TW201644183A - Dry vacuum pump device and method of controlling same - Google Patents
Dry vacuum pump device and method of controlling same Download PDFInfo
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本發明係關於一種乾式真空泵浦裝置、其控制方法及控制程式，特別是關於在指的是於1秒鐘以下程度之短時間發生的停電之「瞬停」等停電後，可立即再啟動真空泵浦之旋轉，或是可立即將真空泵浦之速度恢復到額定狀態的乾式真空泵浦裝置、其控制方法及控制程式者。 The present invention relates to a dry vacuum pumping device, a control method thereof and a control program thereof, and particularly to restarting a vacuum pump immediately after a power failure such as a "short-stop" of a power failure occurring in a short time of less than one second. The rotation of the pump, or the dry vacuum pumping device that can immediately restore the vacuum pumping speed to the rated state, its control method and control program.
半導體元件、液晶、太陽光面板、LED等生產線上，為了將進行各種處理之處理室內進行真空排氣，而廣泛使用乾式真空泵浦裝置。乾式真空泵浦裝置因指的是於1秒鐘以下程度之短時間發生的停電之「瞬停」等停電，而泵浦運轉控制停止時，由於藉由真空泵浦之排氣造成處理室之內壓上昇，處理室內之處理條件發生變化，而無法繼續進行製造處理，導致生產線停止。因停電造成乾式真空泵浦裝置之泵浦運轉控制停止時間拉的愈長，受到的損害愈大，所以希望在恢復供電後立即再啟動乾式真空泵浦裝置。又，處理室之真空因停電而受到破壞時，會造成處理室內處理中的產品破損，所以希望即使停電仍可儘量減輕對處理室內壓的影響。 On a production line such as a semiconductor element, a liquid crystal, a solar panel, or an LED, a dry vacuum pumping apparatus is widely used in order to evacuate a chamber in which various processes are performed. The dry vacuum pumping device refers to a power failure such as a "short stop" of a power failure that occurs within a short period of time of less than one second, and the internal pressure of the processing chamber is caused by the vacuum pumping exhaust when the pumping operation control is stopped. Ascending, the processing conditions in the processing chamber change, and the manufacturing process cannot be continued, resulting in the production line being stopped. The longer the pump operation control stop time of the dry vacuum pumping device is caused by the power failure, the greater the damage, so it is desirable to restart the dry vacuum pumping device immediately after the power supply is restored. Further, when the vacuum in the processing chamber is damaged due to power failure, the product in the processing chamber is damaged, so that it is desirable to minimize the influence on the pressure in the processing chamber even if the power is turned off.
一般而言，乾式真空泵浦裝置具備：乾式真空泵浦；驅動乾式真空泵浦之馬達；控制馬達之旋轉速度(旋轉頻率)的變頻器；及控制變頻器之動作的控制裝置；藉由對馬達供給可變頻率之交流電力，可控制乾式真空泵浦之運轉速度。 In general, a dry vacuum pumping device includes: a dry vacuum pump; a motor that drives a dry vacuum pump; a frequency converter that controls a rotational speed (rotation frequency) of the motor; and a control device that controls the operation of the frequency converter; The variable frequency AC power can control the running speed of the dry vacuum pump.
具備上述變頻器之乾式真空泵浦裝置中，因為停電而停止從變頻器裝置對真空泵浦驅動馬達供給電力，所以真空泵浦變成停止運轉狀態，泵浦驅動馬達成為減速狀態。 In the dry vacuum pumping apparatus including the above-described inverter, since the power supply to the vacuum pumping drive motor is stopped from the inverter device due to the power failure, the vacuum pump is stopped, and the pump drive motor is decelerated.
而後，輸入電源恢復供電時，之後變頻器裝置之輸出控制才恢復功能。但是，特別是在轉子側使用永久磁鐵之直流無整流子電動機時，當該泵浦馬達在旋轉狀態，欲再度開始變頻器輸出時，如同該馬達本身係對變頻器輸出端子側供給電力的發電機，而發生很大再生電力。 Then, when the input power is restored to the power supply, the output control of the inverter device resumes the function. However, especially when a DC non-commutator motor using a permanent magnet on the rotor side is used, when the pump motor is in a rotating state and wants to start the inverter output again, the motor itself supplies power to the output terminal side of the inverter. The motor, while a large regenerative power occurs.
因為該再生電力發生於變頻器輸出端子，所以就變頻器而言，因為與變頻器本身須對馬達供給之電力重疊而控制來自馬達的再生電力，所以變頻器須處理之電力超過正常使用範圍而控制。因而，對於在變頻器內部之切換元件會供給超過正常使用之電力、電流，所以在發生再生電力時可能引起故障。用於保護該切換元件之手段，其一般方法曾提出有：設置用於消耗再生電力之再生電阻，藉由該電阻使再生部分之電力散熱的方法；不設再生電阻，而進行將再生電力返回電源側(輸入側)之控制的方法；或在馬達低於指定轉數之前，不恢復變頻器控制，而使再生電力因馬達減速而自然衰減的方法。 Since the regenerative electric power is generated at the output terminal of the inverter, in terms of the inverter, since the regenerative electric power from the motor is controlled to overlap with the electric power supplied from the motor itself, the electric power to be processed by the inverter exceeds the normal use range. control. Therefore, the switching elements inside the inverter are supplied with power and current exceeding normal use, so that malfunction may occur when regenerative power is generated. Means for protecting the switching element, the general method has been proposed to provide a regenerative resistor for consuming regenerative electric power, a method for dissipating heat of the regenerative portion by the resistor, and returning the regenerative electric power without providing a regenerative resistor The method of controlling the power supply side (input side); or the method of not restoring the inverter control before the motor is lower than the specified number of revolutions, and naturally reducing the regenerative power due to motor deceleration.
但是，以再生電阻消耗再生電力之方式構成情況下，需要再生電阻及用於使再生電流在再生電阻中流動的切換機構。因而，零件數量增多，而有整個變頻器裝置大型化且成本提高的問題。 However, in the case where the regenerative resistor consumes regenerative electric power, a regenerative resistor and a switching mechanism for causing the regenerative current to flow through the regenerative resistor are required. Therefore, the number of parts is increased, and there is a problem that the entire inverter device is large in size and cost is increased.
又，進行將再生電力返回電源側(輸入側)之控制情況下，變頻器中之切換元件等的功率元件控制困難，由於設置控制用電路之成本亦提高，因此在將再生電力返回輸入側之控制上有問題。 Further, when the control is performed to return the regenerative electric power to the power source side (input side), it is difficult to control the power elements such as the switching elements in the inverter, and the cost of installing the control circuit is also improved, so that the regenerative electric power is returned to the input side. There is a problem with the control.
因此，為了解決上述問題並避免裝置成本提高，通常係在乾式真空泵浦裝置中，於停電時不使再生電力返回變頻器側，而在泵浦、馬達低於指定轉數之前不恢復變頻器控制，藉由馬達減速使再生電力自然消耗，當泵浦、馬達低於指定轉數之後，再啟動乾式真空泵浦。 Therefore, in order to solve the above problems and avoid the increase in the cost of the device, it is usually in the dry vacuum pumping device that the regenerative power is not returned to the inverter side during the power failure, and the inverter control is not restored until the pump and the motor are lower than the specified number of revolutions. The regenerative power is naturally consumed by the motor deceleration, and the dry vacuum pump is started after the pump and the motor are lower than the specified number of revolutions.
