TW201533457A - Inspecting device of single-layer object under inspection and inspecting method thereof - Google Patents

Inspecting device of single-layer object under inspection and inspecting method thereof Download PDF

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TW201533457A
TW201533457A TW104105084A TW104105084A TW201533457A TW 201533457 A TW201533457 A TW 201533457A TW 104105084 A TW104105084 A TW 104105084A TW 104105084 A TW104105084 A TW 104105084A TW 201533457 A TW201533457 A TW 201533457A
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conductors
electrodes
inspection
electrode
sensor panel
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TWI681199B (en
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Tadashi Takahashi
Ting-Chih Lin
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Nidec Read Corp
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/26Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
    • G01R27/2605Measuring capacitance
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
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  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
  • Testing Electric Properties And Detecting Electric Faults (AREA)
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  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

This invention provides a construction that suppresses the increase of inspecting circuits and facilitates efficient inspection for an inspecting device that inspects a single-layer object under inspection. A sensor panel (50) used as an object under inspection of a sensor panel inspecting device (1) consists of a plurality of first electrodes (51) and a plurality of second electrodes (52), which are disposed at the same layer along a thickness direction. The first electrodes (51) are arranged in lines. Each first electrode (51) has a thin and long ruler portion (3) along a direction perpendicular to an arrangement direction of the first electrodes (51). The second electrodes (52) are arranged in array along the arrangement direction of the first electrodes (51) and along the direction of the ruler portion (3). The sensor panel inspecting device (1) includes a line mixing portion (39) and a current inspecting portion (41). During inspection, the line mixing portion (39) synthesizes the output signals of each corresponding second electrode among the second electrodes (52) arranged at the arrangement direction of the first electrodes (51). The current inspecting portion (41) inspects the output of the line mixing portion (39).

Description

單層型檢查對象物的檢查裝置及檢查方法Inspection device and inspection method for single-layer type inspection object

本發明主要有關於被稱為單層型的面板狀的檢查對象物的檢查裝置。The present invention mainly relates to an inspection apparatus called a single-layer type panel-shaped inspection object.

一直以來,作為檢測觸碰位置的觸碰面板裝置的一種,已知有所謂的靜電電容方式的觸碰面板裝置。靜電電容式觸碰面板裝置的感測器面板例如具有在由玻璃等形成的透明的基板上設有第一圖案透明導電層和第二圖案透明導電層的結構。該圖案透明導電層例如可以藉由使用酸化銦錫(Indium Tin Oxide,ITO)進行成膜而形成。Conventionally, as one type of touch panel device for detecting a touch position, a so-called capacitive touch panel device has been known. The sensor panel of the capacitive touch panel device has, for example, a structure in which a first pattern transparent conductive layer and a second pattern transparent conductive layer are provided on a transparent substrate formed of glass or the like. The patterned transparent conductive layer can be formed, for example, by forming a film using Indium Tin Oxide (ITO).

該圖案透明導電層分別作為電極發揮功能。應予說明,以下有時將第一圖案透明導電層和第二圖案透明導電層稱為第一電極和第二電極。The patterned transparent conductive layers each function as an electrode. Incidentally, the first pattern transparent conductive layer and the second pattern transparent conductive layer are sometimes referred to as a first electrode and a second electrode.

靜電電容方式的觸碰面板的構成有多種,但作為眾所周知的構成,可舉出如下的觸碰面板的構成,即,以直線狀排列佈置M個第一電極,在與其垂直的方向排列佈置N個第二電極,使第一電極與第二電極隔著感測器面板的厚度方向的間隙而對置,且相互垂直交叉。應予說明,在本說明書中,有時將該結構的觸碰面板稱為“層疊型”的觸碰面板。There are various configurations of the capacitive touch panel. However, as a well-known configuration, a touch panel is provided in which M first electrodes are arranged in a line, and N is arranged in a direction perpendicular thereto. The second electrodes are such that the first electrode and the second electrode face each other across a gap in the thickness direction of the sensor panel and vertically intersect each other. In addition, in this specification, the touch panel of this structure may be called the "stack type" touch panel.

在層疊型的觸碰面板中,在第一電極與第二電極的交叉部分形成一種電容器,該電容器的靜電電容藉由接近或接觸導電性物體(例如人體)而變化。對於觸碰面板裝置而言,藉由檢測該靜電電容的變化,從而能夠檢測觸碰到感測器面板的位置。該方式被稱為所謂的投影型靜電電容方式,優點在於能夠高精度地檢測觸碰位置。In the laminated touch panel, a capacitor is formed at an intersection of the first electrode and the second electrode, and the electrostatic capacitance of the capacitor is changed by approaching or contacting a conductive object such as a human body. With the touch panel device, by detecting the change in the electrostatic capacitance, it is possible to detect the position at which the sensor panel is touched. This method is called a so-called projection type electrostatic capacitance method, and has an advantage in that the touch position can be detected with high precision.

對於觸碰面板裝置的製造商而言,為了避免不合格品的混入而確保產品質量,進行感測器面板的檢查是極其重要的。因此,提出了用於檢查上述靜電電容式的觸碰面板的裝置(例如,參照專利文獻1)。For manufacturers of touch panel devices, it is extremely important to perform inspection of the sensor panel in order to avoid product quality by ensuring the incorporation of non-conforming products. Therefore, an apparatus for inspecting the electrostatic capacitance type touch panel has been proposed (for example, refer to Patent Document 1).

專利文獻1公開了層疊型的靜電電容式觸碰面板的檢查裝置。在該專利文獻1的檢查裝置中,藉由靜電電容檢測電路來監視作為檢查對象的被測定電極與同該被測定電極對置的對置電極中的特定對置電極之間的靜電電容的兩端間的電壓,基於該監視結果判定被測定電極的狀態。專利文獻1中,根據該裝置,藉由測定由被測定電極和對置電極作為一種電容器發揮作用而產生的靜電電容的微小變化,從而能夠在不使觸碰面板的感測器面與檢查裝置直接接觸的情況下判定靜電電容式觸碰面板中的被測定電極的狀態(例如斷開或短路)。Patent Document 1 discloses an inspection device for a laminated capacitive touch panel. In the inspection apparatus of Patent Document 1, the electrostatic capacitance detecting circuit monitors two electrostatic capacitances between the electrode to be inspected and the specific counter electrode in the counter electrode opposed to the electrode to be inspected. The voltage between the terminals determines the state of the electrode to be measured based on the monitoring result. According to the device 1, in the apparatus, by measuring a small change in the electrostatic capacitance generated by the action of the electrode to be measured and the counter electrode as a type of capacitor, the sensor surface of the touch panel and the inspection device can be prevented. In the case of direct contact, the state (for example, open or short) of the electrode to be measured in the capacitive touch panel is determined.

習知技術文獻Conventional technical literature

專利文獻Patent literature

專利文獻1:國際公開第2011/121862號小冊子Patent Document 1: International Publication No. 2011/121862

技術問題technical problem

如以上所說明,在靜電電容式觸碰面板中,以使相互垂直交叉的電極隔著感測器面板的厚度方向的間隙對置的方式進行配置的構成已經成為主流。然而,在該層疊型的構成中,難以在厚度方向進行壓縮,因此應對近年來智能手機或平板電腦等的越來越薄板化、輕量化的要求存在侷限性。As described above, in the capacitive touch panel, a configuration in which electrodes perpendicularly intersecting each other are disposed to face each other across the gap in the thickness direction of the sensor panel has become mainstream. However, in this laminated type configuration, it is difficult to compress in the thickness direction. Therefore, there has been a limitation in the demand for thinner and lighter weight of smartphones, tablet computers, and the like in recent years.

因此,提出了在一個層中配置全部電極(圖案透明導電層)的所謂單層型的觸碰面板。以下,參照第1圖說明該單層型的觸碰面板的例子。Therefore, a so-called single-layer type touch panel in which all the electrodes (pattern transparent conductive layers) are disposed in one layer has been proposed. Hereinafter, an example of the single-layer type touch panel will be described with reference to Fig. 1 .

在第1圖所示的觸碰面板裝置的感測器面板50中,以直線狀(在第1圖中為橫向)排列佈置有複數個(M個)第一電極51。各第一電極51在與該第一電極51排列的方向垂直的方向(第1圖的縱向)具有細長的長尺狀部3。另外,在該感測器面板50中,複數個第二電極52在第一電極51排列的方向和沿著上述長尺狀部3的方向排列佈置成矩陣狀(M×N個)。In the sensor panel 50 of the touch panel device shown in Fig. 1, a plurality of (M) first electrodes 51 are arranged in a line (in the horizontal direction in Fig. 1). Each of the first electrodes 51 has an elongated long-length portion 3 in a direction perpendicular to the direction in which the first electrodes 51 are arranged (the longitudinal direction of FIG. 1). Further, in the sensor panel 50, a plurality of second electrodes 52 are arranged in a matrix (M×N) in a direction in which the first electrodes 51 are arranged and in a direction along the long-length portions 3.

