TW202012252A - 具有活性表面之容器及形成此類容器之方法 - Google Patents
具有活性表面之容器及形成此類容器之方法 Download PDFInfo
- Publication number
- TW202012252A TW202012252A TW108120259A TW108120259A TW202012252A TW 202012252 A TW202012252 A TW 202012252A TW 108120259 A TW108120259 A TW 108120259A TW 108120259 A TW108120259 A TW 108120259A TW 202012252 A TW202012252 A TW 202012252A
- Authority
- TW
- Taiwan
- Prior art keywords
- container
- bottle
- acid
- activated
- polymer surface
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims abstract description 57
- 239000002253 acid Substances 0.000 claims abstract description 46
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 40
- 239000000203 mixture Substances 0.000 claims abstract description 28
- 239000000126 substance Substances 0.000 claims abstract description 26
- 235000013361 beverage Nutrition 0.000 claims abstract 2
- 229920000642 polymer Polymers 0.000 claims description 86
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims description 35
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 claims description 20
- 229910017604 nitric acid Inorganic materials 0.000 claims description 20
- 239000012776 electronic material Substances 0.000 claims description 13
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 claims description 12
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims description 7
- 239000003513 alkali Substances 0.000 claims 1
- 239000003814 drug Substances 0.000 claims 1
- 239000007800 oxidant agent Substances 0.000 claims 1
- 238000011282 treatment Methods 0.000 abstract description 8
- 238000003860 storage Methods 0.000 abstract description 5
- 230000015572 biosynthetic process Effects 0.000 abstract description 2
- 229910052751 metal Inorganic materials 0.000 description 38
- 239000002184 metal Substances 0.000 description 38
- 238000006277 sulfonation reaction Methods 0.000 description 37
- 239000000463 material Substances 0.000 description 34
- 239000000243 solution Substances 0.000 description 22
- 238000004458 analytical method Methods 0.000 description 19
- 238000001095 inductively coupled plasma mass spectrometry Methods 0.000 description 17
- 239000003795 chemical substances by application Substances 0.000 description 14
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 12
- 238000004519 manufacturing process Methods 0.000 description 12
- AKEJUJNQAAGONA-UHFFFAOYSA-N sulfur trioxide Chemical compound O=S(=O)=O AKEJUJNQAAGONA-UHFFFAOYSA-N 0.000 description 12
- 238000007654 immersion Methods 0.000 description 11
- 239000007788 liquid Substances 0.000 description 11
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 10
- 238000006243 chemical reaction Methods 0.000 description 10
- 238000005516 engineering process Methods 0.000 description 10
- 239000012535 impurity Substances 0.000 description 10
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 8
- LZCLXQDLBQLTDK-UHFFFAOYSA-N ethyl 2-hydroxypropanoate Chemical compound CCOC(=O)C(C)O LZCLXQDLBQLTDK-UHFFFAOYSA-N 0.000 description 8
- HIFJUMGIHIZEPX-UHFFFAOYSA-N sulfuric acid;sulfur trioxide Chemical compound O=S(=O)=O.OS(O)(=O)=O HIFJUMGIHIZEPX-UHFFFAOYSA-N 0.000 description 8
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 8
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 7
- 150000007513 acids Chemical class 0.000 description 7
- 239000007844 bleaching agent Substances 0.000 description 7
- 229920001684 low density polyethylene Polymers 0.000 description 7
- 239000004702 low-density polyethylene Substances 0.000 description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- RAHZWNYVWXNFOC-UHFFFAOYSA-N Sulphur dioxide Chemical compound O=S=O RAHZWNYVWXNFOC-UHFFFAOYSA-N 0.000 description 6
- 238000010306 acid treatment Methods 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 6
- 239000007789 gas Substances 0.000 description 6
- 239000000047 product Substances 0.000 description 6
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 5
- 238000004061 bleaching Methods 0.000 description 5
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- 239000012808 vapor phase Substances 0.000 description 5
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 4
- QUSNBJAOOMFDIB-UHFFFAOYSA-N Ethylamine Chemical compound CCN QUSNBJAOOMFDIB-UHFFFAOYSA-N 0.000 description 4
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 4
- 125000004432 carbon atom Chemical group C* 0.000 description 4
- 229940116333 ethyl lactate Drugs 0.000 description 4
- -1 ethylene, propylene, isobutylene Chemical group 0.000 description 4
- 238000010101 extrusion blow moulding Methods 0.000 description 4
- 238000011049 filling Methods 0.000 description 4
- 150000002466 imines Chemical class 0.000 description 4
- 150000002739 metals Chemical class 0.000 description 4