乾式真空泵浦以額定轉數運轉中發生停電時，有時泵浦殼內的壓力保持非常低，停止從變頻器供給驅動電流時，有時短時間也不致發生旋轉減速，而大致以額定轉數繼續旋轉。 When the dry vacuum pump is powered off during the rated number of revolutions, sometimes the pressure in the pump casing is kept very low. When the drive current is stopped from the inverter, the rotation deceleration may not occur for a short period of time, but will continue at the rated number of revolutions. Rotate.
在該狀態下恢復供電，再度開始對泵浦馬達通電時，因為馬達發揮發電機功能，所以在變頻器輸出端子發生再生電力。藉由該再生電力而發生於變頻器輸出端子的電流，有可能發生與馬達驅動時變頻器輸出之電流大致同等的電流。因此，變頻器側切換元件一定無法處理正常輸出電流之兩倍程度的電流。 When the power supply is restored in this state and the pump motor is energized again, since the motor functions as a generator, regenerative power is generated at the output terminal of the inverter. The current generated at the output terminal of the inverter by the regenerative electric power may cause a current substantially equal to the current output from the inverter when the motor is driven. Therefore, the inverter side switching element must not be able to handle twice the normal output current.
使用一般變頻器裝置之乾式真空泵浦為了避免該再生電力發生，發生停電後之恢復供電動作係使用等待泵浦馬達之旋轉充分降低，達到不發生再生電力之條件，才開始變頻器側之輸出的方法。 Dry vacuum pumping using a general inverter device In order to avoid the occurrence of this regenerative power, the power recovery operation after the power failure occurs is to wait for the rotation of the pump motor to be sufficiently reduced, and the output of the inverter side is started only after the condition that the regenerative power does not occur. method.
另外，乾式真空泵浦之速度降低時，因為泵浦性能降低，處理室內之氣體排氣速度降低，所以會發生處理室內壓上昇，破壞處理室之真空，在處理室內製造處理中之產品受到損傷。 Further, when the speed of the dry vacuum pump is lowered, the pumping performance is lowered, and the gas exhaust speed in the processing chamber is lowered. Therefore, the pressure in the processing chamber rises, the vacuum in the processing chamber is destroyed, and the product in the manufacturing process in the processing chamber is damaged.
又，對半導體製造裝置使用乾式真空泵浦時，作為半導體製造裝置業界標準而制訂之SEMI規格有關於瞬間停電的規定，要求發生1秒以內之停電時須繼續正常運轉，與恢復供電時泵浦迅速恢復旋轉。 In addition, when dry vacuum pumping is used for semiconductor manufacturing equipment, the SEMI specification, which is established as an industry standard for semiconductor manufacturing equipment, has regulations on instantaneous power failure. It is required to continue normal operation when power failure occurs within 1 second, and pumping quickly when power is restored. Resume the rotation.
因此，用於半導體製造裝置之乾式真空泵浦，對發生停電又恢復供電 後之泵浦馬達或泵浦速度恢復的控制方法成為重大課題。 Therefore, dry vacuum pumping for semiconductor manufacturing equipment restores power to a power outage The latter control method of pump motor or pump speed recovery has become a major issue.
[專利文獻1]日本特開2010-110139號公報 [Patent Document 1] Japanese Patent Laid-Open Publication No. 2010-110139
[專利文獻2]日本特開2011-69294號公報 [Patent Document 2] Japanese Patent Laid-Open Publication No. 2011-69294
但是，如上述，在馬達側消耗再生電力前等待乾式真空泵浦再啟動之方法，因為乾式真空泵浦減速中處理室之內壓上昇，處理條件惡化，所以會有對生產線影響過大的問題。 However, as described above, the method of waiting for the dry vacuum pump to be restarted before the motor side consumes the regenerative electric power has a problem that the internal pressure of the processing chamber rises during the dry vacuum pump deceleration, and the processing conditions are deteriorated, so that the influence on the production line is excessively large.
因而，本發明人就藉由變頻器之功率元件消耗停電時馬達側發生之再生電力，且在1秒以內之短時間恢復供電時，立即對變頻器供給電力，再啟動乾式真空泵浦之對策不斷進行檢討。 Therefore, the inventors of the present invention use the power component of the inverter to consume the regenerative electric power generated on the motor side during the power failure, and when the power supply is restored within a short period of one second, the inverter is immediately supplied with electric power, and the countermeasure for restarting the dry vacuum pump is continuously performed. Conduct a review.
本發明係鑑於上述情形者，目的為提供一種可以變頻器之功率元件消耗停電時在馬達側發生之再生電力，並在恢復供電後立即從電源供給電力至變頻器，可在恢復供電後立即再啟動真空泵浦之乾式真空泵浦裝置、其控制方法及控制程式。 The present invention has been made in view of the above circumstances, and an object thereof is to provide a regenerative electric power generated on a motor side when a power component of a frequency converter can be consumed, and to supply power from the power supply to the frequency converter immediately after the power supply is restored, and can be resumed immediately after the power supply is restored. A vacuum pumping dry vacuum pumping device, a control method thereof and a control program are started.
又，本發明之目的為提供一種可使因瞬間停電造成排氣對象之處理室的內壓變動極小之乾式真空泵浦裝置、其控制方法及控制程式。 Further, an object of the present invention is to provide a dry vacuum pumping apparatus, a control method, and a control program for minimizing fluctuations in internal pressure of a processing chamber of an exhaust gas object due to an instantaneous power failure.
為了達成上述目的，本發明之乾式真空泵浦裝置第一種態樣的特徵為具備：乾式真空泵浦；馬達，其係驅動前述乾式真空泵浦；變頻 器，其係供給可變頻率之交流電力至前述馬達，來控制馬達之旋轉速度；及控制裝置，其係控制前述變頻器；前述控制裝置係以當停電時以前述變頻器之切換元件消耗在馬達側發生的再生電力，並在恢復供電之後從前述變頻器供給驅動電力至馬達的方式控制前述變頻器。 In order to achieve the above object, a first aspect of the dry vacuum pumping apparatus of the present invention is characterized by: a dry vacuum pump; a motor that drives the aforementioned dry vacuum pump; And supplying a variable frequency AC power to the motor to control a rotational speed of the motor; and a control device for controlling the inverter; the control device is configured to consume the switching element of the inverter when the power is cut off The regenerative electric power generated on the motor side is controlled to supply the drive electric power to the motor from the inverter after the power supply is restored.
本發明適合態樣之特徵為：前述變頻器係前述切換元件之額定電流為通用變頻器之切換元件的額定電流之1.5倍~3.0倍的變頻器。 The feature of the present invention is that the inverter is a frequency converter in which the rated current of the switching element is 1.5 times to 3.0 times the rated current of the switching element of the universal frequency converter.
本發明之乾式真空泵浦裝置之控制方法的第一種態樣，該乾式真空泵浦裝置具備：乾式真空泵浦；馬達，其係驅動前述乾式真空泵浦；及變頻器，其係供給可變頻率之交流電力至前述馬達，來控制馬達之旋轉速度；其特徵為：係進行在停電之同時停止前述變頻器輸出，以前述變頻器之切換元件消耗在馬達側發生的再生電力，並在恢復供電時隨即開始前述變頻器之輸出的控制。 In a first aspect of the control method of the dry vacuum pumping apparatus of the present invention, the dry vacuum pumping apparatus comprises: a dry vacuum pump; a motor that drives the dry vacuum pump; and a frequency converter that supplies a variable frequency alternating current Electric power is supplied to the motor to control the rotation speed of the motor; and the utility model is characterized in that the output of the inverter is stopped at the same time of power failure, and the switching element of the inverter consumes the regenerative electric power generated on the motor side, and immediately resumes the power supply. Start the control of the output of the aforementioned inverter.
