TW202136677A - Gas supply apparatus having align function - Google Patents

Gas supply apparatus having align function Download PDF

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Publication number
TW202136677A
TW202136677A TW109131963A TW109131963A TW202136677A TW 202136677 A TW202136677 A TW 202136677A TW 109131963 A TW109131963 A TW 109131963A TW 109131963 A TW109131963 A TW 109131963A TW 202136677 A TW202136677 A TW 202136677A
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Taiwan
Prior art keywords
alignment
valve
gas supply
supply device
transfer
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TW109131963A
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Chinese (zh)
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TWI777241B (en
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朴用建
李祥煜
金容澈
徐徹教
金相鎮
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南韓商Ｋｃ股份有限公司
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/08—Mounting arrangements for vessels
    • F17C13/084—Mounting arrangements for vessels for small-sized storage vessels, e.g. compressed gas cylinders or bottles, disposable gas vessels, vessels adapted for automotive use
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/04—Arrangement or mounting of valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C1/00—Pressure vessels, e.g. gas cylinder, gas tank, replaceable cartridge
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/002—Details of vessels or of the filling or discharging of vessels for vessels under pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C7/00—Methods or apparatus for discharging liquefied, solidified, or compressed gases from pressure vessels, not covered by another subclass
    • F17C7/02—Discharging liquefied gases
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2201/00—Vessel construction, in particular geometry, arrangement or size
    • F17C2201/01—Shape
    • F17C2201/0104—Shape cylindrical
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/06—Controlling or regulating of parameters as output values
    • F17C2250/0605—Parameters
    • F17C2250/0678—Position or presence
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2270/00—Applications
    • F17C2270/05—Applications for industrial use
    • F17C2270/0518—Semiconductors
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30—Hydrogen technology
    • Y02E60/32—Hydrogen storage

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

The present invention provides a gas supply device equipped with an alignment function, which can proceed alignment when moving in a horizontal direction while being raised and lowered in a vertical direction, thereby preventing damage to the alignment portion. The gas supply device includes: an upper module, including a main board, which is fixed to the upper side of a valve part equipped at the upper end of the container; a lower module comprising a cover separation part, a connector fastening part, and a second alignment part, and capable of being raised and lowered in the vertical direction with respect to the upper module, wherein the cover separation part separates the cover covering the valve connector from the valve connector, the valve connector is equipped in the valve part. The connector fastening part connects the connecting pipe connector connected to the gas-demanding point to the valve connector. The second alignment part is combined with the first alignment part provided in the valve part when moving in the horizontal direction, so as to realize the alignment of the container.

Description

配備有對準功能的氣體供應裝置Equipped with gas supply device with alignment function

本發明涉及一種氣體供應裝置，尤其涉及一種當替換氣體儲存容器時能夠在將氣體儲存容器的閥連接器與連接於氣體需求處的連接配管連接器緊固之前對準氣體儲存容器的氣體供應裝置。The present invention relates to a gas supply device, in particular to a gas supply device that can align the gas storage container before tightening the valve connector of the gas storage container and the connecting pipe connector connected to the gas demand place when the gas storage container is replaced .

通常，對於向利用氣體的裝置（尤其，向諸如半導體設備等執行精密作業的氣體需求處）供應氣體的裝置而言，要求適合於各種目的的種類的氣體滿足預定的濃度和壓力等。Generally, for devices that supply gas to devices that use gas (especially, to gas demand locations that perform precision work such as semiconductor equipment), types of gases suitable for various purposes are required to meet predetermined concentrations and pressures.

為了進行有效的提供，許多種類的氣體在高壓狀態下進行保管，尤其，具有可燃性、毒性、腐蝕性等有害特性的氣體在與人類隔離的單獨的空間進行嚴格管理。In order to provide effective supply, many types of gases are stored under high pressure. In particular, gases with harmful properties such as flammability, toxicity, and corrosiveness are strictly managed in a separate space isolated from humans.

保管氣體的氣體儲存容器（以下，簡稱為「容器」）連接於氣體需求處，若保管在容器的氣體被全部消耗，則將連接於氣體需求處的連接配管從氣體容器的閥分離而替換容器之後，將連接於氣體需求處的連接配管連接器結合到替換後的容器的閥連接器而再次供應氣體。The gas storage container (hereinafter referred to as the "container") that stores the gas is connected to the gas demand site. If all the gas stored in the container is consumed, the connecting pipe connected to the gas demand site is separated from the valve of the gas container and the container is replaced After that, the connection piping connector connected to the gas demand point is coupled to the valve connector of the replaced container, and gas is supplied again.

在這樣替換容器的情況下，操作者必須將容器放置在容器裝載部的原位置，但是若沒有配備用於將容器放置到原位置的自動化裝置，則具有操作者難以將氣體桶準確地放置到原位置的問題。In the case of replacing the container in this way, the operator must place the container in the original position of the container loading part. However, if there is no automatic device for placing the container in the original position, it will be difficult for the operator to accurately place the gas barrel in the original position. The problem with the original location.

當然，若配備有自動化裝置，則能夠將容器放置到原位置，但是具有裝置的構成複雜且製造成本高的問題。Of course, if it is equipped with an automated device, the container can be placed in the original position, but there are problems in that the structure of the device is complicated and the manufacturing cost is high.

作為關於半導體設備的氣體供應裝置的現有技術，公開有韓國授權專利第10-0242982號。As a prior art related to a gas supply device for semiconductor equipment, Korean Granted Patent No. 10-0242982 is disclosed.

本發明是為瞭解決上述的各種問題而提出的，其目的在於提供一種能夠沿垂直方向升降的同時當水平方向移送時進行對準，從而能夠防止對準部破損的氣體供應裝置。The present invention is proposed to solve the above-mentioned various problems, and its object is to provide a gas supply device that can be raised and lowered in the vertical direction while being aligned when transported in the horizontal direction, thereby preventing damage to the alignment portion.

本發明的另一目的在於提供一種當水平方向移送時使對準部能夠進行旋轉，從而能夠實現更準確的對準的氣體供應裝置。Another object of the present invention is to provide a gas supply device that enables the alignment portion to rotate during horizontal transfer, so that more accurate alignment can be achieved.

用於達成上述目的的本發明的配備有對準功能的氣體供應裝置包括：上部模塊，配備有主板，所述主板固定設置在配備於容器上端的閥部的上側；下部模塊，包括蓋分離部、連接器緊固部和第二對準部，並且能夠相對於所述上部模塊沿垂直方向升降，其中，所述蓋分離部將覆蓋閥連接器的蓋從所述閥連接器分離，所述閥連接器配備於所述閥部所述連接器緊固部用於將連接於氣體需求處的連接配管連接器連接到所述閥連接器，所述第二對準部當水平方向移送時通過與配備於所述閥部的第一對準部結合而實現所述容器的對準。The gas supply device equipped with an alignment function of the present invention for achieving the above-mentioned object includes: an upper module equipped with a main board fixedly arranged on the upper side of a valve part provided at the upper end of the container; and a lower module including a lid separating part , The connector fastening part and the second alignment part, and can be raised and lowered in a vertical direction relative to the upper module, wherein the cover separating part separates the cover covering the valve connector from the valve connector, the The valve connector is provided in the valve part. The connector fastening part is used to connect the connecting pipe connector connected to the gas demand point to the valve connector. The second alignment part passes through when moving in the horizontal direction. The alignment of the container is realized by combining with the first alignment portion provided on the valve portion.

所述第一對準部和第二對準部中的任意一個可以由具有水平方向的長度的銷形狀的對準銷構成，其餘一個由供所述對準銷***的對準銷***槽構成。Either one of the first alignment portion and the second alignment portion may be constituted by a pin-shaped alignment pin having a length in the horizontal direction, and the remaining one may be constituted by an alignment pin insertion groove into which the alignment pin is inserted .

所述第二對準部可以與配備於所述下部模塊的外側的側面殼體結合。The second alignment part may be combined with a side housing provided on the outer side of the lower module.

在所述側面殼體可以結合有對準塊，所述第二對準部在所述對準塊配備於朝向所述閥部的面。An alignment block may be combined with the side shell, and the second alignment portion is provided on a surface facing the valve portion in the alignment block.