- 238000006386 neutralization reaction Methods 0.000 description 4
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 4
- 239000002904 solvent Substances 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- VZGDMQKNWNREIO-UHFFFAOYSA-N tetrachloromethane Chemical compound ClC(Cl)(Cl)Cl VZGDMQKNWNREIO-UHFFFAOYSA-N 0.000 description 4
- KEQGZUUPPQEDPF-UHFFFAOYSA-N 1,3-dichloro-5,5-dimethylimidazolidine-2,4-dione Chemical compound CC1(C)N(Cl)C(=O)N(Cl)C1=O KEQGZUUPPQEDPF-UHFFFAOYSA-N 0.000 description 3
- VXNZUUAINFGPBY-UHFFFAOYSA-N 1-Butene Chemical compound CCC=C VXNZUUAINFGPBY-UHFFFAOYSA-N 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- AQZGPSLYZOOYQP-UHFFFAOYSA-N Diisoamyl ether Chemical compound CC(C)CCOCCC(C)C AQZGPSLYZOOYQP-UHFFFAOYSA-N 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 3
- 230000004913 activation Effects 0.000 description 3
- 239000003570 air Substances 0.000 description 3
- 239000000908 ammonium hydroxide Substances 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 3
- 239000006227 byproduct Substances 0.000 description 3
- XTHPWXDJESJLNJ-UHFFFAOYSA-N chlorosulfonic acid Substances OS(Cl)(=O)=O XTHPWXDJESJLNJ-UHFFFAOYSA-N 0.000 description 3
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- 239000000356 contaminant Substances 0.000 description 3
- 229920001577 copolymer Polymers 0.000 description 3
- 238000002845 discoloration Methods 0.000 description 3
- 239000001307 helium Substances 0.000 description 3
- 229910052734 helium Inorganic materials 0.000 description 3
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 3
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 230000003472 neutralizing effect Effects 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 238000003756 stirring Methods 0.000 description 3
- QPFMBZIOSGYJDE-UHFFFAOYSA-N 1,1,2,2-tetrachloroethane Chemical compound ClC(Cl)C(Cl)Cl QPFMBZIOSGYJDE-UHFFFAOYSA-N 0.000 description 2
- WSLDOOZREJYCGB-UHFFFAOYSA-N 1,2-Dichloroethane Chemical compound ClCCCl WSLDOOZREJYCGB-UHFFFAOYSA-N 0.000 description 2
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical compound NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 description 2
- JHWIEAWILPSRMU-UHFFFAOYSA-N 2-methyl-3-pyrimidin-4-ylpropanoic acid Chemical compound OC(=O)C(C)CC1=CC=NC=N1 JHWIEAWILPSRMU-UHFFFAOYSA-N 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 2
- ROSDSFDQCJNGOL-UHFFFAOYSA-N Dimethylamine Chemical compound CNC ROSDSFDQCJNGOL-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- BAVYZALUXZFZLV-UHFFFAOYSA-N Methylamine Chemical compound NC BAVYZALUXZFZLV-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- CYTYCFOTNPOANT-UHFFFAOYSA-N Perchloroethylene Chemical group ClC(Cl)=C(Cl)Cl CYTYCFOTNPOANT-UHFFFAOYSA-N 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 150000001338 aliphatic hydrocarbons Chemical class 0.000 description 2
- 150000001412 amines Chemical class 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 125000003118 aryl group Chemical group 0.000 description 2
- 239000001569 carbon dioxide Substances 0.000 description 2
- 229910002092 carbon dioxide Inorganic materials 0.000 description 2
- 239000003054 catalyst Substances 0.000 description 2
- 239000003344 environmental pollutant Substances 0.000 description 2
- 238000011065 in-situ storage Methods 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 238000005342 ion exchange Methods 0.000 description 2
- 239000007791 liquid phase Substances 0.000 description 2
- DDMCDMDOHABRHD-UHFFFAOYSA-N methyl 2-hydroxybutanoate Chemical compound CCC(O)C(=O)OC DDMCDMDOHABRHD-UHFFFAOYSA-N 0.000 description 2
- 239000000178 monomer Substances 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 239000012071 phase Substances 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 231100000719 pollutant Toxicity 0.000 description 2
- 239000002861 polymer material Substances 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 239000000376 reactant Substances 0.000 description 2
- 238000002791 soaking Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 125000000542 sulfonic acid group Chemical group 0.000 description 2
- 239000011593 sulfur Substances 0.000 description 2
- 229910052717 sulfur Inorganic materials 0.000 description 2
- 150000003512 tertiary amines Chemical class 0.000 description 2
- 229920001169 thermoplastic Polymers 0.000 description 2
- 239000004416 thermosoftening plastic Substances 0.000 description 2
- GETQZCLCWQTVFV-UHFFFAOYSA-N trimethylamine Chemical compound CN(C)C GETQZCLCWQTVFV-UHFFFAOYSA-N 0.000 description 2
- AOPDRZXCEAKHHW-UHFFFAOYSA-N 1-pentoxypentane Chemical compound CCCCCOCCCCC AOPDRZXCEAKHHW-UHFFFAOYSA-N 0.000 description 1
- OEPOKWHJYJXUGD-UHFFFAOYSA-N 2-(3-phenylmethoxyphenyl)-1,3-thiazole-4-carbaldehyde Chemical compound O=CC1=CSC(C=2C=C(OCC=3C=CC=CC=3)C=CC=2)=N1 OEPOKWHJYJXUGD-UHFFFAOYSA-N 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 1
