TW202210160A - Particles capturing system - Google Patents
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Description
本發明涉及處理粉塵之技術領域,尤指一種微粒、粉塵、微細粉塵的捕集。The present invention relates to the technical field of dust processing, especially to the capture of particles, dust and fine dust.
在主要空汙來源中,粉塵、微粒(Particles)、微細粉塵(fine dust)扮演了關鍵的角色,因為粉塵、微粒、微細粉塵的體積極不可思議的細微,一旦暴露在充斥該類粉塵、微粒、微細粉塵的空氣中,便會對人體健康造成嚴重危害,尤其是呼吸道方面的疾病。Among the main sources of air pollution, dust, particles (Particles), fine dust (fine dust) play a key role, because the body of dust, particles, fine dust is incredibly fine, once exposed to the flood of such dust, particles, fine dust In the air of fine dust, it will cause serious harm to human health, especially respiratory diseases.
就高科技製造業的顆粒粉塵廢棄處理系統而言,許多廢氣減量過程中都需要收集微細粉塵。廢氣中的微細粉塵是極細的固體微粒,會長時間懸浮在空氣中。直徑超過10微米的粒子歸為粗微粒,這類顆粒微粒會被鼻毛或鼻咽腔內的黏膜吸附。直徑小於10微米(PM10)的微細粉塵屬於懸浮粒子,一旦吸入人體,將會沿著氣管與支氣管一直深入直達肺部。In the case of particulate dust disposal systems in high-tech manufacturing, many exhaust gas abatement processes require the collection of fine dust. Fine dust in exhaust gas is extremely fine solid particles that remain suspended in the air for a long time. Particles larger than 10 microns in diameter are classified as coarse particles, which are adsorbed by the nasal hairs or mucous membranes in the nasopharyngeal cavity. Fine dust with a diameter of less than 10 microns (PM10) belongs to suspended particles. Once inhaled into the human body, it will penetrate deep into the lungs along the trachea and bronchi.
直徑小於2.5微米的微細粉塵便屬於微細懸浮微粒(PM2.5),而小於0.1微米者則屬於超微細懸浮微粒。包括PM10、PM2.5,在現有的氣體洗滌器(gas scrubber)和分離器(separator)都很難處理,因此可能造成排氣道阻塞。Fine dust with a diameter of less than 2.5 microns is classified as fine suspended particles (PM2.5), while those less than 0.1 microns are classified as ultra-fine suspended particles. Including PM10, PM2.5, in the existing gas scrubber (gas scrubber) and separator (separator) are difficult to handle, so it may cause exhaust duct blockage.
於各種加工製程中,常會產生許多粉塵、微粒、微細粉塵,必須將此類粉塵去除,以避免排放至大氣環境中。In various processing processes, many dusts, particles and fine dusts are often generated, and such dusts must be removed to avoid being discharged into the atmosphere.
就半導體製程所產生的廢氣而言,雖然大部分化學物質及粉塵/微粒能透過洗滌塔去除,但仍有極小尺寸(<PM10)的粉塵無法有效除去。若將含有該類微粒、微細粉塵的廢氣排放到大氣環境,則會造成直接之空氣汙染及環境汙染。As for the waste gas generated by the semiconductor process, although most of the chemical substances and dust/particulates can be removed through the scrubber, there are still very small size (<PM10) dusts that cannot be effectively removed. If the exhaust gas containing such particles and fine dust is discharged into the atmospheric environment, it will cause direct air pollution and environmental pollution.
據此,如何發展出一種可有效收集、捕集粉塵、微粒、微細粉塵的「微粒捕集系統」,是相關技術領域人士亟待解決之課題。Accordingly, how to develop a "particle capture system" that can effectively collect and capture dust, particles, and fine dust is an urgent problem for those in the relevant technical fields.
