TW201714685A - Spherical metal powder and manufacturing method thereof and manufacturing apparatus thereof capable of allowing the fine metal particles to converge into a spherical shape in a relatively long time to achieve the purpose of improving the metal powder roundness - Google Patents
Spherical metal powder and manufacturing method thereof and manufacturing apparatus thereof capable of allowing the fine metal particles to converge into a spherical shape in a relatively long time to achieve the purpose of improving the metal powder roundness Download PDFInfo
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本發明係與金屬粉末製造技術有關，主要揭露一種相對具有較佳圓率的圓球形金屬粉末，以及與其相關的圓球形粉末製造方法及圓球形粉末製造設備。The present invention relates to a metal powder manufacturing technique, and mainly discloses a spherical metal powder having a relatively good circular ratio, and a method for producing a spherical powder and a spherical spherical powder manufacturing apparatus therefor.
近年來，隨著金屬射出成型、金屬熱噴塗、金屬快速成型、金屬積層製造(3D列印)等技術發展越趨成熟，使得金屬粉末在電子、資訊、冶金、能源、宇航等領域之應用範圍日益擴大；相對的，對於金屬粉末的細微性、純淨度、形貌等方面的性能要求亦逐漸提高。In recent years, with the development of metal injection molding, metal thermal spraying, metal rapid prototyping, metal laminate manufacturing (3D printing) and other technologies, the application of metal powder in electronics, information, metallurgy, energy, aerospace and other fields Increasingly, the performance requirements for the fineness, purity, and morphology of metal powders are gradually increasing.
再者，金屬粉末當中之金屬顆粒外型對於其後續所之成品應用，實有舉足輕重之影響；例如，錫粉的圓率提高，在製成錫膏後可提高其印刷性，以及在金屬積層製造(3D列印)鋪上金屬粉末時，若提高金屬粉末之圓率將可增加金屬粉末之移動性，從而改善金屬粉末平鋪後的平整度。Furthermore, the appearance of the metal particles in the metal powder has an important influence on the subsequent application of the finished product; for example, the roundness of the tin powder is increased, the printability is improved after the solder paste is formed, and the metal layer is laminated. When manufacturing (3D printing) metal powder, if the roundness of the metal powder is increased, the mobility of the metal powder can be increased, thereby improving the flatness of the metal powder after tiling.
根據國際電子工業聯接協會(IPC)正式出版之J-STD-005(焊膏要求)標準，球形粉末有兩個必要條件；其一為90%以上的顆粒，其最長軸與最短軸的最大比率為1.5，若比率大於1.5則判定為非球形粉末；其二為90%以上的顆粒，其圓率(roundness)介於1~1.07之間（圓率為1時是正圓），若大於1.07則判定為非球形粉末。According to the J-STD-005 (solder paste requirements) standard officially published by the International Electronics Industry Association (IPC), spherical powder has two requirements; one is more than 90% of the particles, and the maximum ratio of the longest axis to the shortest axis 1.5, if the ratio is greater than 1.5, it is judged to be a non-spherical powder; the second is 90% or more of particles, and the roundness is between 1 and 1.07 (round circle is 1 is a perfect circle), if greater than 1.07 It was judged to be a non-spherical powder.
至於，一般對於金屬粉末最長軸與最短軸比率及圓率的量測方法，係將金屬粉末當中之金屬顆粒送入掃描式電子顯微鏡觀察，然後將觀察影像輸出再以圖像計算軟體分析，將得到的每顆金屬顆粒的最長軸長度，最短軸長度，圓周長及面積，然後分別套入公式計算出最長軸與最短軸比率及圓率。As for the measurement method of the ratio of the longest axis to the shortest axis of the metal powder and the roundness, the metal particles in the metal powder are sent to a scanning electron microscope for observation, and then the output of the observed image is analyzed by software for image calculation. The longest axis length, the shortest axis length, the circumference length and the area of each metal particle obtained are then nested into the formula to calculate the ratio of the longest axis to the shortest axis and the circular ratio.
在眾多金屬粉末製造工法當中，氣霧化法應可算是目前金屬粉末備製技術的主流，使用氣霧化法生產金屬或合金粉末，主要係利用高速氣流將金屬液滴細化，並使其凝固成粉粒；在目前既有習知使用氣霧化法備製金屬粉末之技術中，多係先將固體金屬原料加熱熔化成液態後，再將其以液滴型態導入一可受超音波氣流作用之霧化腔室中。Among the many metal powder manufacturing methods, the gas atomization method should be regarded as the mainstream of the current metal powder preparation technology. The gas atomization method is used to produce metal or alloy powder, mainly by using high-speed gas flow to refine the metal droplets and make it Solidification into powder particles; in the current technology of preparing metal powder by gas atomization method, the multi-system first heats the solid metal material into a liquid state, and then introduces it into a droplet type The sonic flow acts in the atomization chamber.
由於其熔融液態金屬呈現液滴型態時，已經有大部分的熱能流失，因此在其金屬液滴再經細化之後的凝固過程中，相對無法有足夠的溫度及時間令其收斂成球形，導致其所形成之金屬粉末普遍存在混雜少數球形金屬顆粒及多數橢圓形金屬顆粒之粒度不均的現象。Since the molten liquid metal exhibits a droplet type, most of the heat energy has been lost. Therefore, during the solidification process after the metal droplet is refined, relatively insufficient temperature and time are allowed to converge into a spherical shape. The metal powder formed by it generally has a phenomenon in which a small number of spherical metal particles and a plurality of elliptical metal particles are uneven in particle size.
然而，目前業界針對使用氣霧化法備製金屬粉末之技術改良，仍著重在如何提升金屬粉末之霧化效率，且多普遍認為控制超音波氣流噴嘴之結構設計成為金屬粉末霧化之關鍵技術，至於有關如何提高金屬粉末圓率之技術則鮮少被揭露。However, at present, the technical improvement of the preparation of metal powder by gas atomization method is still focused on how to improve the atomization efficiency of metal powder, and it is generally believed that the structural design of controlling the ultrasonic gas jet nozzle becomes the key technology of metal powder atomization. As for the technology on how to increase the roundness of metal powder, it is rarely revealed.
有鑑於此，本發明即在揭露一種相對具有較佳圓率的圓球形金屬粉末，以及與其相關的圓球形粉末製造方法及圓球形粉末製造設備，為其主要目的者。In view of the above, the present invention is to disclose a spherical metal powder having a relatively good circular ratio, and a method for producing a spherical powder and a spherical spherical powder manufacturing apparatus therefor, which are the main objects thereof.
為了達到上述目的，本發明所揭露之圓球形粉末製造方法，係利用電弧放電之熱能將至少一被送入電弧放電區域之金屬原料加熱熔解形成金屬液，且由具有預先設定動能之氣流作用於電弧放電區域，對該至少一金屬原料所熔解的金屬液立即施予第一次霧化使其形成複數微細的金屬液滴，同時再以至少一電漿噴流作用於經第一次霧化所形成之金屬液滴，使其再次霧化成為複數細微金屬顆粒，待全數微細金屬顆粒冷卻定型即完成圓球形金屬粉末之製造。In order to achieve the above object, the method for manufacturing a spherical powder disclosed in the present invention utilizes thermal energy of arc discharge to heat-melt at least one metal material fed into an arc discharge region to form a molten metal, and is acted upon by a gas stream having a predetermined kinetic energy. In the arc discharge region, the molten metal melted by the at least one metal material is immediately subjected to a first atomization to form a plurality of fine metal droplets, and at the same time, at least one plasma jet is applied to the first atomization chamber. The formed metal droplets are atomized again into a plurality of fine metal particles, and the preparation of the spherical metal powder is completed after the cooling and shaping of all the fine metal particles.