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- ZKQDCIXGCQPQNV-UHFFFAOYSA-N Calcium hypochlorite Chemical compound [Ca+2].Cl[O-].Cl[O-] ZKQDCIXGCQPQNV-UHFFFAOYSA-N 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- 239000004709 Chlorinated polyethylene Substances 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- FEWJPZIEWOKRBE-JCYAYHJZSA-N Dextrotartaric acid Chemical compound OC(=O)[C@H](O)[C@@H](O)C(O)=O FEWJPZIEWOKRBE-JCYAYHJZSA-N 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- 239000004606 Fillers/Extenders Substances 0.000 description 1
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- BZLVMXJERCGZMT-UHFFFAOYSA-N Methyl tert-butyl ether Chemical compound COC(C)(C)C BZLVMXJERCGZMT-UHFFFAOYSA-N 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
- CZPWVGJYEJSRLH-UHFFFAOYSA-N Pyrimidine Chemical compound C1=CN=CN=C1 CZPWVGJYEJSRLH-UHFFFAOYSA-N 0.000 description 1
- 239000005708 Sodium hypochlorite Substances 0.000 description 1
- FEWJPZIEWOKRBE-UHFFFAOYSA-N Tartaric acid Natural products [H+].[H+].[O-]C(=O)C(O)C(O)C([O-])=O FEWJPZIEWOKRBE-UHFFFAOYSA-N 0.000 description 1
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 description 1
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 230000003667 anti-reflective effect Effects 0.000 description 1
- 239000003963 antioxidant agent Substances 0.000 description 1
- 239000007900 aqueous suspension Substances 0.000 description 1
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 1
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 1
- 239000004327 boric acid Substances 0.000 description 1
- 230000005587 bubbling Effects 0.000 description 1
- 239000011575 calcium Substances 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 125000002843 carboxylic acid group Chemical group 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 239000011538 cleaning material Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 239000012611 container material Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- UFULAYFCSOUIOV-UHFFFAOYSA-N cysteamine Chemical compound NCCS UFULAYFCSOUIOV-UHFFFAOYSA-N 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- 239000002274 desiccant Substances 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- 150000001983 dialkylethers Chemical class 0.000 description 1
- ZBCBWPMODOFKDW-UHFFFAOYSA-N diethanolamine Chemical compound OCCNCCO ZBCBWPMODOFKDW-UHFFFAOYSA-N 0.000 description 1
- HPNMFZURTQLUMO-UHFFFAOYSA-N diethylamine Chemical compound CCNCC HPNMFZURTQLUMO-UHFFFAOYSA-N 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- WEHWNAOGRSTTBQ-UHFFFAOYSA-N dipropylamine Chemical compound CCCNCCC WEHWNAOGRSTTBQ-UHFFFAOYSA-N 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- GNTDGMZSJNCJKK-UHFFFAOYSA-N divanadium pentaoxide Chemical compound O=[V](=O)O[V](=O)=O GNTDGMZSJNCJKK-UHFFFAOYSA-N 0.000 description 1
- 239000000975 dye Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- HQQADJVZYDDRJT-UHFFFAOYSA-N ethene;prop-1-ene Chemical group C=C.CC=C HQQADJVZYDDRJT-UHFFFAOYSA-N 0.000 description 1
- 125000000816 ethylene group Chemical group [H]C([H])([*:1])C([H])([H])[*:2] 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 238000009472 formulation Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229920001903 high density polyethylene Polymers 0.000 description 1
- 239000004700 high-density polyethylene Substances 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 1
- 229910000041 hydrogen chloride Inorganic materials 0.000 description 1
- 229910000040 hydrogen fluoride Inorganic materials 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- NBZBKCUXIYYUSX-UHFFFAOYSA-N iminodiacetic acid Chemical compound OC(=O)CNCC(O)=O NBZBKCUXIYYUSX-UHFFFAOYSA-N 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 150000002576 ketones Chemical group 0.000 description 1
- 239000006193 liquid solution Substances 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 229960003151 mercaptamine Drugs 0.000 description 1
- GNVRJGIVDSQCOP-UHFFFAOYSA-N n-ethyl-n-methylethanamine Chemical compound CCN(C)CC GNVRJGIVDSQCOP-UHFFFAOYSA-N 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000012858 packaging process Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- DPBLXKKOBLCELK-UHFFFAOYSA-N pentan-1-amine Chemical compound CCCCCN DPBLXKKOBLCELK-UHFFFAOYSA-N 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 229920002239 polyacrylonitrile Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 239000011591 potassium Substances 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 239000012286 potassium permanganate Substances 0.000 description 1