於一實施例中,本發明提出一種微粒捕集系統,其包含: 一文氏管過濾裝置,其具有一進氣部、一喉部與一出氣部,出氣部的水平高度高於進氣部的水平高度,喉部位於進氣部與出氣部之間,喉部的內徑小於進氣部與出氣部的內徑; 一旋風式過濾裝置,設置於文氏管過濾裝置之出氣部,旋風式過濾裝置由複數過濾單元構成,各過濾單元包含一直型管部,直型管部之底部具有一錐型管部,直型管部的軸心垂直於水平面,錐型管部管徑較小的一端朝向喉部,複數過濾單元之直型管部的具有至少兩種尺寸,複數過濾單元層層套設,位於最外層之過濾單元具有一入口,入口的水平高度高於相鄰內層過濾單元之底部的水平高度,位於最內層之過濾單元的直型管部的頂部為一出口,出口的水平高度高於入口的水平高度; 複數第一噴嘴,設置於文氏管過濾裝置內,複數第一噴嘴的水平高度高於喉部的水平高度,各複數第一噴嘴提供第一水霧,各第一水霧的噴灑方向大致平行於文氏管過濾裝置的軸心方向由第一噴嘴朝向喉部噴灑;以及 氣體由進氣部之進氣口進入文氏管過濾裝置,依序通過喉部、複數第一噴嘴,由入口進入旋風式過濾裝置,由出口流出旋風式過濾裝置,藉此捕集氣體中之粉塵與微粒。In one embodiment, the present invention provides a particle capture system, comprising: A venturi filter device has an air inlet, a throat and an air outlet, the horizontal height of the air outlet is higher than the horizontal height of the air inlet, the throat is located between the air inlet and the air outlet, and the throat is located between the air inlet and the air outlet. The inner diameter is smaller than the inner diameter of the air inlet and the air outlet; A cyclone filter device is arranged at the air outlet of the venturi filter device. The cyclone filter device is composed of a plurality of filter units. Each filter unit includes a straight pipe portion. The bottom of the straight pipe portion has a conical pipe portion, which is straight The axis of the shaped tube part is perpendicular to the horizontal plane, the smaller end of the tapered tube part faces the throat, the straight tube parts of the plurality of filter units have at least two sizes, and the plurality of filter units are nested layer by layer and located in the outermost layer The filter unit has an inlet, the level of the inlet is higher than the level of the bottom of the adjacent inner filter unit, the top of the straight pipe part of the innermost filter unit is an outlet, and the level of the outlet is higher than the inlet. the horizontal height; A plurality of first nozzles are arranged in the venturi filter device, the horizontal height of the plurality of first nozzles is higher than the horizontal height of the throat, each of the plurality of first nozzles provides a first water mist, and the spraying directions of the first water mists are substantially parallel Sprayed from the first nozzle toward the throat in the axial direction of the venturi filter device; and The gas enters the venturi filter device from the air inlet of the air inlet, passes through the throat and the plurality of first nozzles in sequence, enters the cyclone filter device from the inlet, and flows out of the cyclone filter device from the outlet, thereby capturing the gas in the gas. Dust and particulates.