所述第一對準部可以配備於與所述閥部結合的固定塊，所述固定塊包括：第一固定塊和第二固定塊，所述第一固定塊和第二固定塊以如下方式包圍所述閥部：使得使用於管制氣體的供應的閥開閉的手柄向上部暴露，使所述閥連接器向所述連接配管連接器所在的方向暴露，所述第一固定塊具有水平方向的長度，並且所述水平方向的一側部包圍所述閥部，在所述水平方向的另一側部配備有所述第一對準部。The first aligning part may be equipped with a fixed block combined with the valve part, the fixed block includes: a first fixed block and a second fixed block, the first fixed block and the second fixed block are as follows Surrounding the valve part: the handle for opening and closing the valve used for the supply of controlled gas is exposed to the upper part, the valve connector is exposed in the direction where the connecting pipe connector is located, and the first fixing block has a horizontal direction Length, and one side part in the horizontal direction surrounds the valve part, and the first alignment part is provided on the other side part in the horizontal direction.

用於結合到在所述固定塊鄰近於所述第一對準部而配備的第一結合部的第二結合部可以配備於所述下部模塊，當所述第一對準部與第二對準部結合時，所述第一結合部與第二結合部結合，從而保持所述固定塊與所述下部模塊的結合狀態。The second coupling portion for coupling to the first coupling portion provided on the fixing block adjacent to the first alignment portion may be provided on the lower module, when the first alignment portion and the second pair When the standard part is combined, the first joint part is combined with the second joint part, so as to maintain the joint state of the fixing block and the lower module.

在所述下部模塊可以結合有對準塊，所述第二結合部由配備於所述對準塊且朝向所述第一結合部凸出的固定塊結合部件構成，所述第一結合部由形成於所述固定塊而使所述固定塊結合部件***的固定槽構成，若所述固定塊結合部件***到所述固定槽，則所述固定塊結合部件被防止從所述固定槽脫離，若供應空氣，則所述固定塊結合部件能夠從所述固定槽脫離。The lower module may be combined with an alignment block, and the second coupling portion is composed of a fixed block coupling member equipped on the alignment block and protruding toward the first coupling portion, and the first coupling portion is composed of The fixing block is formed in the fixing block and the fixing block coupling member is inserted into the fixing groove, and if the fixing block coupling member is inserted into the fixing groove, the fixing block coupling member is prevented from detaching from the fixing groove, If air is supplied, the fixing block coupling member can be detached from the fixing groove.

所述下部模塊可以配備為能夠相對於所述上部模塊沿水平方向旋轉。The lower module may be equipped to be able to rotate in a horizontal direction with respect to the upper module.

所述下部模塊的上部與所述上部模塊的下部可以通過固定銷結合，在所述下部模塊和上部模塊中的任意一個結合有引導銷，在其餘一個形成有圓弧形狀的引導槽，以使所述引導銷***所述引導槽而能夠以所述固定銷為旋轉中心旋轉。The upper part of the lower module and the lower part of the upper module may be combined by a fixing pin, a guide pin is combined with any one of the lower module and the upper module, and an arc-shaped guide groove is formed in the other one to make The guide pin is inserted into the guide groove and can be rotated about the fixed pin as a rotation center.

在所述上部模塊可以配備有：一對移送引導件，用於沿垂直方向移送所述下部模塊；一對移送引導件支撐部件，結合於所述一對移送引導件的下部，其中，所述一對移送引導件支撐部件中的一側的移送引導件支撐部件與所述下部模塊通過所述固定銷結合，在形成於另一側的移送引導件支撐部件的所述引導槽***有結合於所述下部模塊的引導銷。The upper module may be equipped with: a pair of transfer guides for transferring the lower module in a vertical direction; a pair of transfer guide support members coupled to the lower part of the pair of transfer guides, wherein the The transfer guide support member on one side of the pair of transfer guide support members is coupled to the lower module by the fixing pin, and the guide groove of the transfer guide support member formed on the other side is inserted and coupled to The guide pin of the lower module.

所述下部模塊可以相對於所述上部模塊能夠沿水平方向旋轉的同時直線移動。The lower module may move linearly while being able to rotate in a horizontal direction relative to the upper module.

在所述上部模塊可以配備有：第一移送引導件，為了引導所述下部模塊沿作為水平方向中的任意一個的第一方向移送而配備；第二移送引導件，用於引導所述下部模塊沿水平方向中的與第一方向垂直的第二方向移送。The upper module may be equipped with: a first transfer guide to guide the lower module to be transferred in any one of the horizontal directions; and a second transfer guide to guide the lower module It is transported in a second direction perpendicular to the first direction in the horizontal direction.

所述主板、中間板、下部板可以配備為從上部向下部彼此隔開，所述第一移送引導件配備於所述主板與中間板之間，所述第二移送引導件配備於所述中間板與下部板之間。The main plate, the middle plate, and the lower plate may be equipped to be spaced apart from the upper part to the lower part, the first transfer guide is provided between the main plate and the middle plate, and the second transfer guide is provided in the middle Between the board and the lower board.

在所述上部模塊可以配備有：第三移送引導件，用於引導所述下部模塊沿垂直方向移送。The upper module may be equipped with a third transfer guide for guiding the lower module to be transferred in a vertical direction.

在所述第三移送引導件可以配備有用於對垂直方向移送進行制動的垂直方向制動部。The third transfer guide may be provided with a vertical direction stopper for braking the vertical direction transfer.

可以配備有用於對所述水平方向中的至少任意一個直線方向移送進行制動的水平方向制動部。It may be equipped with a horizontal direction braking part for braking at least any one of the linear directions of the horizontal directions.

在所述下部模塊可以配備有：移送機構，用於相對於所述閥部沿前後方向和左右方向一體地移送所述蓋分離部和連接器緊固部；旋轉機構，用於使所述蓋分離部和連接器緊固部旋轉，並且配備有：控制部，用於控制所述移送機構的移送及所述旋轉機構的旋轉。The lower module may be equipped with: a transfer mechanism for integrally transferring the cover separating part and the connector fastening part in the front-rear direction and the left-right direction relative to the valve part; and a rotating mechanism for making the cover The separation part and the connector fastening part rotate, and are equipped with a control part for controlling the transfer of the transfer mechanism and the rotation of the rotation mechanism.

根據本發明，下部模塊能夠沿垂直方向升降的同時，當水平方向移送時進行對準，從而能夠防止對準部破損。According to the present invention, while the lower module can be raised and lowered in the vertical direction, it can be aligned while being transferred in the horizontal direction, so that the alignment portion can be prevented from being damaged.

並且，下部模塊相對於上部模塊可旋轉，從而能夠實現更準確的對準。In addition, the lower module is rotatable relative to the upper module, so that more accurate alignment can be achieved.

並且，即使操作者未將容器置於容器裝載部的準確位置也能夠實現容器的準確對準，因此作業便利。In addition, even if the operator does not place the container in the exact position of the container loading part, the container can be accurately aligned, so the operation is convenient.

以下，參照附圖對本發明進行詳細說明。Hereinafter, the present invention will be described in detail with reference to the drawings.

在此，對方向進行命名時，將圖1所示的X軸稱為前後方向，Y軸稱為左右方向，Z軸稱為垂直方向。並且，水平方向包括由XY平面構成的所述左右方向和前後方向。Here, when naming the directions, the X-axis shown in FIG. 1 is referred to as the front-rear direction, the Y-axis is referred to as the left-right direction, and the Z-axis is referred to as the vertical direction. In addition, the horizontal direction includes the left-right direction and the front-rear direction constituted by the XY plane.

參照圖1，本發明的配備有對準功能的氣體供應裝置1構成為包括：上部模塊2，配備有主板211，所述主板211固定設置在從配備於容器10上端的閥部向上側隔開的位置固定設置；下部模塊3，配備於所述上部模塊2的下部，能夠相對於所述上部模塊2沿垂直方向升降，並且包括第二對準部351（圖4），該第二對準部351當水平方向移送時通過與配備於所述容器10側的第一對準部530（圖2）結合而實現所述容器10的對準。1, the gas supply device 1 equipped with the alignment function of the present invention is configured to include: an upper module 2 equipped with a main board 211 fixedly arranged on the upper side from a valve portion provided on the upper end of the container 10 The position is fixed; the lower module 3, equipped at the lower part of the upper module 2, can be raised and lowered in the vertical direction relative to the upper module 2, and includes a second alignment portion 351 (Figure 4), the second alignment The part 351 is combined with the first aligning part 530 (FIG. 2) provided on the side of the container 10 to realize the alignment of the container 10 when being transferred in the horizontal direction.

