TW201940852A - Pressure sensing device - Google Patents
Pressure sensing device Download PDFInfo
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- TW201940852A TW201940852A TW108106448A TW108106448A TW201940852A TW 201940852 A TW201940852 A TW 201940852A TW 108106448 A TW108106448 A TW 108106448A TW 108106448 A TW108106448 A TW 108106448A TW 201940852 A TW201940852 A TW 201940852A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
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- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
Description
本說明是關於一般的感壓裝置(Pressure Sensing Device),尤其是有關具備壓力感測器的感壓裝置。This description relates to a general pressure sensing device, and more particularly to a pressure sensing device including a pressure sensor.
專利文獻1是揭示靜電電容式壓力感測半導體裝置(感壓裝置)。該半導體裝置,具備:以靜電電容的變化來感測壓力的壓力感測部,及封閉此壓力感測器的封裝。壓力感測部具備第1電極及與此第1電極透過預定距離相對配置的第2電極,在第1電極與第2電極之間形成有靜電電容。壓力感測部是藉著按壓構件對應傳達至第1電極的壓力使距離變化而使得靜電電容變化。在封裝配設有傳達至壓力感測部的第1電極之按壓構件產生的壓力傳達至第1電極的壓力傳達構件。Patent Document 1 discloses a capacitive pressure sensing semiconductor device (pressure sensing device). The semiconductor device includes a pressure sensing section that senses pressure by a change in electrostatic capacitance, and a package that closes the pressure sensor. The pressure sensing unit includes a first electrode and a second electrode disposed opposite to the first electrode through a predetermined distance, and an electrostatic capacitance is formed between the first electrode and the second electrode. The pressure sensor changes the capacitance by changing the distance according to the pressure transmitted to the first electrode by the pressing member. The package is provided with a pressure transmitting member that transmits the pressure generated by the pressing member of the first electrode that is transmitted to the pressure sensor to the first electrode.
專利文獻1中,有將封裝形成不僅壓力感測部也有收容壓力傳達構件的必要,因此整體的構造變得複雜。
[先前技術文獻]
[專利文獻]In Patent Document 1, it is necessary to form a package in which not only the pressure sensing section but also a pressure transmitting member is accommodated, so the overall structure becomes complicated.
[Prior technical literature]
[Patent Literature]
專利文獻1:日本特開2013-156066號公報Patent Document 1: Japanese Patent Application Publication No. 2013-156066
[發明所欲解決之課題][Problems to be Solved by the Invention]
本發明的課題是提供以簡單的構造可對感壓面的壓力傳達效率的提升的感壓裝置。
[用於解決課題的手段]An object of the present invention is to provide a pressure-sensing device capable of improving the efficiency of transmitting pressure to a pressure-sensing surface with a simple structure.
[Means for solving problems]
本發明之一樣態的感壓裝置具備壓力感測器、膜構件及彈性構件。上述壓力感測器具有感壓面。上述膜構件具有彈性,在上述感壓面隔著間隔相對地固定於上述感壓面的周圍。上述彈性構件是位在上述感壓面與上述膜構件之間,將施加於上述膜構件的力傳達至上述感壓面。A pressure sensing device according to the present invention includes a pressure sensor, a membrane member, and an elastic member. The pressure sensor has a pressure-sensitive surface. The film member has elasticity and is relatively fixed around the pressure-sensitive surface to the pressure-sensitive surface at intervals. The elastic member is positioned between the pressure-sensitive surface and the film member, and transmits a force applied to the film member to the pressure-sensitive surface.
1. 實施形態
1.1 實施形態1
1.1.1 概要
第1圖及第2圖表示本實施形態的感壓裝置10A。感壓裝置10A,具備:壓力感測器20、膜構件30及彈性構件40A。壓力感測器20具有感壓面201。膜構件30具有彈性,在感壓面201隔著間隔相對地固定於感壓面201的周圍。彈性構件40A是位在感壓面201與膜構件30之間,將施加於膜構件30的力傳達至感壓面201。Implementation form
1.1 Embodiment 1
1.1.1 Overview FIGS. 1 and 2 show a pressure sensing device 10A according to this embodiment. The pressure sensing device 10A includes a pressure sensor 20, a membrane member 30, and an elastic member 40A. The pressure sensor 20 has a pressure-sensitive surface 201. The film member 30 has elasticity and is relatively fixed around the pressure-sensitive surface 201 on the pressure-sensitive surface 201 at intervals. The elastic member 40A is located between the pressure-sensitive surface 201 and the film member 30 and transmits a force applied to the film member 30 to the pressure-sensitive surface 201.
如上述感壓裝置10A是將具有彈性的膜構件30在感壓面201隔著間隔相對地固定於感壓面201的周圍,在膜構件30與感壓面201之間配置有彈性構件40A。此構成中,壓力施加於膜構件30的場合,藉著膜構件30本身的變形,將施加於膜構件30的壓力透過彈性構件40A傳達至感壓面201。亦即,膜構件30與彈性構件40A具有作為按壓感壓面201用之按壓機構的功能。藉此,可提升對感壓面201之壓力傳達效率的提升。並且,此效果僅在壓力感測器20設置膜構件30及彈性構件40A的簡單構造即可獲得。因此,藉感壓裝置10A,可以簡易的構造獲得對感壓面201之壓力傳達效率的提升。另外,由於膜構件30是固定在感壓面201的周圍,因此彈性構件40A的定位變得容易。As described above, the pressure-sensitive device 10A fixes the elastic film member 30 around the pressure-sensitive surface 201 on the pressure-sensitive surface 201 with an interval therebetween, and arranges the elastic member 40A between the film member 30 and the pressure-sensitive surface 201. In this configuration, when pressure is applied to the film member 30, the pressure applied to the film member 30 is transmitted to the pressure-sensitive surface 201 through the elastic member 40A due to the deformation of the film member 30 itself. That is, the film member 30 and the elastic member 40A have a function as a pressing mechanism for pressing the pressure-sensitive surface 201. Thereby, the improvement of the pressure transmission efficiency to the pressure-sensitive surface 201 can be improved. Moreover, this effect can be obtained only by the simple structure in which the film member 30 and the elastic member 40A are provided in the pressure sensor 20. Therefore, with the pressure-sensing device 10A, it is possible to improve the pressure transmission efficiency of the pressure-sensing surface 201 with a simple structure. In addition, since the film member 30 is fixed around the pressure-sensitive surface 201, positioning of the elastic member 40A becomes easy.
另外,彈性構件40A位在膜構件30與感壓面201之間,藉此保護感壓面201來自施加於膜構件30之過度的壓力。因此,感壓裝置10A可期待彈性構件40A及膜構件30之感壓面201的保護。In addition, the elastic member 40A is positioned between the film member 30 and the pressure-sensitive surface 201, thereby protecting the pressure-sensitive surface 201 from excessive pressure applied to the film member 30. Therefore, the pressure sensitive device 10A is expected to protect the pressure sensitive surface 201 of the elastic member 40A and the film member 30.