各第二電極52具備在與第一電極51排列的方向垂直的方向以對應的方式配置的一對(兩個)導電部4。因此,該感測器面板50可以在橫向排列M個、在縱向排列2×N個導電部4。各導電部4構成為矩形狀。Each of the second electrodes 52 includes a pair of (two) conductive portions 4 that are disposed in a corresponding manner in a direction perpendicular to the direction in which the first electrodes 51 are arranged. Therefore, the sensor panel 50 can be arranged in the lateral direction and arranged in the longitudinal direction by 2×N conductive portions 4. Each of the conductive portions 4 is formed in a rectangular shape.

在第一電極51形成有從長尺狀部3的寬度方向一側垂直突出的複數個突出部5,這些突出部5隔開所排列的2×N個導電部4之間。其結果,第一電極51構成為具有複數個凹部的、整體上像梳狀那樣的形狀,成為在一個一個凹部的內側配置導電部4的佈局。各第二電極52具備引出部6,該引出部6將屬於同一第二電極52的上述兩個導電部4此相互電連接,並且在與第一電極51排列的方向垂直的方向(沿著長尺狀部3的方向,縱向),朝向感測器面板50的邊緣部引出。The first electrode 51 is formed with a plurality of protruding portions 5 that vertically protrude from one side in the width direction of the long-length portion 3, and these protruding portions 5 are spaced apart from each other by the 2 × N conductive portions 4 arranged. As a result, the first electrode 51 has a shape in which a plurality of concave portions are formed in a comb shape as a whole, and the conductive portion 4 is disposed inside the one concave portion. Each of the second electrodes 52 is provided with a lead portion 6 that electrically connects the two conductive portions 4 belonging to the same second electrode 52 to each other in a direction perpendicular to the direction in which the first electrodes 51 are arranged (along the length) The direction of the ruler 3, longitudinal direction, is drawn toward the edge of the sensor panel 50.

根據該構成,在第一電極51與第二電極52接近的部分形成一種電容器,該電容器的靜電電容藉由接近或接觸導電性物體(例如人體)而變化。由此,能夠檢測觸碰位置。According to this configuration, a capacitor is formed in a portion where the first electrode 51 and the second electrode 52 are close, and the capacitance of the capacitor changes by approaching or contacting a conductive object (for example, a human body). Thereby, the touch position can be detected.

在複數個第一電極51分別單獨連接有第一引板配線部。各第一引板配線部7與第一電極51所具有的長尺狀部3的一端連接。另外,在複數個第二電極52分別單獨連接有第二引板配線部8。各第二引板配線部8與第二電極52所具有的引出部6的一端連接。A first lead plate wiring portion is separately connected to each of the plurality of first electrodes 51. Each of the first tab wiring portions 7 is connected to one end of the long-length portion 3 of the first electrode 51. Further, the second lead plate wiring portion 8 is separately connected to each of the plurality of second electrodes 52. Each of the second lead-plate wiring portions 8 is connected to one end of the lead-out portion 6 of the second electrode 52.

由於第1圖所示的感測器面板50不存在第一電極51與第二電極52交叉的部分,所以能夠將兩個電極物理地配置於單一的層,能夠實現觸碰設備的薄板化、構成的簡化。Since the sensor panel 50 shown in FIG. 1 does not have a portion where the first electrode 51 and the second electrode 52 intersect, the two electrodes can be physically disposed in a single layer, and the touch device can be thinned. The simplification of the composition.

然而,對於這樣的單層型的觸碰面板而言,上述的檢查的重要性沒有與其它觸碰面板存在不同之處。因此,考慮使用上述的專利文獻1的檢查裝置來檢查第1圖所示的感測器面板50。However, for such a single-layer type touch panel, the importance of the above-described inspection is not different from other touch panels. Therefore, it is considered to inspect the sensor panel 50 shown in Fig. 1 by using the inspection apparatus of Patent Document 1 described above.

然而,單層型的觸碰面板與上述的層疊型的觸碰面板不同,電極的數目大幅增加。具體而言,形成M×N的矩陣時,如果是層疊型的觸碰面板,則存在M個第一電極、N個第二電極,但單層型的感測器面板50的情況下,存在M個第一電極、M×N個第二電極。因此,在單層型的觸碰面板中,為了檢查各電極間的靜電電容而需要複數個電路,會導致檢查裝置的構成複雜化、高成本化。另外,檢查花費較長時間,從縮短節拍時間的觀點考慮,也存在改善的餘地。However, the single-layer type touch panel is different from the above-described stacked type touch panel, and the number of electrodes is greatly increased. Specifically, when a matrix of M×N is formed, if there are laminated touch panels, there are M first electrodes and N second electrodes, but in the case of the single-layer type sensor panel 50, there is M first electrodes, M x N second electrodes. Therefore, in the single-layer type touch panel, in order to check the electrostatic capacitance between the electrodes, a plurality of circuits are required, which complicates the configuration of the inspection apparatus and increases the cost. In addition, the inspection takes a long time, and there is room for improvement from the viewpoint of shortening the tact time.

本發明是鑒於以上情況而完成的,其目的在於提供在檢查單層型的檢查對象物的檢查裝置中能夠抑制檢查電路的增加、高效地進行檢查的構成。The present invention has been made in view of the above circumstances, and an object of the invention is to provide an inspection apparatus capable of suppressing an increase in an inspection circuit and performing an inspection efficiently in an inspection apparatus for inspecting a single-layer type inspection object.

技術手段Technical means

技術問題如上,接下來說明技術手段和有益效果。The technical problems are as above, and the technical means and beneficial effects are explained next.

根據本發明的第一觀點,提供以下構成的檢查裝置。即,該檢查裝置檢查將複數個第一導電體和複數個第二導電體在厚度方向配置在同一層的、如下構成的面板狀的檢查對象物。上述第一導電體並列配置成直線狀。各上述第一導電體在與該第一導電體排列的方向垂直的方向具有細長的長尺狀部。上述第二導電體在上述第一導電體排列的方向和沿著上述長尺狀部的方向排列佈置成矩陣狀。並且,該檢查裝置具備或部和檢測部。上述或部在檢查時對上述第二導電體中在上述第一導電體排列的方向上對應的各第二導電體的訊號輸出進行合成。上述檢測部檢測上述或部的輸出。According to a first aspect of the present invention, an inspection apparatus having the following configuration is provided. In other words, the inspection apparatus inspects a panel-shaped inspection object having the following configuration in which a plurality of first conductors and a plurality of second conductors are disposed in the same layer in the thickness direction. The first conductors are arranged in parallel in a straight line. Each of the first electrical conductors has an elongated long-length portion in a direction perpendicular to a direction in which the first electrical conductors are arranged. The second conductors are arranged in a matrix in a direction in which the first conductors are arranged and in a direction along the long-length portions. Further, the inspection device includes a portion and a detecting portion. The above or part combines the signal outputs of the respective second conductors corresponding to the direction in which the first conductors are arranged in the second conductor during the inspection. The detecting unit detects the output of the or part.

即,在如上構成的單層型的檢查對象物中,從圖案上的特徵可以認為第二導電體中在第一導電體的排列方向上對應的第二導電體彼此不相互短路。因此,即使在電極的數目達到複數個的單層型的檢查中,藉由像本發明那樣在合成訊號輸出之後進行檢查,從而以少的檢查電路就能夠進行充分的檢查。其結果,能夠實現檢查裝置的顯著的簡化、低成本化,並且能夠提高檢查效率。In other words, in the single-layer type inspection object configured as described above, it is considered that the second conductors corresponding to the arrangement direction of the first conductors in the second conductor are not short-circuited with each other from the features on the pattern. Therefore, even in the case where the number of electrodes reaches a plurality of single-layer type inspections, by performing inspection after the synthesis signal output as in the present invention, it is possible to perform sufficient inspection with a small number of inspection circuits. As a result, significant simplification and cost reduction of the inspection apparatus can be achieved, and inspection efficiency can be improved.

在上述的檢查裝置中,較佳為以下構成。即,該檢查裝置具備複數個第一配線體和複數個第二配線體。上述第一配線體能夠與上述第一導電體的每一個電連接。上述第二配線體能夠與上述第二導電體的每一個電連接。在對矩陣狀的上述第二導電體進行分組,以使在上述第一導電體排列的方向上對應的每一個第二導電體為一組時,上述或部是將連接到屬於同一個上述組的各上述第二導電體的上述第二配線體進行線或連接的線或部。In the above inspection apparatus, the following configuration is preferable. That is, the inspection apparatus includes a plurality of first wiring bodies and a plurality of second wiring bodies. The first wiring body can be electrically connected to each of the first electrical conductors. The second wiring body can be electrically connected to each of the second electrical conductors. When the second electric conductors in a matrix form are grouped such that each of the second electric conductors corresponding to the direction in which the first electric conductors are arranged is a group, the orbits are connected to belong to the same group The second wiring body of each of the second conductors is a line or a portion of a line or a connection.