利用上述技術特徵，本發明所揭露之圓球形粉末製造方法，主要在金屬原料受熱熔解成金屬液之瞬間即對其施予第一次霧化形成複數金屬液滴，以降低金屬液滴之熱能損失，接著由電漿噴流對金屬液滴施予第二次霧化形成複數細微金屬顆粒，且由電漿噴流提供足夠的溫度，讓細微金屬顆粒得以有相對較長的時間收歛成球形，以達到提高金屬粉末圓率之目的。According to the above technical feature, the method for manufacturing a spherical powder disclosed in the present invention mainly applies a first atomization to form a plurality of metal droplets at a moment when the metal raw material is melted into a molten metal to reduce the thermal energy of the metal droplets. Loss, followed by a second atomization of the metal droplets by the plasma jet to form a plurality of fine metal particles, and the plasma jet provides sufficient temperature to allow the fine metal particles to converge into a spherical shape for a relatively long period of time. To achieve the purpose of increasing the roundness of metal powder.
依據上述技術特徵，所述圓球形粉末製造方法係在一封閉狀的腔室內進行電弧放電、第一次霧化及第二次霧化。According to the above technical feature, the method for manufacturing a spherical powder is to perform arc discharge, first atomization, and second atomization in a closed chamber.
依據上述技術特徵，所述圓球形粉末製造方法，係以該至少一金屬原料做為進行電弧放電之電極。According to the above technical feature, the method for producing a spherical powder is to use the at least one metal material as an electrode for performing arc discharge.
依據上述技術特徵，所述圓球形粉末製造方法係以該至少一金屬原料做為進行電弧放電之電極，以及在一封閉狀的腔室內進行電弧放電、第一次霧化及第二次霧化。According to the above technical feature, the method for manufacturing a spherical powder is to use the at least one metal material as an electrode for performing arc discharge, and performing arc discharge, first atomization, and second atomization in a closed chamber. .
所述至少一金屬原料係可以為鈦、錫、銅、鋅、鋁、金、銀、鐵、鎳其中之一或其合金。The at least one metal raw material may be one of titanium, tin, copper, zinc, aluminum, gold, silver, iron, nickel or an alloy thereof.
所述至少一金屬原料係為具預先設定線徑的線金屬原料。The at least one metal raw material is a wire metal raw material having a predetermined wire diameter.
所述至少一金屬原料係為具預先設定線徑的棒金屬原料。The at least one metal raw material is a rod metal raw material having a predetermined wire diameter.
所述作用於電弧放電區域之氣流，係可以為空氣、氧氣、氮氣、氬氣、氦氣、氫氧、一氧化碳、二氧化碳其中之一，或其組合。The gas stream acting on the arc discharge region may be one of air, oxygen, nitrogen, argon, helium, hydrogen, carbon monoxide, carbon dioxide, or a combination thereof.
所述電弧放電區域之工作溫度係介於1000℃至6000℃之間。The operating temperature of the arc discharge zone is between 1000 ° C and 6000 ° C.
所述至少一電漿噴流之工作溫度係介於1000℃至10000℃之間。The operating temperature of the at least one plasma jet is between 1000 ° C and 10000 ° C.
所述金屬液滴之平均粒徑介係於100~500μm之間。The average particle diameter of the metal droplets is between 100 and 500 μm.
所述微細金屬顆粒之平均粒徑係小於100μm。The fine metal particles have an average particle diameter of less than 100 μm.
所述圓球形粉末製造方法，係分別以兩條直徑1.6mm的銅線金屬原料做為產生電弧放電作用的電極，於對該腔室抽真空至＜1×10-3 Pa之後通入低於0.12~0.15MPa的氮氣，通以120A之電流使兩條直徑1.6mm的銅線金屬原料產生電弧放電，將兩條直徑1.6mm的銅線金屬原料加熱溶解產生金屬液，同時以進氣壓力0.5MPa送入氮氣形成作用於電弧放電區域的氣流，將兩條直徑1.6mm的銅線金屬原料受熱熔解之銅金屬液施予第一次霧化使其形成複數微細的銅金屬液滴，接著以三組功率各為25kW，進氣壓力各為0.5MPa之電漿火炬所產生的電漿噴流作用於經第一次霧化所形成之銅金屬液滴，使其再次霧化成為複數細微銅金屬顆粒。The method for manufacturing the spherical powder is to use two copper wire metal materials having a diameter of 1.6 mm as an electrode for generating an arc discharge, and to pass under vacuum after the chamber is evacuated to <1×10 −3 Pa. 0.12~0.15MPa of nitrogen gas is used to generate two arc wires of 1.6mm copper wire metal material by arc current, and two copper wire metal materials with a diameter of 1.6mm are heated and dissolved to produce metal liquid, and the inlet pressure is 0.5. MPa is fed with nitrogen to form a gas flow acting on the arc discharge region, and two copper metal materials having a diameter of 1.6 mm are thermally melted and subjected to a first atomization to form a plurality of fine copper metal droplets, followed by The three groups of power are each 25kW, and the plasma jet generated by the plasma torch with the inlet pressure of 0.5MPa acts on the copper metal droplet formed by the first atomization, causing it to be atomized again into a plurality of fine copper metal. Particles.
所述圓球形粉末製造方法，係分別以兩條直徑1.6mm的鈦線金屬原料做為產生電弧放電作用的電極，於對該腔室抽真空至＜1×10-3 Pa之後通入低於0.12~0.15MPa的氮氣，通以150A之電流使兩條直徑1.6mm的鈦線金屬原料產生電弧放電，將兩條直徑1.6mm的鈦線金屬原料加熱溶解產生金屬液，同時以進氣壓力0.5MPa送入氬氣形成作用於電弧放電區域的氣流，將兩條直徑1.6mm的鈦線金屬原料受熱熔解之金屬液施予第一次霧化使其形成複數微細的鈦金屬液滴，接著以三組功率各為25kW，進氣壓力各為0.5MPa之電漿火炬所產生的電漿噴流作用於經第一次霧化所形成之鈦金屬液滴，使其再次霧化成為複數細微鈦金屬顆粒。The method for manufacturing the spherical powder is to use two titanium wire metal materials having a diameter of 1.6 mm as an electrode for generating an arc discharge, and the inlet is lower than after the chamber is evacuated to <1×10 -3 Pa. 0.12~0.15MPa of nitrogen gas, through the current of 150A, two 1.6mm diameter titanium wire metal materials are arc-discharged, and two 1.6mm diameter titanium wire metal materials are heated and dissolved to produce molten metal, and the inlet pressure is 0.5. MPa is fed with argon to form a gas flow acting on the arc discharge region, and two metal liquids of 1.6 mm diameter of the titanium wire metal material are subjected to a first atomization to form a plurality of fine titanium metal droplets, followed by The three groups of power are each 25kW, and the plasma jet generated by the plasma torch with an inlet pressure of 0.5MPa acts on the titanium metal droplet formed by the first atomization, causing it to be atomized again into a plurality of fine titanium metal. Particles.
所述圓球形粉末製造方法，係分別以兩條直徑2.0mm的錫合金線金屬原料做為產生電弧放電作用的電極，於對該腔室抽真空至＜1×10-3 Pa之後通入低於0.12~0.15MPa的氮氣，通以110A之電流使兩條錫合金線金屬原料產生電弧放電，將兩條錫合金線金屬原料加熱溶解產生金屬液，同時以進氣壓力0.3MPa送入氮氣形成作用於電弧放電區域的氣流，將兩條錫合金線金屬原料受熱熔解之錫合金金屬液施予第一次霧化使其形成複數微細的錫合金金屬液滴，接著以三組功率各為20kW，進氣壓力各為0.4MPa之電漿火炬所產生的電漿噴流作用於經第一次霧化所形成之錫合金金屬液滴，使其再次霧化成為複數細微錫合金金屬顆粒。The method for manufacturing the spherical powder is to use two tin alloy wire metal materials with a diameter of 2.0 mm as an electrode for generating an arc discharge, and to pass the vacuum to the chamber after <1×10 -3 Pa. The nitrogen gas of 0.12~0.15MPa is used to generate arc discharge of the two tin alloy wire metal materials by the current of 110A, and the two tin alloy wire metal materials are heated and dissolved to produce the metal liquid, and the nitrogen gas is formed by the inlet pressure of 0.3 MPa. The gas flow acting on the arc discharge region applies the tin alloy metal liquid which is thermally melted to the two tin alloy wire metal materials to the first atomization to form a plurality of fine tin alloy metal droplets, and then each of the three sets of power is 20 kW. The plasma jet generated by the plasma torch with an inlet pressure of 0.4 MPa acts on the tin alloy metal droplet formed by the first atomization, and is atomized again into a plurality of fine tin alloy metal particles.
