liquid lubricant received in a chamber of the oil sump (13), the rotation of the turbine (14) causing some of the lubricant to circulate in a lubricating duct (15) towards the elements to be lubricated.

Description

真空泵vacuum pump

本發明關於一種乾式真空泵，例如，具有垂直的旋轉軸線之「魯氏」(Roots)或「爪式」(Claw)或螺旋式類型的泵。The present invention relates to a dry vacuum pump, for example of the "Roots" or "Claw" or screw type pump with a vertical axis of rotation.

乾式真空泵包括串聯的一個或多個泵送級，待泵送的氣體通過一個或多個泵送級在抽吸入口和輸送出口之間循環。在已知的真空泵中，在具有旋轉波瓣的真空泵(其亦已知名稱為「魯氏」泵)、已知為「爪式」泵的泵、及螺旋式泵之間存在區別。同樣已知的是魯氏壓縮器(或「魯氏鼓風機」)類型的真空泵，其被使用在粗式真空泵(rough-vacuum pump)的上游，以增加高流量條件下的泵送能力。這些真空泵被稱為「乾式」，因為操作中轉子在定子內側旋轉，而沒有兩者之間或與定子之間的任何機械接觸，這使得其可能不會在泵送級中使用油。A dry vacuum pump consists of one or more pumping stages connected in series through which the gas to be pumped circulates between a suction inlet and a delivery outlet. Among the known vacuum pumps, a distinction is made between vacuum pumps with rotating lobes, which are also known under the designation "Rooper" pumps, pumps known as "claw" pumps, and screw pumps. Also known are Lubf compressor (or "Rob blower") type vacuum pumps, which are used upstream of rough-vacuum pumps to increase pumping capacity at high flow conditions. These vacuum pumps are called "dry" because in operation the rotor rotates inside the stator without any mechanical contact between the two or with the stator, making it possible not to use oil in the pumping stages.

藉由以油或滑脂潤滑的軸承來支撐轉子，且這些轉子藉由同樣被潤滑的齒輪進行同步。必不可少的是，在用於「乾式」應用(例如，用於製造半導體基板的方法)的泵送部分中不能發現油或滑脂的蹤跡。使軸仍能夠旋轉的密封方式讓含有潤滑劑的區域與乾式泵送部分隔開。The rotors are supported by bearings lubricated with oil or grease, and these rotors are synchronized by gears that are also lubricated. It is essential that no trace of oil or grease can be found in the pumping section for "dry" applications (for example, in the process of manufacturing semiconductor substrates). A seal that allows the shaft to still rotate separates the area containing the lubricant from the dry pumping section.

在真空泵被水平地佈置的情況下，油攪拌器盤大致被使用來在油槽中建立空氣和潤滑劑的霧化氣氛，有助於軸承的潤滑。油攪拌器被緊固到泵的軸中的一者，攪拌器的下端浸入槽的液體油中。支撐油攪拌器的軸旋轉，形成油霧，將潤滑劑的液滴噴射到槽的壁上，其接著滴落到要被潤滑的部件上。Where the vacuum pump is arranged horizontally, oil stirrer discs are generally used to create an atomized atmosphere of air and lubricant in the oil sump, aiding the lubrication of the bearings. An oil stirrer is fastened to one of the shafts of the pump, the lower end of which is immersed in the liquid oil of the tank. The shaft supporting the oil agitator rotates, forming an oil mist that sprays droplets of lubricant onto the walls of the tank, which in turn drip onto the parts to be lubricated.

在垂直架構的情況下，不再可能有效地使用油攪拌器盤。因此，尋求一種用於迫使油在通道中循環並朝向要被潤滑的垂直真空泵的滾動軸承上升的裝置。In the case of a vertical architecture, it is no longer possible to efficiently use the oil stirrer pan. Therefore, a device is sought for forcing the oil to circulate in the channels and rise towards the rolling bearings of the vertical vacuum pumps to be lubricated.

本發明的目的為提出一種真空泵，其解決上面所描述的至少一缺點。The object of the present invention is to propose a vacuum pump which solves at least one of the disadvantages described above.

為此目的，本發明的一個主題為一種真空泵，包括： -　定子，包括至少一壓縮室， -　兩個轉子，配置來在壓縮室中繞著各自的旋轉軸線旋轉，旋轉軸線為垂直的，以及 -　要被潤滑的元件，被安裝在轉子的軸上， 其特徵在於，真空泵還包括油泵，其包括油槽、及安裝在轉子的其中一個軸上的至少一渦輪，渦輪被沉浸在被接收於油槽的腔室中的液體潤滑劑中，渦輪的旋轉造成潤滑劑的一部分在潤滑管道中循環朝向要被潤滑的元件。 To this end, a subject of the invention is a vacuum pump comprising: - a stator comprising at least one compression chamber, - two rotors configured to rotate in the compression chamber about respective axes of rotation, the axes of rotation being vertical, and - the element to be lubricated, mounted on the shaft of the rotor, It is characterized in that the vacuum pump also includes an oil pump comprising an oil sump and at least one turbine mounted on one of the shafts of the rotor, the turbine being immersed in a liquid lubricant received in a chamber of the oil sump, the rotation of the turbine causing lubrication A part of the agent circulates in the lubrication line towards the element to be lubricated.

在操作中，馬達驅動轉子在壓縮室中旋轉，用於在乾式泵送部分中泵送氣體。在此同時，軸的旋轉使得油泵的渦輪旋轉。渦輪的旋轉使藉由離心力或藉由渦輪的旋轉機械元件(葉片或小齒輪的齒)被徑向地驅動進入潤滑管道中的液體潤滑劑加速。油泵接著可迫使潤滑劑上升到坐落在油槽上方之要被潤滑的元件的高度。油泵為便宜的，因為其使用與真空泵的轉子的旋轉驅動裝置相同的旋轉驅動裝置。此外，油泵不具有磨損部分且為容易施用的。In operation, the motor drives the rotor to rotate in the compression chamber for pumping gas in the dry pumping section. At the same time, the rotation of the shaft rotates the turbine of the oil pump. The rotation of the turbine accelerates the liquid lubricant driven radially into the lubrication duct by centrifugal force or by the rotating mechanical elements of the turbine (blades or pinion teeth). The oil pump can then force the lubricant up to the level of the element to be lubricated sitting above the sump. An oil pump is cheap because it uses the same rotary drive as that of the vacuum pump's rotor. Furthermore, the oil pump has no wearing parts and is easy to apply.

真空泵還可單獨或組合地包括在下文中所描述的一個或多個特徵。The vacuum pump may also include one or more of the features described hereinafter, alone or in combination.

根據實施例的第一範例，油泵為輪葉泵(vane pump)，渦輪具有碟片、及從碟片的頂面突出的至少一葉片。According to a first example of the embodiment, the oil pump is a vane pump, and the turbine has a disk and at least one vane protruding from the top surface of the disk.

渦輪包括，例如，兩個到六個之間的彎曲的葉片，其在10度和120度之間的圓弧上方延伸到，例如，渦輪的碟片的邊緣。The turbine comprises, for example, between two and six curved blades extending over an arc of between 10 and 120 degrees to, for example, the edge of the disk of the turbine.

根據實施例的第二範例，油泵為離心泵(centrifugal pump)。According to a second example of embodiment, the oil pump is a centrifugal pump.

根據實施例的一個範例，離心泵的渦輪包括平滑的碟片。According to one example of embodiment, the impeller of the centrifugal pump comprises smooth discs.

根據實施例的另一個範例，離心泵的渦輪具有碟片，其以圓柱形壁延伸以形成圓柱形凹腔，至少兩個通孔被形成在凹腔的圓柱形壁中。According to another example of embodiment, the impeller of the centrifugal pump has a disc extending with a cylindrical wall to form a cylindrical cavity, at least two through holes being formed in the cylindrical wall of the cavity.

根據實施例的第三範例，油泵為齒輪泵，其包括被安裝在轉子的軸上的至少一個渦輪，且由真空泵的同步傳動裝置(synchronizing gearing)的齒輪所形成。According to a third example of embodiment, the oil pump is a gear pump comprising at least one turbine wheel mounted on the shaft of the rotor and formed by the gears of the synchronizing gearing of the vacuum pump.

要被潤滑的元件包括，例如，被安裝在轉子之相應的軸上的同步傳動裝置的齒輪、及/或被安裝在轉子的軸的末端處之至少一第一對軸承、及/或至少一第二對軸承。同步傳動裝置及/或這些對軸承沿著轉子的軸坐落在，例如，油槽上方。The elements to be lubricated include, for example, the gears of the synchronous transmission mounted on the corresponding shaft of the rotor, and/or at least one first pair of bearings mounted at the ends of the shaft of the rotor, and/or at least one Second pair of bearings. The synchronous transmission and/or these pairs of bearings sit along the axis of the rotor, for example above an oil sump.