參照圖2，所述容器10作為用於儲存並供應向半導體裝置等氣體需求處供應的工藝氣體的構成，在容器10的上部配備有所述閥部。Referring to FIG. 2, the container 10 serves as a structure for storing and supplying process gas supplied to gas demand locations such as semiconductor devices, and the valve portion is provided on the upper portion of the container 10.

所述閥部構成為包括：閥20，用於管制氣體的供應；閥連接器30，配備於所述閥20的一側而緊固於連接器緊固部330；蓋31，覆蓋所述閥連接器30；閥閘（Valve Shutter）40，開閉所述閥20；手柄50，連接於所述閥閘40的上部，通過旋轉而使閥閘40升降，從而開閉閥20。The valve portion is configured to include: a valve 20 for the supply of controlled gas; a valve connector 30 provided on one side of the valve 20 and fastened to the connector fastening portion 330; and a cover 31 covering the valve Connector 30; valve gate (Valve Shutter) 40, open and close the valve 20; handle 50, connected to the upper part of the valve gate 40, by rotating the valve gate 40 up and down, thereby opening and closing the valve 20.

在所述閥部結合有固定塊510、520。在所述固定塊510、520配備有所述第一對準部530。Fixed blocks 510 and 520 are combined with the valve part. The fixing blocks 510 and 520 are equipped with the first alignment part 530.

所述固定塊510、520可以包括包圍所述閥部的第一固定塊510和第二固定塊520。The fixing blocks 510 and 520 may include a first fixing block 510 and a second fixing block 520 surrounding the valve part.

若通過所述第一固定塊510與第二固定塊520的結合而包圍所述閥部，則所述閥部中的所述閥連接器30及蓋31相對於所述固定塊510、520向側方向凸出並暴露，所述閥部中的所述手柄50相對於所述固定塊510、520向上方凸出並暴露。If the valve portion is surrounded by the combination of the first fixing block 510 and the second fixing block 520, the valve connector 30 and the cover 31 in the valve portion are oriented toward the fixing blocks 510 and 520. The side direction protrudes and is exposed, and the handle 50 in the valve part protrudes upwards and is exposed relative to the fixing blocks 510 and 520.

所述第一固定塊510具有水平方向的長度，並且所述水平方向的一側部包圍所述閥部，在所述水平方向的另一側部配備有所述第一對準部530。The first fixing block 510 has a length in the horizontal direction, and one side of the horizontal direction surrounds the valve portion, and the other side of the horizontal direction is equipped with the first alignment portion 530.

所述第一固定塊510的一側部形成有槽以***述閥部，在所述槽***述閥部的狀態下，利用所述第二固定塊520包圍所述閥部，之後利用結合銷540使第一固定塊510與第二固定塊520保持結合的狀態。A groove is formed on one side of the first fixing block 510 to accommodate the valve portion. In a state where the valve portion is accommodated in the groove, the valve portion is surrounded by the second fixing block 520, and then used The coupling pin 540 keeps the first fixing block 510 and the second fixing block 520 in a coupled state.

所述第一對準部530可以由從所述第一固定塊510的側面向作為與所述閥連接器30相同的方向的X軸方向凸出而具有水平方向的長度的對準銷530構成。The first alignment portion 530 may be composed of an alignment pin 530 that protrudes from the side surface of the first fixing block 510 in the X-axis direction, which is the same direction as the valve connector 30, and has a length in the horizontal direction. .

所述第二對準部351可以由形成於後文所述的下部模塊3的對準塊350（圖4）的對準銷***槽351構成。The second alignment portion 351 may be constituted by an alignment pin insertion groove 351 formed in an alignment block 350 (FIG. 4) of the lower module 3 described later.

通過使所述對準銷530***到所述對準銷***槽351而實現所述容器10的對準。The alignment of the container 10 is achieved by inserting the alignment pin 530 into the alignment pin insertion groove 351.

在本實施例中，以第一對準部530由對準銷構成，且第二對準部351由對準銷***槽構成的情形為例進行了說明，然而也可以是第一對準部由對準銷***槽構成，使第二對準部由對準銷構成。In this embodiment, the case where the first alignment portion 530 is composed of an alignment pin and the second alignment portion 351 is composed of an alignment pin insertion groove has been described as an example. However, it may also be the first alignment portion. It is constituted by an alignment pin insertion groove, and the second alignment portion is constituted by an alignment pin.

並且，在本實施例中，以對準銷***到對準銷***槽的情形為例進行了說明，然而並不侷限於此，也可以構成為第一對準部與第二對準部緊固或結合的結構。將所述第一對準部與第二對準部***、緊固、結合的方式統稱定義為「結合」。In addition, in this embodiment, a case where the alignment pin is inserted into the alignment pin insertion groove has been described as an example, but it is not limited to this, and the first alignment portion and the second alignment portion may be configured to be tight. Solid or bonded structure. The methods of inserting, fastening, and coupling the first alignment portion and the second alignment portion are collectively referred to as "combination".

所述第一固定塊510在與所述第一對準部530鄰近的位置配備有第一結合部511。與所述第一結合部511實現結合的第二結合部352配備於所述下部模塊3。The first fixing block 510 is equipped with a first coupling portion 511 at a position adjacent to the first alignment portion 530. The second coupling portion 352 that is coupled with the first coupling portion 511 is provided in the lower module 3.

所述第一結合部511可以由固定槽511構成，所述固定槽511在所述第一固定塊510中的與形成所述第一對準部530的面相同的面沿X軸方向凹陷而形成。The first coupling portion 511 may be constituted by a fixing groove 511, and the fixing groove 511 is recessed in the X-axis direction on the same surface of the first fixing block 510 as the surface on which the first alignment portion 530 is formed. form.

所述第二結合部352可以由固定塊結合部件352構成，所述固定塊結合部件352在與所述第二對準部351鄰近的位置的對準塊350朝向所述第一結合部511凸出。The second coupling portion 352 may be composed of a fixing block coupling member 352, and the alignment block 350 of the fixing block coupling member 352 at a position adjacent to the second alignment portion 351 protrudes toward the first coupling portion 511 out.

在所述固定塊結合部件352的外側面配備有多個凸起352a，所述多個凸起352a被配備於內部的彈簧（未圖示）彈性支撐。在所述固定槽511的內部形成有供所述凸起352a***的凸起***槽（未圖示）。若所述固定塊結合部件352***到所述固定槽511，則所述凸起352a***到所述凸起***槽，從而可以防止所述固定塊結合部件352從所述固定槽511脫離，進而保持所述下部模塊3結合於所述第一固定塊510的狀態。A plurality of protrusions 352a are provided on the outer side surface of the fixed block coupling member 352, and the plurality of protrusions 352a are elastically supported by a spring (not shown) provided inside. A protrusion insertion groove (not shown) into which the protrusion 352a is inserted is formed in the fixing groove 511. If the fixing block coupling part 352 is inserted into the fixing groove 511, the protrusion 352a is inserted into the protrusion insertion groove, thereby preventing the fixing block coupling part 352 from being detached from the fixing groove 511, and thereby The state of the lower module 3 coupled to the first fixing block 510 is maintained.

在從固定槽511拔出所述固定塊結合部件352的情況下，若供應空氣（air）而使所述凸起352a克服所述彈簧的彈力並從固定塊結合部件352的表面進入到內側，則所述凸起352a從所述凸起***槽脫離。據此，所述固定塊結合部件352可以從固定槽511脫離。When the fixing block coupling member 352 is pulled out from the fixing groove 511, if air is supplied to cause the protrusion 352a to overcome the elastic force of the spring and enter the inner side from the surface of the fixing block coupling member 352, Then the protrusion 352a is separated from the protrusion insertion groove. Accordingly, the fixing block coupling member 352 can be detached from the fixing groove 511.

參照圖3，在所述上部模塊2配備有所述主板211、中間板212、下部板213、第一移送引導件220、第二移送引導件230、第三移送引導件241、242。3, the upper module 2 is equipped with the main board 211, the middle board 212, the lower board 213, the first transfer guide 220, the second transfer guide 230, and the third transfer guides 241 and 242.

所述主板211構成為平板形狀，結合於諸如未圖示的櫃體等位置被固定的相對物。The main board 211 is formed in a flat plate shape, and is coupled to a fixed counterpart such as a cabinet not shown in the figure.

