TW201706098A - Cutter wheel which can inhibit crack of blade tip due to impact during polishing process and can be stably held at a tapered shaft of the polishing apparatus - Google Patents
Cutter wheel which can inhibit crack of blade tip due to impact during polishing process and can be stably held at a tapered shaft of the polishing apparatus Download PDFInfo
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- TW201706098A TW201706098A TW105118729A TW105118729A TW201706098A TW 201706098 A TW201706098 A TW 201706098A TW 105118729 A TW105118729 A TW 105118729A TW 105118729 A TW105118729 A TW 105118729A TW 201706098 A TW201706098 A TW 201706098A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
- B28D5/022—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D1/00—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
- B28D1/22—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by cutting, e.g. incising
- B28D1/225—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by cutting, e.g. incising for scoring or breaking, e.g. tiles
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
- B23D19/00—Shearing machines or shearing devices cutting by rotary discs
- B23D19/08—Shearing machines or shearing devices cutting by rotary discs for special use, e.g. for cutting curves, for chamfering edges
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B3/00—Sharpening cutting edges, e.g. of tools; Accessories therefor, e.g. for holding the tools
- B24B3/36—Sharpening cutting edges, e.g. of tools; Accessories therefor, e.g. for holding the tools of cutting blades
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B26—HAND CUTTING TOOLS; CUTTING; SEVERING
- B26D—CUTTING; DETAILS COMMON TO MACHINES FOR PERFORATING, PUNCHING, CUTTING-OUT, STAMPING-OUT OR SEVERING
- B26D1/00—Cutting through work characterised by the nature or movement of the cutting member or particular materials not otherwise provided for; Apparatus or machines therefor; Cutting members therefor
- B26D1/01—Cutting through work characterised by the nature or movement of the cutting member or particular materials not otherwise provided for; Apparatus or machines therefor; Cutting members therefor involving a cutting member which does not travel with the work
- B26D1/12—Cutting through work characterised by the nature or movement of the cutting member or particular materials not otherwise provided for; Apparatus or machines therefor; Cutting members therefor involving a cutting member which does not travel with the work having a cutting member moving about an axis
- B26D1/14—Cutting through work characterised by the nature or movement of the cutting member or particular materials not otherwise provided for; Apparatus or machines therefor; Cutting members therefor involving a cutting member which does not travel with the work having a cutting member moving about an axis with a circular cutting member, e.g. disc cutter
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D1/00—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
- B28D1/32—Methods and apparatus specially adapted for working materials which can easily be split, e.g. mica, slate, schist
- B28D1/327—Methods and apparatus specially adapted for working materials which can easily be split, e.g. mica, slate, schist for cutting or shearing easily splittable working materials
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Mining & Mineral Resources (AREA)
- Life Sciences & Earth Sciences (AREA)
- Forests & Forestry (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Polishing Bodies And Polishing Tools (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
- Dicing (AREA)
Abstract
Description
本發明係關於一種適用於對氧化鋁、HTCC(高溫共燒多層陶瓷)、LTCC(低溫共燒多層陶瓷基板)等陶瓷基板或藍寶石基板、矽基板等、較非晶質玻璃基板硬的脆性材料基板進行刻劃線(切槽)加工、分斷的由單結晶鑽石構成之刀輪(亦稱為刻劃輪)。 The present invention relates to a brittle material which is suitable for a ceramic substrate such as alumina, HTCC (high temperature co-fired multilayer ceramic), LTCC (low temperature co-fired multilayer ceramic substrate) or a sapphire substrate, a ruthenium substrate or the like, which is harder than an amorphous glass substrate. The substrate is subjected to scribing (grooving) processing, and a cutter wheel (also referred to as a scoring wheel) composed of a single crystal diamond.