真空泵可包括形成在要被潤滑的元件和油槽的腔室之間的回油通道。在操作中，多餘的潤滑劑經由回油通道返回到油槽中。The vacuum pump may include an oil return passage formed between the element to be lubricated and the chamber of the oil sump. In operation, excess lubricant is returned to the oil sump via the oil return passage.

潤滑管道可包括入口管道，其與接收渦輪之油槽的腔室連通，且相對於渦輪被切向地或徑向地定向。The lubrication conduit may include an inlet conduit that communicates with a chamber that receives the oil sump of the turbine and is oriented tangentially or radially relative to the turbine.

入口管道可包括限流器(flow restriction)，其配置來藉由文土里效應(Venturi effect)加速潤滑劑的循環。The inlet conduit may include a flow restriction configured to accelerate circulation of the lubricant by the Venturi effect.

入口管道可為筆直的，並與渦輪的碟片相切。The inlet duct may be straight and tangential to the disks of the turbine.

根據實施例的一個範例，入口管道的入口為蝸殼(volute)的形式。蝸殼以螺旋形式繞著渦輪的碟片環繞，蝸殼的通道的直徑隨著接近入口管道之筆直且切向的部分而增加。蝸殼可繞著碟片在一個完整的圓上延伸，碟片的周緣形成入口管道的入口。在蝸殼的截面隨著潤滑劑循環的方向增加的情況下，蝸殼使得其能夠將潤滑劑傳送到潤滑管道中，同時限制紊流。在蝸殼的截面隨著潤滑劑循環的方向減少的情況下，蝸殼使得其能夠藉由文土里效應來加速潤滑管道中的潤滑劑的循環。According to one example of embodiment, the inlet of the inlet duct is in the form of a volute. The volute wraps around the disk of the turbine in a helical fashion, the diameter of the channel of the volute increasing as a straight and tangential portion of the inlet duct is approached. The volute may extend in a complete circle around the disc, the periphery of which forms the inlet of the inlet duct. The volute makes it possible to convey the lubricant into the lubrication duct while limiting turbulence, with the section of the volute increasing with the direction of lubricant circulation. The volute makes it possible to accelerate the circulation of the lubricant in the lubricating duct by means of the Venturi effect, with the section of the volute decreasing in the direction of the lubricant circulation.

還可提供的是，在渦輪中形成中央通口，用於將渦輪緊固在轉子的軸的末端處。It may also be provided that a central port is formed in the turbine for fastening the turbine at the end of the shaft of the rotor.

本發明的另一個主題為一種真空泵，包括： -　定子，包括至少一個壓縮室， -　兩個轉子，配置來在定子中繞著各自的旋轉軸線旋轉，旋轉軸線為垂直的， -　要被潤滑的元件，被安裝在轉子的軸上， -　馬達，配置來驅動轉子的軸旋轉， 其特徵在於，真空泵還包括外部油泵，其包括其自身的旋轉驅動裝置，用於使被包含在真空泵的油槽中的潤滑劑的一部分循環朝向要被潤滑的元件。 Another subject of the invention is a vacuum pump comprising: - a stator, including at least one compression chamber, - two rotors, arranged to rotate in the stator about respective axes of rotation, the axes of rotation being vertical, - the element to be lubricated, mounted on the shaft of the rotor, - a motor, configured to drive the rotation of the shaft of the rotor, It is characterized in that the vacuum pump also comprises an external oil pump comprising its own rotary drive for circulating a portion of the lubricant contained in the oil sump of the vacuum pump towards the elements to be lubricated.

有鑑於其具有自身的旋轉驅動裝置，藉由外部油泵被循環之液體潤滑劑的流率與真空泵的旋轉速度無關。接著，可能精確地控制所欲的潤滑流率，而無需取決於真空泵的頻率。即使在真空泵的速度降低的情況下，亦可能顯著地確保恆定的潤滑流率。The flow rate of the liquid lubricant circulated by the external oil pump is independent of the rotation speed of the vacuum pump, since it has its own rotary drive. Then, it is possible to precisely control the desired lubrication flow rate without depending on the frequency of the vacuum pump. Even with reduced speed of the vacuum pump, it is possible to ensure a constant lubrication flow rate remarkably.

真空泵還可單獨或組合地包括在下文中所描述的一個或多個特徵。The vacuum pump may also include one or more of the features described hereinafter, alone or in combination.

外部油泵可為正排量式(positive-displacement)油泵，例如，輪葉泵。The external oil pump may be a positive-displacement oil pump, such as a vane pump.

在此情況下，可接著在不取決於油的黏度的情況下控制所欲的潤滑流率。In this case, the desired lubrication flow rate can then be controlled independently of the viscosity of the oil.

外部油泵亦可為非正排量式(non-positive-displacement)泵，例如，離心泵。The external oil pump may also be a non-positive-displacement pump, such as a centrifugal pump.

在此情況下，真空泵可包括溫度感測器及控制單元，溫度感測器配置來測量液體潤滑劑的溫度，控制單元連接到溫度感測器，配置來控制外部油泵的旋轉驅動裝置的旋轉速度，以便控制潤滑流率作為被測量的溫度的函數。In this case, the vacuum pump may comprise a temperature sensor configured to measure the temperature of the liquid lubricant and a control unit connected to the temperature sensor configured to control the rotational speed of the rotary drive of the external oil pump , in order to control the lubrication flow rate as a function of the measured temperature.

本發明的另一個主題為一種真空泵，其包括兩個真空泵單元，每一個真空泵單元包括： -　定子，包括至少一個壓縮室， -　兩個轉子，配置來在定子的壓縮室中繞著各自的旋轉軸線旋轉， -　要被潤滑的元件，被安裝在轉子的軸上，以及 -　馬達，配置來驅動轉子旋轉。 Another subject of the invention is a vacuum pump comprising two vacuum pump units each comprising: - a stator, including at least one compression chamber, - two rotors, configured to rotate about respective axes of rotation in the compression chambers of the stator, - the element to be lubricated, mounted on the shaft of the rotor, and - A motor, configured to drive the rotor in rotation.

真空泵單元的旋轉軸線為垂直的。The axis of rotation of the vacuum pump unit is vertical.

真空泵還包括外部油泵，其包括其自身的旋轉驅動裝置，用於使被包含在每一個真空泵單元的油槽中的潤滑劑的一部分循環朝向要被潤滑的元件。更準確地，例如，外部油泵迫使潤滑劑在兩個真空泵單元共用的潤滑管道中循環朝向每一個單元之要被潤滑的元件。The vacuum pumps also include an external oil pump comprising its own rotary drive for circulating a portion of the lubricant contained in the oil sump of each vacuum pump unit towards the elements to be lubricated. More precisely, for example, an external oil pump forces the lubricant to circulate in a lubrication line common to both vacuum pump units towards the elements to be lubricated of each unit.

圖1至6顯示油泵9的第一實施例。1 to 6 show a first embodiment of an oil pump 9 .

真空泵1包括乾式泵送部分2及機械驅動部分3(圖1)。The vacuum pump 1 comprises a dry pumping part 2 and a mechanical drive part 3 (Fig. 1).

乾式泵送部分2包括定子4及兩個轉子6，定子4包括至少一個壓縮室5，兩個轉子6配置來在定子4的壓縮室5中繞著各自的旋轉軸線I-I旋轉。真空泵1配置為在旋轉軸線I-I為垂直的情況下被安裝，亦即，例如，被放置在地面上或底盤上。真空泵1的垂直佈置使得其可能顯著地減少覆蓋面積(footprint)。The dry pumping part 2 comprises a stator 4 comprising at least one compression chamber 5 and two rotors 6 arranged to rotate about respective axes of rotation I-I in the compression chamber 5 of the stator 4 . The vacuum pump 1 is configured to be mounted with the axis of rotation I-I vertical, ie, for example, to be placed on the ground or on a chassis. The vertical arrangement of the vacuum pump 1 makes it possible to significantly reduce the footprint.

轉子6具有能夠被組裝到軸7上的配對輪廓，或轉子6可與軸7一起被製造為單一件的(稱為單件式轉子)。轉子6為，例如，具有至少兩波瓣的「魯氏」類型、或「爪式」類型，或者它們為另一種類似的正排量式真空泵原理。這些真空泵被稱作為「乾式」，因為在操作中，轉子6在定子4內側旋轉，而沒有兩者之間或與定子4之間的任何機械接觸，這使得其可能不會在乾式泵送部分2中使用油。The rotor 6 has a mating profile that can be assembled onto the shaft 7, or the rotor 6 can be manufactured together with the shaft 7 as a single piece (referred to as a one-piece rotor). The rotors 6 are, for example, of the "Roots" type with at least two lobes, or of the "claw" type, or they are another similar positive displacement vacuum pump principle. These vacuum pumps are referred to as "dry" because in operation the rotor 6 rotates inside the stator 4 without any mechanical contact between the two or with the stator 4, which makes it possible not to be in a dry pumping section 2 using oil.