1.1.2 構成
以下,參閱第1圖~第3圖,針對感壓裝置10A進一步詳細地說明。感壓裝置10A,具備:壓力感測器20、膜構件30、彈性構件40A、按壓構件50、第1接著層61及第2接著層62。1.1.2 Structure Hereinafter, the pressure sensing device 10A will be described in more detail with reference to FIGS. 1 to 3. The pressure sensing device 10A includes a pressure sensor 20, a membrane member 30, an elastic member 40A, a pressing member 50, a first adhesive layer 61, and a second adhesive layer 62.
壓力感測器20具有感壓面201。壓力感測器20是檢測施加於感壓面201的力(壓力)。本實施形態中,壓力感測器20為靜電電容式的壓力感測器。靜電電容式的壓力感測器具有省電,並可以較簡單的從壓力感測器20獲得檢測輸出用的電路(例如,不需要增幅器)的優點。The pressure sensor 20 has a pressure-sensitive surface 201. The pressure sensor 20 detects a force (pressure) applied to the pressure-sensitive surface 201. In this embodiment, the pressure sensor 20 is an electrostatic capacitance type pressure sensor. The electrostatic capacitance type pressure sensor has the advantages of saving power and obtaining a circuit for detecting output from the pressure sensor 20 (for example, an amplifier is not needed).
壓力感測器20是如第3圖表示,具備感測元件21,及封裝22。另外,壓力感測器20,具備:第1端子23、第2端子24、第1連接部25及第2連接部26。壓力感測器20是例如縱的尺寸為數[mm]、橫的尺寸為數[mm]及高度的尺寸為1[mm]以下的大小。The pressure sensor 20 includes a sensor element 21 and a package 22 as shown in FIG. 3. The pressure sensor 20 includes a first terminal 23, a second terminal 24, a first connection portion 25, and a second connection portion 26. The pressure sensor 20 has a size of several [mm] in a vertical dimension, a number of [mm] in a horizontal dimension, and a size of 1 [mm] or less in height.
感測元件21,具有:基板210、電極211、隔膜212、絕緣構件213、接著構件214及電極極板215。感測元件21是可製作成微機電系統(MEMS)。The sensing element 21 includes a substrate 210, an electrode 211, a separator 212, an insulating member 213, an adhesive member 214, and an electrode pad 215. The sensing element 21 can be fabricated as a micro-electromechanical system (MEMS).
基板210為四角形(例如,正方形)的平板狀。基板210具有電絕緣性。本實施形態中,基板210為玻璃製。基板210具有第1面及第2面(第3圖的上面及下面)。The substrate 210 is a flat plate having a quadrangular shape (for example, a square shape). The substrate 210 has electrical insulation. In this embodiment, the substrate 210 is made of glass. The substrate 210 has a first surface and a second surface (upper and lower surfaces in FIG. 3).
電極211是位在基板210的第1面。尤其是將電極211固定於基板210第1面的中央部。電極211是例如圓形的膜狀。The electrode 211 is located on the first surface of the substrate 210. In particular, the electrode 211 is fixed to the center of the first surface of the substrate 210. The electrode 211 is, for example, a circular film.
隔膜212為基板210的第1面。隔膜212具有薄板部212a與支撐部212b。薄板部212a是利用於壓力之感測的部位。薄板部212a是比支撐部212b薄,因此,比支撐部212b更容易變形。支撐部212b是用於將薄板部212a相對於基板210支撐在預定位置的部位。更詳細而言,支撐部212b是圍繞著電極211固定在基板210的第1面,使薄板部212a與位在基板210的第1面的電極211隔著間隔相對地支撐薄板部212a。又,隔膜212是如第3圖表示,在電極211具有連接第2連接部26用的貫穿孔212c。隔膜212具有導電性。隔膜212是例如以雜質之摻雜物具導電性的矽所形成。並且,本實施形態中,薄板部212a為圓形,支撐部212b為四角形的框狀。因此,隔膜212整體為四角形(例如,正方形)的平板狀。The diaphragm 212 is a first surface of the substrate 210. The diaphragm 212 includes a thin plate portion 212a and a support portion 212b. The thin plate portion 212a is a portion used for sensing pressure. Since the thin plate portion 212a is thinner than the support portion 212b, it is easier to deform than the support portion 212b. The support portion 212 b is a portion for supporting the thin plate portion 212 a at a predetermined position with respect to the substrate 210. More specifically, the support portion 212 b is fixed to the first surface of the substrate 210 around the electrode 211, and the thin plate portion 212 a and the electrode 211 located on the first surface of the substrate 210 support the thin plate portion 212 a with an interval therebetween. Further, as shown in FIG. 3, the separator 212 has a through hole 212 c for connecting the second connection portion 26 to the electrode 211. The separator 212 has conductivity. The separator 212 is formed of, for example, silicon having conductivity as a dopant of impurities. Further, in the present embodiment, the thin plate portion 212a is circular, and the support portion 212b is rectangular frame-shaped. Therefore, the diaphragm 212 has a rectangular plate shape (for example, a square shape) as a whole.
隔膜212的薄板部212a、絕緣構件213及電極211是構成電容器216。在此場合中,與薄板部212a的電極211相反側的面(第3圖的上面)成為感壓面201。亦即,感壓面201之中與膜構件30相對的區域是以隔膜212所形成。朝感壓面201施加力時,對應施加的力使隔膜212的薄板部212a彎曲。亦即,隨著施加於感壓面201的力變大而使得薄板部212a的彎曲變大。並且,對應薄板部212a的彎曲,使薄板部212a與電極211之間的距離變化,其結果使電容器216的靜電電容變化。亦即,隨著施加於感壓面201的力變大而使得薄板部212a與電極211之間的距離變短,使電容器216的靜電電容變大。因此,可檢測施加於感壓面201的力(壓力)。The thin plate portion 212 a of the separator 212, the insulating member 213, and the electrode 211 constitute a capacitor 216. In this case, the surface (the upper surface in FIG. 3) opposite to the electrode 211 of the thin plate portion 212 a becomes the pressure-sensitive surface 201. That is, a region of the pressure-sensitive surface 201 opposite to the membrane member 30 is formed by the diaphragm 212. When a force is applied to the pressure-sensitive surface 201, the thin plate portion 212a of the diaphragm 212 is bent in response to the applied force. That is, as the force applied to the pressure-sensitive surface 201 increases, the bending of the thin plate portion 212a increases. In addition, the distance between the thin plate portion 212a and the electrode 211 is changed in accordance with the bending of the thin plate portion 212a, and as a result, the electrostatic capacitance of the capacitor 216 is changed. That is, as the force applied to the pressure-sensitive surface 201 becomes larger, the distance between the thin plate portion 212a and the electrode 211 becomes shorter, and the electrostatic capacitance of the capacitor 216 becomes larger. Therefore, a force (pressure) applied to the pressure-sensitive surface 201 can be detected.