所述中間板212構成為平板形狀並配備為與所述主板211的下部隔開。所述下部板213構成為平板形狀並配備為與所述中間板212的下部隔開。The intermediate board 212 is configured in a flat plate shape and is provided to be spaced apart from the lower portion of the main board 211. The lower plate 213 is configured in a flat plate shape and is provided to be spaced apart from the lower part of the middle plate 212.

所述第一移送引導件220可以配備於所述主板211與中間板212之間，由如下的LM引導件構成：引導包括所述中間板212、第二移送引導件230、下部板213及下部模塊3在內的所有連接於所述中間板212的下部的部件使其沿作為水平方向的Y軸方向（第一方向）移送。The first transfer guide 220 may be provided between the main plate 211 and the middle plate 212, and is composed of the following LM guide: the guide includes the middle plate 212, the second transfer guide 230, the lower plate 213, and the lower part. All the components connected to the lower part of the intermediate plate 212 including the module 3 are moved along the Y-axis direction (first direction) which is a horizontal direction.

所述第二移送引導件230可以配備於所述中間板212與下部板213之間，由如下的LM引導件構成：引導包括所述下部板213及下部模塊3在內的所有連接於所述下部板213的下部的部件使其沿作為水平方向的與Y軸垂直的X軸方向（第二方向）移送。The second transfer guide 230 may be provided between the middle plate 212 and the lower plate 213, and is composed of the following LM guide: guiding all connections including the lower plate 213 and the lower module 3 to the The lower part of the lower plate 213 is moved in the X-axis direction (second direction) perpendicular to the Y-axis as the horizontal direction.

在所述下部板213結合有一對移送引導件結合板243、244，在所述一對移送引導件結合板243、244配備有一對第三移送引導件241、242。A pair of transfer guide coupling plates 243, 244 are coupled to the lower plate 213, and a pair of third transfer guides 241, 242 are provided to the pair of transfer guide coupling plates 243, 244.

所述一對移送引導件結合板243、244在所述下部板213的一側和另一側彼此對向而配備，並且構成為具有上下方向的長度的板形狀。The pair of transfer guide coupling plates 243 and 244 are provided on one side and the other side of the lower plate 213 to face each other, and are configured in a plate shape having a length in the vertical direction.

在所述第三移送引導件241、242的下部結合有所述下部模塊3，所述第三移送引導件241、242可以由引導所述下部模塊3使其沿垂直方向移送的LM引導件構成。The lower module 3 is coupled to the lower part of the third transfer guides 241, 242, and the third transfer guides 241, 242 may be constituted by LM guides that guide the lower module 3 to be transferred in the vertical direction .

在所述一對第三移送引導件241、242的下端部結合有一對移送引導件支撐部件251、252。A pair of transfer guide support members 251, 252 are coupled to the lower ends of the pair of third transfer guides 241, 242.

在所述第一移送引導件至第三移送引導件220、230、241、242未連接有驅動結構，而僅起到使操作者能夠手動移送的引導功能。即，若操作者用手抓持下部模塊3而沿X軸、Y軸、Z軸方向施加力，則下部模塊3在施加力的方向上沿各個移送引導件被移送。The first to third transfer guides 220, 230, 241, and 242 are not connected with a driving structure, but only serve as a guide function that enables the operator to manually transfer. That is, if the operator grasps the lower module 3 by hand and applies force in the X-axis, Y-axis, and Z-axis directions, the lower module 3 is transferred along the respective transfer guides in the direction in which the force is applied.

另外，在所述第一移送引導件至第三移送引導件220、230、241、242可以配備有起到制動功能的制動部。In addition, the first to third transfer guides 220, 230, 241, and 242 may be equipped with a braking part having a braking function.

可以配備有執行如下制動功能的水平方向制動部（未圖示）：在被所述第一移送引導件220引導而沿第一方向移送的情況下，在特定位置保持停止狀態。並且，可以配備有執行如下制動功能的水平方向制動部（未圖示）：在被所述第二移送引導件230引導而沿第二方向移送的情況下，在特定位置保持停止狀態。並且，可以配備有執行如下制動功能的垂直方向制動部260：在借助於所述第三移送引導件241、242沿垂直方向移送的情況下，在特定位置保持停止狀態。It may be equipped with a horizontal direction braking part (not shown) that performs a braking function that maintains a stopped state at a specific position while being guided by the first transfer guide 220 and transferred in the first direction. In addition, it may be equipped with a horizontal direction braking portion (not shown) that performs a braking function that maintains a stopped state at a specific position when guided by the second transfer guide 230 and transferred in the second direction. In addition, the vertical direction braking portion 260 may be equipped with a braking function that maintains a stopped state at a specific position when being moved in the vertical direction by means of the third transfer guides 241 and 242.

在這種情況下，所述水平方向制動部可以分別配備於所述第一移送引導件220和第二移送引導件230，也可以僅配備於所述第一移送引導件220和第二移送引導件230這兩個中的任意一個。優選地可以構成為，所述水平方向制動部僅配備於所述第一移送引導件220而不配備於所述第二移送引導件230，對於所述第二方向的制動而言，通過所述第一結合部511與第二結合部352的結合而保持固定狀態。In this case, the horizontal direction stopper may be provided in the first transfer guide 220 and the second transfer guide 230, or may be provided only in the first transfer guide 220 and the second transfer guide. Piece 230 Either of these two. Preferably, the horizontal direction braking portion is provided only on the first transfer guide 220 and not on the second transfer guide 230, and for the second direction braking, the The combination of the first coupling portion 511 and the second coupling portion 352 maintains a fixed state.

所述水平方向制動部和垂直方向制動部260可以構成為在利用彈簧（未圖示）的按壓力抓持LM引導件的軌道的狀態下保持制動力，若供應空氣（air）而從軌道去除所述彈簧的按壓力，則解除制動力。The horizontal direction braking portion and the vertical direction braking portion 260 may be configured to hold the braking force in a state where the rail of the LM guide is held by the pressing force of a spring (not shown), and is removed from the rail if air is supplied. The pressing force of the spring releases the braking force.

可以配備有用於施加所述水平方向制動部和垂直方向制動部260的操作信號的制動開關（未圖示）。若處於操作者按壓所述制動開關的狀態，則所述水平方向制動部和垂直方向制動部260的制動力被解除，從而下部模塊3能夠被第一移送引導件220和第三移送引導件241、242引導而沿Y軸及Z軸方向自由移動。在操作者從制動開關拿開手的瞬間，開關借助於彈簧的力自動恢復，從而被施加所述水平方向制動部和垂直方向制動部260的制動力，進而下部模塊3可以不發生移動而保持被固定的狀態。A brake switch (not shown) for applying operation signals of the horizontal direction braking portion and the vertical direction braking portion 260 may be provided. If the operator presses the brake switch, the braking force of the horizontal direction braking portion and the vertical direction braking portion 260 is released, so that the lower module 3 can be controlled by the first transfer guide 220 and the third transfer guide 241 , 242 guide and move freely along the Y-axis and Z-axis directions. When the operator removes his hand from the brake switch, the switch is automatically restored by the force of the spring, and the braking force of the horizontal braking portion and vertical braking portion 260 is applied, so that the lower module 3 can be held without moving The state of being fixed.

所述一對移送引導件支撐部件251、252其截面為「└」字形狀，且配備為彼此對向，從而成為對稱的形狀。所述移送引導件支撐部件251、252的主體部251a、252a的上端部結合於所述第三移送引導件241、242的下端部，下端部結合於下部模塊3的上端部。The pair of transfer guide support members 251 and 252 have a cross-section of a "└" shape, and are arranged to face each other, thereby becoming a symmetrical shape. The upper end portions of the main body portions 251 a and 252 a of the transfer guide support members 251 and 252 are connected to the lower end portions of the third transfer guides 241 and 242, and the lower end portions are connected to the upper end portion of the lower module 3.

所述一側的移送引導件支撐部件251的底部251b與所述下部模塊3通過固定銷253結合。所述固定銷253以相對於所述移送引導件支撐部件251可自轉的方式結合於所述移送引導件支撐部件251。The bottom 251 b of the transfer guide support member 251 on the one side is connected to the lower module 3 by a fixing pin 253. The fixing pin 253 is coupled to the transfer guide support member 251 so as to be rotatable relative to the transfer guide support member 251.

在所述另一側的移送引導件支撐部件252的底部252b形成有圓弧形狀的引導件槽252c，並且結合於所述下部模塊3上部的引導銷254***到所述引導件槽252c。所述引導銷254設計為在所述引導件槽252c內部可移動。An arc-shaped guide groove 252c is formed on the bottom 252b of the transfer guide support member 252 on the other side, and a guide pin 254 coupled to the upper part of the lower module 3 is inserted into the guide groove 252c. The guide pin 254 is designed to be movable inside the guide groove 252c.

