TW202319150A - Sawing wire, and method for producing same - Google Patents
Sawing wire, and method for producing same Download PDFInfo
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- TW202319150A TW202319150A TW111129511A TW111129511A TW202319150A TW 202319150 A TW202319150 A TW 202319150A TW 111129511 A TW111129511 A TW 111129511A TW 111129511 A TW111129511 A TW 111129511A TW 202319150 A TW202319150 A TW 202319150A
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 8
- 238000002788 crimping Methods 0.000 claims abstract description 15
- 239000002184 metal Substances 0.000 claims abstract description 5
- 230000005489 elastic deformation Effects 0.000 claims abstract description 4
- 238000000034 method Methods 0.000 claims description 23
- 239000004033 plastic Substances 0.000 claims description 13
- 238000005452 bending Methods 0.000 claims description 12
- 230000008569 process Effects 0.000 claims description 8
- 239000000835 fiber Substances 0.000 claims description 7
- 238000011161 development Methods 0.000 description 15
- 230000018109 developmental process Effects 0.000 description 15
- 238000005520 cutting process Methods 0.000 description 14
- 239000000463 material Substances 0.000 description 8
- 239000002002 slurry Substances 0.000 description 8
- 230000000694 effects Effects 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 238000006073 displacement reaction Methods 0.000 description 3
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 239000003082 abrasive agent Substances 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 235000011187 glycerol Nutrition 0.000 description 1
- 229910052500 inorganic mineral Inorganic materials 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000011707 mineral Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000008385 outer phase Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
- B23D61/00—Tools for sawing machines or sawing devices; Clamping devices for these tools
- B23D61/18—Sawing tools of special type, e.g. wire saw strands, saw blades or saw wire equipped with diamonds or other abrasive particles in selected individual positions
- B23D61/185—Saw wires; Saw cables; Twisted saw strips
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
- B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
Description
本發明係關於一種鋸線以及用於製造鋸線的方法。The invention relates to a sawing wire and a method for producing a sawing wire.
在下文中描述了鋸線，用於切割金屬和礦物材料，特別是用於製造電子元件的晶片。A sawing wire is described below for cutting metal and mineral materials, in particular wafers for the manufacture of electronic components.
眾所周知，例如為此目的從矽棒上切下薄片，其中此處的切片這樣進行，一根帶導輥的金屬線被引導到周圍，其中在切割區域內已準備好一個待切割的棒，被切割線研磨切割。It is known, for example, to cut thin slices from silicon rods for this purpose, wherein the slicing here is carried out in such a way that a metal wire with guide rollers is guided around, wherein a rod to be cut is already prepared in the cutting area, and is Cutting wire abrasive cutting.
確切地說，待切割的棒的材料不是由金屬線本身切割，而是由漿料中的磨料構成成分切割，該成分由線材傳送到切割間隙中。因此人們也說到了一種線鋸切片製程，其中線材在其縱向方向上從放線軸移動到收線軸上，當中有線材僅在一個方向上移動的設計，也有線材移動方向不斷反轉的設計。也就是說，線材必須能夠將磨料構成成分送到切割間隙中以及在那裡確保，磨料能夠對要切割的材料有磨蝕作用。漿料在此處是一種諸如由較高黏性的甘油和碳化矽顆粒製成的混和物。堅硬的小碳化矽顆粒在此處從待加工材料的基體中分解出小顆粒。當然，其它的油類或液態承載介質和其它的硬質材料也是可能的。Rather, the material of the rod to be cut is not cut by the wire itself, but by the abrasive constituents of the slurry which are transported by the wire into the cutting gap. So people also speak of a wire saw slicing process in which the wire moves in its longitudinal direction from a pay-off spool to a take-up spool, there are designs where the wire moves in only one direction, and designs where the direction of wire movement is constantly reversed. That is to say, the wire must be able to feed the abrasive constituents into the cutting gap and ensure there that the abrasive can have an abrasive effect on the material to be cut. The slurry here is a mixture, for example, of relatively viscous glycerin and silicon carbide particles. Here the hard, small silicon carbide particles break down into small particles from the matrix of the material to be processed. Of course, other oily or liquid carrier media and other hard materials are also possible.
