TW201703960A - Cutter wheel and manufacturing method thereof performing scribing for ceramic substrates, silicon substrates, such as alumina, high-temperature co-fired ceramic, low-temperature co-fired ceramic, etc. - Google Patents
Cutter wheel and manufacturing method thereof performing scribing for ceramic substrates, silicon substrates, such as alumina, high-temperature co-fired ceramic, low-temperature co-fired ceramic, etc. Download PDFInfo
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Description
本發明係關於一種對脆性材料基板進行刻劃線(切槽)之加工、或進行分斷時使用之刀輪(亦稱為刻劃輪)及其製造方法。本發明尤其是關於一種適合於對氧化鋁、HTCC(High-Temperature Co-fired Ceramic：高溫共燒陶瓷)、LTCC(Low-Temperature Co-fired Ceramic：低溫共燒陶瓷)等陶瓷基板或藍寶石基板、矽基板等、較非晶質玻璃基板硬之脆性材料基板進行刻劃線之加工、或進行分斷之由單結晶鑽石(金剛石)構成之刀輪及其製造方法。 The present invention relates to a process for scribing (grooving) a substrate of a brittle material, or a cutter wheel (also referred to as a scoring wheel) used for breaking, and a method of manufacturing the same. More particularly, the present invention relates to a ceramic substrate or a sapphire substrate suitable for alumina, HTCC (High-Temperature Co-fired Ceramic), LTCC (Low-Temperature Co-fired Ceramic), A crucible or the like, which is a substrate made of a single crystal diamond (diamond), or a method for producing the same, which is obtained by scribing a hard brittle material substrate such as a crucible substrate.
分斷脆性材料基板之加工，一般已知的方法，係使用刀輪在基板表面形成刻劃線，之後，藉由沿刻劃線從背面側施加外力使基板撓曲，據以分斷成各個單位基板，此方法已揭示於例如專利文獻1。 For the processing of breaking the brittle material substrate, a generally known method is to form a scribe line on the surface of the substrate by using a cutter wheel, and then, by applying an external force from the back side along the scribe line, the substrate is deflected, thereby breaking into individual pieces. A unit substrate, this method has been disclosed, for example, in Patent Document 1.
對脆性材料基板進行刻劃線加工之刀輪，係使用在圓周面具有V字形之刃前端的刀輪。一般而言，刀輪係由超硬合金或多結晶鑽石燒結體作成，但最近受注目的係為由單結晶鑽石構成之硬度較玻璃基板高之陶瓷基板或藍寶石基板、矽基板等之刻劃用之刀輪。 A cutter wheel for scribing a brittle material substrate is a cutter wheel having a V-shaped tip end on a circumferential surface. In general, the cutter wheel is made of a superhard alloy or a polycrystalline diamond sintered body, but recently it has been marked with a ceramic substrate, a sapphire substrate, a ruthenium substrate, etc., which is composed of a single crystal diamond and has a higher hardness than a glass substrate. Knife wheel.
為了在刀輪之圓周面形成V字形之刃前端，如圖3所示在作為素材之圓板狀本體101之軸孔3***研磨裝置之軸4並使圓板狀本體旋轉，藉由研磨石5呈傾斜地對圓周面之兩側緣進行研磨，形成由左右之斜 面與稜線構成之V字形之刃前端。 In order to form the front end of the V-shaped blade on the circumferential surface of the cutter wheel, as shown in FIG. 3, the shaft 4 of the disc-shaped body 101 as the material is inserted into the shaft 4 of the grinding device and the disc-shaped body is rotated by the grinding stone. 5 obliquely rubbing the two sides of the circumferential surface to form a slope from left to right The front end of the V-shaped blade formed by the surface and the ridge line.
分斷玻璃基板等脆性材料基板之步驟，雖係在利用刀輪進行刻劃線之加工後，對基板施加外力以沿刻劃線將其分斷，但若刀輪之刃前端斜面未充分研磨而殘留凹凸，則在分斷時於基板之分斷端面留下傷痕，使基板之端面強度降低。此外，若在刀輪之刃前端斜面存在凹凸，則刻劃時之阻力增加將導致刃前端產生缺口、逐漸磨耗等而降低使用壽命。因此，刃前端斜面必須形成為無凹凸之光滑面。該刃前端斜面之表面粗糙度，較佳為算術平均粗糙度(Ra)為0.03μm以下。 The step of breaking the brittle material substrate such as a glass substrate is performed by applying a force to the substrate after the scribe line is processed by the cutter wheel to break it along the scribe line, but if the tip end of the cutter wheel is not sufficiently polished On the other hand, the residual unevenness leaves a flaw on the fracture end surface of the substrate at the time of breaking, and the strength of the end face of the substrate is lowered. In addition, if there is unevenness on the slope of the front end of the blade of the cutter wheel, the increase in resistance at the time of scoring will cause a notch at the tip end of the blade, gradually wear, and the like, thereby reducing the service life. Therefore, the bevel of the front end of the blade must be formed as a smooth surface without irregularities. The surface roughness of the tip end slope of the blade is preferably an arithmetic mean roughness (Ra) of 0.03 μm or less.