若如上所述地構成，則當操作者向下部模塊3沿旋轉的方向施加力時，下部模塊3將以所述固定銷253為旋轉中心旋轉。在這種情況下，所述引導銷254在引導件槽252c內被引導，進而旋轉角度被限制。If configured as described above, when the operator applies a force to the lower module 3 in the direction of rotation, the lower module 3 will rotate with the fixed pin 253 as the rotation center. In this case, the guide pin 254 is guided in the guide groove 252c, and the rotation angle is restricted.

參照圖4，在所述下部模塊3配備有多個殼體311、312、313、蓋分離部320、連接器緊固部330、移送機構340、對準塊350、插頭模塊360、墊片供應部370及旋轉機構380（圖1）。4, the lower module 3 is equipped with a plurality of housings 311, 312, 313, a cover separation part 320, a connector fastening part 330, a transfer mechanism 340, an alignment block 350, a plug module 360, a gasket supply Section 370 and rotating mechanism 380 (Figure 1).

所述多個殼體311、312、313包括：上部殼體311，以板形狀配備於所述下部模塊3的上部；第一側面殼體312和第二側面殼體313，分別結合於所述上部殼體311的兩側。The plurality of housings 311, 312, and 313 include: an upper housing 311, which is provided on the upper part of the lower module 3 in the shape of a plate; a first side housing 312 and a second side housing 313, respectively coupled to the Both sides of the upper housing 311.

在所述上部殼體311結合有上部模塊2的固定銷253和引導銷254。所述上部殼體311、第一側面殼體312、第二側面殼體313配備為包圍所述下部模塊3的上部及外側周圍的一部分。The fixing pin 253 and the guide pin 254 of the upper module 2 are coupled to the upper housing 311. The upper housing 311, the first side housing 312, and the second side housing 313 are equipped to surround a part of the upper and outer periphery of the lower module 3.

所述蓋分離部320將覆蓋閥連接器30的蓋31從所述閥連接器30分離，其中，所述閥連接器30配備於所述閥部。The cover separating part 320 separates the cover 31 covering the valve connector 30 from the valve connector 30, wherein the valve connector 30 is provided in the valve part.

所述蓋分離部320形成有槽，使得所述蓋31***到內部，若在所述蓋31***到所述蓋分離部320的槽的狀態下驅動所述旋轉機構380而使所述蓋分離部320旋轉，則所述蓋31從所述閥連接器30分離。與此相反，可以驅動所述旋轉機構380而將從所述蓋分離部320分離的蓋31結合到所述閥連接器30。The cover separating part 320 is formed with a groove so that the cover 31 is inserted into the inside. If the cover 31 is inserted into the groove of the cover separating part 320, the rotating mechanism 380 is driven to separate the cover When the part 320 rotates, the cover 31 is separated from the valve connector 30. In contrast to this, the rotation mechanism 380 may be driven to couple the cover 31 separated from the cover separation part 320 to the valve connector 30.

所述連接器緊固部330配備為能夠將連接於氣體需求處的連接配管連接器331結合於所述閥連接器30。若在所述連接器緊固部330與閥連接器30連接的狀態下開放閥20，則容器10內部的氣體通過閥連接器30和連接配管連接器331向氣體需求處供應。The connector fastening portion 330 is equipped to be capable of coupling a connection pipe connector 331 connected to a gas demand location to the valve connector 30. If the valve 20 is opened in a state where the connector fastening portion 330 is connected to the valve connector 30, the gas inside the container 10 is supplied to the gas demanding place through the valve connector 30 and the connection piping connector 331.

所述移送機構340將所述蓋分離部320和連接器緊固部330一體地沿左右方向（Y軸方向）和前後方向（X軸方向）移送。The transfer mechanism 340 integrally transfers the cover separation part 320 and the connector fastening part 330 in the left-right direction (Y-axis direction) and the front-rear direction (X-axis direction).

所述移送機構340可以包括：第一移送機構，用於將所述蓋分離部320和連接器緊固部330一體地沿前後方向移送；第二移送機構，用於將所述蓋分離部320和連接器緊固部330一體地沿左右方向移送。The transfer mechanism 340 may include: a first transfer mechanism for integrally transferring the cover separating portion 320 and the connector fastening portion 330 in the front-rear direction; and a second transfer mechanism for transferring the cover separating portion 320 It is moved in the left-right direction integrally with the connector fastening part 330.

所述第一移送機構可以包括用於沿前後方向進行移送的移送引導件和通過供應空氣（air）而施加移送力的氣缸。並且，所述第二移送機構可以包括用於沿左右方向進行移送的移送引導件和通過供應空氣（air）而施加移送力的氣缸。The first transfer mechanism may include a transfer guide for transferring in the front-rear direction and an air cylinder that applies a transfer force by supplying air. In addition, the second transfer mechanism may include a transfer guide for transferring in the left-right direction and an air cylinder that applies a transfer force by supplying air.

所述旋轉機構380使所述蓋分離部320和連接器緊固部330旋轉。所述旋轉機構380包括發生旋轉力的馬達和減速器，並且包括用於向所述蓋分離部320和連接器緊固部330傳遞所述旋轉力的旋轉傳遞部件。The rotation mechanism 380 rotates the cover separation part 320 and the connector fastening part 330. The rotation mechanism 380 includes a motor and a speed reducer that generate a rotation force, and includes a rotation transmission member for transmitting the rotation force to the cover separation part 320 and the connector fastening part 330.

所述旋轉傳遞部件分別向蓋分離部320和連接器緊固部330傳遞所述旋轉力，若所述馬達驅動，則所述蓋分離部320和連接器緊固部330將同時旋轉。與此不同，所述旋轉機構380也可以構成為配備有兩個馬達，並且利用所述兩個馬達使得所述蓋分離部320和連接器緊固部330分別旋轉。The rotation transmission member transmits the rotation force to the cover separation part 320 and the connector fastening part 330 respectively, and if the motor is driven, the cover separation part 320 and the connector fastening part 330 will rotate at the same time. Unlike this, the rotation mechanism 380 may also be configured to be equipped with two motors, and the cover separation part 320 and the connector fastening part 330 are respectively rotated by the two motors.

配備有控制部，所述控制部用於控制包括所述移送機構340和所述旋轉機構380在內的本發明的整個氣體供應裝置1。Equipped with a control unit for controlling the entire gas supply device 1 of the present invention including the transfer mechanism 340 and the rotation mechanism 380.

所述對準塊350在所述第二側面殼體313的前方端部以凸出的方式結合，並且構成為大致四角筒形狀。在所述對準塊350的前方表面形成有作為第二對準部351的對準銷***槽351，在所述對準銷***槽351的下側，作為所述第二結合部352的固定塊結合部件352形成為朝向所述閥部凸出的形狀。The alignment block 350 is combined in a protruding manner at the front end of the second side shell 313 and is formed into a substantially rectangular tube shape. An alignment pin insertion groove 351 as a second alignment portion 351 is formed on the front surface of the alignment block 350, and the lower side of the alignment pin insertion groove 351 serves as a fixation for the second coupling portion 352 The block coupling member 352 is formed in a shape protruding toward the valve portion.

參照圖4和圖5，對插頭模塊360和墊片供應部370進行說明。4 and 5, the plug module 360 and the gasket supply part 370 will be described.

所述插頭模塊360構成為包括：插頭361，為了在閥連接器30與連接器緊固部330未緊固的狀態下防止異物流入到連接器緊固部330內部而結合於連接器緊固部330；插頭支撐部件362，用於支撐所述插頭361的端部；插頭支撐殼體363，結合併支撐所述插頭支撐部件362；插頭移送引導件364，用於將所述插頭361、插頭支撐部件362及插頭支撐殼體363一體地沿前後方向移送；插頭模塊支撐台314，結合併支撐所述插頭移送引導件364，並且結合於所述上部殼體311。The plug module 360 is configured to include a plug 361, which is coupled to the connector tightening portion in order to prevent foreign substances from entering the connector tightening portion 330 when the valve connector 30 and the connector tightening portion 330 are not tightened. 330; plug support member 362, used to support the end of the plug 361; plug support housing 363, combined and support the plug support member 362; plug transfer guide 364, used to support the plug 361, the plug The component 362 and the plug support housing 363 are integrally transferred in the front-to-rear direction; the plug module support platform 314 combines and supports the plug transfer guide 364, and is coupled to the upper housing 311.

