TW201431057A - Method for fabricating organic light emitting display device and inkjet print device used therein - Google Patents
Method for fabricating organic light emitting display device and inkjet print device used therein Download PDFInfo
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- TW201431057A TW201431057A TW102133186A TW102133186A TW201431057A TW 201431057 A TW201431057 A TW 201431057A TW 102133186 A TW102133186 A TW 102133186A TW 102133186 A TW102133186 A TW 102133186A TW 201431057 A TW201431057 A TW 201431057A
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- Prior art keywords
- organic light
- ink
- light emitting
- reactive solvent
- display device
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- 238000000034 method Methods 0.000 title claims abstract description 48
- 239000002904 solvent Substances 0.000 claims abstract description 209
- 238000007599 discharging Methods 0.000 claims abstract description 55
- 239000000758 substrate Substances 0.000 claims abstract description 29
- 239000010410 layer Substances 0.000 claims description 152
- 238000004519 manufacturing process Methods 0.000 claims description 63
- 230000007246 mechanism Effects 0.000 claims description 53
- 239000000463 material Substances 0.000 claims description 40
- 238000007641 inkjet printing Methods 0.000 claims description 26
- 238000002347 injection Methods 0.000 claims description 17
- 239000007924 injection Substances 0.000 claims description 17
- 239000007787 solid Substances 0.000 claims description 14
- DRLRGHZJOQGQEC-UHFFFAOYSA-N 2-(2-methoxypropoxy)propyl acetate Chemical compound COC(C)COC(C)COC(C)=O DRLRGHZJOQGQEC-UHFFFAOYSA-N 0.000 claims description 9
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 claims description 9
- 230000005525 hole transport Effects 0.000 claims description 9
- 239000012044 organic layer Substances 0.000 claims description 8
- UYAAVKFHBMJOJZ-UHFFFAOYSA-N diimidazo[1,3-b:1',3'-e]pyrazine-5,10-dione Chemical compound O=C1C2=CN=CN2C(=O)C2=CN=CN12 UYAAVKFHBMJOJZ-UHFFFAOYSA-N 0.000 claims description 7
- 229940116423 propylene glycol diacetate Drugs 0.000 claims description 7
- LAVARTIQQDZFNT-UHFFFAOYSA-N 1-(1-methoxypropan-2-yloxy)propan-2-yl acetate Chemical compound COCC(C)OCC(C)OC(C)=O LAVARTIQQDZFNT-UHFFFAOYSA-N 0.000 claims description 6
- DKPFZGUDAPQIHT-UHFFFAOYSA-N butyl acetate Chemical compound CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 claims description 6
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 claims description 6
- XXJWXESWEXIICW-UHFFFAOYSA-N diethylene glycol monoethyl ether Chemical compound CCOCCOCCO XXJWXESWEXIICW-UHFFFAOYSA-N 0.000 claims description 6
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 5
- 238000009835 boiling Methods 0.000 claims description 5
- 229940075557 diethylene glycol monoethyl ether Drugs 0.000 claims description 5
- NQBXSWAWVZHKBZ-UHFFFAOYSA-N 2-butoxyethyl acetate Chemical compound CCCCOCCOC(C)=O NQBXSWAWVZHKBZ-UHFFFAOYSA-N 0.000 claims description 4
- XLLIQLLCWZCATF-UHFFFAOYSA-N ethylene glycol monomethyl ether acetate Natural products COCCOC(C)=O XLLIQLLCWZCATF-UHFFFAOYSA-N 0.000 claims description 4
- 238000007639 printing Methods 0.000 claims description 4
- 238000005507 spraying Methods 0.000 claims description 4
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 claims description 3
- WMDZKDKPYCNCDZ-UHFFFAOYSA-N 2-(2-butoxypropoxy)propan-1-ol Chemical compound CCCCOC(C)COC(C)CO WMDZKDKPYCNCDZ-UHFFFAOYSA-N 0.000 claims description 3
- WAEVWDZKMBQDEJ-UHFFFAOYSA-N 2-[2-(2-methoxypropoxy)propoxy]propan-1-ol Chemical compound COC(C)COC(C)COC(C)CO WAEVWDZKMBQDEJ-UHFFFAOYSA-N 0.000 claims description 3
- FYYLCPPEQLPTIQ-UHFFFAOYSA-N 2-[2-(2-propoxypropoxy)propoxy]propan-1-ol Chemical compound CCCOC(C)COC(C)COC(C)CO FYYLCPPEQLPTIQ-UHFFFAOYSA-N 0.000 claims description 3
- SBZXBUIDTXKZTM-UHFFFAOYSA-N diglyme Chemical compound COCCOCCOC SBZXBUIDTXKZTM-UHFFFAOYSA-N 0.000 claims description 3
- 238000007598 dipping method Methods 0.000 claims description 3
- BHXIWUJLHYHGSJ-UHFFFAOYSA-N ethyl 3-ethoxypropanoate Chemical compound CCOCCC(=O)OCC BHXIWUJLHYHGSJ-UHFFFAOYSA-N 0.000 claims description 3
- IJUHLFUALMUWOM-UHFFFAOYSA-N ethyl 3-methoxypropanoate Chemical compound CCOC(=O)CCOC IJUHLFUALMUWOM-UHFFFAOYSA-N 0.000 claims description 3
- GJRQTCIYDGXPES-UHFFFAOYSA-N iso-butyl acetate Natural products CC(C)COC(C)=O GJRQTCIYDGXPES-UHFFFAOYSA-N 0.000 claims description 3
- FGKJLKRYENPLQH-UHFFFAOYSA-M isocaproate Chemical compound CC(C)CCC([O-])=O FGKJLKRYENPLQH-UHFFFAOYSA-M 0.000 claims description 3
- OQAGVSWESNCJJT-UHFFFAOYSA-N isovaleric acid methyl ester Natural products COC(=O)CC(C)C OQAGVSWESNCJJT-UHFFFAOYSA-N 0.000 claims description 3
- HSDFKDZBJMDHFF-UHFFFAOYSA-N methyl 3-ethoxypropanoate Chemical compound CCOCCC(=O)OC HSDFKDZBJMDHFF-UHFFFAOYSA-N 0.000 claims description 3
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 claims description 3
- CAQYAZNFWDDMIT-UHFFFAOYSA-N 1-ethoxy-2-methoxyethane Chemical compound CCOCCOC CAQYAZNFWDDMIT-UHFFFAOYSA-N 0.000 claims description 2
- LIPRQQHINVWJCH-UHFFFAOYSA-N 1-ethoxypropan-2-yl acetate Chemical compound CCOCC(C)OC(C)=O LIPRQQHINVWJCH-UHFFFAOYSA-N 0.000 claims description 2
- FPZWZCWUIYYYBU-UHFFFAOYSA-N 2-(2-ethoxyethoxy)ethyl acetate Chemical compound CCOCCOCCOC(C)=O FPZWZCWUIYYYBU-UHFFFAOYSA-N 0.000 claims description 2
- JABXMSSGPHGCII-UHFFFAOYSA-N acetic acid;propane-1,2-diol Chemical compound CC(O)=O.CC(O)CO JABXMSSGPHGCII-UHFFFAOYSA-N 0.000 claims description 2
- 239000012046 mixed solvent Substances 0.000 claims description 2
- 238000003860 storage Methods 0.000 claims description 2
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 claims 2
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 claims 1
- OHBRHBQMHLEELN-UHFFFAOYSA-N acetic acid;1-butoxybutane Chemical compound CC(O)=O.CCCCOCCCC OHBRHBQMHLEELN-UHFFFAOYSA-N 0.000 claims 1
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 claims 1
- 238000001035 drying Methods 0.000 description 9
- 230000008569 process Effects 0.000 description 8
- 238000005229 chemical vapour deposition Methods 0.000 description 7
- 239000007921 spray Substances 0.000 description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 6
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 6
- 238000000206 photolithography Methods 0.000 description 6
- 238000005240 physical vapour deposition Methods 0.000 description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 6
- 239000000126 substance Substances 0.000 description 6
- 239000011651 chromium Substances 0.000 description 4
- 238000001704 evaporation Methods 0.000 description 4
- 239000010931 gold Substances 0.000 description 4
- 239000011777 magnesium Substances 0.000 description 4
- -1 propylene glycol monoethyl ether acetate Ester Chemical class 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000010017 direct printing Methods 0.000 description 3
- 230000008020 evaporation Effects 0.000 description 3
- 238000007646 gravure printing Methods 0.000 description 3
- 229910052758 niobium Inorganic materials 0.000 description 3
- 239000010955 niobium Substances 0.000 description 3
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 2
- 229920001609 Poly(3,4-ethylenedioxythiophene) Polymers 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- UMIVXZPTRXBADB-UHFFFAOYSA-N benzocyclobutene Chemical compound C1=CC=C2CCC2=C1 UMIVXZPTRXBADB-UHFFFAOYSA-N 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 150000002148 esters Chemical class 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 229910003437 indium oxide Inorganic materials 0.000 description 2
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 2
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 2
- 229910052749 magnesium Inorganic materials 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 239000011368 organic material Substances 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 229920001467 poly(styrenesulfonates) Polymers 0.000 description 2
- 229920000768 polyamine Polymers 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 2
- 239000011787 zinc oxide Substances 0.000 description 2
- CNJRPYFBORAQAU-UHFFFAOYSA-N 1-ethoxy-2-(2-methoxyethoxy)ethane Chemical compound CCOCCOCCOC CNJRPYFBORAQAU-UHFFFAOYSA-N 0.000 description 1
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- CETPSERCERDGAM-UHFFFAOYSA-N ceric oxide Chemical compound O=[Ce]=O CETPSERCERDGAM-UHFFFAOYSA-N 0.000 description 1
- 229910000422 cerium(IV) oxide Inorganic materials 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- OUFLLVQXSGGKOV-UHFFFAOYSA-N copper ruthenium Chemical compound [Cu].[Ru].[Ru].[Ru] OUFLLVQXSGGKOV-UHFFFAOYSA-N 0.000 description 1
- XCJYREBRNVKWGJ-UHFFFAOYSA-N copper(II) phthalocyanine Chemical compound [Cu+2].C12=CC=CC=C2C(N=C2[N-]C(C3=CC=CC=C32)=N2)=NC1=NC([C]1C=CC=CC1=1)=NC=1N=C1[C]3C=CC=CC3=C2[N-]1 XCJYREBRNVKWGJ-UHFFFAOYSA-N 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000005281 excited state Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000005283 ground state Effects 0.000 description 1
- 238000005470 impregnation Methods 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229960002796 polystyrene sulfonate Drugs 0.000 description 1
- 239000011970 polystyrene sulfonate Substances 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000036632 reaction speed Effects 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 1
- ODHXBMXNKOYIBV-UHFFFAOYSA-N triphenylamine Chemical compound C1=CC=CC=C1N(C=1C=CC=CC=1)C1=CC=CC=C1 ODHXBMXNKOYIBV-UHFFFAOYSA-N 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
- H10K71/13—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing
- H10K71/135—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing using ink-jet printing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J3/00—Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed
- B41J3/407—Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed for marking on special material
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/191—Deposition of organic active material characterised by provisions for the orientation or alignment of the layer to be deposited
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
- H10K71/15—Deposition of organic active material using liquid deposition, e.g. spin coating characterised by the solvent used
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/20—Changing the shape of the active layer in the devices, e.g. patterning
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Electroluminescent Light Sources (AREA)
Abstract
Description
本發明係關於一種製造有機發光顯示器裝置之方法及用於該方法中之噴墨印刷裝置。 The present invention relates to a method of fabricating an organic light emitting display device and an ink jet printing device used in the method.
平板顯示器裝置可分類為發射型或非發射型。發射型顯示器裝置可以是一平板陰極射線管、一電漿顯示器面板、一電致發光裝置、或一發光二極體。非發射型顯示器裝置可以是一液晶顯示器。彼等當中，電致發光裝置的優點包括寬視角、上等對比度、和高反應速度，且因此，已經聚焦成為下一代的顯示器裝置。依形成發光層的材料而異，電致發光裝置係分類成無機發光裝置或有機發光裝置。 Flat panel display devices can be classified as either emissive or non-emissive. The emissive display device can be a flat cathode ray tube, a plasma display panel, an electroluminescent device, or a light emitting diode. The non-emissive display device can be a liquid crystal display. Among them, the advantages of electroluminescent devices include wide viewing angles, superior contrast, and high reaction speed, and thus, have been focused on the next generation of display devices. The electroluminescent device is classified into an inorganic light-emitting device or an organic light-emitting device depending on the material from which the light-emitting layer is formed.