對脆性材料基板進行分斷之加工，一般已知有以下方法，例如專利文獻1揭示的方法，即，使用刀輪在基板表面形成刻劃線，之後，沿刻劃線從背面側施加外力以使基板撓曲，藉此分斷成各個單位基板。 For the processing of the breaking of the brittle material substrate, the following method is generally known. For example, the method disclosed in Patent Document 1 is to form a scribe line on the surface of the substrate using a cutter wheel, and then apply an external force from the back side along the scribe line. The substrate is deflected, thereby being separated into individual unit substrates.
用於在脆性材料基板加工刻劃線之刀輪，係使用在圓周面具有V字形之刃前端的刀輪。一般而言，刀輪係由超硬合金或多結晶鑽石燒結體作成，但最近受到注目的是對硬度較玻璃基板高之陶瓷基板或藍寶石基板、矽基板等刻劃用之由單結晶鑽石構成的刀輪。 For a cutter wheel for scribing a brittle material substrate, a cutter wheel having a V-shaped blade tip end is used. In general, the cutter wheel is made of a superhard alloy or a polycrystalline diamond sintered body, but recently it has been noticed that it is composed of a single crystal diamond for scribing a ceramic substrate or a sapphire substrate having a higher hardness than a glass substrate, and a ruthenium substrate. Knife wheel.
為了在刀輪之圓周面形成V字形之刃前端，如圖3(a)所示，將作為素材的圓板狀本體101之軸承孔103嵌入研磨裝置之錐形軸4，使圓板狀本體101與錐形軸一起旋轉，藉由研磨石5將圓周面之兩側緣研磨成傾斜，以形成由左右之斜面與稜線構成之V字形之刃前端部102。 In order to form the front end of the V-shaped blade on the circumferential surface of the cutter wheel, as shown in FIG. 3(a), the bearing hole 103 of the disk-shaped body 101 as a material is inserted into the tapered shaft 4 of the polishing apparatus to form a disk-shaped body. The 101 rotates together with the tapered shaft, and the both sides of the circumferential surface are ground to be inclined by the grinding stone 5 to form a V-shaped blade leading end portion 102 composed of left and right inclined surfaces and ridge lines.
使用於脆性材料基板、尤其是半導體基板之刻劃的刀輪，由於其直徑為1~3mm非常地小，因此被要求能夠容易地相對研磨裝置之錐 形軸4或刀輪之保持具(未圖示)裝卸。因此，以內徑一定之貫通孔形成圓板狀本體101之軸承孔103，並形成將其兩端之開口緣斜切而成之切面103a，藉此容易往錐形軸4***。 A scribing wheel for scribing a brittle material substrate, in particular a semiconductor substrate, is required to be easily opposed to the cone of the polishing device because its diameter is very small from 1 to 3 mm. The shaft 4 or the holder of the cutter wheel (not shown) is attached and detached. Therefore, the bearing hole 103 of the disk-shaped body 101 is formed by the through hole having a constant inner diameter, and the cut surface 103a obtained by chamfering the opening edges of both ends thereof is formed, whereby the tapered shaft 4 is easily inserted.
此外，研磨裝置之錐形軸4，通常是以超硬合金、碳鋼、不銹鋼、鋼材等工具材作成，且形成為緩和傾斜之前端細狀之狀態。藉此，如圖3所示，僅需將圓板狀本體101***錐形軸4，便能夠在切面103a之角部103b與錐形軸4之周面接觸的位置，在無晃動的情形下穩定保持圓板狀本體101。此外，在研磨後，僅需將圓板狀本體101拔起，便能夠從錐形軸4卸除。 Further, the tapered shaft 4 of the polishing apparatus is usually made of a tool material such as cemented carbide, carbon steel, stainless steel, or steel, and is formed to relax the state in which the front end is thin. Thereby, as shown in FIG. 3, only the disk-shaped body 101 needs to be inserted into the tapered shaft 4, so that the corner portion 103b of the cut surface 103a can be in contact with the circumferential surface of the tapered shaft 4 without shaking. The disk-shaped body 101 is stably held. Further, after the grinding, the disk-shaped body 101 only needs to be pulled up, so that it can be removed from the tapered shaft 4.