所述墊片供應部370用於當替換容器10時在所述連接配管連接器331安裝新的墊片，構成為包括：墊片抓持器372，抓持墊片371；墊片收容部373，收容多個墊片371；墊片移送機構374，為了將收容於所述墊片收容部373的墊片371安裝到所述連接配管連接器331而進行移送。所述墊片移送機構374配備為在所述墊片抓持器372抓持有墊片371的狀態下沿Y軸方嚮往返移動。The gasket supply part 370 is used to install a new gasket on the connecting pipe connector 331 when the container 10 is replaced, and is configured to include: a gasket gripper 372, a gripping gasket 371, and a gasket receiving part 373 , Accommodating a plurality of gaskets 371; a gasket transfer mechanism 374 for attaching the gasket 371 accommodated in the gasket accommodating portion 373 to the connection piping connector 331 for transfer. The shim transfer mechanism 374 is equipped to move back and forth in the Y-axis direction in a state in which the shim gripper 372 grips the shim 371.

參照圖6至圖11對根據本發明的氣體供應裝置的操作進行說明。The operation of the gas supply device according to the present invention will be described with reference to FIGS. 6 to 11.

首先，為了替換容器10，將容器10裝載於容器裝載部（未圖示）上。First, in order to replace the container 10, the container 10 is loaded on a container loading part (not shown).

接下來，操作者使下部模塊3沿前後方向、左右方向、上下方向移動，從而如圖6所示，以第二對準部351與第一對準部530相面對的方式進行對準。Next, the operator moves the lower module 3 in the front-rear direction, the left-right direction, and the up-down direction, so as to perform alignment such that the second alignment portion 351 and the first alignment portion 530 face each other as shown in FIG. 6.

如上所述，若操作者為了進行對準而沿前後方向、左右方向、上下方向向下部模塊3施加力，則下部模塊3向施加力的方向沿各個移送引導件220、230、241、242被移送。As described above, if the operator applies force to the lower module 3 in the front-rear direction, left-right direction, and up-down direction for alignment, the lower module 3 will be moved along the respective transfer guides 220, 230, 241, 242 in the direction of the force. Transfer.

並且，若操作者向下部模塊3施加力以使其沿水平方向旋轉，則以固定銷253為旋轉中心旋轉而引導銷254沿引導槽252c內部旋轉，從而下部模塊3在XY平面上旋轉而實現對準。In addition, if the operator applies a force to the lower module 3 to rotate it in the horizontal direction, the fixed pin 253 is rotated as the center of rotation and the guide pin 254 rotates along the inside of the guide groove 252c, so that the lower module 3 rotates on the XY plane. alignment.

因此，操作者可以將力施加為使下部模塊3不僅能夠沿前後方向、左右方向、上下方向移送，還能夠沿水平方向旋轉，因此能夠易於使第一對準部530與第二對準部351對準。Therefore, the operator can apply force so that the lower module 3 can not only be transported in the front-to-rear direction, the left-right direction, and the up-down direction, but also can be rotated in the horizontal direction. Therefore, the first alignment portion 530 and the second alignment portion 351 can be easily made. alignment.

若在圖6的狀態下進一步向作為X軸方向的前方推動下部模塊3，則如圖7所示，作為第一對準部530的對準銷530***到作為第二對準部351的對準銷***槽351。在這種情況下，第一結合部511與第二結合部352結合，從而能夠防止下部模塊3與固定塊510、520分離。並且，蓋分離部320佈置為與蓋31相面對。If the lower module 3 is further pushed forward in the X-axis direction in the state of FIG. 6, as shown in FIG. 7, the alignment pin 530 as the first alignment portion 530 is inserted into the pair of the second alignment portion 351. The quasi pin is inserted into the groove 351. In this case, the first coupling portion 511 and the second coupling portion 352 are coupled, so that the lower module 3 can be prevented from being separated from the fixing blocks 510 and 520. And, the cover separation part 320 is arranged to face the cover 31.

若在圖7的狀態下驅動移送機構340的第一移送機構而使蓋分離部320向前方移動，則如圖8所示，蓋31***到蓋分離部320。在這種情況下，也可以構成為使蓋分離部320向X軸方向的前方移動，並且驅動旋轉機構380而使蓋分離部320旋轉，從而蓋31***到蓋分離部320。If the first transfer mechanism of the transfer mechanism 340 is driven in the state of FIG. 7 to move the cover separation part 320 forward, as shown in FIG. 8, the cover 31 is inserted into the cover separation part 320. In this case, the cover separation part 320 may be moved forward in the X-axis direction, and the rotation mechanism 380 is driven to rotate the cover separation part 320 so that the cover 31 is inserted into the cover separation part 320.

若蓋31***到所述蓋分離部320，則如圖8至圖11所示的操作受到控制部的控制而自動進行操作。When the cover 31 is inserted into the cover separation part 320, the operations shown in FIGS. 8 to 11 are controlled by the control part and the operations are automatically performed.

若通過所述控制部驅動旋轉機構380而使蓋分離部320旋轉，同時驅動所述第一移送機構而使蓋分離部320向後方移動，則蓋31從閥連接器30分離。When the rotation mechanism 380 is driven by the control unit to rotate the lid separation portion 320 and the first transfer mechanism is driven to move the lid separation portion 320 backward, the lid 31 is separated from the valve connector 30.

在所述蓋31從閥連接器30分離之後，若驅動移送機構340的第二移送機構，則如圖9所示，蓋分離部320和連接器緊固部330一體地沿Y軸方向移動，從而連接器緊固部330與閥連接器30佈置為相面對。After the cover 31 is separated from the valve connector 30, if the second transfer mechanism of the transfer mechanism 340 is driven, as shown in FIG. Thus, the connector fastening portion 330 and the valve connector 30 are arranged to face each other.

若在圖9的狀態下驅動墊片移送機構374，則如圖10所示，墊片371被墊片抓持器372抓持的狀態下沿X軸及Y軸方向移送，從而墊片371將被佈置於閥連接器30的端部。If the shim transfer mechanism 374 is driven in the state of FIG. 9, as shown in FIG. It is arranged at the end of the valve connector 30.

與此不同，可以構成為不將所述墊片371佈置於閥連接器30的端部，而是將所述墊片371先結合於連接配管連接器331。即，也可以構成為在墊片抓持器372抓持墊片371的狀態下沿X軸及Y軸方向移送，從而將墊片371結合於連接配管連接器331，在該狀態下將連接器緊固部330和抓持有墊片371的墊片抓持器372沿X軸方向移送，從而使墊片371佈置於閥連接器30的端部。Unlike this, it may be configured that the gasket 371 is not arranged at the end of the valve connector 30, but the gasket 371 is coupled to the connecting pipe connector 331 first. That is, it may be configured to move the gasket 371 in the X-axis and Y-axis directions while the gasket gripper 372 grips the gasket 371, thereby coupling the gasket 371 to the connecting pipe connector 331, and in this state, the connector The fastening portion 330 and the gasket gripper 372 holding the gasket 371 are moved along the X-axis direction, so that the gasket 371 is arranged at the end of the valve connector 30.

若在圖10的狀態下驅動移送機構340的第一移送機構而向前方移送連接器緊固部330的同時，驅動旋轉機構380而使連接器緊固部330旋轉，則如圖11所示，閥連接器30結合於連接器緊固部330的連接配管連接器331，並且通過驅動墊片移送機構374，從而使墊片抓持器372向脫離閥連接器30的位置移動。When the first transfer mechanism of the transfer mechanism 340 is driven in the state of FIG. 10 to transfer the connector fastening portion 330 forward, and the rotation mechanism 380 is driven to rotate the connector fastening portion 330, as shown in FIG. 11, The valve connector 30 is coupled to the connection pipe connector 331 of the connector fastening portion 330, and the gasket transfer mechanism 374 is driven to move the gasket gripper 372 to a position where it is separated from the valve connector 30.

通過如上所述的過程，若在閥連接器30結合於連接配管連接器331的狀態下旋轉手柄50而開放閥20，則收容於容器10的氣體將被供應至氣體需求處。Through the process described above, if the handle 50 is turned to open the valve 20 in a state where the valve connector 30 is coupled to the connecting pipe connector 331, the gas contained in the container 10 will be supplied to the gas demand.

