TW201839412A - Power monitor module for a high power fiber laser system cuts off the power immediately according to the situation by feeding back to the electronic control device of the laser system - Google Patents
Power monitor module for a high power fiber laser system cuts off the power immediately according to the situation by feeding back to the electronic control device of the laser system Download PDFInfo
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本發明係關於一種功率量測裝置，特別是關於一種用於高功率光纖雷射系統的功率量測裝置。 This invention relates to a power measuring device, and more particularly to a power measuring device for a high power fiber laser system.
現今的高功率光纖雷射系統，其良好的光束品質，可應用於標記、切割、焊接、加工等工業處理，具有良好的成效，且其能源轉換率高，光束品質佳，因而產品可輕薄短小，並具有生命週期長等優點，如今已廣為各業界所使用；功率量測裝置則是高功率光纖雷射系統重要關鍵零組件之一，其功用為即時量測高功率光纖雷射系統輸出功率，所量測到的光訊號強度，可回饋至電控裝置，即時補償與調整操作電流，以達到穩定的輸出功率，此外，如有異常大的光訊號變化量，表明系統有異常，藉由回饋至雷射系統之電控裝置，即時切斷電源，以達到保護高功率光纖雷射系統的目的。 Today's high-power fiber laser systems, with good beam quality, can be applied to industrial processes such as marking, cutting, welding, processing, etc., with good results, and high energy conversion rate, good beam quality, so the product can be light and short And has a long life cycle and other advantages, is now widely used in various industries; power measurement device is one of the important key components of high-power fiber laser system, its function is to measure the output of high-power fiber laser system Power, measured optical signal strength, can be fed back to the electronic control device to instantly compensate and adjust the operating current to achieve stable output power. In addition, if there is an abnormally large amount of optical signal change, it indicates that the system is abnormal. The electronic control device that feeds back to the laser system instantly cuts off the power supply to achieve the purpose of protecting the high-power fiber laser system.
習知技術中，量測光纖傳輸訊號的習知方法包含使用錐形耦合器和量測背景散射訊號兩種方法，其中，使用錐形耦合器，其技術為從主傳輸光纖分出固定的一小部份訊號進行量測，而量測背景散射訊號者，則利用光纖纖芯傳輸 的訊號源會產生背景瑞立散射訊號，在光纖表面加上光偵測器量測背景散射訊號，藉由建立輸出功率與光偵檢器量測功率的關係，即可用來監控輸出訊號強度；但使用錐形耦合器的習知技術，其缺點為只適合小於10W功率光纖雷射系統，過大的功率會超過錐形耦合器所能耐受的功率，而使用量測背景散射訊號的習知技術，其缺點為光纖纖芯傳輸中所產生的背景瑞立散射訊號非常微弱，往往需要靈敏度高的光偵測器，以及無法區別所量測的訊號為往前(direct)訊號或者是反射(reflected)的訊號。 In the prior art, a conventional method for measuring an optical fiber transmission signal includes two methods of using a tapered coupler and measuring a background scatter signal, wherein a tapered coupler is used, and the technique is to separate a fixed one from the main transmission fiber. A small number of signals are measured, and those who measure the background scatter signal use a signal source transmitted by the fiber core to generate a background Rayleigh scatter signal, and a photodetector is used to measure the background scatter signal on the surface of the fiber. Establishing the relationship between the output power and the measured power of the optical detector can be used to monitor the output signal strength; however, the conventional technique using a tapered coupler has the disadvantage that it is only suitable for a fiber laser system of less than 10 W power, and excessive power will be The conventional technique of measuring the background scatter signal exceeds the power that the cone coupler can withstand. The disadvantage is that the background Rayleigh scatter signal generated in the fiber core transmission is very weak, and often requires high sensitivity optical detection. The detector, and the signal that cannot be distinguished from the measured signal is a direct signal or a reflected signal.
