TW202223361A - Image capturing system, optical detection system, and image capturing method - Google Patents

Image capturing system, optical detection system, and image capturing method Download PDF

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TW202223361A
TW202223361A TW110103687A TW110103687A TW202223361A TW 202223361 A TW202223361 A TW 202223361A TW 110103687 A TW110103687 A TW 110103687A TW 110103687 A TW110103687 A TW 110103687A TW 202223361 A TW202223361 A TW 202223361A
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TWI753764B (en
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朱名遠
包玲豔
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英華達股份有限公司
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8851Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/60Control of cameras or camera modules
    • H04N23/67Focus control based on electronic image sensor signals
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/60Control of cameras or camera modules
    • H04N23/695Control of camera direction for changing a field of view, e.g. pan, tilt or based on tracking of objects
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8851Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8887Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques

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Abstract

The present invention provides an image capturing system, an optical detection system, and an image capturing method. The system includes: a camera; an object stage for carrying an object; a mirror that can be moved and/or rotated; wherein the object stage is arranged between the camera and the mirror, and the camera is configured to collect light reflected by the mirror to obtain an image of the surface of the object to be inspected. In the present invention, by setting a movable and/or rotating mirror, the camera can obtain the image of the object to be inspected through the mirror, and when the camera is fixed-focus, by adjusting the position of the mirror, different clear images of the surface to be inspected can be obtained.

Description

攝像系統、光學檢測系統及攝像方法Camera system, optical detection system and camera method

本發明是有關於一種光學檢測的攝像技術領域,且特別是有關於一種攝像系統、光學檢測系統及攝像方法。The present invention relates to the field of imaging technology for optical detection, and in particular, to an imaging system, an optical detection system and an imaging method.

隨著消費者對於產品品質要求的提高,許多製造商使用機器視覺學習技術,對將出廠的產品進行表面瑕疵檢測。其中,會影響瑕疵檢測準確率的因素,除了演算法外,如果產品影像無法清楚呈現缺陷特徵,縱使演算法如何演進,仍無法辨識。由此可見,對於用於光學檢測的攝像而言,如何取得較佳之影像對於提升檢測精準度具有舉足輕重的影響力。As consumers' requirements for product quality increase, many manufacturers use machine vision learning technology to detect surface defects on products that will be shipped. Among them, the factors that will affect the accuracy of defect detection, in addition to the algorithm, if the product image cannot clearly show the defect characteristics, no matter how the algorithm evolves, it still cannot be identified. It can be seen that, for the camera used for optical detection, how to obtain a better image has a decisive influence on improving the detection accuracy.

目前的用於光學檢測的攝像係將待檢測物放置於可旋轉的載物台上,載物台帶動待檢測物旋轉,使攝像機可以截取到待檢測物各側壁的影像,以進一步對表面進行瑕疵檢測。然而,當攝像機與載物台的位置都固定,待檢側物受載物台帶動旋轉時,攝像機至待檢側物表面的距離會有所異動,導致在焦距不變的條件下,無法取得清晰影像,而會影響後續瑕疵檢測的精準度。目前為解決前述問題的方法有:(1)移動載物台或攝像機,使待檢測物與攝像機距離維持定值,然而這種方式的缺點為:光源未同時移動,致使影像的明暗度不均。(2)使用變焦攝像機,然而這種方式的缺點為:成本較高,同時對焦時間相對長導致拍攝時間長。The current camera system used for optical inspection places the object to be inspected on a rotatable stage, and the stage drives the object to be inspected to rotate, so that the camera can capture the images of each side wall of the object to be inspected, so as to further conduct surface inspection. Defect detection. However, when the positions of the camera and the stage are fixed, and the object to be inspected is rotated by the stage, the distance between the camera and the surface of the object to be inspected will change, resulting in the inability to obtain the desired focal length under the condition that the focal length remains unchanged. Clear images will affect the accuracy of subsequent defect detection. At present, the methods to solve the aforementioned problems are: (1) Move the stage or the camera to keep the distance between the object to be detected and the camera at a constant value. However, the disadvantage of this method is that the light source does not move at the same time, resulting in uneven brightness of the image. . (2) Using a zoom camera, however, the disadvantage of this method is that the cost is high, and the relatively long focusing time leads to a long shooting time.

針對現有技術中的問題,本發明的目的在於提供一種攝像系統、光學檢測系統及攝像方法,經由設置可移動和/或旋轉的反射鏡,在攝像機定焦的情形下可以獲取待檢測物不同待檢測面的清晰圖像。In view of the problems in the prior art, the purpose of the present invention is to provide a camera system, an optical detection system and a camera method. By setting a movable and/or rotating mirror, when the camera is fixed, it is possible to obtain different objects to be detected. Clear image of the inspection surface.

根據本發明之一方面,提出一種攝像系統,包括:攝像機;載物台,用於承載待檢測物;反射鏡,可受操作移動和/或旋轉;其中,所述載物台設置於所述攝像機和所述反射鏡之間,所述攝像機用於採集所述反射鏡反射的光線以獲取所述待檢測物的待檢測面的圖像。According to an aspect of the present invention, a camera system is proposed, comprising: a camera; an object stage for carrying an object to be inspected; a reflector, which can be operated to move and/or rotate; wherein the object stage is arranged on the Between the camera and the mirror, the camera is used to collect the light reflected by the mirror to obtain an image of the surface to be detected of the object to be detected.

根據本發明之一方面,提出一種光學檢測系統,包括所述的攝像系統,所述光學檢測系統更包括:瑕疵檢測模組,用於根據所述攝像機的拍攝圖像檢測所述待檢測物的待檢測面的表面瑕疵。According to an aspect of the present invention, an optical detection system is provided, including the camera system, and the optical detection system further includes: a defect detection module, configured to detect the object to be detected according to the image captured by the camera. Surface flaws on the surface to be inspected.