絕緣構件213具有絕緣膜213a與筒部213b。絕緣膜213a是例如圓盤狀的絕緣體(介質)。絕緣膜213a是例如比薄板部212a薄。絕緣膜213a是位在隔膜212的薄板部212a中與電極211相對的面(第3圖的下面)。以一定以上的力將薄板部212a朝基板210側按壓的場合,使絕緣膜213a與電極211接觸。絕緣膜213a藉著隔膜212之薄板部212a的變形使隔膜212與電極211直接接觸可防止隔膜212與電極211短路。又,藉絕緣構件213,壓力感測器20可在隔膜212的薄板部212a與電極211之間確保著間隙。因此,壓力感測器20中,在薄板部212a與電極211之間產生靜電電容。藉此,壓力感測器20可檢測施加於感壓面201的力。筒部213b是例如筒狀的絕緣體(介質)。筒部213b是設置在絕緣膜213a的一端。筒部213b在電極211中圍繞著與第2連接部26的連接之處。筒部213b的內側是與隔膜212的貫穿孔212c連結。藉此筒部213b的內側與貫穿孔212c使電極211的一部分露出。The insulating member 213 includes an insulating film 213a and a cylindrical portion 213b. The insulating film 213a is, for example, a disc-shaped insulator (dielectric). The insulating film 213a is thinner than the thin plate portion 212a, for example. The insulating film 213 a is a surface (the lower surface of FIG. 3) facing the electrode 211 in the thin plate portion 212 a of the separator 212. When the thin plate portion 212a is pressed toward the substrate 210 side with a certain force or more, the insulating film 213a is brought into contact with the electrode 211. The insulating film 213a can prevent the separator 212 and the electrode 211 from being short-circuited by directly contacting the separator 212 and the electrode 211 by the deformation of the thin plate portion 212a of the separator 212. In addition, with the insulating member 213, the pressure sensor 20 can secure a gap between the thin plate portion 212a of the diaphragm 212 and the electrode 211. Therefore, in the pressure sensor 20, an electrostatic capacitance is generated between the thin plate portion 212 a and the electrode 211. Thereby, the pressure sensor 20 can detect the force applied to the pressure-sensitive surface 201. The cylindrical portion 213b is, for example, a cylindrical insulator (dielectric). The cylindrical portion 213b is provided at one end of the insulating film 213a. The cylindrical portion 213 b surrounds the connection point with the second connection portion 26 in the electrode 211. The inside of the tube portion 213b is connected to the through hole 212c of the diaphragm 212. As a result, a part of the electrode 211 is exposed inside the cylindrical portion 213b and the through hole 212c.
接著構件214是固定在基板210的第2面。接著構件214是將感壓裝置10A固定於安裝基板之用。接著構件214為四角形(例如,正方形)的膜狀。本實施形態中,接著構件214為小片連接膜(Die Attach Film:DAF)。小片連接膜在常溫幾乎沒有作為接著劑的的功能,例如在製造步驟中藉著加熱,具有作為接著劑的功能。The next member 214 is fixed to the second surface of the substrate 210. The next member 214 is used for fixing the pressure sensitive device 10A to the mounting substrate. Next, the member 214 has a rectangular shape (for example, a square shape). In this embodiment, the bonding member 214 is a die attach film (DAF). The small piece of connection film has almost no function as an adhesive at room temperature, for example, it has a function as an adhesive by heating in a manufacturing step.
電極極板215是位在與隔膜212的基板210相反側的面(第3圖的上面)。電極極板215是可利用於賦予隔膜212電位之用。The electrode pad 215 is a surface (the upper surface in FIG. 3) located on the side opposite to the substrate 210 of the separator 212. The electrode pad 215 can be used for applying a potential to the separator 212.
第1端子23及第2端子24皆是平板狀。第1端子23及第2端子24是分別藉第1連接部25及第2連接部26電連接於隔膜212及電極211。第1連接部25及第2連接部26皆是具有導電性的纜線。第1連接部25是將一端連接於第1端子23,將另一端連接於電極極板215。第2連接部26是將一端連接於第2端子24,將另一端通過支撐部212b的貫穿孔212c連接於電極211。Both the first terminal 23 and the second terminal 24 are flat. The first terminal 23 and the second terminal 24 are electrically connected to the diaphragm 212 and the electrode 211 via the first connection portion 25 and the second connection portion 26, respectively. Both the first connection portion 25 and the second connection portion 26 are conductive cables. The first connection portion 25 connects one end to the first terminal 23 and connects the other end to the electrode pad 215. The second connection portion 26 connects one end to the second terminal 24 and connects the other end to the electrode 211 through the through-hole 212c of the support portion 212b.
封裝22收容著感測元件21、第1端子23、第2端子24、第1連接部25及第2連接部26。封裝22整體為四角形的箱狀(例如,長方體的箱狀)(參閱第2圖)。封裝22具有在厚度方向朝向彼此相反側的第1面221及第2面222。封裝22的第1面221及第2面222是分別成為壓力感測器20的表面及內面。在封裝22的第1面221具有至少使感測元件21的感壓面201露出的開口223。藉此,使開口223的內側面與感壓面201構成壓力感測器20的凹部202。又,感壓面201是位在凹部202的底面。開口223的開口尺寸是隨著從封裝22的第1面221朝向第2面222緩緩地變小。本實施形態中,開口223為圓形,開口223的內徑是隨著從封裝22的第1面221朝向第2面222緩緩地變小。開口223是位在封裝22的第1面221的中央部分。並且,在封裝22的第2面222使接著構件214、第1端子23及第2端子24露出。封裝22為樹脂成型品。亦即,壓力感測器20是以感測元件21、第1端子23、第2端子24、第1連接部25及第2連接部26為鑲嵌品,可藉由進行鑲嵌成形形成。The package 22 houses the sensing element 21, the first terminal 23, the second terminal 24, the first connection portion 25, and the second connection portion 26. The package 22 has a rectangular box shape (for example, a rectangular parallelepiped box shape) as a whole (see FIG. 2). The package 22 includes a first surface 221 and a second surface 222 that face the opposite sides in the thickness direction. The first surface 221 and the second surface 222 of the package 22 are a surface and an inner surface of the pressure sensor 20, respectively. The first surface 221 of the package 22 has an opening 223 that exposes at least the pressure-sensitive surface 201 of the sensing element 21. Thereby, the inner side surface of the opening 223 and the pressure-sensing surface 201 constitute a recess 202 of the pressure sensor 20. The pressure-sensitive surface 201 is located on the bottom surface of the recess 202. The opening size of the opening 223 gradually decreases as it goes from the first surface 221 to the second surface 222 of the package 22. In this embodiment, the opening 223 is circular, and the inner diameter of the opening 223 gradually decreases as it goes from the first surface 221 to the second surface 222 of the package 22. The opening 223 is a central portion of the first surface 221 of the package 22. Then, the second member 222, the first terminal 23, and the second terminal 24 are exposed on the second surface 222 of the package 22. The package 22 is a resin molded product. That is, the pressure sensor 20 is formed by inserting the sensing element 21, the first terminal 23, the second terminal 24, the first connection portion 25, and the second connection portion 26 as inserts, and can be formed by insert molding.