習知技術應用於監控具有準直輸出鏡(collimator)的雷射系統，其主要概念為使用光隔離器(isolator)來令雷射光打在後端光學元件不會反射回系統，以及裝設平板狀(plate-shaped)之光束分光鏡(beam splitter)，來用來反射一小部份的正向與反向傳遞的訊號光，再以光偵測器量測反射光達到監控之目的，若該裝置用於監控高功率的雷射系統，必須在光偵測器前方加裝漫射器(diffuser)來衰減反射光，避免光偵檢器因太強的光功率而損壞；但其應用於監控不同功率的雷射系統輸出功率時，必須更換適當光束分離器與漫射器，或耐受功率更高的光偵檢器，並且重新進行校準程序，此外，經由準直輸出的雷射光，尚須經由偏振器(polarizer)與旋轉器(rotator)等光學元件的作用，來使訊號光反射，因而增加了裝置架設的難度與成本。 The prior art is applied to monitoring a laser system having a collimator, the main concept of which is to use an isolator to cause laser light to be hit at the rear optical element without being reflected back to the system, and to install a flat plate. A plate-shaped beam splitter is used to reflect a small portion of the forward and reverse transmitted signal light, and then the reflected light is measured by the photodetector for monitoring purposes. The device is used to monitor a high-power laser system. A diffuser must be installed in front of the photodetector to attenuate the reflected light to prevent the optical detector from being damaged due to too strong optical power; however, it is applied When monitoring the output power of laser systems of different powers, it is necessary to replace the appropriate beam splitter and diffuser, or to withstand higher power optical detectors, and to re-calibrate the program, in addition, through the collimated output of the laser, It is still necessary to reflect the signal light through the action of optical elements such as a polarizer and a rotator, thereby increasing the difficulty and cost of the device erection.
因此目前業界極需發展出一種可用於高功率光纖雷射系統的功率量測裝置，能以簡單結構並能應用於監控不同功率的雷射系統輸出功率，即時管控雷射輸出，如此一來，方能同時兼具監控準確度與雷射安全，以達到保護高功率光纖雷射系統之目的。 Therefore, there is a great need in the industry to develop a power measuring device that can be used in a high-power fiber laser system, which can be applied to monitor the output power of a laser system with different powers and control the laser output in real time, so that It can simultaneously monitor accuracy and laser safety to protect high-power fiber laser systems.
鑒於上述習知技術之缺點，本發明之主要目的在於提供一種用於雷射系統的功率量測裝置，整合一回饋雷射光單元、一光衰減元件、一光偵測元件及一訊號調整單元等，以完成高功率光纖雷射系統的即時雷射光功率量測。 In view of the above disadvantages of the prior art, the main object of the present invention is to provide a power measuring device for a laser system, which integrates a feedback laser unit, an optical attenuating element, a photo detecting element, a signal adjusting unit, and the like. To complete the real-time laser optical power measurement of high-power fiber laser systems.
為了達到上述目的，根據本發明所提出之一方案，提供一種用於雷射系統的功率量測裝置，包括：一調整方位機構；一回饋雷射光單元，其係用以提供一回饋雷射光；一光衰減元件，設置於該回饋雷射光單元前方，其係具有一針孔結構；一光偵測元件，設置於該光衰減元件後方，其係用以接收通過該針孔結構的回饋雷射光；一訊號調整單元，設置於該光衰減元件及光偵測元件下方，其係用以調整該光偵測元件接收該回饋雷射光的位置。 In order to achieve the above object, according to one aspect of the present invention, a power measuring device for a laser system is provided, comprising: an adjustment azimuth mechanism; and a feedback laser light unit for providing a feedback laser light; An optical attenuation component is disposed in front of the feedback laser light unit and has a pinhole structure; a light detecting component is disposed behind the light attenuating component for receiving the feedback laser light passing through the pinhole structure A signal adjusting unit is disposed under the light attenuating element and the light detecting element for adjusting a position at which the light detecting element receives the feedback laser light.
上述中回饋雷射光單元可包含一回饋雷射光訊號輸入接頭及一回饋雷射光訊號埠，其連接一雷射裝置，可將雷射裝置產生的雷射光，經由回饋雷射光訊號埠及回饋雷射光訊號輸入接頭，導入到光衰減元件的針孔結構內；光衰 減元件若用於高功率的雷射系統，則必須耐得住例如500W的高功率雷射，否則將大幅影響光衰減元件的壽命，本案發明中的光衰減元件可以金屬或陶瓷材料來構成，以增加功率量測裝置的使用週期。 The medium feedback laser light unit may include a feedback laser light signal input connector and a feedback laser light signal port, which is connected to a laser device, and the laser light generated by the laser device can be used to feedback the laser light signal and feedback the laser light. The signal input connector is introduced into the pinhole structure of the optical attenuating element; if the optical attenuating element is used in a high power laser system, it must withstand a high power laser such as 500W, otherwise the life of the optical attenuating element will be greatly affected. The light attenuating element in the invention of the present invention may be constructed of a metal or ceramic material to increase the life cycle of the power measuring device.