根據本發明之一方面,提出一種攝像方法,採用所述的攝像系統,所述方法包括如下步驟:獲取待檢測物的待檢測面的位置資訊;根據所述待檢測物的待檢測面的位置計算所述反射鏡的移動距離和/或旋轉角度;根據所述位置計算模組的計算結果調整所述反射鏡的位置和/或旋轉角度;採集所述攝像機的拍攝圖像。According to an aspect of the present invention, a camera method is proposed, which adopts the camera system, and the method includes the following steps: acquiring the position information of the surface to be detected of the object to be detected; according to the position of the surface to be detected of the object to be detected Calculate the moving distance and/or rotation angle of the mirror; adjust the position and/or rotation angle of the mirror according to the calculation result of the position calculation module; and collect the captured image of the camera.

本發明經由設置可移動和/或旋轉的反射鏡,攝像機可以經由反射鏡獲取待檢測物的圖像,並且經由控制反射鏡與待檢測物/攝像機之間的距離,待檢測物在反射鏡中成像至攝像機之間的距離維持固定,從而在攝像機定焦的情形下,經由調整反射鏡的位置,可以獲取不同待檢測面的清晰圖像。In the present invention, by setting a movable and/or rotating mirror, the camera can obtain the image of the object to be detected through the mirror, and by controlling the distance between the mirror and the object to be detected/camera, the object to be detected is in the mirror The distance between the imaging and the camera remains fixed, so that when the camera is fixed, clear images of different surfaces to be detected can be obtained by adjusting the position of the mirror.

為了對本發明之上述及其他方面有更佳的瞭解,下文特舉實施例,並配合所附圖式詳細說明如下:In order to have a better understanding of the above-mentioned and other aspects of the present invention, the following specific examples are given and described in detail in conjunction with the accompanying drawings as follows:

現在將參考附圖更全面地描述示例實施方式。然而,示例實施方式能夠以多種形式實施,且不應被理解為限於在此闡述的範例;相反,提供這些實施方式使得本公開將更加全面和完整,並將示例實施方式的構思全面地傳達給本領域的具有通常知識者。所描述的特徵、結構或特性可以以任何合適的方式結合在一個或更多實施方式中。Example embodiments will now be described more fully with reference to the accompanying drawings. Example embodiments, however, can be embodied in various forms and should not be construed as limited to the examples set forth herein; rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of example embodiments to Persons with ordinary knowledge in the field. The described features, structures, or characteristics may be combined in any suitable manner in one or more embodiments.

此外,附圖僅為本公開的示意性圖解,並非一定是按比例繪製。圖中相同的附圖標記表示相同或類似的部分,因而將省略對它們的重複描述。附圖中所示的一些方框圖是功能實體,不一定必須與物理或邏輯上獨立的實體相對應。可以採用軟體形式來實現這些功能實體,或在一個或多個硬體模組或積體電路中實現這些功能實體,或在不同網路和/或處理器裝置和/或微控制器裝置中實現這些功能實體。Furthermore, the drawings are merely schematic illustrations of the present disclosure and are not necessarily drawn to scale. The same reference numerals in the drawings denote the same or similar parts, and thus their repeated descriptions will be omitted. Some of the block diagrams shown in the figures are functional entities that do not necessarily necessarily correspond to physically or logically separate entities. These functional entities may be implemented in software, or in one or more hardware modules or integrated circuits, or in different network and/or processor devices and/or microcontroller devices these functional entities.

如第1圖所示,本發明實施例提供一種攝像系統,包括:攝像機M100;載物台M200,用於承載待檢測物J100;以及反射鏡M300,可移動和/或旋轉。As shown in FIG. 1, an embodiment of the present invention provides a camera system, including: a camera M100; an object stage M200 for carrying the object to be detected J100; and a mirror M300, which is movable and/or rotatable.

其中,所述載物台M200設置於所述攝像機M100和所述反射鏡M300之間,所述攝像機M100用於採集所述反射鏡M300反射的光線以獲取所述待檢測物的圖像。在該實施例中,所述載物台M200是可相對於所述攝像機M100旋轉的,從而可以經由旋轉載物台M200和對應調整反射鏡M300使得攝像機M100拍攝不同的待檢測面。在其他可替代的實施方式中,所述載物台M200也可以是不旋轉的,而是經由調整反射鏡M300實現拍攝不同的待檢測面。The object stage M200 is disposed between the camera M100 and the reflector M300, and the camera M100 is configured to collect the light reflected by the reflector M300 to obtain an image of the object to be detected. In this embodiment, the stage M200 is rotatable relative to the camera M100, so that the camera M100 can shoot different surfaces to be detected by rotating the stage M200 and correspondingly adjusting the mirror M300. In other alternative embodiments, the stage M200 may also not be rotated, but different surfaces to be inspected can be photographed through the adjusting mirror M300.

因此,本發明經由設置可移動和/或旋轉的反射鏡M300,攝像機M100可以經由反射鏡M300獲取待檢測物的圖像,並且經由控制反射鏡M300與待檢測物J100/攝像機M100之間的距離,待檢測物J100在反射鏡M300中成像至攝像機M100之間的距離維持固定,從而在攝像機M100定焦的情形下,經由調整反射鏡M300的位置,可以獲取不同待檢測面的清晰圖像。在該實施例中,所述反射鏡M300為平面鏡,方便在測量待檢測物J100的不同待檢測面時計算移動距離和旋轉角度。但本發明不限於此。Therefore, in the present invention, by setting the movable and/or rotatable mirror M300, the camera M100 can obtain the image of the object to be detected via the mirror M300, and control the distance between the mirror M300 and the object to be detected J100/camera M100 , the distance from the image of the object to be detected J100 in the mirror M300 to the camera M100 remains fixed, so that when the camera M100 is fixed, clear images of different surfaces to be detected can be obtained by adjusting the position of the mirror M300. In this embodiment, the reflecting mirror M300 is a plane mirror, which is convenient for calculating the moving distance and rotation angle when measuring different surfaces to be detected of the object to be detected J100. However, the present invention is not limited to this.

所述攝像機M100可以採用定焦攝像機,即可以獲取不同待檢測面的清晰圖像,從而可以在保證清晰度的基礎上大大節省整個攝像系統乃至整個光學檢測系統的成本。在其他可替代的實施方式中,所述攝像機M100也可以採用變焦攝像機,其在測量同一個待檢測物的不同待檢測面時,可以不用反復變焦,節省了拍攝和檢測時間。The camera M100 can adopt a fixed-focus camera, that is, it can obtain clear images of different surfaces to be detected, so that the cost of the entire camera system and even the entire optical detection system can be greatly saved on the basis of ensuring the clarity. In other alternative implementations, the camera M100 can also use a zoom camera, which does not need to zoom repeatedly when measuring different surfaces to be detected of the same object to be detected, which saves time for shooting and detection.