有機發光裝置包括一有機發光層，其係由設置在陽極電極與陰極電極之間的有機材料所製成。若將電壓施加至這些電極，分別地，從陽極電極注入的電洞係透過電洞注入層和電洞傳輸層移動至有機發光層，及電子係透過電子注入層和電子傳輸層移動至有機發光層。在有機發光層中，電子和電洞係經再結合 的。透過此再結合產生激子(exciton)，且當該激子係從激發態改變至基態時，有機發光層發射光以顯示影像。 The organic light-emitting device includes an organic light-emitting layer made of an organic material disposed between the anode electrode and the cathode electrode. If a voltage is applied to the electrodes, respectively, the holes injected from the anode electrode are moved to the organic light-emitting layer through the hole injection layer and the hole transport layer, and the electrons are moved to the organic light through the electron injection layer and the electron transport layer. Floor. In the organic light-emitting layer, electrons and holes are recombined of. An exciton is generated by this recombination, and when the exciton changes from an excited state to a ground state, the organic light emitting layer emits light to display an image.
有機發光裝置包括像素定義膜，具有暴露陽極電極的開口，且有機發光層係形成於透過該像素定義膜之開口所暴露的陽極電極上。 The organic light-emitting device includes a pixel defining film having an opening exposing the anode electrode, and the organic light-emitting layer is formed on the anode electrode exposed through the opening of the pixel defining film.
使用一噴墨印刷方法，經由在其透過像素定義膜之開口而暴露的陽極電極上排放有機發光油墨而可形成有機發光層。 The organic light-emitting layer can be formed by discharging an organic light-emitting ink on an anode electrode exposed through an opening of the pixel-defining film using an inkjet printing method.
然而，在形成像素定義膜之後，精細殘餘的物質(其係肉眼看不見的)可能留在陽極電極上，且該精細殘餘的物質可能影響或惡化排放在陽極電極上的有機發光油墨的潤濕性。在此種情況中，經由在像素定義膜之開口(例如，在該開口內部)中排放有機發光油墨而形成的有機發光層的厚度可能是不均勻的。 However, after the formation of the pixel-defining film, a fine residual substance (which is invisible to the naked eye) may remain on the anode electrode, and the fine residual substance may affect or deteriorate the wetting of the organic light-emitting ink discharged on the anode electrode. Sex. In this case, the thickness of the organic light-emitting layer formed by discharging the organic light-emitting ink in the opening of the pixel defining film (for example, inside the opening) may be uneven.
因此，期望提供一種製造有機發光顯示器裝置之方法，其經由形成具有均勻厚度的有機發光層而可實現均勻的光發射，係透過有機發光油墨(其係排放在像素定義膜之開口中)之改善的潤濕性。 Accordingly, it is desirable to provide a method of fabricating an organic light emitting display device that achieves uniform light emission by forming an organic light emitting layer having a uniform thickness, which is improved by transmitting an organic light emitting ink which is discharged in an opening of a pixel defining film. Wettability.
此外，期望提供一種噴墨印刷裝置，其經由形成具有實質上均勻厚度的有機發光層而可實現更均勻的光發射，係透過有機發光油墨(其係排放在像素定義膜之開口中)之改善的潤濕性。 Furthermore, it is desirable to provide an ink jet printing apparatus that achieves a more uniform light emission by forming an organic light emitting layer having a substantially uniform thickness, which is improved by the organic light emitting ink which is discharged in the opening of the pixel defining film. Wettability.
本發明之另外的方面及特徵將在下文描述中闡述一部分，且一部分將依下文的檢視而對本領域中具有通常知識者而言變得顯而易見，或可從本發明之實施而了解。 Additional aspects and features of the invention will be set forth in part in the description which follows.
根據本發明之一具體實施態樣，一種製造有機發光顯示器裝置之方法，包括形成一第一電極於一基材上；形成一像素定義膜，具有暴露該第一電極之開口；經由在該開口處排放一油墨非反應性溶劑以形成一油墨非反應性溶劑部分，以及經由在該油墨非反應性溶劑部分上排放一有機發光油墨以形成一有機發光層；以及形成一第二電極於該有機發光層上。 According to an embodiment of the present invention, a method of fabricating an organic light emitting display device includes forming a first electrode on a substrate, forming a pixel defining film having an opening exposing the first electrode, and passing through the opening Discharging an ink non-reactive solvent to form an ink non-reactive solvent portion, and discharging an organic light-emitting ink on the non-reactive solvent portion of the ink to form an organic light-emitting layer; and forming a second electrode on the organic On the luminescent layer.
像素定義膜之開口可具有一矩形形狀。 The opening of the pixel defining film may have a rectangular shape.
像素定義膜之開口可具有圓角。 The opening of the pixel defining film may have rounded corners.
油墨非反應性溶劑可包括一溶劑，其係與該有機發光油墨呈非反應性，可為透明的，並可具有等於或高於約70℃的沸點。 The ink non-reactive solvent may include a solvent which is non-reactive with the organic light-emitting ink, may be transparent, and may have a boiling point equal to or higher than about 70 °C.
油墨非反應性溶劑可包括下列之至少一者：醇、二丙二醇單甲基醚乙酸酯(DPMA)、乙酸乙酯、乙酸正丁酯、乙酸異丁酯、乙二醇單甲基醚乙酸酯、乙二醇正丁基醚乙酸酯、二乙二醇二甲基醚、二丙二醇單甲基醚乙酸酯、二乙二醇甲基乙基醚、二乙二醇乙基醚乙酸酯、二丙二醇正丁基醚、三丙二醇正丙基醚、三丙二醇甲基醚、丙二醇甲基醚乙酸酯、丙二醇二乙酸酯、丙二醇單甲基醚、丙二醇單乙基醚乙酸酯、環己酮、3-甲氧基丙酸乙酯、3-乙氧基丙酸甲酯、3-乙氧基丙酸乙酯、乙二醇正丁基醚乙酸 酯(EGBEA)、二丙二醇單甲基醚乙酸酯(DPMA)、丙二醇二乙酸酯(PGDA)、二乙二醇單乙基醚(DPGME)、或二乙二醇單乙基醚(卡必醇，Carbitol)。 The ink non-reactive solvent may include at least one of the following: alcohol, dipropylene glycol monomethyl ether acetate (DPMA), ethyl acetate, n-butyl acetate, isobutyl acetate, ethylene glycol monomethyl ether Acid ester, ethylene glycol n-butyl ether acetate, diethylene glycol dimethyl ether, dipropylene glycol monomethyl ether acetate, diethylene glycol methyl ethyl ether, diethylene glycol ethyl ether Acid ester, dipropylene glycol n-butyl ether, tripropylene glycol n-propyl ether, tripropylene glycol methyl ether, propylene glycol methyl ether acetate, propylene glycol diacetate, propylene glycol monomethyl ether, propylene glycol monoethyl ether acetate Ester, cyclohexanone, ethyl 3-methoxypropionate, methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, ethylene glycol n-butyl ether acetate Ester (EGBEA), dipropylene glycol monomethyl ether acetate (DPMA), propylene glycol diacetate (PGDA), diethylene glycol monoethyl ether (DPGME), or diethylene glycol monoethyl ether (card Alcohol, Carbitol).
油墨非反應性溶劑之黏度範圍可在約2厘泊(centi-poise，cP)至約4厘泊。 The viscosity of the ink non-reactive solvent can range from about 2 centipoise (cP) to about 4 centipoise.
該製造有機發光顯示器裝置之方法可更包括定義各像素；以及使用噴墨印刷方法或噴嘴印刷方法，依各像素線排放或相對於所有像素同步地排放該油墨非反應性溶劑。 The method of fabricating an organic light emitting display device may further include defining each pixel; and discharging the ink non-reactive solvent in accordance with each pixel line or synchronously with respect to all pixels using an inkjet printing method or a nozzle printing method.
油墨非反應性溶劑可使用噴塗方法或浸漬方法而排放。 The ink non-reactive solvent can be discharged using a spraying method or a dipping method.
油墨非反應性溶劑部分可實質上覆蓋第一電極及像素定義膜之上表面，且可具有一實質上恆定的厚度。 The ink non-reactive solvent portion may substantially cover the first electrode and the upper surface of the pixel defining film and may have a substantially constant thickness.
油墨非反應性溶劑部分可具有一第一厚度於第一電極上，以及可具有一第二厚度於像素定義膜之上表面上，該第二厚度係可大於該第一厚度。 The ink non-reactive solvent portion may have a first thickness on the first electrode and may have a second thickness on the upper surface of the pixel definition film, the second thickness being greater than the first thickness.
有機發光油墨可包括一溶劑及固體物，以及有機發光油墨之溶劑可相同於或不同於油墨非反應性溶劑。 The organic light-emitting ink may include a solvent and a solid, and the solvent of the organic light-emitting ink may be the same as or different from the ink non-reactive solvent.
有機發光層可包括一電洞注入層、一電洞傳輸層、一有機層、一電子傳輸層、以及一電子注入層，該等層係堆疊於第一電極上，以及固體物可包括構成該電洞注入層、該電洞傳輸層、該有機層、該電子傳輸層、以及該電子注入層之任何材料。 The organic light emitting layer may include a hole injection layer, a hole transport layer, an organic layer, an electron transport layer, and an electron injection layer, the layers are stacked on the first electrode, and the solid matter may include the Any material of the hole injection layer, the hole transport layer, the organic layer, the electron transport layer, and the electron injection layer.
油墨非反應性溶劑部分之溶劑和有機發光油墨之溶 劑可經由排放有機發光油墨於油墨非反應性溶劑部分上而混合。 Solvent of solvent non-reactive solvent part and dissolution of organic light-emitting ink The agent may be mixed by discharging the organic light-emitting ink onto the ink non-reactive solvent portion.
可實質上蒸發油墨非反應性溶劑部分和有機發光油墨的混合溶劑，且可留下有機發光油墨之固體物作為有機發光層。 The mixed solvent of the ink non-reactive solvent portion and the organic light-emitting ink may be substantially evaporated, and the solid matter of the organic light-emitting ink may be left as the organic light-emitting layer.
在油墨非反應性溶劑之排放完成之後，可排放有機發光油墨一段時間。 After the discharge of the ink non-reactive solvent is completed, the organic light-emitting ink may be discharged for a while.
油墨非反應性溶劑可透過一油墨非反應性溶劑排放機構來排放，該機構係包括一第一噴嘴於一第一頭部之下方部分處，以及有機發光油墨可透過一有機發光油墨排放機構來排放，該機構係包括一第二噴嘴於一第二頭部之下方部分處。 The ink non-reactive solvent is discharged through an ink non-reactive solvent discharge mechanism, the mechanism includes a first nozzle at a lower portion of the first head, and the organic light-emitting ink is permeable to an organic light-emitting ink discharge mechanism. Discharge, the mechanism includes a second nozzle at a lower portion of a second head.
油墨非反應性溶劑排放機構和有機發光油墨排放機構可經獨立控制或可經配置以同步移動。 The ink non-reactive solvent discharge mechanism and the organic light-emitting ink discharge mechanism can be independently controlled or can be configured to move synchronously.
一種噴墨印刷裝置，包括一油墨非反應性溶劑排放機構，經配置以經由在一像素定義膜之開口中排放油墨非反應性溶劑而形成一油墨非反應性溶劑部分，該開口暴露一第一電極於一有機發光顯示器裝置之基材上；以及一有機發光油墨排放機構，經配置以經由在該油墨非反應性溶劑部分上排放一有機發光油墨而形成一有機發光層。 An ink jet printing apparatus comprising an ink non-reactive solvent discharge mechanism configured to form an ink non-reactive solvent portion by discharging an ink non-reactive solvent in an opening of a pixel defining film, the opening exposing a first An electrode on a substrate of an organic light emitting display device; and an organic light emitting ink discharge mechanism configured to form an organic light emitting layer by discharging an organic light emitting ink on the ink non-reactive solvent portion.
油墨非反應性溶劑排放機構可包括一第一控制器，經配置以控制油墨非反應性溶劑之排放和第一排放器之移動；一油墨非反應性溶劑儲存器，經配置以儲存該油墨非反應性溶劑；以及該第一排放器係經配置以接收來自該第一控制器的排放控制信號和移動控制信號，接收來自該油墨非反應性溶劑儲存器的油 墨非反應性溶劑，和排放該油墨非反應性溶劑於該第一電極上。 The ink non-reactive solvent discharge mechanism can include a first controller configured to control discharge of the ink non-reactive solvent and movement of the first discharger; an ink non-reactive solvent reservoir configured to store the ink a reactive solvent; and the first drain is configured to receive an emission control signal and a movement control signal from the first controller to receive oil from the ink non-reactive solvent reservoir An ink non-reactive solvent, and a non-reactive solvent that discharges the ink on the first electrode.
有機發光油墨排放機構可包括一第二控制器，經配置以控制有機發光油墨之排放和第二排放器之移動；一有機發光油墨儲存器，經配置以儲存該有機發光油墨；以及該第二排放器係經配置以接收來自該第二控制器的排放控制信號和移動控制信號，接收來自該有機發光油墨儲存器的有機發光油墨，和排放該有機發光油墨於該油墨非反應性溶劑部分上。 The organic light emitting ink discharge mechanism can include a second controller configured to control emission of the organic light emitting ink and movement of the second discharger; an organic light emitting ink reservoir configured to store the organic light emitting ink; and the second The ventilator is configured to receive an emission control signal and a movement control signal from the second controller, receive the organic luminescent ink from the OLED ink reservoir, and discharge the organic luminescent ink onto the non-reactive solvent portion of the ink .
