TW202106135A - 電路基板的製作方法 - Google Patents

電路基板的製作方法 Download PDF

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TW202106135A
TW202106135A TW108126908A TW108126908A TW202106135A TW 202106135 A TW202106135 A TW 202106135A TW 108126908 A TW108126908 A TW 108126908A TW 108126908 A TW108126908 A TW 108126908A TW 202106135 A TW202106135 A TW 202106135A
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circuit
layer
manufacturing
groove
substrate
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TWI700023B (zh
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江遜旌
楊翔雲
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聚鼎科技股份有限公司
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Priority to CN201911227719.8A priority patent/CN112312667A/zh
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/02Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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    • H05K3/44Manufacturing insulated metal core circuits or other insulated electrically conductive core circuits
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    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • H05K1/05Insulated conductive substrates, e.g. insulated metal substrate
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    • H05K3/02Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/04Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed mechanically, e.g. by punching
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    • H05K3/02Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/06Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
    • CCHEMISTRY; METALLURGY
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    • C23F1/14Aqueous compositions
    • C23F1/16Acidic compositions
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    • HELECTRICITY
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    • H05K2203/02Details related to mechanical or acoustic processing, e.g. drilling, punching, cutting, using ultrasound
    • H05K2203/0207Partly drilling through substrate until a controlled depth, e.g. with end-point detection
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    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/02Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/06Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/02Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/06Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
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Abstract

一種電路基板的製作方法,包括:提供一層疊板,該層疊板包括一絕緣層及位於該絕緣層上表面的一線路層;形成一光阻層於該線路層表面;機械切割該光阻層及部分的該線路層形成凹槽;蝕刻該凹槽內的該線路層直到該絕緣層表面,形成電路圖案;以及去除該光阻層,形成電路基板。

