TW202304277A - 具有獨立的模塊化單元結構的探測器 - Google Patents

具有獨立的模塊化單元結構的探測器 Download PDF

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Publication number
TW202304277A
TW202304277A TW111123531A TW111123531A TW202304277A TW 202304277 A TW202304277 A TW 202304277A TW 111123531 A TW111123531 A TW 111123531A TW 111123531 A TW111123531 A TW 111123531A TW 202304277 A TW202304277 A TW 202304277A
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TW
Taiwan
Prior art keywords
detector
electrical
chamber module
modular unit
unit structure
Prior art date
Application number
TW111123531A
Other languages
English (en)
Chinese (zh)
Inventor
朴濫佑
朴基宅
申起薰
Original Assignee
南韓商株式會社塞米克斯
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 南韓商株式會社塞米克斯 filed Critical 南韓商株式會社塞米克斯
Publication of TW202304277A publication Critical patent/TW202304277A/zh

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2863—Contacting devices, e.g. sockets, burn-in boards or mounting fixtures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2862—Chambers or ovens; Tanks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2868—Complete testing stations; systems; procedures; software aspects

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Environmental & Geological Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Structure Of Telephone Exchanges (AREA)
TW111123531A 2021-06-23 2022-06-23 具有獨立的模塊化單元結構的探測器 TW202304277A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2021-0081727 2021-06-23
KR1020210081727A KR102669106B1 (ko) 2021-06-23 2021-06-23 독립 모듈형 셀 구조를 갖는 프로버

Publications (1)

Publication Number Publication Date
TW202304277A true TW202304277A (zh) 2023-01-16

Family

ID=84538676

Family Applications (1)

Application Number Title Priority Date Filing Date
TW111123531A TW202304277A (zh) 2021-06-23 2022-06-23 具有獨立的模塊化單元結構的探測器

Country Status (3)

Country Link
KR (1) KR102669106B1 (ko)
TW (1) TW202304277A (ko)
WO (1) WO2022270948A1 (ko)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5377915B2 (ja) * 2008-09-30 2013-12-25 東京エレクトロン株式会社 検査装置及び検査方法
JP6267928B2 (ja) * 2013-10-29 2018-01-24 東京エレクトロン株式会社 ウエハ検査装置の整備用台車及びウエハ検査装置の整備方法
JP6827385B2 (ja) * 2017-08-03 2021-02-10 東京エレクトロン株式会社 検査システム
JP7170494B2 (ja) * 2018-10-15 2022-11-14 東京エレクトロン株式会社 中間接続部材及び検査装置
KR102222827B1 (ko) * 2019-08-12 2021-03-04 주식회사 쎄믹스 그룹 프로버 시스템 및 이의 설치 방법

Also Published As

Publication number Publication date
KR102669106B1 (ko) 2024-05-24
KR20220170635A (ko) 2022-12-30
WO2022270948A1 (ko) 2022-12-29

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