第一排放器可包括一第一噴嘴於一第一頭部之下方部分處，以及第二排放器可包括一第二噴嘴於一第二頭部之下方部分處，以及該第一頭部和該第二頭部係分別地耦合至移動裝置，該移動裝置係經配置以相對於彼此獨立地移動。 The first discharger may include a first nozzle at a lower portion of the first head, and the second discharger may include a second nozzle at a lower portion of the second head, and the first head and The second head unit is separately coupled to the mobile device, the mobile device being configured to move independently of each other.
第一排放器可包括一第一噴嘴於一第一頭部之下方部分處，以及第二排放器可包含一第二噴嘴於一第二頭部之下方部分處，以及該第一頭部和該第二頭部係耦合至一個移動裝置。 The first discharger may include a first nozzle at a lower portion of the first head, and the second discharger may include a second nozzle at a lower portion of the second head, and the first head and The second head unit is coupled to a mobile device.
在第一噴嘴與第二噴嘴之間的距離實質上可等於一像素的寬度。 The distance between the first nozzle and the second nozzle may be substantially equal to the width of one pixel.
因此，即使在形成像素定義膜於第一電極上之後留下精細殘餘的物質，可防止該精細殘餘的物質限制有機發光油墨的潤濕性，且因而，可改善該有機發光油墨的潤濕性。 Therefore, even if a fine residual substance is left after forming the pixel defining film on the first electrode, the fine residual substance can be prevented from restricting the wettability of the organic light emitting ink, and thus, the wettability of the organic light emitting ink can be improved. .
因此，經由調整在像素定義膜之開口中之有機發光油墨的厚度，有機發光層係形成在具實質上均勻厚度的第一電極上，且因而，有機發光顯示器裝置的顯示品質可透過該有機發光 層之均勻光發射而改善。 Therefore, by adjusting the thickness of the organic light-emitting ink in the opening of the pixel defining film, the organic light-emitting layer is formed on the first electrode having a substantially uniform thickness, and thus, the display quality of the organic light-emitting display device is transparent to the organic light-emitting The uniform light emission of the layer is improved.
根據本發明之方面和功效係不限於上述例示性內容，且進一步各種方面及功效係包括於說明中。 Aspects and effects in accordance with the present invention are not limited to the above-described exemplary contents, and further various aspects and functions are included in the description.
1‧‧‧噴墨印刷裝置 1‧‧‧Inkjet printing device
10、10A‧‧‧油墨非反應性溶劑排放機構(部分) 10, 10A‧‧‧Ink non-reactive solvent discharge mechanism (partial)
11、11A‧‧‧第一頭部 11, 11A‧‧‧ first head
12、12A‧‧‧第一噴嘴 12, 12A‧‧‧ first nozzle
13‧‧‧第一控制器 13‧‧‧First controller
14‧‧‧油墨非反應性溶劑儲存器 14‧‧‧Ink non-reactive solvent reservoir
15‧‧‧第一排放器 15‧‧‧First Discharger
20、20A‧‧‧有機發光油墨排放機構(部分) 20, 20A‧‧‧Organic Luminous Ink Emission Mechanism (Partial)
21、21A‧‧‧第二頭部 21, 21A‧‧‧ second head
22、22A‧‧‧第二噴嘴 22, 22A‧‧‧ second nozzle
23‧‧‧第二控制器 23‧‧‧Second controller
24‧‧‧有機發光油墨儲存器 24‧‧‧Organic Luminescent Ink Storage
25‧‧‧第二排放器 25‧‧‧Second discharger
30‧‧‧噴霧裝置 30‧‧‧Spray device
40‧‧‧移動裝置 40‧‧‧Mobile devices
110‧‧‧基材 110‧‧‧Substrate
120‧‧‧第一電極 120‧‧‧first electrode
130、230‧‧‧像素定義膜 130, 230‧‧‧ pixel definition film
131、231‧‧‧開口 131, 231‧‧‧ openings
135‧‧‧油墨非反應性溶劑部分 135‧‧‧Ink non-reactive solvent part
135a‧‧‧油墨非反應性溶劑 135a‧‧‧Ink non-reactive solvent
140‧‧‧有機發光層 140‧‧‧Organic light-emitting layer
140a‧‧‧有機發光油墨 140a‧‧‧Organic Luminescent Ink
150‧‧‧第二電極 150‧‧‧second electrode
d1‧‧‧距離 D1‧‧‧ distance
PX‧‧‧像素 PX‧‧ ‧ pixels
T1‧‧‧第一厚度 T1‧‧‧first thickness
T2‧‧‧第二厚度 T2‧‧‧second thickness
S10‧‧‧形成第一電極 S10‧‧‧ forming the first electrode
S20‧‧‧形成畫素定義膜 S20‧‧‧ forming a pixel definition film
S30‧‧‧形成有機發光層 S30‧‧‧Forming an organic light-emitting layer
S31‧‧‧排放油墨非反應性溶劑 S31‧‧‧Discharge ink non-reactive solvent
S32‧‧‧排放有機發光油墨 S32‧‧‧Draining organic light-emitting ink
S40‧‧‧形成第二電極 S40‧‧‧ forming a second electrode
透過參考以下詳細說明並結合考量所附圖式，本發明之上述及其他特徵及方面將更為明白。 The above and other features and aspects of the present invention will become more apparent from the description of the appended claims.
第1圖係描述根據本發明之一具體實施態樣製造有機發光顯示器裝置之方法的流程圖；第2圖係描述根據本發明之一具體實施態樣製造有機發光顯示器裝置之方法之有機發光層形成步驟的流程圖；第3至9圖係根據本發明之一具體實施態樣製造有機發光顯示器裝置之方法之製程步驟的剖視圖和平面圖；第10至14圖係根據本發明之另一具體實施態樣製造有機發光顯示器裝置之方法之像素定義膜形成步驟和有機發光層形成步驟的剖視圖和平面圖；第15至17圖係根據本發明之又一具體實施態樣製造有機發光顯示器裝置之方法之有機發光層形成步驟的剖視圖；第18至21圖係根據本發明之再一具體實施態樣製造有機發光顯示器裝置之方法之有機發光層形成步驟的剖視圖；第22至24圖係根據本發明之又再一具體實施態樣製造有機發光顯示器裝置之方法之有機發光層形成步驟的剖視圖； 第25圖係說明用於根據本發明之一具體實施態樣製造有機發光顯示器裝置之方法中的噴墨印刷裝置的示意性構造的圖示；第26圖係說明第25圖之噴墨印刷裝置之詳細構造的圖示；以及第27圖係說明第26圖之噴墨印刷裝置之實例的剖視圖。 1 is a flow chart depicting a method of fabricating an organic light emitting display device in accordance with an embodiment of the present invention; and FIG. 2 is a view showing an organic light emitting layer in a method of fabricating an organic light emitting display device in accordance with an embodiment of the present invention. FIG. 3 to FIG. 9 are cross-sectional and plan views showing process steps of a method of fabricating an organic light-emitting display device according to an embodiment of the present invention; and FIGS. 10 to 14 are another embodiment of the present invention. A cross-sectional view and a plan view of a pixel defining film forming step and an organic light emitting layer forming step of a method of fabricating an organic light emitting display device; and FIGS. 15 to 17 are a method of manufacturing an organic light emitting display device according to still another embodiment of the present invention. A cross-sectional view of an organic light-emitting layer forming step; FIGS. 18 to 21 are cross-sectional views showing an organic light-emitting layer forming step of a method of fabricating an organic light-emitting display device according to still another embodiment of the present invention; and FIGS. 22 to 24 are diagrams according to the present invention. Further, an organic light-emitting layer forming step of a method for manufacturing an organic light-emitting display device Sectional view; Figure 25 is a view showing a schematic configuration of an inkjet printing device used in a method of manufacturing an organic light-emitting display device according to an embodiment of the present invention; and Figure 26 is a view showing an inkjet printing device of Figure 25. FIG. 27 is a cross-sectional view showing an example of the ink jet printing apparatus of FIG. 26.
參考下文詳細描述的實施例具體實施態樣與伴隨的圖式，本發明之方面和特點以及用於完成本發明的方法將更易於了解。然而，本發明可以許多不同的形式來體現，且不應被解釋為限制於在此所述之具體實施態樣。相反，這些具體實施態樣係提供以使此揭露更為徹底及完整，且將充分傳達本發明之概念至本領域中具有通常知識者，而本發明將僅由後附申請專利範圍所定義。 The aspects and features of the present invention, as well as the methods for accomplishing the present invention, will be more readily understood by reference to the detailed description of the embodiments and accompanying drawings. However, the invention may be embodied in many different forms and should not be construed as being limited to the specific embodiments described herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and the invention will be <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt;
亦了解，當層被稱為在另一層或基材「上」時，其可以直接在另一層或基材上，或也可存在中介層。全文中，相同的參考數字表示相同的組件。 It is also understood that when a layer is referred to as being "on" another layer or substrate, it may be directly on the other layer or substrate, or an intervening layer may also be present. Throughout the text, the same reference numerals indicate the same components.
將了解，本文雖然可使用「第一、第二、第三...」等術語來描述不同的元件、組件、區域、層及/或區段，但是這些元件、組件、區域、層及/或區段不應受到這些術語的限制。該等術語僅用於區分一元件、組件、區域、層或區段與另一元件、組 件、區域、層或區段。因此，下文所討論之第一元件、組件、區域、層或區段可被稱為第二元件、組件、區域、層或區段，而不會偏離本發明的教示。 It will be understood that the terms "first, second, third, ..." may be used to describe different elements, components, regions, layers and/or sections, but such elements, components, regions, layers and/or Or sections should not be limited by these terms. These terms are only used to distinguish one element, component, region, layer or Pieces, regions, layers, or sections. Thus, a first element, component, region, layer or section hereinafter may be referred to as a second element, component, region, layer or section without departing from the teachings of the invention.
後文，將參考所附圖式描述本發明之具體實施態樣。 Hereinafter, specific embodiments of the present invention will be described with reference to the accompanying drawings.
第1圖係根據本發明之一具體實施態樣製造有機發光顯示器裝置之方法的流程圖；及第2圖係根據本發明之一具體實施態樣製造有機發光顯示器裝置之方法之有機發光層形成步驟的流程圖。第3至9圖係根據本發明之一具體實施態樣製造有機發光顯示器裝置之方法之製程步驟的剖視圖和平面圖。 1 is a flow chart of a method of fabricating an organic light emitting display device according to an embodiment of the present invention; and FIG. 2 is an organic light emitting layer formed by a method for fabricating an organic light emitting display device according to an embodiment of the present invention. Flow chart of the steps. 3 through 9 are cross-sectional and plan views showing process steps of a method of fabricating an organic light emitting display device in accordance with an embodiment of the present invention.
根據本發明之一具體實施態樣製造有機發光顯示器裝置之方法係包括第一電極形成步驟(S10)、像素定義膜形成步驟(S20)、有機發光層形成步驟(S30)、以及第二電極形成步驟(S40)。 A method of fabricating an organic light emitting display device according to an embodiment of the present invention includes a first electrode forming step (S10), a pixel defining film forming step (S20), an organic light emitting layer forming step (S30), and a second electrode formation Step (S40).
首先，參考第1和3圖，第一電極形成步驟(S10)係形成第一電極120於基材10上之步驟。第一電極120可用作提供電洞用之陽極電極、或提供電子用之陰極電極。 First, referring to FIGS. 1 and 3, the first electrode forming step (S10) is a step of forming the first electrode 120 on the substrate 10. The first electrode 120 can be used as an anode electrode for providing a hole or a cathode electrode for providing electrons.
基材110可包括絕緣基材。基材110(例如，絕緣基材)可由具有二氧化矽(SiO2)作為主要組分之透明玻璃材料而形成。在一些具體實施態樣中，基材110可由不透明材料或塑料材料製成。此外，基材110可以是可撓性的。 Substrate 110 can include an insulative substrate. The substrate 110 (for example, an insulating substrate) may be formed of a transparent glass material having ceria (SiO 2 ) as a main component. In some embodiments, the substrate 110 can be made of an opaque material or a plastic material. Additionally, substrate 110 can be flexible.