請參閱圖1所示,本發明所提供之一種粉塵微粒捕集系統100,其包含一文氏管過濾裝置10、一旋風式過濾裝置20、複數第一噴嘴30及複數第二噴嘴40。文氏管過濾裝置10與旋風式過濾裝置20大致同軸心C設置。Referring to FIG. 1 , a dust
請參閱圖1及圖2A、2B所示,文氏管過濾裝置10具有一進氣部11、一喉部12與一出氣部13。進氣部11具有一進氣口111,提供氣體A進入進氣部11。通常,氣體A帶有含有汙染的粉塵、微粒、微細粉塵。Please refer to FIG. 1 and as shown in FIGS. 2A and 2B , the
圖2A與圖2B是為了更清楚地本發明結構及氣體與水霧的流動,因此將圖1的粉塵微粒捕集系統100分為兩張圖面,然圖2A與圖2B為相連結的整體結構,可由圖2A頂部的與圖2B底部的標示得知二者的連結關係。FIGS. 2A and 2B are for the purpose of clarifying the structure of the present invention and the flow of gas and water mist. Therefore, the dust
出氣部13的水平高度H13
(如圖2B)高於進氣部11的水平高度H11
(如圖2A)。喉部12位於進氣部11與出氣部13之間,喉部12的內徑小於進氣部11與出氣部13的內徑。在此實施例中,縮小的喉部內部的截面積,用以加大進氣之亂流流速,增加捕集粉塵、微粒、微細粉塵的效率。The horizontal height H 13 of the air outlet portion 13 (as shown in FIG. 2B ) is higher than the horizontal height H 11 of the air intake portion 11 (as shown in FIG. 2A ). The
如圖2A,文氏管過濾裝置10更包括一調整元件14,調整元件14具有一錐部141,錐部141具有直徑較小的一端(例如為一尖端)朝向喉部12。調整元件14可升降地設置於進氣部11,藉此改變氣體A由進氣部11通過喉部12時之允許通過的截面積,進而調整氣體A由進氣部11通過喉部12時之流速。As shown in FIG. 2A , the
於本實施例中,調整元件14連接於一調整齒輪組15,調整齒輪組15包括一第一齒輪組件151與一第二齒輪組件152。In this embodiment, the adjusting
第一齒輪組件151包括一第一齒輪1511與一第一桿體1512。第一桿體1512之兩端分別連接於調整元件14與第一齒輪1511,第一桿體1512之軸心方向垂直於水平面H。The
第二齒輪組件152,包括一第二齒輪1521與一第二桿體1522。第二桿體1522之一端連接於第二齒輪1521,第二桿體1522之另一端凸伸於文氏管過濾裝置10外。第二齒輪1521與第一齒輪1511相嚙合,藉由驅動第二桿體1522,同步帶動第二齒輪1521驅動第一齒輪1511旋轉,進而驅動第一桿體1512帶動調整元件14升降。在一實施例中,調整元件14可為一柱塞。The
在另一實施例中,可省略設置調整齒輪組15,亦即,氣體A進入喉部12允許通過的環狀截面積為固定。In another embodiment, the
請參閱圖1及圖2A、2B所示,第一噴嘴30設置於文氏管過濾裝置10內,第一噴嘴30的水平高度H30
(如圖2B)高於喉部12的水平高度H12
(如圖2A)。各第一噴嘴30提供第一水霧M1,各第一水霧M1的噴灑方向大致平行於文氏管過濾裝置10的軸心C之方向,且由第一噴嘴30朝向喉部12噴灑,藉以洗滌粉塵、微粒、微細粉塵至下方收集桶。Referring to FIG. 1 and FIGS. 2A and 2B , the
如圖2B,於本實施例中,第一噴嘴30可為複數個,各第一噴嘴30之水平高度H30
為相同,且等距環繞文氏管過濾裝置10的軸心C設置。第一噴嘴30的數量不限,例如可至少為三個,且在以軸心C為中心的圓周上是等分地配置,例如,若設有三個第一噴嘴30,則第一噴嘴30間的夾角為120度,若設有四個第一噴嘴30,則第一噴嘴30間的夾角為90度。As shown in FIG. 2B , in this embodiment, the
請見圖1及圖2B,第二噴嘴40設置於靠近出氣部13且環繞旋風式過濾裝置20外圍。第二噴嘴40的水平高度H40
高於第一噴嘴30的水平高度H30
。各第二噴嘴40提供第二水霧M2,各第二水霧M2的噴灑方向大致平行於水平面H、或垂直於水平面且朝下方(未圖示),且由第二噴嘴40朝向旋風式過濾裝置20內噴灑。Please refer to FIG. 1 and FIG. 2B , the
如圖2B,於本實施例中,第二噴嘴40可為複數個,各第二噴嘴40之水平高度H40
為相同且等距環繞旋風式過濾裝置20的軸心C設置。第二噴嘴40的數量不限,例如可至少為三個,且在以軸心C為中心的圓周上是等分地配置,例如,若設有三個第二噴嘴40,則第二噴嘴40間的夾角為120度,若設有四個第二噴嘴40,則第二噴嘴40間的夾角為90度。As shown in FIG. 2B , in this embodiment, the
於進氣口111的下方設有一收集桶16,用以收集落下之第一水霧M1及第二水霧M2及捕集到的粉塵、微粒、微細粉塵。A collecting
