TW202317818A - Feeding pipe, single crystal growth apparatus and feeding method thereof - Google Patents

Feeding pipe, single crystal growth apparatus and feeding method thereof Download PDF

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TW202317818A
TW202317818A TW112101077A TW112101077A TW202317818A TW 202317818 A TW202317818 A TW 202317818A TW 112101077 A TW112101077 A TW 112101077A TW 112101077 A TW112101077 A TW 112101077A TW 202317818 A TW202317818 A TW 202317818A
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feeding
guide
silicon raw
crucible
guide part
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TW112101077A
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TWI827440B (en
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陳俊宏
邢微波
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大陸商徐州鑫晶半導體科技有限公司
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    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/02—Single-crystal growth by pulling from a melt, e.g. Czochralski method adding crystallising materials or reactants forming it in situ to the melt
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/002—Continuous growth
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/36—Carbides

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

The disclosure discloses a feeding pipe, a single crystal growth apparatus and a feeding method thereof. The feeding pipe is adapted to the single crystal growth apparatus. The single crystal growth apparatus includes a crucible and the feeding pipe, and the crucible is adapted to hold silicon melt. The feeding pipe includes a pipe body and a switch assembly. The pipe body defines a feeding channel and a plurality of storage chambers adapted to store silicon material. The storage chambers are connected to the feeding channel, and the feeding channel is adapted to deliver the silicon material in the storage chambers to the crucible. The switch assembly is adapted to respectively control communication or disconnection between the storage chambers and the feeding channel. According to the feeding pipe of the present disclosure, it is easier to control the feeding amount of the silicon material, and it can also prevent the high-temperature silicon melt from splashing when the silicon material enters the silicon melt, thereby improving the safety and reliability of the operation of the single crystal growth apparatus.

Description

加料管、單晶生長設備及其加料方法Feeding tube, single crystal growth equipment and feeding method thereof

本發明關於碳化矽單晶生長技術領域，尤其是關於一種加料管、單晶生長設備及其加料方法。The invention relates to the technical field of silicon carbide single crystal growth, in particular to a feeding tube, single crystal growth equipment and a feeding method thereof.

相關技術中，通常使用多段拉晶技術以降低製備晶棒的成本，在拉製出一個晶棒後，需要使用加料管向石英坩堝內補充多晶矽原料，以補足由於上次提拉晶棒而減少的矽熔湯。但是在使用加料管向石英坩堝內補充多晶矽原料時，由於加料管與熔湯液面之間存在高度差，當加料管的加料口打開時，在重力的作用下，大量的多晶矽從加料管掉落至熔湯，容易造成熔湯的飛濺，影響晶體生長裝置工作的可靠性。In related technologies, multi-stage crystal pulling technology is usually used to reduce the cost of preparing crystal rods. After pulling out a crystal rod, it is necessary to use a feeding tube to replenish polysilicon raw materials into the quartz crucible to make up for the reduction due to the last pulling of the crystal rod. silicon melt soup. However, when the feeding tube is used to replenish polysilicon raw materials into the quartz crucible, due to the height difference between the feeding tube and the liquid level of the molten soup, when the feeding port of the feeding tube is opened, a large amount of polysilicon will fall from the feeding tube under the action of gravity. Falling into the molten soup will easily cause splashing of the molten soup, which will affect the reliability of the crystal growth device.

本發明旨在至少解決現有技術中存在的技術問題之一。為此，本發明在於提出一種加料管，所述加料管可以防止加料時高溫矽熔湯的飛濺，提高單晶生長設備的安全性和可靠性。The present invention aims to solve at least one of the technical problems existing in the prior art. Therefore, the present invention proposes a feeding tube, which can prevent splashing of high-temperature silicon molten soup during feeding, and improve the safety and reliability of single crystal growth equipment.

本發明還提出一種具有上述加料管的單晶生長設備。The present invention also proposes a single crystal growth device with the above-mentioned feeding tube.

本發明還提出了一種單晶生長設備的加料方法，利用所述加料方法可以防止加料時高溫矽熔湯的飛濺，提高單晶生長設備的安全性和可靠性。The invention also proposes a feeding method for single crystal growth equipment, which can prevent splashing of high-temperature silicon molten soup during feeding, and improve the safety and reliability of single crystal growth equipment.

根據本發明第一方面實施例的加料管，用於單晶生長設備，所述單晶生長設備包括：坩堝和所述加料管，所述坩堝適於盛放矽熔湯，所述加料管包括：管本體，所述管本體限定出輸料通道和多個用於儲放矽原料的儲料腔，多個所述儲料腔均和所述輸料通道連通，所述輸料通道適於將多個所述儲料腔內的矽原料投放至所述坩堝；開關組件，所述開關組件適於分別控制多個所述儲料腔與所述輸料通道的通斷。The feeding tube according to the embodiment of the first aspect of the present invention is used in a single crystal growth device, and the single crystal growth device includes: a crucible and the feeding tube, the crucible is suitable for containing molten silicon soup, and the feeding tube includes : a pipe body, the pipe body defines a material delivery channel and a plurality of material storage chambers for storing silicon raw materials, and the plurality of material storage chambers are all connected with the material delivery channel, and the material delivery channel is suitable for Putting the silicon raw materials in the multiple storage chambers into the crucible; a switch assembly, the switch assembly is adapted to separately control the on-off of the multiple storage chambers and the material delivery channel.

根據本發明實施例的加料管，通過設置多個儲料腔，可以在需要向坩堝內投料時來選擇投放一個或多個儲料腔內的矽原料，與相關技術中加料管僅設有一個儲料腔，在打開儲料腔時將全部的矽原料均投入矽熔湯相比，一方面更易於控制每次投放矽原料時的投放量，另一方面，可以防止大量的矽原料進入矽熔湯時造成的高溫矽熔湯的飛濺，提升了單晶生長設備運行的安全性和可靠性。此外，多個儲料腔中的矽原料均通過輸料通道來投放，更容易控制和調整落料區域。According to the feeding pipe of the embodiment of the present invention, by providing multiple storage chambers, silicon raw materials in one or more storage chambers can be selected and put into the crucible when feeding materials into the crucible. Compared with the feeding pipe in the related art, there is only one Compared with putting all the silicon raw materials into the silicon molten soup when opening the storage chamber, on the one hand, it is easier to control the amount of silicon raw materials each time, and on the other hand, it can prevent a large amount of silicon raw materials from entering the silicon. The splash of high-temperature silicon molten soup caused by melting soup improves the safety and reliability of single crystal growth equipment operation. In addition, the silicon raw materials in multiple storage chambers are delivered through the delivery channel, which makes it easier to control and adjust the discharge area.

根據本發明的一些實施例，所述管本體包括：外管；內管，所述內管位於所述外管的內側，所述內管限定出所述輸料通道；多個隔板，多個所述隔板間隔設於所述外管與所述內管之間，多個所述隔板與所述外管以及所述內管共同限定出多個所述儲料腔，所述內管上形成有與多個所述儲料腔一一對應的多個連通口，所述連通口連通所述儲料腔和所述輸料通道，所述開關組件適於打開或關閉多個所述連通口。According to some embodiments of the present invention, the pipe body includes: an outer pipe; an inner pipe, the inner pipe is located inside the outer pipe, and the inner pipe defines the material delivery channel; a plurality of partitions, a plurality of A plurality of partitions are arranged between the outer tube and the inner tube at intervals, and a plurality of partitions together with the outer tube and the inner tube define a plurality of storage chambers. A plurality of communication ports corresponding to the plurality of storage chambers are formed on the pipe, and the communication ports communicate with the storage chamber and the delivery channel, and the switch assembly is suitable for opening or closing the plurality of storage chambers. The connecting port is described.

進一步地，多個所述隔板沿所述內管的周向間隔佈置，多個所述隔板與所述外管以及所述內管共同限定出沿所述內管的軸向延伸且沿所述內管的周向間隔佈置的多個所述儲料腔，所述連通口位於所述儲料腔的鄰近底端的位置。Further, a plurality of partitions are arranged at intervals along the circumference of the inner tube, and a plurality of partitions together with the outer tube and the inner tube define a A plurality of the material storage chambers are arranged at intervals in the circumferential direction of the inner tube, and the communication port is located near the bottom end of the material storage chambers.

再進一步地，所述儲料腔的底壁沿所述內管的徑向向內且沿軸向向下的方向傾斜延伸。Still further, the bottom wall of the storage chamber extends obliquely inward along the radial direction of the inner tube and axially downward.

根據本發明的一些實施例，所述開關組件包括：多個開關門，多個所述開關門與多個所述連通口一一對應且適配，所述開關門沿所述內管的軸向且遠離所述坩堝的一端與所述內管樞轉連接。According to some embodiments of the present invention, the switch assembly includes: a plurality of switch doors, the plurality of switch doors correspond to and adapt to the plurality of communication ports, and the switch doors are arranged along the axis of the inner tube One end facing and away from the crucible is pivotally connected to the inner tube.

根據本發明的一些實施例，所述加料管還包括：驅動件，所述驅動件與所述管本體相連，所述驅動件適於驅動所述管本體繞所述管本體的中心軸線轉動以帶動多個所述儲料腔轉動。According to some embodiments of the present invention, the feeding pipe further includes: a driving member connected to the pipe body, and the driving member is adapted to drive the pipe body to rotate around the central axis of the pipe body to Drive multiple storage chambers to rotate.

在一些實施例中，所述加料管還包括：導向蓋，所述導向蓋適於封堵所述輸料通道的鄰近所述坩堝的一端，所述導向蓋適於在第一位置和第二位置之間移動，所述導向蓋在所述第一位置時，所述輸料通道被關閉，所述導向蓋在所述第二位置時，所述輸料通道被打開，所述儲料腔內的矽原料適於通過所述輸料通道輸送至所述坩堝。In some embodiments, the feeding tube further includes: a guide cover, the guide cover is suitable for blocking one end of the feeding channel adjacent to the crucible, and the guide cover is suitable for the first position and the second When the guide cover is in the first position, the material delivery channel is closed; when the guide cover is in the second position, the material delivery channel is opened, and the material storage chamber The silicon raw material inside is suitable for being transported to the crucible through the transport channel.

進一步地，所述導向蓋適於沿所述管本體的軸向所述第一位置和所述第二位置之間移動，在沿所述管本體的軸向且遠離所述管本體的方向上，所述導向蓋的至少部分沿徑向向外傾斜延伸形成導向面，所述導向蓋的直徑大於所述輸料通道的直徑，所述導向蓋位於所述第一位置時，所述導向面封堵所述輸料通道，所述導向蓋在所述第二位置時，所述導向面與所述管本體沿軸向間隔開，所述儲料腔內的矽原料適於沿所述導向面輸送到所述坩堝內。Further, the guide cover is adapted to move between the first position and the second position along the axial direction of the pipe body, in a direction along the axial direction of the pipe body and away from the pipe body , at least part of the guide cover extends radially outward to form a guide surface, the diameter of the guide cover is larger than the diameter of the material delivery channel, and when the guide cover is located at the first position, the guide surface Blocking the material conveying channel, when the guide cover is in the second position, the guide surface is axially spaced from the pipe body, and the silicon material in the storage chamber is suitable for moving along the guide The surface is transported into the crucible.

更進一步地，所述導向蓋包括：第一導向部，所述第一導向部在參考面內的投影形成為半圓形，所述第一導向部適於將矽原料投放至所述坩堝的第一區域；第二導向部，所述第二導向部在參考面內的投影形成為半圓形，所述第二導向部在參考面內的投影的半徑小於所述第一導向部在參考面內的投影的半徑，所述第二導向部與所述第一導向部沿徑向相對且相連，所述第二導向部適於將矽原料投放至所述坩堝的第二區域，所述第二區域在參考面內的投影位於所述第一區域在參考面內的投影的內側，所述參考面垂直於所述輸料管道的中心軸線，所述導向蓋還適於繞所述輸料通道的軸線轉動，以使所述第一導向部或所述第二導向部運動至需要投放矽料的所述儲料腔的下側。Furthermore, the guide cover includes: a first guide part, the projection of the first guide part in the reference plane is formed as a semicircle, and the first guide part is suitable for putting silicon raw materials into the crucible The first area; the second guide part, the projection of the second guide part in the reference plane is formed as a semicircle, and the radius of the projection of the second guide part in the reference plane is smaller than that of the first guide part in the reference plane The radius of the projection in the plane, the second guide part is radially opposite to and connected to the first guide part, the second guide part is suitable for putting silicon raw materials into the second area of the crucible, the The projection of the second area in the reference plane is located inside the projection of the first area in the reference plane, the reference plane is perpendicular to the central axis of the conveying pipeline, and the guide cover is also suitable for The axis of the material channel is rotated so that the first guide part or the second guide part moves to the lower side of the material storage cavity where the silicon material needs to be placed.