第一電極之材料層係形成在基材110上。在第一電極120係用作透明電極之情況中，該第一電極之材料層可包括銦錫氧 化物(ITO)、銦鋅氧化物(IZO)、氧化鋅(ZnO)、或氧化銦(In2O3)。另外，在第一電極120係用作反射電極之情況中，該第一電極之材料層可包括選自下列群組之至少一層(例如，經由形成選自下列群組之至少一層而形成)，包括銀(Ag)、鎂(Mg)、鋁(Al)、鉑(Pt)、鈀(Pd)、金(Au)、鎳(Ni)、釹(Nd)、銥(Ir)、鉻(Cr)、或其化合物，然後在其上形成選自包含下列群組之至少一層：ITO、IZO、ZnO、或In2O3。該第一電極之材料層可使用一方法，例如化學氣相沉積(CVD)或物理氣相沉積(PVD)而形成。 A material layer of the first electrode is formed on the substrate 110. In the case where the first electrode 120 is used as a transparent electrode, the material layer of the first electrode may include indium tin oxide (ITO), indium zinc oxide (IZO), zinc oxide (ZnO), or indium oxide (In 2 O 3 ). In addition, in the case where the first electrode 120 is used as a reflective electrode, the material layer of the first electrode may include at least one layer selected from the group consisting of, for example, formed by forming at least one layer selected from the group consisting of: Including silver (Ag), magnesium (Mg), aluminum (Al), platinum (Pt), palladium (Pd), gold (Au), nickel (Ni), niobium (Nd), antimony (Ir), chromium (Cr) Or a compound thereof, and then formed thereon to be at least one layer selected from the group consisting of ITO, IZO, ZnO, or In 2 O 3 . The material layer of the first electrode can be formed using a method such as chemical vapor deposition (CVD) or physical vapor deposition (PVD).
然後，該第一電極之材料層係根據各像素PX而圖案化，以形成第一電極120。該第一電極之材料層可透過，例如，光蝕刻製程而圖案化。 Then, the material layer of the first electrode is patterned according to each pixel PX to form the first electrode 120. The material layer of the first electrode is permeable, for example, by a photolithography process.
在本發明之另一具體實施態樣中，第一電極120可透過使用噴墨印刷方法或凹版印刷方法直接印刷而形成。在此種情況中，可省略光蝕刻製程。 In another embodiment of the present invention, the first electrode 120 can be formed by direct printing using an inkjet printing method or a gravure printing method. In this case, the photolithography process can be omitted.
參考第1和4圖，像素定義膜形成步驟(S20)係形成像素定義膜130於基材110(其上形成有第一電極120)上之步驟。更具體地，像素定義膜之材料層係首先形成在第3圖中所得材料之整個或全部表面上(例如，第一電極120和基材110之整個暴露的表面)。像素定義膜之材料層可包括絕緣材料，例如，至少一有機材料係選自包括下列之群組：苯并環丁烯(BCB)、聚醯亞胺(PI)、聚醯胺(PA)、丙烯酸系樹脂、及酚樹脂。另外，作為另一實例，像素定義膜之材料層可包括無機材料，例如氮化矽。像素定義膜之材料層可使用一方法，例如化學氣相沉積(CVD)或物理氣相 沉積(PVD)而形成。 Referring to FIGS. 1 and 4, the pixel defining film forming step (S20) is a step of forming the pixel defining film 130 on the substrate 110 on which the first electrode 120 is formed. More specifically, the material layer of the pixel defining film is first formed on all or all of the surface of the material obtained in FIG. 3 (for example, the entire exposed surface of the first electrode 120 and the substrate 110). The material layer of the pixel defining film may comprise an insulating material, for example, at least one organic material is selected from the group consisting of benzocyclobutene (BCB), polyimine (PI), polyamine (PA), Acrylic resin and phenol resin. Additionally, as another example, the material layer of the pixel defining film may comprise an inorganic material such as tantalum nitride. The material layer of the pixel defining film may use a method such as chemical vapor deposition (CVD) or physical vapor phase. Formed by deposition (PVD).
然後，具有一開口131的像素定義膜130係經由圖案化該像素定義膜之材料層，使該像素定義材料之材料層定義各像素PX。像素定義膜之材料層可經由，例如，光蝕刻製程而圖案化。參考第5圖，在各像素PX中，像素定義膜130之開口131可具有一矩形的平面形狀(例如，平面矩形形狀)。亦即，開口131的相鄰側璧所形成的角度可以是一直角。 Then, the pixel defining film 130 having an opening 131 defines a material layer of the pixel defining material by defining a material layer of the pixel defining material. The material layer of the pixel defining film can be patterned via, for example, a photolithography process. Referring to FIG. 5, in each of the pixels PX, the opening 131 of the pixel defining film 130 may have a rectangular planar shape (for example, a planar rectangular shape). That is, the angle formed by the adjacent side turns of the opening 131 may be a right angle.
在本發明之另一具體實施態樣中，像素定義膜130可透過使用噴墨印刷方法或凹版印刷方法直接印刷而形成。在此種情況中，可省略光蝕刻製程。 In another embodiment of the present invention, the pixel defining film 130 can be formed by direct printing using an inkjet printing method or a gravure printing method. In this case, the photolithography process can be omitted.
參考第1、2、和6至8圖，有機發光層形成步驟(30)包括形成一有機發光層140於第一電極120上，透過像素定義膜130之開口131而暴露第一電極120。有機發光層140可包括一電洞注入層，形成在第一電極120上、一電洞傳輸層，形成在該電洞注入層上、一有機層，形成在該電洞傳輸層上、一電子傳輸層，形成在該有機層上、以及一電子注入層，形成在該電子傳輸層上。從第一電極120透過電洞注入層和電洞傳輸層所提供的電洞與從第二電極150透過電子注入層和電子傳輸層所提供的電子係在有機層中彼此結合，以發射光。 Referring to FIGS. 1, 2, and 6 to 8, the organic light emitting layer forming step (30) includes forming an organic light emitting layer 140 on the first electrode 120, and exposing the first electrode 120 through the opening 131 of the pixel defining film 130. The organic light-emitting layer 140 may include a hole injection layer formed on the first electrode 120, a hole transport layer formed on the hole injection layer, and an organic layer formed on the hole transport layer and an electron. A transport layer, formed on the organic layer, and an electron injection layer are formed on the electron transport layer. The holes provided from the first electrode 120 through the hole injection layer and the hole transport layer and the electrons supplied from the second electrode 150 through the electron injection layer and the electron transport layer are combined with each other in the organic layer to emit light.
有機發光層形成步驟(S30)可包括一油墨非反應性溶劑排放步驟(S31)以及一有機發光油墨排放步驟(S32)。 The organic light-emitting layer forming step (S30) may include an ink non-reactive solvent discharging step (S31) and an organic light-emitting ink discharging step (S32).
如第6圖所示，油墨非反應性溶劑排放步驟(S31) 包括排放一油墨非反應性溶劑135a至或到第一電極120上。排放油墨非反應性溶劑135a可經由一噴墨印刷方法使用一油墨非反應性溶劑排放機構或部分10而進行，該機構係包括複數個第一噴嘴12於(例如安裝於)一第一頭部11之下方部分處(例如，第一頭部11底部)。此外，第一頭部11在一方向上移動時，可依各像素線進行排放油墨非反應性溶劑135a。第一頭部11可包括一熱噴墨印刷頭部或一壓電噴墨印刷頭部。在一些具體實施態樣中，經由或使用噴嘴印刷方法可進行排放油墨非反應性溶劑135a。 As shown in Fig. 6, the ink non-reactive solvent discharge step (S31) This includes discharging an ink non-reactive solvent 135a to or onto the first electrode 120. The discharge ink non-reactive solvent 135a can be performed via an inkjet printing process using an ink non-reactive solvent discharge mechanism or portion 10 that includes a plurality of first nozzles 12 (eg, mounted) on a first head At the lower portion of 11 (for example, the bottom of the first head 11). Further, when the first head portion 11 is moved in one direction, the ink non-reactive solvent 135a can be discharged in accordance with each pixel line. The first head 11 can include a thermal inkjet print head or a piezoelectric inkjet print head. In some embodiments, the ink non-reactive solvent 135a can be discharged via or using a nozzle printing method.
油墨非反應性溶劑135a係一溶劑，其係在排放有機發光油墨140a至或到第一電極120上期間改善有機發光油墨140a的潤濕性，係與或對有機發光油墨140a呈非反應性，且可用作(例如經選擇為)一透明溶劑。此外，油墨非反應性溶劑135a可具有等於或高於約70℃的沸點，使得在排放有機發光油墨140a至或到第一電極120之前或當時，油墨非反應性溶劑135a係留在第一電極120上，而不會被蒸發。如果油墨非反應性溶劑135a的沸點係等於或高於約70℃，也可避免在有機發光油墨140a被排放至或到第一電極120之前蒸發油墨非反應性溶劑135a。 The ink non-reactive solvent 135a is a solvent which improves the wettability of the organic light-emitting ink 140a during discharge of the organic light-emitting ink 140a to or onto the first electrode 120, and is non-reactive with or with the organic light-emitting ink 140a. It can also be used (for example as selected) as a transparent solvent. Further, the ink non-reactive solvent 135a may have a boiling point equal to or higher than about 70 ° C such that the ink non-reactive solvent 135a remains in the first electrode 120 before or at the time of discharging the organic light-emitting ink 140a to or to the first electrode 120. Up, not to be evaporated. If the boiling point of the ink non-reactive solvent 135a is equal to or higher than about 70 ° C, it is also possible to avoid evaporation of the ink non-reactive solvent 135a before the organic light-emitting ink 140a is discharged to or to the first electrode 120.
如上述，油墨非反應性溶劑135a，其係與或對有機發光油墨140a呈非反應性，係透明的，並具有等於或高於約70℃的沸點。油墨非反應性溶劑135a，例如，可包括選自下列群組之至少一者：醇、二丙二醇單甲基醚乙酸酯(DPMA)、乙酸乙酯、乙酸正丁酯、乙酸異丁酯、乙二醇單甲基醚乙酸酯、乙二醇正丁基醚乙酸酯、二乙二醇二甲基醚、二丙二醇單甲基醚乙酸酯、二 乙二醇甲基乙基醚、二乙二醇乙基醚乙酸酯、二丙二醇正丁基醚、三丙二醇正丙基醚、三丙二醇甲基醚、丙二醇甲基醚乙酸酯、丙二醇二乙酸酯、丙二醇單甲基醚、丙二醇單乙基醚乙酸酯、環己酮、3-甲氧基丙酸乙酯、3-乙氧基丙酸甲酯、3-乙氧基丙酸乙酯、乙二醇正丁基醚乙酸酯(EGBEA)、二丙二醇單甲基醚乙酸酯(DPMA)、丙二醇二乙酸酯(PGDA)、二乙二醇單乙基醚(DPGME)、或二乙二醇單乙基醚(卡必醇，Carbitol)。 As described above, the ink non-reactive solvent 135a, which is or is non-reactive with the organic light-emitting ink 140a, is transparent and has a boiling point equal to or higher than about 70 °C. The ink non-reactive solvent 135a, for example, may include at least one selected from the group consisting of alcohol, dipropylene glycol monomethyl ether acetate (DPMA), ethyl acetate, n-butyl acetate, isobutyl acetate, Ethylene glycol monomethyl ether acetate, ethylene glycol n-butyl ether acetate, diethylene glycol dimethyl ether, dipropylene glycol monomethyl ether acetate, two Ethylene glycol methyl ethyl ether, diethylene glycol ethyl ether acetate, dipropylene glycol n-butyl ether, tripropylene glycol n-propyl ether, tripropylene glycol methyl ether, propylene glycol methyl ether acetate, propylene glycol Acetate, propylene glycol monomethyl ether, propylene glycol monoethyl ether acetate, cyclohexanone, ethyl 3-methoxypropionate, methyl 3-ethoxypropionate, 3-ethoxypropionic acid Ethyl ester, ethylene glycol n-butyl ether acetate (EGBEA), dipropylene glycol monomethyl ether acetate (DPMA), propylene glycol diacetate (PGDA), diethylene glycol monoethyl ether (DPGME), Or diethylene glycol monoethyl ether (carbitol, Carbitol).
另外，當油墨非反應性溶劑135a係使用或透過第一噴嘴12排放時，油墨非反應性溶劑135a可具有約2厘泊(cP)至約4厘泊(cP)範圍的黏度。在上述的黏度範圍中，油墨非反應性溶劑135a可在第一噴嘴12中或透過第一噴嘴12流動(例如，平滑地流動)。 In addition, the ink non-reactive solvent 135a may have a viscosity ranging from about 2 centipoise (cP) to about 4 centipoise (cP) when the ink non-reactive solvent 135a is used or discharged through the first nozzle 12. In the above viscosity range, the ink non-reactive solvent 135a may flow in the first nozzle 12 or through the first nozzle 12 (for example, smoothly flow).
如第7圖所示，有機發光油墨排放步驟(S32)包括排放有機發光油墨140a至或到油墨非反應性溶劑部分135，油墨非反應性溶劑部分135係油墨非反應性溶劑135a被排放至或到第一電極120時而形成的。 As shown in Fig. 7, the organic light-emitting ink discharging step (S32) includes discharging the organic light-emitting ink 140a to or to the ink non-reactive solvent portion 135, and the ink non-reactive solvent portion 135 is discharging the ink non-reactive solvent 135a to or Formed to the first electrode 120.