- USHAGKDGDHPEEY-UHFFFAOYSA-L potassium persulfate Chemical compound [K+].[K+].[O-]S(=O)(=O)OOS([O-])(=O)=O USHAGKDGDHPEEY-UHFFFAOYSA-L 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 150000003141 primary amines Chemical class 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 125000001453 quaternary ammonium group Chemical group 0.000 description 1
- 230000035484 reaction time Effects 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 150000003335 secondary amines Chemical class 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- SUKJFIGYRHOWBL-UHFFFAOYSA-N sodium hypochlorite Chemical compound [Na+].Cl[O-] SUKJFIGYRHOWBL-UHFFFAOYSA-N 0.000 description 1
- MWNQXXOSWHCCOZ-UHFFFAOYSA-L sodium;oxido carbonate Chemical compound [Na+].[O-]OC([O-])=O MWNQXXOSWHCCOZ-UHFFFAOYSA-L 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000011975 tartaric acid Substances 0.000 description 1
- 235000002906 tartaric acid Nutrition 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D25/00—Details of other kinds or types of rigid or semi-rigid containers
- B65D25/14—Linings or internal coatings
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D1/00—Containers having bodies formed in one piece, e.g. by casting metallic material, by moulding plastics, by blowing vitreous material, by throwing ceramic material, by moulding pulped fibrous material, by deep-drawing operations performed on sheet material
- B65D1/02—Bottles or similar containers with necks or like restricted apertures, designed for pouring contents
- B65D1/0207—Bottles or similar containers with necks or like restricted apertures, designed for pouring contents characterised by material, e.g. composition, physical features
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D25/00—Details of other kinds or types of rigid or semi-rigid containers
- B65D25/14—Linings or internal coatings
- B65D25/16—Loose, or loosely-attached, linings
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B1/00—Layered products having a non-planar shape
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/04—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
- B32B15/08—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
- B32B15/082—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin comprising vinyl resins; comprising acrylic resins
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/04—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
- B32B15/08—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
- B32B15/085—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin comprising polyolefins
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/18—Layered products comprising a layer of metal comprising iron or steel
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/06—Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material
- B32B27/08—Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/18—Layered products comprising a layer of synthetic resin characterised by the use of special additives
- B32B27/20—Layered products comprising a layer of synthetic resin characterised by the use of special additives using fillers, pigments, thixotroping agents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/30—Layered products comprising a layer of synthetic resin comprising vinyl (co)polymers; comprising acrylic (co)polymers
- B32B27/304—Layered products comprising a layer of synthetic resin comprising vinyl (co)polymers; comprising acrylic (co)polymers comprising vinyl halide (co)polymers, e.g. PVC, PVDC, PVF, PVDF
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/30—Layered products comprising a layer of synthetic resin comprising vinyl (co)polymers; comprising acrylic (co)polymers
- B32B27/308—Layered products comprising a layer of synthetic resin comprising vinyl (co)polymers; comprising acrylic (co)polymers comprising acrylic (co)polymers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/32—Layered products comprising a layer of synthetic resin comprising polyolefins
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B3/00—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form
- B32B3/02—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form characterised by features of form at particular places, e.g. in edge regions
- B32B3/08—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form characterised by features of form at particular places, e.g. in edge regions characterised by added members at particular parts
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D1/00—Containers having bodies formed in one piece, e.g. by casting metallic material, by moulding plastics, by blowing vitreous material, by throwing ceramic material, by moulding pulped fibrous material, by deep-drawing operations performed on sheet material
- B65D1/02—Bottles or similar containers with necks or like restricted apertures, designed for pouring contents