在一些實施例中，多個所述儲料腔適於分別存儲不同尺寸的矽原料，多個所述儲料腔按照所存儲的矽原料的尺寸大小沿所述管本體的周向依次佈置。In some embodiments, the plurality of storage chambers are suitable for storing silicon raw materials of different sizes, and the plurality of storage chambers are sequentially arranged along the circumference of the tube body according to the sizes of the stored silicon raw materials.

進一步地，多個所述儲料腔中，存儲較大尺寸矽原料的所述儲料腔的容積大於存儲較小尺寸矽原料的所述儲料腔的容積。Further, among the plurality of storage chambers, the volume of the storage chamber storing larger-sized silicon raw materials is greater than the volume of the storage chamber storing smaller-sized silicon raw materials.

根據本發明第二方面實施例的單晶生長設備，包括：根據本發明第一方面所述的加料管。The single crystal growth equipment according to the embodiment of the second aspect of the present invention includes: the feeding pipe according to the first aspect of the present invention.

根據本發明實施例的單晶生長設備，通過設置上述第一方面所述的加料管，更易於控制每次投放矽原料時的投放量，此外，可以防止大量的矽原料進入矽熔湯時造成的高溫矽熔湯的飛濺，提升了單晶生長設備運行的安全性和可靠性。According to the single crystal growth equipment of the embodiment of the present invention, by setting the feeding tube described in the first aspect above, it is easier to control the amount of silicon raw material added each time, and in addition, it can prevent a large amount of silicon raw material from entering the silicon melt. The splash of high-temperature silicon molten soup improves the safety and reliability of single crystal growth equipment operation.

根據本發明第三方面實施例的單晶生長設備的加料方法，所述單晶生長設備包括：坩堝和加料管，所述坩堝適於盛放矽熔湯，所述加料管包括：管本體，所述管本體限定出輸料通道和多個用於儲放矽原料的儲料腔，多個所述儲料腔適於分別存儲不同尺寸的矽原料，多個所述儲料腔按照所存儲的矽原料的尺寸大小沿所述管本體的周向依次佈置，多個所述儲料腔均和所述輸料通道連通，所述輸料通道適於將多個所述儲料腔內的矽原料輸送至所述坩堝內；開關組件，所述開關組件適於分別控制多個所述儲料腔與所述輸料通道的通斷；所述加料方法包括以下步驟：控制所述加料管按照多個所述儲料腔所存儲的矽原料的尺寸由小到大的順序依次投放多個所述儲料腔內的矽原料。According to the method for feeding single crystal growth equipment according to the embodiment of the third aspect of the present invention, the single crystal growth equipment includes: a crucible and a feeding tube, the crucible is suitable for containing molten silicon soup, and the feeding tube includes: a tube body, The pipe body defines a feeding channel and a plurality of storage chambers for storing silicon raw materials. The plurality of storage chambers are suitable for storing silicon raw materials of different sizes respectively. The plurality of storage chambers are stored according to the The size of the silicon raw material is sequentially arranged along the circumference of the tube body, and a plurality of the storage chambers are all communicated with the delivery channel, and the delivery channel is suitable for transporting the silicon materials in the plurality of storage cavities The silicon raw material is transported into the crucible; the switch assembly is adapted to separately control the on-off of a plurality of the material storage chambers and the material delivery channel; the feeding method includes the following steps: controlling the feeding pipe The silicon raw materials stored in the plurality of storage chambers are sequentially put in order according to the size of the silicon raw materials stored in the plurality of storage chambers from small to large.

根據本發明實施例的單晶生長設備的加料方法，通過為加料管設置多個儲料腔，可以在需要向坩堝內投料時來選擇投放一個或多個儲料腔內的矽原料，並且，在加料管向坩堝內投放矽原料時，按照多個儲料腔所存儲的矽原料的尺寸由小到大的順序來依次打開多個儲料腔，使得在先投放的小尺寸的矽原料作為在後投放的大尺寸矽原料的緩衝層，從而避免出現矽熔湯飛濺的問題，而且還可以避免較大尺寸的多晶矽塊砸破坩堝，從而保證設備工作的可靠性。與相關技術中加料管僅設有一個儲料腔，在打開儲料腔時將全部的矽原料均投入矽熔湯相比，既便於控制每次投放矽原料時的投放量，更可以防止大量的矽原料進入矽熔湯時造成的高溫矽熔湯的飛濺，提升了單晶生長設備運行的安全性和可靠性，而且多個儲料腔中的矽原料均通過輸料通道來投放，更容易控制和調整落料區域。According to the feeding method of single crystal growth equipment in the embodiment of the present invention, by providing a plurality of storage chambers for the feeding pipe, silicon raw materials in one or more storage chambers can be selected to be fed into the crucible when feeding, and, When the feeding pipe puts silicon raw materials into the crucible, the multiple storage cavities are sequentially opened according to the size of the silicon raw materials stored in the multiple storage cavities from small to large, so that the small-sized silicon raw materials put in earlier are used as The buffer layer of the large-size silicon raw material put in later avoids the problem of silicon molten soup splashing, and also prevents the larger-sized polycrystalline silicon block from smashing the crucible, thereby ensuring the reliability of the equipment. Compared with the feeding tube in the related art, which only has one material storage cavity, and all the silicon raw materials are put into the silicon molten soup when the material storage cavity is opened, it is not only convenient to control the amount of silicon raw materials put in each time, but also can prevent a large amount of The splash of high-temperature silicon molten soup caused by the silicon raw material entering the silicon molten soup improves the safety and reliability of single crystal growth equipment operation, and the silicon raw materials in multiple storage chambers are put in through the feeding channel, which is more Easy to control and adjust the blanking area.

在本發明的一些實施例中，所述加料管還包括：導向蓋，所述導向蓋適於沿所述管本體的軸向在第一位置和第二位置之間移動，在沿所述管本體的軸向且遠離所述管本體的方向上，所述導向蓋的至少部分沿徑向向外傾斜延伸形成導向面，所述導向蓋的直徑大於所述輸料通道的直徑，所述導向蓋位於所述第一位置時，所述導向面封堵所述輸料通道，所述導向蓋在所述第二位置時，所述導向面與所述管本體沿軸向間隔開，所述儲料腔內的矽原料適於沿所述導向面輸送到所述坩堝內，所述導向蓋包括：第一導向部，所述第一導向部在參考面內的投影形成為半圓形，所述第一導向部適於將矽原料投放至所述坩堝內的第一區域；第二導向部，所述第二導向部在參考面內的投影形成為半圓形，所述第二導向部在參考面內的投影的半徑小於所述第一導向部在參考面內的投影的半徑，所述第二導向部與所述第一導向部沿徑向相對且相連，所述第二導向部適於將矽原料投放至所述坩堝內的第二區域，所述第二區域所在的參考圓小於所述第一區域所在的參考圓，所述導向蓋還適於繞所述輸料通道的軸線轉動，以使所述第一導向部或所述第二導向部位於需要投放矽料的所述儲料腔的下側，所述加料方法還包括以下步驟：確定矽原料投放在第一區域，控制所述導向蓋旋轉至所述第一導向部與所述儲料腔的連通口相對，控制所述導向蓋沿軸向移動以打開所述輸料通道，控制所述開關組件打開所述連通口，控制所述加料管與所述第一導向部同步轉動；或者，確定矽原料投放在第二區域，控制所述導向蓋旋轉至所述第二導向部與所述儲料腔的連通口相對，控制所述導向蓋沿軸向移動以打開所述輸料通道，控制所述開關組件打開所述連通口，控制所述加料管與所述第二導向部同步轉動；或者，確定矽原料投放在第一區域和第二區域，控制所述導向蓋沿軸向移動以打開所述輸料通道，控制所述開關組件打開所述連通口，控制所述加料管與導向蓋差速轉動。In some embodiments of the present invention, the feeding tube further includes: a guide cover, the guide cover is adapted to move between a first position and a second position along the axial direction of the tube body. In the axial direction of the body and in the direction away from the pipe body, at least part of the guide cover extends radially outward to form a guide surface, the diameter of the guide cover is larger than the diameter of the material delivery channel, and the guide cover When the cover is at the first position, the guide surface blocks the material delivery channel; when the guide cover is at the second position, the guide surface is axially spaced from the pipe body, and the The silicon raw material in the storage chamber is suitable for being transported into the crucible along the guide surface, and the guide cover includes: a first guide part, the projection of the first guide part on the reference plane is formed as a semicircle, The first guide part is suitable for putting silicon raw materials into the first area in the crucible; the second guide part, the projection of the second guide part in the reference plane is formed as a semicircle, and the second guide part The radius of the projection of the first guide part in the reference plane is smaller than the radius of the projection of the first guide part in the reference plane, the second guide part is radially opposite to and connected to the first guide part, and the second guide part The part is suitable for putting the silicon raw material into the second area in the crucible, the reference circle where the second area is located is smaller than the reference circle where the first area is located, and the guide cover is also suitable for surrounding the feeding channel Rotate the axis so that the first guide part or the second guide part is located at the lower side of the storage chamber where the silicon material needs to be put in. The charging method also includes the following steps: determine that the silicon material is put in the first area, control the guide cover to rotate until the first guide part is opposite to the communication port of the material storage chamber, control the guide cover to move in the axial direction to open the material delivery channel, and control the switch assembly to open the to control the feeding tube to rotate synchronously with the first guide part; or, to determine that the silicon raw material is placed in the second area, control the guide cover to rotate to the position between the second guide part and the material storage chamber The communication port is opposite, the guide cover is controlled to move in the axial direction to open the material delivery channel, the switch assembly is controlled to open the communication port, and the feeding pipe is controlled to rotate synchronously with the second guide part; or, determine The silicon raw material is placed in the first area and the second area, the guide cover is controlled to move in the axial direction to open the feeding channel, the switch assembly is controlled to open the communication port, and the differential speed between the feeding pipe and the guide cover is controlled. turn.

本發明的附加方面和優點將在下面的描述中部分給出，部分將從下面的描述中變得明顯，或通過本發明的實踐瞭解到。Additional aspects and advantages of the invention will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention.

下面詳細描述本發明的實施例，所述實施例的示例在圖式中示出，其中自始至終相同或類似的標號表示相同或類似的元件或具有相同或類似功能的元件。下面通過參考圖式描述的實施例是示例性的，旨在用於解釋本發明，而不能理解為對本發明的限制。Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals designate the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary and are intended to explain the present invention and should not be construed as limiting the present invention.

下面參考圖1至圖10描述根據本發明第一方面實施例的加料管100。The feeding tube 100 according to an embodiment of the first aspect of the present invention will be described below with reference to FIGS. 1 to 10 .

如圖1所示，根據本發明第一方面實施例的加料管100，可以用於單晶生長設備，例如，單晶生長設備可以是拉製晶棒的設備，也可以是其他類型的晶體生長爐。單晶生長設備可以包括：坩堝和加料管100。As shown in Figure 1, the feeding tube 100 according to the embodiment of the first aspect of the present invention can be used in single crystal growth equipment, for example, the single crystal growth equipment can be a device for pulling crystal ingots, or it can be other types of crystal growth furnace. The single crystal growth equipment may include: a crucible and a feeding tube 100 .

其中，坩堝適於盛放矽熔湯200，在晶體生長時，坩堝中的矽原料在高溫下變成熔融態的矽熔湯200，加料管100可以用於在坩堝中的矽熔湯200減少或不足時向坩堝中添加矽原料，以即時補充晶體生長所需的原料。加料管100可以包括：管本體1和開關組件2。其中，管本體1限定出輸料通道15和多個儲料腔14，多個儲料腔14可以用於儲放矽原料。多個儲料腔14均和輸料通道15連通，輸料通道15適於將多個儲料腔14內的矽原料投放至坩堝。也就是說，每個儲料腔14中的儲放的矽原料均可以通過輸料通道15投放至坩堝內。開關組件2適於分別控制多個儲料腔14與輸料通道15的通斷，以便於根據矽熔湯200的消耗量來投放適量的原料。Wherein, the crucible is suitable for containing the molten silicon soup 200. When the crystal grows, the silicon raw material in the crucible becomes molten silicon molten soup 200 at high temperature, and the feeding pipe 100 can be used to reduce or reduce the silicon molten soup 200 in the crucible. Add silicon raw materials to the crucible when it is insufficient, so as to instantly supplement the raw materials needed for crystal growth. The feeding pipe 100 may include: a pipe body 1 and a switch assembly 2 . Wherein, the pipe body 1 defines a material delivery channel 15 and a plurality of storage chambers 14, and the plurality of storage chambers 14 can be used for storing silicon raw materials. The plurality of material storage chambers 14 are all in communication with the material delivery channel 15, and the material delivery channel 15 is suitable for feeding the silicon raw materials in the plurality of material storage chambers 14 into the crucible. That is to say, the silicon raw material stored in each material storage cavity 14 can be put into the crucible through the material delivery channel 15 . The switch assembly 2 is adapted to separately control the on-off of multiple material storage chambers 14 and the material conveying channel 15 so as to inject an appropriate amount of material according to the consumption of the silicon melt 200 .

