TW202114034A - Positional relationship detection system - Google Patents

Positional relationship detection system Download PDF

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TW202114034A
TW202114034A TW109127243A TW109127243A TW202114034A TW 202114034 A TW202114034 A TW 202114034A TW 109127243 A TW109127243 A TW 109127243A TW 109127243 A TW109127243 A TW 109127243A TW 202114034 A TW202114034 A TW 202114034A
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detected
article
positional relationship
distance
unit
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TW109127243A
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TWI841772B (en
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堀井高宏
荻須基成
八木田信之
林光太郎
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日商大福股份有限公司
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    • H—ELECTRICITY
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    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
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Abstract

A positional relationship between an article holding portion of an article transportation vehicle and a transfer location is detected with a simpler structure. A detectable unit of a detection subject to be detected by a detector unit is provided with a plurality of detectable spots for detecting a distance from a detection reference point of the detector unit. The detectable unit is formed in a three-dimensional form as being made up of a plurality of detectable surfaces. The plurality of detectable surfaces can be detected for at least two of planar relative position, inclination, and rotating angle to correspond to the value of the distance from the detection reference point. The planar relative position indicates a relative position of the article holding portion with respect to the transfer location in a first direction on a reference plane and a second direction, which is orthogonal to the first direction, on the reference plane. The inclination is the inclination of the article holding portion with respect to the reference plane. The rotating angle is a rotating angle of the article holding portion about a reference axis that is orthogonal to the reference plane.

Description

位置關係檢測系統Position relationship detection system

本發明是有關於一種位置關係檢測系統，前述位置關係檢測系統是在具備在搬送起點與搬送目的地之間搬送物品之物品搬送車的物品搬送設備中，檢測移載裝置所具備的物品保持部相對於移載地點的位置關係，前述移載裝置是在搬送起點及搬送目的地之移載地點之間移載物品。The present invention relates to a positional relationship detection system. The aforementioned positional relationship detection system detects the article holding part of the transfer device in an article transport equipment equipped with an article transport vehicle that transports articles between a transfer starting point and a transfer destination. With respect to the positional relationship of the transfer location, the aforementioned transfer device transfers articles between the transfer starting point and the transfer destination.

在藉由物品搬送車來自動地搬送物品的物品搬送設備中，較佳的是在物品搬送車與搬送對象地點之間以較高的精度來移載物品。具體而言，為了在物品的搬送起點上以較好的精度來保持、搬送物品，並且以較好的精度來載置到物品的搬送目的地之預定的位置，較佳的是以較好的精度來調整物品搬送車的停止位置或保持物品的物品保持部進行保持動作的位置或姿勢。在日本專利特許第6146537號公報中，揭示有進行像這樣的調整(teaching， 教示)的技術。以下，在先前技術中括弧內的符號是所參照的文獻的符號。In the article transfer equipment that automatically transfers articles by the article transfer vehicle, it is preferable to transfer articles with high accuracy between the article transfer vehicle and the transfer target location. Specifically, in order to hold and transport the articles with better accuracy at the starting point of the article's transfer, and to place the articles at the predetermined position of the article's transfer destination with better accuracy, it is preferable to use a better Accuracy is used to adjust the stop position of the article transport vehicle or the position or posture of the article holding portion holding the article to perform the holding operation. Japanese Patent No. 6146537 discloses a technique for performing such adjustments (teaching). Hereinafter, the symbols in parentheses in the prior art are the symbols of the referenced documents.

在物品搬送車上搭載有教示單元(20)，在對應於搬送對象地點的裝載口上設置有目標單元(30)。在教示單元(20)中搭載有複數個距離感測器(23X1 、23Y1 、23Y2 、23Z1 、23Z2 、23Z3 )。複數個距離感測器是將XYZ軸3維正交座標系統中之沿著X、Y、Z軸的方向設為檢測方向。在目標單元(30)中具備有目標板(32、33、34)，前述目標板是成為分別將X、Y、Z軸方向設為檢測方向的每一個的距離感測器的檢測對象。教示單元(20)是依據複數個距離感測器所進行之這些目標板(32、33、34)的檢測結果，來求出平行於物品搬送車的行走方向之第一方向、平行於基準面且正交於第一方向的第二方向、平行於基準面的面內之旋轉方向、及基準面的斜度。A teaching unit (20) is mounted on the article transport vehicle, and a target unit (30) is provided at a loading port corresponding to the transport target location. A plurality of distance sensors (23X 1 , 23Y 1 , 23Y 2 , 23Z 1 , 23Z 2 , 23Z 3 ) are mounted in the teaching unit (20). The multiple distance sensors set the directions along the X, Y, and Z axes in the XYZ axis 3D orthogonal coordinate system as the detection direction. The target unit (30) is provided with target plates (32, 33, 34), and the target plates are the detection targets of the distance sensors each having the X, Y, and Z axis directions as the detection directions. The teaching unit (20) is based on the detection results of these target plates (32, 33, 34) performed by a plurality of distance sensors to find the first direction parallel to the traveling direction of the article transport vehicle and parallel to the reference plane And the second direction orthogonal to the first direction, the rotation direction in the plane parallel to the reference surface, and the slope of the reference surface.

發明欲解決之課題The problem to be solved by the invention

根據上述，可以藉由使用了具備距離感測器的教示單元與目標單元的教示(teaching)，以較好的精度來檢測出物品搬送車的物品保持部的位置。但是，為了確保檢測精度，必須以較好的精度將複數個距離感測器安裝於教示單元。又，由於為了分別檢測複數個不同的方向而會使用複數個距離感測器，因此會有教示單元的成本較容易變高的問題。According to the above, the position of the article holding portion of the article transport vehicle can be detected with better accuracy by teaching using the teaching unit with the distance sensor and the target unit. However, in order to ensure the detection accuracy, a plurality of distance sensors must be installed in the teaching unit with good accuracy. In addition, since a plurality of distance sensors are used to detect a plurality of different directions, there is a problem that the cost of the teaching unit tends to increase.

有鑑於上述背景，所期望的是以更簡單的構成來適當地檢測物品搬送車的物品保持部與移載地點的位置關係之技術的提供。 用以解決課題之手段In view of the above background, it is desired to provide a technology for appropriately detecting the positional relationship between the article holding portion of the article transport vehicle and the transfer location with a simpler configuration. Means to solve the problem

作為1個態樣，有鑑於上述之位置關係檢測系統，是在具備物品搬送車的物品搬送設備中檢測位置關係的位置關係檢測系統，前述物品搬送車具備在搬送起點及搬送目的地之移載地點之間移載物品的移載裝置，且在前述搬送起點與前述搬送目的地之間搬送物品，前述位置關係是前述移載裝置所具備的物品保持部相對於前述移載地點的位置關係，前述位置關係檢測系統具備：第1單元，保持於前述物品保持部；及第2單元，設置於前述移載地點，前述第1單元及前述第2單元的一者為感測器單元，另一者為具備前述感測器單元的檢測對象之被檢測單元，前述感測器單元是檢測出從該感測器單元中的檢測基準點到設定於前述被檢測單元的複數個被檢測點之間的距離，前述被檢測單元是具備複數個被檢測面而立體地形成，前述複數個被檢測面可檢測出平面相對位置、斜度及旋轉角度當中的至少2個，來作為因應於從前述檢測基準點起算的距離的值，前述平面相對位置表示在沿著基準面之第1方向及沿著前述基準面並且正交於前述第1方向的第2方向中之前述物品保持部相對於前述移載地點的相對位置，前述基準面被設定成在前述移載地點上相向於前述感測器單元，前述斜度為前述物品保持部相對於前述基準面的斜度，前述旋轉角度是繞與前述基準面正交的基準軸之前述物品保持部的旋轉角度。As one aspect, in view of the above-mentioned positional relationship detection system, it is a positional relationship detection system that detects the positional relationship in an article transport facility equipped with an article transport vehicle. The foregoing article transport vehicle is equipped with transfers at the starting point and the destination of the transport. A transfer device that transfers articles between locations, and transfers articles between the transfer starting point and the transfer destination, the positional relationship is the positional relationship of the article holding portion of the transfer device with respect to the transfer location, The positional relationship detection system includes: a first unit held in the article holding portion; and a second unit installed at the transfer location, one of the first unit and the second unit is a sensor unit, and the other It is a detected unit with the detection target of the aforementioned sensor unit, and the aforementioned sensor unit detects the distance from the detection reference point in the sensor unit to the plurality of detected points set in the aforementioned detected unit The detected unit is three-dimensionally formed with a plurality of detected surfaces, and the plurality of detected surfaces can detect at least two of the relative position, inclination, and rotation angle of the plane as a response to the detection The value of the distance from the reference point. The relative position of the plane indicates the relative displacement of the article holding portion in the first direction along the reference plane and the second direction along the reference plane and orthogonal to the first direction. The relative position of the loading location, the reference surface is set to face the sensor unit at the transfer location, the slope is the slope of the article holding portion with respect to the reference surface, and the rotation angle is around and The rotation angle of the aforementioned article holding portion of the reference axis orthogonal to the reference plane.

根據此構成，可藉由1個感測器單元來檢測出從檢測基準點到複數個被檢測點之間的距離。由於不需要安裝複數個感測器，因此也不需要考慮到複數個感測器彼此的安裝精度等，而可以用簡單的構成來確保檢測精度。又，在立體地形成的被檢測單元中具備有複數個被檢測面，前述被檢測面可檢測平面相對位置、斜度、旋轉角度當中的至少2個，作為因應於從檢測基準點起算的距離的值。從而，可以藉由1個感測器單元來檢測出顯示物品保持部相對於移載地點的位置關係之平面相對位置、斜度、旋轉角度當中的至少2個。如此，根據本構成，可以提供以更簡單的構成來適當地檢測物品搬送車的物品保持部與移載地點的位置關係之技術。According to this configuration, one sensor unit can detect the distance from the detection reference point to a plurality of detected points. Since there is no need to install a plurality of sensors, there is no need to consider the installation accuracy of the plurality of sensors, etc., and the detection accuracy can be ensured with a simple configuration. In addition, the three-dimensionally formed detection unit is provided with a plurality of detection surfaces, and the detection surface can detect at least two of the relative position, inclination, and rotation angle of the plane as a function of the distance from the detection reference point. Value. Therefore, at least two of the relative position, the inclination, and the rotation angle of the plane indicating the positional relationship of the article holding portion with respect to the transfer location can be detected by one sensor unit. In this way, according to the present structure, it is possible to provide a technique for appropriately detecting the positional relationship between the article holding portion of the article transport vehicle and the transfer location with a simpler structure.

位置關係檢測系統之更進一步的特徵及優點，透過參照圖式來說明的實施形態之以下的記載將變得明確。Further features and advantages of the positional relationship detection system will be made clear by the following description of the embodiment described with reference to the drawings.

用以實施發明之形態The form used to implement the invention

以下，依據圖式來說明位置關係檢測系統的實施形態。圖1是示意地顯示使用位置關係檢測系統100(參照圖5等)的物品搬送設備200的構成例。在本實施形態中，是以具備物品搬送車20的物品搬送設備200為例來進行說明，前述物品搬送車20在對於半導體基板進行薄膜形成、光蝕刻、蝕刻等之各種處理的複數個半導體處理裝置(處理裝置202)之間，沿著行走路徑LT而在一個方向(行走方向Y)上搬送物品W(參照圖2等)。在本實施形態中，行走路徑LT是藉由支撐托架205(參照圖4)所支撐而設置在天花板側的行走軌道RL(參照圖2、圖4)所形成，物品搬送車20是被懸吊支撐在行走軌道RL的天花板搬送車。Hereinafter, the embodiment of the positional relationship detection system will be explained based on the drawings. Fig. 1 schematically shows a configuration example of an article transport facility 200 using a positional relationship detection system 100 (refer to Fig. 5 etc.). In the present embodiment, the article transport equipment 200 provided with the article transport vehicle 20 is taken as an example for description. The article transport vehicle 20 performs multiple semiconductor processing operations on semiconductor substrates such as thin film formation, photo-etching, and etching. Between the apparatuses (processing apparatus 202), the article W is conveyed in one direction (traveling direction Y) along the traveling path LT (refer to FIG. 2 etc.). In the present embodiment, the traveling path LT is formed by a traveling rail RL (refer to FIGS. 2 and 4) provided on the ceiling side supported by a support bracket 205 (refer to FIG. 4), and the article transport vehicle 20 is suspended The ceiling transport vehicle is suspended and supported on the walking rail RL.