膜構件30具有彈性。膜構件30是如第3圖表示,在感壓面201隔著間隔相對地固定於感壓面201的周圍。膜構件30是如第2圖表示為四角形(例如,長方形)。又,膜構件30是如第1圖表示,包覆壓力感測器20的封裝 22之第1面221的整體。亦即,膜構件30是如第1圖及第3圖表示,固定於壓力感測器20之封裝22的第1面221,包覆第1面221及開口223(凹部202)。如上述,由於膜構件30包覆著凹部202,因此可防止異物混入凹部202,可防止壓力感測器20的誤動作。本實施形態中,膜構件30與壓力感測器20是藉第1接著層61接合著。第1接著層61包覆膜構件30的壓力感測器20側之面的全面。作為膜構件30的材料的例是舉例有彈性體(例如,聚醯亞胺、矽膠及丁基橡膠)。又,膜構件30具有電絕緣性。藉此,可降低對感壓面201之電氣影響。The film member 30 has elasticity. As shown in FIG. 3, the film member 30 is relatively fixed around the pressure-sensitive surface 201 on the pressure-sensitive surface 201 at intervals. The film member 30 is shown as a quadrangle (for example, a rectangle) as shown in FIG. 2. The membrane member 30 is the entirety of the first surface 221 of the package 22 covering the pressure sensor 20 as shown in FIG. 1. That is, the film member 30 is the first surface 221 of the package 22 fixed to the pressure sensor 20 as shown in FIGS. As described above, since the film member 30 covers the recessed portion 202, it is possible to prevent foreign matter from being mixed into the recessed portion 202 and to prevent a malfunction of the pressure sensor 20. In the present embodiment, the membrane member 30 and the pressure sensor 20 are joined by the first adhesive layer 61. The first adhesive layer 61 covers the entire surface of the pressure sensor 20 side of the film member 30. Examples of the material of the film member 30 include elastomers (for example, polyimide, silicone, and butyl rubber). The film member 30 has electrical insulation properties. Thereby, the electrical influence on the pressure-sensitive surface 201 can be reduced.
彈性構件40A是如第3圖表示,位在感壓面201與膜構件30之間。彈性構件40A是將施加於膜構件30的力傳達至感壓面201用的構件。彈性構件40A是固定在膜構件30。藉此,將膜構件30固定於壓力感測器20,進行彈性構件40A的定位。尤其,彈性構件40A是與感壓面201相對地固定於膜構件30。由於彈性構件40A是固定在膜構件30,因此防止與彈性構件40A之壓力方向垂直的面的偏移,可提升壓力感測器20的檢測精度。在此,彈性構件40A與感壓面201分別的中心軸為一致。並且,對膜構件30之彈性構件40A的固定是利用第1接著層61來進行。又,彈性構件40A為圓形的柱狀。此時,彈性構件40A的高度是比凹部202的深度小。因此,如第3圖表示,彈性構件40A與感壓面201之間具有間隙。藉此,排除對感壓面201之低的壓力的傳達,可傳達至高的壓力,壓力感測器20成為可檢測高的壓力。又,彈性構件40A的體積是比凹部202的容積小。這是意味著凹部202的整體未被彈性構件40A所埋沒。藉此,彈性構件40A可在凹部202內位移。因此,即使彈性構件40A受壓力而變形的場合,仍可將彈性構件40A納入凹部202,提升對感壓面201之壓力的傳達效率。彈性構件40A的材料的例是舉例有彈性體(例如,聚醯亞胺、矽膠及丁基橡膠)。又,彈性構件40A具有電絕緣性。藉此,可降低對感壓面201之電氣影響。The elastic member 40A is located between the pressure-sensitive surface 201 and the membrane member 30 as shown in FIG. 3. The elastic member 40A is a member for transmitting a force applied to the film member 30 to the pressure-sensitive surface 201. The elastic member 40A is fixed to the film member 30. Thereby, the film member 30 is fixed to the pressure sensor 20, and positioning of the elastic member 40A is performed. In particular, the elastic member 40A is fixed to the film member 30 so as to face the pressure-sensitive surface 201. Since the elastic member 40A is fixed to the membrane member 30, the displacement of a surface perpendicular to the pressure direction of the elastic member 40A is prevented, and the detection accuracy of the pressure sensor 20 can be improved. Here, the respective central axes of the elastic member 40A and the pressure-sensitive surface 201 coincide with each other. The fixing of the elastic member 40A of the film member 30 is performed using the first adhesive layer 61. The elastic member 40A has a circular columnar shape. At this time, the height of the elastic member 40A is smaller than the depth of the recessed portion 202. Therefore, as shown in FIG. 3, there is a gap between the elastic member 40A and the pressure-sensitive surface 201. Thereby, the transmission of the low pressure to the pressure-sensing surface 201 is eliminated, and a high pressure can be transmitted, and the pressure sensor 20 can detect a high pressure. The volume of the elastic member 40A is smaller than the volume of the recess 202. This means that the entirety of the recess 202 is not buried in the elastic member 40A. Thereby, the elastic member 40A can be displaced within the recessed portion 202. Therefore, even when the elastic member 40A is deformed under pressure, the elastic member 40A can be incorporated into the recess 202 to improve the efficiency of transmitting the pressure to the pressure-sensitive surface 201. Examples of the material of the elastic member 40A include an elastomer (for example, polyimide, silicone, and butyl rubber). The elastic member 40A has electrical insulation properties. Thereby, the electrical influence on the pressure-sensitive surface 201 can be reduced.
本實施形態中,彈性構件40A的彎折撓曲是比隔膜212的彎折撓曲大。並且,膜構件30的彎折撓曲是比彈性構件40A的彎折撓曲大。藉此,可提升對感壓面201之壓力的傳達效率。In the present embodiment, the bending deflection of the elastic member 40A is larger than the bending deflection of the diaphragm 212. Further, the bending deflection of the film member 30 is larger than the bending deflection of the elastic member 40A. Thereby, the transmission efficiency of the pressure to the pressure-sensitive surface 201 can be improved.
按壓構件50是如第3圖表示,隔著膜構件30位在與彈性構件40A的相反側。亦即,按壓構件50是於膜構件30中固定在與彈性構件40A相反側。具有按壓構件50對膜構件30容易施加壓力。膜構件30與按壓構件50是藉第2接著層62所接合。本實施形態中,按壓構件50與彈性構件40A是分別的中心軸為一致。又,按壓構件50為圓形的板狀。並且,按壓構件50的尺寸(外形尺寸)是比彈性構件40A的尺寸(外形尺寸)小。按壓構件50的材料的例是舉例有彈性體(例如,聚醯亞胺、矽膠及丁基橡膠)。但是,按壓構件50是比膜構件30及彈性構件40A硬度高。因此,壓力施加於按壓構件50時,比按壓構件50更先使膜構件30及彈性構件40A變形。藉此,對膜構件30施加壓力變得更容易,操作性良好。又,按壓構件50具有電絕緣性。藉此,可降低對感壓面201之電氣影響。As shown in FIG. 3, the pressing member 50 is positioned on the side opposite to the elastic member 40A with the film member 30 interposed therebetween. That is, the pressing member 50 is fixed to the film member 30 on the side opposite to the elastic member 40A. Having the pressing member 50 easily applies pressure to the film member 30. The film member 30 and the pressing member 50 are joined by the second adhesive layer 62. In the present embodiment, the respective central axes of the pressing member 50 and the elastic member 40A coincide with each other. The pressing member 50 has a circular plate shape. The size (outer dimension) of the pressing member 50 is smaller than the size (outer dimension) of the elastic member 40A. Examples of the material of the pressing member 50 are elastomers (for example, polyimide, silicone, and butyl rubber). However, the pressing member 50 has higher hardness than the film member 30 and the elastic member 40A. Therefore, when pressure is applied to the pressing member 50, the film member 30 and the elastic member 40A are deformed before the pressing member 50. This makes it easier to apply pressure to the film member 30 and improves operability. The pressing member 50 has electrical insulation properties. Thereby, the electrical influence on the pressure-sensitive surface 201 can be reduced.
