TW201932857A - Self-diagnosis module and self-diagnosis method of plasma power supply - Google Patents

Self-diagnosis module and self-diagnosis method of plasma power supply Download PDF

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TW201932857A
TW201932857A TW108100426A TW108100426A TW201932857A TW 201932857 A TW201932857 A TW 201932857A TW 108100426 A TW108100426 A TW 108100426A TW 108100426 A TW108100426 A TW 108100426A TW 201932857 A TW201932857 A TW 201932857A
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power supply
supply device
self
diagnostic
circuits
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TWI676807B (en
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崔云善
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崔云善
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2832—Specific tests of electronic circuits not provided for elsewhere
    • G01R31/2836—Fault-finding or characterising
    • G01R31/2839—Fault-finding or characterising using signal generators, power supplies or circuit analysers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/20—Modifications of basic electric elements for use in electric measuring instruments; Structural combinations of such elements with such instruments
    • G01R1/206—Switches for connection of measuring instruments or electric motors to measuring loads
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R19/00—Arrangements for measuring currents or voltages or for indicating presence or sign thereof
    • G01R19/165—Indicating that current or voltage is either above or below a predetermined value or within or outside a predetermined range of values
    • G01R19/16566—Circuits and arrangements for comparing voltage or current with one or several thresholds and for indicating the result not covered by subgroups G01R19/16504, G01R19/16528, G01R19/16533
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/31721—Power aspects, e.g. power supplies for test circuits, power saving during test
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/40—Testing power supplies
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
    • H05H7/02—Circuits or systems for supplying or feeding radio-frequency energy

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)

Abstract

A self-diagnosis module and a self-diagnosis method of a plasma power supply are disclosed. According to an embodiment of the present invention, the self-diagnosis module of a plasma power supply comprises: a dummy load resistance connected to a power supply terminal unit to perform a self-diagnosis of the plasma power supply; a test current applying unit for inputting a power supply driving current to the dummy load resistance; a data collecting unit collecting self-diagnosis data including input/output currents, a voltage, a temperature, an operation state measured by a test current applied to the power supply from a diagnosis sensor provided in input/output nodes of a circuit and a component configuring the power supply; and a determining unit for comparing the self-diagnosis data received from the data collecting unit with a preset value to determine whether each of the circuit and the component of the power supply is defective.

Description

電漿電源裝置的自我診斷模組及自我診斷方法 Self-diagnostic module and method for plasma power supply device

本發明係關於一種電漿電源裝置的自我診斷模組及自我診斷方法，具體地說，該自我診斷模組及自我診斷方法藉由連接在電漿電源裝置的負載及複數個自我診斷資料檢知感測器判斷電漿電源裝置所包含的組成零件與電路的正常動作與否。 The invention relates to a self-diagnostic module and a self-diagnostic method of a plasma power supply device. Specifically, the self-diagnostic module and the self-diagnostic method are detected by a load connected to the plasma power device and a plurality of self-diagnostic data. The sensor judges whether the components and circuits included in the plasma power supply device are operating normally.

除非在本說明書另行表示，否則本節所說明的內容並非針對本專利申請的申請專利範圍的先前技術，即使被包含在本節亦不能因此認定為先前技術。 Unless stated otherwise in this specification, the content described in this section is not related to the prior art in the patentable scope of this patent application, and even if it is included in this section, it cannot be considered as prior art.

電源裝置(power supply)在平時讓商業用交流電源經過整流裝置、轉換裝置、變形補償裝置之類的工具為負載供應交流電源，接著再將蓄電池連接至整流裝置的輸出而使其進行浮充並供應電力。電源裝置在所輸入的電流存在雜訊時或輸入的電流不穩定時予以穩定地加工而預先防止設備的運轉異常。 Power supply (power supply) usually allows commercial AC power to pass through tools such as rectifiers, converters, deformation compensation devices to supply AC power to the load, and then connects the battery to the output of the rectifier to make it floating and merge. Supply electricity. The power supply device performs stable processing when there is noise in the input current or when the input current is unstable, and prevents abnormal operation of the equipment in advance.

安裝電源裝置時或針對運轉中的電源裝置檢驗其異常與否時需要進行下列過程，亦即，作業人員直接針對所安裝的電源裝置進行個別操作而判斷其是否動作，或將所安裝的設備上連接的各種電線之類的公 共設施拆下並拿下電源裝置後，按照另行配備的負載器或安裝條件重新安裝並且由作業人員直接操作後判斷是否動作。 When installing the power supply device or checking the abnormality of the power supply device in operation, the following process needs to be performed, that is, the operator directly performs an individual operation on the installed power supply device to determine whether it is operating, or put the installed equipment on Various wires such as After the common facility is removed and the power supply device is removed, it is reinstalled in accordance with the loader or installation conditions separately equipped and directly operated by the operator to determine whether it is operating.

如前述，先前技術每次在安裝電源裝置或針對運轉中的電源裝置檢驗其故障與否時都需要配備負載器，並且從另行安裝的位置拆下後進行檢驗而使得檢驗電源裝置時花費較多時間、費用及人力。尤其係，檢驗電源裝置時為了判斷電源裝置所包含的各個電路異常與否而需要由檢驗人員直接設定並調整負載及電流供應條件。與此同時，按照電源裝置的各組成零件將連接至負載器的開關予以斷開後，個別連接開關並測試電源裝置的組成零件的穩定性，因此在檢驗電源裝置時需要直接設定各種測試條件並且根據所設定的條件直接調整電路配線。 As mentioned above, the prior art needs to be equipped with a loader each time a power supply device is installed or a fault is checked for a power supply device in operation, and it is removed from a separately installed location for inspection, which makes it expensive to inspect the power supply device. Time, cost and manpower. In particular, in order to determine whether the various circuits included in the power supply device are abnormal during the inspection of the power supply device, it is necessary for the inspector to directly set and adjust the load and current supply conditions. At the same time, after the switches connected to the load are disconnected according to the various components of the power supply device, the switches are individually connected and the stability of the components of the power supply device is tested. Therefore, when testing the power supply device, various test conditions need to be set directly and Adjust the circuit wiring directly according to the set conditions.