上述錫合金線金屬原料，係為錫-銀-銅合金線。The tin alloy wire metal raw material is a tin-silver-copper alloy wire.
本發明所揭露之圓球形金屬粉末製造設備，係在一腔室內設置有：一電弧加熱單元、一第一霧化單元，以及一第二霧化單元；其中：該電弧加熱單元，係供連接用以產生電弧放電的正、負電荷，且供承接至少一金屬原料做為用以產生電弧放電之電極，由電極通電之後產生將該至少一金屬原料加熱溶解成金屬液的電弧；該第一霧化單元，係供將具有預先設定動能之氣流作用於該電弧加熱單元之電弧放電區域，對該至少一金屬原料受熱熔解之金屬液施予第一次霧化形成複數金屬液滴；該第二霧化單元，係以電漿噴流作用於該第一霧化單元之第一次霧化所形成之金屬液滴，使經第一次霧化所形成之金屬液滴再次霧化成為複數細微金屬顆粒。The apparatus for manufacturing a spherical metal powder disclosed in the present invention is provided in a chamber: an arc heating unit, a first atomizing unit, and a second atomizing unit; wherein: the arc heating unit is for connection And an anode for generating an arc discharge, and for receiving at least one metal material as an electrode for generating an arc discharge, and generating an arc for heating and dissolving the at least one metal material into a molten metal after the electrode is energized; The atomization unit is configured to apply a gas stream having a predetermined kinetic energy to an arc discharge region of the arc heating unit, and apply a first atomization to the metal liquid heated and melted by the at least one metal material to form a plurality of metal droplets; The second atomization unit is a metal droplet formed by the first atomization of the first atomization unit by a plasma jet, so that the metal droplet formed by the first atomization is atomized again into a plurality of fine particles. Metal particles.
依據上述結構特徵，所述電弧加熱單元，係設有兩組供分別連接正、負電荷的電極，且另設有兩組將各電極所連接之電荷引導進入電弧放電區域的支架。According to the above structural features, the arc heating unit is provided with two sets of electrodes for respectively connecting positive and negative charges, and two sets of brackets for guiding the electric charges connected to the electrodes into the arc discharge area.
依據上述結構特徵，所述第一霧化單元，係設有至少一組將具預定動能之氣流作用於電弧放電區域的噴嘴。According to the above structural feature, the first atomizing unit is provided with at least one set of nozzles for applying a gas stream having a predetermined kinetic energy to the arc discharge region.
依據上述結構特徵，所述第二霧化單元，係設有至少一供於通電後產生電漿噴流的電漿火炬，該至少一電漿火炬係被設定令其所產生之電漿噴流作用於該第一霧化單元之氣流通過電弧放電區域之後的行程處。According to the above structural feature, the second atomizing unit is provided with at least one plasma torch for generating a plasma jet after energization, and the at least one plasma torch is set to cause the plasma jet generated by the plasma atomizing device to act on The gas flow of the first atomizing unit passes through the stroke after the arc discharge region.
依據上述結構特徵，所述電弧加熱單元，係設有兩組供分別連接正、負電荷的電極，且另設有兩組將各電極所連接之電荷引導進入電弧放電區域的支架；該第一霧化單元，係設有至少一組將具預定動能之氣流作用於電弧放電區域的噴嘴；該第二霧化單元，係設有至少一供於通電後產生電漿噴流的電漿火炬，該至少一電漿火炬係被設定令其所產生之電漿噴流作用於該第一霧化單元之氣流通過電弧放電區域之後的行程處。According to the above structural feature, the arc heating unit is provided with two sets of electrodes for respectively connecting positive and negative charges, and two sets of brackets for guiding the electric charges connected to the electrodes into the arc discharge area; The atomizing unit is provided with at least one set of nozzles for applying a predetermined kinetic energy to the arc discharge area; the second atomizing unit is provided with at least one plasma torch for generating a plasma jet after being energized, At least one of the plasma torches is configured such that the plasma jet produced thereby acts on the stroke of the first atomizing unit after the gas stream passes through the arcing region.
所述圓球形金屬粉末製造設備，係進一步包括一可供承接至少一條金屬原料，且將所承接之金屬原料朝該電弧放電區域推進的進料單元。The spherical metal powder manufacturing apparatus further includes a feeding unit for receiving at least one metal material and advancing the metal material to be taken toward the arc discharge region.
所述圓球形金屬粉末製造設備，係進一步包括一可供承接至少一條金屬原料，且將所承接之金屬原料朝該電弧放電區域推進的進料單元；所述電弧加熱單元之各支架係設有一可供金屬原料穿過的通道；該進料單元係分別與各支架對應設有至少兩個供與金屬原料接觸的傳送輪。The spherical metal powder manufacturing apparatus further includes a feeding unit capable of receiving at least one metal raw material and advancing the metal raw material received toward the arc discharge area; each of the brackets of the arc heating unit is provided with a The passage for the metal raw material to pass through; the feeding unit is respectively provided with at least two transfer wheels for contacting the metal raw materials corresponding to the respective brackets.
所述圓球形金屬粉末製造設備，係進一步包括一可供承接至少一條金屬原料，且將所承接之金屬原料朝該電弧放電區域推進的進料單元；該電弧加熱單元係於其中一組支架設有一可供金屬原料穿過的通道；該進料單元係與設有通道之支架對應設有至少兩個供與金屬原料接觸的傳送輪。The spherical metal powder manufacturing apparatus further includes a feeding unit capable of receiving at least one metal raw material and advancing the metal raw material received toward the arc discharge region; the arc heating unit is disposed in one of the brackets There is a passage for the metal material to pass through; the feeding unit is provided with at least two transfer wheels for contacting the metal material corresponding to the bracket provided with the passage.
所述第一霧化單元之至少一噴嘴係設於該電弧加熱單元之兩組支架中間。At least one nozzle of the first atomizing unit is disposed between the two sets of brackets of the arc heating unit.
所述第一霧化單元之至少一噴嘴係設於該電弧加熱單元之兩組支架外圍。At least one nozzle of the first atomizing unit is disposed at a periphery of two sets of brackets of the arc heating unit.
所述第二霧化單元之至少一電漿火炬係設於該電弧加熱單元之兩組支架外圍。At least one plasma torch of the second atomizing unit is disposed at a periphery of two sets of brackets of the arc heating unit.
本發明所揭露之圓球形金屬粉末，係為依據上揭各種可能實施之圓球形粉末製造方法所製造完成之圓球形金屬粉末，該圓球形金屬粉末係具有複數細微金屬顆粒，其全數微細金屬顆粒之平均粒徑係小於100μm，且有92%以上之微細金屬顆粒之圓率介於1~1.07之間，且有92%以上之微細金屬顆粒之最長軸與最短軸比率小於1.5。The spherical metal powder disclosed in the present invention is a spherical metal powder which is manufactured according to various possible methods for producing a spherical powder, and the spherical metal powder has a plurality of fine metal particles, and all of the fine metal particles thereof The average particle diameter is less than 100 μm, and 92% or more of the fine metal particles have a circular ratio of 1 to 1.07, and 92% or more of the fine metal particles have a ratio of the longest axis to the shortest axis of less than 1.5.