即使精細殘餘的物質在形成像素定義膜130之後係留在第一電極120上，有機發光油墨140a係排放至或到形成在第一電極120上的油墨非反應性溶劑部分135上，且因此，防止該精細殘餘的物質限制(例如，直接限制)有機發光油墨140a的潤濕性。 Even if the fine residual substance remains on the first electrode 120 after forming the pixel defining film 130, the organic light-emitting ink 140a is discharged onto or onto the ink non-reactive solvent portion 135 formed on the first electrode 120, and thus, prevents This fine residual material limits (e.g., directly limits) the wettability of the organic light-emitting ink 140a.
有機發光油墨140a可包括一溶劑及固體物。該溶劑可相同於或可不同於油墨非反應性溶劑135a。該固體物可包括(例如，構成)電洞注入層、電洞傳輸層、有機層、電子傳輸層、以 及電子注入層之任一者的材料，該等層係堆疊(或互相堆疊)於第一電極120上。例如，如果該固體物係一電洞注入層之材料，則它可以是4,4’,4”-叁(3-甲基苯基苯基胺基)三苯基胺(MTDATA)、銅酞青(CuPc)、或聚(3,4-乙烯二氧噻吩)/(聚苯乙烯磺酸酯)(PEDOT/PSS)，但其並不限於此。 The organic light-emitting ink 140a may include a solvent and a solid. The solvent may be the same as or different from the ink non-reactive solvent 135a. The solid may include, for example, a hole injection layer, a hole transport layer, an organic layer, an electron transport layer, And materials of any of the electron injecting layers stacked on each other (or stacked on each other) on the first electrode 120. For example, if the solid is a material of a hole injection layer, it may be 4,4',4"-叁(3-methylphenylphenylamino)triphenylamine (MTDATA), copper ruthenium. Cyan (CuPc), or poly(3,4-ethylenedioxythiophene)/(polystyrene sulfonate) (PEDOT/PSS), but it is not limited thereto.
有機發光油墨140a係包括溶劑，且如果其被排放至或到油墨非反應性溶劑部分135上，則它係與呈液態之油墨非反應性溶劑部分135混合。透過此混合，可改善在像素定義膜130之開口131中之有機發光油墨140a的潤濕性。 The organic light-emitting ink 140a includes a solvent, and if it is discharged onto or onto the ink non-reactive solvent portion 135, it is mixed with the liquid non-reactive solvent portion 135. By this mixing, the wettability of the organic light-emitting ink 140a in the opening 131 of the pixel defining film 130 can be improved.
經由或使用噴墨印刷方法使用有機發光油墨排放機構或部分20可進行排放有機發光油墨140a，該機構係包括複數個第二噴嘴22於(例如安裝於)一第二頭部21之下方部分處(例如，第二頭部21底部)。此外，第二頭部21在一方向上(例如，一個方向)移動時，可依各像素線進行排放有機發光油墨140a。第二頭部21可以是一熱噴墨印刷頭部或一壓電噴墨印刷頭部。在一些具體實施態樣中，經由或使用噴嘴印刷方法可進行排放有機發光油墨140a。 The organic light-emitting ink 140a may be discharged using an organic light-emitting ink discharge mechanism or portion 20 via or using an inkjet printing method, the mechanism including a plurality of second nozzles 22 at (eg, mounted to) a lower portion of a second head 21 (for example, the bottom of the second head 21). Further, when the second head portion 21 is moved in one direction (for example, one direction), the organic light-emitting ink 140a can be discharged in accordance with each pixel line. The second head 21 can be a thermal inkjet print head or a piezoelectric inkjet print head. In some embodiments, the organic light-emitting ink 140a can be discharged via or using a nozzle printing method.
在油墨非反應性溶劑135a之排放完成之後，在例如約二至約五秒的時間(例如，預定的時間)後，可進行排放有機發光油墨140a在油墨非反應性溶劑部分135上。在該時間範圍中，可以防止油墨非反應性溶劑部分135(其係透過或經由排放油墨非反應性溶劑135a在第一電極120上而形成的)變乾燥或蒸發。然而，本發明並不限於此。基於油墨非反應性溶劑部分135從第一電 極120經乾燥或蒸發之前的一段時間，排放油墨非反應性溶劑135a與排放有機發光油墨140a之間的時間(例如，預定的時間)可藉由實驗而確定(例如，計算)。 After the discharge of the ink non-reactive solvent 135a is completed, the organic light-emitting ink 140a may be discharged on the ink non-reactive solvent portion 135 after, for example, about two to about five seconds (for example, a predetermined time). In this time range, it is possible to prevent the ink non-reactive solvent portion 135 (which is formed by or through the discharge of the ink non-reactive solvent 135a on the first electrode 120) from drying or evaporating. However, the invention is not limited thereto. Based on the ink non-reactive solvent portion 135 from the first electricity The time between discharge of the ink non-reactive solvent 135a and discharge of the organic light-emitting ink 140a (for example, a predetermined time) may be determined (for example, calculated) by the experiment for a period of time before the electrode 120 is dried or evaporated.
在有機發光油墨140a排放時間經過(例如，通過)當時或之後，油墨非反應性溶劑排放機構10係在排放油墨非反應性溶劑135a至或到第一電極120上之後移動至相鄰像素PX，且有機發光油墨排放機構20係移動至經由油墨非反應性溶劑135a所形成的油墨非反應性溶劑部分135上方(例如，至油墨非反應性溶劑部分135之上側)。此外，有機發光油墨排放機構20係排放有機發光油墨140a至或到油墨非反應性溶劑部分135上。 The ink non-reactive solvent discharge mechanism 10 moves to the adjacent pixel PX after discharging the ink non-reactive solvent 135a to or onto the first electrode 120, at or after the discharge time of the organic light-emitting ink 140a. The organic light-emitting ink discharge mechanism 20 is moved over the ink non-reactive solvent portion 135 formed via the ink non-reactive solvent 135a (for example, to the upper side of the ink non-reactive solvent portion 135). Further, the organic light-emitting ink discharge mechanism 20 discharges the organic light-emitting ink 140a to or onto the ink non-reactive solvent portion 135.
油墨非反應性溶劑排放機構10之移動和有機發光油墨排放機構20之移動可在一個方向上進行及/或可獨立控制。在一些具體實施態樣中，當油墨非反應性溶劑排放機構10之第一頭部11和有機發光油墨排放機構20之第二頭部21係耦合至一個移動裝置時，可進行(例如，同時或同步地進行)油墨非反應性溶劑排放機構10之移動和有機發光油墨排放機構20之移動。 The movement of the ink non-reactive solvent discharge mechanism 10 and the movement of the organic light-emitting ink discharge mechanism 20 can be performed in one direction and/or independently. In some embodiments, when the first head 11 of the ink non-reactive solvent discharge mechanism 10 and the second head 21 of the organic light-emitting ink discharge mechanism 20 are coupled to a mobile device, it can be performed (for example, simultaneously The movement of the ink non-reactive solvent discharge mechanism 10 and the movement of the organic light-emitting ink discharge mechanism 20 are performed either synchronously.
透過有機發光油墨排放機構20之移動，有機發光油墨140a係排放至或到所有像素PX的油墨非反應性溶劑部分135上，以形成有機發光層140，如第8圖所示。油墨非反應性溶劑部分135之溶劑和有機發光油墨140a之溶劑，其係由於有機發光油墨140a之排放而混合，係全部蒸發(例如，完全蒸發)，且留下有機發光油墨140a之固體物作為有機發光層140。 The organic light-emitting ink 140a is discharged to or onto the ink non-reactive solvent portion 135 of all the pixels PX by the movement of the organic light-emitting ink discharge mechanism 20 to form the organic light-emitting layer 140 as shown in FIG. The solvent of the ink non-reactive solvent portion 135 and the solvent of the organic light-emitting ink 140a are mixed due to the discharge of the organic light-emitting ink 140a, all are evaporated (for example, completely evaporated), and the solid matter of the organic light-emitting ink 140a is left as Organic light emitting layer 140.
參考第1和9圖，第二電極形成步驟(S40)係形成第 二電極150於有機發光層140上之步驟。第二電極150可用作提供電子用之陰極電極，或提供電洞用之陽極電極。 Referring to Figures 1 and 9, the second electrode forming step (S40) is formed The step of the two electrodes 150 on the organic light-emitting layer 140. The second electrode 150 can be used as a cathode electrode for supplying electrons or an anode electrode for providing a hole.
更具體地，第二電極形成步驟(S40)包括經由形成第二電極之材料層於有機發光層140和像素定義膜130二者之整個表面(例如，整個暴露的表面)上而形成第二電極150。在第二電極150係用作(例如，經形成為)透明電極之情況中，該第二電極之材料層可包括銦錫氧化物(ITO)、銦鋅氧化物(IZO)、氧化鋅(ZnO)、或氧化銦(In2O3)。另外，在第二電極150係用作(例如，經形成為)反射電極之情況中，該第二電極之材料層可包括選自下列群組之至少一層(例如，經由形成選自下列群組之至少一層而形成)：銀(Ag)、鎂(Mg)、鋁(Al)、鉑(Pt)、鈀(Pd)、金(Au)、鎳(Ni)、釹(Nd)、銥(Ir)、鉻(Cr)、或其化合物，然後在其上形成選自包含下列群組之至少一層：ITO、IZO、ZnO、或In2O3。該第二電極之材料層可使用一方法，例如化學氣相沉積(CVD)或物理氣相沉積(PVD)而形成。 More specifically, the second electrode forming step (S40) includes forming the second electrode via the material layer forming the second electrode on the entire surface (for example, the entire exposed surface) of both the organic light emitting layer 140 and the pixel defining film 130 150. In the case where the second electrode 150 is used as (for example, formed as) a transparent electrode, the material layer of the second electrode may include indium tin oxide (ITO), indium zinc oxide (IZO), and zinc oxide (ZnO). ), or indium oxide (In 2 O 3 ). Additionally, where the second electrode 150 is used (eg, formed as) a reflective electrode, the material layer of the second electrode can include at least one layer selected from the group consisting of: Formed from at least one layer): silver (Ag), magnesium (Mg), aluminum (Al), platinum (Pt), palladium (Pd), gold (Au), nickel (Ni), niobium (Nd), niobium (Ir And chromium (Cr), or a compound thereof, and then formed thereon to be at least one layer selected from the group consisting of ITO, IZO, ZnO, or In 2 O 3 . The material layer of the second electrode can be formed using a method such as chemical vapor deposition (CVD) or physical vapor deposition (PVD).
在一些具體實施態樣中，經由圖案化第二電極之材料層可形成第二電極150，以具有不同圖案。 In some embodiments, the second electrode 150 can be formed via a layer of material that patterns the second electrode to have a different pattern.
雖然未圖示，根據本發明之一具體實施態樣之製造有機發光顯示器裝置之方法，可更包括放置(例如，排列)一密封基材於第二電極150之上方部分上(例如，於第二電極150之頂部)之步驟。另外，根據本發明之一具體實施態樣之製造有機發光顯示器裝置之方法，可更包括放置(例如，排列)間隔件於第二電極150與該密封基材之間之步驟。 Although not illustrated, a method of fabricating an organic light emitting display device according to an embodiment of the present invention may further include placing (eg, arranging) a sealing substrate on an upper portion of the second electrode 150 (eg, The step of the top of the two electrodes 150). In addition, a method of fabricating an organic light emitting display device according to an embodiment of the present invention may further include the step of placing (eg, arranging) a spacer between the second electrode 150 and the sealing substrate.
如上述，根據本發明之一具體實施態樣之製造有機發光顯示器裝置之方法，有機發光油墨140a係排放至或到油墨非反應性溶劑部分135(其係透過排放油墨非反應性溶劑135a所形成的)上，以形成有機發光層140。亦即，即使精細殘餘的物質在形成像素定義膜130之製程之後係留在第一電極120上，在其上形成油墨非反應性溶劑部分135之後仍係排放有機發光油墨140a，且因此，防止該精細殘餘的物質限制(例如，直接限制)有機發光油墨140a的潤濕性。因此，可改善有機發光油墨140a的潤濕性。 As described above, according to a method of manufacturing an organic light emitting display device according to an embodiment of the present invention, the organic light emitting ink 140a is discharged to or into the ink non-reactive solvent portion 135 which is formed by discharging the ink non-reactive solvent 135a. Up to form the organic light emitting layer 140. That is, even if the fine residual substance remains on the first electrode 120 after the process of forming the pixel defining film 130, the organic light-emitting ink 140a is discharged after the ink non-reactive solvent portion 135 is formed thereon, and thus, the prevention is prevented. The fine residual material limits (eg, directly limits) the wettability of the organic light-emitting ink 140a. Therefore, the wettability of the organic light-emitting ink 140a can be improved.