根據本發明實施例的加料管100，通過設置多個儲料腔14，可以在需要向坩堝內投料時來選擇投放一個或多個儲料腔14內的矽原料，與相關技術中加料管僅設有一個儲料腔，在打開儲料腔時將全部的矽原料均投入矽熔湯相比，一方面更易於控制每次投放矽原料時的投放量，另一方面，可以防止大量的矽原料進入矽熔湯200時造成的高溫矽熔湯200的飛濺，提升了單晶生長設備運行的安全性和可靠性。此外，多個儲料腔14中的矽原料均通過輸料通道15來投放，更容易控制和調整落料區域。According to the feeding pipe 100 of the embodiment of the present invention, by providing a plurality of storage chambers 14, the silicon raw material in one or more storage chambers 14 can be selected to be fed into the crucible when it needs to be fed into the crucible. There is a material storage chamber. Compared with putting all the silicon raw materials into the silicon molten soup when the material storage chamber is opened, on the one hand, it is easier to control the amount of silicon raw materials each time, and on the other hand, it can prevent a large amount of silicon The high-temperature silicon molten soup 200 is splashed when raw materials enter the silicon molten soup 200, which improves the safety and reliability of the operation of the single crystal growth equipment. In addition, the silicon raw materials in the multiple material storage chambers 14 are delivered through the delivery channel 15 , which makes it easier to control and adjust the discharge area.

根據本發明的一些實施例，管本體1可以包括：外管11、內管12和多個隔板13。其中，內管12位於外管11的內側，內管12和外管11可以同軸設置，內管12限定出輸料通道15。多個隔板13間隔設於外管11與內管12之間，多個隔板13與外管11以及內管12共同限定出多個儲料腔14，內管12上形成有與多個儲料腔14一一對應的多個連通口，連通口連通儲料腔14和輸料通道15，開關組件2適於打開或關閉多個連通口。例如，每個隔板13可以垂直於輸料通道15的中心軸線設置，多個隔板13相互平行，此時所形成的多個儲料腔14可以沿輸料通道15的軸向佈置；或者，每個隔板13可以沿輸料通道15的軸向延伸，多個隔板13相互平行，此時所形成的多個儲料腔14可以沿輸料通道15的周向佈置。由此，加料管100的整體結構簡單，便於製造和裝配。According to some embodiments of the present invention, the pipe body 1 may include: an outer pipe 11 , an inner pipe 12 and a plurality of partitions 13 . Wherein, the inner tube 12 is located inside the outer tube 11 , the inner tube 12 and the outer tube 11 can be arranged coaxially, and the inner tube 12 defines a material delivery channel 15 . A plurality of partitions 13 are arranged at intervals between the outer tube 11 and the inner tube 12, and the plurality of partitions 13, the outer tube 11 and the inner tube 12 jointly define a plurality of storage chambers 14, and the inner tube 12 is formed with a plurality of The material storage chamber 14 corresponds to a plurality of communication ports one by one, and the communication ports communicate with the material storage chamber 14 and the material delivery channel 15, and the switch assembly 2 is suitable for opening or closing the plurality of communication ports. For example, each dividing plate 13 can be arranged perpendicular to the central axis of the material delivery channel 15, and a plurality of dividing plates 13 are parallel to each other, and at this time, a plurality of material storage chambers 14 formed can be arranged along the axial direction of the material delivery channel 15; or , each partition 13 can extend along the axial direction of the material delivery channel 15 , and a plurality of partitions 13 are parallel to each other, and at this time, a plurality of material storage chambers 14 formed can be arranged along the circumferential direction of the material delivery channel 15 . Therefore, the overall structure of the feeding tube 100 is simple and convenient to manufacture and assemble.

進一步地，參考圖1至圖3，多個隔板13可以沿內管12的周向間隔佈置，多個隔板13與外管11以及內管12共同限定出多個儲料腔14，每個儲料腔14均沿內管12的軸向延伸，並且多個儲料腔14沿內管12的周向間隔佈置，連通口位於儲料腔14的鄰近底端的位置，如此，使得連通口可以最大程度接近坩堝，減小連通口和坩堝內的矽熔湯200的高度差，以避免落料引起的矽熔湯200飛濺。Further, referring to FIG. 1 to FIG. 3 , a plurality of partitions 13 may be arranged at intervals along the circumference of the inner tube 12, and the plurality of partitions 13 together with the outer tube 11 and the inner tube 12 define a plurality of storage chambers 14, each Each material storage chamber 14 extends axially along the inner tube 12, and a plurality of material storage chambers 14 are arranged at intervals along the circumference of the inner tube 12, and the communication port is located at the position near the bottom end of the material storage chamber 14, so that the communication port The crucible can be approached to the greatest extent, and the height difference between the communication port and the molten silicon soup 200 in the crucible can be reduced, so as to avoid splashing of the molten silicon soup 200 caused by blanking.

再進一步地，參考圖6和圖7，儲料腔14的底壁沿內管12的徑向向內且沿軸向向下的方向傾斜延伸，如此，儲料腔14內的矽原料均可以被充分投放，避免矽原料在儲料腔14的底部產生堆積以及由此導致的投放不充分。Further, referring to Fig. 6 and Fig. 7, the bottom wall of the material storage chamber 14 extends obliquely inwardly and axially downward along the radial direction of the inner tube 12, so that the silicon raw material in the material storage chamber 14 can be be fully injected, avoiding the accumulation of silicon raw materials at the bottom of the storage chamber 14 and the resulting insufficient input.

根據本發明的一些實施例，參考圖4至圖9，開關組件2可以包括：多個開關門21。其中，多個開關門21與多個連通口一一對應且適配，開關門21沿內管12的軸向且遠離坩堝的一端與內管12樞轉連接。例如，由於內管12為環形，連通口的截面也為弧形，由此，開關門21形成為與連通口適配的弧形板，以便於更好地關閉和打開連通口，開關門21的頂端和內管12通過樞轉軸連接以便於開關門21的打開和關閉。According to some embodiments of the present invention, referring to FIG. 4 to FIG. 9 , the switch assembly 2 may include: a plurality of switch doors 21 . Wherein, a plurality of opening and closing doors 21 correspond to and are adapted to a plurality of communication ports one by one, and the opening and closing doors 21 are pivotally connected to the inner pipe 12 along the axial direction of the inner pipe 12 and at an end far away from the crucible. For example, since the inner tube 12 is annular, the cross-section of the communication port is also arc-shaped, thus the switch door 21 is formed as an arc-shaped plate adapted to the communication port, so as to better close and open the communication port, and the switch door 21 The top end and the inner tube 12 are connected by a pivot shaft so as to facilitate the opening and closing of the switch door 21.

根據本發明的一些實施例，參考圖1至圖9，加料管100還可以包括：驅動件5。具體而言，驅動件5與管本體1相連，驅動件5適於驅動管本體1繞管本體1的中心軸線轉動以帶動多個儲料腔14轉動，如此，可以實現加料管100向坩堝內的各區域均勻布料，保證矽熔湯200周向方向上均有投料，防止局部區域落料過多，受熱不均勻，提高矽原料的熔融效率，進而確保晶體的正常生長。較佳地，驅動件5可以設於單晶生長設備的隔離爐上。According to some embodiments of the present invention, referring to FIG. 1 to FIG. 9 , the feeding pipe 100 may further include: a driving member 5 . Specifically, the driver 5 is connected to the tube body 1, and the driver 5 is suitable for driving the tube body 1 to rotate around the central axis of the tube body 1 to drive a plurality of storage chambers 14 to rotate, so that the feeding tube 100 can be moved into the crucible The uniform distribution of materials in each area ensures that the silicon melting soup is fed in the 200-circumferential direction, prevents excessive dropping in some areas, uneven heating, improves the melting efficiency of silicon raw materials, and ensures the normal growth of crystals. Preferably, the driving member 5 can be arranged on the isolation furnace of the single crystal growth equipment.

在一些實施例中，參考圖4至圖9，加料管100還可以包括：導向蓋3。具體而言，導向蓋3適於封堵輸料通道15的鄰近坩堝的一端（例如圖4中所示的輸料通道15的下端），導向蓋3可以在第一位置和第二位置之間移動，當導向蓋3位於第一位置時，導向蓋3可以封堵輸料通道15的下端，此時輸料通道15被關閉，當導向蓋3處於第二位置時，輸料通道15被打開，此時儲料腔14內的矽原料可以通過輸料通道15輸送至坩堝。此外，投料過程中，在導向蓋3的導向作用下，多晶矽料可以投放在坩堝的相對靠外的位置處，從而減少中心位置矽熔湯200的波動。較佳地，加料管100還可以包括提拉機構4，提拉機構4與導向蓋3體的上端連接，利用提拉機構4的上下牽拉，使得導向蓋3在第一位置和第二位置之間移動以實現打開或封閉輸料通道15。In some embodiments, referring to FIG. 4 to FIG. 9 , the feeding pipe 100 may further include: a guide cover 3 . Specifically, the guide cover 3 is suitable for blocking one end of the feeding channel 15 adjacent to the crucible (such as the lower end of the feeding channel 15 shown in FIG. 4 ), and the guide cover 3 can be between the first position and the second position. Move, when the guide cover 3 is in the first position, the guide cover 3 can block the lower end of the feeding channel 15, at this time the feeding channel 15 is closed, and when the guide cover 3 is in the second position, the feeding channel 15 is opened , at this time, the silicon raw material in the storage chamber 14 can be transported to the crucible through the transport channel 15 . In addition, during the feeding process, under the guidance of the guide cover 3 , the polysilicon material can be placed at a relatively outer position of the crucible, thereby reducing the fluctuation of the silicon melt 200 at the center. Preferably, the feeding pipe 100 can also include a pulling mechanism 4, which is connected to the upper end of the guide cover 3, and the pulling mechanism 4 is used to pull up and down, so that the guide cover 3 is in the first position and the second position. Move between to realize opening or closing delivery channel 15.

進一步地，導向蓋3適於沿管本體1的軸向第一位置和第二位置之間移動，在沿管本體1的軸向且遠離管本體1的方向上，導向蓋3的上表面的至少部分沿徑向向外傾斜延伸形成導向面，導向蓋3的直徑大於輸料通道15的直徑，導向蓋3位於第一位置時，導向面封堵輸料通道15，導向蓋3在第二位置時，導向面與管本體1沿軸向間隔開，儲料腔14內的矽原料適於沿導向面輸送到坩堝內。Further, the guide cover 3 is adapted to move between the first position and the second position along the axial direction of the pipe body 1, and in the direction along the axial direction of the pipe body 1 and away from the pipe body 1, the upper surface of the guide cover 3 At least part of it extends radially outwards to form a guide surface. The diameter of the guide cover 3 is greater than the diameter of the feed channel 15. When the guide cover 3 is in the first position, the guide surface blocks the feed channel 15, and the guide cover 3 is in the second position. position, the guide surface is axially spaced apart from the pipe body 1, and the silicon raw material in the storage chamber 14 is suitable for being transported into the crucible along the guide surface.