本發明之乾式真空泵浦裝置之控制程式的第一種態樣，該乾式真空泵浦裝置具備：乾式真空泵浦；馬達，其係驅動前述乾式真空泵浦；及變頻器，其係供給可變頻率之交流電力至前述馬達，來控制馬達之旋轉速度；其特徵為：前述乾式真空泵浦裝置係藉由前述控制程式以在停電之同時停止前述變頻器輸出，以前述變頻器之切換元件消耗在馬達側發生的再生電力，並在恢復供電時隨即開始前述變頻器之輸出的方式控制前述變頻器。 In a first aspect of the control program of the dry vacuum pumping apparatus of the present invention, the dry vacuum pumping apparatus comprises: a dry vacuum pump; a motor that drives the dry vacuum pump; and a frequency converter that supplies a variable frequency alternating current Power is supplied to the motor to control the rotational speed of the motor; and the dry vacuum pumping device is configured to stop the output of the inverter at the same time of power failure by using the foregoing control program, and the switching component of the inverter is consumed on the motor side. The regenerative electric power is controlled, and the inverter is controlled in such a manner that the output of the aforementioned inverter is started immediately after the power supply is restored.
本發明之乾式真空泵浦裝置第二種態樣的特徵為具備：乾式真空泵浦；馬達，其係驅動前述乾式真空泵浦；變頻器，其係供給可變頻率之交流電力至前述馬達，來控制馬達之旋轉速度；及控制裝置，其係控 制前述變頻器；前述控制裝置具備檢測停電之功能，前述控制裝置係以從停電復原而恢復供電後，前述變頻器供給變頻器額定電流之1.5~3.0倍的電流至馬達之方式控制前述變頻器。 A second aspect of the dry vacuum pumping device of the present invention is characterized by: a dry vacuum pump; a motor that drives the dry vacuum pump; and a frequency converter that supplies variable frequency AC power to the motor to control the motor Rotation speed; and control device The inverter includes a function of detecting a power failure, and the control device controls the inverter by supplying a current of 1.5 to 3.0 times the rated current of the inverter to the motor after restoring the power supply from the power failure recovery. .
本發明適合態樣之特徵為：前述控制裝置於恢復供電後，當前述乾式真空泵浦之速度恢復為指定速度時，係以前述變頻器供給變頻器額定電流以下之電流至馬達的方式控制前述變頻器。 The feature of the present invention is characterized in that: after the power supply is restored, when the speed of the dry vacuum pump is restored to a specified speed, the frequency converter is controlled by the inverter to supply a current below the rated current of the inverter to the motor. Device.
本發明適合態樣之特徵為：前述變頻器之切換元件的額定電流係前述變頻器額定電流之1.5~3.0倍。 The feature of the present invention is that the rated current of the switching component of the inverter is 1.5 to 3.0 times the rated current of the inverter.
本發明之乾式真空泵浦裝置之控制方法的第二種態樣，該乾式真空泵浦裝置具備：乾式真空泵浦；馬達，其係驅動前述乾式真空泵浦；及變頻器，其係供給可變頻率之交流電力至前述馬達，來控制馬達之旋轉速度；其特徵為：係以從停電而恢復供電後，前述變頻器供給變頻器額定電流之1.5~3.0倍的電流至馬達之方式控制前述變頻器。 In a second aspect of the control method of the dry vacuum pumping apparatus of the present invention, the dry vacuum pumping apparatus comprises: a dry vacuum pump; a motor that drives the dry vacuum pump; and a frequency converter that supplies a variable frequency alternating current The electric power is sent to the motor to control the rotation speed of the motor; and the utility model is characterized in that the inverter is controlled to supply the current to the motor by supplying a current of 1.5 to 3.0 times the rated current of the inverter to the motor after the power is restored from the power failure.
本發明適合態樣之特徵為：前述恢復供電後，當前述乾式真空泵浦之速度恢復為指定速度時，係以前述變頻器供給變頻器額定電流以下之電流至馬達的方式控制前述變頻器。 The feature of the present invention is characterized in that, after the power supply is restored, when the speed of the dry vacuum pumping is restored to a specified speed, the inverter is controlled by the inverter supplying a current below the rated current of the inverter to the motor.
本發明適合態樣之特徵為：前述變頻器之切換元件的額定電流係前述變頻器額定電流之1.5~3.0倍。 The feature of the present invention is that the rated current of the switching component of the inverter is 1.5 to 3.0 times the rated current of the inverter.
本發明之乾式真空泵浦裝置之控制程式的第二種態樣，該乾式真空泵浦裝置具備：乾式真空泵浦；馬達，其係驅動前述乾式真空泵浦；及變頻器，其係供給可變頻率之交流電力至前述馬達，來控制馬達之旋轉速度；其特徵為：前述乾式真空泵浦裝置係藉由前述控制程式以從停電而 恢復供電後，前述變頻器供給變頻器額定電流之1.5~3.0倍的電流至馬達之方式控制前述變頻器。 In a second aspect of the control program of the dry vacuum pumping apparatus of the present invention, the dry vacuum pumping apparatus comprises: a dry vacuum pump; a motor that drives the dry vacuum pump; and a frequency converter that supplies a variable frequency alternating current Power to the motor to control the rotational speed of the motor; characterized in that the dry vacuum pumping device is controlled by the aforementioned control program After the power supply is restored, the inverter supplies 1.5 to 3.0 times the rated current of the inverter to the motor to control the inverter.
本發明適合態樣之特徵為：前述乾式真空泵浦裝置藉由前述控制程式在前述恢復供電後，當前述乾式真空泵浦之速度恢復為指定速度時，係以前述變頻器供給變頻器額定電流以下之電流至馬達的方式控制前述變頻器。 A suitable aspect of the present invention is characterized in that: the dry vacuum pumping device is supplied to the inverter under the rated current of the inverter when the speed of the dry vacuum pumping is restored to a specified speed after the power supply is restored by the control program. The current frequency converter controls the aforementioned frequency converter.
採用本發明時，因為可以變頻器之功率元件消耗停電時在馬達側發生的再生電力，並在恢復供電後立即從電源供給電力至變頻器，所以可在恢復供電後立即再啟動乾式真空泵浦。因此，可抑制藉由乾式真空泵浦排氣之處理室的內壓變動。 According to the present invention, since the power component of the inverter can consume the regenerative electric power generated on the motor side during the power failure, and the power is supplied from the power supply to the inverter immediately after the power supply is restored, the dry vacuum pump can be restarted immediately after the power supply is restored. Therefore, the internal pressure fluctuation of the processing chamber by the dry vacuum pumping of the exhaust gas can be suppressed.
又，採用本發明時，當檢測出瞬間停電，並從瞬間停電復原後，藉由從變頻器供給變頻器額定電流之數倍大電流至馬達，可使因停電而降低之泵浦速度立即復原。因此，可使藉由乾式真空泵浦排氣之處理室的內壓變動極小。 Moreover, according to the present invention, when an instantaneous power failure is detected and the power is restored from the instantaneous power failure, the pump speed which is reduced by the power failure can be immediately restored by supplying a large current to the motor several times from the rated current of the inverter from the frequency converter. . Therefore, the internal pressure fluctuation of the processing chamber by the dry vacuum pumping of the exhaust gas can be made extremely small.