於圖1、2A所示實施例中,進氣口111位於進氣部11之側邊,且位於收集桶16之上方,氣體A以平行於水平面H之方向進入進氣部11。除此之外,可依所需將進氣口111設置為其他態樣。In the embodiment shown in FIGS. 1 and 2A , the
請參閱圖3所示,進氣口111位於進氣部11之底部,進氣口111連接一管體112且管體112的頂端凸伸於收集桶16之上方。氣體A以垂直於水平面H之方向進入進氣部11。管體112的上方設有一蓋體113,蓋體113與管體112之頂端具有一距離,氣體A由管體112之頂端流出後,再由蓋體113之四周流入進氣部11。Referring to FIG. 3 , the
收集桶16之一側設有一排水管161,用以排除收集桶16中所收集的汙水。A
請參閱圖1及圖2A所示,文氏管過濾裝置10之喉部12設有一多孔性材料121,其具有特殊設計之多孔性結構,材質為金屬或聚合物,微生物會在其表面潤溼累積,以增大與第一水霧M1與第二水霧M2的表面接觸,並對第一水霧M1與第二水霧M2進行汙水降解分離處理。在另一實施例中,可省略多孔性材料121。Please refer to FIG. 1 and FIG. 2A , the
請參閱圖1及圖2B所示,旋風式過濾裝置20設置於文氏管過濾裝置10之出氣部13。旋風式過濾裝置20包括一第一過濾單元21、一第二過濾單元22、一第三過濾單元23及一第四過濾單元24。Please refer to FIG. 1 and FIG. 2B , the
第一過濾單元21具有一第一直型管部211及一第一錐型管部212,於第一直型管部211設有一第一開口213作為氣體的入口。第一直型管部211的軸心C垂直於水平面H。第一過濾單元21的第一錐型管部212的底部設有一第一下降管214,第一下降管214之軸向C長度之底部之水平高度H214
低於各第一噴嘴30之水平高度H30
。第一下降管214之底部具有一第一錐部215,第一錐部215具有管部管徑較小的一第一錐部開口217朝向喉部12(可參見圖1與圖2A)。The
第二過濾單元22具有一第二直型管部221及一第二錐型管部222。第二直型管部221的外徑小於第一直型管部211的內徑,第二過濾單元22同軸心C設置於第一過濾單元21內。第二錐型管部222的底部的水平高度H222
低於第一開口213的水平高度H213
。The
第三過濾單元23具有一第三直型管部231及一第三錐型管部232。第三直型管部231的外徑小於第二直型管部221的內徑,第三過濾單元同軸心C設置於第二過濾單元22內。第三錐型管部232的底部的水平高度H232
低於第二錐型管部222的底部的水平高度H222
。The
於第三直型管部231設有一第三開口233,第三開口233的水平高度H233
高於第二錐型管部222的底部的水平高度H222
。第三過濾單元23的第三錐型管部232的底部設有一第三下降管234,第三下降管234之軸向C長度之底部之水平高度H234
高於第一錐型管部212的底部的水平高度H212
。第三下降管234之底部具有一第三錐部235,第三錐部235具有管徑較小的一第三錐部開口237朝向喉部12。在另一實施例中,第三下降管234之軸向C長度之底部之水平高度H234
可以視需求設置成為低於第一錐型管部212的底部的水平高度H212
。A
第四過濾單元24具有一第四直型管部241及一第四錐型管部242。第四直型管部241的外徑小於第三直型管部231的內徑,第四過濾單元24同軸心C設置於第三過濾單元23內。第四錐型管部242的底部的水平高度H242
低於第三開口233的水平高度H233
且高於第三錐型管部232的底部的水平高度H232
,第四直型管部241的頂部為氣體的出口。The
請參閱圖2A、2B所示,完整說明微粒捕集系統100的氣體A及第一水霧M1與第二水霧M2的流動路徑。其中,實線箭頭代表氣體的路徑,虛線箭頭代表水霧的路徑。Please refer to FIGS. 2A and 2B for a complete description of the gas A and the flow paths of the first water mist M1 and the second water mist M2 of the
氣體A由進氣口111進入進氣部11,而後由調整元件14的週圍進入喉部12,可藉由調整齒輪組15控制調整元件14升降,改變允許通過喉部12的環狀截面積及氣體A進入喉部12的流速;例如,在一實施例中,使允許通過喉部12的環狀截面積縮小進而增大氣體A的流速,在另一實施例中,使允許通過喉部12的環狀截面積加大進而減小氣體A的流速。又在另一實施例中,可省略設置調整齒輪組15,使氣體允許通過喉部12的環狀截面積為固定。The gas A enters the
於第四直型管部241的頂部外可設置一抽氣風扇(圖中未示出),以將氣體A由進氣口111抽入進氣部11。An air suction fan (not shown in the figure) may be disposed outside the top of the fourth
而後,氣體A通過多孔性材料121繼續向上流入出氣部13。當氣體A通過第一噴嘴30時,可藉由第一水霧M1的沖刷以捕集氣體A中所含的粉塵。Then, the gas A continues to flow upward into the
而後,帶著粉塵的第一水霧M1落入多孔性材料121,可由多孔性材料121對第一水霧M1進行汙水降解分離處理。通過多孔性材料121的第一水霧M1繼續下落至收集桶16中。在另一實施例中,可省略多孔性材料121。Then, the first water mist M1 with dust falls into the