由此,能夠簡單且合理地進行屬於同一組的第二導電體的訊號輸出的合成。Thereby, the synthesis of the signal output of the second conductor belonging to the same group can be performed simply and reasonably.

在上述的檢查裝置中,較佳為以下構成。即,該檢查裝置具備複數個感測器部和測定部。上述感測器部在與上述第一導電體排列的方向垂直的方向排列。上述測定部檢測上述感測器部的輸出。各上述感測器部以能夠與複數個上述第二導電體電容耦合的方式在上述第一導電體排列的方向細長地形成。In the above inspection apparatus, the following configuration is preferable. That is, the inspection apparatus includes a plurality of sensor sections and a measuring section. The sensor portions are arranged in a direction perpendicular to a direction in which the first conductors are arranged. The measuring unit detects an output of the sensor unit. Each of the sensor portions is formed to be elongated in a direction in which the first conductors are arranged so as to be capacitively coupled to the plurality of second conductors.

由此,不僅能夠檢查檢查對象物的電極圖案的合不合格,還能夠基於感測器部的訊號輸出而容易確定圖案不合格處。另外,由於感測器部構成為細長的形狀,以能夠與配置成矩陣狀的複數個第二導電體電容耦合,所以能夠用簡單構成的感測器部充分進行不合格處的確定。Thereby, not only the failure of the electrode pattern of the inspection object can be checked, but also the pattern failure can be easily determined based on the signal output of the sensor unit. Further, since the sensor portion is formed in an elongated shape and can be capacitively coupled to a plurality of second conductors arranged in a matrix, it is possible to sufficiently determine the defective portion with the sensor portion which is simply configured.

在上述的檢查裝置中,較佳為以下構成。即,在上述檢查對象物中,各上述第二導電體具備在與上述第一導電體排列的方向垂直的方向上以對應的方式成對配置的導電部。上述感測器部以與上述導電部的成對的一方和另一方分別對應的方式設置。In the above inspection apparatus, the following configuration is preferable. In other words, in the inspection object, each of the second conductors includes a conductive portion that is disposed in pairs in a direction perpendicular to a direction in which the first conductors are arranged. The sensor portion is provided to correspond to one of the pair of the conductive portions and the other of the conductive portions.

由此,能夠更詳細地確定圖案不合格處。Thereby, the pattern defective portion can be determined in more detail.

根據本發明的第二觀點,提供以下檢查方法。即,該檢查方法檢查將複數個第一導電體和複數個第二導電體在厚度方向上配置於同一層的、如下構成的面板狀的檢查對象物。上述第一導電體排列佈置成直線狀。各上述第一導電體在與該第一導電體排列的方向垂直的方向上具有細長的長尺狀部。上述第二導電體在上述第一導電體排列的方向和與其垂直的方向排列佈置成矩陣狀。並且,在該檢查方法中,利用或部對上述第二導電體中在上述第一導電體排列的方向上對應的各第二導電體的訊號輸出進行合成之後,檢查合成後的訊號輸出。According to a second aspect of the present invention, the following inspection method is provided. In other words, this inspection method inspects a panel-shaped inspection object having the following configuration in which a plurality of first conductors and a plurality of second conductors are disposed in the same layer in the thickness direction. The first electric conductors are arranged in a line shape. Each of the first electrical conductors has an elongated long-length portion in a direction perpendicular to a direction in which the first electrical conductors are arranged. The second electric conductors are arranged in a matrix in a direction in which the first electric conductors are arranged and a direction perpendicular thereto. Further, in the inspection method, the signal output of each of the second conductors corresponding to the direction in which the first conductors are arranged in the second conductor is combined by the or part, and the combined signal output is checked.

即,在如上所述構成的單層型的檢查對象物中,從圖案上的特徵可以認為,第二導電體中在第一導電體排列的方向對應的第二導電體彼此不相互短路。因此,即使在電極的數目達到複數個的單層型的檢查中,藉由像本發明那樣在合成訊號輸出之後進行檢查,從而以少的檢查電路就能夠進行充分的檢查。其結果,能夠實現檢查裝置的顯著的簡化、低成本化,並且能夠提高檢查效率。In other words, in the single-layer type inspection object configured as described above, it is considered that the second conductors corresponding to the direction in which the first conductors are arranged in the second conductor are not short-circuited to each other. Therefore, even in the case where the number of electrodes reaches a plurality of single-layer type inspections, by performing inspection after the synthesis signal output as in the present invention, it is possible to perform sufficient inspection with a small number of inspection circuits. As a result, significant simplification and cost reduction of the inspection apparatus can be achieved, and inspection efficiency can be improved.

接下來,參照圖式來說明本發明的實施方式。第1圖是示意地表示單層型觸碰面板裝置的感測器面板50上的電極圖案的俯視圖。第2圖是表示本發明的一個實施方式的感測器面板檢查裝置1的整體構成的示意圖。Next, an embodiment of the present invention will be described with reference to the drawings. Fig. 1 is a plan view schematically showing an electrode pattern on the sensor panel 50 of the single-layer type touch panel device. Fig. 2 is a schematic view showing the overall configuration of a sensor panel inspection device 1 according to an embodiment of the present invention.

第2圖所示的第一實施方式的感測器面板檢查裝置1以能夠檢查第1圖所示的感測器面板50的方式構成。第2圖中示出了將第1圖所示的感測器面板50安裝於檢查裝置的狀態。The sensor panel inspection device 1 of the first embodiment shown in FIG. 2 is configured to be able to inspect the sensor panel 50 shown in FIG. 1 . Fig. 2 shows a state in which the sensor panel 50 shown in Fig. 1 is attached to the inspection device.

作為檢查對象物的感測器面板50是觸碰面板裝置的主要構成部件,成為在由玻璃等構成的透明的基板上設置了第一電極(第一導電體)51和第二電極(第二導電體)52的構成。該感測器面板50構成為上述的單層型。The sensor panel 50 as an inspection object is a main component of the touch panel device, and is provided with a first electrode (first conductor) 51 and a second electrode (second) on a transparent substrate made of glass or the like. The structure of the conductor 52. The sensor panel 50 is configured as the single layer type described above.

單層型觸碰面板裝置中的感測器面板50的構成已經參照第1圖進行了說明,因此在此進行簡單說明。第一電極51在第1圖的橫向等間隔地排列而設有M個。第二電極52在第1圖的橫向等間隔地排列而設有M個、在縱向等間隔地排列而設有N個。其結果,由第一電極51、第二電極52構成M×N的矩陣。應予說明,在以後的說明中,有時將第一電極51排列的方向稱為x方向,將與其垂直的方向稱為y方向。The configuration of the sensor panel 50 in the single-layer type touch panel device has been described with reference to Fig. 1, and therefore, a brief description will be given here. The first electrodes 51 are arranged at equal intervals in the lateral direction of the first drawing, and M are provided. The second electrodes 52 are arranged at equal intervals in the lateral direction of the first drawing, M is provided, and N are arranged at equal intervals in the longitudinal direction. As a result, the first electrode 51 and the second electrode 52 constitute a matrix of M × N. In the following description, the direction in which the first electrodes 51 are arranged may be referred to as an x direction, and the direction perpendicular thereto may be referred to as a y direction.

由此,藉由第一電極51和第二電極52中的任一個來覆蓋幾乎所有能夠檢測觸碰位置的區域(以下,有時稱為觸碰區域)。Thereby, almost any area capable of detecting the touch position (hereinafter sometimes referred to as a touch area) is covered by any one of the first electrode 51 and the second electrode 52.

在上述的觸碰區域中,根據配置成矩陣狀的第一電極51與第二電極52的關係設定感測器坐標系。該坐標系可以由上述x方向和y方向的坐標表示。具體而言,將位於第1圖或第2圖中的觸碰區域的左下角的第二電極52的導電部4、4的對應部分設定為(1,1),將位於右上角的對應部分設定為(M,N)。In the above-described touch region, the sensor coordinate system is set in accordance with the relationship between the first electrode 51 and the second electrode 52 arranged in a matrix. This coordinate system can be represented by the above-described coordinates in the x direction and the y direction. Specifically, the corresponding portion of the conductive portions 4, 4 of the second electrode 52 located in the lower left corner of the touch region in FIG. 1 or FIG. 2 is set to (1, 1), and the corresponding portion in the upper right corner will be located. Set to (M, N).

應予說明,在第1圖或第2圖的感測器面板50中,第一電極51和第二電極52在橫向排列的數目為4個(M=4),第二電極52在縱向排列的數目為4個(N=4),但不限於該例,可以進行適當增減。另外,對於第一電極51和第二電極52的形狀也不受上述限定,可以根據情況變更成各種形狀。It should be noted that in the sensor panel 50 of FIG. 1 or FIG. 2, the number of the first electrodes 51 and the second electrodes 52 arranged in the lateral direction is four (M=4), and the second electrodes 52 are arranged in the longitudinal direction. The number is four (N=4), but is not limited to this example, and can be appropriately increased or decreased. Further, the shapes of the first electrode 51 and the second electrode 52 are not limited to the above, and may be changed into various shapes depending on the situation.