例如圖4所示，導向蓋3形成為在從下至上的方向上橫截面積逐漸減小的圓錐形，導向蓋3的上表面形成為導向面，導向蓋3在參考面內的投影的直徑大於輸料通道15在參考面內的投影的直徑，在投放矽原料時，從輸料通道15落下的矽原料首先落在導向蓋3上，然後沿著導向面滑落到坩堝內，如此，一方面導向蓋3可以起到對矽原料的緩衝作用，另一方面，由於矽原料是從導向蓋3的邊緣落入坩堝內，因此矽原料在坩堝內的落料區域由導向蓋3的大小決定，因此可以通過調整導向蓋3的大小來調整矽原料的落料區域。For example, as shown in Figure 4, the guide cover 3 is formed into a conical shape whose cross-sectional area gradually decreases in the direction from bottom to top, and the upper surface of the guide cover 3 is formed as a guide surface, and the diameter of the projection of the guide cover 3 in the reference plane greater than the diameter of the projection of the feeding channel 15 in the reference plane, when the silicon raw material is put in, the silicon raw material falling from the feeding channel 15 first falls on the guide cover 3, and then slides down into the crucible along the guiding surface, so that a On the one hand, the guide cover 3 can act as a buffer for the silicon raw material; on the other hand, since the silicon raw material falls into the crucible from the edge of the guide cover 3, the blanking area of the silicon raw material in the crucible is determined by the size of the guide cover 3 , so the blanking area of the silicon raw material can be adjusted by adjusting the size of the guide cover 3 .

在一些實施例中，參考圖8至圖10，導向蓋3可以包括：第一導向部31和第二導向部32。其中，第一導向部31在參考面內的投影形成為半圓形，第一導向部31適於將矽原料投放至坩堝的第一區域。第二導向部32在參考面內的投影形成為半圓形，第二導向部32在參考面內的投影的半徑小於第一導向部31在參考面內的投影的半徑，第二導向部32與第一導向部31沿徑向相對且相連，第二導向部32適於將矽原料投放至坩堝的第二區域，第二區域在參考面內的投影位於第一區域在參考面內的投影的內側，參考面垂直於輸料通道15的中心軸線。導向蓋3還適於繞輸料通道15的軸線轉動，以使第一導向部31或第二導向部32運動至需要投放矽料的儲料腔14的下側，如此，通過設置導向蓋3，並將導向蓋3設置為適於繞輸料通道15的軸線轉動，可以方便地調整原料在坩堝內的落料區域。In some embodiments, referring to FIG. 8 to FIG. 10 , the guide cover 3 may include: a first guide portion 31 and a second guide portion 32 . Wherein, the projection of the first guide part 31 in the reference plane is formed as a semicircle, and the first guide part 31 is suitable for putting the silicon raw material into the first area of the crucible. The projection of the second guide portion 32 in the reference plane is formed as a semicircle, the radius of the projection of the second guide portion 32 in the reference plane is smaller than the radius of the projection of the first guide portion 31 in the reference plane, and the second guide portion 32 Opposite and connected to the first guide part 31 in the radial direction, the second guide part 32 is suitable for putting the silicon raw material into the second area of the crucible, and the projection of the second area on the reference plane is located at the projection of the first area on the reference plane The inner side of the reference plane is perpendicular to the central axis of the feeding channel 15 . The guide cover 3 is also suitable for rotating around the axis of the feeding channel 15, so that the first guide part 31 or the second guide part 32 moves to the lower side of the storage chamber 14 where the silicon material needs to be put in, so that by setting the guide cover 3 , and the guide cover 3 is set to be suitable for rotating around the axis of the material delivery channel 15, so that the blanking area of the raw material in the crucible can be adjusted conveniently.

例如，當確定矽原料需要投放在第一區域時，可以控制導向蓋3旋轉至第一導向部31與儲料腔14的連通口相對，然後控制導向蓋3沿軸向移動至第二位置以打開輸料通道15，控制開關門21打開連通口，控制加料管100與第一導向部31同步轉動，此時儲料腔14內的原料可以始終沿著第一導向部31的導向面落到坩堝的第一區域。For example, when it is determined that the silicon raw material needs to be placed in the first area, the guide cover 3 can be controlled to rotate until the first guide portion 31 is opposite to the communication port of the storage chamber 14, and then the guide cover 3 can be controlled to move axially to the second position to Open the feeding channel 15, control the opening and closing door 21 to open the communication port, and control the feed pipe 100 to rotate synchronously with the first guide part 31. At this time, the raw materials in the material storage chamber 14 can always fall to The first area of the crucible.

當確定矽原料需要投放在第二區域時，可以控制導向蓋3旋轉至第二導向部32與儲料腔14的連通口相對，然後控制導向蓋3沿軸向移動至第二位置以打開輸料通道15，控制開關門21打開連通口，並控制加料管100與第二導向部32同步轉動，此時儲料腔14內的原料可以始終沿著第一導向部31的導向面落到坩堝的第二區域。When it is determined that the silicon raw material needs to be placed in the second area, the guide cover 3 can be controlled to rotate until the second guide part 32 is opposite to the communication port of the material storage chamber 14, and then the guide cover 3 is controlled to move axially to the second position to open the delivery. Material channel 15, control the switch door 21 to open the communication port, and control the feeding pipe 100 to rotate synchronously with the second guide part 32, at this time, the raw material in the material storage chamber 14 can always fall into the crucible along the guide surface of the first guide part 31 of the second area.

當確定坩堝的第一區域和第二區域均需要投放矽原料時，可以控制導向蓋3沿軸向移動至第二位置以打開輸料通道15，控制開關組件2打開連通口，控制加料管100與導向蓋3差速轉動，這樣，當第一導向部31轉動至和儲料腔14的連通口相對時，儲料腔14內的矽原料可以沿第一導向部31的導向面落至坩堝的第一區域；當第二導向部32轉動至和儲料腔14的連通口相對時，儲料腔14內的矽原料可以沿第二導向部32的導向面落至坩堝的第二區域。When it is determined that both the first area and the second area of the crucible need to put in silicon raw materials, the guide cover 3 can be controlled to move to the second position in the axial direction to open the feeding channel 15, the control switch assembly 2 is opened to open the communication port, and the feeding pipe 100 is controlled. Rotate at a differential speed with the guide cover 3, so that when the first guide part 31 rotates to face the communication port of the storage chamber 14, the silicon raw material in the storage chamber 14 can fall to the crucible along the guide surface of the first guide part 31 When the second guide part 32 is rotated to face the communication port of the storage chamber 14, the silicon material in the storage chamber 14 can fall to the second area of the crucible along the guide surface of the second guide part 32.

在一些實施例中，參考圖1至圖3，多個儲料腔14適於分別存儲不同尺寸的矽原料，多個儲料腔14按照所存儲的矽原料的尺寸大小沿管本體1的周向依次佈置。例如，多個所述儲料腔14包括：第一儲料腔、第二儲料腔、第三儲料腔和第四儲料腔。其中，第一儲料腔適於儲放第一尺寸的矽原料；第二儲料腔適於儲放第二尺寸的矽原料，第二尺寸大於第一尺寸；第三儲料腔適於儲放第三尺寸的矽原料，第三尺寸大於第二尺寸；第四儲料腔適於儲放第四尺寸的矽原料，第四尺寸大於第三尺寸，第一儲料腔、第二儲料腔、第三儲料腔以及第四儲料腔沿管本體1的周向依次佈置。如此，本發明的加料管100可以根據實際需要投放多種尺寸的矽原料。In some embodiments, referring to FIG. 1 to FIG. 3 , a plurality of storage chambers 14 are adapted to respectively store silicon raw materials of different sizes, and a plurality of storage chambers 14 are arranged along the circumference of the tube body 1 according to the sizes of the stored silicon raw materials. Arranged in order. For example, the multiple storage chambers 14 include: a first storage chamber, a second storage chamber, a third storage chamber and a fourth storage chamber. Wherein, the first storage chamber is suitable for storing silicon raw materials of a first size; the second storage chamber is suitable for storing silicon raw materials of a second size, and the second size is larger than the first size; the third storage chamber is suitable for storing Put the silicon raw material of the third size, the third size is larger than the second size; the fourth storage chamber is suitable for storing the silicon raw material of the fourth size, the fourth size is larger than the third size, the first storage chamber, the second storage chamber The cavity, the third material storage cavity and the fourth material storage cavity are sequentially arranged along the circumference of the pipe body 1 . In this way, the feeding tube 100 of the present invention can inject silicon raw materials of various sizes according to actual needs.

在加料管100向坩堝內投放矽原料時，可以按照多個儲料腔14所存儲的矽原料的尺寸由小到大的順序來依次打開多個儲料腔14，以使較小尺寸的矽原料先落入矽熔湯200內，這樣，靠後投放的較大尺寸的矽原料在落入矽熔湯200時可以以靠前投放的矽原料作為緩衝層，以防止矽熔湯200的飛濺。例如，先將第一尺寸的多晶矽塊（矽原料）加入矽熔湯200，由此第一尺寸的多晶矽塊可以在矽熔湯200的表面形成第一緩衝層；然後再投放第二尺寸的多晶矽塊，使得第二尺寸的多晶矽塊掉落至第一緩衝層上，在第一緩衝層的緩衝作用下，可以減少第二尺寸的多晶矽塊對矽熔湯200的衝擊，同時第二尺寸的多晶矽塊又可以形成第二緩衝層；以此類推，依次再投放第三尺寸和第四尺寸的多晶矽塊，如此，在緩衝層的緩衝下，可以避免出現矽熔湯200飛濺的問題，而且還可以避免較大尺寸的多晶矽塊砸破石英坩堝，從而保證設備工作的可靠性。When the feeding tube 100 puts silicon raw materials into the crucible, the multiple storage chambers 14 can be sequentially opened according to the size of the silicon raw materials stored in the multiple storage chambers 14 from small to large, so that the silicon raw materials with smaller sizes The raw materials fall into the silicon melting soup 200 first, and like this, when the larger-sized silicon raw materials put in later fall into the silicon melting soup 200, the silicon raw materials put in front can be used as a buffer layer to prevent the silicon melting soup 200 from splashing . For example, the polycrystalline silicon block (silicon raw material) of the first size is added into the silicon molten soup 200 first, so that the polycrystalline silicon block of the first size can form a first buffer layer on the surface of the silicon molten soup 200; and then the polycrystalline silicon of the second size is added block, so that the polysilicon block of the second size falls on the first buffer layer, and under the buffering effect of the first buffer layer, the impact of the polysilicon block of the second size on the molten silicon soup 200 can be reduced, while the polysilicon block of the second size The block can form the second buffer layer again; and so on, put in the polysilicon blocks of the third size and the fourth size in turn, so, under the buffer of the buffer layer, the problem of splashing of silicon molten soup 200 can be avoided, and it can also Avoid breaking the quartz crucible by large-sized polycrystalline silicon blocks, so as to ensure the reliability of the equipment.

進一步地，參考圖2至圖3，多個儲料腔14中，存儲較大尺寸矽原料的儲料腔14的容積大於存儲較小尺寸矽原料的儲料腔14的容積，例如，第一儲料腔、第二儲料腔、第三儲料腔和第四儲料腔的尺寸可以依次增大，例如，加料管100可以構造為第四儲料腔的圓心角為180°，其餘三個儲料腔14的圓心角為分別為40°、60°、80°，當然，多個儲料腔14的圓心角可以根據實際需要合理選擇，由此可以盛放更多的大尺寸多晶矽料。當然，具體地每個腔室的角度範圍還可以擴展，只要保證第四儲料腔的體積最大即可。Further, with reference to FIGS. 2 to 3 , among the plurality of storage chambers 14, the volume of the storage chamber 14 storing larger-sized silicon raw materials is greater than the volume of the storage chamber 14 storing smaller-sized silicon raw materials, for example, the first The size of the material storage cavity, the second material storage cavity, the third material storage cavity and the fourth material storage cavity can be increased successively, for example, the feeding pipe 100 can be configured such that the central angle of the fourth material storage cavity is 180 °, and the other three The central angles of each material storage chamber 14 are 40°, 60°, and 80° respectively. Of course, the central angles of multiple material storage chambers 14 can be reasonably selected according to actual needs, so that more large-size polysilicon materials can be stored. . Certainly, specifically, the angle range of each chamber can be expanded, as long as the volume of the fourth storage chamber is ensured to be the largest.