【先前技術文獻】[Previous Technical Literature] 【專利文獻】[Patent Literature]

【專利文獻1】韓國專利註冊第10-1245503號(2013.03.13) [Patent Document 1] Korean Patent Registration No. 10-1245503 (2013.03.13)

本發明為了電漿電源裝置的自我診斷而提供自我診斷模組，該自我診斷模組將連接至電源裝置末端部的仿真負載電阻提供至電源裝置內部或外部，針對供應至電漿電源裝置的組成零件的測試電流、仿真負載電阻及擬診斷的組成零件與電路之類的測試條件進行設定，按照所設 定的條件收集自我診斷資料後，針對設於構成電源裝置的電路內的複數個感測器所收集的自我診斷資料進行分析而得知電漿電源裝置的組成零件的異常與否。 The invention provides a self-diagnostic module for self-diagnosis of a plasma power supply device. The self-diagnostic module provides a simulated load resistor connected to the end of the power supply device to the inside or outside of the power supply device. Set the test conditions for the component's test current, simulated load resistance, and the component and circuit to be diagnosed. After collecting self-diagnostic data under certain conditions, the self-diagnostic data collected by a plurality of sensors provided in a circuit constituting the power supply device is analyzed to determine whether the components of the plasma power supply device are abnormal.

本發明的實施例的電漿電源裝置的自我診斷模組包含：仿真負載(dummy load)電阻，為了電漿電源裝置的自我診斷而連接至電源裝置末端部；測試電流供應單元，為了檢查電源裝置的正常動作而往仿真負載電阻輸入電源裝置的任意工作電流；資料收集單元，從設於構成電源裝置的零件及電路的輸入輸出節點的診斷感測器收集憑藉供應至電源裝置的測試電流測量的自我診斷資料，前述自我診斷資料包含輸入輸出電流、電壓、溫度、動作與否；判斷單元，比較收自資料收集單元的自我診斷資料與既設定值而判斷電源裝置的組成零件及電路各自的故障與否。 The self-diagnostic module of the plasma power supply device according to the embodiment of the present invention includes: a dummy load resistor connected to the end of the power supply device for self-diagnosis of the plasma power supply device; and a test current supply unit for checking the power supply device Input normal operation of the power supply device to the simulated load resistor. The data collection unit collects the measured current measured by the test current supplied to the power supply device from the diagnostic sensors provided at the input and output nodes of the components and circuits that make up the power supply device. Self-diagnostic data, the aforementioned self-diagnostic data includes input / output current, voltage, temperature, action or not; a judging unit, which compares self-diagnosing data received from the data collecting unit with the set values to judge the respective faults of the components and circuits of the power supply device Or not.

本發明另一個實施例的電漿電源裝置的自我診斷方法包含下列步驟：(A)測試電流供應單元為了檢查電源裝置的正常動作而往仿真負載電阻輸入電源裝置的任意測試電流值；(B)資料收集單元從設於電源裝置的組成零件輸入輸出節點的診斷感測器收集憑藉供應至電源裝置的測試電流測量的自我診斷資料，前述自我診斷資料包含輸入輸出電流、電壓、溫度、動作與否；及(C)判斷單元比較收自資料收集單元的自我診斷資料與既設定值而判斷電源裝置的組成零件及電路各自的故障與否。 The self-diagnosing method for a plasma power supply device according to another embodiment of the present invention includes the following steps: (A) the test current supply unit inputs an arbitrary test current value of the power supply device to the simulated load resistance in order to check the normal operation of the power supply device; (B) The data collection unit collects self-diagnostic data measured by a test current supplied to the power supply device from a diagnostic sensor provided at an input / output node of a component of the power supply device. The aforementioned self-diagnostic data includes input / output current, voltage, temperature, operation or not ; And (C) the judgment unit compares the self-diagnostic data received from the data collection unit with the existing set value to judge the failure of each of the components and circuits of the power supply device.

檢驗電源裝置時不必另行連接負載器、冷卻器及配線亦能由電漿電源裝置本身迅速並準確地診斷組成零件及電路是否異常。 It is not necessary to separately connect the loader, cooler and wiring when inspecting the power supply device. The plasma power supply device itself can quickly and accurately diagnose whether the component parts and the circuit are abnormal.

又，在沒有從安裝電源裝置的整機拆卸並搬出的狀態下，不需要作業人員檢驗各個個別功能動作而由電源裝置本身根據所輸入的任意工作指令值進行動作並且藉由LCD或FND顯示檢驗結果以便讓使用者查看其結果消息，從而大幅縮短檢驗時間與整機的停機時間。 In addition, in the state where the power supply device is not disassembled and unloaded, the operator does not need to check each individual function operation. The power supply device itself operates according to the input of any work instruction value and is checked by LCD or FND display. The results allow users to view their results messages, which significantly reduces inspection time and machine downtime.

本發明的效果並不侷限於前述效果，應闡釋為亦包含能從本發明的發明內容或申請專利範圍所記載的發明推論出來的一切效果。 The effects of the present invention are not limited to the foregoing effects, and should be construed as including all effects that can be deduced from the invention described in the invention content or the scope of patent application.

1‧‧‧診斷感測器 1‧‧‧diagnostic sensor

2‧‧‧診斷感測器 2‧‧‧Diagnostic Sensor

3‧‧‧診斷感測器 3‧‧‧Diagnostic Sensor

4‧‧‧診斷感測器 4‧‧‧Diagnostic Sensor

5‧‧‧診斷感測器 5‧‧‧diagnostic sensor

6‧‧‧診斷感測器 6‧‧‧diagnostic sensor

100‧‧‧轉換電路 100‧‧‧ conversion circuit

200‧‧‧放大電路 200‧‧‧ amplifier circuit

300‧‧‧自我診斷模組 300‧‧‧Self-diagnostic module

310‧‧‧測試電流供應單元 310‧‧‧test current supply unit

330‧‧‧資料收集單元 330‧‧‧Data Collection Unit

350‧‧‧判斷單元 350‧‧‧ Judgment Unit

400‧‧‧仿真負載電阻 400‧‧‧simulated load resistance

【圖1】表示包含本發明實施例的自我診斷模組的電漿電源裝置的框圖。 FIG. 1 is a block diagram showing a plasma power supply device including a self-diagnostic module according to an embodiment of the present invention.

【圖2】表示將本發明實施例的仿真負載電阻連接至電源裝置或設於電源裝置內部後在電源裝置自我診斷時使用的例示圖。 [FIG. 2] It is an example diagram used when the power supply apparatus self-diagnoses after connecting the artificial load resistance of the embodiment of this invention to a power supply apparatus, or it is provided in a power supply apparatus.

【圖3】表示用於本發明實施例的電漿電源裝置自我診斷的複數個診斷感測器與具體的電路配置的圖形。 [Fig. 3] A diagram showing a plurality of diagnostic sensors and specific circuit configurations for self-diagnosis of the plasma power supply device according to the embodiment of the present invention.

【圖4】表示本發明實施例的自我診斷模組300的資料處理用構成要素的圖形。 FIG. 4 is a diagram showing constituent elements for data processing of a self-diagnostic module 300 according to an embodiment of the present invention.

【圖5】表示本發明實施例的電漿電源裝置的自我診斷方法的資料處理流程的流程圖。 5 is a flowchart showing a data processing flow of a self-diagnosis method of a plasma power supply device according to an embodiment of the present invention.

