TW201616078A - Heat exchanger and exhaust gas treatment device using the same - Google Patents

Heat exchanger and exhaust gas treatment device using the same Download PDF

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Publication number
TW201616078A
TW201616078A TW104116830A TW104116830A TW201616078A TW 201616078 A TW201616078 A TW 201616078A TW 104116830 A TW104116830 A TW 104116830A TW 104116830 A TW104116830 A TW 104116830A TW 201616078 A TW201616078 A TW 201616078A
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Taiwan
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heat
main body
exhaust gas
heat exchanger
body casing
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TW104116830A
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Chinese (zh)
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今村啓志
塚田勉
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康肯環保設備有限公司
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Publication of TW201616078A publication Critical patent/TW201616078A/en

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J15/00—Arrangements of devices for treating smoke or fumes
    • F23J15/08—Arrangements of devices for treating smoke or fumes of heaters
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J15/00—Arrangements of devices for treating smoke or fumes
    • F23J15/02—Arrangements of devices for treating smoke or fumes of purifiers, e.g. for removing noxious material
    • F23J15/04—Arrangements of devices for treating smoke or fumes of purifiers, e.g. for removing noxious material using washing fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J15/00—Arrangements of devices for treating smoke or fumes
    • F23J15/06—Arrangements of devices for treating smoke or fumes of coolers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D7/00—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall
    • F28D7/02—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being helically coiled
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D7/00—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall
    • F28D7/02—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being helically coiled
    • F28D7/022—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being helically coiled the conduits of two or more media in heat-exchange relationship being helically coiled, the coils having a cylindrical configuration
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J2217/00—Intercepting solids
    • F23J2217/50—Intercepting solids by cleaning fluids (washers or scrubbers)
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E20/00—Combustion technologies with mitigation potential
    • Y02E20/30—Technologies for a more efficient combustion or heat usage

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Treating Waste Gases (AREA)
  • Heat-Exchange Devices With Radiators And Conduit Assemblies (AREA)

Abstract

Provided is a heat exchanger the interior of which can easily be cleaned and maintained, and with which sufficient heat transfer area can be secured. Also provided is an exhaust gas treatment device using this heat exchanger. This heat exchanger (10) is equipped with heat transfer plates (22) which partition the interior space in a double-pipe structured main body casing (16) into a heat-receiving fluid flow path (18) and a heat-radiating fluid flow path (20), which are formed so as to be contiguous in the axial direction of the main body casing, and so as to have a helical shape across the entirety of the main body casing in the axial direction. A heat-receiving fluid outlet (18b) and a heat-radiating fluid inlet (20a) are provided in the upper end of the main body casing (16), and a head box (24) that defines a space connecting the heat-receiving fluid outlet (18b) and the heat-radiating fluid inlet (20a) is attached to the upper end of the main body casing (16). In addition, on the upper end surface of the main body casing (16) there is mounted a guide member (26), which links the heat-receiving fluid outlet (18b) and the heat-radiating fluid inlet (20a) by means of slanted surfaces (26b, 26c) having a shared apex part (26a), and which guides fluid supplied to the apex part (26a) toward the heat-receiving fluid outlet (18b) and the heat-radiating fluid inlet (20a).

Description

熱交換器及使用該熱交換器之排氣處理裝置 Heat exchanger and exhaust gas treatment device using the same

本發明主要是有關可適合於排氣的熱分解處理過程的熱交換器及使用該熱交換器之排氣處理裝置。 The present invention is mainly directed to a heat exchanger which is suitable for a thermal decomposition treatment process of exhaust gas and an exhaust gas treatment apparatus using the same.

熱交換器具有被以傳熱板彼此分割的至少兩條流路，將低溫的受熱流體(氣體或液體，以下相同)流通於一方的流路，並將高溫的散熱流體流通於另一方的流路，藉此在散熱流體與受熱流體之間進行熱的收送(傳熱)。 The heat exchanger has at least two flow paths divided by the heat transfer plates, and a low-temperature heat-receiving fluid (gas or liquid, the same applies hereinafter) flows through one of the flow paths, and the high-temperature heat-dissipating fluid flows through the other flow. The road is thereby subjected to heat transfer (heat transfer) between the heat radiating fluid and the heated fluid.

以上的熱交換器是使用在利用熱的種種的產業，例如專利文獻1中，揭示有在排氣除害裝置設置熱交換器，並在藉著該排氣除害裝置的除害處理部的燃燒或加熱分解產生高溫的氣體及導入與上述除害處理部連通的配管的惰性氣體之間進行熱交換的技術。 The above-mentioned heat exchanger is used in various industries that utilize heat. For example, Patent Document 1 discloses that a heat exchanger is provided in the exhaust gas detoxification device, and the detoxification treatment unit is provided by the exhaust gas detoxification device. A technique of performing heat exchange between a gas that generates high temperature by combustion or heat decomposition and an inert gas that is introduced into a pipe that communicates with the above-described abatement treatment unit.

根據上述的技術，可使得從除害處理部排出的氣體的溫度降低，減輕排氣的冷卻負擔。又，可以使導入與除害處理部連通的配管的惰性氣體的溫度上升，所以可抑制起 因於該配管內的排氣的溫度降低之固形物的生成及附著。因此，不需要對該配管之加熱器的設置，獲得成本的降低。 According to the above technique, the temperature of the gas discharged from the abatement processing unit can be lowered, and the cooling load of the exhaust gas can be reduced. Moreover, the temperature of the inert gas introduced into the pipe that communicates with the abatement processing unit can be increased, so that it can be suppressed. The formation and adhesion of solids due to a decrease in the temperature of the exhaust gas in the piping. Therefore, the setting of the heater of the piping is not required, and the cost is reduced.

[先前技術文獻] [Previous Technical Literature] [專利文獻] [Patent Literature]

[專利文獻1]日本特開2006-275421號公報 [Patent Document 1] JP-A-2006-275421

但是，在上述習知的熱交換器及使用該熱交換器的排氣處理裝置會有以下的問題。 However, the conventional heat exchanger and the exhaust gas treatment apparatus using the same have the following problems.

亦即，使用於習知的該種裝置的熱交換器，一般是構成使散熱流體的流路或受熱流體的流路的一方蛇行，以確保散熱流體與受熱流體的接觸面積(換言之「傳熱面積」)，並分配至另一方並列的多數細管所構成。因此，在上述流路流動的散熱流體及受熱流體例如包含如半導體排氣的某種粉塵的場合，上述流路之中構成蛇行的一方的角隅部份是在流體的流動方向逆轉時，相對於該流體有著離心力等的作用，使得粉塵等從該流體中分離堆積在流路的角隅部份。並且，分配至上述流路之中並列的多數細管所構成的另一方則是分配至多數的細管時使流速降低，所以此時也會與上述同樣有粉塵等的堆積。其結果，傳熱效率會顯著降低，並使得在流體流通於上述流路時的壓力損 失變大而減少或堵塞流量，產生如真空泵(或者送風機)的負擔變大的問題。 That is, the heat exchanger used in the conventional device generally has a meandering flow path for the flow path or the heated fluid of the heat dissipating fluid to ensure the contact area of the heat dissipating fluid and the heated fluid (in other words, "heat transfer" Area"), and is distributed to the majority of the thin tubes that are juxtaposed to the other side. Therefore, when the heat-dissipating fluid and the heat-receiving fluid flowing through the flow path include, for example, a certain kind of dust such as semiconductor exhaust gas, the corner portion of one of the flow paths constituting the meandering is reversed when the flow direction of the fluid is reversed. The fluid has a centrifugal force or the like so that dust or the like is separated from the fluid and accumulated in the corner portion of the flow path. Further, the other one of the plurality of thin tubes which are arranged in the above-described flow path is configured to reduce the flow rate when the plurality of thin tubes are distributed. Therefore, dust or the like is deposited in the same manner as described above. As a result, the heat transfer efficiency is remarkably lowered, and the pressure loss when the fluid circulates in the above flow path The loss is large and the flow is reduced or blocked, which causes a problem that the burden of the vacuum pump (or the blower) becomes large.

如上述問題產生的場合，雖停止熱交換器(以致使用熱交換器的裝置)的運轉進行內部的清掃，但是積留在蛇行的流路的角隅部份或細管內的粉塵的清掃極為困難成為費時與費力的作業。 When the above problem occurs, the internal cleaning is performed while the operation of the heat exchanger (so that the heat exchanger is used) is stopped. However, it is extremely difficult to clean the dust in the corner portion or the narrow tube of the meandering flow path. Become a time-consuming and laborious job.

又，如上述，為增加散熱流體、受熱流體間的傳熱面積，使得該等流體的流路成為大的蛇行，或分配於細管時，必然會使得熱交換器變大。如上述熱交換器變大時露出表面的散熱面積變大，實質上也會有熱交換效率降低的問題。 Further, as described above, in order to increase the heat transfer area between the heat radiating fluid and the heat receiving fluid, the flow path of the fluids becomes a large meandering, or when the thin tubes are distributed, the heat exchanger is inevitably enlarged. When the heat exchanger becomes large, the heat radiation area of the exposed surface becomes large, and there is a problem that the heat exchange efficiency is lowered substantially.

因此，本發明的主要課題為提供一種不但小型化且可確保充分的傳熱面積，並可容易進行內部的清掃與維護之高效率的熱交換器。又，本發明的進一步的課題是提供一種使用如上述的熱交換器，可進行大容量排氣之有效熱分解(除害)處理的排氣處理裝置。 Therefore, a main object of the present invention is to provide a heat exchanger which is not only small in size but also capable of ensuring a sufficient heat transfer area and which can easily perform internal cleaning and maintenance. Further, a further object of the present invention is to provide an exhaust gas treatment apparatus which can perform an effective thermal decomposition (detoxification) treatment of a large-capacity exhaust gas using the heat exchanger as described above.