專利文獻1：日本專利3787489號公報 Patent Document 1: Japanese Patent No. 3787489
然而，為了削去圓板之圓周面之兩側緣以加工成V字形之刃前端的形態，且由於削去的研磨區域多，因此必須使用粒度粗之粗研磨用研磨石。因此，於加工成V字形後，必須以粒度細之研磨石對刃前端斜面進行精研磨，但由於在以粗研磨石進行加工後之刃前端斜面殘留較大的凹凸，因此使用細粒度之研磨石研磨至成為最佳之表面粗糙度相當費時，並且研磨石之更換頻率亦增加使成本變高。此外，刀輪之刃前端，由於侵入脆性材料基板之前端稜線部分成為實質的刃前端，因此只要針對進行該步驟之刃前端之前端部分，將其精加工成所希望之表面粗糙度即可，但上述方法因係精研磨刃前端斜面之全域而產生浪費的部分。尤其是在僅由硬度高、且易受表面所呈現之複數個結晶方位之影響的單結晶鑽石構成之刀輪的加工中，將殘留有凹凸之刃前端斜面全周均勻地精研磨至所希望之表面粗糙度，是非常困難的作業。 However, in order to cut off the both side edges of the circumferential surface of the circular plate to form the front end of the V-shaped blade, and since there are many grinding regions to be removed, it is necessary to use a coarse grinding stone for coarse grinding. Therefore, after processing into a V-shape, it is necessary to finish the front end bevel of the blade with a fine-grained grinding stone. However, since a large unevenness remains on the bevel of the tip end of the blade after the rough grinding, the fine-grained grinding is used. It is quite time consuming to grind the stone to the optimum surface roughness, and the frequency of replacement of the grinding stone is also increased to make the cost high. Further, since the tip end of the blade end of the cutter wheel becomes a substantial blade tip end before the intrusion into the brittle material substrate, it is only necessary to finish the tip end portion of the blade end portion which is subjected to this step to a desired surface roughness. However, the above method produces a wasteful portion due to the entire surface of the bevel of the front end of the polishing blade. In particular, in the processing of a cutter wheel composed of a single crystal diamond having a high hardness and being susceptible to a plurality of crystal orientations exhibited by the surface, the front end slope of the blade having the unevenness is uniformly polished to the desired periphery. Surface roughness is a very difficult job.
因此，本發明有鑑於上述課題，目的在於提供一種具有無凹凸之光滑的刃前端斜面、且能夠長期穩定使用之單結晶鑽石製之刀輪及其製造方法。 Accordingly, the present invention has been made in view of the above problems, and an object of the invention is to provide a cutter wheel made of a single crystal diamond which has a smooth tip end slope without unevenness and which can be stably used for a long period of time and a method for manufacturing the same.
為了解決上述課題，在本發明中提出如以下之技術性的手段。亦即，本發明之刀輪，係於外周面具備刃前端部之由單結晶鑽石構成之刀輪，該刃前端部由左右對稱之三段的斜面、與形成於最上段之左右斜面之交點的稜線構成；該三段之各斜面之傾斜角，形成為上段之斜面較下段之斜面平緩，該最上段之斜面與該稜線，形成侵入作為刻劃對象之脆性材料基板之實質的刃前端；該最上段之斜面部之厚度方向的寬度為圓板狀本體之厚度的一半以下，且該最上段之斜面之表面粗糙度，形成為算術平均粗糙度為0.03μm以下。 In order to solve the above problems, the following technical means are proposed in the present invention. In other words, the cutter wheel of the present invention is provided with a cutter wheel made of a single crystal diamond having a tip end portion on the outer peripheral surface, and the tip end portion of the blade is formed by a beveled surface of three sides symmetrical with respect to each other and an intersection of the left and right bevels formed at the uppermost stage. The ridge line is formed; the inclined angle of each of the three sections is formed such that the slope of the upper section is gentler than the slope of the lower section, and the slope of the uppermost section and the ridge line form a front end of the blade which invades the substrate of the brittle material as the object to be scribed; The width of the uppermost slope portion in the thickness direction is less than or equal to half the thickness of the disk-shaped body, and the surface roughness of the uppermost slope is formed to have an arithmetic mean roughness of 0.03 μm or less.
此處，較佳為：該最上段之左右斜面相交之角度為100~150°。 Here, it is preferable that an angle at which the left and right slopes of the uppermost portion intersect is 100 to 150 degrees.