1.1.3 動作
如上述的感壓裝置10A中,壓力感測器20是檢測施加於按壓構件50的力(例如,按壓力)。使用者(或按壓件)將按壓構件50按壓的場合,藉施加於按壓構件50的按壓力,使得膜構件30變形,使彈性構件40A向感壓面201側移動。以此狀態增加按壓力時,使彈性構件40A與感壓面201接觸,藉此,將施加於按壓構件50的按壓力透過膜構件30及彈性構件40A傳達至感壓面201。並且,從壓力感測器20可獲得對應施加於膜構件30(按壓構件50)之力的檢測輸出。1.1.3 Operation As in the pressure sensing device 10A described above, the pressure sensor 20 detects a force (for example, a pressing force) applied to the pressing member 50. When a user (or a pressing member) presses the pressing member 50, the film member 30 is deformed by the pressing force applied to the pressing member 50, and the elastic member 40A is moved to the pressure-sensitive surface 201 side. When the pressing force is increased in this state, the elastic member 40A is brought into contact with the pressure-sensitive surface 201, whereby the pressing force applied to the pressing member 50 is transmitted to the pressure-sensitive surface 201 through the membrane member 30 and the elastic member 40A. In addition, a detection output corresponding to a force applied to the film member 30 (pressing member 50) can be obtained from the pressure sensor 20.
1.1.4 用途
感壓裝置10A是可利用於使用壓力感測器20之檢測輸出的機器等的控制或資訊的提供。具體的用途可舉例如觸控筆、穿戴式終端機、資訊終端機(智慧型手機、平板終端機等)、控制機器(電動工具等)、檢測裝置(觸覺檢測裝置、翹曲檢測裝置等)。又,感壓裝置10A也可使用於氣壓感測器及水壓感測器等的感測器。1.1.4 Application The pressure sensing device 10A is used to provide control or information for a device or the like that uses the detection output of the pressure sensor 20. Specific uses include, for example, a stylus, a wearable terminal, an information terminal (smartphone, tablet terminal, etc.), a control device (power tool, etc.), a detection device (tactile detection device, warpage detection device, etc.) . The pressure sensing device 10A can also be used for sensors such as an air pressure sensor and a water pressure sensor.
1.2 實施形態2
第4圖及第5圖是表示實施形態2之感壓裝置10B。感壓裝置10B具備彈性構件40B來取代彈性構件40A。1.2 Embodiment 2
4 and 5 show a pressure sensing device 10B according to the second embodiment. The pressure sensing device 10B includes an elastic member 40B instead of the elastic member 40A.
彈性構件40B是如第5圖表示,位在感壓面201與膜構件30之間。彈性構件40B是將施加於膜構件30的力傳達至感壓面201用的構件。但是,彈性構件40B是與感壓面201接觸並包覆感壓面201。更詳細而言,彈性構件40B是在凹部202內充滿壓力感測器20之凹部202的整體。但是,彈性構件40B並非如彈性構件40A為事先形成的零組件,而是將彈性構件40B的材料填充至凹部202硬化所形成。亦即,本實施形態中,彈性構件40B是可將彈性構件40B的材料填充至凹部202所形成,不需進行彈性構件40B的定位。彈性構件40B的高度是與凹部202的深度一致。因此,與彈性構件40B之感壓面201相反側的面是與封裝22的第1面221成同平面。因此,彈性構件40B與膜構件30連接。彈性構件40B的材料是與彈性構件40A同樣,可舉例有彈性體(例如,聚醯亞胺、矽膠及丁基橡膠)。並且,彈性構件40B具有電絕緣性。The elastic member 40B is located between the pressure-sensitive surface 201 and the membrane member 30 as shown in FIG. 5. The elastic member 40B is a member for transmitting a force applied to the film member 30 to the pressure-sensitive surface 201. However, the elastic member 40B is in contact with the pressure-sensitive surface 201 and covers the pressure-sensitive surface 201. More specifically, the elastic member 40B is the entire recessed portion 202 of the pressure sensor 20 in the recessed portion 202. However, the elastic member 40B is not a previously formed component, as the elastic member 40A is formed by filling the recessed portion 202 with the material of the elastic member 40B and hardening. That is, in this embodiment, the elastic member 40B is formed by filling the recessed portion 202 with the material of the elastic member 40B, and it is not necessary to perform positioning of the elastic member 40B. The height of the elastic member 40B corresponds to the depth of the recess 202. Therefore, the surface opposite to the pressure-sensitive surface 201 of the elastic member 40B is the same plane as the first surface 221 of the package 22. Therefore, the elastic member 40B is connected to the film member 30. The material of the elastic member 40B is the same as that of the elastic member 40A, and examples thereof include an elastomer (for example, polyimide, silicone, and butyl rubber). In addition, the elastic member 40B has electrical insulation properties.
如以上說明的感壓裝置10B中,壓力感測器20是檢測施加於按壓構件50的力(例如,按壓力)。使用者(或按壓件)將按壓構件50按壓的場合,藉施加於按壓構件50的按壓力,將膜構件30及彈性構件40B推壓至感壓面201。藉此,將施加於按壓構件50的按壓力透過膜構件30及彈性構件40B傳達至感壓面201。並且,從壓力感測器20可獲得對應施加於膜構件30(按壓構件50)之力的檢測輸出。As described above, in the pressure sensing device 10B, the pressure sensor 20 detects a force (for example, a pressing force) applied to the pressing member 50. When the user (or the pressing member) presses the pressing member 50, the film member 30 and the elastic member 40B are pressed to the pressure-sensitive surface 201 by the pressing force applied to the pressing member 50. Thereby, the pressing force applied to the pressing member 50 is transmitted to the pressure-sensitive surface 201 through the membrane member 30 and the elastic member 40B. In addition, a detection output corresponding to a force applied to the film member 30 (pressing member 50) can be obtained from the pressure sensor 20.
實施形態2的感壓裝置10B是可使用在與感壓裝置10A相同的用途。The pressure-sensing device 10B of the second embodiment can be used for the same applications as the pressure-sensing device 10A.
2 變形例
以上說明的實施形態1、2僅是本說明書之種種實施形態的例。並且,實施形態1、2只要可達成本說明書的目的,可對應設計等進行種種的變更。以下,列舉實施形態1、2的變形例。2 Modifications The embodiments 1 and 2 described above are merely examples of various embodiments of the present specification. In addition, as long as the first and second embodiments can achieve the purpose of the cost specification, various changes can be made to the design and the like. Hereinafter, modifications of the first and second embodiments will be listed.