- B65D1/0207—Bottles or similar containers with necks or like restricted apertures, designed for pouring contents characterised by material, e.g. composition, physical features
- B65D1/0215—Bottles or similar containers with necks or like restricted apertures, designed for pouring contents characterised by material, e.g. composition, physical features multilayered
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D1/00—Containers having bodies formed in one piece, e.g. by casting metallic material, by moulding plastics, by blowing vitreous material, by throwing ceramic material, by moulding pulped fibrous material, by deep-drawing operations performed on sheet material
- B65D1/02—Bottles or similar containers with necks or like restricted apertures, designed for pouring contents
- B65D1/0223—Bottles or similar containers with necks or like restricted apertures, designed for pouring contents characterised by shape
- B65D1/023—Neck construction
- B65D1/0246—Closure retaining means, e.g. beads, screw-threads
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D23/00—Details of bottles or jars not otherwise provided for
- B65D23/02—Linings or internal coatings
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2250/00—Layers arrangement
- B32B2250/02—2 layers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2250/00—Layers arrangement
- B32B2250/24—All layers being polymeric
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2270/00—Resin or rubber layer containing a blend of at least two different polymers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2439/00—Containers; Receptacles
- B32B2439/40—Closed containers
- B32B2439/60—Bottles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2439/00—Containers; Receptacles
- B32B2439/40—Closed containers
- B32B2439/62—Boxes, cartons, cases
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2439/00—Containers; Receptacles
- B32B2439/40—Closed containers
- B32B2439/66—Cans, tins
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2439/00—Containers; Receptacles
- B32B2439/70—Food packaging
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2439/00—Containers; Receptacles
- B32B2439/80—Medical packaging
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2457/00—Electrical equipment
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Ceramic Engineering (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
- Details Of Rigid Or Semi-Rigid Containers (AREA)
- Detergent Compositions (AREA)
Abstract
本文提供了容器,該容器包含:外殼構件;以及視需要至少部分在該外殼構件內的製品。該外殼構件和/或該製品包含活化的聚合物表面,其中該外殼構件和/或該製品包含活化的聚合物表面,其中該活化的聚合物表面藉由包括用包含質子酸的組成物處理磺化的聚合物表面之方法形成。還提供了形成容器之方法。該容器及其形成方法在電子工業中以及在水、製藥和食品和飲料工業中有用的高純度化學品的儲存中特別有用。
Description
本發明總體上涉及用於高純度材料之容器。更具體地,本發明涉及用於高純度材料的活性容器以及製造此類活性容器之方法。本發明特別適用於包裝和儲存在製造電子裝置(電子材料)並且具體地半導體製造工業以及在水、食物和製藥工業中使用的材料。
在半導體製造工業中,包含液體的過程化學品貫穿製造過程使用,例如在光刻法(lithography )、塗覆、清潔、汽提、蝕刻和化學機械平坦化(CMP)過程中。此類化學品包括例如酸、溶劑、光刻膠、減反射材料、顯影劑、脫膜劑(remover)、漿料和清潔溶液。在先進半導體裝置所需要的關鍵尺寸的持續減小下,變得越來越重要的是以超純形式提供過程化學品。然而,即使呈純化形式的過程化學品典型地含有痕量的金屬,尤其如鐵、鈉、鎳、銅、鈣、鎂和鉀。在過程化學品中存在金屬可能是不利的,例如產生圖案化缺陷以及改變所形成的裝置的電子特性,從而影響裝置可靠性和產品產率。此類金屬雜質的來源可以是來自在化學品製造過程中使用的原材料,或者可能在製造和包裝過程期間以其他方式引入。
來自過程化學品、原材料和先質的金屬和其他雜質的減少已經常規地藉由使用離子交換和/或過濾過程來實現。這種純化之後,典型地將化學品包裝在容器、例如瓶或其他器皿中,然後將該等容器運送給使用者並且由使用者儲存。在半導體製造工業中,該等化學品容器經常直接連通到晶圓加工所使用的過程工具以減少污染化學品的可能性。然而,已經發現,該等化學品容器自身可以是在儲存和運輸期間可能原位產生的雜質的來源。據信,容器如在運輸期間的移動使這種問題加重。在致力於減少過程化學品中的顆粒產生中,已經例如在美國專利申請公開案號2013/0193164 A1中提出了含有氟化內襯的瓶的使用。然而,避免含氟材料係出於環境原因所希望的。此外,此類內襯係鈍化材料,並且最好不對配製物中的總金屬作貢獻。希望提供一種容器,該容器除了不對容器材料中的總金屬作貢獻之外,還從所含有的化學品中主動地去除此類雜質。除了電子工業之外,還希望將這種容器用於例如水、食物和製藥工業。
因而,本領域中對於改進的容器和其製造方法和用途存在需要,該容器及其製造方法和用途解決了與先前技術有關的一個或多個問題。
根據本發明的第一方面,提供了容器。該等容器包含:外殼構件;以及視需要至少部分在該外殼構件內的製品。該外殼構件和/或該製品包含活化的聚合物表面,其中該活化的聚合物表面藉由包括用包含質子酸的組成物處理磺化的聚合物表面的方法形成。
根據本發明的另一個方面,提供了形成具有活化的聚合物表面的容器的方法。該等方法包括提供包含磺化的聚合物表面的外殼構件或外殼構件內襯,並且用包含質子酸的組成物處理該磺化的聚合物表面。該等容器及其形成方法在電子工業中在電子裝置(即,電子材料)的製造中、特別是在半導體製造工業中以及在水、製藥和食品工業中有用的化學品的儲存中特別有用。可以儲存在本發明的容器中的電子材料和其他材料典型地是高純度材料,並且較佳的是超純材料。
在此使用的術語僅用於描述具體實施方式的目的,而不旨在限制本發明。除非上下文另有指示,否則單數形式「一個/一種」(a/an)和「該/所述」(the)旨在包括單數和複數形式。
本發明的容器包含對於從在容器內含有的化學組成物中去除金屬雜質有效的活化的聚合物表面。合適的容器包括例如在電子工業中有用的高純度化學品的儲存中使用的那些容器。此類化學品包括例如酸、溶劑、聚合物、光刻膠、減反射材料、顯影劑、脫膜劑、漿料和清潔溶液。該等容器進一步可用於例如水、製藥和食品工業中。該等容器可以採取各種形式,例如,瓶、罐、箱、圓筒和槽。
現在將描述用於活化容器的聚合物表面的本發明之方法。包含聚合物表面的組分可以採取各種形式,應理解,至少一部分的活化表面將與在容器中儲存的化學組成物接觸。有待活化的聚合物表面可以例如包括外殼構件的內壁、外殼構件內襯、或有待至少部分佈置在外殼構件內的嵌入件。
適合於有待活化的表面的材料包括能夠被磺化的有機聚合物。此類聚合物具有鍵合到碳基團上的氫原子,該等氫原子可以被具有直接鍵合到碳原子上的硫的磺酸基替代。該等聚合物材料較佳的是熱塑性的、非芳香族的、烴聚合物,其具有帶有僅非芳香族取代基的直鏈的碳與碳骨架分子結構並且具有多個附接到聚合物鏈的碳原子上的游離氫原子。擠出或模製該等聚合物以形成外殼構件、內襯或嵌入件。該等熱塑性擠出級或可模製級非芳香族烴聚合物的實例係乙烯、丙烯、異丁烯、甲基-戊烯-1、丁烯-1、氯乙烯、偏二氯乙烯、丙烯腈的均聚物,前述單體彼此之間的互聚物、氯化聚乙烯和氯化聚丙烯、以及前述單體和共聚物的共混物。特別引人注意的是高和低密度聚乙烯、聚丙烯、乙烯/丙烯共聚物、乙烯/丁烯-1共聚物及其共混物。
聚合物組成物可以包括選自例如本領域已知的抗氧化劑、顏料、染料、或增充劑的一種或多種視需要的添加劑。如果使用的話,此類視需要的添加劑典型地以基於聚合物組成物的總固體的如從0.01 wt%至10 wt%的少量存在於組成物中。