此外，本發明亦以以下之刀輪之製造方法作為特徵。亦即，本發明之單結晶鑽石製刀輪之製造方法，該刀輪於外周面具備由左右對稱之三段的斜面、與形成於最上段之斜面之交點的稜線構成的刃前端，該三段之各斜面之傾斜角，形成為上段之斜面較下段之斜面平緩；該製造方法由下述加工步驟構成：去除圓板狀本體之圓周面之兩側緣，以形成最下段之斜面的一次加工步驟；對藉由該一次加工步驟形成之最下段之斜面之一部分進行加工，以形成第二段之斜面的二次加工步驟；以及對藉由該二次加工步驟而形成之第二段之斜面之一部分進行加工，以形成最上段之斜面的三次加工步驟；於該三次加工步驟，加工成該最上段之斜面之表面粗糙度為算術平均粗糙度0.03μm以下；於該三次加工步驟，加工成被加工之最 上段之斜面部分相對於圓板狀本體之厚度所占之比例為圓板狀本體之厚度的一半以下。 Further, the present invention is also characterized by the following method of manufacturing a cutter wheel. In other words, in the method of manufacturing a single crystal diamond cutter wheel according to the present invention, the cutter wheel has a tip end formed by a slanting surface of three symmetrical sides and a ridge line formed at an intersection of the uppermost slanted surface on the outer peripheral surface, the third The inclination angle of each slope of the segment is formed such that the slope of the upper section is gentler than the slope of the lower section; the manufacturing method comprises the following processing steps: removing both sides of the circumferential surface of the disk-shaped body to form the slope of the lowermost section once a processing step; a secondary processing step of processing a portion of the lowermost slope formed by the one processing step to form a slope of the second segment; and a second segment formed by the secondary processing step a portion of the bevel is machined to form a third processing step of the uppermost bevel; in the three processing steps, the surface roughness of the beveled surface of the uppermost segment is an arithmetic mean roughness of 0.03 μm or less; in the three processing steps, processing The most processed The ratio of the slope portion of the upper section to the thickness of the disk-shaped body is less than or less than half the thickness of the disk-shaped body.
根據本發明之刀輪，由於刃前端部之斜面係以三段之斜面形成，因此能夠在加工斜面時從下段之斜面至上段依序分成三次進行加工。因此，藉由順著加工步驟改變成粒度較細之研磨石，能夠從第一段之斜面至第二段、第三段之斜面依序使表面之凹凸變小，且能夠於最終使用粒度細之精加工用之研磨石，容易地將成為實質的刃前端斜面之最上段之斜面加工至所希望之表面粗糙度。此外，由於最上段之斜面之寬度為圓板狀本體之厚度之一半以下，因此在以精研磨石對最上段之斜面進行研磨時，與如習知對刃前端斜面之整體寬進行研磨相比，能夠使研磨區域大幅地減少而不浪費地迅速進行精研磨。藉此，能夠容易地獲得具有無凹凸之光滑的刃前端斜面、刀刃缺裂少、使用壽命長之單結晶鑽石製刀輪。 According to the cutter wheel of the present invention, since the inclined surface of the tip end portion of the blade is formed by the three-section inclined surface, it is possible to process the inclined surface from the lower slope to the upper portion in three steps. Therefore, by changing the grinding stone to a finer particle size along the processing step, the surface of the first segment can be reduced from the slope of the first segment to the second segment and the third segment, and the surface roughness can be reduced. The grinding stone for finishing is easily processed to the desired upper surface roughness of the uppermost slope of the blade front end bevel. In addition, since the width of the uppermost inclined surface is one-half or less of the thickness of the disk-shaped body, when the uppermost inclined surface is polished by the fine grinding stone, compared with the conventional wide width of the front end inclined surface of the blade It is possible to drastically reduce the polishing area without dripping the fine grinding. Thereby, it is possible to easily obtain a single crystal diamond cutter wheel having a smooth blade tip end slope without unevenness, a small blade edge crack, and a long service life.
此外，根據本發明之刀輪之製造方法，雖經由一次、二次、三次之三階段之加工步驟，加工具有三段斜面之刃前端部，但此時係以從第一段之斜面至第二段、第三段之斜面其表面凹凸變小之方式依序加工。因此，能夠於最終使用粒度細之精加工用之研磨石，容易地將成為實質的刃前端斜面之最上段之第三段斜面加工至所希望之表面粗糙度。 Further, according to the method of manufacturing a cutter wheel according to the present invention, the front end portion of the blade having the three-step bevel is processed through the processing steps of three stages of one, two, and three times, but at this time, from the slope of the first stage to the The slopes of the second and third sections are sequentially processed in such a manner that the surface irregularities become smaller. Therefore, it is possible to finally use the grinding stone for fine-grain finishing, and to easily machine the third-stage inclined surface which is the uppermost stage of the blade tip end slope to a desired surface roughness.
此外，於三次加工步驟，由於僅對成為圓板狀本體之厚度的一半以下的第三段斜面進行精加工成所希望之表面粗糙度，因此與如習知對刃前端斜面之整體寬進行加工相比，能夠使加工區域大幅地減少而不浪費地迅速進行精加工。該優點在僅由質硬、且易受不同結晶方位之影響的單結晶鑽石構成之刀輪的加工中尤其特別顯著。藉此，能夠以良好效率製造於全周 具備無凹凸之光滑的刃前端斜面、刀刃缺裂少、使用壽命長之單結晶鑽石製之刀輪。 Further, in the three-step processing step, since only the third-stage bevel which is half or less the thickness of the disk-shaped body is finished to a desired surface roughness, the entire width of the front end bevel is processed as in the conventional blade. In contrast, it is possible to greatly reduce the processing area without causing rapid finishing. This advantage is particularly pronounced in the processing of cutter wheels consisting only of single crystal diamonds which are hard and susceptible to different crystal orientations. Thereby, it can be manufactured in good efficiency with good efficiency throughout the week. It has a smooth blade front end bevel without unevenness, a single crystal diamond wheel with less blade edge and long service life.
