TW202220009A - 聚焦能量束裝置 - Google Patents

聚焦能量束裝置 Download PDF

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Publication number
TW202220009A
TW202220009A TW110133546A TW110133546A TW202220009A TW 202220009 A TW202220009 A TW 202220009A TW 110133546 A TW110133546 A TW 110133546A TW 110133546 A TW110133546 A TW 110133546A TW 202220009 A TW202220009 A TW 202220009A
Authority
TW
Taiwan
Prior art keywords
exhaust port
energy beam
exhaust
sub
inner space
Prior art date
Application number
TW110133546A
Other languages
English (en)
Chinese (zh)
Inventor
新井敏成
松本𨺓徳
竹下𤥨郎
Original Assignee
日商Ｖ科技股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商Ｖ科技股份有限公司 filed Critical 日商Ｖ科技股份有限公司
Publication of TW202220009A publication Critical patent/TW202220009A/zh

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/18—Vacuum control means
    • H01J2237/182—Obtaining or maintaining desired pressure
    • H01J2237/1825—Evacuating means

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measurement Of Radiation (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Particle Accelerators (AREA)
TW110133546A 2020-10-20 2021-09-09 聚焦能量束裝置 TW202220009A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020176267A JP7469803B2 (ja) 2020-10-20 2020-10-20 集束エネルギービーム装置
JP2020-176267 2020-10-20

Publications (1)

Publication Number Publication Date
TW202220009A true TW202220009A (zh) 2022-05-16

Family

ID=81291251

Family Applications (1)

Application Number Title Priority Date Filing Date
TW110133546A TW202220009A (zh) 2020-10-20 2021-09-09 聚焦能量束裝置

Country Status (5)

Country Link
JP (1) JP7469803B2 (ja)
KR (1) KR20230091099A (ja)
CN (1) CN116235274A (ja)
TW (1) TW202220009A (ja)
WO (1) WO2022085309A1 (ja)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4792688A (en) * 1987-06-15 1988-12-20 The Perkin-Elmer Corporation Differentially pumped seal apparatus
JP3886777B2 (ja) 2001-11-02 2007-02-28 日本電子株式会社 電子線照射装置および方法
JP2003249187A (ja) 2002-02-25 2003-09-05 Sony Corp 真空装置及び真空装置における真空維持方法
JP6419662B2 (ja) 2015-08-25 2018-11-07 株式会社東芝 ストレージシステム及びデータ重複検出方法
JP2019179747A (ja) 2018-03-30 2019-10-17 株式会社ニコン 荷電粒子装置、計測システム、及び、荷電粒子ビームの照射方法

Also Published As

Publication number Publication date
JP7469803B2 (ja) 2024-04-17
JP2022067525A (ja) 2022-05-06
KR20230091099A (ko) 2023-06-22
CN116235274A (zh) 2023-06-06
WO2022085309A1 (ja) 2022-04-28

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