或者，在另外的一些實施例中，加料管100也可以構造為第一儲料腔和第二儲料腔的容積相同，第三儲料腔和第四儲料腔的容積相同，並且，第一儲料腔和第二儲料腔的容積小於第三儲料腔和第四儲料腔的容積。還或者，加料管100也可以構造為第二儲料腔和第三儲料腔的容積相同，第一儲料腔的容積小於第二儲料腔的容積，第三儲料腔的容積小於第四儲料腔的容積。多個儲料腔14的容積大小可以根據實際需要合理選擇。Or, in some other embodiments, the feeding pipe 100 can also be configured such that the volumes of the first storage chamber and the second storage chamber are the same, the volumes of the third storage chamber and the fourth storage chamber are the same, and the first The volumes of the first material storage chamber and the second material storage chamber are smaller than the volumes of the third material storage chamber and the fourth material storage chamber. Alternatively, the feeding pipe 100 can also be configured such that the volumes of the second material storage chamber and the third material storage chamber are the same, the volume of the first material storage chamber is smaller than the volume of the second material storage chamber, and the volume of the third material storage chamber is smaller than that of the third material storage chamber. The volume of the four storage chambers. The volumes of the multiple storage chambers 14 can be reasonably selected according to actual needs.

下面描述根據本發明第二方面實施例的單晶生長設備。A single crystal growth apparatus according to an embodiment of the second aspect of the present invention will be described below.

根據本發明第二方面的單晶生長設備，包括：根據本發明上述實施例的加料管100。The single crystal growth equipment according to the second aspect of the present invention includes: the feeding tube 100 according to the above-mentioned embodiment of the present invention.

根據本發明第二方面實施例的單晶生長設備，通過設置上述實施例的加料管100，更易於控制每次投放矽原料時的投放量，此外，可以防止大量的矽原料進入矽熔湯200時造成的高溫矽熔湯200的飛濺，提升了單晶生長設備運行的安全性和可靠性。According to the single crystal growth equipment of the embodiment of the second aspect of the present invention, by setting the feeding tube 100 of the above embodiment, it is easier to control the amount of silicon raw material injected each time, and in addition, it can prevent a large amount of silicon raw material from entering the silicon molten soup 200 The splash of high-temperature silicon molten soup 200 caused by this process improves the safety and reliability of the operation of single crystal growth equipment.

下面描述根據本發明的單晶生長設備的一個具體實施例的加料方法。The feeding method of a specific embodiment of the single crystal growth apparatus according to the present invention will be described below.

根據本發明實施例的的單晶生長設備的加料方法，其中，單晶生長設備可以是拉製晶棒的設備，也可以是其他類型的晶體生長爐。單晶生長設備可以包括：坩堝和加料管100。According to the method for feeding single crystal growth equipment in an embodiment of the present invention, the single crystal growth equipment may be a device for pulling crystal ingots, or may be other types of crystal growth furnaces. The single crystal growth equipment may include: a crucible and a feeding tube 100 .

其中，坩堝適於盛放矽熔湯200，在晶體生長時，坩堝中的矽原料在高溫下變成熔融態的矽熔湯200，加料管100可以用於在坩堝中的矽熔湯200減少或不足時向坩堝中添加矽原料，以即時補充晶體生長所需的原料。加料管100可以包括：管本體1和開關組件2。其中，管本體1限定出輸料通道15和多個儲料腔14，多個儲料腔14可以用於儲放矽原料。多個儲料腔14均和輸料通道15連通，多個儲料腔14適於分別存儲不同尺寸的矽原料，多個儲料腔14按照所存儲的矽原料的尺寸大小沿管本體1的周向依次佈置，輸料通道15適於將多個儲料腔14內的矽原料投放至坩堝。也就是說，每個儲料腔14中的儲放的矽原料均可以通過輸料通道15投放至坩堝內。開關組件2適於分別控制多個儲料腔14與輸料通道15的通斷，以便於根據矽熔湯200的消耗量來投放適量的原料。加料方法可以包括以下步驟：控制加料管100按照多個儲料腔14所存儲的矽原料的尺寸由小到大的順序依次投放多個儲料腔14內的矽原料。Wherein, the crucible is suitable for containing the molten silicon soup 200. When the crystal grows, the silicon raw material in the crucible becomes molten silicon molten soup 200 at high temperature, and the feeding pipe 100 can be used to reduce or reduce the silicon molten soup 200 in the crucible. Add silicon raw materials to the crucible when it is insufficient, so as to instantly supplement the raw materials needed for crystal growth. The feeding pipe 100 may include: a pipe body 1 and a switch assembly 2 . Wherein, the pipe body 1 defines a material delivery channel 15 and a plurality of storage chambers 14, and the plurality of storage chambers 14 can be used for storing silicon raw materials. A plurality of material storage chambers 14 are all communicated with the material delivery channel 15, and the plurality of material storage chambers 14 are suitable for storing silicon raw materials of different sizes respectively, and the plurality of material storage chambers 14 are arranged along the tube body 1 according to the size of the stored silicon raw materials. Arranged sequentially in the circumferential direction, the feeding channel 15 is suitable for putting the silicon raw materials in the multiple storage chambers 14 into the crucible. That is to say, the silicon raw material stored in each material storage cavity 14 can be put into the crucible through the material delivery channel 15 . The switch assembly 2 is adapted to separately control the on-off of multiple material storage chambers 14 and the material conveying channel 15 so as to inject an appropriate amount of material according to the consumption of the silicon melt 200 . The feeding method may include the following steps: controlling the feeding pipe 100 to sequentially inject the silicon raw materials in the multiple storage chambers 14 according to the size of the silicon raw materials stored in the multiple storage chambers 14 from small to large.

多個所述儲料腔14包括：第一儲料腔、第二儲料腔、第三儲料腔和第四儲料腔。其中，第一儲料腔適於儲放第一尺寸的矽原料；第二儲料腔適於儲放第二尺寸的矽原料，第二尺寸大於第一尺寸；第三儲料腔適於儲放第三尺寸的矽原料，第三尺寸大於第二尺寸；第四儲料腔適於儲放第四尺寸的矽原料，第四尺寸大於第三尺寸，第一儲料腔、第二儲料腔、第三儲料腔以及第四儲料腔沿管本體1的周向依次佈置。如此，本發明的加料管100可以根據實際需要投放多種尺寸的矽原料。The multiple storage chambers 14 include: a first storage chamber, a second storage chamber, a third storage chamber and a fourth storage chamber. Wherein, the first storage chamber is suitable for storing silicon raw materials of a first size; the second storage chamber is suitable for storing silicon raw materials of a second size, and the second size is larger than the first size; the third storage chamber is suitable for storing Put the silicon raw material of the third size, the third size is larger than the second size; the fourth storage chamber is suitable for storing the silicon raw material of the fourth size, the fourth size is larger than the third size, the first storage chamber, the second storage chamber The cavity, the third material storage cavity and the fourth material storage cavity are sequentially arranged along the circumference of the pipe body 1 . In this way, the feeding tube 100 of the present invention can inject silicon raw materials of various sizes according to actual needs.

在加料管100向坩堝內投放矽原料時，可以按照多個儲料腔14所存儲的矽原料的尺寸由小到大的順序來依次打開多個儲料腔14，以使較小尺寸的矽原料先落入矽熔湯200內，這樣，靠後投放的較大尺寸的矽原料在落入矽熔湯200時可以以靠前投放的矽原料作為緩衝層，以防止矽熔湯200的飛濺。例如，先將第一尺寸的多晶矽塊（矽原料）加入矽熔湯200，由此第一尺寸的多晶矽塊可以在矽熔湯200的表面形成第一緩衝層；然後再投放第二尺寸的多晶矽塊，使得第二尺寸的多晶矽塊掉落至第一緩衝層上，在第一緩衝層的緩衝作用下，可以減少第二尺寸的多晶矽塊對矽熔湯200的衝擊，同時第二尺寸的多晶矽塊又可以形成第二緩衝層；以此類推，依次再投放第三尺寸和第四尺寸的多晶矽塊，如此，在緩衝層的緩衝下，可以避免出現矽熔湯200飛濺的問題，而且還可以避免較大尺寸的多晶矽塊砸破石英坩堝，從而保證設備工作的可靠性。When the feeding tube 100 puts silicon raw materials into the crucible, the multiple storage chambers 14 can be sequentially opened according to the size of the silicon raw materials stored in the multiple storage chambers 14 from small to large, so that the silicon raw materials with smaller sizes The raw materials fall into the silicon melting soup 200 first, and like this, when the larger-sized silicon raw materials put in later fall into the silicon melting soup 200, the silicon raw materials put in front can be used as a buffer layer to prevent the silicon melting soup 200 from splashing . For example, the polycrystalline silicon block (silicon raw material) of the first size is added into the silicon molten soup 200 first, so that the polycrystalline silicon block of the first size can form a first buffer layer on the surface of the silicon molten soup 200; and then the polycrystalline silicon of the second size is added block, so that the polysilicon block of the second size falls on the first buffer layer, and under the buffering effect of the first buffer layer, the impact of the polysilicon block of the second size on the molten silicon soup 200 can be reduced, while the polysilicon block of the second size The block can form the second buffer layer again; and so on, put in the polysilicon blocks of the third size and the fourth size in turn, so, under the buffer of the buffer layer, the problem of splashing of silicon molten soup 200 can be avoided, and it can also Avoid breaking the quartz crucible by large-sized polycrystalline silicon blocks, so as to ensure the reliability of the equipment.

根據發明實施例的單晶生長設備的加料方法，可以避免加料時出現矽熔湯200飛濺的問題，而且還可以避免較大尺寸的多晶矽塊砸破石英坩堝，從而保證設備工作的可靠性。According to the feeding method of the single crystal growth equipment of the embodiment of the invention, the problem of silicon molten soup 200 splashing during feeding can be avoided, and the quartz crucible can be prevented from being smashed by larger-sized polycrystalline silicon blocks, thereby ensuring the reliability of equipment operation.

下面參考圖式描述根據本發明第三方面實施例的單晶生長設備的加料方法。The feeding method of the single crystal growth equipment according to the embodiment of the third aspect of the present invention will be described below with reference to the drawings.

根據本發明第三方面實施例的單晶生長設備的加料方法，其中，單晶生長設備可以是拉製晶棒的設備，也可以是其他類型的晶體生長爐。單晶生長設備可以包括：坩堝和加料管100。According to the feeding method of single crystal growth equipment in the embodiment of the third aspect of the present invention, the single crystal growth equipment may be a device for pulling crystal ingots, or may be other types of crystal growth furnaces. The single crystal growth equipment may include: a crucible and a feeding tube 100 .

其中，坩堝適於盛放矽熔湯200，在晶體生長時，坩堝中的矽原料在高溫下變成熔融態的矽熔湯200，加料管100可以用於在坩堝中的矽熔湯200減少或不足時向坩堝中添加矽原料，以即時補充晶體生長所需的原料。加料管100可以包括：管本體1和開關組件2。其中，管本體1限定出輸料通道15和多個儲料腔14，多個儲料腔14可以用於儲放矽原料。多個儲料腔14均和輸料通道15連通，多個儲料腔14適於分別存儲不同尺寸的矽原料，多個儲料腔14按照所存儲的矽原料的尺寸大小沿管本體1的周向依次佈置，輸料通道15適於將多個儲料腔14內的矽原料投放至坩堝。也就是說，每個儲料腔14中的儲放的矽原料均可以通過輸料通道15投放至坩堝內。開關組件2適於分別控制多個儲料腔14與輸料通道15的通斷，以便於根據矽熔湯200的消耗量來投放適量的原料。加料方法可以包括以下步驟：控制加料管100按照多個儲料腔14所存儲的矽原料的尺寸由小到大的順序依次投放多個儲料腔14內的矽原料。Wherein, the crucible is suitable for containing the molten silicon soup 200. When the crystal grows, the silicon raw material in the crucible becomes molten silicon molten soup 200 at high temperature, and the feeding pipe 100 can be used to reduce or reduce the silicon molten soup 200 in the crucible. Add silicon raw materials to the crucible when it is insufficient, so as to instantly supplement the raw materials needed for crystal growth. The feeding pipe 100 may include: a pipe body 1 and a switch assembly 2 . Wherein, the pipe body 1 defines a material delivery channel 15 and a plurality of storage chambers 14, and the plurality of storage chambers 14 can be used for storing silicon raw materials. A plurality of material storage chambers 14 are all communicated with the material delivery channel 15, and the plurality of material storage chambers 14 are suitable for storing silicon raw materials of different sizes respectively, and the plurality of material storage chambers 14 are arranged along the tube body 1 according to the size of the stored silicon raw materials. Arranged sequentially in the circumferential direction, the feeding channel 15 is suitable for putting the silicon raw materials in the multiple storage chambers 14 into the crucible. That is to say, the silicon raw material stored in each material storage cavity 14 can be put into the crucible through the material delivery channel 15 . The switch assembly 2 is adapted to separately control the on-off of multiple material storage chambers 14 and the material conveying channel 15 so as to inject an appropriate amount of material according to the consumption of the silicon melt 200 . The feeding method may include the following steps: controlling the feeding pipe 100 to sequentially inject the silicon raw materials in the multiple storage chambers 14 according to the size of the silicon raw materials stored in the multiple storage chambers 14 from small to large.