結合圖式詳細說明的後述實施例將有助於明確了解本發明的優點、特徵及其實現方法。惟，本發明不限於下面所揭示的實施例，本發明可藉由各種互不相同的形態實現，此等實施例僅係有助於本發明的完整揭示，其主要目的係向本發明所屬技術領域中具有通常知識者完整地說明本發明的範圍，本發明的範圍僅能由申請專利範圍定義。整個說明書中具有同一符號者代表同一構成要素。 The embodiments described in detail with reference to the drawings will help to clearly understand the advantages, features, and implementation methods of the present invention. However, the present invention is not limited to the embodiments disclosed below. The present invention can be implemented in various forms different from each other. These embodiments are only helpful for the complete disclosure of the present invention, and its main purpose is to provide technology to the present invention. Those skilled in the art can fully explain the scope of the present invention, and the scope of the present invention can only be defined by the scope of patent application. Those having the same symbol throughout the specification represent the same constituent elements.

在說明本發明的實施例之前，如果認為公知結構或功能的具體說明可能會非必要地混淆本發明的主旨，將省略其詳細說明。後述的術語係考慮其在本發明的實施例中的功能後定義的術語，可能會根據使用者與運營者的意圖或慣例而有所變化。因此應該根據本說明書的整體內容進行該定義。 Before explaining the embodiments of the present invention, if it is considered that specific descriptions of well-known structures or functions may unnecessarily obscure the gist of the present invention, detailed descriptions thereof will be omitted. Terms described later are terms defined in consideration of their functions in the embodiments of the present invention, and may be changed according to the intentions or practices of users and operators. Therefore, the definition should be based on the entire content of this specification.

圖1表示包含本發明實施例的自我診斷模組的電漿電源裝置的框圖。 FIG. 1 shows a block diagram of a plasma power supply device including a self-diagnostic module according to an embodiment of the present invention.

請參閱圖1，實施例的電漿電源裝置可包含仿真負載電阻400、轉換電路100、放大電路200、根據測試條件測量自我診斷資料的診斷感測器1、3、5及自我診斷模組300的構成。本說明書所用術語「模組」應根據該術語被使用的文脈而闡釋為包含軟體、硬體或其組合。例如，軟體可係機器語言、韌體(firmware)、嵌式碼(embedded code)及應用軟體。例如，硬體可係電路、處理器、電腦、積體電路、積體電路核心、感測器、微機電系統(MEMS；Micro-Electro-Mechanical System)、被動元件或其組合。 Referring to FIG. 1, the plasma power supply device of the embodiment may include a simulated load resistance 400, a conversion circuit 100, an amplification circuit 200, diagnostic sensors 1, 3, and 5 and a self-diagnostic module 300 that measure self-diagnostic data according to test conditions. Composition. The term "module" used in this specification should be interpreted to include software, hardware, or a combination thereof, in accordance with the context in which the term is used. For example, the software may be machine language, firmware, embedded code, and application software. For example, the hardware may be a circuit, a processor, a computer, an integrated circuit, an integrated circuit core, a sensor, a Micro-Electro-Mechanical System (MEMS), a passive element, or a combination thereof.

仿真負載電阻400為了電漿電源裝置的自我診斷而連接至 電源裝置末端部並且在電源裝置輸出端構成閉合電路。在本發明的實施例中，若由仿真負載電阻400為電源裝置供應電流，電漿電源裝置的組成零件及電路宛如電源裝置實際被驅動一樣地進行動作。 The simulated load resistance 400 is connected to the self-diagnosis of the plasma power supply device. The power supply device ends and forms a closed circuit at the output of the power supply device. In the embodiment of the present invention, if the power supply device is supplied with current by the simulated load resistor 400, the components and circuits of the plasma power supply device act as if the power supply device is actually driven.

轉換電路100將輸入電源裝置的交流電流轉換成直流電流，將經過轉換的直流電流中符合預設條件的直流電流予以過濾。之後，將經過過濾的直流電流重新轉換成交流的轉換電流予以輸出。 The conversion circuit 100 converts the AC current input to the power supply device into a DC current, and filters the DC current that meets a preset condition from the converted DC current. After that, the filtered DC current is reconverted into an AC converted current and output.

放大電路200在轉換電流輸入時將所輸入的電流予以放大，將放大的電流轉換成直流電流，將轉換的直流電流經過過濾後的放大電流加以輸出。 The amplifier circuit 200 amplifies the input current when converting the current input, converts the amplified current into a DC current, and outputs the converted DC current after filtering the amplified current.

複數個診斷感測器1、3、5安裝在電路的輸入輸出節點並針對基於供應至電路的電流的輸入輸出電流值、電壓、溫度等用於判斷電路異常動作的自我診斷資料進行測量。在本發明的實施例中，可藉由診斷感測器3所測量的診斷資料得知諸如轉換電路的短路、放大電路的過負載、連接診斷感測器3的配線的發熱狀態、電流感測器異常、診斷感測器異常、逆變器動作與否等影響電漿電源裝置動作的電路狀態。 A plurality of diagnostic sensors 1, 3, and 5 are installed at the input and output nodes of the circuit and measure self-diagnostic data used to determine abnormal operation of the circuit based on input and output current values, voltages, and temperatures based on the current supplied to the circuit. In the embodiment of the present invention, the diagnostic data measured by the diagnostic sensor 3 can be used to know the short circuit of the conversion circuit, the overload of the amplifier circuit, the heating state of the wiring connected to the diagnostic sensor 3, and the current sensing. The abnormality of the power supply, the abnormality of the diagnostic sensor, and the operation of the inverter affect the circuit state of the plasma power supply device.

自我診斷模組300在基於仿真負載電阻400的測試電流及電壓被供應至電源裝置的各電路後收集診斷感測器1、3、5所測量的自我診斷資料。之後，比較自我診斷資料及預先儲存的資料，以比較結果為基準判斷電源裝置的組成零件中出現異常的零件或電路。 The self-diagnostic module 300 collects self-diagnostic data measured by the diagnostic sensors 1, 3, and 5 after the test current and voltage based on the simulated load resistance 400 are supplied to the circuits of the power supply device. After that, the self-diagnostic data and the pre-stored data are compared, and based on the comparison result, it is judged that abnormal parts or circuits appear in the component parts of the power supply device.

圖2表示將本發明實施例的仿真負載電阻連接至電源裝置後在電源裝置自我診斷時使用的例示圖。 FIG. 2 shows an exemplary diagram used when the power supply device performs a self-diagnosis after connecting a simulated load resistor according to an embodiment of the present invention to the power supply device.