本發明所揭露之圓球形金屬粉末，係為依據上揭各種可能實施之圓球形粉末製造設備所製造完成之圓球形金屬粉末，該圓球形金屬粉末係具有複數細微金屬顆粒，其全數微細金屬顆粒之平均粒徑係小於100μm，且有92%以上之微細金屬顆粒之圓率介於1~1.07之間，且有92%以上之微細金屬顆粒之最長軸與最短軸比率小於1.5。The spherical metal powder disclosed in the present invention is a spherical metal powder which is manufactured according to various possible spherical spherical powder manufacturing apparatuses, and the spherical metal powder has a plurality of fine metal particles, and all of the fine metal particles thereof The average particle diameter is less than 100 μm, and 92% or more of the fine metal particles have a circular ratio of 1 to 1.07, and 92% or more of the fine metal particles have a ratio of the longest axis to the shortest axis of less than 1.5.
所述圓球形金屬粉末係具有複數微細銅金屬顆粒，其全數微細銅金屬顆粒之平均粒徑係介於30~50μm之間，有96%以上之微細銅金屬顆粒之圓率小於1.5，且有95%以上之微細銅金屬顆粒之圓率介於1~1.07之間。The spherical metal powder has a plurality of fine copper metal particles, and the average particle diameter of all the fine copper metal particles is between 30 and 50 μm, and more than 96% of the fine copper metal particles have a circularity of less than 1.5, and More than 95% of the fine copper metal particles have a roundness between 1 and 1.07.
所述圓球形金屬粉末係具有複數微細鈦金屬顆粒，其全數微細鈦金屬顆粒之平均粒徑係介於15~30μm之間，有97%以上之微細鈦金屬顆粒之圓率小於1.5，且有94%以上之微細鈦金屬顆粒之圓率介於1~1.07之間。The spherical metal powder has a plurality of fine titanium metal particles, and the average particle diameter of all the fine titanium metal particles is between 15 and 30 μm, and more than 97% of the fine titanium metal particles have a circularity of less than 1.5, and More than 94% of the fine titanium metal particles have a roundness between 1 and 1.07.
所述圓球形金屬粉末係具有複數微細錫合金金屬顆粒，其全數微細錫合金金屬顆粒之平均粒徑係介於25~45μm之間，有95%以上之微細錫合金金屬顆粒之圓率小於1.5，且有92%以上之微細錫合金金屬顆粒之圓率介於1~1.07之間。The spherical metal powder has a plurality of fine tin alloy metal particles, and the average particle diameter of all the fine tin alloy metal particles is between 25 and 45 μm, and more than 95% of the fine tin alloy metal particles have a circularity of less than 1.5. And more than 92% of the fine tin alloy metal particles have a roundness between 1 and 1.07.
上述微細錫合金金屬顆粒，係為錫-銀-銅合金金屬顆粒。The above fine tin alloy metal particles are tin-silver-copper alloy metal particles.
由於，本發明主要在金屬原料受熱熔解成金屬液之瞬間，即以氣流對其施予第一次霧化形成複數金屬液滴，接著再以電漿噴流再對金屬液滴施予第二次霧化形成複數細微金屬顆粒，不但可以有效降低金屬液滴之熱能損失，更可由電漿噴流提供足夠的溫度，讓細微金屬顆粒得以有相對較長的時間收歛成球形，達到提高金屬粉末圓率之目的；尤其，受電弧加熱熔解的金屬液在依序經過第一次霧化及第二次霧化之後，可以有效提高細微金屬顆粒之分布率，以相對更為積極、可靠之手段提升圓球形金屬粉末之產能及品質。Since the present invention mainly applies a first atomization of a metal material to a molten metal to form a plurality of metal droplets, and then applies a plasma jet to the metal droplet for a second time. Atomization to form a plurality of fine metal particles can not only effectively reduce the thermal energy loss of the metal droplets, but also provide sufficient temperature by the plasma jet to allow the fine metal particles to converge into a spherical shape for a relatively long period of time, thereby increasing the roundness of the metal powder. The purpose; in particular, the metal liquid melted by the arc heating can effectively increase the distribution rate of the fine metal particles after the first atomization and the second atomization, and the circle is relatively more positive and reliable. The production capacity and quality of spherical metal powder.
本發明所揭露之圓球形粉末製造方法，係利用電弧放電之熱能將至少一被送入電弧放電區域之金屬原料加熱熔解形成金屬液，且由具有預先設定動能之氣流作用於電弧放電區域，對該至少一金屬原料所熔解的金屬液立即施予第一次霧化使其形成複數微細的金屬液滴，同時再以至少一電漿噴流作用於經第一次霧化所形成之金屬液滴，使其再次霧化成為複數細微金屬顆粒，待全數微細金屬顆粒冷卻定型即完成如第1圖所示之具有複數細微金屬顆粒之圓球形金屬粉末10A之製造流程。The method for manufacturing a spherical powder disclosed in the present invention is to use a thermal energy of arc discharge to heat and melt at least one metal material fed into an arc discharge region to form a molten metal, and a gas stream having a predetermined kinetic energy acts on the arc discharge region, The molten metal melted by the at least one metal material is immediately subjected to a first atomization to form a plurality of fine metal droplets, and at the same time, at least one plasma jet is applied to the metal droplets formed by the first atomization. Then, it is atomized again into a plurality of fine metal particles, and the entire micro-fine metal particles are cooled and shaped to complete the manufacturing process of the spherical metal powder 10A having a plurality of fine metal particles as shown in FIG.
具體而言，本發明所揭露之圓球形粉末製造方法，主要在金屬原料受熱熔解成金屬液之瞬間即對其施予第一次霧化形成複數金屬液滴，以降低金屬液滴之熱能損失，其全數金屬液滴之平均粒徑係可介於100~500μm之間，接著由電漿噴流對金屬液滴施予第二次霧化形成複數細微金屬顆粒，其全數微細金屬顆粒之平均粒徑係可小於100μm，且由電漿噴流提供足夠的溫度，讓細微金屬顆粒得以有相對較長的時間收歛成球形，進而達到提高金屬粉末圓率之目的。Specifically, the method for manufacturing a spherical powder disclosed in the present invention mainly applies a first atomization to form a plurality of metal droplets at a moment when the metal raw material is thermally melted into a molten metal to reduce thermal energy loss of the metal droplets. The average particle size of all the metal droplets may be between 100 and 500 μm, and then the second atomization of the metal droplets by the plasma jet forms a plurality of fine metal particles, and the average particles of all the fine metal particles The diameter system can be less than 100 μm, and the plasma jet provides sufficient temperature to allow the fine metal particles to converge into a spherical shape for a relatively long period of time, thereby achieving the purpose of increasing the roundness of the metal powder.
本發明之圓球形粉末製造方法，於實施時，係可以在一封閉狀的腔室內進行電弧放電、第一次霧化及第二次霧化，其電弧放電區域之工作溫度係可介於1000℃至6000℃之間；其至少一電漿噴流之工作溫度係可介於1000℃至10000℃之間。The method for manufacturing the spherical powder of the present invention can be subjected to arc discharge, first atomization and second atomization in a closed chamber, and the working temperature of the arc discharge region can be 1000. Between °C and 6000 °C; the operating temperature of at least one of the plasma jets may be between 1000 ° C and 10000 ° C.
本發明之圓球形粉末製造方法，於實施時，係可直接以該至少一金屬原料直接做為進行電弧放電之電極；當然，本發明之圓球形粉末製造方法，直接以該至少一金屬原料做為進行電弧放電之電極時，又以在一封閉狀的腔室20內進行電弧放電、第一次霧化及第二次霧化為佳。The method for manufacturing the spherical powder of the present invention can be directly used as the electrode for performing arc discharge directly by using the at least one metal raw material; of course, the method for manufacturing the spherical powder of the present invention directly uses the at least one metal raw material. In order to perform the arc discharge electrode, it is preferable to perform arc discharge, first atomization, and second atomization in a closed chamber 20.