真空泵1可包括被串聯佈置的複數個泵送級。每一個泵送級包括接收兩個配對的轉子6的壓縮室5，壓縮室5包括各自的入口和出口。在旋轉過程中，從入口抽取的氣體被困在由轉子6和定子4所產生的體積中，並接著被轉子6驅動朝向下一個級。藉由將前一個泵送級的出口連接到後一個泵送級的入口之相應的級間通道(inter-stage channel)使連續的泵送級一個接著另一個地串聯連接。The vacuum pump 1 may comprise a plurality of pumping stages arranged in series. Each pumping stage comprises a compression chamber 5 receiving two paired rotors 6, the compression chambers 5 comprising respective inlets and outlets. During rotation, the gas drawn from the inlet is trapped in the volume created by the rotor 6 and the stator 4 and is then driven by the rotor 6 towards the next stage. Successive pumping stages are connected in series one after the other by corresponding inter-stage channels connecting the outlet of the preceding pumping stage to the inlet of the following pumping stage.

真空泵1還包括潤滑劑緊密密封裝置(未顯示)，其***置在機械驅動部分3和乾式泵送部分2之間。密封裝置允許軸7在乾式泵送部分2中旋轉，同時限制潤滑劑的轉移。The vacuum pump 1 also includes a lubricant-tight seal (not shown), which is interposed between the mechanical drive part 3 and the dry pumping part 2 . The sealing arrangement allows the shaft 7 to rotate in the dry pumping section 2 while limiting the transfer of lubricant.

機械驅動部分3包括馬達8，其配置來驅動轉子6旋轉。The mechanical drive part 3 includes a motor 8 configured to drive the rotor 6 in rotation.

真空泵1還包括要被潤滑的元件及油泵9，要被潤滑的元件被安裝在轉子6的軸7上，油泵9用於迫使液體潤滑劑循環朝向這些要被潤滑的元件。The vacuum pump 1 also comprises elements to be lubricated, mounted on the shaft 7 of the rotor 6, and an oil pump 9 for forcing liquid lubricant to circulate towards these elements to be lubricated.

例如，要被潤滑的元件包括被安裝在轉子6的軸的末端處之至少一第一對軸承10、及/或至少一第二對軸承11。在實施例的第一範例中，馬達8***置在第一對軸承10和第二對軸承11之間。For example, the elements to be lubricated include at least one first pair of bearings 10 , and/or at least one second pair of bearings 11 mounted at the ends of the shaft of the rotor 6 . In a first example of embodiment, the motor 8 is interposed between a first pair of bearings 10 and a second pair of bearings 11 .

例如，軸承10、11包括滾動軸承。For example, the bearings 10, 11 comprise rolling bearings.

要被潤滑的元件亦可包括同步傳動裝置，其包括安裝在轉子6之相應的軸7上的兩個齒輪12。齒輪12被配置為使軸7的旋轉同步。The element to be lubricated may also comprise a synchronous transmission comprising two gear wheels 12 mounted on respective shafts 7 of rotor 6 . The gear 12 is configured to synchronize the rotation of the shaft 7 .

油泵9包括油槽13、及安裝在轉子6的軸7中的一個軸(其同樣為驅動軸或從動軸，在此處為從動軸)上的至少一渦輪14。油槽13包括配置來包含液體潤滑劑的儲備量之腔室，液體潤滑劑透過，例如，油槽13中的孔口(被形成在腔室封閉板中且能夠藉由插塞21被關閉(參見，例如，圖16及17))被注入與排放。The oil pump 9 comprises an oil sump 13 and at least one turbine 14 mounted on one of the shafts 7 of the rotor 6 (which is also the drive shaft or the driven shaft, here the driven shaft). The oil sump 13 comprises a chamber configured to contain a reserve of liquid lubricant through, for example, an orifice in the oil sump 13 (formed in the chamber closing plate and capable of being closed by means of a plug 21 (see, For example, Figures 16 and 17)) are injected and drained.

渦輪14被沉浸在被接收於油槽13的腔室中的液體潤滑劑中。由軸7的旋轉所造成之渦輪14的旋轉使得潤滑劑的一部分在潤滑管道15中循環朝向要被潤滑的元件，其在此處為第一對上軸承10(圖1)。The turbine 14 is immersed in a liquid lubricant received in a chamber of the sump 13 . The rotation of the turbine wheel 14 caused by the rotation of the shaft 7 causes a part of the lubricant to circulate in the lubrication duct 15 towards the element to be lubricated, here the first pair of upper bearings 10 ( FIG. 1 ).

回油通道25可被形成在要被潤滑的元件和油槽13的腔室之間。在操作中，多餘的潤滑劑經由回油通道25返回到油槽13中。An oil return passage 25 may be formed between the element to be lubricated and the cavity of the oil sump 13 . In operation, excess lubricant returns to oil sump 13 via oil return passage 25 .

根據實施例的一個範例，油槽13的腔室與同步傳動裝置及第二對下軸承11連通。According to an example of the embodiment, the chamber of the oil groove 13 communicates with the synchronous transmission and the second pair of lower bearings 11 .

在此第一實施例中，油泵9為輪葉泵，渦輪14具有碟片16以及從碟片16的頂面突出的至少一葉片17(圖2、3及4)。因此，被安裝在垂直軸7上的碟片16在水平平面中延伸。In this first embodiment, the oil pump 9 is a vane pump and the turbine 14 has a disk 16 and at least one blade 17 protruding from the top surface of the disk 16 ( FIGS. 2 , 3 and 4 ). Thus, the disc 16 mounted on the vertical shaft 7 extends in a horizontal plane.

渦輪14包括，例如，兩個到六個葉片17，例如，三個葉片17。這些葉片17可為彎曲的。其在，例如，10度和120度之間(例如，圖3至5中所繪示的120度)的圓弧上方延伸。葉片17的後緣延伸到，例如，渦輪14的碟片16的邊緣。Turbine 14 includes, for example, two to six blades 17 , for example three blades 17 . These blades 17 may be curved. It extends over an arc of a circle, for example, between 10 and 120 degrees (eg, 120 degrees as depicted in FIGS. 3 to 5 ). The trailing edges of the blades 17 extend to, for example, the edges of the disks 16 of the turbine 14 .

中央通口18可被形成在渦輪14中，用於將渦輪14緊固在轉子6的軸的末端處，例如，藉由旋擰到轉接器19上，轉接器19被***到軸的末端的孔口中(圖2)。A central port 18 may be formed in the turbine 14 for fastening the turbine 14 at the end of the shaft of the rotor 6, for example by screwing onto an adapter 19 inserted into the end of the shaft in the orifice (Figure 2).

潤滑管道15可包括入口管道20，其與接收渦輪14之油槽13的腔室連通，且相對於渦輪14被切向地定向。如同圖3的範例中可見的，入口管道20為筆直的，並與渦輪14的碟片16相切。根據未被顯示的另一個範例，入口管道20相對於渦輪14被徑向地定向。Lubrication conduit 15 may include an inlet conduit 20 that communicates with a chamber receiving sump 13 of turbine 14 and is oriented tangentially relative to turbine 14 . As can be seen in the example of FIG. 3 , the inlet duct 20 is straight and tangential to the disks 16 of the turbine 14 . According to another example not shown, the inlet duct 20 is oriented radially with respect to the turbine 14 .

在操作中，馬達8驅動轉子6在壓縮室5中旋轉，用於在乾式泵送部分2中泵送氣體。在此同時，軸7的旋轉驅動油泵9的渦輪14旋轉。渦輪14的旋轉造成液體潤滑劑在油槽13的腔室中旋轉。液體潤滑劑藉由葉片17而被加速和徑向地驅動直到碟片16的邊緣，並接著進入入口管道20。油泵9可接著使得潤滑劑的一部分從油槽13的腔室循環朝向入口管道20，並接著進入潤滑管道15。潤滑劑可接著上升到坐落在油槽13上方之要被潤滑的元件的高度，特別是第二對軸承11、同步傳動裝置的齒輪12及/或坐落在高於第二對軸承11位置的第一對軸承10。多餘的潤滑劑經由回油通道25返回到油槽13中。藉由圖1中的箭頭繪示出液體潤滑劑的循環。In operation, the motor 8 drives the rotor 6 in rotation in the compression chamber 5 for pumping gas in the dry pumping section 2 . At the same time, the rotation of the shaft 7 drives the turbine 14 of the oil pump 9 in rotation. The rotation of the turbine 14 causes the liquid lubricant to spin in the chamber of the sump 13 . The liquid lubricant is accelerated and driven radially by the vanes 17 up to the edge of the disc 16 and then enters the inlet duct 20 . The oil pump 9 may then circulate a portion of the lubricant from the chamber of the sump 13 towards the inlet duct 20 and then into the lubrication duct 15 . The lubricant can then rise to the level of the elements to be lubricated situated above the oil sump 13, in particular the second pair of bearings 11, the gears 12 of the synchronous transmission and/or the first pair of bearings situated above the second pair of bearings 11. For bearings 10. Excess lubricant returns to the oil sump 13 via the oil return channel 25 . The circulation of the liquid lubricant is depicted by the arrows in FIG. 1 .