1‧‧‧乾式真空泵浦 1‧‧‧ dry vacuum pump
2‧‧‧馬達 2‧‧‧Motor
3‧‧‧馬達驅動器 3‧‧‧Motor drive
4‧‧‧控制裝置 4‧‧‧Control device
5‧‧‧處理室 5‧‧‧Processing room
6‧‧‧斷路器 6‧‧‧Circuit breaker
7‧‧‧AC電源 7‧‧‧AC power supply
10‧‧‧轉換器 10‧‧‧ converter
11‧‧‧變頻器 11‧‧‧Inverter
12‧‧‧驅動器控制部 12‧‧‧Drive Control Department
C1‧‧‧電容器 C1‧‧‧ capacitor
V‧‧‧電壓 V‧‧‧ voltage
S1~S6‧‧‧切換元件 S1~S6‧‧‧Switching components
第一圖係顯示本發明之乾式真空泵浦裝置的全體構成示意圖。 The first figure shows a schematic view of the overall configuration of the dry vacuum pumping apparatus of the present invention.
第二(a)圖、第二(b)圖係對比顯示過去技術之乾式真空泵浦裝置的控制與本發明一種態樣之乾式真空泵浦的控制曲線圖，第二(a)圖顯示過去技術之乾式真空泵浦裝置的控制，第二(b)圖顯示本發明一種態樣之乾式真空泵浦裝置的控制。 The second (a) diagram and the second (b) diagram show a comparison of the control of the dry vacuum pumping apparatus of the prior art and the control curve of the dry vacuum pump of one aspect of the present invention, and the second (a) diagram shows the prior art. The control of the dry vacuum pumping device, the second (b) diagram shows the control of a dry vacuum pumping device of one aspect of the invention.
第三(a)圖、第三(b)圖係顯示過去技術之乾式真空泵浦裝置的控制與本發明一種態樣之乾式真空泵浦裝置的控制曲線圖，第三(a)圖顯示過去技術之乾式真空泵浦裝置的控制，第三(b)圖顯示本發明一種態樣之乾式真空泵浦裝置的控制。 The third (a) and third (b) drawings show the control charts of the dry vacuum pumping device of the prior art and the dry vacuum pumping device of one aspect of the present invention, and the third (a) shows the prior art. The control of the dry vacuum pumping device, the third (b) diagram shows the control of a dry vacuum pumping device of one aspect of the invention.
第四圖係顯示本發明之變頻器控制方法的一種態樣曲線圖。 The fourth figure shows a state diagram of the inverter control method of the present invention.
第五圖係顯示本發明之變頻器的控制流程圖。 The fifth figure shows a control flow chart of the frequency converter of the present invention.
以下，參照第一圖至第五圖說明本發明之乾式真空泵浦裝置、其控制方法及控制程式的實施形態。第一圖至第五圖中，對同一或相當之元件註記同一符號並省略重複的說明。 Hereinafter, embodiments of the dry vacuum pumping device, the control method therefor, and the control program of the present invention will be described with reference to the first to fifth figures. In the first to fifth figures, the same or equivalent elements are denoted by the same reference numerals and the repeated description is omitted.
第一圖係顯示本發明之乾式真空泵浦裝置的全體構成示意圖。如第一圖所示，乾式真空泵浦裝置具備：乾式真空泵浦1、旋轉驅動乾式真空泵浦1之馬達2、控制馬達2之旋轉速度的馬達驅動器3、及控制馬達驅動器3之動作的控制裝置4。馬達驅動器3經由斷路器6連接於商用電源等的AC電源7。乾式真空泵浦1之進氣口連接於半導體製造裝置等的處理室5，並以藉由乾式真空泵浦1將處理室5中排氣成真空的方式構成。 The first figure shows a schematic view of the overall configuration of the dry vacuum pumping apparatus of the present invention. As shown in the first figure, the dry vacuum pumping device includes a dry vacuum pump 1, a motor that rotationally drives the dry vacuum pump 1, a motor driver 3 that controls the rotational speed of the motor 2, and a control device that controls the operation of the motor driver 3. . The motor driver 3 is connected to an AC power source 7 such as a commercial power source via a circuit breaker 6. The air inlet of the dry vacuum pump 1 is connected to the processing chamber 5 of a semiconductor manufacturing apparatus or the like, and is configured to evacuate the exhaust gas in the processing chamber 5 by the dry vacuum pump 1.
馬達驅動器3具備：將從AC電源7供給之交流電力轉換成直流電力的轉換器10；將轉換後之直流電力轉換成具有希望頻率的交流電力之變頻器11；及將指示變頻器11之切換元件S1~S6的ON-OFF動作之閘極驅動信號傳送至變頻器11的驅動器控制部12。轉換器10中具備用於將電壓平滑化之電容器C1。 The motor driver 3 includes a converter 10 that converts AC power supplied from the AC power source 7 into DC power, a converter 11 that converts the converted DC power into AC power having a desired frequency, and a switching of the inverter 11 The gate drive signal of the ON-OFF operation of the elements S1 to S6 is transmitted to the driver control unit 12 of the inverter 11. The converter 10 is provided with a capacitor C1 for smoothing a voltage.
驅動器控制部12依據乾式真空泵浦1之運轉指令速度等生成 PWM信號，並將其傳送至變頻器11。控制裝置4係以控制全體驅動器3之動作，進一步與外部之上級機器通信的方式構成。驅動器控制部12取得從馬達驅動器3供給至馬達2之電流值作為馬達2之運轉資訊，從該電流值算出馬達2的旋轉速度，依據預定之目標旋轉速度與算出的旋轉速度之差生成PWM信號，並將其傳送至馬達驅動器3的變頻器11。變頻器11按照PWM信號驅動切換元件S1~S6，將用於以目標旋轉速度使馬達2旋轉的輸入電壓施加於馬達2。再者，控制裝置4係以按照使用者之操作將乾式真空泵浦1之啟動信號及停止信號傳送至驅動器控制部12的方式構成。 The drive control unit 12 generates the operation command speed according to the dry vacuum pump 1 or the like. The PWM signal is transmitted to the frequency converter 11. The control device 4 is configured to control the operation of the entire driver 3 and further communicate with the external upper-level device. The driver control unit 12 obtains the current value supplied from the motor driver 3 to the motor 2 as the operation information of the motor 2, calculates the rotation speed of the motor 2 from the current value, and generates a PWM signal based on the difference between the predetermined target rotation speed and the calculated rotation speed. And transmits it to the frequency converter 11 of the motor driver 3. The inverter 11 drives the switching elements S1 to S6 in accordance with the PWM signal, and applies an input voltage for rotating the motor 2 at the target rotational speed to the motor 2. Further, the control device 4 is configured to transmit the start signal and the stop signal of the dry vacuum pump 1 to the driver control unit 12 in accordance with the user's operation.
如第一圖所示地構成之乾式真空泵浦裝置，當瞬間停電等停電時，乾式真空泵浦1停止運轉，不過隨著該運轉停止時之減速，在馬達2中發生再生電力。該再生電力會返回變頻器11。 When the dry vacuum pumping device is configured as shown in the first figure, the dry vacuum pump 1 is stopped when a power failure such as an instantaneous power failure occurs, but regenerative electric power is generated in the motor 2 as the operation is stopped at the time of the stop. This regenerative power is returned to the inverter 11.