再者，本發明之圓球形粉末製造方法，其所使用之至少一金屬原料係可以為鈦、錫、銅、鋅、鋁、金、銀、鐵、鎳其中之一或其合金；以及，所述至少一金屬原料係為具預先設定線徑的線金屬原料，或是為具預先設定線徑的棒金屬原料；至於，作用於電弧放電區域之氣流，係可以為空氣、氧氣、氮氣、氬氣、氦氣、氫氧、一氧化碳、二氧化碳其中之一，或其組合。Furthermore, in the method for producing a spherical powder of the present invention, at least one metal raw material used may be one of titanium, tin, copper, zinc, aluminum, gold, silver, iron, nickel or an alloy thereof; The at least one metal material is a wire metal material having a predetermined wire diameter, or a bar metal material having a predetermined wire diameter; and the gas flow acting on the arc discharge region may be air, oxygen, nitrogen, or argon. One of gas, helium, hydrogen, carbon monoxide, carbon dioxide, or a combination thereof.
如第2圖及第3圖所示，本發明所揭露之圓球形金屬粉末製造設備，基本上係在一腔室20內設置有：一電弧加熱單元30、一第一霧化單元40，以及一第二霧化單元50；其中：As shown in FIG. 2 and FIG. 3, the apparatus for manufacturing a spherical metal powder disclosed in the present invention is basically provided with a arc heating unit 30, a first atomizing unit 40, and a chamber 20, and a second atomizing unit 50; wherein:
該電弧加熱單元30，係供連接用以產生電弧放電的正、負電荷，且供承接至少一金屬原料10做為用以產生電弧放電之電極，由電極通電之後產生將該至少一金屬原料加熱溶解成金屬液的電弧；於實施時，所述電弧加熱單元30，係可以設有兩組供分別連接正、負電荷的電極31、32，且另設有兩組將各電極所連接之電荷引導進入電弧放電區域30A的支架33；在第2圖及第3圖所示之實施例中，所述電弧加熱單元30之各支架33係進一步設有一可供金屬原料10穿過的通道331。The arc heating unit 30 is configured to connect positive and negative charges for generating an arc discharge, and is configured to receive at least one metal material 10 as an electrode for generating an arc discharge, and the at least one metal material is heated after the electrode is energized. The arc is dissolved into a molten metal; in practice, the arc heating unit 30 may be provided with two sets of electrodes 31 and 32 for respectively connecting positive and negative charges, and two sets of electric charges for connecting the electrodes. The holder 33 leading into the arc discharge region 30A is guided; in the embodiments shown in Figs. 2 and 3, each of the brackets 33 of the arc heating unit 30 is further provided with a passage 331 through which the metal material 10 can pass.
該第一霧化單元40，係供將具有預先設定動能之氣流作用於該電弧加熱單元30之電弧放電區域，對該至少一金屬原料10受熱熔解之金屬液施予第一次霧化形成複數金屬液滴11；於實施時，所述第一霧化單元40，係可以設有至少一組將具預定動能之氣流作用於電弧放電區域30A的噴嘴41，該至少一噴嘴係可設於該電弧加熱單元之兩組支架外圍，或者如圖所示，設於該電弧加熱單元30之兩組支架33中間。The first atomizing unit 40 is configured to apply a gas stream having a predetermined kinetic energy to an arc discharge region of the arc heating unit 30, and apply a first atomization to the molten metal of the at least one metal material 10 to be thermally fused. In the implementation, the first atomizing unit 40 may be provided with at least one set of nozzles 41 for applying a predetermined kinetic energy to the arc discharge region 30A, and the at least one nozzle system may be disposed at the nozzle The two sets of brackets of the arc heating unit, or as shown, are disposed between the two sets of brackets 33 of the arc heating unit 30.
該第二霧化單元50，係以電漿噴流作用於該第一霧化單元40之第一次霧化所形成之金屬液滴11，使經第一次霧化所形成之金屬液滴11再次霧化成為複數細微金屬顆粒12；於實施時，所述第二霧化單元50，係可以設有至少一供於通電後產生電漿噴流的電漿火炬51，該至少一電漿火炬51係被設定令其所產生之電漿噴流作用於該第一霧化單元40之氣流通過電弧放電區域30A之後的行程處；在本實施例中，該至少一電漿火炬51係設於該電弧加熱單元40之兩組支架33外圍。The second atomizing unit 50 is a metal droplet 11 formed by the first atomization of the first atomizing unit 40 by a plasma jet, so that the metal droplet 11 formed by the first atomization is formed. Re-igniting into a plurality of fine metal particles 12; in practice, the second atomizing unit 50 may be provided with at least one plasma torch 51 for generating a plasma jet after energization, the at least one plasma torch 51 The plasma jet generated is configured to act on the stroke of the first atomizing unit 40 after the airflow passes through the arc discharge region 30A; in the embodiment, the at least one plasma torch 51 is disposed in the arc The two sets of brackets 33 of the heating unit 40 are peripheral.
當然，本發明所揭露之圓球形金屬粉末製造設備，於實施時，係以所述電弧加熱單元30，係可以設有兩組供分別連接正、負電荷的電極31、32，且另設有兩組將各電極所連接之電荷引導進入電弧放電區域30A的支架33；該第一霧化單元40，係可以設有至少一組將具預定動能之氣流作用於電弧放電區域30A的噴嘴41；以及，該第二霧化單元50，係可以設有至少一供於通電後產生電漿噴流的電漿火炬51，該至少一電漿火炬51係被設定令其所產生之電漿噴流作用於該第一霧化單元40之氣流通過電弧放電區域30A之後的行程處之結構型態呈現為佳。Of course, the spherical metal powder manufacturing apparatus disclosed in the present invention is implemented by the arc heating unit 30, and two sets of electrodes 31 and 32 for respectively connecting positive and negative charges may be provided, and another The two groups direct the charge connected to each electrode into the holder 33 of the arc discharge area 30A; the first atomization unit 40 may be provided with at least one set of nozzles 41 for applying a predetermined kinetic energy to the arc discharge area 30A; And the second atomizing unit 50 may be provided with at least one plasma torch 51 for generating a plasma jet after being energized, and the at least one plasma torch 51 is set to cause the plasma jet generated by the plasma atomizing nozzle Preferably, the gas flow of the first atomizing unit 40 passes through the structural form at the stroke after the arc discharge region 30A.
原則上，本發明之圓球形粉末製造設備，於運作時，係可將至少一條金屬原料與該電弧加熱單元之其中一電極電氣連接，於電弧加熱單元之全數電極通電之後，配合將金屬原料朝電弧放電區域推進，即可使各電極所連接之電荷進入電弧放電區域，進而產生將金屬原料加熱熔解的電弧。In principle, the spherical spherical powder manufacturing apparatus of the present invention can electrically connect at least one metal raw material to one of the electrodes of the arc heating unit during operation, and after the full electrode of the arc heating unit is energized, the metal raw material is matched When the arc discharge region is advanced, the electric charge connected to each electrode can enter the arc discharge region, thereby generating an arc for heating and melting the metal material.
在第2圖及第3圖所示之實施例中，係將兩條金屬原料10分別與電弧加熱單元30之兩個電極31、32電氣連接(亦即由兩條金屬原料10分別連接用以產生電弧之正、負電荷)，各金屬原料10係可分別穿入電弧加熱單元30各支架33之通道331中，由支架33將其所穿置的金屬原料10引導進入電弧放電區域30A，同時將其所連接的電荷引導進入電弧放電區域30A。In the embodiment shown in Figures 2 and 3, the two metal materials 10 are electrically connected to the two electrodes 31, 32 of the arc heating unit 30 respectively (i.e., the two metal materials 10 are respectively connected for use). Each of the metal materials 10 can be respectively inserted into the passage 331 of each bracket 33 of the arc heating unit 30, and the metal material 10 that is placed therethrough is guided into the arc discharge region 30A by the bracket 33, and simultaneously The charge connected thereto is directed into the arc discharge region 30A.