例如,壓力感測器20的構造不限於上述的例。例如,壓力感測器20的感測元件21並非靜電電容式,也可以是利用壓敏電阻的電阻式。感測元件21中,接著構件214並非必要。並且,封裝22的形狀也可以是四角形以外的多角形的箱狀,或圓形的箱狀。封裝22只要是使感測元件21的感壓面201的至少一部分露出,收容感測元件21的形狀即可。第1端子23及第2端子24雖出露出於封裝22的第2面222,但也可露出於封裝22的側面。並且,感測元件21只要具有相當於第1端子23及第2端子24的構成即可,不需要第1連接部25及第2連接部26。For example, the structure of the pressure sensor 20 is not limited to the example described above. For example, the sensing element 21 of the pressure sensor 20 is not an electrostatic capacitance type, and may be a resistance type using a varistor. In the sensing element 21, the adhering member 214 is not necessary. In addition, the shape of the package 22 may be a polygonal box shape other than a quadrangle, or a circular box shape. The package 22 only needs to expose at least a part of the pressure-sensing surface 201 of the sensing element 21 and accommodate the shape of the sensing element 21. Although the first terminal 23 and the second terminal 24 are exposed on the second surface 222 of the package 22, they may be exposed on the side surface of the package 22. In addition, as long as the sensing element 21 has a configuration equivalent to the first terminal 23 and the second terminal 24, the first connection portion 25 and the second connection portion 26 are not necessary.
例如,膜構件30的形狀不限於上述的形狀。例如,膜構件30也可以是四角形以外的多角形狀,或圓形狀。又,膜構件30及按壓構件50的材料不限於上述的例。並且,膜構件30不僅是單層構造也可以是複數層構造。又,將膜構件30固定在壓力感測器20的封裝22,藉此固定於感壓面201的周圍。但是,膜構件30也可直接固定在感測元件21之感壓面201的周圍。此時,膜構件30也可不是平坦的板狀,而是在與感壓面201之間形成可配置彈性構件40A的空間的圓拱狀。膜構件30至少只要在感壓面201隔著間隔相對即可,也可與感壓面201的周圍連接。因此,可將膜構件30直接或間接固定在感壓面201的周圍。對壓力感測器20之膜構件30的接合,除了使用第1接著層61等的接著劑之外,也可使用雷射熔敷。For example, the shape of the film member 30 is not limited to the shape described above. For example, the film member 30 may have a polygonal shape other than a quadrangle, or a circular shape. The materials of the film member 30 and the pressing member 50 are not limited to the examples described above. In addition, the film member 30 may have not only a single-layer structure but also a multiple-layer structure. Further, the film member 30 is fixed to the package 22 of the pressure sensor 20, and thereby fixed to the periphery of the pressure-sensing surface 201. However, the film member 30 may be directly fixed around the pressure-sensitive surface 201 of the sensing element 21. At this time, the film member 30 may not be a flat plate shape, but a dome shape that forms a space where the elastic member 40A can be arranged between the film member 30 and the pressure-sensitive surface 201. The film member 30 may be at least opposed to the pressure-sensitive surface 201 at intervals, and may be connected to the periphery of the pressure-sensitive surface 201. Therefore, the film member 30 can be directly or indirectly fixed around the pressure-sensitive surface 201. For bonding the film member 30 of the pressure sensor 20, in addition to using an adhesive such as the first adhesive layer 61, laser welding may be used.
例如,彈性構件40A的形狀不限於上述的形狀。例如,彈性構件40A並非圓形的板狀,而是四角形等的多角形的板狀。又,彈性構件40A的體積也可以是凹部202的容積以下。其中一例為彈性構件40A也可以是埋入凹部202整體的形狀。此時,將彈性構件40A嵌入凹部202,彈性構件40A相對於壓力感測器20的定位。相反地,彈性構件40A的體積也可以是凹部202的容積以上。但是,彈性構件40A以可納於凹部202內為佳。並且,實施形態1中,彈性構件40A在壓力未施加於膜構件30的場合(膜構件30維持在原形的場合),不與感壓面201接觸。但是,彈性構件40A也可經常地與感壓面201接觸。又,彈性構件40A的材料不限於上述的例。並且,對膜構件30之彈性構件40A的接合雖是使用第1接著層61等的接著劑,也可使用雷射熔敷。並且,也可將彈性構件40A與膜構件30形成一零組件。For example, the shape of the elastic member 40A is not limited to the shape described above. For example, the elastic member 40A is not a circular plate shape, but a polygonal plate shape such as a quadrangle. The volume of the elastic member 40A may be equal to or smaller than the volume of the recess 202. One example is that the elastic member 40A may have a shape in which the entire recessed portion 202 is embedded. At this time, the elastic member 40A is fitted into the recess 202, and the elastic member 40A is positioned with respect to the pressure sensor 20. Conversely, the volume of the elastic member 40A may be equal to or greater than the volume of the recess 202. However, it is preferable that the elastic member 40A can be received in the recess 202. Further, in Embodiment 1, the elastic member 40A is not in contact with the pressure-sensitive surface 201 when pressure is not applied to the film member 30 (when the film member 30 is maintained in its original shape). However, the elastic member 40A may be in constant contact with the pressure-sensitive surface 201. The material of the elastic member 40A is not limited to the examples described above. In addition, although the elastic member 40A of the film member 30 is bonded using an adhesive such as the first adhesive layer 61, laser welding may be used. In addition, the elastic member 40A and the film member 30 may be formed as a component.
例如,彈性構件40B的形狀不限於上述的形狀。亦即,彈性構件40B也可以不是埋入凹部202整體的形狀,而是佔據凹部202的一部分的形狀。此時,彈性構件40B只要是在感壓面201與膜構件30之間即可,可不與膜構件30接觸。並且,彈性構件40B的材料不限於上述的例。For example, the shape of the elastic member 40B is not limited to the shape described above. That is, the elastic member 40B may not be a shape in which the entire recessed portion 202 is embedded, but a shape that occupies a part of the recessed portion 202. At this time, the elastic member 40B is only required to be between the pressure-sensitive surface 201 and the film member 30, and may not be in contact with the film member 30. In addition, the material of the elastic member 40B is not limited to the example described above.
例如,按壓構件50的形狀不限於上述的形狀。例如,按壓構件50不僅是圓形的板狀,也可以是四角形等的多角形的板狀。並且,按壓構件50的材料不限於上述的例。對膜構件30之按壓構件50的接合,除了使用第2接著層62的接著劑之外,也可以使用雷射熔敷。又,按壓構件50與膜構件30也可形成為一零組件。並且,按壓構件50並非必要。For example, the shape of the pressing member 50 is not limited to the shape described above. For example, the pressing member 50 may be not only a circular plate shape but also a polygonal plate shape such as a quadrangle. The material of the pressing member 50 is not limited to the example described above. The bonding of the pressing member 50 of the film member 30 may be performed by laser welding in addition to the adhesive of the second adhesive layer 62. In addition, the pressing member 50 and the film member 30 may be formed as one component. Moreover, the pressing member 50 is not necessary.