然而為了能完全攜帶此類漿料（泥漿），鋸線需要一種允許攜帶高黏度泥漿的表面設計。專用的圓柱形線材僅藉由黏合劑相互作用來攜帶漿料，但是切割過程會導致漿料迅速剝離以及失去切割作用。However, in order to be able to carry such slurries (slurry) at all, the wire needs a surface design that allows the highly viscous slurry to be carried. The specialized cylindrical wires only carry the paste through the binder interaction, but the cutting process causes the paste to peel off quickly and lose its cutting action.
為了提高線材的漿料輸送能力，鋸線具有一個藉由捲曲而實現的結構。捲曲在此處是一種有序的彎曲過程，其中結構被壓到鋸線中，例如藉由兩個90°偏置的齒輪，該等齒輪從中心的中間位置以機械方式使線材發生塑性偏移或彎曲。其中，結構由此而產生，即線材圍繞一個圓形尖端彎曲，例如齒輪上的一個形狀適配的齒。In order to improve the slurry conveying ability of the wire, the saw wire has a structure realized by crimping. Crimping is here an ordered bending process in which a structure is pressed into the saw wire, for example by means of two 90° offset gears, which mechanically deflect the wire plastically from the middle of the center or bent. In this case, the structure is produced in that the wire is bent around a circular tip, such as a form-fitting tooth on a gear.
此類線材很自然地也會在切割過程中遭受磨損，因為所攜帶的磨料顆粒不僅影響到要切割的材料，而且也可能會對線材產生磨蝕作用，要被切割的材料也可能會對線材產生磨蝕作用。特別是線材在捲曲的外側會受到磨損，過度磨損會導致捲曲丟失，因為線材會拉長以及不再能攜帶足夠的泥漿。Such wires are also naturally subject to wear during cutting, as the abrasive particles carried not only affect the material being cut, but may also be abrasive to the wire, which may also be abrasive to the wire. Abrasive effect. In particular the wire is subject to wear on the outside of the crimp, excessive wear can cause the crimp to be lost as the wire stretches and can no longer carry enough mud.
WO2018/149631 A1揭露了一種線鋸、線引導輥和一種用於從棒上同時切割多個切片的方法。此處要說明的是，由光滑圓鋼絲製成的結構化線材對於上述製程特別重要，該結構化線材在不改變其橫截面的形狀和尺寸的情況下沿著其整個長度週期性地移位，並且在垂直於線材縱向方向上具有相同的數量推移的橫截面。要說明的是，這些位移通常被稱為捲曲部，其中位移的大小稱為捲曲的幅度以及位移之間的縱向長度被稱為波長。該文獻還指出，捲曲部之間的空間充當凹槽或儲存器，與直徑相當的光滑線材比，線材在沿鋸線縱向方向移動時可在該等凹槽或儲存器中攜帶更多的漿料，且漿料不會被剝離。結構化線材的外包絡被定義為直徑最小的直圓柱體，它完全包含整個結構化線材。該直圓柱體的基面被定義為有效截面，圓柱體基面的直徑被定義為結構化線材的有效直徑，以及圓柱體外包絡的縱向軸被定義為結構化線材的縱向軸。芯線直徑應該是130 µm至175 µm，其中結構化線材外包絡的直徑應當是芯線直徑的1.02至1.25倍。由於磨損，各向異性磨損在捲曲部的暴露尖端區域內很明顯，其中線材在該區域內變成橢圓形。WO2018/149631 A1 discloses a wire saw, a wire guide roller and a method for simultaneously cutting multiple slices from a rod. It is to be stated here that structured wires made of smooth round steel wires, which are periodically displaced along their entire length without changing the shape and size of their cross-section, are of particular importance for the above process , and have the same number of shifted cross-sections in the direction perpendicular to the longitudinal direction of the wire. Note that these displacements are often referred to as curls, where the magnitude of the displacement is referred to as the amplitude of the curl and the longitudinal length between the displacements is referred to as the wavelength. The document also states that the spaces between the crimps act as grooves or reservoirs in which the wire can carry more pulp as it moves in the longitudinal direction of the wire than a smooth wire of comparable diameter material, and the slurry will not be peeled off. The outer envelope of the structured wire is defined as the smallest diameter right cylinder that completely encloses the entire structured wire. The base of the right cylinder is defined as the effective cross-section, the diameter of the base of the cylinder is defined as the effective diameter of the structured wire, and the longitudinal axis of the outer envelope of the cylinder is defined as the longitudinal axis of the structured wire. The core wire diameter should be 130 µm to 175 µm, where the diameter of the outer envelope of the structured wire should be 1.02 to 1.25 times the core wire diameter. Due to abrasion, anisotropic wear is evident in the exposed tip region of the crimp, where the wire becomes oval.
