TW202316558A - 晶圓載置台 - Google Patents
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Abstract
晶圓載置台10具備:陶瓷基材20;冷卻基材30;及多數孔(例如氣體孔44還有端子孔51)。陶瓷基材20在頂面具有可載置晶圓的晶圓載置面22a,並內設有晶圓吸著用電極26。冷卻基材30接合在陶瓷基材20的底面,具有冷媒流道32。氣體孔44還有端子孔51在上下方向貫通冷卻基材30。此等孔的周邊區域設有:熱交換促進部(例如流道變細的部分32a),促進在冷媒流道32流動的冷媒與載置在晶圓載置面22a的晶圓W之熱交換。
Description
本發明係關於晶圓載置台。
以往,已知有揭示一種晶圓載置台,其具備:陶瓷基材,具有晶圓載置面,並內設有電極;冷卻基材,具有冷媒流道;及接合層,將陶瓷基材與冷卻基材加以接合。例如,專利文獻1、2記載有在這樣的晶圓載置台使用「以線性膨脹係數與陶瓷基材相同程度之金屬基複合材料所製作之物」來作為冷卻基材。並且,專利文獻1、2又記載有在晶圓載置台設置:端子孔,由用來供電至電極的供電端子所插通;氣體孔,用來將He氣體供給至晶圓背面;及昇降銷孔,由將晶圓自晶圓載置面抬起的昇降銷所插通。
[先前技術文獻]
[專利文獻]
專利文獻1:日本專利第5666748號公報
專利文獻2:日本專利第5666749號公報
(發明所欲解決之問題)
然而,在端子孔、氣體孔、或昇降銷孔的周邊,因為散熱能力較差,所以晶圓之中這樣的孔的緊鄰上方之周邊有時會成為溫度比其它部分更高之所謂的熱點。
本發明之主要目的在於解決此種課題,抑制晶圓產生熱點。
(解決問題之方式)
本發明之晶圓載置台具備:陶瓷基材,於頂面具有可載置晶圓的晶圓載置面,並內設有電極;冷卻基材,接合在前述陶瓷基材之底面,具有冷媒流道;多數孔,在上下方向貫通前述冷卻基材;及熱交換促進部,設於前述多數孔之中至少一個孔的周邊區域,促進在前述冷媒流道流動的冷媒與載置在前述晶圓載置面的晶圓之熱交換。
在此晶圓載置台中,於多數孔之中至少一個孔的周邊區域設有:熱交換促進部,促進在冷媒流道流動的冷媒與載置在晶圓載置面的晶圓之熱交換。一般而言,晶圓之中這樣的孔的緊鄰上方之周邊容易成為熱點,但在本發明中,因為於這樣的孔的周邊區域設有熱交換促進部,所以促進孔的周邊區域之散熱。所以,能夠抑制在晶圓產生熱點。
在本發明之晶圓載置台中,亦可使前述冷媒流道在前述熱交換促進部中比在離前述孔之周邊區域較遠的區域細。冷媒在冷媒流道變細的部分流動時比在冷媒流道並未變細的部分流動時之流速快。因此,促進孔的周邊區域之散熱。例如,亦可使俯視前述冷媒流道時前述冷媒流道之寬度,在前述熱交換促進部中比在離前述孔之周邊區域較遠的區域窄。冷媒流道變細的部分之流道截面積宜為並未變細的部分之流道截面積的60~90%。
在本發明之晶圓載置台中,亦可在前述熱交換促進部中,於前述冷媒流道的內面設有鰭片。冷媒在冷媒流道之設有鰭片的部分流動時,比在並未設有鰭片的部分流動時,容易成為亂流。因此,促進孔的周邊區域之散熱。冷媒流道之設有鰭片的部分之流道截面積,宜為並未設有鰭片的部分之流道截面積的60~90%。