油泵9為便宜的，因為其使用與真空泵1的轉子6的旋轉驅動裝置相同的旋轉驅動裝置。此外，油泵9不具有磨損部分且為容易施用的。The oil pump 9 is cheap since it uses the same rotary drive as that of the rotor 6 of the vacuum pump 1 . Furthermore, the oil pump 9 has no wearing parts and is easy to apply.

圖5顯示油泵9的第一變形實施例。FIG. 5 shows a first modified embodiment of the oil pump 9 .

在此範例中，油泵9亦為輪葉泵。其包括與實施例的第一範例相同的渦輪14。此範例不同於先前範例之處在於，入口管道20的入口為蝸殼22的形式。In this example, the oil pump 9 is also a vane pump. It comprises the same turbine 14 as the first example of embodiment. This example differs from the previous examples in that the inlet of the inlet duct 20 is in the form of a volute 22 .

蝸殼22形式的入口以螺旋形式繞著渦輪14的碟片16環繞，蝸殼22的通道的直徑隨著接近入口管道20之筆直且切向的部分而增加。An inlet in the form of a volute 22 , the passage of which increases in diameter approaching a straight and tangential portion of the inlet duct 20 , wraps around the disc 16 of the turbine 14 in a helical fashion.

例如，蝸殼22繞著碟片16在一個完整的圓上延伸，碟片16的周緣形成入口管道20的入口。For example, the volute 22 extends in a complete circle around the disk 16 , the periphery of which forms the inlet of the inlet duct 20 .

坐落在渦輪14的碟片16的邊緣處之葉片17的後緣在蝸殼22的擴展方向及在渦輪14的旋轉方向上坐落在葉片17的下游(參見圖5箭頭)。The trailing edge of the blade 17 situated at the edge of the disk 16 of the turbine 14 is situated downstream of the blade 17 in the direction of expansion of the volute 22 and in the direction of rotation of the turbine 14 (see FIG. 5 arrow).

蝸殼22使得其可能朝向入口管道20傳送潤滑劑，同時限制流動紊流。The volute 22 makes it possible to convey the lubricant towards the inlet duct 20 while limiting flow turbulence.

圖6顯示油泵9的第二變形實施例。FIG. 6 shows a second modified embodiment of the oil pump 9 .

在此範例中，油泵9亦為輪葉泵。渦輪14包括，例如，彎曲的葉片17。此範例的不同於前一個範例之處在於，葉片17相較於第一變形實施例為較短的且更遠離中心。其在，例如，10度和45度之間的圓弧上方延伸。葉片17的後緣延伸到，例如，渦輪14的碟片16的邊緣。In this example, the oil pump 9 is also a vane pump. Turbine 14 includes, for example, curved blades 17 . This example differs from the previous example in that the vanes 17 are shorter and more remote from the center than in the first variant embodiment. It extends over, for example, an arc of between 10 and 45 degrees. The trailing edges of the blades 17 extend to, for example, the edges of the disks 16 of the turbine 14 .

較短的葉片17為較簡單製造的且因此為較低成本的，但潤滑劑流率可能為較不好控制且相較於更細長的葉片為較低的。Shorter blades 17 are simpler to manufacture and thus less costly, but the lubricant flow rate may be less controllable and lower compared to more slender blades.

圖7至13顯示油泵9的第二實施例。7 to 13 show a second embodiment of the oil pump 9 .

在第二實施例中，油泵為離心泵。In a second embodiment, the oil pump is a centrifugal pump.

在圖7至9所顯示的範例中，渦輪14包括平滑的碟片16。如同在先前範例中的，被安裝在軸7上的碟片16在水平平面中延伸。In the example shown in FIGS. 7 to 9 , the turbine 14 includes smooth disks 16 . As in the previous example, the disc 16 mounted on the shaft 7 extends in a horizontal plane.

中央通口18亦可被形成在渦輪14中，以將渦輪14緊固在轉子6的軸的末端處，例如，藉由旋擰到轉接器19上，轉接器19被***到軸的末端的孔口中。A central port 18 may also be formed in the turbine 14 to fasten the turbine 14 at the end of the shaft of the rotor 6, for example by screwing onto an adapter 19 inserted into the end of the shaft in the orifice.

潤滑管道15可包括入口管道20，其與接收渦輪14之油槽13的腔室連通，且相對於渦輪14被切向地定向(圖9)。根據未被顯示的另一個範例，入口管道20相對於渦輪14被徑向地定向。Lubrication conduit 15 may include an inlet conduit 20 that communicates with a chamber receiving sump 13 of turbine 14 and is oriented tangentially relative to turbine 14 ( FIG. 9 ). According to another example not shown, the inlet duct 20 is oriented radially with respect to the turbine 14 .

根據圖7所顯示之實施例的第一範例，入口管道20為筆直的，並與渦輪14的碟片16相切。According to a first example of embodiment shown in FIG. 7 , the inlet duct 20 is straight and tangential to the disk 16 of the turbine 14 .

在操作中，馬達8驅動轉子6在壓縮室5中旋轉，用於在乾式泵送部分2中泵送氣體。在此同時，軸7的旋轉驅動油泵9的渦輪14旋轉。渦輪14的旋轉造成液體潤滑劑在油槽13的腔室中旋轉。液體潤滑劑藉由離心力而被加速和徑向地驅動直到碟片16的邊緣，並接著進入入口管道20。油泵9可接著使得潤滑劑的一部分從油槽13的腔室循環朝向入口管道20，並接著進入潤滑管道15。潤滑劑上升到坐落在油槽13上方之要被潤滑的元件的高度，特別是第二對軸承11、同步傳動裝置的齒輪12及/或坐落在第二對軸承11上方的第一對軸承10。In operation, the motor 8 drives the rotor 6 in rotation in the compression chamber 5 for pumping gas in the dry pumping section 2 . At the same time, the rotation of the shaft 7 drives the turbine 14 of the oil pump 9 in rotation. The rotation of the turbine 14 causes the liquid lubricant to spin in the chamber of the sump 13 . The liquid lubricant is accelerated and driven radially by centrifugal force up to the edge of the disc 16 and then enters the inlet duct 20 . The oil pump 9 may then circulate a portion of the lubricant from the chamber of the sump 13 towards the inlet duct 20 and then into the lubrication duct 15 . The lubricant rises to the level of the elements to be lubricated sitting above the oil sump 13 , in particular the second pair of bearings 11 , the gear wheels 12 of the synchronous transmission and/or the first pair of bearings 10 sitting above the second pair of bearings 11 .

相較於具有葉片的渦輪，具有平滑的碟片16之渦輪14為較簡單製造的且因此為較低成本的，但潤滑劑流率可能為較不好控制且較低的。A turbine 14 with smooth discs 16 is simpler to manufacture and thus less costly than a turbine with blades, but the lubricant flow rate may be less controllable and lower.

圖9顯示離心式油泵9的變形實施例。FIG. 9 shows a modified embodiment of the centrifugal oil pump 9 .

在此範例中，油泵9包括與如圖7所顯示之實施例的先前範例相同的具有平滑的碟片的渦輪14。此範例的不同之處在於，入口管道20的入口為蝸殼22的形式。In this example, the oil pump 9 comprises the same turbine 14 with smooth disks as the previous example of embodiment shown in FIG. 7 . This example differs in that the inlet of the inlet duct 20 is in the form of a volute 22 .

如上所述，蝸殼22以螺旋形式繞著渦輪14的碟片16環繞，蝸殼22的通道的直徑隨著接近入口管道20之筆直且切向的部分而增加。As mentioned above, the volute 22 wraps around the disk 16 of the turbine 14 in a helical fashion, the diameter of the channel of the volute 22 increasing as a straight and tangential portion of the inlet duct 20 is approached.