如圖1所示，在物品搬送設備200中設置有至少2個不同屬性的區域(第1區域E1及第2區域E2)。在第1區域E1中，形成有相對較大的環狀的主路徑Lp、以及相對較小的環狀的副路徑Ls。第1區域E1具備有上述之處理裝置202，並且是在各處理裝置202(後述的載置台203)之間藉由物品搬送車20來搬送物品W的區域。第2區域E2是設置在和第1區域E1不同的區域，並且為利用後述之位置關係檢測系統100來進行物品搬送車20的調整之區域。在第2區域E2中，具備有後述之被檢測單元4的調整用載置台204是設置在地板面上。另外，調整用載置台204與處理裝置202所具備的載置台203，從地板面到載置面的高度是相同的，對於每一個載置台203的調整是使用調整用載置台204來執行。As shown in FIG. 1, at least two areas with different attributes (a first area E1 and a second area E2) are provided in the article transport facility 200. In the first area E1, a relatively large loop-shaped main path Lp and a relatively small loop-shaped sub path Ls are formed. The first area E1 is provided with the processing device 202 described above, and is an area where the article W is transported by the article transport vehicle 20 between the processing devices 202 (the mounting table 203 described later). The second area E2 is provided in an area different from the first area E1, and is an area where the article transport vehicle 20 is adjusted by the positional relationship detection system 100 described later. In the second area E2, the adjustment mounting table 204 provided with the detected unit 4 described later is installed on the floor. In addition, the height from the floor surface to the mounting surface of the mounting table 204 for adjustment and the mounting table 203 with which the processing apparatus 202 is equipped is the same, and the adjustment for each mounting table 203 is performed using the mounting table 204 for adjustment.

在本實施形態中，物品W是被稱為FOUP(Front Opening Unified Pod，前開式晶圓傳送盒)且容置複數片半導體基板的容器。圖2是顯示已藉由物品保持部24保持物品W的狀態之物品搬送車20的側面圖(從正交於行走方向Y的方向來觀看的圖)。如圖2所示，物品W具有凸緣部16與容置部15，在容置部15的前面(例如行走方向Y之側)，形成有用於供半導體基板出入的插拔口12(參照圖9)。此插拔口12可藉由可裝卸的蓋部14(參照圖9)而關閉。在容置部15的內部，形成有保持複數個半導體基板(基板)的每一個之複數道狹縫13(參照圖9)。In this embodiment, the article W is a container called a FOUP (Front Opening Unified Pod) and accommodating a plurality of semiconductor substrates. FIG. 2 is a side view of the article transport vehicle 20 (viewed from a direction orthogonal to the traveling direction Y) showing a state in which the article W is held by the article holding portion 24. As shown in FIG. 2, the article W has a flange portion 16 and an accommodation portion 15. On the front face of the accommodation portion 15 (for example, on the side of the traveling direction Y), an insertion port 12 for entering and exiting a semiconductor substrate is formed (refer to FIG. 9). The plug-in port 12 can be closed by the removable cover 14 (refer to FIG. 9). Inside the accommodating portion 15, a plurality of slits 13 (refer to FIG. 9) for holding each of a plurality of semiconductor substrates (substrates) are formed.

處理裝置202是對於收容於容器(物品W)的基板(半導體基板)進行如上述之各種處理。為了在各處理裝置202之間搬送容器(物品W)，在各處理裝置202中，是以相鄰於每一個處理裝置202的狀態而在地板面上設置有載置台203。這些載置台203是物品搬送車20的物品W之搬送對象地點(搬送起點及搬送目的地)。物品搬送車20具備移載裝置28，前述移載裝置28是在搬送起點及搬送目的地中的移載地點與物品搬送車20之間移載物品W。物品搬送車20是藉由移載裝置28而將物品W從搬送起點的載置台203移載至物品搬送車20，且行走於行走路徑LT，並且藉由移載裝置28而將物品W從物品搬送車20移載至搬送目的地的載置台203，藉此在搬送起點與搬送目的地之間搬送物品W。The processing device 202 performs various processing as described above on the substrate (semiconductor substrate) contained in the container (article W). In order to transport the container (article W) between the processing devices 202, in each processing device 202, a mounting table 203 is provided on the floor surface in a state adjacent to each processing device 202. These mounting tables 203 are the transfer target locations (the transfer starting point and the transfer destination) of the article W of the article transfer vehicle 20. The article transfer vehicle 20 includes a transfer device 28 that transfers the article W between the transfer point of the transfer starting point and the transfer destination and the article transfer vehicle 20. The article transfer vehicle 20 transfers the article W from the loading table 203 at the starting point of the transfer to the article transfer vehicle 20 by the transfer device 28, travels on the traveling path LT, and transfers the article W from the article by the transfer device 28 The transport vehicle 20 is transferred to the mounting table 203 of the transport destination, thereby transporting the article W between the transport starting point and the transport destination.

圖3的方塊圖是示意地顯示物品搬送設備200及物品搬送車20的系統構成。圖4是顯示保持物品W前之載置有該物品W的載置台203與物品搬送車20的關係。如圖2及圖4所示，物品搬送車20具備沿著行走路徑LT而行走的行走部22、以及具備物品保持部24的本體部23，前述物品保持部24是被行走部22懸吊支撐成位於行走軌道RL的下方並且保持物品W。The block diagram of FIG. 3 schematically shows the system configuration of the article transport equipment 200 and the article transport vehicle 20. FIG. 4 shows the relationship between the mounting table 203 on which the article W is placed and the article transport vehicle 20 before the article W is held. As shown in FIGS. 2 and 4, the article transport vehicle 20 includes a traveling portion 22 that travels along a traveling path LT, and a body portion 23 provided with an article holding portion 24. The article holding portion 24 is suspended and supported by the traveling portion 22 It is located below the walking rail RL and holds the article W.

在行走部22中，具備有在沿著行走路徑LT而設置的行走軌道RL上滾動的行走車輪22a、以及使該行走車輪22a旋轉的行走用馬達22m。本體部23具備物品保持部24、升降部25、滑動部26、旋轉部27、及罩體23c。物品保持部24、升降部25、滑動部26、及旋轉部27是構成移載裝置28。移載裝置28是在搬送起點及搬送目的地的載置台203中的移載地點與物品搬送車20之間移載物品W，並且在藉由物品保持部24保持物品W的狀態下來搬送物品W的機構。如圖2所示，物品W的凸緣部16設置在物品W的上端部(比容置部15更上方)，且藉由物品保持部24所支撐。物品搬送車20是以藉由物品保持部24懸吊支撐凸緣部16的狀態來搬送物品W。The traveling part 22 is equipped with the traveling wheel 22a which rolls on the traveling rail RL provided along the traveling path LT, and the motor 22m for traveling which rotates this traveling wheel 22a. The main body portion 23 includes an article holding portion 24, an elevating portion 25, a sliding portion 26, a rotating portion 27, and a cover 23c. The article holding portion 24, the elevating portion 25, the sliding portion 26, and the rotating portion 27 constitute the transfer device 28. The transfer device 28 transfers the article W between the transfer location on the loading table 203 of the transfer starting point and the transfer destination and the article transfer vehicle 20, and transfers the article W in a state where the article W is held by the article holding portion 24 Institutions. As shown in FIG. 2, the flange portion 16 of the article W is provided at the upper end portion of the article W (above the accommodating portion 15 ), and is supported by the article holding portion 24. The article transport vehicle 20 transports articles W in a state where the flange portion 16 is suspended and supported by the article holding portion 24.

升降部25是使物品保持部24相對於行走部22而升降移動的驅動部。滑動部26是使物品保持部24相對於行走部22而沿著橫向X(沿著水平面，正交於行走方向Y)滑動移動的驅動部。旋轉部27是使物品保持部24相對於行走部22而繞著縱軸心Z(垂直方向的軸心)旋轉的驅動部。如圖2所示，罩體23c是在支撐了物品W的物品保持部24上升到上升基準位置的狀態下，覆蓋物品W的上方側及路徑前後側的構件。另外，所謂上升基準位置是指在支撐了物品W的狀態下使物品搬送車20沿著行走軌道RL行走時，作為物品保持部24所在的上下方向(垂直方向)的位置而事先規定的位置。The elevating portion 25 is a driving portion that moves the article holding portion 24 up and down relative to the walking portion 22. The sliding part 26 is a driving part which slides and moves the article holding part 24 with respect to the walking part 22 along the horizontal direction X (along a horizontal plane, orthogonal to the walking direction Y). The rotating part 27 is a driving part that rotates the article holding part 24 with respect to the walking part 22 about the longitudinal axis Z (the axis in the vertical direction). As shown in FIG. 2, the cover 23c is a member that covers the upper side of the article W and the front and rear sides of the path in a state where the article holding portion 24 supporting the article W is raised to the raising reference position. In addition, the ascending reference position refers to a position predetermined in advance as the position in the vertical direction (vertical direction) where the article holding portion 24 is located when the article transport vehicle 20 is driven along the traveling rail RL while supporting the article W.

以下，也參照示意地顯示物品搬送設備200及物品搬送車20的系統構成之圖3來說明物品搬送車20的構成。在物品保持部24中具備有一對把持爪24a與把持用馬達24m(參照圖3)。如圖2所示，一對把持爪24a的每一個從側面來觀看(往X方向觀看)是形成為L字形，以藉由各把持爪24a的下端部而從下方來支撐物品W的凸緣部16。一對把持爪24a是藉由把持用馬達24m的驅動力，而沿著水平方向互相接近及遠離。物品保持部24是構成為可切換為支撐狀態與支撐解除狀態，使一對把持爪24a藉由接近而成為支撐狀態，且藉由遠離而成為支撐解除狀態。Hereinafter, the configuration of the article transport vehicle 20 will also be described with reference to FIG. 3 schematically showing the system configuration of the article transport facility 200 and the article transport vehicle 20. The article holding portion 24 is provided with a pair of gripping claws 24a and a gripping motor 24m (refer to FIG. 3). As shown in FIG. 2, each of the pair of gripping claws 24a is formed in an L shape when viewed from the side (viewed in the X direction), and the flange of the article W is supported from below by the lower end of each gripping claw 24a Section 16. The pair of gripping claws 24a approach and move away from each other in the horizontal direction by the driving force of the gripping motor 24m. The article holding portion 24 is configured to be switchable between the supported state and the supported released state, and the pair of gripping claws 24a are brought into a supported state by approaching, and they are brought into a supported released state by being separated.

如圖2所示，懸吊支撐物品W的物品保持部24藉由和物品保持部24同樣地構成移載裝置28的升降部25，而被支撐成可相對於行走部22來升降。在升降部25中，具備有捲繞體25a、捲取帶25b及升降用馬達25m(參照圖3)。捲繞體25a被後述的旋轉體27a所支撐。捲取帶25b是被捲繞在捲繞體25a上，並且在前端部上連結支撐有物品保持部24。升降用馬達25m會給予用於使捲繞體25a旋轉的動力。藉由升降用馬達25m使捲繞體25a朝正方向旋轉，來捲取捲取帶25b，且藉由升降用馬達25m使捲繞體25a朝反方向旋轉，來送出捲取帶25b。藉此，使物品保持部24及物品保持部24所支撐的物品W升降移動。另外，在升降部25中也具備有藉由脈衝數來計測捲繞體25a的送出量之編碼器(未圖示)。作動控制部21(參照圖3)是依據此脈衝數來控制物品保持部24的升降高度。As shown in FIG. 2, the article holding portion 24 that suspends and supports the article W is supported so as to be able to be raised and lowered with respect to the walking portion 22 by configuring the elevating portion 25 of the transfer device 28 similar to the article holding portion 24. The elevating part 25 is equipped with the winding body 25a, the winding belt 25b, and the motor 25m for raising/lowering (refer FIG. 3). The wound body 25a is supported by a rotating body 27a described later. The take-up belt 25b is wound on the winding body 25a, and the article holding part 24 is connected and supported by the front-end|tip part. The motor 25m for raising/lowering gives power for rotating the winding body 25a. The winding body 25a is rotated in the forward direction by the lifting motor 25m to wind the winding tape 25b, and the winding body 25a is rotated in the reverse direction by the lifting motor 25m, and the winding tape 25b is sent out. Thereby, the article holding portion 24 and the article W supported by the article holding portion 24 are moved up and down. In addition, the lifter 25 is also provided with an encoder (not shown) that measures the delivery amount of the wound body 25a by the number of pulses. The operation control part 21 (refer to FIG. 3) controls the height of the article holding part 24 according to this pulse number.