於此同時,氣體A仍繼續上行,由第一開口213進入第一過濾單元21。當氣體A通過第二噴嘴40時,可藉由第二水霧M2對氣體A進行第二次沖刷以捕集氣體A中所含的微粒,並阻隔微粒再進入第二過濾單元22。At the same time, the gas A continues to ascend, and enters the
帶著微粒的第二水霧M2通過第一錐型管部212、第一下降管214、第一錐部215與第一錐部開口217之後,落入多孔性材料121,由多孔性材料121對第二水霧M2進行汙水降解分離處理。通過多孔性材料121的第二水霧M2繼續下落至收集桶16中。After the second water mist M2 with particles passes through the first
於此同時,氣體A由第二錐型管部222的底部流入第二過濾單元22,再由第三開口233進入第三過濾單元23,而氣體A中的粉塵、微粒受離心力與重力雙重作用落下,經第三錐部開口237排出,氣體A而後由第四錐型管部242的底部流入第四過濾單元24,最後,氣體A1由第四直型管部241的頂部流出旋風式過濾裝置20,亦即,由第四直型管部241的頂部流出的氣體A1已經是除去粉塵、微粒的氣體。At the same time, the gas A flows into the
值得說明的是,如本發明技術領域人士所理解,旋風式過濾裝置20的工作原理為,當氣體A進入旋風式過濾裝置20、23時,可於旋風式過濾裝置20、23內部產生螺旋狀迴轉,氣體A中的粉塵、微粒受離心力與重力雙重作用而由氣體A中分離而由旋風式過濾裝置20的底部落出。據此,本發明特殊設計的第一過濾單元21、第二過濾單元22、第三過濾單元23及第四過濾單元24之多層套設結構,可對氣體A發揮雙重旋風式過濾效果。It should be noted that, as understood by those skilled in the art of the present invention, the working principle of the
由第三過濾單元23及第四過濾單元24旋風分離出的微粒、微細粉塵,可藉由第三下降管234及第三錐部235之第三錐部開口237導引至第一下降管214、第一錐部215中,經由第一錐部開口217排出。同樣地,由第一過濾單元21、第二過濾單元22旋風分離出的粉塵,可落入第一下降管214、第一錐部215中,經由第一錐部開口217排出。,再導引至旋風式過濾裝置20外部。The particles and fine dust separated by the cyclone of the
圖4至圖7為圖1實施例之旋風式過濾裝置之過濾單元之不同實施例之結構示意圖。請參閱圖4所示,第一過濾單元21A具有一第一直型管部211及一第一錐型管部212,第三過濾單元23A具有一第三直型管部231及一第三錐型管部232。相較於圖2B,圖4實施例的第一過濾單元21A及第三過濾單元23不具有圖2B所示第一下降管214及第一錐部215,以及不具有第三下降管234及第三錐部235。4 to 7 are schematic structural diagrams of different embodiments of the filter unit of the cyclone filter device of the embodiment of FIG. 1 . Please refer to FIG. 4 , the
請參閱圖5所示,本實施例是以圖4實施例結構為基礎,於第一過濾單元21B的第一錐型管部212的底部設有一第一料斗216,例如,為一空心圓柱,於第三過濾單元23B的第三錐型管部232的底部設有一第三料斗236,例如,為一空心圓柱,用以收集來自氣體中的粉塵、微粒。Please refer to FIG. 5. This embodiment is based on the structure of the embodiment shown in FIG. 4. A
請參閱圖6所示,第一過濾單元21C具有一第一直型管部211、一第一錐型管部212部及第一下降管214。第三過濾單元23C具有一第三直型管部231、一第三錐型管部232及第三下降管234。相較於圖2B,本實施例的第一過濾單元21C及第三過濾單元23C不具有圖2B所示第一錐部215及第三錐部235。Referring to FIG. 6 , the
請參閱圖7所示,本實施例是以圖6實施例結構為基礎,於第一過濾單元21D的第一下降管214之底部設有一第一料斗216,例如,為一空心圓柱,於第三過濾單元23D的第三下降管234之底部設有一第三料斗236,例如,為一空心圓柱,分別收集來自氣體中的粉塵、微粒。Please refer to FIG. 7 , this embodiment is based on the structure of the embodiment shown in FIG. 6 . A
圖4至圖7實施例顯示,本發明的過濾單元除了具有直型管部、錐型管部之外,另可依所需搭配錐部、下降管、料斗。The embodiments shown in FIGS. 4 to 7 show that the filter unit of the present invention not only has a straight pipe portion and a conical pipe portion, but also can be equipped with a conical portion, a descending pipe, and a hopper as required.