本發明的訊號調整單元可包含一位移溝槽及一固定鈕，該位移溝槽提供一個方向的移動空間，可調控光衰減元件及光偵測元件的移動，以因應不同功率的雷射，當光衰減元件及光偵測元件移動至適當位置後，利用固定鈕固定光衰減元件及光偵測元件的位置；本案發明更包含一固定底板，其中，光衰減元件、光偵測元件及訊號調整單元都是設置於該固定底板上。 The signal adjusting unit of the present invention may include a displacement groove and a fixed button, and the displacement groove provides a moving space in one direction, and can adjust the movement of the light attenuating element and the light detecting element to respond to lasers of different powers. After the light attenuating component and the light detecting component are moved to the appropriate positions, the position of the light attenuating component and the light detecting component is fixed by using a fixing button; the invention further comprises a fixed bottom plate, wherein the light attenuating component, the light detecting component and the signal adjustment The units are all disposed on the fixed bottom plate.
為了達到上述目的，根據本發明所提出之另一方案，提供一種高功率光纖雷射系統，包括：一光纖光學系統，其係用以產生一雷射光；一電源供應模組，電性相連該光纖光學系統，其係用以提供電源；一電控模組，其係用以控制該電源供應模組所輸出的電壓；一如請求項1所述之功率量測裝置，電性相連該電控模組，其係用以量測該光纖光學系統回饋而來的雷射光。 In order to achieve the above object, according to another aspect of the present invention, a high power fiber laser system is provided, comprising: a fiber optic system for generating a laser light; and a power supply module electrically connected to the a fiber optic system for providing a power source; an electronic control module for controlling a voltage output by the power supply module; and a power measuring device according to claim 1 electrically connected to the power The control module is configured to measure the laser light returned by the optical fiber system.
上述系統中，光纖光學系統利用回饋雷射光單元，將產生的雷射光回饋傳輸給功率量測裝置，功率量測裝置再將量測到的雷射光強度傳輸給電控模組，而電控模組則可利用功率量測裝置所量測到的雷射光強度，控制電源供應 模組所輸出的電壓大小，因此可隨時調整光纖光學系統所產生的雷射光強度。 In the above system, the optical fiber system uses the feedback laser light unit to transmit the generated laser light feedback to the power measuring device, and the power measuring device transmits the measured laser light intensity to the electronic control module, and the electronic control module The intensity of the laser light measured by the power measuring device can be used to control the voltage output by the power supply module, so that the intensity of the laser light generated by the optical fiber system can be adjusted at any time.
以上之概述與接下來的詳細說明及附圖，皆是為了能進一步說明本創作達到預定目的所採取的方式、手段及功效。而有關本創作的其他目的及優點，將在後續的說明及圖式中加以闡述。 The above summary and the following detailed description and drawings are intended to further illustrate the manner, means and effects of the present invention in achieving its intended purpose. Other purposes and advantages of this creation will be explained in the following description and drawings.