在上述發明中，優選為：使稜線之最大高度粗糙度為0.3μm以下。此外，較佳為：使稜線之最大高度粗糙度為0.1μm以下，更佳為0.05μm以下。 In the above invention, it is preferable that the maximum height roughness of the ridge line is 0.3 μm or less. Further, it is preferable that the maximum height roughness of the ridge line is 0.1 μm or less, and more preferably 0.05 μm or less.
在刀輪之素材為多結晶鑽石燒結體的情形雖少有問題，但近年來在由單結晶鑽石構成之刀輪中，已知具有表面細微的傷痕(龜裂)成為起點而容易破損之性質。尤其是在將單結晶鑽石加工成圓板狀，進一步於其外周形成刃前端的情形時，由於在圓周上受到周期性地不同之結晶方位的影響，在特定之部位容易出現細微的傷痕(龜裂)。因此，不僅是算術平均粗糙度(Ra)，亦對於稜線之最大高度粗糙度(Rz)之值，以在受到不同之結晶方位之影響的複數個部位相同程度地變小之方式設定，可有效地防止破損。亦即，稜線之山高之最大值與谷深之最大值的和即稜線之最大高度粗糙度(Rz)，加工成在外周上無較上述值更大之部位，亦減少刀輪表面之難以出現在算術平均粗糙度(Ra)之值之局部的凹凸，藉此減少在刻劃時刀輪受到局部且集中的負載而產生破損之問題。 In the case where the material of the cutter wheel is a sintered body of a polycrystalline diamond, there is a problem in the case of a cutter wheel composed of a single crystal diamond. In recent years, it is known that the flaw (crack) having a fine surface is a starting point and is easily broken. . In particular, when a single-crystal diamond is processed into a disk shape and the tip end of the blade is further formed on the outer periphery thereof, fine scratches (turtles) are likely to occur in specific portions due to the influence of periodically different crystal orientations on the circumference. crack). Therefore, it is effective not only for the arithmetic mean roughness (Ra) but also for the value of the maximum height roughness (Rz) of the ridge line so as to be reduced to the same extent by a plurality of portions affected by different crystal orientations. Prevent damage. That is, the sum of the maximum value of the mountain height of the ridge line and the maximum value of the valley depth, that is, the maximum height roughness (Rz) of the ridge line, is processed into a portion having no larger value on the outer circumference, and also reduces the difficulty of the surface of the cutter wheel. Now, the local unevenness of the value of the arithmetic mean roughness (Ra) is used to reduce the problem that the cutter wheel is damaged by local and concentrated load at the time of scribing.
A‧‧‧刀輪 A‧‧‧knife wheel
L1‧‧‧第三段(最上段)之斜面之寬度 The width of the slope of the third paragraph (top) of L1‧‧
α3‧‧‧第三段之斜面之交點角度(第三段之左右斜面相交之角度) The angle of intersection of the slopes of the third paragraph of α3‧‧‧ (the angle at which the left and right slopes intersect at the third stage)
1‧‧‧圓板狀本體 1‧‧‧round plate body
2‧‧‧刃前端部 2‧‧‧blade front end
2a‧‧‧第一段(最下段)之斜面 2a‧‧‧1st (lowest) bevel
2b‧‧‧第二段之斜面 2b‧‧‧ slope of the second paragraph
2c‧‧‧第三段之斜面 2c‧‧‧The third paragraph of the slope
2d‧‧‧稜線 2d‧‧‧ ridgeline
3‧‧‧軸孔 3‧‧‧ shaft hole
圖1，係顯示本發明之刀輪的前視圖與側視圖、及刃前端部分的放大圖。 Fig. 1 is a front view and a side view showing a cutter wheel of the present invention, and an enlarged view of a front end portion of the blade.
圖2，係顯示本發明之刀輪之製造步驟的說明圖。 Fig. 2 is an explanatory view showing a manufacturing step of the cutter wheel of the present invention.
圖3，係顯示本發明之刀輪之製造方法中的第一次研磨步驟的說明圖。 Fig. 3 is an explanatory view showing a first grinding step in the method of manufacturing the cutter wheel of the present invention.
圖4，係說明本發明之效果的圖。 Fig. 4 is a view for explaining the effects of the present invention.
以下，針對本發明之刀輪及其製造方法，根據圖1~圖3詳細地進行說明。 Hereinafter, the cutter wheel of the present invention and a method of manufacturing the same will be described in detail with reference to Figs. 1 to 3 .