進一步地,如第1圖所示,所述攝像系統還可以包括光源模組M400,用於對待檢測物J100照明。該光源模組M400可以採用同軸光源和碗光源,但本發明不限於此,採用其他類型的光源或者不採用光源均屬於本發明的保護範圍之內。第1圖中示出的是攝像系統的俯視視角的結構圖,其中僅示意性地示出了攝像系統中各個元件的位置。在實際應用中,各個元件的位置不限於第1圖中示出的排布方式,只需要滿足載物台M200位於攝像機M100和反射鏡M300之間且攝像機M100可以拍攝到待檢測物J100在反射鏡M300中所成的像即可。在實際應用中,載物台M200和攝像機M100可以設置在不同的水平面,例如,載物台M200可以略低於攝像機M100的水平面,從而不會出現攝像機M100被待檢測物J100遮擋的問題。所述光源模組M400中間也可以設置有穿孔,攝像機M100可以經由該穿孔拍攝到反射鏡M300中所成的像。Further, as shown in FIG. 1, the camera system may further include a light source module M400 for illuminating the object to be detected J100. The light source module M400 can use a coaxial light source and a bowl light source, but the present invention is not limited to this, and the use of other types of light sources or no light sources are within the protection scope of the present invention. FIG. 1 shows a structural view of the camera system from a top view, in which the positions of various components in the camera system are only schematically shown. In practical applications, the position of each component is not limited to the arrangement shown in Figure 1, it only needs to satisfy that the stage M200 is located between the camera M100 and the mirror M300 and the camera M100 can capture the reflection of the object to be detected J100. The image formed in the mirror M300 is sufficient. In practical applications, the stage M200 and the camera M100 can be set on different levels. For example, the stage M200 can be slightly lower than the level of the camera M100, so that the camera M100 is not blocked by the object to be detected J100. The light source module M400 may also be provided with a hole in the middle, and the camera M100 can capture the image formed in the reflector M300 through the hole.

如第2圖所示,為該實施例的攝像系統增加控制功能模組之後的結構示意圖。所述攝像系統還包括:位置計算模組,用於根據待檢測物的待檢測面的位置計算所述反射鏡的移動距離和/或旋轉角度。As shown in FIG. 2 , it is a schematic structural diagram after adding a control function module to the camera system of this embodiment. The camera system further includes: a position calculation module, configured to calculate the moving distance and/or the rotation angle of the mirror according to the position of the to-be-detected surface of the to-be-detected object.

如第3圖所示,為該實施例的攝像系統應用於拍攝待檢測物的一個平面待檢測面的示意圖。如果所述待檢測面為平面,則所述位置計算模組根據待檢測物的待檢測面的位置計算所述反射鏡沿第一方向的移動距離,所述第一方向為所述攝像機的拍攝方向,在第3圖中即為上下方向。該實施例中,載物台是可旋轉的。載物台在初始狀態時,待檢測物處於J100A的狀態,反射鏡的鏡面在P1位置,反射鏡中成像在J200A的位置,此時的待檢測面是第3圖中梯形的上底邊對應的面。此時,攝像機M100的工作距離為WD=d1+d1+L+B,其中B為待檢測物的旋轉中心到待檢測面沿第一方向的距離,d1為待檢測面到鏡面沿第一方向的距離,L為攝像機到待檢測物的旋轉中心沿第一方向的距離。As shown in FIG. 3 , it is a schematic diagram of the application of the camera system of this embodiment to photograph a plane to be inspected of the object to be inspected. If the surface to be detected is a plane, the position calculation module calculates the moving distance of the mirror along a first direction according to the position of the surface to be detected of the object to be detected, and the first direction is the shooting of the camera The direction, in Figure 3, is the up and down direction. In this embodiment, the stage is rotatable. When the stage is in the initial state, the object to be inspected is in the state of J100A, the mirror surface of the mirror is at the P1 position, and the image in the mirror is at the position of J200A. At this time, the surface to be inspected corresponds to the upper bottom edge of the trapezoid in Figure 3. face. At this time, the working distance of the camera M100 is WD=d1+d1+L+B, where B is the distance from the rotation center of the object to be detected to the surface to be detected along the first direction, and d1 is the distance from the surface to be detected to the mirror surface along the first direction , L is the distance from the camera to the rotation center of the object to be detected along the first direction.

載物台旋轉至待檢測物處於J100B的狀態後,同時移動反射鏡至P2位置,反射鏡中成像在J200B的位置,此時的待檢測面是第3圖中梯形的一個腰對應的面。此時,攝像機M100的工作距離為WD=d2+d2+L+A,A為此時待檢測物的旋轉中心到待檢測面沿第一方向的距離,d2為此時待檢測面到鏡面沿第一方向的距離。After the stage is rotated until the object to be detected is in the state of J100B, the mirror is moved to the P2 position at the same time, and the mirror image is at the position of J200B. At this time, the surface to be detected is the surface corresponding to a waist of the trapezoid in Figure 3. At this time, the working distance of the camera M100 is WD=d2+d2+L+A, A is the distance from the rotation center of the object to be detected to the surface to be detected along the first direction, and d2 is the distance from the surface to be detected to the edge of the mirror surface at this time distance in the first direction.

由於攝像機未變焦,因此兩種狀態下工作距離WD不變,則滿足如下公式:

Figure 02_image001
Figure 02_image003
Figure 02_image005
Since the camera is not zoomed, the working distance WD remains unchanged in the two states, and the following formula is satisfied:
Figure 02_image001
Figure 02_image003
Figure 02_image005

所述位置計算模組可以採用如下公式計算所述反射鏡沿第一方向的移動距離

Figure 02_image007
Figure 02_image005
The position calculation module can use the following formula to calculate the moving distance of the mirror along the first direction:
Figure 02_image007
:
Figure 02_image005

其中,A為當前所述待檢測物的旋轉中心與所述待檢測面在第一方向上的距離,B為初始狀態下所述待檢測物的旋轉中心與所述待檢測面在第一方向上的距離。Among them, A is the current distance between the rotation center of the object to be detected and the surface to be detected in the first direction, B is the initial state of the rotation center of the object to be detected and the surface to be detected in the first direction upward distance.