如圖2所示，若將本發明實施例的仿真負載電阻400連接 至電源裝置，可利用由所連接的仿真負載電阻400供應的電流得知電源裝置的組成零件是否異常。實施例所提供的仿真負載電阻400不僅可附接或內置於電源裝置後使用，亦能附接或內置於設有一般電源裝置的各種電子機器後使用。實施例所提供的仿真負載電阻400連接至電源裝置輸出端時會形成閉合電路，因此即使不以實際負載驅動電源裝置亦能向構成電源裝置的各個電路與零件供應電流。由仿真負載電阻400供應的電流係測試電流並且可個別供應至構成電源裝置的各零件及各電路。又，在本發明的實施例中，可一邊變更仿真負載電阻值或所供應的電流值一邊收集診斷資料，從而能在各式各樣的測試條件下輕易確認電源裝置的異常與否。圖2所示實施例中仿真負載電阻400安裝在電源裝置外部，惟本揭示例所提供的仿真負載電阻400亦能設於電源裝置內部並且用於電源裝置自我診斷測試。 As shown in FIG. 2, if the simulated load resistor 400 according to the embodiment of the present invention is connected To the power supply device, it is possible to know whether the component parts of the power supply device are abnormal by using the current supplied by the connected dummy load resistor 400. The simulated load resistor 400 provided in the embodiment can be used not only after being attached or built in a power supply device, but also after being attached or built in various electronic devices provided with a general power supply device. When the simulated load resistor 400 provided in the embodiment is connected to the output terminal of the power supply device, a closed circuit is formed. Therefore, even if the power supply device is not driven with an actual load, current can be supplied to each circuit and part constituting the power supply device. The current supplied by the dummy load resistor 400 is a test current and can be individually supplied to each part and each circuit constituting the power supply device. In addition, in the embodiment of the present invention, diagnostic data can be collected while changing the simulated load resistance value or the current value supplied, so that the abnormality of the power supply device can be easily confirmed under various test conditions. In the embodiment shown in FIG. 2, the simulated load resistance 400 is installed outside the power supply device. However, the simulated load resistance 400 provided in the present disclosure can also be provided inside the power supply device and used for self-diagnostic testing of the power supply device.

圖3表示用於本發明實施例的電漿電源裝置自我診斷的複數個診斷感測器與具體的電路配置的圖形。 FIG. 3 is a diagram showing a plurality of diagnostic sensors and specific circuit configurations for self-diagnosis of the plasma power supply device according to the embodiment of the present invention.

請參閱圖3，轉換電路100可包含轉換器、濾波器、逆變器的構成，放大電路200可包含變壓器、轉換器、濾波器的構成。 Referring to FIG. 3, the conversion circuit 100 may include a converter, a filter, and an inverter, and the amplifier circuit 200 may include a transformer, a converter, and a filter.

設於電漿電源裝置的各個診斷感測器1、2、4、5、6不僅設於轉換電路100及放大電路200的輸入輸出電路內1、3、5，亦設於作為構成電路的零件的濾波器及變壓器的輸入輸出電路內2、4、6，從而能夠針對診斷資料進行測量，前述診斷資料包含構成轉換電路100與放大電路200的各零件所輸入輸出的電流值、溫度等在內。 Each of the diagnostic sensors 1, 2, 4, 5, and 6 provided in the plasma power supply device is provided not only in the input and output circuits 1, 3, and 5 of the conversion circuit 100 and the amplification circuit 200, but also as parts constituting the circuit. Filters, transformers, and transformers' input and output circuits 2, 4, and 6, so that diagnostic data can be measured. The diagnostic data includes the current value, temperature, etc. of the input and output of each component constituting the conversion circuit 100 and the amplifier circuit 200. .

例如，轉換電路100的轉換器將所輸入的交流電流轉換成 直流電流，濾波器從經過轉換的直流電流中過濾出出現一定數值以上的電流後輸入至逆變器。此時，診斷感測器1檢知輸入電流值、連接配線電阻所致發熱溫度等，診斷感測器2則可檢知轉換器的輸出電流值、溫度、輸入濾波器的電流值之類的診斷資料。 For example, the converter of the conversion circuit 100 converts the input AC current into DC current, the filter filters out the converted DC current, and then inputs the current to the inverter. At this time, the diagnostic sensor 1 detects the input current value and the heating temperature caused by the connection wiring resistance, and the diagnostic sensor 2 can detect the output current value, temperature of the converter, the current value of the input filter and the like. Diagnostic information.

逆變器130將所輸入的直流電流重新轉換成交流後予以輸出，診斷感測器3則檢知所輸出的電流。此時，可藉由診斷感測器3所檢知的診斷資料判斷轉換電路的短路或放大電路的過負載。轉換電路100的輸出電流則成為放大電路200的輸入電流而被變壓器210放大。診斷感測器4則檢知放大電流，放大的電流在轉換器220被轉換成直流電流，診斷感測器5則檢知轉換器所輸出的直流電流後輸入濾波器。在濾波器230濾掉低於一定數值的電流。之後，通過濾波器230的電流則被診斷感測器6檢知。 The inverter 130 converts the input DC current into AC again and outputs it, and the diagnostic sensor 3 detects the output current. At this time, the short circuit of the conversion circuit or the overload of the amplifier circuit can be determined by the diagnostic data detected by the diagnostic sensor 3. The output current of the conversion circuit 100 becomes the input current of the amplifier circuit 200 and is amplified by the transformer 210. The diagnostic sensor 4 detects the amplified current, and the amplified current is converted into a DC current by the converter 220. The diagnostic sensor 5 detects the DC current output by the converter and inputs the detected current to the filter. A current lower than a certain value is filtered out in the filter 230. After that, the current passing through the filter 230 is detected by the diagnostic sensor 6.

自我診斷模組300收集構成電源裝置的電路及零件的輸入輸出端上安裝的複數個診斷感測器所測量的診斷資料，根據其以及預先儲存的資料的比較結果而得知電源裝置中出現異常動作的電路及零件。 The self-diagnostic module 300 collects diagnostic data measured by a plurality of diagnostic sensors installed on the input and output terminals of the circuits and parts constituting the power supply device, and learns that an abnormality has occurred in the power supply device according to the comparison results of the sensor and the pre-stored data. Operating circuits and parts.

在圖3示出診斷感測器1至6並且在濾波器與轉換器、轉換電路與放大電路的輸入輸出節點收集自我診斷資料，如前述的說明僅揭示本發明的實施例，並非限制診斷感測器的數量與配置。自我診斷感測器的數量及安裝位置可根據配備自我診斷模組的電源裝置的配置而不同。 The diagnostic sensors 1 to 6 are shown in FIG. 3 and the self-diagnostic data is collected at the input and output nodes of the filter and converter, the conversion circuit and the amplification circuit. The foregoing description only discloses the embodiments of the present invention, and does not limit the diagnostic sense. Number and configuration of testers. The number and installation position of the self-diagnostic sensors may vary according to the configuration of the power supply device equipped with the self-diagnostic module.