專利文獻1：日本專利3787489號公報 Patent Document 1: Japanese Patent No. 3787489
然而，如上所述，在圓板狀本體101被保持於錐形軸4的狀態下，如圖3(b)之放大圖所示，係以切面103a之尖的角部103b之一處接觸於錐形軸4。因此，在利用研磨石進行研磨加工時，由於負載集中於該尖的角部103b之一處，因此在由硬度高的單結晶鑽石構成之圓板狀本體101，有時會因碰撞而產生破裂等損壞。尤其是，由於單結晶鑽石與超硬合金或多結晶鑽石燒結體不同，其硬度根據結晶方位而有所不同，因此在硬度較周圍小的部分容易產生破裂。此外，有時會有因硬且尖的角部103b而在錐形軸4表面產生小凹凸的傷痕。一旦產生上述傷痕，由於圓板狀本體101以角部103b之一處支承於錐形軸4，因此在其姿勢產生微細的傾斜而無法將旋轉面維持水平。因此，使得旋轉不穩而無法精密加工刃前端尺寸。 However, as described above, in a state where the disk-shaped body 101 is held by the tapered shaft 4, as shown in an enlarged view of Fig. 3(b), one of the corner portions 103b of the pointed surface 103a is in contact with Tapered shaft 4. Therefore, when the grinding process is performed by the grinding stone, since the load is concentrated on one of the pointed corner portions 103b, the disk-shaped body 101 composed of the single crystal diamond having a high hardness may be broken by the collision. And so on. In particular, since the single crystal diamond is different from the superhard alloy or the polycrystalline diamond sintered body, the hardness thereof differs depending on the crystal orientation, and therefore cracks are likely to occur in a portion having a hardness smaller than the surrounding portion. Further, there may be a flaw in which small unevenness is generated on the surface of the tapered shaft 4 due to the hard and pointed corner portion 103b. When the above-described flaw occurs, the disk-shaped body 101 is supported by the tapered shaft 4 at one of the corner portions 103b, so that the posture is slightly inclined and the rotating surface cannot be maintained horizontal. Therefore, the rotation is unstable and the front end size cannot be precisely machined.
本發明有鑑於上述課題，其目的在提供一種能夠抑制刃前端部之研磨加工時因碰撞產生破損，並且穩定保持於研磨裝置之錐形軸的單 結晶鑽石製之刀輪。 The present invention has been made in view of the above problems, and an object thereof is to provide a single article capable of suppressing breakage due to collision during polishing processing of a tip end portion of a blade and stably holding the tapered shaft of the polishing device. A cutter wheel made of crystallized diamonds.
為了解決上述課題在本發明中提出如以下之技術性手段。亦即，本發明之刀輪，係在圓板狀本體之外周面設有刃前端部之單結晶鑽石製之刀輪，在該圓板狀本體之中心貫通形成軸承孔，且該軸承孔之兩端開口緣以切除成曲線狀之圓弧面形成。 In order to solve the above problems, the following technical means are proposed in the present invention. In other words, the cutter wheel of the present invention is provided with a single crystal diamond cutter wheel having a blade tip end portion on the outer peripheral surface of the disk-shaped body, and a bearing hole is formed through the center of the disk-shaped body, and the bearing hole is formed The opening edges at both ends are formed by cutting off a curved arcuate surface.