為達成上述的目的，本發明是例如第1圖至第3圖表示，將熱交換器10如以下構成。 In order to achieve the above object, the present invention is, for example, shown in Figs. 1 to 3, and the heat exchanger 10 is constructed as follows.

亦即，以外管12及內管14所成，豎立設置使該等的軸朝著上下方向的雙重管構造的主體外殼16，及將形成在上述外管12與上述內管14之間的內部空間，跨上述主體外殼16的軸向整體形成螺旋狀，並區隔成在上述主體 外殼16的軸向彼此鄰接的受熱流體通流路18及散熱流體通流路20的傳熱板22構成。上述主體外殼16的下端部開設有連接於上述受熱流體通流路18的受熱流體入口18a和連接於上述散熱流體通流路20的散熱流體出口20b，並在上述主體外殼16的上端部開設有連接於上述受熱流體通流路18的受熱流體出口18b和連接於上述散熱流體通流路20的散熱流體入口20a。 That is, the outer tube 12 and the inner tube 14 are formed, and the main body casing 16 having the double pipe structure in which the shafts are oriented in the vertical direction and the inner portion between the outer tube 12 and the inner tube 14 are erected. a space that is spirally formed across the axial direction of the main body casing 16 and is partitioned into the body The heat transfer fluid passages 18 adjacent to each other in the axial direction of the outer casing 16 and the heat transfer plates 22 of the heat radiating fluid passages 20 are formed. The lower end portion of the main body casing 16 defines a heat receiving fluid inlet 18a connected to the heat receiving fluid passage 18 and a heat radiating fluid outlet 20b connected to the heat radiating fluid passage 20, and is opened at an upper end portion of the main body casing 16. The heated fluid outlet 18b connected to the heated fluid passage 18 and the heat-dissipating fluid inlet 20a connected to the heat-dissipating fluid passage 20 are connected.

本發明是例如可實現以下的作用。 The present invention is, for example, capable of achieving the following effects.

受熱流體通流路18與散熱流體通流路20是在主體外殼16的軸向鄰接，並跨主體外殼16的軸向整體形成螺旋狀，因此可使透過傳熱板22接觸之低溫側的受熱流體與高溫側的散熱流體的接觸面積，即傳熱面積極大化。 The heat-fluid-fluid passage 18 and the heat-dissipating fluid passage 20 are adjacent to each other in the axial direction of the main body casing 16 and are spirally formed integrally across the axial direction of the main body casing 16, so that the low-temperature side of the heat transfer plate 22 can be heated. The contact area of the fluid with the heat-dissipating fluid on the high temperature side, that is, the heat transfer area is maximized.

又，受熱流體通流路18與散熱流體通流路20並非蛇行(即具有如流路逆轉的急角隅部份)，使內管14的外圍旋繞成螺旋的形狀，並且，受熱流體及散熱流體是經常以快的速度流動於無分支的大致相同形狀的流路內，因此上述的粉塵等不易積留在流路內，或即使粉塵等積留的場合，僅使得洗淨水或洗淨空氣等的內部洗淨流體流動即可較簡單地洗去。 Moreover, the heated fluid passage 18 and the heat-dissipating fluid passage 20 are not meandering (that is, having a sharp corner portion which is reversed by the flow path), and the outer circumference of the inner tube 14 is spirally wound into a spiral shape, and the heat-receiving fluid and heat dissipation are performed. Since the fluid often flows at a rapid rate in a flow path of substantially the same shape without branching, the above-mentioned dust or the like is less likely to accumulate in the flow path, or even if dust or the like is accumulated, only the washing water or the washing is performed. The internal cleaning fluid such as air can be washed out relatively simply.

此外，透過傳熱板22接觸的散熱流體與受熱流體成為對流，因此進一步提升熱交換，可使裝置小型化。又，僅分別對設置在主體外殼16上端部的受熱流體出口18b及散熱流體入口20a供應上述的內部洗淨流體，之後利用重力等使內部洗淨流體流下，可藉此簡單清掃熱交換器 10的內部。 Further, since the heat-dissipating fluid that has passed through the heat transfer plate 22 is convected with the heat-receiving fluid, heat exchange is further enhanced, and the apparatus can be miniaturized. Further, the above-described internal cleaning fluid is supplied only to the heat-receiving fluid outlet 18b and the heat-dissipating fluid inlet 20a provided at the upper end portion of the main body casing 16, and then the internal washing fluid is flowed down by gravity or the like, whereby the heat exchanger can be simply cleaned. The interior of 10.

本發明中，例如第1圖及第2圖表示，以加上以下的構成為佳。 In the present invention, for example, Fig. 1 and Fig. 2 show that it is preferable to add the following configuration.

亦即，以在上述主體外殼16的上部，安裝區隔上述受熱流體出口18b與上述散熱流體入口20a連通的空間的上部箱24，並在上述主體外殼16的上端面，裝設有以頂部26a共同的傾斜面26b、26c連結上述受熱流體出口18b與上述散熱流體入口20a，並將賦予上述頂部26a的流體朝著上述受熱流體出口18b及上述散熱流體入口20a引導的引導構件26為佳。 That is, an upper case 24 that partitions a space in which the heated fluid outlet 18b communicates with the heat radiating fluid inlet 20a is attached to an upper portion of the main body casing 16, and a top portion 26a is attached to an upper end surface of the main body casing 16 The common inclined surfaces 26b and 26c are preferably connected to the heat-receiving fluid outlet 18b and the heat-dissipating fluid inlet 20a, and the guiding member 26 that guides the fluid to the top portion 26a toward the heat-receiving fluid outlet 18b and the heat-dissipating fluid inlet 20a.

此時，僅朝向引導構件26的頂部26a噴射、供應洗淨水等的熱交換器內部洗淨用的流體即可對受熱流體通流路18與散熱流體通流路20分別自動供應內部洗淨用的流體。 At this time, only the fluid for cleaning the inside of the heat exchanger, such as washing water, which is sprayed toward the top portion 26a of the guide member 26, can be automatically supplied to the heated fluid passage 18 and the heat radiating fluid passage 20, respectively. Fluid used.

又，本發明中，除上述各構成，例如第4圖表示，以在上述受熱流體通流路18及上述散熱流體通流路20之中，至少上述散熱流體通流路20內，設置朝向其內部空間的下方噴射淨化用氣體的淨化用氣體供應手段50為佳。 Further, in the present invention, in addition to the above-described respective configurations, for example, FIG. 4 shows that at least the heat radiating fluid passage 20 is provided in the heat-receiving fluid passage 18 and the heat-dissipating fluid passage 20; It is preferable that the gas supply means 50 for purifying the purge gas is injected below the internal space.

在此，淨化用氣體是用於將堆積在散熱流體通流路20(及受熱流體通流路18)內的粉塵等的粒子朝散熱流體出口20b(及受熱流體入口18a)吹除並洗淨(沖除)的氣體。作為該淨化用氣體，尤其以使用如氮氣的惰性氣體為佳。 Here, the purge gas is used to blow off particles of dust or the like deposited in the heat-dissipating fluid passage 20 (and the heated fluid passage 18) toward the heat-dissipating fluid outlet 20b (and the heated fluid inlet 18a) and wash it. (rushed out) gas. As the gas for purification, it is particularly preferable to use an inert gas such as nitrogen.

又，第2發明有關的排氣處理裝置是使用上 述熱交換器10的裝置，例如第1圖表示，如以下構成排氣處理裝置。 Further, the exhaust gas treatment device according to the second invention is used. The apparatus of the heat exchanger 10, for example, is shown in Fig. 1, and constitutes an exhaust gas treatment apparatus as follows.

亦即，具備上述熱交換器10及將流通其熱交換器10的受熱流體通流路18而來之處理對象的排氣E加熱的加熱手段30的反應塔32，及液洗導入於反應塔32之處理對象的排氣E的濕式的入口刮板34或在上述反應塔32液洗熱分解處理後之排氣E的濕式的出口刮板36的至少其中一方。 In other words, the reaction tower 32 including the heat exchanger 10 and the heating means 30 for heating the exhaust gas E to be treated, which flows through the heat-receiving fluid passage 18 of the heat exchanger 10, and the liquid washing are introduced into the reaction tower. At least one of the wet inlet squeegee 34 of the exhaust gas E of the treatment object 32 or the wet outlet screed 36 of the exhaust gas E after the liquid phase thermal decomposition treatment of the reaction tower 32.

又，第3發明有關的排氣處理裝置是使用上述熱交換器10的裝置，例如第3圖表示，如以下構成排氣處理裝置。 Further, the exhaust gas treatment device according to the third aspect of the invention is a device using the heat exchanger 10 described above. For example, FIG. 3 shows an exhaust gas treatment device as follows.

亦即，具備以上述熱交換器10及將流通其熱交換器10的受熱流體通流路18而來之處理對象的排氣E加熱的加熱手段30構成的反應塔32。在上述熱交換器10之受熱流體入口18a附近的受熱流體通流路18內或散熱流體出口20b附近之散熱流體通流路20內的至少其中一方，設有液洗排氣E的一或複數個噴灑嘴40。 In other words, the reaction tower 32 including the heat exchanger 10 and the heating means 30 for heating the exhaust gas E to be processed by the heat-receiving fluid passage 18 passing through the heat exchanger 10 is provided. At least one of the heat-dissipating fluid passages 20 in the vicinity of the heated fluid passage 18 near the heated fluid inlet 18a of the heat exchanger 10 or the heat-dissipating fluid outlet 20b is provided with one or more of the liquid-washed exhaust E Spray nozzles 40.