圖4表示本發明實施例的自我診斷模組300的資料處理用構成要素的圖形。 FIG. 4 is a diagram showing constituent elements for data processing of the self-diagnostic module 300 according to the embodiment of the present invention.

請參閱圖4，自我診斷模組300可包含測試電流供應單元 310、資料收集單元330及判斷單元350的構成。 Please refer to FIG. 4, the self-diagnostic module 300 may include a test current supply unit 310. The structure of the data collection unit 330 and the determination unit 350.

測試電流供應單元310為了檢查電源裝置的正常動作而往仿真負載電阻輸入電源裝置工作電流值或電壓值。在本發明的實施例中，可在測試電流供應單元310調整測試電流值或在測試電流供應單元310調整仿真負載電阻值而控制測試電流值。 The test current supply unit 310 inputs a working current value or a voltage value of the power supply device to the simulated load resistor in order to check the normal operation of the power supply device. In the embodiment of the present invention, the test current value can be adjusted in the test current supply unit 310 or the simulated load resistance value can be adjusted in the test current supply unit 310 to control the test current value.

又，測試電流供應單元310可為了確認電漿電源裝置的組成零件及電路各自正常動作與否而個別控制前述電源裝置的組成零件及電路各自的電源。例如，測試電流供應單元310在電源裝置包含n個零件時藉由下述數學式1算出供應測試電流的個案數，將算出來的各個測試電流供應至電源裝置所包含的零件。 In addition, the test current supply unit 310 may individually control the power of each of the components and circuits of the power supply device in order to confirm whether the components and circuits of the plasma power supply device operate normally. For example, when the power supply device includes n parts, the test current supply unit 310 calculates the number of cases in which the test current is supplied by using the following mathematical formula 1, and supplies the calculated test currents to the parts included in the power supply device.

[數學式1]包含n個零件的電源裝置的測試電流輸入輸出路徑的計算個案數= n C k=nC1+nC2+nC3+nC4+......+nCn=n！ [Mathematical formula 1] Calculation of the number of test current input / output paths of a power supply device including n parts = n C k = nC1 + nC2 + nC3 + nC4 + ...... + nCn = n!

具體地說，假設係包含n個零件的電路，選擇n個零件中的一個，供應對所選定零件輸入輸出的測試電流並測量診斷資料，在n個零件中選擇兩個(相鄰)零件並且為選定的兩個零件供應測試電流後測量診斷資料。亦即，測試電流供應單元310為構成電漿電源裝置的各個零件供應電流後得知異常動作與否，確認各個零件正常動作的話，選擇複數個零件並且為選定的複數個零件供應電流而得知各個零件連接時是否發生異常動作。亦即，實施例的測試電流供應單元310將能夠得知電源裝置所包含的各零件及各零件的連接狀態的測試電流路徑予以條件化並且根據各條件測量診斷資料，從而能個別地得知電漿電源裝置所包含的零件的異常動 作，亦能診斷零件之間的連接狀態。 Specifically, suppose that it is a circuit including n parts, select one of the n parts, supply a test current for the input and output of the selected part and measure diagnostic data, select two (adjacent) parts among the n parts and Measure diagnostic data after supplying test current to selected two parts. That is, the test current supply unit 310 learns whether an abnormal operation is performed after supplying the current to each component constituting the plasma power supply device. If the normal operation of each component is confirmed, a plurality of components are selected and a current is supplied to the selected plurality of components. Is there any abnormal operation when the parts are connected? That is, the test current supply unit 310 of the embodiment conditions the test current path capable of knowing each part included in the power supply device and the connection status of each part, and measures diagnostic data according to each condition, so that the power can be known individually. Abnormal movement of parts included in the pulp power supply unit It can also diagnose the connection status between parts.

又，使用者選擇輸入輸出零件時，測試電流供應單元310可向選定的零件供應測試電流。例如，選擇電漿電源裝置的擬檢查異常與否的組成零件及電路時，測試電流供應單元310可向選定的組成零件及電路供應測試電流。 In addition, when the user selects an input / output part, the test current supply unit 310 can supply a test current to the selected part. For example, when selecting component parts and circuits of the plasma power supply device that are to be checked for abnormality, the test current supply unit 310 may supply a test current to the selected component parts and circuits.

又，測試電流供應單元310設定測試條件並且將基於所設定的測試條件的測試電流供應至擬診斷的組成零件及電路，藉由憑藉所供應的測試電流測量的自我診斷資料對電源裝置進行自我診斷，前述測試條件包含仿真負載電阻值、擬診斷的組成零件及電路、輸入的電流值中的任一個。 In addition, the test current supply unit 310 sets a test condition and supplies a test current based on the set test condition to components and circuits to be diagnosed, and performs self-diagnosis of the power supply device based on self-diagnostic data measured by the supplied test current. The foregoing test conditions include any one of a simulated load resistance value, component parts and circuits to be diagnosed, and an input current value.

資料收集單元330從設於電源裝置的組成零件輸入輸出電路內的診斷感測器1、2、3、4、5、6收集憑藉供應至電源裝置的測試電流測量的診斷資料，前述診斷資料包含輸入輸出電流、電壓、溫度、動作與否。 The data collection unit 330 collects the diagnostic data measured by the test current supplied to the power supply device from the diagnostic sensors 1, 2, 3, 4, 5, and 6 provided in the input / output circuits of the component parts of the power supply device. The aforementioned diagnostic data includes Input and output current, voltage, temperature, and operation.

判斷單元350比較收自資料收集單元的電路診斷資料與既設定值而判斷構成電源裝置的電路與零件各自的故障與否。例如，判斷單元350可比較收自複數個診斷感測器1、2、3、4、5、6的測量值中的任一個以上與既設定值並且根據比較結果判斷異常動作的電源裝置的組成零件與電路。 The judging unit 350 compares the circuit diagnostic data received from the data collection unit with the existing set values and judges whether or not each of the circuits and components constituting the power supply device is malfunctioning. For example, the judging unit 350 may compare any one or more of the measured values received from the plurality of diagnostic sensors 1, 2, 3, 4, 5, and 6 with a set value and determine the composition of the power supply device that operates abnormally based on the comparison result. Parts and circuits.