從WO2015/119344 Al已知一種結構化鋸線，該鋸線應當即使在張力下也能保持其捲曲的特性。在這個文獻中還提及這個必要性，即在鋸切條件下保持線材的結構，以便攜帶切割材料。這種鋸線應具有之字形方式的連續捲曲，其中實際捲曲部的彎曲半徑應當是線材本身直徑的5-20倍。鋸切時，鋸線受到縱向方向上的張力，該張力的目的是打開捲曲部的彎曲部分。這會降低捲曲幅度並且線材被拉伸。需要指出的是，如果彎曲半徑僅是線材直徑的5倍或更小，可能會出現過度彎曲，這可能導致生產中線材的斷裂。另一方面，彎曲半徑大於線材直徑的20倍會導致，施加切割應力時，切割線很容易拉伸，從而很大程度地增大線材的磨損程度，切割效率降低。此外提供，不僅是進行二維捲曲，而且藉由以下方式進行三維捲曲，即捲曲圍繞縱向軸線旋轉，使得捲曲部交替位於XZ平面和YZ平面上，從而形成螺旋。藉此改進漿料攜帶能力，進而提高切割能力。From WO 2015/119344 Al is known a structured saw wire which is supposed to retain its crimped properties even under tension. Also mentioned in this document is the need to maintain the structure of the wire under sawing conditions in order to carry the cut material. Such saw wire should have a continuous crimp in a zigzag fashion, wherein the actual crimp should have a bend radius of 5-20 times the diameter of the wire itself. When sawing, the wire is subjected to tension in the longitudinal direction, the purpose of which is to open the curved portion of the crimp. This reduces the amount of crimp and the wire is stretched. It should be pointed out that if the bending radius is only 5 times the diameter of the wire or less, excessive bending may occur, which may cause the wire to break during production. On the other hand, if the bending radius is greater than 20 times the diameter of the wire, the cutting wire will be easily stretched when the cutting stress is applied, thereby greatly increasing the wear of the wire and reducing the cutting efficiency. Furthermore, it is provided that not only two-dimensional crimping is performed, but also three-dimensional crimping by rotating the crimp around the longitudinal axis such that the crimps lie alternately in the XZ plane and the YZ plane, thereby forming a helix. This improves slurry carrying capacity, which in turn increases cutting capacity.
本發明的目的在於，提供一種製造鋸線的方法，藉由該方法製造鋸線，該鋸線具有較之先前技術得到改進的幾何形狀穩定性，因此更加耐磨。It is an object of the present invention to provide a method for producing a sawing wire by which a sawing wire is produced which has an improved geometrical stability compared to the prior art and is therefore more wear-resistant.
該目的藉由一種具有請求項1所述的特徵的方法得以實現。This object is achieved by a method having the features stated in claim 1 .
在相關的附屬請求項中確定了有利的進一步發展。Advantageous further developments are identified in the related subsidiary claims.
另一個目的是提供一種鋸線，該鋸線具有幾何形狀穩定性，該幾何形狀穩定性具有更好的抗磨損能力，因而不受形狀變化的影響以及因此保持攜帶磨料的能力。Another object is to provide a sawing wire which has a geometrical stability which has a better resistance to wear and thus is not affected by changes in shape and thus maintains the ability to carry abrasives.
該目的藉由一種具有請求項12所述的特徵的鋸線得以實現。This object is achieved by a sawing wire having the features stated in claim 12 .
在相關的附屬從請求項中確定了有利的進一步發展。Advantageous further developments are identified in the related subclaims.