因為本發明係以在停電後恢復供電時，從控制裝置4傳送乾式真空泵浦1之啟動信號至馬達驅動器3，或是雖正在停電中仍繼續傳送啟動信號，而從AC電源7供給用於驅動馬達之電力至變頻器11的方式構成，所以，在變頻器11中重疊來自馬達2之再生電力與從AC電源7供給的用於驅動馬達之電力。亦即，因為變頻器11中重疊來自馬達2之再生電流與來自AC電源7的用於驅動馬達之電流，所以變頻器11需要承受該重疊之大電流。因而，本發明中，關於變頻器之切換元件的額定電流，係使用額定電流比通用變頻器之額定電流大的專用變頻器。 Since the present invention transmits the start signal of the dry vacuum pump 1 from the control device 4 to the motor driver 3 when the power is restored after the power failure, or continues to transmit the start signal while the power is being turned off, it is supplied from the AC power source 7 for driving. Since the electric power of the motor is configured to the inverter 11, the regenerative electric power from the motor 2 and the electric power for driving the motor supplied from the AC power supply 7 are superimposed on the inverter 11. That is, since the regenerative current from the motor 2 and the current from the AC power source 7 for driving the motor are superimposed in the inverter 11, the inverter 11 needs to withstand the large current of the overlap. Therefore, in the present invention, the rated current of the switching element of the inverter is a dedicated inverter having a rated current larger than the rated current of the general-purpose inverter.
通用變頻器之額定電力與使用之切換元件的額定電流規格之關係，各家變頻器廠商係採用獨自的計算方法，而表1係其一例與本發明使用之專用變頻器的比較對比表。 The relationship between the rated power of the general-purpose inverter and the rated current specification of the switching element used, each inverter manufacturer adopts a separate calculation method, and Table 1 is a comparison table of one example with the dedicated inverter used in the present invention.
表1係就切換元件之額定電流，每個變頻器的額定電力比較對比通用變頻器與專用變頻器。從表1瞭解，本發明中切換元件之額定電流(設定)係使用通用變頻器之1.5倍~2.5倍的專用變頻器。按照本發明人之見解，本發明之專用變頻器對通用變頻器的額定電流比不限於1.5倍~2.5倍，只要在1.5倍~3.0倍之範圍即可。 Table 1 shows the rated current of the switching components. The rated power of each inverter is compared with the general-purpose inverter and the dedicated inverter. It is understood from Table 1 that the rated current (setting) of the switching element in the present invention is a dedicated frequency converter which is 1.5 times to 2.5 times that of the general-purpose frequency converter. According to the inventor's opinion, the rated current ratio of the special frequency converter of the present invention to the general-purpose frequency converter is not limited to 1.5 times to 2.5 times, as long as it is in the range of 1.5 times to 3.0 times.
如此，藉由以具有可承受大電流之切換元件的變頻器構成變頻器11，在停電時以變頻器11之功率裝置消耗在馬達側發生的再生電力，並從AC電源7供給電力至變頻器11，可在發生1秒以內短時間停電，於恢復供電後立即再啟動乾式真空泵浦1。 In this way, by configuring the inverter 11 with a frequency converter having a switching element capable of withstanding a large current, the power consumption of the inverter 11 is consumed by the power device of the inverter 11 during power failure, and power is supplied from the AC power source 7 to the inverter. 11. The power can be turned off within a short period of 1 second, and the dry vacuum pump 1 is started immediately after the power is restored.
第二(a)圖、第二(b)圖係對比顯示過去技術之乾式真空泵浦裝置的控制與本發明一種態樣之乾式真空泵浦1的控制曲線圖，第二(a)圖顯示過去技術之乾式真空泵浦裝置的控制，第二(b)圖顯示本發明一種態樣之乾式真空泵浦裝置1的控制。第二(a)圖、第二(b)圖中，橫軸表示時間(t)，以1s表示1秒鐘。縱軸表示對變頻器之輸入電壓(V)、變頻器輸出、泵浦轉數(rpm)及處理室內壓。 The second (a) diagram and the second (b) diagram show a comparison of the control of the dry vacuum pumping apparatus of the prior art with the control curve of the dry vacuum pump 1 of one aspect of the present invention, and the second (a) diagram shows the prior art. The control of the dry vacuum pumping device, the second (b) diagram shows the control of a dry vacuum pumping device 1 of an aspect of the invention. In the second (a) and second (b) diagrams, the horizontal axis represents time (t) and 1 second represents 1 second. The vertical axis indicates the input voltage (V) to the inverter, the inverter output, the number of pump revolutions (rpm), and the chamber pressure.
如第二(a)圖所示，過去技術因瞬間停電導致對變頻器之輸入電壓斷開 (OFF)時，變頻器之輸出亦斷開。即使瞬間停電後恢復供電，馬達之轉數仍然降低而不發生再生電力，或是因為發生之再生電力非常小而等待，所以變頻器輸出斷開的狀態繼續將近1秒鐘。變頻器輸出斷開時，泵浦轉數降低，而處理室內壓上昇。第二(a)圖中顯示瞬間停電時間短時、稍長時、與中等時三個態樣，不過，不論瞬間停電時間長短，變頻器輸出皆斷開約1秒鐘，任何一種態樣下，泵浦轉數降低程度及處理室內壓之上昇程度皆概略相同。 As shown in the second (a) diagram, the past technology disconnected the input voltage of the inverter due to an instantaneous power failure. When (OFF), the output of the inverter is also disconnected. Even if the power is restored after an instantaneous power failure, the number of revolutions of the motor is still reduced without regenerative power, or because the regenerative power generated is very small, the inverter output is disconnected for approximately one second. When the inverter output is disconnected, the pump revolutions decrease and the process chamber pressure rises. The second (a) shows the instantaneous power failure time is short, slightly longer, and medium. However, regardless of the instantaneous power failure time, the inverter output is disconnected for about 1 second, in any kind of situation. The degree of decrease in the number of pump revolutions and the increase in the pressure in the process chamber are all the same.
如第二(b)圖所示，本發明一種態樣因瞬間停電導致對變頻器之輸入電壓斷開時，雖然變頻器輸出亦斷開，不過當恢復供電時，無須在馬達轉數降低而發生的再生電力降低中等待，變頻器輸出立即接通(ON)。第二(b)圖中，亦顯示瞬間停電時間短時、稍長時、與中等三個態樣，任何一種態樣皆是恢復供電時立即接通變頻器輸出。如此，因為恢復供電後變頻器輸出立即接通，所以可抑制泵浦轉數的降低及處理室內壓的上昇。 As shown in the second (b) diagram, when an input voltage of the inverter is disconnected due to an instantaneous power failure, although the output of the inverter is also disconnected, when the power supply is restored, the number of revolutions of the motor does not need to be reduced. Waiting for the generated regenerative power to decrease, the inverter output is immediately turned ON (ON). In the second (b) diagram, the instantaneous power failure time is also short, slightly longer, and medium. In either case, the inverter output is immediately turned on when the power is restored. In this way, since the inverter output is immediately turned on after the power supply is restored, the decrease in the number of pump revolutions and the increase in the pressure in the process chamber can be suppressed.
第三(a)圖、第三(b)圖係顯示過去技術之乾式真空泵浦裝置的控制與本發明一種態樣之乾式真空泵浦裝置1的控制曲線圖，第三(a)圖顯示過去技術之乾式真空泵浦裝置的控制，第三(b)圖顯示本發明一種態樣之乾式真空泵浦裝置1的控制。第三(a)圖、第三(b)圖中，橫軸表示時間(t)，以1s表示1秒鐘。縱軸表示對變頻器之輸入電壓(V)、變頻器輸出、泵浦轉數(rpm)及處理室內壓。 The third (a) diagram and the third (b) diagram show the control graph of the control of the dry vacuum pumping apparatus of the prior art and the dry vacuum pumping apparatus 1 of one aspect of the present invention, and the third (a) diagram shows the past technique. The control of the dry vacuum pumping device, the third (b) diagram shows the control of a dry vacuum pumping device 1 of an aspect of the invention. In the third (a) and third (b) diagrams, the horizontal axis represents time (t) and 1 second represents 1 second. The vertical axis indicates the input voltage (V) to the inverter, the inverter output, the number of pump revolutions (rpm), and the chamber pressure.