又，判斷單元350可調整仿真負載電阻值及供應至電源裝置的組成零件以及電路的測試電流值並且將收自複數個診斷感測器的測量值及既設定值的比率進行比較後算出電源裝置的組成零件與電路的各自的 成品率(yield)。亦即，判斷單元350可算出基於測試條件的成品率，前述測試條件包含仿真負載電阻值、所供應的電流值及需自我診斷的組成零件與電路。例如，判斷單元350將憑藉測試電流測量出來的診斷資料及既儲存的資料加以比較而得知構成電源裝置的各零件以及電路上發生的損失電流與損失率，此時，該測試電流則根據電源裝置的測試電流輸入輸出路徑的計算個案供應。在實施例中，判斷單元350可將損失率為一定水準以上的電路及零件予以更換，亦可在零件之間的連接線或節點上發生的雜訊導致輸出電流的損失較多時將引起輸出電流損失的連接線及節點的位置告知檢驗人員。 In addition, the judging unit 350 can adjust the simulated load resistance value, the test current value of the components and circuits supplied to the power supply device, and compare the ratios of the measured values and the preset values received from the plurality of diagnostic sensors to calculate the power supply device The respective components and circuits of Yield (yield). That is, the judging unit 350 can calculate the yield based on the test conditions. The test conditions include a simulated load resistance value, a supplied current value, and components and circuits that need self-diagnosis. For example, the judgment unit 350 compares the diagnostic data measured with the test current and the stored data to learn the loss currents and loss rates that occur on the parts and circuits that constitute the power supply device. At this time, the test current is based on the power supply. Case calculation of the device's test current input and output paths. In the embodiment, the judging unit 350 may replace circuits and parts with a loss rate above a certain level, and may also cause output when there is a large loss of output current due to noise occurring on the connection lines or nodes between the parts. The location of the current-loss connections and nodes is notified to the inspector.

以下依次說明本發明實施例的自我診斷方法。實施例的自我診斷方法的作用(功能)在本質上及自我診斷模組上的功能相同，因此將省略與圖1至圖4重複的說明。 The self-diagnostic method according to the embodiments of the present invention will be described in order below. The function (function) of the self-diagnostic method of the embodiment is essentially the same as the function on the self-diagnostic module, and therefore descriptions that overlap with FIGS. 1 to 4 will be omitted.

圖5表示本發明實施例的電漿電源裝置的自我診斷方法的資料處理流程的流程圖。 FIG. 5 is a flowchart illustrating a data processing flow of a self-diagnosis method of a plasma power supply device according to an embodiment of the present invention.

在S410步驟，測試電流供應單元為了檢查電源裝置的正常動作而向前述仿真負載電阻輸入電源裝置測試電流值。在S410步驟，為了確認電漿電源裝置的組成零件及電路各自正常動作與否而為電源裝置的組成零件及電路以個別方式各自輸入測試電流。例如，在S410步驟，將利用數學式1算出來的電源裝置的測試電流輸入輸出路徑的各個案進行測試電流條件設定，按照所設定的條件供應測試電流並且收集基於所供應的電流的診斷資料。又，S410步驟在電漿電源裝置的擬檢查異常與否的組成零件及電路被選擇時能向選定的組成零件及電路輸入測試電流。 In step S410, in order to check the normal operation of the power supply device, the test current supply unit inputs the test current value of the power supply device to the aforementioned simulated load resistance. In step S410, in order to confirm whether the components and circuits of the plasma power supply device operate normally, the component parts and circuits of the power supply device are individually input with the test current. For example, in step S410, the test current condition setting is performed for each case of the test current input / output path of the power supply device calculated by Math. 1, the test current is supplied according to the set conditions, and diagnostic data based on the supplied current is collected. In step S410, a test current can be input to the selected component parts and circuits when the component parts and circuits of the plasma power supply device to be checked for abnormality are selected.

又，S410步驟可對測試條件進行設定並且將基於所設定的測試條件的測試電流供應至擬診斷的組成零件及電路，前述測試條件包含仿真負載電阻值、擬診斷的組成零件及電路、輸入的電流值中的任一個。 In step S410, the test conditions can be set and the test current based on the set test conditions can be supplied to the components and circuits to be diagnosed. The test conditions include the simulated load resistance value, the components and circuits to be diagnosed, and the input Any of the current values.

在S430步驟，資料收集單元從設於電源裝置的組成零件輸入輸出節點的診斷感測器收集憑藉供應至電源裝置的測試電流測量的包含輸入輸出電流、電壓、溫度、動作與否的診斷資料。 In step S430, the data collection unit collects diagnostic data including input and output current, voltage, temperature, operation or not, which is measured by the test current supplied to the power supply device from a diagnostic sensor provided at the input / output nodes of the component parts of the power supply device.

在S450步驟，判斷單元比較收自資料收集單元的診斷資料與既設定值而判斷電源裝置的組成零件各自的故障與否。在S450步驟，可比較收自複數個診斷感測器的測量值中的任一個以上與既設定值並且根據比較結果判斷異常動作的電源裝置的組成零件與電路。又，在S450步驟，可根據仿真負載電阻值與供應至電源裝置的組成零件及電路的測試電流值與電源裝置的測試電流輸入輸出路徑條件進行調整，能比較收自複數個診斷感測器的測量值與既設定值的比率而算出電源裝置的組成零件與電路各自的成品率(yield)。例如，在S450步驟，可對根據測試條件供應的測試電流值進行調整，比較收自複數個診斷感測器的測量值與既設定值的比率而算出電源裝置的組成零件與電路各自的成品率(yield)及損失率，前述測試條件包含仿真負載電阻值、擬診斷的組成零件及電路、輸入的電流值中的任一個。 In step S450, the judgment unit compares the diagnosis data received from the data collection unit with the set values and judges whether the respective components of the power supply device are faulty or not. In step S450, it is possible to compare any one or more of the measured values received from the plurality of diagnostic sensors with the set values and determine the components and circuits of the power supply device that operate abnormally based on the comparison result. Also, in step S450, adjustments can be made according to the simulated load resistance value and the test current values of the component parts and circuits supplied to the power supply device and the test current input and output path conditions of the power supply device, which can compare the data received from multiple diagnostic sensors. The ratio of the measured value to the preset value is used to calculate the yield of each component and circuit of the power supply device. For example, in step S450, the test current value supplied according to the test conditions can be adjusted, and the ratios of the measured values received from the plurality of diagnostic sensors to the preset values can be compared to calculate the respective yields of the components and circuits of the power supply device. (yield) and loss rate. The aforementioned test conditions include any of a simulated load resistance value, a component to be diagnosed and a circuit, and an input current value.