圖1(a)係顯示本發明之刀輪A的前視圖，圖1(b)係側視圖，圖1(c)係刃前端部分的放大圖。該刀輪A，僅以單結晶鑽石製作，於中心具備軸孔3的圓板狀本體1之外周面設有刃前端部2。本實施例中，形成為刀輪A之直徑D為2mm，厚度t為650μm，第三段(最上段)之斜面相交之角度為120°。 Fig. 1(a) is a front view showing a cutter wheel A of the present invention, Fig. 1(b) is a side view, and Fig. 1(c) is an enlarged view of a front end portion of the blade. The cutter wheel A is made of only single crystal diamond, and the blade tip end portion 2 is provided on the outer peripheral surface of the disk-shaped body 1 having the shaft hole 3 at the center. In the present embodiment, the diameter D of the cutter wheel A is 2 mm, the thickness t is 650 μm, and the angle at which the slopes of the third section (the uppermost section) intersect is 120°.
刀輪A之刃前端部2，由形成左右對稱之三段斜面2a、2b、2c、與形成於最上段斜面2c、2c之交點的稜線2d構成。該等斜面2a、2b、2c之傾斜角度，以上段之斜面較下段之斜面平緩之方式形成。本實施例中，第一段(最下段)之左右斜面2a、2a相交之角度α1為90~140°，較佳為形成100~140°，第二段之左右斜面2b、2b相交之角度α2為95~145°，較佳為形成105~145°，第三段(最上段)之左右斜面2c、2c相交之角度α3為100~150°，較佳為形成110~150°。該第三段斜面2c、2c與該等斜面相交之稜線2d，成為刻劃時侵入脆性材料基板之實質的刃前端。因此，斜面2c、2c相交之角度α3成為刃前端角度。此處，較佳為：第三段(最上段)之斜面2c、2c相交之角度α3與第二段之斜面2b、2b相交之角度α2的角度差為5~10°，第二段之斜面2b、2b相交之角度α2與第一段(最下段)之斜面2a、2a相交之角度α1的角度差為5~10°。藉由設定成上述角度差，能夠在將加工去除的量控制為最小限度之同時，以良好精度確實地形成傾斜面與稜線。 The tip end portion 2 of the cutter wheel A is composed of three slanted faces 2a, 2b, and 2c which are bilaterally symmetrical, and a ridgeline 2d formed at the intersection of the uppermost inclined faces 2c and 2c. The inclination angles of the inclined surfaces 2a, 2b, and 2c are formed such that the slope of the upper stage is gentler than the slope of the lower stage. In this embodiment, the angle α1 at which the left and right slopes 2a and 2a of the first segment (the lowermost segment) intersect is 90 to 140°, preferably 100 to 140°, and the angle α2 at which the left and right slopes 2b and 2b intersect. It is 95 to 145°, preferably 105 to 145°, and the angle α3 at which the left and right slopes 2c and 2c of the third stage (the uppermost stage) intersect is 100 to 150°, preferably 110 to 150°. The ridge line 2d at which the third-slope inclined surfaces 2c and 2c intersect with the inclined surfaces serves as a substantial blade tip end which intrudes into the brittle material substrate at the time of scribing. Therefore, the angle α3 at which the inclined faces 2c and 2c intersect is the blade tip end angle. Here, it is preferable that the angle difference between the angle α3 at which the inclined surfaces 2c and 2c of the third stage (the uppermost stage) intersect and the angle α2 intersecting the inclined surfaces 2b and 2b of the second stage is 5 to 10°, and the slope of the second stage The angle difference between the angle α2 at which the intersections 2b and 2b intersect with the slopes 2a and 2a of the first segment (the lowermost segment) is 5 to 10°. By setting the above-described angular difference, it is possible to reliably form the inclined surface and the ridge line with good precision while controlling the amount of processing removal to a minimum.
從成為該實質的刃前端的第三段斜面2c、2c之稜線起沿斜面之寬度L1，較佳為：在直徑為2mm且厚度為650μm之刀輪A中，以成為單側10 ~50μm之方式形成。在第三段(最上段)之斜面相交之角度為120°，沿斜面之寬度L1為單側50μm時，配合第三段之左右斜面部的厚度方向之寬度約為80μm。 The width L1 along the slope of the third stepped slopes 2c, 2c which is the tip end of the substantial blade is preferably a single wheel 10 in a cutter wheel A having a diameter of 2 mm and a thickness of 650 μm. Formed in a manner of ~50 μm. The angle at which the slope of the third stage (the uppermost stage) intersects is 120°, and when the width L1 of the slope is 50 μm on one side, the width of the left and right slopes of the third stage is about 80 μm.
接下來，根據圖2及圖3說明刀輪A之製造方法。 Next, a method of manufacturing the cutter wheel A will be described with reference to FIGS. 2 and 3.
圖2(a)係顯示刃前端加工前之圓板狀本體101。該圓板狀本體101，從側面觀察下為圓形且外周面平坦，於中心設有貫通之軸孔3。圓板狀本體101之厚度t，與完成後之刀輪A的厚度相同，為650μm。 Fig. 2(a) shows the disk-shaped body 101 before the tip end processing. The disk-shaped body 101 has a circular shape as viewed from the side and a flat outer peripheral surface, and a shaft hole 3 penetrating therethrough is provided at the center. The thickness t of the disk-shaped body 101 is the same as the thickness of the finished cutter wheel A, and is 650 μm.