3 樣態
如從上述實施形態及變形例可得知,本說明書包括下述的第1~7樣態。以下是僅用於明示與實施形態的對應關係,附記帶有括弧的符號。3 Aspects As can be seen from the above embodiments and modifications, this specification includes the following first to seventh aspects. The following is only for clearly showing the correspondence relationship with the embodiment, and the symbols with parentheses are attached.
第1樣態的感壓裝置(10A;10B)具備:壓力感測器(20)、膜構件(30)及彈性構件(40A;40B)。上述壓力感測器(20)具有感壓面(201)。上述膜構件(30)具有彈性。上述膜構件(30)是在上述感壓面(201)隔著間隔相對地設置在上述感壓面(201)的周圍。上述彈性構件(40A;40B)是位在上述感壓面(201)與上述膜構件(30)之間,將施加於上述膜構件(30)的力傳達至上述感壓面(201)。根據第1樣態,可以簡易的構造提升對感壓面(201)之壓力的傳達效率。並且,將膜構件(30)固定在感壓面(201)的周圍,因此彈性構件(40A;40B)的定位變得容易。The first aspect of the pressure sensing device (10A; 10B) includes a pressure sensor (20), a membrane member (30), and an elastic member (40A; 40B). The pressure sensor (20) has a pressure-sensitive surface (201). The film member (30) has elasticity. The film member (30) is relatively provided around the pressure-sensitive surface (201) on the pressure-sensitive surface (201) at intervals. The elastic member (40A; 40B) is located between the pressure-sensitive surface (201) and the film member (30), and transmits a force applied to the film member (30) to the pressure-sensitive surface (201). According to the first aspect, it is possible to improve the transmission efficiency of the pressure to the pressure-sensitive surface (201) with a simple structure. In addition, since the film member (30) is fixed around the pressure-sensitive surface (201), positioning of the elastic member (40A; 40B) becomes easy.
第2樣態的感壓裝置(10A;10B)是可藉著與第1樣態的組合來實現。第2樣態中,上述壓力感測器(20)在表面(第1面221)具有凹部(202)。上述感壓面(201)是位在上述凹部(202)的底面。上述膜構件(30)是固定於上述表面(第1面221)包覆著上述凹部(202)。根據第2樣態,由於膜構件(30)包覆著凹部(202),因此可防止異物混入凹部,並可防止壓力感測器(20)的誤動作。The pressure sensing device (10A; 10B) of the second aspect can be realized by combining with the first aspect. In a second aspect, the pressure sensor (20) has a recess (202) on a surface (first surface 221). The pressure-sensitive surface (201) is a bottom surface of the recessed portion (202). The film member (30) is fixed to the surface (first surface 221) and covers the recessed portion (202). According to the second aspect, since the film member (30) covers the recessed portion (202), foreign matter can be prevented from being mixed into the recessed portion, and malfunction of the pressure sensor (20) can be prevented.
第3樣態的感壓裝置(10A)是可藉著與第2樣態的組合來實現。第3樣態中,上述彈性構件(40A)的體積是比上述凹部(202)的容積小。根據第3樣態,即使彈性構件(40A)受壓力而變形的場合,仍可將彈性構件(40A)納入凹部(202),提升對感壓面(201)之壓力的傳達效率。The third aspect of the pressure sensing device (10A) can be realized by a combination with the second aspect. In a third aspect, the volume of the elastic member (40A) is smaller than the volume of the recess (202). According to the third aspect, even when the elastic member (40A) is deformed under pressure, the elastic member (40A) can be incorporated into the recess (202) to improve the efficiency of transmitting pressure to the pressure-sensitive surface (201).
第4樣態的感壓裝置(10A)是可藉著與第3樣態的組合來實現。第4樣態中,上述彈性構件(40A)是固定於上述膜構件(30)。根據第4樣態,由於彈性構件(40A)是固定在膜構件(30),因此防止與彈性構件(40A)之壓力方向垂直的面的偏移,可提升壓力感測器(20)的檢測精度。The fourth aspect of the pressure sensing device (10A) can be realized by a combination with the third aspect. In a fourth aspect, the elastic member (40A) is fixed to the film member (30). According to the fourth aspect, since the elastic member (40A) is fixed to the membrane member (30), it is possible to prevent displacement of a surface perpendicular to the pressure direction of the elastic member (40A), thereby improving the detection of the pressure sensor (20). Precision.
第5樣態的感壓裝置(10A)是可藉著與第3或第4樣態的組合來實現。第5樣態中,上述彈性構件(40A;40B)與上述感壓面(201)之間具有間隙。根據第5樣態,排除對感壓面(201)之低的壓力的傳達,可傳達至高的壓力,可提升壓力感測器(20)的檢測能力。The pressure sensing device (10A) of the fifth aspect can be realized by a combination with the third or fourth aspect. In a fifth aspect, there is a gap between the elastic member (40A; 40B) and the pressure-sensitive surface (201). According to the fifth aspect, transmission of low pressure to the pressure-sensitive surface (201) is excluded, and high pressure can be transmitted, and the detection capability of the pressure sensor (20) can be improved.
第6樣態的感壓裝置(10A)是可藉著與第1~第5樣態的其中任一的組合來實現。第6樣態中,上述彈性構件(40A)與上述感壓面(201)分別的中心軸為一致。根據第6樣態,可以簡易的構造提升對感壓面(201)之壓力的傳達效率。The sixth aspect of the pressure sensing device (10A) can be realized by a combination with any of the first to fifth aspects. In a sixth aspect, the respective central axes of the elastic member (40A) and the pressure-sensitive surface (201) coincide. According to the sixth aspect, it is possible to improve the transmission efficiency of the pressure to the pressure-sensitive surface (201) with a simple structure.
第7樣態的感壓裝置(10B)是可藉著與第1~第4樣態的其中任一的組合來實現。第7樣態中,上述彈性構件(40B)是與上述感壓面(201)接觸而包覆上述感壓面(201)。根據第7樣態,可將彈性構件(40B)的材料填充至凹部(202)形成彈性構件(40B),不需進行彈性構件(40B)的定位。The pressure sensing device (10B) of the seventh aspect can be realized by a combination with any of the first to fourth aspects. In a seventh aspect, the elastic member (40B) is in contact with the pressure-sensitive surface (201) and covers the pressure-sensitive surface (201). According to the seventh aspect, the material of the elastic member (40B) can be filled into the recess (202) to form the elastic member (40B), and the positioning of the elastic member (40B) is not required.
第8樣態的感壓裝置(10B)是可藉著與第1樣態的組合來實現。第8樣態中,上述壓力感測器(20)在表面(第1面221)具有凹部(202)。上述感壓面(201)是位在上述凹部(202)的底面。上述彈性構件(40B)是在上述凹部(202)內充滿上述壓力感測器(20)之凹部(202)的整體。根據第8樣態,可以簡易的構造提升對感壓面(201)之壓力的傳達效率。The pressure sensing device (10B) of the eighth aspect can be realized by combining with the first aspect. In an eighth aspect, the pressure sensor (20) has a recess (202) on a surface (first surface 221). The pressure-sensitive surface (201) is a bottom surface of the recessed portion (202). The elastic member (40B) is an entirety of the recessed portion (202) of the pressure sensor (20) filled in the recessed portion (202). According to the eighth aspect, it is possible to improve the transmission efficiency of the pressure to the pressure-sensitive surface (201) with a simple structure.