如第三(a)圖所示，過去技術當短時間中反覆發生瞬間停電時(圖中顯示每隔1秒鐘反覆發生三次瞬間停電的情況)，對變頻器之輸入電壓因最初 瞬間停電而斷開時，變頻器輸出斷開，而後雖暫時恢復供電，但是因為在發生之再生電力降低中等待，所以在下次瞬間停電前變頻器輸出並未接通，而變頻器輸出斷開狀態繼續到最後的瞬間停電。最後瞬間停電後恢復供電時變頻器輸出接通時間延後。如此，在短時間反覆發生瞬間停電時，變頻器輸出的斷開狀態持續相當長時間(圖示例係3秒鐘)。此期間泵浦轉數持續降低並降低至0rpm。因而處理室內壓上昇至最高等級(High)。 As shown in the third (a) diagram, in the past, when an instantaneous power failure occurred in a short time (the figure shows that three times of power failure occurred every 1 second), the input voltage to the inverter was originally When the power is turned off and the power is turned off, the inverter output is disconnected, and although the power supply is temporarily restored, but because the regenerative power is reduced, the inverter output is not turned on before the next moment, and the inverter output is disconnected. The state continues until the last moment of power outage. When the power is restored after the last moment of power failure, the inverter output is delayed. In this way, when an instantaneous power failure occurs in a short time, the off state of the inverter output continues for a relatively long time (the figure is 3 seconds). During this period, the number of pump revolutions continues to decrease and is reduced to 0 rpm. Therefore, the process chamber pressure rises to the highest level (High).
如第三(b)圖所示，本發明一種態樣當短時間中反覆發生瞬間停電時(圖中顯示每隔1秒鐘反覆發生三次瞬間停電的情況)，雖然對變頻器之輸入電壓當時斷開，變頻器輸出當時斷開，不過因為無須在再生電力降低中等待，所以恢復供電時變頻器輸出不論瞬間停電時間長短皆立即恢復成接通。發生瞬間停電時雖然泵浦轉數在當時稍微降低，不過因為恢復供電後立即恢復變頻器輸出，所以泵浦轉數降低程度小，且處理室內壓之上昇程度也小。因而，在變頻器輸出恢復的同時處理室內壓立即到達最低程度(Low)。如此，採用本發明時，即使變頻器輸出因停電而斷開，因為在恢復供電後變頻器輸出可立即接通，真空泵浦的轉數在很短時間恢復到額定轉數，所以可抑制處理室內壓之變動。 As shown in the third (b) diagram, an aspect of the present invention occurs when an instantaneous power failure occurs in a short time (the figure shows that three times of power failure occurs repeatedly every one second), although the input voltage to the frequency converter is then When the inverter is disconnected, the inverter output is disconnected at the time, but since it is not necessary to wait in the regenerative power reduction, the inverter output is immediately restored to the ON state regardless of the instantaneous power failure time when the power supply is restored. In the event of an instantaneous power failure, although the number of pump revolutions is slightly reduced at that time, since the inverter output is restored immediately after the power supply is restored, the degree of pump revolution is reduced to a small extent, and the degree of rise in the processing chamber is also small. Thus, the chamber pressure is immediately reached to a minimum (Low) while the inverter output is being restored. Thus, when the present invention is used, even if the inverter output is disconnected due to a power failure, since the inverter output can be immediately turned on after the power supply is restored, the number of revolutions of the vacuum pump is restored to the rated number of revolutions in a short time, so that the processing chamber can be suppressed. The change in pressure.
此處，變頻器本身之額定電流係依泵浦所需之規格(排氣速度、排氣時間、及容許氣體流量等)經實驗來選定。所謂變頻器之額定電流，係變頻器可連續輸出之最大電流值。變頻器內部之切換元件、其他零件及冷卻機構等係設計成即使變頻器連續輸出變頻器之額定電流值仍然沒有問題。此處，本發明中變頻器之切換元件的額定電流為變頻器額定電流的1.5~3.0倍。與切換元件之額定電流比較，藉由抑制變頻器之額定電流較 低，可將變頻器之切換元件以外的零件及冷卻機構對應於低電流，可避免變頻器大型化，並降低成本。 Here, the rated current of the inverter itself is selected experimentally according to the specifications required for the pump (exhaust speed, exhaust time, and allowable gas flow rate, etc.). The rated current of the inverter is the maximum current value that the inverter can continuously output. The switching elements, other parts and cooling mechanisms inside the inverter are designed so that there is no problem even if the inverter continuously outputs the rated current of the inverter. Here, the rated current of the switching element of the inverter in the present invention is 1.5 to 3.0 times the rated current of the inverter. Compared with the rated current of the switching element, by suppressing the rated current of the inverter Low, it can correspond to parts and cooling mechanism other than the switching element of the inverter to low current, which can avoid large-scale inverter and reduce cost.
第一圖之控制裝置4中設有連接記憶媒體讀取裝置之連接器(無圖示)，依需要可連接記憶媒體讀取裝置，而從外部記憶媒體讀取控制程式及資料。而後，如上述，藉由備有記憶媒體，其儲存用於進行停電後恢復供電時，無須在馬達再生電力降低中等待，立即接通變頻器輸出之控制的控制程式，從該記憶媒體讀取控制程式安裝於控制裝置4中，即可在既有之真空泵浦裝置中執行本發明。 The control device 4 of the first figure is provided with a connector (not shown) for connecting the memory medium reading device, and the memory medium reading device can be connected as needed, and the control program and data can be read from the external memory medium. Then, as described above, by providing a memory medium for storing power for restoring power after power failure, it is not necessary to wait for the motor regenerative power to be lowered, and immediately turns on the control program of the inverter output control, and reads from the memory medium. The control program is installed in the control device 4, that is, the present invention can be carried out in an existing vacuum pumping device.
第二(b)圖及第三(b)圖所示之本發明中，在瞬間停電後恢復供電時，從變頻器11供給至馬達2之變頻器輸出電流控制在變頻器11的額定電流以下。 In the second (b) diagram and the third (b) diagram, when the power supply is restored after an instantaneous power failure, the inverter output current supplied from the inverter 11 to the motor 2 is controlled to be lower than the rated current of the inverter 11. .
本發明人注意到為了在瞬間停電後恢復供電時，將從變頻器11供給至馬達2之變頻器輸出電流控制在變頻器11的額定電流以下，而限制馬達輸出並限制真空泵浦的轉數結果，與理想狀態比較時，處理室內壓之上昇程度大，且上昇時間長。 The present inventors have noted that in order to restore power supply after an instantaneous power failure, the inverter output current supplied from the inverter 11 to the motor 2 is controlled below the rated current of the inverter 11, and the motor output is limited and the number of revolutions of the vacuum pump is limited. When compared with the ideal state, the pressure in the processing chamber is increased to a large extent, and the rising time is long.
因此，本發明一種態樣係在瞬間停電後恢復供電時，將從變頻器11供給至馬達2之變頻器輸出電流設為變頻器11的額定電流之數倍。藉此，可使瞬間停電時處理室的壓力變動更小。以下，參照第四圖及第五圖說明該態樣。 Therefore, in one aspect of the present invention, when the power is restored after an instantaneous power failure, the inverter output current supplied from the inverter 11 to the motor 2 is set to be several times the rated current of the inverter 11. Thereby, the pressure fluctuation of the processing chamber at the time of an instantaneous power failure can be made smaller. Hereinafter, this aspect will be described with reference to the fourth and fifth figures.