聚合物表面藉由包括磺化和用包含質子酸的組成物處理磺化的聚合物表面的多步法進行活化。聚合物表面的活化允許從佈置在接觸活化的表面的容器內的化學組成物中去除金屬雜質。不希望受任何具體理論的束縛,據信,藉由離子交換和/或用活化的聚合物表面吸附從化學組成物中去除金屬雜質。用於處理聚合物表面的在此描述的過程化學品(例如,磺化材料、含質子酸的組成物以及可以在過程中使用的其他材料,如沖洗劑)較佳的是小於100 ppb/金屬、更較佳的是小於50 ppb/金屬、並且最較佳的是小於10 ppb/金屬。
可以藉由本領域眾所周知的技術進行聚合物表面的磺化。應理解,有待使用的希望的範圍的磺化將在一定程度上取決於儲存在容器中的材料和被磺化的具體聚合物。磺化的程度太低將導致從有待佈置在容器內的材料中無法有效地去除金屬雜質,而過度的磺化可能導致被磺化的構件的拉伸強度的顯著損失,這可能導致聚合物的分解。典型地,磺化程度係基於磺化的聚合物表面上的總碳原子的從0.5至25原子%、較佳的是從1至15原子%、並且更較佳的是從3至10原子%。合適的磺化溫度將取決於所使用的具體技術,但是任何方法應該小於所處理的基材和聚合物材料的熔點。類似地進行磺化的壓力將取決於具體的磺化方法,並且典型地是大氣壓,但可以是低於大氣壓(例如,10至750托)或超大氣壓(例如,770至4000托)。磺化反應時間可以取決於方法和其他變數而顯著變化,其中從兩分鐘至24小時的時間係典型的。
磺化有待活化的基材的聚合物表面的典型方法係將這種表面暴露於氣態三氧化硫,較佳的是用乾燥惰性氣體如空氣、氬氣、氮氣、氦氣、二氧化碳、二氧化硫等稀釋。氣態磺化劑中的三氧化硫的濃度可以基於總氣態磺化劑從0.1 vol%至50 vol%,較佳的是從5 vol%至35 vol%的三氧化硫變化。三氧化硫可以藉由使二氧化硫和空氣經催化劑床如氧化釩(V2
O5
)或文獻中已知的其他催化劑床反應而原位產生。產生可接受程度的磺化所需要的磺化時間隨三氧化硫濃度和溫度而變化。例如,磺化程度隨三氧化硫的較高濃度和較高溫度而增加。可能希望藉由常規乾燥劑管從以上氣體中排除水蒸氣,因為在以液體或蒸汽形式的水的存在下,三氧化硫被轉化為具有不同濃度的硫酸的液滴,並且可能抑制或防止塑膠的磺化。為了去除水,可能進一步希望在引入磺化反應物之前用乾燥惰性氣體如空氣、氬氣、氮氣、氦氣、二氧化碳、二氧化硫等吹掃磺化室。應該控制一種或多種氣體的加入速率以使磺化速率最大化,同時最小化任何潛在不利效應,如聚合物的熔化。可以連續地或以不連續的方式例如以不同的脈衝將一種或多種氣體加入含有基材的磺化室內。反應室可以處於環境壓力或者小於或大於環境壓力的壓力下。用於氣相磺化反應的反應溫度典型地是從20°C至132°C。
用於磺化聚合物表面的另一種合適的方法包括在惰性液體溶劑如液體多氯化脂肪烴(例如,二氯甲烷、四氯化碳、全氯乙烯、1,1,2,2-四氯乙烷、或二氯化乙烯)中使表面與SO3
的溶液接觸。合適的濃度包括例如基於總溶液從1 wt%至25 wt%的SO3
。反應溫度典型地是從0°C至140°C,應理解,溫度係小於被處理的聚合物的熔點。
另一種合適的磺化方法包括使聚合物表面與氯磺酸磺化劑接觸。可以例如用純氯磺酸磺化聚合物表面。視需要,氯磺酸可以與一種或多種附加的溶劑例如液體多氯化脂肪烴如二氯甲烷、四氯化碳、全氯乙烯、1,1,2,2-四氯乙烷、或二氯化乙烯一起使用。這種磺化方法的典型溫度係從25°C至75°C。
另一種合適的磺化方法包括使聚合物表面與硫酸接觸。沒有特別限制合適的濃度。硫酸可以例如呈濃縮或非濃縮的形式。合適的濃度包括例如10 wt%或更大、20 wt%或更大、30 wt%或更大、90 wt%或更大、96% wt%或更大、或98 wt%或更大的硫酸。硫酸的濃度可以可替代地是96 wt%或更少。用硫酸磺化的反應溫度典型地是從0°C至140°C、例如從30°C至120°C。
另一種合適的磺化方法包括使聚合物表面與發煙硫酸接觸。如在此使用的,發煙硫酸(fuming sulfuric acid)(又稱為「發煙硫酸(oleum)」)不同於濃硫酸,差別在於發煙硫酸係含有溶解的SO3
的100%硫酸。與濃硫酸相比,使用發煙硫酸可以是有利的,因為發煙硫酸係顯著更具反應性的並且因此磺化反應更快發生。典型地,發煙硫酸的濃度被描述為溶液中游離SO3
的wt%。典型的發煙硫酸係在溶液中0.1 wt%至30 wt%的SO3
。發煙硫酸磺化的反應溫度典型地是從0°C至140°C、例如從30°C至120°C。
對於在此描述的磺化方法,通常在本領域中已知的是,磺化過程的變數包括例如溫度、反應物濃度、壓力、磺化時間和聚合物的特性如百分比結晶度、雙鍵含量和孔隙率。確定以上描述的磺化方法的合適條件以實現希望的磺化程度係在熟悉該項技術者的水平內。
典型地,磺化的聚合物表面將用沖洗劑,典型地與水混溶的液體、例如水、較佳的是去離子(DI)水、甲醇、乙醇、丙酮或四氫呋喃沖洗,以去除殘餘的硫酸、反應副產物以及其他污染物。沖洗劑可以是與水不混溶的液體(例如甲苯、二氯甲烷)或醚(如甲基三級丁基醚、二***、二戊醚或其他C2-C10二烷基醚)。這種沖洗對於去除殘餘的未結合酸係有用的。沖洗典型地進行一段時間以達到中性,即,直到用過的沖洗材料表示出與尚未接觸磺化的聚合物表面的沖洗材料相同的pH水平。沖洗過程典型地藉由填充被沖洗的製品來進行,例如在外殼構件或內襯的情況下,排空內含物並且重複直到達到中性。在另一方面,質子酸溶液可以藉由將製品浸沒在含有質子酸溶液的槽中並且使製品浸泡來施加,較佳的是在攪拌下。可以將質子酸溶液以連續方式施加到槽中,或者更典型地,以分批方式如藉由連續地填充並且排空槽直到達到中性來施加。
磺化過程典型地導致被處理的聚合物表面變色,其中產生黑色或深棕色的層。不希望受任何具體理論的束縛,據信,該反應係同時氧化和磺化的反應。變色因此似乎係聚合物的複雜氧化的結果,使得它含有各種發色團的不飽和聚合物基團和氧化的基團,如羥基、酮基或羧酸基。進一步據信,該等基團彼此之間縮合以形成造成以上指出的深色的附加的發色基團。
典型地希望去除或減少變色層,因為變色層可能滲入並且污染有待儲存在容器中的材料。出於這個目的,變色的表面可以視需要用漂白劑沖洗。合適的漂白劑包括例如次氯酸鈉、次氯酸鈣、過氧化氫、過碳酸銨、過硫酸鉀、過錳酸鉀和重鉻酸鈉的水溶液。聚合物表面的漂白隨後典型地是用如以上描述的與水混溶的液體沖洗,以去除殘餘的漂白劑、反應副產物和其他污染物。
磺化的聚合物表面接著用包含質子酸的組成物處理。藉由用質子酸處理,可以去除產生自磺化過程的污染物和金屬。合適的質子酸包括例如硝酸、鹽酸、硫酸、乙酸、檸檬酸、酒石酸、亞胺基二乙酸、磷酸、硼酸、或其組合。較佳的是,使聚合物表面與質子酸的液體溶液接觸。質子酸溶液的濃度典型地是從1 wt%至80 wt%的酸、並且較佳的是從10 wt%-30 wt%的酸。可以例如藉由填充如用於處理外殼構件或內襯的內部聚合物表面的基材並且使質子酸與聚合物表面之間接觸一段希望的時間將質子酸溶液施加到製品上,較佳的是在攪拌下。可替代地,質子酸溶液可以藉由將製品浸沒在含有質子酸溶液的槽中並且使製品浸泡來施加,較佳的是在攪拌下。從一小時至14天、較佳的是從5天至10天的沖洗時間係典型的。酸沖洗的溫度典型地是從0°C至100°C、較佳的是從20°C至50°C。
質子酸處理可以可替代地使用在氣體或蒸汽相中的質子酸在密閉室中進行。呈氣體形式的合適的質子酸包括例如氯化氫和氟化氫。以蒸汽形式使用的合適的質子酸包括以上關於質子酸溶液描述的那些。蒸汽產生可以使用本領域已知的方法完成,例如將嵌入件載氣如空氣、氬氣、氮氣、或氦氣鼓泡到質子酸溶液中並且視需要加熱酸。從一小時至14天、較佳的是從5天至10天的處理時間係典型的。典型地,該等處理可以在大氣壓或超大氣壓下進行。在此方法中磺化製品的質子酸處理之前,聚合物表面應該用水性沖洗劑、典型地去離子水處理,以便在與質子酸接觸期間允許溶解金屬污染物並且從聚合物表面中去除金屬污染物。沖洗處理可以在引入密閉室中之前如藉由用沖洗劑填充製品或將製品浸沒在沖洗劑中進行。沖洗時間不是關鍵的,並且處理應該足以在有待用質子酸處理的聚合物表面上產生水膜。
如果希望聚合物表面的漂白,可以將其代替如以上描述的分開的漂白過程或者除分開的漂白過程之外與質子酸處理同時進行。對於在質子酸處理期間的漂白,某些質子酸自身(例如硝酸)可以充當漂白劑。視需要,不同於質子酸的漂白劑可以與質子酸組合使用,以處理聚合物表面。合適的質子酸/漂白劑組合包括例如上述質子酸和漂白劑的任何組合。特別合適的組合包括例如過氧化氫/硫酸、過氧化氫/鹽酸、過氧化氫/硝酸和重鉻酸鈉/硫酸。
質子酸處理的聚合物表面典型地用如以上關於後磺酸處理沖洗描述的水可混溶的沖洗劑沖洗。沖洗典型地進行一段時間以達到中性。
視需要,質子酸處理的聚合物表面可以用中和聚合物上的磺酸基的試劑進行處理。例如,這可以是希望的,以便防止其中有待儲存在容器中的材料與酸基團不相容的反應。在這種情況下,酸基團的中和可以使容器與有待儲存的材料相容。中和劑可以例如處於液相或蒸汽相。合適的液相中和劑包括例如:一級胺、二級胺或三級胺;氫氧化銨,包括氫氧化季銨溶液,如四甲基氫氧化銨;一級亞胺、二級亞胺或三級亞胺;或其混合物。可以使用的合適的胺包括具有2-5個碳原子的一級、二級、或三級飽和脂肪胺,其係水溶性的並且通常在室溫下是液體,例如,戊胺、二丙胺、三乙胺、二乙胺、乙胺、二乙基甲胺、乙醇胺、二乙醇胺、三乙醇胺和硫代乙醇胺。可以使用的合適的亞胺包括一級、二級、或三級芳香族和脂肪族亞胺,其係水溶性的並且通常在室溫下是液體,例如吡啶、嘧啶和吡𠯤。
可以將磺化的塑膠表面浸漬到水性溶液或懸浮液中,或者可以將其用溶液噴霧、用水洗滌並且乾燥。典型地,以使所得溶液含有從1 wt%-20 wt%的中和劑的量將中和劑加入水中。接觸時間不是關鍵的,並且僅浸漬或噴霧可以是足夠的。進行中和的溫度不是關鍵的,並且典型地是從-20°C至60°C、較佳的是從20°C至40°C。
合適的蒸汽相中和劑包括例如氣態氨、甲胺、二甲胺、三甲胺和吡啶。對於標準條件下處於液體形式的那些材料,例如吡啶,可以將材料加熱至允許蒸發的溫度。蒸汽相中和劑與磺化的聚合物表面之間的接觸時間典型地是從1分鐘至24小時、並且更典型地從15分鐘至四小時。進行蒸汽相中和的溫度典型地是從0°C至100°C、較佳的是從20°C至80°C。如果視需要的中和處理發生,聚合物表面則典型地用如以上關於後磺酸處理沖洗描述的水可混溶的沖洗劑沖洗。
根據本發明的示例性容器現在將參照附圖進行描述。圖1展示了根據本發明的第一示例性容器1。容器1包括具有對於從有待儲存在容器中的組成物中去除金屬雜質有效的活性內部表面3的聚合物外殼構件2。聚合物外殼構件可以藉由本領域熟知的方法例如擠出吹塑模製來製造。由如以上描述的有利於磺化的聚合物形成外殼構件。外殼構件的內表面藉由如以上描述的方法進行活化。容器1進一步包括用於覆蓋外殼構件的閉合物4。合適的閉合物係本領域已知的,並且包括例如螺帽、按壓配合帽、分配連接件(例如,來自英特格公司(Entegris, Inc.)的ErgoNOW(tm)連接件)以及具有隔膜的閉合物。為了適應閉合物,瓶可以包括用於固定帽的配合特徵,如螺紋。