進一步地,目前產品多會導圓角形成弧面,單單僅檢測產品四周已經無法滿足需求。需要進一步可以檢測弧面。因此,該實施例中可以經由進一步控制反射鏡旋轉來實現檢測待檢測物的弧面。Further, at present, most products will have rounded corners to form curved surfaces, and it is no longer enough to only detect the surrounding of the product. It is necessary to further detect the arc surface. Therefore, in this embodiment, the arc surface of the object to be detected can be detected by further controlling the rotation of the mirror.

如第4圖所示,為該實施例的待檢測面為弧面時的攝像示意圖。如果所述待檢測面為弧面,則所述位置計算模組根據待檢測物的待檢測面的位置計算所述反射鏡的沿第一方向的移動距離和相對於第二方向的旋轉角度,所述第一方向為所述攝像機的拍攝方向,所述第二方向垂直於所述第一方向。在第4圖中,所述第一方向即為左右方向,所述第二方向即為上下方向。As shown in FIG. 4 , it is a schematic diagram of imaging when the surface to be detected in this embodiment is an arc surface. If the surface to be detected is an arc surface, the position calculation module calculates the moving distance of the mirror along the first direction and the rotation angle relative to the second direction according to the position of the surface to be detected of the object to be detected, The first direction is the shooting direction of the camera, and the second direction is perpendicular to the first direction. In FIG. 4 , the first direction is the left-right direction, and the second direction is the up-down direction.

如第4圖所示,

Figure 02_image009
為入射線與第一方向的夾角,待檢測面的切線面與第一方向的夾角為
Figure 02_image011
Figure 02_image011
可由待檢測物本身的特徵得到。入射線與切線垂直,因此,
Figure 02_image009
=90°-
Figure 02_image011
。初始狀態下,待檢測物處於J100A的狀態,反射鏡的鏡面在P1位置,反射鏡中成像在J200A的位置,此時,攝像機M100的工作距離為WD=d1+d1+L+B。在測量待檢測物的弧面時,旋轉反射鏡的鏡面到P2位置,然後平移反射鏡的鏡面到P3位置,此時,反射鏡的鏡面到待檢測的弧面的距離是d3,反射鏡中成像在J200B,此時,攝像機M100的工作距離為:
Figure 02_image013
As shown in Figure 4,
Figure 02_image009
is the angle between the incident ray and the first direction, and the angle between the tangent plane of the surface to be detected and the first direction is
Figure 02_image011
,
Figure 02_image011
It can be obtained from the characteristics of the object to be detected. The incident ray is perpendicular to the tangent, so,
Figure 02_image009
=90°-
Figure 02_image011
. In the initial state, the object to be detected is in the state of J100A, the mirror surface of the mirror is at the position of P1, and the image in the mirror is at the position of J200A. At this time, the working distance of the camera M100 is WD=d1+d1+L+B. When measuring the curved surface of the object to be detected, rotate the mirror surface of the mirror to the position P2, and then translate the mirror surface of the mirror to the position P3. At this time, the distance from the mirror surface of the mirror to the curved surface to be detected is d3. Imaging in J200B, at this time, the working distance of camera M100 is:
Figure 02_image013

根據平行原理∠DAC=

Figure 02_image009
,根據法線原理,∠1=∠2=
Figure 02_image015
/2。根據平行原理∠3=∠2,∠4=∠3=
Figure 02_image009
/2,∠5=90°-
Figure 02_image015
/2。根據平行與相似三角形原理,
Figure 02_image017
=
Figure 02_image009
/2。因此,
Figure 02_image019
。 According to the parallel principle ∠DAC=
Figure 02_image009
, according to the normal principle, ∠1=∠2=
Figure 02_image015
/2. According to the parallel principle ∠3=∠2, ∠4=∠3=
Figure 02_image009
/2, ∠5=90°-
Figure 02_image015
/2. According to the principle of parallel and similar triangles,
Figure 02_image017
=
Figure 02_image009
/2. therefore,
Figure 02_image019
.

根據平行原理,

Figure 02_image021
Figure 02_image023
,並且
Figure 02_image025
Figure 02_image027
; 由此,
Figure 02_image029
因此,
Figure 02_image031
。 According to the principle of parallelism,
Figure 02_image021
,
Figure 02_image023
,and
Figure 02_image025
,
Figure 02_image027
; thus,
Figure 02_image029
therefore,
Figure 02_image031
.

因此,如第4圖所示,如果所述待檢測面為弧面,則所述位置計算模組採用如下公式計算所述反射鏡的沿第一方向的移動距離

Figure 02_image007
和相對於第二方向的旋轉角度
Figure 02_image017
Figure 02_image033
Figure 02_image035
Therefore, as shown in Figure 4, if the surface to be detected is an arc surface, the position calculation module uses the following formula to calculate the moving distance of the mirror along the first direction
Figure 02_image007
and the rotation angle relative to the second direction
Figure 02_image017
:
Figure 02_image033
Figure 02_image035

其中,

Figure 02_image011
為待檢測面的切線面與第一方向的夾角,d1為初始狀態下所述反射鏡與所述待檢測面在第一方向上的距離。 in,
Figure 02_image011
is the angle between the tangent plane of the surface to be detected and the first direction, and d1 is the distance between the mirror and the surface to be detected in the first direction in the initial state.

如第2圖所示,在該實施例中,所述攝像系統還包括: 反射鏡移動模組,用於根據所述位置計算模組的計算結果調整所述反射鏡的位置和/或旋轉角度,從而可以實現所述反射鏡的自動位置調整。 As shown in Figure 2, in this embodiment, the camera system further includes: The mirror moving module is used to adjust the position and/or the rotation angle of the mirror according to the calculation result of the position calculation module, so that the automatic position adjustment of the mirror can be realized.