在本發明之晶圓載置台中,亦可使自前述晶圓至前述冷媒流道之頂棚面為止的距離,在前述熱交換促進部中比在離前述孔之周邊區域較遠的區域短。冷媒在自晶圓至冷媒流道之頂棚面為止的距離變短的部分流動時,比在自晶圓至冷媒流道之頂棚面為止的距離並未變短的部分流動時,冷媒與晶圓之間的熱阻小。因此,促進孔的周邊區域之散熱。在熱交換促進部中之自晶圓至冷媒流道之頂棚面為止的距離,宜係熱交換促進部以外區域之自晶圓至冷媒流道之頂棚面為止的距離之50~90%。
本發明之晶圓載置台,亦可於前述晶圓載置面之基準面具備:多數小凸起,以頂面支持晶圓的底面;且前述多數小凸起的頂面亦可在同一平面上,也可使前述小凸起的面積率,或前述基準面***的情況,在前述熱交換促進部中比在離前述孔之周邊區域較遠的區域大。「小凸起之面積率」係指單位面積中小凸起之頂面的總面積所佔之比例。小凸起係陶瓷材料,陶瓷材料比空隙導熱率佳。在小凸起之面積率大的部分,相較於小凸起之面積率非大的部分,因為在平面方向上陶瓷材料所占比例較高,所以促進晶圓與冷媒之熱交換,進而促進散熱。自孔之中心起半徑25mm以內所存在的小凸起之面積率,宜為其它處的兩倍以上。又,在基準面***的部分中,相較於基準面未***的部分,基準面與晶圓之空隙的厚度較薄。在基準面***的部分相較於在基準面未***的部分,因為在厚度方向上陶瓷材料所占的比例較高,所以促進晶圓與冷媒之熱交換,進而促進散熱。另,亦可使得在熱交換促進部相較於在離孔之周邊區域較遠的區域,小凸起的面積率較大,並且基準面較為***。
在本發明之晶圓載置台中,前述孔亦可係以下至少一者:供電構件插通孔,設置成在前述晶圓載置台之中自前述電極往下,由往前述電極供電的供電構件所插通;昇降銷孔,在上下方向貫通前述晶圓載置台,由昇降銷所插通;及氣體孔,在上下方向貫通前述晶圓載置面,使氣體通過而供給至前述晶圓載置面。一般而言,晶圓之中供電構件插通孔、昇降銷孔及氣體孔的緊鄰上方區域容易變成熱點。因此,應用本發明具有重大的意義。
(實施發明之較佳形態)
以下參照圖式來說明本發明之較佳實施形態。圖1係設置在腔室94的晶圓載置台10之縱剖視圖(在包含晶圓載置台10之中心軸的面切開時的剖視圖),圖2係晶圓載置台10之俯視圖,圖3係在通過冷媒流道32的水平面切開晶圓載置台10時之剖視圖,圖4係顯示冷媒流道32的重要部分之剖視放大圖。
晶圓載置台10係用在利用電漿對於晶圓W進行CVD或蝕刻等,固定在設於半導體製程用之腔室94內部的設置板96。晶圓載置台10具備:陶瓷基材20;冷卻基材30;及金屬接合層40。
陶瓷基材20於具有圓形的晶圓載置面22a之中央部22的外周,具備具有環狀的聚焦環載置面24a之外周部24。以下有時將聚焦環簡稱為「FR」。晶圓載置面22a載置有晶圓W,FR載置面24a載置有聚焦環78。陶瓷基材20係以氧化鋁、氮化鋁等所代表的陶瓷材料來形成。FR載置面24a相對於晶圓載置面22a而言低了一層。
陶瓷基材20的中央部22於靠近晶圓載置面22a之側,內設有晶圓吸著用電極26。晶圓吸著用電極26係以含有例如W、Mo、WC、MoC等之材料來形成。晶圓吸著用電極26係圓板狀或網格狀的單極型靜電吸著用電極。陶瓷基材20之中比晶圓吸著用電極26更上側的層作為介電質層而發揮功能。晶圓吸著用電極26經由供電端子54(相當於本發明之供電構件)而連接有晶圓吸著用直流電源52。供電端子54插通「設於晶圓載置台10之中晶圓吸著用電極26的底面與冷卻基材30的底面之間的端子孔51」。供電端子54設置成通過配置於端子孔51之中在上下方向貫通冷卻基材30及金屬接合層40的貫通孔之絕緣管55,自陶瓷基材20的底面到達晶圓吸著用電極26。晶圓吸著用直流電源52與晶圓吸著用電極26之間設有低通濾波器(LPF)53。