Description

電路基板的製作方法
本發明關於一種電路基板的製作方法,特別是關於一種具有厚線路層的電路基板的製作方法。
隨著科技發展,於電路板上所設置的元件數量越來越多,又或者是例如電動車的充電樁、DC-DC轉換輸出等大電流的應用需求,連帶著對電路板線路的電流導通能力和承載能力也要求甚高。因為大電流通常也會產生高熱,而衍生出電路板需要良好散熱的要求。因此,有增加銅層厚度的導熱電路基板的需求出現,以承載40安培至200安培電流的大電流。
大電流的導熱電路基板傳統上可透過厚銅蝕刻在銅層上蝕刻出厚銅線路。然而因為銅層厚度通常會大於0.7mm,甚至會厚達2~5mm,若採取蝕刻方式製作電路,通常需超過24小時甚至數天之久,而缺乏經濟效益。加上以蝕刻製作之線路,線距大小受限於線路厚度,通常線距大小必須是線路厚度的1~1.3倍。此外,於厚銅蝕刻之過程中不僅會浪費掉大量的銅金屬,更由於其所需利用之強酸溶液而對環境造成汙染。
經由上述,可以得知慣用之大電流導熱電路基板的製作方法有其缺點與不足,而急需加以改進。
本發明揭露一種電路基板的製作方法,使用兩種不同製程來製作電路基板中線路層的電路圖案,突破於較厚線路層不易製作電路圖案的問題,可縮短製作時間,提供如電動車充電等大電流的應用。
根據本發明一實施例的電路基板的製作方法,揭露一種電路基板的製作方法,其包括:提供一層疊板,該層疊板包括一絕緣層及位於該絕緣層上表面的一線路層;形成一光阻層於該線路層表面;機械切割該光阻層及部分的該線路層形成凹槽;蝕刻該凹槽內的該線路層直到該絕緣層表面,形成電路圖案;以及去除該光阻層,形成電路基板。
一實施例中,該凹槽中該線路層經機械切割去除的深度為該線路層厚度的50~90%。
一實施例中,該線路層的厚度為0.4~6mm。
一實施例中,該線路層為銅金屬層。
一實施例中,該層疊板另包括位於該導熱絕緣層下表面的一金屬底材,該金屬底材可為銅金屬層或鋁金屬層。
一實施例中,該凹槽側壁的角度為75~90度。
一實施例中,該凹槽頂部的寬度為W1,該凹槽底部的寬度為W2,W2/W1的比值在0.5~0.9的範圍。
一實施例中,該凹槽頂部的寬度為W1,該線路層的厚度為H,該H/W1的比值在1~5的範圍。
一實施例中,該蝕刻步驟的過蝕比率小於30%。
一實施例中,該絕緣層的導熱率為2~20W/m·K。。
本發明的電路基板的製作方法可增進線路層製作線路的速度,可有效解決厚線路層無法經由傳統蝕刻製程製作的限制。此外,線路層中的凹槽在同樣凹槽寬度中可製作的較深,突破了傳統上凹槽寬度需大於等於其深度的限制。
為讓本發明之上述和其他技術內容、特徵和優點能更明顯易懂,下文特舉出相關實施例,並配合所附圖式,作詳細說明如下。
圖1~圖5顯示本發明一實施例的電路基板於各製作階段的結構示意圖。參照圖1,首先提供一層疊板10,該層疊板10包括金屬底材13、絕緣層11及線路層12。絕緣層11位於該金屬底材13的上表面,而線路層12位於該絕緣層11上表面,依序形成層疊結構。該金屬底材13的厚度約0.3~5mm,可為銅金屬層或鋁金屬層,作為散熱底材。絕緣層11的厚度約0.05~0.25mm,優選地可選用摻混導熱填料的高分子聚合物層,增進導熱效果,其導熱率可為2~20W/m·K,例如5W/m·K、8W/m·K或12W/m·K。線路層12的厚度約為0.4~6mm,例如1mm、3mm、5mm或8mm,可選用銅金屬層或鋁金屬層。
參照圖2和圖3,形成一光阻層14於該線路層12表面。一實施例中,該光阻層的厚度約20~30µm。將機械切割刀具對應於欲製作的電路圖案位置,機械切割該光阻層14及部分的該線路層12形成凹槽15,此時凹槽15內的線路層12仍有部分殘留。申言之,該凹槽15對應於欲製作的電路圖案位置。參照圖4,蝕刻該凹槽15內的該線路層12直到該絕緣層11表面。一實施例中,蝕刻採用化學濕蝕刻,蝕刻所採用的酸性蝕刻液例如:氯化銅或其他蝕刻液,蝕刻厚度和光阻層厚度的比值(蝕刻厚度/光阻層厚度)為16~200。之後,去除該光阻層14,形成電路基板20,如圖5所示。
圖6顯示凹槽15的細部結構示意圖。為求簡潔,圖6省略了金屬底材的部分。線路層12中凹槽15的形成過程中,機械切割的深度為H1,隨後蝕刻的深度為H2直到絕緣層11表面。凹槽15的深度等於線路層12的厚度H,H=H1+H2。凹槽15中該線路層12經機械切割去除的深度H1為該線路層厚度H的50~90%,亦即H1/H=50~90%,例如H1/H=60%或80%。H1/H小於50%,會造成製作凹槽速度過慢及凹槽開口擴大的問題。H1/H大於90%,存在機械切割控制精準度不佳時切割到下方絕緣層11的疑慮。在機械切割部分的凹槽15側壁的角度θ為75~90度。角度θ為凹槽15側壁與水平線的夾角。蝕刻時若有過度的過蝕(over etch),會造成凹槽15頂部外擴,使得凹槽15側壁的角度θ過小,例如小於70度,恐將影響電路的品質。本發明在不過度過蝕(例如小於30%或20%過蝕比率)的情況下,凹槽15底部可能會形成弧狀。若凹槽15頂部的寬度為W1,凹槽15底部的寬度為W2,W2/W1的比值在0.5~0.9的範圍,例如W2/W1=0.6或0.8。因為濕蝕刻不具備方向性,傳統單純使用蝕刻製作電路的凹槽不能太深,凹槽的寬度通常要大於等於其深度。本發明可製作出較大深度的凹槽15,H/W1的比值在1~5的範圍。根據本發明的多個實施例,凹槽15的尺寸數值紀錄如表1,其中H、H1、H2、W1和W2的單位為mm。
表1
實施例 H H1 H2 W1 W2 θ W2/W1 H/W1
E1 0.4 0.3 0.1 0.3 0.25 85o 0.83 1.33
E2 1 0.8 0.2 0.5 0.35 85o 0.7 2
E3 3.2 2.9 0.3 1.8 1.2 84o 0.67 1.78
E4 2 1.8 0.2 0.5 0.3 87o 0.6 4
E5 5 4.1 0.9 5 4.2 84o 0.84 1
E6 2.5 2 0.5 2 1 75o 0.5 1.25
E7 3 1.8 1.2 0.8 0.5 85o 0.63 3.75
本發明之電路基板的製作方法可歸納如圖6所示的流程圖。步驟S61:提供一層疊板,該層疊板包括一絕緣層及位於該絕緣層上表面的一線路層。步驟S62:形成一光阻層於該線路層表面。步驟S63:機械切割該光阻層及部分的該線路層形成凹槽。步驟S64: 蝕刻該凹槽內的該線路層直到該絕緣層表面,形成電路圖案。步驟S65:去除該光阻層,形成電路基板。
綜言之,傳統使用蝕刻方式製作線路圖案的凹槽時,凹槽的寬度通常不得小於凹槽的深度,而該凹槽的深度相當於該線路層的厚度。因為凹槽太深或寬度較小,可能會造成無法完全蝕刻至線路層底部,而仍有線路層殘留,或者蝕刻時間太長,所以通常無法蝕刻超過0.4mm的線路層。本發明結合機械切割及化學蝕刻,可於厚達0.4~6mm的線路層製作線路圖案所需的凹槽,這是傳統蝕刻所無法突破的瓶頸。採用本發明之電路基板製作方法,針對最厚至5mm情況下,可以將線距製作到0.7mm~1mm,蝕刻因子可以維持在9以上,有效解決了線距大小受限於線路厚度的問題。本發明的電路基板的製作方法克服了傳統蝕刻效率過低的問題,特別是適合電路基板中線路層較厚的大電流應用。
本發明之技術內容及技術特點已揭示如上,然而本領域具有通常知識之技術人士仍可能基於本發明之教示及揭示而作種種不背離本發明精神之替換及修飾。因此,本發明之保護範圍應不限於實施例所揭示者,而應包括各種不背離本發明之替換及修飾,並為以下之申請專利範圍所涵蓋。
10:層疊板 11:絕緣層 12:線路層 13:金屬底材 14:光阻層 15:凹槽 20:電路基板 S61~S65:步驟
圖1~圖5顯示本發明一實施例的電路基板於各製作階段的結構示意圖。 圖6顯示圖5中凹槽的局部放大圖。 圖7顯示本發明一實施例的電路基板的製作流程圖。
S61~S65:步驟