所述反射鏡移動模組可以包括驅動電機,驅動所述反射鏡根據所述位置計算模組的計算結果平移和/或旋轉。具體地,在所述反射鏡需要平移和旋轉兩種動作時,可以分別採用一個平移驅動電機和一個旋轉驅動電機來驅動反射鏡調整至需要的位置。The mirror moving module may include a drive motor for driving the mirror to translate and/or rotate according to the calculation result of the position calculation module. Specifically, when the mirror needs two actions of translation and rotation, a translation drive motor and a rotation drive motor can be respectively used to drive the mirror to adjust to the required position.

進一步地,所述攝像系統還包括: 待檢測物分析模組,用於載入待檢測物的模型資料庫,分析待檢測物的待檢測面的特徵;所述待檢測物的模型資料庫可以包括所述待檢測物的形狀資料,例如包括的待檢測面的數量、各個待檢測面相對於旋轉中心的距離、各個待檢測面之間的夾角等,在所述待檢測物有弧面時,所述模型資料庫海報框待檢測物的弧面特徵和弧面角度,可以用於後續位置計算模組計算反射鏡的平移距離和/或旋轉角度; 載物台旋轉模組,用於根據所述待檢測物的待檢測面的特徵控制所述載物台旋轉,具體地,需要根據待檢測面與初始拍攝面之間的角度以及與攝像機的相對位置計算所述載物台旋轉的角度,然後控制所述載物台旋轉。所述載物台旋轉模組可以採用驅動電機實現。 Further, the camera system also includes: The object to be detected analysis module is used to load the model database of the object to be detected, and analyze the characteristics of the surface to be detected of the object to be detected; the model database of the object to be detected may include the shape data of the object to be detected, For example, the number of surfaces to be detected, the distance of each surface to be detected relative to the rotation center, the angle between each surface to be detected, etc., when the object to be detected has a curved surface, the model database poster frame the object to be detected The camber feature and camber angle can be used for the subsequent position calculation module to calculate the translation distance and/or rotation angle of the mirror; The stage rotation module is used to control the rotation of the stage according to the characteristics of the surface to be detected of the object to be detected. The position calculates the angle of rotation of the stage, and then controls the rotation of the stage. The stage rotation module can be realized by a drive motor.

如第5圖所示,本發明實施例還提供一種光學檢測系統,包括所述的攝像系統,所述光學檢測系統還包括: 瑕疵檢測模組,用於根據所述攝像機的拍攝圖像檢測所述待檢測物的待檢測面的表面瑕疵。 As shown in FIG. 5, an embodiment of the present invention further provides an optical detection system, including the camera system, and the optical detection system further includes: The defect detection module is used for detecting the surface defects of the to-be-detected surface of the to-be-detected object according to the image captured by the camera.

由於本發明經由設置可移動和/或旋轉的反射鏡,攝像機可以經由反射鏡獲取待檢測物的圖像,並且經由控制反射鏡與待檢測物/攝像機之間的距離,待檢測物在反射鏡中成像至攝像機之間的距離維持固定,從而在攝像機定焦的情形下,經由調整反射鏡的位置,可以獲取不同待檢測面的清晰圖像。在攝像機獲取到待檢測面的清晰圖像後,所述瑕疵檢測模組可以對所述清晰圖像進行分析,實現表面凹坑、劃痕等瑕疵檢測。所述瑕疵檢測模組的檢測方法可以採用現有技術中的瑕疵檢測方法,例如基於機器視覺學習模型來進行檢測。由於本發明中的瑕疵檢測模組所基於的檢測圖像更為清晰,因此,可以實現更準確的檢測。並且,所述光學檢測系統不僅可以應用於平面的檢測,還可以用於弧面的檢測,應用範圍更廣泛。Since the present invention sets a movable and/or rotatable mirror, the camera can obtain the image of the object to be detected through the mirror, and by controlling the distance between the mirror and the object to be detected/camera, the object to be detected is in the mirror. The distance between the mid-image and the camera remains fixed, so that when the camera is fixed, clear images of different surfaces to be detected can be obtained by adjusting the position of the mirror. After the camera obtains a clear image of the surface to be inspected, the defect detection module can analyze the clear image to detect defects such as surface pits and scratches. The detection method of the defect detection module may adopt the defect detection method in the prior art, such as detection based on a machine vision learning model. Since the detection image on which the defect detection module of the present invention is based is clearer, more accurate detection can be achieved. Moreover, the optical detection system can be applied not only to the detection of flat surfaces, but also to the detection of curved surfaces, and the application range is wider.

如第6圖所示,本發明實施例還提供一種攝像方法,採用所述的攝像系統,所述方法包括如下步驟: S100:獲取待檢測物的待檢測面的位置資訊,此位置資訊可以是根據待檢測物的模型資料庫中待檢測物的形狀資料得到的; S200:根據所述待檢測物的待檢測面的位置計算所述反射鏡的移動距離和/或旋轉角度; S300:根據所述位置計算模組的計算結果調整所述反射鏡的位置和/或旋轉角度; S400:採集所述攝像機的拍攝圖像。 As shown in FIG. 6 , an embodiment of the present invention further provides a camera method using the camera system, and the method includes the following steps: S100: Acquire position information of the surface to be detected of the object to be detected, the position information may be obtained according to the shape data of the object to be detected in the model database of the object to be detected; S200: Calculate the moving distance and/or the rotation angle of the mirror according to the position of the surface to be detected of the object to be detected; S300: Adjust the position and/or the rotation angle of the mirror according to the calculation result of the position calculation module; S400: Collect the captured image of the camera.

因此,本發明經由設置可移動和/或旋轉的反射鏡,攝像機可以經由反射鏡獲取待檢測物的圖像,並且經由步驟S200和S300控制反射鏡移動或旋轉,調整反射鏡與待檢測物/攝像機之間的距離,待檢測物在反射鏡中成像至攝像機之間的距離維持固定,從而在攝像機定焦的情形下,經由調整反射鏡的位置,可以獲取不同待檢測面的清晰圖像。Therefore, in the present invention, by setting a movable and/or rotating mirror, the camera can obtain the image of the object to be detected through the mirror, and control the mirror to move or rotate through steps S200 and S300, and adjust the mirror and the object to be detected/ The distance between the cameras and the distance between the object to be detected in the mirror and the camera remain fixed, so that when the camera is fixed, clear images of different surfaces to be detected can be obtained by adjusting the position of the mirror.