110‧‧‧回饋雷射光單元 110‧‧‧Feedback laser unit
111‧‧‧回饋雷射光 111‧‧‧Rewarding laser light
112‧‧‧回饋雷射光訊號輸入接頭 112‧‧‧Feedback laser signal input connector
113‧‧‧回饋雷射光訊號埠 113‧‧‧Feedback laser signal 埠
120‧‧‧光衰減元件 120‧‧‧Light attenuation components
121‧‧‧針孔結構 121‧‧‧ pinhole structure
130‧‧‧光偵測元件 130‧‧‧Light detecting components
140‧‧‧訊號調整單元 140‧‧‧Signal adjustment unit
141‧‧‧位移溝槽 141‧‧‧ displacement trench
142‧‧‧固定鈕 142‧‧‧fixed button
150‧‧‧固定底板 150‧‧‧Fixed base plate
210‧‧‧光纖光學系統 210‧‧‧Fiber Optics
211‧‧‧雷射二極體模組 211‧‧‧Laser diode module
212‧‧‧光纖模組 212‧‧‧Fiber optic module
220‧‧‧電源供應模組 220‧‧‧Power supply module
230‧‧‧電控模組 230‧‧‧Electric control module
240‧‧‧功率量測裝置 240‧‧‧Power measuring device
250‧‧‧輸出傳遞光纖 250‧‧‧Output transfer fiber
260‧‧‧輸出準直鏡 260‧‧‧ Output collimating mirror
第一圖係為本發明一種用於雷射系統的功率量測裝置示意圖；第二圖係為本發明一種高功率光纖雷射系統示意圖；第三圖係為本發明一種應用功率量測裝置量測光偵測元件電壓與實驗輸出功率關係圖。 The first figure is a schematic diagram of a power measuring device for a laser system according to the present invention; the second figure is a schematic diagram of a high power fiber laser system according to the present invention; and the third figure is an application power measuring device according to the present invention. The relationship between the photometric detection component voltage and the experimental output power.
以下係藉由特定的具體實例說明本創作之實施方式，熟悉此技藝之人士可由本說明書所揭示之內容輕易地了解本創作之優點及功效。 The embodiments of the present invention are described by way of specific examples, and those skilled in the art can readily understand the advantages and effects of the present invention from the disclosure of the present disclosure.
本發明提出高功率光纖雷射系統的輸出功率量測裝置，主要是結合具有訊號埠(signal port)的光纖合束器，來進行輸出訊號採樣，但由於所回饋的雷射光強度若非常高，必須使用與光感測元件尺寸匹配的針孔結構，來衰減輸 出採樣的光能量，因此本案發明適用於不同的光纖雷射系統，例如：100W-500W、1kW及更高能量的雷射系統，另本案發明設計出具有可調適/校正量測不同光能量的機械結構，此機械結構是裝置在一固定底板，固定底板上另具有回饋雷射光訊號輸入接頭，方便於連接與輸入由高功率光纖雷射系統所回饋的雷射光訊號，回饋雷射光訊號可以由不同方式取得。 The invention provides an output power measuring device for a high-power fiber laser system, which mainly combines an optical fiber combiner with a signal port for output signal sampling, but because the intensity of the returned laser light is very high, The pinhole structure that matches the size of the light sensing element must be used to attenuate the light energy of the output sample, so the invention is applicable to different fiber laser systems, such as 100W-500W, 1kW and higher energy laser systems, In addition, the invention has a mechanical structure with adjustable/corrected measurement of different light energy. The mechanical structure is provided on a fixed bottom plate, and the fixed bottom plate further has a feedback laser signal input connector, which is convenient for connecting and inputting by high power fiber. The laser light signal fed back by the laser system can be obtained by different methods.
本發明另提出一高功率光纖雷射系統，主要系統架構包含了：光纖光學系統(fiber optical system)、電源供應模組(power supply)、電控模組(controller)、功率量測裝置(power monitor module)、與輸出傳遞光纖(delivery fiber)和輸出準直鏡(QBH)等，本案發明的功率量測裝置的使用方法為，使用光合束器元件，將光纖光學系統分出一道雷射訊號光，將此雷射訊號光，連接至功率量測裝置，藉由建立輸出功率與功率量測裝置所獲得的關係後，所偵測到的光訊號值經由換算，即可對應實際輸出功率，功率量測裝置所偵測到的強度，可即時回饋至電控裝置，達到即時補償與調整操作電流，以達到穩定的輸出功率；此外，如有異常大的光訊號變化量，表明系統有異常，藉由回饋至雷射系統之電控裝置，即時切斷電源，以達到保護高功率光纖雷射系統的目的。 The invention further provides a high power fiber laser system. The main system architecture comprises: a fiber optical system, a power supply module, an electric control module, and a power measuring device. Monitor module), and output delivery fiber and output collimator (QBH), etc., the power measuring device of the present invention is used by using a light combiner element to separate a laser signal from a fiber optic system. Light, the laser signal is connected to the power measuring device. After establishing the relationship between the output power and the power measuring device, the detected optical signal value can be converted to the actual output power. The intensity detected by the power measuring device can be immediately fed back to the electronic control device to instantly compensate and adjust the operating current to achieve stable output power. In addition, if there is an abnormally large amount of optical signal change, the system is abnormal. By switching back to the electronic control device of the laser system, the power supply is cut off immediately to achieve the purpose of protecting the high power fiber laser system.