第一電極51和第二電極52藉由使用上述的ITO,利用濺射或蒸鍍等公知的方法形成圖案透明導電層而構成。然而,作為電極的材料,不限於使用ITO,例如可以使用酸化銦鋅(Indium Zinc Oxide,IZO)等各種材料。The first electrode 51 and the second electrode 52 are formed by forming a patterned transparent conductive layer by a known method such as sputtering or vapor deposition using the above-described ITO. However, the material of the electrode is not limited to the use of ITO, and various materials such as indium Zinc Oxide (IZO) can be used.

以與第一電極51和第二電極52連接的方式在基板上形成第一引板配線部7和第二引板配線部8。該第一引板配線部7和第二引板配線部8形成在避開上述觸碰區域的位置,以能夠將第一電極51和第二電極52與觸碰面板裝置的驅動器電路(省略圖示)電連接的方式構成。The first lead plate wiring portion 7 and the second lead plate wiring portion 8 are formed on the substrate so as to be connected to the first electrode 51 and the second electrode 52. The first lead plate wiring portion 7 and the second lead plate wiring portion 8 are formed at positions avoiding the touch region so as to be able to connect the first electrode 51 and the second electrode 52 to the driver circuit of the touch panel device (omitted from the drawing) Shows the way of electrical connection.

在本實施方式中,第一引板配線部7和第二引板配線部8藉由使用具有導電性的漿料(具體而言為銀漿),利用絲網印刷而形成。然而,不限於該構成,例如可以使用銅漿代替銀漿,或者可以使用例如噴墨印刷等其它印刷方法代替絲網印刷。另外,藉由在將具有導電性的各種金屬膜蒸鍍後進行選擇性的蝕刻,也能夠形成第一引板配線部7和第二引板配線部8的圖案。In the present embodiment, the first tab wiring portion 7 and the second tab wiring portion 8 are formed by screen printing by using a conductive paste (specifically, a silver paste). However, not limited to this configuration, for example, copper paste may be used instead of silver paste, or other printing methods such as inkjet printing may be used instead of screen printing. Further, the pattern of the first tab wiring portion 7 and the second tab wiring portion 8 can be formed by performing selective etching after vapor deposition of various metal films having conductivity.

第2圖所示的本實施方式的感測器面板檢查裝置1用於檢查感測器面板50上靠近電極的部分的靜電電容是否符合設計,並且檢查是否正確形成第一電極51、第二電極52。該感測器面板檢查裝置1具備第一電纜(第一配線體)37、第二電纜(第二配線體)38、訊號部11、訊號供給切換部31、檢測切換部32、電流檢測部(檢測部)41和控制器單元(控制部)45作為主要的構成。The sensor panel inspection apparatus 1 of the present embodiment shown in FIG. 2 is for checking whether the electrostatic capacitance of the portion of the sensor panel 50 close to the electrode conforms to the design, and checking whether the first electrode 51 and the second electrode are correctly formed. 52. The sensor panel inspection device 1 includes a first cable (first wiring body) 37, a second cable (second wiring body) 38, a signal portion 11, a signal supply switching portion 31, a detection switching portion 32, and a current detecting portion ( The detecting unit 41 and the controller unit (control unit) 45 have a main configuration.

第一電纜37和第二電纜38由具有導電性的電線構成。將感測器面板50安裝於感測器面板檢查裝置1時,第一電纜37經由感測器面板50的第一引板配線部7與第一電極51電連接,第二電纜38經由感測器面板50的第二引板配線部8與第二電極52電連接。The first cable 37 and the second cable 38 are composed of an electrically conductive wire. When the sensor panel 50 is mounted on the sensor panel inspection device 1, the first cable 37 is electrically connected to the first electrode 51 via the first lead plate wiring portion 7 of the sensor panel 50, and the second cable 38 is sensed. The second lead wiring portion 8 of the panel 50 is electrically connected to the second electrode 52.

由於配置有M個第一電極51,所以與此相對應地具備M根第一電纜37。另一方面,由於配置有M×N個第二電極52,所以具備M×N根第二電纜38。Since the M first electrodes 51 are disposed, the M first cables 37 are provided corresponding thereto. On the other hand, since M × N second electrodes 52 are disposed, M × N second cables 38 are provided.

然而,在本實施方式中,在配置有M×N個的第二電極52中,以將在第一電極51排列的方向(x方向)上對應的M個第二電極分為一組的方式設定有N個組。換言之,以y=1的組、y=2的組、•••的方式將第二電極52在每個y坐標上分組。並且,與屬同一組的第二電極52對應的第二電纜38彼此藉由作為或部的線或部39連接。However, in the present embodiment, among the M×N second electrodes 52, the M second electrodes corresponding in the direction (x direction) in which the first electrodes 51 are arranged are grouped into one group. There are N groups set. In other words, the second electrodes 52 are grouped on each y coordinate in a group of y=1, a group of y=2, and•••. Further, the second cables 38 corresponding to the second electrodes 52 belonging to the same group are connected to each other by a line or portion 39 as a portion.

訊號部11作為供給預定電壓的交流訊號的交流電源而構成。該訊號部11供給的交流訊號例如可以設定為頻率在10kHz~1000kHz的範圍內且電壓的有效值在1V~10V的範圍內。訊號部11的一端接地,另一端與訊號供給切換部31電連接。The signal unit 11 is configured as an AC power source that supplies an AC signal of a predetermined voltage. The AC signal supplied from the signal unit 11 can be set, for example, to a frequency in the range of 10 kHz to 1000 kHz and an effective value of the voltage in the range of 1 V to 10 V. One end of the signal portion 11 is grounded, and the other end is electrically connected to the signal supply switching portion 31.

訊號部11與控制器單元45連接,能夠基於來自控制器單元45的控制指令產生交流訊號。The signal unit 11 is connected to the controller unit 45, and can generate an alternating signal based on a control command from the controller unit 45.

訊號供給切換部31能夠從複數個第一電極51中選擇全部或一部分而使該選擇的第一電極51與訊號部11電連接。該訊號供給切換部31具有與第一電極51分別對應的複數個開關。應予說明,在圖式中,對各開關標注“1”~“4”的編號,該編號與上述的感測器坐標系中的x坐標對應。各開關以能夠進行開啟/關閉動作的方式構成,並且經由上述第一電纜37和第一引板配線部7與對應的第一電極51電連接。The signal supply switching unit 31 can select all or part of the plurality of first electrodes 51 to electrically connect the selected first electrode 51 to the signal unit 11. The signal supply switching unit 31 has a plurality of switches corresponding to the first electrodes 51, respectively. In the drawings, the numbers "1" to "4" are assigned to the switches, and the numbers correspond to the x coordinates in the sensor coordinate system described above. Each of the switches is configured to be capable of performing an opening/closing operation, and is electrically connected to the corresponding first electrode 51 via the first cable 37 and the first lead plate wiring portion 7.

訊號供給切換部31與控制器單元45連接,能夠基於來自控制器單元45的控制指令分別切換上述開關的開啟/關閉。The signal supply switching unit 31 is connected to the controller unit 45, and can switch the on/off of the above-described switches based on the control command from the controller unit 45, respectively.

在將配置為M×N個的第二電極52像上述那樣進行了分組時,檢測切換部32能夠選擇全部或一部分的組,使該選擇的第二電極52的組與電流檢測部41電連接。該檢測切換部32具有與第二電極52的組分別對應的複數個開關。應予說明,在圖式中,對各開關標注“1”~“4”的編號,該編號與上述的感測器坐標系中的y坐標對應。這些開關以能夠進行開啟/關閉動作的方式構成,並且經由上述第二電纜38和第二引板配線部8與對應的第二電極52的組電連接。When the second electrodes 52 arranged in M×N are grouped as described above, the detection switching unit 32 can select all or a part of the group, and electrically connect the selected group of the second electrodes 52 to the current detecting unit 41. . The detection switching unit 32 has a plurality of switches corresponding to the groups of the second electrodes 52, respectively. In the drawings, the numbers "1" to "4" are assigned to the respective switches, and the numbers correspond to the y coordinates in the above-described sensor coordinate system. These switches are configured to be capable of performing an opening/closing operation, and are electrically connected to a group of the corresponding second electrodes 52 via the second cable 38 and the second lead wiring portion 8.

檢測切換部32與訊號供給切換部31同樣地連接到控制器單元45,能夠基於來自控制器單元45的控制指令切換上述開關的開啟/關閉。Similarly to the signal supply switching unit 31, the detection switching unit 32 is connected to the controller unit 45, and can switch the on/off of the above-described switch based on a control command from the controller unit 45.