請參閱圖8所示,本實施例旋風式過濾裝置20E是以圖2A實施例為基礎,於第三過濾單元23與第四過濾單元24之間更包括一第五過濾單元25及一第六過濾單元26。Please refer to FIG. 8 , the
第五過濾單元25具有一第五直型管部251及一第五錐型管部252,第五直型管部251的外徑小於第三直型管部231的內徑,第五過濾單元同軸心C設置於第三過濾單元23內。第五錐型管部252的底部的水平高度H252
低於第三開口233的水平高度H233
且高於第三錐型管部232的底部的水平高度H232
。The
第六過濾單元26具有一第六直型管部261及一第六錐型管部262,第六直型管部261的外徑小於第五直型管部251的內徑,第六過濾單元26同軸心C設置於第五過濾單元25內。第六錐型管部262的底部的水平高度H262
低於第五錐型管部252的底部的水平高度H252
,於第六直型管部261設有一第六開口263,第六開口263的水平高度H263
高於第四錐型管部242的底部的水平高度H242
。The
第四過濾單元24同軸心設置於第六過濾單元26內,第四直型管部241的頂部為氣體A1的出口。The
圖8實施例之氣體A的流動方向為,由第一開口213進入第一過濾單元21,而後由第二錐型管部222的底部流入第二過濾單元22,再由第三開口233進入第三過濾單元23,而後由第五錐型管部252的底部流入第五過濾單元25,再由第六開口263進入第六過濾單元26,而後由第四錐型管部242的底部流入第四過濾單元24,最後,氣體A1由第四直型管部241的頂部流出旋風式過濾裝置20E。The flow direction of the gas A in the embodiment of FIG. 8 is that it enters the
請參閱圖9所示,本實施例旋風式過濾裝置20F是以圖2A實施例為基礎,僅具有第一過濾單元21及第四過濾單元24。Referring to FIG. 9 , the
第一過濾單元21具有一第一直型管部211及一第一錐型管部212,於第一直型管部211設有一第一開口213作為入口。第四過濾單元24具有一第四直型管部241及一第四錐型管部242,第四直型管部241的頂部為氣體A1出口。The
圖9實施例之氣體A的流動方向為,由第一開口213進入第一過濾單元21,而後由第四錐型管部242的底部流入第四過濾單元24,最後,氣體A1由第四直型管部241的頂部流出旋風式過濾裝置20F。The flow direction of the gas A in the embodiment of FIG. 9 is that it enters the
請參閱圖10所示,本實施例旋風式過濾裝置20G是以圖9實施例為基礎,位於最內層之第四過濾單元24內設有複數個子過濾單元27,各子過濾單元27具有一子直型管部271、一子錐型管部272及一子下降管274。子直型管部271的外徑小於位於最內層之第四過濾單元24的內徑。於各子直型管部271設有一子開口273,子開口273的水平高度H273
高於位於最內層之第四過濾單元24的第四錐型管部242的底部的水平高度H242
,各子過濾單元27的頂部相連通並與第四過濾單元24的第四直型管部241相連通。子下降管274的底部的水平高度H274
與位於最內層之第四過濾單元24的第四錐型管部242的底部的水平高度H242
大致相同,或亦可低於水平高度H242
。Please refer to FIG. 10 , the
請參閱圖10、10A所示,於本實施例中,位於最內層之第四過濾單元24之軸心C設有複數個子過濾單元27,且複數個子過濾單元27環繞於位於最內層之第四過濾單元24之軸心C等距設置。Referring to FIGS. 10 and 10A, in this embodiment, the axis C of the
圖10實施例之氣體A的流動方向為,由第一開口213進入第一過濾單元21,而後由第四錐型管部242的底部流入第四過濾單元24,再由各子開口273流入各子過濾單元27,最後,氣體A1由第四直型管部241的頂部匯集流出旋風式過濾裝置20G。在本實施例中,透過氣體螺旋狀漩渦繞著管壁的流動,使氣體與微粒產生分離,藉以捕集氣體中之粉塵與微粒。在另一實施例中,可在進入第二層旋風式過濾裝置入口前,透過另外增加之第二水霧噴灑,阻隔微粒再進入第二層,同時藉由第二水霧再次洗滌以捕集氣體中之粉塵、微粒、微細粉塵至下方收集桶。粉塵、微粒均通過層層套設之旋風式複數過濾單元,達成多重次捕集氣體中之粉塵與微粒。The flow direction of the gas A in the embodiment shown in FIG. 10 is that it enters the
上述圖2B、圖8至11所揭露的旋風式過濾裝置具有共同的結構特徵:各過濾單元皆包含一直型管部及錐型管部,直型管部的軸心垂直於水平面,錐型管部管徑較小的一端(尖端)朝向喉部,位於最外層之過濾單元具有一入口,入口的水平高度高於相鄰內層過濾單元之底部的水平高度,位於最內層之過濾單元的直型管部的頂部為一出口,出口的水平高度高於入口的水平高度。在一實施例中,位於最外層之過濾單元的入口可設置於管部的正中央、或是設置於管部的側邊。The cyclone filter devices disclosed in the above-mentioned FIGS. 2B and 8 to 11 have common structural features: each filter unit includes a straight pipe portion and a conical pipe portion, the axis of the straight pipe portion is perpendicular to the horizontal plane, and the conical pipe portion is perpendicular to the horizontal plane. The smaller end (tip) of the pipe diameter faces the throat, the filter unit located in the outermost layer has an inlet, the level of the inlet is higher than the level of the bottom of the adjacent inner layer filter unit, and the filter unit located in the innermost layer has an inlet. The top of the straight pipe is an outlet, and the level of the outlet is higher than that of the inlet. In one embodiment, the inlet of the filter unit located at the outermost layer may be disposed in the center of the pipe portion, or may be disposed at the side of the pipe portion.