增加線材的拉伸殘餘應力，以保證形狀穩定性，該方法在先前技術中是已知的。然而發明者已經發現，較高的拉伸殘餘應力的影響可以忽略不計，因為該應力處於線材的外相以及它們在1-3 µm的深度下的影響隨著塑性變形而被解除。The method of increasing the tensile residual stress of the wire to ensure shape stability is known in the prior art. The inventors have however found that the effect of higher tensile residual stresses is negligible because the stresses are in the outer phase of the wire and their effects are relieved with plastic deformation at a depth of 1-3 µm.
根據本發明，將鋸線結構化。結構化代表了阿波羅問題的解決方案，即是說，線材試圖在三個齒輪尖部之間找到一個用於變形（兩尖相對，一尖凸起）的位置。鋸線在捲曲處形成一個塑性鉸鏈，其中齒輪尖應當具有合適的半徑。合適的半徑例如處於線材直徑的1-3倍的數量級。因此，外層纖維的實際膨脹率可以在10%到30%之間，特別是大約17%到23%之間。相應地，在整個線材橫截面中，最多有20%，特別地最多有10%處於彈性變形區域，而線材的剩餘橫截面則是塑性變形。高塑性變形使線材的抗拉強度總體僅降低2%-6%，相當於塑性鉸鏈的承載量。According to the invention, the sawing wire is structured. Structuring represents a solution to the Apollo problem, that is, the wire tries to find a place for deformation (two facing each other, one convex) between the three gear tips. The wire forms a plastic hinge at the crimp, where the gear tip should have a suitable radius. Suitable radii are, for example, in the order of 1-3 times the wire diameter. Thus, the actual expansion of the fibers of the outer layer may be between 10% and 30%, especially between about 17% and 23%. Accordingly, a maximum of 20%, in particular a maximum of 10%, of the entire wire cross-section is in the region of elastic deformation, while the remaining cross-section of the wire is plastically deformed. High plastic deformation reduces the overall tensile strength of the wire by only 2%-6%, which is equivalent to the load capacity of a plastic hinge.
相應地，在已捲曲線材的捲曲位置上，在外側產生壓應力，在應力藉由線材中必要的扭矩平衡變為拉伸殘餘應力之前，取決於直徑，該壓應力在表面以下達到20-40 µm。高塑性變形使得線材進一步對外部條件的波動變得不敏感，因為0.3-0.8 µm的磨損僅代表1%-2%的機械條件的變化。Correspondingly, at the crimped position of the coiled wire, a compressive stress occurs on the outside, which, depending on the diameter, reaches 20-40° below the surface before the stress is transformed into a tensile residual stress by the necessary torque balance in the wire. µm. High plastic deformation renders the wire further insensitive to fluctuations in external conditions, since a wear of 0.3-0.8 µm represents only a 1%-2% change in mechanical conditions.
根據本發明，如果在捲曲過程中向線材施加拉力，則可增大可能的線材形式的範圍。特別地，事實證明有利的是，將此拉力的大小定為抗拉強度Rm和線材橫截面A的乘積的至少8%，特別地至少12%以及最大35%，特別地最大24%。拉應力導致塑性變形區域的再一次擴大，從而可以進一步減少外部磨損條件對線材幾何形狀的影響，並且對線材幾何形狀的可能形狀施加的限制要少得多。According to the invention, the range of possible wire forms can be increased if tension is applied to the wire during crimping. In particular, it has proven to be advantageous to dimension this tensile force at least 8%, in particular at least 12% and at most 35%, in particular at most 24%, of the product of the tensile strength Rm and the wire cross section A. The tensile stress leads to another enlargement of the plastic deformation area, which can further reduce the influence of external wear conditions on the wire geometry and imposes much fewer restrictions on the possible shapes of the wire geometry.
由於捲曲過程中的拉力所引發的拉應力由於系統原因在捲曲之後不再存在，因此成品線材的外層纖維上將僅出現壓應力。Since the tensile stresses induced by the tension during crimping are systematically no longer present after crimping, only compressive stresses will appear on the outer fibers of the finished wire.
根據本發明，影響因素是齒輪頭的幾何形狀，特別是齒輪的齒半徑，結構化過程中的拉伸力和偏移限制比Re/Rm。According to the invention, influencing factors are the geometry of the gear head, in particular the tooth radius of the gear, the tensile force during structuring and the deflection limiting ratio Re/Rm.