例如，蝸殼22繞著碟片16在一個完整的圓上延伸，碟片16的周緣形成入口管道20的入口。For example, the volute 22 extends in a complete circle around the disk 16 , the periphery of which forms the inlet of the inlet duct 20 .

圖10至13顯示離心式油泵9的實施例的另一個範例。10 to 13 show another example of the embodiment of the centrifugal oil pump 9 .

在此實施例中，渦輪14具有碟片16，其以圓柱形壁24延伸以形成圓柱形凹腔，至少兩個通孔23被形成在凹腔的圓柱形壁24中(圖10及12)。凹腔的碟片16在水平平面中延伸。In this embodiment, the turbine 14 has a disc 16 which extends with a cylindrical wall 24 to form a cylindrical cavity in which at least two through holes 23 are formed ( FIGS. 10 and 12 ) . The disc 16 of the cavity extends in a horizontal plane.

例如，具有兩個到十個孔23，在此處為六個孔，其均勻地分布在凹腔的周緣上(圖12及13)。For example, there are from two to ten holes 23 , here six holes, distributed evenly over the periphery of the cavity ( FIGS. 12 and 13 ).

中央通口18亦可被形成在渦輪14中，用於將渦輪14緊固在轉子6的軸的末端處，例如，藉由旋擰到轉接器19上，轉接器19被***到軸的末端的孔口中(圖10)。A central port 18 may also be formed in the turbine 14 for fastening the turbine 14 at the end of the shaft of the rotor 6, for example by screwing onto an adapter 19 inserted into the shaft of the shaft. in the orifice at the end (Figure 10).

潤滑管道15可包括入口管道20，其與接收渦輪14之油槽13的腔室連通，且相對於渦輪14被切向地定向。入口管道20為，例如，筆直的，並與渦輪14的碟片16相切(圖11)。根據未被顯示的另一個範例，入口管道20相對於渦輪14被徑向地定向。Lubrication conduit 15 may include an inlet conduit 20 that communicates with a chamber receiving sump 13 of turbine 14 and is oriented tangentially relative to turbine 14 . The inlet duct 20 is, for example, straight and tangential to the disks 16 of the turbine 14 (FIG. 11). According to another example not shown, the inlet duct 20 is oriented radially with respect to the turbine 14 .

在操作中，馬達8驅動轉子6在壓縮室5中旋轉，用於在乾式泵送部分2中泵送氣體。在此同時，軸7的旋轉驅動油泵9的渦輪14旋轉。渦輪14的旋轉造成液體潤滑劑在油槽13的腔室中旋轉。液體潤滑劑藉由離心力而被加速和徑向地驅動直到凹腔的邊緣，並接著經由孔23進入入口管道20。油泵9可接著驅使潤滑劑的一部分從油槽13的腔室循環朝向入口管道20，並接著進入潤滑管道15。潤滑劑上升到坐落在油槽13上方之要被潤滑的元件的高度，特別是第二對軸承11、同步傳動裝置的齒輪12及/或坐落在第二對軸承11上方的第一對軸承10。In operation, the motor 8 drives the rotor 6 in rotation in the compression chamber 5 for pumping gas in the dry pumping section 2 . At the same time, the rotation of the shaft 7 drives the turbine 14 of the oil pump 9 in rotation. The rotation of the turbine 14 causes the liquid lubricant to spin in the chamber of the sump 13 . The liquid lubricant is accelerated and driven radially by centrifugal force up to the edge of the cavity and then enters the inlet duct 20 through the hole 23 . The oil pump 9 may then drive a portion of the lubricant to circulate from the chamber of the sump 13 towards the inlet duct 20 and then into the lubrication duct 15 . The lubricant rises to the level of the elements to be lubricated sitting above the oil sump 13 , in particular the second pair of bearings 11 , the gear wheels 12 of the synchronous transmission and/or the first pair of bearings 10 sitting above the second pair of bearings 11 .

圖13顯示油泵9的變形實施例。FIG. 13 shows a modified embodiment of the oil pump 9 .

在此範例中，油泵9包括與實施例的先前範例相同之具有圓柱形凹腔的渦輪14。此範例不同於先前範例之處在於，入口管道20的入口為蝸殼22的形式。In this example, the oil pump 9 comprises the same turbine 14 with a cylindrical cavity as in the previous example of embodiment. This example differs from the previous examples in that the inlet of the inlet duct 20 is in the form of a volute 22 .

如上所述，蝸殼22以螺旋形式繞著渦輪14的碟片16環繞，蝸殼22的通道的直徑隨著接近入口管道20之筆直且切向的部分而增加。As mentioned above, the volute 22 wraps around the disk 16 of the turbine 14 in a helical fashion, the diameter of the channel of the volute 22 increasing as a straight and tangential portion of the inlet duct 20 is approached.

例如，蝸殼22繞著碟片16在一個完整的圓上延伸，碟片16的周緣形成入口管道20的入口。For example, the volute 22 extends in a complete circle around the disk 16 , the periphery of which forms the inlet of the inlet duct 20 .

在所有上述實施例中，油槽13、馬達8及油泵9的佈置可在未偏離本發明的情況下在真空泵1中變化，如同，例如，圖14和15中可見的。In all the above-described embodiments, the arrangement of the oil sump 13 , the motor 8 and the oil pump 9 can be varied in the vacuum pump 1 without departing from the invention, as can be seen, for example, in FIGS. 14 and 15 .

在圖14的範例中，油槽13被佈置在軸的末端處，馬達8***置在油槽13與同步傳動裝置和第二對軸承11之間。In the example of FIG. 14 , an oil sump 13 is arranged at the end of the shaft and the motor 8 is interposed between the oil sump 13 and the synchronous transmission and the second pair of bearings 11 .

此外，濾油器26可被佈置在潤滑管道15中及/或回油通道25中。此特徵顯然可應用於所有實施例及變形實施例。Furthermore, an oil filter 26 can be arranged in the lubrication line 15 and/or in the oil return channel 25 . This feature is obviously applicable to all embodiments and variants.

根據另一個變形，與油槽13的位置無關，且在圖14中顯然可見的，渦輪14被安裝在驅動軸7上。According to another variant, independent of the position of the oil sump 13 and clearly visible in FIG. 14 , the turbine 14 is mounted on the drive shaft 7 .

圖15顯示真空泵1的另一個變形實施例，其中，馬達8被佈置在軸的末端處，且油槽13***置在馬達8與同步傳動裝置和第二對軸承11之間。FIG. 15 shows another variant embodiment of the vacuum pump 1 , in which the motor 8 is arranged at the end of the shaft and an oil sump 13 is interposed between the motor 8 and the synchronous transmission and the second pair of bearings 11 .

圖16至18顯示油泵9的第三實施例。16 to 18 show a third embodiment of the oil pump 9 .

在此實施例中，油泵9包括被安裝在轉子6的軸7上的渦輪14，渦輪14藉由同步傳動裝置的齒輪12來形成。齒輪12在水平平面中延伸。In this embodiment, the oil pump 9 comprises a turbine 14 mounted on the shaft 7 of the rotor 6, the turbine 14 being formed by the gears 12 of the synchronous transmission. The gear 12 extends in a horizontal plane.

同樣在此範例中，潤滑管道15包括入口管道20，其與接收渦輪14之油槽13的腔室連通。入口管道20相對於渦輪14被切向地或徑向地定向。其可包括限流器27，其配置來藉由文土里效應加速潤滑管道15中的潤滑劑的循環(圖18)。Also in this example, the lubrication duct 15 comprises an inlet duct 20 which communicates with the chamber receiving the sump 13 of the turbine 14 . Inlet duct 20 is oriented tangentially or radially relative to turbine 14 . It may include a flow restrictor 27 configured to accelerate the circulation of the lubricant in the lubrication duct 15 by means of the Venturi effect ( FIG. 18 ).

具有齒輪的油泵9使用同步傳動裝置的齒輪12的旋轉及齒輪12的輪廓來使潤滑管道15中的液體潤滑劑加速並循環。The geared oil pump 9 uses the rotation of the gear 12 of the synchronous transmission and the profile of the gear 12 to accelerate and circulate the liquid lubricant in the lubrication duct 15 .

油槽13的腔室亦可直接地連通第二對下軸承11。The chamber of the oil groove 13 can also directly communicate with the second pair of lower bearings 11 .

在圖16和17所顯示的範例中，馬達8***置在乾式泵送部分2與第二軸承11和同步齒輪12之間(圖16)。In the example shown in Figures 16 and 17, the motor 8 is interposed between the dry pumping part 2 and the second bearing 11 and the synchronous gear 12 (Figure 16).