在同樣地構成本體部23的滑動部26中，具備有中繼部26a與滑動用馬達26m(參照圖3)。中繼部26a是被行走部22支撐成可相對於行走部22而沿著橫向X滑動移動。滑動用馬達26m會給予用於使中繼部26a沿著橫向X滑動移動的動力。滑動部26是藉由滑動用馬達26m的驅動而使中繼部26a沿著橫向X滑動移動，藉此使物品保持部24及升降部25沿著橫向X移動。The sliding part 26 which similarly comprises the main body part 23 is equipped with the relay part 26a and the motor 26m for sliding (refer FIG. 3). The relay part 26 a is supported by the walking part 22 so as to be slidable in the lateral direction X relative to the walking part 22. The sliding motor 26m gives power for sliding the relay portion 26a in the lateral direction X. The sliding portion 26 is driven by the sliding motor 26m to slide the relay portion 26a along the lateral direction X, thereby moving the article holding portion 24 and the elevating portion 25 along the lateral direction X.

在同樣地構成移載裝置28的旋轉部27中，具備有旋轉體27a與旋轉用馬達27m(參照圖3)。旋轉體27a是相對於中繼部26a而被支撐成可繞著沿垂直方向(上下方向)的縱軸心Z來旋轉。旋轉用馬達27m會給予用於使旋轉體27a繞著縱軸心旋轉的動力。旋轉部27是藉由旋轉用馬達27m的驅動而使旋轉體27a旋轉，藉此使物品保持部24及升降部25繞著縱軸心Z來旋轉。The rotating portion 27 that similarly configures the transfer device 28 includes a rotating body 27a and a rotating motor 27m (see FIG. 3). The rotating body 27a is supported with respect to the relay portion 26a so as to be rotatable about the longitudinal axis Z in the vertical direction (up and down direction). The rotation motor 27m gives power for rotating the rotating body 27a around the longitudinal axis. The rotating part 27 rotates the rotating body 27a by the driving of the rotating motor 27m, thereby rotating the article holding part 24 and the elevating part 25 around the longitudinal axis Z. As shown in FIG.

如圖3所示，物品搬送車20具備設定檔儲存部29。設定檔儲存部29是由記憶體等之儲存媒體所構成，並且儲存設定檔資訊，前述設定檔資訊包含用於在各載置台203上移載物品W的位置或作動量之資訊。在設定檔資訊中包含為了在各載置台203上搬送及移載物品W而在行走路徑LT中使物品搬送車20停止的停止目標位置之資訊及移載基準作動量之資訊。移載基準作動量包含例如：旋轉作動量，規定物品保持部24相對於行走部22之繞著縱軸心Z的旋轉量；滑動作動量，規定物品保持部24相對於行走部22之橫向X的移動量；及下降作動量，規定物品保持部24相對於行走部22之上下方向的作動量。移載基準作動量將行走部22行走於行走軌道RL時的物品保持部24的姿勢設為基準。例如，將行走部22行走於行走軌道RL時的物品保持部24之繞縱軸心的位置設為旋轉基準位置，將行走部22行走時的物品保持部24之橫向X上的位置設為滑動基準位置，並且將行走部22行走時的物品保持部24之上下方向上的位置設為上升設定位置。As shown in FIG. 3, the article transport vehicle 20 includes a profile storage unit 29. The profile storage unit 29 is composed of a storage medium such as a memory, and stores profile information. The profile information includes information on the position or amount of actuation of the article W to be transferred on each mounting table 203. The profile information includes information on the stop target position at which the article transport vehicle 20 is stopped in the travel path LT in order to transport and transfer the article W on each mounting table 203 and information on the transfer reference amount of movement. The transfer reference movement amount includes, for example, the rotation movement amount, which specifies the rotation amount of the article holding portion 24 relative to the walking portion 22 around the longitudinal axis Z; the sliding movement momentum, which specifies the transverse X of the article holding portion 24 relative to the walking portion 22 The amount of movement; and the amount of downward movement, which specifies the amount of movement of the article holding portion 24 relative to the moving portion 22 in the up and down direction. The transfer reference amount of motion is based on the posture of the article holding portion 24 when the traveling portion 22 is traveling on the traveling rail RL. For example, the position of the article holding portion 24 around the longitudinal axis when the walking portion 22 is traveling on the traveling rail RL is set as the rotation reference position, and the position in the lateral direction X of the article holding portion 24 when the traveling portion 22 is traveling is set as sliding The reference position, and the upper and lower position of the article holding portion 24 when the walking portion 22 is traveling is set as the rising setting position.

在物品搬送車20被導入到物品搬送設備200時設定有適當的設定檔資訊。但是，若因物品搬送車20的長期變化或耗損等，使得誤差變大時，則會有變得無法適當地移載物品W等之物品的情況。會有例如因行走車輪22a的磨耗等，使停止目標位置從理想的位置偏離的情況。又，也會有伴隨於升降部25(升降用馬達25m或捲取帶25b)的長期劣化或耗損，而使移載基準作動量與理想的作動量之偏離逐漸地變大的情況。因此，例如會規定期間來進行定期檢查等，並且在該檢查時實施調整。又，在移載錯誤已增加的情況等，會有因應於一個個的物品搬送車20之適當的時期來進行調整的情況。詳細內容將於後文描述，位置關係檢測系統100是依據移載基準作動量來檢測出物品保持部24作動後之相對於物品保持部24與移載地點的位置關係之系統。依據已檢測的位置關係，來進行移載基準作動量的設定或更新。When the article transport vehicle 20 is introduced into the article transport facility 200, appropriate profile information is set. However, if the error increases due to long-term changes or wear of the article transport vehicle 20, it may become impossible to properly transfer articles such as articles W. For example, due to wear of the traveling wheels 22a, etc., the stop target position may deviate from the ideal position. In addition, due to long-term deterioration or wear of the elevating portion 25 (elevating motor 25m or take-up belt 25b), the deviation of the transfer reference operation amount from the ideal operation amount may gradually increase. Therefore, for example, regular inspections are performed during a predetermined period, and adjustments are made during the inspections. In addition, in cases where transfer errors have increased, etc., adjustments may be made in accordance with the appropriate timing of the individual article transport vehicles 20. Details will be described later. The positional relationship detection system 100 is a system that detects the positional relationship between the article holding portion 24 and the transfer location after the article holding portion 24 is actuated based on the transfer reference movement amount. According to the detected positional relationship, the transfer reference movement amount is set or updated.

搬送設備控制裝置H是成為物品搬送設備200的核心之系統控制器。搬送設備控制裝置H是對於物品搬送車20的上位控制器，控制第1區域E1中的物品搬送車20的作動，並且執行用於搬送物品W的搬送控制。又，搬送設備控制裝置H也會控制第2區域E2中的物品搬送車20的作動，並且執行進行物品搬送車20的調整之調整控制。另外，在此，雖然例示了共通的搬送設備控制裝置H成為核心來執行搬送控制與調整控制的形態，但是亦可為藉由各自不同的控制裝置來執行的形態。The conveying equipment control device H is a system controller that becomes the core of the article conveying equipment 200. The conveyance equipment control device H is a higher-level controller for the article conveyance vehicle 20, controls the operation of the article conveyance vehicle 20 in the first area E1, and executes conveyance control for conveying the articles W. In addition, the transport equipment control device H also controls the operation of the article transport vehicle 20 in the second area E2, and performs adjustment control for adjusting the article transport vehicle 20. In addition, here, although the common conveyance equipment control device H is exemplified as the core to execute the conveyance control and the adjustment control, the form may be executed by different control devices.

如圖3所示，物品搬送車20與搬送設備控制裝置H是藉由例如無線LAN等來進行無線通訊。又，物品搬送車20與位置關係檢測系統100的感測器單元3是進行例如近距離無線通訊或無線LAN之無線通訊、或透過纜線等的有線通訊。作動控制部21是藉由微電腦等所構成，在搬送控制中，是依據來自搬送設備控制裝置H的指令，藉由自主控制使物品搬送車20作動。又，在調整控制中，是和位置關係檢測系統100協同合作，來進行物品搬送車20的調整(設定檔資訊的設定或更新)。As shown in FIG. 3, the article transport vehicle 20 and the transport equipment control device H perform wireless communication by, for example, wireless LAN. In addition, the article transport vehicle 20 and the sensor unit 3 of the positional relationship detection system 100 perform wireless communication such as short-range wireless communication or wireless LAN, or wired communication through a cable or the like. The actuation control unit 21 is constituted by a microcomputer or the like, and in the transport control, the article transport vehicle 20 is actuated by autonomous control in accordance with instructions from the transport equipment control device H. In addition, in the adjustment control, the article transport vehicle 20 is adjusted in cooperation with the positional relationship detection system 100 (setting or updating of profile information).

以下，也參照圖5至圖12來說明。位置關係檢測系統100具備：第1單元1，保持於物品保持部24；及第2單元2，設置於移載地點。第1單元1及第2單元2的一者為感測器單元3，另一者為具備感測器單元3的檢測對象之被檢測單元4。在本實施形態中，第1單元1為感測器單元3，第2單元2為被檢測單元4。Hereinafter, description will also be made with reference to FIGS. 5 to 12. The positional relationship detection system 100 includes: a first unit 1 held by the article holding portion 24; and a second unit 2 installed at a transfer location. One of the first unit 1 and the second unit 2 is the sensor unit 3, and the other is the detected unit 4 having the detection target of the sensor unit 3. In this embodiment, the first unit 1 is the sensor unit 3, and the second unit 2 is the unit 4 to be detected.

感測器單元3可以檢測出從該感測器單元3中的檢測基準點Q到被檢測體(在此為被檢測單元4)的複數個位置之間的距離K。亦即，感測器單元3是檢測出從檢測基準點Q到設定於被檢測單元4的複數個被檢測點R之間的距離K。在此，感測器單元3是將距離K設為要檢測的距離，前述距離K是和設定於感測器單元3的檢測基準面QP正交的方向上的距離。從而，檢測基準點Q是對應於每一個被檢測點R，而在檢測基準面QP上設定有複數個。當然，亦可為檢測從1個檢測基準點Q到每一個被檢測點R之間的距離，並且使用三角測量的原理來檢測距離K之形態。The sensor unit 3 can detect the distance K from the detection reference point Q in the sensor unit 3 to a plurality of positions of the detected body (here, the detected unit 4). That is, the sensor unit 3 detects the distance K from the detection reference point Q to the plurality of detected points R set in the detected unit 4. Here, the sensor unit 3 sets the distance K as the distance to be detected, and the aforementioned distance K is the distance in the direction orthogonal to the detection reference plane QP set on the sensor unit 3. Therefore, the detection reference point Q corresponds to each detected point R, and a plurality of detection reference points QP are set. Of course, it is also possible to detect the distance from one detection reference point Q to each detected point R, and use the principle of triangulation to detect the form of the distance K.