晶圓載置面22a如圖2所示,沿著外緣形成有密封環帶 22b,整面形成有多數小凸起22c。密封環帶 22b及多數小凸起22c形成於晶圓載置面22a之基準面22d。小凸起22c在本實施形態中為扁平的圓柱凸起。密封環帶 22b之頂面及多數小凸起22c之頂面位於同一平面上。密封環帶 22b及小凸起22c之高度(意即自基準面22d至此等頂面為止之距離)係數μm~數十μm。晶圓W在接觸密封環帶 22b之頂面及多數小凸起22c之頂面的狀態下載置於晶圓載置面22a。
冷卻基材30係金屬基複合材料(Metal Matrix Composite;MMC)製的圓板構件。冷卻基材30內部具備冷媒可循環的冷媒流道32。此冷媒流道32連接於未圖示的冷媒供給道及冷媒排出道,自冷媒排出道排出的冷媒經過溫度調整後再度回到冷媒供給道。就MMC而言,舉例為含有Si、SiC及Ti的材料還有在SiC多孔質體滲入有Al及/或Si的材料等。含有Si、SiC及Ti的材料稱為SiSiCTi,在SiC多孔質體滲入有Al的材料稱為AlSiC,在SiC多孔質體滲入有Si的材料稱為SiSiC。陶瓷基材20係氧化鋁基材之情形,就用於冷卻基材30的MMC而言,宜為熱膨脹係數接近氧化鋁的AlSiC還有SiSiCTi等。冷卻基材30經由供電端子64而連接於射頻電源62。冷卻基材30與射頻電源62之間配置有高通濾波器(HPF)63。冷卻基材30在底面側具有凸緣部34,用來將晶圓載置台10夾持至設置板96。
金屬接合層40將陶瓷基材20的底面與冷卻基材30的頂面加以接合。金屬接合層40亦可係例如以軟焊料或硬焊料來形成的層。金屬接合層40藉由例如TCB(Thermal compression bonding,熱壓接合)來形成。TCB係公知的方法,將金屬接合材夾入接合對象的兩個構件之間,在加熱至金屬接合材的固相線溫度以下的溫度之狀態下將兩個構件加壓接合。
陶瓷基材20的外周部24之側面、金屬接合層40的外周及冷卻基材30之側面披覆有絕緣膜42。就絕緣膜42而言,舉例如有氧化鋁或氧化釔等之噴塗膜。
晶圓載置台10具有在上下方向貫通晶圓載置台10的多數孔。就這樣的孔而言,如圖2所示,有以下者:多數氣體孔44,在晶圓載置面22a之基準面22d開口;及昇降銷孔48,由使晶圓W相對於晶圓載置面22a上下移動的昇降銷所插通。氣體孔44在俯視晶圓載置面22a時係於基準面22d的適當位置設有多個(在本實施形態中為3個)。氣體孔44自外部的氣體供給源46(參照圖1)供給有如He氣體的導熱氣體。在將晶圓W載置在晶圓載置面22a的狀態下將導熱氣體供給至氣體孔44時,由晶圓W、密封環帶 22b、小凸起22c、及基準面22d所圍繞的空間受到導熱氣體所充填。導熱氣體相較於真空,因為導熱率高,所以能夠確實地使晶圓W與陶瓷基材20之間導熱良好。昇降銷孔48在俯視晶圓載置面22a時係於沿著晶圓載置面22a的同心圓而等間隔設有多個(在本實施形態中為3個)。