根據本發明，可提供一種即使小型化仍可充分確保傳熱面積，並容易進行內部的清掃與維護之高效率的熱交換器，及使用如此的熱交換器，將大容量排氣可有效熱分解(除害)處理的排氣處理裝置。 According to the present invention, it is possible to provide a heat exchanger which can sufficiently ensure a heat transfer area even if it is small in size, and which is easy to perform internal cleaning and maintenance, and which can efficiently heat a large-capacity exhaust gas using such a heat exchanger. An exhaust gas treatment device that decomposes (destroyed) the treatment.

10‧‧‧熱交換器 10‧‧‧ heat exchanger

11A、11B‧‧‧排氣處理裝置 11A, 11B‧‧‧ exhaust treatment unit

12‧‧‧外管 12‧‧‧External management

14‧‧‧內管 14‧‧‧Inside

16‧‧‧主體外殼 16‧‧‧ body shell

18‧‧‧受熱流體通流路 18‧‧‧heated fluid flow path

18a‧‧‧受熱流體入口 18a‧‧‧ heated fluid inlet

18b‧‧‧受熱流體出口 18b‧‧‧heated fluid outlet

20‧‧‧散熱流體通流路 20‧‧‧Solid fluid flow path

20a‧‧‧散熱流體入口 20a‧‧‧heating fluid inlet

20b‧‧‧散熱流體出口 20b‧‧‧Dissipating fluid outlet

22‧‧‧傳熱板 22‧‧‧heat transfer plate

24‧‧‧上部箱 24‧‧‧Upper box

26‧‧‧引導構件 26‧‧‧Guiding components

26a‧‧‧(引導構件的)頂部 26a‧‧‧ (leading member) top

26b、26c‧‧‧(引導構件的)傾斜面 26b, 26c‧‧‧ (guide member) inclined surface

30‧‧‧加熱手段 30‧‧‧heating means

32‧‧‧反應塔 32‧‧‧Reaction tower

34‧‧‧入口刮板 34‧‧‧Ink scraper

36‧‧‧出口刮板 36‧‧‧Export scraper

40‧‧‧噴灑嘴 40‧‧‧ spray nozzle

50‧‧‧淨化用氣體供應手段 50‧‧‧Gas supply means for purification

E‧‧‧排氣 E‧‧‧Exhaust

第1圖表示本發明之一實施例的排氣處理裝置的概略的說明圖。 Fig. 1 is a schematic explanatory view showing an exhaust gas treatment device according to an embodiment of the present invention.

第2圖為第1圖的主要部的放大圖，表示本發明的熱交換器之一例的圖。 Fig. 2 is an enlarged view of a main portion of Fig. 1 and showing an example of a heat exchanger according to the present invention.

第3圖表示本發明之其他實施例的排氣處理裝置的概略的說明圖。 Fig. 3 is a schematic explanatory view showing an exhaust gas treatment device according to another embodiment of the present invention.

第4圖表示本發明之其他實施例的熱交換器的概略的說明圖。 Fig. 4 is a schematic explanatory view showing a heat exchanger according to another embodiment of the present invention.

以下，藉第1圖及第2圖說明本發明之一實施形態(第1實施形態)。 Hereinafter, an embodiment (first embodiment) of the present invention will be described with reference to Figs. 1 and 2 .

第1圖是表示搭載本發明的熱交換器10之排氣處理裝置11A的概略圖。該排氣處理裝置11A是將包含從未圖示的半導體製造裝置排出之甲矽烷(SiH4)、氯基氣體、PFCs(全氟化合物)等的排氣E除害處理用的裝置，如該圖表示，排氣處理裝置11A是沿著排氣E的處理流程，將入口刮板34、反應塔32及出口刮板36依此順序設置，並加上排氣風扇42及水槽44所構成。 Fig. 1 is a schematic view showing an exhaust gas treatment device 11A on which the heat exchanger 10 of the present invention is mounted. The exhaust gas treatment device 11A is a device for detoxification treatment of exhaust gas E containing methane (SiH 4 ), chlorine-based gas, PFCs (perfluoro compound), and the like discharged from a semiconductor manufacturing device (not shown). The exhaust gas treatment device 11A is a process flow along the exhaust gas E, and the inlet squeegee 34, the reaction tower 32, and the outlet squeegee 36 are disposed in this order, and an exhaust fan 42 and a water tank 44 are added.

在此，針對賦予第1圖中的符號E的箭頭，相對較粗的線的箭頭是表示熱分解前，相對較細的線的箭頭則是表示熱分解後(後述的第2圖與第3圖也相同)。 Here, with respect to the arrow given to the symbol E in the first drawing, the arrow of the relatively thick line indicates the thermal decomposition, and the arrow of the relatively thin line indicates the thermal decomposition (second image and third embodiment to be described later). The figure is the same).

入口刮板34是以洗淨水吸收包含於未圖示半導體製造裝置所排出之排氣E的粉塵或水溶性氣體等從排氣E洗淨除去，以直管型的刮板主體34a，及配設在其刮板主體34a內部，對供應反應塔32之前的排氣E，噴射熱分解前洗淨水PW將此洗淨的噴灑嘴34b構成。在此，熱分解前洗淨水PW是因應目的，使用添加水或氨或NaOH等的鹼或酸等藥液的水溶液等。 The inlet squeegee 34 is a straight tube type squeegee main body 34a that is washed and removed from the exhaust gas E by the dust or water-soluble gas contained in the exhaust gas E discharged from the semiconductor manufacturing apparatus (not shown). The inside of the squeegee main body 34a is disposed, and the exhaust gas E before the supply of the reaction tower 32 is sprayed with the spray nozzle 34b which is washed by the hot pre-decomposition washing water PW. Here, the pre-thermal decomposition washing water PW is an aqueous solution of a chemical solution such as an alkali or an acid such as ammonia or NaOH, which is added with water or ammonia.

該入口刮板34的頂部是透過入口導管46與未圖示的半導體製造裝置連結，將半導體的製造過程所排出的各種排氣E通過入口導管46，導入該入口刮板34的頂部。 The top of the inlet squeegee 34 is connected to a semiconductor manufacturing apparatus (not shown) through an inlet duct 46, and various exhaust gases E discharged from the semiconductor manufacturing process are introduced into the top of the inlet squeegee 34 through the inlet duct 46.

再者，第1圖中的符號34c是促進從噴灑嘴34b散佈之熱分解前洗淨水PW與排氣E的氣液接觸用的填充材。 In addition, reference numeral 34c in Fig. 1 is a filler for promoting gas-liquid contact between the pre-thermal decomposition washing water PW and the exhaust gas E dispersed from the spray nozzle 34b.

又，第1圖中，排氣E的流通方向與從噴灑嘴34b所散佈之熱分解前洗淨水PW的流通方向為相同方向，但該等也可成為對向流。 Further, in the first drawing, the flow direction of the exhaust gas E is the same as the flow direction of the washing water PW before the thermal decomposition dispersed from the spray nozzle 34b, but these may also be the opposite flow.

圖示實施例中，該入口刮板34與水槽44為個別設置，並且兩者是以水洗氣體供應配管48及從該水洗氣體供應配管48分支的排水管50連接。因此，來自入口刮板34的排水是透過水洗氣體供應配管48及排水管50送入到設置在水槽44內的灑水回收槽44a(後述)。又，排水管50的水槽側端部50a是藉著配設在比灑水回收槽44a的水面更低的位置進行水封。 In the illustrated embodiment, the inlet squeegee 34 and the water tank 44 are separately provided, and both are connected by a water-washing gas supply pipe 48 and a drain pipe 50 branched from the water-washing gas supply pipe 48. Therefore, the drain water from the inlet squeegee 34 is sent to the water sprinkling tank 44a (described later) provided in the water tank 44 through the water washing gas supply pipe 48 and the drain pipe 50. Moreover, the water tank side end portion 50a of the drain pipe 50 is water-sealed by being disposed at a position lower than the water surface of the sprinkling water collecting tank 44a.

上述的噴灑嘴34b與灑水回收槽44a是透過配管52連接，在該配管52的中途設有泵54。並且，藉 此泵54，將貯放在灑水回收槽44a內的熱分解前洗淨水PW朝著噴灑嘴34b供應。 The spray nozzle 34b and the water spray recovery tank 44a are connected to each other through a pipe 52, and a pump 54 is provided in the middle of the pipe 52. And borrow This pump 54 supplies the pre-thermal decomposition washing water PW stored in the sprinkling water recovery tank 44a toward the spray nozzle 34b.

並且，也可將上述入口刮板34豎立設置在灑水回收槽44a上，使入口刮板34的內部與水槽44的內部彼此直接連通。 Further, the inlet squeegee 34 may be erected on the sprinkling water collecting tank 44a so that the inside of the inlet squeegee 34 and the inside of the water tank 44 are in direct communication with each other.

反應塔32是排氣E加熱分解用的裝置，具有熱交換器10與加熱手段30。 The reaction tower 32 is a device for heating and decomposing the exhaust gas E, and has a heat exchanger 10 and a heating means 30.