實施例的電漿電源裝置的自我診斷方法為構成電漿電源裝置的零件各自供應電流而確認異常動作與否，確認各個零件正常動作的話，選擇複數個零件後為選定的複數個零件供應電流而得以得知零件各自連接時異常動作發生與否。亦即，在本發明的實施例中，將能夠得知電源 裝置所包含的各個零件及各零件的連接狀態的測試電流路徑予以條件化並且根據各條件測量診斷資料，從而能夠個別地得知電漿電源裝置所包含的零件的異常動作，亦能診斷零件之間的連接狀態。 The self-diagnosing method of the plasma power supply device of the embodiment is to supply current to each component constituting the plasma power supply device to confirm abnormal operation. If it is confirmed that each component operates normally, select a plurality of components and supply current to the selected plurality of components. It can be known whether abnormal movement occurs when the parts are individually connected. That is, in the embodiment of the present invention, it will be possible to know the power supply The test current path of each part and the connection status of each part included in the device is conditionalized and diagnostic data is measured according to each condition, so that the abnormal actions of the parts included in the plasma power supply device can be individually known, and the diagnosis of the parts can also be diagnosed. Connection status.

又，將包含連接至電源裝置輸出端的仿真負載電阻值、測試電流值及測試電流輸入輸出路徑的測試條件予以變更而得以根據測試條件收集電源裝置的診斷資料，因此不僅能自動診斷電源裝置的異常動作，亦能自動得知成品率及損失率。 In addition, by changing the test conditions including the simulated load resistance value, test current value, and test current input / output path connected to the output terminal of the power supply device, diagnostic data of the power supply device can be collected according to the test conditions. The action can also automatically know the yield and loss rate.

藉由實施例的電漿電源裝置的自我診斷模組及自我診斷方法檢驗電源裝置時不必另行連接負載器、冷卻器及配線亦能由電源裝置本身迅速並準確地診斷組成零件及電路是否異常。 The self-diagnostic module and the self-diagnostic method of the plasma power supply device of the embodiment can be used to quickly and accurately diagnose whether the component parts and the circuit are abnormal by connecting the loader, cooler and wiring separately when the power supply device is inspected.

前文所揭示的內容僅為例示，本發明所屬技術領域中具有通常知識者能在不脫離申請專利範圍所申請主旨的情形下實施各種變化，所揭示內容的保護範圍並不侷限於前述特定實施例。 The content disclosed in the foregoing is merely an example. Those with ordinary knowledge in the technical field to which the present invention pertains can implement various changes without departing from the spirit of the patent application. The scope of protection of the content disclosed is not limited to the foregoing specific embodiments. .

Claims (13)