設於冷卻基材30內部的冷媒流道32如圖3所示,自上方觀察「在水平面切開冷媒流道32的剖面」時,冷卻基材30之中凸緣部34以外的區域整體,自入口32p至出口32q一筆畫地形成。在本實施形態中,冷媒流道32形成為漩渦狀。冷媒流道32之中,在通過端子孔51之周邊區域(在圖2及圖3中兩點鏈線所圍繞的區域)、氣體孔44之周邊區域、及昇降銷孔48之周邊區域的部分32a,相較於此等孔之周邊區域以外的部分,形成為寬度變窄(流道變細)。亦即,冷媒流道32之中此等部分32a相較於其它部分,流道截面積變小。因此,冷媒在冷媒流道32之此等部分32a流動時,比在其它部分流動時的流速快。冷媒流道32的部分32a相當於本發明的熱交換促進部。冷媒流道32通過此等孔51、44、48的左右兩側,在本實施形態中使孔51、44、48的單側變細。
這樣的晶圓載置台10使用夾持構件70來安裝在設於腔室94內部的設置板96。夾持構件70係剖面大致倒L字形的環狀構件,具有內周平台面70a。晶圓載置台10與設置板96藉由夾持構件70而一體化。在將夾持構件70的內周平台面70a載置於晶圓載置台10的冷卻基材30之凸緣部34的狀態,自夾持構件70的頂面***螺栓72而螺合於設在設置板96的頂面的螺紋孔。螺栓72安裝在沿著夾持構件70之圓周方向而等間隔設置的多處(例如八處或十二處)。夾持構件70還有螺栓72可係以絕緣材料來製作,亦可係以導電材料(金屬等)來製作。
其次,使用圖5來說明晶圓載置台10的製造例。圖5係晶圓載置台10的製造程序圖。首先,藉由將陶瓷粉末之成型體熱壓燒結來製作成為陶瓷基材20之原胚的圓板狀陶瓷燒結體120(圖5A)。陶瓷燒結體120內設有晶圓吸著用電極26。其次,在陶瓷燒結體120的底面至晶圓吸著用電極26為止之間形成端子孔上部151a,並且於既定位置開設在上下方向貫通陶瓷燒結體120的氣體孔上部144a及昇降銷孔上部(未圖示)(圖5B)。並且,將供電端子54***端子孔上部151a而將供電端子54與晶圓吸著用電極26加以接合(圖5C)。
與此同時製作兩個MMC圓板構件131、136(圖5D)。並且,在兩邊的MMC圓板構件131、136開設在上下方向貫通的多數孔,並於上側MMC圓板構件131之底面形成最後會成為冷媒流道32的溝槽132(圖5E)。具體而言,在上側MMC圓板構件131開設端子孔中間部151b、氣體孔中間部144b、及昇降銷孔中間部(未圖示)。又,在下側MMC圓板構件136開設端子孔下部151c、氣體孔下部144c、及昇降銷孔下部(未圖示)。與溝槽132之中冷媒流道32之寬度較窄的部分32a對應的部分132a為溝槽寬度較窄。陶瓷燒結體120係氧化鋁製之情形,MMC圓板構件131、136宜係SiSiCTi製或AlSiC製。此係因為氧化鋁的熱膨脹係數與SiSiCTi還有AlSiC的熱膨脹係數大致相同。
SiSiCTi製的圓板構件可藉由例如以下方式製作。首先,將碳化矽、金屬Si、及金屬Ti混合來製作粉體混合物。其次,將獲得的粉體混合物藉由單軸加壓成型來製作圓板狀成型體,並將該成型體在惰性氣體環境下熱壓燒結,藉以獲得SiSiCTi製的圓板構件。
其次,將金屬接合材配置在上側MMC圓板構件131的底面與下側MMC圓板構件136的頂面之間,並且將金屬接合材配置在上側MMC圓板構件131之頂面。各金屬接合材在與各孔對向的位置設有貫通孔。並且,將陶瓷燒結體120的供電端子54***端子孔中間部151b及端子孔下部151c,將陶瓷燒結體120放在配置於上側MMC圓板構件131之頂面的金屬接合材之上。藉此獲得自下方起依如下順序疊層而成的疊層體:下側MMC圓板構件136、金屬接合材、上側MMC圓板構件131、金屬接合材、及陶瓷燒結體120。藉由將疊層體加熱並且加壓(TCB)而獲得接合體110(圖5F)。