將該圓板狀本體101之軸孔3，如圖3所示，***研磨裝置之旋轉軸4以安裝圓板狀本體101，一邊使圓板狀本體101旋轉一邊將研磨石5按壓於圓板狀本體101之外周面之側緣部分，以進行第一段斜面2a之加工，亦即一次加工步驟。於該步驟，首先加工一側之斜面2a，接著反轉圓板狀本體101以加工另一側之斜面2a。藉此，形成僅由如圖2(b)所示之斜面2a形成刃前端斜面之圓板狀本體102。 As shown in FIG. 3, the shaft hole 3 of the disk-shaped body 101 is inserted into the rotating shaft 4 of the polishing apparatus to mount the disk-shaped body 101, and the grinding stone 5 is pressed against the circular plate while rotating the disk-shaped body 101. The side edge portion of the outer peripheral surface of the body 101 is processed to perform the first step slope 2a, that is, a single processing step. In this step, the inclined surface 2a of one side is first processed, and then the disk-shaped body 101 is inverted to process the inclined surface 2a of the other side. Thereby, a disk-shaped body 102 in which the blade tip end slope is formed only by the slope 2a as shown in Fig. 2(b) is formed.
在一次加工步驟中，由於應去除之區域S1較大，亦即，加工區域較大，因此在藉由研磨進行加工時，使用粒度粗之研磨石，例如粒度為400~1000號，較佳為使用600~900號之粗研磨石進行研磨。 In one processing step, since the area S1 to be removed is large, that is, the processing area is large, when grinding by grinding, a coarse-grained grinding stone, for example, having a particle size of 400 to 1000, is preferably used. Grinding is carried out using coarse grinding stones No. 600~900.
接著，藉由與上述同樣的手法，進行二次加工步驟，該二次加工步驟係加工於先前的一次加工步驟中加工而成的第一段斜面2a之上方部分以形成第二段之斜面2b、2b。藉此，如圖2(c)所示，形成具有由第一段斜面2a與第二段斜面2b所形成之二段形狀之刃前端斜面的圓板狀本體103。此時，較佳為根據角度將沿第二段之斜面2b、2b的傾斜面之寬度W2設成為單側30~80μm。 Next, by the same method as described above, a secondary processing step is performed which is processed in the upper portion of the first-stage inclined surface 2a processed in the previous one-step processing step to form the inclined surface 2b of the second-stage 2b. Thereby, as shown in FIG. 2(c), a disk-shaped body 103 having a blade tip end slope formed by the first-stage inclined surface 2a and the second-stage inclined surface 2b is formed. At this time, it is preferable to set the width W2 of the inclined surface along the inclined surfaces 2b and 2b of the second stage to be 30 to 80 μm on one side depending on the angle.
於該二次加工步驟，由於藉由加工去除之區域S2，亦即加工區域，與一次加工步驟之加工區域S1相比相當地少，因此在藉由研磨進行加工時，可使用粒度較在一次加工步驟中所使用之研磨石更細之研磨石，例如粒度為2000~8000號，較佳為使用3000~5000號之研磨石進行研磨。藉此，第二段之斜面2b被漂亮地加工成較第一段之斜面2a更小的凹凸面。 In the secondary processing step, since the region S2 removed by the processing, that is, the processing region, is considerably smaller than the processing region S1 of the primary processing step, the grain size can be used once when processing by grinding. The grinding stone having a finer grinding stone used in the processing step, for example, having a particle size of 2000 to 8000, is preferably ground using a grinding stone of 3000 to 5000. Thereby, the inclined surface 2b of the second stage is beautifully processed into a concave-convex surface smaller than the inclined surface 2a of the first stage.
接著，如圖2(d)所示，進行三次加工步驟以完成圓板狀本體1，該三次加工步驟係加工藉由二次加工步驟加工而成的第二段斜面2b之上方部分以形成第三段之斜面2c、2c。此時，較佳為將從第三段之斜面2c、2c之稜線起的沿斜面之寬度W1設成為10~50μm。此外，此時，第三段之左右之斜面部的厚度方向之寬度L1設成為圓板狀本體1之厚度t之一半以下。該第三段之斜面2c、2c、與形成於該等斜面之交點的稜線2d，形成刻劃時侵入脆性材料基板之實質的刃前端。 Next, as shown in FIG. 2(d), three processing steps are performed to complete the disk-shaped body 1 which processes the upper portion of the second-stage inclined surface 2b processed by the secondary processing step to form the first Three sections of slopes 2c, 2c. In this case, it is preferable that the width W1 along the slope from the ridge line of the inclined surfaces 2c and 2c of the third stage is set to 10 to 50 μm. Further, at this time, the width L1 in the thickness direction of the left and right inclined surface portions of the third stage is set to be one-half or less of the thickness t of the disk-shaped main body 1. The inclined surfaces 2c and 2c of the third stage and the ridge line 2d formed at the intersection of the inclined surfaces form a substantial blade tip end which intrudes into the brittle material substrate at the time of scribing.