如果改善經排放的有機發光油墨140a的潤濕性，則有機發光油墨140a的厚度在開口131中可經調整(例如，經均勻地調整)。因此，有機發光層140可形成在具有(例如，具)一實質上均勻厚度的第一電極120上，且因此，該有機發光顯示器裝置的顯示品質可透過各自有機發光層140之實質上均勻的光發射而改善。 If the wettability of the discharged organic light-emitting ink 140a is improved, the thickness of the organic light-emitting ink 140a may be adjusted (for example, uniformly adjusted) in the opening 131. Therefore, the organic light emitting layer 140 may be formed on the first electrode 120 having a substantially uniform thickness (for example), and thus, the display quality of the organic light emitting display device may be substantially uniform through the respective organic light emitting layers 140. Improved by light emission.
接著，將描述根據本發明之另一具體實施態樣製造有機發光顯示器裝置之方法。 Next, a method of manufacturing an organic light emitting display device according to another embodiment of the present invention will be described.
與根據如上述之本發明之一具體實施態樣之製造有機發光顯示器裝置之方法相比，該根據本發明之另一具體實施態樣製造有機發光顯示器裝置之方法包括除像素定義膜形成步驟以外之相似步驟。因此，在描述該根據本發明之另一具體實施態樣製造有機發光顯示器裝置之方法中，只有像素定義膜形成步驟(例如，形成像素定義膜230之步驟)和有機發光層形成步驟係不同的。因此，將只詳細說明該像素定義膜形成步驟和該有機發光層 形成步驟。 In contrast to a method of fabricating an organic light emitting display device according to another embodiment of the present invention as described above, the method of fabricating an organic light emitting display device according to another embodiment of the present invention includes, in addition to the pixel defining film forming step Similar steps. Therefore, in describing the method of fabricating an organic light emitting display device according to another embodiment of the present invention, only the pixel defining film forming step (for example, the step of forming the pixel defining film 230) and the organic light emitting layer forming step are different. . Therefore, only the pixel defining film forming step and the organic light emitting layer will be described in detail. Forming steps.
第10至14圖係根據本發明之另一具體實施態樣製造有機發光顯示器裝置之方法之像素定義膜形成步驟和有機發光層形成步驟的剖視圖和平面圖。 10 to 14 are a cross-sectional view and a plan view showing a pixel defining film forming step and an organic light emitting layer forming step of a method of manufacturing an organic light emitting display device according to another embodiment of the present invention.
參考第10和11圖，在該根據本發明之另一具體實施態樣製造有機發光顯示器裝置之方法中的像素定義膜形成步驟係相似於如上述參考第4圖的像素定義膜形成步驟(S20)。然而，在形成像素定義膜230於基材110上(該基材110上係形成第一電極120)時，如第10圖所示，係形成像素定義膜230之一開口231，使開口231的平面形狀在各像素PX內係具有圓角，如第11圖所示。因此，經排放的有機發光油墨140a可良好地展開(例如，均勻地展開)至該開口231的邊緣，並因此可改善有機發光油墨140a在開口231中的填充(例如，填充特性)。 Referring to FIGS. 10 and 11, the pixel defining film forming step in the method of fabricating an organic light emitting display device according to another embodiment of the present invention is similar to the pixel defining film forming step (S20) as described above with reference to FIG. ). However, when the pixel defining film 230 is formed on the substrate 110 (the first electrode 120 is formed on the substrate 110), as shown in FIG. 10, one opening 231 of the pixel defining film 230 is formed to make the opening 231 The planar shape has rounded corners in each pixel PX as shown in FIG. Therefore, the discharged organic light-emitting ink 140a can be well developed (for example, uniformly spread) to the edge of the opening 231, and thus the filling (for example, filling characteristics) of the organic light-emitting ink 140a in the opening 231 can be improved.
如第10圖所示像素定義膜形成步驟係包括形成像素定義膜之材料層在第3圖中所得的材料(例如，基材110和第一電極120)之整個表面(例如，整個暴露的表面)上。該像素定義膜之材料層可使用一方法，例如CVD或PVD而形成。因為上文已描述該像素定義膜之材料層的例示性材料，將省略其重複說明。 The pixel defining film forming step as shown in FIG. 10 includes the entire surface of the material (for example, the substrate 110 and the first electrode 120) obtained by forming the material layer of the pixel defining film in FIG. 3 (for example, the entire exposed surface) )on. The material layer of the pixel defining film can be formed using a method such as CVD or PVD. Since the exemplary material of the material layer of the pixel defining film has been described above, the repeated description thereof will be omitted.
然後，具有開口231之像素定義膜230係透過或經由圖案化該像素定義膜之材料層而形成，使得該材料層定義各像素PX(例如，沿各像素PX之周邊延伸)。像素定義膜之材料層可，例如，透過或使用光蝕刻製程而圖案化。用於圖案化該像素定義膜之材料層之光罩的開口可經形成為具有圓角。 Then, the pixel defining film 230 having the opening 231 is formed by or through a layer of material that patterns the pixel defining film such that the material layer defines each pixel PX (eg, extending along the periphery of each pixel PX). The material layer of the pixel defining film can be patterned, for example, by or using a photolithography process. The opening of the reticle for patterning the material layer of the pixel defining film may be formed to have rounded corners.
在本發明之另一具體實施態樣中，像素定義膜230可透過使用噴墨印刷方法或凹版印刷方法直接印刷而形成。在此種情況中，可省略光蝕刻製程。 In another embodiment of the present invention, the pixel defining film 230 can be formed by direct printing using an inkjet printing method or a gravure printing method. In this case, the photolithography process can be omitted.
參考第12至14圖，有機發光層形成步驟係包括形成有機發光層140於第一電極120上，經由像素定義膜230之開口231而暴露第一電極120。有機發光層形成步驟可包括油墨非反應性溶劑排放步驟和有機發光油墨排放步驟。 Referring to FIGS. 12 to 14, the organic light emitting layer forming step includes forming the organic light emitting layer 140 on the first electrode 120, exposing the first electrode 120 via the opening 231 of the pixel defining film 230. The organic light emitting layer forming step may include an ink non-reactive solvent discharging step and an organic light emitting ink discharging step.
如第12圖所示，油墨非反應性溶劑排放步驟係包括排放油墨非反應性溶劑135a至或到第一電極120上。排放油墨非反應性溶劑135a可使用如第6圖所示的方法而進行。 As shown in Fig. 12, the ink non-reactive solvent discharging step includes discharging the ink non-reactive solvent 135a to or onto the first electrode 120. The discharge ink non-reactive solvent 135a can be carried out using the method as shown in Fig. 6.
如第13圖所示，有機發光油墨排放步驟係包括排放有機發光油墨140a至或到油墨非反應性溶劑部分135上，該部分係透過排放油墨非反應性溶劑135a至或到第一電極120而形成的。排放有機發光油墨140a可使用如第7圖所示的方法而進行。透過有機發光油墨排放機構20的移動，有機發光油墨140a係排放至或到所有像素PX的油墨非反應性溶劑部分135上，以形成有機發光層140，如第14圖所示。油墨非反應性溶劑部分135之溶劑和有機發光油墨140a之溶劑，其係由於有機發光油墨140a之排放而混合，係透過乾燥步驟(例如，定時的乾燥步驟)等而全部蒸發(例如，完全蒸發)，且留下有機發光油墨140a之固體物作為有機發光層140。 As shown in FIG. 13, the organic light-emitting ink discharging step includes discharging the organic light-emitting ink 140a to or onto the ink non-reactive solvent portion 135, which passes through the discharged ink non-reactive solvent 135a to or to the first electrode 120. Forming. The discharge of the organic light-emitting ink 140a can be carried out using the method as shown in FIG. The organic light-emitting ink 140a is discharged to or onto the ink non-reactive solvent portion 135 of all the pixels PX by the movement of the organic light-emitting ink discharge mechanism 20 to form the organic light-emitting layer 140 as shown in FIG. The solvent of the ink non-reactive solvent portion 135 and the solvent of the organic light-emitting ink 140a are mixed by the discharge of the organic light-emitting ink 140a, and are all evaporated (for example, completely evaporated) through a drying step (for example, a timed drying step) or the like. And leaving a solid of the organic light-emitting ink 140a as the organic light-emitting layer 140.
如上述，根據本發明之另一具體實施態樣製造有機發光顯示器裝置之方法，因為形成像素定義膜230之開口231，使 開口231的平面形狀具有圓角，因此經排放的有機發光油墨140a可展開(例如，良好且完全地展開)至開口231的邊緣(例如，可整個填充)，並因此可改善有機發光油墨140a在開口231中的填充(例如，填充特性)。 As described above, a method of fabricating an organic light emitting display device according to another embodiment of the present invention, because the opening 231 of the pixel defining film 230 is formed, The planar shape of the opening 231 has rounded corners, so that the discharged organic light-emitting ink 140a can be unfolded (eg, well and completely unfolded) to the edge of the opening 231 (eg, can be entirely filled), and thus the organic light-emitting ink 140a can be improved The fill (eg, fill characteristics) in the opening 231.
接著，將描述根據本發明之又一具體實施態樣製造有機發光顯示器裝置之方法。 Next, a method of manufacturing an organic light emitting display device according to still another embodiment of the present invention will be described.
與根據如上述之本發明之一具體實施態樣之製造有機發光顯示器裝置之方法相比，該根據本發明之又一具體實施態樣製造有機發光顯示器裝置之方法具有除有機發光層形成步驟以外之相似步驟。因此，在描述該根據本發明之又一具體實施態樣製造有機發光顯示器裝置之方法中，將只說明有機發光層形成步驟。 The method of fabricating an organic light emitting display device according to still another embodiment of the present invention has a step other than the organic light emitting layer forming step, in accordance with a method of fabricating an organic light emitting display device according to an embodiment of the present invention as described above. Similar steps. Therefore, in describing a method of manufacturing an organic light emitting display device according to still another embodiment of the present invention, only the organic light emitting layer forming step will be described.
第15至17圖係根據本發明之又一具體實施態樣製造有機發光顯示器裝置之方法之有機發光層形成步驟的剖視圖。 15 to 17 are cross-sectional views showing an organic light-emitting layer forming step of a method of manufacturing an organic light-emitting display device according to still another embodiment of the present invention.
參考第15至17圖，有機發光層形成步驟係包括形成有機發光層140於第一電極120上，經由像素定義膜130之開口131而暴露第一電極120。有機發光層形成步驟可包括油墨非反應性溶劑排放步驟和有機發光油墨排放步驟。 Referring to FIGS. 15-17, the organic light emitting layer forming step includes forming the organic light emitting layer 140 on the first electrode 120, exposing the first electrode 120 via the opening 131 of the pixel defining film 130. The organic light emitting layer forming step may include an ink non-reactive solvent discharging step and an organic light emitting ink discharging step.
如第15圖所示，油墨非反應性溶劑排放步驟係包括排放油墨非反應性溶劑135a至或到第一電極120上。經由油墨非反應性溶劑排放機構或部分10A對所有像素PX進行(例如，同時或同步進行)排放油墨非反應性溶劑135a，此與第6圖中所示的具體 實施態樣不同，在第6圖具體實施態樣中係依油墨非反應性溶劑排放機構10相對於各像素線移動，對各像素線進行排放油墨非反應性溶劑135a。因此，油墨非反應性溶劑排放機構10A可減少該油墨非反應性溶劑排放步驟的處理時間。油墨非反應性溶劑排放機構10A可具有複數個第一噴嘴12A，其數量係對應於像素PX之數量，其上第一頭部11A的下方部分(例如，於第一頭部11A的底部處)具有一尺寸相似於或實質上相似於基材110的尺寸。 As shown in Fig. 15, the ink non-reactive solvent discharging step includes discharging the ink non-reactive solvent 135a to or onto the first electrode 120. The ink non-reactive solvent 135a is discharged (for example, simultaneously or simultaneously) to all of the pixels PX via the ink non-reactive solvent discharge mechanism or portion 10A, which is specific to that shown in FIG. Different from the embodiment, in the specific embodiment of Fig. 6, the ink non-reactive solvent discharge mechanism 10 is moved relative to each pixel line, and the ink non-reactive solvent 135a is discharged to each pixel line. Therefore, the ink non-reactive solvent discharge mechanism 10A can reduce the processing time of the ink non-reactive solvent discharge step. The ink non-reactive solvent discharge mechanism 10A may have a plurality of first nozzles 12A, the number of which corresponds to the number of pixels PX on which the lower portion of the first head portion 11A (for example, at the bottom of the first head portion 11A) There is a size that is similar or substantially similar to the size of the substrate 110.