本發明特別地關於一種用於製造結構化鋸線的方法，其中具有至少二維結構的金屬線是這樣形成，即線材沿著線材的縱向軸線如此捲曲，使得線材與凸起塑性變形，其中在捲曲過程中施加占線材抗拉強度10%-20%的拉應力。The invention relates in particular to a method for producing a structured sawing wire, wherein a metal wire having an at least two-dimensional structure is formed in such a way that the wire is crimped along the longitudinal axis of the wire such that the wire and the protrusions are plastically deformed, wherein in During the crimping process, a tensile stress accounting for 10%-20% of the tensile strength of the wire is applied.
進一步的發展提供，線材在多個相互成角度的平面內捲曲，以形成三維結構。A further development provides that the wire is crimped in a plurality of mutually angled planes to form a three-dimensional structure.
進一步的發展提供，線材在捲曲過程中形成塑性鉸鏈，其中彎曲半徑為線材直徑的1-2倍，使得實際膨脹約為17%至23%，特別是20%左右。A further development provides that the wire forms a plastic hinge during crimping, wherein the bending radius is 1-2 times the wire diameter, so that the actual expansion is about 17% to 23%, especially about 20%.
進一步的發展提供，降伏點在1.5%-1.7%開始，其中整個線材橫截面的最多5%-20%處於彈性變形區域，而剩下的80%-95%的線材則發生塑性變形，使得塑性變形總體上對應塑性鉸鏈的承載量僅降低2%-6%的線材抗拉強度。Further development provides that the yield point starts at 1.5%-1.7%, where at most 5%-20% of the entire wire cross-section is in the elastic deformation region, while the remaining 80%-95% of the wire undergoes plastic deformation, making the plasticity Deformation generally corresponds to a reduction in the tensile strength of the wire by only 2%-6% of the load capacity of the plastic hinge.
進一步的發展提供，在已捲曲線材的外側，在捲曲部位置上設置壓應力，在該處的應力變為拉伸殘餘應力之前，該壓應力在表面之下達到20-40 µm。A further development provides that, on the outside of the coiled wire, a compressive stress is placed at the location of the crimp, which reaches 20-40 µm below the surface before the stress there becomes a tensile residual stress.
進一步的發展提供，線材圍繞圓形尖彎曲，特別地藉由適當形成的齒輪齒或定期衝擊的成型銷來實現。A further development provides that the wire is bent around a rounded point, in particular by means of suitably formed gear teeth or periodically impacted profiled pins.
進一步的發展提供，變形（從兩側到達線材）的間距約為線材直徑的10-15x，波長因此約為直徑的20-30x。A further development provides that the spacing of the deformations (reaching the wire from both sides) is about 10-15x the diameter of the wire and the wavelength is thus about 20-30x the diameter.
進一步的發展提供，該結構是在偏移80°至90°的方向上獨立施加的，其中要注意的是，所產生的波長具有儘可能大的最小公倍數。A further development provides that the structures are applied independently in directions offset by 80° to 90°, with care being taken that the resulting wavelengths have as large a least common multiple as possible.
進一步的發展提供，如此設置幅度，使得線材的表觀直徑（縱向方向上的包絡圓直徑）在線鋸的線材場（Drahtfeld）的工作張力下約為8 µm至12 µm以及特別地為10 µm和/或在未施加夾緊力的情況下比實際線材直徑大8%-24%，特別地大10%至20%。A further development provides that the amplitude is set such that the apparent diameter of the wire (diameter of the enveloping circle in the longitudinal direction) is approximately 8 µm to 12 µm and in particular 10 µm and / or 8% - 24% larger than the actual wire diameter without clamping force applied, especially 10% to 20% larger.
進一步的發展提供，線材的偏移限制比Re/Rm被設置為85%至95%以及特別地被設置為90%。A further development provides that the deflection limiting ratio Re/Rm of the wire is set at 85% to 95% and in particular at 90%.
本發明的另一態樣係關於一種鋸線，特別地採用之前描述的方法來製造，其中線材在一個或多個相互成角度的平面內捲曲。Another aspect of the invention relates to a sawing wire, in particular manufactured by the method described above, wherein the wire is crimped in one or more mutually angled planes.