於三次加工步驟，藉由加工去除之區域S3，與二次加工步驟之加工區域S2相比更少，而且被研削之第二段斜面2b表面之凹凸，已藉由先前的二次加工步驟而變小。因此在藉由研磨進行加工的情形時，可使用粒度較在二次加工步驟中所使用之研磨石更細的精加工用之研磨石，例如粒度為10000~30000號之研磨石。藉此，能夠容易地研磨至所希望之表面粗糙度、亦即JIS0601：2013所規定之算術平均粗度(Ra)為0.03μm以下，較佳為研磨至0.01μm。 In the three processing steps, the area S3 removed by the processing is less than the processing area S2 of the secondary processing step, and the unevenness of the surface of the second stepped surface 2b which has been ground has been performed by the previous secondary processing step. Become smaller. Therefore, in the case of processing by grinding, it is possible to use a grinding stone having a finer grain size than that of the grinding stone used in the secondary processing step, for example, a grinding stone having a particle size of 10,000 to 30,000. Thereby, it is possible to easily polish to a desired surface roughness, that is, the arithmetic mean roughness (Ra) defined by JIS0601:2013 is 0.03 μm or less, and preferably to 0.01 μm.
同樣地，測量JIS0601：2013中規定之最大高度粗糙度(Rz)，最大高度粗糙度(Rz)設為0.3μm以下，較佳為0.1μm以下，更佳為0.05μm以下。藉此，能夠使因稜線之細微的傷痕(凹凸)而起的破損難以產生。另外， 在該加工中，雖算術平均粗糙度(Ra)及最大高度粗糙度(Rz)越小則破損越難以產生，但由於其加工之難易度亦增加，因此以與加工成本的關係來決定粗糙度之精度。 Similarly, the maximum height roughness (Rz) prescribed in JIS0601:2013 is measured, and the maximum height roughness (Rz) is 0.3 μm or less, preferably 0.1 μm or less, and more preferably 0.05 μm or less. Thereby, it is possible to prevent damage due to minute flaws (concavities and convexities) of the ridge line from occurring. In addition, In this process, the smaller the arithmetic mean roughness (Ra) and the maximum height roughness (Rz), the more difficult it is to break. However, since the difficulty of processing increases, the roughness is determined in relation to the processing cost. Precision.
如上所述在本發明中，經由一次、二次、三次之所謂的三階段加工步驟，加工具有三段斜面之刃前端部2。此時，藉由依照加工步驟順序而改變成粒度較細的研磨石，並以從第一段斜面2a至第二段斜面2b、進一步至第三段斜面2c依序使表面凹凸變小的方式加工。因此，在加工成為實質的刃前端斜面之第三段斜面2c的三次加工步驟中，可使用粒度細的精加工用之研磨石而容易地加工至所希望之表面粗糙度。此外，於三次加工步驟，由於僅針對成為實質的刃前端斜面之第三段斜面2c進行精加工成所希望之表面粗糙度，因此如圖4(b)所示，由於與習知的刃前端斜面之寬度L相比，圖4(a)所示之斜面2c之寬度L1為圓板狀本體1之厚度t之一半以下，因此能夠不浪費且迅速地進行精加工。該優點在僅由質硬的單結晶鑽石構成之刀輪的研磨中尤其特別顯著。 As described above, in the present invention, the blade tip end portion 2 having the three-stage bevel is machined through the so-called three-stage processing steps of one time, two times, and three times. At this time, by changing the fine-grained grinding stone in accordance with the order of the processing steps, the surface unevenness is sequentially reduced from the first-stage inclined surface 2a to the second-stage inclined surface 2b and further to the third-stage inclined surface 2c. machining. Therefore, in the three-step processing step of processing the third-stage inclined surface 2c which becomes the substantial blade front end slope, it is possible to easily process to a desired surface roughness using the grinding stone for fine-grain finishing. Further, in the third processing step, since only the third stepped surface 2c which becomes the substantial blade leading end slope is finished to a desired surface roughness, as shown in FIG. 4(b), due to the conventional blade tip The width L1 of the inclined surface 2c shown in FIG. 4(a) is one-half or less of the thickness t of the disk-shaped main body 1 as compared with the width L of the inclined surface, so that the finishing can be performed without wasting and quickly. This advantage is particularly pronounced in the grinding of cutter wheels consisting only of hard, single crystal diamonds.
以上，雖針對本發明之代表性的實施例進行了說明，但本發明並不特定於上述實施形態。例如，在本發明中包含上述實施例所示之直徑為2mm者，可適用於0.8~3mm之刀輪。此外，成為實質的刃前端角度的第三段斜面2c之交點角度α3，在本實施例中雖設定成120°，但可在100~150°之範圍內實施。 Although the representative embodiments of the present invention have been described above, the present invention is not limited to the above embodiments. For example, in the present invention, the diameter of 2 mm shown in the above embodiment can be applied to a cutter wheel of 0.8 to 3 mm. Further, the intersection angle α3 of the third stepped surface 2c which becomes the substantial blade tip end angle is set to 120° in the present embodiment, but can be implemented in the range of 100 to 150°.