如第16圖所示，有機發光油墨排放步驟係包括排放有機發光油墨140a至或到油墨非反應性溶劑部分135上，該部分係透過排放油墨非反應性溶劑135a至或到第一電極120上而形成的。經由有機發光油墨排放機構20A對所有像素PX進行(例如，同時或同步進行)排放有機發光油墨140a，此與第7圖中所示的具體實施態樣不同，第7圖具體實施態樣係依該有機發光油墨排放機構20相對於各像素線移動，對各像素線進行排放該有機發光油墨140a。因此，有機發光油墨排放機構或部分20A可減少該有機發光油墨排放步驟的處理時間。有機發光油墨排放機構20A可具有複數個第二噴嘴22A，其數量係對應於像素PX之數量，其上第二頭部21A的下方部分(例如，於第二頭部21A的底部處)具有一尺寸相似於或實質上相似於基材110的尺寸。 As shown in FIG. 16, the organic light-emitting ink discharging step includes discharging the organic light-emitting ink 140a to or onto the ink non-reactive solvent portion 135, which is transmitted through the discharged ink non-reactive solvent 135a to or onto the first electrode 120. And formed. The organic light-emitting ink 140a is discharged (for example, simultaneously or simultaneously) to all the pixels PX via the organic light-emitting ink discharge mechanism 20A, which is different from the specific embodiment shown in FIG. 7, and the specific embodiment of FIG. 7 is The organic light-emitting ink discharge mechanism 20 moves with respect to each pixel line, and discharges the organic light-emitting ink 140a for each pixel line. Therefore, the organic light-emitting ink discharge mechanism or portion 20A can reduce the processing time of the organic light-emitting ink discharging step. The organic light-emitting ink discharge mechanism 20A may have a plurality of second nozzles 22A, the number of which corresponds to the number of pixels PX, and the lower portion of the second head portion 21A (for example, at the bottom of the second head portion 21A) has one The dimensions are similar or substantially similar to the dimensions of the substrate 110.
透過有機發光油墨排放機構20A，有機發光油墨140a係排放至或到所有像素PX的油墨非反應性溶劑部分135上，以形成有機發光層140，如第17圖所示。油墨非反應性溶劑部分135之溶劑和有機發光油墨140a之溶劑，其係由於有機發光油墨140a之排 放而混合，係透過乾燥步驟(例如，定時的乾燥步驟)等而全部蒸發(例如，完全蒸發)，且留下有機發光油墨140a之固體物作為有機發光層140。 The organic light-emitting ink 140a is discharged to or onto the ink non-reactive solvent portion 135 of all the pixels PX through the organic light-emitting ink discharge mechanism 20A to form the organic light-emitting layer 140 as shown in FIG. The solvent of the ink non-reactive solvent portion 135 and the solvent of the organic light-emitting ink 140a are due to the row of the organic light-emitting ink 140a The mixing is carried out by evaporation (for example, complete evaporation) through a drying step (for example, a timed drying step) or the like, and the solid matter of the organic light-emitting ink 140a is left as the organic light-emitting layer 140.
如上述，根據本發明之又一具體實施態樣製造有機發光顯示器裝置之方法，因為油墨非反應性溶劑135a係使用油墨非反應性溶劑排放機構10A排放(例如，同時或同步地排放)至或到所有像素PX上，而有機發光油墨140a係使用有機發光油墨排放機構20A排放(例如，同時或同步地排放)至或到所有像素PX上，可減少製造處理時間。 As described above, a method of manufacturing an organic light emitting display device according to still another embodiment of the present invention, because the ink non-reactive solvent 135a is discharged (for example, simultaneously or simultaneously) to or using the ink non-reactive solvent discharge mechanism 10A. Up to all of the pixels PX, and the organic light-emitting ink 140a is discharged (for example, simultaneously or simultaneously) to or onto all of the pixels PX using the organic light-emitting ink discharge mechanism 20A, the manufacturing processing time can be reduced.
接著，將描述根據本發明之再一具體實施態樣製造有機發光顯示器裝置之方法。 Next, a method of manufacturing an organic light emitting display device according to still another embodiment of the present invention will be described.
與根據如上述之本發明之一具體實施態樣之製造有機發光顯示器裝置之方法相比，該根據本發明之再一具體實施態樣製造有機發光顯示器裝置之方法具有除有機發光層形成步驟以外之相似步驟。因此，在描述該根據本發明之再一具體實施態樣製造有機發光顯示器裝置之方法中，將只說明有機發光層形成步驟。 The method for fabricating an organic light emitting display device according to still another embodiment of the present invention has a step other than the organic light emitting layer forming step, as compared with the method for fabricating an organic light emitting display device according to an embodiment of the present invention as described above. Similar steps. Therefore, in describing a method of manufacturing an organic light emitting display device according to still another embodiment of the present invention, only the organic light emitting layer forming step will be described.
第18至21圖係根據本發明之再一具體實施態樣製造有機發光顯示器裝置之方法之有機發光層形成步驟的剖視圖。 18 to 21 are cross-sectional views showing a step of forming an organic light-emitting layer of a method of manufacturing an organic light-emitting display device according to still another embodiment of the present invention.
參考第18至21圖，有機發光層形成步驟係包括形成有機發光層140於第一電極120上，經由像素定義膜130之開口131而暴露第一電極120(例如，而暴露的一區域)。有機發光層形成 步驟可包括油墨非反應性溶劑排放步驟和有機發光油墨排放步驟。 Referring to FIGS. 18-21, the organic light emitting layer forming step includes forming the organic light emitting layer 140 on the first electrode 120, exposing the first electrode 120 (for example, an exposed region) via the opening 131 of the pixel defining film 130. Organic light-emitting layer formation The step may include an ink non-reactive solvent discharging step and an organic light emitting ink discharging step.
如第18圖所示，油墨非反應性溶劑排放步驟係包括排放油墨非反應性溶劑135a至第二電極120和像素定義膜130二者之整個或全部表面(例如，整個暴露的表面)上。排放油墨非反應性溶劑135a可使用噴塗方法使用噴霧裝置30而進行。透過排放油墨非反應性溶劑135，如第19圖所示，油墨非反應性溶劑部分135可覆蓋或實質上覆蓋第一電極120及像素定義膜130，且可經形成為具有一實質上恆定的厚度，獲自(例如，測量自)像素定義膜130之上表面。在一些具體實施態樣中，形成油墨非反應性溶劑部分135可使用浸漬方法而進行，其中基材110(其上形成有第一電極120和像素定義膜130)係浸漬到油墨非反應性溶劑135a中。 As shown in FIG. 18, the ink non-reactive solvent discharging step includes discharging the ink non-reactive solvent 135a to all or all of the surfaces (for example, the entire exposed surface) of the second electrode 120 and the pixel defining film 130. The discharge ink non-reactive solvent 135a can be carried out using a spray device 30 using a spray method. By discharging the ink non-reactive solvent 135, as shown in FIG. 19, the ink non-reactive solvent portion 135 may cover or substantially cover the first electrode 120 and the pixel defining film 130, and may be formed to have a substantially constant The thickness is obtained from (eg, measured from) the upper surface of the pixel definition film 130. In some embodiments, forming the ink non-reactive solvent portion 135 can be performed using an impregnation method in which the substrate 110 on which the first electrode 120 and the pixel defining film 130 are formed is impregnated into the ink non-reactive solvent. In 135a.
如第20圖所示，有機發光油墨排放步驟係包括排放有機發光油墨140a至或到油墨非反應性溶劑部分135上，該部分係形成在第一電極120上。油墨非反應性溶劑部分135(其具有一大的厚度獲自(例如，測量自)第一電極120，如第19圖中所示)係在幾秒內乾燥(例如，蒸發)，且因此可留下具有薄厚度的油墨非反應性溶劑部分135在第一電極120上。排放有機發光油墨140a可使用如第7圖中所示的方法而進行。透過有機發光油墨排放機構20的移動，有機發光油墨140a係排放至或到所有像素PX的油墨非反應性溶劑部分135上，以形成有機發光層140，如第21圖所示。油墨非反應性溶劑部分135之溶劑和有機發光油墨140a之溶劑，其係由於有機發光油墨140a之排放而混合，係透過乾燥步驟(例如， 定時的乾燥步驟)等而全部蒸發(例如，完全蒸發)，且留下有機發光油墨140a之固體物作為有機發光層140。 As shown in Fig. 20, the organic light-emitting ink discharging step includes discharging the organic light-emitting ink 140a to or onto the ink non-reactive solvent portion 135 which is formed on the first electrode 120. An ink non-reactive solvent portion 135 (having a large thickness obtained from (eg, measured from) the first electrode 120, as shown in FIG. 19) is dried (eg, evaporated) in a few seconds, and thus An ink non-reactive solvent portion 135 having a thin thickness is left on the first electrode 120. The discharge of the organic light-emitting ink 140a can be performed using the method as shown in FIG. Through the movement of the organic light-emitting ink discharge mechanism 20, the organic light-emitting ink 140a is discharged onto or onto the ink non-reactive solvent portion 135 of all the pixels PX to form the organic light-emitting layer 140 as shown in FIG. The solvent of the ink non-reactive solvent portion 135 and the solvent of the organic light-emitting ink 140a are mixed by the discharge of the organic light-emitting ink 140a, and are passed through a drying step (for example, The timed drying step and the like are all evaporated (for example, completely evaporated), and the solid matter of the organic light-emitting ink 140a is left as the organic light-emitting layer 140.
如上述，根據本發明之再一具體實施態樣製造有機發光顯示器裝置之方法，因為油墨非反應性溶劑部分135係使用一簡單方法例如噴塗方法使用噴霧裝置30或浸漬方法而形成於第一電極120上，可減少製造處理時間。 As described above, a method of manufacturing an organic light emitting display device according to still another embodiment of the present invention, because the ink non-reactive solvent portion 135 is formed on the first electrode using a simple method such as a spraying method using a spray device 30 or a dipping method. On 120, manufacturing processing time can be reduced.
接著，將描述根據本發明之又再一具體實施態樣製造有機發光顯示器裝置之方法。 Next, a method of manufacturing an organic light emitting display device according to still another embodiment of the present invention will be described.
與根據如上述之本發明之一具體實施態樣製造有機發光顯示器裝置之方法相比，該根據本發明之又再一具體實施態樣製造有機發光顯示器裝置之方法具有除有機發光層形成步驟以外之相似步驟。因此，在描述該根據本發明之又再一具體實施態樣製造有機發光顯示器裝置之方法中，將只說明有機發光層形成步驟。 The method for fabricating an organic light emitting display device according to still another embodiment of the present invention has a step other than the organic light emitting layer forming step, as compared with the method for manufacturing an organic light emitting display device according to an embodiment of the present invention as described above. Similar steps. Therefore, in describing a method of manufacturing an organic light emitting display device according to still another embodiment of the present invention, only the organic light emitting layer forming step will be described.
第22至24圖係根據本發明之又再一具體實施態樣製造有機發光顯示器裝置之方法之有機發光層形成步驟的剖視圖。 22 to 24 are cross-sectional views showing an organic light-emitting layer forming step of a method of manufacturing an organic light-emitting display device according to still another embodiment of the present invention.
參考第22至24圖，有機發光層形成步驟係包括形成有機發光層140於第一電極120上，經由像素定義膜130之開口131而暴露第一電極120。有機發光層形成步驟可包括油墨非反應性溶劑排放步驟和有機發光油墨排放步驟。 Referring to FIGS. 22 to 24, the organic light emitting layer forming step includes forming the organic light emitting layer 140 on the first electrode 120, exposing the first electrode 120 via the opening 131 of the pixel defining film 130. The organic light emitting layer forming step may include an ink non-reactive solvent discharging step and an organic light emitting ink discharging step.
油墨非反應性溶劑排放步驟包括排放油墨非反應性溶劑(第18圖中的135a)到第一電極120和像素定義膜130二者之 整個或全部表面(例如，整個暴露的表面)上，且如第22圖所示，油墨非反應性溶劑部分135係形成於像素定義膜130和第一電極120之上表面上(例如，頂部處)而具有一薄厚度。排放油墨非反應性溶劑135a可使用噴塗方法使用第18圖之噴霧裝置30而進行。此處，油墨非反應性溶劑部分135係形成於像素定義膜130之上表面上(例如，於像素定義膜130之頂部處)而具有薄厚度，且形成於像素定義膜130之上表面上(例如，於像素定義膜130之頂部處)的油墨非反應性溶劑部分135的一部分的油墨非反應性溶劑135a係移動(例如，流動或遷移)至第一電極120之上部分(例如，第一電極120之頂部)。因此，形成於第一電極120上之油墨非反應性溶劑部分135的第二厚度T2係較厚於形成於像素定義膜130之上表面上之油墨非反應性溶劑部分135的第一厚度T1。因為形成於像素定義膜130之上表面上的油墨非反應性溶劑部分135具有一薄厚度，所以它可在有機發光油墨排放步驟進行之前或有機發光油墨排放步驟期間乾燥。 The ink non-reactive solvent discharging step includes discharging the ink non-reactive solvent (135a in FIG. 18) to both the first electrode 120 and the pixel defining film 130. On the entire or all surfaces (for example, the entire exposed surface), and as shown in Fig. 22, an ink non-reactive solvent portion 135 is formed on the upper surface of the pixel defining film 130 and the first electrode 120 (for example, at the top) ) has a thin thickness. The discharge ink non-reactive solvent 135a can be carried out using a spray method using the spray device 30 of Fig. 18. Here, the ink non-reactive solvent portion 135 is formed on the upper surface of the pixel defining film 130 (for example, at the top of the pixel defining film 130) to have a thin thickness, and is formed on the upper surface of the pixel defining film 130 ( For example, a portion of the ink non-reactive solvent portion 135 of the ink non-reactive solvent portion 135 at the top of the pixel defining film 130 is moved (eg, flowed or migrated) to a portion above the first electrode 120 (eg, first The top of the electrode 120). Therefore, the second thickness T2 of the ink non-reactive solvent portion 135 formed on the first electrode 120 is thicker than the first thickness T1 of the ink non-reactive solvent portion 135 formed on the upper surface of the pixel defining film 130. Since the ink non-reactive solvent portion 135 formed on the upper surface of the pixel defining film 130 has a thin thickness, it can be dried before the organic light-emitting ink discharging step or during the organic light-emitting ink discharging step.