電流檢測部41具有以與複數個第二電極52的組分別對應的方式配置了複數個的電流計。各電流計將檢測到的電流的值發送到控制器單元45。The current detecting unit 41 has a plurality of galvanometers arranged to correspond to the respective groups of the plurality of second electrodes 52. Each galvanometer sends the value of the detected current to the controller unit 45.

控制器單元45以微電腦的形式構成,具備未圖示的作為運算部的CPU和作為存儲部的ROM、RAM等。並且,在控制器單元45的上述ROM中存儲有用於使感測器面板檢查裝置1工作的程序。並且,藉由上述硬件與上述軟件協同工作,從而能夠使控制器單元45作為檢查部47發揮功能。The controller unit 45 is configured as a microcomputer, and includes a CPU as a calculation unit (not shown), a ROM, a RAM, and the like as a storage unit. Further, a program for operating the sensor panel inspection device 1 is stored in the ROM of the controller unit 45. Further, the above-described hardware works in cooperation with the above-described software, whereby the controller unit 45 can function as the inspection unit 47.

檢查部47在感測器面板50被安置於感測器面板檢查裝置1的狀態下向訊號部11、訊號供給切換部31、檢測切換部32、電流檢測部41發送控制訊號來進行控制,進行感測器面板50的檢查。The inspection unit 47 transmits a control signal to the signal unit 11, the signal supply switching unit 31, the detection switching unit 32, and the current detecting unit 41 in a state where the sensor panel 50 is placed in the sensor panel inspection device 1 to perform control. Inspection of the sensor panel 50.

接下來,對感測器面板50的檢查進行說明。第3圖是表示感測器面板檢查裝置1檢查感測器面板50上的位置(1,4)時的形成電路的圖。第4圖是簡略地表示形成電路的圖。Next, the inspection of the sensor panel 50 will be described. Fig. 3 is a view showing a circuit formed when the sensor panel inspection device 1 inspects the position (1, 4) on the sensor panel 50. Fig. 4 is a view schematically showing the formation of a circuit.

首先,參照第4圖對檢查的考慮方式進行說明。本實施方式的感測器面板檢查裝置1能夠測定第一電極51與第二電極52接近部分的靜電電容。另外,感測器面板檢查裝置1成為能夠基於第一電極51和第二電極52的電阻值(或者根據電阻值而變化的值)來檢查該第一電極51和第二電極52的形狀均一性的構成。這與不僅能夠檢查電極的導通/短路,並且也能夠適當檢查電極的粗/細的需求高漲相對應。First, the consideration of the inspection will be described with reference to Fig. 4. The sensor panel inspection device 1 of the present embodiment can measure the electrostatic capacitance of a portion close to the first electrode 51 and the second electrode 52. Further, the sensor panel inspection apparatus 1 becomes capable of checking the shape uniformity of the first electrode 51 and the second electrode 52 based on the resistance values of the first electrode 51 and the second electrode 52 (or values that vary according to the resistance value). Composition. This corresponds to not only being able to check the conduction/short circuit of the electrodes, but also to appropriately check the coarse/fine demand of the electrodes.

以下,對電阻值的檢查進行詳細說明。配置於感測器面板50的第一電極51和第二電極52在M×N個地方相互接近。如上所述,由於在第一電極51與第二電極52之間形成有間隙,所以可以認為在上述的電極接近部分分別形成有電容器。Hereinafter, the inspection of the resistance value will be described in detail. The first electrode 51 and the second electrode 52 disposed on the sensor panel 50 are close to each other at M×N places. As described above, since a gap is formed between the first electrode 51 and the second electrode 52, it is considered that a capacitor is formed in each of the electrode approaching portions described above.

另外,第一電極51和第二電極52如上所述由ITO導電膜形成,雖然該ITO在與其它的透明電極材料的關係中顯示了優異的低電阻率,但示出相應的電阻值。因此,只要第一電極51和第二電極52的形狀沒有異常(例如上述的電極的粗/細)、均勻地形成圖案,則經由第一電極51、電極接近部分、第二電極52的電路(以下,有時稱為形成電路)的電阻隨著電極接近部分越遠離第一引板配線部7、第二引板配線部8(感測器坐標系的y坐標越大),由於必須藉由由ITO導電膜形成的較長的路徑,所以會越大。另一方面,由於第一電極51和第二電極52在x方向是相同形狀的圖案單純重複的構成,所以只要均勻地形成圖案,即使電極接近部分的感測器坐標系的x坐標變化,上述的形成電路的電阻也應該相同。在本實施方式的感測器面板檢查裝置1中,基於以上考慮進行感測器面板50的檢查。Further, the first electrode 51 and the second electrode 52 are formed of an ITO conductive film as described above, and although the ITO exhibits an excellent low resistivity in the relationship with other transparent electrode materials, the corresponding resistance value is shown. Therefore, as long as the shapes of the first electrode 51 and the second electrode 52 are not abnormal (for example, the above-described electrode is thick/thin) and the pattern is uniformly formed, the circuit via the first electrode 51, the electrode proximity portion, and the second electrode 52 ( Hereinafter, the resistance which is sometimes referred to as a circuit formation is further away from the first lead-plate wiring portion 7 and the second lead-plate wiring portion 8 as the electrode approaching portion (the y coordinate of the sensor coordinate system is larger), since it is necessary to The longer path formed by the ITO conductive film, so it will be larger. On the other hand, since the patterns in which the first electrode 51 and the second electrode 52 have the same shape in the x direction are simply repeated, as long as the pattern is uniformly formed, even if the x coordinate of the sensor coordinate system of the electrode approaching portion changes, The resistance of the forming circuit should also be the same. In the sensor panel inspection device 1 of the present embodiment, the inspection of the sensor panel 50 is performed based on the above considerations.

以下,以檢查上述的感測器坐標系中的(1,4)的情況為例說明感測器面板檢查裝置1的具體動作。檢查部47從存在的四個上述第一電極51中選擇與檢查對象的x坐標對應的第一電極51,另外,從存在的四個上述第二電極52的組中選擇與檢查對象的y坐標對應的組,以這些電極成為檢查對象的方式控制訊號供給切換部31和檢測切換部32。在這個例子中,檢查部47使訊號供給切換部31中“1”的開關開啟,使檢測切換部32中“4”的開關開啟。Hereinafter, a specific operation of the sensor panel inspection apparatus 1 will be described by taking the case of checking (1, 4) in the above-described sensor coordinate system as an example. The inspection unit 47 selects the first electrode 51 corresponding to the x coordinate of the inspection target from among the four existing first electrodes 51, and selects the y coordinate of the inspection object from the group of the four existing second electrodes 52 present. In the corresponding group, the signal supply switching unit 31 and the detection switching unit 32 are controlled such that the electrodes are to be inspected. In this example, the inspection unit 47 turns on the switch of "1" in the signal supply switching unit 31, and turns on the switch of "4" in the detection switching unit 32.

由此,訊號部11和電流檢測部41的電流計藉由第3圖中粗線所表示的電路連接。該粗線所描畫的電路從第一電極51與第一引板配線部7的連接部分經由上述的(1,4)所表示的電極交叉部分到達第二電極52與第二引板配線部8的連接部分。Thereby, the galvanometer of the signal section 11 and the current detecting section 41 is connected by the circuit indicated by the thick line in FIG. The circuit drawn by the thick line reaches the second electrode 52 and the second lead wiring portion 8 from the connection portion of the first electrode 51 and the first lead-plate wiring portion 7 via the electrode intersection portion indicated by the above (1, 4). The connection part.

第4圖示意地表示感測器面板50中的上述形成電路與感測器面板檢查裝置1連接的狀態。流過該電路的交流電流i藉由電流檢測部41的電流計進行測定。如該第4圖所示,與坐標(1,4)對應的電路包括適當大小的電阻和形成在上述電極接近部分的電容器。Fig. 4 is a view schematically showing a state in which the above-described forming circuit in the sensor panel 50 is connected to the sensor panel inspection device 1. The alternating current i flowing through the circuit is measured by an ammeter of the current detecting unit 41. As shown in Fig. 4, the circuit corresponding to the coordinates (1, 4) includes a resistor of an appropriate size and a capacitor formed in the proximity portion of the above electrode.

應予說明,如上所述,形成電路根據想要檢查的位置的坐標(x,y)而存在各種變化,因此其電阻值也各異。考慮到這種情況,檢查部47預先計算相對於任意坐標(x,y)的形成電路的電阻值並將其存儲於上述RAM等中。Incidentally, as described above, since the forming circuit has various changes depending on the coordinates (x, y) of the position to be inspected, the resistance value thereof also differs. In consideration of such a situation, the inspection unit 47 calculates in advance the resistance value of the forming circuit with respect to the arbitrary coordinates (x, y) and stores it in the RAM or the like.