進一步的發展提供，捲曲點上的彎曲半徑是線材直徑的1-2倍以及從兩側到達線材的變形的距離為線材直徑的5至15倍，特別是10倍，以及波長為線材直徑的10至30倍，特別是20倍。A further development provides that the bending radius at the crimping point is 1-2 times the wire diameter and the distance to the deformation of the wire from both sides is 5 to 15 times the wire diameter, in particular 10 times, and the wavelength is 10 times the wire diameter to 30 times, especially 20 times.
進一步的發展提供，在已捲曲線材的外側，在捲曲位置上設置壓應力，在該處的應力變為拉伸殘餘應力之前，該壓應力在表面之下達到20-40 µm。A further development provides that, on the outside of the coiled wire, a compressive stress is placed at the coiled location, which reaches 20-40 µm below the surface before the stress there becomes a tensile residual stress.
進一步的發展進供，被拉伸線材的抗拉強度Rm在3000 MPa至4200 MPa之間，特別地在3200 MPa至4000 MPa之間，進一步較佳地在3400 MPa至3800 MPa之間以及被拉伸線材的降伏強度在2500 MPa至4000 MPa之間，特別地在2900 MPa至3800 MPa之間以及較佳地在3000 MPa和3450 MPa之間。Further development provides that the tensile strength Rm of the drawn wire is between 3000 MPa and 4200 MPa, especially between 3200 MPa and 4000 MPa, and is further preferably between 3400 MPa and 3800 MPa and is drawn The yield strength of the drawn wire is between 2500 MPa and 4000 MPa, especially between 2900 MPa and 3800 MPa and preferably between 3000 MPa and 3450 MPa.
進一步的發展提供，線材具有0.12 mm至0.17 mm的直徑以及具有三維的捲曲結構，其中彎曲半徑為0.24 mm至0.34mm，其中幅度為0.14 mm至0.2mm以及波長在2 mm至4 mm之間。A further development provides that the wire has a diameter of 0.12 mm to 0.17 mm and has a three-dimensional coil structure with a bending radius of 0.24 mm to 0.34 mm, with an amplitude of 0.14 mm to 0.2 mm and a wavelength of between 2 mm and 4 mm.
將參照一個示例闡釋本發明，其中根據圖1的表列舉了相應資料。The invention will be explained with reference to an example in which the corresponding data are listed according to the table of FIG. 1 .
為直徑0.15mm的線材設置三維的捲曲結構，其中彎曲半徑為直徑的兩倍，即0.3 mm。所形成的幅度為0.17 mm，而波長為3.1 mm。在外層纖維上的必要伸長率為20%，其中取決於原材料的降伏點為1.7%。與此對應，塑性伸長分量為18.3%。由此得出的從中心線到降伏點的距離為5.61 µm，而從邊緣至零應力線的距離為35.36 µm。彎曲過程結束後，外側纖維中最終的殘餘伸長率在卸載後為負1.6%（壓縮）。A three-dimensional crimp structure is set for a wire with a diameter of 0.15 mm, where the bending radius is twice the diameter, ie 0.3 mm. The resulting amplitude is 0.17 mm and the wavelength is 3.1 mm. The necessary elongation on the fibers of the outer layer is 20%, with a yield point of 1.7% depending on the raw material. Corresponding to this, the plastic elongation component is 18.3%. The resulting distance from the centerline to the yield point is 5.61 µm, while the distance from the edge to the zero stress line is 35.36 µm. After the bending process, the final residual elongation in the outer fibers was minus 1.6% after unloading (compression).
偏移限制比Re/Rm為90%，其中被拉伸線材的抗拉強度Rm為3600 MPa。被拉伸線材的降伏強度為3240 MPa。The deviation restriction ratio Re/Rm is 90%, and the tensile strength Rm of the drawn wire is 3600 MPa. The yield strength of the stretched wire is 3240 MPa.