接合體110係於成為冷卻基材30之原胚的MMC區塊130的頂面,透過金屬接合層40來接合陶瓷燒結體120而成。MMC區塊130係將上側MMC圓板構件131與下側MMC圓板構件136透過金屬接合層135來接合而成。MMC區塊130於內部具有冷媒流道32、端子孔51、氣體孔44、及昇降銷孔(未圖示)。冷媒流道32之中通過各孔之周邊區域的部分32a寬度變窄。端子孔51係端子孔上部151a、端子孔中間部151b、及端子孔下部151c所連成的孔,氣體孔44係氣體孔上部144a、氣體孔中間部144b、及氣體孔下部144c所連成的孔。昇降銷孔雖未圖示,但係昇降銷孔上部、昇降銷孔中間部、及昇降銷孔下部所連成的孔。
TCB例如以下述方式進行。亦即,以金屬接合材之固相線溫度以下(例如在自固相線溫度減去20℃的溫度以上,固相線溫度以下)的溫度將疊層體加壓接合,其後回到室溫。藉此,金屬接合材成為金屬接合層。就此時的金屬接合材而言,可使用Al-Mg系接合材還有Al-Si-Mg系接合材。例如,使用Al-Si-Mg系接合材來進行TCB之情形,係在真空氣體環境下加熱的狀態將疊層體加壓。金屬接合材宜使用厚度100μm前後者。
接著,對陶瓷燒結體120的外周進行切削來形成平台,藉而成為具備中央部22與外周部24的陶瓷基材20。又,對MMC區塊130的外周進行切削來形成平台,藉而成為具備凸緣部34的冷卻基材30。又,自端子孔51之中陶瓷基材20的底面至冷卻基材30的底面為止,配置供電端子54所插通的絕緣管55。再者,陶瓷基材20的外周部24之側面、金屬接合層40之周圍、及冷卻基材30之側面,藉由使用陶瓷粉末進行噴塗而形成絕緣膜42(圖5G)。密封環帶 22b還有小凸起22c藉由例如噴砂加工來形成。藉此獲得晶圓載置台10。
另,圖1的冷卻基材30雖記載為一體成型品,但亦可係如圖5G所示將兩個構件以金屬接合層來接合的構造,也可係將三個以上的構件以金屬接合層來接合的構造。
其次使用圖1來說明晶圓載置台10之使用例。腔室94的設置板96如上所述地藉由夾持構件70而固定有晶圓載置台10。腔室94的頂棚面配置有:噴淋頭98,將製程氣體自多數氣體噴射孔往腔室94的內部放出。
晶圓載置台10的FR載置面24a載置有聚焦環78,晶圓載置面22a載置有圓盤狀的晶圓W。聚焦環78沿著上端部的內周具備平台,俾不與晶圓W干渉。在此狀態下將晶圓吸著用直流電源52的直流電壓施加至晶圓吸著用電極26,而將晶圓W吸著在晶圓載置面22a。並且,將腔室94的內部設定成既定的真空氣體環境(或減壓氣體環境),自噴淋頭98供給製程氣體,並且將來自射頻電源62的射頻電壓施加至冷卻基材30。然後,晶圓W與噴淋頭98之間產生出電漿。並且,利用該電漿而在晶圓W實施CVD成膜或實施蝕刻。另,隨著晶圓W受到電漿處理,聚焦環78亦會消耗,但聚焦環78因為比晶圓W更厚,所以聚焦環78的更換係於處理多片晶圓W之後才進行。
以高功率電漿來處理晶圓W之情形,必須有效率地冷卻晶圓W。在晶圓載置台10中,就陶瓷基材20與冷卻基材30之接合層而言,使用導熱率較高的金屬接合層40,並非導熱率較低的樹脂層。因此,自晶圓W抽走熱的能力(散熱能力)高。又,因為陶瓷基材20與冷卻基材30之熱膨脹差異小,所以即使金屬接合層40之應力鬆弛較低亦不會發生困難。再者,因為冷媒流道32之中通過各孔之周邊區域的部分32a變細,所以冷媒在此部分32a流動時之流速比在其它部分流動時之流速更快,促進晶圓W與冷媒之熱交換。