此外，在本實施例中，雖於一次加工步驟、二次加工步驟、三次加工步驟中藉由研磨形成加工區域，但亦可藉由其他的加工方法形成加工區域。例如，可利用雷射加工，或是在摻雜氟素或磷等之不純物而具有導電 性的單結晶鑽石的情形時，可利用放電加工。在加工區域較大的一次加工步驟中，可使用雷射加工或放電加工縮短加工時間。另一方面，為了使加工後的表面粗糙度變小，三次加工較佳為進行研磨加工。 Further, in the present embodiment, the processing region is formed by polishing in one processing step, second processing step, and three processing steps, but the processing region may be formed by another processing method. For example, it can be processed by laser or conductive by doping impurities such as fluorine or phosphorus. In the case of a single crystallized diamond, electrical discharge machining can be utilized. In a single processing step in the processing area, laser processing or electrical discharge machining can be used to shorten the processing time. On the other hand, in order to make the surface roughness after the processing small, the tertiary processing is preferably performed by grinding.
此外，本發明可在達成其目的、不脫離申請專利範圍的範圍內適當地進行修改、變更。 Further, the present invention can be appropriately modified or changed within the scope of the invention without departing from the scope of the invention.
本發明，適用於對陶瓷基板或藍寶石基板、矽基板等、較非晶質之玻璃基板硬的脆性材料基板加工刻劃線、或進行分斷時使用之單結晶鑽石製之刀輪。 The present invention is suitable for use in a process for scribing a brittle material substrate which is hard on a ceramic substrate, a sapphire substrate, a ruthenium substrate or the like, or a relatively amorphous glass substrate, or a single crystal diamond cutter wheel used for the separation.
A‧‧‧刀輪 A‧‧‧knife wheel
D‧‧‧刀輪之直徑 D‧‧‧ diameter of the cutter wheel
L1‧‧‧第三段(最上段)之斜面之寬度 The width of the slope of the third paragraph (top) of L1‧‧
W1‧‧‧從第三段之斜面2c、2c之稜線起的沿斜面之寬度 W1‧‧‧ Width along the slope from the ridgeline 2c, 2c of the third paragraph
W2‧‧‧沿第二段之斜面2b、2b的傾斜面之寬度 W2‧‧‧The width of the inclined surface along the slopes 2b, 2b of the second paragraph
t‧‧‧刀輪之厚度 T‧‧‧ thickness of the cutter wheel
α1‧‧‧第一段之左右斜面相交之角度 Angle of intersection of the left and right slopes of the first paragraph of α1‧‧‧
α2‧‧‧第二段之左右斜面相交之角度 Angle of intersection of the left and right slopes of the second paragraph of α2‧‧‧
α3‧‧‧第三段之左右斜面相交之角度 Angle of intersection of the left and right slopes of the third paragraph of α3‧‧
1‧‧‧圓板狀本體 1‧‧‧round plate body
2‧‧‧刃前端部 2‧‧‧blade front end
2a‧‧‧第一段(最下段)之斜面 2a‧‧‧1st (lowest) bevel
2b‧‧‧第二段之斜面 2b‧‧‧ slope of the second paragraph
2c‧‧‧第三段之斜面 2c‧‧‧The third paragraph of the slope
2d‧‧‧稜線 2d‧‧‧ ridgeline
3‧‧‧軸孔 3‧‧‧ shaft hole
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| JP2016089465A JP6736151B2 (en) | 2015-06-30 | 2016-04-27 | Cutter wheel and manufacturing method thereof |
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| TWI365175B (en) * | 2008-12-18 | 2012-06-01 | Univ Nat Taiwan | Method and device for vibration assistant scribing process on a substrate |
| JP5597327B2 (en) * | 2010-06-29 | 2014-10-01 | 学校法人東京理科大学 | Diamond-coated tool and manufacturing method thereof |
| JP5174118B2 (en) * | 2010-10-08 | 2013-04-03 | 三星ダイヤモンド工業株式会社 | Scribing wheel and manufacturing method thereof |
| EP2823944B1 (en) * | 2012-03-08 | 2016-12-21 | Mitsuboshi Diamond Industrial Co., Ltd. | Scribing wheel and method for manufacturing same |
| JP5998574B2 (en) * | 2012-03-29 | 2016-09-28 | 三星ダイヤモンド工業株式会社 | Manufacturing method of scribing wheel |
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| JP6357746B2 (en) * | 2013-09-24 | 2018-07-18 | 三星ダイヤモンド工業株式会社 | Scribing wheel, holder unit, scribing device, scribing wheel manufacturing method and scribing method |
| JP2015205459A (en) * | 2014-04-21 | 2015-11-19 | 三星ダイヤモンド工業株式会社 | Scribe device, scribe method and scribing tool |
| JP2015209350A (en) * | 2014-04-25 | 2015-11-24 | 三星ダイヤモンド工業株式会社 | Method for manufacturing scribing tool, scribing tool, scribing apparatus and scribing method |
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