熱交換器10是如第2圖表示，以不鏽鋼或耐鹽酸鎳基合金(Haynes International,Inc登錄商標)等的金屬材料形成的外管12及內管14構成的雙重管構造的主體外殼16，及同樣的不鏽鋼或耐鹽酸鎳基合金(Haynes International,Inc登錄商標)等的金屬材料所構成，以將形成在上述外管12與上述內管14之間的內部空間區隔成受熱流體通流路18及散熱流體通流路20的傳熱板22所構成。並且，上述受熱流體通流路18與上述散熱流體通流路20是以上述主體外殼16的軸向鄰接並跨上述主體外殼16的軸向整體形成螺旋狀。 The heat exchanger 10 is a main body casing 16 having a double pipe structure including an outer pipe 12 and an inner pipe 14 made of a metal material such as stainless steel or a nickel-hydrochloride-resistant alloy (Haynes International, Inc.), as shown in Fig. 2, And a metal material such as the same stainless steel or nickel-hydrochloride-resistant alloy (Haynes International, Inc. registered trademark) or the like to partition the internal space formed between the outer tube 12 and the inner tube 14 into a heated fluid flow. The path 18 and the heat transfer plate 22 of the heat dissipation fluid passage 20 are formed. Further, the heat-receiving fluid passage 18 and the heat-dissipating fluid passage 20 are formed in a spiral shape so as to be adjacent to the axial direction of the main body casing 16 in the axial direction of the main body casing 16.

在此，形成主體外殼16的外管12及內管14的形狀為圓管狀或角管狀等任何的形狀皆可。尤其在主體外殼16的外管12及內管14的形狀為角管狀的場合，可實現如以下的作用、效果。亦即，在受熱流體通流路18及散熱流體通流路20流動的受熱流體及散熱流體會因為角隅部份相對於壁面呈大致直角突出而產生亂流。並且，如上述產生亂流，傳熱效率(熱傳效率)即會上升數倍，可提升 熱交換器整體的熱交換效率，並可抑制粉塵等對流路壁面的附著。此外，對受熱流體通流路18及散熱流體通流路20供應(後述)熱交換器內部洗淨用的流體的場合，該流體在角隅部份相對於壁面成大致直角抵接而碎裂成無數。因此，可進一步提升該流體之洗淨效果。 Here, the shape of the outer tube 12 and the inner tube 14 forming the main body casing 16 may be any shape such as a circular tube shape or an angular tube shape. In particular, when the outer tube 12 and the inner tube 14 of the main body casing 16 have an angular tubular shape, the following actions and effects can be achieved. That is, the heated fluid and the heat-dissipating fluid flowing through the heated fluid passage 18 and the heat-dissipating fluid passage 20 cause turbulence due to the corner portion protruding at a substantially right angle with respect to the wall surface. Moreover, if turbulent flow occurs as described above, the heat transfer efficiency (heat transfer efficiency) will increase several times and can be improved. The heat exchange efficiency of the entire heat exchanger can suppress the adhesion of dust or the like to the wall surface of the flow path. Further, when the fluid for cleaning the inside of the heat exchanger (described later) is supplied to the heat-fluid-fluid passage 18 and the heat-dissipating fluid passage 20, the fluid abuts at a substantially right angle with respect to the wall surface and is broken. Innumerable. Therefore, the cleaning effect of the fluid can be further improved.

又，圖示實施形態的熱交換器10中，主體外殼16是豎立設置使其軸朝著上下方向，在該主體外殼16的下端部，更具體是在外管12的下端外圍面，開設有連接於受熱流體通流路18的受熱流體入口18a和連接於散熱流體通流路20的散熱流體出口20b。在上述受熱流體入口18a連接著水洗氣體供應配管48的下游端，在上述散熱流體出口20b連接有將反應塔32內熱分解處理後的排氣E送給水槽44的分解氣體送給配管56。再者，上述受熱流體入口18a及散熱流體出口20b只要設置在主體外殼16的下端部即可，其開設位置不限於上述的位置，例如，也可以是主體外殼16的下端面。 Further, in the heat exchanger 10 of the illustrated embodiment, the main body casing 16 is erected such that its axis faces in the vertical direction, and is connected at the lower end portion of the main body casing 16, more specifically, to the outer peripheral surface of the lower end of the outer pipe 12. The heated fluid inlet 18a of the heated fluid passage 18 and the heat-dissipating fluid outlet 20b connected to the heat-dissipating fluid passage 20. A downstream end of the water-washing gas supply pipe 48 is connected to the heat-receiving fluid inlet 18a, and a decomposition gas supply pipe 56 for supplying the exhaust gas E after the thermal decomposition treatment in the reaction tower 32 to the water tank 44 is connected to the heat-dissipating fluid outlet 20b. Further, the heat-receiving fluid inlet 18a and the heat-dissipating fluid outlet 20b may be provided at the lower end portion of the main body casing 16, and the opening position thereof is not limited to the above-described position, and may be, for example, the lower end surface of the main body casing 16.

另一方面，該主體外殼16的上端部，更具體是在外管12的上端外圍面，開設有連接於受熱流體通流路18的受熱流體出口18b和連接於散熱流體通流路20的散熱流體入口20a。如上述，本實施形態的熱交換器10是構成使散熱流體與受熱流體成為對向流。並且，只要上述受熱流體出口18b及散熱流體入口20a也設置在主體外殼16的上端部，其開設位置不限於上述的位置，例如，也可以是主體外殼16的上端面。 On the other hand, the upper end portion of the main body casing 16, more specifically, the outer peripheral surface of the outer pipe 12, is provided with a heated fluid outlet 18b connected to the heated fluid passage 18 and a heat radiating fluid connected to the heat radiating fluid passage 20. Entrance 20a. As described above, the heat exchanger 10 of the present embodiment is configured such that the heat radiating fluid and the heat receiving fluid are opposed to each other. Further, as long as the heat-receiving fluid outlet 18b and the heat-dissipating fluid inlet 20a are also provided at the upper end portion of the main body casing 16, the opening position thereof is not limited to the above-described position, and may be, for example, the upper end surface of the main body casing 16.

在此，從本實施形態的熱交換器10整體的流路與其溫度分佈的配置顯示，高溫側成為上部，低溫側成為下部，散熱少且熱交換率高的省能裝置為理想的配置。 Here, the arrangement of the flow path and the temperature distribution of the entire heat exchanger 10 of the present embodiment shows that the high-temperature side is the upper portion, the low-temperature side is the lower portion, and the energy-saving device having less heat dissipation and high heat exchange rate is preferable.

此外，主體外殼16的上部是以不鏽鋼或耐鹽酸鎳基合金(Haynes International,Inc登錄商標)等的金屬材料形成，安裝有區隔受熱流體出口18b與散熱流體入口20a的空間的上部箱24，並在主體外殼16的上端面，裝設有透過頂部26a共同的傾斜面26b、26c連結受熱流體出口18b與散熱流體入口20a的金屬或陶瓷製的引導構件26。在此，在上部箱24內的該引導構件26的頂部26a正上方的位置安裝有噴灑嘴28，必要時，從此噴灑嘴28朝向引導構件26的頂部26a噴射的熱交換器內部洗淨用的流體的灑水SW為上述引導構件26的傾斜面26b、26c所引導，而供應受熱流體出口18b及散熱流體入口20a。又如第2圖表示，在上部箱24的底部設置有將上述的灑水SW等毫無遺漏地引導至受熱流體出口18b及散熱流體入口20a的傾斜。 Further, the upper portion of the main body casing 16 is formed of a metal material such as stainless steel or a nickel-hydrochloride-resistant alloy (Haynes International, Inc. registered trademark), and is mounted with an upper tank 24 that partitions the space of the heated fluid outlet 18b and the heat-dissipating fluid inlet 20a. On the upper end surface of the main body casing 16, a metal or ceramic guide member 26 that connects the heat-receiving fluid outlet 18b and the heat-dissipating fluid inlet 20a through the inclined surfaces 26b and 26c common to the top portion 26a is provided. Here, the spray nozzle 28 is attached to a position directly above the top portion 26a of the guide member 26 in the upper tank 24, and if necessary, the heat exchanger sprayed from the spray nozzle 28 toward the top portion 26a of the guide member 26 is cleaned. The fluid sprinkling SW is guided by the inclined faces 26b, 26c of the above-described guiding member 26, and supplies the heated fluid outlet 18b and the heat radiating fluid inlet 20a. Further, as shown in Fig. 2, the bottom portion of the upper casing 24 is provided with an inclination to guide the above-described sprinkling SW or the like to the heated fluid outlet 18b and the heat radiating fluid inlet 20a without fail.

再者，圖示實施形態的熱交換器10中，上述主體外殼16與上部箱24是形成露出的狀態，但為了進一步提升熱交換器10的熱利用率，以在上部箱24的外表面及上述主體外殼16的外管12的外圍面與內管14的內部空間貼設隔熱材為佳。又如上述，從熱交換器10整體的流路與其溫度分佈的配置顯示，高溫側成為上部，低溫側成為下部是理想的配置，至少在上部箱24的外表面與主體外殼 16的外管12的外圍面上部貼設隔熱材，即可充分提升熱利用效率。 Further, in the heat exchanger 10 of the illustrated embodiment, the main body casing 16 and the upper casing 24 are exposed. However, in order to further improve the heat utilization rate of the heat exchanger 10, the outer surface of the upper casing 24 and It is preferable that the outer peripheral surface of the outer tube 12 of the main body casing 16 and the inner space of the inner tube 14 are provided with a heat insulating material. Further, as described above, the arrangement of the flow path and the temperature distribution from the entire heat exchanger 10 indicates that the high temperature side is the upper portion and the low temperature side is the lower portion, which is an ideal arrangement, at least on the outer surface of the upper case 24 and the main body case. A heat insulating material is attached to the outer surface of the outer tube 12 of the outer tube 12 to sufficiently improve the heat utilization efficiency.