根據本發明之刀輪，由於在為了進行刃前端部之研磨加工而將圓板狀本體安裝於研磨裝置之錐形軸時，以軸承孔之兩端緣之圓弧面接觸保持於錐形軸之周面，因此相較於習知以尖的角部接觸之支承構造，能夠緩和負載集中於一點，抑制因碰撞產生破損。此外，由於以圓弧面接觸錐形軸，因此不會如習知以尖的角部接觸的情形般在錐形軸周面產生小傷痕。藉此，能夠以始終穩定之姿勢、且以無旋轉不穩之狀態支承圓板狀本體，能夠精密地進行刃前端部之研磨加工。 According to the cutter wheel of the present invention, when the disk-shaped body is attached to the tapered shaft of the polishing apparatus for the grinding process of the tip end portion of the blade, the arc-shaped surface contact of the both end edges of the bearing hole is held by the tapered shaft. Since the circumferential surface is smaller than the conventional support structure in which the corners are in contact with each other, it is possible to alleviate the load concentration at one point and suppress the damage due to the collision. Further, since the tapered shaft is contacted by the circular arc surface, small flaws are not generated on the circumferential surface of the tapered shaft as is conventionally known to be contacted by sharp corners. Thereby, the disk-shaped body can be supported in a state of constant stability and in a state of no rotation instability, and the blade front end portion can be precisely polished.
在上述發明中，較佳為：沿著該軸承孔之軸方向的該圓弧面之長度，形成為該軸承孔之全長的3~12%。 In the above invention, preferably, the length of the circular arc surface along the axial direction of the bearing hole is formed to be 3 to 12% of the total length of the bearing hole.
藉此，在將刀輪安裝於刻劃裝置之保持具軸時，能夠將與保持具軸周面接觸之軸承孔內面確保為軸承孔全長之80%以上，能夠穩定地使刀輪被周接觸支承於保持具軸。 Therefore, when the cutter wheel is attached to the holder shaft of the scribing device, the inner surface of the bearing hole that is in contact with the circumferential surface of the holder can be secured to 80% or more of the total length of the bearing hole, and the cutter wheel can be stably surrounded. The contact is supported on the retainer shaft.
此外在上述發明中，較佳為：該圓弧面，以越靠近軸承孔之開口端則曲率越大的曲線形成。 Further, in the above invention, it is preferable that the circular arc surface is formed by a curve having a larger curvature as it approaches the open end of the bearing hole.
藉此，軸承孔之開口端以較正圓之圓弧大且呈喇叭狀擴大而能夠更容易進行往錐形軸或保持具軸之***操作。 Thereby, the open end of the bearing hole is enlarged in a flared shape with a circular arc of a straight circle, and the insertion operation to the tapered shaft or the retainer shaft can be performed more easily.
A‧‧‧刀輪 A‧‧‧knife wheel
L‧‧‧軸承孔之全長 L‧‧‧Full length of bearing hole
L1‧‧‧軸承孔方向之圓弧面長度 L1‧‧‧Arc length of bearing hole direction
L2‧‧‧圓板狀本體側面方向之圓弧面長度 L2‧‧‧Circular surface length in the direction of the circular plate body
1‧‧‧圓板狀本體 1‧‧‧round plate body
1’‧‧‧研磨加工前之圓板狀本體 1'‧‧‧round plate body before grinding
2‧‧‧刃前端部 2‧‧‧blade front end
3‧‧‧軸承孔 3‧‧‧ bearing hole
3a‧‧‧圓弧面 3a‧‧‧Arc face
4‧‧‧錐形軸 4‧‧‧Conical shaft
圖1，係顯示本發明之刀輪的圖。 Fig. 1 is a view showing a cutter wheel of the present invention.
圖2，係顯示本發明之刀輪之製造步驟的說明圖。 Fig. 2 is an explanatory view showing a manufacturing step of the cutter wheel of the present invention.
圖3，係顯示習知的刀輪之製造步驟的說明圖。 Fig. 3 is an explanatory view showing a manufacturing step of a conventional cutter wheel.
以下，針對本發明之刀輪，根據圖1、2詳細地進行說明。 Hereinafter, the cutter wheel of the present invention will be described in detail with reference to Figs.