實施例一 Embodiment 1
請參閱第一圖，為本發明一種用於雷射系統的功率量測裝置示意圖。如圖一所示，本發明所提供一種用於雷射系統的功 率量測裝置，包括：一回饋雷射光單元110，其係用以提供一回饋雷射光111，其中，該回饋雷射光單元110係包含一回饋雷射光訊號輸入接頭112及一回饋雷射光訊號埠113，該饋雷射光訊號埠113於本實施例中係為一光纖合束器；一光衰減元件120，設置於該回饋雷射光單元110前方，其係具有一針孔結構121，其中，該光衰減元件係以金屬或陶瓷材料所構成，該針孔結構的形狀可以是任何幾何形狀，例如：圓形、正方形、長方形等，而本實施例中，該針孔結構為圓孔結構，其直徑範圍為50微米(μm)至2釐米(mm)；一光偵測元件130，設置於該光衰減元件120後方，其係用以接收通過該針孔結構121的回饋雷射光111，其中光偵測元件130與針孔結構121組合可為多組組合，例如：1至3組，可分別量測回饋的輸出雷射訊號源、回饋的泵浦雷射光源、和非線性訊號等；一訊號調整單元140，設置於該光衰減元件120及光偵測元件130下方，其係用以調整該光偵測元件130接收該回饋雷射光111的位置，其中，該訊號調整單元140係包含一位移溝槽141及一固定鈕142，該位移溝槽141為若為直線型，可提供一維位移方向，位移溝槽141若為L型，則可提供1個或2個可調位移方向；於本實施例中，更包含一固定底板150，其中，該光衰減元件120、光偵測元件130及訊號調整單元140係設置於該固定底板150上。 Please refer to the first figure, which is a schematic diagram of a power measuring device for a laser system according to the present invention. As shown in FIG. 1 , the present invention provides a power measuring device for a laser system, comprising: a feedback laser light unit 110 for providing a feedback laser light 111, wherein the feedback laser light unit 110 The device includes a feedback laser signal input connector 112 and a feedback laser signal 埠 113. The laser light signal 埠 113 is a fiber combiner in this embodiment; an optical attenuation component 120 is disposed on the feedback lightning The front of the light-emitting unit 110 has a pinhole structure 121, wherein the light-attenuating element is made of a metal or ceramic material, and the shape of the pinhole structure can be any geometric shape, such as a circle, a square, a rectangle, etc. In this embodiment, the pinhole structure is a circular hole structure having a diameter ranging from 50 micrometers (μm) to 2 centimeters (mm); a light detecting component 130 is disposed behind the light attenuating component 120. For receiving the feedback laser light 111 passing through the pinhole structure 121, the light detecting component 130 and the pinhole structure 121 may be combined in multiple groups, for example, 1 to 3 groups, and the output laser signals can be respectively measured and fed back. Source, feedback a laser light source, a non-linear signal, and the like; a signal adjustment unit 140 disposed under the light attenuation component 120 and the light detecting component 130 for adjusting the light detecting component 130 to receive the feedback laser light 111 The position adjustment unit 140 includes a displacement groove 141 and a fixed button 142. The displacement groove 141 is a linear type, and provides a one-dimensional displacement direction. If the displacement groove 141 is an L-shape, The one or two adjustable displacement directions are provided. In this embodiment, the fixed bottom plate 150 is further disposed on the fixed bottom plate. The light attenuating element 120, the light detecting component 130, and the signal adjusting unit 140 are disposed on the fixed bottom plate. 150 on.