在該實施例中,所述步驟S100:獲取待檢測物的待檢測面的位置資訊之前,還包括如下步驟: 載入待檢測物的模型資料庫,分析待檢測物的待檢測面的特徵;所述待檢測物的模型資料庫可以包括所述待檢測物的形狀資料,例如包括的待檢測面的數量、各個待檢測面相對於旋轉中心的距離、各個待檢測面之間的夾角等,在所述待檢測物有弧面時,所述模型資料庫海報框待檢測物的弧面特徵和弧面角度,可以用於分析出待檢測面與相機的距離,以及後續步驟S200計算反射鏡的平移距離和/或旋轉角度; 根據所述待檢測物的待檢測面的特徵控制所述載物台旋轉,轉動待檢測物至待檢測面。 In this embodiment, the step S100: before acquiring the position information of the to-be-detected surface of the to-be-detected object, further includes the following steps: Load the model database of the object to be detected, and analyze the characteristics of the surface to be detected of the object to be detected; the model database of the object to be detected may include shape data of the object to be detected, such as the number of surfaces to be detected, The distance of each surface to be detected relative to the rotation center, the angle between each surface to be detected, etc., when the object to be detected has a curved surface, the curved surface feature and the curved surface angle of the object to be detected in the poster frame of the model database, It can be used to analyze the distance between the surface to be detected and the camera, and the subsequent step S200 calculates the translation distance and/or rotation angle of the mirror; The object stage is controlled to rotate according to the characteristics of the surface to be detected of the object to be detected, and the object to be detected is rotated to the surface to be detected.

在該實施例中,所述步驟S200:根據所述待檢測物的待檢測面的位置計算所述反射鏡的移動距離和/或旋轉角度,包括如下步驟: 判斷所述待檢測面是否為弧面; 如果所述待檢測面為平面,則根據待檢測物的待檢測面的位置計算所述反射鏡沿第一方向的移動距離; 如果所述待檢測面為弧面,則根據待檢測物的待檢測面的位置計算所述反射鏡的沿第一方向的移動距離和相對於第二方向的旋轉角度,所述第一方向為所述攝像機的拍攝方向,所述第二方向垂直於所述第一方向。 In this embodiment, the step S200: calculating the moving distance and/or the rotation angle of the mirror according to the position of the to-be-detected surface of the to-be-detected object, includes the following steps: Determine whether the surface to be detected is an arc surface; If the surface to be detected is a plane, calculating the moving distance of the mirror along the first direction according to the position of the surface to be detected of the object to be detected; If the surface to be detected is an arc surface, the moving distance of the mirror along the first direction and the rotation angle relative to the second direction are calculated according to the position of the surface to be detected of the object to be detected, and the first direction is The shooting direction of the camera, the second direction is perpendicular to the first direction.

本發明實施例還提供一種光學檢測方法,包括所述攝像方法,在所述步驟S400:採集所述攝像機的拍攝圖像之後,還包括根據所述攝像機的拍攝圖像檢測所述待檢測物的待檢測面的表面瑕疵。如第7圖所示,為本發明實施例提供的一種光學檢測方法的流程圖。所述光學檢測方法包括如下步驟: 載入待檢測物的模型資料庫的內容,待檢測物分析模組分析出待檢測物的待檢測面與攝像機的距離、待檢測物的弧面特徵及弧面角度、待檢測物的待檢測面資訊; 旋轉載物台,轉動待檢測物至待檢測面; 選擇待檢測面中的待檢測區域; 判斷待檢測區域是否為弧面; 如果待檢測區域是平面,則位置計算模組根據當前待檢測面的位置計算反射鏡的移動量,反射鏡移動模組根據移動量平移反射鏡; 如果待檢測區域是弧面,則位置計算模組根據當前待檢測面的位置計算反射鏡的運動量和旋轉角度,反射鏡移動模組根據移動量平移反射鏡並且旋轉反射鏡; 攝像機對待檢測區域進行拍攝; 判斷待檢測面是否已經拍攝完成; 如果是,則判斷待檢測物是否已經拍攝完成; 瑕疵檢測模組根據所述攝像機的拍攝圖像檢測所述待檢測物的待檢測面的表面瑕疵。 An embodiment of the present invention further provides an optical detection method, including the imaging method, and after the step S400: collecting a photographed image of the camera, further comprising detecting the object to be detected according to the photographed image of the camera. Surface flaws on the surface to be inspected. As shown in FIG. 7 , it is a flowchart of an optical detection method provided by an embodiment of the present invention. The optical detection method includes the following steps: The content of the model database of the object to be detected is loaded, and the object to be detected analysis module analyzes the distance between the object to be detected and the camera, the feature and angle of the curved surface of the object to be detected, and the distance of the object to be detected. face information; Rotate the stage, and turn the object to be detected to the surface to be detected; Select the area to be inspected in the surface to be inspected; Determine whether the area to be detected is an arc surface; If the area to be detected is a plane, the position calculation module calculates the movement amount of the mirror according to the current position of the surface to be detected, and the mirror movement module translates the mirror according to the movement amount; If the area to be detected is a curved surface, the position calculation module calculates the movement amount and rotation angle of the mirror according to the current position of the surface to be detected, and the mirror movement module translates the mirror and rotates the mirror according to the movement amount; The camera shoots the area to be detected; Determine whether the surface to be detected has been photographed; If so, determine whether the object to be detected has been photographed; The defect detection module detects surface defects of the surface to be inspected of the object to be inspected according to the image captured by the camera.

因此,本發明經由設置可移動和/或旋轉的反射鏡,攝像機可以經由反射鏡獲取待檢測物的圖像,並且經由控制反射鏡移動或旋轉,調整反射鏡與待檢測物/攝像機之間的距離,待檢測物在反射鏡中成像至攝像機之間的距離維持固定,從而在攝像機定焦的情形下,經由調整反射鏡的位置,可以獲取不同待檢測面的清晰圖像。瑕疵檢測模組對待檢測物的瑕疵進行檢測時,基於更清晰的圖像,可以實現更準確的瑕疵檢測。並且,所述光學檢測方法不僅可以應用於平面的檢測,還可以用於弧面的檢測,應用範圍更廣泛。Therefore, in the present invention, by setting a movable and/or rotating mirror, the camera can obtain the image of the object to be detected through the mirror, and adjust the distance between the mirror and the object to be detected/camera by controlling the movement or rotation of the mirror. The distance between the object to be detected in the mirror and the camera remains fixed, so that when the camera is fixed, clear images of different surfaces to be detected can be obtained by adjusting the position of the mirror. When the defect detection module detects the defects of the object to be detected, based on a clearer image, more accurate defect detection can be achieved. Moreover, the optical detection method can be applied not only to the detection of flat surfaces, but also to the detection of curved surfaces, and has a wider application range.