圖1係顯示本發明之刀輪A的圖，圖1(a)係前視圖，圖1(b)係側視剖面圖，圖1(c)係軸承孔3之圓弧面3a部分的放大圖。該刀輪A，僅以單結晶鑽石製作，且在具備貫通中心之軸承孔3的圓板狀本體1之外周面設置刃前端部2。刃前端部2，由左右之斜面2a、2a、與形成於該等斜面2a、2a之交點的稜線2b構成。本實施例中，刀輪A之直徑形成為2mm，厚度形成為650μm。 BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view showing a cutter wheel A of the present invention, Fig. 1(a) is a front view, Fig. 1(b) is a side sectional view, and Fig. 1(c) is an enlarged view of a portion of a circular arc surface 3a of a bearing hole 3. Figure. The cutter wheel A is made of only single crystal diamond, and the blade tip end portion 2 is provided on the outer peripheral surface of the disk-shaped body 1 having the bearing hole 3 penetrating the center. The blade distal end portion 2 is composed of left and right inclined surfaces 2a and 2a and ridge lines 2b formed at intersections of the inclined surfaces 2a and 2a. In the present embodiment, the diameter of the cutter wheel A is 2 mm, and the thickness is 650 μm.
圓板狀本體1之軸承孔3形成為內徑一定的貫通孔，其兩端開口緣以切除成曲線狀之圓弧面3a形成。 The bearing hole 3 of the disk-shaped body 1 is formed as a through hole having a constant inner diameter, and the opening edges at both ends thereof are formed by cutting the arcuate surface 3a into a curved shape.
圓弧面3a之沿軸承孔方向的長度L1，形成為軸承孔3之全長L的3~12%，較佳為7~10%。本實施例中，相對於軸承孔全長650μm設為25~60μm。 The length L1 of the circular arc surface 3a in the direction of the bearing hole is formed to be 3 to 12%, preferably 7 to 10%, of the total length L of the bearing hole 3. In the present embodiment, the total length of the bearing hole is 650 μm, which is 25 to 60 μm.
該圓弧面之內面側之曲率半徑R，係在與軸承孔3之圓筒狀部分的邊界內接於圓弧面之假想圓之半徑，該假想圓，係以與軸承孔3之圓筒狀部分的邊界的接點為起點，以中心角θ為30~90°之圓弧與圓弧面一致之方式設定。此外，R為輪之厚度的0.03倍以上，且為100μm以下。 The radius of curvature R of the inner surface side of the circular arc surface is a radius of an imaginary circle that is in contact with the circular arc surface at the boundary with the cylindrical portion of the bearing hole 3, and the imaginary circle is rounded with the bearing hole 3 The joint of the boundary of the cylindrical portion is the starting point, and the arc having the central angle θ of 30 to 90° is set to coincide with the arc surface. Further, R is 0.03 times or more of the thickness of the wheel and is 100 μm or less.
此外，圓弧面3a之圓板狀本體1之側面側的長度L2，設成為沿軸承孔 方向之長度L1的0.5~2.0倍、較佳為1.0~1.5倍之長度。 Further, the length L2 of the side surface side of the disk-shaped body 1 of the circular arc surface 3a is set to be along the bearing hole. The length L1 of the direction is 0.5 to 2.0 times, preferably 1.0 to 1.5 times the length.
本實施例中，該圓弧面3a，以越靠近軸承孔3之開口端則曲線之曲率越大的方式形成。即使在此情形下，和與軸承孔3之圓筒狀部分的邊界相接之假想圓之半徑即內面側之曲率半徑R，為輪厚度的0.03倍以上。藉此，如圖1(c)所示，圓弧面3a之圓板狀本體1之側面的長度L2形成為較L1長。本實施例中，L2之長度範圍為25~100μm、較佳為60~100μm，更佳之例為採用80μm。 In the present embodiment, the circular arc surface 3a is formed such that the curvature of the curved line is larger as it approaches the open end of the bearing hole 3. Even in this case, the radius of the imaginary circle that is in contact with the boundary of the cylindrical portion of the bearing hole 3, that is, the radius of curvature R of the inner surface side is 0.03 times or more of the thickness of the wheel. Thereby, as shown in FIG. 1(c), the length L2 of the side surface of the disk-shaped main body 1 of the circular arc surface 3a is formed longer than L1. In the present embodiment, the length of L2 is in the range of 25 to 100 μm, preferably 60 to 100 μm, and more preferably 80 μm.