在這種情況下，還可以配備有用於使所述手柄50旋轉的手柄旋轉部（未圖示），所述手柄旋轉部可以構成為其位置被控制部控制，從而自動地開放所述手柄50。In this case, a handle rotating part (not shown) for rotating the handle 50 may also be provided, and the handle rotating part may be configured such that its position is controlled by the control part to automatically open the handle 50 .

根據如上所述的構成，下部模塊3能夠沿垂直方向升降的同時當水平方向移送時實現對準，從而能夠防止第一對準部和第二對準部的破損。並且，下部模塊3相對於上部模塊2可旋轉，從而能夠更準確地進行對準。並且，即使操作者未將容器10置於容器裝載部的準確位置也能夠實現容器10的準確對準，因此便於作業。According to the configuration as described above, the lower module 3 can be raised and lowered in the vertical direction while achieving alignment when being transferred in the horizontal direction, so that damage to the first alignment portion and the second alignment portion can be prevented. In addition, the lower module 3 is rotatable relative to the upper module 2, so that the alignment can be performed more accurately. In addition, even if the operator does not place the container 10 in the exact position of the container loading part, the container 10 can be accurately aligned, which facilitates the work.

如上文所述，雖然以優選的實施例為例對本發明進行了詳細的說明，但是本發明並不限於上述的實施例，在權利要求範圍和本發明的詳細說明以及附圖的範圍內能夠進行各種變形而實施，且這些也屬於本發明。As described above, although the present invention has been described in detail with preferred embodiments as examples, the present invention is not limited to the above-mentioned embodiments, and can be carried out within the scope of the claims, the detailed description of the present invention, and the scope of the drawings. Various modifications are implemented, and these also belong to the present invention.

1:氣體供應裝置 2:上部模塊 3:下部模塊 10:容器 20:閥 30:閥連接器 31:蓋 40:閥閘 50:手柄 211:主板 212:中間板 213:下部板 220:第一移送引導件 230:第二移送引導件 241、242:第三移送引導件 243、244:移送引導件結合板 251、252:移送引導件支撐部件 251a、252a:主體部 251b、252b:底部 252c:引導槽 253:固定銷 254:引導銷 260:垂直方向制動部 311:上部殼體 312:第一側面殼體 313:第二側面殼體 314:插頭模塊支撐台 320:蓋分離部 330:連接器緊固部 331:連接配管連接器 340:移送機構 350:對準塊 351:第二對準部 352:第二結合部 352a:凸起 360:插頭模塊 361:插頭 362:插頭支撐部件 363:插頭支撐殼體 364:插頭移送引導件 370:墊片供應部 371:墊片 372:墊片抓持器 373:墊片收容部 374:墊片移送機構 380:旋轉機構 510、520:固定塊 511:第一結合部 530:第一對準部 540:結合銷1: Gas supply device 2: Upper module 3: Lower module 10: container 20: Valve 30: Valve connector 31: cover 40: valve gate 50: handle 211: Motherboard 212: Intermediate plate 213: Lower plate 220: The first transfer guide 230: Second transfer guide 241, 242: third transfer guide 243, 244: transfer guide combination plate 251, 252: Transfer guide support parts 251a, 252a: main body 251b, 252b: bottom 252c: guide slot 253: fixed pin 254: guide pin 260: Vertical braking part 311: upper shell 312: first side shell 313: second side shell 314: Plug module support table 320: Lid separation part 330: Connector fastening part 331: Connect the piping connector 340: transfer mechanism 350: Alignment block 351: Second alignment part 352: second joint 352a: raised 360: plug module 361: Plug 362: Plug support part 363: plug support shell 364: Plug transfer guide 370: Gasket Supply Department 371: Gasket 372: Gasket gripper 373: Gasket Storage Department 374: Gasket transfer mechanism 380: Rotating Mechanism 510, 520: fixed block 511: first joint 530: first alignment part 540: combined pin

圖1是示出本發明的氣體供應裝置的立體圖。 圖2是示出在本發明的氣體供應裝置中閥固定模塊結合於容器的狀態的立體圖。 圖3是示出本發明的氣體供應裝置的上部模塊的立體圖。 圖4是示出本發明的氣體供應裝置的下部模塊的立體圖。 圖5是示出本發明的氣體供應裝置中的插頭模塊和墊片供應部的立體圖。 圖6是示出在本發明的氣體供應裝置中第一對準部與第二對準部佈置為對向的狀態的平面圖。 圖7是示出在圖6的狀態下使下部模塊前進而第一對準部與第二對準部結合的狀態的平面圖。 圖8是示出在圖7的狀態下使蓋分離部前進而結合於蓋的狀態的平面圖。 圖9是示出在圖8的狀態下連接器緊固部佈置為與閥連接器對向的狀態的平面圖。 圖10是示出在圖9的狀態下從墊片供應部向閥連接器供應墊片的狀態的平面圖。 圖11是示出在圖10的狀態下墊片抓持器移動且連接器緊固部與閥連接器連接狀態的平面圖。Fig. 1 is a perspective view showing a gas supply device of the present invention. Fig. 2 is a perspective view showing a state in which the valve fixing module is coupled to the container in the gas supply device of the present invention. Fig. 3 is a perspective view showing an upper module of the gas supply device of the present invention. Fig. 4 is a perspective view showing a lower module of the gas supply device of the present invention. Fig. 5 is a perspective view showing a plug module and a gasket supply part in the gas supply device of the present invention. Fig. 6 is a plan view showing a state where the first alignment portion and the second alignment portion are arranged to face each other in the gas supply device of the present invention. Fig. 7 is a plan view showing a state where the lower module is advanced in the state of Fig. 6 and the first alignment portion and the second alignment portion are combined. Fig. 8 is a plan view showing a state in which the cover separating portion is advanced to be coupled to the cover in the state of Fig. 7. Fig. 9 is a plan view showing a state in which the connector fastening portion is arranged to face the valve connector in the state of Fig. 8. Fig. 10 is a plan view showing a state in which a gasket is supplied from a gasket supply part to the valve connector in the state of Fig. 9. Fig. 11 is a plan view showing a state in which the gasket gripper moves and the connector fastening portion is connected to the valve connector in the state of Fig. 10.

1:氣體供應裝置1: Gas supply device

2:上部模塊2: Upper module

3:下部模塊3: Lower module

10:容器10: container

211:主板211: Motherboard

241、242:第三移送引導件241, 242: third transfer guide

251、252:移送引導件支撐部件251, 252: Transfer guide support parts

311:上部殼體311: upper shell

340:移送機構340: transfer mechanism

350:對準塊350: Alignment block

380:旋轉機構380: Rotating Mechanism

510:固定塊510: fixed block

Claims (17)