在被檢測單元4上，以相向於感測器單元3的方式設定有基準面P0。在本實施形態中，被檢測單元4在使基準面P0成為與水平面平行的狀態下被設置於調整用載置台204。被檢測單元4被設置於將第1方向D1及第2方向D2設為基準的基準位置上，前述第1方向D1是沿著基準面P0，前述第2方向D2是沿著基準面P0並且正交於第1方向D1。亦即，被檢測單元4是相對於調整用載置台204而以基準姿勢設置於基準位置。在此，當將物品保持部24與調整用載置台204的位置關係調整成規定的位置關係時，感測器單元3與被檢測單元4的相對位置及相對姿勢是處於基準位置關係。The detected unit 4 is provided with a reference plane P0 so as to face the sensor unit 3. In this embodiment, the detected unit 4 is installed on the adjustment mounting table 204 in a state where the reference plane P0 is parallel to the horizontal plane. The detected unit 4 is set at a reference position based on the first direction D1 and the second direction D2. The first direction D1 is along the reference plane P0, and the second direction D2 is along the reference plane P0 and is positive. Hand in the first direction D1. That is, the detected unit 4 is installed at a reference position with respect to the adjustment mounting table 204 in a reference posture. Here, when the positional relationship between the article holding portion 24 and the adjustment stage 204 is adjusted to a predetermined positional relationship, the relative position and relative posture of the sensor unit 3 and the detected unit 4 are in a reference positional relationship.

如圖5所示，感測器單元3具備：具備圖像感測器31與雷射器32的感測器本體部30、將來自感測器本體部30的輸出訊號放大的放大器單元34、可程式控制器36(PLC：Programmable Logic Controller)、及顯示器35。感測器單元3可以藉由圖像感測器31來拍攝檢測對象(在此為被檢測單元4)。攝影圖像是顯示於顯示器35。作業人員是將物品保持部24與調整用載置台204的位置關係調整成規定的位置關係(基準位置關係)，在感測器單元3與被檢測單元4處於基準位置關係的狀態下，在顯示器35所顯示的攝影圖像(被檢測單元4)上設定被檢測點R。例如，如圖7的平面圖及圖8的側面圖所示，對於攝影圖像上的被檢測單元4來設定被檢測點R。亦即，雷射器32是設定為測定到這些被檢測點R的距離K。可程式控制器36是將已測定之到被檢測點R的距離K，發送至搬送設備控制裝置H。As shown in FIG. 5, the sensor unit 3 includes: a sensor main body 30 including an image sensor 31 and a laser 32, an amplifier unit 34 that amplifies the output signal from the sensor main body 30, A programmable controller 36 (PLC: Programmable Logic Controller), and a display 35. The sensor unit 3 can use the image sensor 31 to photograph the detection object (here, the detected unit 4). The photographed image is displayed on the display 35. The operator adjusts the positional relationship between the article holding portion 24 and the adjustment stage 204 to a predetermined positional relationship (reference positional relationship). When the sensor unit 3 and the detected unit 4 are in the reference positional relationship, the display The detected point R is set on the photographed image (detected unit 4) displayed at 35. For example, as shown in the plan view of FIG. 7 and the side view of FIG. 8, the detected point R is set for the detected unit 4 on the photographed image. That is, the laser 32 is set to measure the distance K to these detected points R. The programmable controller 36 sends the measured distance K to the detected point R to the conveying equipment control device H.

如圖6的立體圖所示，被檢測單元4具備複數個被檢測面40，前述複數個被檢測面40是感測器單元3可檢測出下述當中的至少2個來作為因應於從檢測基準點Q起算的距離K的值：顯示物品保持部24相對於移載地點的相對位置之平面相對位置(參照圖11)、物品保持部24相對於設定在移載地點的基準面P0的斜度ψ(參照圖12)、及物品保持部24繞正交於基準面P0的基準軸C的旋轉角度θ。另外，平面相對位置表示第1方向D1及第2方向D2上的物品保持部24相對於移載地點的相對位置，前述基準面P0是設定成在移載地點上相向於感測器單元3，前述第1方向D1是沿著基準面P0的方向，前述第2方向D2是沿著基準面P0並且正交於第1方向D1的方向。As shown in the perspective view of FIG. 6, the detected unit 4 has a plurality of detected surfaces 40, and the aforementioned plurality of detected surfaces 40 is the sensor unit 3 that can detect at least two of the following as a response to the detection standard The value of the distance K calculated from the point Q: the relative position of the plane showing the relative position of the article holding portion 24 with respect to the transfer location (see FIG. 11), and the inclination of the article holding portion 24 with respect to the reference plane P0 set at the transfer location ψ (refer to FIG. 12) and the rotation angle θ of the article holding portion 24 about the reference axis C orthogonal to the reference plane P0. In addition, the plane relative position indicates the relative position of the article holding portion 24 in the first direction D1 and the second direction D2 with respect to the transfer location, and the aforementioned reference plane P0 is set to face the sensor unit 3 at the transfer location. The first direction D1 is a direction along the reference plane P0, and the second direction D2 is a direction along the reference plane P0 and orthogonal to the first direction D1.

如圖6、圖8等所示，檢測第1方向D1上的平面相對位置的被檢測面40為傾斜平面(第1傾斜平面41)，前述傾斜平面配置成隨著朝向第1方向D1的一側，從檢測基準點Q起算的距離K以一定的比例增加。又，檢測第2方向D2上的平面相對位置的被檢測面40為傾斜平面(第2傾斜平面42)，前述傾斜平面配置成隨著朝向第2方向D2的一側，從檢測基準點Q起算的距離以一定的比例增加。As shown in FIG. 6, FIG. 8, etc., the detected surface 40 that detects the relative position of the plane in the first direction D1 is an inclined plane (first inclined plane 41), and the inclined plane is arranged so as to move toward a first direction D1. On the other hand, the distance K from the detection reference point Q increases by a certain ratio. In addition, the detected surface 40 for detecting the relative position of the plane in the second direction D2 is an inclined plane (second inclined plane 42), and the inclined plane is arranged so as to face one side in the second direction D2 from the detection reference point Q The distance increases by a certain percentage.

檢測斜度的被檢測面40是設置在至少3個地點。這3個被檢測面40(51、52、53)配置成在沒有斜度的情況下從檢測基準點Q起算的距離成為相同，並且為平行於基準面P0的面(非傾斜平面50)。在區別3個非傾斜平面50的每一個的情況下，是稱為第1非傾斜平面51、第2非傾斜平面52、第3非傾斜平面53。第1非傾斜平面51與第2非傾斜平面52是沿著第2方向D2而配置，第2非傾斜平面52與第3非傾斜平面53是沿著第1方向D1而配置。The to-be-detected surface 40 for detecting the inclination is installed in at least three places. These three detected surfaces 40 (51, 52, 53) are arranged so that the distances from the detection reference point Q are the same when there is no slope, and they are surfaces (non-inclined plane 50) parallel to the reference surface P0. When each of the three non-inclined planes 50 is distinguished, they are referred to as a first non-inclined plane 51, a second non-inclined plane 52, and a third non-inclined plane 53. The first non-inclined plane 51 and the second non-inclined plane 52 are arranged along the second direction D2, and the second non-inclined plane 52 and the third non-inclined plane 53 are arranged along the first direction D1.

檢測繞基準軸C的旋轉角度θ的被檢測面40為螺旋狀面43，前述螺旋狀面43配置成隨著繞基準軸C而朝一側旋繞，從檢測基準點Q起算的距離以一定的比例增加。The detected surface 40 that detects the rotation angle θ around the reference axis C is a spiral surface 43. The spiral surface 43 is arranged to spiral toward one side along the reference axis C, and the distance from the detection reference point Q is proportional to increase.

另外，沿著基準面P0之各方向上的被檢測面40的寬度設定成比移載地點與物品保持部24的理論上的偏離之最大值更大。具體而言，第1傾斜平面41設定成：至少沿著基準面P0並且正交於第1方向D1的方向(第2方向D2)的寬度變得比移載地點與物品保持部24的第2方向D2上的理論上的偏離之最大值更大。另外，當然，第1傾斜平面41的第1方向D1的寬度(長度)是比移載地點與物品保持部24之第1方向D1上的理論上的偏離之最大值更大。同樣地，第2傾斜平面42是設定成：至少沿著基準面P0並且正交於第2方向D2的方向(第1方向D1)上的寬度變得比移載地點與物品保持部24的第1方向D1上的理論上的偏離之最大值更大。另外，當然，第2傾斜平面42的第2方向D2的寬度(長度)是比移載地點與物品保持部24之第2方向D2上的理論上的偏離之最大值更大。In addition, the width of the detected surface 40 in each direction along the reference plane P0 is set to be larger than the maximum value of the theoretical deviation between the transfer point and the article holding portion 24. Specifically, the first inclined plane 41 is set such that the width of the direction (the second direction D2) along the reference plane P0 at least and orthogonal to the first direction D1 becomes larger than the width of the second direction between the transfer point and the article holding portion 24. The maximum theoretical deviation in the direction D2 is greater. In addition, of course, the width (length) of the first inclined plane 41 in the first direction D1 is greater than the theoretical maximum value of the deviation between the transfer point and the article holding portion 24 in the first direction D1. Similarly, the second inclined plane 42 is set so that the width in the direction (first direction D1) that is at least along the reference plane P0 and orthogonal to the second direction D2 becomes larger than the width of the transfer point and the article holding portion 24. The maximum value of the theoretical deviation in the 1 direction D1 is greater. In addition, of course, the width (length) of the second inclined plane 42 in the second direction D2 is greater than the theoretical maximum value of the deviation in the second direction D2 of the article holding portion 24 from the transfer point.

又，螺旋狀面43是設定成：在正交於旋繞方向D3的方向上的寬度，會變得比移載地點與物品保持部24之沿著基準面P0的方向上的理論上的偏離之最大值更大。由於可以使旋繞方向D3對應於以基準軸C為中心的圓的圓周，因此正交於旋繞方向D3的方向，相當於正交於該圓周的切線的方向，亦即以基準軸C為中心的圓的直徑方向。從而，螺旋狀面43設定成：以基準軸C為中心的圓的直徑方向上的寬度變得比移載地點與物品保持部24在該直徑方向上的理論上的偏離之最大值更大。又，非傾斜平面50設定成：第1方向D1及第2方向D2上的寬度變得比第1方向D1及第2方向D2上的理論上的偏離之最大值更大。In addition, the spiral surface 43 is set such that the width in the direction orthogonal to the winding direction D3 becomes less than the theoretical deviation between the transfer location and the article holding portion 24 in the direction along the reference plane P0 The maximum value is greater. Since the winding direction D3 can be made to correspond to the circumference of the circle centered on the reference axis C, the direction orthogonal to the winding direction D3 is equivalent to the direction orthogonal to the tangent to the circumference, that is, the reference axis C is the center. The diameter direction of the circle. Therefore, the spiral surface 43 is set so that the width in the diameter direction of the circle centered on the reference axis C becomes larger than the maximum value of the theoretical deviation of the transfer location and the article holding portion 24 in the diameter direction. In addition, the non-inclined plane 50 is set so that the width in the first direction D1 and the second direction D2 becomes larger than the maximum value of the theoretical deviation in the first direction D1 and the second direction D2.

然而，在調整控制時，較佳的是以和搬送控制同樣的條件來進行。如上述，在本實施形態中，由於搬送對象的物品W是容置複數個基板(半導體基板)的收納容器(FOUP)，因此較理想的是在FOUP中設置有感測器單元3。如圖9所示，作為收納容器的FOUP具備：複數道狹縫13，保持複數個基板的每一個；插拔口12，用於供基板在該狹縫13出入；及蓋部14，關閉插拔口12。感測器單元3是被具有和基板同樣的厚度的支撐基板71所支撐，並且藉由支撐基板71受到狹縫13所支撐，而設置於FOUP。However, it is preferable to perform the adjustment control under the same conditions as the conveyance control. As described above, in the present embodiment, since the article W to be conveyed is a storage container (FOUP) that houses a plurality of substrates (semiconductor substrates), it is preferable to provide the sensor unit 3 in the FOUP. As shown in Figure 9, the FOUP as a storage container has: a plurality of slits 13 to hold each of the plurality of substrates; an insertion port 12 for the substrate to enter and exit through the slit 13; and a cover 14 to close the insertion Pull mouth 12. The sensor unit 3 is supported by a support substrate 71 having the same thickness as the substrate, and is supported by the slit 13 via the support substrate 71, and is installed in the FOUP.