圖2係顯示本發明之刀輪A之製造步驟的說明圖，符號1’係表示刃前端部2之研磨加工前的圓板狀本體。該圓板狀本體1’，從側面觀察為圓形，其外周面平坦，且於中心預先加工軸承孔3，該軸承孔3係於兩端開口緣具備上述之圓弧面3a。 Fig. 2 is an explanatory view showing a manufacturing step of the cutter wheel A of the present invention, and reference numeral 1' denotes a disk-shaped body before the grinding process of the blade tip end portion 2. The disk-shaped main body 1' has a circular shape as viewed from the side, and has an outer peripheral surface which is flat, and the bearing hole 3 is previously machined at the center, and the bearing hole 3 is provided with the above-mentioned circular arc surface 3a at the both end opening edges.
將該圓板狀本體1’之軸承孔3，如圖2(a)所示***研磨裝置之錐形軸4以安裝圓板狀本體1’，一邊使圓板狀本體1’旋轉一邊將研磨石5按壓於圓板狀本體1’之外周面之側緣部分以加工刃前端2。在此步驟中，首先加工一側之刃前端斜面，接著使圓板狀本體1’反轉以加工另一側之刃前端斜面。藉此，加工出由圖1所示之左右之斜面2a、2a與稜線2b構成之刃前端2。 The bearing hole 3 of the disk-shaped body 1' is inserted into the tapered shaft 4 of the polishing apparatus as shown in Fig. 2(a) to mount the disk-shaped body 1', and the disk-shaped body 1' is rotated while rotating. The stone 5 is pressed against the side edge portion of the outer peripheral surface of the disk-shaped body 1' to machine the blade leading end 2. In this step, the leading edge slope of one side is first machined, and then the disk-shaped body 1' is reversed to machine the leading edge slope of the other side. Thereby, the blade tip end 2 composed of the left and right inclined faces 2a, 2a and the ridgeline 2b shown in Fig. 1 is machined.
上述刃前端加工步驟中，安裝於研磨裝置之錐形軸4的圓板狀本體1’，如圖2(b)之放大圖所示，以軸承孔3之兩端緣之圓弧面3a、3a接觸保持於錐形軸4之周面。該圓弧面3a與錐形軸4之周面的接觸，於負載為0時係點接觸，當在接觸部分施加負載時，接觸部分變形並在對應負載之狹窄的範圍內進行面接觸(參考：赫茲接觸理論(球與平面))。藉此，相 較於以如圖3之尖的角部103b接觸錐形軸4之周面的習知構造，能夠緩和負載之集中於一點，抑制因碰撞產生破損。另外，圓弧面3a之曲率半徑R越大，則越容易使施加於與錐形軸接觸的接觸部分之負載分散。此外，本發明中由於係以圓弧面3a接觸錐形軸4，因此不會如習知的以尖的角部103b接觸的情形時在錐形軸4之周面產生小傷痕，而能夠以始終穩定的姿勢保持圓板狀本體1’。 In the blade front end processing step, the disk-shaped body 1' attached to the tapered shaft 4 of the polishing apparatus has an arcuate surface 3a of both end edges of the bearing hole 3 as shown in an enlarged view of FIG. 2(b). The 3a contact is held on the circumferential surface of the tapered shaft 4. The contact between the circular arc surface 3a and the circumferential surface of the tapered shaft 4 is in point contact when the load is 0. When a load is applied to the contact portion, the contact portion is deformed and surface contact is performed within a narrow range of the corresponding load (refer to : Hertz contact theory (ball and plane)). With this, phase Compared with the conventional structure in which the corner portion 103b of the tip of FIG. 3 contacts the circumferential surface of the tapered shaft 4, it is possible to alleviate the concentration of the load and suppress damage due to the collision. Further, the larger the radius of curvature R of the circular arc surface 3a, the easier it is to disperse the load applied to the contact portion that is in contact with the tapered shaft. Further, in the present invention, since the tapered shaft 4 is contacted by the circular arc surface 3a, it is not possible to cause small scratches on the circumferential surface of the tapered shaft 4 as in the case of the conventional contact with the pointed corner portion 103b, and it is possible to The disc-shaped body 1' is maintained in a stable posture.