圖2展示了根據本發明的第二示例性容器1,其包括具有用於從儲存在容器中的組成物中去除金屬雜質的活性內部表面7的聚合物內襯6。內襯可以藉由本領域熟知的方法例如擠出吹塑模製來製造。由如以上描述的有利於磺化的聚合物形成內襯。內襯的內表面藉由如以上描述的方法進行活化。對於包含聚合物內襯6的容器,外殼構件可以由除如在此描述的聚合物之外的材料構成。外殼構件可以例如由玻璃、不銹鋼、或未經污染的其他惰性的清潔材料製成。
為了增加活化的聚合物表面與有待儲存在容器中的化學組成物之間的相互作用,可以希望提供具有增加的表面積以與化學組成物更大接觸的活化的聚合物表面。據信,這種增加的活化的聚合物表面積可以提供金屬污染物的進一步減少。可以例如藉由聚合物表面的表面紋理化來實現增加的表面積。合適的紋理包括各種幾何形狀的凸起或凹進的結構,例如,凹坑、圓頂、脊、凹槽、錐體、矩形長方體、圓柱、及其組合。表面紋理化可以在瓶(或其他外殼構件或製品)的製造期間實現。圖3A展示了具有紋理化的活化表面8A的外殼構件2的容器1。圖3B-3E示出了包括錐體(圖3B)、矩形長方體(圖3C)、圓頂(圖3D)和凹坑(圖3E)紋理化的各種形式的紋理化表面。
在以上描述的示例性容器中,外殼構件或內襯包括活性內部聚合物表面。此外或可替代地,容器可以包括至少部分佈置在外殼構件內的嵌入件,其包括用於金屬去除的活化聚合物表面。出於增加嵌入件的活化表面積的目的,可以希望在嵌入件上包括如關於圖3A-3E描述的表面紋理化。
圖4展示了包括佈置在外殼構件2內的活化的聚合物封閉的底部圓柱形嵌入件10的示例性容器1。聚合物嵌入件的活化藉由如在此描述的方法進行。出於最大化活性聚合物表面的表面積的目的,較佳的是活化圓柱形組件的每一個暴露表面。圓柱形組件可以藉由本領域已知的方法例如擠出吹塑模製來製造。
圖5展示了包括呈活化的細長聚合物構件12形式的活化的嵌入件的另一個示例性容器1。聚合物構件12可以在形式上例如係中空的或實心的,並且可以具有各種細長的形狀,如圓柱形或棱柱形,其中圓柱形係典型的。構件12可以藉由本領域已知的方法例如擠出吹塑模製來製造,隨後藉由如在此描述的方法進行活化。聚合物構件12可以與如所展示的閉合物4係一體的,或者可以作為與閉合物分開的部件提供。
以下非限制性實例係本發明的例示。
實例
實例1
使15 ml的LDPE白色半透明瓶(2.4 cm直徑,5.8 cm高度)經受氣相磺化。預磺化的瓶沒有表現出可測量的元素硫,並且磺化的瓶表現出在表面處如藉由x射線光電子能譜法(XPS)測定的6.9原子百分比的元素硫含量。在視覺上觀察到磺化的瓶從內到外變色成黑色。用去離子(DI)水(18兆歐姆)沖洗該等瓶。將磺化的瓶用20 wt%的Optima(tm)硝酸(飛世爾科技公司(Fisher Scientific))填充,並且將瓶振盪7天。硝酸在顏色上變黃,並且在瓶的內壁上的變色基本上被去除,表明去除了磺化副產物。然後用DI水(18兆歐姆)沖洗瓶,並且在如藉由XPS測量的在表面處的硫含量係3.4原子百分比。將10 ml的包括丙烯酸樹脂和有機溶劑的混合物的OC(tm)3050浸沒面漆材料(麻塞諸塞州瑪律堡陶氏電子材料公司(Dow Electronic Materials, Marlborough, MA))加入瓶中。將瓶振盪7天,並且用安捷倫8800 ICP-MS系統進行金屬分析。ICP金屬分析包括對所有實例的來自瓶的兩個樣品的分析。結果示於表1中。
對比實例1
將15 ml的LDPE白色半透明瓶(2.4 cm直徑,5.8 cm高度)用20 wt%的Optima(tm)硝酸(飛世爾科技公司)填充,並且將瓶振盪7天。然後用DI水(18兆歐姆)沖洗瓶。將10 ml的OC(tm)3050浸沒面漆材料(陶氏電子材料公司)加入瓶中。將瓶振盪7天,並且用安捷倫8800 ICP-MS系統進行金屬分析。結果示於表1中。
對比實例2
如實例1中所述製備磺化的/DI水沖洗的瓶。將10 ml的OC(tm)3050浸沒面漆材料(陶氏電子材料公司)加入瓶中。將瓶振盪7天,並且用安捷倫8800 ICP-MS系統進行金屬分析。結果示於表1中。
實例2
如實例1中所述製備硝酸處理的/DI水沖洗的磺化的瓶。將10 ml的TraceSELECT Ultra TMAH溶液(在水中25 wt%)(弗盧卡公司(Fluka))加入瓶中,並且振盪一周。TMAH溶液獲得暗棕色並且從瓶中去除。用18 MOhm DI水沖洗瓶,並且將10 ml的OC(tm)3050浸沒面漆材料(陶氏電子材料公司)加入瓶中。將瓶振盪7天,並且用安捷倫8800 ICP-MS系統進行金屬分析。結果示於表1中。
實例3
如實例1中所述製備硝酸處理的/DI水沖洗的磺化的瓶。將10 ml的Optima氫氧化銨溶液(20 wt%)(飛世爾科技公司)加入瓶中,並且振盪一周。TMAH溶液獲得暗棕色並且從瓶中去除。用18 MOhm DI水沖洗瓶,並且將10 ml的OC(tm)3050浸沒面漆材料(陶氏電子材料公司)加入瓶中。將瓶振盪7天,並且用安捷倫8800 ICP-MS系統進行金屬分析。結果示於表1中。
實例4
為了研究再利用本發明的容器的適合性,用蒸餾的乳酸乙酯沖洗磺化的、硝酸洗滌的並且含有OC(tm)3050浸沒面漆材料(陶氏電子材料公司)的如在實例1中製備的瓶。將瓶然後用18 MOhm DI水沖洗,並且用20 wt% Optima硝酸(飛世爾科技公司)處理7天。所得硝酸保持澄清。用18 MOhm DI水沖洗瓶,並且將10 ml的OC(tm)3050浸沒面漆材料(陶氏電子材料公司)加入瓶中。將瓶振盪7天,並且用安捷倫8800 ICP-MS系統進行金屬分析。結果示於表1中。
實例5
如實例1中所述製備磺化的/DI水沖洗的瓶。將瓶用98 wt% Optima硫酸(飛世爾科技公司)填充7天。所得硫酸保持澄清,並且瓶壁的內部保持黑色。用18 MOhm DI水沖洗瓶,並且將10 ml的OC(tm)3050浸沒面漆材料(陶氏電子材料公司)加入瓶中。將瓶振盪7天,並且用安捷倫8800 ICP-MS系統進行金屬分析。結果示於表1中。
實例6
如實例1中所述製備磺化的/DI水沖洗的瓶。將瓶用30 wt%的Optima過氧化氫(飛世爾科技公司) : 98 wt%的Optima硫酸(飛世爾科技公司)的1 : 4混合物(按體積計)填充,並且將瓶振盪7天。所得硫酸保持澄清,並且內瓶壁的顏色從黑色減輕至棕色。用18 MOhm DI水沖洗瓶,並且將10 ml的OC(tm)3050浸沒面漆材料(陶氏電子材料公司)加入瓶中。將瓶振盪7天,並且用安捷倫8800 ICP-MS系統進行金屬分析。結果示於表1中。
實例7
如實例1中所述製備磺化的/DI水沖洗的瓶。將瓶用TraceSelect乙酸(弗盧卡公司)填充,並且將瓶振盪7天。所得乙酸保持澄清,並且瓶壁的內部變得略微帶棕色。用18 MOhm DI水沖洗瓶,並且將10 ml的OC(tm)3050浸沒面漆材料(陶氏電子材料公司)加入瓶中。將瓶振盪7天,並且用安捷倫8800 ICP-MS系統進行金屬分析。結果示於表1中。
對比實例3
將15 ml的LDPE白色半透明瓶(2.4 cm直徑,5.8 cm高度)用20 wt%的Optima(tm)硝酸(飛世爾科技公司)填充,並且將瓶振盪7天。然後用DI水(18兆歐姆)沖洗瓶。將10 ml的異戊醚(東洋合成工業株式會社(Toyo Gosei))加入瓶中。將瓶振盪7天,並且用安捷倫8800 ICP-MS系統進行金屬分析。結果示於表1中。
實例8
如實例1中所述製備硝酸處理的/DI水沖洗的磺化的瓶。將10 ml的異戊醚(東洋合成工業株式會社)加入瓶中。將瓶振盪7天,並且用安捷倫8800 ICP-MS系統進行金屬分析。結果示於表1中。
對比實例4
將15 ml的LDPE白色半透明瓶(2.4 cm直徑,5.8 cm高度)用20 wt%的Optima(tm)硝酸(飛世爾科技公司)填充,並且將瓶振盪7天。然後用DI水(18兆歐姆)沖洗瓶。將10 ml的乳酸乙酯加入瓶中。將瓶振盪7天,並且用安捷倫8800 ICP-MS系統進行金屬分析。結果示於表1中。
實例9
如實例1中所述製備硝酸處理的/DI水沖洗的磺化的瓶。將10 ml的乳酸乙酯加入瓶中。將瓶振盪7天,並且用安捷倫8800 ICP-MS系統進行金屬分析。結果示於表1中。
對比實例5
將15 ml的LDPE白色半透明瓶(2.4 cm直徑,5.8 cm高度)用20 wt%的Optima(tm)硝酸(飛世爾科技公司)填充,並且將瓶振盪7天。然後用DI水(18兆歐姆)沖洗瓶。將10 ml的羥丁酸甲酯(HBM)加入瓶中。將瓶振盪7天,並且用安捷倫8800 ICP-MS系統進行金屬分析。結果示於表1中。
實例10
如實例1中所述製備硝酸處理的/DI水沖洗的磺化的瓶。將10 ml的HBM加入瓶中。將瓶振盪7天,並且用安捷倫8800 ICP-MS系統進行金屬分析。結果示於表1中。
對比實例6
將15 ml的LDPE白色半透明瓶(2.4 cm直徑,5.8 cm高度)用20 wt%的Optima(tm)硝酸(飛世爾科技公司)填充,並且將瓶振盪7天。然後用DI水(18兆歐姆)沖洗瓶。將10 ml的丙二醇單甲醚乙酸酯(PGMEA)加入瓶中。將瓶振盪7天,並且用安捷倫8800 ICP-MS系統進行金屬分析。結果示於表1中。
實例11
如實例1中所述製備硝酸處理的/DI水沖洗的磺化的瓶。將10 ml的PGMEA加入瓶中。將瓶振盪7天,並且用安捷倫8800 ICP-MS系統進行金屬分析。結果示於表1中。
以十億分之幾(ppb)計的金屬含量係來自瓶的兩個樣品的平均值;σ = 來自瓶的兩個樣品的標準差;「Y」 = 進行了磺化;「TC」 = 浸沒面漆材料;「IE」 = 異戊醚;「EL」 = 乳酸乙酯;「HBM」 = 羥丁酸甲酯;「PGMEA」 = 丙二醇單甲醚乙酸酯;「nd」 = 未檢出;* 瓶再利用研究。
1:容器
2:外殼構件
3,7:活性內部表面
4:閉合物
6:聚合物內襯
8A:活化表面
10:圓柱形嵌入件
12:聚合物構件
將參照以下附圖描述本發明,在附圖中相似的參考號表示相似的特徵,並且在附圖中:
[圖1]展示了包括活化的外殼構件的根據本發明之容器;
[圖2]展示了包括活化的內襯的根據本發明之容器;
[圖3A-3E]展示了具有不同活化的紋理化表面幾何結構的根據本發明之容器;以及
[圖4和5]示出了包括活化的嵌入件的根據本發明之容器。
無
1:容器
2:外殼構件
3:活性內部表面
4:閉合物
Claims (11)
- 一種容器,其包含: 外殼構件;以及 視需要至少部分在該外殼構件內的製品; 其中該外殼構件和/或該製品包含活化的聚合物表面,其中該活化的聚合物表面藉由包括用包含質子酸的組成物處理磺化的聚合物表面的方法形成。
- 如申請專利範圍第1項所述之容器,其中該外殼構件包含活化的聚合物表面。
- 如申請專利範圍第1或2項所述之容器,其中該製品包含活化的聚合物表面。
- 如申請專利範圍第3項所述之容器,其中該製品係外殼構件內襯。
- 如申請專利範圍第3項所述之容器,其中該製品為非外殼構件內襯的容器嵌入件。
- 如申請專利範圍第1至5項中任一項所述之容器,其中該容器含有與該活化表面接觸的超純化學組成物。
- 如申請專利範圍第1至6項中任一項所述之活性容器,其中該容器含有與該活化表面接觸的水、藥物、食品、飲料、或電子材料。
- 一種形成具有活化的聚合物表面的容器之方法,該方法包括提供包含磺化的聚合物表面的外殼構件或外殼構件內襯,並且用包含質子酸的組成物處理該磺化的聚合物表面。