加熱手段30是用於排氣E熱分解的熱源。圖示實施樣態中，該加熱手段30是使用在氧化鋁等的陶瓷製或耐鹽酸鎳基合金(Haynes International,Inc登錄商標)或不鏽鋼等的金屬製的保護管的內部，裝填SiC等的陶瓷或鎳線或鐵鉻鋁耐熱材料(SANDVIK AB公司登錄商標)線等的金屬線所構成發熱電阻的電熱式的加熱器。並且，將該加熱手段30複數設置在上部箱24內的排氣E的流路附近，具體是引導構件26的內部及與該引導構件26相對的上部箱24的內壁內部。 The heating means 30 is a heat source for thermal decomposition of the exhaust gas E. In the embodiment shown in the figure, the heating means 30 is used in a protective tube made of a ceramic such as alumina or a nickel-hydrochloride-resistant alloy (Haynes International, Inc.) or stainless steel, and is filled with SiC or the like. An electrothermal heater that constitutes a heating resistor by a metal wire such as a ceramic or nickel wire or an iron-chromium-aluminum heat-resistant material (registered trademark of SANDVIK AB). Further, the heating means 30 is provided in plural in the vicinity of the flow path of the exhaust gas E in the upper tank 24, specifically, the inside of the guide member 26 and the inside of the inner wall of the upper tank 24 opposed to the guide member 26.

又，雖未圖示，但是於加熱手段30構成的電熱式的加熱器，在其後端部設有供電端子，透過導線將電源裝置連接於此供電端子。 Further, although not shown, the electrothermal heater configured by the heating means 30 is provided with a power supply terminal at the rear end portion thereof, and the power supply device is connected to the power supply terminal through the lead wire.

再者，加熱手段30只要是可供應排氣E的熱分解之高溫的熱，則其樣態不為上述電熱式的加熱器所限定，例如，也可以是火焰式的燃燒器或非移動式或移動式的電漿噴燈等。又，其設置個數並非如上述為複數個也可以是一個。 Further, the heating means 30 is not limited to the above-described electrothermal heater as long as it is a high-temperature heat that can supply the thermal decomposition of the exhaust gas E. For example, it may be a flame type burner or a non-mobile type. Or mobile plasma torches, etc. Further, the number of the settings may be one or more than the above.

此外，不論加熱手段30為何，在排氣E的除害上必須要氧或空氣等的助燃性氣體等的場合，相關的氣體也可以和排氣E一起從受熱流體入口18a朝反應塔32內供應，或直接供應至上部箱24內。 Further, regardless of the heating means 30, when a combustion-supporting gas such as oxygen or air is required for the detoxification of the exhaust gas E, the related gas may be supplied from the heated fluid inlet 18a toward the reaction tower 32 together with the exhaust gas E. It is supplied or supplied directly to the upper tank 24.

出口刮板36是用於將反應塔32熱分解後的 排氣洗淨及冷卻，以豎立設置在構成水槽44的出口刮板排水回收槽44b(後述)的上面的直管狀的刮板主體36a；與排氣E的流通方向相對地從上方噴射洗淨水CW之向下的噴灑嘴36b；及促進從噴灑嘴36b散佈的洗淨水CW與排氣E的氣液接觸用的填充材36c。 The outlet scraper 36 is for thermally decomposing the reaction tower 32 The exhaust pipe is washed and cooled, and is erected in a straight tubular squeegee main body 36a which is provided on the upper surface of the outlet squeegee drain collecting groove 44b (described later) constituting the water tank 44; and is sprayed from above in the direction in which the exhaust gas E flows. A spray nozzle 36b that is downward of the water CW; and a filler 36c for promoting gas-liquid contact between the washing water CW and the exhaust gas E dispersed from the spray nozzle 36b.

該出口刮板36是與上述入口刮板34同樣，在圖示實施形態中，噴灑嘴36b與水槽44(更具體為出口刮板排水回收槽44b)是透過配管60連接，雖是藉安裝在此配管60中途的泵62，將出口刮板排水回收槽44b內的洗淨水CW上揚至噴灑嘴36b，但是對此噴灑嘴36b除了水槽44內的洗淨水CW之外，可根據需要供應新水等的新的藥液。 The outlet squeegee 36 is similar to the inlet squeegee 34. In the illustrated embodiment, the spray nozzle 36b and the water tank 44 (more specifically, the outlet squeegee drain recovery tank 44b) are connected through the pipe 60, and are attached thereto. The pump 62 in the middle of the piping 60 raises the washing water CW in the outlet scraper drain recovery tank 44b to the spray nozzle 36b, but the spray nozzle 36b can be supplied as needed in addition to the washing water CW in the water tank 44. New liquid such as new water.

並且，第1圖中的符號64是將從出口刮板排水回收槽44b供應至噴灑嘴36b的洗淨水CW冷卻用的冷卻裝置。 Further, reference numeral 64 in Fig. 1 denotes a cooling device for cooling the washing water CW supplied from the outlet blade drain recovery tank 44b to the spray nozzle 36b.

排氣風扇42是連接於出口刮板36的頂部出口，藉著該排氣風扇42的作動將排氣處理裝置11A的內部經常保持在比大氣壓低的壓力(=負壓)。因此，不致使得熱分解處理前的排氣E或已處理的高溫的排氣E因錯誤而從排氣處理裝置11A漏出到外部。 The exhaust fan 42 is a top outlet connected to the outlet squeegee 36, and the inside of the exhaust gas treatment device 11A is constantly maintained at a pressure lower than atmospheric pressure (= negative pressure) by the operation of the exhaust fan 42. Therefore, the exhaust gas E before the thermal decomposition treatment or the exhausted high temperature E which has been treated is not caused to leak from the exhaust treatment device 11A to the outside due to an error.

水槽44是貯放熱分解前洗淨水PW、灑水SW及洗淨水CW用的槽，其內部是藉間隔構件66分隔成灑水回收槽44a及出口刮板排水回收槽44b。又，間隔構件66是從水槽44內的底面豎立設置的板材，在其上端與水槽48內的頂面之間設有開口68，如後述在排氣處理裝置 11A的作動中，排氣E通過此開口68。 The water tank 44 is a tank for storing the pre-heat decomposition pre-cleaned water PW, the sprinkling water SW, and the washing water CW, and the inside thereof is partitioned into a sprinkling water collecting tank 44a and an outlet scraper drain collecting tank 44b by a partition member 66. Further, the partition member 66 is a plate member that is erected from the bottom surface in the water tank 44, and an opening 68 is provided between the upper end and the top surface in the water tank 48, as will be described later in the exhaust gas treatment device. In the operation of 11A, exhaust gas E passes through this opening 68.

如上述，灑水回收槽44a是回收從入口刮板34噴射的熱分解前洗淨水PW及噴灑嘴28噴射的灑水SW，並相對於入口刮板34及噴灑嘴28貯留透過泵54供應之熱分解前洗淨水PW及灑水SW的水槽。 As described above, the sprinkling water recovery tank 44a recovers the pre-thermal decomposition washing water PW sprayed from the inlet scraper 34 and the sprinkling water SW sprayed from the spray nozzle 28, and supplies it to the inlet squeegee 34 and the spray nozzle 28 to store the permeate pump 54. The water is washed before the water PW and the sink of the SW.

又，出口刮板排水回收槽44b是回收從出口刮板36的噴灑嘴36b排出的洗淨水CW及依需要而供應新水等的新的藥液，並貯留供應出口刮板36之噴灑嘴36b的水等，即洗淨水CW的水槽。 Further, the outlet blade drain recovery tank 44b collects the washing liquid CW discharged from the nozzle 36b of the outlet blade 36, and supplies new liquid such as fresh water as needed, and stores the nozzle of the supply outlet blade 36. 36b of water, etc., that is, the sink of the washing water CW.

在此，依需要將供應出口刮板36的新水等的新的藥液流入出口刮板排水回收槽44b，因此剩餘的水超過間隔構件66即會溢流至灑水回收槽44a不致存留預定量以上的水等。又，灑水回收槽44a是如上述，水等從出口刮板排水回收槽44b溢流而來，因此配設排水管70以不致貯留預定量以上的水等。該排水管70是將貯留在灑水回收槽44a的水等送至未圖示之排水處理裝置用的配管，其一方端是與排水處理裝置連接，並且另一端是從灑水回收槽44a的底面配設在預定的高度。因此，灑水回收槽44a的水面位置不會比排水管70另一方端的位置高。 Here, a new chemical solution such as fresh water supplied to the outlet blade 36 is supplied to the outlet blade drain recovery tank 44b as needed, so that the remaining water overflows the spacer member 66 and overflows to the water sprinkling tank 44a. More than the amount of water. In addition, as described above, the water sprinkling tank 44a overflows from the outlet scraper drain recovery tank 44b. Therefore, the drain pipe 70 is disposed so as not to store a predetermined amount or more of water or the like. The drain pipe 70 is a pipe for discharging water or the like stored in the water sprinkling tank 44a to a drain treatment device (not shown), and one end thereof is connected to the drain treatment device, and the other end is from the sprinkling water collecting tank 44a. The bottom surface is disposed at a predetermined height. Therefore, the water surface position of the water sprinkling tank 44a is not higher than the position of the other end of the drain pipe 70.

再者，在本實施例的排氣處理裝置11A中除反應塔32的上部箱24內的其他部份，為了防止因包含於排氣E或排氣E分解所產生的氫氟酸等之腐蝕性成分的腐蝕各部，施以氯乙烯樹脂、聚乙烯樹脂、不飽和聚酯樹脂及含氟樹脂等抗腐蝕性的內襯或塗敷。 Further, in the exhaust gas treatment device 11A of the present embodiment, in addition to the other portions in the upper tank 24 of the reaction tower 32, in order to prevent corrosion of hydrofluoric acid or the like due to decomposition of the exhaust gas E or the exhaust gas E, Each part of the corrosion of the sexual component is coated with a corrosion-resistant lining or coating such as a vinyl chloride resin, a polyethylene resin, an unsaturated polyester resin, or a fluorine-containing resin.