本發明實施例還提供一種攝像設備,包括處理器;記憶體,其中儲存有所述處理器的可執行指令;其中,所述處理器配置為經由執行所述可執行指令來執行所述的攝像方法的步驟。An embodiment of the present invention further provides an imaging device, including a processor; a memory, in which executable instructions of the processor are stored; wherein the processor is configured to execute the imaging by executing the executable instructions steps of the method.

所屬技術領域的具有通常知識者能夠理解,本發明的各個方面可以實現為系統、方法或程式產品。因此,本發明的各個方面可以具體實現為以下形式,即:完全的硬體實施方式、完全的軟體實施方式(包括固件、微代碼等),或硬體和軟體方面結合的實施方式,這裡可以統稱為“電路”、“模組”或“平台”。As can be appreciated by one of ordinary skill in the art, various aspects of the present invention may be implemented as a system, method or program product. Accordingly, various aspects of the present invention may be embodied in the following forms: an entirely hardware implementation, an entirely software implementation (including firmware, microcode, etc.), or an implementation in which both hardware and software aspects are combined. Collectively referred to as "circuits," "modules," or "platforms."

綜上所述,經由採用本發明的攝像系統、光學檢測系統、攝像方法,經由設置可移動和/或旋轉的反射鏡,攝像機可以經由反射鏡獲取待檢測物的圖像,並且經由控制反射鏡與待檢測物/攝像機之間的距離,待檢測物在反射鏡中成像至攝像機之間的距離維持固定,從而在攝像機定焦的情形下,經由調整反射鏡的位置,可以獲取不同待檢測面的清晰圖像。To sum up, by adopting the camera system, optical detection system, and camera method of the present invention, and by setting movable and/or rotating mirrors, the camera can obtain the image of the object to be detected through the mirror, and control the mirror by controlling the mirror. The distance from the object to be detected/camera, the distance from the object to be detected in the mirror to the camera remains fixed, so that when the camera is fixed, by adjusting the position of the mirror, different surfaces to be detected can be obtained clear image.

綜上所述,雖然本發明已以實施例揭露如上,然其並非用以限定本發明。本發明所屬技術領域中具有通常知識者,在不脫離本發明之精神和範圍內,當可作各種之更動與潤飾。因此,本發明之保護範圍當視後附之申請專利範圍所界定者為準。To sum up, although the present invention has been disclosed by the above embodiments, it is not intended to limit the present invention. Those skilled in the art to which the present invention pertains can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention shall be determined by the scope of the appended patent application.

M100:攝像機 M200:載物台 J100:檢測物 M300:反射鏡 M400:光源模組 J100A,J100B:狀態 J200A,J200B,P1,P2,P3:位置 WD,d1,d2,d3,L,A,B,Δp,:距離 α,β:夾角 θ:旋轉角度 M100:Camera M200: Stage J100: Test object M300: Reflector M400: Light source module J100A, J100B: Status J200A, J200B, P1, P2, P3: Location WD,d1,d2,d3,L,A,B,Δp,: distance α,β: included angle θ: rotation angle

第1圖是本發明一實施例的攝像系統的結構示意圖; 第2圖是本發明一實施例的攝像系統增加控制功能模組的結構框圖; 第3圖是本發明一實施例的待檢測面為平面時的攝像示意圖; 第4圖是本發明一實施例的待檢測面為弧面時的攝像示意圖; 第5圖是本發明一實施例的光學檢測系統的結構示意圖; 第6圖是本發明一實施例的攝像方法的流程圖; 第7圖是本發明一實施例的光學檢測方法的流程圖。 FIG. 1 is a schematic structural diagram of a camera system according to an embodiment of the present invention; FIG. 2 is a structural block diagram of adding a control function module to a camera system according to an embodiment of the present invention; FIG. 3 is a schematic view of a camera when the surface to be detected is a plane according to an embodiment of the present invention; FIG. 4 is a schematic view of a camera when the surface to be detected is an arc surface according to an embodiment of the present invention; FIG. 5 is a schematic structural diagram of an optical detection system according to an embodiment of the present invention; FIG. 6 is a flowchart of an imaging method according to an embodiment of the present invention; FIG. 7 is a flowchart of an optical detection method according to an embodiment of the present invention.

M100:攝像機 M100:Camera

M200:載物台 M200: Stage

J100:檢測物 J100: Test object

M300:反射鏡 M300: Reflector

M400:光源模組 M400: Light source module

Claims (10)