另須說明的是,於上述實施例中所示各水平高度Hx
是相對於水平面H的距離,換言之,若是將圖1所示微粒捕集系統100旋轉九十度設置,亦即使軸心C平行於水平面H時,上述各水平高度Hx
可改以其他位置為基準,例如,可改以進氣口111為基準。It should also be noted that the horizontal heights H x shown in the above-mentioned embodiments are the distances relative to the horizontal plane H. In other words, if the
綜上所述,本發明所提供之微粒捕集系統,以文氏管過濾裝置搭配旋風式過濾裝置及兩段式噴霧,經實做樣品驗證,可有效捕集氣體中粒徑小於2.5μm(微米)的粉塵,有利於解決製程產生之微粒廢氣排放入大氣環境之問題。To sum up, the particle capture system provided by the present invention uses a Venturi filter device, a cyclone filter device and a two-stage spray. It is verified by actual samples that it can effectively capture the particle size in the gas less than 2.5μm ( Micron) dust is beneficial to solve the problem of particulate exhaust gas generated by the process being discharged into the atmospheric environment.
雖然本發明已以實施例揭露如上,然其並非用以限定本發明,任何所屬技術領域中具有通常知識者,在不脫離本發明的精神和範圍內,當可作些許的更動與潤飾,故本發明的保護範圍當視後附的申請專利範圍所界定者為準。Although the present invention has been disclosed above by the embodiments, it is not intended to limit the present invention. Anyone with ordinary knowledge in the technical field can make some changes and modifications without departing from the spirit and scope of the present invention. Therefore, The protection scope of the present invention shall be determined by the scope of the appended patent application.
100:微粒捕集系統 10:文氏管過濾裝置 11:進氣部 111:進氣口 112:管體 113:蓋體 12:喉部 121:多孔性材料 13:出氣部 14:調整元件 141:錐部 15:調整齒輪組 151:第一齒輪組件 1511:第一齒輪 1512:第一桿體 152:第二齒輪組件 1521:第二齒輪 1522:第二桿體 16:收集桶 161:排水管 20,20E,20F,20G:旋風式過濾裝置 21,21B,21C,21D:第一過濾單元 211:第一直型管部 212:第一錐型管部 213:第一開口 214:第一下降管 215:第一錐部 216:第一料斗 217:第一錐部開口 22:第二過濾單元 221:第二直型管部 222:第二錐型管部 23,23B,23C,23D:第三過濾單元 231:第三直型管部 232:第三錐型管部 233:第三開口 234:第三下降管 235:第三錐部 236:第三料斗 237:第三錐部開口 24:第四過濾單元 241:第四直型管部 242:第四錐型管部 25:第五過濾單元 251:第五直型管部 252:第五錐型管部 26:第六過濾單元 261:第六直型管部 262:第六錐型管部 263:第六開口 27:子過濾單元 271:子直型管部 272:子錐型管部 273:子開口 274:子下降管 30:第一噴嘴 40:第二噴嘴 A, A1:氣體 C:軸心 H:水平面 H11 , H12 , H13 , H30 , H40 , H212 , H213 , H214 , H222 , H232 , H233 , H234 , H242 , H252 , H262 , H263 , H273 , H274 :水平高度 M1:第一水霧 M2:第二水霧100: Particulate capture system 10: Venturi filter device 11: Air inlet 111: Air inlet 112: Tube body 113: Cover body 12: Throat 121: Porous material 13: Air outlet 14: Adjustment element 141: Cone 15: Adjustment gear set 151: First gear assembly 1511: First gear 1512: First rod body 152: Second gear assembly 1521: Second gear 1522: Second rod body 16: Collection bucket 161: Drain pipe 20 , 20E, 20F, 20G: cyclone filter device 21, 21B, 21C, 21D: first filter unit 211: first straight pipe part 212: first tapered pipe part 213: first opening 214: first descending pipe 215: first cone part 