接著，在使用如以上所構成的排氣處理裝置11A進行排氣E的除害處理時，最初首先，啟動排氣處理裝置11A的運轉開關(未圖示)使反應塔32內的加熱手段30動作，開始上部箱24內的加熱。 Next, when the exhaust gas treatment device 11A configured as described above performs the detoxification treatment of the exhaust gas E, first, the operation switch (not shown) of the exhaust gas treatment device 11A is started to cause the heating means 30 in the reaction tower 32. The operation starts heating in the upper tank 24.

接著，上部箱24內的排氣E流通區域的溫度達到包含在該排氣E之除害對象成分的熱分解溫度時，使排氣風扇42動作，開始進行朝排氣處理裝置11A之排氣E的導入。如此一來，排氣E依照入口刮板34、反應塔32及出口刮板36的順序通過而將排氣E中的除害對象成分除害。 When the temperature of the exhaust gas E in the upper tank 24 reaches the thermal decomposition temperature of the component to be depleted of the exhaust gas E, the exhaust fan 42 is operated to start the exhaust to the exhaust gas treatment device 11A. Import of E. As a result, the exhaust gas E passes through the inlet squeegee 34, the reaction tower 32, and the outlet squeegee 36 in order, and the target component of the exhaust gas E is detoxified.

根據本實施形態的排氣處理裝置11A，熱交換器10是如上述所構成，在排氣E的熱分解之時，可實現以下的作用。 According to the exhaust gas treatment device 11A of the present embodiment, the heat exchanger 10 is configured as described above, and when the exhaust gas E is thermally decomposed, the following effects can be achieved.

即，受熱流體通流路18與散熱流體通流路20是在主體外殼16的軸向鄰接，並跨主體外殼16的軸向整體形成螺旋狀，因此可使透過傳熱板22接觸之受熱流體與散熱流體的接觸面積，即傳熱面積極大化。此外，使透過傳熱板22接觸的散熱流體與受熱流體成為對向流，因此經常成低溫的受熱流體與較此高溫度的散熱流體接觸，可提升熱交換效率。 That is, the heat-receiving fluid passage 18 and the heat-dissipating fluid passage 20 are adjacent to each other in the axial direction of the main body casing 16 and are spirally formed integrally with the axial direction of the main casing 16, so that the heated fluid that is transmitted through the heat transfer plate 22 can be contacted. The contact area with the heat dissipating fluid, that is, the heat transfer area is maximized. Further, since the heat-dissipating fluid that has passed through the heat transfer plate 22 and the heat-receiving fluid are opposed to each other, the heat-receiving fluid that is often low-temperature is in contact with the heat-dissipating fluid having a higher temperature, and the heat exchange efficiency can be improved.

又，本實施形態的排氣處理裝置11A中，熱交換器10的受熱流體通流路18與散熱流體通流路20是將內管14的外圍形成旋繞成螺旋狀的形狀，因此粉塵等積留於流路內困難，且即使有粉塵等積留的場合，僅藉著 洗淨水或洗淨空氣等的內部洗淨流體的流動即可比較簡單進行沖洗。尤其在本實施形態的排氣處理裝置11A中，在豎立設置的熱交換器10的主體外殼16的上端面設有引導構件26，並且在此引導構件26的頂點26a正上方的位置裝設有噴射灑水SW的噴灑嘴28，因此僅朝著引導構件26的頂部26a噴射、供應熱交換器內部洗淨用的灑水SW即可對受熱流體出口18b及散熱流體入口20a分別自動地供應灑水SW。並且，對受熱流體出口18b及散熱流體入口20a分別供應的灑水SW是在其後，依據重力等流下至熱交換器10的內部沖洗積留在熱交換器10內的粉塵等。 Further, in the exhaust gas treatment device 11A of the present embodiment, the heat-receiving fluid passage 18 and the heat-dissipating fluid passage 20 of the heat exchanger 10 have a shape in which the outer periphery of the inner tube 14 is spirally wound, so that dust and the like are accumulated. It is difficult to stay in the flow path, and even if there is accumulation of dust, etc., only by The flow of the internal washing fluid such as washing water or washing air can be washed relatively easily. In the exhaust gas treatment device 11A of the present embodiment, the guide member 26 is provided on the upper end surface of the main body casing 16 of the heat exchanger 10 that is erected, and is disposed at a position directly above the apex 26a of the guide member 26. Since the spray nozzle 28 of the sprinkling water SW is sprayed, the sprinkling water SW for cleaning the inside of the heat exchanger is sprayed only toward the top portion 26a of the guide member 26, and the heated fluid outlet 18b and the heat-dissipating fluid inlet 20a are automatically supplied and sprinkled, respectively. Water SW. Further, the water sprinkling SW supplied to the heat-receiving fluid outlet 18b and the heat-dissipating fluid inlet 20a is followed by the dust or the like which flows down to the inside of the heat exchanger 10 in accordance with gravity or the like.

再者，上述的實施形態，可變更如下。 Furthermore, the above embodiment can be modified as follows.

上述排氣處理裝置11A雖表示具備入口刮板34與出口刮板36的雙方的場合，但根據處理之排氣E的種類也可具備該等的其中任一方。 Although the exhaust gas treatment device 11A includes both the inlet squeegee 34 and the outlet squeegee 36, any one of these may be provided depending on the type of the exhaust gas E to be treated.

接著，針對第3圖表示的第2實施形態的排氣處理裝置11B說明。 Next, the exhaust gas treatment device 11B of the second embodiment shown in Fig. 3 will be described.

與上述第1實施形態不同的部份，主要是省略反應塔32前後的入口刮板34及出口刮板36，並在熱交換器10的下側內部配置噴灑嘴40的點。並且，該等以外的部份是與上述第1實施形態相同，因此針對相同的構成賦予和第1實施形態相同的符號，並援用上述第1實施形態的說明來取代本實施形態的說明。又關於各符號，在以上位概念表示各部位的場合則不加註字母的分枝編號僅以***數字表示，有必要區別各部位的場合(即以下位概念表示 的場合)則加註大字母的分枝編號並賦予***數字來區別。 The portion different from the above-described first embodiment mainly omits the inlet squeegee 34 and the outlet squeegee 36 in the front and rear of the reaction tower 32, and the nozzle 40 is disposed inside the lower side of the heat exchanger 10. The other portions are the same as those in the first embodiment. Therefore, the same components as those in the first embodiment are denoted by the same reference numerals, and the description of the first embodiment is used instead of the description of the present embodiment. Regarding each symbol, when the above-mentioned concept indicates each part, the branch number without a letter is only indicated by an Arabic numeral, and it is necessary to distinguish each part (that is, the following concept representation) In the case of the case, the branch number of the big letter is added and the Arabic numeral is given to distinguish.

噴灑嘴40為噴射灑水SW進行排氣E液洗之用，複數設置在熱交換器10之受熱流體入口18a附近的受熱流體通流路18內及散熱流體出口20b附近的散熱流體通流路20內。其中，設置在受熱流體入口18a附近的受熱流體通流路18內的噴灑嘴40A是從受熱流體入口18a朝著與供應受熱流體通流路18內之排氣E的流動相對的方向噴射灑水SW，發揮與上述入口刮板34同等的功能。相對於此，設置在散熱流體出口20b附近之散熱流體通流路20內的噴灑嘴40B是在散熱流體通流路20內朝著與散熱流體出口20b的排氣E的流動並行的方向噴射灑水SW，發揮與上述出口刮板36同等的功能。 The spray nozzle 40 is used for the exhaust E liquid washing of the spray sprinkling SW, and a plurality of heat-dissipating fluid passages disposed in the heated fluid passage 18 near the heated fluid inlet 18a of the heat exchanger 10 and near the heat-dissipating fluid outlet 20b. 20 inside. Here, the spray nozzle 40A provided in the heated fluid passage 18 near the heated fluid inlet 18a sprays water from the heated fluid inlet 18a in a direction opposite to the flow of the exhaust E in the supplied heated fluid passage 18 The SW exerts the same function as the above-described inlet blade 34. On the other hand, the nozzle 40B provided in the heat radiating fluid passage 20 in the vicinity of the heat radiating fluid outlet 20b is sprayed in the direction parallel to the flow of the exhaust gas E of the heat radiating fluid outlet 20b in the heat radiating fluid passage 20 The water SW exerts the same function as the above-described exit squeegee 36.

又，本實施形態的排氣處理裝置11B是在受熱流體入口18a直接連結有水槽72。該水槽72是以從噴灑嘴40A噴射出的灑水SW作為排水W回收的槽，其內部空間是透過入口導管46與未圖示的半導體製造裝置連結。另一方面，在散熱流體出口20b直接連結有水槽74。該水槽74是以從噴灑嘴40B噴射出的灑水SW作為排水W回收的槽，其內部空間連接於排氣風扇42。 Further, in the exhaust gas treatment device 11B of the present embodiment, the water tank 72 is directly connected to the heat receiving fluid inlet 18a. The water tank 72 is a tank that is collected by the sprinkling water SW sprayed from the spray nozzle 40A as the drain W, and the internal space thereof is connected to a semiconductor manufacturing apparatus (not shown) through the inlet duct 46. On the other hand, the water tank 74 is directly connected to the heat radiating fluid outlet 20b. This water tank 74 is a tank which is collected as the drain W by the sprinkling water SW sprayed from the spray nozzle 40B, and its internal space is connected to the exhaust fan 42.