在操作中，馬達8驅動轉子6在壓縮室5中旋轉，用於在乾式泵送部分2中泵送氣體。在此同時，軸7的旋轉驅動油泵9的渦輪14旋轉。齒輪12及渦輪14的齒加速並驅動潤滑劑的一部分，使其從油槽13的腔室朝向潤滑管道15。潤滑劑上升到坐落在油槽13上方之要被潤滑的元件的高度，特別是第二對軸承11、及/或坐落在第二對軸承11上方的第一對軸承10。In operation, the motor 8 drives the rotor 6 in rotation in the compression chamber 5 for pumping gas in the dry pumping section 2 . At the same time, the rotation of the shaft 7 drives the turbine 14 of the oil pump 9 in rotation. The teeth of the gear 12 and the worm gear 14 accelerate and drive a portion of the lubricant from the chamber of the sump 13 towards the lubrication duct 15 . The lubricant rises to the level of the elements to be lubricated sitting above the oil sump 13 , in particular the second pair of bearings 11 , and/or the first pair of bearings 10 sitting above the second pair of bearings 11 .

在此實施例中，已存在的同步齒輪被使用來使作為油泵9的旋轉驅動裝置之軸7同步，用於迫使液體潤滑劑循環。In this embodiment, existing synchronizing gears are used to synchronize the shaft 7 as the rotary drive of the oil pump 9 for forcing the circulation of the liquid lubricant.

雖然在圖16至18中，單一齒輪12被用來作為油泵9的渦輪14，但完全可設想到的是，藉由提供包括被安裝在轉子6之相應的軸7上的兩個渦輪14(藉由同步傳動裝置的齒輪12形成每一個渦輪14)的油泵9來使系統對稱。Although in FIGS. 16 to 18 a single gear 12 is used as the turbine 14 of the oil pump 9 , it is entirely conceivable that by providing two turbines 14 mounted on corresponding shafts 7 of the rotor 6 ( The system is made symmetrical by synchronizing the gears 12 of the transmission to form the oil pump 9 of each turbine 14).

圖19和20顯示根據另一個發明所製造的真空泵1。19 and 20 show a vacuum pump 1 manufactured according to another invention.

真空泵1包括乾式泵送部分2及機械驅動部分3。The vacuum pump 1 includes a dry pumping part 2 and a mechanical driving part 3 .

乾式泵送部分2包括定子4及兩個轉子6，定子4包括至少一個壓縮室5，兩個轉子6配置來在定子4的壓縮室5中繞著各自的旋轉軸線I-I旋轉。真空泵1配置為在旋轉軸線I-I為垂直的情況下被安裝，亦即，例如，被放置在地面上或底盤上。真空泵1的垂直佈置使得其可能顯著地減少覆蓋面積。The dry pumping part 2 comprises a stator 4 comprising at least one compression chamber 5 and two rotors 6 arranged to rotate about respective axes of rotation I-I in the compression chamber 5 of the stator 4 . The vacuum pump 1 is configured to be mounted with the axis of rotation I-I vertical, ie, for example, to be placed on the ground or on a chassis. The vertical arrangement of the vacuum pump 1 makes it possible to significantly reduce the footprint.

轉子6具有能夠被組裝到軸7上的配對輪廓，或轉子6可與軸7一起被製造為單一件的(稱為單件式轉子)。轉子6為，例如，具有至少兩波瓣的「魯氏」類型、或「爪式」類型，或者它們為另一種類似的正排量式真空泵原理。這些真空泵被稱作為「乾式」，因為在操作中，轉子6在定子4內側旋轉，而沒有兩者之間或與定子4之間的任何機械接觸，這使得其可能不會在乾式泵送部分2中使用油。The rotor 6 has a mating profile that can be assembled onto the shaft 7, or the rotor 6 can be manufactured together with the shaft 7 as a single piece (referred to as a one-piece rotor). The rotors 6 are, for example, of the "Roots" type with at least two lobes, or of the "claw" type, or they are another similar positive displacement vacuum pump principle. These vacuum pumps are referred to as "dry" because in operation the rotor 6 rotates inside the stator 4 without any mechanical contact between the two or with the stator 4, which makes it possible not to be in a dry pumping section 2 using oil.

真空泵1可包括被串聯佈置的複數個泵送級。每一個泵送級包括接收兩個配對的轉子6的壓縮室5，壓縮室5包括各自的入口和出口。在旋轉過程中，從入口抽取的氣體被困在由轉子6和定子4所產生的體積中，並接著被轉子6驅動朝向下一個級。藉由將前一個泵送級的出口連接到後一個泵送級的入口之相應的級間通道使連續的泵送級一個接著另一個地串聯連接。The vacuum pump 1 may comprise a plurality of pumping stages arranged in series. Each pumping stage comprises a compression chamber 5 receiving two paired rotors 6, the compression chambers 5 comprising respective inlets and outlets. During rotation, the gas drawn from the inlet is trapped in the volume created by the rotor 6 and the stator 4 and is then driven by the rotor 6 towards the next stage. Successive pumping stages are connected in series one after the other by corresponding interstage channels connecting the outlet of the preceding pumping stage to the inlet of the following pumping stage.

真空泵1還包括潤滑劑緊密密封裝置(未顯示)，其***置在機械驅動部分3和乾式泵送部分2之間。密封裝置允許軸7在乾式泵送部分2中旋轉，同時限制潤滑劑的轉移。The vacuum pump 1 also includes a lubricant-tight seal (not shown), which is interposed between the mechanical drive part 3 and the dry pumping part 2 . The sealing arrangement allows the shaft 7 to rotate in the dry pumping section 2 while limiting the transfer of lubricant.

真空泵1還包括被安裝在轉子6的軸7上之要被潤滑的元件、及外部油泵30，用於迫使液體潤滑劑循環朝向這些要被潤滑的元件。The vacuum pump 1 also comprises the elements to be lubricated, mounted on the shaft 7 of the rotor 6, and an external oil pump 30 for forcing a liquid lubricant to circulate towards these elements to be lubricated.

要被潤滑的元件包括，例如，被安裝在轉子6的軸的末端處之至少一第一對軸承10、及/或至少一第二對軸承11，例如，至少一第二對軸承11***置在馬達8和乾式泵送部分2之間。或者，馬達8可***置在乾式泵送部分2和第二對軸承11之間。The elements to be lubricated include, for example, at least one first pair of bearings 10 mounted at the end of the shaft of the rotor 6, and/or at least one second pair of bearings 11, for example, at least one second pair of bearings 11 inserted Placed between the motor 8 and the dry pumping section 2. Alternatively, the motor 8 may be interposed between the dry pumping part 2 and the second pair of bearings 11 .

例如，軸承10、11包括滾動軸承。For example, the bearings 10, 11 comprise rolling bearings.

要被潤滑的元件亦可包括同步傳動裝置，其包括安裝在轉子6之相應的軸7上的兩個齒輪12。齒輪12被配置為使軸7的旋轉同步。The element to be lubricated may also comprise a synchronous transmission comprising two gear wheels 12 mounted on respective shafts 7 of rotor 6 . The gear 12 is configured to synchronize the rotation of the shaft 7 .

真空泵1還包括，例如，油槽31，其包含液體潤滑劑的儲備量，與，例如，同步傳動裝置、第二對軸承11、且可能還與馬達8連通。The vacuum pump 1 also comprises, for example, an oil sump 31 containing a reserve of liquid lubricant in communication with, for example, the synchronous transmission, the second pair of bearings 11 and possibly also the motor 8 .

潤滑管道15將，例如，油槽31的液體潤滑劑的儲備量連接到外部油泵30、及要被潤滑的元件，其在此處為坐落在軸的末端處之第一對軸承10(圖19)。The lubrication duct 15 connects, for example, the reservoir of liquid lubricant of the oil sump 31 to the external oil pump 30, and the element to be lubricated, here the first pair of bearings 10 sitting at the end of the shaft (Fig. 19) .

回油通道25可被形成在要被潤滑的元件和油槽31的腔室之間。在操作中，多餘的潤滑劑經由回油通道25返回到油槽31中。The oil return passage 25 may be formed between the element to be lubricated and the cavity of the oil groove 31 . In operation, excess lubricant returns to oil sump 31 via oil return passage 25 .

濾油器26可被佈置在潤滑管道15中及/或回油通道25中。An oil filter 26 may be arranged in the lubrication line 15 and/or in the oil return channel 25 .

外部油泵30包括其自身的旋轉驅動裝置。其自身的裝置意味著外部油泵30的旋轉驅動裝置獨立於真空泵1的乾式泵送部分2的轉子6的驅動馬達8。The external oil pump 30 includes its own rotary drive. Its own device means that the rotary drive of the external oil pump 30 is independent of the drive motor 8 of the rotor 6 of the dry pumping part 2 of the vacuum pump 1 .