一種電漿電源裝置的自我診斷模組，其特徵係其包含：仿真負載電阻，為了前述電漿電源裝置的自我診斷而位於前述電漿電源裝置的內部，連接至前述電源裝置末端部而在前述電源裝置自我診斷時在前述電源裝置輸出端構成閉合電路；測試電流供應單元，為了確認前述電源裝置正常動作而向前述仿真負載電阻輸入電源裝置工作電流；資料收集單元，從設於構成前述電源裝置的零件及電路的輸入輸出節點的診斷感測器收集憑藉供應至前述電源裝置的測試電流測量的自我診斷資料，前述自我診斷資料係包含輸入輸出電流、電壓、溫度、動作與否中的任一個以上；判斷單元，比較收自前述資料收集單元的前述自我診斷資料與既設定值而判斷前述電源裝置的組成零件及電路各自的故障與否。 A self-diagnostic module for a plasma power supply device is characterized in that it includes: a simulated load resistance, which is located inside the plasma power supply device for self-diagnosis of the plasma power supply device, is connected to an end portion of the power supply device, and is During the self-diagnosis of the power supply device, a closed circuit is formed at the output end of the power supply device; the test current supply unit is used to input the working current of the power supply device to the simulated load resistor in order to confirm the normal operation of the power supply device; The diagnostic sensors of the input and output nodes of the components and circuits of the device collect self-diagnostic data measured by the test current supplied to the power supply device. The self-diagnostic data includes any one of input and output current, voltage, temperature, and operation. Above; the judging unit compares the self-diagnostic data received from the aforementioned data collecting unit with the existing set values to judge whether or not each of the component parts and the circuit of the power supply device is faulty. 如申請專利範圍第1項所記載之電漿電源裝置的自我診斷模組，其中，前述電源裝置的組成零件包含轉換器、濾波器、逆變器、變壓器；前述診斷感測器設於構成前述電漿電源裝置的轉換器、濾波器、逆變器、變壓器及轉換電路與放大電路的輸入輸出節點。 The self-diagnostic module of the plasma power supply device described in item 1 of the scope of the patent application, wherein the component parts of the power supply device include a converter, a filter, an inverter, and a transformer; the diagnostic sensor is provided to constitute the foregoing Input, output nodes of converters, filters, inverters, transformers, conversion circuits and amplifier circuits of plasma power supply devices. 如申請專利範圍第1項所記載之電漿電源裝置的自我診斷模組，其中，前述判斷單元比較收自複數個前述診斷感測器的測量值中的任一個以上與既設定值，並且根據比較結果判斷異常動作的前述電源裝置的組成零件與電路。 The self-diagnostic module of the plasma power supply device according to item 1 of the scope of the patent application, wherein the determination unit compares any one or more of the measured values received from the plurality of diagnostic sensors with a preset value, and As a result of the comparison, the components and circuits of the aforementioned power supply device that have determined abnormal operation are determined. 如申請專利範圍第1項所記載之電漿電源裝置的自我診斷模組，其中，前述測試電流供應單元為了確認前述電漿電源裝置的組成零件及電路各個正常動作與否，而個別控制前述電源裝置的組成零件及電路各自的電源。 The self-diagnostic module of the plasma power supply device described in item 1 of the scope of the patent application, wherein the test current supply unit individually controls the power supply in order to confirm whether the components and circuits of the plasma power supply device operate normally. The components of the device and the respective power supply of the circuit. 如申請專利範圍第1項所記載之電漿電源裝置的自我診斷模組，其中，前述測試電流供應單元在前述電漿電源裝置的擬檢查異常與否的組成零件及電路被選擇時，向前述選定的組成零件及電路輸入測試電流。 According to the self-diagnostic module of the plasma power supply device described in item 1 of the scope of the patent application, wherein the test current supply unit selects the components and circuits of the plasma power supply device that are to be checked for abnormality, and reports to the foregoing The selected component and circuit input the test current. 如申請專利範圍第1項所記載之電漿電源裝置的自我診斷模組，其中，前述測試電流供應單元係針對測試條件進行設定，且前述測試條件包含前述仿真負載電阻值、擬診斷的組成零件及電路、輸入的電流值中的任一個，將基於前述設定的測試條件的測試電流供應至前述擬診斷的組成零件及電路，將憑藉前述被供應的測試電流及電壓測量的自我診斷資料傳輸至前述判斷單元。 The self-diagnostic module of the plasma power supply device described in item 1 of the scope of the patent application, wherein the test current supply unit is set for a test condition, and the test condition includes the simulated load resistance value and a component to be diagnosed. Either the circuit or the input current value, the test current based on the set test conditions is supplied to the components and circuits to be diagnosed, and the self-diagnosis data based on the supplied test current and voltage measurements is transmitted to The aforementioned judgment unit. 如申請專利範圍第1項所記載之電漿電源裝置的自我診斷模組，其中，前述判斷單元根據測試條件調整所供應的測試電流值，比較收自複數個前述診斷感測器的測量值與既設定值的比率而算出前述電源裝置的組成零件與電路各自的成品率(yield)，前述測試條件包含前述仿真負載電阻值、擬診斷的組成零件及電路、輸入的電流值中的任一個。 The self-diagnostic module of the plasma power supply device described in item 1 of the scope of the patent application, wherein the aforementioned judgment unit adjusts the supplied test current value according to the test conditions, and compares the measured values received from a plurality of the aforementioned diagnostic sensors with The yield of each of the component parts and the circuit of the power supply device is calculated based on the ratio of the set values. The test conditions include any of the simulated load resistance value, the component and circuit to be diagnosed, and the input current value. 一種電漿電源裝置的自我診斷方法，其特徵係其包含下列步驟：(A)測試電流供應單元為了確認前述電源裝置正常動作而往仿真負載電阻輸入電源裝置測試電流值；(B)資料收集單元從設於前述電源裝置的組成零件輸入輸出節點的診斷 感測器收集憑藉供應至前述電源裝置的測試電流測量的自我診斷資料，前述自我診斷資料包含輸入輸出電流、電壓、溫度、動作與否中的任一個以上；及(C)判斷單元比較收自前述資料收集單元的前述自我診斷資料與既設定值而判斷前述電源裝置的組成零件及電路各自的故障與否；前述仿真負載電阻位於前述電漿電源裝置的內部，前述仿真負載電阻連接至前述電源裝置的末端部並且在前述電源裝置自我診斷時在前述電源裝置輸出端構成閉合電路。 A self-diagnosis method for a plasma power supply device, which is characterized in that it includes the following steps: (A) a test current supply unit inputs a test current value of a power supply device to a simulated load resistor in order to confirm the normal operation of the power supply device; (B) a data collection unit Diagnosis from input / output nodes of component parts provided in the power supply device The sensor collects self-diagnostic data by means of a test current measurement supplied to the aforementioned power supply device, the aforementioned self-diagnostic data includes any one or more of input-output current, voltage, temperature, operation or not; and (C) the comparison unit receives from The self-diagnostic data and the set values of the data collection unit are used to determine the failure of the components and circuits of the power supply device; the simulated load resistance is located inside the plasma power supply device, and the simulated load resistance is connected to the power supply. The terminal of the device forms a closed circuit at the output end of the power supply device during self-diagnosis of the power supply device. 如申請專利範圍第8項所記載之電漿電源裝置的自我診斷方法，其中，前述(C)判斷電源裝置的組成零件及電路各自的故障與否的步驟，比較收自複數個前述診斷感測器的測量值中的任一個以上與既設定值，並且根據比較結果判斷異常動作的前述電源裝置的組成零件與電路。 The self-diagnostic method for a plasma power supply device as described in item 8 of the scope of the patent application, wherein (C) the step of judging the failure of each of the components and circuits of the power supply device, and comparing the plurality of diagnostic sensors received Any one or more of the measured values of the device and the existing set value, and the component parts and the circuit of the power supply device that determine abnormal operation based on the comparison result. 如申請專利範圍第8項所記載之電漿電源裝置的自我診斷方法，其中，前述(A)輸入電源裝置測試電流值的步驟，為了確認前述電漿電源裝置的組成零件及電路各個正常動作與否，而為前述電源裝置的組成零件及電路以個別方式各自輸入測試電流地控制電源。 According to the self-diagnostic method of the plasma power supply device described in item 8 of the scope of the patent application, wherein (A) the step of inputting the test current value of the power supply device, in order to confirm the normal operation of each component and circuit of the plasma power supply device, No, and the components and circuits of the aforementioned power supply device individually control the power supply by individually inputting a test current. 如申請專利範圍第8項所記載之電漿電源裝置的自我診斷方法，其中，前述(A)輸入電源裝置測試電流值的步驟，在前述電漿電源裝置的擬檢查異常與否的組成零件及電路被選擇時，向前述選定的組成零件及電路輸入測試電流。 The self-diagnosing method for a plasma power supply device as described in item 8 of the scope of the patent application, wherein (A) the step of inputting a test current value of the power supply device, the component parts of the plasma power supply device that are to be checked for abnormality, and When a circuit is selected, a test current is input to the aforementioned selected component parts and circuit. 如申請專利範圍第8項所記載之電漿電源裝置的自我診斷方法，其中， 前述(A)輸入電源裝置測試電流值的步驟包含下列步驟：針對測試條件進行設定，前述測試條件包含前述仿真負載電阻值、擬診斷的組成零件及電路、輸入的電流值中的任一個；將基於前述設定的測試條件的測試電流供應至前述擬診斷的組成零件及電路；及將憑藉前述被供應的測試電流測量的前述自我診斷資料傳輸至前述判斷單元。 The self-diagnostic method for a plasma power supply device as described in item 8 of the scope of patent application, wherein: The step of (A) inputting the test current value of the power supply device includes the following steps: setting the test conditions, the test conditions including any of the aforementioned simulated load resistance value, components and circuits to be diagnosed, and the input current value; The test current based on the aforementioned set test conditions is supplied to the aforementioned components and circuits to be diagnosed; and the aforementioned self-diagnostic data measured by means of the aforementioned supplied test current is transmitted to the aforementioned judging unit. 如申請專利範圍第8項所記載之電漿電源裝置的自我診斷方法，其中，前述(C)判斷電源裝置的組成零件各自的故障與否的步驟包含下列步驟：根據測試條件調整所供應的測試電流值，前述測試條件包含前述仿真負載電阻值、擬診斷的組成零件及電路、輸入的電流值中的任一個；及比較收自複數個前述診斷感測器的測量值與既設定值的比率而算出前述電源裝置的組成零件與電路各自的成品率(yield)。 The self-diagnosing method for a plasma power supply device as described in item 8 of the scope of patent application, wherein the step of (C) determining the failure of each of the components of the power supply device includes the following steps: adjusting the supplied test according to the test conditions Current value, the aforementioned test conditions include any of the aforementioned simulated load resistance values, component parts and circuits to be diagnosed, and the input current value; and a ratio of the measured values received from a plurality of the aforementioned diagnostic sensors to a preset value The yields of the components and circuits of the power supply device are calculated.
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