第9樣態的感壓裝置(10B)是可藉著與第8樣態的組合來實現。第9樣態中,上述彈性構件(40B)是將上述彈性構件(40B)的材料填充至上述凹部(202)硬化所形成。根據第9樣態,不需進行彈性構件(40B)的定位。The ninth aspect of the pressure sensing device (10B) can be realized by a combination with the eighth aspect. In a ninth aspect, the elastic member (40B) is formed by filling a material of the elastic member (40B) into the recessed portion (202) and curing it. According to the ninth aspect, positioning of the elastic member (40B) is not required.
第10樣態的感壓裝置(10B)是可藉著與第9樣態的組合來實現。第10樣態中,上述彈性構件(40B)的高度是與上述凹部(202)的深度一致。根據第10樣態,可以簡易的構造提升對感壓面(201)之壓力的傳達效率。The pressure sensing device (10B) of the tenth aspect can be realized by a combination with the ninth aspect. In a tenth aspect, the height of the elastic member (40B) is consistent with the depth of the recess (202). According to the tenth aspect, it is possible to improve the transmission efficiency of the pressure to the pressure-sensitive surface (201) with a simple structure.
第11樣態的感壓裝置(10A;10B)是可藉著與第1~第10樣態的其中任一的組合來實現。第11樣態中,上述感壓面(201)之中與上述膜構件(30)相對的區域是以隔膜(212)所形成。上述彈性構件(40A;40B)的彎折撓曲是比上述隔膜(212)的彎折撓曲大。上述膜構件(30)的彎折撓曲是比上述彈性構件(40A;40B)的彎折撓曲大。根據第11樣態,可提升對感壓面(201)之壓力的傳達效率。The pressure sensing device (10A; 10B) of the eleventh aspect can be realized by a combination with any of the first to tenth aspects. In an eleventh aspect, a region of the pressure-sensitive surface (201) opposite to the film member (30) is formed by a diaphragm (212). The bending deflection of the elastic member (40A; 40B) is larger than the bending deflection of the diaphragm (212). The bending deflection of the film member (30) is larger than the bending deflection of the elastic member (40A; 40B). According to the eleventh aspect, the transmission efficiency of the pressure to the pressure-sensitive surface (201) can be improved.
第12樣態的感壓裝置(10A;10B)是可藉著與第1~第11樣態的其中任一的組合來實現。第12樣態中,上述感壓裝置(10A;10B)進一步具備按壓構件(50)。上述按壓構件(50)是隔著上述膜構件(30)位在與上述彈性構件(40A;40B)的相反側。根據第12樣態,對膜構件(30)施加壓力變得容易。The twelfth aspect of the pressure sensing device (10A; 10B) can be realized by a combination with any of the first to eleventh aspects. In a twelfth aspect, the pressure sensing device (10A; 10B) further includes a pressing member (50). The pressing member (50) is located on the opposite side to the elastic member (40A; 40B) through the film member (30). According to the twelfth aspect, it becomes easy to apply pressure to the membrane member (30).
第13樣態的感壓裝置(10A;10B)是可藉著與第12樣態的組合來實現。第13樣態中,上述按壓構件(50)的尺寸是比上述彈性構件(40A;40B)的尺寸小。根據第13樣態,對膜構件(30)施加壓力變得更為容易,操作性良好。The pressure sensing device (10A; 10B) of the thirteenth aspect can be realized by combining with the twelfth aspect. In a thirteenth aspect, the size of the pressing member (50) is smaller than the size of the elastic member (40A; 40B). According to the thirteenth aspect, it is easier to apply pressure to the film member (30), and the operability is good.
第14樣態的感壓裝置(10A;10B)是可藉著與第12或第13樣態的組合來實現。第14樣態中,上述按壓構件(50)是比上述膜構件(30)及上述彈性構件(40A;40B)的硬度高。根據第14樣態,對膜構件(30)施加壓力變得更為容易,操作性良好。The pressure sensing device (10A; 10B) of the fourteenth aspect can be realized by combining with the twelfth or thirteenth aspect. In a fourteenth aspect, the pressing member (50) has a higher hardness than the film member (30) and the elastic member (40A; 40B). According to the fourteenth aspect, it is easier to apply pressure to the membrane member (30), and the operability is good.
第15樣態的感壓裝置(10A;10B)是可藉著與第12~第14樣態的其中任一的組合來實現。第15樣態中,上述膜構件(30)、上述彈性構件(40A;40B)及上述按壓構件(50)的至少其中之一具有電絕緣性。根據第15樣態,可降低對感壓面(201)之電氣影響。The fifteenth aspect of the pressure sensing device (10A; 10B) can be realized by a combination with any of the twelfth to fourteenth aspects. In a fifteenth aspect, at least one of the film member (30), the elastic member (40A; 40B), and the pressing member (50) has electrical insulation. According to the fifteenth aspect, the electrical influence on the pressure-sensitive surface (201) can be reduced.
10A、10B‧‧‧感壓裝置10A, 10B‧‧‧ Pressure Sensing Device
20‧‧‧壓力感測器 20‧‧‧Pressure sensor
201‧‧‧感壓面 201‧‧‧ pressure sensitive surface
202‧‧‧凹部 202‧‧‧ Recess
221‧‧‧第1面(表面) 221‧‧‧First side (surface)
30‧‧‧膜構件 30‧‧‧Membrane member
40A、40B‧‧‧彈性構件 40A, 40B‧‧‧Elastic member
50‧‧‧按壓構件 50‧‧‧Pressing member
第1圖為實施形態1之感壓裝置的透視圖。Fig. 1 is a perspective view of a pressure sensing device according to the first embodiment.
第2圖為實施形態1之感壓裝置的分解透視圖。 Fig. 2 is an exploded perspective view of the pressure sensing device of the first embodiment.
第3圖為實施形態1之感壓裝置的概略剖面圖。 Fig. 3 is a schematic cross-sectional view of the pressure sensing device of the first embodiment.
第4圖為實施形態2之感壓裝置的分解透視圖。 Fig. 4 is an exploded perspective view of a pressure sensing device according to a second embodiment.
第5圖為實施形態2之感壓裝置的概略剖面圖。 Fig. 5 is a schematic cross-sectional view of a pressure sensing device according to a second embodiment.
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JPS59111107U (en) * | 1983-01-18 | 1984-07-26 | 株式会社日本コ−リン | Carotid wave detection device |
-
2019
- 2019-02-18 WO PCT/JP2019/005737 patent/WO2019167688A1/en active Application Filing
- 2019-02-26 TW TW108106448A patent/TW201940852A/en unknown
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Publication number | Publication date |
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WO2019167688A1 (en) | 2019-09-06 |
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