一種攝像系統,用於光學檢測,所述系統包括: 一攝像機; 一載物台,用於承載待檢測物;以及 一反射鏡,可受操作移動和/或旋轉; 其中,所述載物台設置於所述攝像機和所述反射鏡之間,所述攝像機用於採集所述反射鏡反射的光線以獲取所述待檢測物的待檢測面的圖像。 A camera system for optical detection, the system comprising: a camera; a stage for carrying the object to be tested; and a mirror, operable to move and/or rotate; Wherein, the object stage is arranged between the camera and the reflection mirror, and the camera is used for collecting the light reflected by the reflection mirror to obtain an image of the surface to be detected of the object to be detected. 根據請求項1所述的攝像系統,更包括: 一位置計算模組,用於根據待檢測物的待檢測面的位置計算所述反射鏡的移動距離和/或旋轉角度。 The camera system according to claim 1, further comprising: A position calculation module for calculating the moving distance and/or rotation angle of the mirror according to the position of the surface to be detected of the object to be detected. 根據請求項2所述的攝像系統,如果所述待檢測面為平面,則所述位置計算模組根據待檢測物的待檢測面的位置計算所述反射鏡沿第一方向的移動距離,所述第一方向為所述攝像機的拍攝方向;所述位置計算模組採用如下公式計算所述反射鏡沿第一方向的移動距離
Figure 03_image007
Figure 03_image005
其中,A為當前所述待檢測物的旋轉中心與所述待檢測面在第一方向上的距離,B為初始狀態下所述待檢測物的旋轉中心與所述待檢測面在第一方向上的距離。
According to the camera system of claim 2, if the surface to be detected is a plane, the position calculation module calculates the moving distance of the mirror along the first direction according to the position of the surface to be detected of the object to be detected, so The first direction is the shooting direction of the camera; the position calculation module uses the following formula to calculate the moving distance of the mirror along the first direction
Figure 03_image007
:
Figure 03_image005
Among them, A is the current distance between the rotation center of the object to be detected and the surface to be detected in the first direction, B is the initial state of the rotation center of the object to be detected and the surface to be detected in the first direction upward distance.
根據請求項2所述的攝像系統,如果所述待檢測面為弧面,則所述位置計算模組根據待檢測物的待檢測面的位置計算所述反射鏡沿第一方向的移動距離和相對於第二方向的旋轉角度,所述第一方向為所述攝像機的拍攝方向,所述第二方向垂直於所述第一方向;所述位置計算模組採用如下公式計算所述反射鏡的沿第一方向的移動距離
Figure 03_image007
和相對於第二方向的旋轉角度
Figure 03_image017
Figure 03_image033
Figure 03_image037
其中,
Figure 03_image011
為待檢測面的切線面與第一方向的夾角,d1為初始狀態下所述反射鏡與所述待檢測面在第一方向上的距離。
According to the camera system of claim 2, if the surface to be detected is an arc surface, the position calculation module calculates the moving distance of the mirror along the first direction and Relative to the rotation angle of the second direction, the first direction is the shooting direction of the camera, and the second direction is perpendicular to the first direction; the position calculation module uses the following formula to calculate the Movement distance in the first direction
Figure 03_image007
and the rotation angle relative to the second direction
Figure 03_image017
:
Figure 03_image033
Figure 03_image037
in,
Figure 03_image011
is the angle between the tangent plane of the surface to be detected and the first direction, and d1 is the distance between the mirror and the surface to be detected in the first direction in the initial state.
根據請求項2所述的攝像系統,更包括: 一反射鏡移動模組,用於根據所述位置計算模組的計算結果調整所述反射鏡的位置和/或旋轉角度。 The camera system according to claim 2, further comprising: A mirror moving module for adjusting the position and/or rotation angle of the mirror according to the calculation result of the position calculation module. 根據請求項1所述的攝像系統,更包括: 一待檢測物分析模組,用於載入待檢測物的一模型資料庫,分析待檢測物的待檢測面的特徵;以及 一載物台旋轉模組,用於根據所述待檢測物的待檢測面的特徵控制所述載物台旋轉。 The camera system according to claim 1, further comprising: a to-be-detected object analysis module for loading a model database of the to-be-detected object to analyze the characteristics of the to-be-detected surface of the to-be-detected object; and A stage rotation module is used to control the rotation of the stage according to the characteristics of the surface to be inspected of the object to be inspected. 一種光學檢測系統,包括請求項1至6中任一項所述的攝像系統,所述光學檢測系統更包括: 一瑕疵檢測模組,用於根據所述攝像機的拍攝圖像檢測所述待檢測物的待檢測面的表面瑕疵。 An optical detection system, comprising the camera system according to any one of claims 1 to 6, the optical detection system further comprising: A defect detection module is used for detecting surface defects of the to-be-detected surface of the to-be-detected object according to the image captured by the camera. 一種攝像方法,採用請求項1至6中任一項所述的攝像系統,所述方法包括如下步驟: 獲取所述待檢測物的待檢測面的位置資訊; 根據所述待檢測物的待檢測面的位置計算所述反射鏡的移動距離和/或旋轉角度; 根據所述位置計算模組的計算結果調整所述反射鏡的位置和/或旋轉角度;以及 採集所述攝像機的拍攝圖像。 A camera method, using the camera system described in any one of claim 1 to 6, the method comprising the steps of: obtaining the position information of the surface to be detected of the object to be detected; Calculate the moving distance and/or the rotation angle of the mirror according to the position of the to-be-detected surface of the to-be-detected object; Adjust the position and/or rotation angle of the mirror according to the calculation result of the position calculation module; and A captured image of the camera is collected. 根據請求項8所述的攝像方法,其中所述獲取待檢測物的待檢測面的位置資訊之前,更包括如下步驟: 載入待檢測物的模型資料庫,分析待檢測物的待檢測面的特徵; 根據所述待檢測物的待檢測面的特徵控制所述載物台旋轉。 The imaging method according to claim 8, wherein before acquiring the position information of the to-be-detected surface of the to-be-detected object, it further comprises the following steps: Load the model database of the object to be detected, and analyze the characteristics of the surface to be detected of the object to be detected; The rotation of the object stage is controlled according to the characteristics of the surface to be inspected of the object to be inspected. 根據請求項8所述的攝像方法,其中根據所述待檢測物的待檢測面的位置計算所述反射鏡的移動距離和/或旋轉角度,包括如下步驟: 判斷所述待檢測面是否為弧面; 如果所述待檢測面為平面,則根據待檢測物的待檢測面的位置計算所述反射鏡沿第一方向的移動距離; 如果所述待檢測面為弧面,則根據待檢測物的待檢測面的位置計算所述反射鏡的沿第一方向的移動距離和相對於第二方向的旋轉角度,所述第一方向為所述攝像機的拍攝方向,所述第二方向垂直於所述第一方向。 The imaging method according to claim 8, wherein calculating the moving distance and/or the rotation angle of the mirror according to the position of the to-be-detected surface of the to-be-detected object includes the following steps: Determine whether the surface to be detected is an arc surface; If the surface to be detected is a plane, calculating the moving distance of the mirror along the first direction according to the position of the surface to be detected of the object to be detected; If the surface to be detected is an arc surface, the moving distance of the mirror along the first direction and the rotation angle relative to the second direction are calculated according to the position of the surface to be detected of the object to be detected, and the first direction is The shooting direction of the camera, the second direction is perpendicular to the first direction.
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