在前述條件下，在外層纖維上產生了453 MPa的殘餘應力，這也是由於在結構化過程中施加了8牛頓的拉伸應力所造成的。人們發現，在被拉伸線材的抗拉強度Rm為3600 MPa的情況下，在結構化過程中施加了約12.6%的縱向應力，導致0.2%的預伸長率。Under the aforementioned conditions, a residual stress of 453 MPa was generated on the fibers of the outer layer, which was also caused by the tensile stress of 8 Newtons applied during the structuring process. It was found that at a tensile strength Rm of the drawn wire of 3600 MPa, about 12.6% of longitudinal stress was applied during structuring, resulting in a pre-elongation of 0.2%.
被拉伸線材的外層纖維中的殘餘應力可以達到接近線材的降伏強度，但在最後的拉伸步驟中有意識地藉由最終的較小變型而減小了一些。以1500 MPa的拉伸殘餘應力為例，但在3 µm左右的深度，拉伸殘餘應力降至0。最大預伸長率為0.8%的殘餘應力導致更快地達到降伏點，並且因此自塑性變形開始就立刻失去了對最終線材性能的影響。Residual stresses in the outer fibers of the drawn wire can reach close to the yield strength of the wire, but are intentionally reduced somewhat by final minor deformations during the final drawing step. Take the tensile residual stress of 1500 MPa as an example, but at a depth of around 3 µm, the tensile residual stress drops to 0. The residual stress with a maximum pre-elongation of 0.8% leads to a faster reaching of the yield point and thus immediately loses its influence on the final wire properties from the onset of plastic deformation.
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| DE102021121134.4A DE102021121134A1 (en) | 2021-08-13 | 2021-08-13 | Saw wire and method for its manufacture |
| DE102021121134.4 | 2021-08-13 |
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| KR (1) | KR20240042105A (en) |
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| JP2627373B2 (en) * | 1991-07-08 | 1997-07-02 | 金井 宏之 | High strength extra fine metal wire |
| DE19839091A1 (en) * | 1998-08-27 | 2000-03-09 | Kempten Elektroschmelz Gmbh | Saw wire |
| JP2001259991A (en) | 2000-03-15 | 2001-09-25 | Sumitomo Electric Ind Ltd | Wire for wire saw |
| LU91126B1 (en) * | 2004-12-23 | 2006-06-26 | Trefilarbed Bettembourg S A | Monofilament metal saw wire |
| JP2012139743A (en) | 2010-12-28 | 2012-07-26 | Tochigi Sumitomo Denko Kk | Saw wire |
| KR20120120721A (en) * | 2011-04-25 | 2012-11-02 | 니폰 세이센 가부시키가이샤 | Saw wire and method for manufacturing the same |
| KR101934152B1 (en) * | 2012-09-07 | 2018-12-31 | 베카에르트 빈장 스틸 코드 코., 엘티디. | A shaped sawing wire with subsurface tensile residual stresses |
| CN104070610A (en) * | 2013-03-26 | 2014-10-01 | 蒙特集团（香港）有限公司 | High-efficiency cutting wire saw with abrasive |
| CN103343871B (en) | 2013-07-02 | 2016-12-28 | 江苏宝钢精密钢丝有限公司 | A kind of low elasticity structure lines and manufacture method thereof |
| CN203471061U (en) * | 2013-09-09 | 2014-03-12 | 凡登（常州）新型金属材料技术有限公司 | Metal wire with different structures and manufacturing device thereof |
| KR101652062B1 (en) | 2014-02-04 | 2016-08-29 | 홍덕산업 주식회사 | A structure saw wire maintaining crimp property under high slicing tension |
| JP3215089U (en) * | 2017-01-09 | 2018-03-01 | べカルト ビンジャン スチール コード カンパニー．，リミテッドＢｅｋａｅｒｔ Ｂｉｎｊｉａｎｇ Ｓｔｅｅｌ Ｃｏｒｄ Ｃｏ．，Ｌｔｄ | Saw wire spool with elastic and plastic rotation |
| CN108284529A (en) * | 2017-01-09 | 2018-07-17 | 江阴贝卡尔特合金材料有限公司 | With the spool for sawing silk for thering is elasticity and plasticity to rotate |
| DE102017202314A1 (en) | 2017-02-14 | 2018-08-16 | Siltronic Ag | Wire saw, wire guide roller, and method of simultaneously separating a plurality of disks from a rod |
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