在以上說明的本實施形態之晶圓載置台10中,於孔(端子孔51、氣體孔44、還有昇降銷孔48)之周邊區域設有:熱交換促進部(冷媒流道32之中變細的部分32a),促進在冷媒流道32流動的冷媒與載置在晶圓載置面22a的晶圓W之熱交換。一般而言,晶圓W之中這樣的孔的緊鄰上方之周邊容易成為熱點,但在本實施形態中,因為在這樣的孔之周邊區域設有熱交換促進部,所以促進孔的周邊區域之散熱。所以能夠抑制晶圓W產生熱點。
又,一般而言晶圓W之中端子孔51、氣體孔44、還有昇降銷孔48的緊鄰上方區域容易變成熱點。因此,將熱交換促進部(冷媒流道32之中變細的部分32a)應用至此等孔之周邊區域很有意義。
另,本發明並不限定在上述任何實施形態,只要屬於本發明之技術範圍,當然能以各種態樣來實施。
在上述實施形態中,在通過端子孔51左右兩側的冷媒流道32之中設置單邊變細的部分32a,但並非特別限定於此。亦可例如圖6之剖視放大圖所示,在通過端子孔51左右兩側的冷媒流道32兩邊設置較細的部分32a。如此,更容易防止端子孔51之周邊區域成為熱點。關於通過氣體孔44、還有昇降銷孔48左右兩側的冷媒流道32,亦可採用與此相同的構造。
在上述實施形態中,在通過端子孔51之周邊區域的冷媒流道32設有冷媒流道32變細的部分32a作為熱交換促進部,但並非特別限定於此。亦可例如圖7的剖視放大圖所示,於通過端子孔51之周邊區域的冷媒流道32內面,設置鰭片32b作為熱交換促進部。冷媒在冷媒流道32之設有鰭片32b的部分流動時,比在並未設有鰭片的部分流動時,容易形成亂流。因此,促進端子孔51之周邊區域的散熱。另,鰭片32b之數量還有長度只要因應於希望的散熱量來適當設定即可。關於通過氣體孔44、昇降銷孔48之周邊區域的冷媒流道32,亦可採用與此相同的構造。
或者,亦可圖8的剖視放大圖所示,使端子孔51之周邊區域之中的自晶圓W起至冷媒流道32之頂棚面為止的距離d1,比離端子孔51之周邊區域較遠的區域之中的自晶圓W起至冷媒流道32之頂棚面為止的距離d2短。冷媒在自晶圓W至冷媒流道32之頂棚面為止的距離較短的部分(距離d1的部分)流動時,相較於在自晶圓W起至冷媒流道32之頂棚面為止的距離並未變短的部分(距離d2的部分)流動時,冷媒與晶圓W之間的熱阻變小。因此,促進端子孔51的周邊區域之散熱。另,在圖8中,在自晶圓W起至冷媒流道32之頂棚面為止的距離變短的部分中,冷媒流道32的上下方向長度比其它部分更長,但亦可係與其它部分相同長度。關於氣體孔44還有昇降銷孔48之周邊區域,亦可採用與此相同的構造。
或者,亦可如圖9的剖視放大圖及圖10的俯視圖所示,使形成在晶圓載置面22a之中端子孔51之周邊區域X的基準面22e,相較於形成在離端子孔51之周邊區域X較遠的區域的基準面22d而言為***。藉此,小凸起22c所支持的晶圓W與基準面22e之空隙厚度,比晶圓W與基準面22d之空隙的厚度薄。在晶圓載置面22a之中形成***的基準面22e的端子孔51之周邊區域X中,相較於離端子孔51之周邊區域X較遠的區域(形成基準面22d的區域),因為在厚度方向上陶瓷材料所佔的比例較高,所以促進晶圓W與冷媒之熱交換,進而促進散熱。關於氣體孔44、還有昇降銷孔48之周邊區域,亦可採用與此相同構造。