此外，圓弧面3a，由於將沿軸承孔3之軸方向的長度L1設為軸承孔3之全長L的3~12%，因此在將刀輪A安裝於刻劃裝置之保持具軸(未圖示)時，能夠確保接觸保持具軸周面之軸承孔3內面為軸承孔3全長的80%以上。藉此，能夠使刀輪A以穩定的狀態被周接觸支承於保持具軸。 Further, since the arc surface 3a has a length L1 along the axial direction of the bearing hole 3 of 3 to 12% of the total length L of the bearing hole 3, the cutter wheel A is attached to the holder shaft of the scoring device (not In the case of the drawing, it is possible to ensure that the inner surface of the bearing hole 3 that contacts the peripheral surface of the retainer has 80% or more of the entire length of the bearing hole 3. Thereby, the cutter wheel A can be supported and supported by the holder shaft in a stable state in the circumferential direction.
進一步地，該圓弧面3a，由於係以越靠近軸承孔3之開口端則曲線之曲率越大的方式形成，且圓弧面3a於圓板狀本體1之側面側的長度L2較軸承孔方向的長度L1長，因此使軸承孔3之開口端以較正圓之圓弧大且呈喇叭狀擴大，而使往錐形軸4或保持具軸之***操作更為容易。 Further, the circular arc surface 3a is formed in such a manner that the curvature of the curved line is larger as it is closer to the open end of the bearing hole 3, and the length L2 of the circular arc surface 3a on the side surface side of the circular plate-shaped body 1 is larger than that of the bearing hole. Since the length L1 of the direction is long, the open end of the bearing hole 3 is enlarged in a flared shape with a circular arc of a straight circle, and the insertion operation to the tapered shaft 4 or the holder shaft is made easier.
以上，雖針對本發明之代表性的實施例進行了說明，但本發明並不一定特定於上述實施形態。例如，本發明可適用於包含上述實施例所示之直徑2mm的0.8~3mm的刀輪。 Although the representative embodiments of the present invention have been described above, the present invention is not necessarily limited to the above embodiments. For example, the present invention is applicable to a cutter wheel comprising 0.8 mm to 3 mm having a diameter of 2 mm as shown in the above embodiment.
此外，本發明可在達成其目的、不脫離申請專利範圍之範圍內適當地進行修改、變更。 Further, the present invention can be appropriately modified or changed within the scope of the invention without departing from the scope of the invention.
本發明適用於對陶瓷基板或藍寶石基板、矽基板等、較非晶質玻璃基板硬的脆性材料基板加工刻劃線、進行分斷時使用之單結晶鑽石製的刀輪。 The present invention is applicable to a single-crystal diamond cutter wheel that is used for dicing a hard substrate such as a ceramic substrate, a sapphire substrate, a ruthenium substrate, or the like, which is harder than an amorphous glass substrate, and is used for cutting.