216: first hopper 217: first cone part opening 22: second filter unit 221: second straight pipe part 222: second conical pipe part 23, 23B, 23C, 23D: third Filter unit 231: Third straight pipe portion 232: Third tapered pipe portion 233: Third opening 234: Third descending pipe 235: Third tapered portion 236: Third hopper 237: Third tapered portion opening 24: Third Four filter units 241: Fourth straight pipe part 242: Fourth tapered pipe part 25: Fifth filter unit 251: Fifth straight pipe part 252: Fifth conical pipe part 26: Sixth filter unit 261: No. Six straight pipe part 262: Sixth tapered pipe part 263: Sixth opening 27: Sub-filter unit 271: Sub-straight pipe part 272: Sub-conical pipe part 273: Sub-opening 274: Sub-down pipe 30: First Nozzle 40: Second Nozzle A, A1: Gas C: Axis H: Horizontal Surface H 11 , H 12 , H 13 , H 30 , H 40 , H 212 , H 213 , H 214 , H 222 , H 232 , H 233 , H 234 , H 242 , H 252 , H 262 , H 263 , H 273 , H 274 : Level M1: First water mist M2: Second water mist
圖1為本發明之一實施例之組合結構示意圖。 圖2A至2B為圖1實施例之進氣氣體與水霧流動方向之示意圖。 圖2B為圖1實施例之旋風式過濾裝置之進氣氣體與水霧流動方向之示意圖。 圖2C為圖2B之B-B剖面結構示意圖。 圖3為本發明之文氏管過濾裝置另一實施例之進氣氣體與水霧流動方向之示意圖。 圖4至圖7為圖1實施例之旋風式過濾裝置之過濾單元之不同實施例之結構示意圖。 圖8至圖10為本發明之旋風式過濾裝置之不同實施例之結構示意圖。 圖10A為圖10之C-C剖面結構示意圖。FIG. 1 is a schematic diagram of a combined structure of an embodiment of the present invention. 2A to 2B are schematic diagrams illustrating the flow directions of the intake gas and the water mist in the embodiment of FIG. 1 . FIG. 2B is a schematic diagram of the flow direction of the intake gas and the water mist of the cyclone filter device of the embodiment of FIG. 1 . FIG. 2C is a schematic diagram of the cross-sectional structure of FIG. 2B along B-B. 3 is a schematic diagram of the flow direction of the intake gas and the water mist in another embodiment of the venturi filter device of the present invention. 4 to 7 are schematic structural diagrams of different embodiments of the filter unit of the cyclone filter device of the embodiment of FIG. 1 . 8 to 10 are schematic structural diagrams of different embodiments of the cyclone filter device of the present invention. FIG. 10A is a schematic diagram of the cross-sectional structure of FIG. 10 taken along C-C.
100:微粒捕集系統100: Particulate capture system
10:文氏管過濾裝置10: Venturi filter device
11:進氣部11: Intake part
111:進氣口111: Air intake
12:喉部12: Throat
121:多孔性材料121: Porous Materials
13:出氣部13: Air outlet
14:調整元件14: Adjustment components
15:調整齒輪組15: Adjust the gear set
16:收集桶16: Collection Buckets
20:旋風式過濾裝置20: Cyclone filter device
30:第一噴嘴30: First Nozzle
40:第二噴嘴40: Second nozzle
C:軸心C: axis
H:水平面H: horizontal plane
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- 2020-11-13 TW TW109139767A patent/TWI788729B/en active
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TWI788729B (en) | 2023-01-01 |
TWM609892U (en) | 2021-04-01 |
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