檢查部47在使訊號部11產生交流訊號的狀態下,對電流檢測部41的電流計的輸出進行相位檢波而計算,由此獲得上述的形成電路的靜電電容和形成電路的電阻值(形成電路測量值)。將這樣獲得的靜電電容與預定的判定基準值進行比較,在允許範圍以外時判定為不合格品。另外,將所獲得的電阻值與預定的判定基準值比較,在允許範圍以外時,判定為第一電極51、第二電極52的形狀存在異常的不合格品。The inspection unit 47 performs phase detection on the output of the ammeter of the current detecting unit 41 in a state where the signal unit 11 generates an alternating current signal, thereby obtaining the electrostatic capacitance of the above-described circuit and the resistance value of the forming circuit (forming circuit) Measurements). The electrostatic capacitance thus obtained is compared with a predetermined determination reference value, and is judged to be a defective product when it is outside the allowable range. In addition, when the obtained resistance value is compared with a predetermined determination reference value and is outside the allowable range, it is determined that the shape of the first electrode 51 and the second electrode 52 is abnormal.

靜電電容和形成電路的電阻值的獲得以及是否為不合格品的判定是將想要檢查的位置的坐標切換成(1,1),(1,2),•••,(M-1,N),(M,N),同時對所有坐標進行檢查。由此,感測器面板50的檢查結束。其中,檢查的坐標的順序不受上述限定,可以進行適當改變。The determination of the capacitance and the resistance value of the circuit to be formed and whether it is a defective product is to switch the coordinates of the position to be inspected to (1, 1), (1, 2), •••, (M-1, N), (M, N), check all coordinates at the same time. Thereby, the inspection of the sensor panel 50 is completed. Here, the order of the coordinates of the inspection is not limited to the above, and may be appropriately changed.

在此,在本實施方式中,如上所述,將配置了M×N個的第二電極52在每個y坐標上進行分組之後,利用線或部39將與同一組的第二電極52連接的第一電纜37相互連接。Here, in the present embodiment, as described above, after the M×N second electrodes 52 are grouped on each y coordinate, the second electrode 52 of the same group is connected by the line or portion 39. The first cables 37 are connected to each other.

其理由如下。即,如果關注以M×N的形式配置成矩陣狀的第二電極52中的y坐標相等的任意兩個電極,該兩個第二電極52、52之間一定是被以劃分第二電極52的整個矩陣配置區域的方式配置為一根以上的第一電極51(長尺狀部3)隔開。因為這樣的電極圖案的特徵,所以很難認為兩個第二電極52之間會發生(直接)短路。The reason is as follows. That is, if any two electrodes having the same y-coordinates in the matrix-shaped second electrode 52 in the form of M×N are focused, the two second electrodes 52, 52 must be divided to divide the second electrode 52. The entire matrix arrangement area is arranged such that one or more first electrodes 51 (long-length portions 3) are spaced apart. Because of the characteristics of such an electrode pattern, it is difficult to think that a (direct) short circuit occurs between the two second electrodes 52.

因此,在本實施方式中,認為y坐標相同的第二電極52彼此不會發生相互短路,藉由使用上述的線或部39,能夠實質上共用檢查電路(具體而言是電流檢測部41的電流計)。由此,能夠減少檢查電路(通道)的數目,能夠實現檢查裝置的簡化、低成本化。另外,由於能夠減少檢查次數,所以也能夠實現檢查效率的提高。Therefore, in the present embodiment, it is considered that the second electrodes 52 having the same y-coordinate are not short-circuited with each other, and by using the above-described line or portion 39, the inspection circuit can be substantially shared (specifically, the current detecting portion 41) Ammeter). Thereby, the number of inspection circuits (channels) can be reduced, and simplification and cost reduction of the inspection apparatus can be achieved. In addition, since the number of inspections can be reduced, the inspection efficiency can be improved.

以下,對檢查電路的減少效果進行具體說明。即,如第1圖所示,當想要檢查排列佈置M個第一電極、M×N個第二電極的觸碰面板時,通常所需要的檢查電路的數目是加上兩電極的數目而成為M+M×N=M×(1+N)個。另一方面,如上所述,用線或部39連接時,對於M個第一電極51需要相應數量的檢查電路,另外,對於N個第二電極52的組也需要相應數量的檢查電路,所以需要的電路數目為M+N個。因此,可知由本實施方式的構成帶來的檢查電路減少的效果高,特別是對於M、N為大規模的大型面板而言,效果更明顯。Hereinafter, the effect of reducing the inspection circuit will be specifically described. That is, as shown in FIG. 1, when it is desired to inspect the touch panel in which the M first electrodes and the M×N second electrodes are arranged, the number of inspection circuits that are usually required is the number of two electrodes. It becomes M+M×N=M×(1+N). On the other hand, as described above, when connected by the wire or portion 39, a corresponding number of inspection circuits are required for the M first electrodes 51, and a corresponding number of inspection circuits are required for the group of N second electrodes 52, The number of circuits required is M+N. Therefore, it is understood that the effect of reducing the inspection circuit by the configuration of the present embodiment is high, and in particular, the effect is more remarkable for a large panel in which M and N are large-scale.

如以上所說明,本實施方式的感測器面板檢查裝置1檢查單層型觸碰面板裝置的感測器面板50。作為檢查對象物的感測器面板50是複數個第一電極51和複數個第二電極52在厚度方向上配置於同一層而構成的。第一電極51排列佈置成直線狀。各第一電極51在與該第一電極51排列的方向垂直的方向具有細長的長尺狀部3。As described above, the sensor panel inspection device 1 of the present embodiment inspects the sensor panel 50 of the single-layer type touch panel device. The sensor panel 50 as an inspection object is configured by arranging a plurality of first electrodes 51 and a plurality of second electrodes 52 in the same layer in the thickness direction. The first electrodes 51 are arranged in a line shape. Each of the first electrodes 51 has an elongated long-length portion 3 in a direction perpendicular to the direction in which the first electrodes 51 are arranged.

第二電極52在第一電極51排列的方向和沿著長尺狀部3的方向排列佈置成矩陣狀。感測器面板檢查裝置1具備線或部39和電流檢測部41。線或部39在檢查時合成第二電極52中的在第一電極51排列的方向對應的各第二電極的訊號輸出。電流檢測部41檢測線或部39的輸出。The second electrodes 52 are arranged in a matrix in the direction in which the first electrodes 51 are arranged and in the direction along the long-length portions 3. The sensor panel inspection device 1 includes a wire or portion 39 and a current detecting portion 41. The line or portion 39 synthesizes the signal output of each of the second electrodes 52 corresponding to the direction in which the first electrodes 51 are arranged in the inspection. The current detecting unit 41 detects the output of the line or unit 39.

即,在如上所述構成的單層型觸碰面板的感測器面板50中,從其圖案上的特徵可以認為,第二電極52中在第一電極51排列的方向對應的第二電極彼此不相互短路。因此,即使在電極的數目達到複數個的單層型的檢查中,藉由像本實施方式那樣在對訊號輸出進行合成之後進行檢查,從而能夠以少的檢查電路就進行充分的檢查。其結果,能夠實現感測器面板檢查裝置1的顯著簡化、低成本化,並且能夠提高檢查效率。That is, in the sensor panel 50 of the single-layer type touch panel constructed as described above, it can be considered that the second electrodes 52 correspond to the second electrodes 52 in the direction in which the first electrodes 51 are arranged from each other. Not shorted to each other. Therefore, even in the case where the number of electrodes reaches a plurality of single-layer type inspections, by performing inspection after synthesizing the signal outputs as in the present embodiment, it is possible to perform sufficient inspection with a small number of inspection circuits. As a result, significant simplification and cost reduction of the sensor panel inspection apparatus 1 can be achieved, and inspection efficiency can be improved.

另外,本實施方式的感測器面板檢查裝置1具備第一電纜37和第二電纜38。第一電纜37以能夠與各第一電極51電連接的方式具備複數個。第二電極52以能夠與各第二電極52電連接的方式具備複數個。並且,在對矩陣狀的第二電極52進行分組,以使在第一電極51排列的方向上對應的每一個第二電極為一組時,線或部39對與屬同一組的各第二電極52連接的第二電纜38進行線或連接。Further, the sensor panel inspection device 1 of the present embodiment includes a first cable 37 and a second cable 38. The first cable 37 is provided in plurality so as to be electrically connectable to each of the first electrodes 51. The second electrode 52 is provided in plurality so as to be electrically connectable to each of the second electrodes 52. Further, when the matrix-shaped second electrodes 52 are grouped so that each of the second electrodes corresponding in the direction in which the first electrodes 51 are arranged is a group, the line or portion 39 is paired with the second group belonging to the same group. The second cable 38 to which the electrodes 52 are connected is wired or connected.

由此,能夠簡單且合理地進行屬同一組的第二電極52的訊號輸出的合成。Thereby, the synthesis of the signal output of the second electrode 52 belonging to the same group can be performed simply and reasonably.