據以，當電弧加熱單元30之全數電極31、32通電之後，配合將兩條金屬原料10同時朝電弧放電區域30A推進，即可使各電極所連接之電荷進入電弧放電區域30A，進而產生同時將兩條金屬原料10加熱熔解的電弧。Therefore, when the entire electrodes 31, 32 of the arc heating unit 30 are energized, the two metal materials 10 are simultaneously pushed toward the arc discharge region 30A, so that the electric charge connected to each electrode enters the arc discharge region 30A, thereby generating simultaneous The arc of the two metal materials 10 is heated and melted.
在此同時，可由第一霧化單元40所產生之氣流作用於金屬原料10受熱之後熔解的金屬液，藉以對熔解的金屬液立即施予第一次霧化使形成複數微細的金屬液滴11，同時由第二霧化單元50所產生之電漿噴流作用於經第一次霧化所形成之金屬液滴11，使經第一次霧化所形成之金屬液滴11再次霧化(細化)形成複數細微金屬顆粒12即可完成具有複數細微金屬顆粒12之圓球形金屬粉末之製造。At the same time, the gas stream generated by the first atomizing unit 40 acts on the molten metal which is melted after the metal material 10 is heated, so that the molten metal liquid is immediately subjected to the first atomization to form a plurality of fine metal droplets 11 At the same time, the plasma jet generated by the second atomizing unit 50 acts on the metal droplet 11 formed by the first atomization, so that the metal droplet 11 formed by the first atomization is atomized again (fine The formation of a plurality of fine metal particles 12 can complete the manufacture of a spherical metal powder having a plurality of fine metal particles 12.
再者，本發明之圓球形金屬粉末製造設備，係可進一步包括一可供承接至少一條金屬原料10，且將所承接之金屬原料10朝該電弧加熱單元30之電弧放電區域30A推進的進料單元60；在第2圖及第3圖所示之實施例中，所述電弧加熱單元30之各支架33係設有一可供金屬原料10穿過的通道331。Furthermore, the spherical metal powder manufacturing apparatus of the present invention may further comprise a feed for receiving at least one metal raw material 10 and advancing the received metal raw material 10 toward the arc discharge region 30A of the arc heating unit 30. Unit 60; In the embodiment shown in Figures 2 and 3, each of the brackets 33 of the arc heating unit 30 is provided with a passage 331 through which the metal material 10 can pass.
該進料單元60係分別與各支架33對應設有至少兩個供與金屬原料10接觸的傳送輪61；至於，其金屬原料10係可以為具有預先設定線徑的線金屬原料或棒金屬原料，使得以在進料單元60之傳送輪61帶動下，以預先設定之速率朝電弧放電區域30A推進，以持續供應用以製造圓球形金屬粉末所需之原料。The feeding unit 60 is provided with at least two conveying wheels 61 for contacting the metal material 10 respectively corresponding to the respective brackets 33; wherein the metal material 10 may be a wire metal material or a rod metal material having a predetermined wire diameter. The material is advanced toward the arc discharge region 30A at a predetermined rate by the transfer wheel 61 of the feed unit 60 to continuously supply the raw materials required for the manufacture of the spherical metal powder.
再者，本發明之圓球形金屬粉末製造設備，亦可如第4圖及第5圖所示，所述電弧加熱單元30係於其中一組支架33設有一可供金屬原料10穿過的通道331，該設有通道331之支架33亦可以同時為該第一霧化單元40之噴嘴41；至於，該進料單元60係與設有通道331之支架33對應設有至少兩個供與金屬原料10接觸的傳送輪61。Furthermore, the apparatus for manufacturing a spherical metal powder of the present invention may also be as shown in FIGS. 4 and 5, wherein the arc heating unit 30 is provided with a set of brackets 33 provided with a passage through which the metal material 10 can pass. The bracket 33 provided with the passage 331 can also be the nozzle 41 of the first atomizing unit 40 at the same time; as for the feeding unit 60, at least two metal and metal are provided corresponding to the bracket 33 provided with the passage 331 The transfer wheel 61 in contact with the raw material 10.
在第4圖及第5圖所示之實施例中，係將一條金屬原料10與電弧加熱單元30其中一個電極31電氣連接，亦即由此單一金屬原料10連接用以產生電弧之正電荷或負電荷(圖中所示係為連接負電荷)，且將此條金屬原料10穿入電弧加熱單元30之支架33通道331中，由支架33將其所穿置的金屬原料10及其所連接之電荷引導進入電弧放電區域30A，同時由另一組支架33直接連接另一電極32將其所連接的電荷引導進入電弧放電區域30A。In the embodiment shown in FIGS. 4 and 5, a metal material 10 is electrically connected to one of the electrodes 31 of the arc heating unit 30, that is, the single metal material 10 is connected to generate a positive electric charge of the arc or The negative charge (shown as a negative charge is connected), and the metal material 10 is inserted into the channel 33 of the bracket 33 of the arc heating unit 30, and the metal material 10 that is placed by the bracket 33 and its connected The charge is directed into the arc discharge region 30A while the other set of brackets 33 are directly connected to the other electrode 32 to direct the charge connected thereto into the arc discharge region 30A.
同樣的，當電弧加熱單元30之全數電極31、32通電之後，可配合在進料單元60之傳送輪61帶動下，將該金屬原料10朝電弧放電區域30A推進，即可使各電極所連接之電荷進入電弧放電區域30A，進而產生同時將兩條金屬原料10加熱熔解的電弧。Similarly, after the entire electrodes 31, 32 of the arc heating unit 30 are energized, the metal material 10 can be pushed toward the arc discharge region 30A by the transfer wheel 61 of the feeding unit 60, so that the electrodes can be connected. The charge enters the arc discharge region 30A, thereby generating an arc that simultaneously heats and melts the two metal materials 10.
換言之，本發明所揭露之圓球形金屬粉末，係可以為依據上揭各種可能實施之圓球形粉末製造方法所製造完成之圓球形金屬粉末，該圓球形金屬粉末係具有複數細微金屬顆粒，其全數微細金屬顆粒之平均粒徑係小於100μm，且有92%以上之微細金屬顆粒之圓率介於1~1.07之間，且有92%以上之微細金屬顆粒之最長軸與最短軸比率小於1.5。In other words, the spherical metal powder disclosed in the present invention may be a spherical metal powder which is manufactured according to various possible methods for producing a spherical powder, and the spherical metal powder has a plurality of fine metal particles, all of which are The fine metal particles have an average particle diameter of less than 100 μm, and 92% or more of the fine metal particles have a circularity of from 1 to 1.07, and more than 92% of the fine metal particles have a ratio of the longest axis to the shortest axis of less than 1.5.
抑或是，本發明所揭露之圓球形金屬粉末，係為依據上揭各種可能實施之圓球形粉末製造設備所製造完成之圓球形金屬粉末，該圓球形金屬粉末係具有複數細微金屬顆粒，其全數微細金屬顆粒之平均粒徑係小於100μm，且有92%以上之微細金屬顆粒之圓率介於1~1.07之間，且有92%以上之微細金屬顆粒(12)之最長軸與最短軸比率小於1.5。Or the spherical metal powder disclosed in the present invention is a spherical metal powder which is manufactured according to various possible spherical spherical powder manufacturing apparatuses, and the spherical metal powder has a plurality of fine metal particles, and the total number thereof The average particle diameter of the fine metal particles is less than 100 μm, and the round ratio of the fine metal particles of 92% or more is between 1 and 1.07, and the ratio of the longest axis to the shortest axis of the fine metal particles (12) of 92% or more Less than 1.5.