在此，本實施形態的排氣處理裝置11B是朝著噴灑嘴40B供應新水，將回收於水槽74的排水W以泵76汲取供應至噴灑嘴40A。但是，供應各噴灑嘴40的水不限於該等的樣態，例如，所有也可都使用新水，所有的也可汲 取回收於水槽72及/或水槽74的排水W來使用。 Here, the exhaust gas treatment device 11B of the present embodiment supplies fresh water to the spray nozzle 40B, and the drain water W recovered in the water tank 74 is pumped to the spray nozzle 40A by the pump 76. However, the water supplied to each of the spray nozzles 40 is not limited to such a state, for example, all of them may also use new water, and all of them may also be used. The drain W recovered in the water tank 72 and/or the water tank 74 is used.

根據如以上所構成的排氣除害裝置11B，由於可省略反應塔32前後的入口刮板34及出口刮板36，可以使排氣處理裝置11B小巧化。 According to the exhaust gas decontamination apparatus 11B configured as described above, since the inlet squeegee 34 and the outlet squeegee 36 in the front and rear of the reaction tower 32 can be omitted, the exhaust gas treatment device 11B can be made compact.

又，與上述第1實施形態同樣，該第2實施形態的排氣處理裝置11B也具備熱交換器10，所以可進行大容量排氣之有效熱分解(除害)處理。具體為使用輸出10kW的電熱加熱器作為加熱手段30，將風量400L/分鐘的排氣加熱至850℃，在進行排氣中的NF3可除害99.5%以上的排氣處理裝置中，運用角管狀的主體外殼16的高度為1000mm、外管12的水平剖面形狀為1邊400mm的矩形、內管14的水平剖面形狀為1邊200mm的矩形、將受熱流體通流路18及散熱流體通流路20呈螺旋狀分別10旋轉旋繞而形成於1000mm高度的主體外殼16之本發明的熱交換器10的場合，可將加熱手段30的電熱加熱器的負載降低75%左右。又，其結果，不僅將電熱加熱器的負載降低75%左右，同時作為散熱流體使用之後，也意味著將排出大氣中的排氣E的冷卻負載降低75%左右。如上述使用本發明的熱交換器10，可有效且經濟地進行排氣的熱分解處理。 In addition, since the exhaust gas treatment device 11B of the second embodiment also includes the heat exchanger 10, it is possible to perform effective thermal decomposition (detoxification) treatment of large-capacity exhaust gas. Specifically, an electric heater that outputs 10 kW is used as the heating means 30, and the exhaust gas having an air volume of 400 L/min is heated to 850 ° C, and an exhaust gas treatment device that can remove 99.5% or more of NF 3 in the exhaust gas is used. The tubular main body casing 16 has a height of 1000 mm, the horizontal cross-sectional shape of the outer pipe 12 is a rectangle of one side of 400 mm, and the horizontal cross-sectional shape of the inner pipe 14 is a rectangle of one side of 200 mm, and the heated fluid passage path 18 and the heat radiating fluid are passed therethrough. When the road 20 is spirally wound and wound around 10, and the heat exchanger 10 of the present invention is formed in the main body casing 16 having a height of 1000 mm, the load of the electric heater of the heating means 30 can be reduced by about 75%. Further, as a result, not only the load of the electrothermal heater is reduced by about 75%, but also the use as a heat dissipating fluid means that the cooling load of the exhaust gas E discharged from the atmosphere is reduced by about 75%. By using the heat exchanger 10 of the present invention as described above, the thermal decomposition treatment of the exhaust gas can be performed efficiently and economically.

再者，上述的第2實施形態，可變更如下。 Furthermore, the second embodiment described above can be modified as follows.

上述的排氣處理裝置11B雖表示在受熱流體通流路18內及散熱流體通流路20內的雙方設置噴灑嘴40的場合，但也可根據處理的排氣E的種類在該等的其中任一方 設置噴灑嘴40。 The exhaust gas treatment device 11B described above is a case where the spray nozzles 40 are provided in both the heat-receiving fluid passage 18 and the heat-dissipating fluid passage 20, but they may be in accordance with the type of the exhaust gas E to be processed. Either side A spray nozzle 40 is provided.

又，上述第1及第2實施形態中，雖針對熱交換器10運用於從半導體製造裝置的排氣E除害用的排氣除害裝置11A及11B的形態已作說明，但該熱交換器10的用途不僅限於此，只要是尋求多量含有粉塵等的流體間之熱交換的裝置則可運用其他任何的裝置。 Further, in the above-described first and second embodiments, the heat exchanger 10 has been described as being applied to the exhaust gas detoxification devices 11A and 11B for detoxification of the exhaust gas E in the semiconductor manufacturing apparatus, but the heat exchange is performed. The use of the device 10 is not limited thereto, and any other device may be used as long as it is a device that seeks a large amount of heat exchange between fluids containing dust or the like.

接著，針對與上述第1及第2實施形態的熱交換器10不同之如第4圖表示實施形態的熱交換器10說明。 Next, a description will be given of a heat exchanger 10 according to an embodiment, as shown in Fig. 4, which is different from the heat exchangers 10 of the first and second embodiments.

該實施形態的熱交換器10與第1及第2實施形態的熱交換器10之間不同的點是在本實施形態的熱交換器10設有淨化用氣體供應手段50的點。並且，除此之外的部份是與上述各實施形態相同，因此針對相同的構成賦予和第1及第2實施形態相同的符號，並援用上述第1及第2實施形態的說明來取代本實施形態的說明。 The difference between the heat exchanger 10 of the first embodiment and the heat exchanger 10 of the first and second embodiments is that the heat exchanger 10 of the present embodiment is provided with the purification gas supply means 50. In addition, the other portions are the same as those of the above-described respective embodiments. Therefore, the same reference numerals are given to the same configurations as those of the first and second embodiments, and the descriptions of the first and second embodiments are used instead of the above. Description of the embodiment.

淨化用氣體供應手段50是在排氣E的熱分解等時副生成朝堆積在熱交換器10內的粉塵等粒子，噴射惰性氮氣等所成的淨化用氣體，將該等粒子朝向該熱交換器10的下方沖洗排出於外部的沖洗裝置，在熱交換器10內具有朝向其下方噴射淨化用氣體的噴嘴50a。在該噴嘴50a連結淨化用氣體供應管50b的下游端。並且，上述淨化用氣體供應管50b的上游端是與未圖示的淨化用氣體貯存槽等的淨化用氣體供應源連接，並在該淨化用氣體供應管50b安裝有控制從噴嘴50a噴射之淨化用氣體的量與噴 嘴50a的動作時間、時機等的控制裝置(未圖示)。 The purification gas supply means 50 generates particles such as dust deposited in the heat exchanger 10 when the exhaust gas E is thermally decomposed or the like, and ejects a purge gas such as inert nitrogen gas, and directs the particles toward the heat exchange. The lower portion of the device 10 is flushed and discharged to the external flushing device, and the heat exchanger 10 has a nozzle 50a for injecting a purifying gas downward. The nozzle 50a is connected to the downstream end of the purification gas supply pipe 50b. Further, the upstream end of the purification gas supply pipe 50b is connected to a purification gas supply source such as a purge gas storage tank (not shown), and the purification gas supply pipe 50b is mounted with a purge for controlling injection from the nozzle 50a. The amount of gas used and spray A control device (not shown) such as the operation time and timing of the nozzle 50a.

在此，第4圖表示的熱交換器10中，設主體外殼16的外管12及內管14的形狀為角管狀，在形成於主體外殼16內部的散熱流體通流路20的各角隅部份安裝噴嘴50a，並以上述控制裝置控制從安裝於主體外殼16之上部(上段)的噴嘴50a至安裝於下部(下段)的噴嘴50a的各噴嘴50a例如以每三秒依序地噴射淨化用氣體。藉此，無需停止熱交換器10的運轉而在運轉的狀態下，將堆積在散熱流體通流路20內的粉塵等的粒子，有效地朝向外部沖洗，其結果，可長時間抑制差壓的上升，並可以使熱交換效率經常在極大化的狀態使用熱交換器10。 Here, in the heat exchanger 10 shown in Fig. 4, the outer tube 12 and the inner tube 14 of the main body casing 16 are formed in an angular tubular shape, and the corners of the heat-dissipating fluid passage 20 formed in the main body casing 16 are formed. The nozzle 50a is partially mounted, and the nozzle 50a attached from the nozzle 50a attached to the upper portion (upper section) of the main body casing 16 to the nozzle 50a attached to the lower portion (lower section) is controlled by the above-described control device, for example, in three thirds. Use gas. With this configuration, particles such as dust deposited in the heat-dissipating fluid passage 20 are efficiently flushed toward the outside without stopping the operation of the heat exchanger 10, and as a result, the differential pressure can be suppressed for a long period of time. The heat exchanger 10 is used in a state where the heat exchange efficiency is often maximized.

再者，上述實施形態雖表示主體外殼16的形狀為角管狀，在散熱流體通流路20的各角隅部份安裝噴嘴50a的場合，但也可以是主體外殼16的形狀為圓筒狀，並在散熱流體通流路20的上部跨其下部隔著預定的間隔安裝噴嘴50a。 Further, in the above embodiment, the main body casing 16 has an angular tubular shape, and the nozzle 50a is attached to each corner portion of the heat radiating fluid passage 20, but the main casing 16 may have a cylindrical shape. The nozzle 50a is attached to the lower portion of the heat radiating fluid passage 20 at a predetermined interval therebetween.