或者,亦可如圖11A~D所示,在端子孔51之周邊區域X中,相較於離端子孔51之周邊區域X較遠的區域,小凸起的面積率變大。圖11A~D係顯示晶圓載置面22a之其它例的重要部分(相當於圖2以單點鏈線圍繞的部分)之俯視圖。小凸起之面積率係指單位面積中小凸起的頂面之總面積所佔的比例。例如,在圖11A中,在端子孔51之周邊區域X中,使小凸起22c之配置密度比離端子孔51之周邊區域X較遠的區域高。在圖11B中,在端子孔51之周邊區域X中,配置有頂面的面積比小凸起22c更大的小凸起22f。在圖11C中,在端子孔51之周邊區域X中,將頂面的面積比小凸起22c更大的小凸起22g,配置成比離端子孔51之周邊區域X較遠的區域更密集。在圖11D中,在端子孔51之周邊區域X中,配置一個具有將該周邊區域X幾乎加以覆蓋的面積之小凸起22h。在任一情形中,端子孔51之周邊區域X相較於離端子孔51之周邊區域X較遠的區域,小凸起的面積率均為較大。小凸起係陶瓷材料,陶瓷材料比空隙的導熱率佳。在小凸起之面積率較大的部分中,相較於小凸起之面積率並非較大的部分,因為在平面方向上陶瓷材料所佔的比例較高,所以促進晶圓與冷媒之熱交換,進而促進散熱。關於氣體孔44、還有昇降銷孔48之周邊區域,亦可採用與此相同的構造。
在上述實施形態中,在端子孔51、氣體孔44、及昇降銷孔48全部的周邊區域設有熱交換促進部,但並非特別限定於此。例如,亦可在此等孔之中的一部分孔之周邊區域(例如尤其容易變成熱點的區域)設置熱交換促進部。
在上述實施形態中,在通過孔之周邊區域的部分32a使冷媒流道32之寬度變窄,但並非特別限定於此。例如,通過孔之周邊區域的部分32a亦可使冷媒流道32的上下方向之長度變短。
在上述實施形態中,以MMC製作冷卻基材30,但並非特別限定於此。亦可係以金屬(例如鋁、鈦、鉬、還有鎢,及此等者之合金)來製作冷卻基材30。
在上述實施形態中,將陶瓷基材20與冷卻基材30透過導熱率佳發明效果好的金屬接合層40來接合,但並非特別限定於此。例如,亦可使用樹脂接合層來代替金屬接合層40。
在上述實施形態中,使冷媒流道32於俯視時的形狀為漩渦狀,但並非特別限定於此。例如,亦可使冷媒流道32於俯視時的形狀為鋸齒狀。具體而言,以俯視時冷卻基材30之中心為對稱中心的點對稱之外周附近兩點設置入口與出口,自入口至出口將冷媒流道32一筆畫地形成為鋸齒狀。
在上述實施形態中,在陶瓷基材20的中央部22內設有晶圓吸著用電極26,但亦可用電漿產生用的射頻電極來代替,或併設兩者,也可內設有加熱器電極(電阻發熱體)。又,亦可於陶瓷基材20的外周部24內設有聚焦環(FR)吸著用電極,也可內設有射頻電極還有加熱器電極。
在上述實施形態中,圖5A的陶瓷燒結體120係藉由將陶瓷粉末的成型體熱壓燒結來製作,但此時的成型體可係藉由將帶狀成型體疊層多片來製作,亦可藉由模鑄法來製作,並可藉由將陶瓷粉末壓實來製作。
本申請案係根據2021年10月14日申請的日本專利申請案第2021-168603號主張優先權,並將其全部內容引用至本說明書。
10:晶圓載置台
20:陶瓷基材
22:中央部
22a:晶圓載置面
22b:密封環帶
22c:小凸起
22d:基準面
22e:基準面
22f:小凸起
22g:小凸起
22h:小凸起
24:外周部
24a:聚焦環載置面
26:電極
30:冷卻基材
32:冷媒流道
32a:部分
32b:鰭片
32p:入口
32q:出口
34:凸緣部
40:金屬接合層
42:絕緣膜
44:氣體孔
46:氣體供給源
48:昇降銷孔
51:端子孔
52:直流電源
53:低通濾波器
54:供電端子
55:絕緣管
62:射頻電源