本發明在一具體實施之圓球形粉末製造方法中，係分別以兩條直徑1.6mm的銅線金屬原料做為產生電弧放電作用的電極，於對該腔室抽真空至＜1×10-3 Pa之後通入低於0.12~0.15MPa的氮氣，通以120A之電流使兩條直徑1.6mm的銅線金屬原料產生電弧放電，將兩條直徑1.6mm的銅線金屬原料加熱溶解產生金屬液。In a method for manufacturing a spherical powder according to a specific embodiment of the present invention, two copper wire metal materials having a diameter of 1.6 mm are respectively used as electrodes for generating an arc discharge, and the chamber is evacuated to <1×10 -3 . After Pa, a nitrogen gas of less than 0.12 to 0.15 MPa was introduced, and two copper wires of 1.6 mm in diameter were arc-discharged by a current of 120 A, and two copper wire metal materials having a diameter of 1.6 mm were heated and dissolved to produce a molten metal.
同時以進氣壓力0.5MPa送入氮氣形成作用於電弧放電區域的氣流，將兩條直徑1.6mm的銅線金屬原料受熱熔解之銅金屬液施予第一次霧化使其形成複數微細的銅金屬液滴，接著以三組功率各為25kW，進氣壓力各為0.5MPa之電漿火炬所產生的電漿噴流作用於經第一次霧化所形成之銅金屬液滴，使其再次霧化成為複數細微銅金屬顆粒。At the same time, the nitrogen gas is introduced into the arc discharge region at an inlet pressure of 0.5 MPa, and two copper metal materials having a diameter of 1.6 mm are thermally melted to be firstly atomized to form a plurality of fine copper. The metal droplets, followed by three sets of power of 25 kW each, and the plasma jet generated by the plasma torch with an inlet pressure of 0.5 MPa acts on the copper metal droplets formed by the first atomization to make it fog again. It turns into a plurality of fine copper metal particles.
在此具體實施方法所製造完成之圓球形金屬粉末係具有複數微細銅金屬顆粒，其全數微細銅金屬顆粒之平均粒徑係介於30~50μm之間，有96%以上之微細銅金屬顆粒之圓率小於1.5，且有95%以上之微細銅金屬顆粒之圓率介於1~1.07之間。The spherical metal powder produced by the specific implementation method has a plurality of fine copper metal particles, and the average particle diameter of all the fine copper metal particles is between 30 and 50 μm, and 96% or more of the fine copper metal particles are used. The round ratio is less than 1.5, and more than 95% of the fine copper metal particles have a roundness between 1 and 1.07.
本發明在另一具體實施之圓球形粉末製造方法中，係分別以兩條直徑1.6mm的鈦線金屬原料做為產生電弧放電作用的電極，於對該腔室抽真空至＜1×10-3 Pa之後通入低於0.12~0.15MPa的氮氣，通以150A之電流使兩條直徑1.6mm的鈦線金屬原料產生電弧放電，將兩條直徑1.6mm的鈦線金屬原料加熱溶解產生金屬液。In another embodiment of the method for manufacturing a spherical powder, the titanium wire metal material having a diameter of 1.6 mm is used as an electrode for generating an arc discharge, and the chamber is evacuated to <1×10 − After 3 Pa, nitrogen gas of less than 0.12~0.15MPa is introduced, and two titanium wire metal materials with a diameter of 1.6mm are arc-discharged by a current of 150A, and two titanium wire metal materials with a diameter of 1.6 mm are heated and dissolved to produce a molten metal. .
同時以進氣壓力0.5MPa送入氬氣形成作用於電弧放電區域的氣流，將兩條直徑1.6mm的鈦線金屬原料受熱熔解之金屬液施予第一次霧化使其形成複數微細的鈦金屬液滴，接著以三組功率各為25kW，進氣壓力各為0.5MPa之電漿火炬所產生的電漿噴流作用於經第一次霧化所形成之鈦金屬液滴，使其再次霧化成為複數細微鈦金屬顆粒。At the same time, the argon gas is fed at an inlet pressure of 0.5 MPa to form a gas flow acting on the arc discharge region, and the two molten metal materials of 1.6 mm diameter of the titanium wire are subjected to the first atomization to form a plurality of fine titanium. The metal droplets, followed by three sets of power of 25 kW each, and the plasma jet generated by the plasma torch with an inlet pressure of 0.5 MPa acts on the titanium metal droplets formed by the first atomization to make it fog again. It turns into a plurality of fine titanium metal particles.
在此具體實施方法所製造完成之圓球形金屬粉末係具有複數微細鈦金屬顆粒，其全數微細鈦金屬顆粒之平均粒徑係介於15~30μm之間，有97%以上之微細鈦金屬顆粒之圓率小於1.5，且有94%以上之微細鈦金屬顆粒之圓率介於1~1.07之間。The spherical metal powder produced by the specific implementation method has a plurality of fine titanium metal particles, and the average particle diameter of all the fine titanium metal particles is between 15 and 30 μm, and more than 97% of the fine titanium metal particles are used. The round ratio is less than 1.5, and more than 94% of the fine titanium metal particles have a roundness between 1 and 1.07.
本發明在又一具體實施之圓球形粉末製造方法中，係分別以兩條直徑2.0mm的錫合金線金屬原料做為產生電弧放電作用的電極，所述錫合金線金屬原料係為錫-銀-銅合金線，於對該腔室抽真空至＜1×10-3 Pa之後通入低於0.12~0.15MPa的氮氣，通以110A之電流使兩條錫合金線金屬原料產生電弧放電，將兩條錫合金線金屬原料加熱溶解產生金屬液。In still another embodiment of the method for manufacturing a spherical powder, two tin alloy wire metal materials having a diameter of 2.0 mm are respectively used as electrodes for generating an arc discharge, and the tin alloy wire metal material is tin-silver. - a copper alloy wire, after evacuating the chamber to <1×10 -3 Pa, introducing a nitrogen gas of less than 0.12 to 0.15 MPa, and causing an arc discharge of the two tin alloy wire metal materials by a current of 110 A. The two tin alloy wire metal materials are heated and dissolved to produce a molten metal.
同時以進氣壓力0.3MPa送入氮氣形成作用於電弧放電區域的氣流，將兩條錫合金線金屬原料受熱熔解之錫合金金屬液施予第一次霧化使其形成複數微細的錫合金金屬液滴，接著以三組功率各為20kW，進氣壓力各為0.4MPa之電漿火炬所產生的電漿噴流作用於經第一次霧化所形成之錫合金金屬液滴，使其再次霧化成為複數細微錫合金金屬顆粒。At the same time, the nitrogen gas is introduced into the arc discharge region at an inlet pressure of 0.3 MPa, and the tin alloy metal liquid of the two tin alloy wire metal materials is subjected to the first atomization to form a plurality of fine tin alloy metals. The droplets are then sprayed by a plasma jet generated by a three-group power of 20 kW each with a gas pressure of 0.4 MPa, which acts on the tin alloy metal droplets formed by the first atomization to make it fog again. It is turned into a plurality of fine tin alloy metal particles.
在此具體實施方法所製造完成之圓球形金屬粉末係具有複數微細錫合金金屬顆粒，微細錫合金金屬顆粒係為錫-銀-銅合金金屬顆粒，其全數微細錫合金金屬顆粒之平均粒徑係介於25~45μm之間，有95%以上之微細錫合金金屬顆粒之圓率小於1.5，且有92%以上之微細錫合金金屬顆粒之圓率介於1~1.07之間。The spherical metal powder produced by the specific implementation method has a plurality of fine tin alloy metal particles, and the fine tin alloy metal particles are tin-silver-copper alloy metal particles, and the average particle diameter of all the fine tin alloy metal particles is Between 25 and 45 μm, more than 95% of the fine tin alloy metal particles have a circularity of less than 1.5, and more than 92% of the fine tin alloy metal particles have a roundness of between 1 and 1.07.