外部油泵30可為正排量式油泵，例如，輪葉泵。旋轉驅動裝置接著被配置來驅動外部油泵30的偏心葉片轉子旋轉，以使潤滑劑中的一部分在潤滑管道15中循環。External oil pump 30 may be a positive displacement oil pump, such as a vane pump. The rotary drive is then configured to drive the eccentric vane rotor of the external oil pump 30 in rotation to circulate a portion of the lubricant in the lubrication conduit 15 .

在操作中，外部油泵30使液體潤滑劑的一部分從油槽31循環朝向要被潤滑的元件，其在此處為第一對軸承10。藉由圖19中的箭頭繪示出液體潤滑劑的循環。In operation, the external oil pump 30 circulates a portion of the liquid lubricant from the oil sump 31 towards the elements to be lubricated, here the first pair of bearings 10 . The circulation of the liquid lubricant is depicted by the arrows in FIG. 19 .

根據實施例的另一個範例，外部油泵為非正排量式油泵，例如，離心泵。旋轉驅動裝置接著被配置來使外部油泵30的離心碟片旋轉，以使潤滑劑在潤滑管道15中循環。According to another example of embodiment, the external oil pump is a non-positive displacement oil pump, eg a centrifugal pump. The rotary drive is then configured to rotate the centrifugal discs of the external oil pump 30 to circulate the lubricant in the lubrication duct 15 .

在此情況下，真空泵1還可包括溫度感測器及控制單元，溫度感測器配置來測量液體潤滑劑的溫度，控制單元連接到溫度感測器，配置來控制外部油泵30的旋轉驅動裝置的旋轉速度，以便控制潤滑流率作為被測量的溫度的函數。In this case, the vacuum pump 1 may further comprise a temperature sensor configured to measure the temperature of the liquid lubricant and a control unit connected to the temperature sensor configured to control the rotational drive of the external oil pump 30 The rotational speed in order to control the lubrication flow rate as a function of the temperature being measured.

有鑑於其具有自身的旋轉驅動裝置，藉由外部油泵30被循環之液體潤滑劑的流率與真空泵1的旋轉速度無關。接著，可能精確地控制所欲的潤滑流率，而無需取決於真空泵1的頻率。即使在真空泵1的速度降低的情況下，例如，在閒置模式下，亦可能顯著地確保恆定的潤滑流率。此解決方案還使得其可能簡化濾油器26的使用，以便確保增加機械元件的使用壽命。The flow rate of the liquid lubricant circulated by the external oil pump 30 is independent of the rotational speed of the vacuum pump 1 , since it has its own rotary drive. Then, it is possible to precisely control the desired lubrication flow rate without depending on the frequency of the vacuum pump 1 . Even in the event of reduced speed of the vacuum pump 1 , for example in idle mode, it is possible to remarkably ensure a constant lubrication flow rate. This solution also makes it possible to simplify the use of the oil filter 26 in order to ensure an increased service life of the mechanical elements.

圖20顯示變形實施例，其中，外部油泵30為兩個真空泵1單元所共用的。FIG. 20 shows a modified embodiment in which an external oil pump 30 is shared by two vacuum pump 1 units.

真空泵1包括兩個真空泵單元32，其每一者包括定子4、兩個轉子6、要被潤滑的元件、及馬達8，定子4包括至少一個壓縮室5，兩個轉子6配置來在定子4的壓縮室中繞著各自的旋轉軸線I-I旋轉，要被潤滑的元件被安裝在轉子6的軸7上，馬達8配置來驅動轉子6旋轉。The vacuum pump 1 comprises two vacuum pump units 32, each of which comprises a stator 4 comprising at least one compression chamber 5, two rotors 6, an element to be lubricated, and a motor 8, the two rotors 6 being configured to Rotating in the compression chambers about respective axes of rotation I-I, the elements to be lubricated are mounted on the shaft 7 of the rotor 6, and the motor 8 is configured to drive the rotor 6 in rotation.

真空泵單元32的旋轉軸線I-I為垂直的。The axis of rotation I-I of the vacuum pump unit 32 is vertical.

真空泵1還包括外部油泵30，其包括其自身的旋轉驅動裝置，用於使被包含在每一個真空泵單元32的油槽31中的潤滑劑的一部分循環朝向要被潤滑的元件。更準確地，例如，外部油泵30迫使潤滑劑在兩個真空泵單元32共用的潤滑管道15中循環朝向每一個單元32之要被潤滑的元件，其在此處為第一對上軸承10。The vacuum pump 1 also comprises an external oil pump 30 comprising its own rotary drive for circulating a portion of the lubricant contained in the oil sump 31 of each vacuum pump unit 32 towards the elements to be lubricated. More precisely, for example, an external oil pump 30 forces lubricant to circulate in a lubrication duct 15 common to both vacuum pump units 32 towards the element to be lubricated of each unit 32 , here the first pair of upper bearings 10 .

1:真空泵 2:乾式泵送部分 3:機械驅動部分 4:定子 5:壓縮室 6:轉子 7:(垂直)軸 8:馬達 9:油泵 10:第一對(上)軸承 11:第二對(下)軸承 12:齒輪 13:油槽 14:渦輪 15:潤滑管道 16:(平滑的)碟片 17:葉片 18:中央通口 19:轉接器 20:入口管道 21:插塞 22:蝸殼 23:(通)孔 24:圓柱形壁 25:回油通道 26:濾油器 27:限流器 30:外部油泵 31:油槽 32:真空泵單元 I-I:旋轉軸線 1: vacuum pump 2: Dry pumping part 3: Mechanical drive part 4: Stator 5: Compression chamber 6: rotor 7: (vertical) axis 8: Motor 9:Oil pump 10: The first pair of (upper) bearings 11: The second pair of (lower) bearings 12: gear 13: oil tank 14: Turbine 15: Lubrication pipeline 16: (smooth) disc 17: blade 18: Central port 19: Adapter 20: Inlet pipe 21: plug 22: volute 23: (through) hole 24: cylindrical wall 25: oil return channel 26:Oil filter 27: Current limiter 30: External oil pump 31: oil tank 32: Vacuum pump unit I-I: axis of rotation

藉由閱讀對本發明之特定但非限制性的實施例的以下描述以及所附圖式，其他優點和特徵將變得顯而易見，其中：Other advantages and features will become apparent from reading the following description of specific but non-limiting embodiments of the invention and the accompanying drawings, in which:

[圖1]圖1為真空泵的示意圖。[ Fig. 1] Fig. 1 is a schematic diagram of a vacuum pump.

[圖2]圖2為根據第一實施例之圖1的真空泵的縱向局部截面圖。[ Fig. 2] Fig. 2 is a longitudinal partial sectional view of the vacuum pump of Fig. 1 according to a first embodiment.

[圖3]圖3為圖2的真空泵的油泵的局部截面圖。[ Fig. 3] Fig. 3 is a partial sectional view of an oil pump of the vacuum pump of Fig. 2 .

[圖4]圖4為圖3的油泵的渦輪的透視圖。[ Fig. 4] Fig. 4 is a perspective view of a turbine of the oil pump of Fig. 3 .

[圖5]圖5為根據第一變形實施例的油泵的截面圖。[ Fig. 5] Fig. 5 is a sectional view of an oil pump according to a first modified embodiment.

[圖6]圖6為根據第二變形實施例的油泵之類似於圖5的視圖。[ Fig. 6] Fig. 6 is a view similar to Fig. 5 of an oil pump according to a second modified embodiment.

[圖7]圖7顯示根據第二實施例的真空泵的油泵之縱向截面圖。[ Fig. 7] Fig. 7 shows a longitudinal sectional view of an oil pump of a vacuum pump according to a second embodiment.

[圖8]圖8顯示圖7的油泵的渦輪的透視圖。[ Fig. 8] Fig. 8 shows a perspective view of a turbine of the oil pump of Fig. 7 .

[圖9]圖9顯示根據變形實施例的油泵的局部截面圖。[ Fig. 9] Fig. 9 shows a partial sectional view of an oil pump according to a modified embodiment.

[圖10]圖10顯示根據第三實施例的真空泵的縱向截面圖。[ Fig. 10] Fig. 10 shows a longitudinal sectional view of a vacuum pump according to a third embodiment.

[圖11]圖11顯示圖10的真空泵的油泵的局部俯視圖。[ Fig. 11] Fig. 11 shows a partial plan view of an oil pump of the vacuum pump of Fig. 10 .

[圖12]圖12顯示圖11的油泵的渦輪的透視圖。[ Fig. 12] Fig. 12 is a perspective view showing a turbine of the oil pump of Fig. 11 .

[圖13]圖13顯示圖11的油泵的截面圖。[ Fig. 13] Fig. 13 shows a sectional view of the oil pump of Fig. 11 .