接下來,說明第二實施方式的感測器面板檢查裝置1。第5圖是表示第二實施方式的感測器面板檢查裝置1的整體構成的示意圖。應予說明,在本實施方式的說明中,有時在圖式中對與上述的實施方式相同或類似的部件標注相同的符號,省略說明。Next, the sensor panel inspection device 1 of the second embodiment will be described. Fig. 5 is a schematic view showing the overall configuration of the sensor panel inspection device 1 of the second embodiment. In the description of the embodiments, members that are the same as or similar to those in the above-described embodiments will be denoted by the same reference numerals, and will not be described.

第二實施方式的感測器面板檢查裝置1在與第一電極51排列的方向垂直的方向排列有用於從第二電極52的導電部4中取出電訊號的複數個感測器部48。在感測器面板檢查裝置1上安置感測器面板50時,上述感測器部48以相對於該感測器面板50隔著適當間隙對置的方式而配置。在本實施方式中,感測器部48由導電性的板狀部件構成,具有至少能夠與作為第二電極52的構成元件的導電部4的整面對置的大小。In the sensor panel inspection device 1 of the second embodiment, a plurality of sensor portions 48 for taking out electrical signals from the conductive portion 4 of the second electrode 52 are arranged in a direction perpendicular to the direction in which the first electrodes 51 are arranged. When the sensor panel 50 is placed on the sensor panel inspection device 1, the sensor portion 48 is disposed to face the sensor panel 50 with an appropriate gap therebetween. In the present embodiment, the sensor portion 48 is formed of a conductive plate member, and has a size that can face at least the entire surface of the conductive portion 4 which is a constituent element of the second electrode 52.

感測器部48與矩陣狀的第二電極52的配置間隔對應地等間隔地排列佈置。進一步而言,感測器以與為了構成第二電極52而成對佈置的各導電部4對應的方式排列佈置。The sensor portion 48 is arranged at equal intervals corresponding to the arrangement interval of the matrix-shaped second electrodes 52. Further, the sensors are arranged in a manner corresponding to the respective conductive portions 4 arranged in pairs to constitute the second electrode 52.

各感測器部48與用於測定電流的測定部49(具體而言是電流計)電連接。測定部49的測定結果發送到控制器單元45。Each of the sensor units 48 is electrically connected to a measuring unit 49 (specifically, an ammeter) for measuring current. The measurement result of the measurement unit 49 is sent to the controller unit 45.

藉由以上構成,各感測器部48藉由與導電部4電容耦合而取出電訊號,利用測定部49測定該電訊號,從而能夠在第一電極51、第二電極52中產生斷線等的情況下容易地確定不合格處。With the above configuration, each of the sensor portions 48 is capacitively coupled to the conductive portion 4 to take out the electrical signal, and the measuring portion 49 measures the electrical signal, thereby causing disconnection of the first electrode 51 and the second electrode 52. In the case of the case, it is easy to determine the unqualified place.

另外,近年來,在液晶的濾色器基板與偏振片之間形成透明電極圖案的所謂On-Cell型的觸碰面板得到實用化,認為將來對於如第1圖所示的單層型的觸碰面板也會發展On-Cell型。然而,由於On-Cell型的觸碰面板昂貴,所以有即使在檢查中發現不合格的情況下也要不廢棄而修復不合格處來使用的要求。對於這一點,本實施方式的感測器面板檢查裝置1不僅能夠進行感測器面板50的檢查,還能夠容易地確定所發現的不合格處。因此,能夠迅速準確地進行其後的修復工作。In addition, in recent years, a so-called On-Cell type touch panel in which a transparent electrode pattern is formed between a color filter substrate of a liquid crystal and a polarizing plate has been put into practical use, and it is considered that a single-layer type touch as shown in FIG. 1 will be in the future. Touch panel will also develop On-Cell type. However, since the On-Cell type touch panel is expensive, there is a requirement to repair the unqualified place without disposing it even if it is found to be unqualified during the inspection. In this regard, the sensor panel inspection device 1 of the present embodiment can perform not only the inspection of the sensor panel 50 but also the found failure. Therefore, the subsequent repair work can be performed quickly and accurately.

如以上所說明,本實施方式的感測器面板檢查裝置1具有在與第一電極51排列的方向垂直的方向排列的複數個感測器部48。各感測器部48在第一電極51排列的方向細長地形成。As described above, the sensor panel inspection device 1 of the present embodiment has a plurality of sensor portions 48 arranged in a direction perpendicular to the direction in which the first electrodes 51 are arranged. Each of the sensor portions 48 is formed to be elongated in the direction in which the first electrodes 51 are arranged.

由此,不僅能夠檢查感測器面板50的電極圖案的合格/不合格,而且能夠基於感測器部48的訊號輸出而容易地確定圖案不合格處。另外,由於以能夠與配置成矩陣狀的複數個第二電極52電容耦合的方式細長地構成感測器部48,所以能夠以簡單的構成的感測器部48充分進行不合格處的確定。Thereby, not only the pass/fail of the electrode pattern of the sensor panel 50 but also the pattern failure can be easily determined based on the signal output of the sensor portion 48. In addition, since the sensor portion 48 can be configured to be elongated so as to be capacitively coupled to the plurality of second electrodes 52 arranged in a matrix, the sensor portion 48 having a simple configuration can sufficiently determine the defective portion.

另外,在本實施方式的感測器面板檢查裝置1中,各第二電極52具備在與第一電極51排列的方向垂直的方向上以對應的方式成對配置的導電部4、4。感測器部48以與成對的導電部4的一方和另一方分別對應的方式而設置。Further, in the sensor panel inspection device 1 of the present embodiment, each of the second electrodes 52 includes the conductive portions 4 and 4 that are disposed in pairs in a direction perpendicular to the direction in which the first electrodes 51 are arranged. The sensor unit 48 is provided to correspond to one of the pair of conductive portions 4 and the other.

由此,能夠更詳細地確定圖案的不合格處。Thereby, the defective portion of the pattern can be determined in more detail.

以上,說明了本發明的較佳的實施方式,但上述的構成例如可以如下變更。Although the preferred embodiment of the present invention has been described above, the above configuration can be changed, for example, as follows.

在上述實施方式中,藉由線或部39連接與同一組的第二電極52連接的第二電纜38。然而,不受該連接方式限定,只要實質上能夠“或”同一組的第二電極52的訊號輸出即可。In the above embodiment, the second cable 38 connected to the second electrode 52 of the same group is connected by a wire or portion 39. However, it is not limited to this connection method as long as the signal output of the second electrode 52 of the same group can be substantially "or".

例如可以由FPGA構成線或部39,藉由控制器單元45的控制,能夠切換有無線或連接地構成。由此,能夠增大感測器面板檢查裝置1的檢查的通用性。For example, the line or portion 39 can be constituted by an FPGA, and can be switched between wireless or connected by the control of the controller unit 45. Thereby, the versatility of the inspection of the sensor panel inspection device 1 can be increased.

在上述實施方式中,感測器面板50與訊號供給切換部31藉由作為電線的第一電纜37連接,感測器面板50與檢測切換部32藉由作為電線的第二電纜38連接。然而,並不限於電線,例如可以藉由電路基板的圖案配線來進行電連接。In the above embodiment, the sensor panel 50 and the signal supply switching portion 31 are connected by the first cable 37 as a wire, and the sensor panel 50 and the detection switching portion 32 are connected by the second cable 38 as a wire. However, it is not limited to an electric wire, and for example, electrical connection can be performed by pattern wiring of a circuit board.

本發明的檢查裝置及檢查方法不限於觸碰面板裝置的感測器面板,可以將所謂的單層型的檢查對象物廣泛地作為檢查對象。The inspection apparatus and the inspection method of the present invention are not limited to the sensor panel that touches the panel device, and a so-called single-layer type inspection object can be widely used as an inspection object.