第四圖係顯示本發明之變頻器控制方法的一種態樣曲線圖。第四圖中，橫軸表示時間(t)，縱軸表示電源電壓(V)、泵浦轉數(rpm)、處理室內壓、及變頻器輸出電流(A)。 The fourth figure shows a state diagram of the inverter control method of the present invention. In the fourth figure, the horizontal axis represents time (t), and the vertical axis represents power supply voltage (V), pump revolutions (rpm), process chamber pressure, and inverter output current (A).
如第四圖所示，發生瞬間停電時，喪失電源電壓，變頻器輸出電流斷開。藉此，真空泵浦之旋轉速度逐漸降低。瞬間停電復原而恢復供電後，變頻器11將變頻器額定電流之1.5~3.0倍，更應為2.0~3.0倍的變頻器電流輸出至馬達2。如此，恢復供電後，變頻器11因為將變頻器額定電流之1.5~3.0倍的大電流供給至馬達2，所以馬達輸出變大，如第四圖所示，泵浦旋轉速度急速上昇，短時間回到規定的旋轉速度。因而，雖然瞬間停電後處理室內壓稍微上昇，藉由恢復供電後真空泵浦的旋轉速度急速上昇，處理室內壓快速復原到原來壓力。因此，處理室之壓力變動微小。真空泵浦的旋轉速度復原到規定速度後，使變頻器輸出電流降低至變頻器額定電流以下。在將變頻器輸出電流下降至變頻器額定電流以下的控制中，變頻器11輸出符合需要側亦即處理室側之真空壓所要求的真空泵浦旋轉速度之變頻器電流。 As shown in the fourth figure, when an instantaneous power failure occurs, the power supply voltage is lost and the inverter output current is disconnected. Thereby, the rotational speed of the vacuum pump is gradually lowered. After the instantaneous power failure is restored and the power is restored, the inverter 11 outputs 1.5 to 3.0 times the rated current of the inverter, and more preferably 2.0 to 3.0 times the inverter current to the motor 2. In this way, after the power supply is restored, the inverter 11 supplies a large current of 1.5 to 3.0 times the rated current of the inverter to the motor 2, so that the motor output becomes large. As shown in the fourth figure, the pump rotation speed rapidly rises for a short time. Go back to the specified rotation speed. Therefore, although the pressure in the processing chamber rises slightly after the instantaneous power failure, the rotational speed of the vacuum pump rises rapidly after the power supply is restored, and the pressure in the processing chamber is quickly restored to the original pressure. Therefore, the pressure fluctuation in the processing chamber is small. After the rotational speed of the vacuum pump is restored to the specified speed, the inverter output current is reduced below the rated current of the inverter. In the control of lowering the inverter output current to below the rated current of the inverter, the inverter 11 outputs the inverter current corresponding to the vacuum pump rotation speed required by the required side, that is, the vacuum pressure on the processing chamber side.
因為本發明之切換元件的額定電流係變頻器之額定電流的1.5~3.0倍，所以瞬間停電時恢復供電後，變頻器11可將變頻器額定電流之1.5~3.0倍的大電流供給至馬達2。 Since the rated current of the switching element of the present invention is 1.5 to 3.0 times of the rated current of the frequency converter, the inverter 11 can supply a large current of 1.5 to 3.0 times the rated current of the inverter to the motor 2 after the power is restored in the event of an instantaneous power failure. .
另外，即使發生瞬間停電而喪失電源電壓，若驅動器控制部12等之控制電路有效而在電容器C1中儲存電荷，變頻器11即可輸出電流。本發明在停電中消耗電容器C1之電力，而無法對馬達2供給電力時有效。 Further, even if an instantaneous power failure occurs and the power supply voltage is lost, if the control circuit of the driver control unit 12 or the like is effective and the electric charge is stored in the capacitor C1, the inverter 11 can output a current. The present invention is effective in consuming power of the capacitor C1 during power failure and not supplying power to the motor 2.
上述說明中，係說明乾式真空泵浦係羅茨(Roots)型乾式真空泵浦等旋轉型泵浦，不過乾式真空泵浦係往復型泵浦時，因為馬達之旋轉轉換成泵浦的往返運動，所以只須將泵浦的旋轉速度替換成泵浦往返運動的速度即可。 In the above description, the dry vacuum pumping is a rotary pump such as a Roots type dry vacuum pump. However, when the dry vacuum pump is reciprocating pump, since the rotation of the motor is converted into a reciprocating motion of the pump, only The rotational speed of the pump must be replaced by the speed of the pump's reciprocating motion.
第五圖係顯示本發明之變頻器的控制流程圖。如第五圖所示，變頻器11開始動作時，測定AC電源7之電源電壓，比較電源電壓與規定電壓，當電源電壓比規定電壓低時(是(Yes)時)判斷為停電，變頻器11不輸出(變頻器輸出斷開)。電源電壓比規定電壓高時(否(No)時)返回測定電源電壓的步驟。變頻器輸出斷開後，再度測定電源電壓，當電源電壓比規定電壓高時(是(Yes)時)判斷為恢復供電，而將變頻器輸出電流(變頻器限制電流)提高至變頻器額定電流的1.5~3.0倍。此處，所謂變頻器限制電流係控制裝置4指示馬達驅動器3之變頻器11輸出的最大電流限制值。電源電壓比規定電壓低時(否(No)時)返回測定電源電壓的步驟。在上述提高變頻器輸出電流之步驟後，比較泵浦速度與指定速度，泵浦速度比指定速度大時(是(Yes)時)判斷為瞬間停電復原動作結束，使變頻器輸出電流(變頻器限制電流)復原為變頻器額定電流以下的正常值，並結束控制流程。泵浦速度比指定速度小時(否(NO)時)返回提高變頻器輸出電流之步驟。此處，所謂指定速度係泵浦額定速度之90%~99%範圍內的速度。 The fifth figure shows a control flow chart of the frequency converter of the present invention. As shown in the fifth figure, when the inverter 11 starts operating, the power supply voltage of the AC power source 7 is measured, and the power supply voltage and the predetermined voltage are compared. When the power supply voltage is lower than the predetermined voltage (Yes), it is determined that the power is off. 11 does not output (inverter output is disconnected). When the power supply voltage is higher than the predetermined voltage (No (No)), the procedure of measuring the power supply voltage is returned. After the inverter output is disconnected, the power supply voltage is measured again. When the power supply voltage is higher than the specified voltage (Yes), it is judged that the power supply is restored, and the inverter output current (inverter limited current) is raised to the rated current of the inverter. 1.5 to 3.0 times. Here, the inverter limited current system control device 4 instructs the maximum current limit value output from the inverter 11 of the motor driver 3. When the power supply voltage is lower than the predetermined voltage (No (No)), the procedure of measuring the power supply voltage is returned. After the above steps of increasing the output current of the inverter, comparing the pump speed with the specified speed, and when the pump speed is greater than the specified speed (Yes), it is determined that the instantaneous power failure recovery operation ends, and the inverter output current (inverter The current limit is restored to the normal value below the rated current of the inverter, and the control flow is ended. When the pump speed is lower than the specified speed (NO (NO)), the step of increasing the inverter output current is returned. Here, the specified speed is the speed in the range of 90% to 99% of the pump rated speed.