63:高通濾波器
64:供電端子
70:夾持構件
70a:內周平台面
72:螺栓
78:聚焦環
94:腔室
96:設置板
98:噴淋頭
110:接合體
120:陶瓷燒結體
130:MMC區塊
131,136:MMC圓板構件
132a:部分
135:金屬接合層
144a:氣體孔上部
144b:氣體孔中間部
144c:氣體孔下部
151a:端子孔上部
151b:端子孔中間部
151c:端子孔下部
d1,d2:距離
W:晶圓
X:周邊區域
圖1係設置於腔室94的晶圓載置台10之縱剖視圖。
圖2係晶圓載置台10的俯視圖。
圖3係在通過冷媒流道32的水平面切開晶圓載置台10時之剖視圖。
圖4係顯示冷媒流道32之重要部分之剖視放大圖。
圖5A~G係晶圓載置台10的製造程序圖。
圖6係顯示冷媒流道32之其它例的重要部分之剖視放大圖。
圖7係顯示冷媒流道32之其他例的重要部分之剖視放大圖。
圖8係顯示冷媒流道32之其他例的重要部分之剖視放大圖。
圖9係顯示晶圓載置面22a之其他例的重要部分之剖視放大圖。
圖10係顯視圖9之晶圓載置面22a的重要部分之俯視圖。
圖11A~D係顯示晶圓載置面22a之其他例的重要部分之俯視圖。
10:晶圓載置台
20:陶瓷基材
22:中央部
22a:晶圓載置面
24:外周部
24a:聚焦環載置面
26:電極
30:冷卻基材
32:冷媒流道
32a:部分
34:凸緣部
40:金屬接合層
42:絕緣膜
44:氣體孔
46:氣體供給源
51:端子孔
52:直流電源
53:低通濾波器
54:供電端子
55:絕緣管
62:射頻電源
63:高通濾波器
64:供電端子
70:夾持構件
70a:內周平台面
72:螺栓
78:聚焦環
94:腔室
96:設置板
98:噴淋頭
W:晶圓
Claims (7)
- 一種晶圓載置台,其包含: 陶瓷基材,於頂面具有可載置晶圓的晶圓載置面,並內設有電極; 冷卻基材,接合在該陶瓷基材之底面,具有冷媒流道; 多數孔,於上下方向貫通該冷卻基材;及 熱交換促進部,設於該多數孔之中至少一個孔的周邊區域,促進在該冷媒流道流動的冷媒與載置在該晶圓載置面的晶圓之熱交換。
- 如請求項1之晶圓載置台,其中, 該冷媒流道在該熱交換促進部中比在離該孔之周邊區域較遠的區域細。
- 如請求項2之晶圓載置台,其中, 俯視該冷媒流道時該冷媒流道之寬度,在該熱交換促進部中比在離該孔之周邊區域較遠的區域窄。
- 如請求項1至3中任一項之晶圓載置台,其中, 在該熱交換促進部中,該冷媒流道的內面設有鰭片。
- 如請求項1至3中任一項之晶圓載置台,其中, 在該熱交換促進部中之自該晶圓至該冷媒流道之頂棚面為止的距離,相較於離該孔之周邊區域較遠的區域係較短。
- 如請求項1至3中任一項之晶圓載置台,其中, 於該晶圓載置面之基準面具備:多數小凸起,以頂面支持晶圓的底面; 且該多數小凸起的頂面位於同一平面上, 在該熱交換促進部相較於在離該孔之周邊區域較遠的區域,小凸起之面積率較大,或基準面較***。
- 如請求項1至3中任一項之晶圓載置台,其中, 該孔係以下至少一者: 供電構件插通孔,設置成在該晶圓載置台之中自該電極往下,由往該電極供電的供電構件所插通; 昇降銷孔,在上下方向貫通該晶圓載置台,由昇降銷所插通;及 氣體孔,在上下方向貫通該晶圓載置台,使氣體通過而供給至該晶圓載置面。
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