實施例二 Embodiment 2
請參閱第二圖，為本發明一種高功率光纖雷射系統示意圖。如圖一所示，本發明所提供一種高功率光纖雷射系統，包括：一光纖光學系統210，其係用以產生一雷射光，其中該光纖光 學系統210包含一雷射二極體模組211及一光纖模組212；一電源供應模組220，電性相連該光纖光學系統210，其係用以提供電源；一電控模組230，其係用以控制該電源供應模組220所輸出的電壓；一如請求項1所述之功率量測裝置240，電性相連該電控模組230，其係用以量測該光纖光學系統210回饋而來的雷射光；其中，光纖光學系統210利用回饋雷射光單元，將產生的雷射光回饋傳輸給功率量測裝置240，而該功率量測裝置240再將量測到的雷射光強度傳輸給該電控模組230，最後該電控模組230再利用該功率量測裝置240所量測到的雷射光強度，控制該電源供應模組200所輸出的電壓大小，以調整該光纖光學系統210所產生的雷射光強度。 Please refer to the second figure, which is a schematic diagram of a high power fiber laser system according to the present invention. As shown in FIG. 1 , the present invention provides a high power fiber laser system, comprising: a fiber optic system 210 for generating a laser light, wherein the fiber optics system 210 includes a laser diode module. 211 and a fiber optic module 212; a power supply module 220 electrically connected to the fiber optic system 210 for providing power; an electronic control module 230 for controlling the power supply module 220 The power measuring device 240 is electrically connected to the electronic control module 230 for measuring the laser light fed back by the optical fiber system 210; wherein, the optical fiber is optically optical. The system 210 uses the feedback laser light unit to transmit the generated laser light feedback to the power measuring device 240, and the power measuring device 240 transmits the measured laser light intensity to the electronic control module 230, and finally the power The control module 230 then uses the intensity of the laser light measured by the power measuring device 240 to control the magnitude of the voltage output by the power supply module 200 to adjust the intensity of the laser light generated by the optical fiber system 210.
請參閱第三圖，為本發明一種應用功率量測裝置量測光偵測元件電壓與實驗輸出功率關係圖。如圖所示，圖當中的點-實線為量測曲線，虛線則為擬合曲線，其中，實施例設計的金屬針孔結構(光衰減元件)參數如下：光衰減元件材質為鋁，寬度和厚度分別為18mm和5mm，針孔結構直徑大小約為2mm，光偵測元件與金屬針孔結構貼付結合，且光偵測元件小於光衰減元件，只接收經過針孔結構的雷射光；光衰減元件及光偵測元件裝置於同樣為鋁製的訊號調整單元，訊號調整單元的機構具有一維位移方向，調適與校正量測數據，可令所偵測到的光訊號在線性範圍內，如圖3所示，當高功率光纖雷射系統輸出功率為460W時，光偵測元件量測值 為2.5V，線性度為0.98，顯示出藉由訊號調整單元的一維方向位移的調整，本實施例可應用在不同輸出功率的雷射系統上。 Please refer to the third figure, which is a diagram showing the relationship between the voltage of the photodetecting element and the experimental output power of the power measuring device according to the present invention. As shown in the figure, the point-solid line in the figure is the measurement curve, and the dotted line is the fitting curve. The parameters of the metal pinhole structure (light attenuating element) designed in the embodiment are as follows: the light attenuating element is made of aluminum, and the width is And the thickness is 18mm and 5mm respectively, the diameter of the pinhole structure is about 2mm, the light detecting component is combined with the metal pinhole structure, and the light detecting component is smaller than the light attenuating component, and only receives the laser light passing through the pinhole structure; The attenuating component and the photodetecting component are also arranged in an aluminum signal adjusting unit. The signal adjusting unit has a one-dimensional displacement direction, and the measuring and correcting measurement data can make the detected optical signal in a linear range. As shown in FIG. 3, when the output power of the high-power fiber laser system is 460 W, the photodetection component has a measured value of 2.5 V and a linearity of 0.98, which shows the adjustment of the one-dimensional displacement by the signal adjustment unit. This embodiment can be applied to laser systems of different output powers.
上述之實施例僅為例示性說明本創作之特點及功效，非用以限制本創作之實質技術內容的範圍。任何熟悉此技藝之人士均可在不違背創作之精神及範疇下，對上述實施例進行修飾與變化。因此，本創作之權利保護範圍，應如後述之申請專利範圍所列。 The above-described embodiments are merely illustrative of the features and functions of the present invention and are not intended to limit the scope of the technical content of the present invention. Any person skilled in the art can modify and change the above embodiments without departing from the spirit and scope of the creation. Therefore, the scope of protection of this creation should be as listed in the scope of the patent application described later.
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