成為感測器單元3的核心的感測器本體部30是透過托架72而被支撐基板71懸吊支撐。由於感測器本體部30所進行的檢測方向為下方(朝向FOUP的底部的方向)，因此在FOUP的底部形成有貫穿孔17。感測器單元3是隔著貫穿孔17而與被檢測單元4相向，並且檢測出感測器單元3與被檢測單元4的各被檢測點R之間的距離K。另外，亦可在FOUP的底部的一部分或低部的整面已接觸於調整用載置台204的上表面的狀態下，進行距離K的檢測。因此，貫穿孔17是設定成以下大小：即使物品保持部24與調整用載置台204的位置關係，從理想的位置關係偏離到最大誤差範圍的情況下，仍然可使感測器單元3的整體容納於貫穿孔17的內側之大小。The sensor main body 30 that is the core of the sensor unit 3 is suspended and supported by the support substrate 71 through the bracket 72. Since the detection direction performed by the sensor body portion 30 is downward (the direction toward the bottom of the FOUP), a through hole 17 is formed in the bottom of the FOUP. The sensor unit 3 faces the detected unit 4 with the through hole 17 interposed therebetween, and detects the distance K between the sensor unit 3 and each detected point R of the detected unit 4. In addition, the detection of the distance K may be performed in a state where a part of the bottom portion or the entire surface of the lower portion of the FOUP is in contact with the upper surface of the adjustment mounting table 204. Therefore, the through hole 17 is set to a size such that even if the positional relationship between the article holding portion 24 and the adjustment stage 204 deviates from the ideal positional relationship to the maximum error range, the entire sensor unit 3 can still be The size accommodated inside the through hole 17.

如圖9所示，在支撐基板71上也懸吊支撐有放大器單元34。又，雖然省略圖示，例如，電池或DC-DC轉換器等之電源單元、或通訊單元、可程式控制器36等，也是載置於支撐基板71的上表面、或是懸吊支撐於下表面。又，在FOUP中，在插拔口12的相反側上形成有窗部18。顯示器35是被支撐基板71懸吊支撐成使作業人員可以透過窗部18而從FOUP的外部來視覺辨識。另外，窗部18是構成為可取下，藉由取下窗部18，作業人員可以操作顯示器35的觸控面板，而可以例如如上述地在攝影圖像上設定被檢測點R，前述攝影圖像是在基準位置關係中所拍攝之被檢測單元4的攝影圖像。As shown in FIG. 9, the amplifier unit 34 is also suspended and supported on the support substrate 71. Also, although the illustration is omitted, for example, power supply units such as batteries or DC-DC converters, or communication units, programmable controller 36, etc., are also placed on the upper surface of the support substrate 71 or suspended and supported underneath. surface. In addition, in the FOUP, a window 18 is formed on the opposite side of the insertion port 12. The display 35 is suspended and supported by the support substrate 71 so that the operator can visually recognize it from the outside of the FOUP through the window 18. In addition, the window portion 18 is configured to be detachable. By removing the window portion 18, the operator can operate the touch panel of the display 35, and the detected point R can be set on the photographed image, for example, as described above. It is like a photographed image of the detected unit 4 taken in the reference position relationship.

如圖9及圖10所示，在支撐基板71上，形成有朝向插拔口12的方向，亦即蓋部14的方向突出的突出部73。又，在蓋部14中，在已關閉插拔口12的狀態下，在相向於突出部73的位置上形成有凹部14a。支撐感測器單元3的支撐基板71是藉由FOUP的狹縫13所支撐，且突出部73是藉由凹部14a來限制，藉此來進行支撐基板71之沿著狹縫13的方向的定位。亦即，感測器單元3是藉由狹縫13所支撐，並且藉由蓋部14來進行沿著狹縫13的方向的定位。As shown in FIGS. 9 and 10, the support substrate 71 is formed with a protrusion 73 that protrudes in the direction of the insertion opening 12, that is, in the direction of the cover 14. In addition, in the lid portion 14, in a state where the plug-in port 12 is closed, a recessed portion 14 a is formed at a position facing the protruding portion 73. The support substrate 71 supporting the sensor unit 3 is supported by the slit 13 of the FOUP, and the protrusion 73 is restricted by the recess 14a, thereby positioning the support substrate 71 in the direction of the slit 13 . That is, the sensor unit 3 is supported by the slit 13 and is positioned along the direction of the slit 13 by the cover 14.

以下，參照圖11及圖12，來說明已檢測的距離K與相對位置關係的對應。如下述所說明，可以依據距離K，來求出顯示相對位置關係的平面相對位置、斜度ψ、旋轉角度θ。依據距離K的運算，亦可藉由例如感測器單元3的放大器單元34或未圖示的控制器來執行，亦可藉由搬送設備控制裝置H等和感測器單元3不同的控制器來執行。Hereinafter, the correspondence between the detected distance K and the relative position relationship will be described with reference to FIGS. 11 and 12. As described below, the relative position of the plane, the inclination ψ, and the rotation angle θ that show the relative position relationship can be obtained based on the distance K. The calculation based on the distance K can also be performed by, for example, the amplifier unit 34 of the sensor unit 3 or a controller not shown in the figure, or by a controller different from the sensor unit 3 such as the conveyor control device H To execute.

在沿著基準面P0的方向上物品保持部24與被檢測單元4的相對位置偏離基準位置關係的情況下，物品保持部24與感測器單元3的相對位置也會偏離基準位置關係。圖11的傾斜面表示第1傾斜平面41、第2傾斜平面42、螺旋狀面43。例如，在相對位置相對於基準位置關係而朝第1方向D1偏離的情況下，從檢測基準點Q起算之第1傾斜平面41上的被檢測點，會成為從已設定的被檢測點R偏離的點R’。同樣地，在相對位置相對於基準位置關係而朝第2方向D2偏離的情況下，從檢測基準點Q起算之第2傾斜平面42上的被檢測點，會成為從已設定的被檢測點R偏離的點R’。又，在相對位置繞基準軸C而相對於基準位置關係旋繞的情況下，從檢測基準點Q起算之螺旋狀面43上的被檢測點，會成為從已設定的被檢測點R偏離的點R’。When the relative position of the article holding portion 24 and the detected unit 4 in the direction along the reference plane P0 deviates from the reference position relationship, the relative position of the article holding portion 24 and the sensor unit 3 also deviates from the reference position relationship. The inclined surface in FIG. 11 shows the first inclined plane 41, the second inclined plane 42, and the spiral surface 43. For example, when the relative position deviates in the first direction D1 from the reference position relationship, the detected point on the first inclined plane 41 from the detection reference point Q will deviate from the set detected point R The point R'. Similarly, when the relative position deviates in the second direction D2 from the reference position relationship, the detected point on the second inclined plane 42 from the detection reference point Q will be from the set detected point R The point of deviation R'. In addition, when the relative position revolves around the reference axis C with respect to the reference position relationship, the detected point on the spiral surface 43 from the detection reference point Q will be a point deviated from the set detected point R R'.

在產生像這樣的偏離的情況下，第1傾斜平面41、第2傾斜平面42、螺旋狀面43與檢測基準點Q之間的距離K會成為包含誤差ΔK的值。若將往第1方向D1的偏離量設為d，並且將第1傾斜平面41相對於基準面P0的傾斜角度設為S，則誤差ΔK與偏離量d的關係可以藉由三角函數的正切來表示成“tanS＝ΔK/d”。從而，往第1方向D1的偏離量d可以依據第1傾斜平面41相對於基準面P0的傾斜角度S來運算。同樣地，往第2方向D2的偏離量d也可以依據第2傾斜平面42相對於基準面P0的傾斜角度S來運算。如此進行，可以藉由求出第1方向D1及第2方向D2上的相對位置，來求出平面相對位置。另外，傾斜角度S亦可在第1傾斜平面41與第2傾斜平面42中為相同，亦可為不同。When such a deviation occurs, the distance K between the first inclined plane 41, the second inclined plane 42, the spiral surface 43 and the detection reference point Q becomes a value including the error ΔK. If the deviation to the first direction D1 is set to d, and the inclination angle of the first inclined plane 41 with respect to the reference plane P0 is set to S, the relationship between the error ΔK and the deviation d can be determined by the tangent of the trigonometric function It is expressed as "tanS=ΔK/d". Therefore, the deviation amount d in the first direction D1 can be calculated based on the inclination angle S of the first inclined plane 41 with respect to the reference plane P0. Similarly, the deviation amount d in the second direction D2 can also be calculated based on the inclination angle S of the second inclined plane 42 with respect to the reference plane P0. In this way, the relative position of the plane can be obtained by obtaining the relative position in the first direction D1 and the second direction D2. In addition, the inclination angle S may be the same in the first inclined plane 41 and the second inclined plane 42 or may be different.

又，螺旋狀面43上的偏離量d相當於沿著圓的圓周的長度，前述圓是在平行於基準面P0的面上將連結基準軸C與被檢測點R的線段設為半徑r的圓。此偏離量d可以使用旋繞方向D3上的位移量(旋轉角度θ)來表示成“d＝2rπ・(θ/2π)＝rθ”(π：圓周率)。偏離量d可以和第1方向D1及第2方向D2同樣地，依據誤差ΔK與螺旋狀面43的傾斜角度S來求出。 並且，可以依據半徑r與圓周上的偏離量d來運算出旋繞方向D3上的位移量(旋轉角度θ)。In addition, the amount of deviation d on the spiral surface 43 corresponds to the length along the circumference of the circle, and the circle is the radius r of the line connecting the reference axis C and the detected point R on the plane parallel to the reference plane P0. round. The amount of deviation d can be expressed as "d=2rπ·(θ/2π)=rθ" (π: the ratio of circumference) using the amount of displacement (rotation angle θ) in the winding direction D3. The amount of deviation d can be obtained from the error ΔK and the inclination angle S of the spiral surface 43 in the same manner as in the first direction D1 and the second direction D2. Furthermore, the displacement amount (rotation angle θ) in the winding direction D3 can be calculated based on the deviation amount d between the radius r and the circumference.

如上述，檢測斜度的3個非傾斜平面50是配置成：在沒有斜度的情況下，從檢測基準點Q起算的距離K成為相同。但是，如圖12所示，當物品保持部24與基準面P0的位置關係產生斜度ψ時，在以下的一方或雙方中會產生誤差ΔH：在從檢測基準點Q到第1非傾斜平面51的距離K與從檢測基準點Q到第2非傾斜平面52的距離K之間、以及從檢測基準點Q到第2非傾斜平面52的距離K與從檢測基準點Q到第3非傾斜平面53的距離K之間。沿著第2方向D2而配置的第1非傾斜平面51及第2非傾斜平面52上的誤差ΔH(ΔH1)，可以近似於圓的圓周上的長度，前述圓是將距離L(第1距離L1)設為半徑的圓，前述距離L是第1非傾斜平面51上的被檢測點R與第2非傾斜平面52上的被檢測點R之沿著基準面P0的方向上的距離。並且，相對於基準面P0的斜度ψ(ψ1)、誤差ΔH(ΔH1)、及距離L(第1距離L1)的關係，可以表示成“tanψ1＝L1/ΔH1”。從而，可以依據誤差ΔH(ΔH1)，來運算出第2方向D2上之相對於基準面P0的斜度ψ(ψ1)。As described above, the three non-inclined planes 50 for detecting the inclination are arranged so that the distance K from the detection reference point Q becomes the same when there is no inclination. However, as shown in FIG. 12, when the positional relationship between the article holding portion 24 and the reference plane P0 generates an inclination ψ, an error ΔH may occur in one or both of the following: from the detection reference point Q to the first non-inclined plane The distance K between 51 and the distance K from the detection reference point Q to the second non-inclined plane 52, and the distance K from the detection reference point Q to the second non-inclined plane 52 and the distance K from the detection reference point Q to the third non-inclined plane 52 The distance K between the plane 53. The error ΔH (ΔH1) on the first non-inclined plane 51 and the second non-inclined plane 52 arranged along the second direction D2 can be approximated by the length of the circle on the circumference. The aforementioned circle is the distance L (the first distance L1) is a circle with a radius, and the aforementioned distance L is the distance between the detected point R on the first non-inclined plane 51 and the detected point R on the second non-inclined plane 52 in the direction along the reference plane P0. In addition, the relationship between the inclination ψ (ψ1), the error ΔH (ΔH1), and the distance L (first distance L1) with respect to the reference plane P0 can be expressed as "tanψ1=L1/ΔH1". Therefore, the inclination ψ(ψ1) in the second direction D2 with respect to the reference plane P0 can be calculated based on the error ΔH(ΔH1).