[圖14]圖14為根據變形實施例的真空泵的示意圖。[ Fig. 14] Fig. 14 is a schematic diagram of a vacuum pump according to a modified embodiment.

[圖15]圖15為根據另一個變形實施例的真空泵的示意圖。[ Fig. 15] Fig. 15 is a schematic diagram of a vacuum pump according to another modified embodiment.

[圖16]圖16為根據第四實施例的真空泵的示意圖。[ Fig. 16] Fig. 16 is a schematic diagram of a vacuum pump according to a fourth embodiment.

[圖17]圖17顯示圖16的真空泵的截面圖。[ Fig. 17] Fig. 17 shows a sectional view of the vacuum pump of Fig. 16 .

[圖18]圖18顯示圖17的真空泵的油泵的截面圖。[ Fig. 18] Fig. 18 shows a sectional view of an oil pump of the vacuum pump of Fig. 17 .

[圖19]圖19顯示根據另一個發明的真空泵。[ Fig. 19] Fig. 19 shows a vacuum pump according to another invention.

[圖20]圖20顯示圖19的真空泵的變形實施例。[ Fig. 20] Fig. 20 shows a modified embodiment of the vacuum pump of Fig. 19 .

以下的實施例為範例。雖然描述參照一個或多個實施例，但不一定意味著每一個參照都關於相同的實施例，或意味著特徵僅適用於一個實施例。不同實施例的單一特徵亦可被結合或互換，以提供其他的實施例。The following examples are examples. Although the description refers to one or more embodiments, that does not necessarily mean that each reference is to the same embodiment, or that a feature is applicable to only one embodiment. Single features of different embodiments may also be combined or interchanged to provide other embodiments.

本發明適用於任何類型的單級或多級乾式真空泵，亦即，包括一個或多個級，例如，包括從一個到十個泵送級。此真空泵可為多級粗式真空泵，其配置為輸送在大氣壓力下被泵送的氣體，或可為具有從一個到三個泵送級的乾式真空泵，其在使用中被連接到粗式真空泵的上游，且其輸送壓力為藉由粗式真空泵所獲得的壓力。The invention is applicable to any type of single-stage or multi-stage dry vacuum pump, ie comprising one or more stages, eg comprising from one to ten pumping stages. This vacuum pump may be a multi-stage roughing vacuum pump configured to deliver gas being pumped at atmospheric pressure, or may be a dry vacuum pump with from one to three pumping stages connected in use to the roughing vacuum pump upstream, and its delivery pressure is the pressure obtained by the rough vacuum pump.

在描述中，縱向或軸向方向平行於軸的旋轉軸線。橫向方向為垂直於旋轉的軸向方向之方向。垂直方向為平行於重心方向的方向。水平方向屬於垂直於垂直方向的平面。In the description, the longitudinal or axial direction is parallel to the axis of rotation of the shaft. A transverse direction is a direction perpendicular to the axial direction of rotation. The vertical direction is a direction parallel to the direction of the center of gravity. The horizontal direction belongs to the plane perpendicular to the vertical direction.

1:真空泵 1: vacuum pump

2:乾式泵送部分 2: Dry pumping part

3:機械驅動部分 3: Mechanical drive part

4:定子 4: Stator

5:壓縮室 5: Compression chamber

6:轉子 6: rotor

7:(垂直)軸 7: (vertical) axis

8:馬達 8: Motor

9:油泵 9:Oil pump

10:第一對(上)軸承 10: The first pair of (upper) bearings

11:第二對(下)軸承 11: The second pair of (lower) bearings

12:齒輪 12: gear

13:油槽 13: oil tank

14:渦輪 14: Turbine

15:潤滑管道 15: Lubrication pipeline

16:(平滑的)碟片 16: (smooth) disc

25:回油通道 25: oil return channel

I-I:旋轉軸線 I-I: axis of rotation

Claims (8)

一種真空泵(1)，包括： 定子(4)，包括至少一壓縮室(5)； 兩個轉子(6)，配置來在該壓縮室(5)中繞著各自的旋轉軸線(I-I)旋轉，該等旋轉軸線(I-I)為垂直的；以及 要被潤滑的元件，被安裝在該等轉子(6)的軸(7)上， 該真空泵(1)還包括油泵(9)，該油泵(9)包括油槽(13)、及被安裝在該等轉子(6)的該等軸(7)中的一個軸上的至少一渦輪(14)，該渦輪(14)被沉浸在被接收於該油槽(13)的腔室中的液體潤滑劑中，該渦輪(14)的旋轉造成該潤滑劑的一部分在潤滑管道(15)中循環朝向該要被潤滑的元件， 其特徵在於，該油泵(9)為輪葉泵，該渦輪(14)具有碟片(16)、及從該碟片(16)的頂面突出的至少一葉片(17)，該潤滑管道(15)包括入口管道(20)，該入口管道(20)與接收該渦輪(14)之該油槽(13)的該腔室連通，且相對於該渦輪(14)被切向地或徑向地定向。 A vacuum pump (1), comprising: a stator (4) comprising at least one compression chamber (5); two rotors (6) configured to rotate in the compression chamber (5) about respective axes of rotation (I-I), the axes of rotation (I-I) being vertical; and The elements to be lubricated are mounted on the shafts (7) of the rotors (6), The vacuum pump (1) also includes an oil pump (9) comprising an oil sump (13) and at least one turbine ( 14), the turbine (14) is immersed in the liquid lubricant received in the chamber of the sump (13), the rotation of the turbine (14) causes a part of the lubricant to circulate in the lubrication duct (15) towards the element to be lubricated, It is characterized in that the oil pump (9) is a vane pump, the turbine (14) has a disk (16) and at least one vane (17) protruding from the top surface of the disk (16), the lubricating duct ( 15) comprising an inlet duct (20) communicating with the chamber receiving the oil sump (13) of the turbine (14) and being tangentially or radially positioned with respect to the turbine (14) orientation. 如請求項1之真空泵(1)，其中，該渦輪(14)包括兩個到六個彎曲的葉片(17)，其在10度和120度之間的圓弧上方延伸到該渦輪(14)的該碟片(16)的邊緣。The vacuum pump (1) of claim 1, wherein the turbine (14) comprises two to six curved blades (17) extending over an arc of between 10 and 120 degrees to the turbine (14) edge of the disc (16). 如請求項1或2之真空泵(1)，其中，該要被潤滑的元件包括同步傳動裝置的齒輪(12)，其被安裝在該等轉子(6)之相應的軸(7)上。Vacuum pump (1) according to claim 1 or 2, wherein the element to be lubricated comprises a gear (12) of a synchronous transmission mounted on the corresponding shaft (7) of the rotors (6). 如請求項1之真空泵(1)，其中，該要被潤滑的元件包括被安裝在該等轉子(6)的軸的末端處之至少一第一對軸承(10)、及/或至少一第二對軸承(11)，其沿著該等轉子(6)的該等軸(7)坐落在該油槽(13)上方。The vacuum pump (1) of claim 1, wherein the element to be lubricated comprises at least one first pair of bearings (10) mounted at the ends of the shafts of the rotors (6), and/or at least one first Two pairs of bearings (11) are located above the oil groove (13) along the axes (7) of the rotors (6). 如請求項1之真空泵(1)，其中，該入口管道(20)包括限流器(27)，其配置來藉由文土里效應加速該潤滑劑的該循環。The vacuum pump (1) of claim 1, wherein the inlet pipe (20) includes a flow restrictor (27) configured to accelerate the circulation of the lubricant by Venturi effect. 如請求項1之真空泵(1)，其中，該入口管道(20)的入口(22)為蝸殼的形式。The vacuum pump (1) according to claim 1, wherein the inlet (22) of the inlet pipe (20) is in the form of a volute. 如請求項1之真空泵(1)，其中，該真空泵包括形成在該要被潤滑的元件和該油槽(13)的該腔室之間的回油通道(25)。The vacuum pump (1) of claim 1, wherein the vacuum pump comprises an oil return passage (25) formed between the element to be lubricated and the chamber of the oil groove (13). 如請求項1之真空泵(1)，其中，在該渦輪(14)中形成中央通口(18)，用於將該渦輪(14)緊固在該等轉子(6)的軸的末端處。The vacuum pump (1) of claim 1, wherein a central port (18) is formed in the turbine (14) for fastening the turbine (14) at the ends of the shafts of the rotors (6).
TW111124973A 2021-07-05 2022-07-04 Vacuum pump TW202319645A (en)

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KR101138389B1 (en) * 2009-10-21 2012-04-26 주식회사 코디박 Screw rotor type vaccum pump with built in motor
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US9938977B2 (en) * 2015-02-03 2018-04-10 Emerson Climate Technologies, Inc. Compressor with oil pump assembly
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