Claims (10)

  1. 一種電路基板的製作方法,包括: 提供一層疊板,該層疊板包括一絕緣層及位於該絕緣層上表面的一線路層; 形成一光阻層於該線路層表面; 機械切割該光阻層及部分的該線路層形成凹槽; 蝕刻該凹槽內的該線路層直到該絕緣層表面,形成電路圖案;以及 去除該光阻層,形成電路基板。
  2. 根據請求項1之電路基板的製作方法,其中該凹槽中該線路層經機械切割去除的深度為該線路層厚度的50~90%。
  3. 根據請求項1之電路基板的製作方法,其中該線路層的厚度為0.4~6mm。
  4. 根據請求項1之電路基板的製作方法,其中該線路層為銅金屬層。
  5. 根據請求項1之電路基板的製作方法,其中該層疊板另包括位於該導熱絕緣層下表面的一金屬底材,該金屬底材可為銅金屬層或鋁金屬層。
  6. 根據請求項1之電路基板的製作方法,其中該凹槽側壁的角度為75~90度。
  7. 根據請求項1之電路基板的製作方法,其中該凹槽頂部的寬度為W1,該凹槽底部的寬度為W2,W2/W1的比值在0.5~0.9的範圍。
  8. 根據請求項1之電路基板的製作方法,其中該凹槽頂部的寬度為W1,該線路層的厚度為H,該H/W1的比值在1~5的範圍。
  9. 根據請求項1之電路基板的製作方法,其中該蝕刻步驟的過蝕比率小於30%。
  10. 根據請求項1之電路基板的製作方法,其中該絕緣層的導熱率為2~20W/m·K。
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TWI803008B (zh) * 2021-10-05 2023-05-21 艾姆勒科技股份有限公司 一種不使用遮蔽層之基材結構之圖案化方法

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US6822332B2 (en) * 2002-09-23 2004-11-23 International Business Machines Corporation Fine line circuitization
US7268075B2 (en) * 2003-05-16 2007-09-11 Intel Corporation Method to reduce the copper line roughness for increased electrical conductivity of narrow interconnects (<100nm)
CN101562944B (zh) * 2008-04-16 2011-06-29 欣兴电子股份有限公司 线路板及其制作工艺
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