具體而言，本發明主要在金屬原料受熱熔解成金屬液之瞬間，即以氣流對其施予第一次霧化形成複數金屬液滴，接著再以電漿噴流再對金屬液滴施予第二次霧化形成複數細微金屬顆粒，不但可以有效降低金屬液滴之熱能損失，更可由電漿噴流提供足夠的溫度，讓細微金屬顆粒得以有相對較長的時間收歛成球形，達到提高金屬粉末圓率之目的；尤其，受電弧加熱熔解的金屬液在依序經過第一次霧化及第二次霧化之後，可以有效提高細微金屬顆粒之分布率，以相對更為積極、可靠之手段提升圓球形金屬粉末之產能及品質。Specifically, the present invention mainly applies a first atomization to form a plurality of metal droplets at a moment when the metal raw material is thermally melted into a molten metal, and then sprays the metal droplets by a plasma jet. Secondary atomization to form a plurality of fine metal particles can not only effectively reduce the thermal energy loss of the metal droplets, but also provide sufficient temperature by the plasma jet to allow the fine metal particles to converge into a spherical shape for a relatively long period of time, thereby increasing the metal powder. The purpose of the round rate; in particular, the metal liquid melted by the arc heating can effectively increase the distribution rate of the fine metal particles after the first atomization and the second atomization, in a relatively more active and reliable manner. Improve the production capacity and quality of spherical metal powder.
以上所述之實施例僅係為說明本發明之技術思想及特點，其目的在使熟習此項技藝之人士能夠瞭解本發明之內容並據以實施，當不能以之限定本發明之專利範圍，即大凡依本發明所揭示之精神所作之均等變化或修飾，仍應涵蓋在本發明之專利範圍內。The embodiments described above are merely illustrative of the technical spirit and the features of the present invention, and the objects of the present invention can be understood by those skilled in the art, and the scope of the present invention cannot be limited thereto. That is, the equivalent variations or modifications made by the spirit of the present invention should still be included in the scope of the present invention.
10‧‧‧金屬原料
10A‧‧‧圓球形金屬粉末
11‧‧‧金屬液滴
12‧‧‧金屬顆粒
20‧‧‧腔室
30‧‧‧電弧加熱單元
30A‧‧‧電弧放電區域
31‧‧‧電極
32‧‧‧電極
33‧‧‧支架
331‧‧‧通道
40‧‧‧第一霧化單元
41‧‧‧噴嘴
50‧‧‧第二霧化單元
51‧‧‧電漿火炬
60‧‧‧進料單元
61‧‧‧傳送輪10‧‧‧Metal materials
10A‧‧‧Spherical metal powder
11‧‧‧Metal droplets
12‧‧‧Metal particles
20‧‧‧ chamber
30‧‧‧Arc heating unit
30A‧‧‧Arc discharge area
31‧‧‧ electrodes
32‧‧‧ electrodes
33‧‧‧ bracket
331‧‧‧ channel
40‧‧‧First atomization unit
41‧‧‧Nozzles
50‧‧‧Second atomization unit
51‧‧‧Plastic Torch
60‧‧‧ Feeding unit
61‧‧‧Transport wheel
第1圖係為本發明之圓球形金屬粉末之組成示意圖。 第2圖係為本發明第一實施例之圓球形金屬粉末製造設備結構示意圖。 第3圖係為本發明第一實施例之圓球形金屬粉末製造設備中電弧加熱單元之放大示意圖。 第4圖係為本發明第二實施例之圓球形金屬粉末製造設備結構示意圖。 第5圖係為本發明第二實施例之圓球形金屬粉末製造設備中電弧加熱單元之放大示意圖。Fig. 1 is a schematic view showing the composition of the spherical metal powder of the present invention. Fig. 2 is a schematic view showing the structure of a spherical metal powder manufacturing apparatus according to a first embodiment of the present invention. Fig. 3 is an enlarged schematic view showing an arc heating unit in the apparatus for manufacturing a spherical metal powder according to the first embodiment of the present invention. Fig. 4 is a structural schematic view showing a manufacturing apparatus of a spherical metal powder according to a second embodiment of the present invention. Fig. 5 is an enlarged schematic view showing an arc heating unit in the apparatus for manufacturing a spherical metal powder according to a second embodiment of the present invention.
10‧‧‧金屬原料 10‧‧‧Metal materials
11‧‧‧金屬液滴 11‧‧‧Metal droplets
12‧‧‧金屬顆粒 12‧‧‧Metal particles
30‧‧‧電弧加熱單元 30‧‧‧Arc heating unit
30A‧‧‧電弧放電區域 30A‧‧‧Arc discharge area
31‧‧‧電極 31‧‧‧ electrodes
32‧‧‧電極 32‧‧‧ electrodes
33‧‧‧支架 33‧‧‧ bracket
331‧‧‧通道 331‧‧‧ channel
40‧‧‧第一霧化單元 40‧‧‧First atomization unit
41‧‧‧噴嘴 41‧‧‧Nozzles
50‧‧‧第二霧化單元 50‧‧‧Second atomization unit
51‧‧‧電漿火炬 51‧‧‧Plastic Torch
60‧‧‧進料單元 60‧‧‧ Feeding unit
61‧‧‧傳送輪 61‧‧‧Transport wheel
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| Application Number | Priority Date | Filing Date | Title |
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| TW104135373A TW201714685A (en) | 2015-10-28 | 2015-10-28 | Spherical metal powder and manufacturing method thereof and manufacturing apparatus thereof capable of allowing the fine metal particles to converge into a spherical shape in a relatively long time to achieve the purpose of improving the metal powder roundness |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW104135373A TW201714685A (en) | 2015-10-28 | 2015-10-28 | Spherical metal powder and manufacturing method thereof and manufacturing apparatus thereof capable of allowing the fine metal particles to converge into a spherical shape in a relatively long time to achieve the purpose of improving the metal powder roundness |
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| TW201714685A true TW201714685A (en) | 2017-05-01 |
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| TW104135373A TW201714685A (en) | 2015-10-28 | 2015-10-28 | Spherical metal powder and manufacturing method thereof and manufacturing apparatus thereof capable of allowing the fine metal particles to converge into a spherical shape in a relatively long time to achieve the purpose of improving the metal powder roundness |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI618589B (en) * | 2016-12-23 | 2018-03-21 | 悅城科技股份有限公司 | Device and method for manufacturing material particles |
| CN111250721A (en) * | 2020-03-09 | 2020-06-09 | 深圳市晶莱新材料科技有限公司 | Method for producing Fe-Mn-Pt-based medical 3D printing metal material |
| CN112091229A (en) * | 2020-11-09 | 2020-12-18 | 西安赛隆金属材料有限责任公司 | Device and method for refining particle size of metal powder |
| CN112658271A (en) * | 2020-12-16 | 2021-04-16 | 杭州电子科技大学 | Efficient composite gas atomization powder preparation device and method |
| CN112658272A (en) * | 2020-12-16 | 2021-04-16 | 杭州电子科技大学 | High-cooling-gradient plasma arc-gas atomization composite powder making device and method |
-
2015
- 2015-10-28 TW TW104135373A patent/TW201714685A/en unknown
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI618589B (en) * | 2016-12-23 | 2018-03-21 | 悅城科技股份有限公司 | Device and method for manufacturing material particles |
| CN111250721A (en) * | 2020-03-09 | 2020-06-09 | 深圳市晶莱新材料科技有限公司 | Method for producing Fe-Mn-Pt-based medical 3D printing metal material |
| CN112091229A (en) * | 2020-11-09 | 2020-12-18 | 西安赛隆金属材料有限责任公司 | Device and method for refining particle size of metal powder |
| CN112091229B (en) * | 2020-11-09 | 2021-02-12 | 西安赛隆金属材料有限责任公司 | Device and method for refining particle size of metal powder |
| CN112658271A (en) * | 2020-12-16 | 2021-04-16 | 杭州电子科技大学 | Efficient composite gas atomization powder preparation device and method |
| CN112658272A (en) * | 2020-12-16 | 2021-04-16 | 杭州电子科技大学 | High-cooling-gradient plasma arc-gas atomization composite powder making device and method |
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