例如，多個所述儲料腔14包括：第一儲料腔、第二儲料腔、第三儲料腔和第四儲料腔。其中，第一儲料腔適於儲放第一尺寸的矽原料；第二儲料腔適於儲放第二尺寸的矽原料，第二尺寸大於第一尺寸；第三儲料腔適於儲放第三尺寸的矽原料，第三尺寸大於第二尺寸；第四儲料腔適於儲放第四尺寸的矽原料，第四尺寸大於第三尺寸，第一儲料腔、第二儲料腔、第三儲料腔以及第四儲料腔沿管本體1的周向依次佈置。如此，本發明的加料管100可以根據實際需要投放多種尺寸的矽原料。For example, the multiple storage chambers 14 include: a first storage chamber, a second storage chamber, a third storage chamber and a fourth storage chamber. Wherein, the first storage chamber is suitable for storing silicon raw materials of a first size; the second storage chamber is suitable for storing silicon raw materials of a second size, and the second size is larger than the first size; the third storage chamber is suitable for storing Put the silicon raw material of the third size, the third size is larger than the second size; the fourth storage chamber is suitable for storing the silicon raw material of the fourth size, the fourth size is larger than the third size, the first storage chamber, the second storage chamber The cavity, the third material storage cavity and the fourth material storage cavity are sequentially arranged along the circumference of the pipe body 1 . In this way, the feeding tube 100 of the present invention can inject silicon raw materials of various sizes according to actual needs.

在加料管100向坩堝內投放矽原料時，可以按照多個儲料腔14所存儲的矽原料的尺寸由小到大的順序來依次打開多個儲料腔14，以使較小尺寸的矽原料先落入矽熔湯200內，這樣，靠後投放的較大尺寸的矽原料在落入矽熔湯200時可以以靠前投放的矽原料作為緩衝層，以防止矽熔湯200的飛濺。例如，先將第一尺寸的多晶矽塊（矽原料）加入矽熔湯200，由此第一尺寸的多晶矽塊可以在矽熔湯200的表面形成第一緩衝層；然後再投放第二尺寸的多晶矽塊，使得第二尺寸的多晶矽塊掉落至第一緩衝層上，在第一緩衝層的緩衝作用下，可以減少第二尺寸的多晶矽塊對矽熔湯200的衝擊，同時第二尺寸的多晶矽塊又可以形成第二緩衝層；以此類推，依次再投放第三尺寸和第四尺寸的多晶矽塊，如此，在緩衝層的緩衝下，可以避免出現矽熔湯200飛濺的問題，而且還可以避免較大尺寸的多晶矽塊砸破石英坩堝，從而保證設備工作的可靠性。When the feeding tube 100 puts silicon raw materials into the crucible, the multiple storage chambers 14 can be sequentially opened according to the size of the silicon raw materials stored in the multiple storage chambers 14 from small to large, so that the silicon raw materials with smaller sizes The raw materials fall into the silicon melting soup 200 first, and like this, when the larger-sized silicon raw materials put in later fall into the silicon melting soup 200, the silicon raw materials put in front can be used as a buffer layer to prevent the silicon melting soup 200 from splashing . For example, the polycrystalline silicon block (silicon raw material) of the first size is added into the silicon molten soup 200 first, so that the polycrystalline silicon block of the first size can form a first buffer layer on the surface of the silicon molten soup 200; and then the polycrystalline silicon of the second size is added block, so that the polysilicon block of the second size falls on the first buffer layer, and under the buffering effect of the first buffer layer, the impact of the polysilicon block of the second size on the molten silicon soup 200 can be reduced, while the polysilicon block of the second size The block can form the second buffer layer again; and so on, put in the polysilicon blocks of the third size and the fourth size in turn, so, under the buffer of the buffer layer, the problem of splashing of silicon molten soup 200 can be avoided, and it can also Avoid breaking the quartz crucible by large-sized polycrystalline silicon blocks, so as to ensure the reliability of the equipment.

根據發明實施例的單晶生長設備的加料方法，通過為加料管100設置多個儲料腔14，可以在需要向坩堝內投料時來選擇投放一個或多個儲料腔14內的矽原料，並且，在加料管100向坩堝內投放矽原料時，按照多個儲料腔14所存儲的矽原料的尺寸由小到大的順序來依次打開多個儲料腔14，使得在先投放的小尺寸的矽原料作為在後投放的大尺寸矽原料的緩衝層，從而避免出現矽熔湯200飛濺的問題，而且還可以避免較大尺寸的多晶矽塊砸破坩堝，從而保證設備工作的可靠性。與相關技術中加料管僅設有一個儲料腔，在打開儲料腔時將全部的矽原料均投入矽熔湯200相比，既便於控制每次投放矽原料時的投放量，更可以防止大量的矽原料進入矽熔湯200時造成的高溫矽熔湯200的飛濺，提升了單晶生長設備運行的安全性和可靠性，而且多個儲料腔14中的矽原料均通過輸料通道15來投放，更容易控制和調整落料區域。According to the feeding method of the single crystal growth equipment of the embodiment of the invention, by providing a plurality of storage chambers 14 for the feeding pipe 100, the silicon raw material in one or more storage chambers 14 can be selected to be fed into the crucible, And, when feeding pipe 100 puts silicon raw material into the crucible, the multiple storage cavities 14 are sequentially opened according to the size of the silicon raw materials stored in the multiple storage cavities 14 from small to large, so that the small ones put in earlier The large-sized silicon raw material is used as a buffer layer for the large-sized silicon raw material that will be put in later, so as to avoid the problem of silicon molten soup 200 splashing, and it can also prevent the larger-sized polycrystalline silicon block from breaking the crucible, thereby ensuring the reliability of the equipment. Compared with the feeding pipe in the related art, which only has one material storage chamber, and all the silicon raw materials are put into the silicon melt soup 200 when the material storage chamber is opened, it is not only convenient to control the amount of silicon raw materials put in each time, but also can prevent When a large amount of silicon raw material enters the silicon molten soup 200, the high-temperature silicon molten soup 200 is splashed, which improves the safety and reliability of the operation of single crystal growth equipment, and the silicon raw materials in multiple storage chambers 14 pass through the feeding channel 15 to drop, easier to control and adjust the drop area.

在一些實施例中，參考圖8至圖10，加料管100還可以包括：導向蓋3。具體而言，導向蓋3適於封堵輸料通道15的鄰近坩堝的一端，導向蓋3可以在第一位置和第二位置之間移動，當導向蓋3位於第一位置時，導向蓋3可以封堵輸料通道15的下端，此時輸料通道15被關閉，當導向蓋3處於第二位置時，輸料通道15被打開，此時儲料腔14內的矽原料可以通過輸料通道15輸送至坩堝。此外，當投料時，在導向蓋3體的導向下，多晶矽料可以投放在坩堝的相對靠外的位置處，從而減少中心位置矽熔湯200的波動。較佳地，加料管100還可以包括提拉機構4，提拉機構4與導向蓋3體的上端連接，利用提拉機構4的上下牽拉，使得導向蓋3體打開或封閉輸料通道15的底端。In some embodiments, referring to FIG. 8 to FIG. 10 , the feeding pipe 100 may further include: a guide cover 3 . Specifically, the guide cover 3 is suitable for blocking one end of the adjacent crucible of the feeding channel 15, the guide cover 3 can move between the first position and the second position, when the guide cover 3 is in the first position, the guide cover 3 The lower end of the material delivery channel 15 can be blocked. At this time, the material delivery channel 15 is closed. When the guide cover 3 is in the second position, the material delivery channel 15 is opened. At this time, the silicon raw material in the material storage chamber 14 can pass through the material delivery channel. Channel 15 feeds the crucible. In addition, when feeding, under the guidance of the guide cover 3 , the polysilicon material can be placed at a relatively outer position of the crucible, thereby reducing the fluctuation of the silicon melt 200 at the center. Preferably, the feeding pipe 100 can also include a pulling mechanism 4, which is connected to the upper end of the guide cover 3, and the guide cover 3 is pulled up and down by the pulling mechanism 4 to open or close the feeding channel 15. bottom end.

進一步地，導向蓋3適於沿管本體1的軸向第一位置和第二位置之間移動，在沿管本體1的軸向且遠離管本體1的方向上，導向蓋3的至少部分沿徑向向外傾斜延伸形成導向面，導向蓋3的直徑大於輸料通道15的直徑，導向蓋3位於第一位置時，導向面封堵輸料通道15，導向蓋3在第二位置時，導向面與管本體1沿軸向間隔開，儲料腔14內的矽原料適於沿導向面輸送到坩堝內。Further, the guide cover 3 is suitable for moving between the first position and the second position along the axial direction of the pipe body 1, and at least part of the guide cover 3 is along the axial direction of the pipe body 1 and away from the pipe body 1. Radially outwardly inclined to extend to form a guide surface, the diameter of the guide cover 3 is greater than the diameter of the feed passage 15, when the guide cover 3 is in the first position, the guide surface blocks the feed passage 15, and when the guide cover 3 is in the second position, The guide surface is spaced apart from the pipe body 1 in the axial direction, and the silicon raw material in the storage chamber 14 is suitable for being transported into the crucible along the guide surface.

導向蓋3形成為在從下至上的方向上橫截面積逐漸減小的圓錐形，導向蓋3的上表面形成為導向面，導向蓋3在參考面內的投影的直徑大於輸料通道15在參考面內的投影的直徑，在投放矽原料時，從輸料通道15落下的矽原料首先落在導向蓋3上，然後沿著導向面滑落到坩堝內，如此，一方面導向蓋3可以起到對矽原料的緩衝作用，另一方面，由於矽原料是從導向蓋3的邊緣落入坩堝內，因此矽原料在坩堝內的落料區域由導向蓋3的大小決定，因此可以通過調整導向蓋3的大小來調整矽原料的落料區域。Guide cover 3 is formed into the conical shape that the cross-sectional area gradually reduces in the direction from bottom to top, and the upper surface of guide cover 3 is formed as guide surface, and the diameter of the projection of guide cover 3 in the reference plane is greater than material conveying channel 15 in Referring to the diameter of the projection in the plane, when putting in the silicon raw material, the silicon raw material falling from the feeding channel 15 first falls on the guide cover 3, and then slides down into the crucible along the guide surface. In this way, on the one hand, the guide cover 3 can be lifted On the other hand, since the silicon material falls into the crucible from the edge of the guide cover 3, the blanking area of the silicon material in the crucible is determined by the size of the guide cover 3, so it can be adjusted by adjusting the guide cover. The size of the cover 3 is used to adjust the blanking area of the silicon raw material.

在一些實施例中，導向蓋3可以包括：第一導向部31和第二導向部32。其中，第一導向部31在參考面內的投影形成為半圓形，第一導向部31適於將矽原料投放至坩堝的第一區域。第二導向部32在參考面內的投影形成為半圓形，第二導向部32在參考面內的投影的半徑小於第一導向部31在參考面內的投影的半徑，第二導向部32與第一導向部31沿徑向相對且相連，第二導向部32適於將矽原料投放至坩堝的第二區域，第二區域在參考面內的投影位於第一區域在參考面內的投影的內側，參考面垂直於輸料管道的中心軸線。導向蓋3還適於繞輸料通道15的軸線轉動，以使第一導向部31或第二導向部32運動至需要投放矽料的儲料腔14的下側，如此，通過設置導向蓋3，並將導向蓋3設置為適於繞輸料通道15的軸線轉動，可以方便地調整原料在坩堝內的落料區域。In some embodiments, the guide cover 3 may include: a first guide portion 31 and a second guide portion 32 . Wherein, the projection of the first guide part 31 in the reference plane is formed as a semicircle, and the first guide part 31 is suitable for putting the silicon raw material into the first area of the crucible. The projection of the second guide portion 32 in the reference plane is formed as a semicircle, the radius of the projection of the second guide portion 32 in the reference plane is smaller than the radius of the projection of the first guide portion 31 in the reference plane, and the second guide portion 32 Opposite and connected to the first guide part 31 in the radial direction, the second guide part 32 is suitable for putting the silicon raw material into the second area of the crucible, and the projection of the second area on the reference plane is located at the projection of the first area on the reference plane The inner side of the reference plane is perpendicular to the central axis of the conveying pipeline. The guide cover 3 is also suitable for rotating around the axis of the feeding channel 15, so that the first guide part 31 or the second guide part 32 moves to the lower side of the storage chamber 14 where the silicon material needs to be put in, so that by setting the guide cover 3 , and the guide cover 3 is set to be suitable for rotating around the axis of the material delivery channel 15, so that the blanking area of the raw material in the crucible can be adjusted conveniently.