1‧‧‧感測器面板檢查裝置
11‧‧‧訊號部
3‧‧‧長尺狀部
31‧‧‧訊號供給切換部
32‧‧‧檢測切換部
37‧‧‧第一電纜
38‧‧‧第二電纜
39‧‧‧線或部
4‧‧‧導電部
41‧‧‧電流檢測部
45‧‧‧控制器單元
47‧‧‧檢查部
48‧‧‧感測器部
49‧‧‧測定部
5‧‧‧突出部
50‧‧‧感測器面板
51‧‧‧第一電極
52‧‧‧第二電極
6‧‧‧引出部
7‧‧‧第一引板配線部
8‧‧‧第二引板配線部
1‧‧‧Sensor panel inspection device
11‧‧‧Signal Department
3‧‧‧Long rule
31‧‧‧Signal supply switching unit
32‧‧‧Detection switching unit
37‧‧‧First cable
38‧‧‧Second cable
39‧‧‧ Line or Department
4‧‧‧Electrical Department
41‧‧‧ Current Detection Department
45‧‧‧Controller unit
47‧‧‧ Inspection Department
48‧‧‧Sensor Department
49‧‧‧Determination Department
5‧‧‧Protruding
50‧‧‧Sensor panel
51‧‧‧First electrode
52‧‧‧second electrode
6‧‧‧Export
7‧‧‧First lead plate wiring department
8‧‧‧Second lead plate wiring department

第1圖是示意地表示單層型觸碰面板裝置的感測器面板上的電極圖案的俯視圖。 第2圖是表示本發明的第一實施方式的感測器面板檢查裝置的整體構成的示意圖。 第3圖是表示感測器面板檢查裝置在檢查感測器面板上的位置(1,4)的情況下的形成電路的圖。 第4圖是簡略地表示形成電路的圖。 第5圖是表示第二實施方式的感測器面板檢查裝置的整體構成的示意圖。Fig. 1 is a plan view schematically showing an electrode pattern on a sensor panel of a single-layer type touch panel device. Fig. 2 is a schematic view showing the overall configuration of a sensor panel inspection device according to the first embodiment of the present invention. Fig. 3 is a view showing a circuit for forming a sensor panel inspection device in the case of checking the position (1, 4) on the sensor panel. Fig. 4 is a view schematically showing the formation of a circuit. Fig. 5 is a schematic view showing the overall configuration of a sensor panel inspection device according to a second embodiment.

1‧‧‧感測器面板檢查裝置 1‧‧‧Sensor panel inspection device

11‧‧‧訊號部 11‧‧‧Signal Department

3‧‧‧長尺狀部 3‧‧‧Long rule

31‧‧‧訊號供給切換部 31‧‧‧Signal supply switching unit

32‧‧‧檢測切換部 32‧‧‧Detection switching unit

37‧‧‧第一電纜 37‧‧‧First cable

38‧‧‧第二電纜 38‧‧‧Second cable

39‧‧‧線或部 39‧‧‧ Line or Department

4‧‧‧導電部 4‧‧‧Electrical Department

41‧‧‧電流檢測部 41‧‧‧ Current Detection Department

45‧‧‧控制器單元 45‧‧‧Controller unit

47‧‧‧檢查部 47‧‧‧ Inspection Department

5‧‧‧突出部 5‧‧‧Protruding

50‧‧‧感測器面板 50‧‧‧Sensor panel

51‧‧‧第一電極 51‧‧‧First electrode

52‧‧‧第二電極 52‧‧‧second electrode

6‧‧‧引出部 6‧‧‧Export

7‧‧‧第一引板配線部 7‧‧‧First lead plate wiring department

8‧‧‧第二引板配線部 8‧‧‧Second lead plate wiring department

Claims (5)

一種檢查裝置,其檢查對象物是複數個第一導電體和複數個第二導電體在厚度方向上配置於同一層的面板狀,該第一導電體排列佈置成直線狀,各該第一導電體在與該第一導電體排列的方向垂直的方向具有細長的長尺狀部,該第二導電體在該第一導電體排列的方向和沿著該長尺狀部的方向排列佈置成矩陣狀,該檢查對象物的該檢查裝置係包含: 或部,在檢查時對該第二導電體中在該第一導電體排列的方向上對應的各該第二導電體的訊號輸出進行合成;以及 檢測部,檢測該或部的輸出。An inspection apparatus, wherein the inspection object is a panel shape in which a plurality of first conductors and a plurality of second conductors are disposed in the same layer in a thickness direction, and the first conductors are arranged in a line shape, each of the first conductors The body has an elongated long-length portion in a direction perpendicular to a direction in which the first electrical conductors are arranged, and the second electrical conductors are arranged in a matrix in a direction in which the first electrical conductors are arranged and in a direction along the long-shaped portions. The inspection device of the inspection object includes: a portion that synthesizes a signal output of each of the second conductors corresponding to the direction in which the first conductors are arranged in the second conductor; And a detecting unit that detects an output of the part. 如申請專利範圍第1項所述之檢查裝置,其更包含: 能夠與該第一導電體的各個電連接的複數個第一配線體;以及 能夠與該第二導電體的各個電連接的複數個第二配線體在對矩陣狀的該第二導電體進行分組,以使在該第一導電體排列的方向上對應的各該第二導電體為一組時,該或部是將連接到屬於同一個該組的各該第二導電體的該第二配線體進行線或連接的線或部。The inspection apparatus according to claim 1, further comprising: a plurality of first wiring bodies electrically connectable to each of the first conductors; and a plurality of electrical connections capable of being electrically connected to the second conductors The second wiring body groups the second electric conductors in a matrix such that when the second electric conductors corresponding to the direction in which the first electric conductors are arranged are a group, the undules are connected to A line or portion of the second wiring body belonging to each of the second conductors of the same group to be wired or connected. 如申請專利範圍第1或2項所述之檢查裝置,其更包含: 複數個感測器部,在與該第一導電體排列的方向垂直的方向排列;以及 測定部,檢測該感測器部的輸出,各該感測器部以能夠與複數個該第二導電體電容耦合的方式細長地形成在該第一導電體排列的方向。The inspection apparatus according to claim 1 or 2, further comprising: a plurality of sensor portions arranged in a direction perpendicular to a direction in which the first electrical conductors are arranged; and a measuring portion that detects the sensor The output of the portion is formed in a direction in which the first conductors are arranged in a slender manner so as to be capacitively coupled to the plurality of second conductors. 如申請專利範圍第3項所述之檢查裝置,其中在該檢查對象物中,各該第二導電體具備在與該第一導電體排列的方向垂直的方向上以對應的方式成對配置的導電部,該感測器部以與該導電部的成對的一方和另一方分別對應的方式設置。The inspection apparatus according to claim 3, wherein each of the second electrical conductors is disposed in a paired manner in a direction perpendicular to a direction in which the first electrical conductors are arranged in the inspection object. The conductive portion is provided to correspond to one of the pair of the conductive portions and the other of the conductive portions. 一種檢查方法,其包含下列步驟: 檢查對象物是複數個第一導電體和複數個第二導電體在厚度方向上配置於同一層的面板狀, 該第一導電體排列佈置成直線狀, 各該第一導電體在與該第一導電體排列的方向垂直的方向具有細長的長尺狀部, 該第二導電體在該第一導電體排列的方向和與其垂直的方向排列佈置成矩陣狀, 利用或部對該第二導電體中在該第一導電體排列的方向上對應的各該第二導電體的訊號輸出進行合成之後,檢查合成後的訊號輸出。An inspection method comprising the following steps: the inspection object is a panel shape in which a plurality of first conductors and a plurality of second conductors are disposed in the same layer in a thickness direction, and the first conductors are arranged in a line shape, each The first electrical conductor has an elongated long-length portion in a direction perpendicular to a direction in which the first electrical conductors are arranged, and the second electrical conductors are arranged in a matrix in a direction in which the first electrical conductors are arranged and a direction perpendicular thereto And synthesizing the signal output of each of the second conductors corresponding to the second conductors in the direction in which the first conductors are arranged in the second conductor, and then checking the combined signal output.
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Publication number Priority date Publication date Assignee Title
CN105573554B (en) * 2015-12-31 2019-02-22 厦门天马微电子有限公司 Touch-control display panel
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JP6941546B2 (en) * 2017-11-30 2021-09-29 花王株式会社 Inspection method for sensors for absorbent articles
JP7352840B2 (en) * 2018-09-14 2023-09-29 ニデックアドバンステクノロジー株式会社 Inspection instruction information generation device, board inspection system, inspection instruction information generation method, and inspection instruction information generation program
WO2020202832A1 (en) * 2019-03-29 2020-10-08 日本電産リード株式会社 Measurement method and inspection device

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS559146A (en) * 1978-07-06 1980-01-23 Pentel Kk Tablet testing device
JP3285568B2 (en) * 1999-05-24 2002-05-27 日本電産リード株式会社 Board wiring inspection apparatus and wiring inspection method
US7589713B2 (en) * 2004-10-07 2009-09-15 Alps Electric Co., Ltd. Capacitive coordinate detection device
JP4996531B2 (en) * 2008-04-23 2012-08-08 富士通コンポーネント株式会社 Coordinate detection device
US8576193B2 (en) * 2008-04-25 2013-11-05 Apple Inc. Brick layout and stackup for a touch screen
WO2011121862A1 (en) 2010-03-29 2011-10-06 株式会社アイテス Inspection device of capacitive touch panel and method of inspection
JP5443251B2 (en) * 2010-04-21 2014-03-19 株式会社ジャパンディスプレイ Touch panel and display device
JP5305111B2 (en) * 2011-01-21 2013-10-02 オー・エイチ・ティー株式会社 Circuit pattern inspection device
US9609736B2 (en) * 2012-06-29 2017-03-28 Lg Innotek Co., Ltd. Touch panel and method of manufacturing the same
JP3178844U (en) * 2012-07-23 2012-10-04 志忠 林 Touch control unit
JP6248406B2 (en) * 2013-04-09 2017-12-20 日本電産リード株式会社 Inspection apparatus and inspection method
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