同樣地，沿著第1方向D1而配置的第2非傾斜平面52及第3非傾斜平面53上的誤差ΔH(ΔH2)，可以近似於圓的圓周上的長度，前述圓是將距離L(第2距離L2)設為半徑r的圓，前述距離L是第2非傾斜平面52上的被檢測點R與第3非傾斜平面53上的被檢測點R之沿著基準面P0的方向上的距離。並且，相對於基準面P0的斜度ψ(ψ2)、誤差ΔH(ΔH2)、及距離L(第2距離L2)的關係，可以表示成“tanψ2＝L2/ΔH2”。從而，可以根據誤差ΔH(ΔH2)，來運算出第2方向D2上之相對於基準面P0的斜度ψ(ψ2)。並且，可以依據第2方向D2上的斜度ψ1、與第1方向D1上的斜度ψ2，來運算出物品保持部24相對於基準面P0的斜度ψ。Similarly, the error ΔH(ΔH2) on the second non-inclined plane 52 and the third non-inclined plane 53 arranged along the first direction D1 can be approximated by the length of the circle on the circumference, and the aforementioned circle is the distance L( The second distance L2) is a circle with a radius r. The aforementioned distance L is the direction along the reference plane P0 between the detected point R on the second non-inclined plane 52 and the detected point R on the third non-inclined plane 53 distance. In addition, the relationship between the inclination ψ (ψ2), the error ΔH (ΔH2), and the distance L (second distance L2) with respect to the reference plane P0 can be expressed as "tanψ2=L2/ΔH2". Therefore, it is possible to calculate the inclination ψ(ψ2) in the second direction D2 with respect to the reference plane P0 based on the error ΔH(ΔH2). In addition, the inclination ψ of the article holding portion 24 with respect to the reference plane P0 can be calculated based on the inclination ψ1 in the second direction D2 and the inclination ψ2 in the first direction D1.

然而，在平面相對位置(第1方向D1及第2方向D2上的相對位置) 偏離基準位置關係的情況下，即使旋轉角度與基準位置關係一致，仍然會有相對於螺旋狀面43的距離K產生誤差ΔK的可能性。相反地，當旋轉角度θ偏離基準位置關係的情況下，會有相對於第1傾斜平面41及第2傾斜平面42的距離K產生誤差ΔK的可能性。針對與斜度ψ的關係也可說是同樣的。從而，如上述，在求出平面相對位置、旋轉角度θ、斜度ψ時，較佳的是考慮相對於每一個被檢測面40的距離K的檢測結果。However, when the plane relative position (the relative position in the first direction D1 and the second direction D2) deviates from the reference position relationship, even if the rotation angle is consistent with the reference position relationship, there will still be a distance K relative to the spiral surface 43 The possibility of error ΔK. Conversely, when the rotation angle θ deviates from the reference positional relationship, there is a possibility that an error ΔK may occur in the distance K between the first inclined plane 41 and the second inclined plane 42. The same can be said for the relationship with the slope ψ. Therefore, as described above, when determining the relative position of the plane, the rotation angle θ, and the inclination ψ, it is preferable to consider the detection result of the distance K with respect to each detected surface 40.

[其他的實施形態] 以下，針對其他的實施形態進行說明。另外，以下說明的各實施形態的構成，並不限定於以各自單獨的方式來適用的構成，只要沒有發生矛盾，也可以與其他實施形態的構成組合來應用。[Other embodiments] Hereinafter, other embodiments will be described. In addition, the configuration of each embodiment described below is not limited to the configuration applied individually, and it can be applied in combination with the configuration of other embodiments as long as there is no contradiction.

(1)在上述中是例示下述形態來說明：在感測器單元3中具備顯示攝影圖像的顯示器35，且作業人員是在顯示器35所顯示的攝影圖像(被檢測單元4)上設定被檢測點R。但是，亦可如圖13所例示地為下述形態：在不具備顯示器35的情形下，將個人電腦或平板電腦等之電腦37連接於放大器單元34，而在電腦37的螢幕上設定被檢測點R。又，放大器單元34與電腦37的連接形態，並不限定於藉由纜線等的有線連接，亦可為使用了近距離無線通訊等的無線連接。(1) In the above description, the following mode is exemplified: the sensor unit 3 is provided with a display 35 that displays a photographed image, and the operator is on the photographed image (detected unit 4) displayed on the display 35 Set the detected point R. However, as shown in FIG. 13 exemplified in the following form: without a display 35, a computer 37 such as a personal computer or a tablet computer is connected to the amplifier unit 34, and the setting is detected on the screen of the computer 37 Click R. In addition, the connection form of the amplifier unit 34 and the computer 37 is not limited to a wired connection by a cable or the like, and may be a wireless connection using short-range wireless communication or the like.

(2)在上述中是例示了下述形態：物品保持部24所保持的第1單元1為感測器單元3，設置於移載地點的第2單元2為被檢測單元4。但是，物品保持部24所保持的第1單元1亦可為被檢測單元4，設置於移載地點的第2單元2亦可為感測器單元3。例如，亦可將感測器單元3設置於調整用載置台204，並且在物品保持部24所保持的FOUP中設置被檢測單元4。(2) In the above, the following is exemplified: the first unit 1 held by the article holding portion 24 is the sensor unit 3, and the second unit 2 installed at the transfer location is the unit 4 to be detected. However, the first unit 1 held by the article holding portion 24 may be the unit 4 to be detected, and the second unit 2 installed at the transfer location may be the sensor unit 3. For example, the sensor unit 3 may be installed on the mounting table 204 for adjustment, and the detected unit 4 may be installed in the FOUP held by the article holding portion 24.

(3)在上述中，例示了將感測器單元3設置於作為物品W的FOUP之形態。但是，在物品W不是FOUP，而是容置倍縮光罩的光罩盒的情形下，亦可利用該光罩盒來構成位置關係檢測系統100。另外，一般而言，光罩盒是比FOUP更薄型，會有難以如上述所例示的形態地容置感測器單元3的情況。從而，在物品搬送設備200所搬送的對象之物品W為光罩盒的情況下，較理想的是，物品保持部24所保持的第1單元1為被檢測單元4，設置於移載地點的第2單元2為感測器單元3。當然，即使在物品W為光罩盒的情況下，第1單元1亦可為感測器單元3，且第2單元2亦可為被檢測單元4。(3) In the above, the form in which the sensor unit 3 is installed in the FOUP as the article W has been exemplified. However, in the case where the article W is not a FOUP, but a reticle box accommodating a shrinking reticle, the reticle box may also be used to form the positional relationship detection system 100. In addition, generally speaking, the mask box is thinner than the FOUP, and it may be difficult to accommodate the sensor unit 3 in the form exemplified above. Therefore, when the object W to be conveyed by the article conveying device 200 is a mask box, it is preferable that the first unit 1 held by the article holding portion 24 is the unit 4 to be detected and is installed at the transfer location. The second unit 2 is the sensor unit 3. Of course, even when the article W is a mask box, the first unit 1 may be the sensor unit 3, and the second unit 2 may be the unit 4 to be detected.

(4)在上述中，雖然是以作為物品保持部24相對於移載地點的位置關係，而求出平面相對位置、斜度ψ、及旋轉角度θ之3個的構成作為例子來進行了說明，但是亦可為僅求出這3個當中的任2個的構成。在此情況下，被檢測單元4是設為不具備第1傾斜平面41及第2傾斜平面42、3個非傾斜平面50、及螺旋狀面43之其中一者的構成。(4) In the above description, the configuration in which the relative position of the plane, the inclination ψ, and the rotation angle θ are obtained as the positional relationship of the article holding portion 24 with respect to the transfer point is taken as an example. , But it can also be a configuration in which only any two of these three are found. In this case, the detected unit 4 has a configuration that does not include one of the first inclined plane 41 and the second inclined plane 42, the three non-inclined planes 50, and the spiral surface 43.

(5)在上述中是以下述構成為例進行了說明：支撐感測器單元3的支撐基板71是藉由FOUP的狹縫13來支撐，並且藉由蓋部14的凹部14a來進行沿著狹縫13的方向的定位。但是並不限定於此，亦可為感測器單元3是藉由其他方法來相對於物品保持部24而支撐及定位的構成。(5) In the above description, the following configuration is taken as an example: the support substrate 71 supporting the sensor unit 3 is supported by the slit 13 of the FOUP, and is carried along by the recess 14a of the cover 14 Positioning of the direction of the slit 13. However, it is not limited to this, and the sensor unit 3 may be supported and positioned with respect to the article holding portion 24 by other methods.

(6)在上述中，雖然例示了天花板搬送車來作為物品搬送車20，但是物品搬送車20亦可為在鋪設於地板面上的軌道上行走的地上搬送車或堆高式起重機等。(6) In the above, although the ceiling transport vehicle is exemplified as the article transport vehicle 20, the article transport vehicle 20 may be an over-ground transport vehicle or a stacker crane that runs on a track laid on the floor.

[實施形態之概要] 以下，針對在上述中已說明的位置關係檢測系統的概要來簡單地說明。[Summary of Implementation Mode] Hereinafter, the outline of the positional relationship detection system explained above will be briefly explained.

作為1個態樣，位置關係檢測系統是在具備物品搬送車的物品搬送設備中檢測位置關係的位置關係檢測系統，前述物品搬送車具備在搬送起點及搬送目的地之移載地點之間移載物品的移載裝置，且在前述搬送起點與前述搬送目的地之間搬送物品，前述位置關係是前述移載裝置所具備的物品保持部相對於前述移載地點的位置關係，前述位置關係檢測系統具備：第1單元，保持於前述物品保持部；及第2單元，設置於前述移載地點，前述第1單元及前述第2單元的一者為感測器單元，另一者為具備前述感測器單元的檢測對象之被檢測單元，前述感測器單元是檢測出從該感測器單元中的檢測基準點到設定於前述被檢測單元的複數個被檢測點之間的距離，前述被檢測單元是具備複數個被檢測面而立體地形成，前述複數個被檢測面可檢測出平面相對位置、斜度及旋轉角度當中的至少2個，來作為因應於從前述檢測基準點起算的距離的值，前述平面相對位置表示在沿著基準面之第1方向及沿著前述基準面並且正交於前述第1方向的第2方向中之前述物品保持部相對於前述移載地點的相對位置，前述基準面被設定成在前述移載地點上相向於前述感測器單元，前述斜度為前述物品保持部相對於前述基準面的斜度，前述旋轉角度是繞與前述基準面正交的基準軸之前述物品保持部的旋轉角度。As one aspect, the positional relationship detection system is a positional relationship detection system that detects the positional relationship in an article transport facility equipped with an article transport vehicle. The article transport vehicle is equipped to transfer between the transfer starting point and the transfer destination. An article transfer device, and the article is transferred between the transfer start point and the transfer destination, the positional relationship is the positional relationship of the article holding portion of the transfer device with respect to the transfer location, and the positional relationship detection system Equipped with: a first unit held in the article holding portion; and a second unit installed at the transfer location, one of the first unit and the second unit is a sensor unit, and the other is equipped with the sensor The detected unit of the detection target of the sensor unit, the aforementioned sensor unit detects the distance from the detection reference point in the sensor unit to the plurality of detected points set in the aforementioned detected unit, and the aforementioned is The detection unit is three-dimensionally formed with a plurality of detected surfaces. The plurality of detected surfaces can detect at least two of the relative position, inclination, and rotation angle of the plane as a function of the distance calculated from the detection reference point. The relative position of the plane indicates the relative position of the article holding portion relative to the transfer point in the first direction along the reference plane and the second direction along the reference plane and orthogonal to the first direction The reference surface is set to face the sensor unit at the transfer location, the slope is the slope of the article holding portion with respect to the reference surface, and the rotation angle is about orthogonal to the reference surface The rotation angle of the aforementioned article holding portion of the reference axis.