加料方法還包括以下步驟：當確定矽原料需要投放在第一區域時，可以控制導向蓋3旋轉至第一導向部31與儲料腔14的連通口相對，然後控制導向蓋3沿軸向移動至第二位置以打開輸料通道15，控制開關門21打開連通口，控制加料管100與第一導向部31同步轉動，此時儲料腔14內的原料可以始終沿著第一導向部31的導向面落到坩堝的第一區域。The feeding method also includes the following steps: when it is determined that the silicon raw material needs to be placed in the first area, the guide cover 3 can be controlled to rotate until the first guide part 31 is opposite to the communication port of the material storage chamber 14, and then the guide cover 3 can be controlled to move in the axial direction To the second position to open the feeding channel 15, control the switch door 21 to open the communication port, control the feed pipe 100 to rotate synchronously with the first guide part 31, and at this time, the raw materials in the material storage chamber 14 can always follow the first guide part 31 The guide surface falls onto the first area of the crucible.

當確定矽原料需要投放在第二區域時，可以控制導向蓋3旋轉至第二導向部32與儲料腔14的連通口相對，然後控制導向蓋3沿軸向移動至第二位置以打開輸料通道15，控制開關門21打開連通口，並控制加料管100與第二導向部32同步轉動，此時儲料腔14內的原料可以始終沿著第一導向部31的導向面落到坩堝的第二區域。When it is determined that the silicon raw material needs to be placed in the second area, the guide cover 3 can be controlled to rotate until the second guide part 32 is opposite to the communication port of the material storage chamber 14, and then the guide cover 3 is controlled to move axially to the second position to open the delivery. Material channel 15, control the switch door 21 to open the communication port, and control the feeding pipe 100 to rotate synchronously with the second guide part 32, at this time, the raw material in the material storage chamber 14 can always fall into the crucible along the guide surface of the first guide part 31 of the second area.

當確定坩堝的第一區域和第二區域均需要投放矽原料時，可以控制導向蓋3沿軸向移動至第二位置以打開輸料通道15，控制開關組件2打開連通口，控制加料管100與導向蓋3差速轉動，這樣，當第一導向部31轉動至和儲料腔14的連通口相對時，儲料腔14內的矽原料可以沿第一導向部31的導向面落至坩堝的第一區域；當第二導向部32轉動至和儲料腔14的連通口相對時，儲料腔14內的矽原料可以沿第二導向部32的導向面落至坩堝的第二區域。由此，根據本實施例的加料方法，可以方便地向坩堝的第一區域和第二區域投放矽原料。When it is determined that both the first area and the second area of the crucible need to put in silicon raw materials, the guide cover 3 can be controlled to move to the second position in the axial direction to open the feeding channel 15, the control switch assembly 2 is opened to open the communication port, and the feeding pipe 100 is controlled. Rotate at a differential speed with the guide cover 3, so that when the first guide part 31 rotates to face the communication port of the storage chamber 14, the silicon raw material in the storage chamber 14 can fall to the crucible along the guide surface of the first guide part 31 When the second guide part 32 is rotated to face the communication port of the storage chamber 14, the silicon material in the storage chamber 14 can fall to the second area of the crucible along the guide surface of the second guide part 32. Therefore, according to the feeding method of this embodiment, the silicon raw material can be conveniently fed into the first area and the second area of the crucible.

在本發明的描述中，需要理解的是，術語「中心」、「縱向」、「橫向」、「長度」、「寬度」、「厚度」、「上」、「下」、「前」、「後」、「左」、「右」、「豎直」、「水平」、「頂」、「底」、「內」、「外」、「順時針」、「逆時針」、「軸向」、「徑向」、「周向」等指示的方位或位置關係為基於圖式所示的方位或位置關係，僅是為了便於描述本發明和簡化描述，而不是指示或暗示所指的裝置或元件必須具有特定的方位、以特定的方位構造和操作，因此不能理解為對本發明的限制。In describing the present invention, it is to be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", " Back, Left, Right, Vertical, Horizontal, Top, Bottom, Inner, Outer, Clockwise, Counterclockwise, Axial , "radial", "circumferential" and other indicated orientations or positional relationships are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying the referred device or Elements must have certain orientations, be constructed and operate in certain orientations, and therefore should not be construed as limitations on the invention.

此外，術語「第一」、「第二」僅用於描述目的，而不能理解為指示或暗示相對重要性或者隱含指明所指示的技術特徵的數量。由此，限定有「第一」、「第二」的特徵可以明示或者隱含地包括一個或者更多個該特徵。在本發明的描述中，「多個」的含義是兩個或兩個以上，除非另有明確具體的限定。In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance or implicitly specifying the quantity of indicated technical features. Thus, a feature defined as "first" and "second" may explicitly or implicitly include one or more of these features. In the description of the present invention, "plurality" means two or more, unless otherwise specifically defined.

在本發明中，除非另有明確的規定和限定，術語「安裝」、「相連」、「連接」、「固定」等術語應做廣義理解，例如，可以是固定連接，也可以是可拆卸連接，或成一體；可以是機械連接，也可以是電連接，還可以是通信；可以是直接相連，也可以通過中間媒介間接相連，可以是兩個元件內部的連通或兩個元件的相互作用關係。對於所屬領域具通常知識者而言，可以根據具體情況理解上述術語在本發明中的具體含義。In the present invention, terms such as "installation", "connection", "connection" and "fixation" should be interpreted in a broad sense, for example, it can be a fixed connection or a detachable connection, unless otherwise clearly specified and limited. , or integrated; it can be a mechanical connection, an electrical connection, or a communication; it can be a direct connection or an indirect connection through an intermediary, it can be the internal communication of two components or the interaction relationship between two components . Those with ordinary knowledge in the art can understand the specific meanings of the above terms in the present invention according to specific situations.

在本說明書的描述中，參考術語「一個實施例」、「一些實施例」、「示例」、「具體示例」或「一些示例」等的描述意指結合該實施例或示例描述的具體特徵、結構、材料或者特點包含於本發明的至少一個實施例或示例中。在本說明書中，對上述術語的示意性表述不必須針對的是相同的實施例或示例。而且，描述的具體特徵、結構、材料或者特點可以在任一個或多個實施例或示例中以合適的方式結合。此外，在不相互矛盾的情況下，所屬領域具通常知識者可以將本說明書中描述的不同實施例或示例以及不同實施例或示例的特徵進行結合和組合。In the description of this specification, descriptions referring to the terms "one embodiment", "some embodiments", "example", "specific examples" or "some examples" mean specific features described in connection with the embodiment or example, A structure, material or characteristic is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the above terms are not necessarily directed to the same embodiment or example. Furthermore, the described specific features, structures, materials or characteristics may be combined in any suitable manner in any one or more embodiments or examples. In addition, those skilled in the art can combine and combine different embodiments or examples and features of different embodiments or examples described in this specification without conflicting with each other.

儘管已經示出和描述了本發明的實施例，本發明所屬技術領域中具有通常知識者可以理解：在不脫離本發明的原理和宗旨的情況下可以對這些實施例進行多種變化、修改、替換和變型，本發明的範圍由權利要求及其等同物限定。Although the embodiments of the present invention have been shown and described, those skilled in the art of the present invention can understand that various changes, modifications and substitutions can be made to these embodiments without departing from the principle and spirit of the present invention. and modifications, the scope of the invention is defined by the claims and their equivalents.

1:管本體 2:開關組件 3:導向蓋 4:提拉機構 5:驅動件 11:外管 12:內管 13:隔板 14:儲料腔 15:輸料通道 21:開關門 31:第一導向部 32:第二導向部 100:加料管 200:矽熔湯 1: Tube body 2: switch assembly 3: guide cover 4: Lifting mechanism 5: Driver 11: Outer tube 12: inner tube 13: Partition 14: storage cavity 15: Conveying channel 21: Open and close the door 31: The first guiding part 32: Second guide part 100: Feeding pipe 200: Silicon Molten Soup

圖1是根據本發明實施例的加料管的一個實施例的示意圖； 圖2是根據本發明實施例的加料管的另一個實施例的示意圖； 圖3是根據本發明實施例的加料管的又一個實施例的示意圖； 圖4是根據本發明實施例的加料管的另一個角度的示意圖； 圖5是圖4中所示的加料管的儲料腔打開的示意圖； 圖6是根據本發明實施例的加料管的另一個實施例的示意圖； 圖7是圖6中所示的加料管的儲料腔打開的示意圖； 圖8是根據本發明實施例的加料管的又一個實施例的示意圖； 圖9是圖8中所示的加料管的儲料腔打開的示意圖； 圖10是圖8中所示的加料管的導向蓋的示意圖。 1 is a schematic diagram of an embodiment of a feeding pipe according to an embodiment of the present invention; Fig. 2 is the schematic diagram of another embodiment of the feeding pipe according to the embodiment of the present invention; Fig. 3 is the schematic diagram of another embodiment of the feeding pipe according to the embodiment of the present invention; Fig. 4 is a schematic diagram of another angle of the feeding pipe according to an embodiment of the present invention; Fig. 5 is a schematic diagram of the opening of the material storage chamber of the feeding tube shown in Fig. 4; 6 is a schematic diagram of another embodiment of a feeding tube according to an embodiment of the present invention; Fig. 7 is a schematic diagram of the opening of the material storage chamber of the feeding tube shown in Fig. 6; 8 is a schematic diagram of another embodiment of a feeding tube according to an embodiment of the present invention; Fig. 9 is a schematic diagram of the opening of the storage chamber of the feeding pipe shown in Fig. 8; FIG. 10 is a schematic view of the guide cover of the feeding tube shown in FIG. 8 .

1:管本體 1: Tube body

3:導向蓋 3: guide cover

4:提拉機構 4: Lifting mechanism

5:驅動件 5: Driver

14:儲料腔 14: storage cavity

15:輸料通道 15: Conveying channel

200:矽熔湯 200: Silicon Molten Soup

Claims (14)