A‧‧‧刀輪 A‧‧‧knife wheel
L‧‧‧軸承孔之全長 L‧‧‧Full length of bearing hole
L1‧‧‧軸承孔方向之圓弧面長度 L1‧‧‧Arc length of bearing hole direction
L2‧‧‧圓板狀本體側面方向之圓弧面長度 L2‧‧‧Circular surface length in the direction of the circular plate body
R‧‧‧圓弧面之內面側之曲率半徑 The radius of curvature of the inner side of the R‧‧‧ arc surface
θ‧‧‧中心角 Θ‧‧‧ center angle
1‧‧‧圓板狀本體 1‧‧‧round plate body
2‧‧‧刃前端部 2‧‧‧blade front end
2a‧‧‧斜面 2a‧‧‧Bevel
2b‧‧‧稜線 2b‧‧‧ ridgeline
3‧‧‧軸承孔 3‧‧‧ bearing hole
3a‧‧‧圓弧面 3a‧‧‧Arc face
Claims (3)
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015152328 | 2015-07-31 | ||
| JPJP2015-152328 | 2015-07-31 | ||
| JPJP2015-247485 | 2015-12-18 | ||
| JP2015247485A JP6740606B2 (en) | 2015-07-31 | 2015-12-18 | Cutter wheel |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201706098A true TW201706098A (en) | 2017-02-16 |
| TWI718156B TWI718156B (en) | 2021-02-11 |
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| Application Number | Title | Priority Date | Filing Date |
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| TW105118729A TWI718156B (en) | 2015-07-31 | 2016-06-15 | Knife wheel |
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| Country | Link |
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| JP (1) | JP6740606B2 (en) |
| KR (1) | KR102516664B1 (en) |
| CN (1) | CN106393452B (en) |
| TW (1) | TWI718156B (en) |
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|---|---|---|---|---|
| CN109849196A (en) * | 2017-11-30 | 2019-06-07 | 三星钻石工业股份有限公司 | Stitch marker, point of a knife bracket and fulcrum post |
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| JP2019067845A (en) * | 2017-09-29 | 2019-04-25 | Ｄｏｗａメタルテック株式会社 | Method for manufacturing metal-ceramic joint circuit board |
| JP6936485B2 (en) * | 2017-12-27 | 2021-09-15 | 三星ダイヤモンド工業株式会社 | Scrivener and holder unit |
| CN110027030A (en) * | 2019-04-16 | 2019-07-19 | 嘉兴沃尔德金刚石工具有限公司 | A kind of break bar |
| JP7312430B2 (en) * | 2019-05-28 | 2023-07-21 | 三星ダイヤモンド工業株式会社 | Cutter wheel and holder unit |
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| KR20090058806A (en) * | 2007-12-05 | 2009-06-10 | 주식회사 탑 엔지니어링 | Scribe apparatus |
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| KR100913411B1 (en) * | 2008-08-21 | 2009-08-21 | 김용범 | Cutter for chamfering |
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| JP2015000497A (en) * | 2013-06-14 | 2015-01-05 | 三星ダイヤモンド工業株式会社 | Tip holder unit, tip holder, pin, wheel tip, and substrate processing device |
| CN103506680B (en) * | 2013-08-23 | 2017-02-01 | 厦门金鹭特种合金有限公司 | Cutting blade and milling tool using same |
| CN105108795B (en) * | 2015-08-31 | 2018-02-06 | 嘉兴沃尔德金刚石工具有限公司 | A kind of break bar |
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2015
- 2015-12-18 JP JP2015247485A patent/JP6740606B2/en active Active
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2016
- 2016-06-15 TW TW105118729A patent/TWI718156B/en active
- 2016-06-27 KR KR1020160079951A patent/KR102516664B1/en active IP Right Grant
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109849196A (en) * | 2017-11-30 | 2019-06-07 | 三星钻石工业股份有限公司 | Stitch marker, point of a knife bracket and fulcrum post |
Also Published As
| Publication number | Publication date |
|---|---|
| JP6740606B2 (en) | 2020-08-19 |
| JP2017030344A (en) | 2017-02-09 |
| KR102516664B1 (en) | 2023-04-03 |
| CN106393452B (en) | 2021-08-24 |
| TWI718156B (en) | 2021-02-11 |
| KR20170015136A (en) | 2017-02-08 |
| CN106393452A (en) | 2017-02-15 |
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