根據此構成，可藉由1個感測器單元來檢測出從檢測基準點到複數個被檢測點之間的距離。由於不需要安裝複數個感測器，因此也不需要考慮到複數個感測器彼此的安裝精度等，而可以用簡單的構成來確保檢測精度。又，在立體地形成的被檢測單元中，具備有複數個被檢測面，前述被檢測面可以將平面相對位置、斜度、旋轉角度當中的至少2個，檢測作為因應於從檢測基準點起算的距離的值。從而，可以藉由1個感測器單元來檢測出顯示物品保持部相對於移載地點的位置關係之平面相對位置、斜度、旋轉角度當中的至少2個。如此，根據本構成，可以提供以更簡單的構成來適當地檢測物品搬送車的物品保持部與移載地點的位置關係之技術。According to this configuration, one sensor unit can detect the distance from the detection reference point to a plurality of detected points. Since there is no need to install a plurality of sensors, there is no need to consider the installation accuracy of the plurality of sensors, etc., and the detection accuracy can be ensured with a simple configuration. In addition, the three-dimensionally formed detection unit is provided with a plurality of detection surfaces, and the detection surface can be based on at least two of the relative position, inclination, and rotation angle of the plane. The value of the distance. Therefore, at least two of the relative position, the inclination, and the rotation angle of the plane indicating the positional relationship of the article holding portion with respect to the transfer location can be detected by one sensor unit. In this way, according to the present structure, it is possible to provide a technique for appropriately detecting the positional relationship between the article holding portion of the article transport vehicle and the transfer location with a simpler structure.

在此，較理想的是，檢測前述第1方向上的前述平面相對位置的前述被檢測面為傾斜平面，前述傾斜平面配置成隨著朝向前述第1方向的一側，從前述檢測基準點起算的距離以一定的比例增加，檢測前述第2方向上的前述平面相對位置的前述被檢測面為傾斜平面，前述傾斜平面配置成隨著朝向前述第2方向的一側，從前述檢測基準點起算的距離是以一定的比例增加。Here, it is more desirable that the detected surface that detects the relative position of the plane in the first direction is an inclined plane, and the inclined plane is arranged so as to face one side in the first direction from the detection reference point. The distance increases by a certain ratio, and the detected surface that detects the relative position of the plane in the second direction is an inclined plane, and the inclined plane is arranged to move toward the side of the second direction from the detection reference point The distance is increased by a certain percentage.

根據此構成，在第1方向上物品保持部與移載地點的相對位置從已規定的位置偏離的情況下，從檢測基準點起算的距離會成為和正常的情況不同的值。只要依據已檢測之從檢測基準點起算的距離與規定的距離之差分、以及傾斜面的傾斜角度，就可以求出第1方向上的偏離量。同樣地，在第2方向上，只要依據已檢測之從檢測基準點起算的距離與規定的距離之差分、以及傾斜面的傾斜角度，也可以求出第2方向上的偏離量。According to this configuration, when the relative position of the article holding portion and the transfer point in the first direction deviates from the predetermined position, the distance from the detection reference point becomes a value different from the normal case. The amount of deviation in the first direction can be obtained based on the difference between the detected distance from the detection reference point and the predetermined distance, and the inclination angle of the inclined surface. Similarly, in the second direction, the amount of deviation in the second direction can be obtained based on the difference between the detected distance from the detection reference point and the predetermined distance, and the inclination angle of the inclined surface.

又，較理想的是，檢測前述斜度的前述被檢測面為平行於前述基準面的面，且設置在至少3個地點，並且配置成在沒有前述斜度的情況下從前述檢測基準點起算的距離成為相同。Furthermore, it is more desirable that the detected surface for detecting the inclination is a surface parallel to the reference surface, and is installed in at least three locations, and is arranged to be counted from the detection reference point without the inclination. The distance becomes the same.

根據此構成，在產生有斜度的情況下，針對至少1個被檢測面之從檢測基準點起算的距離，是成為和針對其他被檢測面之從檢測基準點的距離不同的值。從而，可以依據該距離的差分、與已產生差分的2個被檢測面之沿著基準面的方向的距離，來求出斜度的程度(角度)。由於可以藉由設定3個地點以上的檢測面，來求出不同的2個方向上的斜度，因此能夠以更好的精度來求出物品保持部相對於基準面的斜度。According to this configuration, when there is a slope, the distance from the detection reference point for at least one detected surface is a different value from the distance from the detection reference point for other detected surfaces. Therefore, the degree of inclination (angle) can be obtained from the difference in the distance and the distance along the reference plane between the two detected surfaces where the difference has occurred. Since the inclination in two different directions can be obtained by setting the detection surface at three or more locations, the inclination of the article holding portion with respect to the reference surface can be obtained with better accuracy.

又，較理想的是，檢測前述旋轉角度的前述被檢測面為螺旋狀面，前述螺旋狀面配置成隨著繞前述基準軸朝一側旋繞，從前述檢測基準點起算的距離以一定的比例增加。Furthermore, it is more desirable that the detected surface for detecting the rotation angle is a spiral surface, and the spiral surface is arranged so that the distance from the detection reference point increases by a certain ratio as it revolves around the reference axis to one side. .

根據此構成，在繞基準軸旋繞的方向上物品保持部與移載地點的相對位置從已規定的位置偏離的情況下，從檢測基準點起算的距離會成為和正常的情況不同的值。只要依據已檢測之從檢測基準點起算的距離與規定的距離之差分、以及螺旋狀面的傾斜角度，就可以求出旋繞方向上的偏離量。並且，只要依據例如該偏離量、與繞基準軸旋繞1圈的情況下之旋繞距離，就可以求出物品保持部的旋轉角度。According to this configuration, when the relative position of the article holding portion and the transfer location in the direction of the rotation around the reference axis deviates from the predetermined position, the distance from the detection reference point becomes a value different from the normal situation. As long as the difference between the detected distance from the detection reference point and the predetermined distance, and the inclination angle of the spiral surface, the amount of deviation in the winding direction can be obtained. In addition, the rotation angle of the article holding portion can be obtained based on, for example, the deviation amount and the winding distance in the case of one revolution around the reference axis.

又，較理想的是，沿著前述基準面之各方向上的前述被檢測面的寬度，是比前述移載地點與前述物品保持部的理論上的偏離之最大值更大。Furthermore, it is desirable that the width of the detected surface along each direction of the reference surface is greater than the maximum value of the theoretical deviation between the transfer point and the article holding portion.

當移載地點與物品保持部的偏離變大到使被檢測點偏離被檢測面後，會變得無法檢測出移載地點與物品保持部的相對位置或姿勢。當被檢測面的寬度比移載地點與物品保持部的理論上的偏離之最大值更大時，則可以減少被檢測點從被檢測面偏離的可能性，而能夠以較好的精度來檢測移載地點與物品保持部的位置關係。When the deviation between the transfer location and the article holding portion becomes so large that the detected point deviates from the detection surface, it becomes impossible to detect the relative position or posture of the transfer location and the article holding portion. When the width of the detected surface is greater than the maximum value of the theoretical deviation between the transfer location and the article holding part, the possibility of the detected point deviating from the detected surface can be reduced, and the detection can be performed with better accuracy The positional relationship between the transfer location and the article holding part.

又，較理想的是，前述物品是容置複數個基板的收納容器，前述收納容器具備：複數道狹縫，保持複數個前述基板的每一個；插拔口，用於供前述基板在該狹縫出入；及蓋部，關閉前述插拔口，前述感測器單元是藉由前述狹縫來支撐，並且藉由前述蓋部來進行沿著前述狹縫的方向的定位。Furthermore, it is more desirable that the aforementioned article is a storage container for accommodating a plurality of substrates, and the aforementioned storage container is provided with: a plurality of slits to hold each of the plurality of substrates; Slit in and out; and the cover, closing the insertion port, the sensor unit is supported by the slit, and positioning along the direction of the slit is performed by the cover.

物品保持部與移載地點的位置關係，藉由使用實際上對應於物品搬送設備的搬送對象之物品的形狀或重量的檢查用的單元，能夠以更好的精度來檢測的可能性會變高。從而，在搬送對象的物品為收納容器的情況下，較理想的是使用該收納容器來構成檢查用的單元。例如，在物品保持部所保持的第1單元為感測器單元的情況下，是如本構成所示，利用保持基板的狹縫來保持感測器單元，並且利用關閉收納容器的插拔口的蓋部，來進行感測器單元的定位。從而，可以在搬送對象的收納容器中，適當地設置感測器單元，而可以建構能夠以較好的精度來檢測物品保持部與移載地點的位置關係之位置關係檢測系統。The positional relationship between the article holding part and the transfer location, by using an inspection unit that actually corresponds to the shape or weight of the article to be conveyed by the article conveying equipment, it is more likely to be able to detect with better accuracy. . Therefore, when the article to be conveyed is a storage container, it is preferable to use the storage container to constitute an inspection unit. For example, when the first unit held by the article holder is a sensor unit, as shown in this configuration, the sensor unit is held by the slit holding the substrate, and the insertion port of the storage container is closed. The cover part of the sensor unit is used to position the sensor unit. Therefore, the sensor unit can be appropriately installed in the container to be transported, and a positional relationship detection system that can detect the positional relationship between the article holding portion and the transfer location with high accuracy can be constructed.

1:第1單元 2:第2單元 3:感測器單元 4:被檢測單元 12:插拔口 13:狹縫 14:蓋部 14a:凹部 15:容置部 16:凸緣部 17:貫穿孔 18:窗部 20:物品搬送車 21:作動控制部 22:行走部 22a:行走車輪 22m:行走用馬達 23:本體部 23c:罩體 24:物品保持部 24a:把持爪 24m:把持用馬達 25:升降部 25a:捲繞體 25b:捲取帶 25m:升降用馬達 26:滑動部 26a:中繼部 26m:滑動用馬達 27:旋轉部 27a:旋轉體 27m:旋轉用馬達 28:移載裝置 29:設定檔儲存部 30:感測器本體部 31:圖像感測器 32:雷射器 34:放大器單元 35:顯示器 36:可程式控制器 37:電腦 40:被檢測面 41:第1傾斜平面(傾斜平面) 42:第2傾斜平面(傾斜平面) 43:螺旋狀面 50:非傾斜平面(為用於檢測斜度的被檢測面且平行於基準面的面) 51:第1非傾斜平面(非傾斜平面) 52:第2非傾斜平面(非傾斜平面) 53:第3非傾斜平面(非傾斜平面) 71:支撐基板 72:托架 73:突出部 100:位置關係檢測系統 200:物品搬送設備 202:處理裝置 203:載置台 204:調整用載置台 205:支撐托架 C:基準軸 d:偏離量 D1:第1方向 D2:第2方向 D3:旋繞方向 E1:第1區域 E2:第2區域 H:搬送設備控制裝置 K:距離 L:距離 L1:第1距離 L2:第2距離 LT:行走路徑 Lp:主路徑 Ls:副路徑 P0:基準面 Q:檢測基準點 QP:檢測基準面 R:被檢測點 R’:點 RL:行走軌道 S:傾斜角度 W:物品 X:橫向 Y:行走方向 Z:縱軸心 θ:旋轉角度 ψ,ψ1,ψ2:斜度 ΔH,ΔK:誤差1: Unit 1 2: Unit 2 3: Sensor unit 4: Detected unit 12: Socket 13: slit 14: Lid 14a: recess 15: Containment Department 16: Flange 17: Through hole 18: Window 20: Item transport vehicle 21: Action Control Department 22: Walking part 22a: walking wheel 22m: walking motor 23: body part 23c: cover 24: Item holding department 24a: holding claw 24m: control motor 25: Lifting part 25a: winding body 25b: take-up tape 25m: Lifting motor 26: Sliding part 26a: Relay Department 26m: sliding motor 27: Rotating part 27a: Rotating body 27m: Rotating motor 28: Transfer device 29: Configuration file storage section 30: Sensor body 31: Image sensor 32: Laser 34: Amplifier unit 35: display 36: programmable controller 37: Computer 40: detected surface 41: The first inclined plane (inclined plane) 42: The second inclined plane (inclined plane) 43: Spiral surface 50: Non-inclined plane (the surface that is used to detect the inclination and is parallel to the reference plane) 51: The first non-inclined plane (non-inclined plane) 52: The second non-inclined plane (non-inclined plane) 53: The third non-inclined plane (non-inclined plane) 71: Support substrate 72: bracket 73: protrusion 100: Position relationship detection system 200: Item handling equipment 202: processing device 203: Placing Table 204: Adjustment table 205: Support bracket C: reference axis d: deviation D1: 1st direction D2: 2nd direction D3: Spinning direction E1: Zone 1 E2: Zone 2 H: Conveying equipment control device K: distance L: distance L1: 1st distance L2: 2nd distance LT: walking path Lp: main path Ls: secondary path P0: datum plane Q: Detection reference point QP: Detection reference surface R: detected point R’: point RL: walking track S: tilt angle W: Item X: horizontal Y: walking direction Z: Longitudinal axis θ: Rotation angle ψ, ψ1, ψ2: slope ΔH, ΔK: error

