TW202220009A - 聚焦能量束裝置 - Google Patents
聚焦能量束裝置 Download PDFInfo
- Publication number
- TW202220009A TW202220009A TW110133546A TW110133546A TW202220009A TW 202220009 A TW202220009 A TW 202220009A TW 110133546 A TW110133546 A TW 110133546A TW 110133546 A TW110133546 A TW 110133546A TW 202220009 A TW202220009 A TW 202220009A
- Authority
- TW
- Taiwan
- Prior art keywords
- exhaust port
- energy beam
- exhaust
- sub
- inner space
- Prior art date
Links
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/18—Vacuum control means
- H01J2237/182—Obtaining or maintaining desired pressure
- H01J2237/1825—Evacuating means
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Measurement Of Radiation (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Particle Accelerators (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020176267A JP7469803B2 (ja) | 2020-10-20 | 2020-10-20 | 集束エネルギービーム装置 |
JP2020-176267 | 2020-10-20 |
Publications (1)
Publication Number | Publication Date |
---|---|
TW202220009A true TW202220009A (zh) | 2022-05-16 |
Family
ID=81291251
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW110133546A TW202220009A (zh) | 2020-10-20 | 2021-09-09 | 聚焦能量束裝置 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP7469803B2 (ja) |
KR (1) | KR20230091099A (ja) |
CN (1) | CN116235274A (ja) |
TW (1) | TW202220009A (ja) |
WO (1) | WO2022085309A1 (ja) |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4792688A (en) * | 1987-06-15 | 1988-12-20 | The Perkin-Elmer Corporation | Differentially pumped seal apparatus |
JP3886777B2 (ja) | 2001-11-02 | 2007-02-28 | 日本電子株式会社 | 電子線照射装置および方法 |
JP2003249187A (ja) | 2002-02-25 | 2003-09-05 | Sony Corp | 真空装置及び真空装置における真空維持方法 |
JP6419662B2 (ja) | 2015-08-25 | 2018-11-07 | 株式会社東芝 | ストレージシステム及びデータ重複検出方法 |
JP2019179747A (ja) | 2018-03-30 | 2019-10-17 | 株式会社ニコン | 荷電粒子装置、計測システム、及び、荷電粒子ビームの照射方法 |
-
2020
- 2020-10-20 JP JP2020176267A patent/JP7469803B2/ja active Active
-
2021
- 2021-09-01 KR KR1020237013008A patent/KR20230091099A/ko unknown
- 2021-09-01 WO PCT/JP2021/032155 patent/WO2022085309A1/ja active Application Filing
- 2021-09-01 CN CN202180066953.6A patent/CN116235274A/zh active Pending
- 2021-09-09 TW TW110133546A patent/TW202220009A/zh unknown
Also Published As
Publication number | Publication date |
---|---|
JP7469803B2 (ja) | 2024-04-17 |
JP2022067525A (ja) | 2022-05-06 |
KR20230091099A (ko) | 2023-06-22 |
CN116235274A (zh) | 2023-06-06 |
WO2022085309A1 (ja) | 2022-04-28 |
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