- 如申請專利範圍第8項所述之方法,其中該質子酸選自硝酸、鹽酸、硫酸、或乙酸中的一種或多種。
- 如申請專利範圍第8或9項所述之方法,其中,該包含質子酸的組成物進一步包含不同於該質子酸的氧化劑。
- 如申請專利範圍第8至10項中任一項所述之方法,該方法進一步包括在用包含質子酸的組成物處理該磺化的聚合物表面之後,用鹼處理該聚合物表面。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201862686078P | 2018-06-17 | 2018-06-17 | |
US62/686,078 | 2018-06-17 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW202012252A true TW202012252A (zh) | 2020-04-01 |
TWI729407B TWI729407B (zh) | 2021-06-01 |
Family
ID=68839165
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW108120259A TWI729407B (zh) | 2018-06-17 | 2019-06-12 | 具有活性表面之容器及形成此類容器之方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20190382161A1 (zh) |
JP (1) | JP7004685B2 (zh) |
KR (1) | KR102355132B1 (zh) |
CN (1) | CN110606254B (zh) |
TW (1) | TWI729407B (zh) |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56115331A (en) * | 1980-02-04 | 1981-09-10 | Asahi Chem Ind Co Ltd | High polymer film having activated surface |
US4615914A (en) * | 1985-10-07 | 1986-10-07 | The Dow Chemical Company | Treatment of the interior surfaces of resinous enclosure members |
JPS63134053A (ja) * | 1986-11-27 | 1988-06-06 | Toyoda Gosei Co Ltd | 容器物の内面の表面処理方法 |
US5350489A (en) * | 1990-10-19 | 1994-09-27 | Purex Co., Ltd. | Treatment method of cleaning surface of plastic molded item |
JP2003025118A (ja) * | 2001-07-13 | 2003-01-29 | Allied Material Corp | 切削用ダイヤモンド工具 |
JP2004537476A (ja) * | 2001-08-06 | 2004-12-16 | シーエスピー テクノロジーズ,インコーポレイティド | インモールドライナーのための方法及び組成物 |
US6758910B2 (en) | 2001-11-13 | 2004-07-06 | Thomas E. Schmoyer | Apparatus and method for sulfonating an article and articles made therefrom |
JP2003251118A (ja) | 2002-02-27 | 2003-09-09 | Ebara Corp | 高容量金属捕捉能を有するフィルターカートリッジ |
TW200615316A (en) * | 2004-06-18 | 2006-05-16 | Mec Co Ltd | Resin surface treating agent and resin surface treatment |
FR2889204B1 (fr) * | 2005-07-26 | 2007-11-30 | Sidel Sas | Appareil pour le depot pecvd d'une couche barriere interne sur un recipient, comprenant une ligne de gaz isolee par electrovanne |
JP5124946B2 (ja) * | 2006-01-12 | 2013-01-23 | 栗田工業株式会社 | 超純水製造装置における超純水中の過酸化水素の除去方法 |
JP4893156B2 (ja) * | 2006-08-21 | 2012-03-07 | 栗田工業株式会社 | 水質評価方法及びそれに用いられる基板接触器具 |
JP5979712B2 (ja) | 2011-06-20 | 2016-08-31 | 国立研究開発法人日本原子力研究開発機構 | 金属吸着材とその製造方法及び金属吸着材を用いた金属捕集方法 |
JP2014005370A (ja) * | 2012-06-25 | 2014-01-16 | Kao Corp | 油脂の精製方法 |
US9778570B2 (en) * | 2015-01-30 | 2017-10-03 | Shin-Etsu Chemical Co., Ltd. | Conductive polymer composition, coated article, patterning process and substrate |
-
2019
- 2019-05-03 US US16/402,485 patent/US20190382161A1/en not_active Abandoned
- 2019-06-10 JP JP2019107796A patent/JP7004685B2/ja active Active
- 2019-06-11 CN CN201910505374.1A patent/CN110606254B/zh active Active
- 2019-06-12 TW TW108120259A patent/TWI729407B/zh active
- 2019-06-13 KR KR1020190069906A patent/KR102355132B1/ko active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
CN110606254A (zh) | 2019-12-24 |
JP2019218140A (ja) | 2019-12-26 |
KR20190142235A (ko) | 2019-12-26 |
TWI729407B (zh) | 2021-06-01 |
KR102355132B1 (ko) | 2022-01-24 |
CN110606254B (zh) | 2021-09-07 |
US20190382161A1 (en) | 2019-12-19 |
JP7004685B2 (ja) | 2022-01-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US6240933B1 (en) | Methods for cleaning semiconductor surfaces | |
KR101120707B1 (ko) | 부식성 액체를 이용하는 초음파 보조 에칭 | |
TWI442464B (zh) | 清洗方法、清洗系統及製造微細構造之方法 | |
KR20030019323A (ko) | 전자부품을 처리하기 위한 공정 및 장치 | |
KR100500201B1 (ko) | 반도체 웨이퍼 세정 장치 | |
KR20100138998A (ko) | 피라미드 구조를 갖는 실리콘 표면의 제조방법 | |
TWI729407B (zh) | 具有活性表面之容器及形成此類容器之方法 | |
EP0632089B1 (en) | Process for removing fine particles from articles of fluorine-containing resin | |
KR100354953B1 (ko) | 반도체웨이퍼건조방법및장치 | |
JP2743822B2 (ja) | 電解活性水処理装置 | |
WO2000007220A2 (en) | Wet processing methods for the manufacture of electronic components using ozonated process fluids | |
TW444291B (en) | Wet processing methods for the manufacture of electronic components | |
TW202426348A (zh) | 塗覆的容器以及形成此類容器之方法 | |
US20240217702A1 (en) | Coated containers and methods of forming such containers | |
KR20030020399A (ko) | 재생 불소 수지의 제조 방법 및 불소 수지 재생품 | |
CN118270361A (zh) | 涂覆的容器以及形成此类容器的方法 | |
JP2821947B2 (ja) | 超高純度フッ化水素酸の製造方法 | |
US7202175B2 (en) | Method and apparatus for treating a substrate surface by bubbling | |
RU2065488C1 (ru) | Моющее средство для отмывки полимерной поверхности и способ отмывки | |
US20240173671A1 (en) | Method and apparatus for treating wastewater | |
US3501340A (en) | Method of cleaning glass and quartz surfaces | |
Heyns et al. | 5.6 Wet chemical cleaning and surface preparation of Si | |
JPH04259221A (ja) | 半導体ウェーハ用洗浄液 | |
US20060207688A1 (en) | Method for storing silicon substrate having silicon oxide film formed thereon | |
KR20110077278A (ko) | 웨이퍼와 포토레지스트 사이의 점착성을 증가시키는 방법 |