如第23圖所示，有機發光油墨排放步驟係包括排放有機發光油墨140a至或到油墨非反應性溶劑部分135上，該部分係經由排放油墨非反應性溶劑135a至或到第一電極120上而形成的。排放有機發光油墨140a可使用如第7圖中所示的方法而進行。透過有機發光油墨排放機構20的移動，有機發光油墨140a係排放至或到所有像素PX的油墨非反應性溶劑部分135上，以形成有機發光層140，如第24圖所示。油墨非反應性溶劑部分135之溶劑和有機發光油墨140a之溶劑，其係由於有機發光油墨140a之排放而混合，係透過乾燥步驟(例如，定時的乾燥步驟)等而全部蒸發(例 如，完全蒸發)，且留下有機發光油墨140a之固體物作為有機發光層140。 As shown in FIG. 23, the organic light-emitting ink discharging step includes discharging the organic light-emitting ink 140a to or onto the ink non-reactive solvent portion 135 via the discharge ink non-reactive solvent 135a to or onto the first electrode 120. And formed. The discharge of the organic light-emitting ink 140a can be performed using the method as shown in FIG. The organic light-emitting ink 140a is discharged to or onto the ink non-reactive solvent portion 135 of all the pixels PX by the movement of the organic light-emitting ink discharge mechanism 20 to form the organic light-emitting layer 140 as shown in FIG. The solvent of the ink non-reactive solvent portion 135 and the solvent of the organic light-emitting ink 140a are mixed by the discharge of the organic light-emitting ink 140a, and are all evaporated by a drying step (for example, a timed drying step). For example, it is completely evaporated, and the solid matter of the organic light-emitting ink 140a is left as the organic light-emitting layer 140.
如上述，根據本發明之又再一具體實施態樣製造有機發光顯示器裝置之方法，因為油墨非反應性溶劑部分135a係使用一簡單方法例如噴塗方法使用噴霧裝置30而形成於第一電極120上，可減少製造處理時間。 As described above, the method of manufacturing an organic light emitting display device according to still another embodiment of the present invention, because the ink non-reactive solvent portion 135a is formed on the first electrode 120 by using a simple method such as a spraying method using the spray device 30. Can reduce manufacturing processing time.
接著，將描述可用於根據本發明之一具體實施態樣製造有機發光顯示器裝置之方法中的噴墨印刷裝置。 Next, an ink jet printing apparatus which can be used in a method of manufacturing an organic light emitting display device according to an embodiment of the present invention will be described.
第25圖係說明用於根據本發明之一具體實施態樣製造有機發光顯示器裝置之方法中的噴墨印刷裝置的示意性構造的圖示。第26圖係說明第25圖之噴墨印刷裝置之詳細構造的圖示；以及第27圖係說明第26圖之噴墨印刷裝置之實例的剖視圖。 Figure 25 is a diagram showing a schematic configuration of an ink jet printing apparatus used in a method of manufacturing an organic light emitting display device according to an embodiment of the present invention. Fig. 26 is a view showing a detailed configuration of the ink jet printing apparatus of Fig. 25; and Fig. 27 is a cross-sectional view showing an example of the ink jet printing apparatus of Fig. 26.
參考第25圖，用於根據本發明之一具體實施態樣製造有機發光顯示器裝置之方法中的噴墨印刷裝置1係包括一油墨非反應性溶劑排放機構10和一有機發光油墨排放機構20。 Referring to Fig. 25, an ink jet printing apparatus 1 for use in a method of manufacturing an organic light emitting display device according to an embodiment of the present invention includes an ink non-reactive solvent discharge mechanism 10 and an organic light emitting ink discharge mechanism 20.
參考第26圖，油墨非反應性溶劑排放機構10可包括一第一控制器13、一油墨非反應性溶劑儲存器14、和一第一排放器15。 Referring to Fig. 26, the ink non-reactive solvent discharge mechanism 10 may include a first controller 13, an ink non-reactive solvent reservoir 14, and a first discharger 15.
第一控制器13係透過第一排放器15進行對應於油墨非反應性溶劑之排放控制和對應於該第一排放器15之移動控制。對應於油墨非反應性溶劑之排放控制可包括(例如，意指)該油墨非反應性溶劑之黏度或流速和該油墨非反應性溶劑之排放量的 控制。 The first controller 13 performs emission control corresponding to the ink non-reactive solvent and movement control corresponding to the first discharger 15 through the first discharger 15. The emission control corresponding to the ink non-reactive solvent may include, for example, a viscosity or a flow rate of the ink non-reactive solvent and a discharge amount of the ink non-reactive solvent. control.
油墨非反應性溶劑儲存器14係儲存欲排放至或到像素定義膜之開口上的油墨非反應性溶劑，該開口係暴露形成於有機發光顯示器裝置之基材上的第一電極。 The ink non-reactive solvent reservoir 14 stores an ink non-reactive solvent to be discharged onto or into the opening of the pixel-defining film, the opening exposing the first electrode formed on the substrate of the organic light-emitting display device.
第一排放器15係接收來自第一控制器13之對應於油墨非反應性溶劑的排放控制信號和對應於第一排放器15的移動控制信號，接收來自油墨非反應性溶劑儲存器14的油墨非反應性溶劑，和排放油墨非反應性溶劑至或到第一電極上。第一排放器15可包括第一噴嘴12於(例如，安裝於)第6圖之第一頭部11之下方部分處(例如，第一頭部11之底部)，以根據對應於油墨非反應性溶劑的排放控制信號而排放該油墨非反應性溶劑。此外，第一控制器15可包括耦合(例如，連接)至第一頭部11的移動裝置，以在一方向上根據對應於第一排放器15的移動控制信號而移動第一頭部11。 The first discharger 15 receives an emission control signal corresponding to the ink non-reactive solvent from the first controller 13 and a movement control signal corresponding to the first discharger 15 to receive the ink from the ink non-reactive solvent reservoir 14. a non-reactive solvent, and an ink non-reactive solvent to or onto the first electrode. The first discharger 15 may include a first nozzle 12 at (eg, mounted to) a lower portion of the first head portion 11 of FIG. 6 (eg, the bottom of the first head portion 11) to be non-reactive according to the ink The ink non-reactive solvent is discharged by the emission control signal of the solvent. Further, the first controller 15 may include a moving device coupled (eg, coupled) to the first head 11 to move the first head 11 in accordance with a movement control signal corresponding to the first ejector 15 in one direction.
有機發光油墨排放機構20可包括一第二控制器23、一有機發光油墨儲存器24、和一第二排放器25。 The organic light-emitting ink discharge mechanism 20 may include a second controller 23, an organic light-emitting ink reservoir 24, and a second discharger 25.
第二控制器23係透過第二排放器25進行對應於有機發光油墨之排放控制和對應於第二排放器25之移動控制。對應於有機發光油墨之排放控制可包括(例如，意指)該有機發光油墨之黏度或流速和該有機發光油墨之排放量的控制。 The second controller 23 performs emission control corresponding to the organic light-emitting ink and movement control corresponding to the second discharger 25 through the second discharger 25. The emission control corresponding to the organic light-emitting ink may include, for example, a control of the viscosity or flow rate of the organic light-emitting ink and the emission amount of the organic light-emitting ink.
有機發光油墨儲存器24係儲存欲排放至或到油墨非反應性溶劑部分上的有機發光油墨，該部分係經由排放油墨非反 應性溶劑至或到像素定義膜之開口上而形成的，該開口暴露形成於有機發光顯示器裝置之基材上的第一電極。 The organic light-emitting ink reservoir 24 stores an organic light-emitting ink to be discharged onto or onto the non-reactive solvent portion of the ink, the portion being non-reverse via the discharge ink The solvent is formed to or onto the opening of the pixel defining film, the opening exposing the first electrode formed on the substrate of the organic light emitting display device.
第二排放器25係接收來自第二控制器23之對應於有機發光油墨的排放控制信號和對應於第二排放器25的移動控制信號，接收來自有機發光油墨儲存器24的有機發光油墨，和排放有機發光油墨至或到油墨非反應性溶劑部分上。第二排放器25可包括第二噴嘴22於(例如，安裝於)第7圖之第二頭部21之下方部分處(例如，第二頭部21之底部)，以根據對應於有機發光油墨的排放控制信號而排放該有機發光油墨。此外，第二控制器25可包括耦合(例如，連接)至第二頭部21的移動裝置，以在一方向上根據對應於第二排放器25的移動控制信號而移動第二頭部21。 The second ejector 25 receives the emission control signal corresponding to the organic luminescent ink from the second controller 23 and the movement control signal corresponding to the second ejector 25, and receives the organic luminescent ink from the organic luminescent ink reservoir 24, and The organic luminescent ink is discharged to or onto the non-reactive solvent portion of the ink. The second discharger 25 may include a second nozzle 22 at (eg, mounted to) a lower portion of the second head portion 21 of FIG. 7 (eg, the bottom of the second head portion 21) to correspond to the organic light-emitting ink The emission control signal emits the organic light-emitting ink. Further, the second controller 25 may include a moving device coupled (eg, coupled) to the second head 21 to move the second head 21 in accordance with a movement control signal corresponding to the second ejector 25 in one direction.
在一些具體實施態樣中，第一排放器15的移動和第二排放器25的移動可經耦合(例如，連接)至第一頭部11的移動裝置和經耦合(例如，連接)至第二頭部21的移動裝置而彼此獨立地控制。 In some embodiments, movement of the first ejector 15 and movement of the second ejector 25 may be coupled (eg, coupled) to the mobile device of the first head 11 and coupled (eg, connected) to The moving devices of the two heads 21 are controlled independently of each other.
此外，參考第27圖，當第一頭部11和第二頭部21係耦合至一個移動裝置10(例如，的狀態)時，可進行(例如，同時或同步地進行)第一排放器15的移動和第二排放器25的移動。在此種情況中，於(例如，安裝於)第一頭部11之下方部分(例如，第一頭部11之底部)上的第一噴嘴12與於(例如，安裝於)第二頭部21之下方部分(例如，第二頭部21之底部)上的第二噴嘴22之間的距離d1可實質上等於有機發光顯示器裝置之基材上之各像素PX的寬度。 Further, referring to FIG. 27, when the first head 11 and the second head 21 are coupled to one mobile device 10 (for example, a state), the first discharger 15 can be performed (for example, simultaneously or synchronously). Movement and movement of the second discharger 25. In this case, the first nozzle 12 on (eg, mounted to) the lower portion of the first head portion 11 (eg, the bottom of the first head portion 11) is (eg, mounted to) the second head The distance d1 between the second nozzles 22 on the lower portion of the 21 (e.g., the bottom of the second head 21) may be substantially equal to the width of each pixel PX on the substrate of the organic light emitting display device.
在總結詳細說明中，本領域中具有通常知識者將明瞭，可在實質上不偏離本發明之原理下，對較佳的具體實施態樣進行許多的改變和修改。因此，所揭露之本發明較佳的具體實施態樣僅用於一般和描述性意義，而不是為了限制目的。 In the course of the detailed description, it will be apparent to those skilled in the art that many modifications and changes can be made to the preferred embodiments without departing from the principles of the invention. Therefore, the preferred embodiments of the invention disclosed herein are intended to
S10‧‧‧形成第一電極 S10‧‧‧ forming the first electrode
S20‧‧‧形成像素定義膜 S20‧‧‧ forming a pixel definition film
S30‧‧‧形成有機發光層 S30‧‧‧Forming an organic light-emitting layer
S40‧‧‧形成第二電極 S40‧‧‧ forming a second electrode
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| KR102457596B1 (en) * | 2015-11-02 | 2022-10-21 | 삼성디스플레이 주식회사 | Method of manufacturing light emitting display device |
| CN107331681B (en) * | 2017-06-21 | 2020-04-10 | 京东方科技集团股份有限公司 | Display substrate, manufacturing method thereof and display device |
| US11355538B2 (en) * | 2017-08-15 | 2022-06-07 | Bidirectional Display, Inc. | Image sensor panel and method for fabricating the same |
| CN108428723B (en) * | 2018-03-27 | 2021-08-03 | 京东方科技集团股份有限公司 | Pixel defining structure, preparation method thereof, display substrate and ink-jet printing method |
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| CN109860441B (en) * | 2019-04-18 | 2021-01-22 | 京东方科技集团股份有限公司 | Organic electroluminescent display panel, manufacturing method thereof and display device |
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