圖1是示意地顯示物品搬送設備的構成的圖。 圖2是物品搬送車的側面圖。 圖3是示意地顯示物品搬送設備及物品搬送車的系統構成的方塊圖。 圖4是顯示物品搬送車及載置台的側面圖。 圖5是顯示感測器單元的一例的方塊圖。 圖6是顯示被檢測單元的一例的立體圖。 圖7是顯示設定於被檢測單元的被檢測點之一例的平面圖。 圖8是顯示設定於被檢測單元的被檢測點之一例的側面圖。 圖9是顯示設置於容器的感測器單元與設置於載置台的被檢測單元之一例的立體圖。 圖10是設置有感測器單元的容器的截面圖。 圖11是顯示檢測基準點與被檢測點之間的距離產生位置偏離的例子的圖。 圖12是顯示物品保持部相對於基準面而傾斜的例子的圖。 圖13是顯示感測器單元的其他例的方塊圖。Fig. 1 is a diagram schematically showing the configuration of an article conveying facility. Fig. 2 is a side view of the article transport vehicle. Fig. 3 is a block diagram schematically showing the system configuration of the article transport equipment and article transport vehicle. Fig. 4 is a side view showing the article transport vehicle and the mounting table. Fig. 5 is a block diagram showing an example of a sensor unit. Fig. 6 is a perspective view showing an example of a detected unit. Fig. 7 is a plan view showing an example of a detected point set in a detected unit. Fig. 8 is a side view showing an example of a detected point set in a detected unit. Fig. 9 is a perspective view showing an example of a sensor unit provided on a container and a detected unit provided on a mounting table. Fig. 10 is a cross-sectional view of a container provided with a sensor unit. FIG. 11 is a diagram showing an example of a positional deviation caused by the distance between the detection reference point and the detected point. Fig. 12 is a diagram showing an example in which the article holding portion is inclined with respect to the reference plane. Fig. 13 is a block diagram showing another example of the sensor unit.

2:第2單元 2: Unit 2

4:被檢測單元 4: Detected unit

40:被檢測面 40: detected surface

41:第1傾斜平面(傾斜平面) 41: The first inclined plane (inclined plane)

42:第2傾斜平面(傾斜平面) 42: The second inclined plane (inclined plane)

43:螺旋狀面 43: Spiral surface

50:非傾斜平面(為用於檢測斜度的被檢測面且平行於基準面的面) 50: Non-inclined plane (the surface that is used to detect the inclination and is parallel to the reference plane)

51:第1非傾斜平面(非傾斜平面) 51: The first non-inclined plane (non-inclined plane)

52:第2非傾斜平面(非傾斜平面) 52: The second non-inclined plane (non-inclined plane)

53:第3非傾斜平面(非傾斜平面) 53: The third non-inclined plane (non-inclined plane)

C:基準軸 C: reference axis

D1:第1方向 D1: 1st direction

D2:第2方向 D2: 2nd direction

D3:旋繞方向 D3: Spinning direction

P0:基準面 P0: datum plane

R:被檢測點 R: detected point

Claims (10)

一種位置關係檢測系統，是在具備物品搬送車的物品搬送設備中檢測位置關係的位置關係檢測系統，前述物品搬送車具備在搬送起點及搬送目的地之移載地點之間移載物品的移載裝置，且在前述搬送起點與前述搬送目的地之間搬送物品，前述位置關係是前述移載裝置所具備的物品保持部相對於前述移載地點的位置關係，前述位置關係檢測系統之特徵在於具備以下： 第1單元，保持於前述物品保持部；及 第2單元，設置於前述移載地點， 前述第1單元及前述第2單元的一者為感測器單元，另一者為具備前述感測器單元的檢測對象之被檢測單元， 前述感測器單元是檢測出從該感測器單元中的檢測基準點到設定於前述被檢測單元的複數個被檢測點之間的距離， 前述被檢測單元是具備複數個被檢測面而立體地形成，前述複數個被檢測面可檢測出平面相對位置、斜度及旋轉角度當中的至少2個，來作為因應於從前述檢測基準點起算的距離的值，前述平面相對位置表示在沿著基準面之第1方向及沿著前述基準面並且正交於前述第1方向的第2方向中之前述物品保持部相對於前述移載地點的相對位置，前述基準面被設定成在前述移載地點上相向於前述感測器單元，前述斜度為前述物品保持部相對於前述基準面的斜度，前述旋轉角度是繞與前述基準面正交的基準軸之前述物品保持部的旋轉角度。A positional relationship detection system is a positional relationship detection system that detects the positional relationship in an article conveying device equipped with an article conveying vehicle. The article conveying vehicle is equipped with the transfer of articles between the transfer starting point and the transfer destination. Device, and the article is transferred between the transfer start point and the transfer destination, the positional relationship is the positional relationship of the article holding portion of the transfer device with respect to the transfer location, and the positional relationship detection system is characterized by having the following: The first unit is held in the aforementioned article holding part; and The second unit is set up at the aforementioned transfer location, One of the aforementioned first unit and the aforementioned second unit is a sensor unit, and the other is a unit to be detected with a detection target of the aforementioned sensor unit, The sensor unit detects the distance from the detection reference point in the sensor unit to a plurality of detected points set in the detected unit, The detected unit is three-dimensionally formed with a plurality of detected surfaces, and the plurality of detected surfaces can detect at least two of the relative position, inclination, and rotation angle of the plane as a response to the calculation from the detection reference point The value of the distance between the above-mentioned plane and the relative position of the above-mentioned plane indicates the position of the article holding portion relative to the above-mentioned transfer point in the first direction along the reference surface and the second direction along the reference surface and orthogonal to the first direction With respect to the relative position, the reference surface is set to face the sensor unit at the transfer point, the inclination is the inclination of the article holding portion with respect to the reference surface, and the rotation angle is about the same as the reference surface. The rotation angle of the aforementioned article holding part of the reference axis of the cross. 如請求項1之位置關係檢測系統，其中檢測前述第1方向上的前述平面相對位置的前述被檢測面為傾斜平面，前述傾斜平面配置成隨著朝向前述第1方向的一側，從前述檢測基準點起算的距離以一定的比例增加， 檢測前述第2方向上的前述平面相對位置的前述被檢測面為傾斜平面，前述傾斜平面配置成隨著朝向前述第2方向的一側，從前述檢測基準點起算的距離以一定的比例增加。Such as the positional relationship detection system of claim 1, wherein the detected surface that detects the relative position of the plane in the first direction is an inclined plane, and the inclined plane is arranged to move toward the side of the first direction from the detection The distance from the reference point increases by a certain percentage, The detected surface that detects the relative position of the plane in the second direction is an inclined plane, and the inclined plane is arranged such that the distance from the detection reference point increases by a certain ratio as it goes to the side in the second direction. 如請求項1之位置關係檢測系統，其中檢測前述斜度的前述被檢測面為平行於前述基準面的面，且設置在至少3個地點，並且配置成在沒有前述斜度的情況下從前述檢測基準點起算的距離成為相同。Such as the positional relationship detection system of claim 1, wherein the detected surface for detecting the inclination is a surface parallel to the reference plane, and is installed in at least 3 locations, and is configured to change from the inclination without the inclination. The distance from the detection reference point becomes the same. 如請求項2之位置關係檢測系統，其中檢測前述斜度的前述被檢測面為平行於前述基準面的面，且設置在至少3個地點，並且配置成在沒有前述斜度的情況下從前述檢測基準點起算的距離成為相同。Such as the positional relationship detection system of claim 2, wherein the detected surface that detects the inclination is a surface parallel to the reference plane, and is installed in at least 3 locations, and is configured to change from the inclination without the inclination. The distance from the detection reference point becomes the same. 如請求項1之位置關係檢測系統，其中檢測前述旋轉角度的前述被檢測面為螺旋狀面，前述螺旋狀面配置成隨著繞前述基準軸朝一側旋繞，從前述檢測基準點起算的距離以一定的比例增加。For example, the positional relationship detection system of claim 1, wherein the detected surface for detecting the rotation angle is a spiral surface, and the spiral surface is arranged so as to revolve around the reference axis toward one side, and the distance from the detection reference point is equal to A certain percentage increase. 如請求項2之位置關係檢測系統，其中檢測前述旋轉角度的前述被檢測面為螺旋狀面，前述螺旋狀面配置成隨著繞前述基準軸朝一側旋繞，從前述檢測基準點起算的距離以一定的比例增加。For example, the positional relationship detection system of claim 2, wherein the detected surface for detecting the rotation angle is a spiral surface, and the spiral surface is arranged so as to revolve around the reference axis toward one side, and the distance from the detection reference point is equal to A certain percentage increase. 如請求項3之位置關係檢測系統，其中檢測前述旋轉角度的前述被檢測面為螺旋狀面，前述螺旋狀面配置成隨著繞前述基準軸朝一側旋繞，從前述檢測基準點起算的距離以一定的比例增加。For example, the positional relationship detection system of claim 3, wherein the detected surface for detecting the rotation angle is a spiral surface, and the spiral surface is arranged so as to revolve around the reference axis toward one side, and the distance from the detection reference point is equal to A certain percentage increase. 如請求項4之位置關係檢測系統，其中檢測前述旋轉角度的前述被檢測面為螺旋狀面，前述螺旋狀面配置成隨著繞前述基準軸朝一側旋繞，從前述檢測基準點起算的距離以一定的比例增加。For example, the positional relationship detection system of claim 4, wherein the detected surface for detecting the rotation angle is a spiral surface, and the spiral surface is arranged so as to revolve around the reference axis toward one side, and the distance from the detection reference point is equal to A certain percentage increase. 如請求項1之位置關係檢測系統，其中沿著前述基準面之各方向上的前述被檢測面的寬度，是比前述移載地點與前述物品保持部的理論上的偏離之最大值更大。Such as the positional relationship detection system of claim 1, wherein the width of the detected surface along each direction of the reference surface is greater than the maximum value of the theoretical deviation between the transfer location and the article holding portion. 如請求項1至9中任一項之位置關係檢測系統，其中前述物品是容置複數個基板的收納容器， 前述收納容器具備： 複數道狹縫，保持複數個前述基板的每一個； 插拔口，用於供前述基板在該狹縫出入；及 蓋部，關閉前述插拔口， 前述感測器單元是藉由前述狹縫來支撐，並且藉由前述蓋部來進行沿著前述狹縫的方向的定位。Such as the positional relationship detection system of any one of claims 1 to 9, wherein the aforementioned article is a storage container containing a plurality of substrates, The aforementioned storage container has: A plurality of slits to maintain each of a plurality of the aforementioned substrates; The plug-in port is used for the aforementioned substrate to pass in and out of the slit; and Cover, close the aforementioned plug-in port, The sensor unit is supported by the slit, and is positioned along the direction of the slit by the cover.
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