關於上述電源電壓之測定，係構成將控制裝置4連接於AC電源側，而可測定電源電壓，或是構成將驅動器控制部12連接於AC電源側，而可測定電源電壓。 The measurement of the power source voltage is performed by connecting the control device 4 to the AC power source side, measuring the power source voltage, or configuring the driver control unit 12 to be connected to the AC power source side, and measuring the power source voltage.
另外，藉由備有儲存了控制程式之記憶媒體，該控制程式係以從停電而恢復供電後，變頻器11將變頻器額定電流之1.5~3.0倍的電流供給至馬達的方式控制變頻器11，如前述經由記憶媒體讀取裝置將控制程式安裝於控制裝置4，即可在現有之真空泵浦裝置中執行本發明。 In addition, by providing a memory medium storing the control program, the control program controls the inverter 11 by supplying a current of 1.5 to 3.0 times the rated current of the inverter to the motor after the power is restored from the power failure. The present invention can be implemented in a conventional vacuum pumping apparatus by mounting a control program to the control device 4 via a memory medium reading device as described above.
另外，第四圖所示之本發明中，從瞬間停電而恢復供電中之 變頻器輸出電流係到達從瞬間停電復原中的限制電流，不過本發明並非意指變頻器之輸出電流必須到達限制電流。依處理室之壓力變動程度，有時從瞬間停電而復原中變頻器之輸出電流雖然超過正常的變頻器額定電流值，但是尚未到達限制電流其復原動作即結束。 In addition, in the invention shown in the fourth figure, the power supply is restored from an instantaneous power failure. The inverter output current reaches the limiting current from the instantaneous power failure recovery, but the invention does not mean that the output current of the frequency converter must reach the limiting current. Depending on the degree of pressure fluctuation in the processing chamber, the output current of the inverter may be restored from the momentary power failure, and the output current of the inverter may exceed the normal rated current of the inverter.
以上係敘述使用切換元件之額定電流為變頻器的額定電流之1.5~3.0倍，更應為2.0~3.0倍的變頻器進行從瞬間停電的復原動作，不過，即使使用一般變頻器，亦即使用切換元件之額定電流與變頻器的額定電流相等或稍大程度的變頻器，本發明仍可適用。換言之，藉由從瞬間停電而恢復供電後的少許時間，將變頻器之限制電流值提高到變頻器額定電流的1.5~3.0倍，即使短時間流經切換元件之電流超過切換元件的額定電流仍不致故障時，可適用本發明。藉此，仍可藉由恢復供電後之真空泵浦的旋轉速度急速上昇，而使處理室內壓迅速復原到原來的壓力。 The above description uses the rated current of the switching element to be 1.5 to 3.0 times the rated current of the inverter, and more preferably 2.0 to 3.0 times the inverter to recover from the momentary power failure. However, even if a general inverter is used, it is used. The present invention is still applicable to a frequency converter in which the rated current of the switching element is equal to or slightly larger than the rated current of the frequency converter. In other words, by a little time after the power supply is restored from the momentary power failure, the limit current value of the inverter is increased to 1.5 to 3.0 times the rated current of the inverter, even if the current flowing through the switching element for a short time exceeds the rated current of the switching element. The present invention can be applied without causing malfunction. Thereby, the rotation speed of the vacuum pump after the power supply is restored can be rapidly increased, and the pressure in the processing chamber can be quickly restored to the original pressure.
另外，本發明除了在1秒鐘以下程度之短時間發生的停電之外，在1秒鐘以下程度的短時間發生電壓下降時亦可適用。 Further, the present invention is also applicable to a voltage drop occurring in a short period of time of one second or less, in addition to a power failure occurring for a short period of time of one second or less.
以上係說明本發明之實施形態，不過本發明不限定於上述實施形態，在其技術思想之範圍內當然可以各種不同形態來實施。 The embodiments of the present invention have been described above, but the present invention is not limited to the above-described embodiments, and various modifications may be made without departing from the spirit and scope of the invention.
1‧‧‧乾式真空泵浦 1‧‧‧ dry vacuum pump
2‧‧‧馬達 2‧‧‧Motor
3‧‧‧馬達驅動器 3‧‧‧Motor drive
4‧‧‧控制裝置 4‧‧‧Control device
5‧‧‧處理室 5‧‧‧Processing room
6‧‧‧斷路器 6‧‧‧Circuit breaker
7‧‧‧AC電源 7‧‧‧AC power supply
10‧‧‧轉換器 10‧‧‧ converter
11‧‧‧變頻器 11‧‧‧Inverter
12‧‧‧驅動器控制部 12‧‧‧Drive Control Department
C1‧‧‧電容器 C1‧‧‧ capacitor
V‧‧‧電壓 V‧‧‧ voltage
S1~S6‧‧‧切換元件 S1~S6‧‧‧Switching components
Claims (12)
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| JP2015-031060 | 2015-02-19 | ||
| JP2015031060A JP5918406B1 (en) | 2015-02-19 | 2015-02-19 | Dry vacuum pump device and control method thereof |
| JP2016027124A JP2017145726A (en) | 2016-02-16 | 2016-02-16 | Dry vacuum pump device, control method for the same and control program |
| JP2016-027124 | 2016-02-16 |
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| TW201644183A true TW201644183A (en) | 2016-12-16 |
| TWI707534B TWI707534B (en) | 2020-10-11 |
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| Application Number | Title | Priority Date | Filing Date |
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| TW105104886A TWI707534B (en) | 2015-02-19 | 2016-02-19 | Dry vacuum pump device, method of controlling same, and program of controlling same |
Country Status (2)
| Country | Link |
|---|---|
| KR (1) | KR102234374B1 (en) |
| TW (1) | TWI707534B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI683081B (en) * | 2017-08-02 | 2020-01-21 | 日商日立環球生活方案股份有限公司 | refrigerator |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07327375A (en) * | 1994-05-31 | 1995-12-12 | Ebara Corp | Apparatus for protecting vacuum pump against instantaneous interruption and instantaneous voltage drop |
| JP3635988B2 (en) * | 1999-05-27 | 2005-04-06 | 富士電機デバイステクノロジー株式会社 | Semiconductor device |
| ES2749875T3 (en) * | 2008-08-01 | 2020-03-24 | Mitsubishi Electric Corp | AC-DC converter, AC-DC converter control method, motor drive device, compressor drive device, air conditioner and heat pump type hot water supply device |
| JP2010110139A (en) | 2008-10-31 | 2010-05-13 | Fuji Electric Systems Co Ltd | Method for processing regenerative electric power of inverter device |
| JP5431090B2 (en) | 2009-09-25 | 2014-03-05 | 株式会社荏原製作所 | Vacuum pump system and operation method thereof |
| JP2012249494A (en) * | 2011-05-31 | 2012-12-13 | Hitachi Industrial Equipment Systems Co Ltd | Power supply regeneration device |
| JP5914172B2 (en) * | 2012-05-29 | 2016-05-11 | 東芝三菱電機産業システム株式会社 | Drive device for electric motor |
| JP5480351B2 (en) * | 2012-09-25 | 2014-04-23 | 山洋電気株式会社 | Motor control device |
-
2016
- 2016-02-18 KR KR1020160019213A patent/KR102234374B1/en active IP Right Grant
- 2016-02-19 TW TW105104886A patent/TWI707534B/en active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI683081B (en) * | 2017-08-02 | 2020-01-21 | 日商日立環球生活方案股份有限公司 | refrigerator |
Also Published As
| Publication number | Publication date |
|---|---|
| KR102234374B1 (en) | 2021-03-31 |
| TWI707534B (en) | 2020-10-11 |
| KR20160102129A (en) | 2016-08-29 |
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