又，上述實施形態雖表示在散熱流體通流路20安裝複數個噴嘴50a的場合，但該噴嘴50a的安裝個數不受限於此，例如也可以在散熱流體通流路20的上部安裝一個噴嘴50a。 Further, in the above embodiment, the plurality of nozzles 50a are attached to the heat radiating fluid passage 20, but the number of the nozzles 50a to be mounted is not limited thereto. For example, one of the upper portions of the heat radiating fluid passage 20 may be attached. Nozzle 50a.

另外，上述實施形態雖表示將淨化用氣體供應手段50僅安裝在散熱流體通流路20的場合，但此淨化用氣體供應手段50不僅是散熱流體通流路20，也可根據需要而安裝在受熱流體通流路18。 Further, in the above embodiment, the cleaning gas supply means 50 is attached only to the heat dissipation fluid passage 20, but the purification gas supply means 50 is not only the heat dissipation fluid passage 20 but may be attached as needed. The heated fluid flows through the flow path 18.

10‧‧‧熱交換器 10‧‧‧ heat exchanger

11A‧‧‧排氣處理裝置 11A‧‧‧Exhaust treatment device

16‧‧‧主體外殼 16‧‧‧ body shell

18‧‧‧受熱流體通流路 18‧‧‧heated fluid flow path

18a‧‧‧受熱流體入口 18a‧‧‧ heated fluid inlet

18b‧‧‧受熱流體出口 18b‧‧‧heated fluid outlet

20‧‧‧散熱流體通流路 20‧‧‧Solid fluid flow path

20a‧‧‧散熱流體入口 20a‧‧‧heating fluid inlet

20b‧‧‧散熱流體出口 20b‧‧‧Dissipating fluid outlet

22‧‧‧傳熱板 22‧‧‧heat transfer plate

24‧‧‧上部箱 24‧‧‧Upper box

26‧‧‧引導構件 26‧‧‧Guiding components

26a‧‧‧(引導構件的)頂部 26a‧‧‧ (leading member) top

26b、26c‧‧‧(引導構件的)傾斜面 26b, 26c‧‧‧ (guide member) inclined surface

28‧‧‧噴灑嘴 28‧‧‧ spray nozzle

30‧‧‧加熱手段 30‧‧‧heating means

32‧‧‧反應塔 32‧‧‧Reaction tower

34‧‧‧入口刮板 34‧‧‧Ink scraper

34a‧‧‧刮板主體 34a‧‧‧Scraper body

34b‧‧‧噴灑嘴 34b‧‧‧ spray nozzle

34c‧‧‧符號 34c‧‧ symbol

36‧‧‧出口刮板 36‧‧‧Export scraper

36a‧‧‧刮板主體 36a‧‧‧Scraper body

36b‧‧‧噴灑嘴 36b‧‧‧ spray nozzle

36c‧‧‧填充材 36c‧‧‧Filling materials

42‧‧‧排氣風扇 42‧‧‧Exhaust fan

44‧‧‧水槽 44‧‧‧Sink

44a‧‧‧灑水回收槽 44a‧‧‧Sprinkle recovery tank

44b‧‧‧排水回收槽 44b‧‧‧Drainage recovery tank

46‧‧‧入口導管 46‧‧‧Inlet catheter

48‧‧‧水洗氣體供應配管 48‧‧‧Washing gas supply piping

50‧‧‧淨化用氣體供應手段 50‧‧‧Gas supply means for purification

50a‧‧‧水槽側端部 50a‧‧‧Side side end of the sink

52‧‧‧配管 52‧‧‧Pipe

54‧‧‧泵 54‧‧‧ pump

56‧‧‧分解氣體送給配管 56‧‧‧Decomposition gas to piping

60‧‧‧配管 60‧‧‧Pipe

62‧‧‧泵 62‧‧‧ pump

64‧‧‧符號 64‧‧‧ symbol

66‧‧‧間隔構件 66‧‧‧ spacer components

68‧‧‧開口 68‧‧‧ openings

70‧‧‧排水管 70‧‧‧Drainage pipe

CW‧‧‧洗淨水 CW‧‧·washing water

PW‧‧‧洗淨水 PW‧‧·washing water

SW‧‧‧灑水 SW‧‧ sprinkles

E‧‧‧排氣 E‧‧‧Exhaust

Claims (4)

一種熱交換器，其特徵為：由雙重管構造的主體外殼(16)及傳熱板(22)所構成，上述主體外殼(16)，係以外管(12)及內管(14)所成，豎立設置使該等的軸朝向上下方向，及上述傳熱板(22)，係將形成在上述外管(12)與上述內管(14)之間的內部空間，跨上述主體外殼(16)的軸向整體形成螺旋狀，並區隔成在上述主體外殼(16)的軸向彼此鄰接的受熱流體通流路(18)及散熱流體通流路(20)，上述主體外殼(16)的下端部開設有連接於上述受熱流體通流路(18)的受熱流體入口(18a)和連接於上述散熱流體通流路(20)的散熱流體出口(20b)，並在上述主體外殼(16)的上端部開設有連接於上述受熱流體通流路(18)的受熱流體出口(18b)和連接於上述散熱流體通流路(20)的散熱流體入口(20a)，此外，在上述主體外殼(16)的上部，安裝區隔上述受熱流體出口(18b)與上述散熱流體入口(20a)連通的空間的上部箱(24)，並且在上述主體外殼(16)的上端面，裝設有以頂部(26a)共同的傾斜面(26b)(26c)連結上述受熱流體出口(18b)與上述散熱流體入口(20a)，並將賦予上述頂部(26a)的流體朝著上述受熱流體出口(18b)及上述散熱流體入口(20a)引導的引導構件(26)。 A heat exchanger comprising a main body casing (16) and a heat transfer plate (22) of a double pipe structure, wherein the main body casing (16) is formed by an outer pipe (12) and an inner pipe (14). And erected such that the shafts are oriented in the up and down direction, and the heat transfer plate (22) is formed in an inner space between the outer tube (12) and the inner tube (14), across the main body casing (16) The axial direction is integrally formed in a spiral shape, and is partitioned into a heated fluid passage (18) and a heat dissipation fluid passage (20) adjacent to each other in the axial direction of the main body casing (16), and the main body casing (16) The lower end portion is provided with a heated fluid inlet (18a) connected to the heated fluid passage (18) and a heat-dissipating fluid outlet (20b) connected to the heat-dissipating fluid passage (20), and is in the main body casing (16). The upper end portion is provided with a heated fluid outlet (18b) connected to the heated fluid passage (18) and a heat-dissipating fluid inlet (20a) connected to the heat-dissipating fluid passage (20), and further, in the main body casing The upper part of (16), the upper case of the space in which the above-mentioned heated fluid outlet (18b) communicates with the above-mentioned heat-dissipating fluid inlet (20a) (24), and the upper end surface of the main body casing (16) is provided with an inclined surface (26b) (26c) common to the top portion (26a) to connect the heated fluid outlet (18b) and the heat dissipation fluid inlet (20a) And a guiding member (26) that directs the fluid of the top portion (26a) toward the heated fluid outlet (18b) and the heat dissipation fluid inlet (20a). 如申請專利範圍第1項記載的熱交換器，其中， 在上述受熱流體通流路(18)及上述散熱流體通流路(20)之中，至少上述散熱流體通流路(20)內，設置朝向其內部空間的下方噴射淨化用氣體的淨化用氣體供應手段(50)。 The heat exchanger according to claim 1, wherein In the heat-receiving fluid passage (18) and the heat-dissipating fluid passage (20), at least the heat-dissipating fluid passage (20) is provided with a purifying gas for injecting a purifying gas toward a lower portion of the internal space. Supply means (50). 一種排氣處理裝置，其特徵為，具備：反應塔(32)，具備申請專利範圍第1項或第2項的熱交換器(10)，及將流通其熱交換器(10)的受熱流體通流路(18)而來之處理對象的排氣(E)加熱的加熱手段(30)，及液洗導入於上述反應塔(32)之處理對象的排氣(E)的濕式的入口刮板(34)或液洗在上述反應塔(32)熱分解處理後之排氣(E)的濕式的出口刮板(36)的至少其中一方。 An exhaust gas treatment device comprising: a reaction tower (32) having a heat exchanger (10) according to claim 1 or 2, and a heated fluid through which the heat exchanger (10) is to be circulated The heating means (30) for heating the exhaust gas (E) to be treated by the flow path (18), and the wet inlet of the exhaust gas (E) to be treated by the reaction tower (32) The squeegee (34) or at least one of the wet outlet squeegees (36) of the exhaust gas (E) after the thermal decomposition treatment of the reaction tower (32) is liquid-washed. 一種排氣處理裝置，具備以申請專利範圍第1項或第2項的熱交換器(10)，及將流通其熱交換器(10)的受熱流體通流路(18)而來之處理對象的排氣(E)加熱的加熱手段(30)構成的反應塔(32)，其特徵為：在上述熱交換器(10)之上述受熱流體入口(18a)附近的受熱流體通流路(18)內或上述散熱流體出口(20b)附近之散熱流體通流路(20)內的至少其中一方，設有液洗排氣(E)的一或複數個噴灑嘴(40)。 An exhaust gas treatment device comprising a heat exchanger (10) according to the first or second aspect of the patent application, and a heat-treating fluid passage (18) through which the heat exchanger (10) flows a reaction tower (32) comprising a heating means (30) for heating (E), characterized by: a heated fluid passage (18) near the heated fluid inlet (18a) of the heat exchanger (10) At least one of the heat-dissipating fluid passages (20) in the vicinity of or above the heat-dissipating fluid outlet (20b) is provided with one or a plurality of spray nozzles (40) for the liquid-washing exhaust (E).
TW104116830A 2014-05-26 2015-05-26 Heat exchanger and exhaust gas treatment device using the same TW201616078A (en)

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