一種加料管，用於單晶生長設備，所述單晶生長設備包括：坩堝和所述加料管，所述坩堝適於盛放矽熔湯，所述加料管包括： 管本體，所述管本體限定出輸料通道和多個用於儲放矽原料的儲料腔，多個所述儲料腔均和所述輸料通道連通，所述輸料通道適於將多個所述儲料腔內的矽原料投放至所述坩堝； 開關組件，所述開關組件適於分別控制多個所述儲料腔與所述輸料通道的通斷。 A feeding tube for single crystal growth equipment, the single crystal growth equipment includes: a crucible and the feeding tube, the crucible is suitable for containing molten silicon soup, the feeding tube includes: A pipe body, the pipe body defines a material delivery channel and a plurality of material storage chambers for storing silicon raw materials, and the plurality of material storage chambers are all communicated with the material delivery channel, and the material delivery channel is suitable for The silicon raw materials in the plurality of storage chambers are put into the crucible; A switch assembly, the switch assembly is suitable for separately controlling the on-off of the plurality of the material storage chambers and the material conveying channel. 如請求項1所述之加料管，其中所述管本體包括： 外管； 內管，所述內管位於所述外管的內側，所述內管限定出所述輸料通道； 多個隔板，多個所述隔板間隔設於所述外管與所述內管之間，多個所述隔板與所述外管以及所述內管共同限定出多個所述儲料腔，所述內管上形成有與多個所述儲料腔一一對應的多個連通口，所述連通口連通所述儲料腔和所述輸料通道，所述開關組件適於打開或關閉多個所述連通口。 The feeding tube according to claim 1, wherein the tube body includes: outer tube; an inner tube, the inner tube is located inside the outer tube, and the inner tube defines the material delivery channel; A plurality of baffles, a plurality of baffles are arranged at intervals between the outer tube and the inner tube, the plurality of baffles together with the outer tube and the inner tube define a plurality of storage tanks Material chamber, the inner tube is formed with a plurality of communication ports corresponding to the plurality of material storage chambers, the communication ports communicate with the material storage chamber and the material delivery channel, and the switch assembly is suitable for Opening or closing a plurality of said communicating ports. 如請求項2所述之加料管，其中多個所述隔板沿所述內管的周向間隔佈置，多個所述隔板與所述外管以及所述內管共同限定出沿所述內管的軸向延伸且沿所述內管的周向間隔佈置的多個所述儲料腔，所述連通口位於所述儲料腔的鄰近底端的位置。The feeding tube according to claim 2, wherein a plurality of partitions are arranged at intervals along the circumference of the inner tube, and a plurality of partitions together with the outer tube and the inner tube define a A plurality of the storage chambers extend axially of the inner pipe and are arranged at intervals along the circumference of the inner pipe, and the communication port is located near the bottom end of the storage chambers. 如請求項3所述之加料管，其中所述儲料腔的底壁沿所述內管的徑向向內且沿軸向向下的方向傾斜延伸。The feeding tube according to claim 3, wherein the bottom wall of the storage chamber extends obliquely inward along the radial direction of the inner tube and axially downward. 如請求項2所述之加料管，其中所述開關組件包括： 多個開關門，多個所述開關門與多個所述連通口一一對應且適配，所述開關門沿所述內管的軸向且遠離所述坩堝的一端與所述內管樞轉連接。 The feeding tube according to claim 2, wherein the switch assembly includes: A plurality of switch doors, the plurality of switch doors are one-to-one corresponding and adapted to the plurality of communication ports, and the switch doors are pivoted to the inner tube along the axial direction of the inner tube and away from the end of the crucible to connect. 如請求項1所述之加料管，還包括： 驅動件，所述驅動件與所述管本體相連，所述驅動件適於驅動所述管本體繞所述管本體的中心軸線轉動以帶動多個所述儲料腔轉動。 The feeding pipe as described in claim 1, further comprising: A driving part, the driving part is connected with the pipe body, and the driving part is suitable for driving the pipe body to rotate around the central axis of the pipe body to drive a plurality of the storage chambers to rotate. 如請求項1所述之加料管，還包括：導向蓋，所述導向蓋適於封堵所述輸料通道的鄰近所述坩堝的一端，所述導向蓋適於在第一位置和第二位置之間移動，所述導向蓋在所述第一位置時，所述輸料通道被關閉，所述導向蓋在所述第二位置時，所述輸料通道被打開，所述儲料腔內的矽原料適於通過所述輸料通道輸送至所述坩堝。The feeding tube according to claim 1, further comprising: a guide cover, the guide cover is suitable for blocking one end of the feeding channel adjacent to the crucible, and the guide cover is suitable for the first position and the second When the guide cover is in the first position, the material delivery channel is closed; when the guide cover is in the second position, the material delivery channel is opened, and the material storage chamber The silicon raw material inside is suitable for being transported to the crucible through the transport channel. 如請求項7所述之加料管，其中所述導向蓋適於沿所述管本體的軸向所述第一位置和所述第二位置之間移動，在沿所述管本體的軸向且遠離所述管本體的方向上，所述導向蓋的至少部分沿徑向向外傾斜延伸形成導向面， 所述導向蓋的直徑大於所述輸料通道的直徑，所述導向蓋位於所述第一位置時，所述導向面封堵所述輸料通道，所述導向蓋在所述第二位置時，所述導向面與所述管本體沿軸向間隔開，所述儲料腔內的矽原料適於沿所述導向面輸送到所述坩堝內。 The feeding tube according to claim 7, wherein the guide cover is adapted to move between the first position and the second position along the axial direction of the tube body, and in the axial direction of the tube body and In a direction away from the pipe body, at least part of the guide cover extends radially outwards to form a guide surface, The diameter of the guide cover is larger than the diameter of the material delivery channel. When the guide cover is at the first position, the guide surface blocks the material delivery channel. When the guide cover is at the second position , the guide surface is axially spaced apart from the tube body, and the silicon raw material in the storage chamber is suitable for being transported into the crucible along the guide surface. 如請求項8所述之加料管，其中所述導向蓋包括： 第一導向部，所述第一導向部在參考面內的投影形成為半圓形，所述第一導向部適於將矽原料投放至所述坩堝的第一區域； 第二導向部，所述第二導向部在參考面內的投影形成為半圓形，所述第二導向部在參考面內的投影的半徑小於所述第一導向部在參考面內的投影的半徑，所述第二導向部與所述第一導向部沿徑向相對且相連，所述第二導向部適於將矽原料投放至所述坩堝的第二區域，所述第二區域在參考面內的投影位於所述第一區域在參考面內的投影的內側，所述參考面垂直於所述輸料管道的中心軸線， 所述導向蓋還適於繞所述輸料通道的軸線轉動，以使所述第一導向部或所述第二導向部運動至需要投放矽料的所述儲料腔的下側。 The feeding tube according to claim 8, wherein the guide cover includes: a first guide part, the projection of the first guide part in the reference plane is formed as a semicircle, and the first guide part is suitable for putting silicon raw materials into the first area of the crucible; The second guide part, the projection of the second guide part in the reference plane is formed as a semicircle, and the radius of the projection of the second guide part in the reference plane is smaller than the projection of the first guide part in the reference plane radius, the second guide part is radially opposite to and connected to the first guide part, the second guide part is suitable for putting silicon raw materials into the second area of the crucible, and the second area is in the The projection in the reference plane is located inside the projection of the first area in the reference plane, the reference plane is perpendicular to the central axis of the feeding pipeline, The guide cover is also adapted to rotate around the axis of the material conveying channel, so that the first guide part or the second guide part moves to the lower side of the material storage chamber where the silicon material needs to be placed. 如請求項1所述之加料管，其中多個所述儲料腔適於分別存儲不同尺寸的矽原料，多個所述儲料腔按照所存儲的矽原料的尺寸大小沿所述管本體的周向依次佈置。The feeding tube according to claim 1, wherein the multiple storage chambers are suitable for storing silicon raw materials of different sizes, and the multiple storage chambers are along the tube body according to the size of the stored silicon raw materials. Circumferentially arranged in sequence. 如請求項10所述之加料管，其中多個所述儲料腔中，存儲較大尺寸矽原料的所述儲料腔的容積大於存儲較小尺寸矽原料的所述儲料腔的容積。The feeding tube according to claim 10, wherein among the plurality of storage chambers, the volume of the storage chamber storing larger-sized silicon raw materials is greater than the volume of the storage chamber storing smaller-sized silicon raw materials. 一種單晶生長設備，包括：如請求項1-11中任一項所述之加料管。A single crystal growth equipment, comprising: the feeding tube as described in any one of Claims 1-11. 一種單晶生長設備的加料方法，所述單晶生長設備包括：坩堝和加料管，所述坩堝適於盛放矽熔湯，所述加料管包括：管本體，所述管本體限定出輸料通道和多個用於儲放矽原料的儲料腔，多個所述儲料腔適於分別存儲不同尺寸的矽原料，多個所述儲料腔按照所存儲的矽原料的尺寸大小沿所述管本體的周向依次佈置，多個所述儲料腔均和所述輸料通道連通，所述輸料通道適於將多個所述儲料腔內的矽原料輸送至所述坩堝內；開關組件，所述開關組件適於分別控制多個所述儲料腔與所述輸料通道的通斷； 所述加料方法包括以下步驟： 控制所述加料管按照多個所述儲料腔所存儲的矽原料的尺寸由小到大的順序依次投放多個所述儲料腔內的矽原料。 A feeding method for single crystal growth equipment, the single crystal growth equipment includes: a crucible and a feeding tube, the crucible is suitable for containing molten silicon soup, the feeding tube includes: a tube body, the tube body defines a feeding channel and a plurality of storage cavities for storing silicon raw materials, the plurality of storage cavities are suitable for storing silicon raw materials of different sizes respectively, and the plurality of storage cavities are arranged along the The pipe body is arranged in sequence in the circumferential direction, and the multiple storage chambers are all connected to the material delivery channel, and the material delivery channel is suitable for transporting the silicon raw materials in the multiple storage cavities to the crucible ; A switch assembly, the switch assembly is suitable for separately controlling the on-off of a plurality of the storage chambers and the delivery channel; Described feeding method comprises the following steps: The feeding pipe is controlled to release the silicon raw materials in the multiple storage cavities sequentially in order of the sizes of the silicon raw materials stored in the multiple storage cavities from small to large. 如請求項13所述之單晶生長設備的加料方法，其中所述加料管還包括：導向蓋，所述導向蓋適於沿所述管本體的軸向在第一位置和第二位置之間移動，在沿所述管本體的軸向且遠離所述管本體的方向上，所述導向蓋的至少部分沿徑向向外傾斜延伸形成導向面，所述導向蓋的直徑大於所述輸料通道的直徑，所述導向蓋位於所述第一位置時，所述導向面封堵所述輸料通道，所述導向蓋在所述第二位置時，所述導向面與所述管本體沿軸向間隔開，所述儲料腔內的矽原料適於沿所述導向面輸送到所述坩堝內，所述導向蓋包括：第一導向部，所述第一導向部在參考面內的投影形成為半圓形，所述第一導向部適於將矽原料投放至所述坩堝內的第一區域；第二導向部，所述第二導向部在參考面內的投影形成為半圓形，所述第二導向部在參考面內的投影的半徑小於所述第一導向部在參考面內的投影的半徑，所述第二導向部與所述第一導向部沿徑向相對且相連，所述第二導向部適於將矽原料投放至所述坩堝內的第二區域，所述第二區域所在的參考圓小於所述第一區域所在的參考圓，所述導向蓋還適於繞所述輸料通道的軸線轉動，以使所述第一導向部或所述第二導向部位於需要投放矽料的所述儲料腔的下側， 所述加料方法還包括以下步驟： 確定矽原料投放在第一區域，控制所述導向蓋旋轉至所述第一導向部與所述儲料腔的連通口相對，控制所述導向蓋沿軸向移動以打開所述輸料通道，控制所述開關組件打開所述連通口，控制所述加料管與所述第一導向部同步轉動；或者， 確定矽原料投放在第二區域，控制所述導向蓋旋轉至所述第二導向部與所述儲料腔的連通口相對，控制所述導向蓋沿軸向移動以打開所述輸料通道，控制所述開關組件打開所述連通口，控制所述加料管與所述第二導向部同步轉動；或者， 確定矽原料投放在第一區域和第二區域，控制所述導向蓋沿軸向移動以打開所述輸料通道，控制所述開關組件打開所述連通口，控制所述加料管與導向蓋差速轉動。 The feeding method of single crystal growth equipment according to claim 13, wherein the feeding tube further includes: a guide cover, the guide cover is adapted to be between the first position and the second position along the axial direction of the tube body Moving, in the direction along the axial direction of the pipe body and away from the pipe body, at least part of the guide cover extends radially outwards to form a guide surface, and the diameter of the guide cover is larger than that of the conveying material The diameter of the channel, when the guide cover is in the first position, the guide surface blocks the material delivery channel, and when the guide cover is in the second position, the guide surface is along the pipe body Axially spaced apart, the silicon raw material in the storage chamber is suitable for being transported into the crucible along the guide surface, and the guide cover includes: a first guide part, and the first guide part is in the reference plane The projection is formed as a semicircle, and the first guide part is suitable for putting the silicon raw material into the first area in the crucible; the second guide part, the projection of the second guide part in the reference plane is formed as a semicircle shape, the radius of the projection of the second guide part in the reference plane is smaller than the radius of the projection of the first guide part in the reference plane, the second guide part is radially opposite to the first guide part and connected, the second guide part is suitable for putting silicon raw materials into the second area in the crucible, the reference circle where the second area is located is smaller than the reference circle where the first area is located, and the guide cover is also suitable for Rotating around the axis of the material conveying channel, so that the first guide part or the second guide part is located at the lower side of the material storage cavity where the silicon material needs to be placed, The charging method also includes the following steps: determining that the silicon raw material is placed in the first area, controlling the guide cover to rotate until the first guide part is opposite to the communication port of the storage chamber, and controlling the guide cover to move axially to open the material delivery channel, Controlling the switch assembly to open the communication port, controlling the feed pipe to rotate synchronously with the first guide part; or, determining that the silicon raw material is placed in the second area, controlling the guide cover to rotate until the second guide part is opposite to the communication port of the storage chamber, and controlling the guide cover to move axially to open the material delivery channel, Controlling the switch assembly to open the communication port, controlling the feed pipe to rotate synchronously with the second guide part; or, It is determined that the silicon raw material is placed in the first area and the second area, the guide cover is controlled to move in the axial direction to open the feeding channel, the switch assembly is controlled to open the communication port, and the difference between the feeding pipe and the guide cover is controlled. 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