一種配備有對準功能的氣體供應裝置，包括： 上部模塊，配備有主板，該主板固定設置在配備於容器上端的閥部的上側； 下部模塊，包括蓋分離部、連接器緊固部和第二對準部，並且能夠相對於該上部模塊沿垂直方向升降， 其中，該蓋分離部將覆蓋閥連接器的蓋從該閥連接器分離，該閥連接器配備於該閥部，該連接器緊固部用於將連接於氣體需求處的連接配管連接器連接到該閥連接器，該第二對準部當水平方向移送時通過與配備於該閥部的第一對準部結合而實現該容器的對準。A gas supply device equipped with an alignment function, including: The upper module is equipped with a main board, which is fixedly arranged on the upper side of the valve part equipped at the upper end of the container; The lower module includes a cover separation part, a connector fastening part and a second alignment part, and can be raised and lowered in a vertical direction relative to the upper module, Wherein, the cover separating portion separates the cover covering the valve connector from the valve connector, the valve connector is equipped with the valve portion, and the connector fastening portion is used to connect the connection pipe connector connected to the gas demand site To the valve connector, the second alignment portion is combined with the first alignment portion provided on the valve portion to achieve the alignment of the container when the second alignment portion is moved in the horizontal direction. 根據請求項1所述的配備有對準功能的氣體供應裝置，其中該第一對準部和第二對準部中的任意一個由具有水平方向的長度的銷形狀的對準銷構成，其餘一個由供該對準銷***的對準銷***槽構成。The gas supply device equipped with an alignment function according to claim 1, wherein any one of the first alignment portion and the second alignment portion is composed of a pin-shaped alignment pin having a length in a horizontal direction, and the rest One is composed of an alignment pin insertion slot for inserting the alignment pin. 根據請求項1所述的配備有對準功能的氣體供應裝置，其中該第二對準部與配備於該下部模塊的外側的側面殼體結合。The gas supply device equipped with an alignment function according to claim 1, wherein the second alignment portion is combined with a side housing provided on the outer side of the lower module. 根據請求項3所述的配備有對準功能的氣體供應裝置，其中在該側面殼體結合有對準塊，該第二對準部在該對準塊配備於朝向該閥部的面。The gas supply device equipped with an alignment function according to claim 3, wherein an alignment block is combined with the side shell, and the second alignment portion is provided on a surface facing the valve portion in the alignment block. 根據請求項1所述的配備有對準功能的氣體供應裝置，其中該第一對準部配備於與該閥部結合的固定塊，該固定塊包括：第一固定塊和第二固定塊，該第一固定塊和第二固定塊以如下方式包圍該閥部：使得使用於管制氣體的供應的閥開閉的手柄向上部暴露，並且使該閥連接器向該連接配管連接器所在的方向暴露，該第一固定塊具有水平方向的長度，並且該水平方向的一側部包圍該閥部，在該水平方向的另一側部配備有該第一對準部。The gas supply device equipped with an alignment function according to claim 1, wherein the first alignment portion is equipped with a fixing block combined with the valve portion, and the fixing block includes: a first fixing block and a second fixing block, The first fixing block and the second fixing block surround the valve part in such a way that the handle for opening and closing the valve for the supply of controlled gas is exposed to the upper part, and the valve connector is exposed in the direction where the connecting piping connector is located The first fixing block has a length in a horizontal direction, one side of the horizontal direction surrounds the valve portion, and the other side of the horizontal direction is equipped with the first alignment portion. 根據請求項1所述的配備有對準功能的氣體供應裝置，其中該第一對準部配備於與該閥部結合的固定塊，用於結合到在該固定塊鄰近於該第一對準部而配備的第一結合部的第二結合部配備於該下部模塊，當該第一對準部與該第二對準部結合時，該第一結合部與該第二結合部結合，從而保持該固定塊與該下部模塊的結合狀態。The gas supply device equipped with an alignment function according to claim 1, wherein the first alignment portion is equipped with a fixing block combined with the valve portion for coupling to the fixing block adjacent to the first alignment The second coupling portion of the first coupling portion is equipped with the lower module, and when the first alignment portion is coupled with the second alignment portion, the first coupling portion is coupled with the second coupling portion, thereby Maintain the combined state of the fixed block and the lower module. 根據請求項6所述的配備有對準功能的氣體供應裝置，其中在該下部模塊結合有對準塊，該第二結合部由配備於該對準塊且朝向該第一結合部凸出的固定塊結合部件構成，該第一結合部由形成於該固定塊而使該固定塊結合部件***的固定槽構成，若該固定塊結合部件***到該固定槽，則該固定塊結合部件被防止從該固定槽脫離，若供應空氣，則該固定塊結合部件能夠從該固定槽脫離。The gas supply device equipped with an alignment function according to claim 6, wherein an alignment block is combined with the lower module, and the second coupling portion is provided with the alignment block and protruding toward the first coupling portion The fixed block coupling member is constituted by the first coupling portion formed by the fixing groove formed in the fixing block to insert the fixing block coupling member, and if the fixing block coupling member is inserted into the fixing groove, the fixing block coupling member is prevented When detached from the fixing groove, if air is supplied, the fixing block coupling member can be detached from the fixing groove. 根據請求項1所述的配備有對準功能的氣體供應裝置，其中該下部模塊能夠相對於該上部模塊沿水平方向旋轉。The gas supply device equipped with an alignment function according to claim 1, wherein the lower module is capable of rotating in a horizontal direction relative to the upper module. 根據請求項8所述的配備有對準功能的氣體供應裝置，其中該下部模塊的上部與該上部模塊的下部通過固定銷結合，在該下部模塊和該上部模塊中的任意一個結合有引導銷，在其餘一個形成有圓弧形狀的引導槽，以使該引導銷***該引導槽而能夠以該固定銷為旋轉中心旋轉。The gas supply device equipped with an alignment function according to claim 8, wherein the upper part of the lower module and the lower part of the upper module are combined by a fixing pin, and a guide pin is combined with any one of the lower module and the upper module , An arc-shaped guide groove is formed in the remaining one, so that the guide pin is inserted into the guide groove to be able to rotate with the fixed pin as the rotation center. 根據請求項9所述的配備有對準功能的氣體供應裝置，其中在該上部模塊配備有： 一對移送引導件，用於沿垂直方向移送該下部模塊；以及 一對移送引導件支撐部件，結合於該一對移送引導件的下部，其中，該一對移送引導件支撐部件中的一側的移送引導件支撐部件與該下部模塊通過該固定銷結合，在形成於另一側的移送引導件支撐部件的該引導槽***有結合於該下部模塊的引導銷。The gas supply device equipped with an alignment function according to claim 9, wherein the upper module is equipped with: A pair of transfer guides for transferring the lower module in the vertical direction; and A pair of transfer guide support members are coupled to the lower part of the pair of transfer guides, wherein the transfer guide support member on one side of the pair of transfer guide support members is connected to the lower module by the fixing pin, and A guide pin coupled to the lower module is inserted into the guide groove of the transfer guide support member formed on the other side. 根據請求項8所述的配備有對準功能的氣體供應裝置，其中該下部模塊相對於該上部模塊能夠沿水平方向旋轉的同時直線移動。The gas supply device equipped with an alignment function according to claim 8, wherein the lower module can move linearly while rotating in a horizontal direction relative to the upper module. 根據請求項1所述的配備有對準功能的氣體供應裝置，其中在該上部模塊配備有： 第一移送引導件，為了引導該下部模塊沿作為水平方向中的任意一個的第一方向移送而配備；以及 第二移送引導件，用於引導該下部模塊沿水平方向中的與該第一方向垂直的第二方向移送。The gas supply device equipped with an alignment function according to claim 1, wherein the upper module is equipped with: The first transfer guide is equipped to guide the lower module to be transferred in the first direction, which is any one of the horizontal directions; and The second transfer guide is used to guide the lower module to be transferred in a second direction perpendicular to the first direction in the horizontal direction. 根據請求項12所述的配備有對準功能的氣體供應裝置，其中該主板、中間板、下部板配備為從上部向下部彼此隔開，該第一移送引導件配備於該主板與該中間板之間，該第二移送引導件配備於該中間板與下部板之間。The gas supply device equipped with an alignment function according to claim 12, wherein the main board, the middle board, and the lower board are arranged to be separated from each other from the upper part to the lower part, and the first transfer guide is arranged on the main board and the middle board In between, the second transfer guide is provided between the middle plate and the lower plate. 根據請求項1所述的配備有對準功能的氣體供應裝置，其中在該上部模塊配備有： 第三移送引導件，用於引導該下部模塊沿該垂直方向移送。The gas supply device equipped with an alignment function according to claim 1, wherein the upper module is equipped with: The third transfer guide is used to guide the lower module to be transferred along the vertical direction. 根據請求項14所述的配備有對準功能的氣體供應裝置，其中在該第三移送引導件配備有用於對該垂直方向移送進行制動的垂直方向制動部。The gas supply device equipped with an alignment function according to claim 14, wherein the third transfer guide is provided with a vertical direction braking portion for braking the vertical direction transfer. 根據請求項1所述的配備有對準功能的氣體供應裝置，其中配備有用於對該水平方向中的至少任意一個直線方向移送進行制動的水平方向制動部。The gas supply device equipped with an alignment function according to claim 1, which is equipped with a horizontal direction braking portion for braking at least any one of the horizontal directions of linear transfer. 根據請求項1所述的配備有對準功能的氣體供應裝置，其中在該下部模塊配備有： 移送機構，用於相對於該閥部沿前後方向和左右方向一體地移送該蓋分離部和該連接器緊固部；以及 旋轉機構，用於使該蓋分離部和該連接器緊固部旋轉，並且配備有： 控制部，用於控制該移送機構的移送及該旋轉機構的旋轉。The gas supply device equipped with an alignment function according to claim 1, wherein the lower module is equipped with: A transfer mechanism for integrally transferring the cover separation part and the connector fastening part in the front-rear direction and the left-right direction relative to the valve part; and The rotating mechanism is used to rotate the cover separation part and the connector fastening part, and is equipped with: The control unit is used to control the transfer of the transfer mechanism and the rotation of the rotation mechanism.
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